Ion exchange equipment, ultrapure water production equipment and containers

Abstract

Minimizes the leaching of metal components. [Solution] The container (100) has an ion exchange resin filled in it, and the container (100) has a cylindrical portion (110) with openings formed on both the top and bottom surfaces, a plate-shaped top lid portion (120) with a hole (121) that covers the top opening, a plate-shaped bottom lid portion (130) with a hole (131) that covers the bottom opening, and a strainer (140) that is attached to the bottom opening and prevents the ion exchange resin from leaking out of the container (100), and the cylindrical portion (110), top lid portion (120), bottom lid portion (130) and strainer (140) are each made of a non-metallic material.

Description

[Technical Field]

[0001] The present invention relates to an ion exchange device, an ultrapure water production device, and a container. [Background technology]

[0002] In the manufacturing processes of semiconductor devices and liquid crystal devices, ultrapure water, from which impurities have been highly removed, is used for various purposes, such as cleaning. Even trace amounts of metal components contained in ultrapure water can significantly affect device characteristics, so strict control of their concentration is required. In recent years, with the rapid increase in integration and miniaturization of semiconductor devices, requirements for metal concentrations in ultrapure water have become increasingly stringent, resulting in the demand for ultrapure water with metal concentrations at the pg / L level. Ultrapure water is generally produced by sequentially treating raw water (e.g., river water, groundwater, industrial water) through a pretreatment system, a primary pure water system, and a secondary pure water system (subsystem). It is known that metal components leach from pipes, pumps, and other components used in the manufacturing process. Therefore, several proposals have been made to minimize the impact of metal leachate on such ultrapure water production systems (see, for example, Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2004-154713 [Patent Document 2] Japanese Patent Application Laid-Open No. 2011-224489 Summary of the Invention [Problem to be solved by the invention]

[0004] Some of the above-mentioned subsystems include an ion exchange resin tower (ion exchange device) filled with ion exchange resin. For example, by installing such an ion exchange resin tower in a subsystem, even if metal components leach out upstream, the impact of this on the quality of ultrapure water can be suppressed. However, there is a risk that metal components may leach out from the ion exchange resin tower itself. To meet recent stringent requirements for metal concentrations in ultrapure water, it is necessary to minimize the leach-out of metal components from the ion exchange resin tower.

[0005] An object of the present invention is to provide an ion exchange device, an ultrapure water production device and a container that minimize the elution of metal components. [Means for solving the problem]

[0006] The ion exchange device of the present invention comprises: A container and an ion exchange resin filled in the container, The container comprises: a cylindrical portion having openings formed on its top and bottom surfaces; a plate-shaped upper surface cover portion having a first hole portion and covering the opening portion of the upper surface; a plate-shaped bottom cover portion having a second hole portion and covering the opening portion of the bottom surface; a perforated plate attached to the opening in the bottom surface to prevent the ion exchange resin from flowing out of the container, The cylindrical portion, the top cover portion, the bottom cover portion and the perforated plate are each made of a non-metallic material.

[0007] Furthermore, the ultrapure water production apparatus of the present invention comprises: An ultrapure water production apparatus that produces ultrapure water by treating water to be treated, The ion exchange device comprises a container and an ion exchange resin filled in the container, the container having a cylindrical portion with openings formed on both the top and bottom surfaces, a plate-shaped top lid portion having a first hole portion and covering the top opening, a plate-shaped bottom lid portion having a second hole portion and covering the bottom opening, and a strainer attached to the bottom opening and preventing the ion exchange resin from flowing out of the container, and the cylindrical portion, top lid portion, bottom lid portion and strainer are all made of non-metallic materials.

[0008] The container of the present invention further comprises: A container filled with ion exchange resin, a cylindrical portion having openings formed on its top and bottom surfaces; a plate-shaped upper surface cover portion having a first hole portion and covering the opening portion of the upper surface; a plate-shaped bottom cover portion having a second hole portion and covering the opening portion of the bottom surface; a perforated plate attached to the opening in the bottom surface to prevent the ion exchange resin from flowing out of the container, The cylindrical portion, the top cover portion, the bottom cover portion and the perforated plate are each made of a non-metallic material. [Effects of the Invention]

