Fluid machines

Abstract

The temperature of the fluid flowing through the center of the flow path is accurately detected without the temperature detection unit directly contacting the fluid. [Solution] The shut-off valve 100 comprises a main body 110 in which a valve body, a valve chamber 114, an inlet side passage 113, and an outlet side passage are integrally formed from a resin material, and a temperature detection unit 170 for detecting the temperature of the fluid flowing through the main body 110. The inlet side passage 113 has a first passage section 113A extending along a first axis AX1 and a second passage section 113B extending along a second axis AX2 intersecting the first axis AX1, with the first passage section 113A and the second passage section 113B being connected by a connecting region 113C. The main body 110 has a projection 116 that protrudes from the inner circumferential surface of the connecting region 113C along the first axis AX1, and a housing hole 116a for housing the temperature detection unit 170 is formed inside the projection 116.

Description

Technical Field

[0001] The present invention relates to fluid equipment.

Background Art

[0002] Conventionally, a shut-off valve installed in a pipe for circulating a fluid (liquid such as a chemical solution or pure water) used in a semiconductor manufacturing apparatus or the like is known (see, for example, Patent Document 1). The shut-off valve disclosed in Patent Document 1 is formed by integrally forming a valve chamber, an inflow-side flow path, and an outflow-side flow path with a fluororesin material.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In fluid equipment such as a shut-off valve, it may be required to appropriately detect the temperature of the fluid flowing inside. When the fluid flowing inside the fluid equipment is a corrosive chemical solution or the like, if the temperature detection part is arranged inside the flow path through which the fluid flows, although the temperature of the fluid can be appropriately detected, the temperature detection part may come into direct contact with the fluid and corrosion or the like may occur. Therefore, it is not appropriate to arrange the temperature detection part inside the flow path through which the fluid flows.

[0005] To prevent the temperature detection unit from directly contacting the fluid, one possible method is to embed the temperature detection unit near the inner surface of the fluid-flowing channel and detect the temperature transmitted from the resin material forming the channel. However, if the temperature detection unit is brought close to the inner surface of the channel to properly detect the fluid temperature, the resin material will become thinner, posing a risk of damage to the resin material. Furthermore, if a temperature difference occurs between the vicinity of the inner surface of the channel and the center of the channel, it becomes impossible to properly detect the temperature of the fluid flowing through the center of the channel.

[0006] This invention has been made in view of these circumstances, and aims to provide a fluid device that can appropriately detect the temperature of a fluid flowing through the center of a flow path without directly contacting the temperature detection unit with the fluid. [Means for solving the problem]

[0007] To solve the above problems, the present invention employs the following means. A fluid device according to one aspect of the present invention comprises a valve body formed axially so as to extend along a moving axis and movable along the moving axis, a valve chamber housing the valve body, an inlet side passage for guiding fluid flowing in from an inlet side pipe to the valve chamber, and an outlet side passage for guiding fluid from the valve chamber to an outlet side pipe, all integrally formed from a resin material, and a temperature detection unit for detecting the temperature of fluid flowing through the main body, wherein either the inlet side passage or the outlet side passage has a first passage portion extending along a first axis and one end communicating with the valve chamber, and a second passage portion extending along a second axis intersecting the first axis and one end communicating with either the inlet side pipe or the outlet side pipe, the first passage portion and the second passage portion being connected by a connecting region, the main body having a projection that protrudes from the inner circumferential surface of the connecting region along the first axis or the second axis, and a housing hole for housing the temperature detection unit is formed inside the projection.

[0008] According to one aspect of the present invention, the fluid device comprises a main body in which a valve chamber, an inlet passage, and an outlet passage are integrally formed from a resin material. Either the inlet passage or the outlet passage has a first passage portion extending along a first axis and a second passage portion extending along a second axis intersecting the first axis. The main body has a projection that protrudes along the first axis or the second axis from the inner circumferential surface of a connecting region where the first passage portion and the second passage portion are connected. A temperature detection unit is housed in a housing hole formed inside the projection.

