Tilting device

Abstract

The present invention provides a tilting device that can increase the moment required to tilt the tilting part supported by the support part. [Solution] This tilting device 100 comprises a tilting part 10 having a flat plate shape, three drive units 20 that exist with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state and tilt the tilting part 10 around multiple axes passing through the center of the tilting part 10, and support parts 30 that exist between each of the three drive units 20 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state, and spaced apart from the drive units 20, and elastically deform by the driving force of the drive units 20 to support the tilting part 10.

Description

Technical Field

[0001] The present invention relates to a tilting device, and more particularly to a tilting device including a driving unit for tilting a tilting part around a plurality of axes.

Background Art

[0002] Conventionally, a tilting device including a driving unit for tilting a tilting part around a plurality of axes has been known (see, for example, Patent Document 1).

[0003] The optical deflector (tilting device) described in Patent Document 1 includes a mirror part (tilting part), and first, second, and third actuators. In this optical deflector, the first, second, and third actuators are connected to the mirror part and swing the mirror part. Specifically, each of the first, second, and third actuators includes a support part and a driving part. One end of the support part is connected to the mirror part, and the other end is connected to the driving part. The driving method of the driving part is, for example, a piezoelectric method.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in Patent Document 1, each support part of the first, second, and third actuators is connected to the driving part, and the distance between the support part and the driving part is zero. Here, the moment, which is the action of the force for swinging the mirror part (tilting part), increases according to the distance between the driving part and the support part. In Patent Document 1, since the distance between the support part and the driving part is zero, it is considered that the moment for swinging the mirror part becomes relatively small. Therefore, a tilting device capable of increasing the moment for swinging (tilting) the mirror part (tilting part) is desired.

[0006] This invention was made to solve the above-mentioned problems, and one of its objectives is to provide a tilting device that can increase the moment for tilting the tilting part. [Means for solving the problem]

[0007] To achieve the above objective, a tilting device according to one aspect of this invention comprises: a tilting part having a flat plate shape; three drive units, which exist with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state, and which tilt the tilting part around a plurality of axes passing through the center of the tilting part; and support units, which exist between each of the three drive units when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state, and which are spaced apart from the drive units, and which elastically deform by the driving force of the drive units to support the tilting part.

[0008] In one aspect of this invention, the tilting device, as described above, is located between each of the three drive units when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state, and is spaced apart from the drive units. As a result, the support unit and the drive units are spaced apart, so the distance between the support unit and the drive units becomes relatively large. Therefore, the moment required to tilt the tilting part supported by the support unit can be increased. Here, if the tilting device has a structure in which a small moment can be generated, it is necessary to generate a larger force in the drive unit to tilt the tilting part. This results in a larger drive unit and a larger tilting device. On the other hand, as in the present invention, if the tilting device has a structure in which a large moment can be generated, the tilting part can be sufficiently tilted even if the drive unit is small, so the tilting device can be miniaturized.

[0009] In the tilting device according to the first aspect described above, preferably, the three drive units are located at equal angular intervals with respect to the center of the tilting unit, when viewed from a direction perpendicular to the surface of the tilting unit in the non-tilting state. With this configuration, the difference in the degree of tilting influence on the tilting unit from the output of each of the three drive units is reduced compared to when the three drive units are located at different angular intervals from each other, so the tilting angle of the tilting unit can be easily adjusted by adjusting the output of each drive unit.

[0010] In the tilting device according to the first aspect described above, preferably, the three drive units are equidistant from the center of the tilting unit when viewed from a direction perpendicular to the surface of the tilting unit in the non-tilting state. With this configuration, the difference in the degree of influence of the tilting on the tilting unit from the output of each of the three drive units is reduced compared to the case where the distances of the three drive units from the center of the tilting unit are different from each other, so that the tilting angle of the tilting unit can be easily adjusted by adjusting the output of each drive unit.

[0011] In the tilting device according to the first aspect described above, preferably, the three drive units are rotationally symmetric with respect to the center of the tilting unit when viewed from a direction perpendicular to the surface of the tilting unit in the non-tilting state. With this configuration, the degree of tilting influence on the tilting unit from the output of each of the three drive units is equal, making it easier to adjust the tilting angle of the tilting unit by adjusting the output of each drive unit.

[0012] In the tilting device according to the first aspect described above, preferably, there are a total of three support parts, one for each of the three drive parts, and the three support parts are located at equal angular intervals with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state. With this configuration, the tilting part can be supported in a more balanced manner by the three support parts compared to when the three support parts are located at different angular intervals from each other. Furthermore, when the three drive parts tilt the tilting part around multiple axes, the difference in the degree of influence of the elastic deformation reaction force of each support part on the tilting of the tilting part becomes smaller in each direction of tilting, making it easy to adjust the tilting angle of the tilting part.

