Load port module door opening and closing device

Abstract

The present invention provides a door opening and closing device for a load port module, comprising: a load port section including a mounting table on which a FOUP is placed; a support table arranged perpendicular to the mounting table, supported on an installation surface, and having an opening formed on one side of the FOUP; a door section for selectively opening and closing the opening; and an opening and closing actuator for opening and closing the door section on the load port section, wherein the opening and closing actuator tilts the door section by a set angle over the opening and then moves it linearly to open it.

Description

[Technical Field]

[0001] The present invention relates to a door opening and closing device for a load port module, and more particularly to a door opening and closing device for connected load port modules that can open and close doors provided on the load port modules for loading or unloading FOUPs via an Equipment Front End Module (EFEM). [Background technology]

[0002] Generally, semiconductor wafers are processed through deposition, exposure, etching, cleaning, etc. That is, semiconductors are manufactured by performing various processing steps on wafers.

[0003] In recent years, semiconductor manufacturing has been progressing by increasing the efficiency of processing steps while improving manufacturing yields. For example, highly integrated semiconductors are manufactured by patterning fine circuits on wafers.

[0004] However, the fine patterning on the circuits makes it easier for molecular contaminants to cause short circuits between circuits. These short circuit phenomena have become a problem that reduces semiconductor yields. To address this issue, active research and development is being conducted on equipment that improves the cleanliness of each process, with the aim of maximizing semiconductor yields.

[0005] As an example, a device has been developed that fills the inside of the EFEM, which connects the load port module (LPM) and transfer module, with nitrogen, and then naturally creates a nitrogen atmosphere inside the FOUP placed on the load port module (LPM).

[0006] However, to transfer wafers mounted inside a FOUP from the load port module (LPM) to the transfer chamber, the door of the load port module (LPM) must be slid and then moved vertically. This requires both an actuator for sliding the door and an actuator for moving it vertically, and the problem of increased actuator capacity as the door size increases has arisen. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Korean Patent No. 10-2324676 (registered November 4, 2021) Summary of the Invention [Problem to be solved by the invention]

[0008] The present invention aims to solve the above-mentioned problems, and more specifically, to provide a door opening and closing device for a load port module that can open and close a door provided on the load port module using a single actuator, and that can simultaneously tilt and slide the door during the door opening process.

[0009] The objects of the present invention are not limited to those described above, and other objects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0010] In order to achieve the above object, the present invention provides a door opening and closing device for a load port module, comprising: a loading port section including a loading platform on which a FOUP is placed; a support platform arranged perpendicular to the loading platform and supported on an installation surface, the support platform having an opening formed on one side of the FOUP; a door section for selectively opening and closing the opening; and an opening and closing actuator for opening and closing the door section on the load port section, wherein the opening and closing actuator tilts the door section by a set angle over the opening and then moves it linearly to open it.

[0011] The opening / closing actuator may include a linear movement unit that moves the door unit linearly on the load port unit, and a tilt rotation unit that rotates the door unit within a set angle range on the load port unit.

[0012] The tilt rotation unit may include a frame unit extending from a lower portion of the door unit and rotatably connected to the linear movement unit, an elastic unit that constantly provides an elastic restoring force between the linear movement unit and the frame unit in a direction in which the door unit is opened, and an angle block provided at a tip of the frame unit to selectively interfere with a roller provided on the support base.

[0013] The angle block may include an inclined surface that contacts the roller when the door is tilted from a closed state to a set angle for opening.

[0014] The inclined surface may be formed in the range of 30 to 40 degrees.

[0015] The linear movement unit may include a guide member arranged vertically from the mounting table, a slider that slides on the guide member and is arranged to pass at least partially through a slit formed in the support table, and a power unit that supplies power to the slider.

[0016] The slider may include a rotation axis that rotatably connects the linear movement section to the tilt rotation section, a first stopper that is positioned above the rotation axis, and a second stopper that is positioned below the rotation axis.

[0017] The first stopper may be in elastic contact with the frame when the door is closed, and the second stopper may be in elastic contact with the frame when the door is opened and the frame is tilted at a set angle.

