Drive device, positioning device, processing device, device manufacturing method

Abstract

The present invention provides a drive device that can reduce the rotation of a slider caused by a driving force along a predetermined driving direction. [Solution] The stage device 1 includes an X-slider 21 that can move linearly along a predetermined drive direction (X-axis direction), a first linear motor 120 that applies a driving force to the X-slider 21 along the drive direction, and a compensation force application unit 5 that can apply a compensation force to the X-slider 21 to reduce the pitching of the X-slider 21 caused by the driving force. The compensation force application unit 5 can apply a compensation force to the X-slider 21 that has a different line of action from the driving force. Multiple compensation force application units 5 can apply compensation forces in substantially the same direction at different positions on the same outer surface of the X-slider 21.

Description

Technical Field

[0001] The present disclosure relates to a drive device and the like.

Background Art

[0002] Patent Document 1 discloses an XY stage device capable of driving a stage in the XY two-axis directions by an X linear motor and a Y linear motor.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The linear motors for each of the X and Y axes generate driving forces along their respective axial directions. However, since the positions where the driving forces are applied are displaced from the center of gravity of the stage as the driven body, undesirable rotation (such as pitching, yawing, rolling, etc.) of the stage may occur. Such rotation may manifest as undesirable swaying or vibration during stage driving, which may deteriorate the driving accuracy.

[0005] The present disclosure has been made in view of such a situation, and an object thereof is to provide a drive device and the like that can reduce the rotation of a slider due to a driving force along a predetermined driving direction.

Means for Solving the Problems

[0006] To solve the above problems, a drive device according to an aspect of the present disclosure includes a slider that can linearly move along a predetermined driving direction, a drive unit that applies a driving force along the driving direction to the slider, and a compensation force application unit that can apply a compensation force to the slider to reduce the rotation of the slider due to the driving force.

[0007] According to this embodiment, the rotation of the slider due to the driving force of the drive unit can be reduced by a compensating force application unit provided in addition to the drive unit.

[0008] Another aspect of the present disclosure is a positioning device, which positions a slider using the drive device described above.

[0009] Another aspect of the present disclosure is a processing apparatus, which performs a predetermined process on an object to be processed, which is positioned on a slider positioned by the positioning device described above.

[0010] Another aspect of this disclosure is a device manufacturing method, which manufactures a device through processing by the processing apparatus described above.

[0011] Furthermore, any combination of the above components, as well as any representations thereof converted into methods, apparatus, systems, recording media, computer programs, etc., are also included in this disclosure. [Effects of the Invention]

[0012] According to this disclosure, the rotation of the slider due to the driving force along a predetermined driving direction can be reduced. [Brief explanation of the drawing]

[0013] [Figure 1] This is a schematic perspective view showing the stage apparatus according to the first embodiment. [Figure 2] This is a schematic perspective view showing the details of the first linear motor. [Figure 3] This is a schematic cross-sectional view showing the first gas buoyancy section, which facilitates the X-axis drive of the X slider by the first drive shaft using buoyant gas. [Figure 4] This is a schematic cross-sectional view showing the second gas buoyancy section, which facilitates the Y-axis drive of the Y-slider by the second drive shaft using buoyancy gas. [Figure 5] The undesirable rotations that can occur in a slider are schematically illustrated using the X slider as an example. [Figure 6]The mechanism of the undesired rotation of the slider and the concept of the compensation force application unit that reduces it are schematically shown by an example of the yaw around the Z axis that can occur in the X slider. [Figure 7] Schematically shows the compensation force application unit provided on the ZX plane of the X slider. [Figure 8] Schematically shows the stage device according to the second embodiment. [Figure 9] Schematically shows the stage device according to the second embodiment. [Figure 10] Schematically shows the stage device according to the second embodiment. [Figure 11] Schematically shows the details of the voice coil motor in FIG. 8. [Figure 12] It is a schematic functional block diagram of the stage device.

Mode for Carrying Out the Invention

[0014] Hereinafter, embodiments for implementing the present disclosure (hereinafter also referred to as embodiments) will be described in detail with reference to the drawings. In the description and / or drawings, the same or equivalent components, members, processes, etc. are denoted by the same reference numerals, and redundant descriptions are omitted. The scales and shapes of the respective parts shown are set for convenience in order to simplify the description, and are not to be construed as limited unless otherwise specified. The embodiments are examples and do not limit the scope of the present disclosure in any way. All features presented in the embodiments and combinations thereof are not necessarily essential to the present disclosure. The embodiments are presented, for convenience, broken down into components for each function and / or function group for which they are realized. However, one component in an embodiment may actually be realized by a combination of a plurality of components as separate entities, or a plurality of components in an embodiment may actually be realized by one component as an integral entity. Also, a plurality of embodiments and modifications may be disclosed in parallel, but any components of each embodiment and / or each modification may be combined in any manner as long as they do not inhibit each other's functions.

[0015] FIG. 1 is a perspective view schematically showing a stage device 1 as a driving device or a positioning device according to a first embodiment of the present disclosure. In the present embodiment, for convenience, a three-dimensional coordinate system or an XYZ coordinate system formed by X-axis, Y-axis, and Z-axis orthogonal to each other is set. The X-axis direction is a first direction as a driving direction in which a first driving shaft 100 described later drives a stage 2 or a table as a driven body. The Y-axis direction is a second direction as a driving direction in which a second driving shaft 200 described later integrally drives the stage 2 and the first driving shaft 100. The Z-axis direction is a third direction as a normal direction of a driving plane or an XY plane formed by the X-axis and the Y-axis. The XY plane is preferably a horizontal plane, and in this case, the Z-axis direction is a vertical direction. Note that the X-axis, Y-axis, and Z-axis do not have to be orthogonal to each other, and it is sufficient that they at least intersect each other. In other words, the X-axis direction, Y-axis direction, and Z-axis direction only need to be different from each other.

[0016] The stage device 1 includes a first driving shaft 100 that magnetically drives the stage 2 in the X-axis direction, and a second driving shaft 200 that magnetically drives the stage 2 and the first driving shaft 100 integrally in the Y-axis direction. In the example of the present embodiment, a pair (that is, two) of substantially the same second driving shafts 200 are provided at both ends of the first driving shaft 100 extending in the X-axis direction. Hereinafter, unless otherwise specified, the two second driving shafts 200 are not distinguished and are described together.

[0017] One first driving shaft 100 and two second driving shafts 200 form a substantially H shape when viewed in the Z-axis direction or from above. The two second driving shafts 200 are fixedly installed on the surface of a surface plate 3 having a surface in the XY plane or a horizontal plane. One first driving shaft 100 is in a non-contact state away from the surface of the surface plate 3 in the Z-axis direction so as to be movable in the Y-axis direction on the surface plate 3 through the two second driving shafts 200. The surface plate 3 is further fixedly installed on the surface of a base 4 having a surface in the XY plane or a horizontal plane.

[0018] Any object (not shown) is placed on the surface of the stage 2 that constitutes the driven body. Here, in this embodiment, "front surface" or "top surface" refers to the +Z side surface (top surface in Figure 1), and in this embodiment, "back surface" or "bottom surface" refers to the -Z side surface (bottom surface in Figure 1). Furthermore, with respect to the first drive shaft 100 whose driving direction is in the X-axis direction, the ±Y side surfaces are referred to as "side surfaces," and the ±X side surfaces are referred to as "front surfaces" or "rear surfaces." Similarly, with respect to the second drive shaft 200 whose driving direction is in the Y-axis direction, the ±X side surfaces are referred to as "side surfaces," and the ±Y side surfaces are referred to as "front surfaces" or "rear surfaces."

[0019] Any object to be processed, such as a semiconductor wafer, or a workpiece may be placed on the surface or top surface of Stage 2. In this case, Stage 1 constitutes a positioning device for positioning the object to be processed placed on Stage 2 as a driven object, and further constitutes a part of a processing apparatus that performs any processing on the object positioned by the positioning device. Examples of processing apparatuses include semiconductor manufacturing equipment such as exposure apparatuses, ion implantation apparatuses, heat processing apparatuses, ashing apparatuses, sputtering apparatuses, dicing apparatuses, inspection apparatuses, and cleaning apparatuses, as well as FPD (Flat Panel Display) manufacturing apparatuses.

[0020] The first drive shaft 100, which drives the stage 2 as the driven body in the X-axis direction, is equipped with an X-guide 110 that extends linearly along the X-axis direction. The X-guide 110 constitutes the main body of the first drive shaft 100. An X-slider 21 is provided on the X-guide 110 that is movable or slideable linearly along the X-axis direction (a predetermined driving direction) while being guided by the X-guide 110. The surface of the X-slider 21 (the +Z side) is connected to the back surface (the -Z side) of the stage 2, and together they constitute the driven body. Therefore, the stage 2 can move in the X-axis direction while being guided by the X-guide 110, together with the X-slider 21. As will be described later, a buoyant gas such as compressed air is supplied between the inner circumferential surface of the X-slider 21 which constitutes the driven body and the outer circumferential surface of the X-guide 110 which constitutes the first drive shaft 100, so that the X-slider 21 can float away from the X-guide 110 and move smoothly with virtually no contact.

[0021] To drive the driven body, which is composed of the stage 2 and the X slider 21, along the X-axis direction, a first linear motor 120 is configured as a drive unit between the driven body and the first drive shaft 100. The first linear motor 120 applies a driving force to the X slider 21 along the X-axis direction (driving direction). In this embodiment, a pair (i.e., two) substantially identical first linear motors 120 are provided on both sides in the Y-axis direction of the X slider 21 (and the X guide 110 as the body of the first drive shaft 100), which is the driven body. Furthermore, each first linear motor 120 is provided on the X slider 21 on the back side of the driven body, which is composed of the stage 2 and the X slider 21. In this way, by providing each first linear motor 120 on the X slider 21 on the back side, away from the front side stage 2, it is possible to reduce the adverse effects that magnetic leakage from each first linear motor 120 may have on the processing of semiconductor wafers and the like on the stage 2 (for example, irradiation with an electron beam that is susceptible to magnetic fields).

[0022] Generally, a linear motor comprises a coil section composed of multiple coils that generate a magnetic field when an electric current is passed through them from an external source, and a magnet section composed of multiple magnets that interact with the magnetic field generated by the coil section. The first linear motor 120 according to this embodiment also comprises a first coil section 130 as the coil section and a first magnet section 140 as the magnet section. In order to configure the first linear motor 120 to drive the X slider 21 (and stage 2) as the driven object along the X axis direction, one of the first coil section 130 and the first magnet section 140 can be provided on the X slider 21, and the other on the first drive shaft 100.

