Apparatus, control method, production system, and article manufacturing method

Abstract

In an apparatus provided with a movable mechanism capable of adjusting the position and orientation of a moving unit and a fixable brake mechanism, there has been a demand for an apparatus in which the position and orientation of the moving unit is less likely to shift when the moving unit is fixed by the brake mechanism.SOLUTION: The device includes a base, a moving part movable by a driving part, and an elastic member connected to the moving part, and the elastic member is arranged so that a part of force received by the elastic member brings the moving part into contact with a part of the driving part to regulate the movement of the moving part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a device having a moving part and a brake mechanism, and the like. [Background technology]

[0002] In devices for precisely processing objects or for precisely measuring the shape of objects, if the position of the table or stage on which the object is mounted is unstable, the intended work cannot be performed with high precision. Therefore, a brake mechanism is provided to align the table or stage on which the object is mounted and then fix it in a predetermined position.

[0003] Patent Document 1 describes an active brake in a charged particle beam device that is equipped with a pressing member that presses a brake pad against a brake rail in order to suppress minute vibrations of a top table on which a sample is mounted. It describes that the brake pad is supported by a flexible leaf spring, and at least one of the brake pad and the pressing member is provided with a surface shape that allows the brake pad to tilt. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-18978 Summary of the Invention [Problem to be solved by the invention]

[0005] In the active brake described in Patent Document 1, the brake pad is supported by a flexible leaf spring, which allows the brake pad and brake rail to come into contact on a flat surface with a certain area. According to Patent Document 1, this provides an active brake that can effectively suppress residual vibrations after stage movement, as well as steady-state micro-vibrations and drift.

[0006] However, when the position and orientation of a table, stage, etc. is adjusted by a movable mechanism and then fixed using a brake mechanism, if the position and orientation of the table, stage, etc. adjusted by the movable mechanism is easily displaced when fixed by the brake mechanism, the accuracy of alignment will ultimately decrease. This point has not been fully considered in the active brake described in Patent Document 1.

[0007] Therefore, there has been a demand for an apparatus that includes a movable mechanism that can adjust the position and orientation of a table, stage, etc., and a brake mechanism that can fix the position and orientation, and that is less likely to shift when fixed by the brake mechanism. [Means for solving the problem]

[0008] A first aspect of the present invention comprises a base, a moving part that can be moved by a driving part, and an elastic member connected to the moving part, and the elastic member is arranged so that a part of the force received by the elastic member causes the moving part to contact a part of the driving part and restricts the movement of the moving part. The device is characterized by the above.

[0009] A second aspect of the present invention comprises a base, a moving unit supported by the base, a drive unit movable in a first direction or a second direction opposite to the first direction, a spring that urges the moving unit in the second direction to bring the moving unit into contact with the drive unit, and a brake mechanism that can fix the position of the moving unit relative to the base, wherein the brake mechanism comprises a first pad fixed to the base, a second pad supported by the base, a pad drive unit that moves the second pad in a third direction intersecting the first direction, and an elastic member that is disposed between the first pad and the second pad and fixed to the moving unit, When the driving unit moves in the first direction, the moving unit is pushed by the driving unit and moves in the first direction when not in contact with the elastic member, and when the driving unit moves in the second direction, the moving unit is urged by the spring and moves in the second direction while in contact with the driving unit, and when the second pad is in contact with the elastic member and the pad driving unit moves the second pad in the third direction, the elastic member urges the moving unit in a direction in which the moving unit is pressed against the driving unit, and when both the first pad and the second pad come into contact with the elastic member, the position of the moving unit is fixed relative to the base. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide an apparatus that is equipped with a movable mechanism that can adjust the position and orientation of a table, stage, etc., and a brake mechanism that can fix the position and orientation, and that is less likely to shift in position and orientation when fixed by the brake mechanism. [Brief explanation of the drawings]

[0011] [Figure 1] 1A is a schematic top view of the stage apparatus according to the embodiment 1. FIG. 1B is a schematic cross-sectional view of the stage apparatus according to the embodiment 1. [Figure 2] 1A and 1B are diagrams illustrating one stage of the operation of the brake mechanism, and another stage of the operation of the brake mechanism, respectively. [Figure 3](a) A schematic diagram for explaining the balance of forces when the movable pad is in contact with the leaf spring and biased in the Z positive direction in embodiment 1. (b) A schematic diagram for explaining the balance of forces when the movable pad is in contact with the leaf spring and biased in the Z positive direction in reference form 1. [Figure 4] FIG. 10 is a schematic cross-sectional view of a stage device according to a second embodiment. [Figure 5] (a) A schematic diagram for explaining the balance of forces when the movable pad is in contact with the leaf spring and biased in the Z positive direction in embodiment 2. (b) A schematic diagram for explaining the balance of forces when the movable pad is in contact with the leaf spring and biased in the Z positive direction in reference embodiment 2. [Figure 6] FIG. 11 is a schematic side view of a stage device according to a third embodiment. [Figure 7] FIG. 11 is a schematic plan view of a stage device according to a third embodiment. [Figure 8] 1A and 1B are schematic top and side views of a conventional positioning stage device; DETAILED DESCRIPTION OF THE INVENTION

[0012] To facilitate understanding of the embodiments of the present invention, the behavior of a conventional device will first be described as a reference example, and then the embodiments of the present invention will be described. In the following description, for example, when the term "X-plus direction" is used, it refers to the same direction as the X-axis arrow in the illustrated Cartesian coordinate system, and when the term "X-minus direction" is used, it refers to the direction 180 degrees opposite to the direction of the X-axis arrow in the illustrated Cartesian coordinate system. Furthermore, when the term "X-direction" is simply used, it refers to a direction parallel to the X-axis, regardless of whether it is different from the direction of the X-axis arrow in the illustration. The same applies to directions other than X.

[0013] [Conventional device] A conventional positioning stage having a clamp-type brake mechanism will be described with reference to the drawings. Fig. 8(a) is a schematic top view of a conventional positioning stage device having a clamp-type brake mechanism, and Fig. 8(b) is a schematic side view. The positioning stage device has a base 11, a movable stage 13 on which an object to be measured or processed can be placed, a movement mechanism that moves the movable stage 13 in the Y direction, and a brake mechanism 17 that fixes the position of the movable stage 13.

[0014] The movable table 13 is supported by a linear guide 12 extending along the Y direction, and when its position is not constrained by the brake mechanism 17, the movable table 13 can move in the Y positive direction or the Y negative direction due to the action of the moving mechanism.

[0015] The movement mechanism includes a feed screw mechanism 14, a movable table abutment portion 15, and a tension spring 16. By operating the feed screw mechanism 14, the movable table abutment portion 15 moves in the negative Y direction or the positive Y direction. The tension spring 16 is interposed between the base 11 and the movable table 13, and is a spring that urges and pulls the movable table 13 in the positive Y direction. Because the movable table 13 is urged in the positive Y direction by the tension spring 16, it is always in contact with the movable table abutment portion 15. Therefore, when the feed screw mechanism 14 operates and the movable table abutment portion 15 moves in the positive Y direction or the negative Y direction, the movable table 13 moves in the positive Y direction or the negative Y direction accordingly.