[0009] In the present invention, the elution of metal components can be minimized. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a front view of an ion exchange device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a top view of an example of the ion exchange device shown in FIG. 1. [Figure 3] FIG. 2 is a bottom view of the ion exchange device shown in FIG. 1. [Figure 4] 1 is a diagram showing a first application example of an ultrapure water manufacturing system to which an ion exchange device according to the present invention is applied. [Figure 5] FIG. 10 is a diagram showing a second application example of an ultrapure water producing system to which an ion exchange device according to the present invention is applied. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0012] FIG. 1 is a front view of an example of an ion exchange apparatus according to the present invention. The ion exchange apparatus shown in FIG. 1 has a cylindrical container 100 filled with a mixed-bed ion exchange resin (a mixture of cation exchange resin and anion exchange resin). The container 100 has a cylindrical portion 110, a top cover portion 120, a bottom cover portion 130, a perforated plate 140 attached to a perforated plate attachment portion 141, a top support plate 150, a bottom support plate 160, and a fastening portion 170. Note that FIG. 1 does not show the members (screws, protrusions, adhesives, welding, fusion, etc.) that attach each of these components to each other. Note that the ion exchange resin filled in the container 100 may not be a mixed-bed type.

[0013] The cylindrical portion 110 has a space therein that can be filled with ion exchange resin, and has openings on both the top and bottom surfaces. The cylindrical portion 110 is provided with a top flange 111 and a bottom flange 112. The top flange 111 is a member for attaching the top lid portion 120 to the cylindrical portion 110. The bottom flange 112 is a member for attaching the bottom lid portion 130 to the cylindrical portion 110.

[0014] The top lid 120 is a plate-like member that covers the opening on the top surface of the cylindrical portion 110. The top lid 120 is formed with a hole 121 (first hole) that is a supply path for supplying the water to be treated. The top lid 120 may also be provided with a hole for attaching an air vent valve that discharges gas inside the container 100 to the outside. The top lid 120 is attached to the top flange 111 using, for example, bolts.

[0015] The bottom lid 130 is a plate-like member that covers an opening at the bottom of the cylindrical portion 110. The bottom lid 130 is formed with a hole 131 (second hole) that is a drainage path for discharging treated water that has been treated with the ion exchange resin filled in the container 100. The bottom lid 130 is attached to the bottom flange 112 using, for example, bolts.

[0016] The strainer 140 is a member that prevents the ion exchange resin from leaking out of the container 100 from the opening in the bottom surface. The slit width of the strainer 140 is set according to the particle size of the ion exchange resin used, but is not particularly limited as long as it does not generate a differential pressure when water is passed through. The strainer 140 is sandwiched between the bottom flange 112 and the bottom cover portion 130 and attached to a strainer attachment portion 141 provided at the opening in the bottom surface of the cylindrical portion 110. The strainer attachment portion 141 has a structure that allows multiple strainers 140 to be attached in a stacked state. In addition, the strainer attachment portion 141 has a structure that can accommodate multiple types of strainers 140 with various thicknesses (plate thicknesses) to be attached.

[0017] The upper surface support plate 150 is a plate-like member, and is attached to the cylindrical portion 110 with its lower surface in contact with the upper surface of the upper surface lid portion 120. The upper surface support plate 150 has a hole 151 (third hole) at a position opposite to the hole 121. Furthermore, a hole may be provided in the upper surface support plate 150 at a position opposite to the hole provided in the above-mentioned upper surface lid portion 120 for attaching an air vent valve for discharging gas inside the container 100 to the outside, and the air vent valve may be attached so as to pass vertically through the hole in the upper surface lid portion 120 and the hole in the upper surface support plate 150.

[0018] The bottom support plate 160 is a plate-shaped member, and its upper surface is in contact with the lower surface of the bottom cover portion 130 and is attached to the cylindrical portion 110. The bottom support plate 160 has a hole portion 161 (fourth hole portion) at a position opposite to the hole portion 131.

[0019] The fastening portion 170 is a rod-shaped member that is attached along the side surface of the cylindrical portion 110. Both ends of the fastening portion 170 are threaded. The fastening portion 170 passes through attachment holes provided in the top lid portion 120 and the bottom lid portion 130, and one end is fixed to the top lid portion 120 using a nut, and the other end is fixed to the bottom lid portion 130 using a nut. In other words, the fastening portion 170 is a member that applies a force that causes the top lid portion 120 and the bottom lid portion 130 to sandwich the cylindrical portion 110 from above and below.

[0020] The cylindrical portion 110, the top lid portion 120, the bottom lid portion 130, and the perforated plate 140 are each made of a non-metallic material. The cylindrical portion 110, the top lid portion 120, the bottom lid portion 130, and the perforated plate 140 are each made of, for example, PVDF (polyvinylidene fluoride). Alternatively, the cylindrical portion 110, the top lid portion 120, the bottom lid portion 130, and the perforated plate 140 may each be made of other fluororesins such as PTFE (polytetrafluoroethylene), or PP (polypropylene). Using fluororesins can reduce weight and the elution of impurities from the material compared to using metallic materials.

