Adsorption roll

Abstract

In a suction roll that simultaneously draws in air from multiple air passages, it is not possible to individually adjust the air intake for each individual air passage. [Solution] The suction roll 100 comprises a shaft portion 110 having a central axis CA, and a roll portion 120 that is rotatable relative to the shaft portion 110 about the central axis CA. The shaft portion 110 defines a plurality of first flow passages 50, one end of which opens on the outer circumferential surface of the shaft portion 110. The roll portion 120 defines a plurality of second flow passages 70 that extend from the inner circumferential surface to the outer circumferential surface of the roll portion 120. When either the outer circumferential surface of the shaft portion 110 or the inner circumferential surface of the roll portion 120 is designated as a specific circumferential surface, the specific circumferential surface has a plurality of annular grooves that extend in an annular shape about the central axis CA. The plurality of annular grooves are arranged at intervals in the direction along the central axis CA. Each of the first flow passages 50 is connected to each other second flow passage 70 via each other annular groove.

Description

Technical Field

[0001] The present invention relates to an adsorption roll.

Background Art

[0002] The suction roll of Patent Document 1 includes a suction roll body, a suction block, and a suction blower. The suction roll body is cylindrical. The suction roll body partitions a plurality of air passages extending along the central axis direction of the suction roll body inside it. Each air passage opens at one end face of the suction roll body and does not open at the other end face. Also, each air passage is arranged at equal intervals in the circumferential direction around the central axis of the suction roll body. Further, a plurality of suction ports branch from the middle of each air passage. Each suction port opens on the outer peripheral surface of the suction roll body.

[0003] The suction block is attached to the end face on the side where the air passage opens among the two end faces of the suction roll body. The suction block partitions a suction space. The suction space is a space recessed from the surface of the suction block on the side of the suction roll body. The suction space extends in an arc shape in the circumferential direction around the central axis of the suction roll body. And the opening of the suction space faces some of the openings of the air passages on the end face of the suction roll body.

[0004] Furthermore, the suction blower is capable of drawing in air. The suction port of the suction blower is connected to the suction space of the suction block via the internal space of the pipe. As a result, when the suction blower draws in air, the air in the suction space of the suction block, and consequently the air in a portion of the air passage of the suction roll body, is drawn in. The suction roll body is rotatable around its central axis. On the other hand, the suction block is fixed. Therefore, as the suction roll body rotates, the opening of the air passage facing the opening of the suction space changes. Consequently, the air passage through which air is drawn in also changes with the rotation of the suction roll body. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2002-160857 [Overview of the project] [Problems that the invention aims to solve]

[0006] In a suction roll like the one described in Patent Document 1, the suction block simultaneously draws in air from multiple opposing air passages. Therefore, in a suction roll like the one described in Patent Document 1, it is not possible to individually adjust the strength, duration, or timing of air suction in each individual air passage. [Means for solving the problem]

[0007] To solve the above problems, the present invention provides an adsorption roll comprising a cylindrical shaft portion having a central axis, and a roll portion that is cylindrical in shape with its inner circumferential surface facing the outer circumferential surface of the shaft portion and is rotatable relative to the shaft portion about the central axis, wherein the shaft portion comprises a plurality of first flow passages opening at one end on the outer circumferential surface of the shaft portion, and the roll portion comprises a plurality of second flow passages extending from the inner circumferential surface to the outer circumferential surface of the roll portion, and when either the outer circumferential surface of the shaft portion or the inner circumferential surface of the roll portion is designated as a specific circumferential surface, the specific circumferential surface has a plurality of annular grooves extending in an annular shape about the central axis, the plurality of annular grooves are arranged at intervals in the direction along the central axis, and each of the first flow passages is connected to each of the second flow passages via each of the annular grooves. [Effects of the Invention]

[0008] For each individual airflow channel, the strength, duration, and timing of air intake can be adjusted individually. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a perspective view of the peeling device. [Figure 2] Figure 2 is a perspective view of the stage and its lifting mechanism. [Figure 3] Figure 3 is a perspective view of the stage and its clamping mechanism. [Figure 4] Figure 4 is a perspective view of a portion of the shaft. [Figure 5] Figure 5 is a side view of the shaft. [Figure 6] Figure 6 is a perspective view of the adsorption roll. [Figure 7] Figure 7 is a side view of the adsorption roll. [Figure 8] Figure 8 is a partial cross-sectional view of the roll section. [Figure 9] Figure 9 is a partial cross-sectional view of the roll section. [Figure 10] Figure 10 is a perspective view of the adhesive head. [Figure 11]Figure 11 is a plan view of the stage. [Figure 12] Figure 12 is a perspective view of the peeling device. [Figure 13] Figure 13 is a perspective view of the peeling device. [Figure 14] Figure 14 is a perspective view of the support mechanism. [Figure 15] Figure 15 is a diagram showing a modified example of the suction roll.

Embodiment for Carrying out the Invention

[0010] Hereinafter, a peeling device provided with the suction roll of the present invention will be described with reference to the drawings. Note that the drawings schematically represent the components for ease of understanding. Therefore, the dimensional ratios of the components may be different from the actual ones or those in other drawings.

[0011] <Regarding the overall schematic configuration of the peeling device> As shown in FIG. 1, the peeling device 200 has a stage 10, a lifting device 40, and a clamp mechanism 20.

[0012] The stage 10 has a mounting surface 11 on which the object A can be placed. Although not shown, the object A has a main body portion and a sheet covering its surface. The main body portion is a square plate-shaped in plan view. The material of the main body portion is, for example, stainless steel. The sheet is attached to one main surface of the main body portion. Here, the main surface refers to the plane with the largest area among the outer surfaces of the plate-shaped object. The material of the sheet is, for example, an aluminum alloy.

[0013] As shown in FIG. 2, the stage 10 has a top plate 12 and four legs 13. The top plate 12 is square plate-shaped. And one main surface of the top plate 12 is the above-described mounting surface 11. Therefore, the mounting surface 11 is square in plan view. And the area of the mounting surface 11 of the top plate 12 is larger than the area of the main surface of the object A.

[0014] Each leg portion 13 is substantially cylindrical. Each leg portion 13 extends parallel to each other from the main surface on the opposite side of the mounting surface 11 on the top plate 12. Each leg portion 13 is located at the four corners of the top plate 12. The stage 10 is fixed to the floor surface of the factory or the like so that the leg portions 13 are arranged on the lower side and the top plate 12 is arranged on the upper side. The specific structure of each leg portion 13 will be described later.

[0015] Hereinafter, an axis orthogonal to the mounting surface 11 of the stage 10 is defined as the vertical axis X. Also, among the directions along the vertical axis X, the direction in which the mounting surface 11 of the stage 10 faces is defined as the first positive direction X1, and the opposite direction is defined as the first negative direction X2. Note that the up and down directions mentioned here are for convenience and do not necessarily define the direction of gravity.

[0016] When placing the object A on the mounting surface 11 of the stage 10, the object A is arranged so that the diagonal line of the main surface of the object A overlaps the diagonal line of the mounting surface 11 of the stage 10 when viewed from a direction orthogonal to the mounting surface 11. Also, the object A is arranged within the range of the mounting surface 11 of the stage 10 when viewed from a direction orthogonal to the mounting surface 11.

[0017] As shown in FIG. 2, the lifting device 40 is located on the first negative direction X2 side with respect to the top plate 12 of the stage 10. The lifting device 40 is a device for adjusting the position of the top plate 12 of the stage 10 in the direction along the vertical axis X. Therefore, the mounting surface 11 of the stage 10 can move up and down along the vertical axis X. Note that the structure of the lifting device 40 and the manner of the up and down movement of the stage 10 will be described later.

[0018] As shown in FIG. 3, the clamp mechanism 20 has a fixing portion 21 and a driving portion 22. The fixing portion 21 has a substantially rectangular parallelepiped shape. The fixing portion 21 is connected to one of the four end faces 12A of the top plate 12. The fixing portion 21 is located at the longitudinal end portion of the end face 12A among the end faces 12A. Here, the end face of the top plate 12 refers to a plane facing in a direction parallel to the main surface of the top plate 12.

[0019] The drive unit 22 has an elongated shape in one direction. The longitudinal length of the drive unit 22 is longer than the distance from one side of the main surface of the object A placed on the mounting surface 11 of the stage 10 to the side of the stage 10 closest to that side. One end of the drive unit 22 is connected to the fixed part 21 via a pivot shaft (not shown). This pivot shaft is parallel to the end face 12A of the stage 10 to which the fixed part 21 is fixed. Therefore, the drive unit 22 is rotatable relative to the fixed part 21 with the pivot shaft as the center of rotation. When the drive unit 22 rotates so as to tilt toward the mounting surface 11 of the stage 10, the drive unit 22 comes into contact with the object A on the stage 10. In other words, the clamping mechanism 20 can press the object A onto the stage 10. On the other hand, when the drive unit 22 rotates so as to stand up relative to the stage 10, the drive unit 22 moves away from the object A on the stage 10. In this state, object A on stage 10 can be removed from stage 10, or a new object A can be placed on stage 10.

