Sharpening tools

Abstract

We offer grinding tools with a new shape. [Solution] A grinding tool used in a state of rotation around a rotating axis, comprising a disc-shaped grinding wheel portion containing abrasive grains, the grinding wheel portion having a circular first surface and a circular second surface facing the opposite side of the first surface, and a part of the first surface having a shape that approaches the second surface as it moves from the outer edge of the first surface toward the center.

Description

Technical Field

[0006] , ,

[0005] ,

[0001] The present invention relates to a grinding tool.

Background Art

[0002] When machining a workpiece such as a semiconductor wafer, generally, a grinding tool called a cutting blade containing fine abrasive grains is used (see, for example, Patent Document 1). This cutting blade is typically formed in a disc shape (ring shape) having a pair of generally flat and substantially parallel circular (ring-shaped) side surfaces and an outer peripheral surface connected to the outer peripheral edges of the pair of circular side surfaces.

[0003] The above-described cutting blade cuts into the workpiece while rotating at high speed around a rotation axis substantially perpendicular to its side surface. Thereafter, when the cutting blade and the workpiece relatively move in a direction along the side surface of the cutting blade, the workpiece is machined along the path of the relative movement of the cutting blade.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The above-described processing method is applied, for example, when dividing a workpiece into a plurality of chips. In this case, the workpiece is mainly machined by the outer peripheral surface of the cutting blade. On the other hand, in recent years, various processing methods for machining a workpiece using the side surface of the cutting blade have been studied.

[0006] However, the shape of conventional cutting blades is optimized for cutting workpieces using the outer surface of the cutting blade. Therefore, when attempting to apply conventional cutting blades to new machining methods that utilize the side surface of the cutting blade, a problem arises in that extensive adjustments, such as changing the tilt of the spindle that rotates the cutting blade, are required.

[0007] Therefore, the object of the present invention is to provide a grinding tool with a novel shape. [Means for solving the problem]

[0008] According to one aspect of the present invention, a grinding tool is provided which is used in a state where it is rotated around a rotating shaft, and comprises a disc-shaped grinding wheel portion containing abrasive grains, wherein the grinding wheel portion has a circular first surface and a circular second surface facing the opposite side of the first surface, and a part of the first surface has a shape that approaches the second surface as it moves from the outer peripheral edge of the first surface toward the center.

[0009] The grinding wheel portion may further have an annular groove with a portion of the first surface as its side surface.

[0010] Preferably, both the portion of the first surface and the portion of the second surface are inclined with respect to the direction along the axis of rotation. In this case, the grinding wheel portion may further have an annular groove with the portion of the second surface as its side surface.

[0011] Furthermore, a portion of the central side of the first surface and a portion of the central side of the second surface may both have a shape aligned in a direction perpendicular to the axis of rotation.

[0012] Furthermore, the grinding tool may further include a disc-shaped base, and the grinding wheel portion may be fixed to the base so as to protrude outward from the base along the radial direction of the base. [Effects of the Invention]

[0013] A grinding tool according to one aspect of the present invention comprises a disc-shaped grinding wheel portion containing abrasive grains, wherein a portion of the first surface of this grinding wheel portion has a shape that approaches a second surface as it moves from the outer edge of the first surface toward the center. Thus, according to one aspect of the present invention, a grinding tool with a novel shape is provided. [Brief explanation of the drawing]

[0014] [Figure 1] Figure 1 is a schematic perspective view showing a cutting blade according to an embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view showing a cutting blade according to an embodiment. [Figure 3] Figure 3 is a cross-sectional view showing how material is supplied to the mold. [Figure 4] Figure 4 is a cross-sectional view showing how the material is molded by a mold. [Figure 5] Figure 5 is a schematic cross-sectional view showing the start of the cutting process of a workpiece using a cutting blade. [Figure 6] Figure 6 is a schematic cross-sectional view showing how a workpiece is cut by a cutting blade. [Figure 7] Figure 7 is a schematic cross-sectional view showing a workpiece after it has been machined by a cutting blade. [Figure 8] Figure 8 is a schematic cross-sectional view showing a cutting blade according to the first modified example. [Figure 9] Figure 9 is a schematic cross-sectional view showing a cutting blade according to the second modified example. [Figure 10] Figure 10 is a schematic cross-sectional view showing a cutting blade according to the third modified example. [Figure 11] Figure 11 is a schematic cross-sectional view showing a cutting blade according to the fourth modified example. [Figure 12] Figure 12 is a schematic cross-sectional view showing a cutting blade according to the fifth modified example. [Figure 13] Figure 13 is a schematic cross-sectional view showing a cutting blade according to the sixth modified example. [Figure 14]FIG. 14 is a cross-sectional view schematically showing another example of machining a workpiece using a cutting blade.

