Optical waveguides for scanning quantum materials

Abstract

This provides a compact sensor for optical detection of properties that affect quantum materials. [Solution] An aspect of this disclosure is an input wavelength λ i The present invention relates to a sensor comprising a light source configured to generate input light having a certain emission wavelength λ, an optical waveguide, an array of multiple quantum material chiplets, and an imaging array, wherein the optical waveguide is configured to transmit the input light to the array of multiple quantum material chiplets, and each quantum material chiplet absorbs a portion of the input light from the optical waveguide, and in response to the portion of the input light absorbed, each quantum material chiplet emits a certain emission wavelength λ based on its respective parameter value. re Each quantum material chiplet is configured to emit light, and the imaging array is configured to detect each emission and output a detection signal based on the respective parameter values ​​in each quantum material chiplet.

Description

[Technical Field]

[0001] One or more embodiments relate to photodetection of properties that generally affect quantum materials. [Background technology]

[0002] Photodetector magnetic resonance (ODMR) is a dual resonance technique that can photoexcite the electron spin state of crystal defects for spin initialization and readout. ODMR has been shown to detect not only the presence of a magnetic field, but also its magnitude and vector, in laboratory settings.

[0003] However, laboratory ODMR systems are too large and not particularly portable for use outside the laboratory.

[0004] There is a need for a compact, easily transferable ODMR system for use by end users or end-use systems. [Overview of the project]

[0005] A part of this disclosure is the input wavelength λ i The present invention relates to a sensor comprising a light source configured to generate input light having λ, an optical waveguide, an array of multiple quantum material (QM) chiplets, and an imaging array, wherein the optical waveguide is configured to transmit the input light to an array of multiple QM chiplets (QMCs), and each QM chiplet (QMC) absorbs a portion of the input light from the optical waveguide, and in accordance with the portion of the input light absorbed, each QMC emits an emission wavelength λ based on its respective parameter value. re Each of the QMCs is configured to emit light, and the imaging array is configured to detect each light emission and output a detection signal based on the respective parameter values ​​in each QMC.

[0006] In one or more embodiments of this model, the light source includes one of a group of light sources including a single tunable light source, an array of light-emitting diodes, an array of vertical-cavity surface-emitting lasers, an array of grating antennas operating across a frequency spectral range, and combinations thereof.

[0007] In one or more embodiments of this model, the sensor further includes a microwave emitter configured to emit microwave pulses into an array of multiple QMCs, and an optical modulation element configured to modulate input light. In one or more of these embodiments, the optical waveguide includes an optical modulation section including an optical modulation element, and the optical modulation element includes one of a group of optical modulation elements including a wavelength modulation element, a polarization modulation element, a mode modulation element, a near-field phase modulation element, a refractive index distribution lens, a diffraction element, a refractive element, a lenticular array, an intensity modulation element, and combinations thereof.

[0008] In one or more embodiments of this model, the light source, optical waveguide, array of multiple QMCs, and imaging array are a single device.

[0009] In one or more embodiments of this model, the sensor further includes a baffle configured to reduce crosstalk between a first QMC of an array of multiple QMCs and a second QMC of an array of multiple QMCs.

[0010] In one or more embodiments of this model, each QMC uses a parameter value that includes one of the parameter values, which includes the magnetic field strength value, magnetic field direction value, change in magnetic field strength value, change in magnetic field direction value, electric field strength value, electric field direction value, change in electric field strength value, change in electric field direction value, strain value, change in strain value, temperature value, change in temperature value, and combinations thereof, to determine the emission wavelength λ re Each is configured to emit light having a specific characteristic.

[0011] Another aspect of this disclosure relates to a system including a controller and a sensor, wherein the sensor has an input wavelength λ iA light source configured to generate input light having [parameters], an optical waveguide, an array of a plurality of QMCs, and an imaging array, wherein the optical waveguide is configured to transmit the input light to the array of the plurality of QMCs, and each QMC absorbs a part of the input light from the optical waveguide, and in response to absorbing a part of the input light, based on respective parameter values in each QMC, emits respective light emissions having respective emission wavelengths λ re and is configured to radiate, and the imaging array is configured to detect each light emission and output a detection signal based on respective parameter values in each QMC. The controller includes a memory storing instructions and a processor. The processor is configured to execute the instructions to cause the controller to generate input light in the light source and determine respective parameter values in each QMC based on the detection signal.

[0012] In one or more embodiments of this aspect, the light source includes one of a group of light sources including a single wavelength tunable light source, an array of light emitting diodes, an array of vertical cavity surface emitting lasers, a grating antenna array operating over a frequency spectrum range, and combinations thereof.

[0013] In one or more embodiments of this aspect, the sensor further includes a microwave emitter configured to radiate microwave pulses to the array of the plurality of QMCs and an optical modulation element configured to modulate the input light. In one or more of these embodiments, the optical waveguide includes an optical modulation section including the optical modulation element, and the optical modulation element includes one of a group of optical modulation elements including a wavelength modulation element, a polarization modulation element, a mode modulation element, a near-field phase modulation element, a refractive index distribution type lens, a diffraction element, a refractive element, a lenticular array, an intensity modulation element, and combinations thereof.

[0014] In one or more embodiments of this aspect, the light source, the optical waveguide, the array of the plurality of QMCs, and the imaging array are a single device.

[0015] In one or more embodiments of this aspect, the sensor further includes a baffle configured to reduce crosstalk between a first QMC of the plurality of QMC arrays and a second QMC of the plurality of QMC arrays.

[0016] In one or more embodiments of this aspect, each QMC emits respective light emission having respective emission wavelength λ based on each parameter value among a group of parameter values including magnetic field strength value, magnetic field direction value, change in magnetic field strength value, change in magnetic field direction value, electric field strength value, electric field direction value, change in electric field strength value, change in electric field direction value, strain value, change in strain value, temperature value, change in temperature value, and combinations thereof in each QMC. re configured to emit.

[0017] Another aspect of the present disclosure relates to a method for detecting a field of parameter values. The method includes generating input light having input wavelength λ through a controller to a light source, transmitting the input light through an optical waveguide to an array of a plurality of QMCs, wherein each of the plurality of QMCs absorbs a part of the input light from the optical waveguide and, in response to absorbing a part of the input light, emits respective light emission having respective emission wavelength λ based on respective parameter values in each QMC, detecting the respective light emission through an imaging array, and outputting a detection signal through the imaging array based on respective parameter values in each QMC to obtain a field of parameter values of the array of the plurality of QMCs. i configured to emit. re configured to emit.

[0018] In one or more embodiments of this aspect, generating input light through a controller to a light source includes generating input light through a controller to one of a group of light sources including a single wavelength tunable light source, an array of light emitting diodes, an array of vertical cavity surface emitting lasers, a grating antenna array operating over a frequency spectrum range, and combinations thereof.

[0019] In one or more embodiments of this model, the method further includes the steps of radiating microwave pulses to an array of multiple QMCs via a microwave emitter, and modulating input light via an optical modulation element. In one or more of these embodiments, the optical waveguide includes an optical modulation section including an optical modulation element, and the step of modulating input light via an optical modulation element includes modulating input light via one of a group of optical modulation elements including wavelength modulation elements, polarization modulation elements, mode modulation elements, near-field phase modulation elements, refractive index distribution lenses, diffraction elements, refractive elements, lenticular arrays, intensity modulation elements, and combinations thereof.

[0020] In one or more embodiments of this model, the steps of generating, transmitting, detecting, and outputting include, as a single device, generating input light in a light source, transmitting the input light to the array of multiple QMCs, detecting the emission of each light, and outputting a detection signal, via a light source, an optical waveguide, an array of multiple QMCs, and an imaging array.

[0021] In one or more embodiments of this model, the method further includes the step of reducing crosstalk between a first QMC of an array of multiple QMCs and a second QMC of an array of multiple QMCs via a baffle. [Brief explanation of the drawing]

[0022] [Figure 1] Figure 1 shows a portion of a diamond lattice with nitrogen vacancy (NV) centers. [Figure 2] Figure 2 shows a system for detecting magnetic fields using an NV-centered diamond. [Figure 3] Figure 3 shows an example of a non-limiting system for optically detecting a parameter field using a quantum material (QM) chiplet array, according to aspects of the present disclosure. [Figure 4] Figure 4 shows a perspective view of the modulation control board of the system shown in Figure 3, according to an aspect of this disclosure. [Figure 5]Figure 5 shows a non-limiting example of the controller for the system in Figure 3. [Figure 6] Figure 6 shows a perspective view of a non-limiting example of an optically detected magnetic resonance (ODMR) sensor having a QMC array according to an aspect of the present disclosure. [Figure 7] Figure 7 shows a cross-sectional view of an exemplary light beam emitted from a laser array in a non-limiting example of the system in Figure 3. [Figure 8A] Figure 8A shows a cross-sectional view of an exemplary, spatially modulated light beam emitted from a laser array of a non-limiting example of the system in Figure 3, according to one or more embodiments. [Figure 8B] Figure 8B shows a cross-sectional view of an exemplary, spatially modulated light beam emitted from a laser array of a non-limiting example of the system in Figure 3, according to one or more embodiments. [Figure 9] Figure 9 shows a plan view of a QMC array in a non-restrictive example of the system in Figure 3. [Figure 10A] Figure 10A shows overlapping light beams on a single QMC according to one or more embodiments. [Figure 10B] Figure 10B shows light beams overlapping on a single QMC to create an interference pattern, according to one or more embodiments. [Figure 10C] Figure 10C shows a single light beam overlapping multiple QMCs according to one or more embodiments. [Figure 11] Figure 11 shows a plan view of an imaging array of a non-limiting example according to one or more embodiments. [Figure 12A] Figure 12A shows a single light-emitting area that overlaps multiple detection cells of an imaging array, according to one or more embodiments. [Figure 12B] Figure 12B shows multiple light-emitting areas overlapping a single detection cell of an imaging array, according to one or more embodiments. [Figure 13A] Figure 13A shows a plan view of an array of vertical-cavity surface-emitting lasers at time t1 according to one or more embodiments. [Figure 13B]Figure 13B shows a plan view of the vertical-cavity surface-emitting laser array in Figure 13A at time t2. [Figure 13C] Figure 13C shows a plan view of the vertical-cavity surface-emitting laser array in Figure 13B at time t3. [Figure 14A] Figure 14A shows a cross-sectional view of an exemplary spatially modulated light beam emitted from a non-limiting example of the system in Figures 13A-13C at time t4, according to one or more embodiments. [Figure 14B] Figure 14B shows a cross-sectional view of an exemplary spatially modulated light beam emitted from a non-limiting example of the system in Figures 13A-13C at time t5, according to one or more embodiments. [Figure 15] Figure 15 shows a front view of a non-limiting example of a horseshoe-shaped integrated optical sensor (IOS) according to one or more embodiments. [Figure 16] Figure 16 shows a front view of another non-limiting example of a horseshoe-shaped IOS according to one or more embodiments. [Figure 17] Figure 17 shows a front view of a non-limiting example of an IOS with a 90-degree bend shape according to one or more embodiments. [Figure 18] Figure 18 shows a front view of a non-limiting example of an IOS with a dual output split configuration according to one or more embodiments. [Figure 19] Figure 19 shows a front view of a non-limiting example of a dual-output T-shaped IOS according to one or more embodiments. [Figure 20] Figure 20 shows a system used to detect magnetic fields in the human brain according to an aspect of this disclosure. [Figure 21] Figure 21 shows a system used to detect strain on the wing surface of an aircraft according to an aspect of this disclosure. [Figure 22] Figure 22 shows a system used to detect a magnetic field on the surface of an integrated circuit (IC) chip according to an aspect of this disclosure. [Modes for carrying out the invention]

[0023] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate examples of embodiments and explain them.

