Conveying system

Abstract

We provide a transport system that can suppress the decline in productivity. [Solution] The transport system 2 is a system in which an automatic transport device 6 transports workpieces to a processing device 4 which includes multiple processing devices. The transport system 2 includes an inspection unit 8 that inspects workpieces processed by the processing device 4 and generates good / bad information, and a server 10 that controls the automatic transport device 6 based on the information from the inspection unit 8. The processing device 4 includes a first processing device A that processes workpieces first, and a second processing device B that processes workpieces after the first processing device A. The server 10 allows the automatic transport device 6 to continue operating if the information from the inspection unit 8 is good, and restricts the operation of the automatic transport device 6 if the information from the inspection unit 8 is bad.

Description

Technical Field

[0004] ,

[0002] , , , , , , , , ,

[0006] , , , , ,

[0005] , , , , , , ,

[0003] ,

[0001] The present invention relates to a transport system in which an automatic transport device transports a workpiece to a processing device including a plurality of processing devices.

Background Art

[0002] A wafer on which a plurality of devices such as ICs and LSIs are partitioned by a division line and formed on the surface is ground on the back surface by a grinding device to form a desired thickness, and then divided into individual device chips by a cutting device and a laser processing device. Each divided device chip is used in electrical devices such as mobile phones and personal computers.

[0003] In addition, the applicant has developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as a grinding device, a cutting device, and a laser processing device and a wafer storage device that stores a plurality of wafers, and an automatic transport device travels between the processing devices to transport wafers from the wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1). A travel guide line for guiding the travel of the automatic transport device is formed in the travel path, and the automatic transport device can be guided to the target processing device

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

[0007] According to the present invention, the following transport system is provided that solves the above problems. That is, In a transport system in which an automated transport device transports workpieces to a processing apparatus that includes multiple processing devices, An inspection unit that inspects the workpiece processed by the processing device and generates information on whether it is good or bad, A server that controls the automated transport device based on information from the inspection unit, Equipped with, The processing apparatus comprises a first processing apparatus that processes the workpiece first, and a second processing apparatus that processes the workpiece after the first processing apparatus. The server is provided with a transport system that allows the automated transport device to continue operating if the information from the inspection unit is good, and restricts the operation of the automated transport device to avoid the processing unit that produced the defective workpiece if the information from the inspection unit is bad.

[0008] Preferably, the server instructs the automated transport device to transport any workpieces processed by the processing device to the inspection unit. The server may also instruct the automated transport device to transport the workpieces to the next processing device if the inspected workpieces are good. The processing device is equipped with a workpiece storage device for storing workpieces, and it is desirable that the server instructs the automated transport device to collect defective workpieces and store them in the workpiece storage device. Two or more of the first processing devices may be installed, and two or more of the second processing devices may be installed.

[0009] The server is equipped with a processing path storage unit that stores which processing unit a workpiece was processed through, and it is preferable that the server identifies the processing unit that produced the defective workpiece and stops the operation of the identified processing unit.

[0010] The inspection unit comprises a first inspection unit corresponding to the first processing unit and a second inspection unit corresponding to the second processing unit, and the server may identify the processing unit that produced the defective workpiece based on information from the first inspection unit and information from the second inspection unit, and stop the operation of the identified processing unit.

[0011] The inspection unit may be installed in the processing apparatus. It is preferable that a travel panel on which the automated transport device travels is provided on the top plate of the processing apparatus, and that a travel guide line is formed on the travel panel to guide the movement of the automated transport device. [Effects of the Invention]

[0012] The transport system of the present invention is In a transport system in which an automated transport device transports workpieces to a processing device that includes multiple processing devices, An inspection unit that inspects the workpiece processed by the processing device and generates information on whether it is good or bad, A server that controls the automated transport device based on information from the inspection unit, Equipped with, The processing apparatus comprises a first processing apparatus that processes the workpiece first, and a second processing apparatus that processes the workpiece after the first processing apparatus. The server allows the automated transport device to continue operating if the information from the inspection unit is good, and restricts the operation of the automated transport device to avoid the processing unit that produced the defective workpiece if the information from the inspection unit is bad. This prevents the continued generation of defective workpieces and suppresses a decline in productivity. [Brief explanation of the drawing]

[0013] [Figure 1] A schematic diagram illustrating the transport system according to the present invention. [Figure 2] A table showing the types and number of processing units in the transport system according to the present invention. [Figure 3] A table showing the work route and inspection results. [Figure 4](a) Table showing the results of inspection by the first inspection unit after processing in the first processing device, (b) Table showing the results of inspection by the second inspection unit after processing in the second processing device, (c) Table showing the results of inspection by the third inspection unit after processing in the third processing device.