[0023] In the first linear motor 120, it is preferable that the first coil section 130 is provided on the X slider 21 and the first magnet section 140 is provided on the first drive shaft 100. As shown in the figure, the first magnet section 140 may be attached to a columnar beam section 160 that spans between a pair of Y sliders 150 (described later), which are part of the first drive shaft 100. Although their arrangement is arbitrary, for example, in a view along the Z axis, the X slider 21, the first magnet section 140 (or the first coil section 130), and the beam section 160 are arranged in that order from the central X slider 21 outward along the Y axis. Furthermore, the first magnet section 140 and the beam section 160, which are long in the X axis direction, are arranged substantially parallel to each other on both sides in the Y axis direction of the X guide 110, which is also long in the X axis direction. However, the first magnet section 140 and the beam section 160 are not in contact with the X guide 110, and the X slider 21 is able to move through the gap between them.

[0024] The first coil section 130 is driven in the X-axis direction integrally with the X slider 21 by magnetic interaction with the first magnet section 140. Because the first coil section 130 moves in this way, the first linear motor 120 is a so-called moving coil type linear motor. In this case, since the first magnet section 140 is stationary in the X-axis direction (however, it moves in the Y-axis direction by the second drive shaft 200), there is an advantage that there is little fluctuation in magnetic field leakage outside the first linear motor 120. This is particularly preferable when the processing of semiconductor wafers, etc., on the stage 2 is susceptible to magnetic fields.

[0025] In such a moving coil type first linear motor 120, the length of the first coil section 130 in the X-axis direction is shorter than the length of the first magnet section 140 in the X-axis direction. For example, it is preferable that the length of the first coil section 130 in the X-axis direction is less than or equal to the length of the X slider 21 and / or stage 2 in the X-axis direction. Also, it is preferable that the length of the first magnet section 140 in the X-axis direction is long enough to cover the range of motion of the X slider 21 in the X-axis direction. As will be described later, the relatively short first coil section 130 can move integrally with the X slider 21 and stage 2, which are driven bodies, in the X-axis direction within the installation range of the relatively long first magnet section 140.

[0026] On the other hand, if the processing of semiconductor wafers and the like on stage 2 is not easily affected by magnetism, the first linear motor 120 may be configured as a so-called moving magnet type. Specifically, the first coil section 130 is provided on the first drive shaft 100 (for example, the beam section 160), and the first magnet section 140 is provided on the X slider 21 (not shown). In this case, the first coil section 130, which generates heat due to the current flowing through it, is isolated from the driven body integrated with stage 2 or the X slider 21, so that heat transfer to stage 2 and / or the workpiece such as semiconductor wafers can be effectively suppressed. This is particularly preferable when the workpiece such as semiconductor wafers is susceptible to heat.

[0027] In such a moving magnet type first linear motor 120, the length of the first coil section 130 in the X-axis direction is longer than the length of the first magnet section 140 in the X-axis direction. For example, the length of the first coil section 130 in the X-axis direction is preferably long enough to cover the range of motion of the X slider 21 in the X-axis direction. Also, the length of the first magnet section 140 in the X-axis direction is preferably less than or equal to the length of the X slider 21 and / or stage 2 in the X-axis direction. The relatively short first magnet section 140 can move integrally with the X slider 21 and stage 2, which are driven objects, in the X-axis direction within the installation range of the relatively long first coil section 130.

[0028] By providing the pair of first linear motors 120 described above on both sides of the X slider 21 and stage 2 in the Y-axis direction, the driven body can be stably driven in the X-axis direction while effectively suppressing undesirable rotations such as yawing (rotation around the Z-axis).

[0029] Figure 2 is a schematic perspective view showing the details of the first linear motor 120. This figure shows the first linear motor 120 in Figure 1 viewed from the back side (-Z side).

[0030] The first coil section 130 comprises a holder 131 and a coil 132 held by the holder 131. Although not shown in detail, the coil 132 is, for example, a typical three-phase coil. Specifically, U-phase, V-phase, and W-phase coils (not shown) are arranged periodically along the X-axis direction, which is the driving direction. The current flowing through each phase coil 132 (e.g., U-phase current, V-phase current, W-phase current) may be supplied via the holder 131. The coil 132 is provided so as to protrude from the holder 131 on the back side toward the front side (+Z side). Such a coil 132 or group of coils is preferably formed as a flat plate with the Y-axis direction as the normal direction. The holder 131 is fixedly attached to the side surface, preferably on the back side, of the X-slider 21, which is the driven object. Therefore, the first coil section 130 is movable integrally with the X-slider 21 in the X-axis direction.

[0031] The first magnetic section 140 comprises a substantially rectangular parallelepiped housing 141 and magnets 142 arranged on the inner circumferential surface of the housing 141. The housing 141 is made of a magnetic shielding material or soft magnetic material such as carbon steel or permalloy. A long opening 143 extending in the X-axis direction along substantially its entire length is formed on the back surface of the housing 141 (the surface of the housing 141 is closed by a magnetic shielding material or the like). Although not explicitly shown, a magnetic shielding portion may be provided on the edge of the opening 143 or on the side surface of the housing 141. The aforementioned flat plate-shaped coil 132 is inserted into the substantially rectangular parallelepiped space within the housing 141 formed by this opening 143. Furthermore, magnets 142, such as permanent magnets with periodically changed magnetic poles, are arranged along the X-axis direction on the inner circumferential surface of the housing 141, which is the side wall surface of the space.

[0032] Thus, in the roughly rectangular parallelepiped space within the housing 141, the coil 132 or coil group in the first coil section 130 and the magnet 142 or magnet group in the first magnet section 140 face each other in the Y-axis direction. When three-phase alternating current flows through the coil 132, which functions as an electromagnet, it magnetically interacts with the magnet 142, generating a thrust or driving force that drives the coil 132, which acts as a movable element, in the X-axis direction. The flat coil 132 is driven along the X-axis direction within the roughly rectangular parallelepiped space within the housing 141. The X-slider 21 and stage 2, which are driven bodies to which the coil 132 or the first coil section 130 is fixed, are also driven integrally with the first coil section 130 in the X-axis direction while being guided by the X-guide 110.

[0033] As described above, in the example of Figure 2, the coil 132 through which the current flows is provided so as to protrude from the holder 131 toward the surface side (+Z side), and the first magnet part 140 or magnet 142 that interacts with the magnetic field generated by the coil 132 is provided so as to cover the coil 132 from the surface side. In such a first linear motor 120, since the opening 143 through which the magnetism from the coil 132 and / or magnet 142 leaks is provided on the back side far from the stage 2, the adverse effects that this magnetism may have on the processing of semiconductor wafers and the like on the stage 2 can be reduced.

[0034] In Figure 1, the second drive shaft 200, which integrally drives the stage 2 and X slider 21 as driven objects and the first drive shaft 100 in the Y-axis direction, is equipped with a Y guide 210 that extends linearly along the Y-axis direction. The Y guide 210 constitutes the main body of the second drive shaft 200. A Y slider 150 is provided on the Y guide 210, which is movable or slideable linearly along the Y-axis direction (a predetermined driving direction) while being guided by the Y guide 210.

[0035] The Y-slider 150 is part of the first drive shaft 100 described above. Specifically, a pair (i.e., two) substantially identical Y-sliders 150 are integrally provided at both ends in the X-axis direction of the X-guide 110, which is the main body of the first drive shaft 100. When the pair of second drive shafts 200 drive the pair of Y-sliders 150 in the Y-axis direction, the entire first drive shaft 100, which is integrally configured with the Y-sliders 150, and the driven objects, the stage 2 and the X-slider 21, are also driven integrally in the Y-axis direction. Thus, the objects driven by the second drive shafts 200 include the entire first drive shaft 100, which includes the Y-sliders 150 as part, and the driven objects composed of the stage 2 and the X-slider 21.

[0036] Stage 2, as the driven body, is movable in the Y-axis direction while being guided by the Y-guide 210, integrally with the Y-slider 150. As will be described later, a buoyant gas such as compressed air is supplied between the inner circumferential surface of the Y-slider 150, which constitutes the first drive shaft 100, and the outer circumferential surface of the Y-guide 210, which constitutes the second drive shaft 200. As a result, the Y-slider 150 floats away from the Y-guide 210 and can move smoothly with virtually no contact.

[0037] To drive the drive target, including Stage 2 and Y-slider 150, along the Y-axis direction, a second linear motor 220 is configured as a drive unit between the drive target and the second drive shaft 200. The second linear motor 220 applies a driving force to the Y-slider 150 along the Y-axis direction (driving direction). In this embodiment, a pair (i.e., two) substantially identical second linear motors 220 are provided on the outside of each Y-guide 210 and each Y-slider 150 in the X-axis direction.

[0038] The second linear motor 220 comprises a second coil section 230 as a coil section and a second magnet section 240 as a magnet section. In order to configure the second linear motor 220 to drive the Y slider 150, which is the object to be driven, along the Y axis direction, one of the second coil section 230 and the second magnet section 240 can be attached to the Y slider 150, and the other can be attached to the second drive shaft 200.

[0039] In the second linear motor 220, it is preferable that the second coil section 230 is attached to the second drive shaft 200 and the second magnet section 240 is provided on the Y slider 150. As shown in the figure, the second coil section 230 may be fixedly installed on a base 4 adjacent to the second drive shaft 200. Since the base 4, the base plate 3, and the second drive shaft 200 are fixed to each other, regardless of which of them the second coil section 230 is provided on, it should be interpreted as being provided on the second drive shaft 200 in substance. The second coil section 230 (in particular the coil 232 described later) is not in contact with the Y guide 210 and the Y slider 150, and the gap between them allows the second magnet section 240 (in particular the housing 241 described later) to move in the Y direction. In this way, the second coil section 230 is provided at a position away from the Y guide 210, which is the main body of the second drive shaft 200, in the X direction.

[0040] The second coil section 230 comprises a holder 231 mounted on the base 4 and a coil 232 held by the holder 231. Although detailed illustrations are omitted, the coil 232 is, for example, a typical three-phase coil. Specifically, U-phase, V-phase, and W-phase coils (not shown) are arranged periodically along the Y-axis direction, which is the driving direction. The current flowing through each phase coil 232 (e.g., U-phase current, V-phase current, W-phase current) may be supplied via the holder 231. The coil 232 is provided so as to protrude from the holder 231 on the back side (-Z side) toward the front side (+Z side). Such a coil 232 or group of coils is preferably formed as a flat plate with the X-axis direction as the normal direction. Also, in view along the Z-axis direction, the entire second coil section 230 and / or the coil 232 extend along the Y-axis direction substantially parallel to the Y-guide 210.

