Measurement work support method and measurement work support system

Abstract

This invention provides a measurement work support method and a measurement work support system that enable measurement work to be performed even in confined spaces by inserting a virtual measuring tool. [Solution] A virtual measuring tool 91 for measuring the dimensions of an object to be measured is used, along with a virtual operating tool 95 created and displayed at a predetermined distance from the virtual measuring tool 91. When the operator performs operations such as extending, rotating, or moving the virtual operating tool 95, the virtual measuring tool 91 also extends, rotates, or moves in sync with the operation of the virtual operating tool 95. The operator wearing the smart glasses 10 does not directly hold and operate the virtual measuring tool 91 with their hands, but rather operates the virtual operating tool 95 with their hands, and moves the virtual measuring tool 91 in conjunction with this operation to move it to the object to be measured. Even in narrow spaces where a hand cannot reach, the virtual measuring tool 91 can be placed and measurement work can be performed.

Description

Technical Field

[0001] The present invention relates to a measurement work support method and a measurement work support system for supporting a measurement work of measuring a measurement target inside an industrial device such as a substrate processing device that performs a predetermined process on a substrate using a virtual measurement tool. Substrates to be processed by a substrate processing device include, for example, semiconductor substrates, substrates for liquid crystal display devices, substrates for flat panel displays (FPDs), substrates for optical disks, substrates for magnetic disks, or substrates for solar cells.

Background Art

[0002] In recent years, technologies related to mixed reality (MR) have been approaching practical use. Mixed reality is a technology for constructing a space in which a virtual world is combined with the real world by projecting virtual objects onto the real world. In such mixed reality, technologies for obtaining the dimensions and distances of real objects and virtual objects are required. For example, it is necessary to measure the clearance in order to verify whether a virtual object will collide with a real object when the virtual object is arranged inside a substrate processing device. Patent Document 1 discloses a technique for measuring dimensions and distances in a mixed reality space using a virtual measurement tool (for example, a virtual ruler).

[0003] Typically, mixed reality is a technology realized by using a head-mounted display (HMD) such as smart glasses. Patent Document 2 discloses a technique in which an operator wearing smart glasses inputs an operation instruction by a hand gesture to a virtual object. In order to improve the efficiency of measurement work using a virtual measurement tool by applying this technique, a technique has also been devised in which an operator moves the virtual measurement tool by hand to a measurement target to measure a distance or the like.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

[0005] Using the technology described above, a worker can freely move a virtual measuring tool by hand within the mixed reality space recognized by the smart glasses. However, the virtual measuring tool cannot be placed in narrow spaces where the worker's hand cannot reach. Furthermore, even in spaces where the worker's hand can just barely fit, the smart glasses may perceive the space as a wall due to limitations in the resolution of the sensor that recognizes the space. In this case as well, the smart glasses cannot recognize that the worker's hand is in the space, and as a result, the virtual measuring tool held in the hand will not enter that space.

[0006] This invention has been made in view of the above problems, and aims to provide a measurement work support method and a measurement work support system that enable measurement work to be performed even in a narrow space by inserting a virtual measuring tool. [Means for solving the problem]

[0007] To solve the above problems, a first aspect of the present invention is a measurement work support method for supporting a predetermined measurement work using a virtual measuring tool, comprising: a generation step of generating and displaying an operating virtual tool for operating the virtual measuring tool using a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit; and a movement step of moving the virtual measuring tool to the object to be measured in conjunction with the operation of the operating virtual tool by an operator wearing the portable terminal.

[0008] Furthermore, in the second embodiment, in the measurement work support method according to the first embodiment, when the virtual measuring tool is moved to the object to be measured, the display unit displays the object to be measured, which has been captured by the imaging unit, in an enlarged view.

[0009] Furthermore, in the third embodiment, in the measurement work support method according to the first or second embodiment, the virtual tool for operation has the same size and shape as the virtual measuring tool.

[0010] Furthermore, the fourth embodiment is a measurement work support method according to the first or second embodiment, wherein the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool by a predetermined ratio.

[0011] Furthermore, the fifth embodiment is a measurement work support method according to any of the first to fourth embodiments, wherein in the movement step, when an operation of extension, rotation, or movement is performed on the operating virtual tool, the virtual measuring tool extends, rotates, or moves in synchronization with the operating virtual tool.

[0012] Furthermore, the sixth embodiment is a measurement work support method according to any of the first to fifth embodiments, wherein the movement step includes an auxiliary step in which the mobile terminal additionally moves the virtual measuring tool in response to instructions from an operator wearing the mobile terminal.

[0013] Furthermore, the seventh embodiment is a measurement work support method according to any of the first to sixth embodiments, wherein the object to be measured is located inside the industrial equipment.

[0014] Furthermore, the eighth aspect is a measurement work support method according to the seventh aspect, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.

[0015] Furthermore, the ninth embodiment is a measurement work support method according to any of the first to eighth embodiments, wherein the mobile terminal is smart glasses.

[0016] Furthermore, a tenth embodiment is a measurement work support system that assists in a predetermined measurement operation using a virtual measuring tool, comprising: a portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit; a generation unit that generates an operating virtual tool for operating the virtual measuring tool; and a movement unit that moves the virtual measuring tool to the object to be measured in conjunction with the operation of the operating virtual tool by an operator wearing the portable terminal.

[0017] Furthermore, in the 11th embodiment, in the measurement work support system according to the 10th embodiment, when the moving unit moves the virtual measuring tool to the object to be measured, the display unit displays the object to be measured, which has been captured by the imaging unit, in an enlarged view.

[0018] Furthermore, the twelfth embodiment is a measurement work support system according to the tenth or eleventh embodiment, wherein the virtual tool for operation has the same size and shape as the virtual measuring tool.

[0019] Furthermore, the 13th embodiment is a measurement work support system according to the 10th or 11th embodiment, wherein the virtual tool for operation has a shape obtained by enlarging or reducing the virtual measuring tool by a predetermined ratio.

[0020] Furthermore, the 14th embodiment is a measurement work support system according to any of the 10th to 13th embodiments, wherein the moving unit extends, rotates, or moves the virtual measuring tool in synchronization with the operating virtual tool when an operation of extending, rotating, or moving is performed on the operating virtual tool.