[0016] Brake mechanism 17 is a clamp-type brake mechanism for fixing the position of movable table 13, and includes leaf spring 18 fixed to movable table 13, bolt 20 fixed to base 11, and clamp screw 19 that can be threaded onto bolt 20. Leaf spring 18 is provided with a slit 21 extending along the Y direction, and the width of slit 21 in the short direction (Z direction) is set to be larger than the shaft diameter of clamp screw 19 but smaller than the diameter of the head. Therefore, when clamp screw 19 is not tightened, the shaft and head of clamp screw 19 do not interfere with leaf spring 18, and movable table 13 can move in the Y direction in response to the operation of the movement mechanism. On the other hand, when clamp screw 19 is tightened, leaf spring 18 is clamped between the head of clamp screw 19 and bolt 20, and leaf spring 18 is fixed by frictional force. In other words, the position of movable table 13 is fixed.

[0017] If only a force in the positive X direction were applied to leaf spring 18 when clamp screw 19 was rotated to tighten it, all of the clamping force would become a normal force, generating only static friction, and the position of movable base 13 would not shift in the Y direction. However, when clamp screw 19 is actually rotated to move the screw head in the negative X direction, part of the clamping force may act on leaf spring 18 as a component force in the Y direction, causing the movable base 13 to move in the Y direction, which is a problem. In particular, if part of the clamping force acts on leaf spring 18 in the negative Y direction and exceeds the tensile force of tension spring 16, the movable base 13 will be fixed by brake mechanism 17 at a position shifted in the negative Y direction from the position adjusted by the movement mechanism.

[0018] Generally, to improve the accuracy of movement, the feed screw mechanism 14 and the moving table contact portion 15 are constructed with high mechanical rigidity. On the other hand, if the spring constant of the tension spring 16 is increased, a feed screw mechanism 14 with strong driving force is required, so in situations where miniaturization and energy saving are required, the spring constant of the tension spring 16 is set to be small. As a result, in conventional stage devices, even if high-precision alignment was possible using the moving mechanism during the alignment stage, positioning errors were likely to occur when the position was fixed with a clamp-type brake mechanism.

[0019] [Embodiment] The present invention will be described in detail with reference to the accompanying drawings, in which: FIG. 1 is a perspective view of a brake mechanism according to an embodiment of the present invention; FIG. 2 is a perspective view of a brake mechanism according to an embodiment of the present invention; FIG. 3 is a perspective view of a brake mechanism according to an embodiment of the present invention;

[0020] In the drawings referred to in the following description of the embodiments, elements denoted by the same reference numerals have the same functions unless otherwise specified. When a plurality of identical elements are arranged in a drawing, the reference numerals and their descriptions may be omitted.

[0021] Furthermore, the drawings may be represented schematically for the convenience of illustration and explanation, and the shape, size, arrangement, etc. of the elements depicted in the drawings may not necessarily be strictly identical to the actual objects.

[0022] [Embodiment 1] Fig. 1(a) is a schematic top view of the device according to the first embodiment, and Fig. 1(b) is a schematic cross-sectional view taken along line AA in Fig. 1. The device according to the embodiment includes a stage on which an object to be measured or processed can be placed, and therefore can also be called a stage device. Alternatively, since it includes a moving table that is a moving part, it can also be called a moving device. Alternatively, since it has the function of positioning and fixing the position of the stage, it can also be called a positioning device.

[0023] The stage device of the embodiment has a base 101, a movable table 103 which is a moving part on which an object to be measured or processed can be placed, a moving mechanism which moves the movable table 103 in the Y direction, and a brake mechanism 107 (schematically shown surrounded by a dotted line) which fixes the position of the movable table 103.

[0024] The movable stage 103 is supported by a linear guide 102 (linear guide) that extends along the Y direction, and when the position is not restrained by the brake mechanism 107, the movable stage 103 can move in the positive Y direction or the negative Y direction due to the action of the movement mechanism. The linear guide 102 that guides the movable stage 103 along the Y direction can be a cross roller bearing or a hydrostatic bearing that can support the movable stage 103 with low friction.

[0025] The movement mechanism includes a drive unit 104, a movable table abutment unit 105, and a tension spring 106. The drive unit 104 can move the movable table abutment unit 105 in the negative Y direction or the positive Y direction. The movable table abutment unit 105 is disposed at the center of the X-direction width of the movable table 103. The drive mechanism of the drive unit 104 may be a feed screw, a linear motor, an electric cylinder, or the like. In the illustrated example, the movable table abutment unit 105 is moved back and forth in the Y direction by rotating the feed screw while detecting the rotational phase of the stepping motor, thereby adjusting its position.

[0026] The tension springs 106 are interposed between the base 101 and the movable stage 103, and pull the movable stage 103 in the positive Y direction. Two tension springs 106 are arranged symmetrically with respect to the movable stage abutment portion 105 so that a rotational moment is not generated in the XY plane when the movable stage 103 is moved along the Y direction.

[0027] When the brake mechanism is not operating, the movable table 103 is biased in the Y positive direction by the tension spring 106, and is therefore always in contact with the movable table contact portion 105. In other words, the tension spring 106 is a spring that biases the movable table 103, which serves as a moving part, in the Y positive direction, causing the movable table 103 to contact the movable table contact portion 105 of the drive mechanism.

[0028] When the drive unit 104 operates to move the movable stage contact portion 105 in the negative Y direction (first direction), the movable stage 103 (moving unit) is pushed by the movable stage contact portion 105 and moves in the negative Y direction (first direction). When the drive unit 104 operates to move the movable stage contact portion 105 in the positive Y direction (second direction), the movable stage 103 (moving unit) is biased by the tension spring 106 (spring) and moves in the positive Y direction (second direction) while in contact with the movable stage contact portion 105. The negative Y direction (first direction) and the positive Y direction (second direction) are opposite directions and are oriented 180° apart.

[0029] The brake mechanism 107 is a clamp-type brake mechanism for fixing the position of the movable stage 103. To prevent the generation of a rotational moment in the XY plane during operation, two brake mechanisms 107 are arranged symmetrically with respect to the center of the X-direction width of the movable stage 103, and the operation timing of the two brake mechanisms 107 is synchronized.