[0020] As shown in Figure 1, the peeling device 200 is equipped with a linear motion mechanism 61. The linear motion mechanism 61 as a whole has an elongated shape in one direction perpendicular to the vertical axis X. Here, the axis parallel to the direction in which the linear motion mechanism 61 extends is called the movement axis Y. One of the directions along the movement axis Y is called the second positive direction Y1, and the opposite direction is called the second negative direction Y2. Furthermore, the axis perpendicular to both the vertical axis X and the movement axis Y is called the horizontal axis Z. One of the directions along the horizontal axis Z is called the third positive direction Z1, and the opposite direction is called the third negative direction Z2. Note that the term "horizontal" here is for convenience only and does not define horizontal from a specific viewpoint. The linear motion mechanism 61 is a mechanism for reciprocating an object connected to the linear motion mechanism 61 parallel to the movement axis Y.

[0021] The linear motion mechanism 61 is adjacent to the stage 10. More specifically, the linear motion mechanism 61 is positioned such that its extending direction is parallel to one of the two diagonals of the mounting surface 11 of the stage 10. Furthermore, the linear motion mechanism 61 is located on the third positive direction Z1 side relative to the stage 10. The linear motion mechanism 61 is composed of known mechanisms such as a rack and pinion mechanism and a fluid pressure mechanism. In Figure 1, the detailed structure of the linear motion mechanism 61 is omitted, and it is shown as a roughly rectangular parallelepiped object.

[0022] As shown in Figure 1, the peeling device 200 is equipped with a support mechanism 80. The support mechanism 80 includes a trolley section 81, a housing 82, and a mooring section 83. The trolley section 81 is a rectangular plate. The longer side of the trolley section 81 is parallel to the movement axis Y. The trolley section 81 is connected to the linear motion mechanism 61 such that one of its main surfaces faces the surface of the linear motion mechanism 61 facing the first positive direction X1. The trolley section 81 is capable of reciprocating movement in the direction along the movement axis Y by the linear motion mechanism 61.

[0023] The housing 82 has a rectangular parallelepiped shape with its length along the horizontal axis Z. The housing 82 houses a pump 90 capable of drawing in air. Note that the pump 90 and other components inside the housing 82 are not shown in Figure 1.

[0024] The housing 82 is fixed to the side of the trolley 81 facing the first positive direction X1. The housing 82 is also positioned closer to the second negative direction Y2 side of the side of the trolley 81 facing the first positive direction X1. Together with the trolley 81, the housing 82 can reciprocate in the direction along the movement axis Y by the linear motion mechanism 61.

[0025] The mooring section 83 has a shape resembling a rectangular plate that is bent at right angles at two points along its length. In other words, the mooring section 83 can be broadly divided into three regions with the bends as boundaries. These three regions, starting from one end, are designated as the first region 83A, the second region 83B, and the third region 83C.

[0026] The first region 83A of the mooring section 83 is fixed to the trolley section 81. The main surface of the first region 83A is perpendicular to the horizontal axis Z. In other words, the first region 83A appears to be rising up from the trolley section 81. The first region 83A is located on the side of the second positive direction Y1 relative to the housing 82, among the surfaces of the trolley section 81 facing the first positive direction X1.

[0027] The second region 83B extends from the edge of the first region 83A on the second positive direction Y1 side toward the third negative direction Z2 side. The main surface of the second region 83B is perpendicular to the movement axis Y. Furthermore, the length dimension of the second region 83B in the horizontal axis Z direction is longer than the length of one diagonal of the mounting surface 11 of the stage 10.

[0028] The third region 83C extends from the edge of the second region 83B on the third negative direction Z2 side toward the second negative direction Y2 side. The length dimension of the third region 83C in the direction along the movement axis Y is longer than the length dimension of the first region 83A in the direction along the movement axis Y. The main surface of the third region 83C is perpendicular to the horizontal axis Z. Therefore, the main surface of the third region 83C faces the main surface of the first region 83A and the housing 82.

[0029] As shown in Figures 1 and 12, the support mechanism 80 has an arm portion 84 and a plurality of caster portions 85. The arm portion 84 is rectangular in shape. The arm portion 84 is connected to the end face of the third region 83C of the mooring portion 83 that faces the first negative direction X2. The arm portion 84 extends toward the first negative direction X2.

[0030] Each caster section 85 is a disc-shaped wheel. Each caster section 85 is connected to the end of the arm section 84 on the first negative direction X2 side. When two caster sections 85 are considered as a pair, there are two pairs of caster sections 85. The two caster sections 85 constituting a pair of caster sections 85 are aligned along the horizontal axis Z. Also, each pair of caster sections 85 is aligned in the direction along the movement axis Y. Each caster section 85 is rotatably supported with an axis parallel to the horizontal axis Z as its axis of rotation. The outer surface of each caster section 85 is in contact with the floor surface on which the stage 10 and the linear motion mechanism 61 are placed. Therefore, each caster section 85 supports the mooring section 83. Furthermore, each caster section 85 rotates and moves together with the mooring section 83 as the mooring section 83 moves along the movement axis Y.

[0031] As shown in Figure 1, the peeling device 200 is equipped with an adsorption roll 100. As shown in Figure 1, the suction roll 100 has a shaft portion 110 and a roll portion 120.

[0032] The shaft portion 110 is cylindrical. The central axis CA of the shaft portion 110 is parallel to the horizontal axis Z. One end of the shaft portion 110 is supported by the housing 82. Specifically, the shaft portion 110 penetrates the wall of the housing 82. A portion of the shaft portion 110, including one end, extends into the interior of the housing 82. The other end of the shaft portion 110 is connected to the third region 83C of the mooring portion 83.

[0033] The roll section 120 is cylindrical and coaxial with the central axis CA of the shaft section 110. The length of the roll section 120 in the horizontal axis Z direction is shorter than the length of the shaft section 110 in the horizontal axis Z direction. The inner circumferential surface of the roll section 120 faces the outer circumferential surface of the shaft section 110. In other words, the shaft section 110 penetrates the roll section 120. Therefore, one end of the shaft section 110 protrudes from the roll section 120 in the third positive direction Z1, and the other end of the shaft section 110 protrudes from the roll section 120 in the third negative direction Z2. The roll section 120 is rotatable about its central axis CA. That is, the roll section 120 is rotatable relative to the shaft section 110 about its central axis CA. Specifically, a drive mechanism (not shown) located inside the housing 82 makes the roll section 120 rotatable relative to the shaft section 110. An example of a drive mechanism is a pinion that can rotate on the rack of a linear motion mechanism 61, which is a rack and pinion mechanism.

[0034] Furthermore, the end face of the roll section 120 on the third positive direction Z1 side is located closer to the third positive direction Z1 than the vertex of the mounting surface 11 of the stage 10 that is closest to the third positive direction Z1. On the other hand, the end face of the roll section 120 on the third negative direction Z2 side is located closer to the third negative direction Z2 than the vertex of the mounting surface 11 of the stage 10 that is closest to the third negative direction Z2.

[0035] The roll section 120 has a plurality of suction ports 70B. The plurality of suction ports 70B open on the outer circumferential surface of the roll section 120. The outer circumferential surface of the roll section 120 is the outer circumferential surface of the suction roll 100. Therefore, the suction roll 100 has a plurality of suction ports 70B that open outwards from its outer circumferential surface. Note that in Figure 1, only some of the plurality of suction ports 70B are labeled with reference numerals.

[0036] The suction roll 100 can peel the sheet from the main body of the object A on the mounting surface 11 of the stage 10 by sucking air from multiple suction ports 70B. At this time, the sheet is peeled off while being wound onto the outer surface of the roll portion 120 of the suction roll 100. In Figures 1 and 6, the area on the outer surface of the roll portion 120 where the sheet is wound when the sheet is peeled off is hypothetically shown as the winding area C. The more specific structure of the suction roll 100 will be described later.

[0037] As shown in Figure 1, the peeling device 200 includes an adhesive head 160 and a pressing mechanism 190. As shown in Figure 10, the adhesive head 160 is attached to the second region 83B of the anchoring section 83. The adhesive head 160 has an adhesive surface 160A that can contact the object A on the stage 10. As described above, since the mounting surface 11 of the stage 10 is movable up and down along the vertical axis X, the adhesive head 160 is movable relative to the stage 10 along the vertical axis X. When the adhesive head 160 moves relative to the stage 10, the adhesive surface 160A of the adhesive head 160 comes into contact with the sheet of object A. Then, when the adhesive head 160 moves relative to the stage 10, the sheet of object A peels off from the main body along with the adhesive surface 160A of the adhesive head 160.

[0038] The pressing mechanism 190 is attached to the adhesive head 160. Therefore, the pressing mechanism 190 is movable relative to the stage 10 along the vertical axis X together with the adhesive head 160. The pressing mechanism 190 has a contact surface 192A that can contact the object A on the stage 10. When no external force is acting, the contact surface 192A of the pressing mechanism 190 is located on the side closer to the stage 10 than the adhesive surface 160A of the adhesive head 160 in the direction along the vertical axis X. The contact surface 192A of the pressing mechanism 190 can then be moved to the same position as the adhesive surface 160A of the adhesive head 160 in the direction along the vertical axis X when a force is applied toward the first positive direction X1. The purpose of this pressing mechanism 190 is to hold down the sheet so that it does not peel off beyond the point of contact of the contact surface 192A of the pressing mechanism 190 when the adhesive head 160 partially peels the sheet from the main body of the object A. The detailed structure of the adhesive head 160 and the pressing mechanism 190 will be described later.

