Connectors for use in vacuum pump systems

Abstract

A connector (16) for use in a vacuum pump system (2), the connector (16) comprising: a conduit (50), the conduit (50) comprising a first conduit portion (51) having a first opening (61) and a second opening (62); a second conduit portion (52) extending from the first conduit portion (51) at a branch point (54) between the first opening (61) and the second opening (62), the second conduit portion (52) having a third opening (63) at an end distal to the branch point (54); a first valve (71) disposed along the first conduit portion (51) between the branch point (54) and the second opening (62); and a second valve (72) disposed along the second conduit portion (52) between the branch point (54) and the third opening (63).

Description

[Technical Field]

[0001] The present invention relates to connectors for use in vacuum pump systems, for example, connectors for connecting vacuum pumps and / or abatement devices. [Background technology]

[0002] Vacuum pumping systems and abatement systems are used in a variety of different technical fields, such as semiconductor manufacturing. Generally, in such systems, vacuum pumping equipment is used to pump gases (e.g., gases from industrial processes) from a specific location, and abatement equipment is used to abate (e.g., destroy or dispose of) any undesirable substances (e.g., exhaust gases) that are produced.

[0003] In many systems, vacuum pumps may be configured as a stack, for example with a booster pump located above or on top of a compound vacuum pump. Summary of the Invention [Problem to be solved by the invention]

[0004] For example, it tends to be desirable to easily separate the pumps from the pump stack so that one pump can be easily replaced while the other pump is still operating in the system.

[0005] It also tends to be desirable to provide a direct flow of process gas between the booster and the compound pump in the pump stack, which tends to provide significantly better vacuum conductance performance compared to systems that do not provide such a direct flow.

[0006] It also tends to be desirable to provide a manifold that crosses all of the pump stacks. [Means for solving the problem]

[0007] Thus, an apparatus is provided that includes a connector for use between vacuum pumps, which tends to provide improved conductance (due to direct flow of process gas between the booster and the composite pump of the pump stack), manifolding of all pump stacks, and easy isolation of the pump from the pump stack within the system.

[0008] In one aspect, a connector for use in a vacuum pump system is provided, the connector comprising: a conduit comprising a first conduit portion having a first opening and a second opening, and a second conduit portion extending from the first conduit portion at a bifurcation point between the first and second openings, the second conduit portion having a third opening at an end distal to the bifurcation point, a first valve disposed along the first conduit portion between the bifurcation point and the second opening, and a second valve disposed along the second conduit portion between the bifurcation point and the third opening.

[0009] The connector may be an interstage pump isolation device for selectively isolating the first pump from one or both of the manifold and the second pump.

[0010] The first opening can be configured to be fluidly coupled to an outlet of a first vacuum pump, the second opening can be configured to be fluidly coupled to an inlet of a second vacuum pump, and the third opening can be configured to be fluidly coupled to a manifold.

[0011] The first conduit portion can be a substantially straight conduit between the first opening and the second opening, and the second conduit portion can be a substantially straight conduit between the branch point and the third opening.

[0012] In a further aspect, there is provided a pump module comprising a first vacuum pump, a second vacuum pump, and a connector according to the above aspect, wherein the first vacuum pump is coupled to the first opening, and the second vacuum pump is coupled to the second opening.

[0013] The first vacuum pump may be a booster pump.

[0014] The second vacuum pump may be a compound vacuum pump.

[0015] The first and second valves may be gate valves.

[0016] In a further aspect, a pump system is provided that includes a plurality of pump modules, each pump module of the plurality of pump modules being according to the above aspect, and a manifold, the manifold coupled to the third opening of each pump module of the plurality of pump modules.

[0017] In a further aspect, there is provided a method of operating a pump system according to the above aspect, the method including, for each pump module of the plurality of pump modules, opening a first valve of the pump module and pumping, with first and second vacuum pumps of the pump module, fluid from the first vacuum pump through a first conduit portion to the second vacuum pump.

[0018] The method may further include, for a first pump module of the plurality of pump modules, closing a first valve of the first pump module, thereby isolating a second vacuum pump of the first pump module, and opening a second valve of the first pump module.

[0019] The method may further include a step of opening a second valve of the pump module for at least one pump module other than the first pump module of the plurality of pump modules, wherein the at least one pump module of the plurality of pump modules is adapted to take on the pump load of the second vacuum pump of the first pump module.