[0030] Each brake mechanism 107 includes a leaf spring 108 fixed to the movable stage 103, a fixed pad 110 fixed to the base 101, a movable pad 109 supported by the base 101, and a pad drive mechanism 111 that moves the movable pad 109 in the Z direction. In other words, the fixed pad 110, which serves as a first pad, is fixed to the base 101. The movable pad 109, which serves as a second pad, is supported by the base 101 and can be moved in the Z direction (third direction) by the pad drive mechanism 111 that serves as a pad drive unit. The leaf spring 108, which serves as an elastic member, is disposed between the fixed pad 110 and the movable pad 109 and is connected (fixed) to the movable stage 103. The pad drive mechanism 111 can be configured using, for example, a wedge stage and an air cylinder. Increasing the thrust of the air cylinder with the wedge stage allows for a small device to obtain a large output, making it useful as a mechanism for increasing the holding force of the brake mechanism. The brake mechanism 107 moves the movable pad 109 in the positive Z direction, sandwiching the leaf spring 108 between the fixed pad 110 and the movable pad 109 and restraining the leaf spring 108 with static friction force, thereby fixing the position of the movable table 103 relative to the base 101. The movement direction (third direction) of the movable pad 109 is perpendicular to or intersects with the movement direction (first direction) of the movable table abutment portion 105 caused by the drive unit 104.

[0031] 1(b) shows a state in which the position of the movable stage 103 in the Y direction can be adjusted using the moving mechanism. That is, the movable pad 109 is retracted in the negative Z direction, and the leaf spring 108 is in a position where it does not abut either the fixed pad 110 or the movable pad 109. Therefore, the movable stage 103 can move in the Y direction together with the leaf spring 108 and the fixed pad 110 in response to the operation of the moving mechanism. Once the position of the movable stage 103 in the Y direction has been adjusted using the moving mechanism, the brake mechanism 107 is operated to fix the position of the movable stage 103.

[0032] 2(a) and 2(b) are diagrams for explaining the operation of the brake mechanism 107 in stages, and are schematic cross-sectional views taken along line AA in FIG. 1, similar to FIG. 1(b).

[0033] Once the position of the movable stage 103 in the Y direction has been adjusted, the pad driving mechanism 111 moves the movable pad 109 in the positive Z direction. FIG. 2(a) shows the state at the moment when the movable pad 109 comes into contact with the leaf spring 108. FIG. 2(b) shows the state in which the movable pad 109 is further moved in the positive Z direction to elastically deform the leaf spring 108, and both the movable pad 109 and the fixed pad 110 come into contact with the leaf spring 108, sandwiching the leaf spring 108. In other words, FIG. 2(a) shows the initial stage of the braking operation, and FIG. 2(b) shows the stage in which the braking operation is completed and the position of the movable stage 103 in the Y direction is fixed by static friction force.

[0034] 1(b), in this embodiment, the lower main surface of the leaf spring 108, i.e., the surface of the leaf spring 108 that can come into contact with the movable pad 109, is configured to be inclined relative to the orthogonal direction rather than being perpendicular to the Z direction, which is the movement direction of the movable pad 109. Alternatively, it can be said that the lower main surface of the leaf spring 108, i.e., the surface of the leaf spring 108 that can come into contact with the movable pad 109, is configured to be inclined relative to the Y direction, which is the movement direction of the movable table 103.

[0035] 1(b) and 2(a), the surface of the leaf spring 108 with which the movable pad 109 can come into contact is inclined with respect to the XY plane so that the normal vector NL to that surface has not only a negative Z component but also a negative Y component. Therefore, when the pad driving mechanism 111 moves the movable pad 109 in the positive Z direction while it is in contact with the leaf spring 108, the leaf spring 108 biases the movable table 103 in a direction (positive Y direction) in which the movable table 103 is pressed against the movable table contact portion 105.

[0036] 3(a) is a schematic diagram illustrating the balance of forces when the pad driving mechanism 111 biases the movable pad 109, which is in contact with the leaf spring 108, in the positive Z direction in embodiment 1. The arrows in the figure schematically represent the acting forces.

[0037] When movable pad 109 attempts to move in the positive Z direction, leaf spring 108 receives pad normal force 201. In this embodiment, the plate surface of leaf spring 108 is inclined with respect to the movement direction (Y direction) of movable stage 103 and the movement direction (Z direction) of movable pad 109, and pad normal force 201 can be resolved into vertical component force 202 and horizontal component force 203.

[0038] The vertical component force 202 is balanced with a fulcrum reaction force 204 that the movable table 103 receives at the linear guide 102. The horizontal component force 203 is combined with a tension spring force 206 received from the tension spring 106 to urge the movable table 103 in the Y positive direction, but is balanced with a reaction force 205 received from the movable table abutment portion 105.

[0039] The bottom surface of the leaf spring 108 that contacts the movable pad 109 is inclined so that the horizontal component force 203, which is a component of the normal force, presses the movable carriage 103 against the movable carriage contact portion 105. In this embodiment, the linear guide 102 is made of a low-friction material, such as a cross roller bearing. The tension spring 106 has a minimum spring strength (elastic coefficient) that is necessary and sufficient to bring the movable carriage 103 into contact with the movable carriage contact portion 105 during the alignment operation before braking. The compressive rigidity of the movable carriage contact portion 105 is set to a value that is sufficiently higher than the elastic coefficient of the tension spring 106. Because the horizontal component force 203 and the tension spring force 206 are received by the movable carriage contact portion 105, which has high compressive rigidity, the movable carriage 103 does not shift in the positive Y direction during braking, thereby achieving high positioning accuracy. Of course, the movable carriage 103 also does not shift in the negative Y direction during braking. That is, the leaf spring 108 is disposed so that part of the force received by the elastic member, the leaf spring 108, brings the movable carriage 103 into contact with the movable carriage contact portion 105, restricting the movement of the movable carriage 103. As a result, the movable carriage 103 comes into contact with the movable carriage contact portion 105 and its movement is restricted, thereby reducing the positional deviation of the movable carriage 103 in the negative Y direction during braking.

[0040] On the other hand, FIG. 3(b) is a schematic diagram illustrating the balance of forces when the pad driving mechanism biases the movable pad 109 in the positive Z direction while the movable pad 109 is in contact with the leaf spring 108A in Reference Form 1, which is different from Embodiment 1. The arrows in the figure schematically represent the acting forces. As shown in FIG. 3(b), the surface of the leaf spring 108A of Reference Form 1 that the movable pad 109 can contact is inclined with respect to the XY plane so that the normal vector NLA to the surface has not only a negative Z component but also a positive Y component. Therefore, when the pad driving mechanism moves the movable pad 109 in the positive Z direction while the movable pad 109 is in contact with the leaf spring 108A, the leaf spring 108A biases the movable table 103 in the negative Y direction (the direction in which the movable table 103A moves away from the movable table contact portion 105).

[0041] When movable pad 109 attempts to move in the positive Z direction, leaf spring 108A is subjected to pad normal force 201A. In the reference embodiment, the plate surface of leaf spring 108A is inclined with respect to the movement direction (Y direction) of movable stage 103A and the movement direction (Z direction) of movable pad 109, and pad normal force 201A can be resolved into vertical component force 202A and horizontal component force 203A.