[0039] <Regarding the configuration of the stage and lifting device> The configuration of the stage 10 and the lifting device 40 will be described below. As shown in Figure 2, each leg 13 of the stage 10 consists of a shaft 14, an adjustment part 15, and a base member 16. Since the configuration of each leg 13 is the same, one leg 13 will be described as a representative example. The shaft 14 is cylindrical. The shaft 14 extends from the main surface of the top plate 12 opposite to the mounting surface 11. The adjustment part 15 is cylindrical, corresponding to the cylindrical shape of the shaft 14. The inner diameter of the adjustment part 15 is slightly larger than the outer diameter of the shaft 14. The adjustment part 15 accommodates a portion of the shaft 14 on the first negative direction X2 side. Furthermore, the inner circumferential surface of the adjustment part 15 is slidable with respect to the outer circumferential surface of the shaft 14. In other words, the shaft 14 is relatively movable with respect to the adjustment part 15 in the direction along the vertical axis X.

[0040] The base member 16 is disc-shaped. The diameter of the main surface of the base member 16 is longer than the outer diameter of the adjustment section 15. The base member 16 closes the opening on the first negative direction X2 side of the adjustment section 15. Also, the center of the main surface of each base member 16 lies on the central axis of each adjustment section 15.

[0041] As mentioned above, each shaft portion 14 is not fixed inside the adjustment portion 15. Therefore, when no external force is acting on the stage 10, each shaft portion 14 falls to the first negative direction X2 side due to its own weight. In this case, the end of each shaft portion 14 on the first negative direction X2 side is in contact with the bottom member 16. On the other hand, for example, if the stage 10 is pushed to the first positive direction X1 side, the stage 10 can move toward the first positive direction X1 side.

[0042] The lifting device 40 has a storage section 41, two support sections 42, and a pushing section 43. The storage compartment 41 has a rectangular parallelepiped shape. The storage compartment 41 is located on the first negative direction X2 side relative to the top plate 12 of the stage 10. The storage compartment 41 has a cavity inside. Although not shown in the illustration, the storage compartment 41 houses a drive source such as a motor.

[0043] Each support portion 42 is cylindrical. Each support portion 42 extends along the vertical axis X. The length of each support portion 42 is shorter than the longitudinal length of the leg portion 13. Each support portion 42 penetrates the wall portion of the storage unit 41 on the first positive direction X1 side. That is, a portion of each support portion 42 reaches the interior of the storage unit 41. Each support portion 42 is connected to a drive source inside the storage unit 41. Each support portion 42 is movable relative to the storage unit 41 along the vertical axis X based on power from the drive source.

[0044] The pressing portion 43 is rectangular in shape. The main surface of the pressing portion 43 is parallel to the mounting surface 11 of the stage 10. The pressing portion 43 is also connected to the end of each support portion 42 on the first positive direction X1 side. Therefore, the pressing portion 43 is movable along the vertical axis X together with each support portion 42.

[0045] The lifting device 40 can move the mounting surface 11 of the stage 10 up and down. Specifically, suppose that each support part 42 moves in a first positive direction X1 relative to the storage unit 41 by power from a drive source in the storage unit 41. At this time, the pushing part 43 comes into contact with the top plate 12 of the stage 10 and pushes the top plate 12 toward the first positive direction X1. As a result, the mounting surface 11 of the stage 10 moves toward the first positive direction X1. On the other hand, suppose that each support part 42 moves in a first negative direction X2 relative to the storage unit 41 by power from a drive source in the storage unit 41. At this time, the pushing part 43 moves toward the first negative direction X2, away from the top plate 12 of the stage 10. Consequently, the stage 10 moves toward the first negative direction X2 due to its own weight.

[0046] <About the composition of the adsorption roll> As shown in Figures 4 and 5, the shaft portion 110 of the suction roll 100 is cylindrical. The shaft portion 110 divides four first flow passages 50 that extend from the end face on the first positive direction X1 side of the shaft portion 110 to the outer circumferential surface of the shaft portion 110. In Figures 4 and 5, the shape of the internal first flow passages 50 is virtually illustrated by passing through the shaft portion 110. As shown in Figure 4, the opening of each first flow passage 50 at the end face on the first positive direction X1 side of the shaft portion 110 will hereinafter be referred to as the first opening 50A. The first openings 50A of the four first flow passages 50 are arranged at equal intervals in the circumferential direction with respect to the central axis CA of the shaft portion 110. The central axis CA is parallel to the horizontal axis Z. Furthermore, the opening areas of the first openings 50A of the four first flow passages 50 are approximately the same. In this context, the opening area refers to the area at which the apparent area of ​​the opening is maximized when it is observed.

[0047] As shown in Figure 5, the first opening 50A of each first flow passage 50 is connected to the pump 90 inside the housing 82 by a separate flow path. Note that the housing 82 is not shown in Figure 5. In addition, there is an individual control valve 91 for each first flow passage 50 on the flow path between the first opening 50A of each first flow passage 50 and the pump 90. The control valve 91 opens and closes the flow path connecting the first opening 50A of the first flow passage 50 and the pump 90.

[0048] As shown in Figure 5, the four first flow passages 50 extend parallel to the central axis CA toward the third negative direction Z2 from the first opening 50A to a certain point. Furthermore, the lengths of the four first flow passages 50 in the direction along the central axis CA are all different. Then, from a certain point, the four first flow passages 50 extend in a direction perpendicular to the central axis CA. The four first flow passages 50 open on the outer circumferential surface of the shaft portion 110. This opening of the first flow passage 50 on the outer circumferential surface of the shaft portion 110 will hereafter be referred to as the second opening 50B. As described above, the lengths of the four first flow passages 50 in the direction along the central axis CA are all different. Therefore, the positions of the second openings 50B of each first flow passage 50 are offset from each other in the direction along the central axis CA.

[0049] The flow path cross-sectional area of ​​each first flow path 50 is generally constant, except for the portion where the first flow path 50 is bent. Specifically, the flow path cross-sectional area of ​​the portion of each first flow path 50 that extends in a straight line is 90% to 110% of the opening area of ​​the second opening 50B. The flow path cross-sectional area of ​​the portion of the first flow path 50 that extends in a straight line is the area enclosed by the inner circumferential surface of the first flow path 50 in a cross-section perpendicular to the direction in which the first flow path 50 extends.

[0050] As shown in Figure 5, the shaft portion 110 has four first annular grooves 52 and five second annular grooves 53. Each first annular groove 52 is recessed relative to the outer circumferential surface of the shaft portion 110. Therefore, in this embodiment, the outer circumferential surface of the shaft portion 110 is a specific circumferential surface. Furthermore, each first annular groove 52 extends 360 degrees around the central axis CA. Each first annular groove 52 is spaced apart in the direction along the central axis CA. Note that in Figure 5, only some of the multiple first annular grooves 52 and second annular grooves 53 are labeled with reference numerals.

[0051] Each second annular groove 53 is recessed relative to the outer circumferential surface of the shaft portion 110, similar to the first annular groove 52. Each second annular groove 53 extends 360 degrees around the central axis CA. One of the five second annular grooves 53 is located on the third positive Z1 side relative to the first annular groove 52 closest to the third positive Z1 direction. Another of the five second annular grooves 53 is located on the third negative Z2 side relative to the first annular groove 52 closest to the third negative Z2 direction. The remaining three second annular grooves 53 are located between adjacent first annular grooves 52 in the direction along the central axis CA.

[0052] As shown in Figure 5, the suction roll 100 has a plurality of seal rings 55. The seal rings 55 are annular in shape. The material of the seal rings 55 is synthetic rubber, silicone resin, etc. In other words, the material of the seal rings 55 is softer than the material of the shaft portion 110. Each seal ring 55 is fitted into the second annular groove 53. When fitted into the second annular groove 53, the outer surface of the seal ring 55 is positioned slightly outside the outer surface of the surrounding shaft portion 110. Note that in Figure 5, only some of the plurality of seal rings 55 are labeled with reference numerals.

[0053] As shown in Figure 6, the suction roll 100 has a roll section 120. The roll section 120 is cylindrical overall. The inner circumferential surface of the roll section 120 faces the outer circumferential surface of the seal ring 55. Specifically, the inner diameter of the roll section 120 is approximately the same as the outer diameter of the seal ring 55. The roll section 120 is rotatable in the circumferential direction about the central axis CA. In other words, the roll section 120 is rotatable relative to the shaft section 110 about the central axis CA.