[0041] The second magnet section 240 comprises a roughly rectangular parallelepiped housing 241 and magnets (not shown) arranged on the inner circumferential surface of the housing 241. The housing 241 is fixedly attached to the side of the Y slider 150, which is the object to be driven, with the X-axis direction being normal to the side. Therefore, the second magnet section 240 can move integrally with the Y slider 150 in the Y-axis direction.

[0042] The housing 241 is made of a magnetic shielding material or soft magnetic material such as carbon steel or permalloy. Inside the housing 241, there is a roughly rectangular parallelepiped space 243 that penetrates in the Y-axis direction and opens on the back surface. The housing 241 is in an inverted U-shape when viewed in the Y-axis direction. The aforementioned flat plate-shaped coil 232 is inserted into this roughly rectangular parallelepiped space 243 inside the housing 241. In addition, magnets (not shown), such as permanent magnets with periodically changed magnetic poles, are arranged along the Y-axis direction on the inner circumferential surface of the housing 241, which is the side wall surface of the space 243.

[0043] Thus, in the roughly rectangular parallelepiped space 243 within the housing 241, the coil 232 or group of coils in the second coil section 230 and the magnet or group of magnets (not shown) in the second magnet section 240 face each other in the X-axis direction. Then, when the coil 232, which functions as an electromagnet when a three-phase alternating current is passed through it, magnetically interacts with the magnet (not shown), a thrust or driving force is generated that drives the second magnet section 240, which acts as a movable element, in the Y-axis direction. The housing 241, which is inverted U-shaped in the Y-axis direction, is driven in the Y-axis direction along the flat coil 232, with the flat coil 232 sandwiched from above (the coil 232 is included in the space 243 within the housing 241). The Y-slider 150, which is the driving target to which the housing 241 of the second magnet section 240 is fixed, is also driven in the Y-axis direction integrally with the second magnet section 240, while being guided by the Y-guide 210.

[0044] As described above, in the example of Figure 1, the coil 232 through which the current flows is provided so as to protrude from the holder 231 toward the surface side (+Z side), and the second magnet part 240 that interacts with the magnetic field generated by the coil 232 is provided so as to cover the coil 232 from the surface side. In such a second linear motor 220, the space 243 through which the magnetism from the coil 232 and / or the second magnet part 240 leaks is provided on the back side far from the stage 2, thereby reducing the adverse effects that this magnetism may have on the processing of semiconductor wafers and the like on the stage 2.

[0045] The second linear motor 220, on which the second magnet section 240 moves as described above, is a so-called moving magnet type linear motor. In this case, the second coil section 230, which generates heat due to the current flowing through it, is isolated from the drive object integrated with the stage 2 or the Y slider 150 (furthermore, in the illustrated example, the second coil section 230 is also thermally isolated from the second drive shaft 200 via the base 4 and the base plate 3), thus effectively suppressing heat transfer to the stage 2 and / or the workpiece such as a semiconductor wafer. This is particularly preferable when the workpiece such as a semiconductor wafer is susceptible to heat, or when the stage 2 itself is easily deformed by heat.

[0046] In such a moving magnet type second linear motor 220, the length of the second coil section 230 in the Y-axis direction is longer than the length of the second magnet section 240 in the Y-axis direction. For example, it is preferable that the length of the second coil section 230 in the Y-axis direction is long enough to cover the range of motion of the Y slider 150 in the Y-axis direction. Also, it is preferable that the length of the second magnet section 240 in the Y-axis direction is less than or equal to the length of the Y slider 150 and / or stage 2 in the Y-axis direction. The relatively short second magnet section 240 can move integrally with the Y slider 150, which is the object to be driven, in the Y-axis direction within the installation range of the relatively long second coil section 230.

[0047] In the illustrated example, it is preferable that the first linear motor 120 is of the moving coil type in order to reduce the magnetic influence on stage 2, etc., and that the second linear motor 220 is of the moving magnet type in order to reduce the thermal influence on stage 2, etc. Thus, in the stage device 1 according to this embodiment, it is preferable that the first linear motor 120 and the second linear motor 220 are of different types.

[0048] On the other hand, in order to further reduce the influence of magnetism on stage 2, etc., the second linear motor 220 may be configured as a moving coil type. Specifically, the second coil section 230 is provided on the Y slider 150, and the second magnet section 240 is provided on the second drive shaft 200 (for example, the base 4) (not shown). In this case, since the second magnet section 240 is stationary, there is an advantage that there is little fluctuation in magnetism leaking outside the second linear motor 220. This is particularly preferable when the processing of semiconductor wafers, etc. on stage 2 is susceptible to magnetic influences.

[0049] In such a moving coil type second linear motor 220, the length of the second coil section 230 in the Y-axis direction is shorter than the length of the second magnet section 240 in the Y-axis direction. For example, it is preferable that the length of the second coil section 230 in the Y-axis direction is less than or equal to the length of the Y slider 150 and / or stage 2 in the Y-axis direction. Also, it is preferable that the length of the second magnet section 240 in the Y-axis direction is long enough to cover the range of motion of the Y slider 150 in the Y-axis direction. The relatively short second coil section 230 can move integrally with the Y slider 150, which is the object to be driven, in the Y-axis direction within the installation range of the relatively long second magnet section 240.

[0050] By providing the pair of second linear motors 220 described above on both sides of the first drive shaft 100 in the X-axis direction, the drive target can be stably driven in the Y-axis direction while effectively suppressing undesirable rotations such as yawing (rotation around the Z-axis).

[0051] Next, we will describe the gas levitation section that facilitates the X-axis drive by the first drive shaft 100 and the Y-axis drive by the second drive shaft 200.

[0052] Figure 3 is a schematic cross-sectional view of the first gas buoyancy section 10, which facilitates the X-axis drive of the X-slider 21 by the first drive shaft 100 using buoyancy gas. Specifically, the ZX cross-section at the center in the Y-axis direction of the X-guide 110, which is the main body of the first drive shaft 100, is schematically shown. The first gas buoyancy section 10 uses gas to levitate the X-slider 21, which is the driven object, away from the X-guide 110, which is the main body of the first drive shaft 100.

[0053] An air pad 170, acting as a hydrostatic bearing, is formed between the outer circumferential surface of the X guide 110 and the inner circumferential surface of the X slider 21, so that the X slider 21 can move smoothly in the X-axis direction along the X guide 110. The air pad 170 is formed by a first flotation gas, such as compressed air, supplied through a first flotation pipe 127 located inside the X guide 110, which is the body of the first drive shaft 100, and constantly supplied between the outer circumferential surface of the X guide 110 and the inner circumferential surface of the X slider 21. The X slider 21, which is levitated from the X guide 110 by the air pad 170, can move smoothly with virtually no contact with the X guide 110.

[0054] Preferably, the multiple air pads 170 are positioned symmetrically to sandwich the center of the X-slider 21 in the X-axis direction and / or Y-axis direction from both the positive and negative sides in the X-axis direction and / or Y-axis direction. Furthermore, it is preferable that the multiple air pads 170 are positioned symmetrically to sandwich the X-guide 110 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the multiple air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc., effectively suppresses undesirable rotation of the X-slider 21.

[0055] The first flotation tube 127 comprises a positive first flotation tube 127P and a negative first flotation tube 127N. In this embodiment, the positive first flotation tube 127P and the negative first flotation tube 127N, which are located inside the X guide 110, communicate with a flotation gas relay tube located inside the Y guide 210, as will be described later. However, the positive first flotation tube 127P and the negative first flotation tube 127N may also communicate with a flotation gas supply tube or pipe (not shown) that is directly attached to the X guide 110 and supplies flotation gas from the outside. Alternatively, the tubes that supply flotation gas to the air pad 170, such as the positive first flotation tube 127P and the negative first flotation tube 127N, may be located inside the X slider 21 instead of inside the X guide 110. In this case, a flotation gas supply pipe or tube (not shown) may be provided, which is directly attached to the X slider 21 externally to supply flotation gas from the outside.

[0056] The positive first floating gas from a pump (not shown) is supplied to the positive air pad 170 in the X-axis direction via, for example, a positive floating gas relay pipe inside the positive Y-guide 210 and a positive first floating pipe 127P inside the X-guide 110. Similarly, the negative first floating gas from a pump (not shown) is supplied to the negative air pad 170 in the X-axis direction via, for example, a negative floating gas relay pipe inside the negative Y-guide 210 and a negative first floating pipe 127N inside the X-guide 110.

[0057] Furthermore, the first floating gas may be supplied to both the positive and negative air pads 170 from either the positive or negative floating gas relay pipe and the first floating pipe 127. For example, the first floating gas from a pump (not shown) may be supplied to both the positive and negative air pads 170 via the positive floating gas relay pipe inside the positive Y guide 210 and the positive first floating pipe 127P inside the X guide 110. In this case, all or part of the negative floating gas relay pipe inside the negative Y guide 210 and at least part of the negative first floating pipe 127N on the negative side, where the first floating gas is not supplied, may not be provided.

[0058] When the stage device 1 is used in a vacuum chamber where the interior is under vacuum, it is necessary to prevent the first floating gas, such as compressed air supplied to the air pad 170, from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 are provided on the inner surface of the X slider 21 as exhaust sections for discharging the first floating gas in the air pad 170 to the outside of the vacuum chamber housing the stage device 1. As shown in the figure, the exhaust grooves 172, 174, and 176 are positioned to sandwich the air pad 170 from both the positive and negative sides in the X-axis direction and / or the Y-axis direction. In other words, the exhaust grooves 172, 174, and 176 are provided on the inner surface of the X slider 21, outside the air pad 170.

