Dark wet laboratory for scientific research

Abstract

This provides a dark wet laboratory for scientific research that enables 24-hour uninterrupted experimental operation and unattended operation, creating a dark laboratory environment that significantly increases the efficiency and utilization rate of equipment in scientific research, improves the reliability of experimental results, reduces experimental costs, and effectively ensures the safety of researchers. [Solution] A dark wet laboratory for scientific research, comprising a laboratory body, a wet machine platform, a transport robot, sample supply and recovery equipment, chemical supply and recovery equipment and control equipment used to provide a clean space, wherein the transport robot comprises a mobile device 21, a robotic arm device 22, at least one end effector 23 and an accessory device 24, the accessory device being movable in accordance with the mobile device and providing temporary storage space, the robotic arm device being attached to the mobile device and at least one end effector being attached to the robotic arm device for gripping semiconductor samples and / or chemical tanks.

Description

Technical Field

[0001] This application relates to the field of semiconductor cleaning and etching technology, and particularly to a dark wet laboratory for scientific research.

Background Art

[0002] In the process of manufacturing semiconductor micro-nano devices, it is necessary to use a wet machine tool to clean the wafer surface and perform acid and alkali etching. Conventional enterprise-level wet machine tools have a high degree of automation, but are only suitable for mass production and cannot meet flexible and diverse scientific research scenarios. To solve the above problems, Patent Document 1 discloses a fully automated system and machine tool for wet etching in scientific research that meets the needs of university scientific research and improves scientific research efficiency and process stability. However, this design can only achieve the automation of one machine tool, and the wet laboratory constructed thereby still depends on manual operation by personnel and has the following deficiencies.

[0003] 1. It is difficult to further improve scientific research efficiency. 2. It is difficult to fully utilize wet machine tools for scientific research. 3. The experimental results are unstable and lack reliability. 4. The difficulty of laboratory management is high and the experimental cost is relatively high. 5. There are risks to personnel safety. 6. The efficiency of data collection and analysis is low.

[0004] Therefore, there is a need to provide a new design solution to solve the above deficiencies.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] In light of this, the purpose of this application is to provide a dark wet laboratory for scientific research that solves the problems caused by conventional wet laboratories for scientific research still relying on manual operation by personnel. [Means for solving the problem]

[0007] To achieve the above technical objective, this application provides a dark wet laboratory for scientific research. The dark wet laboratory for scientific research includes a laboratory body, a wet machine platform, a transport robot, a sample supply and recovery device, a chemical solution supply and recovery device, and a control device. The aforementioned laboratory body is used to provide a clean space. The aforementioned wet machine stand is installed in the clean space for processing semiconductor samples. The sample supply and recovery equipment is installed in the clean space to provide semiconductor samples to be processed and to store semiconductor samples after processing is complete. The aforementioned chemical supply and recovery equipment is installed in the clean space to provide the chemical tank to be replaced and to house the replaced chemical tank. The transport robot is mounted in the clean space to transport semiconductor samples and / or chemical tanks between the wet machine platform, the transport robot, the sample supply and recovery equipment, and the chemical supply and recovery equipment. The transport robot includes a moving device, a robotic arm device, at least one end effector, and an auxiliary device. The aforementioned auxiliary device is movable in accordance with the aforementioned mobile device and provides temporary storage space. The robot arm device is attached to the moving device, At least one of the end effectors is attached to the robotic arm device for gripping a semiconductor sample and / or a chemical tank. The control device is connected via communication to the wet machine stand, the transport robot, the sample supply and recovery device, and the chemical solution supply and recovery device.

[0008] Furthermore, the auxiliary device is detachably connected to the mobile device. The aforementioned dark wet laboratory for scientific research further includes an attached fixed frame, The aforementioned auxiliary fixing frame is attached to the clean space in order to fix the auxiliary device. The transport robot further includes a fork device, The fork device is attached to the moving device in order to lift the auxiliary device located on the auxiliary fixed frame.

[0009] Furthermore, the fork device includes a fork lifting device and a pallet. A relief cavity for the pallet to enter is provided below the auxiliary device of the aforementioned auxiliary fixing frame. The fork lifting device is attached to the top of the moving device, and its drive end is connected to the pallet in order to move the pallet up and down, forking the attached device away from the attached fixing frame, or forking the attached device back into the attached fixing frame.

[0010] Furthermore, several first fork positioning structures are provided on the top of the pallet. The bottom of the aforementioned auxiliary device is provided with several second fork positioning structures that are individually positioned and fitted into the first fork positioning structure.

[0011] Furthermore, the auxiliary device is provided with a chamber for forming the temporary storage space. The aforementioned auxiliary device is equipped with an auxiliary opening / closing door mechanism for controlling the opening and closing of the chamber.

[0012] Furthermore, a first docking structure is provided at the bottom of the aforementioned auxiliary device. The first docking structure is provided with a first conductive structure that is electrically connected to the accompanying opening and closing door mechanism. The moving device is provided with a second docking structure that can be docked with the first docking structure. The second docking structure is provided with a second conductive structure that can come into contact with the first conductive structure to conduct electricity. The transfer robot is further used to supply power to the accompanying opening and closing door mechanism when the first conductive structure and the second conductive structure come into contact and conduct electricity.

[0013] Furthermore, the first docking structure is provided with a first ventilation structure that communicates with the temporary storage space. The second docking structure is provided with a second ventilation structure that can be docked with the first ventilation structure to conduct. A gas supply device that is connected to and conducts with the second ventilation structure is attached to the moving device.

[0014] Furthermore, the accompanying fixed frame includes two support plates that are symmetrically installed at intervals. On both side surfaces of the accompanying device, stopper protrusions that can contact and abut in a one-to-one correspondence with the top of the support plate are provided respectively.

[0015] Furthermore, a floating correction module is provided on the accompanying fixed frame. The floating correction module is used to correct the position of the moving device or the fork device that penetrates into the accompanying fixed frame so that the first fork positioning structure faces the second fork positioning structure.

[0016] Furthermore, an anticorrosion lining is provided in the temporary storage space.

[0017] Furthermore, there are at least two end effectors. One of the end effectors is used to grip semiconductor samples. Another end effector is used to grip the chemical solution tank. The end effector is detachably connected to the robot arm device via a joint assembly. The aforementioned auxiliary device is provided with a mounting station for mounting the end effector.

[0018] Furthermore, a sample carrier mechanism is installed below the position of the sample input / output port of the wet machine stand for placing semiconductor material to be sent to the sample input / output port or for placing semiconductor material being sent out from the sample input / output port.

[0019] Furthermore, the sample carrier mechanism includes a carrier plate and a sample carrier drive assembly. The carrier plate is rotatably mounted on the wet machine base. The sample carrier drive assembly is mounted on the wet machine base and connected to the carrier plate in order to rotate the carrier plate.

[0020] Furthermore, a chemical carrier mechanism for mounting a chemical tank is installed at the location of the liquid storage chamber of the wet machine stand. The aforementioned chemical solution carrier mechanism includes a support base, a chemical solution carrier drive assembly, and a liquid collection member. The aforementioned support stand is used to place the chemical tank on, The aforementioned drug solution carrier drive assembly is connected to the support base to drive the support base to extend or retract from the liquid storage chamber, The liquid collection member is detachably attached to the chemical tank.