[0009] According to one aspect of the present invention, since the temperature detection unit is housed inside the protruding portion, damage to the temperature detection unit due to direct contact with the fluid can be prevented. Furthermore, since the protruding portion in which the temperature detection unit is housed protrudes from the inner circumferential surface of the connecting region along the first axis or the second axis, the temperature of the fluid flowing through the center of the first or second flow path can be appropriately detected.

[0010] In a fluid device according to one aspect of the present invention, the protruding portion is preferably formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region along the first axis, and the outer diameter of the protruding portion is preferably set to be 0.1 times or more and 0.8 times or less the first inner diameter of the first flow channel.

[0011] With the fluid device configured as described above, by making the outer diameter of the protrusion 0.1 times or more the first inner diameter of the first flow channel, it is possible to secure a sufficient inner diameter for the housing hole that accommodates the temperature detection unit inside the protrusion. Furthermore, by making the outer diameter of the protrusion 0.8 times or less the first inner diameter of the first flow channel, it is possible to prevent the protrusion from excessively obstructing the fluid flow in the first and second flow channels.

[0012] In the fluid device with the above configuration, it is preferable that the length of the protruding portion along the first axis is set to be 0.1 times or more and 0.5 times or less the second inner diameter of the second flow channel portion.

[0013] According to the fluid device of the above embodiment, by making the length of the protrusion along the first axis 0.1 times or more the second inner diameter of the second flow channel, it is possible to secure a sufficient length for the housing hole that accommodates the temperature detection unit inside the protrusion. Furthermore, by making the length of the protrusion along the first axis 0.5 times or less the second inner diameter of the second flow channel, it is possible to prevent the protrusion from excessively obstructing the fluid flow in the first and second flow channels.

[0014] In a fluid device according to one aspect of the present invention, the protruding portion is preferably formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region along the second axis, and the outer diameter of the protruding portion is preferably set to be 0.1 times or more and 0.8 times or less the second inner diameter of the second flow channel.

[0015] With the fluid device configured as described above, by making the outer diameter of the protrusion 0.1 times or more the second inner diameter of the second flow channel, it is possible to secure sufficient inner diameter for the housing hole that accommodates the temperature detection unit inside the protrusion. Furthermore, by making the outer diameter of the protrusion 0.8 times or less the second inner diameter of the second flow channel, it is possible to prevent the protrusion from excessively obstructing the fluid flow in the first and second flow channels.

[0016] In the fluid device with the above configuration, it is preferable that the length of the protruding portion along the second axis is set to be 0.1 times or more and 0.5 times or less the inner diameter of the first flow channel.

[0017] According to the fluid device of the above embodiment, by making the length of the protrusion along the second axis 0.1 times or more the inner diameter of the first flow channel, it is possible to secure a sufficient length for the housing hole that accommodates the temperature detection unit inside the protrusion. Furthermore, by making the length of the protrusion along the second axis 0.5 times or less the inner diameter of the first flow channel, it is possible to prevent the protrusion from excessively obstructing the fluid flow in the first and second flow channels.

[0018] In a fluid device according to one aspect of the present invention, it is preferable that the angle at which the first axis and the second axis intersect is set to 90 degrees.

[0019] According to the fluid device having the above-described configuration, by setting the angle at which the first axis and the second axis intersect to 90 degrees, the cutting process for forming the first flow path portion and the second flow path portion in the main body portion formed of the resin material can be performed relatively easily. Further, the main body portion can be miniaturized as compared with the case where the angle at which the first axis and the second axis intersect is greater than 90 degrees.

[0020] In the fluid device according to one aspect of the present invention, it is preferable that the temperature detection unit is a thermocouple and the contact of the thermocouple is accommodated in the accommodation hole.

[0021] According to the fluid device having the above-described configuration, by accommodating the contact of the thermocouple in the accommodation hole formed inside the protruding portion, the thermoelectromotive force corresponding to the temperature of the fluid flowing through the connection region transmitted to the contact via the protruding portion can be appropriately detected.