Embodiments for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a cutting blade 2 which is an example of a grinding tool, and FIG. 2 is a cross-sectional view schematically showing the cutting blade 2. As shown in FIGS. 1 and 2, the cutting blade 2 according to the present embodiment includes a disk-shaped (annular) grinding portion 4 having a structure in which abrasive grains are dispersed in a binder, and is also called a washer type or the like.

[0016] As the binder of the grinding portion 4, for example, resin, ceramics, metal, etc. are used, and as the abrasive grains, for example, diamond, CBN (cubic boron nitride), etc. are used. There is no significant limitation on the particle size (particle diameter) of the abrasive grains, but in applications for machining workpieces such as semiconductor wafers, it is preferable to use abrasive grains having a particle size of about #240 to #4000 of fine powder for precision polishing defined in JIS R 6001.

[0017] This grinding portion 4 has a circular (annular) first surface 6 and a circular (annular) second surface 8 facing the side opposite to the first surface 6. The outer peripheral edge of the first surface 6 and the outer peripheral edge of the second surface 8 are connected to each other by an outer peripheral surface 10. This outer peripheral surface 10 has a shape corresponding to the outer side surface of a cylinder.

[0018] In addition, circular openings are provided in the central region of the first surface 6 and the central region of the second surface 8, respectively. And the edge of the opening of the first surface 6 (the inner peripheral edge of the first surface 6) and the edge of the opening of the second surface 8 (the inner peripheral edge of the second surface 8) are connected to each other by an inner peripheral surface 12. The inner peripheral surface 12 has a shape corresponding to the inner side surface of a cylinder.

[0019] In other words, the grinding wheel portion 4 of the cutting blade 2 according to this embodiment is provided with a hole that penetrates from the first surface 6 to the second surface 8. The cutting blade 2 is mounted on the spindle by inserting a part of the mount into this hole, and cuts the workpiece while rotating around a rotation axis A1 aligned with the direction of the hole (the direction in which the hole penetrates the grinding wheel portion 4).

[0020] A portion of the outer periphery of the first surface 6 is an inclined surface 6a that approaches the second surface 8 as it moves from the outer periphery towards the center (inner periphery). This inclined surface 6a is formed in an annular shape along the outer periphery of the first surface 6. Furthermore, one end of an annular side surface 6b, which is formed to align with the direction of the rotation axis A1 described above, is connected to the end of the inclined surface 6a closest to the second surface 8 (the end on the center side).

[0021] The end of the side surface 6b that is farther from the second surface 8 is connected to the outer peripheral edge of a generally flat surface 6c. This flat surface 6c has a shape that is aligned with a direction perpendicular to the rotation axis A1 of the cutting blade 2. Thus, the first surface 6 according to this embodiment includes at least an inclined surface 6a on the outer peripheral edge side and a flat surface 6c on the central side (inner peripheral edge side). In addition, an annular groove 6d is provided on the first surface 6 side of the grinding wheel portion 4, with the inclined surface 6a and the side surface 6b as its sides.

[0022] On the other hand, in this embodiment, the second surface 8 is formed to be generally flat. Furthermore, this second surface 8 has a shape that is aligned with a direction perpendicular to the rotation axis A1 of the cutting blade 2. That is, the flat surface 6c, which is a part of the central side of the first surface 6, and the second surface 8 (a part of the central side of the second surface 8) have a shape that is generally flat and generally parallel to each other.

[0023] As shown in Figure 2, the inclined surface 6a of this embodiment is tilted to make an arbitrary angle θ1 satisfying 0° < θ1 < 90° with respect to the direction along the rotation axis A1 of the cutting blade 2. This angle θ1 can be arbitrarily set, for example, according to the desired cutting process. However, considering the size of the grinding wheel portion 4 (typically the outer diameter and inner diameter) and the range of the grinding wheel portion 4 that can be used for cutting, it is preferable that the angle θ1 satisfies 45° < θ1 < 90°, and more preferably 60° < θ1 < 90°.

