Laser chamber and method for manufacturing electronic devices

Abstract

This suppresses the return acoustic waves from reaching the discharge space. [Solution] The laser chamber comprises a container for containing laser gas, a pair of discharge electrodes, a fan for circulating the laser gas, a first guide 10d including a first surface 41 and a second surface 42 which guides the laser gas along the first surface and the second surface forms a first space A1 between itself and the inner surface of the container which narrows in a first direction toward the back, and a second guide 12d including a third surface 43 which guides the laser gas along the third surface toward the vicinity of the first guide.

Description

【Technical Field】 【0001】 The present disclosure relates to a laser chamber and a method for manufacturing an electronic device. 【Background Art】 【0002】 In recent years, in semiconductor exposure apparatuses, as semiconductor integrated circuits have been miniaturized and highly integrated, improvement in resolution has been demanded. For this reason, shortening of the wavelength of light emitted from an exposure light source has been promoted. For example, as a gas laser device for exposure, a KrF excimer laser device that outputs laser light with a wavelength of about 248 nm and an ArF excimer laser device that outputs laser light with a wavelength of about 193 nm are used. 【0003】 Further, excimer laser light output from KrF and ArF excimer laser devices has a pulse width of several 10 ns, and since the wavelengths are short at about 248 nm and about 193 nm, respectively, it may be used for direct processing of polymer materials, glass materials, and the like. Chemical bonds in polymer materials can be broken by excimer laser light having a photon energy higher than the bond energy. Therefore, non-thermal processing of polymer materials is possible with excimer laser light, and it is known that the processed shape becomes neat. Further, since glass, ceramics, etc. have a high absorption rate for excimer laser light, it is known that even materials that are difficult to process with visible and infrared laser light can be processed with excimer laser light. 【Prior Art Documents】 【Patent Documents】 【0004】 【Patent Document 1】 Japanese Patent Application Laid-Open No. 2007-208183 【Patent Document 2】 U.S. Patent Application Publication No. 2003 / 031225 【Patent Document 3】 Summary of U.S. Patent No. 5978405 【0005】 A laser chamber according to one aspect of the present disclosure comprises a container for containing laser gas, a pair of discharge electrodes, a fan for circulating the laser gas, a first guide including a first surface and a second surface for guiding the laser gas along the first surface, the second surface forming a first space between itself and the inner surface of the container that narrows in a first direction toward the back, and a second guide including a third surface for guiding the laser gas along the third surface toward the vicinity of the first guide. 【0006】 A method for manufacturing an electronic device according to one aspect of the present disclosure includes generating laser light with a discharge-excited gas laser apparatus, outputting the laser light to an exposure apparatus, and exposing a photosensitive substrate in the exposure apparatus to manufacture an electronic device. The apparatus comprises an optical resonator, a laser chamber located in the optical path of the optical resonator, and including a first guide having a first surface and a second surface, which guides the laser gas along the first surface and forms a first space between the second surface and the inner surface of the container, which narrows in a first direction toward the back, and a second guide having a third surface, which guides the laser gas along the third surface toward the vicinity of the first guide. [Brief explanation of the drawing] 【0007】 Some embodiments of this disclosure are described below, merely as examples, with reference to the accompanying drawings. [Figure 1] Figure 1 shows the configuration of the laser device in the comparative example. [Figure 2] Figure 2 shows the configuration of the laser chamber in the comparative example as viewed in the -Z direction. [Figure 3] Figure 3 shows a magnified view of the area near the boundary between the first guide and the inclined member in the comparative example. [Figure 4] Figure 4 shows a magnified view of the area near the boundary between the first guide and the inclined member in the first embodiment. [Figure 5] Figure 5 is a perspective view showing a portion of the first guide in the first embodiment. [Figure 6]Figure 6 shows a magnified view of the area near the boundary between the first guide and the inclined member in the second embodiment. [Figure 7] Figure 7 shows a magnified view of the area near the boundary between the first guide and the inclined member in the third embodiment. [Figure 8] Figure 8 shows a magnified view of the area near the boundary between the first guide and the inclined member in the fourth embodiment. [Figure 9] Figure 9 shows a magnified view of the area near the boundary between the first guide and the inclined member in the fifth embodiment. [Figure 10] Figure 10 shows the first and second virtual logarithmic spirals. [Figure 11] Figure 11 shows the configuration of the laser chamber in the fifth embodiment as viewed in the -Z direction. [Figure 12] Figure 12 shows the configuration of the exposure system. Embodiment 【0008】 <Contents> 1. Comparative Example 1.1 Configuration 1.2 Operation 2. Issues with the Comparative Example 3. Laser chamber 10 having a first space A1 between the first guide 10d and the inner surface of the container 19 3.1 Configuration 3.2 Effect 4. Laser chamber 10 with 10g of sound-absorbing material placed in the first space A1. 