Machining apparatus

Abstract

To provide a processing device capable of improving productivity.SOLUTION: The processing apparatus 1 includes a mounting table 5 on which a container 100 for accommodating a package substrate W is mounted, a holding table 30 for holding the package substrate W taken out from the container 100 mounted on the mounting table 5, and a processing unit 40 for processing the package substrate W held by the holding table 30. The processing apparatus 1 further includes a storage shelf 3 capable of storing at least one storage container 100, and a container conveyance unit 4 configured to convey the storage container 100 stored in the storage shelf 3 to the placement table 5.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] Cutting machines are known as machines for dividing multiple devices formed on the surface of a workpiece, such as a silicon wafer, into individual device chips. The devices formed on the surface of the workpiece include, for example, devices such as integrated circuits (ICs) and large scale integrations (LSIs), as well as packaged devices such as chip size packages (CSPs) and quad flat non-leaded packages (QFNs), which are used in various electrical equipment.

[0003] For example, Patent Document 1 describes a cutting device equipped with cutting means for cutting a substrate, which is a workpiece held on a holding table. This cutting device is provided with a cassette placement area where cassettes containing multiple workpieces are placed, and the workpieces are taken out of the cassettes placed in the cassette placement area and transported to the holding table. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-232080 Summary of the Invention [Problem to be solved by the invention]

[0005] In the cutting device of Patent Document 1, when replacing an empty cassette that has transported all of the workpieces contained therein, the empty cassette must be moved from the cassette loading area, and then a new cassette must be brought in from outside the cutting device and loaded into the cassette loading area, a task that must be done manually, leaving room for improvement in terms of productivity.

[0006] The present invention provides a processing device that can improve productivity. [Means for solving the problem]

[0007] The present invention provides a mounting table on which a container for accommodating the workpiece is placed; a holding table for holding the workpiece taken out from the container placed on the placing table; a processing unit that processes the workpiece held on the holding table, a storage shelf capable of storing at least one of the storage containers; The storage system further includes a transport unit that transports the container stored in the storage shelf to the stage. [Effects of the Invention]

[0008] According to the present invention, the storage container placed on the table can be smoothly replaced, thereby improving productivity. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic perspective view of a processing device 1 according to an embodiment of the present invention. [Figure 2] FIG. 2 is an enlarged perspective view of the holding table 30 and the processing unit 40. [Figure 3] 1 is a schematic side view of a storage shelf 3, a container transport unit 4, and a mounting table 5. FIG. [Figure 4] 10 is a diagram showing the mounting table 5 moved to the height position of the upper storage shelf 3. FIG. [Figure 5] 10 is a diagram showing a state in which the storage container 100 is transported from the upper storage shelf 3 to the mounting table 5. FIG. [Figure 6] FIG. 10 is a diagram showing how the table 5 on which the container 100 is placed moves downward. [Figure 7] FIG. 10 is a diagram showing a state in which the storage container 100 placed on the table 5 has been emptied. [Figure 8]10 is a diagram showing how an empty storage container 100 is transported from a mounting table 5 to a lower storage shelf 3. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] An embodiment of the processing apparatus of the present invention will be described below with reference to the accompanying drawings. In the following description, the arrow directions shown in the drawings will be referred to as the X-axis, Y-axis, and Z-axis directions, respectively.

[0011] [Overall overview of the processing equipment] 1 is a schematic perspective view of a processing apparatus 1. The processing apparatus 1 includes a base 2 that supports components described below, and performs a predetermined processing process on a workpiece. In this embodiment, the processing apparatus 1 performs cutting processing on, for example, a package substrate W (an example of a workpiece) on which a plurality of devices D are formed, and separates the package substrate W into individual device chips.

[0012] The package substrate W is, for example, a CSP substrate or a QFN substrate, and is a rectangular plate-like object. The package substrate W is divided into multiple regions by division lines arranged in a grid pattern on its surface, and a device D is formed in each region.