Embodiment for Carrying out the Invention

[0014] Hereinafter, a preferred embodiment of the conveyance system according to the present invention will be described with reference to the drawings.

[0015] (Conveyance System 2) As shown in FIG. 1, the conveyance system 2 is a system in which an automatic conveyance device 6 conveys a work to a processing device 4 including a plurality of processing devices. The conveyance system 2 includes an inspection unit 8 that inspects the work processed by the processing device 4 to generate good / bad information, and a server 10 that controls the automatic conveyance device 6 based on the information of the inspection unit 8.

[0016] (Processing Device 4 of Conveyance System 2) The processing device 4 shown in FIG. 1 includes a work storage device S that stores a work such as a semiconductor wafer, a first processing device A that first processes the work, and a second processing device B that processes the work after the first processing device A. The work storage device S has an unprocessed work storage section that stores unprocessed works, a processed work storage section that stores processed works, and a defective work storage section that stores defective works, although not shown in the figure. Examples of the first and second processing devices A and B include a cutting device that performs cutting processing on the work, a laser processing device that performs laser processing on the work, a grinding device that performs grinding processing on the work, and the like. In the form shown in FIG. 1, one each of the first processing device A, the second processing device B, and the work storage device S is provided, but two or more of each may be provided. Also, in the form shown in FIG. 1, there are two types of processing devices, the first and second processing devices A and B, that perform processing on the work, but three or more types may be provided.

[0017] (Automatic Conveyance Device 6 of Conveyance System 2) The automatic transfer device 6 is a device that transfers workpieces to the processing device 4 and the inspection unit 8. Although five automatic transfer devices 6 are shown in FIG. 1, the number of automatic transfer devices 6 can be set to any number according to the specifications of the transfer system 2. The automatic transfer device 6 is configured to be communicable with the server 10 via the antenna 12, and transfers workpieces to the processing device 4 and the inspection unit 8 based on instructions from the server 10.

[0018] As shown in FIG. 1, on the top plate of each of the processing device 4 (first and second processing devices A and B, workpiece storage device S) and the inspection unit 8, a traveling panel 14 for the automatic transfer device 6 to travel is provided. Regarding the planar shape of the traveling panel 14, in this embodiment, it is formed in a rectangular shape as a whole, but it is not limited to a rectangular shape and can be formed in any planar shape according to the number and arrangement of the processing device 4 and the inspection unit 8. A fall prevention wall 16 for preventing the automatic transfer device 6 from falling from the traveling panel 14 is attached around the traveling panel 14.

[0019] On the upper surface of the traveling panel 14, a traveling guide line 18 for guiding the travel of the automatic transfer device 6 is formed. The automatic transfer device 6 travels on the traveling panel 14 along the traveling guide line 18 and transfers workpieces to the processing device 4 and the inspection unit 8. Regarding the shape of the traveling guide line 18, in this embodiment, it is formed in a grid shape, but it is not limited to a grid shape and can be formed in any shape according to the planar shape of the traveling panel 14 and the like.

[0020] Also, on the traveling panel 14, above the processing device 4 and the inspection unit 8, a workpiece transfer port 14a is formed. Although not shown, on the top plates of the processing device 4 and the inspection unit 8, transfer ports corresponding to the position and size of the transfer port 14a of the traveling panel 14 are also formed. Then, the workpiece is transferred between the automatic transfer device 6 and the processing device 4 and the inspection unit 8 through the transfer port 14a of the traveling panel 14 and the transfer ports on the top plates of the processing device 4 and the inspection unit 8.

[0021] (Inspection unit 8 of transport system 2) The inspection unit 8 inspects the workpieces processed by the processing unit 4, generates good / bad information, and transmits the generated information to the server 10. Although not shown in the figures, the inspection unit 8 may be configured to include, for example, an imaging means for capturing images of the workpieces, an information generation means for generating good / bad information based on the images of the workpieces captured by the imaging means, and a transmission means for transmitting the information generated by the information generation means to the server 10. The transmission means of the inspection unit 8 may be configured to communicate with the server 10 via the antenna 12.

[0022] For example, when the processing of the processing device 4 is cutting, the inspection unit 8 uses an imaging means to image the workpiece after cutting, and generates "good" information using an information generation means if the size and number of chips (chips) caused in the workpiece by cutting are within an acceptable range, or generates "defective" information using an information generation means if the size and number of chips caused in the workpiece by cutting are outside an acceptable range, and transmits the generated information to the server 10 using a transmission means.