[0021] Fig. 2 is an example of a top view of the ion exchange device shown in Fig. 1. As shown in Fig. 2, an upper support plate 150 having holes 151 formed therein is attached to the upper surface of the ion exchange device. The water to be treated is supplied through the holes 151 into a container 100 filled with an ion exchange resin.

[0022] Fig. 3 is an example of a bottom view of the ion exchange device shown in Fig. 1. As shown in Fig. 3, a bottom support plate 160 having holes 161 formed therein is attached to the bottom of the ion exchange device. Treated water treated with the ion exchange resin filled in the container 100 is discharged through the holes 161.

[0023] The top support plate 150, bottom support plate 160, and tightening portion 170 may not be attached to the container 100 depending on the pressure of the water flowing through the container 100. The number or thickness of the strainers 140 may be calculated based on the pressure loss of the ion exchange resin when the container 100 is filled with the ion exchange resin and water is passed through it, and strainers 140 of the calculated number or thickness may be attached to the strainer attachment portion 141. The weight of the ion exchange resin itself may also be taken into account when calculating the number or thickness of the strainers 140. In this case, the strainer attachment portion 141 may be provided with a single strainer 140 having a thickness equal to or greater than the calculated thickness, or multiple strainers 140 may be provided so that the combined thickness of the strainers 140 is equal to or greater than the calculated thickness. In other words, the thickness of the strainers 140 may be calculated based on the weight and pressure loss of the ion exchange resin filled in the container 100, and a combination of the thickness and number of strainers 140 that results in a thickness equal to or greater than the calculated thickness may be calculated. For example, if the calculated thickness of the perforated plates 140 is 10 mm, a combination of two perforated plates 140 each having a thickness of 5 mm may be calculated. Such a combination may be adjusted at the design stage. Note that a computer may calculate the number and thickness of the perforated plates 140, or a combination thereof, based on the weight and pressure loss of the ion exchange resin. Alternatively, a standard thickness (e.g., 5 mm) of the perforated plates 140 to be used may be set in advance, and the number of perforated plates 140 having that standard thickness may be calculated.

[0024] As described above, the ion exchange device of the present invention includes a container 100 made of a nonmetallic material, which includes a cylindrical portion 110, plate-shaped top and bottom lid portions 120 and 130 that cover the opening of the cylindrical portion 110, and a perforated plate 140. The container 100 is filled with ion exchange resin. This configuration reduces the elution of metal components from the container 100 when treating water with the ion exchange resin. Furthermore, the container 100 can be made lighter than containers made of metallic materials. Furthermore, the ion exchange device of the present invention includes a perforated plate mounting portion 141 to which multiple perforated plates 140 can be attached, allowing the container 100 to be configured to accommodate the pressure loss of the ion exchange resin. Furthermore, by providing a top support plate 150 and a bottom support plate 160 on the outer sides of the top and bottom lid portions 120 and 130 of the ion exchange device of the present invention, the attachment of the top and bottom lid portions 120 and 130 to the cylindrical portion 110 can be strengthened. Furthermore, the ion exchange device of the present invention has fastening portion 170, one end of which is screwed to top lid portion 120 and the other end of which is screwed to bottom lid portion 130, thereby strengthening the attachment of top lid portion 120 and bottom lid portion 130 to cylindrical portion 110. A container made of a cylindrical member and a plate-like member, as in the present invention, has the advantage of being easier to manufacture and process (e.g., reducing the number of processing steps) than a container with rounded corners on the bottom surface. In the above-described embodiment, hole 121 is a supply path for supplying the water to be treated, and hole 131 is a drainage path for discharging the treated water treated with the ion exchange resin filled in container 100. However, hole 131 may be a supply path for supplying the water to be treated, and hole 121 may be a drainage path for discharging the treated water treated with the ion exchange resin filled in container 100. That is, the container 100 may be used in such a manner that the direction of flow of the water to be treated inside the container 100 is from the hole 131 to the hole 121. In this case, the strainer mounting portion 141 and the strainer 140 are also attached to the upper cover portion 120 side.Furthermore, even when the direction of flow of the water to be treated within the container 100 is from the hole 121 to the hole 131, the strainer mounting portion 141 and the strainer 140 are attached to the upper surface lid portion 120 side, so that the water supplied from the hole 121 can be dispersed so that it does not concentrate near the central axis of the cylindrical portion 110 and pass through. (Application example)

[0025] Figure 4 is a diagram showing a first application example of an ultrapure water production system to which the ion exchange apparatus of the present invention is applied. The ultrapure water production system shown in Figure 4 has a primary pure water tank 11, a pump 12, a heat exchanger 13, an ultraviolet oxidation device 14, an ion exchange device 15, a membrane degassing device 16, and an ultrafiltration (UF) membrane device 17. These components constitute a secondary pure water production system (subsystem) 10, which sequentially processes primary pure water produced in a primary pure water production system (not shown) to produce ultrapure water and supplies the ultrapure water to a point-of-use 20.