[0024] The basis of ODMR and the ODMR system are described below with reference to FIGS. 1 to 2.

[0025] FIG. 1 shows a part of a diamond lattice 100 having a nitrogen-vacancy (NV) center.

[0026] As shown in the figure, the diamond lattice 100 includes a plurality of carbon atoms, and the sample is shown as carbon atoms 102. Each carbon atom has four covalent bonds with adjacent carbon atoms, and this sample is shown by covalent bond lines 104. A carbon atom is replaced by a nitrogen atom, for example, nitrogen atom 106. Further, adjacent carbon atoms are also removed, creating a vacancy 108. This combination of nitrogen atom 106 and vacancy 108 is called an NV center and has many quantum properties. The diamond lattice 100 is irradiated with light 110 having an input wavelength λ within the diamond lattice 100. i The diamond lattice 100 is in the presence of a parameter 112, which affects the electrons of the NV center. Further, a magnetic field 114 is present in the vicinity of the diamond lattice 100, and the magnetic field 114 also affects the electrons of the NV center. A microwave emitter 116 emits microwaves, indicated by the dotted arrow 118, into the diamond lattice 100. The NV center finally emits a photon 120 having an emission wavelength λ, where e λ i ≠λ e i.e., they are of different colors.

[0027] The NV centers are created by various non-limiting methods such as irradiation, annealing, chemical vapor deposition (CVD), ion implantation, and laser writing.

[0028] [[ID=二十九]] In irradiation and annealing, the diamond lattice (containing only carbon atoms) is first irradiated with high-energy particles (e.g., electrons, protons, neutrons). This creates lattice vacancies throughout the diamond. The diamond is then annealed at temperatures exceeding 700 degrees. During annealing, the vacancies become mobile and are trapped by nitrogen impurities present in the lattice. In CVD, small amounts of nitrogen impurities can be incorporated during the CVD growth of the diamond. These nitrogen atoms can trap vacancies created during the plasma synthesis process. In ion implantation, nitrogen ions can be directly implanted into specific locations in the diamond.

[0029] A useful quantum property of NV centers is their ability to optically detect parameters in their vicinity. For example, magnetic fields, electric fields, heat, and stress in or near an NV center affect the state of electrons within that center. These effects on the state of electrons within an NV center can be optically detected, and this can then be used to detect the quantities or even vectors of influencing magnetic fields, electric fields, etc., present in or near the NV center.

[0030] A system for utilizing light emission from quantum materials is described in more detail below, with reference to Figure 2.

[0031] Figure 2 shows the ODMR system 200 for detecting a magnetic field using an NV-centered diamond 204.

[0032] As shown in the figure, the ODMR system 200 includes a laser 202, an NV-centered diamond 204, a microwave emitter 206, a photodetector 208, a controller 210, a microwave emitter control line 212, a laser control line 214, and an output line 216.

[0033] During operation, the controller inputs the wavelength λ to the NV-centered diamond 204 via the laser control line 214. iThe laser 202 is instructed to emit light 218. A parameter field 220 exists on or near the NV-centered diamond so as to affect the NV-centered diamond. In this example, the parameter field 220 is a magnetic field. The controller instructs the microwave emitter 206 via the microwave emitter control line 212 to emit microwave pulses onto the NV-centered diamond 204. The NV-centered diamond 204 emits light at wavelength λ e It emits light 222. The photodetector 208 detects the light 222 and outputs a detection signal to the controller 210 via the output line 216.

[0034] The magnetic field-induced splitting of the electron spin states ms=±1 in the NV-centered diamond 204 can be measured by optically detecting it using the ODMR system 200. Microwave pulses from the microwave emitter 206 drive transitions between the ground state spin states (ms=0 and ms=±1) of electrons in the NV-centered diamond 204. By applying microwave pulses at an appropriate frequency (typically around 2.7 GHz), coherent control of the electron spin states in the NV-centered diamond 204 becomes possible. The frequency of the microwave pulses from the microwave emitter 206 that induce electron spin transitions in the NV-centered diamond 204 is sensitive to external magnetic fields due to the Zeeman effect. The precise frequency difference between the split ms=±1 states allows for quantitative measurement of magnetic field strength and direction, making the NV center an excellent quantum sensor for magnetic measurements.

[0035] By precisely measuring the frequencies of these resonance pairs, the magnetic field vectors in all spatial coordinates can be reconstructed, enabling applications in wide-field magnetic imaging and nanoscale magnetic measurements.

[0036] The problem with the ODMR system 200 is that it is too large for a typical optical bench setup and is particularly unportable for use outside the laboratory.

[0037] The compact photodetector sensor system according to the embodiments of this disclosure overcomes the size and portability issues of the ODMR system 200.

[0038] Aspects of this disclosure relate to optical waveguides configured to enable integrated scanning of quantum materials.

[0039] Another aspect of this disclosure is the input wavelength λ i A light source configured to supply light of an input wavelength λ to an optical waveguide, and i An optical waveguide configured to enable integrated scanning of the QMC array with light having a wavelength λ, an optical modulation unit configured to spatially modulate the light supplied to the QMC array, a microwave emitter configured to excite the QM in the QMC array with microwaves, and the emission wavelength λ emitted by the QM in the QMC array. e The present invention relates to an optical sensor including an imaging array configured to detect light having [a certain characteristic].

[0040] Another aspect of the present disclosure relates to a system including the above-described optical sensor and a controller, wherein the controller is configured to control a light source, control a microwave emitter, and determine parameter values ​​in each of the QMCs based on the output of an imaging array.

[0041] In one or more embodiments, a tunable light source is located at one end of an optical waveguide, and a quantum material is located at the other end.

[0042] In one or more embodiments, a single tunable light source may be replaced by an array of light-emitting diodes (LEDs), a vertical-cavity surface-emitting laser (VCSEL) array, or a grating antenna array operating across a frequency-spectral range, with light supplied via optical waveguides.

[0043] In one or more embodiments, the optical waveguide is configured to convert several parameters of a light source into a spatial scan of a QMC array. The light source or array can sweep wavelength, polarization, mode, or near-field phase modulation.

[0044] In one or more embodiments, a spatial optical modulator is used in conjunction with an optical waveguide to convert them into spatial sweeps.

[0045] In one or more embodiments, the optical waveguide includes a spatial optical modulation section within the optical waveguide itself in order to convert these into spatial sweeps.

[0046] A spatial light modulator or spatial light modulation unit can be optically modulated through known methods, non-limiting examples of known methods include methods via diffraction layers such as pillar arrays or phase rotors such as metalens; methods via refractive bends such as metal reflectors or spatial light modulators; refractive index distribution (GRIN) units that modulate the refractive index based on spatial modulation of material properties; and combinations thereof.

[0047] Known techniques for creating spatial optical modulation sections within optical waveguides are implemented by non-limiting examples, including laser processing techniques.

[0048] Optical waveguides are fabricated from known optical waveguide materials, including, but not limited to, silicon dioxide (glass), quartz, plastics, and combinations thereof. Within this larger optical waveguide, individual optical features (e.g., smaller optical waveguides, diffraction gratings, or other optical elements) are fabricated using any known techniques, including, but not limited to, laser writing, ion implantation, or other approaches.

[0049] In one or more embodiments, at the exit of the optical waveguide, a lenslet array or lenticular array is installed in front of the QMC array to increase the light collection efficiency on the QMC array.

[0050] In one or more embodiments, each QMC in the QMC array is of the same type of quantum material.

[0051] In one or more embodiments, at least two of the QMCs in the QMC array comprise different types of quantum materials.

[0052] In one or more embodiments, the quantum material is any quantum material, including, as non-limiting examples, nitrogen vacancy (NV) centered diamond, silicon vacancy (SiV) centered diamond, tin vacancy (SnV) centered diamond, lead vacancy (PbV) centered diamond, nickel vacancy (NiV) centered diamond, color centered, defective hexagonal boron nitride (hBN), defective silicon carbide (SiC), or other spin-sensitive materials.

[0053] In one or more embodiments, the lenslet array (or lenticular array) has a metal wiring crossbar or antenna structure between the lenslets (or lenses), and microwave excitation is applied to the quantum material of each QMC in the following QMC array.

[0054] In one or more embodiments, the purpose of the QMC is the input wavelength λ i It absorbs the light from the light source and emits a different second emission wavelength λ e Because it emits light, the QMC array can be arranged above an imaging array (e.g., a CMOS camera sensor) in which one or more pixels are assigned to each QMC. Non-limiting examples of imaging arrays include charge-coupled devices (CCDs) and active-pixel complementary metal-oxide-semiconductor (CMOS) devices.

[0055] The amount of light emitted from each QMC corresponds to the parameter values ​​at the location of each QMC. Non-limiting examples of such parameters include magnetic field strength, magnetic field direction, change in magnetic field strength, change in magnetic field direction, electric field strength, electric field direction, change in electric field strength, change in electric field direction, strain, change in strain, temperature, change in temperature, and combinations thereof.

[0056] In one or more embodiments, a pixel-level color (i.e., wavelength) filter is applied to each pixel of the imaging array. In one or more of these embodiments, many of the pixel filters are the emission wavelength λ of the QM. eWhile it is adjusted for this, some pixel filters use the input wavelength λ of the light source as a reference to eliminate the effects of amplitude drift of the light source. i It is adjusted accordingly.

[0057] In one or more embodiments, if multiple pixels of an imaging array are assigned to each QMC, the diffraction patterns from the chiplets can be analyzed to create a high-resolution map of the parameter field.

[0058] In one or more embodiments, an optical baffle or a plurality of optical baffles are implemented to eliminate crosstalk between optical waveguide paths and reduce crosstalk between QMCs.

[0059] An exemplary system for optically detecting a parameter field using a QMC array according to aspects of this disclosure is described in more detail below with reference to Figures 3 to 22.

[0060] Figure 3 shows a non-limiting example of a system 300 for optically detecting a parameter field using a QMC array according to an aspect of the present disclosure.

[0061] As shown in the figure, system 300 includes a controller 302, a laser array 304, an optical waveguide 306, a modulation control plate 308, a modulation control plate 310, a baffle 312, a QMC array 314, a microwave emitter 316, a baffle 318, an imaging array 320, a laser communication channel 322, a modulation control plate communication channel 324, a modulation control plate communication channel 326, a microwave emitter communication channel 328, and an imaging array communication channel 330. The optical waveguide 306 includes an optical modulation section 332 inside.

