Branching chamber

Abstract

The present invention provides a branching chamber that can precisely control the airflow rate of the gas discharged from each outlet, and can also prevent turbulence of the gas within the box. [Solution] The branching chamber 1 has a box 2 formed with an inlet 21a and a plurality of outlets 21x, 21y, 21z, and plate-shaped guide vanes 31, 32, 33 that extend from the inlet 21a side to the outlets 21x, 21y, 21z side and are equipped with guide surfaces 31s, 32s, 33s for guiding the gas that enters from the inlet 21a to the outlets 21x, 21y, 21z. Inflow gaps 5 are provided at positions adjacent to the respective edges of the guide vanes 31, 32, 33 on the inlet 21a side and the outlets 21x, 21y, 21z side, allowing gas to flow into the space behind the guide surfaces 31s, 32s, 33s inside the box 2.

Description

Technical Field

[0001] The present invention relates to a branch chamber for branching a gas into a plurality of systems and discharging it from a plurality of outlets.

Background Art

[0002] Conventionally, a gas from an air conditioner has been branched through a duct or the like and supplied to each room. As a method of branching the gas and supplying it to each room, an air supply (SA) duct is connected to the air conditioner, and a plurality of distribution ducts are provided so as to branch from this air supply duct, whereby the gas is branched into a plurality of systems and supplied to each room. However, in this method, the structure related to gas branching becomes large and complicated, and there is a risk of inconvenience in terms of the accommodation of the structure.

[0003] Therefore, in order to improve the accommodation of the structure related to gas branching, it is conceivable to use a branch chamber. As the branch chamber, there is known one including a box having an inlet for allowing a gas passing through an air supply duct to flow in and a plurality of outlets for discharging the gas to a distribution duct, and a partition plate for controlling the air volume of the gas discharged from the outlet. The branch chamber branches the gas from the air conditioner flowing in through the air supply duct by the partition plate and sends the branched gas to each distribution duct.

[0004] As a branch chamber having a partition plate, for example, one in which one or a plurality of flat partition plates (flow dividing walls) are arranged in a box in accordance with the positions of the outlets (see, for example, Patent Document 1, etc.) or one in which a bent plate-shaped partition plate is arranged near the inlet in the box (see, for example, Patent Document 2, etc.) has been proposed.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

[0006] Incidentally, in industrial air conditioning systems where each of the multiple systems is a cleanroom system (a system related to the gas supplied to the cleanroom), the airflow rate of the gas to be supplied to each room may be set to differ significantly, that is, to create an imbalance in the airflow rate of each system. In this case, if a branching chamber with partition plates as described above is used, too much gas may flow to the system with the largest airflow rate, and it may not be possible to adequately address the imbalance in airflow rate between systems.

[0007] Furthermore, since expensive manufacturing equipment is sometimes installed in cleanrooms, it is especially necessary to take appropriate measures against condensation inside the branching chamber (box). However, installing new equipment or facilities for this purpose is not desirable in terms of installation space and cost.

[0008] Furthermore, pressure sensors, such as those used for inverter control of air conditioners based on differential pressure, are sometimes installed in a location immediately after the box in the distribution duct (near the box's outlet). However, in branch chambers with partition plates, turbulence and uneven flow of gas are likely to occur within the box, which may lead to a decrease in the accuracy of airflow control of the air conditioner or malfunction of the pressure sensor.

[0009] The present invention has been made in view of the above circumstances, and its purpose is to provide a branching chamber that can accurately control the airflow rate of gas discharged from each outlet, can easily implement measures against condensation inside the box, and can more reliably prevent turbulence of the gas inside the box. [Means for solving the problem]

[0010] Below, we will describe, in separate sections, each means suitable for achieving the above objectives. Furthermore, we will add notes on the effects and benefits specific to each means as needed.

[0011] Means 1. A branching chamber having a box formed with a gas inlet and a plurality of gas outlets, wherein the gas entering from the inlet is branched into a plurality of systems and discharged from a plurality of outlets, Within the box, a plate-shaped guide vane is provided for each system, extending from the inlet side to the outlet side, and having a guide surface for guiding the gas that enters from the inlet to the outlet; A branching chamber characterized by having an inlet gap provided at a position adjacent to the inlet and outlet edges of the guide vane, which allows gas to flow into the space behind the guide surface within the box.

