Cup-shaped baffle plate for shower head of substrate processing system
JP2026508787APending Publication Date: 2026-03-13LAM RES CORP
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-10-18
- Publication Date
- 2026-03-13
AI Technical Summary
Technical Problem
Substrate processing systems experience heterogeneity in deposition due to low-pressure wakes caused by temperature measuring device (TMD) posts and standoff elements, leading to substrate-to-substrate reproducibility issues.
Method used
A cup-shaped baffle plate with a circumferential lip is integrated into the showerhead to restrict fluid flow, minimizing the impact of TMD posts and standoff elements, ensuring uniform fluid flow and pressure across the substrate.
Benefits of technology
The cup-shaped baffle plate enhances deposition uniformity by smoothing fluid flow, reducing turbulence, and maintaining uniform fluid velocity, thereby improving substrate reproducibility and uniformity.
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Smart Images
Figure 2026508787000001_ABST
Abstract
A cup-shaped baffle plate for a shower head of a substrate processing system is a base plate to be disposed in the plenum of the shower head to receive fluid from the stem of the shower head, the base plate including a hole for receiving standoff elements for coupling the base plate to at least one of the back plate or face plate of the shower head, and a circumferential lip on the base plate and adjacent to the outer peripheral edge of the base plate. The circumferential lip restricts fluid flow beyond the peripheral edge of the cup-shaped baffle plate.
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