[0062] In this example, the controller 302, laser array 304, optical waveguide 306, modulation control board 308, modulation control board 310, baffle 312, QMC array 314, microwave emitter 316, baffle 318, and imaging array 320 are shown as separate devices. However, in one or more embodiments, at least two of the controller 302, laser array 304, optical waveguide 306, modulation control board 308, modulation control board 310, baffle 312, QMC array 314, microwave emitter 316, baffle 318, and imaging array 320 may be combined as a single device. Furthermore, in one or more embodiments, the controller 302 is implemented as a computer having a non-temporary computer-readable medium for holding or having computer-executable instructions or stored data structures. Such non-transient computer-readable recording media refers to any computer program product, equipment, or device, such as magnetic disks, optical disks, solid-state storage devices, memory, programmable logic devices (PLDs), DRAM, RAM, ROM, EEPROM, CD-ROM, or other optical disk storage, magnetic disk storage, or other magnetic storage devices, or any other medium that can be used to hold or store desired computer-readable program code in the form of instructions or data structures, and that can be accessed by a general-purpose or application-specific computer or general-purpose or application-specific processor. As used herein, disks include compact disks (CDs), laser disks, optical disks, digital multipurpose disks (DVDs), floppy disks, and Blu-ray disks. Combinations of the above are also included within the scope of computer-readable media. Information transmitted to or provided to a computer via a network or other communication connection (wired, wireless, or a combination of wired and wireless) can be appropriately recognized by the computer as computer-readable media. For this reason, any such connection can be appropriately referred to as computer-readable media. Combinations of the above should also be included within the scope of computer-readable media.

[0063] An exemplary tangible computer-readable medium is coupled to the controller 302 so that the processor can read information from and write information to the tangible computer-readable medium. Alternatively, the tangible computer-readable medium may be integrated into the controller 302. The controller 302 and the tangible computer-readable medium reside within an integrated circuit (IC), ASIC, large-scale integrated circuit (LSI), system LSI, super LSI, or ultra LSI component that performs some or all of the functions described herein. Alternatively, the controller 302 and the tangible computer-readable medium may exist as separate components.

[0064] Exemplary tangible computer-readable media may, in non-limiting examples, be combined with a system including a computer system / server that interacts with a number of other general-purpose or specialized computing system environments or configurations. Examples of known computing systems, environments and / or configurations suitable for use with computer systems / servers include, but are not limited to, personal computer systems, server computer systems, thin clients, thick clients, portable or notebook devices, multiprocessor systems, microprocessor-based systems, set-top boxes, programmable consumer electronics, network PCs, minicomputer systems, mainframe computer systems, and distributed cloud computing environments including any of the systems or devices described above, and their equivalents.

[0065] Such computer systems / servers are described in the general context of computer system executable instructions, such as program modules executed by the computer system. Generally, program modules include routines, programs, objects, components, logic, data structures, etc., that perform a specific task or implement a specific abstract data type. Furthermore, such computer systems / servers may be implemented in a distributed cloud computing environment where tasks are performed by remote processing devices connected via a communication network. In a distributed cloud computing environment, program modules may reside on both local and remote computer system storage media, including memory storage devices.

[0066] In one or more embodiments, the laser array 304, optical waveguide 306, modulation control plate 308, modulation control plate 310, baffle 312, QMC array 314, microwave emitter 316, baffle 318, and imaging array 320 are a single sensor that is positioned in space to detect the parameter field and is implemented to be spatially isolated from the controller 302.

[0067] In one or more embodiments, the controller 302, laser array 304, optical waveguide 306, modulation control plate 308, modulation control plate 310, baffle 312, QMC array 314, microwave emitter 316, baffle 318, and imaging array 320 are a single system arranged in space to detect the parameter field.

[0068] The controller 302 is any device or system configured to control the operation of the system 300.

[0069] The controller 302 is configured to communicate with the laser array 304 via the laser communication channel 322, with the modulation control board 308 via the modulation control board communication channel 324, with the modulation control board 310 via the modulation control board communication channel 326, with the microwave emitter 316 via the microwave emitter communication channel 328, and with the imaging array 320 via the imaging array communication channel 330.

[0070] The laser array 304 is any device or system configured to output n optical beams, where n is a positive integer greater than 1. In one or more embodiments, the laser array 304 takes the form of a group of light sources including a single tunable light source, an array of light-emitting diodes (LEDs), an array of vertical-cavity surface-emitting lasers (VCSELs), an array of grating antennas operating across a frequency spectral range, and combinations thereof. For illustrative purposes only, the laser array 304 is a VCSEL array, as is a non-limiting exemplary embodiment described in more detail herein. In one or more embodiments, each laser in the laser array 304 is configured to emit its own optical beam, each optical beam having the same input wavelength λ i It has. In one or more embodiments, at least one laser of the laser array 304 has an input wavelength λ i1 It is configured to emit a light beam having an input wavelength λ i1 The input wavelength λ of the optical beam of at least one other laser in the laser array 304 is i2 It is different.

[0071] For the sake of explanation, the light from the laser array 304 travels along axis 350 to the imaging array 320, and in this example, axis 350 is a straight line. In one or more embodiments, as will be described in more detail below, the axis of travel is not a straight line.

[0072] The optical waveguide 306 is arranged to receive n optical beams output by the laser array 304. The optical waveguide 306 is any device or system configured to output m optical beams to the QMC array 314 based on the n optical beams received from the laser array 304, where m is a positive integer greater than 0. In one or more embodiments, n is equal to m, and the number of optical beams input into the optical waveguide 306 is equal to the number of optical beams output from the optical waveguide 306. In one or more other embodiments, n is not equal to m, and the number of optical beams input into the optical waveguide 306 is not equal to the number of optical beams output from the optical waveguide 306. The optical waveguide 306 is any known waveguide material, including, in non-limiting examples, quartz, glass, plastic, and combinations thereof. As previously stated, separate optical paths or optical elements for optical transmission and / or conversion are created within the optical waveguide 306 using any known technique to facilitate the transmission of input and output optical beams.

[0073] The optical modulation unit 332 is any optical device or system configured to spatially modulate n optical beams from the laser array 304, and the optical waveguide 306 outputs the m optical beams to the QMC array 314 as m spatially modulated optical beams. In one or more embodiments, the optical modulation unit 332 can take the form of one of a group of optical modulation elements, including wavelength modulation elements, polarization modulation elements, mode modulation elements, near-field phase modulation elements, refractive index distributed lenses, diffraction elements, refractive elements, lenticular arrays, intensity modulation elements, modulation control plates 308 and operable modulation materials used in conjunction with the modulation control plates 308, and combinations thereof. The optical modulation unit 332 may be integrally molded as part of the optical waveguide 306.

[0074] The modulation control plate 308 is positioned adjacent to a portion of the modulation material section 332. The modulation control plate 308 is any device or system configured to generate an operating mechanism at a selectable first set of two-dimensional positions of the modulation material section 332.

[0075] The modulation control plate 310 is positioned adjacent to the second portion of the modulation material section 332 in a manner orthogonal to the modulation control plate 308. The modulation control plate 310 is any device or system configured to generate an operating mechanism at a selectable second set of two-dimensional positions in the optical modulation section 332.

[0076] The operation of modulation control boards 308 and 310 will be described in more detail below with reference to Figure 4.

[0077] Figure 4 shows perspective views of the modulation control board 308 and the modulation control board 310 according to an embodiment of the present disclosure.

[0078] As shown in the figure, the modulation control board 308 includes an array of actuators, and samples of the actuator array are shown as actuator 402, actuator 404, and actuator 406. The modulation control board 310 also includes an array of actuators, and samples of the actuator array are shown as actuator 408, actuator 410, and actuator 412.

[0079] Each actuator in the modulation control plate 308 and the modulation control plate 310 can provide an operating mechanism within the optical modulation section 332 (not shown) along an axis perpendicular to the surface of the actuator. For example, actuator 402 can provide an operating mechanism along axis 414 within the optical modulation section 332, actuator 404 can provide an operating mechanism along axis 416 within the optical modulation section 332, actuator 406 can provide an operating mechanism along axis 418 within the optical modulation section 332, actuator 408 can provide an operating mechanism along axis 420 within the optical modulation section 332, actuator 410 can provide an operating mechanism along axis 422 within the optical modulation section 332, and actuator 412 can provide an operating mechanism along axis 424 within the optical modulation section 332.

[0080] In such embodiments, the actuation mechanism may not be large enough to change the optical properties within the optical modulation section 332 along its axis. For example, the actuation mechanism from actuator 402 along axis 414 is not large enough to change the optical properties within the optical modulation section 332 along the entire axis 414. Similarly, the actuation mechanism from actuator 408 along axis 420 is not large enough to change the optical properties within the optical modulation section 332 along the entire axis 420. However, the combination of the size of the actuation mechanism from actuator 402 along axis 414 and the size of the actuation mechanism from actuator 408 along axis 420 is large enough at position 426 within the optical modulation section 332 to change the optical properties of the optical modulation section 332 at position 426. Similarly, the combination of the size of the operating mechanism from actuator 404 along axis 416 and the size of the operating mechanism from actuator 410 along axis 422 is sufficiently large at position 428 within the light modulation section 332, allowing the optical characteristics of the light modulation section 332 to be changed at position 428. The combination of the size of the operating mechanism from actuator 406 along axis 418 and the size of the operating mechanism from actuator 412 along axis 424 is sufficiently large at position 430 within the light modulation section 332, allowing the optical characteristics of the light modulation section 332 to be changed at position 430.

[0081] In this embodiment, the optical characteristics at a position along the XYZ coordinate system (the Z axis corresponds to the axis 350 of the optical waveguide 306 shown in Figure 3) within the optical modulation unit 332 can be selectively changed to dynamically modulate the light passing through the optical waveguide 306.

[0082] In one or more embodiments, the actuator may be a laser, in which case the operating mechanism is light and functions as a total light modulator. In such embodiments, the light modulation unit 332 includes, as non-limiting examples, known nonlinear optical materials that exhibit changes in their optical properties when exposed to high-intensity light, including potassium dihydrogen phosphate, polymers having chromophores, and semiconductor nanostructures.

[0083] In one or more embodiments, the actuator may be a piezoelectric element, in which case the operating mechanism is a pressure wave and functions as a piezoelectric optical modulator. In such embodiments, the optical modulation section 332 includes, as non-limiting examples, known optical materials that exhibit changes in their optical properties when exposed to pressure, including zinc oxide, polyvinylidene fluoride, and barium titanate.

[0084] In one or more embodiments, the actuator may be a heat-generating element, in which case the operating mechanism is heat and functions as a thermo-optical modulator. In such embodiments, the optical modulation unit 332 includes, as a non-limiting example, a known optical material that exhibits changes in its optical properties when exposed to heat, such as vanadium dioxide.

[0085] In one or more embodiments, the actuator may be a magnetic field generating element, in which case the operating mechanism is a magnetic field and functions as a magneto-optical modulator. In such embodiments, the optical modulation section 332 includes, as non-limiting examples, known optical materials that exhibit changes in their optical properties when exposed to a magnetic field, including magnetic fluids, magnetic plasmonic nanostructures, all-dielectric magnetic metasurfaces, and magnetic polymer composite materials.

[0086] In one or more embodiments, the actuator may be an electric field generating element, in which case the operating mechanism is an electric field and functions as an electric field optical modulator. In such embodiments, the optical modulation unit 332 includes, as non-limiting examples, known optical materials that exhibit changes in their optical properties when exposed to an electric field, including lithium niobate, barium titanate, potassium dihydrogen phosphate, organic polymers, and semiconductor materials.