[0012] According to the above-described method 1, guide vanes are provided for each of the multiple systems. These guide vanes extend from the inlet side to the outlet side and are equipped with guide surfaces for guiding the gas entering from the inlet to the outlet. Therefore, the airflow rate of the gas discharged from each outlet can be controlled with greater precision. As a result, even if the system is set to have an uneven distribution of airflow, it is possible to more reliably prevent excessive gas flow to the system with the highest airflow rate and adequately address the uneven distribution of airflow in each system.

[0013] Furthermore, the guide vanes allow for smooth gas flow from the inlet to the outlet, preventing turbulence and uneven flow within the box. This makes it more reliable to prevent malfunctions in pressure sensors, even if they are installed in the distribution duct near the outlet. Additionally, if pressure sensors used for inverter control of air conditioners are installed, it becomes more reliable to prevent a decrease in the accuracy of airflow control of the air conditioner.

[0014] In addition to the effects described above, the above-mentioned means 1 also provides the following effects. Specifically, the inflow gaps provided adjacent to the inlet and outlet edges of the guide vane allow gas to flow into the space behind the guide surface inside the box. This reduces the temperature difference between the space on the front side of the guide surface (the space through which the guided gas passes) and the space behind the guide surface, thereby more reliably preventing condensation from occurring inside the box. In other words, the above-mentioned means 1 allows for simple measures to be taken regarding condensation inside the box by simply providing inflow gaps.

[0015] Furthermore, when the size (width) of the inlet gap is d (mm) and the width of the guide vane is W (mm), it is preferable to make the size of the inlet gap d relatively small (for example, 100 mm or less) or to configure it so that d / w ≤ 1 / 10 in order to effectively prevent the generation of noise and turbulence. On the other hand, in order to allow sufficient gas to flow into the space behind the guide surface and more reliably prevent condensation from occurring inside the box, it is preferable to make the size of the inlet gap d relatively large (for example, 50 mm or more) or to configure it so that 1 / 20 ≤ d / w is satisfied.

[0016] Means 2. The branching chamber according to Means 1, characterized in that the guide vane is fixed to the box by welding.

[0017] One possible method for securing the guide vanes to the box is to use bolts and nuts. However, using bolts and nuts requires creating holes in the box for the bolts. Consequently, there is a risk that dust and other foreign matter may easily enter the box through these holes.

[0018] In this regard, according to the above-described method 2, the guide vanes are fixed to the box by welding. Therefore, there is no need to drill holes in the box, and foreign matter can be prevented from entering the box more reliably.

[0019] Furthermore, the configuration of the above-described means 2 is particularly suitable when at least one system is a clean room system (a system related to the gas sent toward the clean room).

[0020] Means 3. The box is located between two adjacent guide vanes along a direction orthogonal to the gas guiding direction by the guide surface, and has an inner wall portion capable of preventing the gas guided by one of the guide vanes from flowing toward the other guide vane side. The branch chamber according to means 1, characterized in that.

[0021] According to the above-described means 3, the inner wall portion can more reliably prevent the gas from flowing from one of the adjacent guide vanes to the other. Therefore, the air volume of the gas sent out from each outlet can be controlled more accurately.

[0022] Means 4. The branch chamber according to means 1, characterized in that it comprises a connecting portion connecting the edge portion of the guide vane and the box or the other guide vane.

[0023] According to the above-described means 4, the connecting portion connects the edge portion of the guide vane and the box or the other guide vane. Therefore, the vibration of the edge portion of the guide vane due to the flowing gas can be effectively suppressed, and the generation of abnormal noise and the improvement of durability can be achieved. In terms of more effectively suppressing the vibration of the guide vane, it is preferable that the connecting portion is in the shape of a plate.

[0024] Furthermore, the respective technical matters related to the above-described means may be appropriately combined. Therefore, for example, the technical matters related to the above-described means 3 or 4 may be combined with the technical matters related to the above-described means 2.