[0021] Furthermore, the 15th embodiment is a measurement work support system according to any of the 10th to 14th embodiments, wherein when the moving unit moves the virtual measuring tool, the virtual measuring tool is moved additionally in response to instructions from an operator wearing the portable terminal.

[0022] Furthermore, the 16th embodiment is a measurement work support system according to any of the 10th to 15th embodiments, wherein the object to be measured is located inside the industrial equipment.

[0023] Moreover, in the 17th aspect, in the measurement work support system according to the 16th aspect, the industrial equipment is a substrate processing apparatus that performs predetermined processing on a substrate.

[0024] Moreover, in the 18th aspect, in the measurement work support system according to any one of the 10th to 17th aspects, the portable terminal is smart glasses.

Advantages of the Invention

[0025] According to the measurement work support method according to the 1st to 9th aspects, in order to move the virtual measurement tool in conjunction with the operation on the operation virtual tool by the operator wearing the portable terminal to the measurement target, even in a narrow space where hands cannot reach, the virtual measurement tool can be inserted and the measurement work can be executed.

[0026] Particularly, according to the measurement work support method according to the 2nd aspect, since the display unit enlarges and displays the measurement target imaged by the imaging unit, the visibility of the measurement target is improved, and the measurement work using the virtual measurement tool becomes easier.

[0027] Particularly, according to the measurement work support method according to the 6th aspect, since the portable terminal additionally moves the virtual measurement tool in response to the instruction of the operator wearing the portable terminal, the operability with respect to the virtual measurement tool is improved, and the virtual measurement tool can be moved to the measurement target more easily.

[0028] According to the measurement work support system according to the 10th to 18th aspects, in order to move the virtual measurement tool in conjunction with the operation on the operation virtual tool by the operator wearing the portable terminal to the measurement target, even in a narrow space where hands cannot reach, the virtual measurement tool can be inserted and the measurement work can be executed.

[0029] Particularly, according to the measurement work support system according to the 11th aspect, since the display unit enlarges and displays the measurement target imaged by the imaging unit, the visibility of the measurement target is improved, and the measurement work using the virtual measurement tool becomes easier.

[0030] In particular, according to the measurement work support system of the 15th embodiment, the virtual measuring tool is moved in response to instructions from an operator wearing a mobile terminal, thereby improving the operability of the virtual measuring tool and making it easier to move the virtual measuring tool to the object to be measured. [Brief explanation of the drawing]

[0031] [Figure 1] This figure schematically shows the general configuration of the measurement work support system according to the present invention. [Figure 2] This is a plan view illustrating the internal layout of a substrate processing unit. [Figure 3] This is a plan view showing the schematic configuration of the processing unit. [Figure 4] This is a side view showing the schematic configuration of the processing unit. [Figure 5] This is a perspective view showing the appearance of smart glasses. [Figure 6] This is a block diagram showing the functional configuration of the control unit for smart glasses, a server, a work support terminal, and a substrate processing device. [Figure 7] This flowchart shows the procedure for the measurement work support method according to the present invention. [Figure 8] This diagram schematically illustrates the generation of a virtual tool for operation. [Figure 9] This diagram shows the movement of a virtual measuring tool when the operator extends or retracts the virtual tool used for operation. [Figure 10] This diagram shows the movement of a virtual measuring tool when the operator moves the virtual tool used for operation. [Figure 11] This diagram shows the movement of a virtual measuring tool when the operator rotates the virtual tool used for manipulation. [Figure 12] This figure shows the virtual measuring tool being moved to the spin chuck. [Figure 13] This figure shows an example of a virtual object displayed by the smart glasses of the second embodiment. [Modes for carrying out the invention]

[0032] Embodiments of the present invention will be described in detail below with reference to the drawings. In the following, expressions indicating relative or absolute positional relationships (e.g., "in one direction," "along one direction," "parallel," "orthogonal," "center," "concentric," "coaxial," etc.) shall, unless otherwise specified, not only strictly represent the positional relationship but also represent a state in which there is a relative displacement in terms of angle or distance within a tolerance or a range in which a similar level of function can be obtained. Similarly, expressions indicating equality (e.g., "identical," "equal," "homogeneous," etc.) shall, unless otherwise specified, not only represent a state in which there is a quantitatively strictly equal state but also represent a state in which there is a difference in which a tolerance or a similar level of function can be obtained. Furthermore, expressions indicating shape (e.g., "circular," "square," "cylindrical," etc.) shall, unless otherwise specified, not only strictly represent the geometrically precise shape but also represent a shape within a range in which a similar level of effect can be obtained, and may have, for example, irregularities or chamfers. Additionally, expressions such as "equipped," "possessing," "containing," "having," etc., for a component are not exclusive expressions that exclude the existence of other components. Furthermore, the expression "at least one of A, B, and C" includes "A only," "B only," "C only," "any two of A, B, and C," and "all of A, B, and C."

[0033] <First Embodiment> Figure 1 is a schematic diagram showing the general configuration of the measurement work support system according to the present invention. The measurement work support system according to the present invention comprises a plurality of substrate processing devices 40, smart glasses 10, a server 70, and a work support terminal 80. The controllers of the smart glasses 10 and the substrate processing devices 40 are connected to an information communication network 5 (e.g., the Internet) by wireless communication. The work support terminal 80 and the server 70 are connected to the information communication network 5 by wired connection. Information can be sent and received between devices connected to the information communication network 5, for example, information can be exchanged between the smart glasses 10 and the work support terminal 80. Note that the connection of each device to the information communication network 5 by wireless or wired connection is not limited to the above example and can be in an appropriate form (for example, the work support terminal 80 may be connected to the information communication network 5 wirelessly).

[0034] Multiple substrate processing units 40 are arranged side by side, for example, in a cleanroom. A cleanroom is a room located, for example, within a semiconductor device manufacturing plant, where a certain level of air cleanliness is ensured and temperature and humidity are controlled. Workers perform their tasks on the substrate processing units 40 within the cleanroom.

[0035] Figure 2 is a plan view illustrating the internal layout of the substrate processing apparatus 40. The substrate processing apparatus 40 is a single-wafer type substrate cleaning apparatus that processes one substrate W at a time, which is a disc-shaped silicon substrate such as a semiconductor wafer. The substrate processing apparatus 40 comprises an indexer unit 43, a plurality of processing units 50, a main transport robot 48, and a control unit 45.