[0054] Here, the space enclosed by the inner circumferential surface of the roll section 120, the inner circumferential surface of the first annular groove 52 of the shaft section 110 described above, and the outer surface of the seal ring 55 is defined as the flow path of the first annular groove 52. At this time, the flow path cross-sectional area of ​​the first annular groove 52 is within the range of 90% to 110% of the opening area of ​​the second opening 50B of the first flow passage 50. Note that the flow path cross-sectional area of ​​the first annular groove 52 is the area of ​​the first annular groove 52 when viewed in cross-section including the central axis CA.

[0055] The roll section 120 has a small diameter section 121 and a large diameter section 122. The small diameter section 121 is a portion of the roll section 120 including the end on the third positive direction Z1 side. The small diameter section 121 is cylindrical with respect to the central axis CA. Although not shown in the figures, the small diameter section 121 is connected to an electric motor via a power transmission mechanism consisting of a gear mechanism, pulleys, and a belt. Therefore, the roll section 120 is rotatable based on the power from the electric motor. The large diameter section 122 is the portion of the roll section 120 excluding the small diameter section 121. The large diameter section 122 is cylindrical with respect to the central axis CA. The outer diameter of the large diameter section 122 is larger than the outer diameter of the small diameter section 121. On the other hand, the inner diameter of the large diameter section 122 is the same as the inner diameter of the small diameter section 121. That is, the inner circumferential surface of the roll section 120 does not have a clear boundary between the small diameter section 121 and the large diameter section 122. The large-diameter section 122 is the part that winds up the sheet of object A placed on the mounting surface 11 of the stage 10.

[0056] As shown in Figure 7, the large-diameter portion 122 of the roll section 120 divides four second flow passages 70 that extend from the inner circumferential surface to the outer circumferential surface of the roll section 120. In Figure 7, each of the second flow passages 70 inside the large-diameter portion 122 is shown virtually. Each second flow passage 70 opens at a location on the inner circumferential surface of the roll section 120 that faces the first annular groove 52. Each second flow passage 70 is connected to another first annular groove 52. Therefore, each first flow passage 50 of the shaft section 110 is connected to another second flow passage 70 via another first annular groove 52. The second flow passages 70 also open on the outer circumferential surface of the roll section 120. In the following, the opening on the inner circumferential surface of the roll section 120 will be referred to as the internal opening 70A, and the opening on the outer circumferential surface will be referred to as the suction port 70B. Each second flow passage 70 extends radially from the internal opening 70A around the central axis CA, and then extends parallel to the central axis CA. Furthermore, each second flow passage 70 extends radially again around the central axis CA from the portion that extends parallel to the central axis CA to reach the suction port 70B.

[0057] The flow path cross-sectional area of ​​the second flow passage 70 is generally constant, except for the bent portion of the second flow passage 70 and the vicinity of the suction port 70B of the second flow passage 70. Specifically, for each second flow passage 70, the flow path cross-sectional area of ​​the portion extending in a straight line, excluding the vicinity of the suction port 70B, is within the range of 90% to 110% of the opening area of ​​the second opening 50B on the outer circumferential surface of the shaft portion 110. The definitions of opening area and flow path cross-sectional area are the same as in the case of the first flow passage 50.

[0058] Here, the four second flow passages 70 are distinguished as second flow passage 170, second flow passage 270, second flow passage 370, and second flow passage 470, respectively. When there is no need to distinguish between them, they are collectively referred to as second flow passage 70.

[0059] As shown in Figure 7, the second flow passage 170 branches into two from the internal opening 70A. That is, the second flow passage 170 has two suction ports 170B. The two suction ports 170B are located in the center of the large-diameter portion 122 in the direction along the central axis CA. Furthermore, these two suction ports 170B are aligned in the circumferential direction with respect to the central axis CA.

[0060] As shown in Figure 8, the second flow passage 270 branches into two from the internal opening 70A. That is, the second flow passage 270 has two suction ports 270B. The two suction ports 270B are located at positions offset in the circumferential direction from the suction port 170B, with the central axis CA as the center. The two suction ports 170B are aligned along the central axis CA. Note that the suction pad 111 and cylindrical body 112, which will be described later, are not shown in Figure 8.

[0061] Although not shown in the diagram, the second flow passage 370 branches into three from the internal opening 70A. That is, the second flow passage 370 has three suction ports 370B. The three suction ports 370B are located at positions offset in the circumferential direction from the suction port 270B, with the central axis CA as the center. Furthermore, each suction port 370B is located on the opposite side of the suction port 170B from the suction port 270B, with the central axis CA in between. The three suction ports 170B are aligned along the central axis CA.

[0062] As shown in Figure 7, the outer surface of the suction roll 100 is divided into two 180-degree angular regions in the circumferential direction centered on the central axis CA. Specifically, of the two suction ports 170B, the suction port 170B furthest from suction port 270B is used as the starting point, and the 180-degree range toward suction port 270B is designated as the first angular region R1, while the remaining 180-degree range is designated as the second angular region R2. In this case, the total number of suction ports 70B in the first angular region R1 is 6, while the total number of suction ports 70B in the second angular region R2 is 1. In other words, there are more suction ports 70B on the side of the first angular region R1.

[0063] As shown in Figure 9, the suction roll 100 has a suction pad 111 and a cylindrical body 112. The suction pad 111 is cylindrical overall. Specifically, the suction pad 111 has a mounting body 111A and a pad portion 111B. In this embodiment, the mounting body 111A and the pad portion 111B are integrated. The mounting body 111A is generally cylindrical. The mounting body 111A is inserted into the suction port 70B of the roll portion 120. The pad portion 111B is cylindrical and integrated with the mounting body 111A. The pad portion 111B has an inverse taper shape in which the inner and outer diameters increase as it moves away from the mounting body 111A in the direction of the central axis of the pad portion 111B. That is, a part of the suction pad 111 including the radial outer end centered on the central axis CA has larger inner and outer diameters as it moves outward in the radial direction. The material of the suction pad 111 has a Young's modulus smaller than that of the material of the roll portion 120. Specifically, the material of the suction pad 111 is synthetic rubber, silicone resin, elastomer, etc.

[0064] The cylindrical body 112 is cylindrical. Specifically, the cylindrical body 112 is a hollow bolt. The cylindrical body 112 is located inside the suction pad 111. The cylindrical body 112 extends radially along the central axis of the suction pad 111, that is, with respect to the central axis CA. A portion of the cylindrical body 112 is screwed into the second flow passage 70 through the suction port 70B. Here, the circumferential surface S is defined as the circumferential surface obtained by extending the outer circumferential surface of the roll portion 120 to the suction port 70B. At this time, the radially outer end of the cylindrical body 112 with respect to the central axis CA is located on the above-mentioned virtual circumferential surface S. Note that "located on the virtual circumferential surface S" here means that an error of 1 mm or less is permitted in the radial direction with respect to the central axis CA.

[0065] <About the configuration of the adhesive head> As shown in Figure 10, the adhesive head 160 includes a first mounting member 161 and a head body 162.

[0066] The first mounting member 161 is a rectangular plate. The first mounting member 161 is attached to the main surface of the mooring section 83 that faces the second positive direction Y1 direction of the second region 83B. The main surface of the first mounting member 161 is in contact with the main surface of the mooring section 83. The first mounting member 161 is attached to the center of the second region 83B in the direction of the horizontal axis Z. As described above, the mooring section 83 is capable of reciprocating along the movement axis Y. Therefore, the first mounting member 161 is capable of reciprocating along the movement axis Y together with the mooring section 83.

[0067] The head body 162 is attached to the surface of the first mounting member 161 facing the second positive direction Y1. The head body 162 is generally truncated square pyramidal. Specifically, the head body 162 has a tapered shape in which the area of ​​the cross-section parallel to the vertical axis X decreases as it moves toward the first negative direction X2. The head body 162 has an opposing surface 162B that faces the stage 10. The opposing surface 162B is the end face of the head body 162 on the first negative direction X2 side. The opposing surface 162B of the head body 162 is located between the edge of the first mounting member 161 on the first negative direction X2 side and the surface of the outer circumferential surface of the roll section 120 on the first negative direction X2 side, in the direction along the vertical axis X. That is, a part of the head body 162, including the opposing surface 162B, protrudes toward the first negative direction X2 side relative to the first mounting member 161. Furthermore, when viewed facing the first negative direction X2, the opposing surface 162B of the head body 162 lies on a virtual straight line that includes the diagonal parallel to the movement axis Y among the diagonals of the mounting surface 11 of the stage 10.

[0068] As shown in Figure 10, the adhesive head 160 has a first winding body 163 and a second winding body 165. Furthermore, the first winding body 163 has a core portion 163A and a winding body 163B. The core portion 163A is cylindrical. The winding body 163B is generally rectangular. The length of the diagonal of the main surface of the winding body 163B is approximately the same as the inner diameter of the core portion 163A. The winding body 163B is fitted into the core portion 163A. At this time, the main surface of the winding body 163B is perpendicular to the central axis of the core portion 163A.

[0069] The first winding body 163 is mounted on the main surface of the first mounting member 161, specifically on the side facing the second positive direction Y1. The first winding body 163 is also rotatably mounted to the first mounting member 161 around an axis passing through the geometric center of the main surface of the winding body 163B. The axis of rotation of the first winding body 163 is parallel to the movement axis Y. The first winding body 163 is positioned on the side facing the first positive direction X1 and the third positive direction Z1 relative to the head body 162.