[0059] The exhaust channels 172, 174, and 176 are arranged such that the pressure decreases sequentially from the inside or center outwards, i.e., the vacuum level increases sequentially. For example, exhaust channel 172 is at atmospheric pressure, exhaust channel 174 is at low vacuum, and exhaust channel 176 is at medium vacuum. These exhaust channels 172, 174, and 176, with their different pressures or vacuum levels, are realized by a plurality of first exhaust pipes 129 (only one is shown in Figure 3 for convenience) provided inside the X-guide 110, which is the main body of the first drive shaft 100. Specifically, by opening the first exhaust pipe 129, which communicates with the atmosphere or air at atmospheric pressure, at a position opposite the exhaust channel 172, the exhaust channel 172 becomes atmospheric pressure; by opening the first exhaust pipe 129, which is connected to a low vacuum pump (not shown), at a position opposite the exhaust channel 174, the exhaust channel 174 becomes a low vacuum; and by opening the first exhaust pipe 129, which is connected to a medium vacuum pump (not shown), at a position opposite the exhaust channel 176, the exhaust channel 176 becomes a medium vacuum.

[0060] As described above, the multiple exhaust channels 172, 174, 176 and the multiple first exhaust pipes 129 sequentially exhaust the first floating gas in the air pad 170 to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). This effectively prevents the first floating gas in the air pad 170 from leaking into the vacuum chamber.

[0061] Thus, the stage apparatus 1 according to this embodiment can be used in a vacuum environment such as inside a vacuum chamber. Here, vacuum refers to a space filled with gas at a pressure lower than normal atmospheric pressure. Vacuum is classified into low vacuum (100 kPa to 100 Pa), medium vacuum (100 Pa to 0.1 Pa), and high vacuum (0.1 Pa to 10 Pa). -5 Pa), ultra-high vacuum (10 -5 The vacuum environments are classified as follows (Pa or less). The stage device 1 according to this embodiment may be used in any of the above vacuum environments, or in a non-vacuum environment. The stage device 1 according to this embodiment is particularly suitable for use in low-pressure vacuum environments where high cleanliness is required.

[0062] The first exhaust pipe 129 comprises a positive first exhaust pipe 129P and a negative first exhaust pipe 129N. In this embodiment, the positive first exhaust pipe 129P and the negative first exhaust pipe 129N, which are located inside the X guide 110, are connected to an exhaust relay pipe located inside the Y guide 210, as will be described later. In this case, the first exhaust pipe 129 exhausts the first floating gas to the Y guide 210, which is the main body of the second drive shaft 200 in which the exhaust relay pipe is located. The exhaust relay pipe in the Y guide 210 is connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, in order to achieve atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176), respectively. However, the positive first exhaust pipe 129P and the negative first exhaust pipe 129N may be connected to an exhaust pipe or tube (not shown) that is directly attached externally to the X guide 110 and supplies atmospheric pressure, low vacuum, medium vacuum, etc. from the outside. Alternatively, the pipes that supply atmospheric pressure, low vacuum, medium vacuum, etc., such as the positive first exhaust pipe 129P and the negative first exhaust pipe 129N, may be provided inside the X slider 21 instead of inside the X guide 110. In this case, an exhaust pipe or tube (not shown) that is directly attached externally to the X slider 21 and supplies atmospheric pressure, low vacuum, medium vacuum, etc., from the outside may be provided.

[0063] The exhaust from exhaust channel 172 is discharged into the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside the X guide 110 and the exhaust relay pipe for atmospheric pressure inside the Y guide 210. The exhaust from exhaust channel 174 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside the X guide 110, the exhaust relay pipe for low vacuum inside the Y guide 210 and the low vacuum pump. The exhaust from exhaust channel 176 is discharged via the first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside the X guide 110, the exhaust relay pipe for medium vacuum inside the Y guide 210 and the medium vacuum pump.

[0064] Furthermore, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through either the positive or negative first exhaust pipe 129 and the exhaust relay pipe. For example, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through the positive first exhaust pipe 129P inside the X guide 110 and the positive exhaust relay pipe inside the positive Y guide 210. In this case, at least a portion of the negative first exhaust pipe 129N and all or part of the negative exhaust relay pipe inside the negative Y guide 210 may not be provided on the negative side where exhaust is not performed.

[0065] Figure 4 is a schematic cross-sectional view of the second gas buoyancy section 20, which facilitates the Y-axis drive of the Y-slider 150 by the second drive shaft 200 using buoyancy gas. Specifically, the YZ cross-section at the center in the X-axis direction of the Y-guide 210, which is the main body of the second drive shaft 200, is schematically shown. Components similar to those in the first gas buoyancy section 10 shown in Figure 3 are given the same reference numerals, and redundant explanations are omitted. The second gas buoyancy section 20 uses gas to levitate the Y-slider 150 (part of the first drive shaft 100), which is the object to be driven, away from the Y-guide 210, which is the main body of the second drive shaft 200.

[0066] An air pad 170, acting as a hydrostatic bearing, is formed between the outer circumferential surface of the Y guide 210 and the inner circumferential surface of the Y slider 150, so that the Y slider 150 can move smoothly in the Y-axis direction along the Y guide 210. The air pad 170 is formed by a second flotation gas, such as compressed air, supplied through a second flotation pipe 137 located inside the Y guide 210, which is the body of the second drive shaft 200, and constantly supplied between the outer circumferential surface of the Y guide 210 and the inner circumferential surface of the Y slider 150. Alternatively, the pipe supplying the flotation gas to the air pad 170, such as the second flotation pipe 137, may be located inside the Y slider 150 instead of inside the Y guide 210. In this case, a flotation gas supply pipe or tube (not shown) may be directly attached to the outside of the Y slider 150 to supply the flotation gas from the outside. The Y-slider 150, lifted off the Y-guide 210 by the air pad 170, can move smoothly and virtually without contact with the Y-guide 210.

[0067] Preferably, the multiple air pads 170 are positioned symmetrically to sandwich the center of the Y slider 150 in the Y-axis direction and / or the X-axis direction from both the positive and negative sides in the Y-axis direction and / or the X-axis direction. Furthermore, it is preferable that the multiple air pads 170 are positioned symmetrically to sandwich the Y guide 210 from both the positive and negative sides in the Z-axis direction. Such symmetrical arrangement of the multiple air pads 170 in the X-axis direction, Y-axis direction, Z-axis direction, etc., effectively suppresses undesirable rotation of the Y slider 150.

[0068] The second flotation tube 137 comprises a positive second flotation tube 137P and a negative second flotation tube 137N. The positive second flotation tube 137P and the negative second flotation tube 137N are located inside the Y-guide 210.

[0069] The positive second flotation gas from a pump (not shown) is supplied to the positive air pad 170 in the Y-axis direction via, for example, the positive second flotation pipe 137P inside the Y-guide 210. Similarly, the negative second flotation gas from a pump (not shown) is supplied to the negative air pad 170 in the Y-axis direction via, for example, the negative second flotation pipe 137N inside the Y-guide 210.

[0070] Furthermore, the second flotation gas may be supplied to both the positive and negative air pads 170 from either the positive or negative second flotation pipe 137. For example, the second flotation gas from a pump (not shown) may be supplied to both the positive and negative air pads 170 via the positive second flotation pipe 137P inside the Y guide 210. In this case, at least a portion of the negative second flotation pipe 137N on the negative side, where the second flotation gas is not supplied, may be omitted.

[0071] As previously mentioned with respect to Figure 3, the first flotation pipe 127, which supplies the first flotation gas to the air pad 170 in the first gas flotation section 10, communicates with a flotation gas relay pipe 157 located inside the Y guide 210 in Figure 4. This flotation gas relay pipe 157 is connected to a pump (not shown) which is the source of the first flotation gas. The first flotation gas from the pump (not shown) is supplied to the air pad 170 in the first gas flotation section 10 via the flotation gas relay pipe 157 inside the Y guide 210 and the first flotation pipe 127 inside the X guide 110. In this way, inside the Y guide 210, which is the main body of the second drive shaft 200, the supply of the second flotation gas for the flotation of the Y slider 150 via the second flotation pipe 137 and the supply or relay of the first flotation gas for the flotation of the X slider 21 via the flotation gas relay pipe 157 occur simultaneously.

[0072] When the stage device 1 is used in a vacuum chamber where the interior is under vacuum, it is necessary to prevent the second floating gas, such as compressed air supplied to the air pad 170, from leaking into the vacuum chamber. Therefore, in this embodiment, exhaust grooves 172, 174, and 176 are provided on the inner surface of the Y slider 150 as exhaust sections for discharging the second floating gas in the air pad 170 to the outside of the vacuum chamber housing the stage device 1. As shown in the figure, the exhaust grooves 172, 174, and 176 are positioned to sandwich the air pad 170 from both the positive and negative sides in the Y-axis direction and / or the X-axis direction. In other words, the exhaust grooves 172, 174, and 176 are provided on the inner surface of the Y slider 150, outside the air pad 170.

[0073] The exhaust channels 172, 174, and 176 are arranged such that the pressure decreases sequentially from the inside or center outwards, i.e., the vacuum level increases sequentially. For example, exhaust channel 172 is at atmospheric pressure, exhaust channel 174 is at low vacuum, and exhaust channel 176 is at medium vacuum. These exhaust channels 172, 174, and 176, with their different pressures or vacuum levels, are realized by a plurality of second exhaust pipes 139 (only one is shown in Figure 4 for convenience) provided inside the Y-guide 210, which is the main body of the second drive shaft 200. Specifically, by opening the second exhaust pipe 139, which communicates with the atmosphere or air at atmospheric pressure, at a position opposite the exhaust channel 172, the exhaust channel 172 becomes atmospheric pressure; by opening the second exhaust pipe 139, which is connected to a low vacuum pump (not shown), at a position opposite the exhaust channel 174, the exhaust channel 174 becomes a low vacuum; and by opening the second exhaust pipe 139, which is connected to a medium vacuum pump (not shown), at a position opposite the exhaust channel 176, the exhaust channel 176 becomes a medium vacuum.

[0074] As described above, the multiple exhaust channels 172, 174, 176 and the multiple second exhaust pipes 139 allow the second floating gas in the air pad 170 to be sequentially exhausted to the outside of the vacuum chamber through atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176). This effectively prevents the second floating gas in the air pad 170 from leaking into the vacuum chamber.

[0075] The second exhaust pipe 139 comprises a positive second exhaust pipe 139P and a negative second exhaust pipe 139N. The positive second exhaust pipe 139P and the negative second exhaust pipe 139N are located inside the Y-guide 210. These second exhaust pipes 139 are connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump, respectively, to achieve atmospheric pressure (exhaust channel 172), low vacuum (exhaust channel 174), and medium vacuum (exhaust channel 176), respectively.