[0020] The method may further include performing maintenance work on the second vacuum pump of the first pump module after isolating the second vacuum pump of the first pump module.

[0021] The method may further include, for a first pump module of the plurality of pump modules, closing a second valve of the first pump module, thereby isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pump module from the remainder of the pump system. The method may further include, after isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pump module from the remainder of the pump system, performing a maintenance operation on one or more of the first vacuum pump, the second vacuum pump, or the first valve of the first pump module.

[0022] The method may further include, for a first pump module of the plurality of pump modules, closing a second valve of each pump module other than the first pump module of the plurality of pump modules, thereby isolating each pump module other than the first pump module of the plurality of pump modules from the manifold. After isolating each pump module other than the first pump module of the plurality of pump modules from the manifold, the method may further include performing maintenance work on one or more of the first vacuum pump, the second vacuum pump, the connector, the first valve, and / or the second valve of the first pump module and / or performing maintenance work on the manifold. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a schematic diagram (not to scale) showing a vacuum pump and / or abatement system. [Figure 2] FIG. 1 is a schematic diagram (not to scale) showing a perspective view of a vacuum pump and / or pump module of an abatement system. [Figure 3] FIG. 1 is a schematic diagram (not to scale) showing the connectors of the pump module. [Figure 4] 1 is a process flow diagram illustrating certain steps of a method corresponding to a first mode of operation of a vacuum pump and / or abatement device. [Figure 5] 1 is a schematic diagram (not to scale) illustrating gas flow paths through the connector during a first mode of operation. FIG. [Figure 6] 10 is a process flow diagram illustrating certain steps of a method corresponding to a second mode of operation of the vacuum pump and / or abatement device. [Figure 7] 1 is a schematic diagram (not to scale) illustrating gas flow paths through the connector during a second mode of operation. [Figure 8] 10 is a process flow diagram illustrating certain steps of a method corresponding to a third mode of operation of the vacuum pump and / or abatement device. [Figure 9] 10 is a process flow diagram illustrating certain steps of a method corresponding to a fourth mode of operation of the vacuum pump and / or abatement device. DETAILED DESCRIPTION OF THE INVENTION

[0024] FIG. 1 is a schematic diagram (not to scale) showing a vacuum pumping system 2.

[0025] System 2 includes a plurality of pump modules 4, sometimes referred to as "units" or "slices." Each of pump modules 4 is fluidly coupled to an entity 6 via a respective fluid inlet line 8, commonly referred to as a "foreline." Entity 6 may be, for example, a chamber or space used in an industrial process such as semiconductor manufacturing. Each pump module 4 is also fluidly coupled to a respective exhaust line 10.

[0026] The system includes a plurality of valves 101, 102, e.g., gate valves, disposed on a fluid inlet line 8 and an outlet line 10. The valve 101 disposed along the fluid inlet line 8, i.e., upstream of the pump module 4, is hereinafter referred to as the "inlet line valve." The valve 102 disposed along the outlet line 10, i.e., downstream of the pump module 4, is hereinafter referred to as the "outlet line valve." More specifically, in this embodiment, for each pump module 4, there is a respective inlet line valve 101 disposed along the fluid inlet line 8 of that pump module 4, and a respective outlet line valve 102 disposed along the outlet line 10 of that pump module 4. Thus, each pump module 4 is disposed between a respective pair of upstream and downstream valves 101, 102.

[0027] Each of the pump modules 4 includes a respective first pump 12, a second pump 14, and a connector 16 connecting the first pump 12 and the second pump 14.

[0028] The first and second pumps 12, 14 are vacuum pumps for pumping gas from the element 6. More specifically, in this embodiment, each of the first pumps 12 is a booster pump. In this embodiment, each of the second pumps 14 is a compound pump that may be a combination of a semiconductor dry pump and a booster pump.

[0029] For each pump module 4, the inlet of the first pump 12 is fluidly coupled to the fluid input line 8 of that pump module 4. The outlet of the first pump 12 is fluidly coupled to the inlet of the connector 16 of that pump module 4. The outlet of the connector 16 is fluidly coupled to the inlet of the second pump 14 of that pump module 4. The outlet of the second pump 14 is fluidly coupled to the exhaust line 10 of that pump module 4.

[0030] In one mode of operation, system 2 pumps gas out of element 6 via fluid inlet line 8. Specifically, gas is pumped by pumps 12, 14 of the pump module such that gas travels from element 6 via fluid inlet line 8 to first pump 12, then through first pump 12, then from first pump 12 via connector 16 to second pump 14, then through second pump 14, and then from second pump 14 out of system 2 via exhaust line 10.