[0087] Returning to Figure 3, the optical baffle 312 is positioned between the optical waveguide 306 and the QMC array 314. The baffle 312 is any device or system configured to prevent one of the m spatially modulated optical beams emitted from the optical waveguide 306 from combining with another of the m spatially modulated optical beams emitted from the optical waveguide 306 in any QMC within the QMC array 314. Non-limiting examples of the baffle 312 include an opaque epoxy resin coating applied to a target area of ​​the device, a single QM material package, separate component cavities or frames for elements of the QMC array, or other non-limiting physical baffles that prevent light transmission or crosstalk.

[0088] The QMC array 314 is positioned between baffles 312 and 318 and receives m spatially modulated beams radiated from optical waveguide 306 passing through baffle 312. The QMC array 314 is any device or system configured to have multiple chiplets of quantum material, where the multiple chiplets of quantum material have an input wavelength λ i It absorbs light, λ i ≠λ e The emission wavelength λ e It is configured to emit light. Quantum materials are any quantum material, including, as non-limiting examples, NV-centered diamond, SiV-centered diamond, SnV-centered diamond, PbV-centered diamond, NiV-centered diamond, color-centered, defective hBN, defective SiC, or other spin-sensitive materials.

[0089] In one or more embodiments, at least two of the QMCs in the QMC array 314 include different types of quantum materials.

[0090] In one or more embodiments, each QMC in the QMC array 314 emits the same emission wavelength λ based on its respective parameter value, which includes one value from a group of parameter values ​​including magnetic field strength, magnetic field direction, change in magnetic field strength, change in magnetic field direction, electric field strength, electric field direction, change in electric field strength, change in electric field direction, strain, change in strain, temperature, change in temperature, and combinations thereof. e It is configured to emit light having [certain properties].

[0091] In one or more embodiments, each QMC in the QMC array 314 emits a respective emission wavelength λ based on a parameter value that includes one of a set of parameter values, which includes magnetic field strength value, magnetic field direction value, change in magnetic field strength value, change in magnetic field direction value, electric field strength value, electric field direction value, change in electric field strength value, change in electric field direction value, strain value, change in strain value, temperature value, change in temperature value, and combinations thereof. re Each is configured to emit light having a specific characteristic.

[0092] In one or more embodiments, at least two QMCs of the QMC array 314 have the same emission wavelength λ based on two different respective parameter values, each including two values ​​from a group of parameter values ​​including magnetic field strength, magnetic field direction, change in magnetic field strength, change in magnetic field direction, electric field strength, electric field direction, change in electric field strength, change in electric field direction, strain, change in strain, temperature, change in temperature, and combinations thereof. e Each is configured to emit light having a specific characteristic.

[0093] In one or more embodiments, at least two QMCs of the QMC array 314 have two different respective emission wavelengths λ, based on two different parameter values, each including two values ​​from a group of parameter values ​​including magnetic field strength, magnetic field direction, change in magnetic field strength, change in magnetic field direction, electric field strength, electric field direction, change in electric field strength, change in electric field direction, strain, change in strain, temperature, change in temperature, and combinations thereof. reIt is configured to emit different types of light, each having a different characteristic.

[0094] The microwave emitter 316 is any device or system configured to emit microwave pulses into the QMC array 314. The microwave pulses from the microwave emitter 316 drive transitions between the ground state spin states (ms=0 and ms=±1) of electrons in the QMC of the QMC array 314. Non-limiting examples of the microwave emitter 316 include planar resonators, loop antennas, three-dimensional cavity resonators, microwave striplines, coplanar waveguides, and horn antennas. In one or more embodiments, the microwave frequency is tuned to around 2.7 GHz to coincide with the zero-field splitting of the ground state of the NV-centered diamond.

[0095] The baffle 318 is positioned between the QMC array 314 and the imaging array 320. The baffle 318 is any device or system configured in the imaging array 320 to prevent light emitted from each QMC in the QMC array 314 from combining with light from another QMC in the QMC array 314. Non-limiting examples of the baffle 318 include an opaque epoxy resin coating applied to a target area of ​​the device, a single QM material package, separate component cavities or frames for elements of the QMC array, or other non-limiting physical baffles to prevent light transmission or crosstalk.

[0096] The imaging array 320 is a device or system configured as an array to detect light in p separate areas, which are a positive integer greater than 1, and to output an imaging signal based on the light detected in each separate area. In one or more embodiments, p is equal to m, and the number of separate areas in the imaging array 320 is equal to the number of light beams output from the optical waveguide 306. In one or more embodiments, p is not equal to m, and the number of separate areas in the imaging array 320 is not equal to the number of light beams output from the optical waveguide 306. Non-limiting examples of the imaging array 320 include charge-coupled devices (CCDs) and active-pixel complementary metal-oxide-semiconductor (CMOS) devices.

[0097] The laser communication channel 322, the modulation control board communication channel 324, the modulation control board communication channel 326, the microwave emitter communication channel 328, and the imaging array communication channel 330 are any known type of communication channel, including wired and wireless communication channels.

[0098] During operation, the controller 302 outputs a laser drive signal 334 to the laser array 304 via the laser communication channel 322. The laser drive signal 334 outputs the input wavelength λ to the laser array 304. i The controller radiates n optical beams 336 into the optical waveguide 306. In addition, the controller outputs a modulator drive signal 338 to the modulation control board 308 via the modulation control board communication channel 324 and a modulator drive signal 340 to the modulation control board 310 via the modulation control board communication channel 326. In addition, the controller outputs a microwave drive signal 342 to the microwave emitter 316 via the microwave emitter communication channel 328. The microwave drive signal 342 causes the microwave emitter 316 to radiate microwaves into the QMC array 314.

[0099] The optical modulation unit 332 spatially modulates the n optical beams 336 in the optical waveguide 306, and the input wavelength λ im spatially modulated light beams 344 having the following properties are output. Parameter fields 352, such as magnetic field, electric field, temperature, strain, etc., are present in or near the QMC array 314 and affect the light emitted from the QMCs within the QMC array 314.

[0100] m spatially modulated optical beams 344 are incident on the QMC array 314, while a microwave emitter 316 emits microwaves into the QMC array 314. The m spatially modulated optical beams 344 and the microwaves from the microwave emitter 316 interact with electrons in the QMCs within the QMC array 314 in the same manner as described above with reference to Figures 1 and 2.

[0101] QMC array 314 is λ i ≠λ e The emission wavelength λ e The light 346 is output. As described above, in one or more embodiments, the light 346 emits light at each of the multiple emission wavelengths λ er It includes multiple lights having λ in each of the multiple emission wavelengths. er ≠λ i That is the case.

[0102] The imaging array 320 detects the light 346 and outputs an imaging signal 348 to the controller 302 via the imaging array communication channel 330.

[0103] The controller displays an output corresponding to the parameter value of field 352 based on the imaging signal 348.

[0104] The operation of controller 302 will be described in more detail with reference to Figure 5.

[0105] Figure 5 shows a non-limiting example of the controller 302 of system 300 in Figure 3.

[0106] As shown in Figure 5, the controller 302 includes a control processor 502, a memory 504 having data and a stored scanning program 506, a microwave driver circuit 508, an optical driver circuit 510, a display 512, a detector input circuit 514, a modulator driver circuit 516, a modulator driver circuit 518, a user interface (UI) 520, a memory communication channel 522, a microwave communication channel 524, an optical driver communication channel 526, a display communication channel 528, a detector communication channel 530, a modulator communication channel 532, a modulator communication channel 534, and a UI communication channel 536.

[0107] In this example, the control processor 502, memory 504, microwave driver circuit 508, optical driver circuit 510, display 512, detector input circuit 514, modulator driver circuit 516, modulator driver circuit 518, and UI 520 are shown as separate devices. However, in one or more embodiments, at least two of the control processor 502, memory 504, microwave driver circuit 508, optical driver circuit 510, display 512, detector input circuit 514, modulator driver circuit 516, modulator driver circuit 518, and UI 520 may be combined as a single device. Furthermore, in one or more embodiments, at least one of the control processor 502, memory 504, microwave driver circuit 508, optical driver circuit 510, display 512, detector input circuit 514, modulator driver circuit 516, modulator driver circuit 518, and UI 520 may be implemented as a computer having a non-temporary computer-readable medium for holding or having computer-executable instructions or stored data structures.

[0108] The control processor 502 is configured to communicate with the memory 504 via the memory communication channel 522, with the microwave driver circuit 508 via the microwave communication channel 524, with the optical driver circuit 510 via the optical driver communication channel 526, with the display 512 via the display communication channel 528, with the detector input circuit 514 via the detector communication channel 530, with the modulator driver circuit 516 via the modulator communication channel 532, with the modulator driver circuit 518 via the modulator communication channel 534, and with the UI 520 via the UI communication channel 536.

[0109] The control processor 502 is any device or system configured to control the operation of the controller 302.

[0110] Memory 504 is any device or system capable of storing data, scan programs 506, and instructions used by the control processor 502, and includes, but is not limited to, RAM, DRAM, hard drives, solid-state drives, ROM, EPROM, EEPROM, flash memory, memory blocks embedded in an FPGA, or layers of various other memory hierarchies.

[0111] The microwave driver circuit 508 is any device or system configured to output a microwave drive signal to the microwave emitter 316 via the microwave emitter communication channel 328.

[0112] The optical driver circuit 510 is any device or system configured to output a laser drive signal to the laser array 304 via the laser communication channel 322.

[0113] The display 512 is any device or system configured to display the output of the controller 302 for the user.

[0114] The detector input circuit 514 is any device or system configured to receive detected parameter signals from the imaging array 320 via the imaging array communication channel 330.

[0115] The modulator driver circuit 516 is any device or system configured to output a modulator drive signal 338 to the modulation control board 308 via the modulation control board communication channel 324.

[0116] The modulator driver circuit 518 is any device or system configured to output a modulator drive signal 340 to the modulation control board 310 via the modulation control board communication channel 326.

[0117] UI520 is any device or system configured to enable a user to access and control the control processor 502. UI520 includes one or more layers, including a human-machine interface (HMI) machine having physical input hardware such as a keyboard, mouse, or gamepad, and output hardware such as a computer monitor, speakers, and a printer. Additional UI layers in UI520 include a haptic UI (tactile), a visual UI (visual), and an auditory UI (auditory), which can interact with one or more human senses.

[0118] The scanning program 506 controls the operation of the controller 302. The scanning program 506, which has a set (at least one) of program modules, is stored in memory 504 in a similar manner to, for example, but not limited to, an operating system, one or more application programs, other program modules, and program data. Each of the operating system, one or more application programs, other program modules, and program data, or a combination thereof, includes an implementation of a network environment. The program modules generally perform functions and methodologies of various embodiments of the disclosure described herein.

[0119] As will be described in more detail below, in one or more embodiments, when the scanning program 506 is executed by the control processor 502, it sends the input wavelength λ to the controller 302. i The instruction includes causing the light source to generate input light having a specific property and to determine the field of parameter values ​​of the QMC array 314 based on the detection signal from the imaging array 320.