[0013] The processing apparatus 1 includes a mounting table 5 on which a storage container 100 (sometimes referred to as a cassette) for storing a package substrate W is placed, a first transport unit 10 that transports the package substrate W from the mounting table 5 to a predetermined position A, a second transport unit 20 that transports the package substrate W from the predetermined position A, a holding table 30 on which the package substrate W transported from the predetermined position A by the second transport unit 20 is placed and which holds the package substrate W, a processing unit 40 that processes the package substrate W held by the holding table 30, a processing water supply unit 46 that can supply processing water to the package substrate W, a third transport unit 80 that transports the package substrate W processed by the processing unit 40, a cleaning unit 86 that cleans the processed package substrate W, and a drying unit 87 that dries the cleaned package substrate W. These units and the mounting table 5 that are components of the processing apparatus 1 are supported by a base 2.

[0014] One storage container 100 is placed on the mounting table 5. The storage container 100 has multiple shelves arranged at predetermined intervals in the vertical direction, and multiple package substrates W can be stored horizontally on the shelves. The mounting table 5 is arranged to be movable in the Z-axis direction (i.e., the vertical direction), and can adjust the height position of the package substrate W taken out of the storage container 100 to the height position of the mounting surface for the package substrate W in the first transport unit 10.

[0015] The first transport unit 10 is provided adjacent to the mounting table 5 and includes a conveyor 11 on which a package substrate W taken out of the container 100 in the +Y direction is placed and which transports the package substrate W to a predetermined position A. The conveyor 11 is, for example, a belt conveyor including an endless belt and a motor for driving the belt. Here, the predetermined position A is a downstream area on the conveyor 11, and is an area where the second transport unit 20 can hold the package substrate W.

[0016] The second transport unit 20 transports the package substrate W placed at a predetermined position A to the holding table 30. The second transport unit 20 has a suction pad 21 that suction-holds the upper surface of the package substrate W, a lifting mechanism 22 that supports the suction pad 21 and raises and lowers it up and down, an operating arm 23 that supports the lifting mechanism 22, and a moving mechanism (not shown) that moves the operating arm 23 along the Y-axis direction. The lifting mechanism 22 may be formed, for example, by an air cylinder or by a motor and a ball screw.

[0017] Two holding tables 30 are provided side by side along the Y-axis direction. Each holding table 30 has a circular holding surface, and suction holes (not shown) are exposed on this holding surface. A suction path is formed inside the holding table 30, which communicates with the suction holes and is connected to a suction source such as a vacuum pump. The holding table 30 having this configuration suction-holds the package substrate W transported by the second transport unit 20.

[0018] Further, around each holding table 30, a tray 65 is provided for receiving processing water supplied during processing and processing waste.

[0019] 2 is an enlarged perspective view of the holding table 30 and the processing unit 40. Note that the tray 65 is not shown.

[0020] The holding table 30 is provided so as to be movable along the X-axis direction (processing feed direction) by an X-axis direction moving means 35 provided below the holding table 30. The holding table 30 is also provided so as to be rotatable within a predetermined angle (for example, 90°) around a central axis extending in the Z-axis direction by a rotation drive mechanism (not shown).

[0021] The processing unit 40 cuts the package substrate W held on the holding table 30 along the planned division line. The processing unit 40 has a spindle 41 arranged along the Y-axis direction (indexing feed direction) and a disk-shaped cutting blade 42 attached to the tip of the spindle 41. The spindle 41 and the cutting blade 42 are provided so as to be movable in the Y-axis direction and the Z-axis direction by a Y-axis direction moving means 36 and a Z-axis direction moving means 37. The spindle 41 and the cutting blade 42 are rotated at a predetermined speed by, for example, a servo motor.

[0022] The processing water supply units 46 are provided on both sides of the cutting blade 42 in the X-axis direction and have spray nozzles 47 that can supply processing water. The processing water supplied from the spray nozzles 47 is supplied to the cutting area between the cutting blade 42 and the package substrate W. The processing water cools the cutting area and can wash away processing waste generated during cutting.

[0023] 1, the third transport unit 80 transports the individual devices D separated by the processing unit 40 to the cleaning unit 86. Similar to the second transport unit 20, the third transport unit 80 has a suction pad 81 that suction-holds the devices D, a lifting mechanism 82 that supports the suction pad 81 and raises and lowers it, an operating arm 83 that supports the lifting mechanism 82, and a moving mechanism (not shown) that moves the operating arm 83 along the Y-axis direction.