[0031] In some embodiments, system 2 abatement (e.g., destroying or disposing of) undesirable substances produced by element 6 that may be present in the pumped gas. That is, system 2 may include one or more abatement devices for abatement of undesirable substances produced by element 6. Thus, vacuum pump system 2 may be a vacuum pump and / or an abatement system.

[0032] In some embodiments, system 2 may further include additional modules or devices, including, but not limited to, one or more of an inverter for converting AC power to frequency-shifted AC power, an electronic controller for controlling the operation of all or part of system 2, or equipment devices for performing functions related to the equipment.

[0033] The vacuum pumping and / or abatement system 2 can be an integrated system. The term "integrated system" can be used to refer to two or more modules integrated together into a common system, the modules being selected from the group of modules consisting of a module comprising vacuum pumping equipment, a module comprising process gas abatement equipment, and a module comprising a controller for controlling the vacuum pumping and / or abatement equipment.

[0034] In this embodiment, the pump modules 4 are fluidly coupled via a manifold 18. More specifically, the manifold 18 connects the connectors 16 of the pump modules 4 together (as described in more detail below with reference to FIGS. 2 and 3), thereby allowing gas to be pumped between the pump modules 4.

[0035] FIG. 2 is a schematic diagram (not to scale) showing a perspective view of a pump module 4 of a vacuum pumping system 2.

[0036] The pump module 4 includes a frame 20 and a base 22 coupled to the frame 20. The base 22 can be considered to be part of the frame 20.

[0037] The frame 20 and / or base 22 may be bolted to the ground / floor.

[0038] The first pump 12, the second pump 14, and the connector 16 of the pump module 4 are disposed within a volume defined by a frame 20 and a base 22. The frame 20 comprises a plurality of interconnected bars coupled to the base 22.

[0039] The pump module 4 has a front surface 24 , a rear surface 26 , a top surface 28 , a bottom surface 30 , and two opposing side surfaces 32 .

[0040] FIG. 3 is a schematic diagram of connector 16 (not to scale).

[0041] In this embodiment, the connector 16 comprises a conduit 50 having a first conduit portion 51 and a second conduit portion 52 .

[0042] The first conduit portion 51 comprises a first opening 61, which in this embodiment is located at a first end of the first conduit portion 51, and a second opening 62, which in this embodiment is located at a second end of the first conduit portion 51 opposite the first end.

[0043] The second conduit portion 52 extends from the first conduit portion 51. Specifically, the second conduit 52 extends from a branch point 54 on the first conduit 51. The branch point 54 is located at an intermediate position along the first conduit 51 between the first opening 61 and the second opening 62.

[0044] The second conduit portion 52 includes a third opening 63 at the end of the second conduit portion 52 distal from the bifurcation point 54 .

[0045] Connector 16 includes a first valve 71. First valve 71 is disposed along (e.g., within) first conduit portion 51 between branch point 54 and second opening 62. In this embodiment, first valve 71 is a gate valve.

[0046] Connector 16 further includes a second valve 72. Second valve 72 is disposed in (e.g., within) second conduit portion 52 between branch point 54 and third opening 63. In this embodiment, second valve 72 is a gate valve.

[0047] In this embodiment, as shown in Figures 1 and 2, when the connector 16 is assembled into the system 2, the first opening 61 is fluidly coupled to the outlet or discharge port of the first vacuum pump 12. For example, the first conduit portion 51 can include a first flange (surrounding the first opening 61 at a first end) that can be attached (e.g., bolted) to the outlet of the first pump 12. When the connector 16 is assembled into the system 2, the second opening 62 is fluidly coupled to the inlet of the second vacuum pump 14. For example, the first conduit portion 51 can include a second flange (surrounding the second opening 62 at a second end) that can be attached (e.g., bolted) to the inlet of the second pump 14. When the connector 16 is assembled into the system 2, the third opening 63 is fluidly coupled to the manifold 18 (as shown in Figure 3). For example, the second conduit portion 52 may include a third flange (surrounding a third opening 63 at a third end) that may be attached (e.g., bolted) to a respective inlet of the manifold 18.