[0023] Furthermore, when the processing of the processing device 4 is laser processing, the inspection unit 8 may image the workpiece after laser processing, generate "good" information if the size and quantity of debris attached to the workpiece by laser processing is within an acceptable range, or generate "bad" information if the size and quantity of debris attached to the workpiece by laser processing is outside an acceptable range, and transmit the generated information to the server 10.

[0024] The configuration of the inspection unit 8 is not limited to the above configuration. For example, the inspection unit 8 may include a thickness measuring means for measuring the thickness of a workpiece. Furthermore, when the processing of the processing device 4 is grinding, the inspection unit 8 may measure the thickness of the workpiece after grinding using the thickness measuring means, generate "good" information if the measured thickness of the workpiece is within the acceptable range, or generate "bad" information if the measured thickness of the workpiece is outside the acceptable range, and transmit the generated information to the server 10. In this way, the inspection unit 8 may be equipped with inspection means corresponding to the processing content of the processing device 4. That is, the inspection unit 8 may include a first inspection unit (not shown) that includes inspection means corresponding to the processing content of the first processing device A, and a second inspection unit (not shown) that includes inspection means corresponding to the processing content of the second processing device B. If there are three or more processing devices that process the workpiece, the inspection unit 8 may be equipped with three or more inspection means corresponding to each of the three or more processing contents.

[0025] In the configuration shown in Figure 1, the inspection unit 8 is provided separately from the processing unit 4, but it may also be installed in the processing unit 4. For example, a first inspection unit including inspection means corresponding to the processing content of the first processing unit A may be installed in the first processing unit A, and a second inspection unit including inspection means corresponding to the processing content of the second processing unit B may be installed in the second processing unit B.

[0026] (Server 10 of transport system 2) The server 10 includes a housing 20, a screen 22 mounted on the outer surface of the housing 20, and a computer (not shown) housed within the housing 20, which has a processor and memory, and is configured to communicate with the automated transport device 6 and the inspection unit 8 via an antenna 12.

[0027] As described above, the server 10 receives information generated by the inspection unit 8. The server 10 then controls the operation of the automated transport device 6 based on the information from the inspection unit 8. Specifically, if the information from the inspection unit 8 is good, the server 10 allows the automated transport device 6 to continue operating. On the other hand, if the information from the inspection unit 8 is bad, the server 10 restricts the operation of the automated transport device 6 to avoid the processing unit 4 that generated the defective workpiece. As a result, the transport system 2 does not continue to generate defective workpieces, thus suppressing a decline in productivity.

[0028] (Operation of transport system 2: First form) Next, the first mode of operation of the transport system 2 will be explained with reference to Figures 2 and 3. The processing unit 4 of the transport system 2 described here includes, in addition to the workpiece storage device S, four first processing units A1 to A4, three second processing units B1 to B3, and four third processing units C1 to C4, as shown in Figure 2. The four first processing units A1 to A4 are collectively referred to as "first processing unit A," and the same applies to the second and third processing units.

[0029] In the first configuration, the workpiece is transported by an automatic transfer device 6 from the workpiece storage device S to one of the first processing devices A1 to A4, then to one of the second processing devices B1 to B3, then to one of the third processing devices C1 to C4, and finally to the inspection unit 8. The inspection unit 8 described herein includes inspection means corresponding to the first, second, and third processing contents.

[0030] Figure 3 shows an example in which 13 workpieces W1 to W13 are transported to the first, second, and third processing units A, B, and C, and the inspection unit 8. For example, workpiece W1 is transported in the order of the first processing unit A1, the second processing unit B1, and the third processing unit C1, and after the first, second, and third processing is performed, it is inspected by the inspection unit 8. Similarly, workpieces W2 to W13 are transported sequentially along the path shown in Figure 3, and after the first, second, and third processing is performed, they are inspected by the inspection unit 8.

[0031] Although all workpieces W1 to W13 shown in Figure 3 are inspected in the inspection unit 8, from the viewpoint of preventing a decrease in productivity, some of the workpieces processed by the first, second, and third processing units A, B, and C may be transported to the inspection unit 8. In other words, the server 10 can issue instructions to the automatic transport device 6 to transport any workpieces processed by the processing unit 4 to the inspection unit 8.

[0032] Figure 3 also shows an example of the inspection results from the inspection unit 8. The inspection results from the inspection unit 8 are transmitted to the server 10. As described above, if the information from the inspection unit 8 is good, the server 10 continues the operation of the automatic transport device 6. If the information from the inspection unit 8 is bad, the server 10 restricts the operation of the automatic transport device 6 to avoid the processing unit 4 that produced the defective workpieces. In the example shown in Figure 3, the inspection results for workpieces W1, W3, W4, W7, W8, and W10-W13 are good, but the inspection results for workpieces W2, W5, W6, and W9 are bad. Therefore, in the example shown in Figure 3, since the information from the inspection unit 8 transmitted to the server 10 contains defects, the server 10 restricts the operation of the automatic transport device 6 to avoid the processing unit 4 that produced the defective workpieces.