[0018] When the door is open, the angle that the frame makes with the second stopper relative to a virtual vertical line may be in the range of 5 to 10 degrees.

[0019] The angle block may be positioned on the frame portion so as to be height adjustable.

[0020] The power unit may include an actuator installed on the support base, and a shaft coupled to one side of the slider, which receives power from the actuator to rotate and linearly move the slider on the guide member.

[0021] The slider may include a connecting member provided on one side to be connected to the shaft.

[0022] The shaft is connected to pass through the connecting member, and the rotational motion of the shaft can be converted into linear motion.

[0023] The shaft may be formed to have a length at least equal to or greater than the linear movement range of the door portion.

[0024] The door portion may be positioned to correspond to the opening on the rear surface of the support base when the door portion is closed.

[0025] The door portion may be positioned so as not to overlap the opening at the rear surface of the support base when the door portion is open.

[0026] When the angle block contacts the inclined surface so that the roller rotates in one direction, the angle block may tilt the frame unit in the one direction while restricting the linear upward movement of the frame unit, thereby closing the door unit.

[0027] The angle block contacts the inclined surface so that the roller rotates in the other direction, tilting the frame portion in the other direction along with the linear downward movement of the frame portion, and the door portion can be opened by releasing contact with the roller.

[0028] When the frame part moves linearly downward, the distance between the roller and the angle block may become greater.

[0029] The rollers and angle blocks may be arranged in pairs on the rear surface of the support base in parallel on both sides of the slit.

[0030] Specific details of other embodiments are included in the detailed description and drawings. [Effects of the Invention]

[0031] According to the door opening and closing device for a load port module according to an embodiment of the present invention, First, tilt rotation and linear movement of the door section can be achieved using a single actuator. Secondly, when the door is opened, the door first tilts and rotates without sliding horizontally, minimizing the space required for opening the door. Third, even a small actuator can be used to open the door, minimizing the installation space required for the actuator. Fourth, by configuring the angle block to be height adjustable on the frame portion, it has the effect of being easily adaptable to accommodate different roller sizes or doors of various sizes.

[0032] The effects of the present invention are not limited to those listed above, and other effects not described will be clearly understood by those skilled in the art from the description of the claims. [Brief explanation of the drawings]

[0033] The foregoing summary, as well as the following detailed description of preferred embodiments of the present application, can be better understood by reading the accompanying drawings, in which there is shown by way of illustration preferred embodiments of the present invention; however, it being understood that the present application is not limited to the precise arrangements and instrumentalities shown. [Figure 1] 1 is a perspective view schematically illustrating a load port module according to an embodiment of the present invention, viewed from the front. [Figure 2] 2 is a perspective view showing a door opening and closing device as seen from the rear of the load port module shown in FIG. 1. FIG. [Figure 3] 3 is a side view showing a door opening and closing device of the load port module shown in FIG. 2. [Figure 4] 4 is a front view showing a linear movement part of the door opening and closing device of the load port module shown in FIG. 3. [Figure 5] 4 is a partially enlarged view showing a tilt rotation portion of the door opening and closing device of the load port module shown in FIG. 3. FIG. [Figure 6] 3 is a side view showing the load port module shown in FIG. 2 in a state where the door portion is partially open and tilted. [Figure 7] 7 is a partially enlarged view showing a door opening and closing device of the load port module shown in FIG. 6. FIG. [Figure 8] 3 is a reference view showing a state in which the door portion of the load port module shown in FIG. 2 is completely open. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0034] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Advantages and features of the present invention, as well as methods for achieving them, will become clearer with reference to the following detailed embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be realized in various different forms. These embodiments are provided merely to complete the disclosure of the present invention and to fully convey the scope of the invention to those skilled in the art to which the present invention pertains. The present invention is defined solely by the scope of the claims. The same reference symbols refer to the same elements throughout the specification.

[0035] The present invention may be modified in various ways and may have a number of embodiments, and specific embodiments thereof will be described by way of example in the drawings.