[0048] Preferably, the first conduit portion 51 is a substantially straight conduit between the first opening 61 and the second opening 62. This advantageously tends to provide improved pumping efficiency compared to, for example, pump systems having tortuous paths between successive pumps. Nevertheless, the first conduit portion 51 may be tortuous.

[0049] Preferably, second conduit portion 52 is a substantially straight conduit between branch point 54 and third opening 63. This advantageously tends to provide improved pumping efficiency compared to, for example, pumping systems having tortuous gas paths. Nevertheless, second conduit portion 52 may be tortuous.

[0050] 4 is a process flow diagram illustrating certain steps of a method 400 of operating system 2. The process of FIG. 4 may correspond to a first mode of operation of system 2.

[0051] In step s402, for each of the pump modules 4, the first valve 71 of the connector 16 is opened, for example, by a controller of the system 2. While the first valve 71 of each pump module 4 is opened in step s402, the second valve 72 of each pump module 4 can be opened, thereby providing a shared pump configuration.

[0052] In step s404, each of the pump modules 4 pumps gas from the element 6 out of the system 2. Specifically, for each pump module 4, the first and second vacuum pumps 12, 14 of that pump module 4 pump gas from the element 6 via their respective fluid inlet lines 8 and pump gas out of the system 2 via their respective exhaust lines 10. In each of the pump modules 4, fluid is pumped directly from the first pump 12 to the second pump 14 via the first conduit portion 51 of the connector 16. Gas can be pumped between the pump modules 4 via the manifold 18 and the open second valve 72. The operation of the pumps 12, 14 can be controlled by a controller of the system 2.

[0053] FIG. 5 is a schematic diagram illustrating fluid flow 500 through connector 16 of the pump module during a first mode of operation (ie, method 500).

[0054] Thus, a first mode of operation of the system 2 is provided.

[0055] 6 is a process flow diagram illustrating certain steps of another method 600 of operating system 2. The process of FIG. 6 may correspond to a second mode of operation of system 2.

[0056] In step s602, the system 2 may operate in a first mode of operation, ie, according to the method 400 detailed above with reference to FIG.

[0057] In step s604, for a first pump module 4 of the plurality of pump modules 4, the first valve 71 of the first pump module 4 is closed, for example, by the control device of the system 2. In other words, the closed first valve 71 prevents pumping gas from flowing from the first pump 12 of the first pump module 4 to the second pump 14 of the first pump module 4. Furthermore, the exhaust line valve 102 of the exhaust line 10 of the first pump module 4 can be closed, thereby preventing backflow of process gas toward the second vacuum pump 14 of the first pump module 4. Thus, the second vacuum pump 14 of the first pump module 4 is fluidly isolated from the rest of the system 2.

[0058] In step s606, the second valve 72 of the first pump module 4 is maintained open (or opened in embodiments in which the second valve 72 was previously closed). The controller of system 2 can control the second valve 72.

[0059] In step s608, the second valve 72 of at least one pump module 4 other than the first pump module 4 of the plurality of pump modules 4 (and preferably all other available pump modules 4) is maintained open (or opened in embodiments in which the second valve 72 was previously closed), e.g., by a controller of the system 2. Thus, pumping gas flows from the first pump 12 of the first pump module 4 into the manifold 18, through the manifold 18, and into at least one pump module 4 other than the first pump module 4 of the plurality of pump modules 4. In this manner, the at least one pump module 4 of the plurality of pump modules 4 assumes the pumping load of the second vacuum pump 14 of the first pump module 4, fluidly isolated from the rest of the system.

[0060] FIG. 7 is a schematic diagram illustrating fluid flow 700 through connector 16 of first pump module 4 during the second mode of operation (ie, method 600).

[0061] After fluidly isolating the second vacuum pump 14 of the first pump module 4 in step s610, the isolated second vacuum pump 14 may be turned off or deactivated. The isolated second vacuum pump 14 may be disconnected from the rest of the system 2.

[0062] In step s612, after fluidly isolating the second vacuum pump 14 of the first pump module 4, a maintenance operation (such as an inspection, maintenance, cleaning, repair, and / or replacement operation) is performed on the isolated second vacuum pump 14. The maintenance operation may be performed by a human operator.

[0063] In step s614, after performing maintenance work on the second vacuum pump 14 of the first pump module 4, that vacuum pump 14 can be recoupled or reconnected to the system 2, i.e., to the second end of the first conduit portion 51 of the connector 16 of the first pump module 4. The first pump module 4 is also reconnected to the exhaust line valve 102.

