Cylindrical brush and method of manufacture

Abstract

A method for manufacturing a cylindrical brush for a cleaning tool includes a cylindrical brush having a core member, a plurality of rail plates, a plurality of polyvinyl alcohol (PVA) blob foam bars, and a pair of end caps. The core member includes an outer wall having a plurality of core holes and a pair of openings. A plurality of rail plates having a plurality of rail holes are disposed along the outer wall of the core member. A plurality of polyvinyl alcohol (PVA) blob foam bars are installed on each of the plurality of rail plates such that each of the plurality of blobs of the PVA blob foam bars aligns with the plurality of core holes and the plurality of rail holes. A pair of end caps encloses the pair of openings in the core member.

Description

[Technical Field]

[0001] FIELD OF THE INVENTION The present invention relates generally to cleaning tools for electronic components and methods of manufacturing the same, and more particularly to a cylindrical brush of a cleaning tool and a method of manufacturing the same utilizing a mold assembly. [Background technology]

[0002] Brushes are used in many industrial applications to remove debris from the surface of the material being cleaned. Certain types may be used in either or both dry and wet conditions. Brushes are available in a variety of thicknesses and lengths, including filler materials such as nylon, polypropylene, natural fibers, hair, abrasive filaments, or even metal bristles.

[0003] Cylindrical brushes, commonly used in metal finishing, woodworking, car washing, and industrial cleaning applications, can be rotated along a longitudinal axis, particularly as part of the manufacturing process for electronic components such as silicon wafers.

[0004] In this industry, they may be used for particle removal. Silicon wafers must be exceptionally clean during semiconductor fabrication to ensure the quality and reliability of electronic components. Cylindrical brushes equipped with soft bristles or materials such as nylon are used to gently remove particles, dust, and residue from the surface of silicon wafers. Cylindrical brushes can be integrated into cleaning systems that use specific cleaning solutions or chemicals. The brushes help distribute the cleaning solution evenly across the wafer surface, facilitating the removal of contaminants or photoresist residue. In addition, after certain processing steps, such as etching, wafers may have residue that needs to be removed. Cylindrical brushes are sometimes used in combination with chemical cleaning to thoroughly clean wafers without causing damage.

[0005] One such type of brush contains bristles of hardened polyvinyl alcohol (PVA) or polyvinyl formalin. PVA is the key polymer component in a solution that, when poured into a mold and heated, forms a tough, sponge-like material called polyvinyl formalin, or otherwise known as hardened PVA.

[0006] PVA synthetic polymers have unique properties that make them suitable for this industry. (1) Water-Soluble: PVA is water-soluble, making it an excellent material for brushes used in water-based applications. Brushes made with PVA can absorb water and become flexible, making them suitable for tasks where water is part of the cleaning or application process. (2) Absorbency: PVA brushes are highly absorbent, allowing them to substantially retain and release liquid. This attribute is valuable in applications requiring controlled release or application of liquid, such as cleaning solutions. (3) Flexibility: PVA brushes are known for their soft and gentle bristles, making them suitable for delicate surfaces or materials where abrasive brushes could cause damage. In applications such as cleaning delicate electronic components or surfaces, PVA brushes are preferred to avoid scratches. (4) Chemical Resistance: PVA is resistant to many chemicals, making it suitable for applications where exposure to a variety of cleaning agents or chemicals is expected. This chemical resistance contributes to the durability and longevity of PVA brushes in harsh environments. (5) Temperature Stability: PVA has good stability over a range of temperatures. This makes PVA brushes suitable for applications where exposure to a variety of temperatures is expected without compromising the structural integrity of the brush. (6) Low Coefficient of Friction: PVA has a low coefficient of friction, meaning it has a relatively smooth interaction with surfaces. This attribute is beneficial in applications where the brush needs to glide smoothly without causing excessive friction or wear.

[0007] The PVA solution contains PVA crystals, formaldehyde, sulfuric acid, deionized water, and potato starch. The final product after the PVA solution curing process is a brush 12, as shown in FIGS. 1A and 1B, in which the majority of the core member 14, as well as the plurality of bristles 16, are constructed from polyvinylformaldehyde material. Here, the bristles are rounded slugs. As a component of the cleaning system 10, the brush 12 can be attached to a shaft (not shown) by sliding the shaft through a keyed central hole. The shaft and its tight fitment provide additional rigidity to the brush 12. When the entire assembly is rotated about an axis extending through the longitudinal center of the cylinder, it is pressed against the surface of the object to be cleaned, and cleaning chemicals are applied by the brush 12 through physical contact. During this process, a torque is generated on the brush 12 in a direction opposite to the direction of rotation. Conventional cleaning brushes contain toxic substances in the form of PVA. Summary of the Invention [Problem to be solved by the invention]