[0021] Furthermore, the liquid collection member includes a liquid collection tube and a liquid collection cover. The aforementioned liquid intake pipe can be inserted into the chemical tank through the chemical tank's chemical inlet. The liquid collection cover is fitted onto the liquid collection tube and is capable of fitting onto the liquid collection port in order to close the liquid collection port. A fixing member for securing the liquid collection member to be attached is vertically mounted on the aforementioned support base. The fixing member is a hollow columnar rod structure for movably inserting the liquid intake pipe.

[0022] Furthermore, the sample supply and recovery device includes the main body of the device and a sample displacement device. A sample chamber is provided inside the main body of the aforementioned device. At the bottom of the sample chamber, a first load / unload station, a second load / unload station, a first temporary storage station, and a second temporary storage station are provided. A first load / unload opening is provided at a position on the main body of the device corresponding to the first load / unload station, which connects the sample chamber with the area outside the clean space. The aforementioned first load / unload opening is fitted with a first door that can be opened and closed. A second load / unload opening is provided at a position on the main body of the device corresponding to the second load / unload station, which connects the sample chamber and the clean space. The aforementioned second load / unload opening is fitted with a second door that can be opened and closed. The sample displacement device is attached to the sample chamber for moving semiconductor samples between the first load / unload station, the second load / unload station, the first temporary storage station, and the second temporary storage station.

[0023] Furthermore, a human-computer interaction device is attached to the first load / unload opening side of the main body of the device, which is connected to the control device and extends outside the clean space.

[0024] Furthermore, the chemical solution supply and recovery device includes a chemical solution buffer box. The aforementioned chemical buffer box is provided with a buffer chamber for storing the chemical tank to be loaded or the replaced chemical tank. The aforementioned chemical buffer box is provided with a buffer opening. A buffer door that can be opened and closed is attached to the buffer opening.

[0025] Furthermore, the ground of the clean space is divided from the outside inward into an outer annular region, an inner annular region, and a central region located within the inner annular region. The wet machine base is installed in the outer annular region or the central region, The sample supply and recovery device and the chemical solution supply and recovery device are installed in the outer annular region.

[0026] Furthermore, the robotic arm device is a collaborative robotic arm.

[0027] Furthermore, the aforementioned mobile device is an AGV (Automated Guided Vehicle). [Effects of the Invention]

[0028] As can be seen from the above technical proposal, the dark wet laboratory for scientific research described in this application is configured to link a transport robot, sample supply and recovery equipment, chemical solution supply and recovery equipment, and control equipment with the wet machine platform, thereby enabling 24-hour uninterrupted experimental operation and unmanned operation, and realizing a dark laboratory, which has the following beneficial effects.

[0029] 1. By automatically scheduling operations according to work instructions entered by the experimenter, and by performing automated distribution of semiconductor samples, automated exchange of chemical tanks, automated processing of semiconductor samples, and automated collection and analysis of experimental data according to the schedule, the efficiency of scientific research and the utilization rate of equipment can be significantly increased.

[0030] 2. The experimenter does not need to come into contact with the chemical solution, effectively ensuring the experimenter's safety.

[0031] 3. This method effectively reduces experimental costs by avoiding situations such as the waste of chemical solutions and samples due to the instability of manual operation by experimenters, and the damage to equipment due to misoperation.

[0032] 4. Automate the experimental process for semiconductor materials to enhance the stability and accuracy of the tests, thereby improving the reliability of the experimental results.

[0033] 5. Improve laboratory management levels through automation and unmanned operation.

[0034] 6. An auxiliary device is positioned to move in conjunction with the mobile device, enabling the transport of multiple semiconductor samples or multiple chemical tanks at once, reducing the frequency of back-and-forth material retrieval, and further increasing efficiency.

[0035] 7. This has significant promotional importance for advancing the development of scientific research and technology, improving the efficiency of semiconductor technology research and development, and accelerating the progress of research and development.

[0036] To more clearly describe the embodiments of this application or the prior art, the following is a brief introduction to the drawings that may be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only a few embodiments of this application, and those skilled in the art can obtain other drawings based on these without any creative effort. [Brief explanation of the drawing]

[0037] [Figure 1] This is a perspective view of the dark wet laboratory for scientific research described in this application, without the laboratory body itself. [Figure 2] This is a perspective view of the transport robot for a dark wet laboratory for scientific research, as described in this application. [Figure 3] This is a perspective view showing the fitting of the auxiliary equipment and the auxiliary fixing frame of the dark wet laboratory for scientific research according to this application. [Figure 4]This is a perspective view of the transport robot for a dark wet laboratory for scientific research, as described in this application, without any accompanying equipment. [Figure 5] This is a first perspective view of the ancillary equipment for a dark wet laboratory for scientific research, as described in this application. [Figure 6] This is a perspective view of the wet machine stand for a dark wet laboratory for scientific research, as described in this application. [Figure 7] This is a schematic diagram of the disassembled chemical carrier mechanism with a chemical tank for a dark wet laboratory for scientific research, as described in this application. [Figure 8] This is a perspective view of a chemical carrier mechanism with a chemical tank for a dark wet laboratory for scientific research, as described in this application. [Figure 9] This is a perspective view of the sample supply and recovery equipment for a dark wet laboratory for scientific research, as described in this application, with a portion of the equipment body missing. [Figure 10] This is a perspective view of a chemical buffer box for a dark wet laboratory for scientific research, as described in this application. [Modes for carrying out the invention]

[0038] The following clearly and completely describes the technical concepts of the embodiments of this application with reference to the drawings. Clearly, the embodiments described are some, but not all, embodiments of the embodiments of this application. All other embodiments that can be obtained based on the embodiments of this application without the creative effort of a person skilled in the art are all within the scope of protection of the embodiments of this application.

[0039] In the description of the embodiments of this application, the directions or positional relationships indicated by terms such as "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" are directions or positional relationships shown based on the drawings and are merely for the convenience and simplification of the description in this application. They do not indicate or imply that the referred device or element has a specific direction or must be configured and operated in a specific direction, and should not be understood as limitations on the embodiments of this application. Furthermore, the terms "first," "second," and "third" are used solely for descriptive purposes and should not be understood as indicating or implying relative importance.

[0040] In the description of the embodiments of this application, unless otherwise explicitly defined or limited, the terms “attachment,” “connection,” and “connection” should be understood in a broad sense, and may include, for example, a fixed connection, a replaceable connection, or an integral connection; a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, or internal communication between two elements. A person skilled in the art may understand the specific meaning of the above terms in the embodiments of this application depending on the specific circumstances.

[0041] Embodiments of this application disclose a dark wet laboratory for scientific research.

[0042] Referring to Figures 1 and 2, as one embodiment, the Dark Wet Laboratory for Scientific Research according to the embodiment of this application is: The laboratory includes a main body (not shown), a wet machine stand 1, a transport robot 2, a sample supply and recovery device 3, a chemical solution supply and recovery device 4, and a control device 5.

[0043] The laboratory body is used to provide a clean space. The laboratory body may be constructed of, for example, fire-resistant and explosion-proof panels, and may be equipped with, for example, fire protection and air purification equipment, thereby ensuring the cleanliness and safety of the clean space. Those skilled in the art may, but are not limited to, make appropriate modifications based on this.