Brief Description of the Drawings

[0025] [Figure 1] It is a perspective view of a branch chamber to which an air supply duct and a distribution duct are connected. [Figure 2]This is a perspective view of the branching chamber, looking at the left wall and rear wall of the box body from above the branching chamber. [Figure 3] This is a perspective view of the branching chamber, looking at the left side wall and rear wall of the box body from below the branching chamber. [Figure 4] This is a perspective view of the branching chamber, looking at the right side wall and rear wall of the box body from below the branching chamber. [Figure 5] Figure 2 is a cross-sectional view along the JJ line. [Figure 6] Figure 2 is a cross-sectional view along the KK line. [Figure 7] A bottom view of the branching chamber. [Figure 8] Figure 2 is a cross-sectional view along line LL. [Figure 9] In another embodiment, this is a perspective view of the branching chamber when viewed from below the branching chamber, looking at the rear wall or right side wall of the box body, etc. [Figure 10] In another embodiment, this is a perspective view of the branching chamber when viewed from below the branching chamber, including the front wall and right side wall of the box body. [Figure 11] Figure 9 is a cross-sectional view along the MM line. [Modes for carrying out the invention]

[0026] An embodiment will be described below with reference to the drawings. The branching chamber 1 is a device for branching the gas (supply air) sent from the air conditioner into multiple systems and supplying them to each room. As shown in Figures 1 to 6, the branching chamber 1 comprises a box 2, a first guide vane 31, a second guide vane 32, a third guide vane 33, and a connecting part 4. In this embodiment, the first guide vane 31, the second guide vane 32, and the third guide vane 33 (hereinafter sometimes abbreviated as "guide vanes 31, 32, 33") each correspond to a "guide vane".

[0027] Box 2 comprises a box body 21 and an inner wall portion 22 fixed to the box body 21.

[0028] The box body 21 is a hollow rectangular parallelepiped and has one inlet 21a that opens downwards and a plurality of (three in this embodiment) first outlets 21x, second outlet 21y, and third outlets 21z (hereinafter sometimes abbreviated as "outlets 21x, 21y, 21z") that open horizontally. In this embodiment, the first outlet 21x, second outlet 21y, and third outlet 21z each correspond to "outlets".

[0029] In this embodiment, the gas entering from inlet 21a is branched into three systems, so three outlets 21x, 21y, and 21z are provided. However, the number of outlets will vary depending on the number of systems. Therefore, if the gas is branched into two systems, two outlets will be provided, and if the gas is branched into four systems, four outlets will be provided. Of course, the number of systems and outlets may be changed as appropriate. Also, in this embodiment, all three systems are cleanroom systems (systems related to gas sent towards a cleanroom), but at least one system may be a system other than a cleanroom system (a system related to gas sent towards a room other than a cleanroom).

[0030] The inlet 21a is located in the lower wall of the box body 21 and is an opening for taking in gas supplied from the air conditioner through the supply air duct Da (see Figure 1) into the box body 21. In this embodiment, as will be described later, the airflow rate of the gas to be discharged from the first outlet 21x is greater than the sum of the airflow rates of the gas to be discharged from the second and third outlets 21y and 21z. Therefore, the inlet 21a has a shape in which a rectangular opening Fa, which is relatively long and corresponds to the first outlet 21x, and rectangular openings Ba, which are relatively short and correspond to the second and third outlets 21y and 21z, are arranged in the front-to-back direction (see Figure 7). In Figure 7, the rectangular opening Fa is shown with a dotted pattern, and the rectangular opening Ba is shown with diagonal lines.

[0031] On the other hand, outlets 21x, 21y, and 21z are openings for sending the gas that has been branched inside box 2 to the outside of box 2. The gas sent out from each outlet 21x, 21y, and 21z is sent to each room via distribution ducts Dx, Dy, and Dz (see Figure 1).

[0032] Furthermore, the first exit 21x and the second exit 21y are located adjacent to each other on the left wall of box 2. On the other hand, the third exit 21z is located opposite the second exit 21y on the right wall of box 2.

[0033] In this embodiment, the airflow rate of the gas to be discharged from each outlet 21x, 21y, and 21z is, for example, 35100 m³ for the first outlet 21x. 3 The second exit is set to / h, and the distance to Exit 21y is 5800m. 3 The value is given as / h, and for the third exit 21z, it is 11100m 3 The value is set to / h. Therefore, there is a relatively large bias in the airflow rate of the gas to be discharged from each outlet 21x, 21y, and 21z. Although the airflow rate of the gas to be discharged from each outlet can be changed as appropriate, the present invention is particularly effective when there is a bias in the airflow rate of the gas to be discharged from each outlet (airflow rate of gas for each system) (for example, when the maximum airflow rate is 5 times or more the minimum airflow rate).