[0036] However, it should be understood that this is not intended to limit the invention to the particular embodiments, but rather to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

[0037] Terms including ordinal numbers such as "first," "second," etc. may be used to describe various components, but these components are not limited by such terms.

[0038] These terms are used merely to distinguish one component from another.

[0039] For example, a second component may be referred to as a first component, and similarly, a first component may be referred to as a second component, without departing from the scope of the present invention.

[0040] The term "and / or" means the inclusion of a combination of two or more associated listed items or any one of two or more associated listed items.

[0041] When a component is described as being "connected" or "coupled" to another component, it should be understood that this includes not only the case where the component is directly connected or coupled to the other component, but also the case where there are other components between them.

[0042] In contrast, when a component is described as being "directly connected" or "directly coupled" to another component, it should be understood that there are no other components intervening between them.

[0043] The terms used in this application are merely used to describe particular embodiments and are not intended to limit the present invention.

[0044] Any reference to the singular form shall be construed as including the plural form unless the context clearly dictates otherwise.

[0045] In this application, the terms "comprise" and "have" are intended to specify the presence of features, values, steps, operations, components, parts, or combinations thereof described herein, but should not be understood to preclude the possibility that one or more other features, values, steps, operations, components, parts, or combinations thereof may be present or added.

[0046] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Regardless of the reference numerals in the drawings, the same or corresponding components will be designated by the same reference numerals, and duplicated descriptions will be omitted.

[0047] FIG. 1 is a perspective view showing a load port module according to an embodiment of the present invention, viewed from the front, and FIG. 2 is a perspective view showing a door opening and closing device as viewed from the rear of the load port module shown in FIG.

[0048] 1 and 2, a load port module 10 according to an embodiment of the present invention may include a load port section 100, a door section 200, and an opening / closing operation section 300.

[0049] First, the load port module 10 is disposed in front of the semiconductor transport device (EFEM; Equipment Front End Module), and can check information about wafers (not shown) stored in the FOUP 130. Furthermore, the door 200 can be opened to allow the FOUP 130 and the door 200 to be in close contact with each other while transporting wafers. Only the load port module 10 is shown in FIGS. 1 and 2, and since the opening / closing actuator 300 is shown from the rear of the load port module 10 as shown in FIG. 2, other components of the EFEM (e.g., ATM robot, aligner, etc.) are omitted.

[0050] The load port unit 100 may include a mounting table 110 and a support table 120 .

[0051] The mounting table 110 may be an area on which the FOUP 130 is placed. The mounting table 110 may be arranged horizontally.

[0052] The support table 120 may be disposed vertically on one side of the mounting table 110 and supported on an installation surface. An opening 121 may be formed in an upper region of the mounting table 110 on the support table 120 to correspond to the open region of the FOUP 130. A detailed configuration of the opening / closing actuator 300 may be disposed in a lower region of the mounting table 110 on the support table 120.

[0053] Although one load port module 10 is shown in the drawings for explanation, a plurality of load port modules may be provided.

[0054] In addition, when the door section 200 is closed, the door section 200 can be positioned on the back of the support base 120 so as to correspond to the opening 121, and when the door section 200 is opened, the door section 200 can open the opening 121 by tilting backward and moving linearly downward based on the support base 120 so as not to overlap with the opening 121.

[0055] The opening / closing actuator 300 can tilt and linearly move the door unit 200. At this time, the door unit 200 tilts and rotates at a set angle on the support base 120, and then linearly moves. Since the tilt and linear movements are performed simultaneously and organically using one actuator, the number of actuators can be reduced. Furthermore, by improving the tilt mechanism of the door unit 200 using the opening / closing actuator 300, it is possible to prevent the size of the actuator from increasing linearly with the size of the door unit 200.

[0056] The structure and effects of the opening / closing actuation unit 300 will be described in detail below.

[0057] 3 is a side view showing the door opening and closing device of the load port module shown in FIG. 2, FIG. 4 is a front view showing the linear movement part 310 of the door opening and closing device of the load port module shown in FIG. 3, and FIG. 5 is a partially enlarged view showing a part of the tilt rotation part 320 of the door opening and closing device of the load port module shown in FIG. 3.