[0044] The wet etching machine 1 is installed in a clean space for processing semiconductor samples. Multiple wet etching machines 1 in this application may be installed as needed, and they may be different types of machine equipment. For example, if there are multiple wet etching machines 1, one of them may be an organic wet etching machine, two of them may be oxide cleaning machines, one of them may be a metal etching machine, one of them may be a KOH cleaning machine, one of them may be an HF cleaning machine, one of them may be a mask cleaning machine, etc. Those skilled in the art may select as needed, and are not limited thereto. Each machine equipment is designed or adapted based on the fully automated wet etching system and machine equipment for scientific research disclosed in Patent Document 1, and a detailed description is omitted.

[0045] In the case of multiple wet machine platforms, process interconnection can be achieved, and the order of operations can be determined.

[0046] In wet experiments, there are few processes that are performed continuously; generally, they are carried out in stages, such as dry processes, photoetching, and film coating. Therefore, when multiple machines are connected to each other, they need to cooperate with other equipment, for example, The wafer surface is cleaned using the Organic Wet Machine / Oxide Cleaning Table No. 2 (for a short time, just a few minutes), followed by processes such as photoetching / dry etching. The adhesive is then removed using the Organic Wet Machine / Oxide Cleaning Table No. 2 / HF Cleaning Table (the time may vary from 10 min to 2 hours), and wet etching is performed on the KOH Cleaning Table (approximately 8 hours).

[0047] In the case of multiple wet processing machines, the order in which each wet processing machine is used is rationally planned based on the process sequence, reservation time, process duration, sampling time, etc., enabling multiple sets of experiments to be conducted simultaneously and sequentially in an orderly manner.

[0048] This system enables multiple sets of experiments to be performed on the corresponding wet machine platform 1, according to the planned sequence / experiment type.

[0049] The sample supply and recovery device 3 is installed in a clean space to supply semiconductor samples to be processed and to store the processed semiconductor samples.

[0050] The chemical supply and recovery equipment 4 is installed in a clean space to provide the chemical tank 15 to be replaced and to store the replaced chemical tank 15.

[0051] The transport robot 2 is mounted in a clean space to transport semiconductor samples and / or chemical tanks 15 between the wet machine platform 1, the transport robot 2, the sample supply and recovery equipment 3, and the chemical supply and recovery equipment 4.

[0052] The transport robot 2 includes a moving device 21, a robotic arm device 22, at least one end effector 23, and an auxiliary device 24.

[0053] The auxiliary device 24 is movable in conjunction with the mobile device 21 and provides a temporary storage space which can be used to temporarily store semiconductor samples to be loaded, processed semiconductor samples, chemical tanks 15 to be replaced, or replaced chemical tanks 15.

[0054] The robotic arm device 22 is attached to the mobile device 21, and at least one end effector 23 is attached to the robotic arm device 22 for gripping a semiconductor sample and / or a chemical tank 15. The end effector 23 may be a conventional mechanical jaw, which can grip a cassette 33 or jig holder containing a semiconductor sample, and may also grip the chemical tank 15 and the tank cover of the chemical tank 15, and may be used to loosen or tighten the tank cover by a rotating mechanism at the end of the robotic arm, but is not specifically limited.

[0055] The control device 5 is connected via communication to the wet machine stand 1, the transport robot 2, the sample supply and recovery device 3, and the chemical solution supply and recovery device 4.

[0056] The dark wet laboratory for scientific research described in this application is configured to link a transport robot 2, sample supply and recovery equipment 3, chemical solution supply and recovery equipment 4, and control equipment 5 with a wet machine base 1, thereby enabling 24-hour uninterrupted experimental operation and unmanned operation, and realizing a dark laboratory, which has the following beneficial effects.

[0057] 1. The system automatically schedules operations according to work instructions entered by the experimenter, and performs automated distribution of semiconductor samples, automated replacement of chemical tanks 15, automated processing of semiconductor samples, automated collection and analysis of experimental data, etc., thereby significantly increasing the efficiency of scientific research and the utilization rate of equipment.

[0058] 2. The experimenter does not need to come into contact with the chemical solution, effectively ensuring the experimenter's safety.

[0059] 3. This method effectively reduces experimental costs by avoiding situations such as the waste of chemical solutions and samples due to the instability of manual operation by experimenters, and the damage to equipment due to misoperation.

[0060] 4. Automate the experimental process for semiconductor material 331 to enhance the stability and accuracy of the tests, thereby improving the reliability of the experimental results.

[0061] 5. Improve laboratory management levels through automation and unmanned operation.

[0062] 6. An auxiliary device 24 is provided that moves in conjunction with the mobile device 21, enabling the transport of multiple semiconductor samples or multiple chemical tanks 15 at once, reducing the frequency of back-and-forth material retrieval, and further increasing efficiency.

[0063] 7. This has significant promotional importance for advancing the development of scientific research and technology, improving the efficiency of semiconductor technology research and development, and accelerating the progress of research and development.

[0064] The above describes Embodiment 1 of the dark wet laboratory for scientific research according to the embodiments of this application. The following describes Embodiment 2 of the dark wet laboratory for scientific research according to the embodiments of this application, specifically referring to Figures 1 to 10.

[0065] Based on the above embodiment 1, Furthermore, to enhance ease of use, different auxiliary devices 24 can be selected and used as needed, and these auxiliary devices 24 are arranged to be detachably connected to the mobile device 21. Specifically, different auxiliary devices 24 are arranged to correspond to one wet machine stand 1, and if loading / unloading / chemical solution replacement is required for the corresponding wet machine stand 1, the corresponding auxiliary device should be replaced.

[0066] Specifically, as shown in Figure 3, this application includes an attached fixing frame 26, which is mounted in a clean space to secure the attached device 24.

[0067] As shown in Figure 4, the transport robot 2 further includes a fork device 27, which is attached to the moving device 21 to lift the attached devices 24 located on the attached fixing frame 26. Multiple attached devices 24 are arranged, and multiple corresponding attached fixing frames 26 are arranged. Each attached device 24 is attached and fixed to the corresponding frame. When an attached device 24 needs to be used, the fork device 27 is used to pick up the corresponding attached device 24, thereby connecting the attached device 24 to the moving device 21. When an attached device 24 does not need to be used, it can be returned to the attached fixing frame 26.

[0068] Furthermore, as shown in Figure 4, the fork device 27 includes a fork lifting device 271 and a pallet 272.

[0069] A relief cavity is provided below the attached device 24 of the attached fixing frame 26 for the pallet 272 to enter, thereby ensuring that the moving device 21 can move together with the pallet 272 below the corresponding attached device 24.

[0070] The fork lifting device 271 is attached to the top of the moving device 21, and its drive end is connected to the pallet 272 in order to move the pallet 272 up and down, forking the attached device 24 away from the attached fixing frame 26, or forking the attached device 24 back into the attached fixing frame 26.

[0071] When removing and using the pallet, the moving device 21 enters the escape cavity and positions the pallet 272 directly below the corresponding accessory device 24. Then the fork lifting device 271 moves the pallet 272 upward until it can lift the accessory device 24. The moving device 21 then moves further and exits the escape cavity, detaching the accessory device 24 from the accessory fixing frame 26. Finally, the fork lifting device 271 moves the pallet 272 down to its initial position.

[0072] When returning, the fork lifting device 271 moves the pallet 272 up to a certain height, then the moving device 21 enters the escape cavity and positions the pallet 272 above the corresponding attached fixing frame 26, and then the fork lifting device 271 moves the pallet 272 down to a certain height and returns the attached device 24 to the attached fixing frame 26.

[0073] The robot arm device 22 in this application may be attached to the top of the fork lifting device 271, and the fork lifting device 271 may be a screw slide or the like, as long as it satisfies the lifting control requirements, and is not limited to this.