[0034] The inner wall portion 22 is a flat plate extending from the left and right and vertical directions of the box body 21, and has the function of dividing the space inside the box body 21 into the space on the first exit 21x side and the spaces on the second and third exits 21y and 21z sides. The inner wall portion 22 is welded and fixed to the left wall, right wall, and top wall of the box body 21, respectively, with its lower end surface facing the entrance 21a.

[0035] Furthermore, in this embodiment, as described above, the amount of air to be discharged from the first outlet 21x is greater than the sum of the amounts of air to be discharged from the second and third outlets 21y and 21z. Therefore, the inner wall portion 22 is located on the rear wall side of the box body 21, relative to the longitudinal center of the inlet 21a. For example, when the length of the inlet 21a is b (mm), the inner wall portion 22 is positioned at a distance of approximately 0.61b [= [(0.26 + 0.5) × 35100] / [(0.26 + 0.5) × 35100 + 5800 + 11100] × b] from the front edge of the inlet 21a (see Figure 7). The inner wall portion 22 divides the gas entering from the inlet 21a into the space on the first outlet 21x side and the spaces on the second and third outlets 21y and 21z side within the box body 21. An amount of gas corresponding to the airflow rate to be discharged from the first outlet 21x flows into the space on the first outlet 21x side, and an amount of gas corresponding to the sum of the airflow rates to be discharged from the second and third outlets 21y and 21z flows into the spaces on the second and third outlets 21y and 21z side.

[0036] Guide vanes 31, 32, and 33 are plate-shaped members located inside box 2, which smoothly guide the gas entering from inlet 21a to outlets 21x, 21y, and 21z.

[0037] The first guide vane 31 corresponds to the gas system discharged from the first outlet 21x and has a first guide surface 31s that extends from the inlet 21a to the first outlet 21x and guides the gas entering from the inlet 21a to the first outlet 21x. The end of the first guide surface 31s on the inlet 21a side extends in a direction perpendicular to the opening surface of the inlet 21a (i.e., the direction of gas inflow at the inlet 21a), while the end on the first outlet 21x side extends in a direction perpendicular to the opening surface of the first outlet 21x (i.e., the direction of gas discharge at the first outlet 21x). The first guide surface 31s also has a curved surface that curves smoothly from the end on the inlet 21a side to the end on the first outlet 21x side.

[0038] The second guide vane 32 corresponds to the gas system discharged from the second outlet 21y and has a second guide surface 32s that extends from the inlet 21a to the second outlet 21y and guides the gas entering from the inlet 21a to the second outlet 21y. The end of the second guide surface 32s on the inlet 21a side extends in a direction perpendicular to the opening surface of the inlet 21a, while the end on the second outlet 21y side extends in a direction perpendicular to the opening surface of the second outlet 21y (i.e., the direction of gas discharge at the second outlet 21y). The second guide surface 32s also has a curved surface that curves smoothly from the end on the inlet 21a side to the end on the second outlet 21y side.

[0039] The third guide vane 33 corresponds to the gas system discharged from the third outlet 21z and has a third guide surface 33s that extends from the inlet 21a to the third outlet 21z and guides the gas that enters from the inlet 21a to the third outlet 21z. The end of the third guide surface 33s on the inlet 21a side extends in a direction perpendicular to the opening surface of the inlet 21a, while the end on the third outlet 21z side extends in a direction perpendicular to the opening surface of the third outlet 21z (i.e., the direction of gas discharge at the third outlet 21z). The third guide surface 33s also has a curved surface that curves smoothly from the end on the inlet 21a side to the end on the third outlet 21z side. In this embodiment, the first guide surface 31s, the second guide surface 32s, and the third guide surface 33s (hereinafter sometimes abbreviated as "guide surfaces 31s, 32s, 33s") each correspond to a "guide surface".

[0040] Furthermore, position MP, which is midway between the edges on the inlet 21a side of the second and third guide vanes 32 and 33, is located at the left-right center of the box body 21 (the widthwise center of the rectangular opening Fa) (see Figure 7). Since the airflow rate of the gas to be discharged from the third outlet 21z is greater than the airflow rate of the gas to be discharged from the second outlet 21y, the rectangular opening Ba is configured such that the opening area corresponding to the third outlet 21z is larger than the opening area corresponding to the second outlet 21y. For example, when the width of the rectangular opening Fa is a (mm), the rectangular opening Ba is configured such that the right edge (the third outlet 21z side, which is the lower side of Figure 7) is located 0.5a away from position MP, while the left edge (the second outlet 21y side, which is the lower side of Figure 7) is located approximately 0.26a [= (0.5 × 5800 / 11100) × a] away from position MP.

