A high-power excimer laser with low maintenance cost
By placing the laser resonator outside the laser discharge cavity and replacing the cavity end with an ultraviolet lens, the problem of easy contamination of the laser resonator is solved, achieving low maintenance costs and efficient optical path debugging, and extending the service life of the laser.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN SHENGFANG TECH CO LTD
- Filing Date
- 2025-05-19
- Publication Date
- 2026-05-29
AI Technical Summary
The laser resonator of existing high-power excimer lasers is susceptible to contamination by pollutants, resulting in high maintenance costs. Furthermore, the optical parameters are difficult to measure and adjust quickly, leading to increased operating costs.
The design employs a split structure, placing the laser resonator outside the laser discharge cavity. Low-cost ultraviolet lenses are used to replace the cavity end, allowing for disassembly for cleaning or replacement when contaminated. The laser resonator angle can be independently adjusted using optical path tuning methods.
It reduces the maintenance cost of lasers, extends the service life of laser resonators, improves the efficiency of optical path debugging, and reduces maintenance time and material costs.
Smart Images
Figure CN224305149U_ABST
Abstract
Description
[Technical Field]
[0001] This utility model relates to the field of excimer lasers, specifically a high-power excimer laser with low maintenance costs. [Background Technology]
[0002] A high-power excimer laser is a type of laser capable of generating high-energy pulsed ultraviolet light, widely used in industrial, medical, and scientific research fields. Its characteristics include high output power, short wavelength, and high pulse energy. A high-power excimer laser has resonators mounted at both ends; one resonator undergoes total internal reflection, while the other partially reflects the light to output the laser beam.
[0003] During the operation of a high-power excimer laser, the following contaminants are mainly present: 1. Halogen gases in the working gas react with electrode and cavity materials to generate solid or gaseous contaminants; 2. During discharge, the electrode surface is bombarded by high-energy ions and electrons, leading to corrosion and material spalling, generating particulate contaminants; 3. During high-power operation of the laser, localized high temperatures cause temperature changes that induce thermal stress in the material, leading to microcracks and spalling, generating particulate contaminants. Generally, the laser resonator also serves as part of the laser discharge cavity. The laser discharge cavity and the laser resonators at both ends together form the chamber filled with the working gas. The laser resonators are in direct contact with the working gas, and contaminants adhere to their surface during operation. Therefore, frequent cleaning and wiping of the laser resonators are necessary. However, laser resonators are expensive, and their surface optical coatings cannot withstand repeated cleaning and wiping. Damage caused by wiping alters the optical parameters of the laser resonator, and after repeated wiping, the laser resonator can no longer meet the parameter range required for high-power excimer laser operation. Furthermore, the transmittance and reflectance parameters of laser resonators have strict requirements, making rapid measurement difficult. Even after repeated cleaning, it's hard to determine on-site whether the laser can still be used, necessitating replacement of the expensive resonator and significantly increasing operating costs. Moreover, replacing the resonator requires readjusting the lens angle, adding to the time and cost of maintenance. For lasers used in large-scale industrial applications, reducing maintenance and operating costs is a crucial issue that urgently needs to be addressed. [Utility Model Content]
[0004] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a high-power excimer laser with low maintenance costs. This laser adopts a split structure, with the first and second laser resonators positioned on the outer sides of the laser discharge cavity. This avoids contact between the expensive first and second laser resonators and the internal environment of the laser discharge cavity, eliminating contamination of the first and second laser resonators by internal pollutants and greatly extending their service life. Furthermore, the positions on the cavity where the first and second laser resonators would normally be installed are replaced with high-transmittance ultraviolet (UV) lenses. These UV lenses are inexpensive and can be easily disassembled for cleaning or replacement after contamination, significantly reducing the laser's maintenance costs.
[0005] This utility model is achieved through the following technical solution:
[0006] A low-maintenance, high-power excimer laser includes a frame, within which a laser discharge cavity is provided. The laser discharge cavity includes a cavity body, with detachable lenses at both ends of the cavity body. The lenses and the cavity body form a sealed space for filling with a working gas. Electrodes for exciting the working gas are provided within the cavity body. The frame also includes a first adjustment seat and a second adjustment seat located on both sides of the cavity body. The first adjustment seat has a first laser resonator plate spaced apart from and opposite to the lens on one side of the cavity body, and the second adjustment seat has a second laser resonator plate spaced apart from and opposite to the lens on the other side of the cavity body.