[0058] 3, the opening / closing actuator 300 shown in FIG. 2 may include a linear movement unit 310 and a tilt rotation unit 320. At this time, the cover 111 may be removed from the bottom of the load port module 10 shown in FIGS. 3 and 4.

[0059] The linear movement unit 310 may be installed on one side of the support table 120 of the load port unit 100 , and the tilt rotation unit 320 may be installed on the other side of the support table 120 .

[0060] Referring to FIG. 4, the linear movement section 310 may include a guide member 311, a slider 312, and a power section.

[0061] Two guide members 311 may be provided in parallel along the vertical direction on one side of the support base 120. For example, an LM guide may be used as the guide member 311.

[0062] The sliders 312 may be installed on the guide members 311 on both sides so as to be linearly movable along the length of the guide members 311 .

[0063] The power section may also include an actuator 316 and a shaft 313 .

[0064] An actuator 316 is provided on the support base 120 and can supply power to the shaft 313 .

[0065] The shaft 313 may be positioned to interfere with the slider 312 .

[0066] For example, the shaft 313 may rotate by receiving power from the actuator 316, which is a motor, and the connecting member 314 may be coupled to the shaft 313 so as to mesh with it. The shaft 313 is coupled to the connecting member 314 so as to pass through it, and a male thread and a female thread or a male gear and a female gear may be formed thereon, respectively, and the connecting member 314 may convert the rotational motion of the shaft 313 into linear motion as the shaft 313 rotates. The connecting member 314 is coupled to one side of the slider 312, and as the shaft 313 rotates, the connecting member 314 and the slider 312 move linearly on the guide member 311, and the shaft 313 may be formed to have a length at least equal to or greater than the linear movement range of the door section 200.

[0067] In this case, the support base 120 may be provided with a slit 122 formed to penetrate between the guide members 311 on both sides. The slit 122 may be formed parallel to the longitudinal direction of the guide members 311 and may be formed in at least a height range in which the door part 200 is spaced apart from the opening 121, or in a range larger than this.

[0068] Therefore, a partial area of ​​the slider 312 is disposed so as to pass through the slit 122 and can be coupled to the tilt rotation portion 320 .

[0069] When power is applied to the actuator 316, the shaft 313 can be rotated in one direction to lower the slider 312, and the shaft 313 can be rotated in the other direction to raise the slider 312. In this case, when the slider 312 lowers, the tilt rotation unit 320 connected thereto also lowers, and when the slider 312 rises, the tilt rotation unit 320 also rises.

[0070] Referring to FIG. 5, the tilt rotation portion 320 may include a frame portion 321 , an elastic portion 322 , and an angle block 323 .

[0071] One end of the frame part 321 may be coupled to the door part 200, and a central region thereof may be coupled to the rotation axis 317 that passes through the slit 122 from the slider 312 and is exposed on the other side of the support base 120. Therefore, the frame part 321 may be tilted within a set angle range around the rotation axis 317, and the door part 200 may also be tilted at the same time.

[0072] The frame unit 321 may be configured as a single structure by assembling multiple frames. Of course, the frame unit 321 may also be realized as a single steel pipe structure. In this embodiment, the frame unit 321 may be configured by connecting opposing side panels to the door unit 200 and the rotation shaft 317, respectively, and connecting a back frame covering the back surfaces of both side panels to form a back surface between the side panels.

[0073] In addition, one end of the elastic portion 322 may be coupled to the slider 312, and the other end may be coupled to the frame portion 321. The elastic portion 322 may provide an elastic restoring force such that the frame portion 321 is always pulled relative to the slider 312.

[0074] In this case, the other end of the elastic part 322 may be coupled more closely to the other end of the frame part 321 around the rotation axis 317 of the slider 312. Therefore, referring to Fig. 5, tension may be applied to the frame part 321 so that it rotates clockwise around the rotation axis 317 in the absence of an external force. In Fig. 5, the angle block 323 and the roller 140 are in contact with each other, so the elastic part 322 is shown in a state where it is pulled at a predetermined distance between the slider 312 and the frame part 321.