[0076] The exhaust from exhaust channel 172 is discharged into the atmosphere through a second exhaust pipe 139 (139P and / or 139N) for atmospheric pressure inside the Y-guide 210. The exhaust from exhaust channel 174 is discharged through a second exhaust pipe 139 (139P and / or 139N) for low vacuum inside the Y-guide 210 and a low vacuum pump. The exhaust from exhaust channel 176 is discharged through a second exhaust pipe 139 (139P and / or 139N) for medium vacuum inside the Y-guide 210 and a medium vacuum pump.

[0077] Furthermore, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through either the positive or negative second exhaust pipe 139. For example, exhaust from both the positive and negative exhaust grooves 172, 174, and 176 may be performed through the positive second exhaust pipe 139P inside the Y guide 210. In this case, at least a portion of the negative second exhaust pipe 139N on the negative side, where exhaust is not performed, may be omitted.

[0078] As previously mentioned with respect to Figure 3, the first exhaust pipe 129, which exhausts the first floating gas from the exhaust channels 172, 174, and 176 in the first gas floating section 10, communicates with the exhaust relay pipe 159 provided inside the Y guide 210 in Figure 4. This exhaust relay pipe 159 is connected to, for example, the atmosphere, a low vacuum pump, and a medium vacuum pump in order to achieve atmospheric pressure (exhaust channel 172 in Figure 3), low vacuum (exhaust channel 174 in Figure 3), and medium vacuum (exhaust channel 176 in Figure 3), respectively.

[0079] Thus, the exhaust gas (first floating gas) from the exhaust channel 172 in the first gas floating section 10 is discharged into the atmosphere via the first exhaust pipe 129 (129P and / or 129N) for atmospheric pressure inside the X guide 110 and the exhaust relay pipe 159 for atmospheric pressure inside the Y guide 210. The exhaust gas (first floating gas) from the exhaust channel 174 in the first gas floating section 10 is discharged via the first exhaust pipe 129 (129P and / or 129N) for low vacuum inside the X guide 110, the exhaust relay pipe 159 for low vacuum inside the Y guide 210 and the low vacuum pump. The exhaust gas (first floating gas) from the exhaust channel 176 in the first gas floating section 10 is discharged via the first exhaust pipe 129 (129P and / or 129N) for medium vacuum inside the X guide 110, the exhaust relay pipe 159 for medium vacuum inside the Y guide 210 and the medium vacuum pump.

[0080] As described above, inside the Y-guide 210, which is the main body of the second drive shaft 200, exhaust (atmospheric pressure / low vacuum / medium vacuum) from the second gas buoyancy section 20 through the second exhaust pipe 139 and exhaust (atmospheric pressure / low vacuum / medium vacuum) from the first gas buoyancy section 10 through the exhaust relay pipe 159 are performed simultaneously. In Figure 4, for convenience, the second exhaust pipe 139 and the exhaust relay pipe 159 are shown as separate components, but since the purpose of exhaust (atmospheric pressure / low vacuum / medium vacuum) is the same, the second exhaust pipe 139 and the exhaust relay pipe 159 may be configured as a single unit (the low vacuum pump and medium vacuum pump connected to the second exhaust pipe 139 and the exhaust relay pipe 159 can also be common).

[0081] According to the first embodiment described above, high responsiveness during operation can be achieved by the first drive shaft 100 and the second drive shaft 200, which drive the driven object such as the X slider 21 and the first drive shaft 100 by magnetism (first linear motor 120 and second linear motor 220), and high smoothness during operation can be achieved by the first gas levitation section 10 and the second gas levitation section 20, which levitate the driven object such as the X slider 21 and the first drive shaft 100 by gas. Since the first gas levitation section 10 and the second gas levitation section 20 are equipped with an exhaust mechanism for the levitating gas, the stage device 1 according to this embodiment can be used in a vacuum environment such as inside a vacuum chamber.

[0082] Next, we will describe a compensating force application unit that can apply a compensating force to a slider, such as an X slider 21 or a Y slider 150, to reduce the rotation of the slider or driven part, caused by the driving force of a drive unit such as a first linear motor 120 or a second linear motor 220.

[0083] Figure 5 schematically illustrates an undesirable rotation that may occur in the slider, using the X-slider 21 as an example. In this figure, the X-slider 21 is simplified and shown as a rectangular parallelepiped formed by edges in the X-axis, Y-axis, and Z-axis directions. Illustrations of other components such as the X-guide 110 and stage 2 are omitted.

[0084] As mentioned above, the X-slider 21 is driven linearly along the X-axis direction (driving direction) by a first linear motor 120 (not shown). In Figure 5, the driving force applied by the first linear motor 120 to the X-slider 21 (or the resultant force of each driving force if multiple first linear motors 120 are provided, as in the example in Figure 1) is schematically shown by a thick linear arrow. In an ideal state, the line of action of the driving force passes through the center of gravity of the driven body including the X-slider 21. In this case, the driving force does not cause undesirable rotation of the X-slider 21.

[0085] On the other hand, if the line of action of the driving force deviates from the center of gravity of the driven body, including the X slider 21, undesirable rotation may occur in the X slider 21. This undesirable rotation may include rolling around the X axis which determines the driving direction, pitching around the Y axis, and yawing around the Z axis. Specifically, the Y-axis driving force component and / or Z-axis driving force component whose line of action is deviated in the Z-axis direction from the center of gravity of the driven body will cause rolling; the Z-axis driving force component and / or X-axis driving force component whose line of action is deviated in the Z-axis direction from the center of gravity of the driven body will cause pitching; and the X-axis driving force component and / or Y-axis driving force component whose line of action is deviated in the Y-axis direction from the center of gravity of the driven body will cause yawing. In particular, in the second embodiment described later, pitching is likely to occur because the main line of action of the driving force in the X-axis direction is designed to be offset in the Z-axis direction from the center of gravity of the driven body.

[0086] The compensating force application unit according to this embodiment reduces undesirable rotations of the slider, such as rolling, pitching, and yawing, which are caused by a driving force component whose line of action is offset from the center of gravity of the driven object, as described above.

[0087] Figure 6 schematically illustrates the mechanism of undesirable rotation of the slider and the concept of the compensatory force application unit 5 that reduces it, using an example of yawing around the Z axis that can occur in the X slider 21. Replacing the X axis and Y axis in the following explanation with the Y axis and Z axis will explain rolling around the X axis, and replacing them with the Z axis and X axis will explain pitching around the Y axis. As mentioned above, yawing occurs in the X slider 21 when a driving force F in the X-axis direction and / or Y-axis direction, whose line of action is offset from the center of gravity G of the driven body, is applied to the X slider 21.

[0088] In the example shown in Figure 6, a driving force F along the X-axis direction is applied to the X-slider 21 by two first linear motors 120 (not shown, see Figure 1) located on the ±Y sides of the X-slider 21. Here, if the two first linear motors 120 generate perfectly equal driving forces, the point of application of the resultant driving force F is located at the center of the X-slider 21 in the Y-axis direction, and its line of action (shown by a dashed line in Figure 6) passes through the center of gravity G, so no yawing occurs.

[0089] However, if the balance of the driving forces from the two first linear motors 120 is disrupted, as illustrated in Figure 6, the point of application of the resultant driving force F shifts from the center of the X slider 21 in the Y-axis direction, and its line of action (dotted line) does not pass through the center of gravity G, causing yawing. In the example in Figure 6, the line of action of the driving force F is shifted by δ to the -Y side from the center of gravity G. As a result, a moment M1 (=Fδ) or torque is generated that causes the X slider 21 to rotate counterclockwise (yawing) around the center of gravity G.

[0090] The compensating force application unit 5 according to this embodiment is provided to generate a counteracting moment M2 or counteracting torque, which is a reduced rotation amount or a counteracting rotation amount, that reduces or cancels out the moment M1, which is a rotation amount that causes such undesirable rotation (yawing). In the example in Figure 6, the ideal counteracting moment M2 is the same magnitude (i.e., Fδ) as the moment M1 to be canceled out, but in the opposite direction (i.e., clockwise). In this case, since moment M1 and counteracting moment M2 cancel each other out, the undesirable yawing of the X slider 21 is completely prevented. Note that the magnitude of the counteracting moment M2 in the opposite direction to moment M1 does not have to be exactly equal to moment M1, and as long as a composite moment smaller than the moment M1 before cancellation is obtained as a result of canceling out moment M1 and counteracting moment M2 (i.e., |M1-M2|<|M1|), there is value in providing the compensating force application unit 5.

[0091] The number and arrangement of the compensating force application units 5 for generating the aforementioned canceling moment M2 are arbitrary as long as they can generate a canceling moment M2 that satisfies the condition |M1-M2|<|M1| for a moment M1 within a realistic range. For example, as schematically shown in Figure 6, it is desirable that the compensating force application units 5 for suppressing yawing, which is rotation around the Z axis, be provided on the ±Y side surfaces (top and / or bottom surfaces in Figure 6) and / or the ±X side front and / or rear surfaces (right and / or left surfaces in Figure 6) of the X slider 21.

[0092] Each compensating force application unit 5 can, for example, apply a compensating force f to the X slider 21 in a direction perpendicular to its respective installation surface. Specifically, the compensating force application unit 5 provided on the ZX plane (side surface) of the X slider 21 can apply a compensating force f along the Y-axis direction, which is the normal direction of the ZX plane, to the ZX plane (side surface). This Y-axis compensating force f is a force along a direction that intersects (is perpendicular to) the X-axis direction, which is the driving direction. Furthermore, the compensating force application unit 5 provided on the YZ plane (front and / or rear surface) of the X slider 21 can apply a compensating force f along the X-axis direction, which is the normal direction of the YZ plane, to the X slider 21. This X-axis compensating force f is a force along the X-axis direction, which is the driving direction. The direction and magnitude of each compensating force f applied by each compensating force application unit 5 are individually adjusted or controlled so that the resulting canceling moment M2 has a desired direction and magnitude.

[0093] Each compensating force f applied by each compensating force application unit 5 is required to have a line of action that does not pass through the center of gravity G in order to cause rotation around the center of gravity G (a counteracting rotation amount M2 around the Z-axis to compensate for yawing). Furthermore, it is preferable that the compensating force application unit 5 applies a compensating force f to the slider with a line of action different from that of the driving force F, so as not to interfere with the slider's original drive by the driving force F. The number and arrangement of the compensating force application units 5 are arbitrary, as long as it is possible to apply a compensating force f whose line of action is off-center from the center of gravity G so as to contribute to the generation of the counteracting rotation amount M2.