[0074] Furthermore, as shown in Figures 4 and 5, in order to achieve accurate forking and to ensure a secure connection between the auxiliary device 24 and the pallet 272 after forking, several first fork positioning structures 2721 are provided on the top of the pallet 272, and accordingly, several second fork positioning structures 241 are provided on the bottom of the auxiliary device 24, which are positioned and fitted one by one with the first fork positioning structures 2721.

[0075] The first fork positioning structure 2721 may be a positioning projection, and there may be four of them; accordingly, the second fork positioning structure 241 may be a positioning groove, and the number of grooves may match the number of positioning projections; a person skilled in the art may, but is not limited to, make appropriate modifications based on this.

[0076] To supply power to the electric door mechanism, the auxiliary device 24 is equipped with a power supply battery, and accordingly, the auxiliary fixed frame 26 may be equipped with a charging device to charge the battery in the fixed auxiliary device 24, and the charging method may be wireless charging or contact charging. Of course, the auxiliary opening and closing door mechanism 242 is a manual door mechanism, and the end effector 23 may be moved by a robotic arm device 22 to simulate a human hand and perform the door opening and closing operation.

[0077] Of course, power may also be supplied to the electric door mechanism via the transport robot 2. Specifically, a first docking structure (not shown) is provided at the bottom of the auxiliary device 24.

[0078] The first docking structure is provided with a first conductive structure that is electrically connected to the accompanying opening / closing door mechanism 242. This first conductive structure may be, but is not limited to, a contact-type conductive pin head or another conductive joint structure.

[0079] The moving device 21 is provided with a first docking structure and a second docking structure 211 that can be docked and fitted together. The first docking structure and the second docking structure 211 may be fitted together with each other, and the fitting design is similar to the projection and groove fitting design mentioned above, so a detailed explanation is omitted. In addition, in order to avoid the vertical movement of the pallet 272 being affected, the pallet 272 is provided with a relief opening for the second docking structure 211 to extend when it moves.

[0080] The second docking structure 211 is provided with a second conductive structure that can contact and conduct electricity with the first conductive structure. The transport robot 2 is further used to supply power to the accompanying door opening / closing mechanism 242 when the first conductive structure and the second conductive structure come into contact and conduct electricity. Specifically, the pallet 272 rises to lift the accompanying device 24 from the accompanying fixed frame 26, then moves out of the accompanying fixed frame 26 and then descends to its initial position. At this time, the first docking structure of the accompanying device 24 located on the pallet 272 completes docking with the second docking structure 211, the first conductive structure and the second conductive structure come into contact and conduct electricity, and the transport robot 2 controls the power management module to supply power to the accompanying door opening / closing mechanism 242.

[0081] Furthermore, the first docking structure may be provided with a first ventilation structure that communicates with a temporary storage space, and the second docking structure 211 may be provided with a second ventilation structure that can dock with and conduct electricity to the first ventilation structure, and the first ventilation structure and the second ventilation structure may be gas joints that are inserted into each other.

[0082] The mobile device 21 is fitted with a gas supply device (not shown) that is connected to and conducts electricity with a second ventilation structure. This gas supply device may be a gas pump device, which can supply gas to or exhaust gas from the temporary storage space. The following applications are possible by installing the gas supply device.

[0083] 1. Supply gas to the temporary storage space to maintain a micro-positive pressure state (the gas supply device may be equipped with a filtration device to filter the gas supplied to the temporary storage space). In this way, even when the space is open, the overflow gas generated by the micro-positive pressure can be used to block the entry of external dust into the temporary storage space, thereby maintaining the cleanliness of the temporary storage space.

[0084] 2. Clean the temporary storage space by purging or vacuuming it.

[0085] 3. If the accompanying door opening / closing mechanism 242 is pneumatically driven, it can be used as a power source to control the accompanying door opening / closing mechanism 242.

[0086] Furthermore, the accompanying fixing frame 26 may be provided with a floating straightening module (not shown) to ensure that the subsequent first fork positioning structure 2721 docks precisely with the second fork positioning structure 241 and lifts the accompanying device 24 by enabling precise alignment fitting between the first fork positioning structure 2721 and the second fork positioning structure 241.

[0087] The floating correction module is used to correct the position of the moving device 21 or fork device 27 that enters the accompanying fixed frame 26 so that the first fork positioning structure 2721 is directly facing the second fork positioning structure 241.

[0088] This floating straightening module may be specifically configured to include a first straightener and a second straightener (both the first and second straighteners include an expander and a push plate, the expander being able to connect to the push plate and move the push plate, and further push the incoming moving device 21 to complete the straightening). The first straighteners consist of two that are symmetrically positioned along a direction perpendicular to the direction in which the moving device 21 enters and exits the attached fixed frame 26. When the moving device 21 enters the attached fixed frame 26, the two first straighteners are positioned on either side of themselves, and the expansion and contraction of the first straighteners corrects the position of the moving device 21 in the first direction. The second straightener is positioned along the direction in which the moving device 21 enters and exits the attached fixed frame 26. When the moving device 21 enters the attached fixed frame 26, the second direction corrector is positioned at the tip of the moving device 21, and the extension and retraction motion of the second direction corrects the position of the moving device 21 in the second direction.

[0089] To better achieve accurate positioning and fitting, a relatively large positioning guide groove may be placed around the positioning groove, which has a guide inclined surface to guide the positioning projection into the positioning groove to achieve physical positioning. Of course, to achieve sensing positioning, a positioning sensor such as a scanner may be added to the bottom of the auxiliary device 24, and a sensing structure (such as a label code) that can be sensed by the positioning sensor may be installed on the pallet 272. Those skilled in the art may make appropriate modifications based on this, but are not limited thereto.

[0090] Furthermore, in order to prevent corrosion due to the effects of chemicals in the temporary storage space, a corrosion-resistant lining is provided in the temporary storage space. This corrosion-resistant lining may be made of materials such as PFA, Teflon®, or PP, and is not specifically limited to these materials.

[0091] Furthermore, as shown in Figure 3, the auxiliary device 24 has a housing-like structure, and a chamber for forming a temporary storage space is provided inside it. The auxiliary device 24 is fitted with an auxiliary opening / closing door mechanism 242 for controlling the opening and closing of the chamber. The auxiliary opening / closing door mechanism 242 is an electric door mechanism, such as a flip-type electric door mechanism, which is controlled by the control device 5 to achieve electric opening and closing. It can be based on or directly adapted from conventional electric door designs, and a detailed explanation is omitted.

[0092] Furthermore, as shown in Figure 3, the attached fixing frame 26 may include two support plates 261 that are spaced apart and symmetrically installed. Accordingly, stopper protrusions 243 are provided on both sides of the attached device 24, which can contact and abut the tops of the support plates 261 in a one-to-one correspondence. For contact-type charging, charging contacts may be provided at the bottom of the stopper protrusions 243 and at the tops of the support plates 261 to enable charging of the battery inside the attached device 24 by contact.

[0093] Furthermore, as shown in Figure 3, at least two end effectors 23 are provided, where one end effector 23 is used to grip a semiconductor sample and the other end effector 23 is used to grip the chemical tank 15. To more accurately position the corresponding end effectors 23, it is possible to implement different end effectors 23 performing different operations. For example, the jaw mechanism of the end effector 23 for gripping the cassette 33 on which the semiconductor material 331 is placed may be configured to have a small opening and closing degree, while the jaw mechanism for gripping the chemical tank 15 may be configured to have a large opening and closing degree, and is not specifically limited.