[0075] An angle block 323 may be coupled to the other end of the frame portion 321 .

[0076] The angle block 323 may come into contact with the roller 140 provided on the back surface of the support base 120. When the door section 200 is released from a state in which it has closed the opening 121, or conversely when the door section 200 is closed, the angle block 323 may be involved in tilt rotation due to interference with the roller 140. The angle block 323 and the roller 140 may be arranged in pairs on the back surface of the support base 120 in parallel on both sides of the slit 122 as the center.

[0077] When the door section 200 closes the opening 121, the angle block 323 comes into contact with the inclined surface 324 so that the roller 140 rotates in one direction, restricting the linear upward movement of the frame section 321 while tilting the frame section 321 in one direction, thereby closing the door section 200. Conversely, when the door section 200 opens the opening 121, the angle block 323 comes into contact with the inclined surface 324 so that the roller 140 rotates in the other direction while tilting the frame section 321 in the other direction, and then moves linearly downward, thereby releasing contact with the roller 140.

[0078] When the door section 200 is in a closed state with the frame section 321 positioned perpendicular to the installation surface, the angle (θ1) of the inclined surface 324 of the angle block 323 can be formed in a range of approximately 30 to 40 degrees. More preferably, in the state shown in FIG. 5, the angle (θ1) that the inclined surface 324 makes with respect to the installation surface can be formed to be approximately 30 degrees. Note that the angle (θ1) of the inclined surface 324 can be changed depending on the overall length of the frame section 321, the distance between the rotation shaft 317 and the angle block 323, and the tilt angle range of the door section 200.

[0079] Additionally, the linear movement section 310 may include a first stopper 315a and a second stopper 315b.

[0080] The first stopper 315a and the second stopper 315b may be disposed on the slider 312 so as to pass through the slit 122 and protrude toward the frame portion 321. Alternatively, each of the stoppers 315a and 315b may be additionally provided on a protrusion extending toward the frame portion 321 on the slider 312, and may be provided so as to selectively come into contact with the frame portion 321.

[0081] The first stopper 315a may be disposed to correspond to a region closer to one end of the frame portion 321 around the rotation axis 317 of the slider 312, and the second stopper 315b may be disposed to correspond to a region closer to the other end of the frame portion 321 around the rotation axis 317 of the slider 312. Therefore, with reference to FIG. 5, the first stopper 315a may be located above the rotation axis 317, and the second stopper 315b may be located below the rotation axis 317.

[0082] When the door portion 200 is closed, the tip of the first stopper 315a can be arranged to come into contact with the frame portion 321.

[0083] Furthermore, when the door part 200 is in the open state, the tip of the second stopper 315b can be arranged to come into contact with the frame part 321.

[0084] The first stopper 315a and the second stopper 315b may have a shock absorber function, thereby providing the function of absorbing a predetermined impact when each stopper 315a, 315b comes into contact with the frame portion 321.

[0085] In addition, the first stopper 315a can limit the counterclockwise rotation angle of the frame part 321 by contacting the frame part 321 when the door part 200 is in close contact with the opening 121, i.e., when the door part 200 is completely closed, thereby absorbing impact.

[0086] 6 is a side view showing the load port module shown in FIG. 2 with the door part partially open and tilted, and FIG. 7 is a partially enlarged view showing a part of the door opening and closing device of the load port module shown in FIG. 6.

[0087] When the actuator 316 is actuated to lower the slider 312 to open the door unit 200, the frame unit 321 may tilt while lowering.

[0088] When the frame part 321 descends in this manner, the angle block 323 descends at the same time, and the inclined surface 324 of the angle block 323 that contacts the roller 140 rotates toward the rear surface of the support base 120, thereby causing tilting. The angle (θ1) of the inclined surface 324 with respect to the installation surface decreases as it rotates, causing tilting.

[0089] That is, as shown in FIG. 7, when the door part (200, see FIG. 8) is being opened, tension is applied to the frame part 321 by the elastic part 322 so that the frame part 321 tends to rotate clockwise around the rotation axis 317, and the contact angle between the angle block 323 and the roller 140 becomes smaller, so that the door part 200 and the opening / closing operating part 300 can tilt and rotate as they descend.

