Coil inductor, power conversion system, and method of forming a coil inductor

Abstract

The present invention relates to a coil inductor including a plurality of conductive coils stacked in a first direction, a top conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction, a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

Description

[Technical Field]

[0001] The present disclosure relates to coil inductors, power conversion systems, and methods for forming coil inductors. [Background technology]

[0002] Coil inductors are commonly used in electrical applications and can be categorized into radio frequency (RF) inductors used in signal processing and power inductors used in power supply lines. In RF inductor applications, coil inductors can be used to choke, block, attenuate, or filter / smooth high frequency noise in electrical circuits. In power inductor applications, power inductors form part of a voltage conversion circuit in a direct current-to-direct current (DC-DC) converter or other device. For example, power inductors are used in boost circuits, buck circuits, or buck-boost circuits to convert a specific voltage to a required voltage. Summary of the Invention

[0003] In one embodiment, a coil inductor is disclosed that includes multiple conductive coils stacked in a first direction, a top conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction, a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

[0004] In another aspect, a coil inductor is disclosed. The coil inductor includes a plurality of conductive coils stacked in a first direction and a magnetic body covering the plurality of conductive coils. The conductive coils include a top conductive coil extending in a second direction perpendicular to the first direction, a bottom conductive coil extending in the second direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil. A first terminal of the top conductive coil and a second terminal of the bottom conductive coil extend in the first direction.

[0005] In yet another aspect, a power conversion system is disclosed. The power conversion system includes a coil inductor configured to convert a source voltage to a required voltage, and a controller coupled to the coil inductor and configured to control operation of the coil inductor. The coil inductor includes a plurality of conductive coils stacked in a first direction. The plurality of conductive coils includes a top conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction, a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

[0006] In yet another aspect, a power conversion system is disclosed. The power conversion system includes a coil inductor configured to convert a power supply voltage to a required voltage and a controller coupled to the coil inductor and configured to control operation of the coil inductor. The coil inductor includes a plurality of conductive coils stacked in a first direction and a magnetic material covering the plurality of conductive coils. The conductive coils include a top conductive coil extending in a second direction perpendicular to the first direction, a bottom conductive coil extending in the second direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil. A first terminal of the top conductive coil and a second terminal of the bottom conductive coil extend in the first direction.

[0007] In yet another aspect, a manufacturing method for forming a coil inductor is disclosed. A bottom conductive coil including a second terminal is formed. At least one intermediate conductive coil is stacked on the bottom conductive coil. The intermediate conductive coil is in electrical contact with the bottom conductive coil. A top conductive coil including a first terminal is stacked on the intermediate conductive coil. The top conductive coil is in electrical contact with the intermediate conductive coil. The first terminal and the second terminal are bent. A magnetic material is formed to cover the bottom conductive coil, the intermediate conductive coil, and the top conductive coil. The accompanying drawings, which are incorporated in and form a part of this specification, illustrate aspects of the present disclosure and, together with the description, further explain the disclosure and enable one skilled in the art to make and use the disclosure. [Brief explanation of the drawings]

[0008] [Figure 1] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 2] 1 illustrates a plan view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 3] 1 illustrates a side view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 4] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 5] 1 illustrates a side view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 6] 1 illustrates a side view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 7] 1 illustrates a side view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 8] 1 shows a flowchart of an exemplary method for forming a coil inductor according to some aspects of the present disclosure. [Figure 9] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 10]1 illustrates a plan view of an exemplary coil inductor according to some aspects of the present disclosure. [Figure 11] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 12] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 13] 1 illustrates a perspective view of an exemplary coil inductor according to some aspects of the present disclosure. FIG. [Figure 14] FIG. 1 illustrates a block diagram of an exemplary power conversion system with a coil inductor, in accordance with some aspects of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0009] The present disclosure will be described with reference to the accompanying drawings.

[0010] While specific configurations and arrangements are described, it should be understood that this is for illustrative purposes only. Accordingly, other configurations and arrangements can be used without departing from the scope of the present disclosure. Furthermore, the present disclosure is applicable to a variety of other applications. The functional and structural features described in this disclosure can be combined, adjusted, or modified with one another in ways not specifically shown in the drawings, and these combinations, adjustments, and modifications are within the scope of the present disclosure.

