Interface device for particle beam apparatus

Abstract

An interface device is described that enables rapid, easy, and safe replacement and precise positioning of detectors and accessories for particle beam apparatus. The interface device comprises an alignment member for mounting the detector module of the particle beam apparatus to the interface device in a predetermined orientation, and a guide mechanism configured to move the mounted detector module along a guide path between a first position inside the chamber of the particle beam apparatus and a second position outside the apparatus during use. Methods for replacing the detector module and the sensor head of the detector module in a particle beam apparatus using the interface device are also described.

Description

Technical Field

[0001] The present invention relates to an interface device and method for a particle beam apparatus for more quickly, accurately, and safely replacing a detector module for a particle beam apparatus.

Background Art

[0002] Particle beam apparatuses such as electron beam microscopes are capable of being used for multiple applications, each of which requires a different sensor or peripheral device. Ports for accommodating different detectors and devices are designed in the chamber of an electron beam microscope. To disconnect the connection at the microscope port and replace the detector and device, special training is required due to the risk of physical or electrostatic discharge (ESD) damage. Furthermore, it is difficult to achieve realignment of the beam in the device with the replaced or reinserted sensor, which is an obstacle to the flexible use of the microscope. As a result of these problems, the replacement of detectors and devices is generally performed by service engineers rather than by users.

[0003] Also, for example, in the case of a scanning electron microscope, a detector installed under the final lens is highly likely to be damaged due to a collision with other peripheral devices (additional detectors, cold traps, gas injectors, etc.) in the vicinity during installation or removal, and a collision with a sample or stage during stage movement.

[0004] Conventionally, the procedure for repairing a detector of an electron beam microscope requires a visit by an engineer, and in many cases, the detector is returned to a factory or a local service site for repair. Therefore, the downtime during which the device malfunctions or becomes inoperable becomes much longer, resulting in higher costs.

[0005] There is a need for a configuration that allows for quick, easy, and safe replacement of instrument detectors and accessories for repair or other applications, and a need for an insertion mechanism that allows any sensor to be delivered to the correct analysis position when performing these procedures. In particular, there is a need for such a configuration to provide these advantages while maintaining a good thermal path from the detector, minimizing the risk of ESD and physical damage, and further maintaining good alignment between the replaceable sensor head and the analysis position in the chamber. [Overview of the project]

[0006] According to a first aspect of the present invention, an interface device for a particle beam apparatus is provided, the interface device comprising: an alignment member for mounting a detector module of the particle beam apparatus to the interface device in a first predetermined orientation; and a guide mechanism configured to move the mounted detector module along a guide path between a first position located in a predetermined position within the chamber of the particle beam apparatus and a second position located outside the particle beam apparatus during use, wherein the guide mechanism is configured such that when the mounted detector module is in the first position, it is in a second predetermined orientation with respect to the particle beam apparatus.

[0007] The inventors have demonstrated that the above challenges can be overcome by providing pre-aligned and pre-tested detector modules, preferably an ESD-safe and user-replaceable interface device. The device addresses the critical challenge of minimizing the risk of damaging the detector and microscope when a user replaces a detector module or sensor head in the field, and does not require advanced technical skills, knowledge, or training from the user. By using the interface device, precise alignment, calibration, adjustment, and handling of fragile equipment can be performed during installation of the particle beam apparatus. Installation can be performed by a trained service engineer using specialized installation equipment, and subsequent removal, replacement, and insertion of one or more detector modules can be easily performed by a user of the apparatus who has already established alignment during installation and means to guide the new module to that alignment, and can be performed with the precise alignment and orientation to which the detector module can be mounted in the interface device.

[0008] Two key operations anticipated when using the interface device are the replacement of a faulty sensor head or a faulty detector module constituting a sensor head, and the replacement of the sensor head or detector module with a different sensor head or detector module adapted for different applications, or for monitoring different types of signals or phenomena, or for monitoring data of different quality (e.g., resolution), or for outputting different types of analytical data. Providing an interface device that can be permanently installed in the particle beam instrument chamber to facilitate the removal of modules or sensor heads by the user offers a significant advantage compared to the cumbersome and arduous replacement and maintenance procedures faced by users in conventional configurations.

[0009] Therefore, with this interface device, users can replace these components without requiring on-site visits by service engineers, thereby reducing the cost and time associated with these activities. Similarly, detector modules and sensor heads used with the interface device can be designed and built with smaller and simpler structures, eliminating the need to redesign device components for alternative detectors in different applications. In addition, in some embodiments, a further advantage may be provided where only one device chamber port may be required to use different detector technologies in the device. This reduces the problem of limited port availability in many chambers and alleviates the cost of, for example, microscope ports.