[0090] At this time, the second stopper 315b is arranged to come into contact with the frame part 321 according to the set angle, and therefore the rotation of the frame part 321 can be stopped by contacting the second stopper 315b. Of course, the second stopper 315b also has a shock absorbing function, and can reduce impacts and noise generated between the frame part 321 and the load port part 100 during the tilt rotation of the frame part 321. Furthermore, when the door part 200 is open, the tip of the second stopper 315b can be arranged to come into contact with the frame part 321, and as the frame part 321 moves linearly downward, the distance between the roller 140 and the angle block 323 can become greater.

[0091] Here, when the second stopper 315b contacts the frame portion 321, the set angle (θ2) that the frame portion 321 has with respect to the support base 120 may be in the range of approximately 5 to 10 degrees. More preferably, the set angle (θ2) of the frame portion 321 may be set to approximately 5 degrees. Of course, the set angle (θ2) to be tilted may be changed depending on the thickness and size of the door portion 200.

[0092] Although not shown, the angle block 323 may be arranged so that its combined height from the other end of the frame portion 321 is adjustable. This can accommodate various diameters of the roller 140, which can have the effect of improving versatility. For example, the angle block 323 may be arranged so that its height is adjustable from the frame portion 321, or a configuration in which the inclined surface 324 is formed on the angle block 323 may be combined so that its height is partially adjustable. Of course, to achieve the same effect, the roller 140 can also be designed so that its position or height is adjustable.

[0093] FIG. 8 is a reference view showing the load port module shown in FIG. 2 in a state where the door portion is completely open.

[0094] Referring to FIG. 8, the door part 200 and the frame part 321 are lowered to the lowest end of the support base 120, and the opening 121 is completely opened.

[0095] At this time, the door part 200 and the frame part 321 can maintain the tilt angle at which the door part 200 was initially opened even during the process of descending to the lowest end of the support stand 120 .

[0096] In this way, when the opening 121 is completely opened, the wafer can be removed from the inside of the FOUP described above, and the wafer can be moved for other processes.

[0097] During the process of closing the door section 200, the door section 200 and the frame section 321 move vertically upward in a straight line (or rise) until the roller 140 and the angle block 323 come into contact again, and from the point where the roller 140 and the angle block 323 come into contact, the door section 200 may tilt while rising until it is completely closed.

[0098] Therefore, according to the door opening and closing device for a load port module according to an embodiment of the present invention, tilt rotation and linear movement of the door can be achieved using a single actuator, and when the door is opened, tilt rotation occurs first without horizontal sliding movement of the door, thereby minimizing the space required to open the door. In addition, since a smaller actuator can be used to open the door, the installation space for the actuator can be minimized. Furthermore, by configuring the height of the angle block on the frame to be adjustable, it is possible to accommodate roller sizes or doors of various sizes.

[0099] Although specific embodiments have been shown and described above to illustrate the technical concept of the present invention, the present invention is not limited to the same configurations and functions as the specific embodiments described above, and various modifications can be made without departing from the scope of the present invention. Therefore, such modifications should be considered to be included in the scope of the present invention, and the scope of the present invention should be determined by the claims that follow. [Explanation of symbols]

[0100] 10 Load port module door opening / closing device 100 Load port section 110 Mounting table 111 Cover 120 Support stand 121 Opening 122 Slit 130 FOUP 140 Laura 200 Door section 300 Opening and closing operation part 310 Linear movement section 311 Guide member 312 Slider 313 Shaft 314 Connecting members 315a, 315b stopper 316 Actuator 320 Tilt rotation part 321 Frame section 322 Elastic part 323 Angle Block 324 Slope

Claims

1. a load port unit including a loading platform on which a FOUP is placed, and a support platform disposed perpendicular to the loading platform and supported on an installation surface, the support platform having an opening formed in one side of the FOUP; a door portion that selectively opens and closes the opening; an opening / closing actuator that opens and closes the door on the load port; Including, The opening / closing actuator tilts the door section at a set angle above the opening and then moves it linearly to open it.