[0036] The indexer unit 43 has a plurality (three in this embodiment) of load ports LP and indexer robots 41. A carrier C for accommodating a plurality of substrates W to be processed by the processing unit 50 is placed on each load port LP. The carrier C may take the form of a FOUP (front opening unified pod) that houses the substrates W in a sealed space, an SMIF (Standard Mechanical Interface) pod, or an OC (open cassette) that exposes the housed substrates W to the outside air.

[0037] The indexer robot 41 transports the substrate W between the carrier C and the main transport robot 48. The indexer robot 41 is, for example, an articulated robot and can transfer the substrate W to and from any of the carriers C placed on the multiple load ports LP.

[0038] Furthermore, the main transport robot 48 transports the substrates W between the indexer robot 41 and the processing unit 50. The main transport robot 48 is configured to be able to perform lifting and lowering movements, swivel movements, and forward and backward movements of its transport arm. The main transport robot 48 receives the unprocessed substrates W that the indexer robot 41 has taken out of the carrier C and carries them into the processing unit 50. Also, the indexer robot 41 receives the processed substrates W that the main transport robot 48 has unloaded from the processing unit 50 and stores them in the carrier C.

[0039] In the substrate processing apparatus 40, for example, three processing units 50 are stacked to form one stack (tower). Then, for example, four stacks are arranged around the main transport robot 48. In other words, one substrate processing apparatus 40 contains, for example, 12 (=3 × 4) processing units 50. Figure 2 schematically shows one of the three stacked processing units 50. Note that the number of processing units 50 in the substrate processing apparatus 40 is not limited to 12 and may be changed as appropriate.

[0040] The main transport robot 48 is positioned in the center of four stacked structures, each containing a processing unit 50. The main transport robot 48 receives the substrates W to be processed from the indexer robot 41 and places them inside the cups 55 of one of the processing units 50. The main transport robot 48 also unloads the processed substrates W from each processing unit 50 and hands them over to the indexer robot 41.

[0041] Furthermore, the substrate processing apparatus 40 includes a control unit 45. The control unit 45 is a general-purpose computer that controls the operation of the indexer robot 41, the main transport robot 48, and the mechanisms provided in each processing unit 50, which are located within the apparatus. The control unit 45 has a touch panel, which is an input / output interface provided on the wall of the apparatus, and a communication unit that communicates with the outside of the apparatus. In Figure 2, for illustrative purposes, the control unit 45 is shown within the indexer unit 43, but it is not limited to this, and the control unit 45 can be provided at an appropriate location within the substrate processing apparatus 40.

[0042] The following describes one of the twelve processing units 50 mounted on the substrate processing apparatus 40, but the other processing units 50 have a similar configuration except for differences in the arrangement of the nozzles.

[0043] The processing unit 50 discharges a processing solution onto a single substrate W to perform a cleaning process. The processing solution is a conceptual term that includes various chemicals and pure water. Examples of chemicals include solutions for etching or for removing particles. Specifically, SC-1 solution (a mixed solution of ammonium hydroxide, hydrogen peroxide, and pure water), SC-2 solution (a mixed solution of hydrochloric acid, hydrogen peroxide, and pure water), or hydrofluoric acid are used.

[0044] Figure 3 is a plan view showing the schematic configuration of the processing unit 50. Figure 4 is a side view showing the schematic configuration of the processing unit 50. The processing unit 50 comprises a processing chamber 51, a rotating holding unit 56, a processing liquid nozzle 60, a spray nozzle 65, and a cup 55. The processing chamber 51 is a hollow housing. The rotating holding unit 56, processing liquid nozzle 60, spray nozzle 65, and cup 55 are provided inside the processing chamber 51.

[0045] An outlet / outlet 52 is provided on the side wall of the processing chamber 51. The outlet / outlet 52 is opened and closed by a shutter 53. With the shutter 53 open, the main transport robot 48 loads and unloads substrates W into and out of the processing chamber 51 from the outlet / outlet 52. The shutter 53 closes the outlet / outlet 52 while the substrates W are being processed. When the outlet / outlet 52 is closed by the shutter 53, the inside of the processing chamber 51 becomes a semi-sealed space.

[0046] An FFU (Fan Filter Unit) 54 is provided at the ceiling of the processing chamber 51. The FFU 54 supplies clean air from the ceiling of the processing chamber 51 into the processing chamber 51. This creates a downflow of clean air within the processing chamber 51, moving from top to bottom. The gas supplied into the processing chamber 51 is discharged through an exhaust duct 59 located at the bottom of the processing chamber 51.

[0047] The rotating holding unit 56 includes a spin chuck 57 and a spin motor 58. The spin chuck 57 is a substrate holding unit that holds the substrate W in a horizontal position (a position in which the normal to the main surface of the substrate W is aligned with the vertical direction). The spin chuck 57 is, for example, a vacuum suction type chuck. The spin chuck 57 holds the central part of the lower surface of the substrate W by suction. The spin chuck 57 may be other types of chucks, such as a clamping type mechanical chuck that grips the edge of the substrate W.

[0048] The spin chuck 57 has a disc shape with a diameter smaller than the diameter of the substrate W. When the lower surface of the substrate W is held by the spin chuck 57, the peripheral edge of the substrate W protrudes outward beyond the outer edge of the spin chuck 57.

[0049] The spin chuck 57 is connected to the spin motor 58 via its motor shaft. That is, the upper end of the motor shaft of the spin motor 58 is connected to the center of the lower surface of the spin chuck 57. When the spin motor 58 rotates its motor shaft while the substrate W is held in contact with the spin chuck 57, the substrate W and the spin chuck 57 rotate in the horizontal plane around the axis of rotation which is aligned vertically.

