Robots for high-temperature applications

Abstract

The present invention provides a device and method comprising a robot drive unit and a robot arm connected thereto. [Solution] In the apparatus 10, the robot arm 14 comprises a first link 66 connected to a drive unit 12, a second link 68 rotatably connected to the first link by a rotary joint 76, and an end effector (third link 70) rotatably connected to the second link by a second rotary joint 78 and suitable for picking, transporting, and placing semiconductor wafers. The end effector comprises a heat choke 84 located between the substrate support area 71 of the end effector and the second rotary link. At least one of the first and second rotary joints comprises rotary thermal couplings 94, 96, the rotary thermal couplings comprising a plurality of interleaved members rotatable relative to each other.

Description

[Technical Field]

[0001] Exemplary and non-limiting embodiments generally relate to robots capable of handling high-temperature payloads and suitable for operation in high-temperature environments, such as semiconductor wafer processing systems. Brief description of the prior art

[0002] U.S. Patent No. 10,569,430 discloses heat transfer in robotic drive units and arms, which is incorporated herein by reference in its entirety. U.S. Patent No. 10,424,498 (which is incorporated herein by reference in its entirety) discloses a service loop for supplying coolant. U.S. Patent No. 10,541,167 (which is incorporated herein by reference in its entirety) discloses heat conduction. Abstract

[0003] The following abstract is illustrative only and is not intended to limit the scope of the claims.

[0004] According to the first interpretation, an exemplary device may be provided. This device comprises a robotic drive unit and a robotic arm connected to the robotic drive unit. Here, the robot arm comprises a first link connected to the robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and an end effector rotatably connected to the second link at a second rotatable connector. The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion. At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, the rotatable thermal coupling comprising a plurality of interleaved members rotatable relative to each other.

[0005] Alternatively, an exemplary device may be provided. This device comprises a robotic drive unit and a robotic arm connected to the robotic drive unit. Here, the robot arm comprises a first link connected to the robot drive unit, a second link rotatably connected to the first link by a first rotatable connector, and at least one third link rotatably connected to the second link by at least one second rotatable connector. The at least one third link includes a heat choke located between the substrate support region of the at least one third link and the second rotatable connection portion. At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, the rotatable thermal coupling comprising a plurality of interleaved members rotatable relative to each other.

[0006] From a different perspective, an exemplary method may be provided. This method is To prepare an end effector having a heat choke located between a first end having a substrate support area and a second end on the opposite side; The second end of the end effector is connected to the link at the rotating connection; Includes, The link and the end effector are configured to at least partially form the arm of a substrate transport robot. The connection described above includes providing a rotary thermal coupling, the rotary thermal coupling comprising a plurality of interleaved members that are rotatable relative to each other at the rotary connection portion.

[0007] From a different perspective, an exemplary method may be provided. This method is This includes moving the robot arm so that the circuit board is positioned on the end effector of the robot arm. Here, the robot arm comprises a first link connected to a robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and the end effector rotatably connected to the second link at a second rotatable connector. The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion. The second rotatable connector is equipped with a rotatable thermal coupling, and the rotatable thermal coupling is equipped with a plurality of interleaved members that are rotatable relative to each other. The method further includes transferring heat from the robot arm to the outside of the robot drive unit. The heat choke helps to reduce the heat that should be transferred from the substrate support area to the second link and the second rotatable connection. The rotatable thermal coupling in the second rotatable connection helps to increase heat transfer from the end effector to the second link. [Brief explanation of the drawing]

[0008] The aforementioned interpretation and other features will be explained below, with reference to the attached diagrams.

[0009] [Figure 1A] This is a top view of a robot having the features described herein.

[0010] [Figure 1B] Figure 1A is a side view of the robot.

[0011] [Figure 2] Figures 1A and 1B show schematic cross-sectional views of the robot.

[0012] [Figure 3A] This is a schematic cross-sectional view showing an example of a rotary thermal coupling.

[0013] [Figure 3B] This is a schematic cross-sectional view showing another example of a rotary thermal coupling.

[0014] [Figure 3C]Schematic diagram showing an embodiment including a heat choke, a heat pipe, and a thermal coupling of a joint.

[0015] [Figure 4] Simplified block diagram of the thermal model of the robot of the embodiment shown in FIGS. 1A - 2.

[0016] [Figure 5] Schematic cross-sectional view similar to FIG. 2 of a conventional robot.

[0017] [Figure 6] Simplified block diagram of the thermal model of the robot shown in FIG. 5.

[0018] [Figure 7] FIGS. 7A - 7B are schematic cross-sectional view and top view showing an example of a heat choke and the connection between the third link of a robot arm and the heat choke.

[0019] [Figure 8] FIGS. 8A - 8B are schematic cross-sectional view and top view showing an example of a heat choke and the connection between the third link of a robot arm and the heat choke.

[0020] [Figure 9] Schematic cross-sectional view showing an example of a heat choke and the connection between the third link of a robot arm and the heat choke.

[0021] [Figure 10] Schematic cross-sectional view showing an example of a heat choke and the connection between the third link of a robot arm and the heat choke.

[0022] [Figure 11] FIGS. 11A - 11B are top view and schematic cross-sectional view showing an example of a heat choke and the connection between the third link of a robot arm and the heat choke.

[0023] [Figure 12] A block diagram shows some steps of an exemplary method.