Effects of the Invention

[0022] According to the present invention, it is possible to provide a fluid device capable of appropriately detecting the temperature of the fluid flowing through the center of the flow path without directly contacting the temperature detection unit with the fluid.

Brief Description of the Drawings

[0023] [Figure 1] It is a longitudinal sectional view showing a shut-off valve according to a first embodiment of the present invention. [Figure 2] It is a partially enlarged view of a portion A of the shut-off valve shown in FIG. 1. [Figure 3] It is a sectional view taken along line B-B of the shut-off valve shown in FIG. 2. [Figure 4] It is a longitudinal sectional view showing a shut-off valve according to a second embodiment of the present invention. [Figure 5] It is a partially enlarged view of a portion C of the shut-off valve shown in FIG. 4. [Figure 6] It is a longitudinal sectional view showing a shut-off valve according to a third embodiment of the present invention. [Figure 7] It is a sectional view taken along line D-D of the shut-off valve shown in FIG. 6. [Figure 8] It is a plan view of the shut-off valve shown in FIG. 6. [Figure 9] This is a longitudinal cross-sectional view showing a shut-off valve according to a fourth embodiment of the present invention. [Figure 10] This is a longitudinal cross-sectional view showing a shut-off valve according to a fifth embodiment of the present invention. [Modes for carrying out the invention]

[0024] [First Embodiment] Hereinafter, a shut-off valve (fluid device) 100 according to the first embodiment of the present invention will be described with reference to the drawings. The shut-off valve 100 of this embodiment is a fluid device installed in piping that circulates fluids (liquids such as chemical solutions and pure water) used in semiconductor manufacturing equipment and the like. Figure 1 is a longitudinal cross-sectional view showing the shut-off valve 100 according to the first embodiment of the present invention. Figure 2 is a partially enlarged view of part A of the shut-off valve 100 shown in Figure 1. Figure 3 is a cross-sectional view of the shut-off valve 100 shown in Figure 2 taken along the arrow BB.

[0025] As shown in Figures 1 and 2, the shut-off valve 100 comprises a main body 110, an upper housing 120, a lower housing 130, a valve body 140, a diaphragm 150, a moving mechanism 160, and a temperature detection unit 170.

[0026] The main body 110 is a component in which fluid passages (inlet-side passage 113, valve chamber 114, and outlet-side passage 115, described later) are formed inside to guide fluid from the inlet 111 to the outlet 112. The main body 110 is integrally formed from a fluororesin material.

[0027] The fluid passage formed inside the main body 110 includes an inlet passage 113, a valve chamber 114, and an outlet passage 115. The inlet passage 113 is a passage that guides the fluid flowing in from the inlet piping 111a to the valve chamber 114. The valve chamber 114 is a space that houses the valve body 140. The valve chamber 114 is a space where the valve body 140 is positioned, communicates with the inlet passage 113 and the outlet passage 115, and is formed between the main body 110 and the lower surface of the diaphragm 150.

[0028] The outlet side passage 115 is a passage that guides fluid from the valve chamber 114 to the outlet side piping 112a. As shown in Figure 2, a valve hole 113a is formed at the valve chamber 114 side end of the inlet side passage 113, where the valve body 140 is positioned closer or further away along axis Z.

[0029] The upper housing 120 is positioned above the main body 110 and houses the diaphragm 150 and the moving mechanism 160 in the space formed between it and the main body 110. The lower housing 130 is positioned below the main body 110 and is installed on the mounting surface S.

[0030] As shown in Figure 1, the main body 110, the upper housing 120, and the lower housing 130 are integrated by fastening the upper housing 120 and the lower housing 130 with fastening bolts 180, with the main body 110 in between. The upper housing 120 and the lower housing 130 are integrated by, for example, four fastening bolts 180 positioned at equidistant locations from the axis Z.

[0031] As shown in Figures 1 and 2, the valve body 140 is formed axially so as to extend along the axis (movement axis) Z and is a member that moves closer to or further away from the valve hole 113a that guides fluid from the inflow side passage 113 to the valve chamber 114. The shut-off valve 100 can be switched by the movement mechanism 160 between a closed state (shown by a dotted line in Figure 1) in which the valve body 140 is brought close to the main body 110 to block the inflow of fluid from the valve hole 113a to the valve chamber 114, and an open state (shown by a solid line in Figure 1) in which the valve body 140 is separated from the main body 110.