[0026] The water to be treated (primary pure water) stored in the primary pure water tank 11 is pumped out by a pump 12 and supplied to a heat exchanger 13. The water to be treated, whose temperature has been adjusted by passing through the heat exchanger 13, is then supplied to an ultraviolet oxidation device 14 where it is irradiated with ultraviolet light, thereby decomposing the total organic carbon (TOC) in the water to be treated. The water to be treated then undergoes ion exchange treatment in an ion exchange device 15 to remove ionic components such as metal ions. The water to be treated from which the ionic components have been removed undergoes membrane degassing device 16 to remove dissolved gases, and UF membrane device 17 to remove particulates. A portion of the ultrapure water thus obtained is supplied to a point of use 20, and the remainder is returned to the primary pure water tank 11. Primary pure water is supplied to the primary pure water tank 11 from a primary pure water system (not shown) as needed. The primary pure water tank 11, pump 12, heat exchanger 13, ultraviolet oxidation device 14, membrane degassing device 16, and UF membrane device 17 may be those generally used in subsystems of ultrapure water production systems. The ion exchange device according to the present invention is applied to the ion exchange device 15.

[0027] FIG. 5 is a diagram showing a second application example of an ultrapure water production system to which an ion exchange apparatus according to the present invention is applied. The ultrapure water production system shown in FIG. 5 includes a primary pure water tank 11, a pump 12, a heat exchanger 13, an ultraviolet oxidation device 14, an ion exchange device 15, a membrane degassing device 16, and an ultrafiltration (UF) membrane device 17. These components constitute a secondary pure water production system (subsystem) 10. The ultrapure water production system shown in FIG. 5 also includes an ultrapure water supply device 30. The secondary pure water production system 10 sequentially treats primary pure water produced in a primary pure water production system (not shown) to produce ultrapure water, and supplies the ultrapure water to the ultrapure water supply device 30. The ultrapure water supply device 30 treats the supplied ultrapure water to produce ultrapure water, and supplies the ultrapure water to a point-of-use 20. The ion exchange apparatus according to the present invention is applied to the ultrapure water supply device 30.

[0028] The ultrapure water supply apparatus 30 is provided on a path between the secondary pure water production system 10 and the point of use 20. The closer the ultrapure water supply apparatus 30 is located to the point of use 20, the more preferable it is. As long as the quality of the treated water from the ultrapure water supply apparatus 30 is higher than that of the water to be treated, the impurity removal performance of the ultrapure water supply apparatus 30 is not particularly limited. For example, the ultrapure water supply apparatus 30 removes trace amounts of impurities contained in the ultrapure water supplied from the secondary pure water production system 10 (e.g., impurities eluted from the piping between the secondary pure water production system 10 and the ultrapure water supply apparatus 30). In other words, the ultrapure water supply apparatus 30 has the function of reducing the concentration of impurities and improving the quality of the ultrapure water. The ultrapure water supply apparatus 30 removes the necessary impurities from the ultrapure water supplied from the secondary pure water production system 10 in accordance with the water quality required at the point of use 20. The ultrapure water supply apparatus 30 removes impurities from the ultrapure water supplied from the secondary pure water production system 10 and supplies the ultrapure water (hereinafter referred to as ultra-ultrapure water) to the point of use 20. Examples of impurities that the ultrapure water supply apparatus 30 removes from the ultrapure water include metals, organic matter containing TOC (Total Organic Carbon) components, dissolved oxygen, hydrogen peroxide, and fine particles. The ultrapure water supply apparatus 30 includes a water treatment device therein that performs a unit operation (e.g., removal of impurities) according to the water quality required by the point of use 20. Examples of water treatment devices that can be included in the ultrapure water supply apparatus 30 include an ion exchange device according to the present invention if the purpose is to remove metal ions, a UV oxidation device if the purpose is to remove organic matter containing TOC components, a degassing membrane device if the purpose is to remove dissolved oxygen, and a filtration membrane device including a microfiltration membrane or ultrafiltration membrane if the purpose is to remove fine particles.