[0024] [Figure 13] A block diagram shows some steps of an exemplary method.

[0025] [Figure 14] This is a top view showing an example of the structure of one arm link and multiple heat chokes.

[0026] [Figure 15] This is a cross-sectional view showing an example of the structure of one arm link and multiple heat chokes.

[0027] [Figure 16] This is a cross-sectional view showing an example of the structure of a heat choke inside the frame member of an arm link.

[0028] [Figure 17] This is a top view illustrating the positions of multiple heat chokes in multiple arm links. Detailed description of the embodiment

[0029] Referring to Figures 1A and 1B, top and side views of the apparatus 10 incorporating features of an exemplary embodiment are shown. While these features will be described with reference to the exemplary embodiment shown in the drawings, it should be understood that these features can be embodied in many alternative embodiments. Furthermore, elements or materials of any appropriate size, shape, or type can be used.

[0030] In the exemplary embodiments shown in Figures 1A-1B, the device is a robot comprising a drive unit 12, a robotic arm 14, and a control system 16. The control system 16 may comprise at least one processor 18 and at least one memory 20 containing software or code 22. The control system is configured to control the movement of motors in the drive unit 12 (and possibly in the arm 14) and to receive signals from sensors such as those in the drive unit 12 and / or in the arm 14 and / or outside the robot 10. A simplified cross-sectional view of an exemplary embodiment of the robot 10 is schematically provided in Figure 2.

[0031] Referring also to Figure 2, in the illustrated example, the drive unit 12 comprises a housing 50 which can be mounted immovably against the wall 54 of the substrate transport chamber, and a spindle assembly 52 located inside the housing 50 and configured to at least partially operate the robot arm 14. In this example, the spindle assembly 52 comprises a spindle housing 56, one or more motors, and one or more drive shafts. In the example shown in Figure 3, the spindle assembly 52 comprises three motors M T1 M T2 M T3 The motor is equipped with three drive shafts T1, T2, and T3. However, in alternative examples, fewer than three motors and drive shafts may be used. The motor stator may be mounted on the spindle housing 56, and the motor rotor may be mounted on the drive shafts T1, T2, and T3. In the example in Figure 2, the three shafts T1, T2, and T3 are coaxial drive shafts. The outer shaft is shaft T1, the shaft between the outer shaft and the inner shaft is shaft T2, and the inner shaft is shaft T3.

[0032] In this embodiment, the drive unit further comprises a vertical lift mechanism 24. The vertical lift mechanism 24 may consist, for example, of one or more linear rail bearing mechanisms and a motor-driven ball screw configured to raise and lower the spindle assembly 52 in the vertical direction.

[0033] As shown in Figure 2, the spindle housing (and / or an optional neck that may support the axis T1) may be liquid-cooled as indicated by the coolant inlet conduit 58 and the coolant outlet conduit 60. If the drive unit features a vertical lift mechanism 24, the liquid coolant may flow in and out of the spindle housing via a service loop (along with electrical connections and conductors related to the operation of the spindle motor, in some embodiments).

[0034] Another example particularly advantageous when the drive unit features a vertical lift mechanism is that the robot frame may be liquid-cooled, for example, the housing frame 50. Heat may also be transferred from the spindle housing 56 to the drive unit frame 50. In this case, heat may be transferred not only by radiation but also by conduction and convection through the atmospheric environment 62 between the spindle housing 56 and the drive unit frame 50. In this case, the effective area available for heat transfer may preferably be increased by utilizing one or more alternating vertical fins on the spindle housing 56 and the drive unit frame 50. This configuration may allow vertical movement of the spindle housing 56 relative to the frame 50 of the robot drive unit. Furthermore, it is not necessarily required to flow the liquid coolant through a service loop.

[0035] Alternatively, forced air cooling of the spindle housing, which is commonly used in modern robots, may be employed.

[0036] Given that the robot arm 14 may operate in a vacuum environment within the substrate transport chamber, the spindle assembly 52 of the drive unit may have sealing and other features that allow the axes T1-T3 or their upper parts to be in a vacuum environment. As an example, a substantially cylindrical isolation barrier 64 may be used, positioned between the rotor and stator of the motor. The isolation barrier 64 is positioned such that the stator side (outside) of the isolation barrier 64 contains the atmospheric environment, and the rotor side (inside) of the isolation barrier contains the vacuum environment. In this case, the axes T1, T2, and T3 as a whole may be located in a vacuum environment. As another example, a rotary seal, such as a magnetic fluid seal, may be used to allow the upper parts of the axes T1, T2, and T3 to protrude from the atmospheric environment 62 into the vacuum environment 63.

[0037] The robot arm 14 may have one or more links that can be connected to each other by appropriate mechanical couplings. In the example in Figure 2, three links 66, 68, and 70 are shown connected to each other via a rotary joint. The third link 70 constitutes an end effector having a substrate support area 71 configured to support a payload 72, such as a semiconductor substrate, on it.

[0038] The following terms are used in this specification: In the illustrated robotic arm, the first link 66 is called link 1 or upper arm, the second link 68 is called link 2 or forearm, and the third link 70 is called link 3 or end effector. The rotary joint 74 between the spindle assembly 52 and link 1 is called the shoulder joint, the rotary joint 76 between link 1 and link 2 is called the elbow joint, and the rotary joint 78 between link 2 and link 3 is called the wrist joint.