[0064] In step s616, the second vacuum pump 14 of the first pump module 4 may be turned on or resume operation.

[0065] In step s618, the first valve 71 of the first pump module 4 is opened, for example, by a controller of system 2. Additionally, the exhaust line valve 102 of the exhaust line 10 of the first pump module 4 is opened. The second valve 72 of the first pump module 4 can be maintained open, for example, by a controller of system 2. In this manner, gas is pumped through the first pump module 4, following, for example, flow path 500 shown in FIG. 5 , from the first pump 12 via the first conduit portion 51 of the connector 16 to the second pump 14 and / or directly to another pump module 4 via the manifold 18.

[0066] Thus, a second operating mode of the system 2 is provided in which maintenance can be performed on the second pump 14 of the pump module 4 while avoiding the need to shut down the pump system 2. Furthermore, this tends to be achieved without significant loss of pump performance because the pumping load of the second pump 14 of the first pump module 4 in which maintenance is performed is taken up by the remainder of the pump module 4.

[0067] 8 is a process flow diagram illustrating certain steps of another method 800 of operating system 2. The process of FIG. 8 may correspond to a third mode of operation of system 2.

[0068] In step s802, the system 2 may operate in a first mode of operation, ie, according to the method 400 detailed above with reference to FIG.

[0069] In step s804, for a first pump module 4 of the plurality of pump modules 4, the second valve 72 of the first pump module 4 is closed.

[0070] In step s806, the intake line valve 101 and the exhaust line valve 102 along the fluid inlet line 8 and the exhaust line 10 of the first pump module 4, respectively, are closed.

[0071] In this manner, the pumps 12, 14 and the first valve 71 on the connector 16 of the first pump module 4 are fluidly isolated from the rest of the system 2. Gas is also prevented from flowing through the pumps 12, 14 and the first valve 71 on the connector 16 of the first pump module 4 by the closed inlet and outlet line valves 101, 102 and the closed second valve 72 on that connector 16.

[0072] In step s808, after fluidly isolating the pumps 12, 14 and the first valve 71 of the connector 16 of the first pump module 4, the isolated pumps 12, 14 may be turned off or stopped from operating. The isolated first pump 12 and / or second pump 14 may be disconnected from the rest of the system 2.

[0073] In step s810, after fluidly isolating the pumps 12, 14 and the first valve 71 of the connector 16 of the first pump module 4, a maintenance operation (such as an inspection, maintenance, cleaning, repair, and / or replacement operation) is performed on the isolated first pump 12, second pump 14, and / or the first valve 71 of the connector 16. The maintenance operation may be performed by a human operator.

[0074] In step s812, the pumps 12, 14 of the first pump module 4 and / or the first valve 71 of the connector 16 may be recoupled or reconnected to the system 2 after the maintenance operation has been performed in step s810.

[0075] In step s814, the pumps 12, 14 of the first pump module 4 may be turned on or resume operation.

[0076] In step s816, the first valve 71 of the first pump module 4 is opened, for example, by the controller of system 2. Also, the inlet and outlet line valves 101, 102 of the first pump module 4 are opened, for example, by the controller of system 2. The second valve 72 of the first pump module 4 can be opened, for example, by the controller of system 2. In this manner, gas is pumped through the first pump module 4, following, for example, flow path 500 shown in FIG. 5 , directly from the first pump 12 to the second pump 14 via the first conduit portion 51 of the connector 16.

[0077] Thus, a third mode of operation of the system 2 is provided, which allows maintenance to be performed on the first pump 12, the second pump 14 of the pump module 4, and / or the first valve 71 of the connector 16 while avoiding the need to shut down the pump system 2.

[0078] 9 is a process flow diagram illustrating certain steps of another method 900 of operating system 2. The process of FIG. 9 may correspond to a fourth mode of operation of system 2.

[0079] In step s902, the system 2 may operate in a first mode of operation, ie, according to the method 400 detailed above with reference to FIG.

[0080] In step s904, for each pump module 4 other than the first pump module 4, the second valve 72 of that pump module 4 is closed, for example, by a controller of the system 2. In this manner, each of the pump modules 4 other than the first pump module 4 is fluidly isolated from the manifold 18.

[0081] In step s906, the inlet line valve 101 and the outlet line valve 102 along the fluid inlet line 8 and outlet line 10 of the first pump module 4, respectively, are closed.