[0024] Figures 3 and 4 are cross-sectional views showing an example of a method for manufacturing the cutting blade 2. As shown in Figures 3 and 4, in this embodiment, the grinding wheel portion 4 of the cutting blade 2 is manufactured by press molding using molds 22 and 24. However, the method for manufacturing the cutting blade 2 is not necessarily limited to this.

[0025] The mold 22 has, for example, an annular recess 22a that defines the overall shape of the grinding wheel portion 4, excluding the shape of the first surface 6 side. Specifically, the recess 22a has a bottom surface 22b having a shape corresponding to the second surface 8 of the grinding wheel portion 4, an outer surface 22c having a shape corresponding to the outer peripheral surface 10, and an inner surface 22d having a shape corresponding to the inner peripheral surface 12.

[0026] On the other hand, the mold 24 has an annular protrusion 24a that defines the shape of the first surface 6 side of the grinding wheel portion 4. Specifically, the protrusion 24a has an inclined surface 24b having a shape corresponding to the inclined surface 6a of the first surface 6 of the grinding wheel portion 4, a side surface 24c having a shape corresponding to the side surface 6b, and a flat surface 24d having a shape corresponding to the flat surface 6c. Furthermore, this protrusion 24a is formed in a shape and size that allows it to be inserted into the recess 22a of the mold 22.

[0027] When manufacturing the grinding wheel portion 4 of the cutting blade 2, first, as shown in Figure 3, the material 26 for the grinding wheel portion 4 is supplied to the recess 22a of the mold 22. The material 26 for the grinding wheel portion 4 is a mixture of a binder, such as a resin powder, and abrasive grains. Additives such as fillers useful for the grinding wheel portion 4 may be added to the material 26.

[0028] After the material 26 is supplied to the recess 22a of the mold 22, as shown in Figure 4, the protrusion 24a of the mold 24 is inserted into the recess 22a of the mold 22, and processing such as pressurization is performed. As a result, the material 26 is molded into the shape of the grinding wheel portion 4. After that, the material 26 is heated and solidified (sintered). The heating conditions are set arbitrarily according to the material 26, but typically the temperature is 170°C and the time is 1 hour. As a result, the grinding wheel portion 4 of the cutting blade 2 having the shape described above is obtained.

[0029] As described above, the cutting blade 2 is characterized by the shape of its first surface 6, and is used, for example, in cutting workpieces that utilize the shape of this first surface 6. Figure 5 is a schematic cross-sectional view showing the start of cutting of a workpiece 11 using the cutting blade 2, and Figure 6 is a schematic cross-sectional view showing the workpiece 11 being cut by the cutting blade 2.

[0030] The cutting of the workpiece 11 according to this embodiment is performed using, for example, a cutting device 32 shown in Figure 5, etc. The cutting device 32 is equipped with a chuck table 34 for holding the workpiece 11 from below. The chuck table 34 includes, for example, a disc-shaped frame 36 made of a metal material such as stainless steel, and a holding plate 38 which is made of a porous material and is positioned on top of the frame 36.

[0031] A suction source (not shown), consisting of an ejector or the like, is connected to the lower part of the holding plate 38 via a flow path (not shown) provided inside the frame 36 or a valve (not shown) located outside the frame 36. Therefore, when the valve is opened, the negative pressure generated by the suction source acts on the upper surface 38a of the holding plate 38 through the flow path. The workpiece 11 is placed on this upper surface 38a of the holding plate 38.

[0032] The workpiece 11 is, for example, a disc-shaped wafer mainly made of a semiconductor such as silicon. That is, the workpiece 11 has a circular first surface 11a and a circular second surface 11b facing the opposite side of the first surface 11a. The outer edges of the first surface 11a and the outer edges of the second surface 11b are connected to each other by a rounded outer surface 11c. Such an outer surface 11c can be obtained, for example, by chamfering the outer surface of a workpiece that has corners.

[0033] In this embodiment, as shown in Figure 5, the second surface 11b of the workpiece 11 is supported by the upper surface 38a of the retaining plate 38. Note that devices such as integrated circuits (ICs) may be formed on either the first surface 11a or the second surface 11b of the workpiece 11. Furthermore, a protective member, such as a protective tape made of resin or other material, may be attached to the second surface 11b of the workpiece 11 supported by the retaining plate 38.