[0041] In addition, the guide vanes 31, 32, and 33 are fixed to the box 2 by welding. More specifically, the first guide vane 31 is welded to the rear wall and inner wall portion 22 of the box body 21, while the second guide vane 32 and the third guide vane 33 are welded to the front wall and inner wall portion 22 of the box body 21, respectively. Therefore, the box 2 (box body 21) does not have holes that would be necessary to fix the guide vanes 31, 32, and 33 to the box 2 with bolts and nuts.

[0042] Furthermore, the first guide vane 31 and the second and third guide vanes 32 and 33 are adjacent to each other along a direction perpendicular to the direction in which the gas is guided by their respective guide surfaces 31s, 32s, and 33s, and the inner wall portion 22 is located between the first guide vane 31 and the second and third guide vanes 32 and 33. If the inner wall portion 22 were not present, the gas guided by the guide surfaces 31s, 32s, and 33s might flow from the first guide vane 31 towards the second and third guide vanes 32 and 33, or from the second and third guide vanes 32 and 33 towards the first guide vane 31. However, in this embodiment, since the inner wall portion 22 is located between the first guide vane 31 and the second and third guide vanes 32 and 33, it is possible to more reliably prevent such situations from occurring.

[0043] The connecting section 4 connects the edge portions of the guide vanes 31, 32, and 33 to the box 2 or other guide vanes 31, 32, and 33 (different from the aforementioned guide vanes 31, 32, and 33).

[0044] More specifically, the first guide vane 31 is connected to the inlet 21a side edge and box 2 (box body 21) and to the first outlet 21x side edge and box 2 by a plate-shaped connecting portion 4 (see Figure 5, etc.).

[0045] Furthermore, the second guide vane 32 is connected to the inlet 21a side edge of the third guide vane 33 on the inlet 21a side by a rod-shaped connecting part 4, and the second outlet 21y side edge is connected to the box 2 by a plate-shaped connecting part 4 (see Figure 6).

[0046] Furthermore, the third guide vane 33 is connected to the inlet 21a side edge of the second guide vane 32 by a rod-shaped connecting portion 4, and the third outlet 21z side edge is connected to the box 2 by a plate-shaped connecting portion 4.

[0047] In addition, inlet gaps 5 are provided at positions adjacent to the inlet 21a side and outlet 21x, 21y, 21z side edges of the guide vanes 31, 32, 33. The inlet gaps 5 are formed between the guide vanes 31, 32, 33 and the box 2, or between the edges of the guide vanes 31, 32, 33, and these inlet gaps 5 allow gas to flow into the spaces S1, S2, S3 (see Figures 5, 6) behind the guide surfaces 31s, 32s, 33s inside the box 2 (box body 21).

[0048] Furthermore, when the size (width) of the inlet gap 5 is d (mm) and the width of the guide vanes 31, 32, and 33 related to the inlet gap 5 is W (mm; see Figure 8), it is preferable to set the size d of the inlet gap 5 to 100 mm or less, or to configure it so that d / w ≤ 1 / 10, in order to effectively prevent the generation of noise and turbulence. On the other hand, in order to allow sufficient gas to flow into spaces S1, S2, and S3, it is preferable to set the size d of the inlet gap 5 to, for example, 50 mm or more, or to configure it so that 1 / 20 ≤ d / w.

[0049] As described in detail above, according to this embodiment, the guide vanes 31, 32, and 33 provided for each of the multiple systems extend from the inlet 21a side to the outlets 21x, 21y, and 21z sides, and are equipped with guide surfaces 31s, 32s, and 33s for guiding the gas entering from the inlet 21a to the outlets 21x, 21y, and 21z. Therefore, the airflow rate of the gas discharged from each outlet 21x, 21y, and 21z can be controlled with greater precision. As a result, even when the system is set to have an uneven distribution of airflow, as in this embodiment, it is possible to more reliably prevent excessive gas flow to the system with the largest airflow, and to adequately address the uneven distribution of airflow in each system.