[0011] In general, terms may be understood, at least in part, from their use in context. For example, as used herein, the term "one or more" may be used in the singular sense to describe any feature, structure, or characteristic, or in the plural sense to describe a combination of features, structures, or characteristics, depending, at least in part, on the context. Similarly, terms such as "one," "an," and "said" may also be understood to represent the singular or the plural, depending, at least in part, on the context. Furthermore, the term "based on" is not necessarily intended to convey an exclusive set of factors, but rather may be understood to allow for the presence of additional factors not necessarily explicitly recited, depending, at least in part, on the context.

[0012] It should be readily understood that the meanings of "on" and "above / over" in this disclosure should be interpreted in the broadest sense, and that "on" does not simply mean "directly on" something, but also includes the meaning of "on" something with an intermediate feature or layer in between, and that "above / over" does not simply mean "on" something, but also includes the meaning of being "on" something without an intermediate feature or layer in between (i.e., directly on top of something).

[0013] Additionally, for convenience of description, spatially relative terms such as "beneath / below / lower" and "above / upper" may be used herein to describe the relationship of one element or feature to another element or feature as shown in the figures. The spatially relative terms are intended to encompass various orientations of the device during use or operation in addition to the orientation depicted in the figures. The device may be positioned in other orientations (rotated 90 degrees or at other orientations) and the spatially relative descriptions used herein may likewise be interpreted accordingly.

[0014] As used herein, the term "layer" refers to a portion of material that includes a region having a thickness. A layer may extend across the entire underlying or overlying structure, or may extend over a smaller area than the extent of the underlying or overlying structure. Furthermore, a layer may be a homogeneous or heterogeneous region of a continuous structure having a thickness that is less than the thickness of the continuous structure. For example, a layer may be disposed between any pair of horizontal surfaces located between the top and bottom surfaces of a continuous structure or at the top and bottom surfaces. A layer may extend horizontally, vertically, and / or along a tapered surface. A substrate may be a layer and may include one or more layers therein and / or have one or more layers on, above, and / or below it. A layer may include multiple layers. For example, an interconnect layer may include one or more conductor layers and contact layers (layers in which interconnect lines and / or via contacts are formed) and one or more dielectric layers.

[0015] As used herein, the term "coil" refers to a structure wound into a continuous series of loops. The shape of a coil may be circular, square, rectangular, oval, triangular, or any polygonal shape. A coil may be wound or moved in a spiral. In some embodiments, a coil is a generic term for a spiral electrode. In some embodiments, an inductor may be referred to as a coil. An inductor is a passive two-terminal electrical component that stores energy in a magnetic field when an electric current flows through it. An inductor typically consists of insulated wire wound into a coil.

[0016] The inductance of a circuit depends on the geometry of the current path and the magnetic permeability of nearby materials. An inductor may consist of a wire or other conductor shaped to increase the magnetic flux through the circuit, typically in the form of a coil or spiral with two terminals. Winding the wire into a coil increases the number of times the magnetic flux lines cross the circuit, increasing the magnetic field and increasing inductance. The more turns there are, the higher the inductance. Inductance also depends on the shape of the coil, the spacing between turns, and many other factors. Adding a "magnetic core" made of a ferromagnetic material such as iron inside the coil allows the magnetic field from the coil to induce magnetization in the material, increasing the magnetic flux. The high permeability of a ferromagnetic core can increase the inductance of a coil by thousands of times compared to what would be possible without the core.

[0017] Fig. 1 shows a perspective view of an exemplary coil inductor 100 according to some embodiments of the present disclosure, Fig. 2 shows a plan view of the coil inductor 100 according to some embodiments of the present disclosure, and Fig. 3 shows a side view of the coil inductor 100 according to some embodiments of the present disclosure. To better explain the present disclosure, the perspective view, plan view, and side view of the coil inductor 100 in Figs. 1-3 will be described together.

[0018] As shown in FIGS. 1-3 , coil inductor 100 may include a top conductive coil 102, a bottom conductive coil 110, and at least one intermediate conductive coil 108 disposed between top conductive coil 102 and bottom conductive coil 110. In some embodiments, the number of intermediate conductive coils 108 may be greater than one. Top conductive coil 102 includes a first portion 104 and a second portion 106. In some embodiments, first portion 104 may extend along the X and Y directions to form a plane. In some embodiments, first portion 104 may be circular, square, rectangular, oval, triangular, or any polygonal shape extending along the X and Y directions. Second portion 106 may extend along the Z direction, which is perpendicular to the X and Y directions. In some embodiments, second portion 106 may also extend along the X direction.