[0008] While PVA brushes perform satisfactorily well, there remains a need for improved brushes and methods for improved manufacturing processes for cylindrical brushes for cleaning electronic components. Furthermore, such methods would provide cylindrical brushes that are manufactured with less PVA, thereby reducing the presence of toxic materials within the brush. Such methods would provide cylindrical brushes that would allow for uniform water flow, thereby improving particle removal efficiency. Furthermore, such methods would provide cylindrical brushes that would allow for targeted water flow, eliminating water loss through the body of the cylindrical brush. Such methods would provide a cylindrical brush and core that would be mechanically integrated to prevent slippage between the brush and core and maintain the same rotational speed within the brush as exists in the core. Furthermore, such cylindrical brushes would provide PVA nodules designed to efficiently clean electronic components. Embodiments of the present invention overcome shortcomings in the field by achieving these important objectives. [Means for solving the problem]

[0009] To minimize limitations found in the prior art and minimize other limitations that will become apparent after reading this specification, the present disclosure provides a cylindrical brush cleaning tool for efficiently cleaning electronic components. The cleaning tool includes a cylindrical brush having a core member, a plurality of rail plates, a plurality of polyvinyl alcohol (PVA) blob foam bars, and a pair of end caps. The core member includes an outer wall having a plurality of core holes and a pair of openings. The plurality of rail plates have a plurality of rail holes arranged along the outer wall of the core member such that the plurality of core holes align with the plurality of rail holes. A plurality of polyvinyl alcohol (PVA) blob foam bars are mounted to each of the plurality of rail plates such that each of the plurality of blobs of the PVA blob foam bars aligns with the plurality of core holes and the plurality of rail holes. A pair of end caps encloses a pair of openings in the core member. In this preferred embodiment, the cleaning tool includes a first end portion and a second end portion in an open state.

[0010] A preferred embodiment can also include a method for manufacturing a cylindrical brush. The method begins by creating a mold assembly. In the preferred method, at least one of a plurality of rail plates is positioned over a foam mating recess of a first plate having a plurality of first plate holes. At least one of the plurality of rail plates is provided with a rigid slot for positioning within the foam mating recess to provide a tight friction fit that prevents leakage of polyvinyl alcohol (PVA) when a PVA solution is introduced in a subsequent step of the preferred method. Each rail plate includes a plurality of rail holes. Next, at least one of the plurality of rail plates aligned with the first plate is positioned over a second plate having a plurality of second plate holes. The second plate holes are aligned with the plurality of rail holes so that the rail plate fits relatively precisely with the second plate. The first plate and the second plate substantially sandwich the rail plate snugly inside the internal cavity of the rail plate.

[0011] The second plate has large holes for forming the PVA nodules. The second plate, aligned with at least one rail plate, is placed on a seal plate. The seal plate closes the holes in the second plate, preventing them from being exposed to the air. The only opening to the air at this point is through the upper portion of the first plate.

[0012] A top plate having a plurality of top plate holes is placed over the first plate, and the plurality of top plate holes are aligned with the first plate holes, thereby creating a mold assembly. The mold assembly is then locked using at least one locking member, such as, but not limited to, adhesive, tape, clamps, or bolts and nuts.

[0013] Next, the PVA is mixed into a PVA gel. The PVA gel is injected into each of the plurality of upper plate holes in the upper plate using an injection device, such as a syringe or similar suitable device. The PVA gel permeates through at least one of the plurality of second plate holes, creating at least one of the plurality of PVA nodules. The PVA gel then overflows and begins to fill the interior cavity of at least one of the plurality of rail plates. Each subsequent second plate hole filled with PVA gel creates another PVA nodule, helping to fill the interior rail plate. In this manner, a plurality of PVA nodules are created in the second plate.

[0014] The mold assembly is then placed in a heating device, such as an oven. The heating device hardens the PVA blobs and converts the PVA gel within the PVA blobs into a PVA sponge material, thereby producing at least one of the PVA blob foam bars. The at least one locking member is removed from the mold assembly. The hardened PVA gel on the upper plate is peeled away, thereby removing a portion of the pegs of PVA sponge material that now extend into the shaft of the cleaning tool core member. The first plate is removed, and the remaining pegs of PVA sponge material are peeled away.

[0015] Next, the seal plate is removed, thereby providing full access to the PVA blob surface. Once the seal plate is removed, the row of PVA blobs are pushed through the second plate holes, facilitating removal of at least one of the PVA blob foam bars (and thus the rail plate) with these PVA blobs. This prevents damage to the PVA blobs. If there was only one plate in the mold that created the PVA blobs and the rail plate then needed to be pulled out, the PVA blobs would likely tear. This is why the seal plate separates to allow the PVA blobs to be pushed out rather than pulled out. This completes the molding process for the rail plate.

[0016] To create a cleaning tool, multiple PVA blob foam bars must be attached to a core member. To do so, multiple rail plates are inserted along the outer wall of the cleaning tool's core member in a unique pattern that allows the multiple PVA blobs to efficiently clean electronic components. The unique pattern includes an alternating arrangement of multiple rail plates along the outer wall of the core member. Each of the multiple PVA blob foam bars is mounted on each of the multiple rail plates, thereby creating a cleaning brush. The core member includes a pair of openings that are closed using a pair of end caps.

[0017] It is a first object of the present invention to provide a method for manufacturing a cylindrical brush of a cleaning tool for cleaning electronic components.