[0010] The term "interface device" in this invention is understood to refer to a device or apparatus that connects or is adapted to connect elements of an apparatus, enabling them to work together or communicate with one another. In a preferred embodiment, this particularly relates to an apparatus or microscope port interface, such as an interface connecting an insertion / retraction mechanism to a detector module, so that a sensor can be reliably and safely removed, inserted, and replaced through a port. In some embodiments, the interface, or for example its guide mechanism, may comprise components adapted to be fixed to a part of the particle beam apparatus, which is inside the chamber. For example, it may be fixed to the pole piece or chamber wall of an electron microscope. Such components may be configured to ensure that final alignment to the analysis position is reliably achieved, i.e., to guide the movement of the mounted detector module to its final position. However, in a preferred embodiment, the guide mechanism, or at least a part thereof, is located outside the chamber of the apparatus when the interface device is installed in a particle beam apparatus. The expression "in use" as used in the above context can be understood to mean that at least the guide mechanism of the interface device is in use, and more generally, the use of the interface device.

[0011] The fact that the first position is a predetermined position within the chamber of the particle beam apparatus can be understood as the position being predetermined with respect to the particle beam apparatus or a part thereof, typically, in part of the apparatus chamber, such as the chamber wall to which the interface is attached. This position can be predetermined with respect to one or more components of the apparatus, or with respect to a predetermined position of any of these components, for example, if such components are movable within the apparatus, for example, with respect to the particle beam apparatus, such as a sample stage or electron beam source, and especially with respect to its pole piece. The position of the first position can be predetermined with respect to a beam axis defined for the beam generated when the apparatus is in use, or with respect to the beam spot to which the beam strikes the sample in the chamber when in use. The position of the first position will typically be understood as being determined, i.e., set or selected, when the apparatus is installed in the apparatus. Thus, the installation establishes a predetermined positional relationship (determining both relative position and orientation) between the interface device and the apparatus, and this positional relationship, along with the predetermined positional relationship between the interface device and the detector module attached thereto, predetermined the position of the first position.

[0012] The position of the first position within the device can typically be fixed to one or more parts or components of the device as described above, or it may be adjustable by one or more degrees of mobility, as described later in this disclosure.

[0013] The predetermined orientation that the guide mechanism acts upon the mounted detector module when the mounted detector module is in a first position can be predetermined with respect to the particle beam apparatus or any part or component thereof, as well as the first position. In a preferred embodiment, the guide mechanism and / or alignment member provide a predetermined orientation between the detector module in the first position and the beam axis of the particle beam generated during use. The guide mechanism and / or alignment member are preferably configured continuously so that the orientation of the detector module is maintained or at least constrained as it is moved along the guide path during use, particularly during movement between the first and second positions. In other words, the guide mechanism is preferably configured to control the orientation of the mounted detector module as it is moved along the guide path. This can be achieved by configuring the geometric shape of the guide mechanism itself to restrict the rotational motion of the alignment member and / or the mounted portion of the detector module and / or guide mechanism, for example, by restricting or otherwise restricting the rotational motion relative to the insertion direction or tangent to the guide path at any given point thereon. In other words, the guide mechanism can partially or completely prevent rotational movement of the mounted detector module as the module moves along the guide path, without causing any change in the curvature or direction of the guide path itself. Thus, the orientation of the detector module can be controlled by the guide mechanism along the entirety of the guide path, including one or more portions of the guide path, preferably two ends of the guide path that can be set to a first position and a second position.

[0014] This control of the orientation of modules along a guide path can be thought of as the guide mechanism and / or alignment member restricting modules to their respective predetermined orientations at all positions along one or more portions of the guide path, preferably the entire guide path, and preferably a path or portion thereof that extends continuously or discontinuously between a first position and a second position.

[0015] By controlling the orientation of the mounted detector module in this manner, it becomes advantageous to move the detector module along the guide path in a first end direction (sometimes called the insertion direction), typically to its endpoint or limit, thereby transporting the detector module, and especially its sensor head, to a predetermined position and orientation within the device, typically the analysis position. Conversely, this advantageous configuration of the alignment member and guide mechanism enables movement of the mounted module along the guide path in a second reverse direction (opposite to the first orientation, which can be called the retraction direction), typically to another end, or at least past an intermediate position, thereby transporting the detector module outside the device to an external position or range of external positions where the module is user-accessible.