[0019] In some embodiments, the connection between the first portion 104 and the second portion 106 may be at a right angle. In some embodiments, the connection between the first portion 104 and the second portion 106 may be at an arc angle. In some embodiments, the first portion 104 and the second portion 106 may be formed of the same material, for example, a conductive film or a copper film, and the conductive film or copper film may be bent to form a right angle or an arc angle.

[0020] Bottom conductive coil 110 includes third portion 112 and fourth portion 114. In some embodiments, third portion 112 may extend along the X and Y directions to form a plane. In some embodiments, third portion 112 may be circular, square, rectangular, oval, triangular, or any polygonal shape that extends along the X and Y directions. Fourth portion 114 may extend along the Z direction, which is perpendicular to the X and Y directions. In some embodiments, fourth portion 114 may also extend along the X direction.

[0021] In some embodiments, the connection between third portion 112 and fourth portion 114 may be at a right angle. In some embodiments, the connection between third portion 112 and fourth portion 114 may be at an arc angle. In some embodiments, third portion 112 and fourth portion 114 may be formed of the same material, for example, a conductive film or a copper film, and the conductive film or copper film may be bent to form a right angle or an arc angle.

[0022] In some embodiments, the coil inductor 100 may include multiple intermediate conductive coils 108. In some embodiments, each intermediate conductive coil 108 may have the same material and the same structure. In some embodiments, each intermediate conductive coil 108 may have a different structure. The intermediate conductive coils 108 may extend along the X and Y directions to form a plane. In some embodiments, the intermediate conductive coils 108 may be circular, square, rectangular, oval, triangular, or any polygonal shape extending along the X and Y directions.

[0023] In some embodiments, first portion 104 of top conductive coil 102, third portion 112 of bottom conductive coil 110, and middle conductive coil 108 may have the same shape.

[0024] In some embodiments, the top conductive coil 102 is in electrical contact with the middle conductive coil 108 through a first contact 116. In some embodiments, the bottom conductive coil 110 is in electrical contact with the middle conductive coil 108 through a second contact 118. In some embodiments, the first contact 116 and the second contact 118 are formed of a conductive material, such as copper. In some embodiments, the top conductive coil 102 and the middle conductive coil 108 are separated by a first insulating film 120, and the first contact 116 penetrates the first insulating film 120. In some embodiments, the bottom conductive coil 110 and the middle conductive coil 108 are separated by a second insulating film 122, and the second contact 118 penetrates the second insulating film 122. Although Figures 1-3 show one top conductive coil 102, one bottom conductive coil 110, and four middle conductive coils 108, it will be understood that this is for illustrative purposes only, and that the inductor structure may have more or fewer layers of top conductive coils 102, bottom conductive coils 110, and middle conductive coils 108 depending on different requirements.

[0025] In some embodiments, the top conductive coil 102, the bottom conductive coil 110, and the middle conductive coil 108 may be formed of a metal. In some embodiments, the top conductive coil 102, the bottom conductive coil 110, and the middle conductive coil 108 may be formed of a copper film or copper foil. In some embodiments, the thicknesses of the top conductive coil 102, the bottom conductive coil 110, and the middle conductive coil 108 may range from 20 micrometers to 100 micrometers. In some embodiments, as shown in FIG. 3 , the first thickness of the top conductive coil 102 is less than the second thickness of the middle conductive coil 108. In some embodiments, as shown in FIG. 3 , the third thickness of the bottom conductive coil 110 is less than the second thickness of the middle conductive coil 108.

[0026] In some embodiments, first insulating film 120 and second insulating film 122 may be formed of a non-conductive material. In some embodiments, first insulating film 120 and second insulating film 122 may be formed of a polyimide film. In some embodiments, first insulating film 120 and second insulating film 122 may have a thickness in the range of 5 micrometers to 50 micrometers. In some embodiments, first insulating film 120 and second insulating film 122 may have a thickness in the range of 15 micrometers to 30 micrometers.

[0027] In some embodiments, the top conductive coil 102 may be formed by laminating multiple conductive films. In some embodiments, the bottom conductive coil 110 may be formed by laminating multiple conductive films. In some embodiments, the middle conductive coil 108 may be formed by laminating multiple conductive films.