[0042] Vertical component force 202A is balanced with fulcrum reaction force 204A that movable carriage 103A receives at linear guide 102. Meanwhile, horizontal component force 203A in the negative Y direction urges movable carriage 103A in a direction (negative Y direction) away from movable carriage abutment portion 105. Therefore, the position of movable carriage 103A in the Y direction is determined by the magnitude relationship between horizontal component force 203A in the negative Y direction and tension spring force 206A in the positive Y direction received from tension spring 106. Tension spring 106 is configured with the minimum spring strength (elastic modulus) necessary and sufficient to bring movable carriage 103A into contact with movable carriage abutment portion 105 during the alignment operation before braking. Therefore, the tension spring force 206A may not be able to resist the horizontal component force 203A, and the moving stage 103A may move away from the moving stage contact portion 105 in the negative Y direction as shown in FIG. 3(b).

[0043] Thus, in reference form 1, the Y-direction position of the movable table 103A is likely to become unstable during braking operation, whereas in embodiment 1, the Y-direction position is less likely to fluctuate because the movable table 103 is pressed against the movable table abutment portion 105, which has high compressive rigidity, during braking operation.

[0044] Therefore, according to this embodiment, it is possible to provide an apparatus that is equipped with a movable mechanism that can adjust the position and orientation of a table, stage, etc., and a brake mechanism that can fix the position and orientation, and that is less likely to shift in position and orientation when fixed by the brake mechanism.

[0045] [Embodiment 2] In the first embodiment, a stage device was shown in which the moving stage 103 moves linearly along a linear guide 102 (linear guide), but the embodiments of the present invention are not limited to this. In the second embodiment, a device that precisely moves the moving stage along an arc centered on a point on a normal line from the base, such as a so-called goniostage, will be described. Note that the description of matters common to the first embodiment may be simplified or omitted.

[0046] The device according to the second embodiment can be called a stage device because it is equipped with a stage on which an object to be measured or processed can be placed. Alternatively, it can be called a moving device because it is equipped with a moving table that is a moving part. Alternatively, it can be called a positioning device because it has the function of positioning and fixing the position of the stage.

[0047] In the first embodiment, the movable stage 103 is supported by a linear guide 102 (linear guide) extending along the Y direction, and when its position is not constrained by the brake mechanism 107, the movable stage 103 is able to move linearly due to the action of the movement mechanism. In contrast, in the present embodiment, the movable stage 103 is supported by an arc guide ARC that follows an arc centered on a point on a normal line from the base 101. When its position is not constrained by the brake mechanism, the movable stage 103 is guided by the arc guide ARC and is able to move while rotating along the arc due to the action of the movement mechanism.

[0048] When viewed from above, this embodiment has an appearance similar to that of Fig. 1(a), but differs in that it is provided with an arc guide ARC (not shown) instead of the linear guide 102. Fig. 4 is a schematic cross-sectional view of the stage device according to this embodiment, cut along a line that passes through the brake mechanism, similar to line AA in Fig. 1.

[0049] The stage device has a base 101, a movable table 103 which is a moving part on which an object to be measured or processed can be placed, a moving mechanism which moves the movable table 103 in the θ direction, and a brake mechanism 107 (schematically shown surrounded by a dotted line) which fixes the position of the movable table 103.

[0050] The moving stage 103 is supported by an arc guide ARC having a guide surface along an arc, and when its position is not restrained by the brake mechanism 107, the moving stage 103 can move in the +θ direction or the −θ direction due to the action of the movement mechanism. The arc guide ARC that guides the moving stage 103 can be made of a cross roller bearing or a hydrostatic bearing that can support the moving stage 103 with low friction.

[0051] The movement mechanism includes a drive unit 104, a movable table contact unit 105, and a tension spring 106. The drive unit 104 can move the movable table contact unit 105 in the negative Y direction or the positive Y direction. The internal mechanism of the drive unit 104 may be a feed screw, a linear motor, an electric cylinder, or the like.

[0052] Tension spring 106 (spring) is interposed between base 101 and movable table 103, and is a spring that pulls movable table 103 in the Y positive direction. When brake mechanism 107 is not operating, movable table 103 is constantly urged in the Y positive direction by tension spring 106, and is therefore constantly in contact with movable table abutment portion 105. In other words, tension spring 106 is a spring that urges movable table 103, which serves as a moving unit, in the Y positive direction, which is the second direction, and causes movable table 103 to abut against movable table abutment portion 105 of the drive unit.

[0053] When the drive unit 104 operates to move the movable stage contact portion 105 in the negative Y direction (first direction), the movable stage 103 (moving unit) is pushed by the movable stage contact portion 105 and moves in the negative Y direction (first direction) while rotating in the -θ direction. When the drive unit 104 operates to move the movable stage contact portion 105 in the positive Y direction (second direction), the movable stage 103 (moving unit) is biased by the tension spring 106 (spring) and moves in the positive Y direction (second direction) while in contact with the movable stage contact portion 105, rotating in the +θ direction. In this way, when the drive unit 104 operates, the movable stage 103 (moving unit) can perform rotational movement in the θ direction.

[0054] Furthermore, in order to prevent the area of ​​the contact surface from changing and the force acting between the movable table 103 and the movable table contact portion 105 from changing when the movable table 103 rotates in the θ direction, the tip of the movable table contact portion 105 is made spherical so that the movable table contact portion 105 makes point contact with the movable table 103.

[0055] The brake mechanism 107 is a clamp-type brake mechanism for fixing the position of the movable stage 103. The brake mechanism 107 includes a leaf spring 108 fixed to the movable stage 103, a fixed pad 110 fixed to the base 101, a movable pad 109 supported by the base 101, and a pad drive mechanism 111 for moving the movable pad 109 in the Z direction. In other words, the fixed pad 110, which serves as a first pad, is fixed to the base 101. The movable pad 109, which serves as a second pad, is supported by the base 101 and can be moved in the Z direction (third direction) by the pad drive mechanism 111, which serves as a pad drive unit. The leaf spring 108, which serves as an elastic member, is disposed between the fixed pad 110 and the movable pad 109 and is fixed to the movable stage 103. The pad drive mechanism 111 can be configured using, for example, a wedge stage and an air cylinder. If the thrust of the air cylinder is increased by a wedge stage, a large output can be obtained from a small device, making it useful as a mechanism for increasing the holding force of a brake mechanism. The brake mechanism 107 moves the movable pad 109 in the positive Z direction, sandwiching the leaf spring 108 between the fixed pad 110 and the movable pad 109, and restraining the leaf spring 108 with static friction, thereby fixing the position of the movable table 103 relative to the base 101.