[0094] Furthermore, the end effector 23 may also be an overhaul actuator, and the robot arm device 22 moves the end effector 23, which is the overhaul actuator, to perform an overhaul of the corresponding equipment, thereby realizing automated overhaul work. Of course, it is not limited to this, and may also be other execution mechanisms, for example, a cleaning mechanism for performing cleaning work, and is not specifically limited.

[0095] As shown in Figure 2, the end effector 23 may be positioned to be detachably connected to the robot arm device 22 via a joint assembly 25. This joint assembly 25 is a conventional quick connector and specifically includes a first joint 251 fixed to the end of the robot arm device 22 and a second joint 252 fixed to the end effector 23, thereby enabling quick connection and disconnection.

[0096] As shown in Figure 3, the auxiliary device 24 is provided with a mounting station 244 for mounting the end effector 23 in order to facilitate the replacement of the end effector 23 by mounting the end effector 23 in the auxiliary device 24. This mounting station 244 may have a locking groove structure for the end effector 23 to engage with. The second joint 252 may be specifically installed on the outer surface of the end effector 23 and reinforced and connected to the end effector 23 via a right-angle connecting plate. Taking the mounting station 244 as an example, if it is a locking groove, it may further have a step to support the second joint 252 connected to the end effector 23 to be engaged. By installing the second joint 252 on one side of the end effector 23, the length size of the end effector 23 is reduced, and a protruding structure is formed on the side surface of the end effector 23 to contact the step and achieve quick fixing. This design structure is simple, convenient for inserting and removing the end effector 23, and contributes to improved efficiency, and is not specifically limited.

[0097] To enable the replacement of mounting stations 244 of an auxiliary device 24 as needed, an extension boss 245 is installed on the bottom of one side of the auxiliary device. By installing the extension boss 245, a right-angle mounting area can be formed between it and one side of the auxiliary device 24. A removable jig plate 28 is installed on the extension boss 245, which may be "U-shaped", with the extension boss 245 attached to its lower plate portion, and the side plate portion attached to one side of the auxiliary device 24 to ensure a firm mounting and fixing, and the required mounting station 244 is installed on the upper plate portion of the jig plate 28. The jig plate 28 may be connected to the auxiliary device 24 via fasteners such as screws and bolts, and is not specifically limited.

[0098] Furthermore, since the processing time for semiconductor material 331 by the wet processing machine 1 varies depending on the processing demand, the control device 5 can timely control the transport robot 2 to remove the processed semiconductor material 331 after obtaining the processing completion time for the semiconductor material 331 by the wet processing machine 1. However, if the transport robot is moving other semiconductor material 331 or changing the chemical tank 15 at this time, the transport robot 2 must stop its current operation or the wet processing machine 1 must be put into standby mode, which affects the utilization efficiency of the transport robot 2 or the wet processing machine 1. To solve the above problem, the following improvements are made.

[0099] As shown in Figure 6, this application improves the wet machine stand 1 by mounting a sample carrier mechanism 12 below the position of the sample input / output port 11 for placing semiconductor material 331 to be sent to the sample input / output port 11 or for placing semiconductor material 331 being sent out from the sample input / output port 11. After completing the processing of the semiconductor material 331, the wet machine stand 1 can push the semiconductor material 331 directly from the sample input / output port 11 to the sample carrier mechanism 12 for removal and waiting, and then close the sample input / output port 11 to perform other processes without having to keep the input / output port open and waiting or paused. When the transport robot 2 loads, it first transports the semiconductor material 331 to the sample carrier mechanism 12 and then performs the next process, and when the control device 5 notifies that the wet machine stand 1 is ready to use, it can return to retrieve the semiconductor material 331 being sent out by the wet machine stand 1 and place the semiconductor material 331 located in the sample carrier mechanism 12 in a predetermined position, thereby making it easy to send it to the wet machine stand 1. By placing the semiconductor material 331 to be processed first into the sample carrier mechanism 12, more temporary storage space in the auxiliary device 24 is freed up, allowing for better recovery of processed semiconductor samples and further increasing the efficiency of the equipment.

[0100] Furthermore, as shown in Figure 6, the sample carrier mechanism 12 includes a carrier plate 121 and a sample carrier drive assembly 122.

[0101] The carrier plate 121 is rotatably mounted on the wet machine base 1, and the sample carrier drive assembly 122 is mounted on the wet machine base 1 and connected to the carrier plate 121 in order to rotate the carrier plate 121. The sample carrier drive assembly 122 may be an electric push rod, and there may be two of them, one end of which is hinged to the wet machine base 1 and the other end of which is hinged to the bottom of the carrier plate 121, and rotates the carrier plate 121 by extension and retraction. When the carrier plate 121 needs to be used, the carrier plate 121 is inverted to a horizontal position by controlling the sample carrier drive assembly 122 to extend. When it does not need to be used, the carrier plate 121 is inverted to a vertical position by controlling the sample carrier drive assembly 122 to retract.

[0102] Furthermore, as shown in Figure 6, in order to relatively easily replace the chemical tank 15, this application improves the wet machine stand 1, and a chemical carrier mechanism 14 for placing the chemical tank 15 is attached to the liquid storage chamber 13 of the wet machine stand 1.

[0103] The liquid storage chamber 13 has an open structure, and as shown in Figures 7 and 8, the chemical carrier mechanism 14 includes a support base 141, a chemical carrier drive assembly 142, and a liquid collection member 143.

[0104] The support base 141 is used to support the chemical tank 15, and a positioning mounting groove is provided on it for positioning and attaching the chemical tank 15.

[0105] The chemical carrier drive assembly 142 is connected to the support base 141 to drive the drive support base 141 to extend or retract from the liquid storage chamber 13. The chemical carrier drive assembly 142 may be a conventional multi-stage telescopic shaft / multi-stage chain drive telescopic mechanism, and a detailed explanation is omitted.

[0106] The liquid collection member 143 is detachably attached to the chemical tank 15.

[0107] When replacing, the chemical carrier drive assembly 142 first extends the chemical tank 15 that needs to be replaced out of the liquid storage chamber 13. Then, the robot arm device 22 moves the end effector 23 to first remove the liquid collection member 143, then grasps the chemical tank 15 that needs to be replaced and transports it to the temporary storage space. After grasping the new chemical tank 15 from the temporary storage space and placing it on the support base 141, the robot arm device 22 moves the end effector 23 to loosen the tank cover of the new chemical tank 15, then places the liquid collection member 143 into the new chemical tank 15. Finally, the chemical carrier drive assembly 142 retracts the replaced chemical tank 15 into the liquid storage chamber 13. The liquid collection mechanism in the wet machine base 1 is connected to the liquid collection member 143 via an expandable flexible tube (e.g., an expandable bellows), and is connected using an expandable flexible tube so as not to affect the attachment / detachment operation of the liquid collection member 143 and the movement of the support base 141, to draw liquid from a new chemical tank 15, or the robot arm device 22 may move the end effector 23 to grasp the corresponding joint of the wet machine base 1 and connect to the liquid collection member 143.

[0108] Furthermore, as shown in Figure 7, the liquid collection member 143 includes a liquid collection tube 1432 and a liquid collection cover 1431.