[0028] It is understood that in some embodiments, the first portion 104 and the second portion 106 of the top conductive coil 102 may have different names. For example, the first portion 104 may be referred to as the top conductive film, and the second portion 106 may be referred to as the first terminal. It is also understood that in some embodiments, the third portion 112 and the fourth portion 114 of the bottom conductive coil 110 may have different names. For example, the third portion 112 may be referred to as the bottom conductive film, and the fourth portion 114 may be referred to as the second terminal.

[0029] In some embodiments, the top conductive coil 102, the bottom conductive coil 110, the middle conductive coil 108, the first contact 116, and the second contact 118 may be formed by semiconductor processes such as lithography operations and electroplating processes.

[0030] By stacking multiple layers of conductive coils and insulating films and using lithography and electroplating processes to form contacts between adjacent conductive coils, the coil inductor 100 may include more coil layers. Additionally, the thickness of the coil inductor 100 can be further reduced by forming a coil stack using thin conductive coils and thin insulating films.

[0031] Furthermore, first portion 104 and second portion 106 of top conductive coil 102 may be formed by the same lithography operation and / or electroplating process, and second portion 106 of top conductive coil 102 may be bent at a particular angle, such as 90 degrees, in a later operation. Similarly, third portion 112 and fourth portion 114 of bottom conductive coil 110 may be formed by the same lithography operation and / or electroplating process, and fourth portion 114 of bottom conductive coil 110 may be bent at a particular angle, such as 90 degrees, in a later operation.

[0032] Fig. 4 shows a perspective view of an exemplary coil inductor 200 according to some embodiments of the present disclosure, Fig. 5 shows a side view of the coil inductor 200 according to some embodiments of the present disclosure, Fig. 6 shows a side view of the coil inductor 200 according to some embodiments of the present disclosure, and Fig. 7 shows a side view of the coil inductor 200 according to some embodiments of the present disclosure. To better explain the present disclosure, the perspective view and side view of the coil inductor 200 in Figs. 4 to 7 will be described together.

[0033] In some embodiments, coil inductor 200 may have a structure and materials similar to coil inductor 100, but coil inductor 200 is covered with magnetic material 202. In some embodiments, magnetic material 202 may be formed of a mixture of a magnetic alloy powder and a binder. In some embodiments, the mixture may be a powder or a binder. In some embodiments, the mixture may include a ferrite material primarily composed of the corresponding elements of Fe, Ni, Zn, and / or Cu. In some embodiments, the mixture may include a ferrite material including a Ni-Cu-Zn-based ferrite material, a Ni-Cu-Zn-Mg-based ferrite material, and / or a Ni-Cu-based ferrite material. In some embodiments, the mixture may include a sintered ferrite body.

[0034] In some embodiments, a plurality of conductive coils and a plurality of insulating films may be embedded in the mixture, and the mixture may be fired or cured to solidify and form magnetic material 202. In some embodiments, after the plurality of conductive coils and the plurality of insulating films are embedded in the mixture, a compression process may be performed on the mixture to increase the density of the mixture, and then a firing process may be performed to solidify the mixture.

[0035] As shown in FIGS. 4-7 , in some embodiments, the top surface of magnetic body 202 is higher than the top surface of top conductive coil 102. Specifically, in some embodiments, the top surface of magnetic body 202 is higher than the top surface of first portion 104 of top conductive coil 102. Furthermore, as shown in FIGS. 4-7 , in some embodiments, the bottom surface of magnetic body 202 is lower than the bottom surface of bottom conductive coil 110. Specifically, in some embodiments, the bottom surface of magnetic body 202 is lower than the bottom surface of third portion 112 of bottom conductive coil 110.

[0036] In some embodiments, the second portion 106 of the top conductive coil 102 extends along the Z direction to the bottom surface of the magnetic body 202. In some embodiments, the fourth portion 114 of the bottom conductive coil 110 extends along the Z direction to the bottom surface of the magnetic body 202.

[0037] In some embodiments, the first contact 116 and the second contact 118 may be formed of a conductive material. In some embodiments, the first contact 116 and the second contact 118 may be formed of copper. In some embodiments, as shown in FIG. 6 , in a side view of the coil inductor 100 and / or the coil inductor 200, the first contact 116 and the second contact 118 may be offset from each other. In other words, in a plan view of the coil inductor 100 and / or the coil inductor 200, the first contact 116 and the second contact 118 may not overlap each other.

