Manufacturing method of laminated film

Abstract

This invention provides a method for manufacturing laminated films that improves the adhesion between the base film and the inorganic layer, enabling the stable production of laminated films. [Solution] The method for manufacturing a laminated film according to the present disclosure includes a preparation step S1 of preparing a long base film 10 having a first surface 10a and a second surface 10b opposite to the first surface 10a; a plasma treatment step S2 of plasma treatment of the first surface 10a of the base film 10 in a reduced-pressure atmosphere in a chamber; and a film formation step S3 of forming an inorganic layer 20 on the first surface 10a in a reduced-pressure atmosphere following the plasma treatment step S2. In the plasma treatment step S2, the plasma treatment is performed by inductively coupled plasma of a rare gas and an oxygen-containing gas generated by applying high-frequency power to a low-inductance antenna.

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