[0032] As shown in Figure 1, the diaphragm portion 150 is a member having a thin film portion 151 and a base portion 152. The thin film portion 151 is connected to the outer circumferential surface of the valve body portion 140 located in the valve chamber 114 and is formed in an annular shape around axis Z so as to isolate the valve chamber 114 where the valve body portion 140 is located from the space adjacent to the valve chamber 114. The base portion 152 is connected to the outer circumferential side of the thin film portion 151 and is also formed in an annular shape around axis Z.

[0033] The diaphragm portion 150 is integrally formed with the valve body portion 140 from a fluororesin material. The thin film portion 151 is formed in an annular shape around the axis Z and is formed as a thin film with a thickness of 0.2 mm to 0.5 mm. The thin film portion 151 is flexible and deforms in accordance with the movement of the valve body portion 140 along the axis Z.

[0034] The moving mechanism 160 is a mechanism that switches the valve body 140 between a closed state and an open state. The moving mechanism 160 generates a driving force to move the valve body 140 using compressed air supplied from a supply pipe 161 connected to a compressed air supply source (not shown).

[0035] The temperature detection unit 170 is a device that detects the temperature of the fluid flowing through the inflow channel 113 of the main body 110. The temperature detection unit 170 detects the temperature of the fluid transmitted from the fluid near the protrusion 116 to the protrusion 116 by means of a detection element 171 housed in a housing hole 116a inside the protrusion 116, which will be described later. The temperature detection unit 170 is, for example, a thermocouple, and the detection element 171 in the thermocouple is the contact point of a pair of metal wires formed from different metal materials. A platinum resistance thermometer or a thermistor may be used as the temperature detection unit 170.

[0036] The detection element 171 is fixed in place by a heat-dissipating adhesive injected into the housing hole 116a. By filling the space between the detection element 171 and the housing hole 116a with the heat-dissipating adhesive, it is possible to ensure that the temperature of the fluid flowing through the inflow channel 113 is transmitted to the detection element 171 via the protrusion 116.

[0037] Next, the structure for housing the detection element 171 of the temperature detection unit 170 in the protruding portion 116 of the main body 110 will be described. As shown in Figure 2, the inflow side flow path 113 has a first flow path portion 113A that extends along the first axis AX1 and has one end communicating with the valve chamber 114, and a second flow path portion 113B that extends along the second axis AX2 and has one end communicating with the inflow side piping 111a. As shown in Figure 2, the first flow path portion 113A and the second flow path portion 113B are connected by a connecting region 113C. The first axis AX1 is an axis that coincides with the axis Z that extends in the vertical direction. The second axis AX2 is an axis that intersects the first axis AX1 at a 90-degree angle.

[0038] As shown in Figures 2 and 3, the main body portion 110 has a projection 116 that protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the first axis AX1. Inside the projection 116, there is a housing hole 116a for housing the detection element 171 of the temperature detection unit 170. The projection 116 is formed in a cylindrical shape that protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the first axis AX1.

[0039] As shown in Figures 2 and 3, the outer diameter of the protrusion 116 is OD1, and the inner diameter of the first flow channel 113A is ID1. The outer diameter OD1 and the inner diameter (first inner diameter) ID1 are preferably set as shown in the following equation (1). 0.1 × ID1 ≤ OD1 ≤ 0.8 × ID1 (1)

[0040] As shown in Figure 2, the length of the protrusion 116 along the first axis AX1 is L1, and the inner diameter of the second flow channel 113B is ID2. The length L1 and the inner diameter (second inner diameter) ID2 are preferably set as shown in equation (2) below. 0.1 × ID2 ≤ L1 ≤ 0.5 × ID2 (2)