[0038] 7, in a side view of the coil inductor 100 and / or the coil inductor 200, the first contact 116 and the second contact 118 may be aligned. In other words, in a top view of the coil inductor 100 and / or the coil inductor 200, the first contact 116 and the second contact 118 may overlap one another.

[0039] FIG. 8 shows a flowchart of an exemplary method 300 for forming the coil inductor 100 and / or the coil inductor 200 according to some embodiments of the present disclosure, FIG. 9 shows a perspective view of the coil inductor 100 according to some embodiments of the present disclosure, FIG. 10 shows a plan view of the coil inductor 100 according to some embodiments of the present disclosure, FIG. 11 shows a perspective view of a semi-finished product 150 having a plurality of coil inductors 100 according to some embodiments of the present disclosure, FIG. 12 shows a perspective view of the semi-finished product 150 having a plurality of coil inductors 100 according to some embodiments of the present disclosure, and FIG. 13 shows a perspective view of the semi-finished product 150 having a plurality of coil inductors 100 according to some embodiments of the present disclosure. To better explain the present disclosure, the method 300 of FIG. 8 will be described in conjunction with the structures of FIGS. 9-13.

[0040] As shown in operation 302 of Figure 8, a bottom conductive coil 110 is formed, including a bottom conductive film and a second terminal. In some embodiments, the bottom conductive film and the second terminal, or portions referred to as third portion 112 and fourth portion 114 of bottom conductive coil 110, may be formed in the same operation on the same plane. In some embodiments, the bottom conductive film and the second terminal may be formed by a semiconductor process, such as a lithography operation and an electroplating process.

[0041] 8, at least one middle conductive coil 108 is stacked on the bottom conductive coil 110. The middle conductive coil 108 is in electrical contact with the bottom conductive coil 110 via a second contact 118. In some embodiments, the middle conductive coil 108 and the second contact 118 may be formed by a semiconductor process, such as a lithography operation and an electroplating process.

[0042] As shown in operation 306 of Figure 8, the top conductive coil 102 is laminated onto the middle conductive coil 108. The top conductive coil 102 may include a top conductive film and a first terminal. In some embodiments, the top conductive film and the first terminal, or portions referred to as the first portion 104 and second portion 106 of the top conductive coil 102, may be formed in the same plane and by the same operation. In some embodiments, the top conductive film and the first terminal may be formed by a semiconductor process, such as a lithography operation and an electroplating process.

[0043] 9-10, after operation 306, the coil inductor 100 is formed. In some embodiments, the top conductive film and the first terminal of FIGS. 9-10 are in the same plane extending along the X and Y directions, and the bottom conductive film and the second terminal of FIGS. 9-10 are in the same plane extending along the X and Y directions.

[0044] Next, the first and second terminals are bent at a specific angle, as shown in operation 308 of Figure 8. In some embodiments, the first and second terminals are bent from a horizontal position to a vertical position. In some embodiments, the first and second terminals are bent 90 degrees, as shown in Figures 1-3.

[0045] In some embodiments, multiple coil inductors 100 may be integrally formed by laminating multiple conductive films, as shown in Figure 11. The first and second terminals of the multiple coil inductors 100 may then be bent together, as shown in Figure 12.

[0046] As shown in operation 310 of Figure 8, a magnetic material 202 may be formed over the coil inductor 100, including the bottom conductive coil 110, the middle conductive coil 108, and the top conductive coil 102. After the magnetic material 202 is formed over the multiple coil inductors 100, the multiple coil inductors 200 are integrally formed, as shown in Figure 13. In some embodiments, the multiple coil inductors 200 may later be separated into individual devices.

[0047] It is understood that the operations shown in method 300 are not exhaustive, and that other operations may be performed before, after, or between the operations shown. Furthermore, some operations may be performed simultaneously or in a different order than that shown in Figure 8. For example, bottom conductive coil 110, middle conductive coil 108, and top conductive coil 102 may be formed separately or simultaneously by laminating conductive films, after which bottom conductive coil 110, middle conductive coil 108, and top conductive coil 102 may be bonded to one another.

[0048] By stacking multiple layers of conductive coils and insulating films and using lithography and electroplating processes to form contacts between adjacent conductive coils, the coil inductor 100 may include more coil layers. Additionally, the thickness of the coil inductor 100 can be further reduced by forming a coil stack using thin conductive coils and thin insulating films.