4.1 Configuration 4.2 Effect 5. Laser chamber 10 having a second space A2 located behind the first space A1. 5.1 Configuration 5.2 Effect 6. The angle between the second surface 42 and the inner surface of the container 19 changes depending on the position in the H direction in the laser chamber 10. 6.1 Configuration 6.2 Effect 7. Laser chamber 10h with a logarithmic spiral cross-section of the first surface 41 7.1 Configuration 7.2 Effect 8. Other 8.1 Method for manufacturing an electronic device 8.2 Laser control processor 30 8.3 Supplementary remarks 【0009】 Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The embodiments described below show some examples of the present disclosure and do not limit the content of the present disclosure. Also, not all of the configurations and operations described in each embodiment are essential as the configurations and operations of the present disclosure. Note that the same reference numerals are assigned to the same components, and redundant descriptions are omitted. 【0010】 1. Comparative example 1.1 Configuration FIG. 1 shows the configuration of the laser device 1 in the comparative example. The comparative example of the present disclosure is a form recognized by the applicant as being known only to the applicant, and is not a known example recognized by the applicant. 【0011】 The laser device 1 is a discharge-excited gas laser device capable of outputting laser light LB to the exposure device 100. The laser device 1 includes a laser chamber 10, a power supply device 13, a narrowbanding module 14, an output coupling mirror 15, a heat exchanger 26, and a laser control processor 30. The narrowbanding module 14 and the output coupling mirror 15 constitute an optical resonator. The laser chamber 10 includes windows 10a and 10b, first and second discharge electrodes 11a and 11b, and a container 19. The laser chamber 10 is arranged such that the windows 10a and 10b are located on the optical path of the optical resonator. The laser control processor 30 will be described later. 【0012】 The narrowbanding module 14 includes a prism 14a and a grating 14b. The prism 14a is arranged on the optical path of the light emitted from the window 10a. The grating 14b is arranged on the optical path of the light transmitted through the prism 14a. The output coupling mirror 15 is composed of a partial reflection mirror. 【0013】 The direction of propagation of the laser beam LB output from the output coupling mirror 15 is defined as the Z direction. The first and second discharge electrodes 11a and 11b each extend in the Z direction. The direction in which the first and second discharge electrodes 11a and 11b face each other is defined as the V direction or -V direction. The Z direction and the V direction are perpendicular to each other, and the direction perpendicular to both of these is defined as the H direction or -H direction. Figure 1 shows the configuration of the laser device 1 as seen in the -H direction. 【0014】 Figure 2 shows the configuration of the laser chamber 10 in a comparative example viewed in the -Z direction. The laser chamber 10 includes a container 19, which houses a first guide 10d, first and second discharge electrodes 11a and 11b, inclined members 12a to 12d, a cross-flow fan 21, a cooling section 25, and a guide section 28. The inclined member 12d corresponds to the second guide in this disclosure. The cross-flow fan 21 corresponds to the fan in this disclosure. 【0015】 The container 19 is filled with a laser gas containing, for example, argon or krypton as a rare gas, fluorine as a halogen gas, and neon as a buffer gas. Alternatively, it may be filled with a laser gas containing fluorine and a buffer gas. 【0016】 An opening is formed in a portion of the container 19, and this opening is sealed by an electrical insulating portion 20. This opening is sealed by a lid portion 18 covering the surface of the container 19 that includes the location of the opening from the outside of the container 19. The electrical insulating portion 20 supports the second discharge electrode 11b. Multiple conductive portions 20a are embedded in the electrical insulating portion 20. Each of the conductive portions 20a is electrically connected to the second discharge electrode 11b. A power supply unit 13 (see Figure 1) includes a charger (not shown) and is connected to the second discharge electrode 11b via the conductive portions 20a. The inclined members 12b and 12d each have the shape of a triangular prism and are fixed to the electrical insulating portion 20 so as to cover a portion of two sides of the second discharge electrode 11b, respectively. 【0017】 A return plate 10c is positioned inside the laser chamber 10. The first discharge electrode 11a is supported by the return plate 10c. The first discharge electrode 11a is electrically connected to ground potential via the return plate 10c and wiring (not shown). As shown in Figure 2, the return plate 10c has gaps on the depth side and the front side of the plane of Figure 1 for the laser gas to pass through. The inclined members 12a and 12c each have the shape of a triangular prism and are fixed to the return plate 10c so as to cover parts of two sides of the first discharge electrode 11a, respectively. 【0018】 The cross-flow fan 21 includes multiple blades 21b arranged around a rotating shaft 21a. The rotating shaft 21a is connected to a motor (not shown). 【0019】 The inclined members 12a and 12b are arranged to gradually narrow the laser gas flow path so as to efficiently guide the laser gas sent from the cross-flow fan 21 into the discharge space between the first and second discharge electrodes 11a and 11b. The inclined members 12c and 12d are arranged to gradually widen the laser gas flow path so as to efficiently guide the laser gas that has passed through the discharge space toward the guide section 28. 