[0018] A second object of the present invention is to provide a cylindrical brush and core that are mechanically integrated to prevent slippage between the brush and core and to maintain the same rotational speed in the brush as exists in the core.

[0019] A third object of the present invention is to provide a cylindrical brush that is manufactured without significant utilization of PVA, thereby reducing the presence of toxic materials within the cylindrical brush.

[0020] A fourth object of the present invention is to provide a cylindrical brush that features a unique pattern of rail plates along the outer wall of the core member that allows multiple PVA blobs to efficiently clean electronic components.

[0021] A fifth object of the present invention is to provide a cylindrical brush that allows for uniform water flow, thereby improving particle removal efficiency.

[0022] A sixth object of the present invention is to provide a cylindrical brush that allows for targeted water flow and eliminates water loss through the body of the cylindrical brush.

[0023] A seventh object of the present invention is to provide a cylindrical brush that has a lighter weight compared to conventional systems, thereby reducing material usage as well as machine wear.

[0024] Another object of the present invention is to provide a cylindrical brush that is manufactured utilizing fewer raw materials and shorter curing times.

[0025] It is yet another object of the present invention to provide a cylindrical brush that is manufactured utilizing a fully automated process.

[0026] These and other advantages and features of the present invention are described with particularity in order to make the invention understandable to those skilled in the art.

[0027] To enhance clarity of these advantages and features and to facilitate a better understanding of the various elements and embodiments of the present invention, elements in the figures have not necessarily been drawn to scale. Moreover, in order to provide a clear image of the various embodiments of the present invention, elements that are known to be common and well understood by those skilled in the art have not been shown. Accordingly, the figures have been generalized in form for purposes of clarity and simplicity. [Brief explanation of the drawings]

[0028] [Figure 1A] FIG. 1 is a perspective view of an existing type of cylindrical brush having rounded nodules. [Figure 1B] FIG. 1 is a perspective view of an existing type of cylindrical brush having rounded nodules. [Figure 2] FIG. 1 is a front perspective view of a cylindrical brush of a cleaning tool according to a preferred embodiment of the present invention. [Figure 3] 1 is a perspective view of a cylindrical brush having an end portion in an open state according to a preferred embodiment of the present invention; [Figure 4A] 1 is a perspective view of a molding assembly for a cylindrical brush according to a preferred embodiment of the present invention; [Figure 4B] 1 is a perspective view of a molding assembly for a cylindrical brush according to a preferred embodiment of the present invention; [Figure 4C] FIG. 4C is a cross-sectional view of the molding assembly shown in FIG. 4B according to a preferred embodiment of the present invention. [Figure 5A] FIG. 1 is a perspective view of multiple polyvinyl alcohol (PVA) nodules on a rail plate of a cylindrical brush according to a preferred embodiment of the present invention. [Figure 5B] FIG. 1 is a cross-sectional view of a rail plate fitted with multiple PVA nodules according to a preferred embodiment of the present invention. [Figure 5C] FIG. 1 is a perspective view of a rail plate without PVA blob foam bars inserted according to a preferred embodiment of the present invention. [Figure 5D] FIG. 1 is a perspective view of a PVA modular foam bar according to a preferred embodiment of the present invention. [Figure 5E] FIG. 2 is a perspective view of a rail upper portion according to a preferred embodiment of the present invention. [Figure 5F] FIG. 2 is a perspective view of a rail bottom portion according to a preferred embodiment of the present invention. [Figure 5G] FIG. 10 is a perspective view of mating alignment features of multiple rail plates and a pair of end caps according to a preferred embodiment of the present invention. [Figure 5H] FIG. 10 is a perspective view of mating alignment features of multiple rail plates and a pair of end caps according to a preferred embodiment of the present invention. [Figure 5I] FIG. 10 is a perspective view of mating alignment features of multiple rail plates and a pair of end caps according to a preferred embodiment of the present invention. [Figure 6] FIG. 1 is a perspective view of a PVA blob foam bar of a cylindrical brush according to a preferred embodiment of the present invention. [Figure 7] FIG. 1 is a perspective view of an exemplary rail plate without a PVA blob foam bar according to a preferred embodiment of the present invention. [Figure 8] FIG. 2 is a perspective view of a fully assembled rail plate according to a preferred embodiment of the present invention. [Figure 9] 1 is a perspective view of a core member of a cleaning tool according to a preferred embodiment of the present invention; [Figure 10] FIG. 10 is a perspective view of a core member of a cleaning tool with rail plate sections inserted thereon and a row of PVA blobs inserted therein according to a preferred embodiment of the present invention. [Figure 11A] FIG. 1 is a perspective view of a complete assembly of a cleaning tool showing a cylindrical brush and multiple PVA foam bars according to a preferred embodiment of the present invention. [Figure 11B] FIG. 11B is a top view of the cleaning tool shown in FIG. 11A in accordance with a preferred embodiment of the present invention. [Figure 11C] FIG. 11B is a rear view of the cleaning tool shown in FIG. 11A according to a preferred embodiment of the present invention. [Figure 12] FIG. 10 is an exploded view of another embodiment of a cylindrical brush showing a holder attached to a core member for holding a PVA blob according to one embodiment of the present invention. [Figure 13] FIG. 13 is a perspective view of the fully assembled cylindrical brush illustrated in FIG. 12 according to one embodiment of the present invention. [Figure 14] FIG. 13 is a rear view of the cylindrical brush illustrated in FIG. 12 without the end caps according to one embodiment of the present invention. [Figure 15] FIG. 13 is an exploded view of the cylindrical brush illustrated in FIG. 12 according to one embodiment of the present invention. [Figure 16] 10 is a perspective view of another embodiment of a holder and PVA blob of a cylindrical brush according to an embodiment of the present invention. FIG. [Figure 17] FIG. 1 is an exploded view of an RFID tag embedded in a drive cap of a cleaning tool according to one embodiment of the present invention. [Figure 18] FIG. 1 is a perspective view of a cylindrical brush having a plurality of PVA nodules evenly spaced end to end along the length of the cylindrical brush in accordance with a preferred embodiment of the present invention. [Figure 19] FIG. 1 is a perspective view of a cylindrical brush in which the PVA nodules are not evenly spaced end-to-end along the length of the brush, according to one embodiment of the present invention. [Figure 20]FIG. 1 is a front perspective view of a cylindrical brush showing a targeted water flow through multiple PVA nodules according to a preferred embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0029] In the following discussion of several embodiments and applications of the present invention, reference is made to the accompanying drawings which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. It is to be understood that other embodiments may be utilized and changes may be made without departing from the scope of the present invention.