[0013] In the tilting device according to the first aspect described above, preferably, there are a total of three support parts, one for each of the three drive parts, and the shape of the three support parts is the same. With this configuration, compared to the case where the shapes of the three support parts are different, the tilting part can be supported in a balanced manner by the three support parts, and when the three drive parts tilt the tilting part around multiple axes, the difference in the degree of influence of the elastic deformation reaction force of each support part on the tilting of the tilting part becomes smaller in each direction of tilting, so that the tilting angle of the tilting part can be easily adjusted.

[0014] In the tilting device according to the first aspect described above, preferably, there are a total of three support parts, one for each of the three drive parts, and the three support parts are rotationally symmetrical with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state, and have a rotationally symmetrical shape. With this configuration, since the three support parts are rotationally symmetrical and have a rotationally symmetrical shape, the tilting part can be supported more balanced by the three support parts, and when the three drive parts tilt the tilting part around multiple axes, the degree of influence of the reaction force of the elastic deformation of each support part on the tilting of the tilting part is equal in each direction of tilting, so that the tilting angle of the tilting part can be adjusted more easily.

[0015] In this case, preferably, the tilting part has a disc shape, the three drive units are located along the outer circumference of the disc-shaped tilting part when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state, and the support unit is located in the center between adjacent drive units along the outer circumference of the disc-shaped tilting part when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state. With this configuration, since the support unit is located in the center between adjacent drive units, the distance between each of the three support units and each of the three drive units becomes large. As a result, the moment for tilting the tilting part can be maximized, and the degree of influence of the tilting part on the tilting part from the output of each of the three drive units is equal, and the degree of influence of the reaction force of the elastic deformation of the three support units on the tilting part is also equal, so that the tilting angle of the tilting part can be adjusted even more easily.

[0016] In a tilting device in which a total of three support parts exist between each of the three drive parts, preferably, a magnet part is further provided located below the center of the tilting part, and the three drive parts are spaced apart from the tilting part and include drive coils that generate a magnetic field when an electric current flows through them, and the three drive coils are capable of generating magnetic fields of different strengths from each other. With this configuration, since the three drive coils are capable of generating magnetic fields of different strengths from each other, the tilting part can be tilted to a desired angle by adjusting the strength of the magnetic fields generated by the three drive coils.

[0017] In a tilting device in which a total of three support parts are present between each of the three drive parts, preferably, a magnet part is further provided below the center of the tilting part, spaced apart from the tilting part, and the three drive parts include drive coils located at the bottom of the tilting part that generate a magnetic field when an electric current flows through them, and the three drive coils are capable of generating magnetic forces of different strengths from each other. With this configuration, since the three drive coils are capable of generating magnetic fields of different strengths from each other, the tilting part can be tilted to a desired angle by adjusting the strength of the magnetic fields generated from the three drive coils.

[0018] In the tilting device with the first aspect described above, preferably, the tilting portion includes a reflective mirror portion. With this configuration, the moment for tilting the reflective mirror portion supported by the support portion can be increased, thereby increasing the range of tilt angles of the reflective mirror portion. [Effects of the Invention]

[0019] According to the present invention, as described above, the moment required to tilt the tilting part supported by the support part can be increased. [Brief explanation of the drawing]

[0020] [Figure 1] This is a top view of a tilting device according to the first embodiment. [Figure 2] This is a side view of a tilting device according to the first embodiment. [Figure 3]It is a top view of the drive unit according to the first embodiment. [Figure 4] It is a diagram for explaining the moment acting on the tilting part. [Figure 5] It is a side view of the tilting device according to the second embodiment. [Figure 6] It is a top view of the tilting device according to the first modification. [Figure 7] It is a top view of the tilting device according to the second modification. [Figure 8] It is a top view of the tilting device according to the third modification. [Figure 9] It is a top view of the tilting device according to the fourth modification. [Figure 10] It is a top view of the tilting device according to the fifth modification. [Figure 11] It is a top view of the tilting device according to the sixth modification.

Mode for Carrying Out the Invention

[0021] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0022] [First Embodiment] The tilting device 100 according to the first embodiment will be described. In the present specification, as shown in FIG. 1, the direction perpendicular to the surface of the tilting part 10 in the non-tilting state where the tilting part 10 is not tilted is defined as the Z direction. Also, the surface side of the tilting part 10 is defined as the Z1 side, and the back side is defined as the Z2 side. Further, the direction orthogonal to the Z direction is defined as the X direction. Also, the direction orthogonal to the Z direction and the X direction is defined as the Y direction.

[0023] The tilting device 100 is a device for tilting the reflection mirror part 12. The tilting device 100 is, for example, a mirror scanner for reflecting light emitted from a light emitting part (not shown) at a desired angle. Also, the tilting device 100 is, for example, a MEMS (Micro Electro Mechanical Systems) formed by processing a semiconductor substrate.

[0024] As shown in Figure 1, the tilting device 100 comprises a tilting part 10, a drive part 20, a drive circuit 22 (see Figure 2), a support part 30, a magnet part 40, and a fixing part 50.