[0034] Furthermore, in this embodiment, a disc-shaped wafer mainly composed of a semiconductor such as silicon is exemplified as the workpiece 11, but the material, shape, structure, size, etc. of the workpiece 11 are not limited to this. For example, substrates mainly composed of other semiconductors, ceramics, resins, metals, etc., can be used as the workpiece 11.

[0035] The chuck table 34 (frame 36) is connected to a rotational drive source (not shown), such as a motor, and rotates around a rotation axis perpendicular to the upper surface 38a of the holding plate 38 by the force generated by this rotational drive source. The chuck table 34 (frame 36) is also supported by a machining feed mechanism (not shown) and moves along a first direction (machining feed direction) parallel to the upper surface 38a of the holding plate 38.

[0036] A cutting unit 40 is positioned above the chuck table 34. The cutting unit 40 includes a cylindrical spindle housing 42. A portion of a columnar spindle 44 is housed in the space inside the spindle housing 42. The spindle 44 is positioned such that its longitudinal direction (the direction of the column height) is parallel to the upper surface 38a of the holding plate 38 and aligns with a second direction (indexing feed direction) that is perpendicular to the first direction.

[0037] A cutting blade 2 is mounted on the tip end of the spindle 44, which is exposed from the spindle housing 42, via a mount 46. A rotational drive source (not shown), such as a motor, is connected to the base end of the spindle 44, and the cutting blade 2 mounted on the tip end of the spindle 44 rotates due to the force generated by this rotational drive source. The spindle housing 42 is supported, for example, by a lifting mechanism (not shown) and an indexing feed mechanism (not shown), and moves in a vertical direction that is approximately perpendicular to the upper surface 38a of the holding plate 38, and in a second direction.

[0038] In this embodiment, the cutting device 32 configured in this way is used to cut, for example, a portion of the workpiece 11 including its outer circumferential surface 11c. Specifically, first, the workpiece 11 is placed on the upper surface 38a of the holding plate 38 such that the second surface 11b of the workpiece 11 faces the upper surface 38a of the holding plate 38. Next, with the suction source operating, the valve is opened. As a result, the negative pressure generated by the suction source acts on the upper surface 38a of the holding plate 38 through the flow path, etc., and the workpiece 11 is sucked into and held by the chuck table 34.

[0039] After the workpiece 11 is held by the chuck table 34, the height (vertical position) of the cutting unit 40 is adjusted, for example, by a lifting mechanism. Specifically, the height of the cutting unit 40 is adjusted so that the height of the inclined surface 6a on the lower end side of the cutting blade 2 is approximately the same as the height of the outer circumferential surface 11c of the workpiece 11.

[0040] In this embodiment, the height of the cutting unit 40 is adjusted so that the height of the lower end of the cutting blade 2 is located between the first surface 11a and the second surface 11b of the workpiece 11. However, if a protective member is attached to the second surface 11b of the workpiece 11, the height of the cutting unit 40 may be adjusted so that the height of the lower end of the cutting blade 2 is slightly lower than the second surface 11b of the workpiece 11.

[0041] Next, the chuck table 34 and the spindle 44 (cutting blade 2) are rotated by rotational drive sources connected to them, respectively. In this state, as shown in Figure 5, the cutting unit 40 moves along the second direction by the indexing feed mechanism.

[0042] Specifically, the cutting unit 40 moves from the outer periphery of the workpiece 11 toward the center so that the inclined surface 6a of the cutting blade 2 comes into contact with the workpiece 11 held by the chuck table 34. When the inclined surface 6a of the cutting blade 2 comes into contact with the outer periphery 11c of the workpiece 11, cutting of the workpiece 11 begins.

[0043] The movement of the cutting unit 40 by the indexing feed mechanism continues after the inclined surface 6a of the cutting blade 2 contacts the outer circumferential surface 11c of the workpiece 11, until the cutting blade 2 reaches the target position. As shown in Figure 6, when the cutting blade 2 reaches the target position, the cutting of the workpiece 11 is completed. As a result, an annular notch 11d is formed on the outer circumferential edge of the workpiece 11, having a shape corresponding to the shape of the inclined surface 6a of the cutting blade 2.