[0033] The operation restrictions of the automatic transport device 6 will now be explained. As described above, when workpieces W1 to W13 are sequentially transported to the first, second, and third processing devices A, B, and C, and after the first, second, and third processing is performed, they are inspected by the inspection unit 8, it is preferable that the server 10 is equipped with a processing path storage unit that stores which processing device 4 each workpiece W1 to W13 was processed through. This allows the server 10 to identify the processing device 4 that produced the defective workpieces based on the information stored in the processing path storage unit (the path of workpieces W1 to W13). In the example shown in Figure 3, since the defective workpieces W2, W5, W6, and W9 all passed through the second processing device B2, the server 10 identifies the processing device 4 that produced the defective workpieces as the second processing device B2. The server 10 then restricts the operation of the automatic transport device 6 to avoid the second processing device B2 and stops the operation of the second processing device B2. Furthermore, once the server 10 identifies the processing device 4 that generated the defective workpieces, it instructs the automatic transport device 6 to collect the defective workpieces W2, W5, W6, and W9 and store them in the defective workpiece storage section of the workpiece storage device S.

[0034] (Operation of transport system 2: Second form) Next, the second mode of operation of the transport system 2 will be described with reference to Figures 2 and 4. The processing unit 4 of the transport system 2 described here includes, as described above, the workpiece storage device S, as well as, as shown in Figure 2, four first processing units A1 to A4, three second processing units B1 to B3, and four third processing units C1 to C4. The inspection unit 8 of the transport system 2 described here includes a first inspection unit corresponding to the first processing unit A, a second inspection unit corresponding to the second processing unit B, and a third inspection unit corresponding to the third processing unit C.

[0035] In the second configuration, the workpiece is transported by the automatic transfer device 6 from the workpiece storage device S to one of the first processing devices A1 to A4, where the first processing is performed. Next, the workpiece is transported by the automatic transfer device 6 to the first inspection unit, where it is inspected. If the first inspection unit is installed in each of the first processing devices A1 to A4, the workpiece transport by the automatic transfer device 6 (transport from the first processing device A to the first inspection unit) can be omitted, thereby shortening the workpiece transport time and improving productivity.

[0036] Figure 4(a) shows an example in which seven workpieces W1 to W7 are transported to one of the first processing units A1 to A4 and then inspected in the first inspection unit. In the example shown in Figure 4(a), since the inspection results for workpieces W1 to W7 are good, the server 10 instructs the automatic transport device 6 to transport workpieces W1 to W7 to the second processing unit B (the next processing unit 4).

[0037] In the example shown in Figure 4(a), all inspection results for workpieces W1 to W7 that underwent the first processing were good. However, if any defective workpieces were found among those that underwent the first processing, the server 10 would identify the processing unit 4 that produced the defective workpiece based on the information from the first inspection unit, restrict the operation of the automatic transport device 6 to avoid the identified processing unit 4, and stop the operation of the identified processing unit 4. The server 10 would also instruct the automatic transport device 6 to collect the defective workpiece and store it in the defective workpiece storage section of the workpiece storage device S.

[0038] After inspection in the first inspection unit, the workpieces W1 to W7 are transported by the automatic transport device 6 to one of the second processing units B1 to B3, where the second processing is performed. Subsequently, the workpieces W1 to W7 are transported by the automatic transport device 6 to the second inspection unit, where they are inspected (see Figure 4(b)). Similar to the first inspection unit, it is preferable that the second inspection unit be installed in each of the second processing units B1 to B3 in order to shorten the workpiece transport time.

[0039] In the example shown in Figure 4(b), the inspection results for workpieces W2, W5, and W7 processed by the second processing unit B2, and workpiece W3 processed by the second processing unit B3 are good, but the inspection results for workpieces W1, W4, and W6 processed by the second processing unit B1 are bad. As described above, workpieces W1 to W7, which had good inspection results in the first inspection unit, are transported to the second processing units B1 to B4, where the second processing is applied to workpieces W1 to W7, and then the second inspection unit inspects workpieces W1 to W7. Therefore, based on the information from the first inspection unit and the information from the second inspection unit, the server 10 identifies the processing unit B1 as the second processing unit that produced the defective workpieces. The server 10 then restricts the operation of the automatic transport device 6 and stops the operation of the second processing unit B1 in order to avoid the second processing unit B1 that produced the defective workpieces. Furthermore, once the server 10 identifies the processing unit 4 that generated the defective workpiece, it instructs the automatic transport device 6 to collect the defective workpiece and store it in the defective workpiece storage section of the workpiece storage device S.