[0070] The second winding body 165 has a shape in which disc-shaped flanges are connected to both ends of a cylinder. The second winding body 165 is mounted on the main surface of the first mounting member 161, on the side facing the second positive direction Y1. The second winding body 165 is also rotatably mounted to the first mounting member 161 about the axis of the center of the cylindrical portion of the second winding body 165. The axis of the center of rotation of the second winding body 165 is parallel to the movement axis Y. The second winding body 165 is positioned on the side facing the first positive direction X1 and the side facing the third negative direction Z2 relative to the head body 162. Although not shown in the illustration, the adhesive head 160 has a drive device for rotating the second winding body 165 in a predetermined direction, and a reverse rotation prevention mechanism for preventing the second winding body 165 from rotating in the opposite direction to the predetermined direction. In this embodiment, when viewed from a direction facing the second negative direction Y2, the drive device rotates the second winding body 165 counterclockwise.

[0071] As shown in Figure 10, the adhesive head 160 has a columnar portion 167 and a clamp 168. The columnar portion 167 is cylindrical. The columnar portion 167 is mounted on the main surface of the first mounting member 161, on the side facing the second positive direction Y1. The central axis CA of the columnar portion 167 is parallel to the movement axis Y. The columnar portion 167 is located on the side facing the third positive direction Z1 relative to the opposing surface 162B in the horizontal axis Z direction. The columnar portion 167 is also located between the opposing surface 162B and the first winding body 163 in the vertical axis X direction.

[0072] The clamp 168 is mounted on the main surface of the first mounting member 161, on the side facing the second positive direction Y1. Specifically, the clamp 168 has a housing 168A, a pair of piston rods 168B, and a pressing portion 168C. ​​The housing 168A is rectangular parallelepiped. The housing 168A is attached to the first mounting member 161. The housing 168A also has a cavity inside. The pair of piston rods 168B extend parallel to the horizontal axis Z. Each piston rod 168B protrudes from the housing 168A toward the third negative direction Z2. Each piston rod 168B also penetrates the wall of the housing 168A. Therefore, a portion of each piston rod 168B reaches the interior of the housing 168A. Each piston rod 168B is biased toward the third negative direction Z2 by an elastic member housed within the housing 168A. The pressing portion 168C is connected to the end of each piston rod 168B on the third negative direction Z2 side. The pressing portion 168C is a rectangular plate shape. The main surface of the pressing portion 168C is perpendicular to the third negative direction Z2. The clamp 168 configured in this way is located on the third positive direction Z1 side with respect to the columnar portion 167. Therefore, the pressing portion 168C of the clamp 168 is pressed against the columnar portion 167 from the third positive direction Z1 side to the third negative direction Z2 side.

[0073] The adhesive head 160 is equipped with an adhesive tape 164. The adhesive tape 164 is in the shape of a strip. The width of the adhesive tape 164 is shorter than the length of the columnar portion 167 described above. One side of the adhesive tape 164 is adhesive. On the other hand, the other side of the adhesive tape 164 is not adhesive. The adhesive tape 164 is wound onto the core portion 163A of the first winding body 163 from the outside. In other words, the adhesive tape 164 is wound in a ring shape. Then, the adhesive tape 164 is pulled out from the ring-shaped portion to the opposing surface 162B, passing between the columnar portion 167 and the pressing portion 168C of the clamp 168. Therefore, a portion of the adhesive tape 164 is sandwiched between the columnar portion 167 and the pressing portion 168C of the clamp 168.

[0074] The non-adhesive side of the adhesive tape 164 is in contact with the opposing surface 162B of the head body 162. Therefore, the adhesive side of the adhesive tape 164 on the opposing surface 162B of the head body 162 faces the same direction as the opposing surface 162B. Hereafter, the adhesive side of the adhesive tape 164 on the opposing surface 162B of the head body 162 will be referred to as the adhesive surface 160A. In other words, the adhesive surface 160A faces the placement surface 11 on which the object A on the stage 10 is placed. Therefore, there is an adhesive surface 160A on the opposing surface 162B of the head body 162. In other words, the adhesive head 160 has an adhesive surface 160A that can contact the object A on the stage 10.

[0075] The end of the adhesive tape 164 opposite to the first winding body 163 is fixed to the second winding body 165. Therefore, when the second winding body 165 rotates, the adhesive tape 164 is wound onto the second winding body 165. Consequently, an equal length of adhesive tape 164 is newly pulled out from the first winding body 163 toward the opposite surface 162B. In other words, as the second winding body 165 rotates, a new portion of the adhesive tape 164 becomes the adhesive surface 160A.

[0076] <Regarding the configuration of the holding mechanism> As shown in Figure 10, the peeling device 200 has a pressing mechanism 190. The pressing mechanism 190 includes an extension 193, a pair of movable shafts 194, a pair of biasing parts 191, and a pressing part 192. The extension 193 is attached to the first mounting member 161. The extension 193 is plate-shaped. The main surface of the extension 193 is perpendicular to the vertical axis X. The extension 193 extends in the direction along the movable axis Y to the second positive direction Y1 side relative to the head body 162.

[0077] The pair of movable shafts 194 are cylindrical. Each movable shaft 194 penetrates the extension 193 in a direction along the vertical axis X. Furthermore, each movable shaft 194 is aligned along the horizontal axis Z. The movable shafts 194 are movable relative to the extension 193 in a direction along the vertical axis X. Specifically, the movable shafts 194 are movable along the vertical axis X while sliding against the inner circumferential surface of the through-hole in the extension 193. Although not shown in the illustration, the movable shafts 194 are secured to prevent them from coming out of the extension 193 in the first negative direction X2.

[0078] The pressing portion 192 is approximately rectangular parallelepiped in shape. The pressing portion 192 is connected to the end of the pair of biasing portions 191 on the first negative direction X2 side. Therefore, the surface of the pressing portion 192 facing the first negative direction X2 side is the contact surface 192A.

[0079] Each biasing portion 191 is a helical spring. The biasing portion 191 surrounds the movable shaft 194 from the outside, between the retaining portion 192 and the extension portion 193. In other words, the movable shaft 194 passes through the biasing portion 191. One end of each biasing portion 191 is connected to the retaining portion 192. The other end of each biasing portion 191 is connected to the extension portion 193.

[0080] The position of the contact surface 192A of the pressing portion 192 changes in the direction along the vertical axis X as the movable shaft 194 moves relative to the extension portion 193. The contact surface 192A is movable in the direction along the vertical axis X from the same position as the adhesive surface 160A of the head body 162 to the lower end of the outer circumferential surface of the roll portion 120 that is closest to the stage 10. In other words, the contact surface 192A is movable relative to the adhesive surface 160A from the same position as the adhesive surface 160A to a position closer to the stage 10 than the adhesive surface 160A. Furthermore, as the stage 10 moves up and down, the contact surface 192A of the pressing mechanism 190 can come into contact with the object A on the stage 10.

[0081] Since a pair of biasing parts 191 are interposed between the pressing part 192 and the extension part 193, the pressing part 192 is biased toward the first negative direction X2. When the stage 10 is pushing the pressing part 192 toward the first positive direction X1, each biasing part 191 is elastically compressed. When the stage 10 moves toward the first negative direction X2, each biasing part 191 elastically returns to its original position and the contact surface 192A moves toward the first negative direction X2. The pressing mechanism 190 is attached to the head body 162 of the adhesive head 160, and is therefore able to move relative to the stage 10 along the movement axis Y together with the adhesive head 160.

[0082] <Regarding the operation of the adhesive head and pressing mechanism> The operation of the adhesive head 160 will now be explained. First, the adhesive head 160 moves to the side of the main surface of object A where the vertex closest to the second negative direction Y2 is located. Therefore, as shown in Figure 11, the adhesive surface 160A of the adhesive head 160 faces object A in the vicinity of the vertex on the second negative direction Y2 side of object A. As mentioned above, the pressing mechanism 190 is located on the second positive direction Y1 side of the adhesive head 160. Therefore, the contact surface 192A of the pressing mechanism 190 faces the area of ​​the main surface of object A that is on the second positive direction Y1 side rather than the area that faces the opposing surface 162B of the adhesive head 160. Note that in Figure 11, the positions of the adhesive surface 160A and the contact surface 192A are shown virtually.

[0083] In this state, the lifting device 40 moves the mounting surface 11 of the stage 10 toward the first positive direction X1. At this time, the contact surface 192A of the pressing part 192 is within the range from the same position as the adhesive surface 160A of the head body 162 to the mounting surface 11 of the stage 10 in the vertical axis X direction. Therefore, the contact surface 192A contacts the mounting surface 11 of the stage 10 before the opposing surface 162B of the head body 162. Subsequently, as the pair of biasing parts 191 are elastically compressed, the contact surface 192A moves toward the first positive direction X1 together with the stage 10. Then, the opposing surface 162B of the adhesive head 160 contacts the mounting surface 11 of the stage 10. At this time, the adhesive surface 160A of the head body 162 adheres to the sheet of object A. The position where the adhesive surface 160A adheres to the sheet of object A is one corner region of the rectangular object A. Furthermore, the pair of biasing portions 191 of the holding mechanism 190 are in a state of elastic compression in the vertical axis X direction.