[0056] 4, in this embodiment, the lower main surface of leaf spring 108, i.e., the surface of leaf spring 108 that can come into contact with movable pad 109, is configured to be inclined relative to the orthogonal direction rather than perpendicular to the Z direction, which is the movement direction of movable pad 109. Alternatively, it can be said that the lower main surface of leaf spring 108, i.e., the surface of leaf spring 108 that can come into contact with movable pad 109, is configured to be inclined relative to the Y direction, which is the movement direction of movable table abutment portion 105.

[0057] 4, the surface of the leaf spring 108 with which the movable pad 109 can come into contact is inclined with respect to the XY plane so that the normal vector NL to that surface has not only a negative Z component but also a negative Y component. Therefore, when the pad driving mechanism 111 moves the movable pad 109 in the positive Z direction while it is in contact with the leaf spring 108, the leaf spring 108 biases the movable table 103 in a direction in which the movable table 103 is pressed against the movable table abutment portion 105.

[0058] In this embodiment, since the movable stage 103 is rotatable along the arc guide ARC, the attitude of the leaf spring 108 changes depending on the position of the movable stage 103, and the direction of the normal vector NL can also change. In this embodiment, the inclination angle of the leaf spring 108 is set so that, regardless of the position of the movable stage 103 on the arc guide ARC, when the movable pad 109 is moved in the positive Z direction, the movable stage 103 is urged in a direction that presses it against the movable stage abutment portion 105.

[0059] 5(a) is a schematic diagram illustrating the balance of forces when the pad driving mechanism 111 biases the movable pad 109 in the positive Z direction while the movable pad 109 is in contact with the leaf spring 108 in embodiment 2. The arrows in the figure schematically represent the acting forces.

[0060] When movable pad 109 attempts to move in the positive Z direction, leaf spring 108 receives pad normal force 201. In this embodiment, the plate surface of leaf spring 108 is inclined with respect to the movement direction (Y direction) of movable table abutment portion 105 and the movement direction (Z direction) of movable pad 109, and pad normal force 201 can be resolved into vertical component force 202 and horizontal component force 203.

[0061] Vertical component force 202 balances with the vertical component of fulcrum reaction force 204 that movable table 103 receives at arc guide ARC, the vertical component of reaction force 205 that movable table abutment portion 105 receives, and the vertical component of tension spring force 206. Furthermore, horizontal component force 203 is added to the horizontal component of tension spring force 206 that movable table 103 receives from tension spring 106 and the horizontal component of fulcrum reaction force 204 to urge movable table 103 in the Y positive direction, but balances with the horizontal component of reaction force 205 that movable table abutment portion 105 receives.

[0062] In this way, the bottom surface of the leaf spring 108 is inclined so that the horizontal component force 203, which is a component of the normal force, presses the movable carriage 103 against the movable carriage abutment portion 105. In this embodiment, the arc guide ARC is made of a low-friction material, such as a cross roller bearing, and the tension spring 106 is made of a minimum spring strength (elastic coefficient) necessary and sufficient to bring the movable carriage 103 into contact with the movable carriage abutment portion 105 during alignment. The compressive rigidity of the movable carriage abutment portion 105 is set to a value sufficiently higher than the elastic coefficient of the tension spring 106. Because the horizontal component force 203 and the tension spring force 206 are received by the movable carriage abutment portion 105, which has high compressive rigidity, the movable carriage 103 does not shift in position in the positive Y direction (+θ direction) during braking, thereby achieving high positioning accuracy. Of course, the movable carriage 103 also does not shift in position in the negative Y direction (-θ direction) during braking.

[0063] On the other hand, FIG. 5(b) is a schematic diagram illustrating the balance of forces when the pad driving mechanism biases the movable pad 109 in the positive Z direction while the movable pad 109 is in contact with the leaf spring 108A in Reference Embodiment 2, which is different from Embodiment 2. The arrows in the figure schematically represent the acting forces. As shown in FIG. 5(b), the surface of the leaf spring 108A of Reference Embodiment 2 that the movable pad 109 can contact is inclined with respect to the XY plane so that the normal vector NLA to that surface has not only a negative Z component but also a positive Y component. Therefore, when the pad driving mechanism moves the movable pad 109 in the positive Z direction while the movable pad 109 is in contact with the leaf spring 108A, the leaf spring 108A biases the movable table 103 in a direction (negative Y direction, -θ direction) in which the movable table 103A moves away from the movable table contact portion 105.

[0064] When movable pad 109 attempts to move in the positive Z direction, leaf spring 108A receives pad normal force 201A. In the reference embodiment, the plate surface of leaf spring 108A is inclined with respect to the movement direction (Y direction) of movable stage 103A and the movement direction (Z direction) of movable pad 109, and pad normal force 201A can be resolved into vertical component force 202A and horizontal component force 203A.

[0065] Vertical component force 202A balances with the vertical component of fulcrum reaction force 204A that movable carriage 103A receives at linear guide 102 and the vertical component of tension spring force 206A. Meanwhile, horizontal component force 203A in the negative Y direction urges movable carriage 103A in a direction (negative Y direction) away from movable carriage abutment portion 105. Therefore, the position of movable carriage 103A in the Y direction is determined by the magnitude relationship between horizontal component force 203A in the negative Y direction and the horizontal component of tension spring force 206A in the positive Y direction received from tension spring 106. Tension spring 106 is configured with a minimum spring strength (elastic modulus) necessary and sufficient to bring movable carriage 103A into contact with movable carriage abutment portion 105 during the alignment operation before braking. As a result, the tension spring force 206A may not be able to resist the horizontal component force 203A, and the movable stage 103A may move away from the movable stage contact portion 105 in the negative Y direction and rotate in the -θ direction, as shown in Figure 5(b).

[0066] Thus, in reference form 2, the position of the movable table 103A in the θ direction is likely to become unstable during the braking operation, whereas in embodiment 2, the movable table 103 is pressed against the movable table abutment portion 105, which has high compressive rigidity, during the braking operation, so that the position in the θ direction is less likely to fluctuate.

[0067] Therefore, according to this embodiment, it is possible to provide an apparatus that is equipped with a movable mechanism that can adjust the position and orientation of a table, stage, etc., and a brake mechanism that can fix the position and orientation, and that is less likely to shift in position and orientation when fixed by the brake mechanism.

[0068] [Embodiment 3] In the first embodiment, a stage device in which the movable stage moves along a straight line is shown, and in the second embodiment, a stage device in which the movable stage moves along an arc is shown. However, it is also possible to combine these to configure a stage device with multiple degrees of freedom of movement. For example, by stacking two mechanisms according to the first embodiment so that they are orthogonal in plan view, a stage device capable of adjusting the position in the X and Y directions can be configured. Alternatively, by stacking two mechanisms according to the second embodiment so that they are orthogonal in plan view, a stage device capable of rotational movement around the X and Y axes can be configured. Furthermore, by stacking the mechanisms of the first and second embodiments, a stage device can be configured in which both the translational position of the movable stage and the rotational position of the movable stage (surface angle) can be adjusted.