[0044] Figure 7 is a schematic cross-sectional view showing the workpiece 11 after it has been cut by the cutting blade 2. As shown in Figure 7, according to the machining method of this embodiment, the first surface 11a side of the workpiece 11 is machined to have a shape with an inverse tapered cross-section. That is, a notch 11d is realized having a bottom surface 11e that reflects the shape of the outer peripheral surface 10 of the cutting blade 2 and an inclined surface 11f that reflects the shape of the inclined surface 6a of the cutting blade 2.

[0045] As described above, the cutting blade (grinding tool) 2 according to this embodiment is equipped with a disc-shaped grinding wheel portion 4 containing abrasive grains, and the inclined surface 6a, which is part of the first surface 6 of the grinding wheel portion 4, has a shape that approaches the second surface 8 as it moves from the outer peripheral edge of the first surface 6 towards the center. Therefore, the workpiece 11 can be processed into a reverse tapered shape without making any major adjustments to the cutting device 32, such as tilting the spindle 44.

[0046] Figure 8 is a schematic cross-sectional view of a cutting blade 102 according to the first modified example. This cutting blade 102 has a disc-shaped (annular) grinding wheel portion 104 having a structure in which abrasive grains are dispersed in a binder, as well as a disc-shaped base portion 114 made of metal or the like, and is also called a hub type. Note that Figure 8 shows the side view of the base portion 114.

[0047] The shape of the grinding wheel portion 104 is the same as the shape of the grinding wheel portion 4 of the cutting blade 2 according to the embodiment. That is, the grinding wheel portion 104 has a circular (annular) first surface 6, a circular (annular) second surface 8 facing the opposite side from the first surface 6, and an outer surface 10 that connects the outer peripheral edge of the first surface 6 and the outer peripheral edge of the second surface 8.

[0048] Circular openings are provided in the central region of the first surface 6 and the central region of the second surface 8, and the edges of the openings in the first surface 6 (the inner peripheral edge of the first surface 6) and the edges of the openings in the second surface 8 (the inner peripheral edge of the second surface 8) are connected to each other by the inner peripheral surface 12. In other words, the grinding wheel portion 104 of the cutting blade 102 also has a hole that penetrates from the first surface 6 side to the second surface 8 side.

[0049] A portion of the outer peripheral edge of the first surface 6 is an inclined surface 6a that approaches the second surface 8 as it moves from the outer peripheral edge of the first surface 6 toward the center (inner peripheral edge). The condition for the angle θ2 that this inclined surface 6a makes with respect to the direction along the rotation axis A2 of the cutting blade 102 is the same as the condition for the angle θ1 in the embodiment described above.

[0050] One end of the annular side surface 6b is connected to the inclined surface 6a. A generally flat surface 6c is connected to the other end of the side surface 6b. Thus, an annular groove 6d is provided on the first surface 6 side of the grinding wheel portion 104, with the inclined surface 6a and the side surface 6b as its sides. On the other hand, the second surface 8 is formed to be generally flat. The flat surface 6c and the second surface 8 are aligned in a direction perpendicular to the rotation axis A2 of the cutting blade 102.

[0051] The grinding wheel portion 104 is fixed to the outer peripheral edge of the base portion 114 so as to protrude outward from the base portion 114 along the radial direction of the base portion 114. The base portion 114 has a hole that is concentric with the hole in the grinding wheel portion 104, and the cutting blade 102 is mounted on the spindle 44 by inserting a part of the mount into the hole in the grinding wheel portion 104 and the hole in the base portion 114.

[0052] Figure 9 is a schematic cross-sectional view showing a cutting blade 202 according to a second modified example. This cutting blade 202 also includes a disc-shaped (annular) grinding wheel portion 204 having a structure in which abrasive grains are dispersed in a binder. The shape of the grinding wheel portion 204 is the same as the shape of the grinding wheel portion 4 according to the embodiment, except that the shape of the first surface 206 is different from the first surface 6.

[0053] As shown in Figure 9, the first surface 206 of the grinding wheel portion 204 is an inclined surface that approaches the second surface 8 as it moves from the outer peripheral edge towards the center (inner peripheral edge). In this cutting blade 202, the entire first surface 206 is inclined with respect to the direction along the rotation axis A3 of the cutting blade 202.