[0050] A cup 55 is provided to surround the spin chuck 57. The cup 55 is movable up and down by a cup lifting mechanism 39 conceptually shown in Figure 4. The cup 55 has a roughly cylindrical shape, and the upper part of the cup 55 is inclined so that it approaches the spin chuck 57 as it goes upwards. However, the inner diameter of the upper part of the cup 55 is larger than the diameter of the substrate W. When processing the substrate W, the upper end of the cup 55 is higher than the height of the substrate W held by the spin chuck 57. Therefore, liquid that is scattered by centrifugal force from the substrate W, which is rotated by the rotating holding part 56 during processing, is caught and collected by the cup 55. The liquid collected by the cup 55 is discharged from a drain pipe (not shown) provided at the bottom of the cup 55. The cup 55 may also have a multi-stage structure with multiple collection ports for different purposes.

[0051] The processing liquid nozzle 60 comprises a nozzle tip 61, a swing arm 62, and a nozzle drive unit 63. The processing liquid nozzle 60 is a straight nozzle that discharges processing liquid in a continuous flow state, for example. The nozzle tip 61 is attached to the end of a swing arm 62 that extends substantially horizontally. Processing liquid is supplied to the nozzle tip 61 from a processing liquid supply source (not shown), and an outlet (not shown) is formed therein, from which the processing liquid is discharged. The swing arm 62 is moved up and down by the nozzle drive unit 63 and is oscillated in the horizontal plane around a pivot axis A1 along the vertical direction.

[0052] The nozzle drive unit 63 raises and lowers and swings the swing arm 62, causing the nozzle tip 61 to move between a processing position above the substrate W held by the rotating holding unit 56 and a standby position outside the cup 55. When the nozzle tip 61 is in the processing position, the processing liquid nozzle 60 discharges a chemical solution onto the substrate W held by the rotating holding unit 56, thereby carrying out, for example, a cleaning process of the substrate W. Alternatively, the processing liquid nozzle 60 discharges pure water onto the substrate W, thereby carrying out a pure water rinsing process of the substrate W.

[0053] On the other hand, the spray nozzle 65 comprises a nozzle tip 66, a swing arm 67, and a nozzle drive unit 68. The spray nozzle 65 is a two-fluid nozzle that, for example, mixes a processing liquid and a pressurized gas to generate droplets, and sprays the mixed fluid of the droplets and gas onto the substrate W. The nozzle tip 66 is attached to the end of a swing arm 67 that extends in a substantially horizontal direction. The processing liquid and pressurized gas are supplied to the nozzle tip 66 from a processing liquid supply source and a gas supply source (not shown), and they are mixed inside or outside the nozzle tip 61 to form a mixed fluid. The swing arm 67 is moved up and down by the nozzle drive unit 68 and is also oscillated in the horizontal plane around a pivot axis A2 along the vertical direction.

[0054] The nozzle drive unit 68 raises and lowers and swings the swing arm 67, causing the nozzle tip 66 to move between a processing position above the substrate W held by the rotating holding unit 56 and a standby position outside the cup 55. When the nozzle tip 66 is in the processing position, the spray nozzle 65 discharges a mixed fluid onto the substrate W held by the rotating holding unit 56, thereby carrying out, for example, a cleaning process of the substrate W.

[0055] As shown in Figure 3, the rotational movement of the processing liquid nozzle 60 and the rotational movement of the spray nozzle 65 may interfere with each other. That is, when the processing liquid nozzle 60 is in the processing position, if the spray nozzle 65 also moves above the substrate W, there is a risk of collision between the two. For this reason, an interlock is provided so that when either the processing liquid nozzle 60 or the spray nozzle 65 is in the processing position, the other cannot operate.

[0056] Furthermore, a maintenance light 69 is provided on the upper inside of the processing chamber 51. The maintenance light 69 is a light that illuminates the inside of the processing chamber 51 when the substrate processing device 40 is being maintained.

[0057] Operators performing tasks such as operating the substrate processing device 40 wear smart glasses 10. Smart glasses 10 are a type of wearable device using a head-mounted display (HMD) system. Smart glasses 10 are also devices for realizing AR (Augmented Reality) or MR (Mixed Reality). For example, Microsoft's "HoloLens" (registered trademark) can be used as smart glasses 10.

[0058] Figure 5 is a perspective view showing the appearance of the smart glasses 10. The smart glasses 10 include a visor 11 and a headband 12. The worker wears the smart glasses 10 by attaching the headband 12 to their head. The worker can adjust the length of the headband 12 to fit the size of their head. The headband 12 is also equipped with a power button, brightness button, volume button, etc.

[0059] The visor 11 includes various sensors and a display. The display is a see-through holographic lens. That is, the display is capable of displaying three-dimensional images in the worker's field of vision using holograms, while also transmitting light from real objects like a normal eyeglass lens. Therefore, a worker wearing the smart glasses 10 can view the displayed three-dimensional image while simultaneously viewing real objects through the display.

[0060] The sensors in the visor 11 include, for example, multiple visible light cameras that primarily image the area in front of the visor 11, an infrared camera that tracks the worker's line of sight, a depth sensor that measures the distance to an object, and an inertial measurement sensor. The infrared camera tracks the line of sight by measuring the eye movements of the wearer of the smart glasses 10. The depth sensor measures the distance to an object using, for example, the Time of Flight (ToF) method. The inertial measurement sensor consists of an accelerometer, a gyroscope, a magnetometer, etc.

[0061] Furthermore, the smart glasses 10 have a built-in computer equipped with a CPU, memory, and storage unit. The smart glasses 10 also have a wireless communication mechanism, and the computer in the smart glasses 10 uses this wireless communication mechanism to connect to the information and communication network 5. In addition, the smart glasses 10 are equipped with a microphone, speaker, and battery.

[0062] Figure 6 is a block diagram showing the functional configuration of the smart glasses 10, the server 70, the work support terminal 80, and the control unit 45 of the substrate processing device 40. The smart glasses 10 comprises an imaging unit 21, a communication unit 22, a display unit 23, a storage unit 24, and a spatial recognition unit 25 as hardware elements. The imaging unit 21 includes a visible light camera provided on the visor 11 described above. The imaging unit 21 includes, for example, four visible light cameras that image the area in front and diagonally in front, and can image the field of view of the worker wearing the smart glasses 10.

[0063] The communication unit 22 includes the wireless communication mechanism of the smart glasses 10 described above. The communication unit 22 transmits and receives data with the work support terminal 80 and the server 70 via the information communication network 5. The communication unit 22 can also transmit and receive data directly with the control unit 45 of the substrate processing device 40 if the distance is short. In other words, the communication unit 22 can transmit data and commands to the control unit 45 of the substrate processing device 40 directly or via the information communication network 5.