[0069] Fig. 6 is a schematic side view of a stage apparatus according to embodiment 4, and Fig. 7 is a schematic plan view of the stage apparatus according to embodiment 4. Embodiment 4 is a stage apparatus configured by stacking two mechanisms according to embodiment 1 that are arranged so as to be orthogonal in plan view, and two mechanisms according to embodiment 2 that are arranged so as to be orthogonal in plan view.

[0070] The stage device includes a base 101 and a rotating table 305 that can rotate relative to the base 101 around a rotation axis C1. The base 101 is provided with a driving unit 104 and a moving table contact unit 105, and the driving unit 104 can move the moving table contact unit 105 in the negative Y direction or the positive Y direction. The uppermost stage of the rotating table 305 is provided with a moving table 103 on which an object to be measured or processed can be placed.

[0071] In the stage device of this embodiment, an object is placed on the movable stage 103, and measurement and processing can be performed on the object while rotating the rotary stage 305 to rotate the object about the rotation axis C1. In order to perform measurement and processing with high precision, the position and orientation of the object placed on the movable stage 103 must be precisely adjusted with respect to the rotation axis C1. Therefore, the positioning mechanisms according to the first and second embodiments are used to adjust and fix the position and orientation of the movable stage 103 on which the object is placed.

[0072] Two positioning mechanisms according to the first embodiment are arranged perpendicular to each other in a plan view, and two positioning mechanisms according to the second embodiment are arranged perpendicular to each other in a plan view, stacked on the rotating table 305. The first positioning mechanism 301 and the second positioning mechanism 302 are mechanisms in which the movable bases can move along a straight line as in the first embodiment, and are mounted on the rotating table 305 so that their moving directions are perpendicular to each other in a plan view. The third positioning mechanism 303 and the fourth positioning mechanism 304 are mechanisms in which the movable bases can rotate along an arc as in the second embodiment, and are mounted on the rotating table 305 so that their moving directions are perpendicular to each other in a plan view. Each of the first positioning mechanism 301 to the fourth positioning mechanism 304 is equipped with the brake mechanism described in the first or second embodiment.

[0073] To adjust and fix the position and orientation of the movable stage 103 on which the object is placed, for example, the rotating stage 305 is fixed in the orientation shown in Figures 6 and 7, and the first positioning mechanism 301 is used to align and fix the object in the first linear direction (translation direction). During alignment, the movable stage abutment portion 105 is brought into contact with the abutted portion 306A of the first positioning mechanism 301, and the drive unit 104 is moved in the Y direction. The object is then fixed using the brake mechanism of the first positioning mechanism 301, and as described in the first embodiment, the movable stage 103 does not shift in position in the positive Y direction during the braking operation, thereby achieving high positioning accuracy.

[0074] Next, the movable carriage contact portion 105 is moved in the positive Y direction to separate from the contacted portion 306A, and then the rotating table 305 is rotated counterclockwise by 90° about the rotation axis C1 to bring the contacted portion 306B of the second positioning mechanism 302 and the movable carriage contact portion 105 into opposition. Then, the second positioning mechanism 302 is used to align and fix the movable carriage 103 in a second linear motion direction (translation direction) perpendicular to the first linear motion direction (translation direction). The contacted portion 306B of the second positioning mechanism 302 has a shape that extends in the negative Z direction so that it can abut against the movable carriage contact portion 105 moving in the Y direction. After alignment, the second positioning mechanism 302 is fixed using a brake mechanism. As described in the first embodiment, the movable carriage 103 does not shift in the positive Y direction during the brake operation, achieving high positioning accuracy.

[0075] Next, the movable carriage contact portion 105 is moved in the positive Y direction to separate from the contacted portion 306B, and then the rotating table 305 is rotated counterclockwise by 90° about the rotation axis C1, so that the contacted portion 306C of the third positioning mechanism 303 and the movable carriage contact portion 105 face each other. Then, the third positioning mechanism 303 is used to align and fix the movable carriage 103 in the first arc direction (rotation direction). Note that the contacted portion 306C of the third positioning mechanism 303 has a shape that extends in the negative Z direction so that it can abut against the movable carriage contact portion 105 moving in the Y direction. After alignment, the third positioning mechanism 303 is fixed using a brake mechanism. As described in the second embodiment, the movable carriage 103 does not shift in the arc direction during the braking operation, achieving high positioning accuracy.

[0076] Next, the movable carriage contact portion 105 is moved in the positive Y direction to separate from the contacted portion 306C, and then the rotating table 305 is rotated counterclockwise by 90° about the rotation axis C1, so that the contacted portion 306D of the fourth positioning mechanism 304 faces the movable carriage contact portion 105. Then, the fourth positioning mechanism 304 is used to align and fix the movable carriage 103 in a second arc direction (rotation direction) perpendicular to the first arc direction (rotation direction). The contacted portion 306D of the fourth positioning mechanism 302 has a shape that extends in the negative Z direction so that it can abut against the movable carriage contact portion 105 moving in the Y direction. After alignment, the movable carriage 103 is fixed using the brake mechanism of the fourth positioning mechanism 304. As described in the second embodiment, the movable carriage 103 does not shift in the arc direction during the braking operation, achieving high positioning accuracy.

[0077] Once all positioning is complete, the movable table abutment portion 105 is moved in the positive Y direction and retreated to a position where it will not interfere with the rotation of the turntable 305. Then, while rotating the turntable 305 as necessary, measurement and processing can be performed with high precision on the object placed on the movable table 103.

[0078] Although the stage device of this embodiment is equipped with four stages of positioning mechanisms to accommodate four degrees of freedom of movement, the implementation of the present invention is not limited to this, and any number of stages of positioning mechanisms can be installed to accommodate any degree of freedom of movement.

[0079] The rotating table 305 can be configured to be supported without contact with the base 101, for example, via a hydrostatic bearing. The pad drive mechanisms of the brake mechanisms of the first positioning mechanism 301 to the fourth positioning mechanism 304 can be configured using a wedge stage and an air cylinder. Air pressure is supplied to the rotating table 305 from an air pressure source (not shown) via a non-contact rotary joint with a small gap, and is also supplied to the brake mechanism of the positioning mechanism of each stage. By using a non-contact rotary joint, there is no concern that the rotation of the rotating table 305 will cause problems with the behavior or handling of cables, etc. Furthermore, the operation of the brake mechanism of each stage on the rotating table 305 can be guaranteed without impairing the rotation accuracy of the non-contact hydrostatic bearing.

[0080] As described above, the third positioning mechanism 303 and the fourth positioning mechanism 304 are supported by arc guides, and rotate around the axis in the movement direction of the second positioning stage and the axis in the movement direction of the first positioning stage, respectively. The rotation axes of the third positioning mechanism 303 and the fourth positioning mechanism 304 pass through a single point on the moving stage 103. The object to be positioned, i.e., the object to be measured or processed, is placed at that point.