[0025] The tilting part 10 has a flat plate shape (see Figure 2). Specifically, the tilting part 10 has a disc shape. For example, when viewed from the Z direction perpendicular to the surface of the tilting part 10 in a non-tilting state, the tilting part 10 has a perfect circle shape when it is aligned with the XY plane (not tilted).

[0026] Furthermore, as shown in Figure 2, the tilting part 10 includes a tilting part body 11 and a reflective mirror part 12. The tilting part body 11 is formed from, for example, a silicon layer. Alternatively, the tilting part body 11 may be formed from a material other than a silicon layer (such as an oxidizing agent, an inorganic material, or an organic material). Also, the tilting part body 11 may be integrally formed from the same material as the support part 30 and the fixing part 50.

[0027] The reflective mirror portion 12 is formed on the Z1-side surface of the tilting portion body 11. The reflective mirror portion 12 is formed from a material capable of reflecting light. For example, the reflective mirror portion 12 is formed from a thin metal film such as aluminum, gold, or silver, or from a multilayer dielectric film such as a multilayer film of titanium oxide and silicon oxide.

[0028] In the first embodiment, as shown in Figure 1, there are three drive units 20 (drive units 20a, 20b, and 20c) relative to the center of the tilting part 10, viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. The drive units 20 tilt the tilting part 10 around multiple axes passing through the center of the tilting part 10. The center of the tilting part 10 is the center of the tilting part 10 in the non-tilting state, and refers to the center of the perfectly circular tilting part 10 when viewed from the Z direction (center point C1 in Figure 1). The axis passing through the center of the tilting part 10 is a straight line passing through the center of the tilting part 10 when viewed from the Z direction (for example, line A in Figure 1). The angular interval between the three lines A shown in Figure 1 is 120°. Furthermore, in the tilting device 100, the drive units 20 can tilt the tilting part 10 around all the straight lines (axes) passing through the center of the tilting part 10 when viewed from the Z direction.

[0029] Furthermore, in the first embodiment, the three drive units 20 are located at equal angular intervals with respect to the center of the tilting unit 10, when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. Specifically, the three drive units 20 are located at 120° intervals with respect to the center of the tilting unit 10.

[0030] Furthermore, in the first embodiment, the three drive units 20 are equidistant from the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. For example, the three drive units 20 have a circular shape when viewed from the Z direction. When the center point of the circular drive unit 20 is C2, the distance L between the center point C2 of the three drive units 20 and the center (center point C1) of the tilting unit 10 is equal for each. Also, the distance L is smaller than, for example, the radius r of the circular drive unit 20 (see Figure 4). In this case, the tilting unit 10 and the three drive units 20 overlap when viewed from the Z direction.

[0031] Furthermore, in the first embodiment, the three drive units 20 are located along the outer circumference of the disc-shaped tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. The three drive units 20 are also located rotationally symmetric with respect to the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. That is, if one drive unit 20 is rotated 120° with respect to the center of the tilting unit 10, its position will coincide with that of the other drive units 20.

[0032] In the first embodiment, the three drive units 20 are spaced apart from the tilting unit 10 and include drive coils 21 that generate a magnetic field when current flows through them. Specifically, as shown in Figure 2, the three drive units 20 are spaced apart from the Z2 side surface of the tilting unit 10. In Figure 2, the three drive units 20 and the tilting unit 10 are parallel to each other, but all or some of the three drive units 20 and the tilting unit 10 do not have to be parallel to each other.

[0033] Furthermore, in the first embodiment, as shown in Figure 3, the drive coil 21 is, for example, a planar coil (spiral coil) wound along the XY plane. The drive coil 21 may also be a coil wound spirally along the Z direction. The shapes (number of turns, etc.) of the three drive coils 21 are the same. However, the shapes of the three drive coils 21 may differ. Having the same design, including the shape, of the three drive coils 21 makes it easier to control the tilting angle of the tilting section 10 by controlling the output of each drive coil 21.

[0034] The drive circuit 22 shown in Figure 2 supplies current to each of the three drive coils 21. The drive circuit 22 is capable of supplying currents of different magnitudes to each of the three drive coils 21. As a result, in the first embodiment, the three drive coils 21 can generate magnetic fields of different strengths from each other. The drive circuit 22 is controlled by a control unit (not shown).