【0020】 The guide section 28 is fixed to the inclined member 12c so as to guide the laser gas that has passed between the inclined members 12c and 12d to the cooling section 25. 【0021】 The cooling section 25 includes a plurality of refrigerant pipes and heat dissipation fins arranged around each of the refrigerant pipes. Each of the refrigerant pipes is arranged so that its longitudinal direction extends in the Z direction. The refrigerant pipes are connected to the heat exchanger 26 via pipes 26a and 26b (see Figure 1). 【0022】 1.2 Operation The laser control processor 30 receives a target value for pulse energy E and a light emission trigger signal from the exposure apparatus 100. Based on the target value for pulse energy E, the laser control processor 30 transmits charging voltage setting data to the charger included in the power supply unit 13. The laser control processor 30 also transmits a trigger signal to the power supply unit 13 based on the light emission trigger signal. 【0023】 When the power supply unit 13 receives a trigger signal from the laser control processor 30, it generates a pulsed high voltage from the electrical energy stored in the charger and applies this high voltage between the first and second discharge electrodes 11a and 11b. 【0024】 When a high voltage is applied between the first and second discharge electrodes 11a and 11b, a discharge occurs between them. The energy of this discharge excites the laser medium in the laser chamber 10, causing it to transition to a higher energy level. When the excited laser medium subsequently transitions to a lower energy level, it emits light with a wavelength corresponding to the energy level difference. 【0025】 Light generated within the laser chamber 10 is emitted outside the laser chamber 10 through windows 10a and 10b. The light emitted from window 10a of the laser chamber 10 has its beam width expanded in a plane parallel to the HZ plane by the prism 14a and is then incident on the grating 14b. 【0026】 Light incident on the grating 14b is reflected by the multiple grooves of the grating 14b and diffracted in a direction corresponding to the wavelength of the light. By matching the incident angle of the light incident on the grating 14b with the diffraction angle of the diffracted light of the desired wavelength, the wavelength of the diffracted light returned from the grating 14b to the prism 14a is selected. The prism 14a reduces the beam width of the diffracted light returned from the grating 14b in a plane parallel to the HZ plane and returns that light to the laser chamber 10 through the window 10a. 【0027】 The output coupling mirror 15 transmits a portion of the light emitted from the window 10b of the laser chamber 10 and outputs it, while reflecting the other portion back into the laser chamber 10. 【0028】 In this way, the light emitted from the laser chamber 10 travels back and forth between the narrowband module 14 and the output coupling mirror 15. This light is amplified each time it passes through the discharge space between the first and second discharge electrodes 11a and 11b, and narrowed each time it is folded back by the narrowband module 14. The laser-oscillating and narrowed light is then output as laser light LB from the output coupling mirror 15 and incident on the exposure apparatus 100. 【0029】 When a motor (not shown) rotates the cross-flow fan 21, the laser gas flows and circulates inside the laser chamber 10, as indicated by the arrows in Figure 2. The discharge products generated from the laser gas excited by the discharge between the first and second discharge electrodes 11a and 11b are removed from the discharge space by the flow of laser gas before the next discharge. As a result, the discharge space and its vicinity become less contaminated with discharge products, which can stabilize the discharge. Repeated discharges generate compression waves in the laser gas, and these compression waves propagate inside the container 19 as acoustic waves. 【0030】 2. Issues with the Comparative Example Figure 3 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the comparative example. The first guide 10d has a first surface 41, and the inclined member 12d has a third surface 43. The inclined member 12d guides the laser gas along the third surface 43 toward the vicinity of the first guide 10d in the H direction. The first guide 10d guides the laser gas along the first surface 41 toward the cooling section 25. 【0031】 A gap exists between the container 19 and the electrical insulation part 20, and the V-direction end of this gap is sealed by the lid 18. The upstream end 10e of the first guide 10d and the downstream end 12e of the inclined member 12d are located at the -V-direction end of the gap between the container 19 and the electrical insulation part 20. The upstream end 10e is the upstream side of the laser gas flow, i.e., the -H-direction end, and the downstream end 12e is the downstream side of the laser gas flow, i.e., the H-direction end. 【0032】 The position of the first guide 10d is adjusted by inserting a shim (not shown) between the first guide 10d and the inner surface of the container 19 so that the gap and step between the first guide 10d and the inclined member 12d are minimized. However, due to the manufacturing precision issues and the need to pass wiring (not shown) connected to the return plate 10c, the first guide 10d and the inclined member 12d cannot completely cover the -V end of the gap between the container 19 and the electrical insulation part 20, leaving a small gap. Furthermore, the step cannot be completely eliminated. 