[0081] The first positioning mechanism 301 to the fourth positioning mechanism 304 share one set of drive unit 104 and movable stage abutment unit 105, so the stage device can be configured compactly and at low cost. However, in some cases, a drive unit 104 and movable stage abutment unit 105 may be provided for each positioning mechanism.

[0082] The stage device of this embodiment allows for positioning of the object to be positioned with two degrees of freedom in the horizontal plane and two degrees of freedom in rotation, for a total of four degrees of freedom.This makes it possible to position, with high precision, for example, rotating objects to be processed in a precision machining machine or rotating objects to be measured in a precision measuring machine.

[0083] According to this embodiment, an apparatus can be provided which is equipped with a movable mechanism that can adjust the position and orientation of a table, stage, etc., and a brake mechanism that can fix the position and orientation, and which is less likely to shift in position and orientation when fixed by the brake mechanism.

[0084] [Other embodiments] The present invention is not limited to the above-described embodiments, and many modifications are possible within the technical spirit of the present invention. For example, the above-described different embodiments may be combined in whole or in part.

[0085] For example, in the example shown in FIG. 1(a), two brake mechanisms 107 are arranged at positions symmetrical with respect to the movable table abutment portion 105, but the number and arrangement of the brake mechanisms are not limited to this example. There may be one brake mechanism, or three or more. Also, two tension springs 106 are arranged at positions symmetrical with respect to the movable table abutment portion 105, but the number and arrangement of the tension springs are not limited to this example. There may be one tension spring, or three or more.

[0086] In the second embodiment, the movable stage 103 is supported by the arc guide ARC, but the guide surface of the arc guide does not necessarily have to be part of a geometrically perfect circle, and may be a curved guide that guides along an arbitrary curve.

[0087] The embodiments also include a method for manufacturing an article, in which an object is placed on a movable stage of any of the stage devices according to the embodiments, the object is aligned using a movement mechanism of the movable stage, the position is fixed using a brake mechanism, and the positioned object is processed using a processing device. The processing device may be, for example, a device that processes an object in a non-contact manner, such as a laser processing machine.

[0088] An embodiment also includes a method for measuring an article, in which an object is placed on a movable stage of any of the stage devices according to the embodiments, the object is aligned using a movement mechanism of the movable stage, the position of the movable stage is fixed using a brake mechanism, and the shape of the object is measured using a shape measurement device. The shape measurement device may be, for example, a device that measures the shape of the object in a non-contact manner using laser light or ultrasonic waves, or a device that measures the shape by bringing a probe into contact with the object. An embodiment also includes a method for manufacturing an article, in which processing is performed on the object based on the shape measurement results.

[0089] The present invention also includes, in its embodiments, a production system including any one of the stage devices according to the embodiments and a processing device that processes an object positioned and fixed on the stage device, and a method for manufacturing an article using the production system.

[0090] The embodiments also include a method for controlling a stage device, in which an object is placed on a movable stage of any of the stage devices according to the embodiments, a control unit controls the moving mechanism of the movable stage to align the object, and controls the brake mechanism to fix the position.

[0091] This specification discloses at least the following: [Item 1] The base and a moving unit that can be moved by a driving unit; an elastic member connected to the moving portion, The elastic member is disposed so that a part of the force received by the elastic member causes the moving part to contact a part of the driving part and restricts the movement of the moving part. An apparatus characterized in that [Matter 2] the moving unit is movable by a driving unit in a first direction or a second direction opposite to the first direction, a first pad fixed to the base; a second pad movable in a third direction intersecting the first direction; the elastic member is disposed between the first pad and the second pad and is connected to the moving portion; When the first pad and the second pad are separated from the elastic member, the moving portion is movable in the first direction or the second direction, When the second pad is moved in the third direction while the second pad is in contact with the elastic member, the elastic member biases the moving portion in a direction in which the moving portion is pressed against the driving portion, When both the first pad and the second pad come into contact with the elastic member, the position of the moving part is fixed. Item 1. The device according to item 1. [Matter 3] When the second pad is moved in the third direction while the second pad is in contact with the elastic member, the elastic member biased by the second pad is elastically deformed, and the elastic member comes into contact with both the first pad and the second pad. 3. The device according to item 2. [Matter 4] the elastic member is fixed to the moving part so that a normal vector with respect to a surface on which the second pad abuts has a component in the first direction. 4. The device according to item 2 or 3. [Matter 5] the elastic member is fixed to the moving part so that a surface that contacts the second pad is inclined with respect to the first direction. 5. The device according to any one of items 2 to 4. [Matter 6] The moving unit is installed on a rotating base that is rotatable relative to the base. 6. A device according to any one of items 2 to 5. [Matter 7] A linear guide is provided to guide the moving part. 7. A device according to any one of items 2 to 6. [Matter 8] An arc guide is provided to guide the moving part. 7. A device according to any one of items 2 to 6. [Matter 9] A control method for controlling the device according to any one of items 2 to 8, comprising: In a state in which the first pad and the second pad are spaced apart from the elastic member, the driving unit moves the moving unit to align the moving unit, and then With the second pad in contact with the elastic member, the second pad is moved in the third direction, and both the first pad and the second pad are brought into contact with the elastic member to fix the moving portion. A control method comprising: [Matter 10] A control method for controlling the device according to any one of items 2 to 8, comprising: An object is placed on the moving part, In a state in which the first pad and the second pad are separated from the elastic member, the driving unit moves the moving unit to align the object placed on the moving unit, and then With the second pad in contact with the elastic member, the second pad is moved in the third direction, and both the first pad and the second pad are brought into contact with the elastic member, thereby fixing the moving section on which the object is placed. A control method comprising: [Matter 11] A device according to any one of items 1 to 8, a processing device that processes an object placed on the moving part; A production system characterized by: [Matter 12] Item 11: Using the production system described in item 11, an object placed on the moving unit is processed to manufacture an article. A method for manufacturing an article. [Matter 13] A device according to any one of items 1 to 8, a measuring device for measuring the shape of an object placed on the moving part; A production system characterized by: [Matter 14] 14. Using the production system according to item 13, the shape of the object placed on the moving part is measured to manufacture an article. A method for manufacturing an article. [Matter 15] A first device, which is a device according to any one of items 1 to 8; A production system comprising: a second device that is the device according to any one of items 1 to 8; The moving direction of the moving unit included in the first device is different from the moving direction of the moving unit included in the second device. A production system characterized by: [Matter 16] A first device, which is a device according to any one of items 1 to 6; A production system comprising: a second device that is the device according to any one of items 1 to 6; the first device includes a linear guide that guides the moving part, The second device includes an arc guide that guides the moving part. A production system characterized by: [Matter 17] The first device is mounted on the second device. 17. The production system according to item 15 or 16. [Matter 18] The base and a moving unit supported by the base; a drive unit that is movable in a first direction or a second direction opposite to the first direction; a spring that biases the moving portion in the second direction to bring the moving portion into contact with the driving portion; a brake mechanism capable of fixing the position of the moving unit relative to the base, the brake mechanism includes a first pad fixed to the base, a second pad supported by the base, a pad drive unit that moves the second pad in a third direction intersecting the first direction, and an elastic member that is disposed between the first pad and the second pad and fixed to the mover, When the first pad and the second pad are not in contact with the elastic member, when the drive unit moves in the first direction, the moving unit is pushed by the drive unit and moves in the first direction, and when the drive unit moves in the second direction, the moving unit is biased by the spring and moves in the second direction while in contact with the drive unit, When the pad driving unit moves the second pad in the third direction while the second pad is in contact with the elastic member, the elastic member biases the moving unit in a direction in which the moving unit is pressed against the driving unit, When both the first pad and the second pad come into contact with the elastic member, the position of the moving part is fixed relative to the base. An apparatus characterized in that [Matter 19] A plurality of the brake mechanisms are provided. Item 19. The device according to item 18. [Matter 20] The base includes a linear guide that guides the moving part to move along a straight line. 20. The device according to item 18 or 19. [Matter 21] The base includes an arc guide that guides the moving part to move along an arc. 20. The device according to item 18 or 19. [Explanation of symbols]