[0039] Link 3 may be configured to carry the payload 72. As an example, Link 3 may include an end effector suitable for picking, transporting, and placing semiconductor wafers.

[0040] Link 3 may consist of a first portion (part 1) 80 adjacent to the payload, a second portion (part 2) 82 adjacent to the wrist joint, and a heat choke 84 between these two portions 80, 82. The heat choke 84 may be configured to limit heat transfer from the first portion 80 of link 3 to the second portion 82 of link 3. The amount of heat transferred through the heat choke 84 may be controlled by its thermal resistance. This thermal resistance can be selected along with other design parameters to achieve a desired balance between the temperatures of the first portion 80 of link 3 and the second portion 82 of link 3. The heat choke 84 may be implemented in the form of a part of a material with low thermal conductivity, such as ceramic. The heat choke may be made of a refractory material. A refractory material is a substance that is resistant to decomposition by heat, pressure, or chemical attack and maintains its strength and shape even at high temperatures. Refractory materials are generally polycrystalline, multiphase, inorganic, nonmetallic, porous, and heterogeneous. These materials are generally composed of oxides of substances such as silicon, aluminum, magnesium, calcium, and zirconium, or non-oxides such as carbides or nitrides. Metals with melting points exceeding 1850°C, such as niobium, chromium, zirconium, tungsten, rhenium, and tantalum, can also be considered as heat-resistant materials.

[0041] As shown in Figure 2, link 1 (upper arm) 66 may be connected to drive shaft T1. Link 2 (forearm) 68 may be coupled to link 1 via a rotary joint (elbow joint) 76 and actuated by shaft T3 using a transmission mechanism. This transmission mechanism may include a first shoulder pulley that can be attached to shaft T3, a first elbow pulley that can be attached to link 2, and a band, belt, or cable 86 that can transmit motion between the two pulleys.

[0042] Link 3 may be connected to Link 2 via another rotary joint (wrist joint) and actuated via a two-stage transmission mechanism. The first stage of the transmission mechanism may consist of a second shoulder pulley, a second elbow pulley, and a band, belt, or cable 88 capable of transmitting motion between the two pulleys. The second stage of the transmission mechanism may consist of a third elbow pulley, a wrist pulley, and another band, belt, or cable 90 capable of transmitting motion between the two pulleys. As shown in Figure 2, the second shoulder pulley may be attached to axis T2, the second elbow pulley may be connected to the third elbow pulley, and the wrist pulley may be attached to Link 3.

[0043] One or more mechanical couplings of a robotic arm can be complemented by one or more thermal couplings configured to transfer heat between the links connected by the corresponding mechanical couplings. Referring again to the example in Figure 2, each of the rotational joints of the arm in this particular example, namely the shoulder joint 74, the elbow joint 76, and the wrist joint 78, is complemented by rotational thermal couplings 92, 94, and 96, respectively.

[0044] As shown in Figure 3A, an exemplary rotary thermal coupling 30 may have two parts 32, 34. Each of these parts is characterized by having one or more substantially cylindrical surfaces. These cylindrical surfaces are arranged coaxially with the corresponding rotary joint. Furthermore, the cylindrical surfaces on one part of the thermal coupling are arranged to face the opposite cylindrical surface on the other part of the thermal coupling. A small gap is provided between each part so that the surfaces do not come into contact with each other. The opposing cylindrical surfaces may be configured to transfer heat via radiation across the gap between the opposing cylindrical surfaces of the rotary thermal coupling. This radiation mechanism may be complemented by convection / conduction through the environment between the opposing cylindrical surfaces of the rotary thermal power coupling if residual gas is present in the environment.

[0045] As shown in the example in Figure 3A, in order to increase the effective area and minimize the volume occupied by the exemplary rotational thermal coupling, substantially cylindrical arrangements of features 32a, 34a may be provided on each of the two parts of the rotational thermal coupling. These two arrangements may be arranged in an alternating configuration.

[0046] Alternatively, as depicted in the example in Figure 3B, the two parts 42, 44 of the rotating thermal coupling 40 may provide opposing disk-shaped features 42a, 44a. These features 42a, 44a are configured to allow non-contact heat transfer across the gap between them. Another alternative is to utilize any other suitable shape, and combinations thereof, of an effective structure for a rotating thermal coupling, which is not limited to conical and spherical shapes.

[0047] The effective surface of the rotating thermal coupling may be treated to improve its thermal emissivity. For example, the two parts of the rotating thermal coupling may be made of aluminum and their effective surfaces may be anodized.

[0048] To enable heat transfer between two links of the robot arm, an exemplary rotary thermal coupling may be attached to one link and the other part of the exemplary rotary power coupling to an adjacent link, and the arrangement may be substantially coaxial with the rotary joint connecting the two links. Alternatively, the features of the rotary thermal coupling may be directly incorporated into the links of the robot arm.

[0049] The links of the robot arm may be made of a material with high thermal conductivity, such as aluminum alloy or stainless steel. When the links of the robot arm are made of a material with high thermal conductivity, the temperature gradient (difference) between the connections of each link can be considered negligible. If one or more links of the robot arm are long, if the cross-sectional area of ​​one or more links of the robot arm is small, and / or if the material of one or more links of the robot arm does not provide sufficient thermal conductivity, the heat transfer through that one or more links of the robot arm may be improved by using one or more heat pipes, as schematically depicted in Figure 3C.