[0109] The liquid intake pipe 1432 can be inserted into the chemical tank 15 via the chemical outlet 151 of the chemical tank 15, and the liquid intake cover 1431 is fitted onto the liquid intake pipe 1432 and can be fitted with the chemical outlet 151 to close the chemical outlet 151. Here, the liquid intake pipe 1432 performs the function of taking in liquid, while the liquid intake cover 1431 performs the same function as the original tank cover of the chemical tank 15, closing the chemical outlet 151 and fixing the liquid intake pipe 1432 (the fitting between the liquid intake cover 1431 and the chemical outlet 151 of the chemical tank 15 may be a slip-on fit, screw fit, etc., and is not limited thereto). To facilitate connection with the liquid intake mechanism in the wet machine base 1, a liquid intake joint 1433 is connected to one end of the pipe portion of the liquid intake pipe 1432 located outside the liquid intake cover 1431. This liquid intake joint 1433 is a one-way valve joint, meaning it can only draw liquid from the liquid tank 15, and the liquid cannot flow back into the liquid tank 15.

[0110] After removing the liquid collection member 143, a fixing member 144 is vertically attached to the support base 141 to facilitate storage of the liquid collection member 143 to be installed. Taking the arrangement of the liquid collection tube 1432 and liquid collection cover 1431 described above as an example, this fixing member 144 is arranged in a hollow column rod structure for movably inserting the liquid collection tube 1432. Since some residual chemical solution may remain in the liquid collection tube 1432 after removal, and this residual chemical solution may remain in the fixing member 144 after the liquid collection tube 1432 is inserted into the fixing member 144, causing contamination and waste, a recovery hole (not shown) may be provided at the bottom of the fixing member 144. This recovery hole may be connected to a recovery container via a recovery tube (which may be an expandable bellows) to recover the residual chemical solution in the fixing member 144. Alternatively, this recovery hole may be connected to a cleaning device via a cleaning pipe, and cleaning fluid may be injected into the fixing member 144 via the cleaning device to clean the liquid intake pipe 1432.

[0111] Furthermore, this application may include chemical tank fixtures (not shown) to accommodate the loading of chemical tanks 15 of different sizes, and these chemical tank fixtures may be mounted on a support base 141.

[0112] The number of drug solution carrier mechanisms 14 in this application may be one or more as needed, and is not specifically limited.

[0113] Furthermore, this application includes a monitoring device (not shown) capable of monitoring the amount of chemical solution in the chemical solution tank 15. To avoid affecting the replacement of the chemical solution tank 15, the monitoring device may be a weighing device installed on the support base 141 that weighs the chemical solution tank 15 while it is left unattended. When the weight falls below a preset value, it is considered that the amount of chemical solution in the chemical solution tank 15 has reached an alarm value, and at this time a signal is sent to the control device 5, which may control the transport robot 2 to perform a liquid replacement operation.

[0114] The monitoring device may be an ultrasonic level gauge or an infrared level gauge. A transparent window (not shown) may be installed on top of the chemical tank 15, but the monitoring device is mounted on the wet machine stand 1 and the support stand 141, and detects the liquid level inside the chemical tank 15 through this transparent window, and further monitors the amount of chemical solution in the chemical tank 15.

[0115] When the monitoring device detects that the liquid level in the chemical tank 15 in use has reached an alarm value, it feeds the information back to the control device 5, which then automatically generates a liquid exchange task. (The system manually specifies the start time for this liquid exchange task (considering currently scheduled experimental tasks), and based on this time, it automatically calculates the completion time for the liquid exchange while referring to the standard labor time for liquid exchange, thereby completing the automatic scheduling service for the liquid exchange task.) During the liquid exchange process, the wet machine stand 1 is restricted to unusable, and the liquid exchange priority is set to the highest level.

[0116] Furthermore, as shown in Figure 9, the sample supply and recovery device 3 includes the device body 31 and the sample displacement device 32.

[0117] The main body of the device 31 is equipped with a sample chamber, and at the bottom of the sample chamber are a first load / unload station 311, a second load / unload station 312, a first temporary storage station 313, and a second temporary storage station 314. Here, the first load / unload station 311, the second load / unload station 312, the first temporary storage station 313, and the second temporary storage station 314 are each provided with at least one station groove for placing a cassette 33.

[0118] A first load / unload opening (not shown) is provided at a position corresponding to the first load / unload station 311 of the main body of the device 31, connecting the sample chamber to the outside of the clean space. The experimenter can place semiconductor material 331 that needs to be experimented on into the first load / unload station 311 through this first load / unload opening, or receive semiconductor material 331 that has already been experimented on from the first load / unload station 311 through the first load / unload opening. The first load / unload opening is fitted with a first door that can be opened and closed, and the first door is a conventional electric door structure, which will not be described in detail.

[0119] A second load / unload opening (not shown) is provided at a position corresponding to the second load / unload station 312 of the main unit 31 of the device, connecting the sample chamber and the clean space. The transport robot 2 can grasp a cassette 33 containing semiconductors from the second load / unload station 312 through the second load / unload opening, or place a cassette 33 containing processed semiconductor material 331 into the second load / unload station 312. The second load / unload opening is fitted with a second door that can be opened and closed, and the second door has a conventional electric door structure, which will not be described in detail.

[0120] The sample displacement device 32 is attached to the sample chamber to move semiconductor samples between the first load / unload station 311, the second load / unload station 312, the first temporary storage station 313, and the second temporary storage station 314. The first temporary storage station 313 may be used to store semiconductor materials 331 that have already been processed, while the second temporary storage station 314 may be used to store semiconductor materials 331 that are to be processed.

[0121] The usage process is as follows:

[0122] After detecting that a cassette 33 is present at the first load / unload station 311, the sample displacement device 32 sequentially moves the cassette 33 to the second temporary storage station 314, then, based on scheduling information, moves the corresponding cassette 33 from the second temporary storage station 314 to the second load / unload station 312, and waits for the transport robot 2 to retrieve it. After detecting that a cassette 33 is present at the second load / unload station 312, the sample displacement device 32 sequentially moves the cassette 33 to the first temporary storage station 313, then, based on scheduling information, moves the corresponding cassette 33 from the first temporary storage station 313 to the first load / unload station 311, and waits for the experimenter to retrieve it. The sequential identification of the cassettes 33 may be, but is not specifically limited, by identifying the QR code (registered trademark) or number of the cassette 33.

[0123] The sample displacement device 32 in this application may be arranged to include a three-axis movement module, a clamping mechanism, and an identification sensor. The three-axis movement module, clamping mechanism, and identification sensor are conventional arrangements, and for example, in the case of identifying a QR code (registered trademark), the identification sensor may be a scanner, and for the case of identifying a number, the identification sensor may be a camera, and is not specifically limited.

[0124] Furthermore, as shown in Figure 9, in order to facilitate the experimenter's order recording operations and setting desired experimental parameters, a human-computer interaction device 34 is attached to the first load / unload opening side of the main body 31 of the device, which is connected to the control device 5 and extends outside the clean space. The control device 5 may be installed in the clean space, and is not specifically limited.

[0125] Furthermore, as shown in Figures 1 and 10, the chemical supply and recovery device 4 includes a chemical buffer box 41. Inside the chemical buffer box 41 is a buffer chamber for storing the chemical tank 15 to be loaded or the replaced chemical tank 15. The chemical buffer box 41 is provided with a buffer opening, and an openable and closable buffer door 42 is attached to the buffer opening. Preferably, multiple chemical buffer boxes 41 are arranged so that chemical tanks 15 of different chemical types can be stored separately, and replaced empty chemical tanks 15 can be stored individually.