[0016] The interface device is typically configured such that a detector module is mounted to the interface device in at least a second position, or that a positioning member is used to mount the detector module to the interface device and position the detector module in the second position at a mounting position outside the device chamber. Thus, the positioning member can be positioned to effectively achieve a first predetermined orientation of the mounted detector module with respect to one or more parts of the positioning member, guide mechanism, interface device, and device when the mounted detector module is in the second position. Preferably, the module can be mounted to the mechanism at various positions along the guide path, particularly outside the device chamber. If the guide mechanism is configured to guide the orientation of the module as it moves along the guide path, the predetermined second position and the corresponding predetermined orientation of the mounted detector module when it is in that second position can be defined as either a position along the part outside the guide path (i.e., outside the device chamber and / or the device insertion mechanism) and a range of corresponding orientations. In other words, the second position does not necessarily have to be fixed to a component of the interface device, nor is it necessarily limited to the end of the guide mechanism or an endpoint outside the guide path that can be defined by a block member or the like.

[0017] In various embodiments, it will be understood that the first predetermined orientation may be the same as or different from the second predetermined orientation. If they are the same, the movement may be purely translational rather than rotational; that is, the device may be adapted to maintain the detector in a consistent orientation while moving the detector between the first and second positions. In some cases, the above movement may cause or allow rotation of the detector as it moves along a guide path, but this may be done such that the rotational movement between the first and second positions is net zero. That is, the first and second directions can be the same in any way that causes the device to produce purely translational motion or rotational motion with a net change of direction of zero. Alternatively, the first and second directions may be different, for example, the first being selected to facilitate access to the sensor head, or the second being selected to be a suitable or optimized orientation for analysis within the device.

[0018] In several preferred embodiments, the apparatus, in particular the guide mechanism, comprises an insertion / retraction mechanism. Typically, the insertion / retraction comprises several components adapted to move in cooperation with each other to cause the described movement of the mounted detector module. The insertion / retraction mechanism may comprise components including, for example, one or more of a chassis, bellows, and slide assemblies, as are known in the art. In such embodiments, the mechanism is advantageously configured such that the generally intended insertion and retraction movements are specifically directed along a guide path between a first position and a second position, and are precisely aligned with the equipment when in use.

[0019] The guiding mechanism is preferably provided as a dedicated guiding mechanism configured to move the mounted module along a guide path. That is, the guiding mechanism is preferably separate from any other mechanisms or components of a particle beam apparatus that can be provided for other purposes, such as a sample support, moving body, positioning body, or mechanism adapted to operate a sample, such as a sample stage. In other words, preferably, the guiding mechanism can effectively, control, or guide the movement of the mounted detector module independently of such components or mechanisms, and preferably comprises or does not form any of them.

[0020] In some embodiments, the device does not include such an insertion / retraction mechanism, as described later in this disclosure.

[0021] As mentioned above, the device is typically a particle beam microscope, such as an electron microscope. This interface device is also applicable to other instruments such as optical microscopes, where the working photons of light are considered particles and can form a particle beam when in use.

[0022] The fact that the second position described above is outside the apparatus can be understood to mean that at least a portion of the detector module mounted on the interface device, particularly its sensor head, is outside the apparatus and preferably outside any part of the interface device, such as the insertion mechanism, when it is in the second position. Preferably, the apparatus is configured to provide an appropriate distance between the second position and the particle beam apparatus to which the interface is attached when in use, in order to provide sufficient clearance to allow easy and unobstructed access to the detector module or its sensor head in order to facilitate replacement and exchange of detector components by the user.

[0023] Preferably, the interface device is configured to be attached to the port of the particle beam apparatus throughout the service life of the apparatus. This can be achieved, for example, by the permanence of the fixtures adapted to mount the interface device onto the apparatus. Typically, these fixtures, or means of mounting the device onto the apparatus, restrict or prevent relative movement of the interface device to the apparatus, such that its first position relative to the apparatus can be changed.