[0050] A heat pipe is a device that transfers heat between two thermally conductive interfaces using the principles of heat conduction and phase transition. A heat pipe may consist of a sealed tubular housing with a high-temperature interface at one end and a low-temperature interface at the other, a wick structure, and a working fluid. The operating principle of a heat pipe can be explained as follows: On the high-temperature side, the liquid working fluid comes into contact with the highly thermally conductive high-temperature interface, absorbs heat from the high-temperature interface, and turns into vapor. This vapor moves along the heat pipe to the low-temperature interface, where it condenses back into a liquid state and releases latent heat. This process increases the effective thermal conductivity between the high-temperature and low-temperature interfaces of the heat pipe.

[0051] For example, to facilitate or complement heat transfer through the forearm (link 2) from the wrist joint rotational thermal coupling 402 to the elbow joint rotational thermal coupling 404, one or more heat pipes 400, 401 may be used, for example, as graphically shown in Figure 3C. Similarly, as graphically shown in Figure 3C, one or more heat pipes 401 may be configured to transfer heat through the upper arm (link 1), for example, from the elbow joint rotational thermal coupling 404 to the shoulder joint rotational thermal coupling 406.

[0052] The high-temperature and low-temperature interfaces (high-temperature and low-temperature ends) of one or more heat pipes 400, 401 may be connected to a link of the robot arm or a rotating thermal coupling of the robot arm with minimal mechanical and thermal resistance. For example, clamping, bonding, potting, soldering, or brazing may be used for this purpose. Exemplary embodiments having the features described herein may be provided with one or more heat chokes and one or more heat pipes. For example, one or more heat chokes may be provided on the end effector link of the robot arm. Heat pipes may also be provided behind these heat chokes, for example, on or between other links, joints, or drive units. Heat pipes may also be provided on at least a portion of the end effector. For example, referring to Figure 1A, one or more heat pipes may be provided on a portion of the end effector 70 (between the heat choke 84 and the joint 78), on link 68, link 66, and / or on drive unit 50. In this way, both heat chokes and heat pipes can be combined to help control heat transfer in the robot arm. In one exemplary embodiment, the device may consist of simply one or more heat pipes without using heat chokes. In another example, a heat transfer device, rather than heat pipes, can be used to help facilitate heat transfer from a portion of the robot arm to a region spaced away from the end effector (and possibly heat transfer outwards from the robot arm).

[0053] Figure 4 shows a simplified thermal model of this robot. The following nomenclature is used in the figure and text (alphabetical order). A1: External surface area of ​​link 1 (upper arm) (m²) 2 ) A1S: Effective area (m²) of shoulder joint thermal coupling 2 ) A2: External surface area of ​​link 2 (forearm) (m²) 2 ) A21: Effective area of ​​elbow joint thermal coupling (m²) 2 ) A3: External surface area of the first part of Link 3 (m 2 ) A32: Effective area of the wrist joint thermal coupling (m 2 ) AS: External surface area of the spindle housing (m 2 ) FC: Flow rate of the spindle housing coolant (l / min) P: Ambient pressure of the robot arm (Torr) P01: Heat quantity transmitted from the ambient environment to Link 1 (W) P02: Heat quantity transmitted from the ambient environment to Link 2 (W) P03: Heat quantity transmitted from the payload and the ambient environment to Link 3 (W) P1SRJ: Heat quantity transmitted from Link 1 to the spindle housing through the rotary joint (W) P1STC: Heat quantity transmitted from Link 1 to the spindle housing through the thermal coupling (W) P21RJ: Heat quantity transmitted from Link 2 to Link 1 through the rotary joint (W) P21TC: Heat quantity transmitted from Link 2 to Link 1 through the thermal coupling (W) P32RJ: Heat quantity transmitted from Link 3 to Link 2 through the rotary joint (W) P32TC: Heat quantity transmitted from Link 3 to Link 2 through the thermal coupling (W) P0S: Heat quantity transmitted from the ambient environment to the spindle housing (W) PM: Heat generation of the spindle motor (W) PMS: Heat quantity transmitted from the spindle motor to the spindle housing (W) PSC: Heat quantity transmitted from the spindle housing to the cooling medium (W) T01: Temperature around Link 1 (°C) T02: Temperature around Link 2 (°C) T03: Temperature around the first part of Link 3 (°C) T0S: Temperature around the spindle (°C) T1: Temperature of Link 1 (upper arm) (°C) T2: Temperature of Link 2 (forearm) (°C) T31: Temperature (°C) of the first part of Link 3 (between the payload and the heat choke) T32: Temperature (°C) of the second part of Link 3 (between the heat choke and the wrist joint) TC: Spindle housing coolant inlet temperature (°C) TERA: Thermal emissivity of the outer surface of a robotic arm link TETC: Thermal emissivity of the effective surface of a thermal coupling TM: Spindle motor temperature (°C) TS: Spindle housing temperature (°C)

[0054] As shown in Figure 4, the main components of the robot are represented in the thermal model by (discrete lumped thermal mass). These main components include the spindle housing and link 1 (upper arm), link 2 (forearm), the first part of link 3 (between the payload and the heat choke), and the second part of link 3 (between the heat choke and the wrist joint).