[0049] Furthermore, first portion 104 and second portion 106 of top conductive coil 102 may be formed by the same lithography operation and / or electroplating process, and second portion 106 of top conductive coil 102 may be bent at a particular angle, such as 90 degrees, in a later operation. Similarly, third portion 112 and fourth portion 114 of bottom conductive coil 110 may be formed by the same lithography operation and / or electroplating process, and fourth portion 114 of bottom conductive coil 110 may be bent at a particular angle, such as 90 degrees, in a later operation.

[0050] 14 illustrates a block diagram of an exemplary power conversion system 400 having a coil inductor according to some aspects of the present disclosure. In some embodiments, the power conversion system 400 is a DC-DC converter. In some embodiments, the power conversion system 400 can be applied to various power supply circuits. For example, processors, memories, LEDs, and other devices require many different DC voltages to operate, and the power conversion system 400 can adjust to these voltage differences. Therefore, the power conversion system 400 is necessary for most electronic devices, and many of them are typically used in a device.

[0051] The power conversion system 400 may include a controller 402, a coil inductor 404, and a capacitor 406. The coil inductor 404 may be configured to convert a power supply voltage Vin to a required voltage Vout. The controller 402 may be coupled to the coil inductor 404 and configured to control the operation of the coil inductor 404. The coil inductor 404, in cooperation with the capacitor 406, serves to rectify the square wave output from the controller 402 into direct current.

[0052] According to one aspect of the present disclosure, a coil inductor is disclosed. The coil inductor includes a plurality of conductive coils stacked in a first direction. The coil inductor includes a top conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction, a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

[0053] In some embodiments, the first portion of the top conductive coil, the third portion of the bottom conductive coil, and the middle conductive coil further extend in a third direction perpendicular to the first and second directions.

[0054] In some embodiments, the top conductive coil is in electrical contact with the middle conductive coil via a first contact, and the bottom conductive coil is in electrical contact with the middle conductive coil via a second contact.

[0055] In some embodiments, the top conductive coil and the middle conductive coil are separated by a first insulating film and the first contact penetrates the first insulating film, and the bottom conductive coil and the middle conductive coil are separated by a second insulating film and the second contact penetrates the second insulating film.

[0056] In some embodiments, the first and second insulating films comprise polyimide films, and in some embodiments, the top conductive coil, the bottom conductive coil, and the middle conductive coil comprise copper films.

[0057] In some embodiments, the coil inductor further includes a magnetic body covering the plurality of conductive coils. In some embodiments, a top surface of the magnetic body is higher than a top surface of the top conductive coil. In some embodiments, a bottom surface of the magnetic body is lower than a bottom surface of the third portion of the bottom conductive coil.

[0058] In some embodiments, the second portion of the top conductive coil extends along the first direction to the bottom surface of the magnetic body, and the fourth portion of the bottom conductive coil extends along the first direction to the bottom surface of the magnetic body.

[0059] In some embodiments, the magnetic body is formed from a mixture of magnetic alloy powder and a binder.

[0060] In some embodiments, the first thickness of the top conductive coil is less than the second thickness of the middle conductive coil, and the third thickness of the bottom conductive coil is less than the second thickness of the middle conductive coil.

[0061] In some embodiments, each of the plurality of conductive coils comprises a plurality of conductive films.

[0062] According to another aspect of the present disclosure, a coil inductor is disclosed. The coil inductor includes a plurality of conductive coils stacked in a first direction and a magnetic body covering the plurality of conductive coils. The conductive coils include a top conductive coil extending in a second direction perpendicular to the first direction, a bottom conductive coil extending in the second direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil. A first terminal of the top conductive coil and a second terminal of the bottom conductive coil extend in the first direction.

[0063] In some embodiments, the top conductive coil includes a top conductive film and a first terminal perpendicular to the top conductive film, and the bottom conductive coil includes a bottom conductive film and a second terminal perpendicular to the bottom conductive film.

[0064] In some embodiments, the first terminal extends along the first direction to the bottom surface of the magnetic body, and the second terminal extends along the first direction to the bottom surface of the magnetic body.

[0065] In some embodiments, the top conductive coil, the bottom conductive coil, and the middle conductive coil further extend in a third direction perpendicular to the first and second directions.

[0066] In some embodiments, the top conductive coil is in electrical contact with the middle conductive coil via a first contact, and the bottom conductive coil is in electrical contact with the middle conductive coil via a second contact.