[0054] However, a flat surface aligned perpendicular to the rotation axis A3 may be connected to the inclined surface as part of the central side (inner peripheral edge side) of the first surface 6. In other words, this cutting blade 202 does not have a side surface corresponding to the side surface 6b of the embodiment, nor does it have a groove corresponding to the groove 6d of the embodiment. The condition for the angle θ3 that the inclined surface, the first surface 6, makes with respect to the direction along the rotation axis A3 is the same as the condition for the angle θ1 in the embodiment described above.

[0055] Figure 10 is a schematic cross-sectional view showing a cutting blade 302 according to a third modified example. This cutting blade 302 also includes a disc-shaped (annular) grinding wheel portion 304 having a structure in which abrasive grains are dispersed in a binder. The shape of the grinding wheel portion 304 is the same as that of the grinding wheel portion 4 according to the embodiment, except that the shape of the first surface 306 is different from that of the first surface 6.

[0056] As shown in Figure 10, grooves 306a, 306b, 306c, and 306d are provided on the first surface 306 side of the grinding wheel portion 304, arranged concentrically. The shapes of grooves 306a, 306b, 306c, and 306d are the same as the shape of groove 6d in the embodiment. That is, grooves 306a, 306b, 306c, and 306d all include an inclined surface tilted in the direction along the rotation axis A4 of the cutting blade 302 and an annular side surface.

[0057] The conditions for the angle each inclined surface makes with respect to the direction along the rotation axis A4 are the same as the conditions for angle θ1 in the embodiment described above. However, the angles of each inclined surface do not all have to be the same. That is, the angles of the inclined surfaces constituting groove 306a, groove 306b, groove 306c, and groove 306d may be different. In this case, for example, it becomes possible to form multiple inclined surfaces 11f with different inclinations using a single cutting blade 302.

[0058] Figure 11 is a schematic cross-sectional view showing a cutting blade 402 according to the fourth modified example. This cutting blade 402 also includes a disc-shaped (annular) grinding wheel portion 404 having a structure in which abrasive grains are dispersed in a binder. The shape of the grinding wheel portion 404 is the same as the shape of the grinding wheel portion 4 according to the embodiment, except that the shape of the second surface 408 is different from the second surface 8.

[0059] In other words, the grinding wheel portion 404 has a circular (annular) first surface 406 and a circular (annular) second surface 408 facing the opposite side from the first surface 406. A portion of the outer peripheral edge of the first surface 406 is an inclined surface 406a that approaches the second surface 408 as it moves from the outer peripheral edge of the first surface 406 towards the center (inner peripheral edge).

[0060] One end of the annular side surface 406b is connected to the inclined surface 406a. A generally flat surface 406c is connected to the other end of the side surface 406b. In this way, an annular groove 406d is provided on the first surface 406 side of the grinding wheel portion 404, with the inclined surface 406a and the side surface 406b as its sides.

[0061] Similarly, a portion of the outer peripheral edge of the second surface 408 is an inclined surface 408a, which has a shape that approaches the first surface 406 as it moves from the outer peripheral edge of the second surface 408 toward the center (inner peripheral edge). One end of the annular side surface 408b is connected to the inclined surface 408a. A generally flat surface 408c is connected to the other end of the side surface 408b. In this way, an annular groove 408d is also provided on the second surface 408 side of the grinding wheel portion 404, with the inclined surface 408a and the side surface 408b as its sides.

[0062] In this fourth modified example of the cutting blade 402, both the inclined surface 406a, which is part of the first surface 406, and the inclined surface 408a, which is part of the second surface 408, are inclined with respect to the direction along the rotation axis A5 of the cutting blade 402.

[0063] The conditions for the angle θ5a that inclined surface 406a makes with respect to the direction along the rotation axis A5, and the conditions for the angle θ5b that inclined surface 408a makes with respect to the direction along the rotation axis A5, are the same as the conditions for angle θ1 in the embodiment described above. However, angles θ5a and θ5b do not need to be the same.

[0064] When angles θ5a and θ5b are the same, for example, the same cutting process can be performed on both the first surface 406 and the second surface 408 of the cutting blade 402. This increases the effective durability compared to a cutting blade 2 that has an inclined surface 6a only on the first surface 6, and increases the number of workpieces 11 that can be cut. On the other hand, when angles θ5a and θ5b are different, for example, it becomes possible to form multiple inclined surfaces 11f with different inclinations using a single cutting blade 402.