[0082] In this manner, the first pump module 4 and manifold 18 are fluidly isolated from the rest of the system 2. Also, gas is prevented from flowing through the first pump module 4 and manifold 18.

[0083] In step s908, after isolating the first pump module 4 and manifold 18, those elements may be purged, for example, by pumping nitrogen gas therethrough. The pumps 12, 14 of the first pump module 4 may then be turned off or stopped from operating. The first pump 12, second pump 14, connector 16, and / or manifold 18 may be disconnected from the rest of the system 2.

[0084] In step s910, after isolating the first pump module 4 and the manifold 18, a maintenance operation (such as an inspection, maintenance, cleaning, repair, and / or replacement operation) is performed on at least a portion of the first pump module 4 and / or the manifold 18. For example, the maintenance operation may be performed on the first pump 12, the second pump 14, the first valve 71, and / or the second valve 72 of the first pump module 4. The maintenance operation may be performed by a human operator.

[0085] In step s912, the first pump module 4 and manifold 18 may be recoupled or reconnected to the system 2 after the maintenance procedure has been performed in step s910.

[0086] In step s914, the pumps 12, 14 of the first pump module 4 may be turned on or resume operation.

[0087] In step s916, the first valve 71 of the first pump module 4 is opened, for example, by the controller of system 2. Also, the inlet and outlet line valves 101, 102 of the first pump module 4 are opened, for example, by the controller of system 2. Also, the second valve 72 of the first pump module 4 can be opened, for example, by the controller of system 2. In this manner, gas is pumped through the first pump module 4, following, for example, the flow path 500 shown in FIG. 5 , directly from the first pump 12 to the second pump 14 via the first conduit portion 51 of the connector 16.

[0088] Thus, a fourth operating mode of system 2 is provided. In the fourth operating mode, maintenance can be performed on first pump 12, second pump 14, connector 16 (e.g., on first valve 71 and / or second valve 72), or manifold 18 while avoiding the need to shut down pump system 2.

[0089] In many vacuum pump systems, a vacuum pump module includes a booster pump and a dry pump combined in a single package. In some applications, higher vacuum capacity is required, so a large booster can be added on top of the pump combination, creating a so-called "triple stack." Generally, the term "triple stack" is used to refer to the combination of two pump packages, with the first package having a booster (one pump) and the second package having a pump combination (two pumps). Such triple stacks tend to be more difficult to maintain because the pumps tend to be physically larger. Additional safety precautions tend to be required, and maintenance tends to take significantly longer than maintaining a single unit.

[0090] Conventional system designs address these issues by allowing for pump isolation within the system, sometimes allowing any one pump package to be individually removed for maintenance. However, conventional systems that address these issues lack direct piping between successive pumps. Typically, vacuum pumps are susceptible to the inherent "resistance" of the piping supplying them; the more bends and constrictions in the piping, the lower the "conductance." Therefore, the lack of direct, straight piping between successive pumps tends to adversely affect pump performance. The connectors described herein advantageously tend to provide straight piping or a direct connection between successive pumps 12, 14, while also allowing for the isolation and removal of either or both pumps from the system 2. Additionally, the systems described herein allow for gate valve maintenance while the system is operating. Traditionally, servicing gate valves has been difficult and required the entire system to be turned off.

[0091] The inventors have recognized that the pump combination is more likely to require maintenance than the booster pump, and the above-described arrangement tends to allow for easy isolation and removal of the pump combination (second pump) in a manner that avoids turning off the entire system.

[0092] The connector provides a direct path from the booster to the pump combination without going through the manifold. An isolation valve (first valve) is located above / upstream of the pump combination inlet. This tends to allow for easy isolation of the lower pump during most common pump maintenance procedures. This direct connection path between the pumps tends to improve conductance and pump performance. The connector line branches between the pumps before the first valve. This branch (i.e., second conduit section) transitions back toward a manifold that extends across the rear of the system. This branch has a gate valve (i.e., second valve) that can isolate the entire triple stack from the manifold if necessary. By turning off both gate valves, the booster can be independently isolated and removed while the rest of the system continues to operate.

[0093] Advantageously, the connector can be applied in different orientations.

[0094] In the above embodiment, the connector is implemented in a modular vacuum pump and / or abatement system as detailed above with reference to Figures 1 and 2. The pump modules are arranged and coupled together in a side-by-side, serial arrangement, with each pump module attached on one or both of its sides to one or more adjacent modules. However, in other embodiments, the connector is implemented in a different type of vacuum pump and / or abatement system than that described above.