[0055] Considering that the example robot is expected to handle high-temperature payloads and operate in high-temperature environments, it is assumed that heat may be transferred to link 3 from the payload and from the environment in which the payload is extracted or placed. (This is represented by the “Heat Source” block in Figure 4. For the purposes of thermal modeling, the heat source may be characterized by a temperature T03 as defined above.) It is also assumed that heat may be transferred to links 1 and 2 from their surroundings, as shown in Figure 4. The mechanism of heat transfer may include not only radiation from the surroundings but also convection and conduction if residual gases are present in the environment. Similarly, as shown in Figure 4, the spindle housing may receive heat from the spindle motor and may also receive heat from the surrounding atmospheric environment and other surrounding environments.

[0056] In the example shown in Figure 4, heat from the robot is assumed to be removed by liquid cooling of the spindle housing.

[0057] Table 1 shows examples of parameters and inputs for a thermal model. As an example, the parameters can represent a material handling robot in a semiconductor wafer processing system under a vacuum environment. [Table 1]

[0058] As shown in Table 1, the ambient temperature around the first part of link 3 is selected to be 400°C, which may represent, for example, the temperature of the wafer being handled by the robot or the temperature of the process module where the wafer may be extracted or placed. The ambient temperatures around links 1 and 2 are selected to be 200°C, which may represent, for example, the temperature of the wall surface of the vacuum transfer chamber on which the robot arm operates. The spindle housing is assumed to be water-cooled with an inlet temperature of 20°C and a flow rate of 2.8 l / min, as shown in Table 1.

[0059] For comparison, Figure 5 shows an existing robot corresponding to the robot described above, representing the newest type of robot using existing technology. As shown in the figure, link 3 of the robot arm does not have a heat choke, and there is no rotary thermal joint. However, some heat may be transferred from the rotary joint itself, and the spindle housing is air-cooled.

[0060] A simplified thermal model of the conventional robot in Figure 5 is shown in the block diagram in Figure 6. Since Link 3 does not have a heat choke, it is represented by a single thermal mass in the thermal model. Rotational thermal couplings are absent in this thermal model. Forced air cooling of the spindle housing is also considered.

[0061] For comparison, the same thermal model parameters and inputs were used. The comparison results of thermal performance are shown in Table 2.

[0062] [Table 2]

[0063] As can be seen by comparing Table 1 and Table 2, the link temperatures of the robot in this embodiment are considerably lower compared to conventional, state-of-the-art robots. In particular, the temperature of the part of link 3 adjacent to the wrist joint (the second part of link 3) decreased from 385°C to approximately 85°C, a manageable level, while the temperature of link 2 decreased from 213°C to approximately 80°C, and the temperature of link 1 decreased from 178°C to approximately 60°C. This directly addresses the problems that can occur when the temperature of the robot arm components rises excessively (such as thermal expansion, reduced bearing life, premature decomposition of lubricating oil, and thermal damage to active components such as sensors and electronic equipment that may be incorporated into the robot arm).

[0064] The size, shape, and material used for the heat choke, as well as the method of connecting it to the first and second parts 80, 82 of the third link 70, can be appropriately selected based on the robot's operating environment, such as the expected weight of the payload 72 and the temperature of the payload and substrate processing chamber. See also Figures 7A and 7B, which show an example in which the heat choke consists of a heat-resistant material with interlocking portions that are immovably attached to the finger portions 100, 102 of the metal first and second parts 80, 82. Figure 7A is a cross-sectional view, and Figure 7B is a top view. Interlocking shapes may be used to join the materials, and the heat choke may be molded, for example, on the first and second parts. Alternatively or additionally, fasteners may be used. Examples of fastener use are shown in Figures 8A and 8B. The heat choke is sandwiched between parts of the first and second parts. These parts form the upper and lower plates in a sandwich structure, and fasteners 104 are used to attach these layers together. The fastener 104 may function as a structural reinforcement by directly contacting the two parts 80 and 82, or it may not directly contact the two parts 80 and 82.

[0065] See also Figure 9, in this example, two layers 84a, 84b of heat-resistant material are used, and the thin finger portions 100, 102 of the first and second metal parts 80, 82 may simply be in direct contact with each other to enhance structural integrity at the joint with the heat-resistant material. See also Figure 10, in this example, the heat choke has multiple layers 84c, 84d, 84e of different heat-resistant materials sandwiched between parts of the first and second metal parts 80, 82. Figures 11A-11B illustrate that a substance 110, such as high-temperature epoxy, may be applied to the joint with the first and second parts of the heat choke to prevent gas leakage from the adhesive or heat-resistant material and to prevent dust and fragments of heat-resistant material from peeling off from the link 70. In alternative examples, any suitable high-temperature heat-resistant material cover may be provided at the joint. The heat-resistant material may be placed at least partially inside one or both of the first and second parts.

[0066] The above embodiment describes the features of a three-link robotic arm having a rotary joint, but a robot having the features described herein may utilize any suitable arm mechanism. Such arm mechanisms include, but are not limited to, various serial and parallel mechanisms. Furthermore, but are not limited to, the robotic arm mechanism may utilize various mechanical couplings, including rotary joints, prismatic joints, and spherical joints. Additionally, although the above example describes a robot with a single robotic arm, the robot may be characterized by having multiple arms.