[0024] The cleaning unit 86 physically or chemically cleans the processed package substrate W. The cleaning unit 86 includes, for example, a mechanism for supplying a cleaning liquid and a cleaning tool such as a sponge that comes into contact with the device D to clean it.

[0025] The drying unit 87 dries the device D cleaned by the cleaning unit 86. The drying unit 87 includes, for example, a heater.

[0026] [Storage shelf] As shown in FIG. 1, the processing apparatus 1 further includes a storage shelf 3 capable of storing at least one storage container 100, and a container transport unit 4 that transports the storage container 100 stored in the storage shelf 3 to a mounting table 5.

[0027] If the processing apparatus 1 were not equipped with the storage shelf 3 and the container transport unit 4, when replacing an empty storage container 100 after all of the package substrates W stored therein have been transported, it would be necessary to manually move the empty storage container 100 from the mounting table 5, and then bring a new storage container 100 from outside the processing apparatus 1 and place it on the mounting table 5. In this embodiment, since the processing apparatus 1 is equipped with the storage shelf 3 and the container transport unit 4, the storage container 100 can be smoothly replaced on the mounting table 5, and the productivity of the processing apparatus 1 can be improved.

[0028] 3 to 8, the storage shelves 3, the container transport unit 4, and the mounting table 5 will be described in detail below. In this embodiment, a configuration in which two storage shelves 3 are provided one above the other will be described as an example, but a configuration in which three or more storage shelves 3 are provided one above the other may also be used. Furthermore, a configuration in which multiple storage shelves 3 are provided horizontally may also be used, or a configuration in which only one storage shelf 3 is provided.

[0029] Each storage shelf 3 extends horizontally and is configured to be able to store a plurality of storage containers 100 in the horizontal direction. Specifically, each storage shelf 3 extends in the X-axis direction and is configured to be able to store a plurality of storage containers 100 lined up in the X-axis direction.

[0030] The storage shelf 3 is provided adjacent to the mounting table 5 and has a conveyor 3a that transports the storage containers 100 to the mounting table 5. In this embodiment, the container transport unit 4 is configured to include this conveyor 3a. The conveyor 3a is, for example, a belt conveyor that includes an endless belt and a motor that drives the belt, and multiple storage containers 100 are placed on the upper surface of the belt. The mounting table 5 is provided adjacent to the end of the direction in which the conveyor 3a transports the storage containers 100, i.e., the X-axis direction, and the conveyor 3a transports the storage containers 100 toward the mounting table 5. As the storage shelf 3 has the conveyor 3a in this way, the storage shelf 3 can also function as the container transport unit 4, and the processing apparatus 1 can be made more compact.

[0031] The mounting table 5 is equipped with a moving mechanism 5a that is movable in the Z-axis direction (i.e., the up-down direction), and is configured to be movable up and down to the height position of each storage shelf 3. The moving mechanism 5a may be configured, for example, by an air cylinder or by a motor and a ball screw. By providing multiple storage shelves 3 one above the other, many storage containers 100 can be stored on the storage shelves 3 in the limited space within the processing device 1. Furthermore, since the height positions of the mounting table 5 and each storage shelf 3 can be aligned, transportation from the storage shelf 3 to the mounting table 5 by the container transport unit 4 (conveyor 3a) can be performed smoothly. Note that, although an example in which the mounting table 5 is configured to be movable up and down has been shown here, this is not limiting, and each storage shelf 3 may be configured to be movable up and down to the height position of the mounting table 5.

[0032] The mounting table 5 is provided with a positioning portion 6a for positioning the storage container 100 on an extension of the path along which the storage container 100 is transported from the storage shelf 3 to the mounting table 5. The positioning portion 6a is configured as a wall portion erected from the mounting surface on which the storage container 100 is placed on the mounting table 5. When the storage container 100 is transported from the storage shelf 3 to the mounting table 5, the side surface of the storage container 100 abuts against the positioning portion 6a, thereby positioning the storage container 100 on the mounting table 5.