[0024] Typically, the first position, guide path, and second position are located within a guide volume, and the shape of the guide volume encompasses the detector module when it is at the first position, the second position, and all intermediate positions along the path. Preferably, the guide volume is defined entirely or partially by a projection through the three-dimensional space of a lateral cross-section that defines the range (typically the maximum range) of the mounted detector module in two dimensions perpendicular to the insertion direction and / or guide path, along the insertion direction and / or guide path. Thus, the guide volume can be provided as a motion guide comprising one or more walls, members, or movable parts positioned to abut (guide) one or more portions of the mounted detector module as it moves along the guide path. However, in some embodiments, the guide volume can represent a three-dimensional region of space defined as a plurality of positions occupied by at least a portion of the mounted detector module at a given position during the movement of the mounted detector module between the first and second positions. Preferably, the guide volume is mounted on the device and / or the interface device is adapted in such a way that, at least under normal use, the other components of the device or any other component does not coincide with the guide volume.

[0025] Typically, in such embodiments, the interface device is configured such that each of a plurality of different detector modules having different shapes can move between a first position and a second position while being housed within a guide volume so as to enable the different detector modules to be used within the particle beam device.

[0026] This means that the device is configured such that the guide volume is large enough to completely house the detector module in at least a first dimension and a second dimension orthogonal to the longitudinal direction of the guide volume, and it can be understood that the guide volume is typically parallel to the guide path at any given path along the guide volume.

[0027] Some types of detector modules that can be used with the device are typically larger in one or more dimensions than other types. Preferably, the guide volume is configured to have a sufficient spread in a dimension orthogonal to the insertion / retraction direction so as to be able to accommodate these multiple types.

[0028] In a preferred embodiment, the guide path is linear. This can be considered such that the guide path has a straight portion or is linear along its entire length. The term "linear" as used herein can be understood to mean arranged in a straight line or extending along a straight line. Thus, the guide mechanism can be configured to move the mounted detector along a straight line during use. Preferably, the guide path is linear at least between the first position and the second position. More preferably, the guide mechanism is arranged such that the movement of the detector module when the interface device is in use is a translation at least between the first position and the second position, whereby when a plurality of parts, preferably all parts, of the body of the detector module are moved along the guide path, they are moved in the same direction, preferably without rotation and / or change in shape.

[0029] However, in some embodiments, the guide path can additionally or alternatively comprise one or more curved portions such that the interface device is configured to translate and / or rotate the detector module between a first position and a second position.

[0030] Typically, the first position is within a predetermined distance from the particle beam axis of the beam generated by the particle beam device in use. The predetermined distance is typically selected according to the type or characteristics of one or more detector modules used. Preferably, the predetermined distance is the maximum distance or defines an upper limit of the component of the distance between the beam and the first position in a direction orthogonal to the axis of the device beam in use or lying in a plane orthogonal to the beam axis. Generally, alignment in a direction parallel to the beam axis of the sensor head is less critical than alignment in a direction orthogonal to the beam. The predetermined distance is generally 1 mm, preferably 0.5 mm, and more preferably 0.1 mm.

[0031] The above beam axis can be understood as a geometric axis parallel to the beam and coinciding with its center or centroid, i.e., the center or centroid in dimensions orthogonal to the beam propagation direction.

[0032] Advantageously, the interface device can be adapted to attach to a port of a device having a specific type or dimension, or a specific shape, or a fixed type. Preferably, while the interface device is adapted to engage such a port, it provides adaptability and flexibility in that it can easily accommodate the insertion, retraction, and replacement of various types of detectors. Accordingly, preferably, the interface device further comprises one or more device port-specific components. These device ports may be microscope ports in some embodiments.

[0033] Preferably, the first position is a position within the particle beam apparatus where the detector module is used during normal operation, and this may be called the analysis position or analytical position. In other words, the interface device can be configured to deliver the sensor head of the detector module to the analytical position by moving the mounted detector module along a guide path and stopping the movement at the first position. The guiding mechanism can be configured to restrict the movement of the mounted detector module in the insertion direction, in particular by defining the end of the guide path at the first position. This can be accomplished by some form of blocking member or abutment of the interface device adapted to prevent the mounted detector module from moving further in the insertion direction beyond the first position. Preferably, the movement of the detector module to and from the first position, and generally the position of the module along the guide path or along the insertion and / or retraction direction, is controlled by an electric mechanism. By software-controlling any of this mechanism, the guiding mechanism, and the interface device, controlled module insertion and retraction can be automated and performed without user intervention.

[0034] In some embodiments, the apparatus further comprises an adjustment mechanism, which may be coupled to a guide mechanism, or in some embodiments, constitute a guide mechanism. The adjustment mechanism may be configured to change a first position and / or move the mounted detector module from an initial position in the chamber, or a position before adjustment, to the first position, typically performed during the installation of the apparatus into the instrument. The initial position may also be referred to as a third position. However, it will be understood that different sequence identifiers may be applied as appropriate in embodiments. The apparatus may be provided with a mechanism to facilitate the alignment of the apparatus, in particular the apparatus particle beam axis during operation, during initial installation. Preferably, once the adjustment mechanism has achieved the desired alignment, no further adjustment is performed, and the apparatus continues to provide the aforementioned advantages throughout the service life of the instrument.