[0030] The following describes various features of the present invention that can be used independently of one another or in combination with other features. However, any single feature of the present invention may not address any of the problems discussed above, or may only address one of the problems discussed above. Furthermore, one or more of the problems discussed above may not be fully addressed by any of the features described below.

[0031] As used herein, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. As used herein, "and" is used synonymously with "or," unless expressly stated otherwise. As used herein, the term "about" means ±5% of the parameter being described. All embodiments of any aspect of the invention can be used in combination, unless the context clearly dictates otherwise.

[0032] Unless the context clearly requires otherwise, throughout the specification and claims, "comprises," "including," and the like shall be construed in an inclusive sense, i.e., "including but not limited to," rather than in a restrictive or inclusive sense. Words using the singular and plural include the plural and the singular. In addition, when used in this application, the words "herein," "herein," "wherein," "above," and "below," and words of similar import, shall refer to this application as a whole and not to any particular portions of this application.

[0033] The descriptions of the embodiments of the present disclosure are not intended to be exhaustive or to limit the present disclosure to the precise form disclosed. While specific embodiments of, and examples related to, the present disclosure are described herein for illustrative purposes, those skilled in the art will recognize that various equivalent modifications are possible within the present disclosure.

[0034] 2 and 3, a cleaning tool 20 for cleaning electronic components is illustrated. The cleaning tool 20 includes a cylindrical brush 22 having an outer wall with a plurality of core holes 110 (FIG. 9) and a core member 46 having a pair of openings 60, as shown in FIG. 3; a plurality of rail plates 24 having a plurality of rail holes 36 arranged along the outer wall of the core member 46 so that the core holes 110 align; a plurality of polyvinyl alcohol (PVA) foam blob bars 44 mounted on each of the rail plates 24 so that each of the plurality of foam blobs 42 aligns with the core holes 110 and the rail holes 36; and a pair of end caps 48 enclosing the pair of openings 60 in the core member 46, as shown in FIG. 2. In this preferred embodiment, the cleaning tool 20 includes a first end portion 50 and a second end portion 52. In FIG. 3, the second end portion 52 is in an open state.

[0035] This preferred embodiment describes a method for manufacturing the cylindrical brush 22, clearly shown in FIGS. 4A-4C. The method begins with creating a mold assembly 58. To create the mold assembly 58, as shown in FIGS. 4A and 4B, at least one of the plurality of rail plates 24 is positioned over the foam-fitting recesses 54 of a first plate 26 having a plurality of first plate holes 38. At least some of the plurality of rail plates 24 are provided with rigid slots for positioning within the foam-fitting recesses 54, which provide a tight friction fit that prevents leakage of the PVA solution after it is introduced in a subsequent step of the preferred method. Each rail plate 24 includes a plurality of rail holes 36. Next, at least one of the plurality of rail plates 24, aligned with the first plate 26, is positioned over a second plate 28 having a plurality of second plate holes 34, as shown in FIG. 4B. The second plate holes 34 align with the rail holes 36 so that the rail plate 24 fits relatively precisely with the second plate 28. The first plate 26 and the second plate 28 substantially sandwich the rail plate 24 snugly inside the interior cavity 56 of the rail plate 24 .

[0036] The second plate 28 has large holes for forming multiple PVA blobs 42 (see FIG. 5A). As shown in FIG. 4B, the second plate 28, aligned with at least one rail plate 24, is positioned on a seal plate 30. The seal plate 30 closes the second plate holes 34, thereby preventing them from being exposed to the atmosphere. The only opening to the atmosphere at this point is through the upper portion of the first plate 26.