[0035] In the first embodiment, as shown in Figure 1, the support portion 30 is located between each of the three drive units 20 when viewed from the Z direction perpendicular to the surface of the non-tilting tilting portion 10, and is spaced apart from the drive units 20, supporting the tilting portion 10. The support portion 30 is elastically deformed by the driving force of the drive units 20. Specifically, the driving force of the drive units 20 does not directly act on the support portion 30, but rather the driving force of the drive units 20 causes the magnet portion 40 to move, which in turn causes the tilting portion 10 to tilt. The support portion 30 then elastically deforms to follow the tilting of the tilting portion 10. Also, as shown in Figure 2, the support portion 30 is spaced apart from the drive units 20 in the Z direction. Furthermore, the support portion 30 is formed from, for example, a silicon layer, which is an elastically deformable member. Alternatively, the support portion 30 may be formed from a material other than a silicon layer, as long as it is an elastically deformable member. Furthermore, as described above, the support portion 30 may be formed integrally with the tilting portion body 11 and the fixing portion 50 of the tilting portion 10, or it may be formed as a separate component.

[0036] Furthermore, in the first embodiment, as shown in Figure 1, there are a total of three support parts 30 (support parts 30a, 30b, and 30c) between each of the three drive parts 20. The three support parts 30 are located at equal angular intervals with respect to the center of the tilting part 10, when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. Specifically, the three support parts 30 are located at 120° intervals with respect to the center of the tilting part 10.

[0037] Furthermore, in the first embodiment, the shapes of the three support parts 30 are the same. For example, the shape of the support part 30 is meandering (a meandering shape) when viewed from the Z direction. Alternatively, the support part 30 may be straight or otherwise. Also, the support part 30 has a thin plate shape (see Figure 2). That is, the thickness of the support part 30 in the Z direction is relatively small. Also, the thickness of the support part 30 along the Z direction and the thickness of the tilting part 10 may be the same, or, as shown in Figure 2, the thickness of the support part 30 along the Z direction may be smaller than the thickness of the tilting part 10. Alternatively, the thickness of the support part 30 along the Z direction may be larger than the thickness of the tilting part 10.

[0038] Furthermore, in the first embodiment, as shown in Figure 1, the three support parts 30 are rotationally symmetric with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state, and have a rotationally symmetric shape. That is, as described above, the three support parts 30 are spaced 120° apart with respect to the center of the tilting part 10, and the shapes of the three support parts 30 are the same meander shape.

[0039] Furthermore, in the first embodiment, the support portion 30 is located centered between adjacent drive units 20 along the outer circumference of the disc-shaped tilting portion 10, when viewed from the Z direction perpendicular to the surface of the tilting portion 10 in the non-tilting state. That is, the support portion 30 and the tilting portion 10 are alternately located at 60° intervals. As a result, the combined structure of the tilting portion 10, drive unit 20, and support portion 30 is rotationally symmetrical with respect to the center of the tilting portion 10.

[0040] Furthermore, in the first embodiment, as shown in Figure 2, the magnet portion 40 is located below the center of the tilting portion 10. Specifically, the magnet portion 40 is directly attached to the Z2 side surface of the tilting portion 10. Also, the magnet portion 40 has its north pole and south pole aligned along the Z direction. Note that the orientation of the north and south poles may be such that the north pole is on the Z1 side and the south pole is on the Z2 side, or the south pole is on the Z1 side and the north pole is on the Z2 side. Also, the magnet portion 40 has, for example, a cylindrical shape. Also, the magnet portion 40 is, for example, a permanent magnet. And, as shown in Figure 1, the structure of the tilting portion 10, the support portion 30 and the magnet portion 40 combined is rotationally symmetric with respect to the center of the tilting portion 10. Also, the magnet portion 40 and the drive portion 20 are spaced apart (see Figure 2). As described above, the three drive coils 21 are capable of generating magnetic fields of different strengths from each other. By controlling the magnitude of the output (magnetic field) of the three drive coils 21, the magnet section 40 attempts to move, and as the magnet section 40 moves, the tilting section 10, which is supported (constrained) by the elastically deformable support section 30, tilts.

[0041] Furthermore, as shown in Figure 1, the fixing part 50 is connected to three support parts 30 and supports the support parts 30. For example, the fixing part 50 has a circular opening 51, and the three support parts 30 are connected to the edge of the opening 51. Also, the fixing part 50 has, for example, a flat plate shape (see Figure 2). The fixing part 50 is formed from, for example, a silicon layer. The fixing part 50 may also be formed from a material other than a silicon layer. Note that the space partitioned by the tilting part 10, the support parts 30 and the fixing part 50 is simply empty space.

[0042] Next, referring to Figure 4, we will explain the magnitude of the moment acting on the tilting part 10 due to the force generated by any of the three drive units 20.