[0029] The installation location of the ion exchange device of the present invention is not limited to the locations described in Application Examples 1 and 2. For example, in Application Example 1 shown in FIG. 4, the membrane degassing device 16 may be omitted, and the ion exchange device of the present invention may be applied to the ion exchange device 15 installed immediately upstream of the UF membrane device 17, which is the most downstream device in the secondary pure water production system 10. Also, in Application Example 1 shown in FIG. 4, the UF membrane device 17 may be omitted, and the ion exchange device of the present invention may be applied to the ion exchange device 15 installed most downstream in the secondary pure water production system 10. The ion exchange device of the present invention may also be applied to an ion exchange device constituting a primary pure water system that produces primary pure water. Furthermore, the filling form of the ion exchange resin packed in the container 100 of the present invention is not limited to the mixed bed form of cation exchange resin and anion exchange resin described above. It may also be a double bed form of cation exchange resin and anion exchange resin, or a single bed form of cation exchange resin or anion exchange resin. Furthermore, the container 100 of the present invention may be filled with a chelating resin instead of or in addition to the ion exchange resin. For example, the vessel 100 may be filled with a single bed of chelating resin, or may be filled with multiple beds or a mixed bed of at least one of a cation exchange resin and an anion exchange resin and a chelating resin. [Explanation of symbols]

[0030] 10 Secondary water purification system 11 Primary pure water tank 12 Pump 13 Heat exchanger 14. Ultraviolet oxidation equipment 15 Ion exchange unit 16 Membrane degassing device 17 UF membrane equipment 20 Use Points 30 Ultrapure water supply equipment 100 containers 110 Cylindrical part 111 Upper flange 112 Bottom flange 120 Top side lid part 121,131,151,161 Hole 130 Bottom side lid part 140 perforated plate 141 Strainer mounting part 150 Top support plate 160 Bottom support plate 170 Fastening part

Claims

1. A container and an ion exchange resin filled in the container, The container comprises: a cylindrical portion having openings formed on its top and bottom surfaces; a plate-shaped upper surface cover portion having a first hole portion and covering the opening portion of the upper surface; a plate-shaped bottom cover portion having a second hole portion and covering the opening portion of the bottom surface; a perforated plate attached to the opening in the bottom surface to prevent the ion exchange resin from flowing out of the container, The ion exchange device wherein the cylindrical portion, the top cover portion, the bottom cover portion and the perforated plate are each made of a non-metallic material.

2. 2. The ion exchange apparatus according to claim 1, An ion exchange device in which the thickness of the perforated plate is equal to or greater than a thickness calculated based on the pressure loss of the ion exchange resin filled in the container.

3. 2. The ion exchange apparatus according to claim 1, An ion exchange device in which multiple perforated plates are stacked, and the thickness of the stacked perforated plates is greater than or equal to a thickness calculated based on the pressure loss of the ion exchange resin filled in the container.

4. The ion exchange apparatus according to any one of claims 1 to 3, The container comprises: an upper surface support plate having a plate-like lower surface in contact with an upper surface of the upper surface lid portion and attached to the cylindrical portion, the upper surface support plate having a third hole portion at a position opposite to the first hole portion; an ion exchange device having a bottom support plate attached to the cylindrical portion with its plate-shaped upper surface in contact with the lower surface of the bottom cover portion, and having a fourth hole portion at a position opposite the second hole portion.

5. The ion exchange apparatus according to any one of claims 1 to 3, The ion exchange device has a fastening portion attached along the side surface of the cylindrical portion, one end of which is fixed to the top cover portion and the other end of which is fixed to the bottom cover portion.

6. The ion exchange apparatus according to any one of claims 1 to 3, The non-metallic material is PVDF (polyvinylidene fluoride).

7. An ultrapure water production apparatus that produces ultrapure water by treating water to be treated, An ultrapure water production system comprising the ion exchange device according to any one of claims 1 to 3.

8. A container filled with ion exchange resin, a cylindrical portion having openings formed on its top and bottom surfaces; a plate-shaped upper surface cover portion having a first hole portion and covering the opening portion of the upper surface; a plate-shaped bottom cover portion having a second hole portion and covering the opening portion of the bottom surface; a perforated plate attached to the opening in the bottom surface to prevent the ion exchange resin from flowing out of the container, A container in which the cylindrical portion, the top lid portion, the bottom lid portion and the perforated plate are each made of a non-metallic material.

Images