[0037] As shown in Figure 4B, a top plate 32 having a plurality of top plate holes 40 is positioned on the first plate 26. The plurality of top plate holes 40 are aligned with the first plate holes 38, thereby providing a forming assembly 58. Figure 4C illustrates a cross-sectional view of the forming assembly 58. The forming assembly 58 is then locked utilizing at least one locking member (not shown). The locking member may be selected from the group consisting of a tape, a clamp, or a bolt and nut.

[0038] Next, polyvinyl alcohol (PVA) is mixed into a PVA gel. The PVA gel is injected into each of the plurality of top plate holes 40 in the top plate 32 using an injection device, such as a syringe or similar suitable device. The PVA gel permeates through at least one of the plurality of second plate holes 34, creating at least one of the plurality of PVA blobs 42 (see FIG. 5A ). The PVA gel then overflows and begins to fill the interior cavity 56 of at least one of the plurality of rail plates 24. As each successive second plate hole 34 fills, another PVA blob 42 is produced, helping to fill the interior cavity 56. In this manner, the second plate 28 is provided with a plurality of PVA blobs 42.

[0039] Next, the mold assembly 58 is placed in a heating device, such as an oven. The heating device hardens the plurality of PVA blobs 42 and converts the PVA gel therein into a PVA sponge material, thereby producing at least one of the plurality of PVA blob foam bars 44 (see FIG. 5D). The at least one locking member is removed from the mold assembly 58. The hardened PVA gel on the top plate 32 is peeled away, thereby removing a portion of the pegs of PVA sponge material that now extend into the shaft of the core member 46 (see FIG. 9) of the cleaning tool 20. The first plate 26 is removed, and the remaining pegs of PVA sponge material are peeled away.

[0040] The seal plate 30 is then removed, thereby providing full access to the PVA nodule surface 42. With the seal plate 30 removed, the row of PVA nodules 42 shown in FIG. 5D is pushed through the second plate holes 34, facilitating removal of at least one of the PVA nodule foam bars 44 (and thus the rail) with these PVA nodules 42. This prevents damage to the PVA nodules 42. If there was only one plate in the molding assembly 58 that created the PVA nodules 42 and the rail plate 24 then had to be pulled out, the PVA nodules 42 would likely tear. This is why the seal plate 30 separates to allow the PVA nodules 42 to be pushed out rather than pulled out. The molding process is thus completed.

[0041] To create the cleaning brush 22, a plurality of PVA nodule foam bars 44 must be attached to a core member 46 (see FIG. 9). To do so, a plurality of rail plates 24 are inserted in a unique pattern along the outer wall of the core member 46 of the cleaning tool 20. Each of the plurality of PVA nodule foam bars 44 is installed in each of the plurality of rail plates 24. The core member 46 includes a pair of openings 60 (see FIG. 3) that are closed using a pair of end caps 48 (see FIG. 2). The unique pattern includes an alternating arrangement of the plurality of rail plates 24 along the outer wall of the core member 46. This alternating arrangement allows the plurality of PVA nodule 42 to efficiently clean electronic components.

[0042] Figure 5A illustrates multiple PVA blobs 42 in place on the rail plate 24. Figure 5B illustrates a cross-section of the rail plate 24 with multiple PVA blobs attached. In this preferred embodiment, the plastic wall thickness encasing the PVA blobs 42 is consistent throughout at 1 mm, although various thicknesses can be used. The 1 mm wall is used to minimize differences in shrinkage rates of varying wall thicknesses during the plastic injection molding process. This is why the side walls are foam-fitted to the PVA blobs 42 within the body.

[0043] 5C and 7, the rail plate 24 is shown without the PVA blob foam bar 44 inserted. As shown in FIG. 5D, the PVA blob foam bar 44 is shown on the outside of the rail plate 24, depicting an open foam bar 44 (on the inside of the rail plate 24) that connects all of the PVA blobs 42 into a single unit. This single unit design prevents any of the PVA blobs 42 from becoming detached. This single row of blobs 44 is shown in FIG. 6.

[0044] 5E and 5F illustrate the rail top portion 62 and rail bottom portion 64, respectively, of an assembled rail plate 24. FIGS. 5G-5I illustrate the mating alignment features of a complete assembly of rail plates 24 and a pair of end caps 48. These features are present to ensure that an assembler cannot assemble the cylindrical brush 22 without sequentially alternating the orientation of each rail plate 24. The alternating nature or pattern creates a staggered arrangement of PVA nodules 42 on the brush 22 to achieve proper cleaning performance. As shown in FIG. 5G, the keyed end caps not only secure the rail plates 24 in place along the core member 46, but also key each rail plate 24 to ensure that it is positioned in the proper location along the core member 46.

[0045] 8 illustrates the rail plate 24 in a fully assembled state. The internal crossbar in the proximal end hole prevents shearing of the PVA foam bar 44 at the end, since the end of the foam bar 44 does not benefit from the adjacent PVA nodules 42, like all other PVA nodules, for fastening security.