[0043] Let r be the radius of the circular tilting part 10, and assume that there are three support parts 30 (support parts 30a, 30b, and 30c) spaced at 120° intervals, and three drive parts 20 (drive parts 20a, 20b, and 20c) spaced at 120° intervals. The support parts 30a, 30b, and 30c are located in this order in the circumferential direction, and the drive parts 20a, 20b, and 20c are located in this order in the circumferential direction. Let θ be the angular distance between the support part 30a and the drive part 20a. In this case, the angular distance between the support part 30b and the drive part 20a is 120°-θ. Note that in Figure 4, θ is 60°. The following equation represents the magnitude of the moment M acting on the tilting part 10 (point P in Figure 4) due to the force generated by any of the three drive parts 20. M=r·sinθ·F+r·sin(120°-θ)·F F represents the force acting on point P of the tilting part 10 due to the magnetic field generated by the drive unit 20, and this force F acts toward the back of the paper (towards Z2). By adjusting the current flowing from the drive circuit 22 to the drive unit 20, the magnitude of the moment acting on the tilting part 10 changes. That is, attractive or repulsive forces of different magnitudes act on the tilting part 10 (magnet part 40) from the three drive units 20, causing the tilting part 10 to tilt. As a result, the tilting part 10 tilts to a desired angle around any axis passing through the center of the tilting part 10.

[0044] (Effects of the first embodiment) In the first embodiment, the following effects can be obtained.

[0045] In the first embodiment, as described above, the support portion 30 for supporting the tilting portion 10 is located between each of the three drive units 20 when viewed from the Z direction perpendicular to the surface of the tilting portion 10 in the non-tilting state, and is spaced apart from the drive units 20. As a result, the distance between the support portion 30 and the drive units 20 is relatively large. Therefore, the moment required to tilt the tilting portion 10 supported by the support portion 30 can be increased. If the tilting device 100 has a structure that can generate a small moment, it is necessary to generate a large force in the drive units 20 to tilt the tilting portion 10. This would result in the drive units 20 becoming larger, and the tilting device 100 also becoming larger. On the other hand, if the tilting device 100 has a structure that can generate a large moment, as in the first embodiment, the tilting portion 10 can be tilted sufficiently even if the drive units 20 are small, so the tilting device 100 can be miniaturized.

[0046] In the first embodiment, as described above, the three drive units 20 are located at equal angular intervals with respect to the center of the tilting unit 10, when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in a non-tilting state. This reduces the difference in the degree of tilting influence on the tilting unit 10 due to the output from each of the three drive units 20, compared to when the three drive units 20 are located at different angular intervals from each other. As a result, the tilting angle of the tilting unit 10 can be easily adjusted by adjusting the output of each drive unit 20.

[0047] In the first embodiment, as described above, the three drive units 20 are equidistant from the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. As a result, compared to the case where the distances of the three drive units 20 from the center of the tilting unit 10 are different, the difference in the degree of tilting influence on the tilting unit 10 due to the output from each of the three drive units 20 is reduced, making it easy to adjust the tilting angle of the tilting unit 10 by adjusting the output of each drive unit 20.

[0048] In the first embodiment, as described above, the three drive units 20 are rotationally symmetric with respect to the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. As a result, the degree of tilting influence on the tilting unit 10 from the output of each of the three drive units 20 is equal, making it easier to adjust the tilting angle of the tilting unit 10 by adjusting the output of each drive unit 20.

[0049] In the first embodiment, as described above, there are a total of three support parts 30, one for each of the three drive units 20, and the three support parts 30 are located at equal angular intervals with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. This allows the tilting part 10 to be supported in a more balanced manner by the three support parts 30 compared to when the three support parts 30 are located at different angular intervals from each other. Furthermore, when the three drive units 20 tilt the tilting part 10 around multiple axes, the difference in the degree of influence on the tilting of the tilting part 10 due to the reaction force of the elastic deformation of each support part 30 becomes smaller in each direction of tilting, making it easy to adjust the tilting angle of the tilting part 10.

[0050] In the first embodiment, as described above, there are a total of three support parts 30, one for each of the three drive units 20, and the shape of the three support parts 30 is the same. This allows the tilting part 10 to be supported in a balanced manner by the three support parts 30, compared to the case where the shapes of the three support parts 30 are different. Furthermore, when the three drive units 20 tilt the tilting part 10 around multiple axes, the difference in the degree of influence of the elastic deformation reaction force of each support part 30 on the tilting of the tilting part 10 becomes smaller in each direction of tilting, making it easy to adjust the tilting angle of the tilting part 10.

[0051] In the first embodiment, as described above, there are a total of three support parts 30, one for each of the three drive units 20. The three support parts 30 are rotationally symmetrical with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state, and have a rotationally symmetrical shape. This allows the tilting part 10 to be supported more balanced by the three support parts 30, and when the three drive units 20 tilt the tilting part 10 around multiple axes, the degree to which the reaction force of the elastic deformation of each support part 30 influences the tilting of the tilting part 10 is equal in each direction of tilting, making it easier to adjust the tilting angle of the tilting part 10.