[0041] The operation and effects of the shut-off valve 100 of this embodiment, as described above, will now be explained. The shut-off valve 100 of this embodiment includes a main body 110 in which a valve chamber 114, an inlet-side passage 113, and an outlet-side passage 115 are integrally formed from a resin material. Either the inlet-side passage 113 or the outlet-side passage 115 has a first passage section 113A extending along a first axis AX1 and a second passage section 113B extending along a second axis AX2 intersecting the first axis AX1. The main body has a projection 116 that protrudes along the first axis AX1 from the inner circumferential surface 113Ca of a connecting region 113C to which the first passage section 113A and the second passage section 113B are connected. The detection element 171 of the temperature detection unit 170 is housed in a housing hole 116a formed inside the projection 116.

[0042] In the shut-off valve 100 of this embodiment, since the temperature detection unit 170 is housed inside the protruding portion 116, damage to the temperature detection unit 170 due to direct contact with the fluid can be prevented. Furthermore, since the protruding portion 116, which houses the temperature detection unit 170, protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the first axis AX1, the temperature of the fluid flowing through the center of the first flow path portion 113A can be appropriately detected.

[0043] According to the shut-off valve 100 of this embodiment, by making the outer diameter OD1 of the protrusion 116 0.1 times or more the inner diameter ID1 of the first flow path section 113A, the inner diameter of the housing hole 116a that houses the temperature detection section 170 inside the protrusion 116 can be sufficiently secured. Furthermore, by making the outer diameter OD1 of the protrusion 116 0.8 times or less the inner diameter ID1 of the first flow path section 113A, the protrusion 116 can be prevented from excessively obstructing the fluid flow in the first flow path section 113A and the second flow path section 113B.

[0044] According to the shut-off valve 100 of this embodiment, by making the length L1 of the protrusion 116 along the first axis AX1 0.1 times or more the inner diameter ID2 of the second flow path section 113B, it is possible to sufficiently secure the length L1 of the housing hole 116a for housing the temperature detection unit 170 inside the protrusion 116. Furthermore, by making the length L1 of the protrusion 116 along the first axis AX1 0.5 times or less the inner diameter ID2 of the second flow path section 113B, it is possible to prevent the protrusion 116 from excessively obstructing the fluid flow in the first flow path section 113A and the second flow path section 113B.

[0045] [Second Embodiment] Next, a shut-off valve 100A according to a second embodiment of the present invention will be described with reference to the drawings. The second embodiment is a modification of the first embodiment and is the same as the first embodiment unless otherwise specifically described below, so the following description will be omitted. Figure 4 is a longitudinal cross-sectional view showing a shut-off valve 100A according to a second embodiment of the present invention. Figure 5 is a partially enlarged view of portion C of the shut-off valve 100A shown in Figure 4.

[0046] In the shut-off valve 100 of the first embodiment, the main body 110 has a projection 116 that protrudes along the first axis AX1 from the inner circumferential surface 113Ca of the connecting region 113C where the first flow path 113A and the second flow path 113B are connected. In contrast, in the shut-off valve 100A of this embodiment, the main body 110 has a projection 116 that protrudes along the second axis AX2 from the inner circumferential surface 113Ca of the connecting region 113C where the first flow path 113A and the second flow path 113B are connected.

[0047] As shown in Figures 4 and 5, the inflow channel 113 has a first channel section 113A that extends along the first axis AX1 and has one end communicating with the valve chamber 114, and a second channel section 113B that extends along the second axis AX2 and has one end communicating with the inflow piping 111a. As shown in Figure 5, the first channel section 113A and the second channel section 113B are connected by a connecting region 113C. The first axis AX1 is an axis that coincides with the axis Z that extends in the vertical direction. The second axis AX2 is an axis that intersects the first axis AX1 at a 90-degree angle.

[0048] As shown in Figures 4 and 5, the main body portion 110 has a projection 116 that protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the second axis AX2. Inside the projection 116, there is a housing hole 116a for housing the detection element 171 of the temperature detection unit 170. The projection 116 is formed in a cylindrical shape that protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the second axis AX2.