[0035] However, in some embodiments, in addition to providing this beneficial alignment, the device may allow for further adjustments, particularly user adjustments, to be made, for example, by a technician. This allows for greater tolerances in the manufacturing and / or installation of interfaces on the device and facilitates the positioning of sensors for use with greater precision. Accordingly, the device may include an adjustment mechanism configured to change the first position and / or move the mounted detector module from the first position to an adjusted position within the chamber during use. This adjustment mechanism may include, be the same as, constitute, differ from, or separate from the aforementioned adjustment mechanism.

[0036] Preferably, a first predetermined orientation to which the detector module can be mounted (which can be understood as a predetermined orientation with respect to a part of the interface device to which the detector module is mounted or can be mounted, particularly the mounting portion and / or alignment member), the relative positioning of the first position with respect to the device and / or its beam, and the initial position and / or orientation to which the interface device is fixed to the device, all enable the technical user to continuously and iteratively replace and insert the detector module accurately. It will be understood that this device can ensure that the detector module is precisely positioned and preferably oriented from an external position of the device. Advantageously, this eliminates the need for additional adjustment of the insertion position of the detector module.

[0037] However, in some embodiments, the position and / or orientation brought about by the module inserted into the instrument along the guide path may not be exactly the same as the position and / or orientation in which the module is used during normal operation. For example, it may be in the vicinity of that position, for example, within a distance of sub-millimeters. However, in order to achieve optimal alignment with the particle beam, it may be preferable to further change the initial position to the final position or analysis position after installation.

[0038] Therefore, in some cases, it may be desirable to be able to change the orientation and / or alignment of the detector module, particularly its orientation relative to the microscope or particle beam, after the sensor head has been inserted between the pole piece and the sample holder.

[0039] In some embodiments, the device may be configured to allow for further refinement of the module's insertion position after it has been inserted, for example using a guide mechanism, toward a desired or optimal analysis position. In this case, refinement may refer to improving the module's insertion position through the action of small positional changes, potentially orientation and / or positional changes. Preferably, the device facilitates fine-tuning of the position, at least in the insertion direction. Therefore, preferably, in some embodiments, the device may be configured to allow for final adjustment in the "X" axis, which can be considered to correspond to the direction of insertion, retraction, or movement along the guide path, preferably by operating a retraction mechanism. For example, fine-tuning along or within the end of the guide path may be allowed. For this purpose, a mechanism may be provided adapted to control the module's position along the guide path with an accuracy of, for example, 1 millimeter, 500 micrometers, or most preferably 100 micrometers. The fine-tuning mechanism, which is configured by the interface device and configured to perform such refinement of the detector module's position along the X axis, may, in embodiments, comprise a variety of adjustment components. The fine-tuning mechanism may comprise one or more of the following: an adjustable hard end stop, an adjustable microswitch, an adjustable flag, an optoswitch, and an encoder. Such components are preferably adapted to refine or adjust the insertion position of the detector module along the guide path, and preferably adjustable in the sense that any control or limitation of the detector module's position caused by these components is configurable, particularly user-configurable. The fine-tuning mechanism is typically provided in a preferred embodiment that includes an insertion / retraction mechanism. This mechanism, or any further mechanism, may be provided to enable corresponding fine-tuning in one or each of the spatial axes orthogonal to the aforementioned X-axis.

[0040] As mentioned earlier, any adjustment mechanism is preferably suitable for initially mounting the interface device to the device. However, in some cases, it may be beneficial to use such a mechanism to perform adjustments after mounting.

[0041] Additionally or alternatively, such adjustment mechanisms may be configured to change the position of the first position relative to the beam, beam assembly, and / or device. This is possible before and / or after insertion. For example, the first position may be reachable, defined, or modified by the adjustment mechanism. This can be changed, for example, within a range of positions, or within the end of the guide path as described above, and / or within, and possibly limited to, a one-dimensional, two-dimensional, or three-dimensional portion proximal to the end of the guide path within the chamber. The adjusted position does not need to be predetermined. Rather, it can be determined as part of the method of using the device. For example, it can be determined using optical or visual data, or by verifying the corrected position relative to the beam. Tolerances can be defined by corresponding points, lengths, areas, or volumes within the chamber.