[0067] The features disclosed herein can be used to address the adverse effects of heat emitted from the payload carried by the robotic arm and from the surrounding environment of the robotic arm. If the heat absorbed by the robotic arm is not removed by a suitable cooling mechanism, it can lead to an excessive rise in the temperature of the robotic arm's components, resulting in problems such as thermal expansion, reduced bearing life, premature deterioration of lubricants, and potentially thermal damage to active components such as sensors and electronic equipment that may be integrated into the robotic arm. Cooling mechanisms for robotic arms are particularly challenging in vacuum environments, where conduction and convection are largely absent, making internal forced air cooling or liquid cooling of the robotic arm impractical. The features disclosed herein can be used to provide applicable solutions even under such challenging circumstances.

[0068] One exemplary embodiment is a device comprising a robot drive unit and a robot arm connected thereto. The robot arm comprises a first link connected to the robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and an end effector rotatably connected to the second link at a second rotatable connector. The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion. At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, the rotatable thermal coupling comprising a plurality of interleaved members rotatable relative to each other.

[0069] The robot drive unit may include a drive unit housing and a spindle assembly movably disposed within the drive unit housing. The spindle assembly has a plurality of coaxial drive shafts and a plurality of motors, each connected to one of the drive shafts. The device may include a first rotary thermal coupling located on the outside of the plurality of drive shafts. The rotary thermal coupling may include a second rotary thermal coupling located at the first rotatable connection and a third rotary coupling located at the second rotatable connection. The robot arm may include pulleys and bands configured to rotate the second link and the end effector at the first and second rotatable connection. The first rotatable connection may include a first rotary thermal coupling having a plurality of first interleaved members. The plurality of first interleaved members are rotatable relative to each other about the rotation axis of the first rotatable connector. The second rotatable connector may include a second rotatable thermal coupling having a plurality of second interleaved members. The plurality of second interleaved members are rotatable relative to each other about the rotation axis of the second rotatable connection. The heat choke may have a heat-resistant material connecting the first portion of the end effector and the second portion of the end effector. The heat choke may separate the second portion from the first portion. The heat choke may have portions that alternate with the first portion and / or a portion of the second portion of the end effector. The end effector may have a surrounding material that surrounds the connection between the heat choke and the first and second portions of the end effector. The heat choke may have a plurality of layers, each made of a different material. The robot arm may further include at least one heat pipe. Both ends of the heat pipe are thermally connected to at least one link of the robot arm and / or to a rotating thermal coupling of the robot arm.

[0070] Referring to Figure 12, an exemplary method may be provided. This method includes preparing an end effector having a heat choke located between a first end having a substrate support area and a second end opposite to it, as shown in block 200; and connecting the second end of the end effector to a link at a rotary connection, as shown in block 202. The link and the end effector are configured to at least partially form the arm of a substrate transport robot. The connection described above includes providing a rotary thermal coupling, the rotary thermal coupling comprising a plurality of interleaved members that are rotatable relative to each other at the rotary connection portion.

[0071] An exemplary method may be provided with reference to Figure 13. This method involves moving the robot arm so that the substrate is positioned on the end effector of the robot arm, as shown in block 300. Here, the robot arm comprises a first link connected to a robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and the end effector rotatably connected to the second link at a second rotatable connector. The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion. The second rotatable connector comprises a rotating thermal coupling, the rotating thermal coupling comprising a plurality of interleaved members rotatable relative to one another. The method further includes transferring heat from the robot arm to the outside of the robot drive unit, as shown in block 302. The heat choke helps reduce the heat that should be transferred from the substrate support area to the second link and the second rotatable connector, while the rotational thermal coupling in the second rotatable connector helps increase heat transfer from the end effector to the second link. The first rotatable connector includes a first rotatable thermal coupling, and the rotatable thermal coupling may include a plurality of interleaved members that are rotatable relative to each other. The transfer of heat from the robot arm to the outside of the robot drive unit is facilitated by the first rotational thermal coupling in the first rotatable connection, which increases heat transfer from the second link to the first link.

[0072] Additional alternative examples for heat chokes are shown in Figures 14–17. Figure 14 shows that multiple heat chokes may be provided at separate lengths along link 70'. These may also consist of one or more different heat-resistant materials and one or more different sizes and shapes. Figure 15 shows that multiple heat-resistant members may be inserted into pockets within a single metal member, possibly from separate sides such as top and bottom or left and right. Link 70" may have a single metal frame member having a grid shape or multiple pocket shapes to receive member 84. Alternatively, link 70" may be able to mold or form member 84 within the grid shape or multiple pocket shapes. Figure 16 shows that the integrated frame member of link 70" may have a closed or substantially closed pocket 73 that receives member 84. The opening to the pocket 73 can be closed after assembly by any suitable means, such as an attached door, hatch, or other cover. Figure 17 illustrates that the arm 14' may have two or more heat chokes on two or more links. In Figure 17, the third link 70 has a heat choke 84. The heat choke 84 is closer to the rotary joint 78 than the substrate support area 71 (closer to the rear of link 70 than the front). The second link 68' also has a heat choke 84'. The heat choke 84' is closer to the rotary joint 78 than the rotary joint 76 (closer to the front of link 68' than the rear). Thus, multiple links may have heat chokes. The position of the heat chokes on the links may be at any suitable position in the longitudinal direction. These positions may be different or the same.

[0073] It should be understood that the above explanation is merely an example. Those skilled in the art will be able to consider various variations and modifications. For example, the features described in the various dependent claims within the claims can be combined with each other in any suitable combination. In addition, it is possible to selectively combine features from the various embodiments described above to create new embodiments. Therefore, this application encompasses all changes, modifications, and variations included in the attached claims.