[0067] In some embodiments, the top conductive coil and the middle conductive coil are separated by a first insulating film and the first contact penetrates the first insulating film, and the bottom conductive coil and the middle conductive coil are separated by a second insulating film and the second contact penetrates the second insulating film.

[0068] In some embodiments, the first and second insulating films comprise polyimide films.

[0069] In some embodiments, in a plan view of the coil inductor, the first contact and the second contact overlap.

[0070] In some embodiments, the top conductive coil, the bottom conductive coil, and the middle conductive coil comprise copper film.

[0071] In some embodiments, the first thickness of the top conductive coil is less than the second thickness of the middle conductive coil, and the third thickness of the bottom conductive coil is less than the second thickness of the middle conductive coil.

[0072] According to another aspect of the present disclosure, a power conversion system is disclosed. The power conversion system includes a coil inductor configured to convert a source voltage to a required voltage, and a controller coupled to the coil inductor and configured to control operation of the coil inductor. The coil inductor includes a plurality of conductive coils stacked in a first direction. The plurality of conductive coils includes a top conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction, a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

[0073] According to yet another aspect of the present disclosure, a power conversion system is disclosed. The power conversion system includes a coil inductor configured to convert a power supply voltage to a required voltage, and a controller coupled to the coil inductor and configured to control the operation of the coil inductor. The coil inductor includes a plurality of conductive coils stacked in a first direction and a magnetic material covering the plurality of conductive coils. The conductive coils include a top conductive coil extending in a second direction perpendicular to the first direction, a bottom conductive coil extending in the second direction, and at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil. A first terminal of the top conductive coil and a second terminal of the bottom conductive coil extend in the first direction.

[0074] According to yet another aspect of the present disclosure, a manufacturing method for forming a coil inductor is disclosed. A bottom conductive coil including a second terminal is formed. At least one intermediate conductive coil is stacked on the bottom conductive coil. The intermediate conductive coil is in electrical contact with the bottom conductive coil. A top conductive coil including a first terminal is stacked on the intermediate conductive coil. The top conductive coil is in electrical contact with the intermediate conductive coil. The first terminal and the second terminal are bent. A magnetic material is formed to cover the bottom conductive coil, the intermediate conductive coil, and the top conductive coil.

[0075] In some embodiments, the first and second terminals are bent from a horizontal position to a vertical position.

[0076] The foregoing descriptions of specific embodiments may be readily modified and / or adapted to suit a variety of applications. Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed embodiments, based on the teaching and guidance presented herein.

[0077] The breadth and scope of the present disclosure should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

Claims

1. A coil inductor, a plurality of conductive coils stacked in a first direction, the plurality of conductive coils comprising: an uppermost conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction; a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction; at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil.

2. 2. The coil inductor of claim 1, wherein the first portion of the top conductive coil, the third portion of the bottom conductive coil, and the intermediate conductive coil further extend in a third direction perpendicular to the first direction and the second direction.

3. 3. The coil inductor of claim 1, wherein the top conductive coil is in electrical contact with the middle conductive coil via a first contact, and the bottom conductive coil is in electrical contact with the middle conductive coil via a second contact.

4. 4. The coil inductor of claim 3, wherein the top conductive coil and the intermediate conductive coil are separated by a first insulating film and the first contact penetrates the first insulating film, and the bottom conductive coil and the intermediate conductive coil are separated by a second insulating film and the second contact penetrates the second insulating film.

5. The coil inductor according to claim 4 , wherein the first insulating film and the second insulating film include a polyimide film.

6. The coil inductor of any one of claims 1 to 5, wherein the top conductive coil, the bottom conductive coil, and the middle conductive coil comprise copper film.

7. The coil inductor according to claim 1 , further comprising a magnetic body covering the plurality of conductive coils.

8. The coil inductor according to claim 7 , wherein a top surface of the magnetic body is higher than a top surface of the uppermost conductive coil.

9. The coil inductor of claim 7 or 8, wherein a bottom surface of the magnetic body is lower than a bottom surface of the third portion of the bottom conductive coil.

10. 10. The coil inductor of claim 9, wherein the second portion of the top conductive coil extends along the first direction to the bottom surface of the magnetic body, and the fourth portion of the bottom conductive coil extends along the first direction to the bottom surface of the magnetic body.

11. The coil inductor according to any one of claims 7 to 10, wherein the magnetic body is formed from a mixture of magnetic alloy powder and a binder.