2. The opening / closing operation unit is a linear movement unit that moves the door unit linearly on the load port unit; a tilt rotation unit that rotates the door unit on the load port unit within a set angle range; The door opening and closing device for a load port module according to claim 1 , comprising:

3. The tilt rotation unit is a frame portion extending from a lower portion of the door portion and rotatably connected to the linear movement portion; an elastic portion that constantly provides an elastic restoring force in a direction in which the door portion is opened between the linear moving portion and the frame portion; an angle block provided at a tip of the frame portion so as to selectively interfere with a roller provided on the support base; The door opening and closing device for a load port module according to claim 2 , comprising:

4. The angle block is 4. The door opening and closing device for a load port module according to claim 3, further comprising an inclined surface that comes into contact with the roller when the door is tilted from a closed state to a set angle for opening.

5. 5. The door opening and closing device for a load port module according to claim 4, wherein the inclined surface is formed in a range of 30 to 40 degrees.

6. The linear movement unit is a guide member disposed along a vertical direction from the mounting table; a slider that slides on the guide member and is disposed so as to at least partially pass through a slit formed in the support base; a power unit that supplies power to the slider; The door opening and closing device for a load port module according to claim 3 , comprising:

7. The slider includes: a rotation shaft that rotatably connects the linear movement unit to the tilt rotation unit; a first stopper disposed above the rotation axis; a second stopper disposed below the rotation axis; The door opening and closing device for a load port module according to claim 6, comprising:

8. the first stopper elastically contacts the frame portion when the door portion is closed, 8. The door opening and closing device for a load port module according to claim 7, wherein the second stopper elastically contacts the frame when the frame tilts at a set angle while the door is opened.

9. 8. The door opening and closing device for a load port module according to claim 7, wherein when the door portion is in an open state, the angle that the frame portion forms with an imaginary vertical line by the second stopper is in the range of 5 to 10 degrees.

10. The angle block is The door opening and closing device for a load port module according to claim 3 , wherein the door opening and closing device is arranged on the frame portion so as to be height-adjustable.

11. The power unit includes: an actuator provided on the support base; a shaft coupled to one side of the slider, which is rotated by power supplied from the actuator to linearly move the slider on the guide member; The door opening and closing device for a load port module according to claim 7, comprising:

12. The slider includes: The door opening and closing device for a load port module according to claim 11, further comprising a connecting member provided on one side to be connected to the shaft.

13. The shaft The door opening and closing device for a load port module according to claim 12, which is connected to pass through the connecting member and converts rotational motion of the shaft into linear motion.

14. The shaft The door opening and closing device for a load port module according to claim 12, wherein the door opening and closing device is formed to have a length at least equal to or greater than the linear movement range of the door section.

15. The door portion is The door opening and closing device for a load port module according to claim 1 , wherein the door section is disposed on the rear surface of the support base so as to correspond to the opening when the door section is closed.

16. The door portion is The door opening and closing device for a load port module according to claim 1 , wherein the door section is positioned so as not to overlap the opening on the rear surface of the support base when the door section is opened.

17. The angle block is 5. The door opening and closing device for a load port module according to claim 4, wherein when the roller contacts the inclined surface so as to rotate in one direction, the frame portion is tilted and rotated in the one direction while restricting linear upward movement of the frame portion, thereby closing the door portion.

18. The angle block is 5. The door opening and closing device for a load port module according to claim 4, wherein the frame portion tilts and rotates in the other direction while the frame portion linearly moves downward while being in contact with the inclined surface so as to rotate in the other direction, and the door portion is opened by releasing contact with the roller.

19. When the frame portion moves linearly downward, The door opening and closing device for a load port module according to claim 18, wherein the distance between the roller and the angle block increases.

20. The roller and angle block are 7. The door opening and closing device for a load port module according to claim 6, wherein a pair of the door opening and closing devices are arranged in parallel on both sides of the slit on the rear surface of the support base.

Images