[0064] The display unit 23 includes the display of the visor 11 described above. The display unit 23 has a holographic processing device and displays a stereoscopic image at a predetermined spatial position using hologram technology. Note that the stereoscopic image displayed by the display unit 23 is not limited to three-dimensional shapes, but may also be two-dimensional, such as a document.

[0065] The memory unit 24 includes the memory and storage installed in the smart glasses 10. The memory and storage in the smart glasses 10 are, for example, DRAM (Dynamic Random Access Memory) and UFS (Universal Flash Storage), respectively. The memory unit 24 stores applications and data used by the computer in the smart glasses 10.

[0066] The spatial recognition unit 25 includes the depth sensor of the smart glasses 10 described above. The depth sensor can measure the distance to an object. The spatial recognition unit 25 can perform spatial mapping by scanning the space using the depth sensor. Specifically, the spatial recognition unit 25 creates a spatial mesh, which is mesh data, by scanning the space. Because the spatial recognition unit 25 uses a depth sensor, it is possible to scan the space even in dark places.

[0067] The smart glasses 10 also include an operation recognition unit 31, a generation unit 32, and a movement unit 33. These operation recognition unit 31, generation unit 32, and movement unit 33 are functional processing units realized by the CPU of the smart glasses 10 executing a predetermined processing program. The processing contents of the operation recognition unit 31, generation unit 32, and movement unit 33 will be described further later.

[0068] The control unit 45 of the substrate processing apparatus 40 controls the operation of mechanisms provided in the processing unit 50, such as the spin motor 58, the cup lifting mechanism 39, and the nozzle drive units 63 and 68. The control unit 45 of the substrate processing apparatus 40 can communicate with the communication unit 22 of the smart glasses 10, and can also control the operation of various mechanisms provided in the processing unit 50 according to operation command instructions transmitted from the smart glasses 10.

[0069] The work support terminal 80 is installed, for example, in the factory of a vendor that manufactures and performs maintenance and inspection of the circuit board processing equipment 40. The server 70 is installed in a cleanroom where multiple circuit board processing equipment 40 are installed. The work support terminal 80 and the server 70 are capable of communicating with the smart glasses 10 via the information and communication network 5. Furthermore, the work support terminal 80 and the server 70 are capable of communicating with each other via the information and communication network 5.

[0070] The work support terminal 80 and server 70 are typical computer systems. Specifically, the work support terminal 80 and server 70 include a CPU, which is a circuit for performing various calculations; ROM, which is a read-only memory for storing basic programs; RAM, which is a read-write memory for storing various information; a storage unit (for example, a magnetic disk or SSD) for storing control software and data; and a communication unit for communicating with the information and communication network 5.

[0071] The work support terminal 80 is a computer used, for example, by a vendor's work support staff member to assist workers in the cleanroom. The work support staff member can transmit various information from the work support terminal 80 to the smart glasses 10 worn by the workers in the cleanroom.

[0072] Server 70 is a computer in the measurement work support system according to the present invention that performs predetermined processing in response to requests from smart glasses 10 and work support terminal 80. Server 70 is equipped with a relatively large storage unit 74. Large-sized data created by smart glasses 10 and work support terminal 80 may be stored in the storage unit 74. Note that server 70 and work support terminal 80 are not essential elements.

[0073] Next, a measurement work support method using the measurement work support system having the above-described configuration will be explained. Figure 7 is a flowchart showing the procedure of the measurement work support method according to the present invention. In this embodiment, the case in which the measurement of the dimensions of components in the processing unit 50 of the substrate processing apparatus 40 is supported using a virtual measuring tool will be explained as an example. An operator wearing smart glasses 10 starts the measurement work in the vicinity of the processing unit 50 of the substrate processing apparatus 40.

[0074] First, the generation unit 32 of the smart glasses 10 generates a virtual measuring tool (step S1). While it is possible for an operator to measure the dimensions of the components inside the processing unit 50 using a real measuring tool (such as a ruler or measuring tape), there is a risk that the measuring tool may collide with components such as the processing liquid nozzle 60 when placed inside the processing chamber 51 of the processing unit 50. Generally, the processing liquid nozzle 60 and the like are precisely positioned, and it is undesirable for the measuring tool to physically collide with and impact the processing liquid nozzle 60 and the like. For this reason, the dimensions of the components inside the processing unit 50 are measured using a virtual measuring tool.

[0075] The virtual measuring tool is a virtual object generated by the generation unit 32 of the smart glasses 10, and the display unit 23 displays it as a three-dimensional image using hologram technology. In this embodiment, the virtual measuring tool is a virtual ruler, and the smart glasses 10 generates and displays a rod-shaped virtual measuring tool as a virtual ruler.

[0076] Next, the generation unit 32 of the smart glasses 10 generates a virtual tool for operation (step S2). Figure 8 is a schematic diagram showing the generation of the virtual tool for operation. In this embodiment, the generation unit 32 of the smart glasses 10 generates a virtual tool for operation 95 that is the same size and shape as the virtual measuring tool 91. That is, the virtual tool for operation 95 is also a virtual object generated by the generation unit 32 and has the same size and shape as the virtual measuring tool 91. The display unit 23 of the smart glasses 10 displays the virtual tool for operation 95 as a stereoscopic image at a predetermined distance from the virtual measuring tool 91. The relative position from the virtual measuring tool 91 to which the display unit 23 displays the virtual tool for operation 95 can be set in advance by the operator from the smart glasses 10. Note that in Figure 8, the virtual measuring tool 91 and the virtual tool for operation 95 are marked with scales for ease of understanding, but if this increases the load on the smart glasses 10 and slows down processing, it is preferable to display the virtual measuring tool 91 and the virtual tool for operation 95 without markings. In the following explanation, the virtual measuring tool 91 and the operating virtual tool 95 do not have scales.