[0120] As will be described in more detail below, in one or more embodiments, when the scanning program 506 is executed by the control processor 502, it sends the input wavelength λ to the controller 302. i The command includes causing the laser array 304, which serves as a light source, to generate input light having the specified properties, and to determine the field of parameter values ​​of the QMC array 314 based on the detection signal from the imaging array 320.

[0121] As will be described in more detail below, in one or more embodiments, when the scanning program 506 is executed by the control processor 502, it sends the input wavelength λ to the controller 302. i The instruction includes causing the light source to generate input light having a specific property and to determine the field of parameter values ​​of the QMC array 314 based on the detection signal from the imaging array 320.

[0122] As will be described in more detail below, in one or more embodiments, the scanning program 506, when executed by the control processor 502, further includes an instruction to the controller 302 to cause the microwave emitter 316 to emit microwaves into the QMC array 314.

[0123] As will be described in more detail below, in one or more embodiments, the scanning program 506, when executed by the control processor 502, further includes instructions to the controller 302 to cause the modulation control board 308 to affect the optical properties of the operable modulation material in the optical modulation section 332 of the optical waveguide 306.

[0124] As will be described in more detail below, in one or more embodiments, the scanning program 506, when executed by the control processor 502, further includes instructions to the controller 302 to cause the modulation control board 310 to affect the optical properties of the operable modulation material in the optical modulation section 332 of the optical waveguide 306.

[0125] As will be described in more detail below, in one or more embodiments, the scanning program 506, when executed by the control processor 502, further includes instructions to the controller 302 to cause the modulation control plate 308 to affect the optical properties of the operable modulation material in the optical modulation section 332 of the optical waveguide 306, and to cause the modulation control plate 310 to affect the optical properties of the operable modulation material in the optical modulation section 332 of the optical waveguide 306.

[0126] The memory communication channel 522, microwave communication channel 524, optical driver communication channel 526, display communication channel 528, detector communication channel 530, and UI communication channel 536 are any known type of communication channel, including wired and wireless communication channels.

[0127] In the operation of one or more embodiments, the control processor 502 executes instructions in the scanning program 506 to instruct the optical driver circuit 510 to output a laser drive signal 334. Subsequently, the laser array 304 responds to the laser drive signal 334 with an input wavelength λ i It outputs n optical beams 336 having n beams.

[0128] In one or more embodiments, the control processor 502 further executes instructions in the scanning program 506 to instruct the modulator driver circuit 516 to output a modulator drive signal 338. The modulation control board 308, in the embodiments described above with reference to Figure 4, provides at least one actuation mechanism to the operable modulation material portion in the optical modulation unit 332 in response to the modulator drive signal 338. In one or more embodiments, the control processor 502 further executes instructions in the scanning program 506 to instruct the modulator driver circuit 518 to output a modulator drive signal 340. The modulation control board 310, in the embodiments described above with reference to Figure 4, provides at least one actuation mechanism to the operable modulation material portion in the optical modulation unit 332 in response to the modulator drive signal 340. In this embodiment, the controller 302 dynamically optically spatially modulates n optical beams 336 from the laser array 304 to the input wavelength λ i It is configured to create m spatially modulated optical beams 344 having [a certain characteristic].

[0129] In one or more embodiments, the control processor 502 further executes instructions in the scanning program 506 to instruct the microwave driver circuit 508 to output a microwave drive signal 342.

[0130] The detector input circuit 514 transmits the imaging signal 348 to the control processor 502. The control processor 502 executes instructions in the scanning program 506 to determine the parameter values ​​of the field 352 based on the imaging signal 348. The control processor 502 outputs a display signal 538 to the display 512 to display the determined parameter values ​​of the field 352 on the display.

[0131] The system 300 described above is more generally shown as a schematic diagram illustrating the operation of each element of the system. According to one or more embodiments, the photodetector may include, as a single device, a laser array, an optical waveguide, an optical modulator, a QMC array 314, a microwave emitter, and an imaging array. This will be described in more detail with reference to Figure 6.

[0132] Figure 6 shows a perspective view of a non-limiting example of an optically detected magnetic resonance (ODMR) sensor 600 having a QMC array according to an aspect of the present disclosure.

[0133] As shown in the figure, the ODMR sensor 600 includes a VCSEL array 602, an optical waveguide 604, a QMC array 606, a microwave radiation coil 608, an imaging array 610, and an optical modulation element. In one or more embodiments, the optical modulation element includes one or more diffraction elements 612 integrally molded within the optical waveguide 604, one or more dynamic optical spatial modulation elements 614, one or more distributed refractive index (GRIN) elements 616, one or more refractive elements 618, one or more lenslet arrays 620, and one or more combinations thereof. One or more dynamic optical spatial modulation elements 614 include an operable modulation material 622 having a modulation control plate 624 facing one side and a modulation control plate 626 facing the side perpendicular thereto.

[0134] The VCSEL array 602 of the ODMR sensor 600 corresponds to the laser array 304 of the system 300 described above, with reference to Figure 3. The optical waveguide 604 of the ODMR sensor 600 corresponds to the optical waveguide 306 of the system 300. The QMC array 606 of the ODMR sensor 600 corresponds to the QMC array 314 of the system 300. The microwave emission coil 608 of the ODMR sensor 600 corresponds to the microwave emitter 316 of the system 300. The imaging array 610 of the ODMR sensor 600 corresponds to the imaging array 320 of the system 300. The optical modulation element of the ODMR sensor 600 corresponds to the optical modulation unit 332 of the system 300. In this embodiment, the optical modulation element of the ODMR sensor 600 includes a dynamic optical spatial modulation element 614, and the modulation control plate 308, modulation control plate 310, and a portion of the optical modulation unit 332 (not shown in Figure 3) of the system 300 correspond to the modulation control plate 624, modulation control plate 626, and operable modulation material 622, respectively.

[0135] In one or more embodiments, the optical modulation element is created within the optical waveguide 604.

[0136] In one or more embodiments, the optical waveguide 604 includes at least two separate members, and the optical modulation element is positioned between two of the separate members.

[0137] In one or more embodiments, the optical modulation element is operable to spatially modulate the optical beam from the VCSEL array 602. This will be described in more detail with reference to a more general system 300 and Figure 7.

[0138] Figure 7 shows a cross-sectional view of an exemplary light beam emitted from a non-limiting example of the laser array 304 of system 300 in Figure 3.

[0139] As shown in Figure 7, the array of light beams 700 contains multiple individual light beams, this sample being shown as light beam 702. In this example, each laser in the laser array 304 emits its own light beam. The array of light beams 700 corresponds to the light 336 in Figure 3 emitted from the laser array 304 into the optical waveguide 306.

[0140] An array of light beams similar to the light beam array 700 is radiated from the VCSEL array 602 of the ODMR sensor 600 in Figure 6 into the optical waveguide 604 of the ODMR sensor 600 shown in Figure 6.

[0141] Returning to Figure 3, the array of light beams from the laser array 304 enters the optical waveguide 306 and is modulated by the optical modulation unit 332.

[0142] In one or more embodiments, the optical modulation unit 332 spatially modulates the light beam emitted by the laser array 304 statically, dynamically, or a combination thereof.

[0143] When the light beam emitted by the laser array 304 is "statically" optically spatially modulated, the optical modulation unit 332 takes the form of one of the optical modulation elements, including wavelength modulation elements, polarization modulation elements, mode modulation elements, near-field phase modulation elements, refractive index distributed lenses, diffraction elements, refractive elements, lenticular arrays, intensity modulation elements, and combinations thereof. As a result, when configured using the optical waveguide 306, any optical spatial modulation does not change over time. Rather, it remains constant or "static".

[0144] However, when the light beam emitted by the laser array 304 is "dynamically" optically spatially modulated, the optical modulation unit 332 takes the form of an operable modulation material and is used in combination with the modulation control plate 308.

[0145] The results of optically spatially modulating the light beam emitted by the laser array 304 using the optical modulation unit 332 will be explained in more detail below with reference to Figures 8A and 8B.

[0146] Figure 8A shows a cross-sectional view of an exemplary light beam, after spatial modulation, emitted from a laser array 304 of a non-limiting example of the system 300 of Figure 3, according to one or more embodiments.

[0147] As shown in Figure 8A, the array of light beams 800 includes multiple individual light beams, this sample being shown as light beam 802. In this example, each light beam from the laser array 304 is expanded to overlap with multiple adjacent light beams. In one or more embodiments, the overlapping light beams increase the amount of light on the individual QMCs in the QMC array 314. In one or more embodiments, the amount and specific shape of the overlap are adjusted via the light modulation unit 332 to create a predetermined interference pattern, thereby affecting the amount of light on the individual QMCs in the QMC array 314.

[0148] Figure 8B shows a cross-sectional view of an exemplary light beam, after spatial modulation, emitted from a laser array 304 of a non-limiting example of the system 300 of Figure 3, according to one or more embodiments.

[0149] As shown in Figure 8B, the array of light beams 804 includes multiple individual light beams, this sample being shown as light beam 806. In this example, each light beam from the laser array 304 is reduced and split to generate a larger number of smaller light beams. In one or more embodiments, the multiple smaller light beams improve the accuracy of the light onto the individual QMCs in the QMC array 314. In one or more embodiments, the size and number of split light beams are adjusted via the optical modulation unit 332 to create a predetermined targeting of light onto the individual QMCs in the QMC array 314.

[0150] An array of optical beams 800 or 804 is an example corresponding to m spatially modulated optical beams 344 in Figure 3, which are radiated from optical waveguide 306 to QMC array 314.

[0151] An array of light beams, similar to the array of light beam 800 or the array of light beam 804, is radiated from the optical waveguide 604 to the QMC array 314 of system 300 as shown in Figure 3, or to the QMC array 606 of the ODMR sensor 600 as shown in Figure 6.

[0152] Figure 9 shows a plan view of a non-limiting example of the QMC array 314 of system 300 in Figure 3.

[0153] As shown in Figure 9, the chiplet array 314 includes a substrate 902 having multiple QMC areas arranged in an array, an example of which is shown as QMC904.

[0154] It should be noted that the amount of light incident on each QMC depends on the optical modulation by the optical modulation unit 332 and the size of the output light beams from each laser in the laser array 304. This will be explained in more detail with reference to Figures 10A to 10C.

[0155] Figure 10A shows overlapping light beams on a single QMC according to one or more embodiments.

[0156] As shown in the figure, light beams 1000, 1002, 1004, and 1006 are each part of m spatially modulated light beams 344, and partially incident on QMC1008. This arrangement increases the likelihood that at least one light beam will incident on the NV center of QMC1008.

[0157] However, it should be noted that in one or more embodiments, the individual light beams of the m spatially modulated light beams 344 may interfere with each other. This will be explained in more detail with reference to Figure 10B.

[0158] Figure 10B shows light beams overlapping on a single QMC to create an interference pattern on the QMC, according to one or more embodiments.

[0159] As shown in the figure, light beams 1010, 1012, 1014, and 1016 are each part of m spatially modulated light beams 344 and partially incident on the QMC 1018. In this case, light beams 1010, 1012, 1014, and 1016 create interference patterns on the QMC 1018. In one or more embodiments, the interference patterns created by the multiple incident light beams are predetermined to increase the amount of incident light on the NV center of the QMC 1018.