[0042] Typically, the adjusted position lies on a guide path. This can be understood as being defined by a point position corresponding to the position when the mounted detector module is in the analysis position. Any point or position on the guide path can be defined in this terminology. That is, a position can be defined as a point on a line representing the guide path to which a part of the detector module is located when the detector module is said to be in that position. That part may be, for example, the fiducial portion of the detector module, or a position within the detector module, or a part of the interface device to which the detector module is mounted, and / or a part of the interface device configured to move with the detector module, and / or typically a part configured with respect to it.

[0043] As an alternative mode of adjustment by an adjustment mechanism or another adjustment device, in some embodiments, the adjustment mechanism may be configured to move a detector module mounted during use to a position adjusted via one or more translational or rotational degrees of freedom. In particular, the adjustment mechanism may be configured to control the movement of the mounted detector module, or a portion of an interface device to which such a module can be attached, preferably within a range of higher positional accuracy. The aforementioned degrees of freedom can be understood as one or more of any three translational degrees of freedom and three rotational degrees of freedom. The relative orientation of any of these degrees of freedom can be determined with respect to one or more of any of the guide paths, guide members, and beam assemblies, and the beam axis of the device.

[0044] In some embodiments, the interface device can be configured to retract the detector module away from the analysis position to a partially retracted position within the device chamber. Thus, the interface device, and in particular the guide mechanism, can be configured to move the mounted detector module along a portion of a guide path between a first position and a partially retracted position when the guide mechanism, and more generally the interface device, are in use. The interface device can also be configured to move the mounted detector module along a retraction path that at least partially coincides with a portion of the guide path. The retraction path can extend beyond a portion of the guide path to provide further movement, for example, in the insertion direction, in the direction past the first position, and / or in the retraction direction which can be understood as being antiparallel to the insertion direction. Accordingly, in some embodiments, the retraction path and the partially retracted position can be referred to as a removal path and a partially removed position, respectively, in the sense that they relate to the removal of the detector module from immediate proximity to the beam, without necessarily retracting to a second position and without necessarily retracting along the retraction direction.

[0045] Typically, the detector module includes a user-replaceable sensor head. The term “user” in this disclosure generally refers to the user of the equipment, typically a technician. This is understood to be different from the installer or technician who installs the interface device into the equipment at the beginning of its service life.

[0046] In a preferred embodiment, a detector module comprising sensors adapted to monitor or sense various types of particles can be inserted, positioned, or replaced using an interface device. For example, a sensor adapted to indicate the crystal structure and orientation, atomic number, and chemical elemental composition of a sample can be provided, which is mounted on an interface device and adapted to be inserted using the interface device.

[0047] Typically, a guide mechanism comprises one or more alignment rods. However, it will be understood that other types of guide components may be included, either alternatively or additionally. For example, tubes, rails, shafts, bushings, bearings, and one or more of any form of linear guides, rotary guides, or curved guides may be comprised by the guide mechanism and / or alignment members.

[0048] Preferably, the guide mechanism is configured to be selectively detachable from the interface device. This can mean that the guide mechanism is detachably mounted to the interface device. This will be understood to be partial or whole in a preferred embodiment. In other words, the guide mechanism can be adapted to be detachably mounted to an interface device that is attached and detached by the user for use. As a result, the guide mechanism can be considered a temporary guide mechanism in some embodiments.

[0049] Typically, an interface device, particularly its alignment members and / or guiding mechanisms, comprises a set of one or more interface elements, which may be called alignment elements and / or guiding elements, for both the interface and the module, and is adapted to cooperate with a corresponding set of detector module elements to direct the movement of a mounted detector module along the guiding mechanism and to a first position, or along a guide path and to a first position. Typically, this is configured to bring about, or contribute to, a second predetermined orientation relative to the device when the mounted detector module is in the first position.

[0050] An interface element typically comprises at least one component of a chassis, bellows, and slide assembly, or two or more components. It will be understood that any of these components may comprise cooperating or complementary interface and modular elements.