[0046] As shown in Figures 9 and 10, the core member has space for 12 rails, so there are a total of 12 rows of PVA nodules 42 on the fully assembled core member 46. In other embodiments, any number of rows of nodules, such as 10, 14, or 16, are provided. While the core member 46 may appear cylindrical, it can have any number of sides, with a dodecagonal core being preferred. Figure 10 illustrates a perspective view of the core member 46 of the cleaning tool 20 with a portion of the rail plate 24 inserted on its face into which one row of PVA nodules 44 is inserted.

[0047] Figure 11A illustrates a perspective view of the complete assembly of the cleaning tool 20 showing the cylindrical brush 22 and the multiple PVC foam bars 44. Figure 11B illustrates a top view of the cleaning tool 20 shown in Figure 11A. Figure 11C illustrates a rear view of the cleaning tool 20 shown in Figure 11A.

[0048] The cylindrical brush 22 can be constructed in two ways. In a conventional cleaning brush, the brush is molded and cast from plastic. In a preferred embodiment, the brush 22 can either be dovetailed into place and mechanically slid, as in the disposable rail plate 24 shown in FIGS. 2-11, or the rail plate 24 can be secured in place along the core member 46 using screws, glue, ultrasonic bonding, or the like. In the second situation, the PVA blob 42 need not be dovetail-shaped; instead, the assembly can accommodate other shapes, such as a square. In one assembly method, the PVA blob 42 can simply be pushed through an opening.

[0049] FIG. 12 illustrates an exploded view of another embodiment of a cylindrical brush 70. In this case, each PVA nodule 72 is separately attached to a core member 78 by first placing the PVA nodule 72 in a holder 74 and then attaching the holder 74 to the core member 78. The holder 74 can be attached to the core member 78 by screwing, press-fitting, ultrasonic welding, snap-fitting, gluing, or other suitable attachment means. The holder 74 extends radially inward, thereby filling the void within the core member 78. The cylindrical brush 70 includes a pair of end caps 76. FIG. 13 illustrates a fully assembled perspective view of the brush 70 shown in FIG. 12. FIG. 14 illustrates a rear view of the cylindrical brush 70 shown in FIG. 12 without the end caps. FIG. 15 illustrates an exploded view of the cylindrical brush 70 according to the another embodiment shown in FIG. 12 during assembly. FIG. 16 illustrates another embodiment of a holder 80 and PVA blob 82 in which the holder 80 has a short stem and the PVA blob has a long stem.

[0050] 2 and 3, the cylindrical brush 22 includes certain advantages over the cleaning brush shown in FIGS. 1A and 1B. For example, the cylindrical brush 22 is lighter, thereby causing less wear to machinery. Furthermore, environmentally, the brush 22 has 90% less PVA. Similarly, the cylindrical brush 22 exhibits a shorter break-in period, no mold break-ins during the manufacturing process, fewer particle emissions, reduced water usage in semiconductor fabrication facilities, reduced waste, and improved overall efficiency in wafer cleaning.

[0051] 17 illustrates an exploded view of an RFID tag 92 embedded within the drive cap 90 of a cleaning tool 20 according to one embodiment of the present invention. In this case, the RFID tag 92 is placed inside the drive cap 90 and is water sealed off by a watertight cap 94. The watertight cap 94 and drive cap 90 can be assembled by an interference fit or ultrasonic welding, which, in combination with a cyclohexanone solvent, provides a watertight assembly for the RFID tag 92.

[0052] Turning now to FIG. 18 , a typical brush nodule 42 layout is shown, evenly spaced from end to end along the length of the cylindrical brush 22. In this case, the nodule 42 spacing, labeled 100, is 13.6 mm. In an alternative embodiment of the present invention, the nodule 42 need not be evenly spaced as in FIG. 19 , which illustrates a configuration in which the nodule 42 are not evenly spaced from end to end along the length of the cylindrical brush 96. As shown in FIG. 19 , the nodule 42 spacing is 13.6 mm for those labeled 102, 12.8 mm for those labeled 104, and 11.8 mm for those labeled 106. In this case, the array may include a higher nodule density (or a shorter average distance between nodule) toward the ends and a lower nodule density (or a longer average distance between nodule) toward the center, or vice versa. The variation in nodule density (or average distance between nodules) can be characterized as the number of nodules per unit length of the cylinder, which increases proportionally with distance from the center. Thus, this embodiment is a nodulated cylindrical brush 96 that includes a cylindrical body with nodules distributed along its length, with the nodules 42 exhibiting a variable density that increases toward the ends of the cylinder. The nodules 42 can also vary in size and shape along the length of the cylinder, with these variations designed to optimize specific performance attributes.

[0053] 20 illustrates the targeted water flow through multiple PVA blobs 42 of the preferred embodiment. The cylindrical brush 22 is designed to allow for uniform water flow 108 only through the PVA blobs 42, thereby improving particle removal efficiency and eliminating water loss through the body of the cylindrical brush 22. The water flow 108 directed through the PVA blobs 42 rinses the blobs and sweeps away contaminants that could potentially damage the next wafer. In the preferred cylindrical brush 22, water is redirected to the PVA blobs 42, enhancing the sweep of cross-contaminants by having 100% positioning of the water relative to the blobs.