[0007] The aforementioned light-transmitting lens is an ultraviolet lens.
[0008] The transmittance of the ultraviolet lens is greater than or equal to 96%.
[0009] The cavity is also equipped with a pre-ionizer.
[0010] The debugging method for the optical path of the aforementioned high-power excimer laser includes the following steps:
[0011] S1. Install a first aperture and a second aperture that are spaced apart from each other at a reference position on the frame;
[0012] S2. Prepare to test the light source. Sequentially set the third aperture, the first reflector, and the second reflector on the light transmission path of the test light source. The third aperture is set at the light source emission point of the test light source.
[0013] S3. Turn on the debugging light source and let the light pass through the third aperture. Then adjust the position of the first and second reflectors so that the light passes through the center of the first and second apertures. At this time, the direction of the light path passing through the center of the first and second apertures is the light path transmission direction of the excimer laser that is required.
[0014] S4. Remove the first and second apertures, install the fourth aperture at the lens position on one side of the laser discharge cavity, and install the fifth aperture at the lens position on the other side of the laser discharge cavity. Adjust the position of the laser discharge cavity so that the light from the debugging light source passes through the center of the fourth and fifth apertures. Then fix the position of the laser discharge cavity.
[0015] S5. Remove the fourth and fifth aperture stops;
[0016] S6. Set a first adjustment seat and a second adjustment seat on both sides of the laser discharge cavity. Install a sixth aperture on the first adjustment seat and a seventh aperture on the second adjustment seat. Adjust the positions of the first adjustment seat and the second adjustment seat so that the light from the debugging light source passes through the center of the sixth aperture and the seventh aperture. Then fix the positions of the first adjustment seat and the second adjustment seat.
[0017] S7. Remove the sixth and seventh apertures;
[0018] S8. Install the first laser resonator and the second laser resonator on the first adjustment seat and the second adjustment seat. Adjust the angle of the first laser resonator and the second laser resonator so that the light emitted from the debugging light source is reflected at the second laser resonator and the first laser resonator and presents two identifiable light spots on the third aperture. Continue to adjust the angle of the first laser resonator and the second laser resonator until both light spots are located at the center of the third aperture.
[0019] The arrangement of the first and second reflectors enables the light emitted from the adjustment light source to form a first and a second optical path that are parallel to each other. In steps S1 to S8, the first aperture, the second aperture, the laser discharge cavity, the fourth aperture, the fifth aperture, the first adjustment seat, and the second adjustment seat are arranged along the second optical path.
[0020] Compared with the prior art, the present invention has the following advantages:
[0021] 1. This utility model adopts a split structure design for the discharge cavity and laser resonator of a high-power excimer laser. The laser discharge cavity includes a cavity body and two transparent mirrors at both ends for sealing. The first laser resonator and the second laser resonator are respectively placed on both sides of the outside of the laser discharge cavity. The split structure avoids the expensive first and second laser resonators from coming into contact with the internal environment of the laser discharge cavity, thereby eliminating the contamination of the first and second laser resonators by contaminants inside the laser discharge cavity. The transparent mirrors at both ends of the cavity body can be made of ultraviolet lenses with a transmittance of ≥96%, which are inexpensive and can be disassembled for cleaning or replacement at any time after being contaminated, greatly reducing the maintenance cost of the laser.
[0022] 2. The high transmittance ultraviolet lenses at both ends of the cavity of this utility model have a transmittance of ≥96%, which are cheaper than laser resonators. At the same time, the only key parameter of the ultraviolet lens is the transmittance of light at the corresponding wavelength, which can be quickly measured using an ultraviolet spectrophotometer. Therefore, the degree of damage after multiple wipes and whether it can still be used can be quickly judged on site, reducing the maintenance cost of the laser.
[0023] 3. A method for debugging the optical path of a high-power excimer laser with low maintenance costs: First, the required optical path direction of the excimer laser is determined by installing the first and second apertures at the reference positions. Then, the position of the laser discharge cavity is determined by the fourth and fifth apertures. Next, the positions of the first adjustment seat for the first laser resonator and the second adjustment seat for the second laser resonator are determined by the sixth and seventh apertures. Finally, the angles of the first and second laser resonators are adjusted based on the position of the reflected light spot on the third aperture after being reflected by the first and second laser resonators. The entire debugging principle is ingenious, and the angles of the first and second laser resonators can be adjusted independently, greatly improving debugging efficiency. [Attached Image Description]
[0024] Figure 1 This is a schematic diagram of the low-maintenance, high-power excimer laser structure of this utility model;
[0025] Figure 2 This is one of the schematic diagrams illustrating the optical path debugging method of this utility model;
[0026] Figure 3 Schematic diagram of the optical path debugging method of this utility model (Part 2);
[0027] Figure 4 Schematic diagram of the optical path debugging method of this utility model (Part 3);
[0028] Figure 5 The fourth step in the debugging method of the optical path of this utility model.