[0160] Figure 10C shows a single optical beam 1020 overlapping multiple QMCs according to one or more embodiments. As shown in the figure, the optical beam 1020 overlaps QMCs 1022, 1024, 1026, and 1028. Such arrangement increases the likelihood that input light is incident on each QMC.

[0161] As described above, after the QMCs of the QMC array 314 are irradiated by m spatially modulated light beams 344, the QMCs of the QMC array 314 emit light 346 into the imaging array 320. This will be explained in more detail with reference to Figures 11 to 12B.

[0162] Figure 11 shows a plan view of a non-limiting example of the imaging array 320 of the system 300 of Figure 3, according to one or more embodiments.

[0163] As shown in Figure 11, the imaging array 320 includes an array of individual photodetectors, this sample is shown as photodetector 1102.

[0164] In one or more embodiments, each photodetector in the imaging array is small enough so that multiple adjacent photodetectors can detect light emitted from a single QMC of the QMC array 314. This is described in more detail with reference to Figure 12A.

[0165] Figure 12A shows a single light-emitting area that overlaps multiple detection cells of an imaging array 320, according to one or more embodiments.

[0166] As shown in the figure, photodetectors 1200, 1202, 1204, and 1206 are configured to each receive a portion of the light emitted by a single QMC of the QMC array 314, which is shown as a shaded circle 1208.

[0167] In one or more other embodiments, each photodetector in the imaging array is large enough so that a single detector can detect light emitted from multiple QMCs in the QMC array 314. This will be explained in more detail with reference to Figure 12B.

[0168] Figure 12B shows multiple light-emitting areas overlapping a single detection cell of the imaging array 320, according to one or more embodiments.

[0169] As shown in the figure, the photodetector 1210 is configured to receive light emitted by four different QMCs of the QMC array 314, indicated as shaded circles 1212, 1214, 1216, and 1218.

[0170] In the non-limiting embodiments described above, each laser in the laser array 304 emits light. As can be expected, in one or more embodiments, the controller 302 can control the laser array 304 to output a raster scan of the light beam to the optical waveguide 306. This will be described in more detail with reference to Figures 13A to 13C.

[0171] Figure 13A shows a plan view of a non-limiting example of the laser array 304 of the system 300 in Figure 3 at time t1, according to one or more embodiments.

[0172] As shown in Figure 13A, the laser array 304 includes an array of individual laser emitters, in this example shown as laser emitters 1302 and 1304. In this state, only laser emitter 1302, indicated by the darkened circle, emits light, while other laser emitters, such as laser emitter 1304, indicated by the undarkened circles, do not emit light.

[0173] In these non-limiting embodiments, the controller 302 outputs a laser drive signal 334 to cause the laser array 304 to simultaneously drive fewer lasers than all lasers in the laser array 304. In one or more embodiments, the controller 302 outputs a laser drive signal 334 to cause the laser array 304 to raster scan the lasers in the laser array 304. This will be explained in more detail with reference to Figures 13B to 13C.

[0174] Figure 13B shows a plan view of a non-limiting example of the laser array 304 in Figure 13A at time t2.

[0175] As shown in Figure 13B, only laser emitter 1304, indicated by the darkened circle, emits light, while other laser emitters, such as laser emitter 1302, indicated by the undarkened circle, do not emit light.

[0176] Figure 13C shows a plan view of a non-limiting example of the laser array 304 in Figure 13B at time t3.

[0177] As shown in Figure 13C, only laser emitter 1306, indicated by the darkened circle, emits light, while other laser emitters, such as laser emitter 1304, indicated by the undarkened circle, do not emit light.

[0178] In the non-limiting exemplary embodiments described above with reference to Figures 13A to 13C, the controller 302 controls the laser array 304 to output in a raster scanning mode that illuminates each QMC in the QMC array 314. However, in one or more embodiments, individual laser emitters may be operated to illuminate a predetermined QMC in the QMC array 314.

[0179] Returning to Figure 3, the light 336 is emitted into the optical waveguide 306, then optically spatially modulated by the optical modulation unit 332, generating m spatially modulated light beams 344. These m spatially modulated light beams 344 are then incident on the QMC array 314. This will be explained in more detail with reference to Figures 14A and 14B.

[0180] Figure 14A shows a cross-sectional view of an exemplary light beam, spatially modulated by the optical modulator 332, emitted from a non-limiting example of the laser array 304 shown in Figures 13A-13C, at time t4, according to one or more embodiments. As shown in the figure, a single spatially modulated light beam 1402 is emitted from the optical modulator 332. Multiple dashed circles represent locations where other light beams are optionally emitted from the optical modulator 332, and this sample is indicated by the dashed circle 1404.

[0181] Figure 14B shows a cross-sectional view of an exemplary light beam, spatially modulated by the optical modulator 332, at time t5, emitted from a non-limiting example of the laser array 304 shown in Figures 13A-13C, according to one or more embodiments. As shown in the figure, a single spatially modulated light beam 1406 is emitted from the optical modulator 332. The circles represent locations where other light beams are optionally emitted from the optical modulator 332, and this sample is indicated by circle 1408.

[0182] As shown in Figures 14A and 14B, the optical modulation unit 332 can change the shape and size of the light beams emitted by the individual lasers of the laser array 304 by at least one of refraction, diffraction, and interference. Furthermore, additional refraction, diffraction, and interference effects can be adjusted by changing the number or location of the individual lasers driven by the laser array 304 so that the optical modulation unit 332 produces a predetermined specific output.

[0183] In one or more embodiments, it may be desirable to prevent individual output light beams from the optical modulation unit 332 from incident on more than one QMC in the QMC array 314, or to prevent more than one individual output light beams from the spatial light modulation unit from incident on a single QMC in the QMC array 314. Therefore, in one or more embodiments, as described above, the baffle 312 reduces crosstalk between light beams incident on the QMCs in the QMC array 314.

[0184] In one or more embodiments, it may be desirable to prevent light emitted from each QMC in the QMC array 314 from being combined with light from another QMC in the QMC array 314 in the imaging array 320. Therefore, in one or more embodiments, as described above, the baffle 318 prevents light emitted from each QMC in the QMC array 314 from being combined with light from another QMC in the QMC array 314 in the imaging array 320.

[0185] Figure 6 shows a non-limiting exemplary shape of a photodetector according to one or more embodiments. However, other shapes of photodetectors are configured according to aspects of the present disclosure, and some non-limiting examples of other shapes are described below in more detail with reference to Figures 15 to 19.

[0186] Figure 15 shows a front view of a non-limiting example of a horseshoe-shaped integrated optical sensor (IOS) 1500 according to one or more embodiments.

[0187] As shown in the figure, the horseshoe-shaped IOS1500 includes a laser array 1502, a waveguide body 1504, and an output processing unit 1506. For simplicity, the output processing unit 1506 is shown, but the output processing unit 1506 includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle, as described above with reference to Figure 3.

[0188] The waveguide body 1504 includes an input leg 1508, a bent leg 1510, and an output leg 1512. The input leg 1508 is configured to receive light from the laser array 1502 and guide the light to the bent leg 1510. The bent leg 1510 is configured to receive light from the input leg 1508 and guide the light to the output leg 1512. The output leg 1512 is configured to receive light from the bent leg 1510 and guide the light to the output processing unit 1506.

[0189] The input leg 1508 is separated from the output leg 1512 by space 1514. In this embodiment, the laser array 1502 is offset from the area detected by the output processing unit 1506. Furthermore, in embodiments similar to those described above, the waveguide body 1504 may include an optical modulation element comprising one or more of a diffraction element, a GRIN element, a refractive element, and a lenslet array, an operable modulation material section used in conjunction with a modulation control plate, and combinations thereof.

[0190] Figure 16 shows a front view of a non-limiting example of a U-shaped IOS1600 according to one or more embodiments.

[0191] As shown in the figure, the U-shaped IOS1600 includes a laser array 1602, a waveguide body 1604, and an output processing unit 1606. For simplicity, the output processing unit 1606 is shown, but as described above with reference to Figure 3, the output processing unit 1606 includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle.

[0192] The waveguide body 1604 includes an input leg 1608, a bent leg 1610, and an output leg 1612. The input leg 1608 is configured to receive light from the laser array 1602 and guide the light to the bent leg 1610. The bent leg 1610 is configured to receive light from the input leg 1608 and guide the light to the output leg 1612. The output leg 1612 is configured to receive light from the bent leg 1610 and guide the light to the output processing unit 1606.

[0193] The input leg 1608 is adjacent to the output leg 1612, and therefore there is no space compared to the horseshoe-shaped IOS 1500 described above. Furthermore, in embodiments similar to those described above, the waveguide body 1604 may include an optical modulation element comprising one or more of a diffraction element, a GRIN element, a refractive element, and a lenslet array, an operable modulation material section used in conjunction with a modulation control plate, and combinations thereof.

[0194] Figure 17 shows a front view of a non-limiting example of an IOS1700 with a 90-degree bend shape according to one or more embodiments.

[0195] As shown in the figure, the IOS1700 with a 90-degree bend includes a laser array 1702, a waveguide body 1704, and an output processing unit 1706. For simplicity, the output processing unit 1706 is shown, but as described above with reference to Figure 3, the output processing unit 1706 includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle.

[0196] The waveguide body 1704 includes an input leg 1708, a bent leg 1710, and an output leg 1712. The input leg 1708 is configured to receive light from the laser array 1702 and guide the light to the bent leg 1710. The bent leg 1710 is configured to receive light from the input leg 1708 and guide the light to the output leg 1712. The output leg 1712 is configured to receive light from the bent leg 1710 and guide the light to the output processing unit 1706.

[0197] The input leg 1708 is configured to guide light along the axis 1714, while the output leg 1712 is configured to guide light along the axis 1716. In this embodiment, the laser array 1702 is offset from the area detected by the output processing unit 1706. Furthermore, in embodiments similar to those described above, the waveguide body 1704 may include an optical modulation element comprising one or more of a diffraction element, a GRIN element, a refractive element, and a lenslet array, an operable modulation material section used in conjunction with a modulation control plate, and combinations thereof.

[0198] Figure 18 shows a front view of a non-limiting example of an IOS1800 with a dual output split configuration according to one or more embodiments.

[0199] As shown in the figure, the IOS1800 in a dual-output split configuration includes a laser array 1802, a waveguide body 1804, an output processing unit 1806, and an output processing unit 1808. For simplicity, the output processing unit 1806 is shown, which includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle, as described above with reference to Figure 3. Similarly, the processing unit 1808 is shown for simplicity, which includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle, as described above with reference to Figure 3.

[0200] In one or more embodiments, the QMC array of the output processing unit 1806 is similar to the QMC array of the output processing unit 1808, and each can output light based on a field in the QMC array or a field near the QMC array, where the field is based on some parameter, such as a magnetic field, electric field, temperature, or strain. For example, the output processing unit 1806 is configured to output light based on a field in its QMC array, where the field is based on a magnetic field at the location of the output processing unit 1806 or a magnetic field near the location of the output processing unit 1806, and the output processing unit 1808 is configured to output light based on a field in its QMC array, where the field is similarly based on a magnetic field at the output processing unit 1808 or a magnetic field near the output processing unit 1808.