[0077] An operator who wishes to perform operations such as movement on the virtual measuring tool 91 operates the virtual operating tool 95 with their own hands (step S3). The operator's hand movements (for example, pinching, moving, rotating the virtual operating tool 95) are captured and detected by the imaging unit 21 of the smart glasses 10, and the operation recognition unit 31 analyzes the operator's operations from the detection results. The movement unit 33 of the smart glasses 10 moves the virtual operating tool 95 according to the operator's operations and operates the virtual measuring tool 91 in synchronization with the movement of the virtual operating tool 95 (step S4).

[0078] Figure 9 shows the operation of the virtual measuring tool 91 when the operator extends or retracts the virtual operating tool 95. As shown in the lower part of Figure 9, when the operator manually retracts the virtual operating tool 95, the smart glasses 10 retract and display the virtual operating tool 95 in accordance with the operator's hand movements. Then, as shown in the upper part of Figure 9, the moving part 33 of the smart glasses 10 retracts and displays the virtual measuring tool 91 in synchronization with the retraction of the virtual operating tool 95. Conversely, when the operator manually extends the virtual operating tool 95, the smart glasses 10 extends the virtual operating tool 95 in accordance with the operator's hand movements, and simultaneously extends and displays the virtual measuring tool 91 in synchronization with it. The virtual operating tool 95 and the virtual measuring tool 91 are controlled to have the same size and shape, and the extension / retraction ratio of both is the same when the virtual operating tool 95 is extended or retracted.

[0079] Figure 10 shows the movement of the virtual measuring tool 91 when the operator moves the virtual operating tool 95. As shown in the lower part of Figure 10, when the operator moves the virtual operating tool 95 by hand in a predetermined direction by a predetermined distance, the smart glasses 10 move and display the virtual operating tool 95 in that direction by that distance according to the operator's hand movement. Then, as shown in the upper part of Figure 10, in synchronization with the movement of the virtual operating tool 95 in a predetermined direction by a predetermined distance, the movement unit 33 of the smart glasses 10 moves and displays the virtual measuring tool 91 in the same direction and by the same distance as the virtual operating tool 95. The direction and distance of movement of the virtual operating tool 95 and the virtual measuring tool 91 are completely identical. That is, the virtual operating tool 95 and the virtual measuring tool 91 move in parallel.

[0080] Figure 11 shows the operation of the virtual measuring tool 91 when the operator rotates the virtual operating tool 95. As shown in the lower part of Figure 11, when the operator rotates the virtual operating tool 95 by a predetermined angle with their hand, the smart glasses 10 rotate and display the virtual operating tool 95 by that angle in accordance with the operator's hand movement. Then, as shown in the upper part of Figure 11, in synchronization with the rotation of the virtual operating tool 95 by the predetermined angle, the moving part 33 of the smart glasses 10 rotates and displays the virtual measuring tool 91 by the same angle as the virtual operating tool 95. The rotation direction and rotation angle of the virtual operating tool 95 and the virtual measuring tool 91 are completely identical.

[0081] As described above, the virtual measuring tool 91 operates in complete synchronization with the operations performed on the virtual operating tool 95 by the operator wearing the smart glasses 10. Specifically, when the operator wearing the smart glasses 10 performs operations such as extending, rotating, or moving the virtual operating tool 95, the virtual measuring tool 91 also extends, rotates, or moves in sync with the operation of the virtual operating tool 95.

[0082] The operator wearing the smart glasses 10 performs the above operations on the operating virtual tool 95 to move the virtual measuring tool 91 to the object to be measured (step S5). For example, the operator moves the virtual measuring tool 91 from the discharge port 52 of the processing unit 50 into the processing chamber 51 and to the spin chuck 57, which is the object to be measured, by manipulating the operating virtual tool 95 with their hand. Figure 12 shows the virtual measuring tool 91 being moved to the spin chuck 57.

[0083] Here, the worker wearing the smart glasses 10 can also directly manipulate and move the virtual measuring tool 91 with their hands. However, in order to measure a real object using the virtual measuring tool 91, it is necessary to link the virtual object, the virtual measuring tool 91, with the real object, the processing unit 50, etc. The spatial recognition unit 25 of the smart glasses 10 scans the space including the processing unit 50, etc., and creates a spatial mesh. The spatial mesh created by the spatial recognition unit 25 of the smart glasses 10 is represented by a large number of triangular meshes. Various shapes, including curved surfaces and planes, are represented by a collection of connected triangles. Complex shapes, including bumps and dips, are represented by high-density triangles, while flat shapes are represented by relatively low-density triangles. The smart glasses 10 recognize the shape and size of objects by creating a spatial mesh.

[0084] However, depending on the resolution of the depth sensor in the spatial recognition unit 25, it may recognize, for example, the entrance / exit 52 of the processing unit 50 as a wall instead of an opening. In this case, although in real space a worker can insert their hand into the processing chamber 51 through the entrance / exit 52 of the processing unit 50, the smart glasses 10 cannot recognize that the hand is being inserted through a wall, and as a result, it cannot recognize that the virtual measuring tool 91, which is being operated by the worker's hand, is entering the processing chamber 51 through the entrance / exit 52. It would be possible to recognize the entrance / exit 52 as an opening by increasing the resolution of the depth sensor in the spatial recognition unit 25 and creating a finer spatial mesh, but in this case the amount of data would become too large and impractical for the smart glasses 10 to process. Furthermore, even in real space, it is not possible to insert the virtual measuring tool 91 by hand into a narrow space where a worker's hand cannot fit.

[0085] Therefore, in this embodiment, a virtual operating tool 95 is generated for operating the virtual measuring tool 91, and the operator indirectly moves the virtual measuring tool 91 by manually operating the virtual operating tool 95. Since the operator does not directly hold the virtual measuring tool 91 in their hands, and the virtual measuring tool 91 operates in conjunction with the operator's operation of the virtual operating tool 95, it is also possible to insert the virtual measuring tool 91 into the processing chamber 51 from the discharge entrance 52 of the processing unit 50. In order to allow the virtual measuring tool 91 to move freely, it is preferable to generate the virtual operating tool 95 in a wide open space in step S2.