[0049] As shown in Figures 4 and 5, the outer diameter of the protrusion 116 is OD1, and the inner diameter of the second flow channel 113B is ID2. The outer diameter OD1 and the inner diameter ID2 are preferably set as shown in equation (3) below. 0.1 × ID2 ≤ OD1 ≤ 0.8 × ID2 (3)

[0050] As shown in Figure 5, the length of the protrusion 116 along the second axis AX2 is L2, and the inner diameter of the first flow channel 113A is ID1. The length L2 and inner diameter ID1 are preferably set as shown in equation (4) below. 0.1 × ID1 ≤ L2 ≤ 0.5 × ID1 (4)

[0051] The operation and effects of the shut-off valve 100A of this embodiment, as described above, will now be explained. In the shut-off valve 100A of this embodiment, since the temperature detection unit 170 is housed inside the protruding portion 116, damage to the temperature detection unit 170 due to direct contact with the fluid can be prevented. Furthermore, since the protruding portion 116, which houses the temperature detection unit 170, protrudes from the inner circumferential surface 113Ca of the connecting region 113C along the second axis AX2, the temperature of the fluid flowing through the center of the second flow path 113B can be appropriately detected.

[0052] According to the shut-off valve 100A of this embodiment, by making the outer diameter OD1 of the protrusion 116 0.1 times or more the inner diameter ID2 of the second flow path section 113B, the inner diameter of the housing hole 116a for housing the temperature detection unit 170 inside the protrusion 116 can be sufficiently secured. Furthermore, by making the outer diameter OD1 of the protrusion 116 0.8 times or less the inner diameter ID2 of the second flow path section 113B, the protrusion 116 can be prevented from excessively obstructing the fluid flow in the first flow path section 113A and the second flow path section 113B.

[0053] According to the shut-off valve 100A of this embodiment, by making the length L2 of the protrusion 116 along the second axis AX2 0.1 times or more the inner diameter ID1 of the first flow path section 113A, it is possible to sufficiently secure the length L2 of the housing hole 116a for housing the temperature detection section 170 inside the protrusion 116. Furthermore, by making the length L2 of the protrusion 116 along the second axis AX2 0.5 times or less the inner diameter ID1 of the first flow path section 113A, it is possible to prevent the protrusion 116 from excessively obstructing the fluid flow in the first flow path section 113A and the second flow path section 113B.

[0054] [Third Embodiment] Next, a shut-off valve 100B according to the third embodiment of the present invention will be described with reference to the drawings. The third embodiment is a modification of the second embodiment and is the same as the second embodiment unless otherwise specifically described below, so the following description will be omitted. Figure 6 is a longitudinal cross-sectional view showing the shut-off valve 100B according to the third embodiment of the present invention. Figure 7 is a cross-sectional view taken along the DD arrow of the shut-off valve 100A shown in Figure 6. Figure 8 is a plan view of the shut-off valve 100B shown in Figure 6.

[0055] In the second embodiment, the shut-off valve 100A had an inlet 111 and an outlet 112 that were aligned on the same line when viewed from above. In contrast, in the shut-off valve 100B of this embodiment, the inlet 111 and the outlet 112 are not aligned on the same line when viewed from above. In the shut-off valve 100B of this embodiment, the direction in which the inflow side flow path 113 extends and the direction in which the outflow side flow path 115 extends are 90 degrees apart when viewed from above.

[0056] As shown in Figure 6, the main body portion 110 has a projection 116 that protrudes from the inner circumferential surface of the connecting region 113C along the second axis AX2. Inside the projection 116, there is a housing hole 116a for housing the detection element 171 of the temperature detection unit 170. The projection 116 is formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region 113C along the second axis AX2.

[0057] As shown in Figure 8, in this embodiment, the shut-off valve 100B is such that, when viewed from above, the inlet 111 and the outlet 112 are not arranged on the same line. As shown in Figures 6 and 7, in this embodiment, when viewed from above, the direction in which the inlet-side flow path 113 extends and the direction in which the outlet-side flow path 115 extends are 90 degrees apart.