[0095] In the above embodiment, the connector connects two vacuum pumps, specifically a booster pump and a compound pump. However, in other embodiments, the connector is used to connect different pairs of elements together, for example, to connect two compound pumps together or to connect a vacuum pump to an abatement device. [Explanation of symbols]

[0096] 2. Vacuum pump and / or abatement system 4 Pump Module 6 Elements 8 Fluid inlet line 10 Discharge Line 12 First Pump 14 Second Pump 16 connectors 18 Manifold 20 frames 22 Base 24 Front 26 Rear 28 Top 30 bottom 32 Side 50 Conduit 51 First conduit section 52 Second conduit section 61 First Opening 62 Second Opening 63 Third Opening 71 First Valve 72 Second Valve 400 ways S402-S404 Method Steps 500 gas flow path 600 ways S602-S618 Method Steps 700 Gas flow path 800 ways S802-S816 Method Steps 900 methods S902-S916 Method Steps

Claims

1. 1. A connector for use in a vacuum pump system, comprising: A conduit, a first opening; a second opening; and a first conduit portion comprising: a second conduit portion extending from the first conduit portion at a bifurcation point between the first opening and the second opening, the second conduit portion including a third opening at an end distal to the bifurcation point; a conduit comprising: a first valve disposed along the first conduit portion between the bifurcation point and the second opening; a second valve disposed along the second conduit portion between the bifurcation point and the third opening; A connector comprising:

2. the first opening is configured to be fluidly coupled to an outlet of a first vacuum pump; the second opening is configured to be fluidly coupled to an inlet of a second vacuum pump; The connector of claim 1 , wherein the third opening is configured to be fluidly coupled to a manifold.

3. 3. The connector of claim 1, wherein the first conduit portion is a substantially straight conduit between the first opening and the second opening.

4. 4. The connector of claim 1, wherein the second conduit portion is a substantially straight conduit between the branch point and the third opening.

5. a first vacuum pump; a second vacuum pump; and A connector according to any one of claims 1 to 4; A pump module comprising: the first vacuum pump is coupled to the first opening; The second vacuum pump is coupled to the second opening.

6. the first vacuum pump is a booster pump; and / or the second vacuum pump is a compound vacuum pump; The pump module of claim 5 .

7. a plurality of pump modules, each of the plurality of pump modules being as defined in claim 5 or 6; A manifold; A pump system comprising: The manifold is coupled to the third opening of each pump module of the plurality of pump modules.

8. 8. A method of operating a pump system as recited in claim 7, comprising, for each pump module of the plurality of pump modules: opening the first valve of the pump module; pumping fluid from the first vacuum pump through the first conduit portion to the second vacuum pump with the first and second vacuum pumps of the pump module; A method comprising:

9. For a first pump module of the plurality of pump modules: closing the first valve of the first pump module, thereby isolating the second vacuum pump of the first pump module; opening the second valve of the first pump module; The method of claim 8, comprising:

10. 10. The method of claim 9, further comprising, for at least one pump module other than the first pump module among the plurality of pump modules, opening the second valve of the pump module, wherein the at least one pump module among the plurality of pump modules is adapted to take on the pumping load of the second vacuum pump of the first pump module.

11. 11. The method of claim 9 or 10, further comprising the step of performing maintenance work on the second vacuum pump of the first pump module after isolating the second vacuum pump of the first pump module.

12. For a first pump module of the plurality of pump modules:

9. The method of claim 8, further comprising closing the second valve of the first pump module, thereby isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pump module from the remainder of the pump system.

13. 13. The method of claim 12, further comprising the step of performing maintenance work on one or more of the first vacuum pump, the second vacuum pump, or the first valve of the first pump module after isolating the first vacuum pump, the second vacuum pump, and the first valve of the first pump module from the remainder of the pump system.

14. For a first pump module of the plurality of pump modules:

9. The method of claim 8, further comprising closing the second valve of each pump module other than the first pump module of the plurality of pump modules, thereby isolating each pump module other than the first pump module of the plurality of pump modules from the manifold.

15. after isolating each pump module other than the first pump module of the plurality of pump modules from the manifold; performing maintenance work on one or more of the first vacuum pump, the second vacuum pump, the connector, the first valve, and / or the second valve of the first pump module; and / or performing maintenance work on the manifold; The method of claim 14 further comprising:

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