[0033] The mounting table 5 is also provided with a fixing portion 6b that fixes the storage container 100 transported by the container transport unit 4 to the mounting table 5. The fixing portion 6b is provided at the upper end of the positioning portion 6a and is capable of pressing down on the upper surface of the storage container 100 placed on the mounting table 5 from above. The fixing portion 6b is capable of moving up and down relative to the positioning portion 6a, and is positioned above the upper surface of the storage container 100 before the storage container 100 is transported to the mounting table 5, and moves down after the storage container 100 is placed on the mounting table 5, thereby pressing down on the upper surface of the storage container 100. The provision of the fixing portion 6b makes it possible to stably fix the storage container 100 placed on the mounting table 5.

[0034] 3 to 8, a process for replacing the storage container 100 placed on the mounting table 5 will be described. Here, an example will be described in which the upper storage shelf 3 stores the storage container 100 containing the package substrate W, and the lower storage shelf 3 stores the empty storage container 100.

[0035] FIG. 3 shows the mounting table 5 without a storage container 100 placed thereon and positioned at the height of the first transport unit 10 (see FIG. 1). In this state, the mounting table 5 moves upward to the height of the upper storage shelf 3, as shown in FIG. 4. Then, as shown in FIG. 5, the conveyor 3a of the upper storage shelf 3 is driven, and the storage container 100 placed closest to the mounting table 5 is transported to the mounting table 5. At this time, the fixing part 6b is positioned upward, and the positioning part 6a positions the transported storage container 100. After the storage container 100 is placed on the mounting table 5, the fixing part 6b moves downward and presses down on the top surface of the storage container 100 to fix the storage container 100 to the mounting table 5. As shown in FIG. 6, the mounting table 5 with the storage container 100 placed thereon moves downward to the height of the first transport unit 10.

[0036] 7 shows a state in which the storage container 100 placed on the mounting table 5 is emptied, i.e., a state in which all of the package substrates W have been transported. In this state, the fixing portion 6b moves upward, and the fixing of the storage container 100 is released. Then, as shown in FIG. 8, the storage container 100 is transported to the lower storage shelf 3. When transporting to the lower storage shelf 3, for example, the empty storage container 100 is pushed back to the lower storage shelf 3 by a pressing mechanism (not shown) built into the positioning portion 6a.

[0037] In this way, the container transport unit 4 is configured to be able to transport the empty storage container 100 from the mounting table 5 to the storage shelf 3, and by repeating the steps of Figures 3 to 8, the storage containers 100 placed on the mounting table 5 can be continuously replaced. Therefore, the productivity of the processing device 1 can be further improved.

[0038] Furthermore, at least one shelf (here, the lower shelf 3) among the multiple storage shelves 3 is configured to store only emptied storage containers 100. This allows for smooth collection of used storage containers 100.

[0039] Although one embodiment of the present invention has been described above with reference to the accompanying drawings, it goes without saying that the present invention is not limited to such an embodiment. It is clear that a person skilled in the art can conceive of various modifications or alterations within the scope of the claims, and it is understood that these also naturally fall within the technical scope of the present invention. Furthermore, the components of the above embodiment may be combined in any manner as long as they do not deviate from the spirit of the invention.

[0040] For example, in the above-described embodiment, the container transport unit 4 is configured to include the conveyor 3a of the storage shelf 3, but this is not limited to this. The container transport unit 4 may be configured to be provided independently of the storage shelf 3, and may be configured to include, for example, an arm or the like that can hold the storage container 100.

[0041] This specification describes at least the following: In parentheses, components corresponding to those in the above-described embodiments are shown as examples, but the present invention is not limited to these.

[0042] (1) a mounting table (mounting table 5) on which a container (container 100) for accommodating a workpiece (package substrate W) is placed; a holding table (holding table 30) that holds the workpiece taken out from the container placed on the mounting table; a processing unit (processing unit 40) that processes the workpiece held on the holding table, a storage shelf (storage shelf 3) capable of storing at least one of the storage containers; and a transport unit (container transport unit 4) that transports the container stored in the storage shelf to the placement table. Processing equipment.