[0074] The invention described in the claims attached to the original application is as follows: [Invention 1] It is a device, Robot drive unit and; A robot arm connected to the robot drive unit; Equipped with, The robot arm comprises a first link connected to the robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and an end effector rotatably connected to the second link at a second rotatable connector; The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion; At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, the rotatable thermal coupling comprising a plurality of interleaved members rotatable relative to each other; Device. [Invention 2] The robot drive unit comprises a drive unit housing and a spindle assembly movably disposed within the drive unit housing. The spindle assembly has a plurality of coaxial drive shafts and a plurality of motors, each of which is connected to one of the drive shafts. The apparatus described in Invention 1. [Invention 3] The apparatus according to invention 2, further comprising a first rotary thermal coupling disposed on one of the outer drives of the plurality of drive shafts. [Invention 4] The apparatus according to Invention 3, wherein the rotary thermal coupling comprises a second rotary thermal coupling located at the first rotatable connection portion and a third rotary coupling located at the second rotatable connection portion. [Invention 5] The apparatus according to Invention 1, wherein the robot arm comprises a pulley and a band configured to rotate the second link and the end effector at the first rotatable connection and the second rotatable connection. [Invention 6] The first rotatable connection comprises a first rotatable thermal coupling having a plurality of first interleaved members, The plurality of first interleaved members are rotatable relative to each other about the rotation axis of the first rotatable connection. The apparatus described in Invention 5. [Invention 7] The second rotatable connection comprises a second rotatable thermal coupling having a plurality of second interleaved members, The plurality of second interleaved members are rotatable relative to each other about the rotation axis of the second rotatable connection. The apparatus described in Invention 6. [Invention 8] The apparatus according to Invention 1, wherein the heat choke has a heat-resistant material connecting the first part of the end effector and the second part of the end effector. [Invention 9] The apparatus according to Invention 8, wherein the heat choke separates the first portion from the second portion. [Invention 10] The apparatus according to Invention 8, wherein the heat choke has portions that are arranged alternately with the first portion and / or a portion of the second portion of the end effector. [Invention 11] The apparatus according to Invention 8, wherein the end effector has a surrounding material that surrounds the connection between the heat choke and the first and second parts of the end effector. [Invention 12] The apparatus according to Invention 1, wherein the heat choke has multiple layers, each made of a different material. [Invention 13] The apparatus according to Invention 1, further comprising at least one heat pipe, the ends of which are each thermally connected to at least one link of the robot arm and / or a rotating thermal coupling of the robot arm. [Invention 14] It is a device, Robot drive unit and; A robot arm connected to the robot drive unit; Equipped with, The robot arm comprises a first link connected to the robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and at least one third link rotatably connected to the second link at at least one second rotatable connector; The at least one third link comprises a heat choke located between the substrate support region of the at least one third link and the second rotatable connector; At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, the rotatable thermal coupling comprising a plurality of interleaved members rotatable relative to each other; Device. [Invention 15] The apparatus according to invention 14, further comprising at least one heat pipe, the ends of which are each thermally connected to at least one link of the robot arm and / or a rotating thermal coupling of the robot arm. [Invention 16] To prepare an end effector having a heat choke located between a first end having a substrate support area and a second end on the opposite side; The second end of the end effector is connected to the link at the rotating connection; Includes, The link and the end effector are configured to at least partially form the arm of a substrate transport robot; The connection described above includes providing a rotating thermal coupling, the rotating thermal coupling comprising a plurality of interleaved members rotatable relative to one another at the rotating connection; method. [Invention 17] It is a method, This includes moving the robot arm so that the circuit board is positioned on the end effector of the robot arm; Here, the robot arm comprises a first link connected to a robot drive unit, a second link rotatably connected to the first link at a first rotatable connection, and the end effector rotatably connected to the second link at a second rotatable connection; The end effector includes a heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion; The second rotatable connection includes a rotatable thermal coupling, and the rotatable thermal coupling includes a plurality of interleaved members that are rotatable relative to each other; The method further includes transferring heat from the robot arm to the outside of the robot drive unit; The heat choke helps reduce the heat that should be transferred from the substrate support area to the second link and the second rotatable connector; The rotatable thermal coupling in the second rotatable connection helps to increase heat transfer from the end effector to the second link; method. [Invention 18] A method according to invention 17, wherein the first rotatable connector comprises a first rotatable thermal coupling, and the rotatable thermal coupling comprises a plurality of interleaved members rotatable relative to one another; The transfer of heat from the robot arm to the outside of the robot drive unit is facilitated by the first rotational thermal coupling in the first rotatable connection, which helps to increase heat transfer from the second link to the first link. method.

Claims

1. It is a device, Robot drive unit, A robot arm connected to the robot drive unit, Equipped with, The robotic arm is A first link connected to the robot drive unit, In the first rotatable connector, a second link is connected to the first link, In the second rotatable connection, the end effector connected to the second link, Equipped with, The aforementioned end effector is, The substrate support section, A heat-resistant heat choke is positioned between the second rotatable connecting portion and the substrate support portion and connects them, Equipped with, The heat-resistant heat choke comprises at least one first material having thermal resistance configured to control the transfer of heat between the substrate support portion and the second rotatable connection portion, At least one second substance is placed on the heat-resistant heat choke, and the second substance covers the heat-resistant heat choke, the substrate support portion, and at least a part of the second rotatable connection portion. At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, and the rotatable thermal coupling comprises a plurality of interleaved members that are rotatable relative to each other. Device.