【0033】 A portion of the acoustic waves propagating from the discharge space between the first and second discharge electrodes 11a and 11b is reflected in the gap or step between the first guide 10d and the inclined member 12d, and propagates radially through the inside of the container 19 as a return acoustic wave W with the location of the gap or step as a line sound source S. The reason that the sound source of the return acoustic wave W is a line sound source S is that the gap or step between the first guide 10d and the inclined member 12d extends in the Z direction and can be considered a uniform sound source in the Z direction. The return acoustic wave W may also include acoustic waves that are a portion of the acoustic waves propagating from the discharge space, enter the gap between the container 19 and the electrical insulation part 20, are diffusely reflected by the wall surface of the gap including the lid part 18, and propagate radially through the line sound source S. 【0034】 When the return acoustic wave W reaches the discharge space, the laser gas becomes denser within the discharge space, resulting in a non-uniform refractive index of the light. This can alter the light intensity distribution of the laser beam LB and degrade beam quality. The embodiments described below relate to suppressing the return acoustic wave W from reaching the discharge space. 【0035】 3. Laser chamber 10 having a first space A1 between the first guide 10d and the inner surface of the container 19 3.1 Configuration Figure 4 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the first embodiment. In the first embodiment, the first guide 10d includes a second surface 42 in addition to the first surface 41, and the second surface 42 forms a first space A1 between itself and the inner surface of the container 19, the size of which in the V direction narrows as it goes further in. The direction toward the back of the first space A1 is called the first direction, and the first direction is the direction away from the second discharge electrode 11b. The first direction is approximately the same as the H direction. 【0036】 The upstream end 10e of the first guide 10d is in a different position from the downstream end 12e of the inclined member 12d in a second direction perpendicular to the surface 44 on the inner surface of the container 19 that is in contact with the first space A1. The second direction is approximately the same as the V direction. As a result, the position of the line sound source S is slightly different from that of the comparative example, and is receded to the position of the gap between the container 19 and the inclined member 12d. 【0037】 It is desirable that the second surface 42 has a longer length in the H direction than surface 44. Furthermore, it is desirable that a portion of the first guide 10d and a portion of the inclined member 12d overlap each other when viewed in the second direction. 【0038】 The angle α1 between the second surface 42 and the surface 44 of the container 19 is greater than 0°, less than 90°, and different from 180° / N, where N is any natural number. 【0039】 The first space A1 is arranged such that the extension surface 43a of the third surface 43 passes through the first space A1. The angle α5 between the third surface 43 and the second surface 42 is greater than 0°, less than 90°, and different from 180° / N, where N is any natural number. The angle between the third surface 43 and the surface 44 of the container 19 is between 0° and 10°. 【0040】 Figure 5 is a perspective view showing a part of the first guide 10d in the first embodiment. Preferably, the first guide 10d has a plurality of grooves 10f on the second surface 42 that is in contact with the first space A1. Alternatively, it may have a plurality of grooves 10f on the inner surface 44 of the container 19 that is in contact with the first space A1. Preferably, the depth of the grooves 10f is one-quarter of the wavelength of the acoustic wave. The cross-sectional shape of the grooves 10f may be rectangular, triangular, or arc-shaped. 【0041】 3.2 Effect (1) According to the first embodiment, the laser chamber 10 includes a container 19 for containing laser gas, first and second discharge electrodes 11a and 11b, a cross-flow fan 21 for circulating laser gas, a first guide 10d, and an inclined member 12d. The first guide 10d includes a first surface 41 and a second surface 42, and guides the laser gas along the first surface 41. The second surface 42 forms a first space A1 between itself and the inner surface of the container 19, which narrows in a first direction toward the back. The inclined member 12d includes a third surface 43, and guides the laser gas along the third surface 43 toward the vicinity of the first guide 10d. 【0042】 According to this, even if there are gaps or steps between the container 19 and the inclined member 12d, the reflected acoustic waves W that are reflected by such gaps or steps can be reflected within the first space A1, delaying the timing of their return to the discharge space or attenuating the reflected acoustic waves W within the first space A1. This can suppress the reflected acoustic waves W from reaching the discharge space. 【0043】 (2) According to the first embodiment, the first direction toward the back of the first space A1 is the H direction toward away from the second discharge electrode 11b. 【0044】 According to this, it is possible to suppress the return of acoustic waves that enter the first space A1 from the discharge space back into the discharge space. 【0045】 (3) According to the first embodiment, the angle α1 between the second surface 42 and the surface 44 of the inner surface of the container 19 that is in contact with the first space A1 is greater than 0°, less than 90°, and different from 180° / N when N is any natural number. 【0046】 According to this, it is possible to avoid the acoustic wave entering the first space A1 from the discharge space being reflected N times and returning to the discharge space. 【0047】 (4) According to the first embodiment, the extended surface 43a of the third surface 43 passes through the first space A1. 