[0086] As shown in Figure 12, when the virtual measuring tool 91 moves to the spin chuck 57, which is the object to be measured, the imaging unit 21 of the smart glasses 10 images the vicinity of the spin chuck 57, and the display unit 23 displays the spin chuck 57 and the virtual measuring tool 91 in magnified view (step S6). The operator can see the magnified spin chuck 57 and virtual measuring tool 91 through the visor 11 of the smart glasses 10. When performing the measurement work, the maintenance light 69 is turned on and the inside of the processing chamber 51 is illuminated, so the imaging unit 21 can properly image the spin chuck 57.

[0087] Next, the operator measures the size of the spin chuck 57, which is the object to be measured, using the virtual measuring tool 91 (step S7). The operator measures the size of the spin chuck 57 using the enlarged virtual measuring tool 91 while viewing the enlarged images of the spin chuck 57 and the virtual measuring tool 91 displayed by the smart glasses 10. For example, the operator moves the operating virtual tool 95 while viewing the enlarged image to align one end of the virtual measuring tool 91 with the end of the spin chuck 57. Subsequently, the operator extends or retracts the operating virtual tool 95 to align the other end of the virtual measuring tool 91 with the end of the spin chuck 57. As shown in Figure 12, the display unit 23 of the smart glasses 10 displays the length of the virtual measuring tool 91 at that time near the operating virtual tool 95. The operator can measure the size of the spin chuck 57, which is the object to be measured, by reading the displayed length of the virtual measuring tool 91.

[0088] In the first embodiment, a virtual measuring tool 91 for measuring the dimensions of the object to be measured is displayed, along with a virtual operating tool 95 located at a predetermined distance from the virtual measuring tool 91. The operator does not directly operate the virtual measuring tool 91, but indirectly operates it via the virtual operating tool 95. Specifically, when the operator extends, rotates, or moves the virtual operating tool 95, the virtual measuring tool 91 extends, rotates, or moves in sync with the movement of the virtual operating tool 95. In other words, the operator wearing the smart glasses 10 does not directly hold and operate the virtual measuring tool 91 with their hands, but rather operates the virtual operating tool 95 with their hands, and moves the virtual measuring tool 91 in conjunction with this operation to move it to the object to be measured. As a result, even in relatively small openings that the smart glasses 10 recognize as walls, or in narrow spaces where a hand cannot physically enter, the virtual measuring tool 91 can be inserted and moved to the object to be measured.

[0089] Furthermore, in the first embodiment, when the virtual measuring tool 91 is moved to the object to be measured, the display unit 23 displays the object to be measured, which has been captured by the imaging unit 21 of the smart glasses 10, in an enlarged view. This improves the visibility of the object to be measured, making the measurement work performed by the operator using the virtual measuring tool 91 easier.

[0090] <Second Embodiment> Next, a second embodiment of the present invention will be described. The configuration of the measurement work support system in the second embodiment is the same as in the first embodiment. Also, the procedure of the measurement work support method in the second embodiment is generally the same as in the first embodiment. In the second embodiment, in addition to operations on the operating virtual tool 95, the virtual measuring tool 91 is additionally moved as an auxiliary.

[0091] Figure 13 shows an example of a virtual object displayed by the smart glasses 10 of the second embodiment. In the second embodiment, in addition to the virtual measuring tool 91 and virtual operating tool 95 similar to those in the first embodiment, an operation panel 98 is also displayed. The operation panel 98 is also a virtual object displayed as a three-dimensional image by the display unit 23 of the smart glasses 10 using hologram technology. In the example in Figure 13, the operation panel 98 includes six types of operation buttons.

[0092] In the second embodiment as well, when the operator performs operations such as extending, rotating, or moving the operating virtual tool 95, the virtual measuring tool 91 also extends, rotates, or moves in synchronization with the operation of the operating virtual tool 95. In addition, in the second embodiment, the operator can also move the virtual measuring tool 91 further by giving instructions from the operation panel 98. The operator's hand movements toward the operation panel 98 are captured and detected by the imaging unit 21 of the smart glasses 10, and the operation recognition unit 31 analyzes which operation button the operator has selected from the detection results. The movement unit 33 of the smart glasses 10 further moves the virtual measuring tool 91 according to the content of the operation button selected by the operator.

[0093] In the second embodiment, for example, if there is not enough space to move the operating virtual tool 95, the operator gives instructions from the control panel 98 to additionally assist in moving the virtual measuring tool 91. For example, if the operator wants to push the virtual measuring tool 91 further into the loading / unloading port 52 of the processing unit 50, but it is difficult to move the operating virtual tool 95 further in, the operator selects the "Forward" operation button from the control panel 98. The smart glasses 10, recognizing this, move the virtual measuring tool 91 forward by a predetermined distance. This allows the operator to push the virtual measuring tool 91 further into the loading / unloading port 52 of the processing unit 50 and move it to the desired position.

[0094] In the second embodiment, the smart glasses 10 additionally assist in moving the virtual measuring tool 91 in response to instructions from the worker wearing the smart glasses 10. As a result, the operability of the virtual measuring tool 91 is improved, and it becomes easier to move the virtual measuring tool 91 to the object to be measured.

[0095] <Variation> While embodiments of the present invention have been described above, various modifications can be made to this invention without departing from its spirit. For example, in each of the above embodiments, the operating virtual tool 95 had the same size and shape as the virtual measuring tool 91, but the operating virtual tool 95 may have a shape that is enlarged or reduced by a predetermined ratio from the virtual measuring tool 91. For example, if the object to be measured is located inside a very large device, the virtual measuring tool 91 will also be considerably larger, and if the operating virtual tool 95 has the same size and shape as the virtual measuring tool 91, the operability of the operating virtual tool 95 will be significantly reduced. For this reason, in such cases, it is preferable that the operating virtual tool 95 has a shape that is reduced by a predetermined ratio from the virtual measuring tool 91. Conversely, if the object to be measured is a very small precision part, it is preferable that the operating virtual tool 95 has a shape that is enlarged by a predetermined ratio from the virtual measuring tool 91.

[0096] Furthermore, while the virtual measuring tool 91 was a virtual ruler in each of the above embodiments, it is not limited to this, and the virtual measuring tool 91 may be, for example, a virtual protractor for measuring angles. Alternatively, the virtual measuring tool 91 may be a virtual spirit level for measuring horizontality. In other words, the virtual measuring tool 91 may be any virtual measuring instrument for performing a predetermined measurement task.