[0043] According to (1), the processing device is equipped with a storage shelf that stores at least one storage container and a transport unit that transports the storage container from the storage shelf to the mounting table, so that the storage container can be smoothly replaced on the mounting table, thereby improving the productivity of the processing device.

[0044] (2) The processing device according to (1), The storage shelf is configured to be able to store a plurality of the storage containers in a horizontal direction. Processing equipment.

[0045] According to (2), since a plurality of containers can be stored in the storage shelf, the productivity of the processing device can be further improved.

[0046] (3) The processing device according to (1) or (2), The storage shelf is provided adjacent to the placement table and has a conveyor (conveyor 3a) that transports the storage container to the placement table, The transport unit includes the conveyor. Processing equipment.

[0047] According to (3), the storage shelf can also function as a transport unit, which allows the processing device to be made smaller.

[0048] (4) A processing device according to any one of (1) to (3), The storage shelves are provided in plurality, one above the other, The mounting table is configured to be movable up and down to the height position of each storage shelf, or each storage shelf is configured to be movable up and down to the height position of the mounting table. Processing equipment.

[0049] According to (4), by providing multiple storage shelves above and below, it is possible to store many storage containers on the storage shelves in the limited space within the processing equipment. In addition, since the height positions of the loading table and each storage shelf can be adjusted, transportation from the storage shelves to the loading table can be performed smoothly.

[0050] (5) A processing device according to any one of (1) to (4), the transport unit is configured to be able to transport the emptied container from the placement table to the storage shelf. Processing equipment.

[0051] According to (5), the containers on the mounting table can be replaced continuously, which further improves the productivity of the processing device.

[0052] (6) The processing device according to (5), The storage shelves are provided in plurality, The storage shelves include shelves that store only the emptied storage containers. Processing equipment.

[0053] According to (6), the empty and used storage containers can be collected smoothly.

[0054] (7) A processing device according to any one of (1) to (6), The placement table is provided with a positioning unit (positioning unit 6a) that positions the storage container on an extension of a path along which the storage container is transported from the storage shelf to the placement table. Processing equipment.

[0055] According to (7), the container can be positioned and placed on the table.

[0056] (8) A processing device according to any one of (1) to (7), The mounting table is provided with a fixing portion (fixing portion 6b) that fixes the container transported by the transport unit to the mounting table. Processing equipment.

[0057] According to (8), the container placed on the table can be stably fixed. [Explanation of symbols]

[0058] 1 Processing equipment 3 Storage Shelves 3a Conveyor 4 Container transport unit (transport unit) 5. Mounting table 6a Positioning part 6b Fixed part 30 Holding table 40 Processing Unit 100 Storage Container W Package substrate (workpiece)

Claims

1. a mounting table on which a container for accommodating the workpiece is placed; a holding table for holding the workpiece taken out from the container placed on the placing table; a processing unit that processes the workpiece held on the holding table, a storage shelf capable of storing at least one of the storage containers; a transport unit that transports the container stored in the storage shelf to the storage table, Processing equipment.

2. The processing device according to claim 1, The storage shelf is configured to be able to store a plurality of the storage containers in a horizontal direction. Processing equipment.

3. The processing device according to claim 1 or 2, the storage shelf is provided adjacent to the placement table and has a conveyor that transports the storage container to the placement table; The transport unit includes the conveyor. Processing equipment.

4. The processing device according to claim 1 or 2, The storage shelves are provided in plurality, one above the other, The mounting table is configured to be movable up and down to the height position of each storage shelf, or each storage shelf is configured to be movable up and down to the height position of the mounting table. Processing equipment.

5. The processing device according to claim 1 or 2, the transport unit is configured to be able to transport the emptied container from the placement table to the storage shelf. Processing equipment.

6. The processing device according to claim 5, The storage shelves are provided in plurality, The storage shelves include shelves that store only the emptied storage containers. Processing equipment.

7. The processing device according to claim 1 or 2, The placement table is provided with a positioning unit that positions the storage container on an extension of a path along which the storage container is transported from the storage shelf to the placement table. Processing equipment.

8. The processing device according to claim 1 or 2, the mounting table is provided with a fixing portion that fixes the container transported by the transport unit to the mounting table; Processing equipment.

Images