[0051] Typically, the interface device further comprises a selectively removable transport capsule, which is configured to be mounted on the interface device and / or a detector module, and which is detachable from each of the alignment member and guide mechanism so that the detector module can be moved partially or entirely within the transport capsule by a guide mechanism in some embodiments, and the detector module can be removed from the device. More generally, the capsule can be configured to be mounted on the interface device such that the relative movement of the transport capsule with respect to the detector module can cause part or all of the transport capsule to seal, surround, or cover the detector module. This relative movement can comprise the movement of one or each of the detector module and the transport capsule (e.g., with respect to the device or other parts of the interface device), and is preferably brought about by a mechanism configured by the interface device, particularly a guide mechanism. The capsule itself, or any separate equivalent device, can provide electrostatic discharge (ESD) protection. In some embodiments, the capsule may be mountable to the interface so as to securely hold the detector module while it is sliding in, thereby minimizing the necessary physical contact with the detector module.

[0052] As mentioned above, a guide mechanism, which may be temporary or permanent, can be provided in conjunction with a second guide mechanism in some embodiments. For example, in a preferred embodiment, a permanent guide mechanism is provided that is incorporated into the interface device, while the interface device further comprises a temporary, selectively removable module removal guide mechanism. Thus, the temporary guide mechanism can be configured to move the mounted detector module into the transport capsule along a second guide path when in use. A third position can be considered where the detector module is held, fixed, or at least partially sealed by the capsule within the transport capsule.

[0053] The interface device may further include an interface connector for providing one or more electrical connections to complementary module connectors of the detector module when in use, and the interface connector and the detector module may be arranged together to protect the detector module from damage due to electrostatic discharge.

[0054] Typically, the guide mechanism further includes a service location outside the device chamber along the transport path, and when the detector module is located within the service location, the user can access the sensor head of the detector module, i.e., have access that is not obstructed enough to allow removal, replacement, or installation of the sensor head of the detector module.

[0055] Preferably, the apparatus is adapted to avoid unnecessary damage to the sensor or detector module, generally by particles, typically electrons and / or X-rays. Therefore, the guiding mechanism is preferably configured to move the mounted detector module away from a first position, typically to a distal position that may be on the guide path distal to the beam axis, when the beam is operating, such as when the sensor is not in use, typically when the sample is being replaced or moved. The movement "away" from the first position can typically be understood as moving along the guide path, particularly in the backward direction. The apparatus may include a controller and one or more actuators configured to perform this movement automatically, i.e., without requiring any useful input.

[0056] According to a second aspect of the present invention, an interface device for a particle beam apparatus is provided, the interface device comprising: an alignment member for mounting a detector module of the particle beam apparatus to the interface device in a predetermined orientation; a guide mechanism configured to move the mounted detector module along a guide path between a first position and a second position within the chamber of the particle beam apparatus during use; and an adjustment mechanism configured to move the mounted detector module between the first position and a third position within the chamber.

[0057] The interface device, as in the first embodiment, facilitates user (technician) replacement of the detector module or sensor head on-site with low risk. Similarly, thanks to the positional accuracy with which the device can operate the detector module, the device can easily and accurately insert the module to the analysis position and retract it to the service position, typically when the device is precisely installed in the particle beam instrument, either at the factory or by a service engineer. The interface device in the second embodiment can guide the movement of the module along a guide path, which may be partially or entirely inside the instrument chamber, while advantageously providing the ability to fine-tune the positional relationship between the interface device and the instrument during instrument installation. In this way, the alignment of the instrument on the instrument, and in particular the “insertion” position of the detector module thus defined, i.e., the first position, can be determined with greater precision during factory installation or installation by a service engineer, typically early in the instrument's service life. In this way, a simplified, more compact interface device is provided, which also facilitates the pre-determining of the first position to precisely correspond to a desired or optimal analysis position of the detector module or sensor head. Typically, the guide mechanism and / or alignment member is provided inside the instrument chamber. In this way, the extent or degree of the positional range in which the position and / or orientation of the detector module is constrained by the guide mechanism and / or alignment member can also be limited to within the chamber. In other words, the guide path can form only a portion of the motion path of the detector module between the analysis position and the fully retracted position, typically a portion inside the chamber, and preferably a terminal segment including the endpoint. That is, for at least a portion of the insertion and / or retraction path between the second position and the external position or the fully retracted position, the position and / or orientation of the detector module and / or its translational and / or rotational motion are unconstrained or less constrained than they would be along the guide path.The second position may be a predetermined position within the chamber, and may correspond to a predetermined orientation of the detector module relative to the device or chamber when the detector is installed and when it is in the second position.