[0058] In this embodiment, the shut-off valve 100B is configured such that, when viewed from above, the direction in which the inlet-side flow path 113 extends and the direction in which the outlet-side flow path 115 extends are 90 degrees apart, allowing for the formation of a housing hole 116a that extends linearly along the second axis AX2. Furthermore, by making the height of the inlet 111 and the height of the outlet 112 the same with respect to the installation surface S, the connection of the inlet-side piping 111a to the inlet 111 and the connection of the outlet-side piping 112a to the outlet 112 can be easily performed by an operator.

[0059] [Fourth Embodiment] Next, a shut-off valve 100C according to the fourth embodiment of the present invention will be described with reference to the drawings. The fourth embodiment is a modification of the first embodiment and is the same as the first embodiment unless otherwise specifically described below, so the following description will be omitted. Figure 9 is a longitudinal cross-sectional view showing a shut-off valve 100C according to the fourth embodiment of the present invention.

[0060] In the first embodiment, the shut-off valve 100 had a protruding portion 116 that projected along the first axis AX1 in the connecting region 113C of the inflow side flow path 113, and a temperature detection unit 170 was arranged inside the protruding portion 116. In contrast, in this embodiment, the shut-off valve 100C has a protruding portion 116 that projected along the first axis AX1 in the connecting region 115C of the outflow side flow path 115, and a temperature detection unit 170 is arranged inside the protruding portion 116.

[0061] As shown in Figure 9, the outflow side flow path 115 of the shut-off valve 100C in this embodiment has a first flow path section 115A that extends along the first axis AX1 and has one end communicating with the valve chamber 114, and a second flow path section 115B that extends along the second axis AX2 and has one end communicating with the outflow side piping 112a. As shown in Figure 9, the first flow path section 115A and the second flow path section 115B are connected by a connecting region 115C.

[0062] As shown in Figure 9, the main body portion 110 has a projection 116 that protrudes from the inner circumferential surface of the connecting region 115C along the first axis AX1. Inside the projection 116, there is a housing hole 116a for housing the detection element 171 of the temperature detection unit 170. The projection 116 is formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region 115C along the first axis AX1.

[0063] In the shut-off valve 100C of this embodiment, since the temperature detection unit 170 is housed inside the protruding portion 116, damage to the temperature detection unit 170 due to direct contact with the fluid can be prevented. Furthermore, since the protruding portion 116, which houses the temperature detection unit 170, protrudes from the inner circumferential surface of the connecting region 115C along the first axis AX1, the temperature of the fluid flowing through the center of the first flow path portion 115A can be appropriately detected.

[0064] [Fifth Embodiment] Next, a shut-off valve 100D according to the fifth embodiment of the present invention will be described with reference to the drawings. The fifth embodiment is a modification of the second embodiment and is the same as the second embodiment unless otherwise specifically described below, so the following description will be omitted. Figure 10 is a longitudinal cross-sectional view showing a shut-off valve 100D according to the fifth embodiment of the present invention.

[0065] In the second embodiment, the shut-off valve 100A had a protruding portion 116 that projected along the second axis AX2 in the connecting region 113C of the inflow side flow path 113, and a temperature detection unit 170 was arranged inside the protruding portion 116. In contrast, in this embodiment, the shut-off valve 100D has a protruding portion 116 that projected along the second axis AX2 in the connecting region 115C of the outflow side flow path 115, and a temperature detection unit 170 is arranged inside the protruding portion 116.

[0066] As shown in Figure 10, the outflow side flow path 115 of the shut-off valve 100D in this embodiment has a first flow path section 115A that extends along the first axis AX1 and has one end communicating with the valve chamber 114, and a second flow path section 115B that extends along the second axis AX2 and has one end communicating with the outflow side piping 112a. As shown in Figure 10, the first flow path section 115A and the second flow path section 115B are connected by a connecting region 115C.

[0067] As shown in Figure 10, the main body portion 110 has a projection 116 that protrudes from the inner circumferential surface of the connecting region 115C along the second axis AX2. Inside the projection 116, there is a housing hole 116a for housing the detection element 171 of the temperature detection unit 170. The projection 116 is formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region 115C along the second axis AX2.