[0065] Figure 12 is a schematic cross-sectional view of a cutting blade 502 according to the fifth modified example. This cutting blade 502 also includes a disc-shaped (annular) grinding wheel portion 504 having a structure in which abrasive grains are dispersed in a binder. The shape of the grinding wheel portion 504 is the same as that of the grinding wheel portion 204 according to the second modified example, except that the shape of the second surface 508 is different from that of the second surface 8.

[0066] As shown in Figure 12, the first surface 506 of the grinding wheel portion 504 is an inclined surface that approaches the second surface 508 as it moves from the outer peripheral edge towards the center (inner peripheral edge). In this cutting blade 502, the entire first surface 506 is inclined with respect to the direction along the rotation axis A6 of the cutting blade 502. Similarly, the second surface 508 of the grinding wheel portion 504 is an inclined surface that approaches the first surface 506 as it moves from the outer peripheral edge towards the center (inner peripheral edge). In this cutting blade 502, the entire second surface 508 is inclined with respect to the direction along the rotation axis A6.

[0067] However, a flat surface aligned perpendicular to the rotation axis A6 may be connected to the inclined surface as part of the central side (inner peripheral edge side) of the first surface 506. Similarly, a flat surface aligned perpendicular to the rotation axis A6 may be connected to the inclined surface as part of the central side (inner peripheral edge side) of the second surface 508.

[0068] The conditions for the angle θ6a that the first surface 506 makes with respect to the direction along the rotation axis A6, and the conditions for the angle θ6b that the second surface 508 makes with respect to the direction along the rotation axis A6, are the same as the conditions for angle θ1 in the embodiment described above. However, angles θ6a and θ6b do not need to be the same.

[0069] When angles θ6a and θ6b are the same, for example, the same cutting process can be performed on both the first surface 506 and the second surface 508 of the cutting blade 502. This increases the effective durability compared to a cutting blade 202 that has an inclined surface 206a only on the first surface 206, and increases the number of workpieces 11 that can be cut. On the other hand, when angles θ6a and θ6b are different, for example, it becomes possible to form multiple inclined surfaces 11f with different inclinations using a single cutting blade 502.

[0070] Figure 13 is a schematic cross-sectional view showing a cutting blade 602 according to the sixth modified example. This cutting blade 602 also includes a disc-shaped (annular) grinding wheel portion 604 having a structure in which abrasive grains are dispersed in a binder. The shape of the grinding wheel portion 604 is the same as that of the grinding wheel portion 304 according to the third modified example, except that the shape of the second surface 608 is different from that of the second surface 8.

[0071] As shown in Figure 13, grooves 606a, 606b, 606c, and 606d are provided on the first surface 606 side of the grinding wheel portion 604, arranged concentrically. The shapes of grooves 606a, 606b, 606c, and 606d are the same as the shape of groove 6d in the embodiment. That is, grooves 606a, 606b, 606c, and 606d all include an inclined surface tilted in the direction along the rotation axis A7 of the cutting blade 602 and an annular side surface.

[0072] Similarly, grooves 608a, 608b, 608c, and 608d are provided on the second surface 608 side of the grinding wheel portion 604, arranged concentrically. The shapes of grooves 608a, 608b, 608c, and 608d are the same as the shape of groove 6d in the embodiment. That is, grooves 608a, 608b, 608c, and 608d all include an inclined surface tilted in the direction along the rotation axis A7 and an annular side surface.

[0073] The conditions for the angle each inclined surface makes with respect to the direction along the rotation axis A7 are the same as the conditions for angle θ1 in the embodiment described above. However, the angles of each inclined surface do not all need to be the same. If the angles of each inclined surface are the same, for example, the substantial durability is increased compared to a cutting blade 302 having an inclined surface only on the first surface 306 side, and the number of workpieces 11 that can be cut increases. On the other hand, if the angles of each inclined surface are different, for example, it becomes possible to form multiple inclined surfaces 11f with different inclinations using a single cutting blade 602.

[0074] Figure 14 is a schematic cross-sectional view showing another example of the cutting process of the workpiece 11. The cutting process of the workpiece 11 in this other example is also performed using the cutting device 32 described above. However, in this case, a cutting blade 502 is mounted on the spindle 44, with both the first surface 506 and the second surface 608 inclined with respect to the direction along the rotation axis A6.