[0040] After being inspected in the second inspection unit, workpieces W2, W3, W5, and W7 that passed the inspection are transported by the automatic transport device 6 to one of the third processing units C1 to C4 (the next processing unit 4), where the third processing is performed. Subsequently, workpieces W2, W3, W5, and W7 are transported by the automatic transport device 6 to the third inspection unit, where they are inspected (see Figure 4(c)). Similar to the first and second inspection units, it is preferable that the third inspection unit be installed in each of the third processing units C1 to C4 in order to shorten the workpiece transport time.

[0041] In the example shown in Figure 4(c), the inspection results for all four workpieces W2, W3, W5, and W7 are good. Therefore, the server 10 instructs the automatic transport device 6 to transport workpieces W2, W3, W5, and W7 and store them in the processed workpiece storage section of the workpiece storage device S.

[0042] In the example shown in Figure 4(c), all inspection results for workpieces W2, W3, W5, and W7 that underwent the third processing were good. However, if any of the workpieces that underwent the third processing were found to be defective, the server 10 would identify the processing unit 4 that produced the defective workpiece based on the information from the first inspection unit, the second inspection unit, and the third inspection unit. The server 10 would then restrict the operation of the automatic transport device 6 to avoid the identified processing unit 4 and stop the operation of the identified processing unit 4. The server 10 would also instruct the automatic transport device 6 to collect the defective workpiece and store it in the defective workpiece storage section of the workpiece storage device S.

[0043] As described above, in the transport system 2 of this embodiment, if the information from the inspection unit 8 is good, the operation of the automatic transport device 6 is continued. If the information from the inspection unit 8 is bad, the operation of the automatic transport device 6 is restricted to avoid the processing device 4 that generated the defective workpiece. Therefore, in the transport system 2, defective workpieces are not continuously generated, and thus the deterioration of productivity is suppressed.

[0044] Furthermore, the server 10 may be configured to notify the operator by displaying a message on screen 22 once it has identified the processing unit 4 that produced the defective workpiece. This allows the operator to inspect and repair the processing unit 4 that produced the defective workpiece as soon as possible. [Explanation of symbols]

[0045] 2: Conveying system 4: Processing Unit A: First processing unit B: Second processing unit S: Work storage device 6: Automated transport device 8: Inspection Unit 10: Server 14: Driving Panel 18: Driving guidance line

Claims

1. In a transport system in which an automated transport device transports workpieces to a processing device that includes multiple processing devices, An inspection unit that inspects the workpiece processed by the processing device and generates information on whether it is good or bad, A server that controls the automated transport device based on information from the inspection unit, Equipped with, The processing apparatus comprises a first processing apparatus that processes the workpiece first, and a second processing apparatus that processes the workpiece after the first processing apparatus. The server is a transport system that allows the automated transport device to continue operating if the information from the inspection unit is good, and restricts the operation of the automated transport device to avoid the processing unit that produced the defective workpiece if the information from the inspection unit is bad.

2. The transport system according to claim 1, wherein the server issues instructions to the automated transport device to transport any workpiece processed by the processing device to the inspection unit.

3. The transport system according to claim 2, wherein the server issues instructions to the automated transport device, and if the inspected workpiece is good, the server transports the workpiece to the next processing device.

4. The processing apparatus includes a workpiece storage device for accommodating workpieces, The transport system according to claim 1, wherein the server issues instructions to the automated transport device to collect defective workpieces and store them in the workpiece storage device.

5. The transport system according to claim 1, wherein two or more of the first processing devices are installed, and two or more of the second processing devices are installed.

6. The server includes a processing path storage unit that stores which processing unit the workpiece was processed through, The transport system according to claim 5, which identifies the processing unit that produced the defective workpiece and stops the operation of the identified processing unit.

7. The inspection unit comprises a first inspection unit corresponding to the first processing device and a second inspection unit corresponding to the second processing device. The transport system according to claim 5, wherein the server identifies the processing unit that produced the defective workpiece based on information from the first inspection unit and information from the second inspection unit, and stops the operation of the identified processing unit.

8. The transport system according to claim 1, wherein the inspection unit is installed in the processing apparatus.

9. The transport system according to claim 1, wherein a travel panel on which the automatic transport device travels is disposed on the top plate of the processing device, and a travel guidance line for guiding the movement of the automatic transport device is formed on the travel panel.

Images