[0094] Figure 6 shows eight compensating force application units 5 as an example, but at least one compensating force application unit 5 is sufficient to reduce yawing. To reduce yawing more effectively, it is preferable to have at least two compensating force application units 5, and even more preferable to have at least four compensating force application units 5. Such multiple compensating force application units 5 can apply individually controllable compensating forces f at different positions on the slider.

[0095] For example, if four compensating force application units 5 are provided to reduce yawing, all four compensating force application units 5 may be provided on the ZX plane of the X slider 21, as shown in Figure 7. These four compensating force application units 5 are preferably distributed in the ZX plane of the X slider 21 so that the attitude of the X slider 21 can be controlled in a balanced manner. Specifically, the four compensating force application units 5 are distributed on the ZX plane across at least two regions in the Z axis direction and at least two regions in the X axis direction.

[0096] As shown in Figure 7, the ZX plane constituting the outer surface of the X slider 21 is substantially rectangular, and its opposing pair of sides (the top and bottom sides in Figure 7) extend along the X-axis direction, which is the driving direction. Here, as shown by the dotted lines in Figure 7, it is preferable that at least one compensating force application unit 5 is provided in each of the four regions (which include the corners or edges of the ZX plane and are therefore also referred to as corner regions) formed by bisecting the substantially rectangular ZX plane of the X slider 21 in the vertical direction (Z-axis direction) and the horizontal direction (X-axis direction). The arrangement of each compensating force application unit 5 within each corner region is arbitrary and can be designed individually, but it is preferable to arrange them symmetrically with respect to each bisector (dotted line), as illustrated in Figure 7.

[0097] As shown in the example in Figure 7, when four compensating force application units 5 are provided on the ZX plane of the X slider 21, they may be distributed across two opposing ZX planes (the upper and lower surfaces in Figure 6). For example, two compensating force application units 5 (e.g., the upper left and lower right compensating force application units 5 in Figure 7) may be provided on one ZX plane, and the remaining two compensating force application units 5 (e.g., the lower left and upper right compensating force application units 5 in Figure 7) may be provided on the other ZX plane. Even in this case, it is preferable that the four compensating force application units 5 are arranged symmetrically in the Y-axis direction, as shown in Figure 7. Alternatively, one compensating force application unit 5 may be provided on one ZX plane, and the remaining three compensating force application units 5 may be provided on the other ZX plane. Furthermore, all four compensating force application units 5 may be provided on a single ZX plane (the upper or lower surface in Figure 6) which is the same outer circumferential surface of the X slider 21.

[0098] In the example shown in Figure 7, all four compensating force application units 5 for yawing are provided on the ZX plane (side surface), but all four compensating force application units 5 for yawing may also be provided on the YZ plane (front and / or rear surface). Alternatively, some of the compensating force application units 5 for yawing may be provided on the ZX plane, and the remaining compensating force application units 5 may be provided on the YZ plane. In other words, the multiple compensating force application units 5 according to this embodiment may be configured to apply a compensating force f on different outer surfaces of the X slider 21 (in this example, the ZX plane and the YZ plane).

[0099] As described above, four or more compensation force application units 5, preferably for compensating for yawing, which is rotation around the Z axis, can be provided in any arrangement in the ZX plane and / or YZ plane of the X slider 21. Similarly, four or more compensation force application units 5, preferably for compensating for pitching, which is rotation around the Y axis, can be provided in any arrangement in the YZ plane and / or XY plane of the X slider 21 (see also the second embodiment described later). In addition, four or more compensation force application units 5, preferably for compensating for rolling, which is rotation around the X axis, can be provided in any arrangement in the XY plane and / or ZX plane of the X slider 21.

[0100] The compensation force application unit 5 provided on the XY plane of the X slider 21 may be used for compensating rolling and pitching, the compensation force application unit 5 provided on the YZ plane of the X slider 21 may be used for compensating pitching and yawing, and the compensation force application unit 5 provided on the ZX plane of the X slider 21 may be used for compensating yawing and rolling.

[0101] The compensation force application unit 5 described above can be configured by an actuator or other drive device of any principle, as long as it can apply a compensation force f (see Figure 6) in the desired direction to the X slider 21. For example, the compensation force application unit 5 may be configured by a voice coil motor, as specifically shown in the second embodiment described later, or by a linear drive device or vibration device of any type, such as pneumatic, hydraulic, magnetic, or piezoelectric.

[0102] In the first embodiment described above, as previously mentioned, measures have been taken to suppress undesirable rotation of the slider, such as symmetrical driving by a pair of first linear motors 120 and a pair of second linear motors 220, and symmetrical arrangement of the air pads 170. However, it is difficult to completely prevent undesirable rotation of the slider due to manufacturing errors, malfunctions, etc. The compensation force application unit 5 according to this embodiment can effectively reduce such undesirable rotation of the slider.

[0103] In a hydrostatic bearing type or air guide type stage device 1 as in this embodiment, the slider is suspended from the guide by a floating gas such as compressed air, so even a slight change in the driving force F can easily lead to undesirable rotation of the slider. The compensating force application unit 5 according to this embodiment can effectively reduce such undesirable rotation of the slider, and is therefore particularly suitable for hydrostatic bearing type or air guide type drive devices. However, the application of this disclosure is not limited to hydrostatic bearing type or air guide type drive devices; the compensating force application unit 5 according to this embodiment is also effective in drive devices employing mechanical linear guides when minute vibrations associated with driving become a problem.

[0104] Figures 8 to 10 schematically show a stage device 1 as a drive device or positioning device according to the second embodiment of this disclosure. Figure 8 is a schematic YZ cross-sectional view of the first drive shaft 100 according to the second embodiment. Figure 9 is a cross-sectional view AA (cross-sectional view ZX) in Figure 8. Figure 10 is a cross-sectional view BB (cross-sectional view ZX) in Figure 8. Components similar to those in the first embodiment described above are denoted by the same reference numerals and redundant explanations are omitted.

[0105] In the first embodiment shown in Figure 1, two first linear motors 120 were provided on both sides (±Y sides) of the X slider 21 and X guide 110. However, in this embodiment (second embodiment) shown in Figure 8, one first linear motor 120 is provided on the bottom surface (outer peripheral surface on the -Z side) of the X slider 21. Thus, in this embodiment, compared to the first embodiment, the first linear motor 120 can be further separated from the surface-side stage 2 (not shown in Figure 8), thereby further reducing the adverse effects that magnetic leakage from the first linear motor 120 may have on the processing of semiconductor wafers, etc., on the stage 2 (for example, irradiation with an electron beam that is susceptible to magnetic fields). For this reason, the special configuration for magnetic shielding described above in relation to the first embodiment may be omitted.

[0106] As will be described later with respect to Figure 9, etc., the driving force F along the X-axis direction by the first linear motor 120 inevitably causes pitching (rotation around the Y-axis) of the X-slider 21. However, in order to suppress other unwanted rotations such as rolling and yawing, it is preferable to position the point of application A (Figure 9) of the driving force F directly below the center of gravity G of the X-slider 21 or the driven body including it. In other words, it is preferable that the XY coordinates of the point of application A of the driving force F by the first linear motor 120 coincide with the XY coordinates of the center of gravity G of the X-slider 21 or the driven body including it. In this case, the first linear motor 120 (strictly speaking, the first coil portion 130 as a movable element) is mounted approximately in the center or approximate center of the bottom surface of the X-slider 21 in the X-axis direction and the Y-axis direction.

[0107] Similar to the first embodiment, the first linear motor 120 comprises a first coil section 130 and a first magnet section 140, one of which constitutes a movable element and the other a stator. In this embodiment, the first coil section 130 constitutes the movable element and is attached to the bottom surface of the X slider 21, and the first magnet section 140 constitutes the stator and is attached to the base plate 3. As will be described later, the first coil section 130 that constitutes the movable element may be provided on the bottom surface, which is the same outer circumferential surface of the X slider 21, along with one or more compensating force application sections 5. The first magnet section 140 that constitutes the stator extends linearly along the X-axis direction, which is the driving direction, as shown in Figure 9, and applies a driving force F to the first coil section 130 (movable element).

[0108] As described in Figure 2 of the first embodiment, the first magnet section 140 comprises a substantially rectangular parallelepiped housing (141 in Figure 2) with an opening (143 in Figure 2) on one side in the Y-axis direction. On the inner circumferential surface of this housing on the +Z side and / or -Z side, magnets such as permanent magnets (142 in Figure 2) with periodically changing magnetic poles are arranged along the X-axis direction. The first linear motor 120 is constructed by inserting a flat coil (132 in Figure 2) from the first coil section 130 into the opening in the housing of the first magnet section 140.

[0109] As shown in Figure 9, in such a moving coil type first linear motor 120, the length of the first coil section 130 in the X-axis direction is shorter than the length of the first magnet section 140 in the X-axis direction. The relatively short first coil section 130 can move in the X-axis direction by the driving force F, integrally with the X slider 21 which is the driven body, within the installation range of the relatively long first magnet section 140.

[0110] As shown in Figure 8, the YZ cross-section of the X slider 21 is a roughly rectangular frame shape that surrounds the roughly rectangular YZ cross-section of the X guide 110. As previously described with respect to the first embodiment, a floating gas such as compressed air is supplied between the inner circumferential surface of the X slider 21, which is driven by the first linear motor 120, and the outer circumferential surface of the X guide 110 to form an air guide or hydrostatic bearing.

[0111] As shown in Figure 9, in this embodiment, the point of application A of the driving force F in the X-axis direction by the first linear motor 120 located below the X slider 21 is designed to be offset by a distance L1 in the Z-axis direction from the center of gravity G of the driven body, making pitching, which is rotation around the Y-axis, likely to occur. Specifically, at the point of application A, which is a distance L1 in the Z-axis direction from the center of gravity G, the driving force F applied to the X slider 21 (more precisely, the first coil part 130 integrated with it) generates a moment M1 (=F × L1) or torque that causes the X slider 21 to rotate clockwise (pitch) around the center of gravity G.

[0112] In the first embodiment, the compensation force application unit 5 described above can apply a compensation force f to the slider to reduce such undesirable pitching or moment M1. The compensation force application unit 5 in this embodiment may be provided in accordance with the technical concept described above with respect to Figures 6 and 7 in the first embodiment. Specifically, by swapping Y and Z in Figures 6 and 7 with respect to yawing reduction around the Z axis, a configuration of the compensation force application unit 5 suitable for reducing pitching around the Y axis can be obtained.