[0054] The preferred cylindrical brush 22 provides benefits to the product end user, typically a semiconductor fabrication facility for chip (wafer) production, including the availability of PVA nodule designs ranging from round to unlimited design configurations such as triple edge and bevel edge, as shown most clearly in Figures 4A-4C.

[0055] In terms of particles, a typical brush contains approximately 2,500 particles after hours of washing (treatment bath). In contrast, in a preferred embodiment, the cylindrical brush 22 has been shown to release fewer than 50 particles in less than 20 minutes. Certain advantages of the cylindrical brush 22, unique to PVA manufacturing, include a 76% reduction in raw materials required to manufacture the PVA brush, a 40% reduction in shipping weight, a 98% production yield compared to the average of 76%, elimination of costly mold cleanup in the process, a 78% reduction in toxic chemicals used to manufacture PVA, making this manufacturing better for the environment and ecosystems, a shorter cure time compared to a 16-hour bake time and reduced electricity required to cure in an oven, fully injection-molded rails, and a fully automated manufacturing process compared to the currently implemented manual process. Additionally, the preferred cylindrical brush 22 allows customers to develop, test, and manufacture PVA brushes with unique nodule profiles. The cylindrical brush 22 has more complete positioning of water relative to the nodules, enhancing the cleanup of cross-contamination. In this case, the water flows through the blob 42 and directly contacts the wafer, rinsing the blob 42 and preventing recontamination of the wafer thereafter.

[0056] Other benefits of the preferred cylindrical cleaning brush 22 include a 95% reduction in break-in period and 100% overlap-free delivery of water flowing through the brush 22 to the globules (reducing overall water usage for the end user). It is believed that to achieve the same efficiency with the preferred cylindrical brush, semiconductor fabrication facilities would need to use a 90% reduced volume of water flowing through the cleaning brush 22. Finally, the lightweight nature of the preferred cleaning brush 22 reduces wear on machine wear parts (i.e., bearings, motors).

[0057] The foregoing description of preferred embodiments of the present invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the above teachings. It is intended that the scope of the invention be limited not by this detailed description, but rather by the claims appended hereto and their equivalents. [Explanation of symbols]

[0058] 24 rail plate 26 First Plate 28 Second Plate 30 Seal plate 32 Upper Plate 58 Molding Assembly

Claims

1. A cleaning tool for electronic components, A cylindrical brush having a core member comprising an outer wall with multiple core holes and a pair of openings, A plurality of rail plates having the plurality of rail holes, arranged along the outer wall of the core member such that the plurality of core holes align with the plurality of rail holes, A plurality of polyvinyl alcohol (PVA) small foam bars, wherein each of the plurality of small foam bars of the PVA small foam bar is installed on each of the plurality of rail plates such that it aligns with the plurality of core holes and the plurality of rail holes, A pair of end caps that enclose the pair of openings of the core member, Includes, The alignment of the plurality of core holes, the plurality of rail holes, and the plurality of PVA lumps allows the water filling the core to pass through the core holes and the plurality of rail holes and enter the plurality of PVA lumps, which enables a targeted and precise water flow through the PVA lumps and clears contaminants from the surface of the electronic components. Cleaning tools.

2. The cleaning tool according to claim 1, wherein the plurality of PVA lumps deliver a uniform water flow through the lumps.

3. The cleaning tool according to claim 1, wherein the plurality of PVA lumps control the water flow and sweep away contaminants picked up by the plurality of PVA lumps.

4. The cleaning tool according to claim 1, wherein the electronic component is a silicon wafer.

5. The cleaning tool according to claim 1, wherein the plurality of PVA small foam bars are attached to the rail plate using an adhesive member.

6. The cleaning tool according to claim 1, wherein the cylindrical brush is characterized by a unique pattern of the plurality of rail plates along the outer wall of the core member, which enables the plurality of PVA clumps to efficiently clean the electronic components.

7. The cleaning tool according to claim 1, wherein the plurality of PVA foam bars are configured to remove contaminants from the surface of the electronic component.