2. The robot drive unit comprises a drive housing and a spindle assembly movably disposed within the drive unit housing. The spindle assembly has a plurality of coaxial drive shafts and a plurality of motors, each of which is connected to one of the drive shafts. The apparatus according to claim 1.

3. The apparatus according to claim 2, wherein the rotational thermal coupling includes a first rotational thermal coupling disposed on the outer side of one of the plurality of drive shafts.

4. The apparatus according to claim 3, wherein the rotary thermal coupling comprises a second rotary thermal coupling located at the first rotatable connection portion and a third rotary coupling located at the second rotatable connection portion.

5. The apparatus according to claim 1, wherein the robot arm comprises a pulley and a band configured to rotate the second link and the end effector at the first rotatable connection and the second rotatable connection.

6. The first rotatable connection comprises a first rotatable thermal coupling having a plurality of first interleaved members, The plurality of first interleaved members are rotatable relative to each other about the rotation axis of the first rotatable connection. The apparatus according to claim 5.

7. The second rotatable connection comprises a second rotatable thermal coupling having a plurality of second interleaved members, The plurality of second interleaved members are rotatable relative to each other about the rotation axis of the second rotatable connection. The apparatus according to claim 6.

8. The apparatus according to claim 1, wherein at least one first material of the heat choke has a heat-resistant material connecting the first portion of the end effector and the second portion of the end effector.

9. The apparatus according to claim 8, wherein the at least one second substance comprises epoxy.

10. The apparatus according to claim 8, wherein the heat-resistant heat choke separates the first portion from the second portion.

11. The apparatus according to claim 1, further comprising at least one heat pipe, the ends of which are each thermally connected to at least one link of the robot arm or to a rotating thermal coupling of the robot arm.

12. It is a device, Robot drive unit, A robot arm connected to the robot drive unit, Equipped with, The robotic arm is A first link connected to the robot drive unit, In the first rotatable connector, a second link is connected to the first link, At least one third link connected to the second link in at least one second rotatable connector, The at least one third link includes a heat-resistant heat choke located between the substrate support region of the at least one third link and the at least one third link, connecting them, and the heat-resistant heat choke is A first material having thermal resistance configured to control heat transfer between the substrate support and the second rotatable connection, At least one second substance placed on the heat-resistant heat choke, The second material covers the at least one first material of the heat-resistant heat choke, the substrate support portion, and at least a portion of the second rotatable connecting portion. At least one of the first rotatable connector and the second rotatable connector is provided with a rotatable thermal coupling, and the rotatable thermal coupling comprises a plurality of interleaved members that are rotatable relative to each other. Device.

13. The apparatus according to claim 12, further comprising at least one heat pipe, the ends of which are each thermally connected to at least one link of the robot arm or to a rotating thermal coupling of the robot arm.

14. The apparatus according to claim 12, wherein at least one of the first materials of the heat choke is a heat-resistant material.

15. The apparatus according to claim 14, wherein the at least one second substance comprises epoxy.

16. It is a method, This includes preparing an end effector having a heat-resistant heat choke located between a first end having a substrate support area and a second end on the opposite side, connecting them, The heat-resistant heat choke comprises at least one first material having thermal resistance configured to control heat transfer between the substrate support region and the second end, At least one first substance and at least a portion of the first end and at least one second substance are arranged on the second end to cover them, The above method further involves connecting the second end of the end effector to a link at the rotating connection part, Includes, The link and the end effector are configured to at least partially form the arm of a substrate transport robot. The connection described above includes providing a rotary thermal coupling, the rotary thermal coupling comprising a plurality of interleaved members that are rotatable relative to each other at the rotary connection portion. method.

17. It is a method, This includes moving the robot arm so that the circuit board is positioned on the end effector of the robot arm, Here, the robot arm comprises a first link connected to a robot drive unit, a second link rotatably connected to the first link at a first rotatable connector, and the end effector rotatably connected to the second link at a second rotatable connector. The end effector is equipped with a heat-resistant heat choke located between the substrate support area of ​​the end effector and the second rotatable connection portion, which connects them. The heat-resistant heat choke comprises at least one first material having thermal resistance configured to control heat transfer between the substrate support region and the second rotatable connection portion, At least one second material is placed on the heat-resistant heat choke, and the second material covers the heat-resistant heat choke, the substrate support area, and at least a portion of the second rotatable connection portion. The second rotatable connector comprises a rotatable thermal coupling, and the rotatable thermal coupling comprises a plurality of interleaved members that are rotatable relative to each other. The method further includes transferring heat from the robot arm to the outside of the robot drive unit, The heat-resistant heat choke helps to reduce the heat that should be transferred from the substrate support area to the second link and the second rotatable connection. The rotatable thermal coupling in the second rotatable connection helps to increase heat transfer from the end effector to the second link. method.

18. The first rotatable connector comprises a first rotatable thermal coupling, and the rotatable thermal coupling comprises a plurality of interleaved members that are rotatable relative to each other. The transfer of heat from the robot arm to the outside of the robot drive unit is facilitated by the first rotational thermal coupling in the first rotatable connection, which helps to increase heat transfer from the second link to the first link. The method according to claim 17.

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