[0092] 101... Base / 102... Linear guide / 103... Moving table / 104... Drive unit / 105... Moving table contact part / 106... Tension spring / 107... Brake mechanism / 108... Leaf spring / 109... Movable pad / 110... Fixed pad / 111... Pad drive mechanism / 201... Pad normal force / 202... Normal component force / 203 Horizontal component force / 204 Support reaction force / 205 Reaction force / 206 Tension spring force / 301 First positioning mechanism / 302 Second positioning mechanism / 303 Third positioning mechanism / 304 Fourth positioning mechanism / 305 Rotating table / 306A to 306D Contacted part / ARC Arc guide / NL Normal vector

Claims

1. The base and a moving unit that can be moved by a driving unit; an elastic member connected to the moving portion, The elastic member is disposed so that a part of the force received by the elastic member causes the moving part to contact a part of the driving part and restricts the movement of the moving part. An apparatus characterized in that

2. the moving unit is movable by a driving unit in a first direction or a second direction opposite to the first direction, a first pad fixed to the base; a second pad movable in a third direction intersecting the first direction; the elastic member is disposed between the first pad and the second pad and is connected to the moving portion, When the first pad and the second pad are spaced apart from the elastic member, the moving portion is movable in the first direction or the second direction, When the second pad is moved in the third direction while the second pad is in contact with the elastic member, the elastic member biases the moving portion in a direction in which the moving portion is pressed against the driving portion, When both the first pad and the second pad come into contact with the elastic member, the position of the moving part is fixed.

2. The device of claim 1 .

3. When the second pad is moved in the third direction while the second pad is in contact with the elastic member, the elastic member biased by the second pad is elastically deformed, and the elastic member comes into contact with both the first pad and the second pad.

3. The device according to claim 2.

4. the elastic member is fixed to the moving part so that a normal vector with respect to a surface on which the second pad abuts has a component in the first direction.

3. The device according to claim 2.

5. the elastic member is fixed to the moving portion so that a surface that comes into contact with the second pad is inclined with respect to the first direction; 3. The device according to claim 2.

6. The moving unit is installed on a rotating base that is rotatable relative to the base.

6. Apparatus according to any one of claims 1 to 5.

7. A linear guide is provided to guide the moving part.

6. Apparatus according to any one of claims 1 to 5.

8. An arc guide is provided to guide the moving part.

6. Apparatus according to any one of claims 1 to 5.

9. A control method for controlling the device according to claim 2, comprising: In a state in which the first pad and the second pad are spaced apart from the elastic member, the driving unit moves the moving unit to align the moving unit, and then With the second pad in contact with the elastic member, the second pad is moved in the third direction, and both the first pad and the second pad are brought into contact with the elastic member to fix the moving portion. A control method comprising:

10. A control method for controlling the device according to claim 2, comprising: An object is placed on the moving part, In a state in which the first pad and the second pad are spaced apart from the elastic member, the driving unit moves the moving unit to align the object placed on the moving unit, and then With the second pad in contact with the elastic member, the second pad is moved in the third direction, and both the first pad and the second pad are brought into contact with the elastic member, thereby fixing the moving section on which the object is placed. A control method comprising:

11. An apparatus according to any one of claims 1 to 5; a processing device that processes an object placed on the moving part; A production system characterized by:

12. 12. The production system according to claim 11 is used to manufacture an article by processing an object placed on the moving section. A method for manufacturing an article.

13. An apparatus according to any one of claims 1 to 5; a measuring device for measuring the shape of an object placed on the moving part; A production system characterized by:

14. 14. The production system according to claim 13 is used to measure the shape of an object placed on the moving section and manufacture an article. A method for manufacturing an article.

15. a first device, the first device being a device according to any one of claims 1 to 5; A production system comprising: a second device that is the device according to any one of claims 1 to 5; a moving direction of the moving unit included in the first device and a moving direction of the moving unit included in the second device are different from each other; A production system characterized by:

16. a first device, the first device being a device according to any one of claims 1 to 5; A production system comprising: a second device that is the device according to any one of claims 1 to 5; the first device includes a linear guide that guides the moving part, The second device includes an arc guide that guides the moving part. A production system characterized by:

17. The first device is mounted on the second device.

16. The production system according to claim 15.

18. The base and a moving unit supported by the base; a drive unit that is movable in a first direction or a second direction opposite to the first direction; a spring that biases the moving portion in the second direction to bring the moving portion into contact with the driving portion; a brake mechanism capable of fixing the position of the moving unit relative to the base, the brake mechanism includes a first pad fixed to the base, a second pad supported by the base, a pad drive unit that moves the second pad in a third direction intersecting the first direction, and an elastic member that is disposed between the first pad and the second pad and fixed to the mover, When the first pad and the second pad are not in contact with the elastic member, when the drive unit moves in the first direction, the moving unit is pushed by the drive unit and moves in the first direction, and when the drive unit moves in the second direction, the moving unit is biased by the spring and moves in the second direction while in contact with the drive unit, When the pad driving unit moves the second pad in the third direction while the second pad is in contact with the elastic member, the elastic member biases the moving unit in a direction in which the moving unit is pressed against the driving unit, When both the first pad and the second pad come into contact with the elastic member, the position of the moving part is fixed with respect to the base. An apparatus characterized in that

19. A plurality of the brake mechanisms are provided.

20. The device of claim 18.

20. The base includes a linear guide that guides the moving part to move along a straight line.

20. Apparatus according to claim 18 or 19.

21. The base includes an arc guide that guides the moving part to move along an arc.

20. Apparatus according to claim 18 or 19.

Images