[0084] From the above state, the mounting surface 11 of the stage 10 moves in the first negative direction X2. At this time, the contact surface 192A of the pressing part 192 continues to press against the stage 10 until the biasing part 191 is fully extended in the vertical axis X direction. Meanwhile, as the stage 10 separates from the head body 162 and the adhesive surface 160A, the area of ​​the sheet to which the adhesive surface 160A is attached partially peels off from the body before the adhesive surface 160A detaches from the sheet. More specifically, the adhesive surface 160A partially peels off the sheet in one corner area of ​​the object A from the body. Note that because the pressing part 192 is pressing against the sheet, when viewed from the vertical axis direction, the area of ​​the sheet on the second negative direction Y2 side of the pressing part 192 partially peels off from the body. As the stage 10 moves further in the first negative direction X2, the pressing part 192 separates from the stage 10.

[0085] <About the operation of the suction roll> The operation of the suction roll 100 will be explained. It is assumed that the sheet has been partially peeled off the object A by the adhesive head 160 and the pressing mechanism 190.

[0086] First, as shown in Figure 12, the suction roll 100 moves along the movement axis Y so that it is positioned on the first positive direction X1 side relative to the object A. Then, as the stage 10 moves in the first positive direction X1, the suction roll 100 comes into contact with the sheet of object A. At this time, the area of ​​the suction roll 100 that first comes into contact is the suction pad 111 attached to the outside of the suction port 170B. At this time, the suction pad 111 comes into contact with the portion of the sheet of object A that has been partially peeled off by the adhesive head 160. The suction port 170B is connected to the pump 90 via the second flow passage 70, the flow path of the first annular groove 52, and the first flow passage 50. Therefore, when the pump 90 sucks air in the first flow passage 50, the suction port 170B can suck air outside the outer surface of the roll section 120. Due to this suction force, the suction pad 111 at the suction port 170B adsorbs the partially peeled portion of the sheet. Then, as shown in Figure 13, the suction roll 100 rotates while moving toward the second positive direction Y1. The rotation direction of the suction roll 100 is counterclockwise when viewed from the direction facing the third negative direction Z2. As the roll section 120 rotates, the suction ports 170B, 270B, 370B, and 470B sequentially adsorb the sheet. In this way, the roll section 120 can wind up the sheet.

[0087] Furthermore, even if the roll section 120 rotates relative to the shaft section 110, the connection between the first flow passage 50 and the second flow passage 70 is maintained via the flow path of the first annular groove 52. Therefore, the suction port 70B can suck up the sheet regardless of the angular position of the roll section 120 relative to the shaft section 110. In addition, because the seal ring 55 is fitted into the second annular groove 53 of the shaft section 110, even if a gap occurs between the first annular groove 52 and the inner circumferential surface of the roll section 120, the exchange of air between the flow path of the first annular groove 52 and the flow path of another adjacent first annular groove 52 is suppressed. Therefore, the pump 90 can independently suck up air from each of the first flow passages 50 and the second flow passage 70.

[0088] Furthermore, as the suction roll 100 rotates while winding up the sheet, the clamp mechanism 20 on the stage 10 fixes the side of the main surface of object A that has a vertex on the second negative direction Y2 side to the stage 10. This prevents object A from shifting while the suction roll 100 is rotating.

[0089] <Regarding the effects of the embodiment> The effects of this embodiment will now be explained. (1) In the above embodiment, the outer circumferential surface of the shaft portion 110 has a first annular groove 52. Therefore, even when the roll portion 120 rotates, the first air passage 50 of the shaft portion 110 and the second air passage 70 of the roll portion 120 are connected via the air passage of the first annular groove 52. As a result, no matter what angular position the roll portion 120 is at with respect to the shaft portion 110, the second air passage 70 can maintain communication with the first air passage 50. Moreover, each first air passage 50 is connected to another second air passage 70. Therefore, for example, by adjusting the opening degree of the control valve 91 for each first air passage 50, the strength, duration, and timing of air suction in each first air passage 50 can be adjusted.

[0090] (2) In the above embodiment, a seal ring 55 is fitted into the second annular groove 53. This prevents air from leaking between adjacent first annular grooves 52. By preventing air from leaking between the first annular grooves 52, the risk of unintended air being drawn in from the suction port 70B can be reduced.

[0091] (3) Suppose the opening on the side of the first flow passage 50 that connects to the pump 90 is located on the outer circumferential surface of the shaft portion 110. In this case, depending on the arrangement of the pipes connected to the pump 90, the pipes of the pump 90 may get in the way when the roll portion 120 rotates. Also, if the openings are concentrated in a specific area in the circumferential direction of the outer circumferential surface of the shaft portion 110, there is a concern that that part may become brittle.

[0092] In this regard, in the above embodiment, the other end of the first flow passage 50 is open at one end face of the shaft portion 110. With this configuration, there is little possibility that the pipe connected to the first flow passage 50 will get in the way when the roll portion 120 rotates. Also, since there is no opening of the first flow passage 50 on the outer circumferential surface of the shaft portion 110, this opening will not cause a decrease in the strength of the outer circumferential surface of the shaft portion 110.

[0093] (4) In the above embodiment, the second flow passage 70 has openings at multiple locations on the outer circumferential surface of the roll section 120. The multiple openings on the outer circumferential surface of the roll section 120 in one second flow passage 70 are aligned along the central axis CA.

[0094] With this configuration, the suction pads 111, which are aligned in the direction of the central axis CA, simultaneously adsorb the sheet. Therefore, when the sheet is adsorbed onto the roll section 120, the load on the sheet in the direction of the central axis CA is less likely to be uneven. As a result, the sheet is less likely to tear.

[0095] (5) In the above embodiment, the second flow passage 70 has openings at multiple locations on the outer circumferential surface of the roll section 120. The multiple suction ports 70B on the outer circumferential surface of the roll section 120 in the second flow passage 70 are arranged in a direction along the circumferential direction with respect to the central axis CA. With this configuration, for example, in the area of ​​the sheet that is first wound up, the load on the sheet generated when winding up is less likely to be uneven, so the sheet is less likely to tear.

[0096] (6) In the above embodiment, with respect to the linearly extending portion of each flow passage, the flow cross-sectional areas of the first flow passage 50 and the second flow passage 70 are within the range of 90% to 110% of the opening area of ​​the first flow passage 50 on the outer circumferential surface of the shaft portion 110. When the flow cross-sectional area does not change significantly in this way, the air velocity becomes uniform at each point in the flow passage, so that losses associated with air flow are less likely to increase.

[0097] (7) In the above embodiment, the flow path cross-sectional area of ​​the first annular groove 52 is within the range of 90% to 110% of the opening area of ​​the first flow passage 50 on the outer circumferential surface of the shaft portion 110. In other words, the flow path cross-sectional area of ​​the first annular groove 52 is not significantly different from the flow path cross-sectional area of ​​the first flow passage 50. Therefore, turbulence of the airflow at the boundary between the first annular groove 52 and the first flow passage 50 can be prevented.

[0098] (8) In the above embodiment, the peeling device 200 has an adhesive head 160 that can come into contact with the object A on the stage 10. By bringing the adhesive head 160 into contact with object A on the stage and moving the adhesive head, the sheet on object A can be partially peeled off. In particular, the adhesive head 160 partially peels off the sheet in one corner area of ​​object A. This partially peeled area is the area where the suction roll 100 first adheres. Since the suction roll 100 peels off starting from this area, the sheet on object A can be peeled off without applying excessively strong suction from the suction port 70B of the suction roll 100. Furthermore, since the sheet is peeled off while being wound onto the outer surface of the suction roll 100, force is less likely to concentrate on specific parts of the sheet. As a result, the sheet is less likely to tear when being wound up.

[0099] (9) In the above embodiment, the pressing mechanism 190 is movable relative to the stage 10 along the vertical axis X together with the adhesive head 160. The contact surface 192A of the pressing mechanism 190 is movable relative to the adhesive surface 160A from the same position as the adhesive surface 160A to a position closer to the stage 10 than the adhesive surface 160A, and is biased toward the stage 10.

[0100] Therefore, when the adhesive head 160 peels off the sheet, the pressing part 192 holds the sheet in place. This allows the area of ​​the sheet that the adhesive head 160 peels off to be limited by the pressing part 192. If the area where the sheet is partially peeled off can always be limited in this way, it becomes easy to align the partially peeled area of ​​the sheet with the suction roll 100.

[0101] (10) In the above embodiment, it is conceivable that the adhesive strength of the adhesive surface 160A will decrease as the adhesive surface 160A repeatedly adheres to the sheet. In the above embodiment, the second winding body 165 winds up the portion of the adhesive tape 164 whose adhesive strength has decreased, while new adhesive tape 164 is drawn out from the first winding body 163. In this way, the adhesive surface 160A can maintain an adhesive strength of a constant level.