[0075] After the workpiece 11 is held by the chuck table 34, the orientation of the chuck table 34 is adjusted by a rotary drive source connected to the chuck table 34, for example, so that the planned machining line of the workpiece 11 to be cut is aligned with the first direction (machining feed direction). In addition, the position of the cutting unit 40 relative to the chuck table 34 is adjusted by the machining feed mechanism, indexing feed mechanism, and lifting mechanism so that the cutting blade 502 is positioned along the extension of the planned machining line.

[0076] In this case, the height of the cutting unit 40 is adjusted so that the height of the lower end of the cutting blade 502 is located between the first surface 11a and the second surface 11b of the workpiece 11. However, if a protective member is attached to the second surface 11b of the workpiece 11, the height of the cutting unit 40 may be adjusted so that the height of the lower end of the cutting blade 2 is slightly lower than the second surface 11b of the workpiece 11.

[0077] Next, the cutting blade 2 is rotated by a rotational drive source connected to the spindle 44 (cutting blade 2). In this state, the chuck table 34 moves along the first direction by the machining feed mechanism. As a result, the cutting blade 502 cuts into the workpiece 11 along the target machining line, and the workpiece 11 is machined as shown in Figure 14.

[0078] In this cutting process, both the first surface 506 and the second surface 608 of the cutting blade 502 are inclined with respect to the direction along the rotation axis A6. Therefore, a gap is formed between the groove formed by the cutting process and the first surface 506 and the second surface 508 of the cutting blade 502, which increases towards the center (upwards) of the cutting blade 502. This improves the efficiency of chip evacuation generated by the cutting process.

[0079] The present invention is not limited by the embodiments and modifications described above and can be implemented with various modifications. For example, in the embodiments described above, the case in which the angle θ1 of the inclined surface 6a with respect to the direction along the rotation axis A1 is approximately constant is illustrated, but the angle θ1 of the inclined surface 6a does not have to be constant.

[0080] Furthermore, in the above-described embodiment, the side surface 6b connecting the inclined surface 6a and the flat surface 6c is formed to be aligned with the direction of the rotation axis A1, but the side surface 6b may be inclined with respect to the rotation axis A1.

[0081] Furthermore, the structures, methods, etc., of the embodiments and their respective modifications described above may be modified as appropriate, as long as they do not deviate from the scope of the present invention. [Explanation of Symbols]

[0082] 2: Cutting blade 4: Sharpening stone section 6: 1st page 6a: Inclined surface 6b: Side 6c: flat surface 6d: Groove 8:Second side 10: Outer surface 12: Inner surface 22: Mold 22a: Recess 22b: Bottom 22c: Outer surface 22d: Inner surface 24: Mold 24a: Convex part 24b: Inclined surface 24c: Side 24d: flat surface 26: Material 32: Cutting equipment 34: Chuck Table 36:Frame body 38: Holding plate 38a:Top surface 40: Cutting Unit 42: Spindle Housing 44: Spindle 46: Mounter 11: Workpiece 11a: 1st page 11b: 2nd side 11c: Outer surface 11d: Notch 11e: Bottom 11f: Inclined surface

Claims

1. A grinding wheel tool used in a state where it is rotated around a rotating axis, It is equipped with a disc-shaped grinding wheel containing abrasive grains, The grinding wheel section is, The first circular surface, It has a second circular surface facing the opposite side from the first surface, A grinding tool in which a portion of the first surface has a shape that approaches the second surface as it moves from the outer edge of the first surface toward the center.

2. The grinding wheel tool according to claim 1, wherein the grinding wheel portion further has an annular groove with a part of the first surface as a side surface.

3. The grinding tool according to claim 1 or claim 2, wherein a portion of the first surface and a portion of the second surface are both inclined with respect to the direction along the axis of rotation.

4. The grinding wheel tool according to claim 3, wherein the grinding wheel portion further has an annular groove with a part of the second surface as a side surface.

5. The grinding tool according to claim 1 or claim 2, wherein a portion of the central side of the first surface and a portion of the central side of the second surface both have a shape aligned in a direction perpendicular to the axis of rotation.

6. It further includes a disc-shaped base, The grinding wheel portion is fixed to the base portion such that it protrudes outward from the base portion along the radial direction of the base portion, as described in claim 1 or claim 2.

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