【0048】 According to this, acoustic waves generated in the discharge space and reflected by the third surface 43 can enter the first space A1 and be attenuated. 【0049】 (5) According to the first embodiment, the angle α5 between the second surface 42 and the third surface 43 is greater than 0°, less than 90°, and different from 180° / N when N is any natural number. 【0050】 According to this, it is possible to avoid the acoustic wave being reflected N times by the third surface 43 and the second surface 42 and returning to the discharge space. 【0051】 (6) According to the first embodiment, the upstream end 10e of the first guide 10d in the direction of laser gas flow and the downstream end 12e of the inclined member 12d in the direction of laser gas flow are at different positions in a second direction perpendicular to the surface 44 of the inner surface of the container 19 that is in contact with the first space A1. 【0052】 According to this, it is possible to suppress the return of acoustic waves to the discharge space without making adjustments to minimize the gap between the first guide 10d and the inclined member 12d. 【0053】 (7) According to the first embodiment, the second surface 42 has a longer length in the first direction than the surface 44 of the inner surface of the container 19 that is in contact with the first space A1. 【0054】 According to this, the returning acoustic wave W reflected by the gap or step between the container 19 and the inclined member 12d is received by the second surface 42 and reflected within the first space A1, thereby delaying the timing of its return to the discharge space or attenuating it within the first space A1. 【0055】 (8) According to the first embodiment, a part of the first guide 10d and a part of the inclined member 12d are in positions that overlap each other when viewed in a second direction perpendicular to the surface 44 of the inner surface of the container 19 that is in contact with the first space A1. 【0056】 According to this, the reflected acoustic waves W, which are caused by gaps or steps between the container 19 and the inclined member 12d, can be more reliably received by the second surface 42. 【0057】 (9) According to the first embodiment, a plurality of grooves 10f are formed on either the second surface 42 or the surface 44 of the inner surface of the container 19 that is in contact with the first space A1. 【0058】 According to this, a phase difference corresponding to the depth of the groove 10f occurs in the acoustic waves reflected within the first space A1, causing the acoustic waves to cancel each other out and be attenuated. 【0059】 In other respects, the first embodiment is the same as the comparative example. 【0060】 4. Laser chamber 10 with 10g of sound-absorbing material placed in the first space A1. 4.1 Configuration Figure 6 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the second embodiment. In the second embodiment, sound-absorbing material 10g is placed in the first space A1 between the second surface 42 and the inner surface of the container 19. The sound-absorbing material 10g may have, for example, the shape of a triangular prism, and the entire or partial first space A1 may be filled with the sound-absorbing material 10g. Alternatively, the sound-absorbing material 10g may be placed so as to cover the entire or partial second surface 42 and surface 44. 【0061】 The material of the 10g sound-absorbing material may be foamed nickel or porous alumina. Both are less reactive with fluorine gas and therefore less prone to degradation. Furthermore, foamed nickel is superior in terms of sound absorption and processability, while porous alumina is an insulator, so it can suppress short circuits even when it is close to the second discharge electrode 11b. 【0062】 4.2 Effect (10) According to the second embodiment, 10g of sound-absorbing material is placed in the first space A1. 【0063】 According to this, by placing 10g of sound-absorbing material, the reflection of acoustic waves can be suppressed, and acoustic waves can be attenuated within the first space A1. Furthermore, by placing 10g of sound-absorbing material, the inflow of laser gas into the first space A1 can be suppressed, and gas stagnation can be suppressed. 【0064】 (11) In the second embodiment, the sound-absorbing material 10g may be arranged to cover either the second surface 42 or the surface 44 of the inner surface of the container 19 that is in contact with the first space A1. 【0065】 According to this, the reflection of acoustic waves within the first space A1 can be suppressed, and acoustic waves within the first space A1 can be attenuated. 【0066】 In other respects, the second embodiment is the same as the first embodiment. 【0067】 5. Laser chamber 10 having a second space A2 located behind the first space A1. 5.1 Configuration Figure 7 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the third embodiment. In the third embodiment, a second space A2 is formed between the second surface 42 and the inner surface of the container 19, further inside than the first space A1, and communicates with the first space A1. The second space A2 has a shape in which its size in the V direction increases as it moves away from the first space A1. 【0068】 In the second space A2, the angle α4 between the second surface 42 and the inner surface 45 of the container 19 that is in contact with the second space A2 is greater than or equal to 0°, less than 180°, and different from 180° / N, where N is any natural number. 【0069】 5.2 Effect (12) According to the third embodiment, the second surface 42 forms a second space A2 that communicates with the first space A1 between itself and the inner surface of the container 19, further inside than the first space A1. 【0070】 According to this, it is possible to confine the acoustic waves in the second space A2 and suppress their return to the discharge space. 