[0113] The compensating force application unit 5 according to this embodiment is provided to generate a counteracting moment M2 (Figure 10) or counteracting torque, which is a reduced rotation amount or a counteracting rotation amount, that reduces or cancels out the moment M1 (Figure 9), which is a rotation amount that causes undesirable rotation (pitching). In the example of Figure 10, the ideal counteracting moment M2 is the same magnitude (i.e., F × L1) as the moment M1 to be canceled out, but in the opposite direction (i.e., counterclockwise). In this case, since moment M1 and counteracting moment M2 cancel each other out, undesirable pitting of the X slider 21 is completely prevented. Note that the magnitude of the counteracting moment M2 in the opposite direction to moment M1 does not have to be exactly equal to moment M1, and as long as a composite moment smaller than the moment M1 before cancellation is obtained as a result of canceling out moment M1 and counteracting moment M2 (i.e., |M1-M2|<|M1|), there is value in providing the compensating force application unit 5.

[0114] Figure 10 shows two compensation force application sections 5 on the BB cross section in Figure 8 (in practice, it is preferable to have at least four compensation force application sections 5, as shown in Figure 7). Each compensation force application section 5 can apply compensation forces f1 and f2 to the bottom surface of the X slider 21, respectively, along the Z axis direction which intersects or is perpendicular to the X axis direction, which is the driving direction. Thus, in this embodiment, multiple compensation force application sections 5 can apply compensation forces f1, f2, etc., in substantially the same direction (Z axis direction) at different positions on the bottom surface, which is the same outer circumferential surface of the X slider 21.

[0115] Preferably, the points of application of the compensating forces f1 and f2 from each compensating force application unit 5 are at equal distances L2 from the center of gravity G of the driven body along the X-axis direction, which is the driving direction (however, as previously mentioned with respect to Figures 6 and 7, the distance in the X-axis direction between the point of application of each compensating force and the center of gravity G may differ for each compensating force application unit 5).

[0116] In the example shown in Figure 10, a compensation force application unit 5 located at a distance L2 from the center of gravity G on the -X side applies a counterclockwise compensation moment f1 × L2 to the bottom surface of the X slider 21 by a compensation force f1 in the -Z axis direction, and a compensation force application unit 5 located at a distance L2 from the center of gravity G on the +X side applies a counterclockwise compensation moment f2 × L2 to the bottom surface of the X slider 21 by a compensation force f2 in the +Z axis direction. The canceling moment M2 schematically shown in Figure 10 is the sum of these two compensation moments f1 × L2 and f2 × L2 and the compensation moments f3 × L2 and f4 × L2 from the remaining two compensation force application units 5 (compensation forces f3 and f4), which are not shown.

[0117] The number and arrangement of the compensating force application units 5 for generating the offsetting moment M2 described above are arbitrary as long as they can generate an offsetting moment M2 that satisfies the condition |M1-M2|<|M1| for a moment M1 within a realistic range. For example, as schematically shown in Figure 6 (as mentioned above, Y in this figure can be read as Z), it is desirable that the compensating force application units 5 for suppressing pitching, which is rotation around the Y axis, be provided on the ±Z side surfaces (top and / or bottom surfaces in Figure 6) and / or the ±X side front and / or rear surfaces (right and / or left surfaces in Figure 6) of the X slider 21.

[0118] In Figure 6, eight compensatory force application units 5 are shown as an example, but at least one compensatory force application unit 5 is sufficient to reduce pitching. To reduce pitching more effectively, it is preferable to have at least two compensatory force application units 5, and even more preferable to have at least four compensatory force application units 5.

[0119] For example, if four compensating force application units 5 are provided to reduce pitching, all four compensating force application units 5 may be provided on the XY plane (bottom or top surface) of the X slider 21, as shown in Figure 7 (as mentioned above, Z in this figure can be read as Y), Figure 8, and Figure 10. These four compensating force application units 5 are preferably distributed in the XY plane of the X slider 21 so that the attitude of the X slider 21 can be controlled in a balanced manner. Specifically, the four compensating force application units 5 are distributed across at least two regions in the X-axis direction and at least two regions in the Y-axis direction on the XY plane.

[0120] For example, as shown by the dotted lines in Figure 7, it is preferable that one compensating force application unit 5 is provided in each of the four regions (which include the corners or edges of the XY plane and are therefore also referred to as corner regions) formed by dividing the roughly rectangular XY plane of the X slider 21 into two equal parts in the vertical direction (Y-axis direction) and the horizontal direction (X-axis direction). The arrangement of each compensating force application unit 5 within each corner region is arbitrary and can be designed individually, but it is preferable to arrange them symmetrically with respect to each bisector (dotted line), as illustrated in Figure 7.

[0121] As shown in the example in Figure 7, when four compensating force application units 5 are provided on the XY plane of the X slider 21, they may be distributed across two opposing XY planes (bottom and top surfaces). For example, two compensating force application units 5 (e.g., the upper left and lower right compensating force application units 5 in Figure 7) may be provided on one XY plane, and the remaining two compensating force application units 5 (e.g., the lower left and upper right compensating force application units 5 in Figure 7) may be provided on the other XY plane. Even in this case, it is preferable that the four compensating force application units 5 are arranged symmetrically in the Z-axis direction, as shown in Figure 7. Alternatively, one compensating force application unit 5 may be provided on one XY plane, and the remaining three compensating force application units 5 may be provided on the other XY plane. Furthermore, all four compensating force application units 5 may be provided on a single XY plane (bottom or top surface) which is the same outer circumferential surface of the X slider 21.

[0122] Here, as shown in Figure 1, other components such as the stage 2 are provided on the top or upper side of the X slider 21. However, as shown in Figures 8 and 10, it is preferable to provide all the compensating force application units 5 together on the bottom or lower side of the X slider 21, where there are fewer constraints on placement. As will be described later, when the compensating force application unit 5 is composed of a voice coil motor or the like, providing the compensating force application unit 5 on the bottom surface of the X slider 21, away from the upper stage 2, can reduce the adverse effects that magnetism leaking from the compensating force application unit 5 may have on the processing of semiconductor wafers on the stage 2 (for example, irradiation with an electron beam that is susceptible to magnetic fields).

[0123] Thus, in this embodiment, as schematically shown in Figure 8, the first linear motor 120 (more precisely, the first coil section 130 as a movable element) that generates a driving force F in the X-axis direction and one or more compensation force application sections 5 (more precisely, the coil section 51 as a movable element described later) that generates a compensation force f in the Z-axis direction are provided on the bottom surface, which is the same outer surface of the X slider 21. Therefore, the adverse effects of magnetism on the processing of semiconductor wafers and the like on the stage 2 can be effectively reduced. If undesirable magnetic interactions may occur between the first linear motor 120 and the compensation force application sections 5, which are arranged on the same outer surface, a magnetic shield to block the magnetism between them may be installed on the X slider 21 and / or the base plate 3 in a manner that does not interfere with the X-axis drive of the X slider 21.

[0124] Furthermore, by housing the first linear motor 120 and the compensating force application unit 5 together on the bottom side of the X slider 21, where there are fewer constraints on placement, the space on the side of the X slider 21 (the outer peripheral surface on the ±Y side) can be effectively utilized for other purposes. For example, the aforementioned flotation gas supply pipe or tube, which supplies flotation gas to form an air guide or hydrostatic bearing between the inner peripheral surface of the X slider 21 and the outer peripheral surface of the X guide 110, may be placed in the space on the side of the X slider 21 (the outer peripheral surface on the +Y side and / or -Y side).

[0125] As shown in Figure 8, it is preferable that at least one compensation force application unit 5 is provided on each side (±Y side) of the first magnet unit 140, which serves as the stator of the first linear motor 120. In the example of this embodiment, as shown in Figure 7 (as mentioned above, Z in this figure can be read as Y), two compensation force application units 5 are provided on each side (upper and lower sides in Figure 7) of the first magnet unit 140 (not shown in Figure 7). As previously described with respect to the first embodiment, it is preferable that the four compensation force application units 5 are arranged symmetrically in both the X-axis direction and the Y-axis direction, and in this embodiment, it is further preferable that the first linear motor 120 is arranged so as not to impair the symmetry in the XY plane. Specifically, the first linear motor 120 is aligned and arranged so as to extend linearly along the X-axis direction, passing through the center or middle in the Y-axis direction (vertical direction) in Figure 7.

[0126] In this example of symmetrical arrangement, the distances along the Y-axis (vertical direction in Figure 7) between the first linear motor 120 (more precisely, the line of action of its driving force F) and the four compensating force application units 5 (more precisely, the points of application of each compensating force f) are all equal. Furthermore, in the two-dimensional arrangement of four or more compensating force application units 5 on the XY plane, it is preferable that the spacings along the X-axis and Y-axis directions of each compensating force application unit 5 (more precisely, the points of application of each compensating force f) are uniform (the spacings along the X-axis and Y-axis directions may be different from each other).

[0127] As schematically shown in Figures 8 and 10, each compensation force application unit 5 according to this embodiment is composed of a voice coil motor 5 capable of applying compensation forces f1, f2, etc. along the Z-axis direction to the bottom surface of the X-slider 21. This voice coil motor 5 comprises a coil section 51 and a magnet section 52, one of which constitutes a movable element and the other constitutes a stator. In this embodiment, the coil section 51 constitutes the movable element and is attached to the bottom surface of the X-slider 21 (preferably both ends in the Y-axis direction), and the magnet section 52 constitutes the stator and is attached to the base plate 3. As shown in Figure 10, the magnet section 52 that constitutes the stator extends linearly along the X-axis direction, which is the driving direction, and applies compensation forces f1, f2, etc. along the Z-axis direction to the coil section 51 (movable element).

[0128] Figure 11 schematically shows the details of the voice coil motor 5 in Figure 8. The magnet section 52 comprises a roughly rectangular parallelepiped housing 521 with an opening at the top in the Z-axis direction. Long magnets 52N and 52S extending along the X-axis direction (see Figure 10) are arranged on the inner circumferential surface of this housing 521 on the +Y side and / or -Y side. In the illustrated cross-section, two N-pole magnets 52N and two S-pole magnets 52S are aligned along the Y-axis and Z-axis directions. In the Z-axis direction (vertical direction in Figure 11), one N-pole magnet 52N and one S-pole magnet 52S are arranged vertically. In the Y-axis direction (horizontal direction in Figure 11), one N-pole magnet 52N and one S-pole magnet 52S face each other, sandwiching the voice coil 511 in the coil section 51.