[0201] In one or more embodiments, the QMC array of the output processing unit 1806 differs from the QMC array of the output processing unit 1808 in that each can output light based on a different type of field in the QMC array or a different type of field near the QMC array, each field being based on different parameters, such as magnetic field, electric field, temperature, and strain. For example, the output processing unit 1806 is configured to output light based on a field in its QMC array, where the field is based on a magnetic field at the location of the output processing unit 1806 or a magnetic field near the location of the output processing unit 1806, and the output processing unit 1808 is configured to output light based on a field in its QMC array, where the field is based on a strain field at the location of the output processing unit 1808 or a strain field near the output processing unit 1808.

[0202] The waveguide body 1804 includes an input leg 1808, a beam splitter 1810, an output leg 1812, and an output leg 1814. The input leg 1808 is configured to receive light from the laser array 1802 and guide the light to the beam splitter 1810. The beam splitter 1810 is configured to receive light from the input leg 1808 as indicated by arrow 1818, reflect a portion of the received light to the output leg 1812 as indicated by arrow 1816, and transmit a portion of the received light to the output leg 1814 as indicated by arrow 1820. The output leg 1812 is configured to receive the light reflected by the beam splitter 1810 and guide the light to the output processing unit 1806. The output leg 1814 is configured to receive the light transmitted through the beam splitter 1810 and guide the light to the output processing unit 1808.

[0203] In this embodiment, the laser array 1802 is offset from two separate areas on different axes and detected by output processing units 1806 and 1808, respectively. Furthermore, in embodiments similar to those described above, the waveguide body 1804 may include an optical modulation element comprising one or more of a diffraction element, a GRIN element, a refractive element, and a lenslet array, an operable modulation material section used in conjunction with a modulation control plate, and combinations thereof.

[0204] Figure 19 shows a front view of a non-limiting example of a dual-output T-shaped IOS1900 according to one or more embodiments.

[0205] As shown in the figure, the dual-output T-shaped IOS1900 includes a laser array 1902, a waveguide body 1904, an output processing unit 1906, an output processing unit 1908, and a quarter-wave mirror 1910. For simplicity, the output processing unit 1906 is shown, which includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle, as described above with reference to Figure 8 and any of Figures 19 to 21. Similarly, for simplicity, the processing unit 1908 is shown, which includes at least one of a QMC array, a microwave emitter, an imaging array, and a baffle, as described above with reference to Figure 3.

[0206] In one or more embodiments, the QMC array of the output processing unit 1906 is similar to the QMC array of the output processing unit 1908, and each can output light based on a field in the QMC array or a field near the QMC array, where the field is based on some parameter, such as a magnetic field, electric field, temperature, or strain. For example, the output processing unit 1906 is configured to output light based on a field in its QMC array, where the field is based on a magnetic field at the location of the output processing unit 1906 or a magnetic field near the location of the output processing unit 1906, and the output processing unit 1908 is configured to output light based on a field in its QMC array, where the field is similarly based on a magnetic field at the output processing unit 1908 or a magnetic field near the output processing unit 1908.

[0207] In one or more embodiments, the QMC array of the output processing unit 1906 differs from the QMC array of the output processing unit 1908 in that each can output light based on different types of fields in or near the QMC array, each field based on different parameters, such as magnetic field, electric field, temperature, and strain. For example, the output processing unit 1906 is configured to output light based on a field in its QMC array, where the field is based on a magnetic field at or near the location of the output processing unit 1906, and the output processing unit 1908 is configured to output light based on a field in its QMC array, where the field is based on a strain field at or near the location of the output processing unit 1908.

[0208] The waveguide body 1904 includes an input leg 1912, a beam splitter 1914, an output leg 1916, and an output leg 1918. The input leg 1912 is configured to receive light from the laser array 1902, as indicated by arrow 1920, and direct the light to the beam splitter 1914. The beam splitter 1914 receives light from the input leg 1912 and is configured to reflect a portion of the received light to the output leg 1916, as indicated by arrow 1926, and to transmit a portion of the received light to the quarter-wave mirror 1910, as indicated by arrow 1924.

[0209] The output leg 1916 is configured to receive light reflected by the beam splitter 1914 and guide the light to the output processing unit 1906, as indicated by the arrow 1926.

[0210] The quarter-wave plate mirror 1910 is configured to receive light transmitted by the beam splitter 1914, as indicated by arrow 1924, to add a polarization change of 1 / 4 wavelength to the light, and to return the light with the polarization changed by 1 / 4 wavelength back to the beam splitter, as indicated by arrow 1928. The output leg 1918 is configured to receive light reflected by the beam splitter 1914 and to guide the light to the output processing unit 1908, as indicated by arrow 1930.

[0211] In this embodiment, the laser array 1902 is offset from two separate areas on the same axis and detected by output processing units 1906 and 1908, respectively. Furthermore, in embodiments similar to those described above, the waveguide body 1904 may include an optical modulation element comprising one or more of a diffraction element, a GRIN element, a refractive element, and a lenslet array, an operable modulation material section used in conjunction with a modulation control plate, and combinations thereof.

[0212] In one or more embodiments, a single controller controls multiple IOSs. This will be explained in more detail with reference to Figures 20-21.

[0213] Figure 20 shows a system 2000 used to detect a magnetic field within the brain 2002 of a person 2004 according to an aspect of the present disclosure.

[0214] As shown in the figure, system 2000 includes controller 2006, IOS2008, IOS2010, IOS2012, IOS2014, control channel 2016, control channel 2018, control channel 2020, control channel 2022, output channel 2024, output channel 2026, output channel 2028, and output channel 2030.

[0215] Controller 2006 is configured to communicate with IOS2008 via control channel 2016, IOS2010 via control channel 2018, IOS2012 via control channel 2020, and IOS2014 via control channel 2022. Controller 2006 is further configured to communicate with IOS2008 via output channel 2024, IOS2010 via output channel 2026, IOS2012 via output channel 2028, and IOS2014 via output channel 2030.

[0216] Controller 2006 is configured to control the operation of system 2000.

[0217] IOS2008, 2010, 2012, and 2014 each take the form of an IOS relating to an aspect of this disclosure, and this non-limiting example includes the IOS described above with reference to Figures 26 to 30, each IOS configured such that the light emitted by the IOS is based on a magnetic field at the location of the IOS or a magnetic field in the vicinity of the location of the IOS.

[0218] Each of the control channels 2016, 2018, 2020, and 2022 is shown as a single channel for descriptive purposes only. In practice, each of the control channels 2016, 2018, 2020, and 2022 includes a control channel for controlling the laser array, a control channel for controlling the microwave emitter, and (if included) a control channel for controlling the modulation control board, as described above with reference to Figures 8 and 19-22.

[0219] In operation, the controller 2006 controls the respective laser array, microwave emitter, and, if included, modulation control plate of each IOS. Each IOS then provides its respective output signal based on the magnetic field detected in the vicinity of the IOS location within the brain 2002. In this embodiment, the controller 2006 maps the magnetic field within the brain 2002. While this non-limiting exemplary embodiment includes four IOSs, it should be noted that any number of IOSs may be used in accordance with aspects of this disclosure.

[0220] Figure 21 shows a system 2100 used to detect surface strain of an aircraft wing 2102 according to an aspect of the present disclosure.

[0221] As shown in the figure, system 2100 includes a controller 2104, several IOSs (samples shown as IOS2106 and IOS2108), several control channels (samples shown as control channel 2110 and control channel 2112), and several output channels (samples shown as output channel 2114 and output channel 2116). Note that the remaining IOSs also include control channels and output channels, but are not shown for the sake of simplicity in the drawing.

[0222] The controller 2104 is configured to communicate with each IOS via its respective control channel and its respective output channel. The controller 2104 is configured to control the operation of the system 2100.

[0223] Each IOS takes the form of an IOS according to an aspect of the present disclosure, and this non-limiting example includes the IOSs described above with reference to Figures 6 and 15-19, each IOS configured such that the light output by the IOS is based on a strain field at the location of the IOS or a strain field in the vicinity of the location of the IOS.

[0224] Each control channel is shown as a single channel for descriptive purposes only. In practice, each control channel includes a control channel for controlling the laser array, a control channel for controlling the microwave emitter, and (if included) a control channel for controlling the modulation control plate, as described above with reference to Figures 3 to 5.

[0225] The wing of an aircraft includes an upper surface 2118 and a lower surface 2120. The upper surface 2118 has a greater curvature than the lower surface 2120 so as to create a longer path for the air to travel. Specifically, as air 2122 passes over it, it is divided such that portion 2124 travels along the upper surface 2118 and portion 2126 travels along the lower surface 2120. Due to the greater curvature of the upper surface 2118, portion 2124 travels at a faster speed than portion 2126, generating lift according to the well-known Bernoulli principle.

[0226] However, the forces acting on the aircraft wing 2102 due to airborne movement, while always present, can constantly change. Furthermore, such forces may not be constant at various locations on the aircraft wing 2102. As a result, system 2100 accurately monitors stress at various locations on the surface of the aircraft wing 2102.

[0227] In operation, the controller 2104 controls the respective laser array, microwave emitter, and, if included, modulation control board of each IOS. Each IOS then provides its respective output signal based on the strain field detected in the vicinity of the location of each IOS within the aircraft wing 2102. In this embodiment, the controller 2104 maps the strain field within the aircraft wing 2102. While this non-limiting exemplary embodiment includes nine IOSs, it should be noted that any number of IOSs may be used in accordance with aspects of this disclosure.

[0228] In system 2100, each IOS is configured to detect stress. However, according to one or more embodiments, at least one IOS is configured to detect parameters other than stress.

[0229] For example, in one or more embodiments, one or more IOSs of system 2100 are configured to output light based on a strain field, while other IOSs are configured to output light based on an electric field. In this embodiment, system 2100 can accurately monitor stress at various locations on the aircraft wing 2102, and in addition, accurately monitor the electric field at various locations on the aircraft wing 2102. For this purpose, controller 2104 may map the strain field and electric field on the surface of the aircraft wing 2102.

[0230] Figure 22 shows a system used to detect a magnetic field on the surface of an integrated circuit (IC) chip according to an aspect of this disclosure.

[0231] As shown in the figure, the system includes a controller 2202, an IOS 2204, a control channel 2206, and an output channel 2208.

[0232] The controller 2202 is configured to communicate with IOS 2204 via control channel 2206 and output channel 2208. The controller 2202 is configured to control the operation of IOS 2204.

[0233] IOS2204 takes the form of an IOS according to an aspect of the present disclosure, which non-limiting examples include the IOSs described above with reference to Figures 6 and 15-29, each IOS configured such that the light output by the IOS is based on a strain field at the location of the IOS or a strain field in the vicinity of the location of the IOS.

[0234] The control channels 2206 are shown as individual channels for illustrative purposes only. In practice, the control channels 2206 include control channels for controlling the laser array, control channels for controlling the microwave emitter, and (if included) control channels for controlling the modulation control plate, as described above with reference to Figures 3 to 5.

[0235] The IC chip 2210 includes a top surface 2212, on which circuit elements are located. During operation, the circuit elements on the top surface 2212 generate their respective magnetic and electric fields as a function of time.