12. 12. The coil inductor of claim 1, wherein a first thickness of the top conductive coil is less than a second thickness of the middle conductive coil, and a third thickness of the bottom conductive coil is less than the second thickness of the middle conductive coil.

13. The coil inductor of any one of claims 1 to 12, wherein each of the plurality of conductive coils comprises a plurality of conductive films.

14. A coil inductor, The magnetic coil includes a plurality of conductive coils stacked in a first direction and a magnetic body covering the plurality of conductive coils, wherein the plurality of conductive coils are an uppermost conductive coil extending in a second direction perpendicular to the first direction; a bottom conductive coil extending in the second direction; at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil; A coil inductor, wherein a first terminal of the top conductive coil and a second terminal of the bottom conductive coil extend in the first direction.

15. 15. The coil inductor of claim 14, wherein the top conductive coil includes a top conductive film and the first terminal perpendicular to the top conductive film, and the bottom conductive coil includes a bottom conductive film and a second terminal perpendicular to the bottom conductive film.

16. The coil inductor of claim 14 , wherein the first terminal extends along the first direction to a bottom surface of the magnetic body, and the second terminal extends along the first direction to the bottom surface of the magnetic body.

17. The coil inductor of any one of claims 14 to 16, wherein the top conductive coil, the bottom conductive coil, and the intermediate conductive coil further extend in a third direction perpendicular to the first direction and the second direction.

18. 18. A coil inductor as described in any one of claims 14 to 17, wherein the top conductive coil is in electrical contact with the middle conductive coil via a first contact, and the bottom conductive coil is in electrical contact with the middle conductive coil via a second contact.

19. 20. The coil inductor of claim 18, wherein the top conductive coil and the middle conductive coil are separated by a first insulating film and the first contact penetrates the first insulating film, and the bottom conductive coil and the middle conductive coil are separated by a second insulating film and the second contact penetrates the second insulating film.

20. The coil inductor of claim 19 , wherein the first insulating film and the second insulating film comprise polyimide films.

21. The coil inductor according to any one of claims 18 to 20, wherein the first contact overlaps with the second contact in a plan view of the coil inductor.

22. The coil inductor of any one of claims 14 to 21, wherein the top conductive coil, the bottom conductive coil, and the middle conductive coil comprise copper film.

23. 23. The coil inductor of claim 14, wherein a first thickness of the top conductive coil is less than a second thickness of the middle conductive coil, and a third thickness of the bottom conductive coil is less than the second thickness of the middle conductive coil.

24. 1. A power conversion system comprising: a coil inductor configured to convert a power supply voltage to a required voltage; and a controller coupled to the coil inductor and configured to control operation of the coil inductor, the coil inductor comprising: a plurality of conductive coils stacked in a first direction, the plurality of conductive coils comprising: an uppermost conductive coil including a first portion extending in a second direction perpendicular to the first direction and a second portion extending in the first direction; a bottom conductive coil including a third portion extending in the second direction and a fourth portion extending in the first direction; at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil; 1. A power conversion system comprising:

25. 1. A power conversion system comprising: a coil inductor configured to convert a power supply voltage to a required voltage; and a controller coupled to the coil inductor and configured to control operation of the coil inductor, the coil inductor comprising: The magnetic coil includes a plurality of conductive coils stacked in a first direction and a magnetic body covering the plurality of conductive coils, wherein the plurality of conductive coils are an uppermost conductive coil extending in a second direction perpendicular to the first direction; a bottom conductive coil extending in the second direction; at least one intermediate conductive coil extending in the second direction and disposed between the top conductive coil and the bottom conductive coil; a first terminal of the top conductive coil and a second terminal of the bottom conductive coil extending in the first direction.

26. 1. A manufacturing method for forming a coil inductor, comprising: forming a bottom conductive coil including a second terminal; stacking at least one intermediate conductive coil on the bottom conductive coil, the intermediate conductive coil being in electrical contact with the bottom conductive coil; stacking a top conductive coil including a first terminal on the intermediate conductive coil, the top conductive coil being in electrical contact with the intermediate conductive coil; bending the first terminal and the second terminal; forming a magnetic material covering the bottom conductive coil, the middle conductive coil, and the top conductive coil. Manufacturing method.

27. The step of bending the first terminal and the second terminal includes:

27. The method of claim 26, including bending the first and second terminals from a horizontal position to a vertical position.

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