[0129] In the upper part of Figure 11, a rightward magnetic field is generated because the north pole magnet 52N is on the left and the south pole magnet 52S is on the right. In the lower part of Figure 11, a leftward magnetic field is generated because the south pole magnet 52S is on the left and the north pole magnet 52N is on the right. Thus, within the housing 521 of the magnet section 52, magnetic fields are generated in different directions (+Y direction and -Y direction) on the +Z side and -Z side. By inserting the flat voice coil 511 of the coil section 51 into such a magnetic field, a voice coil motor 5 capable of generating a compensating force f along the Z axis direction is constructed.

[0130] As shown in Figure 10, the voice coil 511 (coil section 51) is a roughly rectangular coil (viewed in the Y-axis direction) wound around the Y-axis, and a current of any magnitude can flow in any direction. In the example in Figure 11, a current flows from the front to the back of the paper through the upper group of wires, and a current flows from the back to the front of the paper through the lower group of wires. The upper group of wires is exposed to the rightward magnetic field from the upper magnet pair mentioned above and therefore receives an electromagnetic force in the -Z direction, while the lower group of wires is exposed to the leftward magnetic field from the lower magnet pair mentioned above and therefore receives an electromagnetic force in the -Z direction. In this case, the voice coil 511 receives a force in the -Z direction, resulting in the generation of a compensatory force f in the -Z-axis direction. If the direction of the current is reversed, a compensatory force f in the +Z-axis direction will be generated.

[0131] As shown in Figure 10, the voice coil 511 (coil portion 51) moves along the X-axis direction together with the X-slider 21. However, the configuration or arrangement of the magnets 52N and 52S that the voice coil 511 faces (Figure 11) remains constant regardless of the position in the X-axis direction. Therefore, by simply controlling the current flowing through the voice coil 511, a compensation force f of a desired direction and magnitude can be stably generated. Thus, the voice coil motor 5 is a suitable device as a compensation force application unit 5 attached to the X-slider 21, as it can generate any compensation force f along a direction (Z-axis direction) that intersects or is perpendicular to the drive direction (X-axis direction) while allowing movement along the drive direction (X-axis direction).

[0132] However, the compensating force application unit 5 according to this embodiment is not limited to a voice coil motor. For example, a magnetic levitation motor capable of controlling both the amount of levitation in the Z-axis direction and the amount of drive in the X-axis direction may be provided as the compensating force application unit 5. Since this magnetic levitation motor also serves as the drive unit for the X slider 21, it is provided in place of the first linear motor 120. Furthermore, instead of the magnetic linear motors 120 and 220 in this disclosure, actuators of any other principle, such as fluid actuators that use a fluid such as air as a drive source, may be used as the drive unit.

[0133] The second embodiment described above concerns a first drive shaft 100 or X slider 21 with the X-axis direction as the drive direction, but this second embodiment is similarly applicable to a second drive shaft 200 or Y slider 150 with the Y-axis direction as the drive direction. For example, the second linear motor 220, which was attached to the side of the Y slider 150 in the first embodiment of Figure 1, may be attached to the bottom or top of the Y slider 150. Furthermore, in order to reduce pitching around the X-axis due to the driving force of the second linear motor 220, one or more compensation force application units 5 may be arranged on the bottom or top of the Y slider 150. Note that the second embodiment may be applied to both the first drive shaft 100 and the second drive shaft 200, or to either one of them.

[0134] Figure 12 is a schematic functional block diagram of a stage device 1 applicable to both the first and second embodiments. This stage device 1 comprises a drive command unit 61, a rotation amount calculation unit 62, a rotation amount measuring unit 63, and a compensation force control unit 64. In both embodiments, some of these functional blocks may be omitted (for example, the rotation amount measuring unit 63 may be omitted) as long as the stage device 1 can realize at least some of the operations and / or effects, including those described above. These functional blocks may be realized through the cooperation of hardware resources such as the central processing unit, memory, input devices, output devices, and peripheral devices connected to the computer, and software executed using them. Regardless of the type or location of the computer, each of the above functional blocks may be realized with the hardware resources of a single computer, or with a combination of hardware resources distributed across multiple computers.

[0135] The drive command unit 61 gives commands to each linear motor 120, 220, which are drive units, regarding the driving of each slider 21, 150, which are the objects to be driven. These drive commands may include command values ​​relating to the direction and magnitude of the driving force F generated by each linear motor 120, 220, or they may include command values ​​relating to at least one of the position, velocity, and acceleration of each slider 21, 150.

[0136] The rotation amount calculation unit 62 calculates the moment M1, which is the amount of rotation of each slider 21, 150 due to the driving force F applied by each linear motor 120, 220 acting as the drive unit. For example, in Figure 9, as described above, F × L1 is calculated by the rotation amount calculation unit 62 as the moment M1. The driving force F in this equation can be obtained directly or indirectly from the drive command given by the drive command unit 61, and the distance L1 in this equation can be obtained as a design value.

[0137] The rotation amount measuring unit 63 measures the amount of rotation of each slider 21, 150. For example, the rotation amount measuring unit 63 can measure the amount of rotation or the orientation of each slider 21, 150 through a sensor of any principle (not shown), such as an inertial sensor or optical sensor, which can measure the orientation of each slider 21, 150.

[0138] The compensation force control unit 64 causes one or more compensation force application units 5 to apply a compensation force f to each slider 21, 150 that produces a counteracting rotation amount M2 (in the example in Figures 9 and 10, -F × L1) of the same magnitude and in the opposite direction to the moment M1 as the rotation amount of each slider 21, 150 obtained by the rotation amount calculation unit 62 and / or rotation amount measuring unit 63. Here, if multiple compensation force application units 5 are provided, the direction and magnitude of each compensation force f applied to each compensation force application unit 5 are individually optimized or adjusted by the compensation force control unit 64 so that the desired counteracting rotation amount M2 is generated overall.

[0139] The present disclosure has been described above based on embodiments. Various modifications are possible for each component and each combination of processes in the exemplary embodiments, and it will be obvious to those skilled in the art that such modifications are included in the scope of the present disclosure.

[0140] The configuration, operation, and function of each device and method described in the embodiments can be realized by hardware resources or software resources, or by the cooperation of hardware resources and software resources. Hardware resources include, for example, processors, ROMs, RAMs, and various integrated circuits. Software resources include, for example, operating systems and application programs. [Explanation of Symbols]

[0141] 1 Stage device, 2 Stage, 5 Compensation force application unit, 10 First gas buoyancy unit, 20 Second gas buoyancy unit, 21 X slider, 51 Coil unit, 52 Magnet unit, 61 Drive command unit, 62 Rotation amount calculation unit, 63 Rotation amount measurement unit, 64 Compensation force control unit, 100 First drive shaft, 110 X guide, 120 First linear motor, 150 Y slider, 170 Air pad, 172, 174, 176 Exhaust groove, 200 Second drive shaft, 210 Y guide, 220 Second linear motor, 511 Voice coil.

Claims

1. A slider that can move linearly along a predetermined driving direction, A drive unit that applies a driving force to the slider along the driving direction, A compensating force application unit capable of applying a compensating force to the slider to reduce the rotation of the slider caused by the aforementioned driving force, A drive device equipped with the following features.

2. The drive device according to claim 1, wherein the compensating force application unit is capable of applying the compensating force, which has a different line of action from the driving force, to the slider.

3. The drive device according to claim 2, wherein a plurality of compensation force application units are provided, and the compensation force can be applied at different positions on the slider.

4. The drive device according to claim 3, wherein the plurality of compensation force application units are capable of applying the compensation force in substantially the same direction at different positions on the same outer surface of the slider.

5. The same outer surface of the slider is substantially rectangular, and a pair of opposing sides thereof extend along the driving direction. The compensating force application section is provided at least once in each of the four corner regions of the substantially rectangular shape. The drive device according to claim 4.

6. The drive unit is a motor comprising a movable element provided on the same outer surface of the slider, and a stator extending linearly along the driving direction and applying the driving force to the movable element. The compensating force application unit is provided at least one on each side of the stator. The drive device according to claim 4.

7. The same outer surface of the slider is the bottom surface or top surface of the slider. Multiple compensation force application units are capable of applying the compensation force to the bottom surface or top surface to reduce at least the pitching of the slider caused by the driving force applied to the bottom surface or top surface by the drive unit. The drive device according to any one of claims 4 to 6.

8. The drive device according to any one of claims 2 to 6, wherein the compensating force application unit is provided on the side surface of the slider and is capable of applying the compensating force to the side surface to reduce at least the yawing of the slider caused by the driving force applied to the slider by the drive unit.

9. The drive device according to claim 3, wherein the plurality of compensation force application units are capable of applying the compensation force on different outer surfaces of the slider.

10. The drive device according to any one of claims 2 to 6, wherein the compensating force application unit is comprised of a voice coil motor capable of applying the compensating force, which has a different line of action from the driving force, to the slider.

11. A rotation amount calculation unit that calculates the amount of rotation of the slider due to the driving force applied by the drive unit, A compensation force control unit that applies the compensation force to the compensation force application unit, which produces a compensating rotation amount of the same magnitude but in the opposite direction to the aforementioned rotation amount, A drive device according to any one of claims 1 to 6, comprising:

12. A rotation amount measuring unit for measuring the amount of rotation of the slider, A compensation force control unit that applies the compensation force to the compensation force application unit, which produces a compensating rotation amount of the same magnitude but in the opposite direction to the aforementioned rotation amount, A drive device according to any one of claims 1 to 6, comprising:

13. The vehicle is equipped with a guide that extends linearly along the aforementioned driving direction, The slider is movable along the drive direction while being guided by the guide. The drive device according to any one of claims 1 to 6.

14. The drive device according to claim 13, further comprising a gas levitation section that uses gas to levitate the slider away from the guide.

15. The drive device according to claim 14, further comprising an exhaust unit for discharging the gas supplied by the gas buoyancy unit to the outside of the chamber housing the drive device.

16. The drive device according to claim 15, wherein the chamber is a vacuum chamber in which the inside is in a vacuum state.

17. A positioning device for positioning the slider by a drive device according to any one of claims 1 to 6.

18. A processing apparatus for performing a predetermined process on an object to be processed, which is positioned on a slider positioned by the positioning device described in claim 17.

19. A device manufacturing method for manufacturing a device through the processing performed by the processing apparatus described in claim 18.

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