[0050] Furthermore, the guide vanes 31, 32, and 33 allow for smooth guidance of the gas from the inlet 21a to the outlets 21x, 21y, and 21z, thereby preventing turbulence and uneven flow of the gas within the box 2 (box body 21). This makes it possible to more reliably prevent malfunctions of pressure sensors, even if pressure sensors are installed in the distribution ducts Dx, Dy, and Dz near the outlets 21x, 21y, and 21z. In addition, if pressure sensors used for inverter control of air conditioners are installed, it is possible to more reliably prevent a decrease in the accuracy of airflow control of the air conditioner.

[0051] In addition, the inflow gaps 5 provided adjacent to the inlet 21a side and outlet 21x, 21y, 21z side edges of the guide vanes 31, 32, 33 allow gas to flow into the spaces S1, S2, S3 on the back side of the guide surfaces 31s, 32s, 33s inside the box 2. This reduces the temperature difference between the space located on the front side of the guide surfaces 31s, 32s, 33s (the space through which the guided gas passes) and the spaces S1, S2, S3 located on the back side of the guide surfaces 31s, 32s, 33s, thereby more reliably preventing condensation from occurring inside the box 2. In other words, a simple method of providing inflow gaps 5 allows for easy countermeasures against condensation inside the box 2.

[0052] Furthermore, the guide vanes 31, 32, and 33 are fixed to the box 2 by welding, and there are no holes in the box 2 that would be necessary for fixing them with bolts and nuts. Therefore, it is possible to more reliably prevent foreign matter from entering the box 2.

[0053] Furthermore, the inner wall portion 22 more reliably prevents gas from flowing from one of the first guide vane 31 to the other of the second and third guide vanes 32 and 33. Therefore, the airflow rate of the gas delivered from each outlet 21x, 21y, and 21z can be controlled with greater precision.

[0054] Furthermore, because the connecting portion 4 is provided, vibrations at the edges of the guide vanes 31, 32, and 33 caused by the flowing gas can be effectively suppressed. This helps prevent the generation of abnormal noises and improves durability. In addition, by using the plate-shaped connecting portion 4, vibrations of the guide vanes 31, 32, and 33 can be suppressed more effectively.

[0055] Furthermore, the embodiment is not limited to the description above, and may be implemented as follows, for example. Of course, other applications and modifications not exemplified below are also possible.

[0056] (a) In the above embodiment, the branched gas is configured to be discharged from the left and right sides of the box 2, but the direction of gas discharge can be changed as appropriate. Therefore, for example, as shown in Figures 9 to 11, the configuration may be made so that gas is discharged from the left, right, and rear of the box 2 by changing the orientation of the first guide vane 31.

[0057] Furthermore, although the gas flows in from the bottom of box 2, the direction of gas inflow can also be changed as needed.

[0058] (b) In the above embodiment, box 2 is a rectangular parallelepiped that is long in the front-to-back direction, but the shape of box 2 may be changed as appropriate. For example, box 2 may be a rectangular parallelepiped with approximately equal lengths in the front-to-back and left-to-right directions (which forms a square shape when viewed from above). [Explanation of symbols]

[0059] 1...Branching chamber, 2...Box, 4...Connecting section, 5...Inlet gap, 21a...Inlet, 21x...First outlet (outlet), 21y...Second outlet (outlet), 21z...Third outlet (outlet), 22...Inner wall section, 31...First guide vane (guide vane), 31s...First guide surface (guide surface), 32...Second guide vane (guide vane), 32s...Second guide surface (guide surface), 33...Third guide vane (guide vane), 33s...Third guide surface (guide surface).

Claims

1. A branching chamber having a box formed with a gas inlet and a plurality of gas outlets, wherein the gas entering from the inlet is branched into a plurality of systems and discharged from a plurality of outlets, Within the box, a plate-shaped guide vane is provided for each system, extending from the inlet side to the outlet side, and having a guide surface for guiding the gas that enters from the inlet to the outlet; A branching chamber characterized by having an inlet gap provided at a position adjacent to the inlet and outlet edges of the guide vane, which allows gas to flow into the space behind the guide surface within the box.

2. The branching chamber according to claim 1, characterized in that the guide vane is fixed to the box by welding.

3. The branching chamber according to claim 1, wherein the box is located between two adjacent guide vanes in a direction perpendicular to the direction of gas guidance by the guide surface, and has an inner wall portion capable of preventing the gas guided by one guide vane from flowing toward the other guide vane.

4. The branching chamber according to claim 1, further comprising a connecting portion that connects the edge of the guide vane to the box or other guide vanes.

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