[0102] (11) In the above embodiment, the mounting surface 11 is movable along the vertical axis. As the stage 10 moves in the direction of the vertical axis X, the adhesive head 160 can make contact with the sheet and peel the sheet from the main body. Therefore, it is not necessary to design a support mechanism 80 or the like, which has a more complex structure, to move in the direction of the vertical axis X.

[0103] (12) In the above embodiment, the suction roll 100 has a cylindrical suction pad 111 connected to the suction port 70B. As a result, the sheet is wound onto the suction roll 100 via the suction pad 111. The pad portion 111B of the suction pad 111 has an inverse tapered shape. The material of the suction pad 111 has a Young's modulus smaller than that of the roll portion 120. Therefore, the load on the sheet is reduced when it is wound onto the suction roll 100. This helps to suppress damage to the sheet.

[0104] (13) In the above embodiment, the suction roll 100 has a cylindrical body 112 extending radially inside the suction pad 111. As a result, the area through which air passes is narrower on the outer circumferential surface side of the roll portion 120 of the second flow passage 70 than the area through which air passes in the second flow passage 70. This prevents, for example, the sheet from being sucked into the interior of the second flow passage 70. In addition, in the radial direction centered on the central axis CA, the outer end of the cylindrical body 112 is located on the virtual circumferential surface S when the outer circumferential surface of the roll portion 120 is extended into the suction port 70B. This prevents the sheet from being sucked in beyond the virtual circumferential surface S, while also preventing the outer end of the cylindrical body 112 from damaging the sheet.

[0105] (14) In the above embodiment, the number of suction ports 70B is increased in the first angular region R1 of the outer surface of the suction roll 100. Therefore, if this first angular region R1 is positioned to face the sheet at the beginning of peeling, the sheet can be adsorbed by multiple suction ports 70B. At the beginning of peeling the sheet, a large force is applied to peel it off. By distributing this force through multiple suction ports 70B, it is possible to avoid concentrating the force on a specific part of the sheet.

[0106] (15) In the above embodiment, there is one or more suction ports 70B in each of the two angular regions on the outer surface of the roll section 120. With this configuration, the sheet can be sucked for most of the time from the start to the end of peeling. Therefore, it is possible to prevent the sheet from shifting or falling off while peeling it with the suction roll 100.

[0107] <Example of changes> This embodiment can be implemented with the following modifications. This embodiment and the following modifications can be combined with each other to the extent that they do not contradict each other technically.

[0108] The components of the peeling device 200, excluding the suction roll 100, can be modified as appropriate. For example, the configuration of the support mechanism 80 that supports the suction roll 100 is not specified. That is, the support mechanism 80 can have any configuration as long as it can support the suction roll 100. Also, the configuration of the adhesive head 160 and the pressing mechanism 190 is not specified, and they may be omitted.

[0109] The shape of the mounting surface 11 of the stage 10 is not limited to the example of this embodiment. For example, the mounting surface 11 may be circular. Also, the stage 10 does not need to have a lifting function as long as the adhesive head 160 and the stage 10 are relatively movable.

[0110] • The clamping mechanism 20 is not required on the stage 10. In that case, it is desirable to have a mechanism to prevent the object A from shifting on the stage 10 while the suction roll 100 is peeling off the film. For example, if the object A is a ferromagnetic material, it may be fixed by magnetic force. Alternatively, the object A may be fixed by using a device that attracts the object A from the back side of the mounting surface 11 of the stage 10.

[0111] Furthermore, there may be a roller 210 for holding down the object A, for example, as shown in the example in Figure 14. The roller 210 is a roller that can rotate about an axis parallel to the horizontal axis Z. The roller 210 is attached to the first positive direction X1 side of the second region 83B of the mooring section 83. More specifically, the lower end of the outer circumferential surface of the roller 210 closest to the stage 10 is located on the stage 10 side relative to the lower end of the outer circumferential surface of the suction roll 100 closest to the stage 10, in the direction along the vertical axis X. Therefore, the roller 210 can contact the object A placed on the stage 10. In the above embodiment, the suction roll 100 can wind up the sheet with the roller 210 in contact with the object A. Therefore, the roller 210 can hold down the object A while the suction roll 100 is winding up the sheet. Therefore, even if the peeling device 200 does not have a clamping mechanism 20, the object A is prevented from shifting while the suction roll 100 is winding up the sheet.

[0112] The lifting device 40 is not limited to the example of this embodiment. In addition to or instead of the lifting device 40, a mechanism that allows the mooring section 83 to reciprocate in the vertical axis X direction may be employed. In other words, one or more selected from the suction roll 100, adhesive head 160, and holding mechanism 190 may be able to reciprocate in the vertical axis X direction.

[0113] The linear motion mechanism 61 is not limited to the example of this embodiment. In addition to or instead of the linear motion mechanism 61, a mechanism that allows the stage 10 to reciprocate along the movement axis Y may be employed. The support mechanism 80 is not limited to the example of this embodiment. For example, the caster part 85 may be replaced with a shaft and a bush. Also, the caster part 85 may be omitted.

[0114] The motor for moving the support mechanism 80, the pump 90 capable of drawing in air, and the drive mechanism for rotating the roll section 120 are not limited to the examples of this embodiment. For example, one or more selected from the motor for moving the support mechanism 80, the pump 90 capable of drawing in air, and the drive mechanism for rotating the roll section 120 may be located outside the housing 82. Furthermore, the housing 82 may be omitted.

[0115] The number of suction ports 70B is not limited to the example of this embodiment, as long as there are two or more. In the example of the above embodiment, there are eight suction ports 70B, but the number of suction ports 70B may be more or less than eight. Also, the number of suction ports 70B in the first angular region R1 and the second angular region R2 may be the same. Accordingly, the number of second flow passages 70 and the number of suction ports 70B may increase or decrease.

[0116] The arrangement of the suction ports 70B on the outer surface of the suction roll 100 is not limited to the example of this embodiment. For example, the suction ports 70B may be present only in the first angular region R1. Also, some of the multiple suction ports 70B of one second flow passage 70 may be aligned along the central axis CA, while other parts may be aligned along the circumferential direction.

[0117] Furthermore, suction ports 70B may be located near the boundary of the winding region C. For example, in the suction roll 100 shown in Figure 15, the second flow passage 270 branches into four from the internal opening 70A. That is, the second flow passage 270 has four suction ports 270B. The four suction ports 170B are aligned along the central axis CA. Also, all four suction ports 170B are located inside the winding region C. Of the four suction ports 270B, the one furthest in the third positive direction Z1 is near the boundary of the winding region C on the third positive direction Z1 side. On the other hand, the one furthest in the third negative direction Z2 is near the boundary of the winding region C on the third negative direction Z2 side. Similarly, in the suction roll 100, the second flow passage 370 branches into five from the internal opening 70A. That is, the second flow passage 370 has five suction ports 270B. The five suction ports 370B are aligned along the central axis CA. Furthermore, all five suction ports 370B are located within the winding region C. Of the five suction ports 370B, the one furthest to the third positive direction Z1 is near the boundary line of the winding region C on the third positive direction Z1 side. Conversely, the one furthest to the third negative direction Z2 is near the boundary line of the winding region C on the third negative direction Z2 side. As a result, within the roughly rectangular winding region C, multiple suction ports 70B, specifically three, are arranged along one side of the winding region C. Because the suction ports 270B and some of the suction ports 370B are positioned near the boundary line along one side of the winding region C, the sheet can be stably peeled off from the portion that conforms to the outer shape of the main surface of object A.

[0118] The roll section 120 does not have to be strictly cylindrical. For example, a part of the outer surface of the roll section 120 may be raised to match the shape of the main surface of object A. By having the outer surface of the roll section 120 partially raised, the area of ​​the sheet that the roll section 120 contacts can be limited. As a result, the area of ​​the sheet that you want to peel off will be peeled off, while the roll section 120 will not come into contact with the area of ​​the sheet that you want to leave on. Therefore, no load will be placed on the sheet in the area where the sheet is left on due to contact with the roll section 120.

[0119] The position of the first openings 50A is not limited to the example of this embodiment. For example, some of the first openings 50A may be on one end face of the shaft portion 110, while other first openings 50A may be on the other end face. Also, the first openings 50A do not have to be arranged at equal intervals in the circumferential direction around the central axis CA of the shaft portion 110. Furthermore, the opening areas of the first openings 50A do not have to be approximately the same.

[0120] The first opening 50A may be located on the outer circumferential surface of the shaft portion 110, rather than on the end face of the shaft portion 110. The number of first flow passages 50 is not limited to this embodiment, as long as there are two or more. For example, the number of first flow passages 50 may be less than or more than four. The same applies to the second flow passages 70.

[0121] The shape of the flow channel cross-sections of the first flow channel 50 and the second flow channel 70 is not limited to the example of this embodiment. For example, they may be polygonal or elliptical. Also, the first flow channel 50 and the second flow channel 70 may extend in a curved manner.