[0052] In the first embodiment, as described above, the tilting part 10 has a disc shape. The three drive units 20 are located along the outer circumference of the disc-shaped tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state, and the support unit 30 is located in the center between adjacent drive units 20 along the outer circumference of the disc-shaped tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. As a result, since the support unit 30 is located in the center between adjacent drive units 20, the distance between each of the three support units 30 and each of the three drive units 20 becomes large. As a result, the moment for tilting the tilting part 10 can be maximized, and the degree of influence on the tilting of the tilting part 10 from the output of each of the three drive units 20 is equal, and the degree of influence on the tilting of the tilting part 10 from the reaction force of the elastic deformation of the three support units 30 is also equal, making it even easier to adjust the tilting angle of the tilting part 10.

[0053] In other words, as in the first embodiment, the moment M (=r·sinθ·F + r·sin(120°-θ)·F) is maximized because the three drive units 20 and three support units 30 are located at equal angular intervals and are rotationally symmetric. Furthermore, r·sinθ·F and r·sin(120°-θ)·F become equal, making it easy to adjust the tilt angle of the tilting unit 10 by controlling the output of the drive unit 20.

[0054] In the first embodiment, as described above, the tilting device 100 further includes a magnet portion 40 located at the lower part of the center of the tilting portion 10. The three drive units 20 are located spaced apart from the tilting portion 10 and include drive coils 21 that generate a magnetic field when an electric current flows through them, and the three drive coils 21 are capable of generating magnetic fields of different strengths from each other. As a result, the tilting portion 10 can be tilted to a desired angle by adjusting the strength of the magnetic fields generated by the three drive coils 21.

[0055] In the first embodiment, as described above, the tilting portion 10 includes the reflective mirror portion 12. This allows the moment for tilting the reflective mirror portion 12 supported by the support portion 30 to be increased, thereby increasing the range of tilt angles of the reflective mirror portion 12.

[0056] [Second Embodiment] The tilting device 200 according to the second embodiment will now be described. As shown in Figure 5, the positions of the drive unit 120 and the magnet unit 140 in the tilting device 200 are different from those of the tilting device 100 of the first embodiment. In the tilting device 200, the same reference numerals are used for components that are the same as those in the tilting device 100 of the first embodiment, and their explanation is omitted.

[0057] In the second embodiment, the magnet portion 140 is located below the center of the tilting portion 10, spaced apart from the tilting portion 10. The other configurations of the magnet portion 140 are the same as those of the magnet portion 40 in the first embodiment.

[0058] In the second embodiment, the three drive units 120 are directly attached to the lower part of the tilting unit 10. Each of the three drive units 120 includes a drive coil 121 that generates a magnetic field when current flows through it. The two drive units 120 shown in Figure 5 are, as in the first embodiment, rotationally symmetric with respect to the center of the tilting unit 10 when viewed from the Z direction. The drive coil 121 is, for example, a coil wound spirally along the Z direction. The drive coil 121 may also be a planar coil (spiral coil) wound along the XY plane. The shape (number of turns, etc.) of the three drive coils 121 is the same. However, the shapes of the three drive coils 121 may be different. On the other hand, if the design of the three drive coils 121, such as the shape, is the same, it is easier to control the tilting angle of the tilting unit 10 by controlling the output of each drive coil 121. The drive circuit 22 is also capable of supplying different magnitudes of current to each of the three drive coils 121. As a result, in the second embodiment, as in the first embodiment, the three drive coils 121 can generate magnetic fields of different strengths from each other. The other configurations of the tilting device 200 in the second embodiment are the same as those of the tilting device 100 in the first embodiment.

[0059] (Effects of the second embodiment) In the second embodiment, the following effects can be obtained.

[0060] In the second embodiment, as described above, the tilting device 200 includes a magnet section 140 located below the center of the tilting section 10 and spaced apart from the tilting section 10. Three drive sections 120 are located below the tilting section 10 and include drive coils 121 that generate a magnetic field when an electric current flows through them. The three drive coils 121 are capable of generating magnetic forces of different strengths from each other. By adjusting the strength of the magnetic fields generated by the three drive coils 121, the magnet section 140 attempts to move, and the tilting section 10, which is supported (restrained) by an elastically deformable support section 30, tilts as the magnet section 140 moves. The other effects of the second embodiment are the same as those of the first embodiment.

[0061] [Differentiation] It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is defined by the claims rather than by the description of the embodiments above, and further includes all modifications (exceptions) within the meaning and scope equivalent to the claims.

[0062] In the first and second embodiments described above, examples were shown where the space partitioned by the tilting part 10, the support part 30, and the fixed part 50 is simply empty space, but the present invention is not limited thereto. For example, as in the tilting device 300 according to the first modification shown in Figure 6, a thin film 230 may be present in the space partitioned by the tilting part 10, the fixed part 50, and the support part 30. The thin film 230 is formed from an elastically deformable member. For example, the thin film 230 may be formed from a silicon layer, a metal thin film, an organic material, etc.

