Piezoelectric tilting device

Abstract

The present invention provides a piezoelectric tilting device that allows for improved design flexibility in the shape of the tilting part and support part, taking into account the resonant frequency of the tilting part. [Solution] This piezoelectric tilting device 100 comprises a tilting part 11, a plurality of support parts 12a, a plurality of piezoelectric elements 12b provided on the surfaces of the plurality of support parts 12a, and a single pressing part 21. The pressing part 21 comes into contact with the center 11c of the tilting part 11 as the tilting part 11 moves along the thickness direction due to the deformation of the plurality of support parts 12a caused by the deformation of the plurality of piezoelectric elements 12b due to the application of voltage.

Claims

1. A tilting part in the shape of a flat plate having a certain thickness, Multiple support parts that support the tilting part, Multiple piezoelectric elements provided on the surface of the multiple support portions, A fixing part that supports the multiple support parts so as not to move, The device comprises a single pressing portion located at the center of the tilting portion and positioned along the thickness direction of the tilting portion, Multiple piezoelectric elements deform when a voltage is applied, The multiple support parts are deformed by the deformation of the multiple piezoelectric elements. The tilting portion moves along the thickness direction of the tilting portion due to the deformation of the plurality of support portions, and tilts about an axis that passes through the center of the tilting portion and is perpendicular to the thickness direction of the tilting portion. The piezoelectric tilting device is characterized in that the pressing portion comes into contact with the center of the tilting portion as the tilting portion moves along the thickness direction.

2. The piezoelectric tilting device according to claim 1, wherein the pressing portion is pressed against the tilting portion such that a predetermined pressing force is applied to the tilting portion when the tilting portion tilts, preventing the tilting portion from resonating in the thickness direction.

3. The piezoelectric tilting device according to claim 1, wherein the tilting portion and the pressing portion are spaced apart at a predetermined distance when no voltage is applied to the plurality of piezoelectric elements.

4. The piezoelectric tilting device according to claim 3, wherein the tilting portion is pressed against the pressing portion from a state separated from the pressing portion by deformation of the plurality of support portions due to the application of a DC bias voltage to the plurality of piezoelectric elements, thereby separating the pressing portion from the pressing portion by a predetermined distance.

5. The magnitude of the bias voltage applied to the plurality of piezoelectric elements is the piezoelectric constant d ３１ The piezoelectric tilting device according to claim 4, wherein the voltage is above the saturation voltage which is the starting point for saturation.

6. The base portion on which the pressing portion is arranged is further provided, The base portion is provided on the opposite side of the pressing portion from the tilting portion. The piezoelectric tilting device according to claim 1, wherein the pressing portion is integrally formed from the same material as the base portion.

7. The system further comprises a control unit that controls the voltage applied to a plurality of piezoelectric elements, The piezoelectric tilting device according to claim 1, wherein the control unit is configured to apply a DC bias voltage to a plurality of piezoelectric elements so as to press the tilting portion against the pressing portion by deformation of a plurality of support portions, and to apply a DC or AC drive voltage to a plurality of piezoelectric elements so as to tilt the tilting portion by deformation of a plurality of support portions.

8. The piezoelectric tilting device according to claim 1, wherein the plurality of support parts are arranged around the tilting part having a circular shape.

9. The piezoelectric tilting device according to claim 1, wherein the tilting portion is provided with a reflective mirror on the side opposite to the pressing portion.

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