[0126] Furthermore, as shown in Figure 1, the ground of the clean space is divided from the outside inward into an outer annular region 61, an inner annular region 62, and a central region 63 located within the inner annular region 62.

[0127] The wet machine stand 1 is installed in the outer annular region 61 or the central region 63, and the sample supply and recovery device 3 and the chemical supply and recovery device 4 are installed in the outer annular region 61.

[0128] The above layout forms a circular arrangement, enabling a compact placement of each piece of equipment, effectively reducing the clean space occupied, shortening the mobile robot's stroke, extending its range, and further reducing experimental costs.

[0129] A charging stand for charging the transport robot 2 may be installed in the outer annular region 61, but at least two mobile robots may also be installed. This improves the efficiency of the experiment and ensures that if one of the robots has insufficient power, the other can operate normally, thus ensuring that the experiment can be carried out stably.

[0130] Furthermore, to enable flexible work, the robot arm device 22 is preferably a collaborative robot arm equipped with a visual sensor for identification and positioning.

[0131] Furthermore, the mobile device 21 is an AGV equipped with sensors such as laser radar to enable automatic pathfinding.

[0132] The operating process of the dark wet laboratory for scientific research described in this application is as follows:

[0133] 1. After the experimenter verifies their identity using the human-computer interaction device 34, they select an experiment type. Once the selection is complete, they set experimental parameters / process routes, etc., and create an experimental work instruction. The control device 5 then schedules the newly created experimental work instructions in order, based on the operating status of the conventional wet machine stand 1 and the status of experimental work instructions already on standby.

[0134] 2. A cassette 33 containing the semiconductor material 331 to be processed is placed into the first load / unload station 311 through the first load / unload opening.

[0135] 3. The control device 5 transmits a signal to the sample displacement device 32 according to the experimental work instructions. The sample displacement device 32 moves the cassette 33 from the first load / unload station 311 to the second temporary storage station 314, and then waits for the execution signal of the experimental work instructions. When it is time to execute these experimental work instructions, the control device 5 transmits a signal to the sample displacement device 32, the transport robot 2, and the wet machine stand 1. The displacement device then moves the cassette 33 from the second temporary storage station 314 to the second load / unload station 312 and waits for the transport robot 2 to retrieve it.

[0136] 4. The transport robot 2 loads the cassette 33 from the second load / unload station 312 onto the corresponding wet machine stand 1, in accordance with the experimental work instructions.

[0137] 5. The corresponding wet machine stand 1 processes the semiconductor material 331 in the cassette 33 according to the experimental parameters in the experimental work instructions. After processing is complete, it pushes the cassette 33 into the sample carrier mechanism 12 and transmits a signal to the transport robot 2.

[0138] 6. The transport robot 2 transports the cassette 33 in the sample carrier mechanism 12 to the second load / unload station 312 and transmits a signal to the sample displacement device 32.

[0139] 7. The sample displacement device 32 moves the cassette 33 from the second load / unload station 312 to the first temporary storage station 313, waits for the removal of the previously completed cassette 33 to be completed, then moves the cassette 33 from the first temporary storage station 313 to the first load / unload station 311, and feeds back a signal to the control device 5. The control device 5 sends a notification to the corresponding experimenter's mobile terminal to remind the experimenter to receive the semiconductor material 331 after the experiment is complete, and also synchronously transmits the operational data of the experimental process to the experimenter after it has been compiled and analyzed.

[0140] The control device 5 can collect operational data (process recording, process parameter collection, abnormal event processing) from each execution device in real time, establish a traceable and scalable process library, and optimize scheduling.

[0141] It can also monitor anomalies during the experimental process in real time and automatically issue alarms.

[0142] It is also possible to fully monitor and record the equipment's history, repairs, maintenance, and inspections.

[0143] The dark wet laboratory for scientific research described in this application has been explained in detail above. However, for those skilled in the art, there may be changes in the modes and scope of application for carrying out the invention based on the concept of the embodiments described in this application. In summary, the contents of this specification should not be understood as limitations on this application. [Explanation of Symbols]

[0144] 1. Wet machine stand 11. Sample input / discharge port 12. Sample carrier mechanism 121, Carrier Plate 122. Sample carrier drive assembly 13. Liquid storage room 14. Drug carrier mechanism 141, support stand 142. Chemical Solution Carrier Drive Assembly 143. Liquid collection member 1431, liquid removal cover 1432, liquid intake tube 1433, liquid extraction joint 144, Fixing member 15. Chemical tank 151, liquid solution port 2. Transport robot 21. Mobile device 211. Second docking structure 22. Robot arm device 23. End effector 24. Ancillary devices 241. Second fork positioning structure 242. Ancillary opening and closing door mechanism 243, Stopper protrusion 244, Loading Station 245, Extended Boss 25. Joint Assembly 251, First Joint 252, Second Joint 26. Ancillary fixed frame 261, support plate 27. Fork device 271. Forklift 272, Palette 2721, First fork positioning structure 28. Jig plate 3. Sample supply and collection equipment 31. Main unit of the device 311, First Load / Unload Station 312. Second Load / Unload Station 313. First temporary storage station 314. Second temporary storage station 32. Sample displacement device 33. Cassette 331. Semiconductor materials 34. Human-computer interaction device 4. Chemical solution supply and recovery equipment 41. Chemical buffer box 42. Buffer Door 5. Control equipment 61. Outer ring region 62. Inner ring region 63, central area

Claims

1. A dark wet laboratory for scientific research, comprising a laboratory body, a wet machine platform (1), a transport robot (2), a sample supply and recovery device (3), a chemical solution supply and recovery device (4), and a control device (5), The aforementioned laboratory body is used to provide a clean space. The wet machine stand (1) is installed in the clean space for processing semiconductor samples. The sample supply and recovery equipment (3) is installed in the clean space to provide semiconductor samples to be processed and to store semiconductor samples after processing is complete. The chemical solution supply and recovery equipment (4) is installed in the clean space to provide the chemical solution tank (15) to be replaced and to house the replaced chemical solution tank (15). The transport robot (2) is mounted in the clean space for transporting semiconductor samples between the wet machine stand (1), the transport robot (2), and the sample supply and recovery equipment (3), and for transporting chemical tanks (15) between the wet machine stand (1), the transport robot (2), and the chemical supply and recovery equipment (4). The transport robot (2) includes a moving device (21), a robot arm device (22), at least one end effector (23), and an auxiliary device (24), The auxiliary device (24) is movable in accordance with the mobile device (21) and provides temporary storage space. The robot arm device (22) is attached to the moving device (21), At least one of the end effectors (23) is attached to the robotic arm device (22) for gripping a semiconductor sample and for gripping a chemical tank (15). The control device (5) is connected to the wet machine stand (1), the transport robot (2), the sample supply and recovery device (3), and the chemical solution supply and recovery device (4) via communication. The auxiliary device (24) is detachably connected to the mobile device (21), The system further includes an auxiliary fixing frame (26) for fixing each of the auxiliary devices (24), The transport robot (2) further includes a fork device (27), The fork device (27) is attached to the moving device (21) in order to lift the auxiliary device (24) located on the auxiliary fixed frame (26). The fork device (27) includes a fork lifting device (271) and a pallet (272). A dark wet laboratory for scientific research, characterized in that the drive end of the fork lifting device (271) is connected to the pallet (272) in order to move the pallet (272) up and down to fork the auxiliary device (24) away from the auxiliary fixing frame (26) or fork the auxiliary device (24) back onto the auxiliary fixing frame (26).