[0068] In the shut-off valve 100D of this embodiment, since the temperature detection unit 170 is housed inside the protruding portion 116, damage to the temperature detection unit 170 due to direct contact with the fluid can be prevented. Furthermore, since the protruding portion 116, which houses the temperature detection unit 170, protrudes from the inner circumferential surface of the connecting region 115C along the second axis AX2, the temperature of the fluid flowing through the center of the second flow path 115B can be appropriately detected.

[0069] [Other embodiments] In the above explanation, the shut-off valve 100 was described as a fluid device, but other fluid devices may also be used. For example, other fluid devices such as a flow control device that adjusts the fluid flow rate by adjusting the insertion amount of a needle valve into the valve hole may also be used.

[0070] In the embodiments described above, the flow path indicated by reference numeral 113 is the inflow side flow path and the flow path indicated by reference numeral 115 is the outflow side flow path, but other embodiments are also possible. For example, the flow path indicated by reference numeral 113 may be the outflow side flow path and the flow path indicated by reference numeral 115 may be the inflow side flow path. [Explanation of Symbols]

[0071] 100, 100A, 100B, 100C, 100D shut-off valves 110 Main body 111 Inlet 111a Inlet piping 112 Outlet 112a Outlet piping 113 Inlet flow path 113A First channel section 113B Second channel section 113C Connected area 113Ca Inner surface 113a Valve hole 114 valve chambers 115 Outflow channel 115A First flow channel 115B Second channel section 115C Connected area 116 Protrusion 116a Enclosure hole 120 Upper Housing 130 Lower Housing 140 Valve body 150 Diaphragm section 151 Thin film section 152 Base 160 Moving mechanism 161 Supply piping 170 Temperature detection unit 171 detection elements 180 fastening bolts AX1 1st axis AX2 2nd axis ID1 First inner diameter ID2 2nd inner diameter OD1 Outer diameter S Installation surface Z axis

Claims

1. A valve body portion formed in an axial shape so as to extend along the axis of movement and movable along the axis of movement, A main body integrally formed from a resin material comprises a valve chamber housing the valve body, an inflow side passage that guides fluid flowing in from the inflow side piping to the valve chamber, and an outflow side passage that guides fluid from the valve chamber to the outflow side piping. The system includes a temperature detection unit for detecting the temperature of the fluid flowing through the main body, Either the inflow channel or the outflow channel has a first channel section extending along a first axis and having one end in communication with the valve chamber, and a second channel section extending along a second axis intersecting the first axis and having one end in communication with either the inflow pipe or the outflow pipe. The first channel section and the second channel section are connected by a connecting region. The main body portion has a projection that protrudes from the inner circumferential surface of the connecting region along the first axis or the second axis. A fluid device having a housing hole formed inside the protruding portion for housing the temperature detection unit.

2. The protruding portion is formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region along the first axis, The fluid device according to claim 1, wherein the outer diameter of the protruding portion is set to be 0.1 times or more and 0.8 times or less the first inner diameter of the first flow channel portion.

3. The fluid device according to claim 2, wherein the length of the protruding portion along the first axis is set to be 0.1 times or more and 0.5 times or less the second inner diameter of the second flow channel portion.

4. The aforementioned protrusion is formed in a cylindrical shape that protrudes from the inner circumferential surface of the connecting region along the second axis, The fluid device according to claim 1, wherein the outer diameter of the protruding portion is set to be 0.1 times or more and 0.8 times or less the inner diameter of the second flow channel portion.

5. The fluid device according to claim 4, wherein the length of the protruding portion along the second axis is set to be 0.1 times or more and 0.5 times or less the inner diameter of the first flow channel portion.

6. The fluid apparatus according to any one of claims 1 to 5, wherein the angle at which the first axis and the second axis intersect is set to 90 degrees.

7. The temperature detection unit is a thermocouple, The fluid apparatus according to any one of claims 1 to 5, wherein the contacts of the thermocouple are housed in the housing hole.

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