【0071】 (13) According to the third embodiment, the second space A2 has a shape that widens as it moves away from the first space A1. 【0072】 According to this, it is possible to suppress the return of acoustic waves that enter the second space A2 to the first space A1. 【0073】 In other respects, the third embodiment is the same as the first embodiment. Alternatively, in the third embodiment, sound-absorbing material may be placed in either or both of the first space A1 and the second space A2. 【0074】 6. The angle between the second surface 42 and the inner surface of the container 19 changes depending on the position in the H direction in the laser chamber 10. 6.1 Configuration Figure 8 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the fourth embodiment. 【0075】 In the fourth embodiment, the angles α1 and α2 between the second surface 42 and surface 44 in the first space A1 become smaller as you move further into the first space A1. For example, the angle α2 at a position far from the second discharge electrode 11b is smaller than the angle α1 at a position close to the second discharge electrode 11b in the first space A1. Alternatively, the angle between the second surface 42 and surface 44 may change in multiple steps, or the second surface 42 may be a curved surface, and the angle between the second surface 42 and surface 44 may change continuously. 【0076】 In the fourth embodiment, the angles α3 and α4 between the second surface 42 and surface 45 in the second space A2 increase as they move away from the first space A1. For example, the angle α4 at a position far from the first space A1 is larger than the angle α3 at a position in the second space A2 closer to the first space A1. Alternatively, the angle between the second surface 42 and surface 45 may change in multiple steps, or the second surface 42 may be a curved surface, and the angle between the second surface 42 and surface 45 may change continuously. 【0077】 6.2 Effect (14) According to the fourth embodiment, the angles α1 and α2 formed by the second surface 42 and the surface 44 of the inner surface of the container 19 that is in contact with the first space A1 become smaller along the first direction toward the back of the first space A1. 【0078】 According to this, by making the angle smaller as you go further into the first space A1, acoustic waves can be attenuated within the first space A1. 【0079】 (15) According to the fourth embodiment, the second surface 42 forms a second space A2 that communicates with the first space A1 between itself and the inner surface of the container 19, further inside than the first space A1. The angles α3 and α4 between the second surface 42 and the inner surface 45 of the container 19 that is in contact with the second space A2 increase as the distance from the first space A1 increases. 【0080】 According to this, it is possible to suppress the return of acoustic waves that enter the second space A2 to the first space A1. 【0081】 In other respects, the fourth embodiment is the same as the third embodiment. 【0082】 7. Laser chamber 10h with a logarithmic spiral cross-section of the first surface 41 7.1 Configuration Figure 9 shows a magnified view of the area near the boundary between the first guide 10d and the inclined member 12d in the fifth embodiment. In the fifth embodiment, when viewed in cross-section with a plane perpendicular to the Z direction, the shape of the first surface 41 of the first guide 10d substantially coincides with the shape of the logarithmic spiral L0. Consisting substantially with the shape of the logarithmic spiral L0 means extending between the following first and second virtual logarithmic spirals L1 and L2. 【0083】 Figure 10 shows the first and second virtual logarithmic spirals L1 and L2. Each of the first and second virtual logarithmic spirals L1 and L2 is a curve whose curvature decreases along the direction of laser gas flow. The first virtual logarithmic spiral L1 is a virtual logarithmic spiral in which the angle φ1 at which the line from the origin O intersects with the tangent to the first virtual logarithmic spiral L1 is 103°. The second virtual logarithmic spiral L2 is a virtual logarithmic spiral in which the angle φ2 at which the line from the origin O intersects with the tangent to the second virtual logarithmic spiral L2 is 96°. In the first and second virtual logarithmic spirals L1 and L2, the angles φ1 and φ2 are different from each other, but the origin O is common. 【0084】 Figure 11 shows the configuration of the laser chamber 10h in the fifth embodiment as viewed in the -Z direction. Not only the first surface 41, but also the inner surface 19a of the container 19 that constitutes the gas flow path between the first guide 10d and the cooling section 25 may be located between the first and second virtual logarithmic spirals L1 and L2. 【0085】 Referring again to Figure 9, it is desirable that not only the first surface 41, but also at least a portion of the third surface 43 of the inclined member 12d, is located between the first and second virtual logarithmic spirals L1 and L2. Furthermore, it is desirable that not only the first surface 41, but also the discharge surface 11c of the second discharge electrode 11b, which is close to the inclined member 12d, is located between the first and second virtual logarithmic spirals L1 and L2. The discharge surface 11c refers to the surface facing the first discharge electrode 11a. 【0086】 7.2 Effect (16) According to the fifth embodiment, when the laser chamber 10 is viewed in cross-section with a VH plane perpendicular to both the first surface 41 and the second surface 42, the first surface 41 extends between the first virtual logarithmic spiral L1 and the second virtual logarithmic spiral L2. The curvature of the first virtual logarithmic spiral L1 decreases along the direction of laser gas flow, and the angle φ1 at which the line from the origin O intersects with the tangent to the first virtual logarithmic spiral L1 is 103°. The curvature of the second virtual logarithmic spiral L2 decreases along the direction of laser gas flow, and the angle φ2 at which the line from the origin O intersects with the tangent to the second virtual logarithmic spiral L2 is 96°. 