[0063] In the first and second embodiments described above, the three drive units 20 are shown to be at equal angular intervals with respect to the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. However, the present invention is not limited thereto. For example, as in the tilting device 400 according to the second modification shown in Figure 7, the drive units 20 may be at different angular intervals with respect to the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. That is, the three drive units 20 do not have to be rotationally symmetric with respect to the center of the tilting unit 10 when viewed from the Z direction perpendicular to the surface of the tilting unit 10 in the non-tilting state. In the tilting device 400 shown in Figure 7, the angular intervals between drive unit 20a and drive unit 20b, and between drive unit 20a and drive unit 20c are relatively large. On the other hand, the angular interval between drive unit 20b and drive unit 20c is relatively small. In the second modification, since the drive units 20 are not located at equal angular intervals, the influence of output control of each drive unit 20 on the tilting of the tilting unit 10 is not equal. Therefore, it becomes difficult to control the tilting angle of the tilting unit 10 by controlling the output of the drive units 20. However, the drive units 20 can be arranged in any position. In the second modification, it is possible to arrange the three drive units 20 in a space-saving manner in the X and Y directions compared to when the three drive units 20 are arranged rotationally symmetrically.

[0064] In the first and second embodiments described above, the three drive units 20 are shown to be equidistant from the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state, but the present invention is not limited thereto. For example, as in the tilting device 500 according to the third modification shown in Figure 8, the drive units 20 may be located at different distances from the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. That is, the three drive units 20 do not have to be rotationally symmetric with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. In the tilting device 500 shown in Figure 8, the distance between drive unit 20a and the center of the tilting part 10 is relatively small. On the other hand, the distance between each of the drive units 20b and 20c and the center of the tilting part 10 is relatively large. Also, in the third modification, since the drive units 20 are not equidistant, the influence of output control of each drive unit 20 on the tilting of the tilting part 10 will not be equal. Therefore, controlling the tilting angle of the tilting part 10 by controlling the output of the drive unit 20 becomes difficult. However, since the drive unit 20 can be positioned at any location, space can be saved. In the third modified example, the drive unit 20a is located closer to the center of the tilting part 10, thus saving space.

[0065] In the first and second embodiments described above, the three support parts 30 are shown to be at equal angular intervals with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. However, the present invention is not limited thereto. For example, as in the tilting device 600 according to the fourth modification shown in Figure 9, the three support parts 30 may be at different angular intervals with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. In other words, the three support parts 30 do not have to be rotationally symmetric with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. In the tilting device 600 shown in Figure 9, the angular intervals between support parts 30a and 30c, and between support parts 30b and 30c are relatively large. On the other hand, the angular interval between support parts 30a and 30b is relatively small. Thus, when the three support parts 30 are spaced at different angles from each other, the degree to which the elastic deformation reaction force of each support part 30 influences the tilting of the tilting part 10 when the three drive units 20 tilt the tilting part 10 around multiple axes will not be equal in each direction of tilting. Therefore, it becomes difficult to control the tilting angle of the tilting part 10 by controlling the output of the drive unit 20. However, since the support parts 30 can be arranged at any position, space can be saved.

[0066] In the first and second embodiments described above, examples were shown in which the shapes of the three support parts 30 are the same, but the present invention is not limited thereto. For example, as in the tilting device 700 according to the fifth modification shown in Figure 10, the shape of support part 630a may differ from the shapes of the other support parts 630b and 630c. That is, the three support parts 630 do not have to be rotationally symmetrical with respect to the center of the tilting part 10 when viewed from the Z direction perpendicular to the surface of the tilting part 10 in the non-tilting state. For example, in the tilting device 700 shown in Figure 10, the shape of support part 630a is rod-shaped (straight shape), and the shapes of support parts 630b and 630c are meander shapes (serpentine shapes). In this way, by having different shapes for the support parts 630, it is possible to change the degree of reaction force from the elastic deformation of each support part 630. This makes it possible to make the tilting part 10 easier to tilt around a specific angle, and to adjust the lifespan of the tilting device 700 due to damage to the support parts 630 caused by repeated elastic deformation from tilting around a specific axis.

[0067] In the first and second embodiments described above, examples were shown in which there are three support parts 30, but the present invention is not limited thereto. For example, there may be four or more support parts 30. That is, there may be two or more support parts 30 between adjacent drive parts 20 in the circumferential direction.

[0068] In the first and second embodiments described above, examples were shown in which the tilting part 10 has a disc shape, but the present invention is not limited thereto. For example, the tilting part 10 may have a shape other than a disc shape (such as a square shape or a hexagonal shape).