2. The dark wet laboratory for scientific research according to claim 1, characterized in that the accompanying fixing frame (26) is attached to the clean space.

3. A relief cavity is provided below the auxiliary device (24) of the auxiliary fixing frame (26) for the pallet (272) to enter. The dark wet laboratory for scientific research according to claim 1, characterized in that the fork lifting device (271) is attached to the top of the moving device (21).

4. The top of the pallet (272) is provided with several first fork positioning structures (2721), The scientific research dark wet laboratory according to claim 3, characterized in that the bottom of the auxiliary device (24) is provided with several second fork positioning structures (241) that are individually positioned and fitted with the first fork positioning structure (2721).

5. The auxiliary device (24) is provided with a chamber for forming the temporary storage space. The dark wet laboratory for scientific research according to claim 4, characterized in that an auxiliary opening / closing door mechanism (242) for controlling the opening and closing of the chamber is mounted on the auxiliary device (24).

6. A first docking structure is provided at the bottom of the aforementioned auxiliary device (24). A first conductive structure is provided on the first docking structure, which is electrically connected to the accompanying opening / closing door mechanism (242). A second docking structure (211) that can be docked and fitted with the first docking structure is provided on the moving device (21). The second docking structure (211) is provided with a second conductive structure that can contact and conduct electricity with the first conductive structure. The dark wet laboratory for scientific research according to claim 5, further characterized in that the transport robot (2) is used to supply power to the accompanying opening / closing door mechanism (242) when the first conductive structure and the second conductive structure are in contact and conduct electricity.

7. The first docking structure is provided with a first ventilation structure that communicates with the temporary storage space. The second docking structure (211) is provided with a second ventilation structure that can dock with the first ventilation structure and conduct electricity, The dark wet laboratory for scientific research according to claim 6, characterized in that the mobile device (21) is fitted with a gas supply device that is connected to and conducts electrical currents with the second ventilation structure.

8. The aforementioned auxiliary fixing frame (26) includes two support plates (261) that are installed symmetrically at intervals from each other. The scientific research dark wet laboratory according to claim 5, characterized in that stopper protrusions (243) are provided on both sides of the auxiliary device (24) that can contact and abut against the top of the support plate (261) in a one-to-one correspondence.

9. The aforementioned auxiliary fixed frame (26) is provided with a floating orthodontic module. The dark wet laboratory for scientific research according to claim 6, characterized in that the floating straightening module is used to straighten the position of the moving device (21) or the fork device (27) that enters the accompanying fixed frame (26) so that the first fork positioning structure (2721) faces the second fork positioning structure (241).

10. The dark wet laboratory for scientific research according to claim 1, characterized in that a corrosion-resistant lining is provided in the temporary storage space.

11. The end effector (23) has at least two components. One of the end effectors (23) is used to grip a semiconductor sample. Another end effector (23) is used to grip the chemical tank (15), The end effector (23) is detachably connected to the robot arm device (22) via a joint assembly (25). The dark wet laboratory for scientific research according to claim 1, characterized in that the auxiliary device (24) is provided with a mounting station (244) for mounting the end effector (23).

12. The dark wet laboratory for scientific research according to claim 1, wherein a sample carrier mechanism (12) for placing semiconductor material (331) to be sent to the sample input / output port (11) or for placing semiconductor material (331) being sent out from the sample input / output port (11) is attached below the position of the sample input / output port (11) of the wet machine stand (1), characterized in that

13. The sample carrier mechanism (12) includes a carrier plate (121) and a sample carrier drive assembly (122). The carrier plate (121) is rotatably mounted on the wet machine base (1). The dark wet laboratory for scientific research according to claim 12, characterized in that the sample carrier drive assembly (122) is attached to the wet machine stand (1) and connected to the carrier plate (121) in order to rotate the carrier plate (121).

14. A chemical liquid carrier mechanism (14) for supporting a chemical liquid tank (15) is installed at the location of the liquid storage chamber (13) of the wet machine base (1). The aforementioned chemical solution carrier mechanism (14) includes a support base (141), a chemical solution carrier drive assembly (142), and a liquid collection member (143). The support base (141) is used to place the chemical tank (15) on top of it. The chemical carrier drive assembly (142) is connected to the support base (141) to drive the support base (141) to extend or retract from the liquid storage chamber (13), The dark wet laboratory for scientific research according to claim 1, characterized in that the liquid collection member (143) is detachably attached to the chemical tank (15).

15. The liquid collection member (143) includes a liquid collection tube (1432) and a liquid collection cover (1431). The liquid intake pipe (1432) can be inserted into the chemical tank (15) via the chemical inlet (151) of the chemical tank (15). The liquid intake cover (1431) is fitted onto the liquid intake tube (1432) and is capable of fitting with the liquid intake port (151) in order to close the liquid intake port (151). A fixing member (144) for fixing the liquid collection member (143) to be attached is vertically mounted on the support base (141). The dark wet laboratory for scientific research according to claim 14, characterized in that the fixing member (144) is a hollow column rod structure for movably inserting the liquid intake tube (1432).

16. The sample supply and recovery device (3) includes a device body (31) and a sample displacement device (32). A sample chamber is provided inside the main body of the device (31). At the bottom of the sample chamber are a first load / unload station (311), a second load / unload station (312), a first temporary storage station (313), and a second temporary storage station (314). A first load / unload opening is provided at a position on the main body of the device (31) corresponding to the first load / unload station (311), which connects the sample chamber with the area outside the clean space. The aforementioned first load / unload opening is fitted with a first door that can be opened and closed. A second load / unload opening is provided at a position on the main body of the device (31) corresponding to the second load / unload station (312), which connects the sample chamber and the clean space. The aforementioned second load / unload opening is fitted with a second door that can be opened and closed. The dark wet laboratory for scientific research according to claim 1, characterized in that the sample displacement device (32) is attached to the sample chamber for moving semiconductor samples between the first load / unload station (311), the second load / unload station (312), the first temporary storage station (313), and the second temporary storage station (314).

17. The dark wet laboratory for scientific research according to claim 16, characterized in that a human-computer interaction device (34) is attached to the first load / unload opening side of the equipment body (31), which is connected to the control equipment (5) in communication and extends outside the clean space.

18. The aforementioned chemical solution supply and recovery device (4) includes a chemical solution buffer box (41), The chemical buffer box (41) is provided with a buffer chamber for storing the chemical tank (15) to be loaded or the replaced chemical tank (15). The aforementioned chemical buffer box (41) is provided with a buffer opening, The dark wet laboratory for scientific research according to claim 1, characterized in that a buffer door (42) that can be opened and closed is attached to the buffer opening.

19. The ground of the clean space is divided from the outside inward into an outer annular region (61), an inner annular region (62), and a central region (63) located within the inner annular region (62). The wet machine base (1) is installed in the outer annular region (61) or the central region (63), The dark wet laboratory for scientific research according to claim 1, characterized in that the sample supply and recovery device (3) and the chemical solution supply and recovery device (4) are installed in the outer annular region (61).

20. The dark wet laboratory for scientific research according to claim 1, characterized in that the robotic arm device (22) is a collaborative robotic arm.

21. The dark wet laboratory for scientific research according to claim 1, characterized in that the mobile device (21) is an AGV.

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