【0087】 According to this, by extending the first surface 41 between first and second virtual logarithmic helices L1 and L2, whose curvature decreases along the direction of laser gas flow, it is possible to suppress the occurrence of laser gas stagnation near the first surface 41, which would increase the flow resistance. 【0088】 (17) According to the fifth embodiment, at least a portion of the third surface 43 is located between the first virtual logarithmic spiral L1 and the second virtual logarithmic spiral L2. 【0089】 According to this, at least a portion of the third surface 43 is located between the first and second virtual logarithmic spirals L1 and L2, so that the stagnation of laser gas in the gas flow path from the vicinity of the third surface 43 to the vicinity of the first surface 41 can be suppressed. 【0090】 (18) According to the fifth embodiment, the discharge surface 11c of the second discharge electrode 11b, which is closer to the inclined member 12d among the first and second discharge electrodes 11a and 11b, is located between the first virtual logarithmic spiral L1 and the second virtual logarithmic spiral L2. 【0091】 According to this, since the discharge surface 11c of the second discharge electrode 11b is located between the first and second virtual logarithmic spirals L1 and L2, it is possible to suppress the occurrence of laser gas stagnation in the gas flow path from the vicinity of the second discharge electrode 11b to the vicinity of the first surface 41. 【0092】 In other respects, the fifth embodiment is the same as the first embodiment. Alternatively, in the fifth embodiment, a second space A2 may be provided, or sound-absorbing material 10g may be placed in the first space A1 or the second space A2, or the angle between the second surface 42 and surface 44 or 45 may be changed according to the position in the H direction. 【0093】 8. Other 8.1 Method for manufacturing electronic devices Figure 12 shows the configuration of the exposure system. The exposure system includes a laser device 1 and an exposure apparatus 100. The laser device 1 is configured to output laser light LB toward the exposure apparatus 100. 【0094】 The exposure apparatus 100 includes an illumination optical system 50 and a projection optical system 51. The illumination optical system 50 illuminates the reticle pattern of a reticle (not shown) placed on a reticle stage RT with laser light LB incident from a laser apparatus 1. The projection optical system 51 reduces and projects the laser light LB that has passed through the reticle onto a workpiece (not shown) placed on a workpiece table WT to form an image. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with photoresist. 【0095】 The exposure apparatus 100 exposes the workpiece to a laser beam LB that reflects the reticle pattern by synchronously moving the reticle stage RT and the workpiece table WT in parallel. After transferring the reticle pattern to the semiconductor wafer through the exposure process described above, an electronic device can be manufactured by going through several processes. 【0096】 8.2 Laser control processor 30 The laser control processor 30 may be physically configured in hardware form to perform the various processes included in this disclosure. For example, the laser control processor 30 may be a computer including a memory storing a control program that defines the various processes, and a processing unit that executes the control program. The control program may be stored in a single memory, or it may be stored in multiple physically separate memories, and the various processes may be defined by the control program as a collection of these memories. The processing unit may be a general-purpose processing unit such as a CPU, or a purpose-specific processing unit such as a GPU. 【0097】 Furthermore, the laser control processor 30 may be programmed in software form to perform the various processes included in this disclosure. For example, the laser control processor 30 may have functions for performing the various processes implemented in a dedicated device such as an ASIC or a programmable device such as an FPGA. 【0098】 The various processes included in this disclosure may be performed by one computer, one dedicated device, or one programmable device, or by the cooperation of multiple computers, multiple dedicated devices, or multiple programmable devices located physically separately. The various processes may be performed by at least two combinations of one or more computers, one or more dedicated devices, and one or more programmable devices. 【0099】 8.3 Supplement The above description is intended to be illustrative, not restrictive. Therefore, it will be apparent to those skilled in the art that modifications can be made to the embodiments of this disclosure without departing from the claims. It will also be apparent to those skilled in the art that the embodiments of this disclosure can be used in combination. 【0100】 Terms used throughout this specification and the claims should be interpreted as "non-limiting" unless otherwise specified. For example, terms such as "includes," "have," "equip," and "possess" should be interpreted as "not excluding the existence of components other than those described." Also, the modifier "one" should be interpreted as "at least one" or "one or more." Furthermore, the term "at least one of A, B, and C" should be interpreted as "A," "B," "C," "A+B," "A+C," "B+C," or "A+B+C." In addition, it should be interpreted as including combinations of these with anything other than "A," "B," and "C."