Detailed Implementation Methods
[0029] The present invention will be further described below with reference to the accompanying drawings:
[0030] like Figure 1As shown, a low-maintenance, high-power excimer laser includes a frame 100. A laser discharge cavity 4 is housed within the frame 100. The laser discharge cavity 4 includes a cavity body 41. Light transmission mirrors 42 are detachably mounted at both ends of the cavity body 41. The light transmission mirrors 42 are ultraviolet lenses with a transmittance greater than or equal to 96%. The light transmission mirrors 42 and the cavity body 41 form a sealed space 43 for filling with working gas. Electrodes 44 for exciting the working gas are located within the cavity body 41. A pre-ionizer 45 is also located within the cavity body 41. A first adjustment seat 5 and a second adjustment seat 6 are located on both sides of the cavity body 41. The first adjustment seat 5 has a first laser resonator 51 positioned opposite and spaced from the light transmission mirror 42 on one side of the cavity body 41. The second adjustment seat 6 has a second laser resonator 52 positioned opposite and spaced from the light transmission mirror 42 on the other side of the cavity body 41. The ultraviolet (UV) lenses are detachably mounted at both ends of the cavity 41, forming a sealed chamber with the cavity 41. The first laser resonator 51 and the second laser resonator 52 are located on both sides outside the laser discharge cavity 4 and are opposite to the corresponding UV lenses. This avoids contaminants generated during laser operation from contaminating the expensive first laser resonator 51 and the second laser resonator 52. The contaminated UV lenses can be wiped clean. Even if wiping causes changes in their optical parameters, they can be quickly measured to determine whether they can continue to be used. Moreover, the cost of UV lenses is lower than that of resonator lenses. If the UV lenses reach the point where they need to be replaced, they can be replaced at any time, which greatly reduces the maintenance cost of the excimer laser.
[0031] like Figures 2 to 5 As shown, the debugging method for the optical path of the aforementioned high-power excimer laser includes the following steps:
[0032] S1. Install a first aperture 71 and a second aperture 72 spaced apart from each other at a reference position on the frame;
[0033] S2. Prepare the debugging light source 1. The debugging light source 1 is a green light source that can partially penetrate and partially reflect on the first laser resonator 51 and the second laser resonator 52. A third aperture 73, a first reflector 81 and a second reflector 82 are set sequentially on the light transmission path of the debugging light source 1. The third aperture 73 is set at the light source emission point of the debugging light source 1 to ensure that the light emitted from the debugging light source 1 can pass through the central hole of the third aperture 73. The setting of the first reflector 81 and the second reflector 82 makes the light emitted from the debugging light source 1 form a first debugging optical path 11 and a second debugging optical path 12 that are parallel to each other.
[0034] S3. Turn on the debugging light source 1 and let the light pass through the third aperture 73. Then adjust the position of the first reflector 81 and the second reflector 82 so that the light from the debugging light source 1 passes through the center of the first aperture 71 and the second aperture 72. At this time, the direction of the light path passing through the center of the first aperture 71 and the second aperture 72 is the light path transmission direction of the excimer laser that is required.
[0035] S4. Remove the first aperture 71 and the second aperture 72. Install the fourth aperture 74 at the position of the light transmission mirror 42 on one side of the laser discharge cavity 4. Install the fifth aperture 75 at the position of the light transmission mirror 42 on the other side of the laser discharge cavity 4. The installation method of the fourth aperture 74 and the fifth aperture 75 is not limited. It is preferable to open slots at both ends of the cavity 41. The fourth aperture 74 and the fifth aperture 75 are snapped and fixed with the slots. Then adjust the position of the laser discharge cavity 4 until the light from the adjustment light source 1 passes through the center of the fourth aperture 74 and the fifth aperture 752, and then fix the position of the laser discharge cavity 4.