[0236] The controller 2202 controls each laser array, microwave emitter, and, if included, modulation control plate of the IOS 2204. The IOS 2204 then provides its respective output signals based on the magnetic field (or electrically induced magnetic field) detected in the vicinity of the IC chip 2210. In this embodiment, the controller 2202 maps the magnetic field around the surface of the IC chip 2210.

[0237] The system in Figure 22 is configured to detect a magnetic field on the surface of the IC chip 2210. However, according to one or more embodiments, the system may be configured to detect parameters other than a magnetic field.

[0238] For example, in one or more embodiments, the IOS is configured to output light based on the thermal field. In this embodiment, the system precisely monitors the thermal energy of various parts of the IC chip 2210.

[0239] The laser array in the IOS according to an aspect of this disclosure enables accurate and customizable optical profiles for photodetection using quantum materials, as described above with reference to, for example, Figures 11 and 13A to 13C. The optical spatial modulation unit in the IOS according to an aspect of this disclosure enables accurate and customizable optical profiles for photodetection using quantum materials, as described above with reference to, for example, Figures 8A to 12B and 14A to 14B.

[0240] The combination of the laser array and the optical spatial modulation unit enables an IOS that can be easily customized for photodetection using quantum materials, and the input optical array interacts with the array of QMCs in one of the following ways: a one-to-one manner in which a single input optical beam interacts with a single designated QMC, a one-to-many manner in which a single input optical beam interacts with more than one QMC, or a many-to-one manner in which more than one input optical beam interacts with one QMC.

[0241] Furthermore, the compact design of the IOS for photodetection using quantum materials according to the embodiments of this disclosure makes it possible to easily transfer such IOS through commercial transactions for use by end users or end-user systems.

[0242] In one or more embodiments, in a system for optically detecting a parameter field using a QMC array according to an aspect of the present disclosure, all lasers in the laser array may emit light simultaneously. In one or more of these embodiments, the light from each laser in the laser array is optically modulated.

[0243] In one or more embodiments, in a system for optically detecting a parameter field using a QMC array according to an aspect of the present disclosure, each laser in the laser array may be operated individually to emit light. In one or more of these embodiments, the light from each laser may be optically modulated.

[0244] In one or more embodiments, the quantum material within each QMC of the QMC array may be the same. For example, the quantum material within each QMC of the QMC array may be NV-centered diamond, SiV-centered diamond, SnV-centered diamond, PbV-centered diamond, NiV-centered diamond, color-centered, defective hBN, defective SiC, or other spin-sensitive material.

[0245] In one or more embodiments, at least one quantum material of a QMC in a QMC array is different from another quantum material of another QMC in the same QMC array. For example, the quantum material in at least one QMC in a QMC array is NV-centered diamond, SiV-centered diamond, SnV-centered diamond, PbV-centered diamond, NiV-centered diamond, chromocenter, defective hBN, defective SiC, or other spin-sensitive material, while the quantum material in at least one other QMC in a QMC array is a different one from NV-centered diamond, SiV-centered diamond, SnV-centered diamond, PbV-centered diamond, NiV-centered diamond, chromocenter, defective hBN, defective SiC, or other spin-sensitive material. In this embodiment, different QMCs output light based on different detection parameters.

[0246] In one or more embodiments, all QMCs in a chiplet array are configured to output light based on the same parameters in each QMC or the same parameters in the vicinity of each QMC. For example, the quantum material in each QMC of the QMC array is a quantum material configured to output light based on a magnetic field, electric field, thermal field, or stress field in or near the QMC.

[0247] In one or more embodiments, at least one QMC in a chiplet array is configured to output light based on different parameters of at least one other QMC in the chiplet array within each QMC or in the chiplet arrays in the vicinity of each QMC. For example, a quantum material in at least one QMC of a QMC array is a quantum material configured to output light based on one of a magnetic field, electric field, thermal field, or stress field in or near the quantum material, while at least one other quantum material in a QMC of the same QMC array is a quantum material configured to output light based on another different of a magnetic field, electric field, thermal field, or stress field in or near the quantum material.

[0248] The descriptions of various preferred embodiments above are presented for illustrative and explanatory purposes only. They are not intended to be exhaustive or to limit the invention to any specific form disclosed, and it will be apparent that various modifications and changes are possible in light of the teachings above. As stated above, the examples of embodiments have been selected and described to make the invention most accessible to those skilled in the art in various embodiments and modifications suitable for specific intended uses. The scope of the invention is intended to be defined by the claims appended herein.

Claims

1. input wavelength λ ｉ A light source configured to generate input light having, Optical waveguide and, An array of multiple quantum material chiplets, Imaging array and A sensor equipped with, The optical waveguide is configured to transmit the input light to the array of the plurality of quantum material chiplets. Each quantum material chiplet absorbs a portion of the input light from the optical waveguide, and in response to the absorption of a portion of the input light, each quantum material chiplet emits an emission wavelength λ based on its respective parameter value. ｒｅ Each is configured to emit light having the following characteristics: The imaging array is configured to detect each emission and output a detection signal based on the respective parameter values ​​in each quantum material chiplet.

2. The sensor according to claim 1, wherein the light source includes one of a group of light sources including a single tunable light source, an array of light-emitting diodes, an array of vertical cavity surface-emitting lasers, an array of grating antennas operating over a frequency spectral range, and a combination thereof.

3. A microwave emitter configured to emit microwave pulses to an array of the plurality of quantum material chiplets, An optical modulation element configured to modulate the input light and The sensor according to claim 1, further comprising the following:

4. The optical waveguide includes an optical modulation section which includes the optical modulation element, The sensor according to claim 3, wherein the optical modulation element includes one of the group of optical modulation elements, which includes a wavelength modulation element, a polarization modulation element, a mode modulation element, a near-field phase modulation element, a refractive index distribution lens, a diffraction element, a refractive element, a lenticular array, an intensity modulation element, and combinations thereof.

5. The sensor according to claim 1, wherein the light source, the optical waveguide, the array of the plurality of quantum material chiplets, and the imaging array constitute a single device.

6. The sensor according to claim 1, further comprising a baffle configured to reduce crosstalk between a first quantum material chiplet of the array of plurality of quantum material chiplets and a second quantum material chiplet of the array of plurality of quantum material chiplets.

7. Each quantum material chiplet is determined based on the respective parameter values, which include one of the parameter values ​​in the set of parameter values, which includes the magnetic field strength value, magnetic field direction value, change in magnetic field strength value, change in magnetic field direction value, electric field strength value, electric field direction value, change in electric field strength value, change in electric field direction value, strain value, change in strain value, temperature value, change in temperature value, and combinations thereof, and the respective emission wavelength λ ｒｅ The sensor according to claim 1, configured to emit light having each of the above characteristics.

8. Controller and Sensor and A system equipped with, The aforementioned sensor is input wavelength λ ｉ A light source configured to generate input light having, Optical waveguide and, An array of multiple quantum material chiplets, Imaging array and Equipped with, The optical waveguide is configured to transmit the input light to the array of the plurality of quantum material chiplets. Each quantum material chiplet absorbs a portion of the input light from the optical waveguide, and in response to the absorption of a portion of the input light, each quantum material chiplet emits an emission wavelength λ based on its respective parameter value. ｒｅ Each is configured to emit light having the following characteristics: The imaging array is configured to detect each emission and output a detection signal based on the respective parameter values ​​in each quantum material chiplet. The aforementioned controller, The memory where the instructions are stored, Processor and Equipped with, The processor executes the instruction and sends it to the controller. The light source is made to generate the input light, A system configured to determine the respective parameter values ​​in each quantum material chiplet based on the aforementioned detection signal.

9. The system according to claim 8, wherein the light source includes one of a group of light sources including a single tunable light source, an array of light-emitting diodes, an array of vertical cavity surface-emitting lasers, an array of grating antennas operating over a frequency spectral range, and a combination thereof.

10. A microwave emitter configured to emit microwave pulses to an array of the plurality of quantum material chiplets, An optical modulation element configured to modulate the input light and The system according to claim 8, further comprising the above.

11. The optical waveguide includes an optical modulation section which includes the optical modulation element, The system according to claim 10, wherein the optical modulation element includes one of the group of optical modulation elements, which includes a wavelength modulation element, a polarization modulation element, a mode modulation element, a near-field phase modulation element, a refractive index distribution lens, a diffraction element, a refractive element, a lenticular array, an intensity modulation element, and combinations thereof.

12. The system according to claim 8, wherein the light source, the optical waveguide, the array of the plurality of quantum material chiplets, and the imaging array constitute a single device.

13. The system according to claim 8, further comprising a baffle configured to reduce crosstalk between a first quantum material chiplet of the array of plurality of quantum material chiplets and a second quantum material chiplet of the array of plurality of quantum material chiplets.

14. Each quantum material chiplet is determined based on the respective parameter values, which include one of the parameter values ​​in the set of parameter values, which includes the magnetic field strength value, magnetic field direction value, change in magnetic field strength value, change in magnetic field direction value, electric field strength value, electric field direction value, change in electric field strength value, change in electric field direction value, strain value, change in strain value, temperature value, change in temperature value, and combinations thereof, and the respective emission wavelength λ ｒｅ The system according to claim 8, configured to emit light from each of the aforementioned light sources.

15. A method for detecting the field of parameter values, The input wavelength λ is transmitted via the controller. ｉ A step of causing a light source to generate input light having the following characteristics: The step of transmitting the input light to an array of multiple quantum material chiplets via an optical waveguide, wherein each of the multiple quantum material chiplets absorbs a portion of the input light from the optical waveguide, and in response to the portion of the input light absorbed, each quantum material chiplet emits an emission wavelength λ based on its respective parameter value. ｒｅ The step is to configure each to emit light having The steps include detecting each emission via an imaging array, To obtain the field of the parameter values ​​of the array of the plurality of quantum material chiplets, the imaging array is used to output a detection signal based on the respective parameter values ​​in each quantum material chiplet. Methods that include...

16. The method according to claim 15, wherein the step of causing the input light to be generated by the light source via the controller includes causing the input light to be generated by one of a group of light sources, including a single tunable light source, an array of light-emitting diodes, an array of vertical-cavity surface-emitting lasers, an array of grating antennas operating across a frequency spectral range, and a combination thereof, via the controller.

17. The steps include: emitting microwave pulses to the array of the plurality of quantum material chiplets via a microwave emitter; The steps of modulating the input light via an optical modulation element and The method according to claim 15, further comprising:

18. The optical waveguide includes an optical modulation section which includes the optical modulation element, The method according to claim 17, wherein the step of modulating the input light via the optical modulation element includes modulating the input light via one of a group of optical modulation elements, including a wavelength modulation element, a polarization modulation element, a mode modulation element, a near-field phase modulation element, a distributed refractive index lens, a diffraction element, a refractive element, a lenticular array, an intensity modulation element, and combinations thereof.

19. The method according to claim 15, wherein the steps of generating, transmitting, detecting, and outputting include causing the input light to be generated by the light source, transmitting the input light to the array of quantum material chiplets, detecting the emission of each, and outputting a detection signal, via the light source, optical waveguide, array of the plurality of quantum material chiplets, and imaging array constituting a single device.

20. The method according to claim 15, further comprising the step of reducing crosstalk between a first quantum material chiplet and a second quantum material chiplet of the array of quantum material chiplets via a baffle.

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