[0069] In the first and second embodiments described above, the support portion 30 is shown to be located in the center of adjacent drive units 20 along the outer circumference of the disc-shaped tilting portion 10, when viewed from the Z direction perpendicular to the surface of the tilting portion 10 in the non-tilting state. However, the present invention is not limited to this. For example, as in the tilting device 800 according to the sixth modified example shown in Figure 11, the support portion 30 may be located in a part other than the center of adjacent drive units 20. In the tilting device 800, the three drive units 20 are rotationally symmetric with respect to the center of the tilting portion 10, and the three support portions 30 are also rotationally symmetric with respect to the center of the tilting portion 10. However, the support portion 30 is located off-center to one side of adjacent drive units 20, rather than in the center of adjacent drive units 20. Thus, if the support section 30 is located off-center between adjacent drive sections 20, rather than in the middle, the output control of each drive section 20 and the degree to which the reaction force of the elastic deformation of each support section 30 influences the tilting of the tilting section 10 will differ for each support section 30. Therefore, it becomes difficult to control the tilting angle of the tilting section 10 by controlling the output of the drive section 20. However, since the drive section 20 and the support section 30 can be arranged in any position, space can be saved.

[0070] In the first embodiment described above, an example was shown in which the magnet portion 40 is directly attached to the lower part of the center of the tilting portion 10, but the present invention is not limited thereto. For example, the magnet portion 40 may be attached to the lower part of the center of the tilting portion 10 via a member such as a spacer.

[0071] In the second embodiment described above, an example was shown in which the drive unit 120 is directly attached to the lower part of the tilting unit 10, but the present invention is not limited thereto. For example, the drive unit 120 may be attached to the lower part of the center of the tilting unit 10 via a member such as a spacer.

[0072] In the first and second embodiments described above, examples were shown in which the tilting part 10 includes a reflective mirror part 12, but the present invention is not limited thereto. For example, the tilting part 10 may include members other than the reflective mirror part 12, and the tilting device may tilt the members other than the reflective mirror part 12. Also, the tilting part 10 does not have to include a reflective mirror part 12. In this case, the tilting device may be used as a motion sensor, an actuator, or the like.

[0073] In the first and second embodiments described above, examples were shown in which the distance L between the center point C2 of the three drive units 20 and the center (center point C1) of the tilting unit 10 is smaller than the radius r of the circular drive unit 20 (see Figure 4). However, the present invention is not limited to this. For example, the distance L may be greater than or equal to the radius r. [Explanation of symbols]

[0074] 10 Tilt part 12 Reflective mirror section 20, 20a, 20b, 20c, 120 Drive unit 21, 121 Drive coil 30, 30a, 30b, 30c, 230, 630, 630a, 630b, 630c Support part 40, 140 Magnet section 100, 200, 300, 400, 500, 600, 700, 800 Tilt device

Claims

1. A tilting part having a flat plate shape, Viewed from a direction perpendicular to the surface of the tilting part in a non-tilting state, there are three drive units that tilt the tilting part around multiple axes passing through the center of the tilting part, A tilting device comprising: a support portion located between each of the three drive units when viewed from a direction perpendicular to the surface of the tilting portion in a non-tilting state, and spaced apart from the drive units, and elastically deformed by the driving force of the drive units for supporting the tilting portion.

2. The tilting device according to claim 1, wherein the three drive units are located at equal angular intervals with respect to the center of the tilting unit when viewed from a direction perpendicular to the surface of the tilting unit in a non-tilting state.

3. The tilting device according to claim 1, wherein the three drive units are located equidistant from the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in a non-tilting state.

4. The tilting device according to claim 1, wherein the three drive units are rotationally symmetric with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in a non-tilting state.

5. There are a total of three support parts, one in each of the three drive units. The tilting device according to any one of claims 1 to 4, wherein the three support parts are located at equal angular intervals with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in a non-tilting state.

6. There are a total of three support parts, one in each of the three drive units. The tilting device according to any one of claims 1 to 4, wherein the three support parts have the same shape.

7. There are a total of three support parts, one in each of the three drive units. The tilting device according to any one of claims 1 to 4, wherein the three support parts are rotationally symmetrical with respect to the center of the tilting part when viewed from a direction perpendicular to the surface of the tilting part in a non-tilting state, and have a rotationally symmetrical shape.

8. The tilting part has a disc shape, The three drive units are located along the outer circumference of the disc-shaped tilting part, when viewed from a direction perpendicular to the surface of the tilting part in the non-tilting state. The tilting device according to claim 7, wherein the support portion is located in the center between adjacent drive portions, along the outer circumference of the disc-shaped tilting portion, when viewed from a direction perpendicular to the surface of the tilting portion in a non-tilting state.

9. The tilting part further comprises a magnet located at the lower part of the center of the tilting part, The three drive units are located spaced apart from the tilting unit and include drive coils that generate a magnetic field when current flows through them. The tilting device according to claim 7, wherein the three drive coils are capable of generating magnetic fields of different strengths from each other.

10. Below the center of the tilting portion, there is further a magnet portion located spaced apart from the tilting portion, The three drive units are located at the lower part of the tilting unit and include drive coils that generate a magnetic field when current flows through them. The tilting device according to claim 7, wherein the three drive coils are capable of generating magnetic forces of different strengths from each other.

11. The tilting device according to claim 1, wherein the tilting portion includes a reflective mirror portion.

Images