[0036] S5. Remove the fourth aperture 74 and the fifth aperture 75 from the cavity 41;
[0037] S6. A first adjustment seat 5 and a second adjustment seat 6 are set on both sides of the laser discharge cavity 4. A sixth aperture 76 is installed on the first adjustment seat 5 and a seventh aperture 77 is installed on the second adjustment seat 6. The sixth aperture 76 and the first adjustment seat 5 and the seventh aperture 77 and the second adjustment seat 6 can also be fixed by snap-fit. Then, adjust the positions of the first adjustment seat 5 and the second adjustment seat 6 until the light from the debugging light source 1 passes through the center of the sixth aperture 76 and the seventh aperture 77, and then fix the positions of the first adjustment seat 5 and the second adjustment seat 6.
[0038] S7. Remove the sixth aperture 76 and the seventh aperture 77;
[0039] S8. Install the first laser resonator 51 and the second laser resonator 52 on the first adjusting seat 5 and the second adjusting seat 6, and adjust their angles. The light emitted from the debugging light source 1 is partially reflected by the first laser resonator 51 and the second laser resonator 52. Since the distances between the first laser resonator 51 and the second laser resonator 52 and the debugging light source 1 are different, in this embodiment, the distance between the first laser resonator 51 and the debugging light source 1 is closer, and the distance between the second laser resonator 52 and the debugging light source 1 is farther. Therefore, the light reflected by the first laser resonator 51 is reflected by the second reflecting mirror 82 and the first reflecting mirror 81. Then, a small, bright spot is formed on the third aperture 73. The light reflected from the second laser resonator 52 passes through the laser discharge cavity 4 and the first laser resonator 51, and is reflected by the second mirror 82 and the first mirror 81 to form a larger, slightly blurry spot on the third aperture 73. That is, two identifiable spots are formed on the third aperture 73. The angles of the first laser resonator 51 and the second laser resonator 52 are adjusted until the two spots are located at the center of the third aperture 73. At this time, the angles of the first laser resonator 51 and the second laser resonator 52 are adjusted, and the optical path of the entire excimer laser is also adjusted.
[0040] The debugging principle of this optical path debugging method is ingenious. First, the design optical path direction of the excimer laser is determined by the first aperture 71 and the second aperture 72 at the reference position. Then, the position of the laser discharge cavity 4 is determined by the fourth aperture 74 and the fifth aperture 75. Next, the positions of the first adjustment seat 5 and the second adjustment seat 6 are determined by the sixth aperture 76 and the seventh aperture 77. Finally, the angles of the first laser resonator 51 and the second laser resonator 52 are determined by the identifiable light spots that appear due to the difference in optical path distance between the first laser resonator 51 and the second laser resonator 52 and the debugging light source 1. Furthermore, the debugging result can be visually judged by observing the two light spots of the reflected light on the third aperture 73. This allows for independent adjustment of the angles of the first laser resonator 51 and the second laser resonator 52. Compared with traditional excimer lasers, which require the resonator lens and the laser cavity to be adjusted together for position and angle, the optical path debugging method of this invention greatly improves the efficiency of optical path debugging.
[0041] In steps S1 to S8, the first aperture 71, the second aperture 72, the laser discharge cavity 4, the fourth aperture 74, the fifth aperture 75, the first adjustment seat 5, and the second adjustment seat 6 are arranged on the second debugging optical path 12.
[0042] The present invention has been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the invention.
Claims
1. A high-power excimer laser with low maintenance cost, characterized in that, The device includes a frame (100), which contains a laser discharge cavity (4). The laser discharge cavity (4) includes a cavity body (41). Both ends of the cavity body (41) are detachably provided with light-transmitting mirrors (42). The light-transmitting mirrors (42) and the cavity body (41) form a sealed space (43) for filling working gas. The cavity body (41) contains electrodes (44) for exciting the working gas. The frame (100) also contains a first adjustment seat (5) and a second adjustment seat (6) located on both sides of the cavity body (41). The first adjustment seat (5) has a first laser resonator (51) that is separated from and opposite to the light-transmitting mirror (42) on one side of the cavity body (41). The second adjustment seat (6) has a second laser resonator (52) that is separated from and opposite to the light-transmitting mirror (42) on the other side of the cavity body (41).
2. The low-maintenance, high-power excimer laser according to claim 1, characterized in that, The light-transmitting lens (42) is an ultraviolet lens.
3. A high-power excimer laser with low maintenance cost according to claim 2, characterized in that, The transmittance of the ultraviolet lens is greater than or equal to 96%.
4. A high-power excimer laser with low maintenance cost according to claim 2, characterized in that, The cavity (41) is also equipped with a pre-ionizer (45).