[0097] Furthermore, in the second embodiment, the virtual measuring tool 91 was moved additionally using the operation panel 98, which is a virtual object. However, instead, the virtual measuring tool 91 may be moved additionally by, for example, the voice of an operator wearing smart glasses 10. Specifically, the smart glasses 10 are also equipped with a microphone, and the smart glasses 10, upon recognizing the operator's voice instructions, may move the virtual measuring tool 91 additionally according to those instructions. In other words, it is sufficient for the smart glasses 10 to move the virtual measuring tool 91 additionally and auxiliaryly in response to instructions from an operator wearing smart glasses 10.

[0098] Furthermore, in each of the above embodiments, the generation unit 32 of the smart glasses 10 generated the virtual operating tool 95 and the movement unit 33 moved the virtual measuring tool 91, but these processes may also be performed by the work support terminal 80 or the server 70.

[0099] Furthermore, while the above embodiments used smart glasses 10, the invention is not limited to this, and a mobile device such as a tablet or smartphone may be used instead of smart glasses 10. In other words, any mobile device equipped with an imaging unit and a communication unit will suffice. However, since using a tablet or the like would occupy the worker's hands, it is preferable to use a wearable device such as smart glasses 10.

[0100] Furthermore, the substrate processing apparatus 40 is not limited to a substrate cleaning apparatus, but may be any apparatus that performs a predetermined process on a substrate, such as a heat treatment apparatus, exposure apparatus, coating and developing apparatus, measuring apparatus, or inspection apparatus. If the substrate processing apparatus 40 is a substrate cleaning apparatus, it may be a single-wafer cleaning apparatus that cleans substrates one at a time, or a batch cleaning apparatus that cleans multiple substrates at once.

[0101] Furthermore, the measurement work support technology according to the present invention is not limited to the inside of a substrate processing apparatus, but can be used inside any industrial equipment. Examples of such industrial equipment include printing processing apparatuses, film deposition apparatuses, medical equipment, and visual inspection apparatuses. [Explanation of Symbols]

[0102] 5. Information and communication network 10 Smart Glasses 21 Imaging Department 22 Communications Department 23 Display section 24 Memory section 25 Spatial recognition section 31 Operation recognition section 32 Generation part 33 Mobile Unit 40 Substrate Processing Equipment 41 Indexer Robot 45 Control Unit 48 Main transport robot 50 processing units 55 cups 56 Rotating holding part 57 Spin Chuck 58 Spin Motor 60 Processing liquid nozzles 65 spray nozzles 70 servers 80 Work support terminals 91 Virtual Measuring Tools 95 Virtual Tools for Operation 98 Control Panel W board

Claims

1. A measurement work support method that assists in a predetermined measurement operation using a virtual measuring tool, A generation process that generates and displays a virtual tool for operating a virtual measuring tool using a mobile terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit, A movement process in which the virtual measuring tool is moved to the object to be measured in conjunction with the operation of the virtual operating tool by the worker wearing the mobile terminal, A measurement work support method comprising the following:

2. In the measurement work support method according to claim 1, A measurement work support method in which, when the virtual measuring tool is moved to the object to be measured, the display unit enlarges and displays the object to be measured as captured by the imaging unit.

3. In the measurement work support method according to claim 1, The aforementioned virtual tool for operation is a measurement work support method having the same size and shape as the aforementioned virtual measuring tool.

4. In the measurement work support method according to claim 1, The aforementioned virtual tool for operation is a measurement work support method having a shape obtained by enlarging or reducing the virtual measuring tool by a predetermined ratio.

5. In the measurement work support method according to claim 1, In the aforementioned movement step, when an operation of extending, rotating, or moving is performed on the operating virtual tool, the virtual measuring tool extends, rotates, or moves in synchronization with the operating virtual tool. This is a measurement work support method.

6. In the measurement work support method according to claim 1, The aforementioned movement step is a measurement work support method that includes an auxiliary step in which the mobile terminal further moves the virtual measuring tool in response to instructions from the worker wearing the mobile terminal.

7. In the measurement work support method according to claim 1, The aforementioned measurement target is located inside industrial equipment and is a method for supporting measurement operations.

8. In the measurement work support method according to claim 7, The aforementioned industrial equipment is a substrate processing apparatus that performs predetermined processing on a substrate, and a measurement work support method.

9. In the measurement work support method according to any one of claims 1 to 8, The aforementioned mobile device is a smart glasses, which is a method for assisting with measurement tasks.

10. A measurement work support system that assists with a predetermined measurement task using a virtual measuring tool, A portable terminal equipped with a display unit, a communication unit, an imaging unit, and a spatial recognition unit, A generation unit that generates a virtual tool for operating a virtual measuring tool, A moving unit that moves the virtual measuring tool to the object to be measured in conjunction with the operation of the virtual operating tool by the worker wearing the mobile terminal, A measurement work support system equipped with the following features.

11. In the measurement work support system according to claim 10, A measurement work support system in which, when the moving unit moves the virtual measuring tool to the object to be measured, the display unit displays an enlarged image of the object to be measured captured by the imaging unit.

12. In the measurement work support system according to claim 10, The aforementioned virtual tool for operation is a measurement work support system having the same size and shape as the aforementioned virtual measuring tool.

13. In the measurement work support system according to claim 10, The aforementioned virtual tool for operation is a measurement work support system having a shape obtained by enlarging or reducing the virtual measuring tool by a predetermined ratio.

14. In the measurement work support system according to claim 10, The moving unit is a measurement work support system that extends, extends, rotates, or moves the virtual measuring tool in synchronization with the virtual operating tool when the virtual operating tool is extended, rotated, or moved.

15. In the measurement work support system according to claim 10, A measurement work support system that, when the moving unit moves the virtual measuring tool, additionally moves the virtual measuring tool in response to instructions from an operator wearing the portable terminal.

16. In the measurement work support system according to claim 10, The object to be measured is a measurement support system located inside industrial equipment.

17. In the measurement work support system according to claim 16, The aforementioned industrial equipment is a measurement work support system which is a substrate processing device that performs predetermined processing on a substrate.

18. In the measurement work support system according to any one of claims 10 to 17, The aforementioned mobile device is a smart glasses system that assists with measurement tasks.

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