8. A method for manufacturing a cylindrical brush for cleaning tools, a) A step of generating a molded assembly, i) A step of positioning at least one of a plurality of rail plates on a foam fitting recess of a first plate having a plurality of first plate holes, wherein each of the plurality of rail plates includes a plurality of rail holes, ii) A step of positioning at least one of the plurality of rail plates aligned with the first plate onto the second plate, iii) The step of placing the second plate, which is aligned with at least one rail plate, on the seal plate, and iv) A step of placing an upper plate having a plurality of upper plate holes on the first plate, thereby generating the molded assembly, The steps include generating the molded assembly, b) The step of locking the molded assembly using at least one locking member, c) A step of mixing polyvinyl alcohol (PVA) into a PVA gel, d) The step of injecting the PVA gel into each of the plurality of upper plate holes using an injection device, e) a step that allows the PVA gel to penetrate through at least one of a plurality of second plate pores on the second plate to generate at least one of a plurality of PVA clumps, f) A step that allows the PVA gel to overflow, thereby filling the internal cavity of at least one of the plurality of rail plates, and generating the plurality of PVA lumps on the second plate, g) The step of placing the molded assembly into the heating device, h) The heating device enables the curing of the plurality of PVA lumps, thereby producing at least one of the plurality of PVA lump foam bars; i) The step of removing at least one locking member from the molded assembly, j) The step of removing a portion of the peg made of the PVA sponge material, k) The step of removing the first plate and peeling off the remaining pegs of the PVA sponge material, l) The step of removing the seal plate, thereby facilitating the removal of at least one of the plurality of PVA small foam bars, m) Repeating steps a) to l) until the plurality of PVA small foam bars are generated, n) The step of inserting the plurality of rail plates along the outer wall of the core member having the plurality of core holes of the cleaning tool in a unique pattern such that the plurality of core holes are aligned with the plurality of rail holes, o) The step of installing each of the plurality of PVA small foam bars onto each of the plurality of rail plates, p) A step of sealing one pair of openings of the core member using one pair of end caps, Includes, As a result, the unique pattern of the plurality of rail plates along the outer wall of the core member allows for efficient cleaning of the electronic components when the plurality of PVA lumps are filled with water. method.

9. The method according to claim 8, wherein the plurality of rail plates are positioned on the second plate together with the first plate such that the plurality of second plate holes are aligned with the plurality of rail holes.

10. The method according to claim 8, wherein the sealing plate prevents the plurality of second plate holes from being exposed to the outside air.

11. The method according to claim 8, wherein the upper plate is placed on the first plate such that the plurality of upper plate holes are aligned with the first plate holes.

12. The method according to claim 8, wherein the alignment of the plurality of core holes with the plurality of rail holes and the plurality of PVA lumps allows water filled in the core to pass through the core holes and the plurality of rail holes into the plurality of PVA lumps, thereby enabling an improved and precise water flow through the PVA lumps and clearing contaminants from the surface of the electronic components.

13. A method for manufacturing a cylindrical brush for cleaning tools, a) A step of generating a molded assembly, i) A step of positioning at least one of a plurality of rail plates on a foam fitting recess of a first plate having a plurality of first plate holes, wherein each of the plurality of rail plates includes a plurality of rail holes, ii) Positioning at least one of the plurality of rail plates aligned with the first plate onto a second plate having a plurality of second plate holes, and aligning the plurality of second plate holes with the plurality of rail holes, iii) A step of placing the second plate, which is aligned with at least one rail plate, on a seal plate, wherein the seal plate prevents the plurality of second plate holes from being exposed to the outside air, and iv) A step of placing an upper plate having a plurality of upper plate holes on the first plate, and aligning the plurality of upper plate holes with the holes in the first plate, thereby generating the molded assembly. The steps include generating the molded assembly which includes the following: b) The step of locking the molded assembly using at least one locking member, c) A step of mixing polyvinyl alcohol (PVA) to make a PVA gel, d) The step of injecting the PVA gel into each of the plurality of upper plate holes in the upper plate using an injection device, e) a step that allows the PVA gel to penetrate through at least one of the plurality of second plate pores to generate at least one of the plurality of PVA clumps, f) A step that allows the PVA gel to overflow, thereby filling the internal cavity of at least one of the plurality of rail plates, and generating the plurality of PVA lumps on the second plate, g) The step of placing the molded assembly into the heating device, h) The heating device enables the curing of the plurality of PVA lumps to convert the PVA gel within the plurality of PVA lumps into a PVA sponge material, thereby producing at least one of the plurality of PVA lump foam bars, i) The step of removing at least one locking member from the molded assembly, j) The step of peeling off the PVA gel that has hardened on the upper plate, thereby removing a portion of the peg of the PVA sponge material, k) The step of removing the first plate and peeling off the remaining pegs of the PVA sponge material, l) The step of removing the seal plate, thereby facilitating the removal of at least one of the plurality of PVA clump foam bars having a row of PVA clumps by pushing the PVA clumps through the second plate hole, m) Repeating steps a) to l) until the plurality of PVA small foam bars are generated, n) The step of inserting the plurality of rail plates along the outer wall of the core member of the cleaning tool in a unique pattern, o) The step of installing each of the plurality of PVA small foam bars onto each of the plurality of rail plates, p) A step of sealing one pair of openings of the core member using one pair of end caps, Includes, As a result, the unique pattern of the plurality of rail plates along the outer wall of the core member allows the plurality of PVA clumps to efficiently clean the electronic components. method.

14. The method according to claim 13, wherein the plurality of PVA small foam bars are attached to the rail plate using an adhesive member.

15. The method according to claim 13, wherein the cylindrical brush is configured to shorten the break-in period for the end user.

16. The method according to claim 13, wherein the cylindrical brush is configured to reduce the overall water usage for the end user.

17. The method according to claim 14, wherein the alignment of the plurality of core holes with the plurality of rail holes and the plurality of PVA lumps allows water filled in the core to pass through the core holes and the plurality of rail holes into the plurality of PVA lumps, thereby enabling an improved and precise water flow through the PVA lumps and clearing contaminants from the surface of the electronic components.

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