Claims

[Claim 1] A container for containing laser gas, A pair of discharge electrodes, A fan for circulating the laser gas, A first guide comprising a first surface and a second surface, which guides the laser gas along the first surface and forms a first space between the second surface and the inner surface of the container, which narrows in a first direction toward the back. A second guide, which includes a third surface, guides the laser gas along the third surface toward the vicinity of the first guide, A laser chamber equipped with [a specific feature / equipment]. [Claim 2] A laser chamber according to claim 1, The first direction is the direction away from the discharge electrode. Laser chamber. [Claim 3] A laser chamber according to claim 1, The angle between the second surface and the surface of the inner surface of the container that is in contact with the first space is greater than 0°, less than 90°, and different from 180° / N, where N is any natural number. Laser chamber. [Claim 4] A laser chamber according to claim 1, The extension of the third surface passes through the first space, Laser chamber. [Claim 5] A laser chamber according to claim 4, The angle between the second surface and the third surface is greater than 0°, less than 90°, and different from 180° / N, where N is any natural number. Laser chamber. [Claim 6] A laser chamber according to claim 1, The upstream end of the first guide in the direction of laser gas flow and the downstream end of the second guide in the direction of laser gas flow are at different positions in a second direction perpendicular to the surface of the inner surface of the container that is in contact with the first space. Laser chamber. [Claim 7] A laser chamber according to claim 1, The second surface has a longer length in the first direction than the surface of the inner surface of the container that is in contact with the first space. Laser chamber. [Claim 8] A laser chamber according to claim 1, The first guide and the second guide are positioned to overlap each other when viewed in a second direction perpendicular to the surface of the inner surface of the container that is in contact with the first space. Laser chamber. [Claim 9] A laser chamber according to claim 1, Multiple grooves are formed on either the second surface or the inner surface of the container that is in contact with the first space. Laser chamber. [Claim 10] A laser chamber according to claim 1, Sound-absorbing material is placed in the first space. Laser chamber. [Claim 11] A laser chamber according to claim 10, The sound-absorbing material is arranged to cover either the second surface or the inner surface of the container that is in contact with the first space. Laser chamber. [Claim 12] A laser chamber according to claim 1, The second surface, located further inside than the first space, forms a second space communicating with the first space between itself and the inner surface of the container. Laser chamber. [Claim 13] A laser chamber according to claim 12, The second space has a shape that widens as it moves away from the first space. Laser chamber. [Claim 14] A laser chamber according to claim 1, The angle between the second surface and the surface of the inner surface of the container that is in contact with the first space decreases along the first direction of the first space. Laser chamber. [Claim 15] A laser chamber according to claim 1, The second surface, located further inside than the first space, forms a second space communicating with the first space between itself and the inner surface of the container. The angle between the second surface and the surface of the inner surface of the container that is in contact with the second space increases as it moves away from the first space. Laser chamber. [Claim 16] A laser chamber according to claim 1, When the laser chamber is viewed in cross-section from a plane perpendicular to both the first and second surfaces, the first surface is, A first virtual logarithmic spiral whose curvature decreases along the flow direction, wherein the angle at which a straight line from the origin intersects the tangent to the first virtual logarithmic spiral is 103°, A second virtual logarithmic spiral whose curvature decreases along the flow direction, wherein the angle at which the straight line from the origin intersects the tangent line of the second virtual logarithmic spiral is 96°, Extending between, Laser chamber. [Claim 17] A laser chamber according to claim 16, At least a portion of the third surface is located between the first virtual logarithmic spiral and the second virtual logarithmic spiral, Laser chamber. [Claim 18] A laser chamber according to claim 16, The discharge surface of one of the discharge electrodes, the one closer to the second guide, is located between the first virtual logarithmic spiral and the second virtual logarithmic spiral. Laser chamber. [Claim 19] Optical resonators and, A laser chamber according to claim 1, located in the optical path of the optical resonator, A discharge-excited gas laser device equipped with the following features. [Claim 20] A method for manufacturing electronic devices, A container for containing laser gas, A pair of discharge electrodes, A fan for circulating the laser gas, A first guide comprising a first surface and a second surface, which guides the laser gas along the first surface and forms a first space between the second surface and the inner surface of the container, which narrows in a first direction toward the back. A second guide, which includes a third surface, guides the laser gas along the third surface toward the vicinity of the first guide, A laser chamber including, A discharge-excited gas laser device equipped with the following generates laser light: The laser light is output to the exposure apparatus, To manufacture the aforementioned electronic device, the laser light is exposed onto a photosensitive substrate in the exposure apparatus. A method for manufacturing electronic devices, including the following.

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