[0122] The multiple suction ports 70B of one second flow passage 70 do not have to be aligned along the central axis CA, nor do they have to be aligned along the circumferential direction with respect to the central axis CA. Furthermore, the second flow passage 70 may extend in two different directions: along the central axis CA and along the circumferential direction with respect to the central axis CA.

[0123] The flow path cross-sectional area of ​​the linearly extending portion of the first flow path 50 is not limited to the example of this embodiment. Depending on the location, the flow path cross-sectional area of ​​the linearly extending portion of the first flow path 50 may be less than 90% or more than 110% of the opening area of ​​the first opening 50A. The same applies to the second flow path 70.

[0124] The flow path cross-sectional area of ​​the first annular groove 52 is not limited to the example of this embodiment. Depending on the location, the flow path cross-sectional area of ​​the first annular groove 52 may be less than 90% or more than 110% of the opening area of ​​the first opening 50A.

[0125] The number of second annular grooves 53 is not limited to the example of this embodiment. For example, the number of second annular grooves 53 may be more than four or less than four. The number of seal rings 55 is not limited to the example of this embodiment. For example, the number of seal rings 55 may be more or less than 5. Also, the seal rings 55 may be omitted. If the seal rings 55 are omitted, the second annular groove 53 may also be omitted.

[0126] The first annular groove 52 may be located on the inner circumferential surface side of the roll portion 120. When either the outer circumferential surface of the shaft portion 110 or the inner circumferential surface of the roll portion 120 is designated as a specific circumferential surface, it is sufficient that the specific circumferential surface is recessed. The same applies to the second annular groove 53.

[0127] The first annular groove 52 and the second annular groove 53 may be located on different circumferential surfaces. For example, the first annular groove 52 may be on the outer circumferential surface of the shaft portion 110, and the second annular groove 53 may be on the inner circumferential surface of the roll portion 120. The reverse is also true.

[0128] The radially outer end of the roll portion 120 of the cylindrical body 112 does not have to be located on the virtual circumferential surface S formed when the outer circumferential surface of the roll portion 120 is extended to the suction port 70B. The end of the cylindrical body 112 may be inside the outer circumferential surface of the roll portion 120, or it may protrude outward. Furthermore, the cylindrical body 112 is not limited to a hollow bolt as long as it is cylindrical in shape through which air can flow. Moreover, the suction roll 100 does not have to have a cylindrical body 112.

[0129] The shape of the suction pad 111 is not limited. Specifically, the suction pad 111 does not need to have a reverse tapered portion. The mounting body 111A and the pad portion 111B of the suction pad 111 may be molded separately. Furthermore, the material of the suction pad 111 is not limited to those exemplified in the above embodiment. Moreover, the suction roll 100 does not need to have a suction pad 111.

[0130] The adhesive head 160 does not necessarily have to be attached to the first mounting member 161. For example, the adhesive head 160 may always be on the first positive direction X1 side of the stage 10. In this case, it is sufficient that the adhesive head 160 can move from a position where it can contact the stage 10 to a position where it does not contact the suction roll 100.

[0131] The adhesive head 160 is not limited to the example of this embodiment. For example, the adhesive tape 164 does not have to be wound onto the first winding body 163. Also, the second winding body 165 does not have to collect the adhesive tape 164 that has become unusable due to a decrease in adhesive strength, for example. For example, there may be a mechanism to cut off and discard the unnecessary portion of the adhesive tape 164.

[0132] The adhesive head 160 may be movable along the vertical axis X on the second region 83B of the mooring section 83. In this case, a known linear motion mechanism can be interposed between the adhesive head 160 and the second region 83B. In this case, the power source for the adhesive head 160 may be an electric motor or a hydraulic system.

[0133] In this modified example, in addition to the stage 10, the adhesive head 160 attached to the first mounting member 161 and the pressing mechanism 190 attached to the adhesive head 160 are movable in the vertical axis X direction. Here, let's assume that of the stage 10 and the first mounting member 161, only the stage 10 is movable. In this case, the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A is limited to the distance that the stage 10 can move. Note that the "maximum distance" here refers to the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A when the length of the biasing part 191 in the vertical axis X direction is its natural length. If the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A is longer than the distance that the stage 10 can move, the adhesive surface 160A and the contact surface 192A will not be able to contact the stage 10 at the same time. In such a case, the adhesive head 160 will not be able to peel off the sheet.

[0134] In contrast, in the above embodiment, both the stage 10 and the first mounting member 161 are movable. Therefore, the maximum distance in the vertical axis X direction from the adhesive surface 160A to the contact surface 192A is the sum of the movable distance of the stage 10 and the movable distance of the first mounting member 161. That is, the adhesive surface 160A can move up to this sum from a state in which both the adhesive surface 160A and the contact surface 192A are simultaneously in contact with the stage 10. Therefore, the adhesive head 160 can peel off a wider area of ​​the sheet. As a result, the adhesive head 160 can peel off the sheet more reliably.

[0135] The adhesive surface 160A of the adhesive head 160 does not necessarily have to be made of adhesive tape 164. For example, adhesive may be applied to the opposing surface 162B of the adhesive head 160. In this case, it is preferable that the adhesive strength of the adhesive is weak enough to allow the sheet to be peeled off the adhesive surface 160A.

[0136] The biasing unit 191 is not limited to the example of this embodiment. For example, pneumatic equipment such as an air cylinder may be used in addition to or instead of the biasing unit 191. The retaining mechanism 190 may be omitted.

[0137] <Note> The technical concepts that can be understood from the above embodiments and modified examples are described below. [1] A suction roll comprising a cylindrical shaft portion having a central axis, and a roll portion that is cylindrical with its inner circumferential surface facing the outer circumferential surface of the shaft portion and is rotatable relative to the shaft portion about the central axis, wherein the shaft portion comprises a plurality of first flow passages opening at one end of the outer circumferential surface of the shaft portion, and the roll portion comprises a plurality of second flow passages extending from the inner circumferential surface to the outer circumferential surface of the roll portion, and when either the outer circumferential surface of the shaft portion or the inner circumferential surface of the roll portion is designated as a specific circumferential surface, the specific circumferential surface has a plurality of annular grooves extending in an annular shape about the central axis, the plurality of annular grooves are arranged at intervals in the direction along the central axis, and each of the first flow passages is connected to each of the second flow passages via each of the annular grooves.

[0138] [2] The suction roll according to [1], wherein the annular groove is designated as the first annular groove, the specific circumferential surface has a second annular groove extending in an annular shape with respect to the central axis, the second annular groove is located between adjacent first annular grooves in the direction along the central axis, and the second annular groove is fitted into the second annular groove.

[0139] [3] The suction roll according to [1] or [2], wherein the other end of the first flow passage is open at one end face of the shaft portion. [4] The second flow passage has openings at multiple locations on the outer surface of the roll portion, and the multiple openings on the outer surface of the roll portion in one of the second flow passages are aligned along the central axis, as described in any one of [1] to [3].

[0140] [5] The suction roll according to any one of [1] to [4], wherein the second flow passage has openings at multiple locations on the outer surface of the roll portion, and the multiple openings on the outer surface of the roll portion in one of the second flow passages are arranged along the circumferential direction with respect to the central axis. [Explanation of symbols]

[0141] CA…Central axis 12A…End face 50…1st flow path 52...First annular groove 53...Second ring groove 55... Seal ring 70…Second flow path 100... Adsorption Roll 110... Shaft 120... Roll section 170…Second flow path 270…Second flow path 370…Second flow path 470…Second flow path

Claims

1. A cylindrical shaft having a central axis, A roll section is cylindrical in shape, with its inner circumferential surface facing the outer circumferential surface of the shaft section, and is rotatable relative to the shaft section about the central axis, Equipped with, The shaft portion comprises a plurality of first flow passages, one end of which opens on the outer circumferential surface of the shaft portion. The roll section comprises a plurality of second flow passages extending from the inner circumferential surface to the outer circumferential surface of the roll section. When either the outer circumferential surface of the shaft portion or the inner circumferential surface of the roll portion is designated as a specific circumferential surface, The aforementioned specific circumferential surface has a plurality of annular grooves extending in an annular shape with respect to the central axis, The multiple annular grooves are arranged at intervals along the central axis, Each of the first flow passages is connected to a separate second flow passage via a separate annular groove. Adsorption roll.

2. When the aforementioned annular groove is designated as the first annular groove, The aforementioned specific circumferential surface has a second annular groove extending in an annular shape with respect to the central axis, The second annular groove is located between adjacent first annular grooves in the direction along the central axis, It comprises an annular seal ring fitted into the second annular groove. The adsorption roll according to claim 1.

3. The other end of the first flow passage is open at one end face of the shaft portion. The adsorption roll according to claim 1.

4. The second flow passage is open at multiple locations on the outer surface of the roll section, The multiple openings on the outer circumferential surface of the roll portion in one of the second flow passages are aligned along the central axis. The adsorption roll according to claim 1.

5. The second flow passage is open at multiple locations on the outer surface of the roll section, The multiple openings on the outer circumferential surface of the roll portion in one of the second flow passages are arranged along the circumferential direction with respect to the central axis. The adsorption roll according to claim 1.

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