[0058] Accordingly, the second position may be outside the instrument chamber, or more typically, it may be an internal instrument position that is different from or distal to the position in which the detector module is positioned relative to the particle beam in normal use. In some embodiments, when the second position is adopted, it is outside the detector module or at least partially outside it. Nevertheless, the second position may be partially internal to the instrument, i.e., when the second position is adopted, the detector module may be partially internal to the chamber, and generally, the second position does not need to be defined or limited in terms of being internal or external to the instrument or its chamber.

[0059] As described above in relation to the first embodiment, the adjustment mechanism can facilitate the adjustment of the insertion position and / or orientation of the detector module and, advantageously, can be used for pre-adjustment of the apparatus to the apparatus and its components. Typically, when installing the apparatus, the installer first positions the apparatus so that the inner end of the guide path is away from components within the apparatus chamber, such as the pole piece of an electron microscope, to avoid accidental collisions between such components and the apparatus or typically the detector module mounted thereon. Then, usually after the apparatus is installed in the apparatus, the installer typically adjusts the apparatus with the adjustment mechanism to move the position of the inner end of the guide path, or the mounted detector module if it is at that end of the guide path, from an initial safe position in the chamber, which can be considered the third position, to the first position. Thus, the first position is usually closer to the analysis position than the third position. In other words, the third position is generally intentionally selected by the installer to be lower than the desired analysis position in the chamber, and these safety tolerances can be eliminated by precise position adjustment by the installer using the adjustment mechanism. In this way, this mechanism can be used to establish the initial analytical position to which the detector module will be placed by subsequent insertion by the device.

[0060] A third aspect of the present invention provides a method for replacing a detector module in a particle beam apparatus using an interface device according to the first aspect, the method comprising the following steps: (a) operating a guide mechanism to remove a first detector module from the particle beam apparatus chamber; (b) removing the first detector module from the guide mechanism; (c) attaching a second detector module to the guide mechanism and aligning the second detector module using an alignment member to achieve a predetermined alignment of the second detector module; and (d) moving the second detector along the guide mechanism to a first position for use.

[0061] The second detector module may differ from the first detector module. For example, one detector module may be replaced with another detector module of a different sensor type, or a non-functioning component may be replaced. The second detector module may be the same as the first detector module, and typically involves some repair or maintenance between steps (b) and (c). Thus, this method is either replacement or repair.

[0062] In some embodiments, the interface device further comprises a selectively removable transport tube, as described above, for example, in relation to the first embodiment. Thus, such embodiments of the Method can be particularly suited to being carried out using the interface device in these embodiments of the first embodiment. Accordingly, the Method may further include mounting a capsule, which may optionally include some guide means, on the interface device and / or the first detector module. The Method may further include moving the first detector module within the transport capsule and removing the first detector module from each of the alignment members and guide mechanisms, typically, to allow for removal, which can be understood as the removal of the detector module from the device in step (b).

[0063] A fourth aspect of the present invention provides a method for replacing the sensor head of a detector module in a particle beam apparatus using an interface device according to the first aspect, wherein the guide mechanism further comprises a service position along a transport path outside the apparatus chamber so that a user can access the sensor head of the detector module when the detector module is positioned in a service position, the method comprising the following steps: (a) operating the guide mechanism to remove a first detector module having a first sensor head from the particle beam apparatus chamber and position it in a service position; (b) removing the first sensor head from the first detector module; (c) attaching a second sensor head to the first detector module; and (d) moving the first detector module having the second sensor head along the guide mechanism and positioning it in a first position for use.

[0064] The second sensor head may differ from the first sensor head, for example, when the sensor head is replaced with another sensor head. The second sensor head may be identical to the first sensor head and typically undergoes the repairs or maintenance described above.

[0065] Preferably, the second sensor head includes a selectively removable cover that surrounds at least the sensor of the sensor head, and preferably the cover remains surrounding the sensor head while the sensor head is attached to the detector module during step (c), preferably step (c) further includes removing the cover before step (d).

[0066] Typically, prior to step (a), the detector module is packaged in a remote location, which includes a. providing thermal and electrical connections, and b. aligning the sensors of the detector module so that when the detector module is in a first position, the detector module is correctly positioned within the device, when the detector module is aligned with the alignment member of the interface module. The remote location is typically located at a service site or manufacturing site.

[0067] According to a fifth aspect of the present invention, a detector module is provided which is adapted for use with an interface device according to a first aspect and comprises a selectively removable sensor head, the detector module comprising a selectively removable cover that surrounds at least the sensor of the sensor head.

[0068] According to a sixth aspect of the present invention, an interface device for a particle beam apparatus is provided, comprising: an alignment member for mounting a particle beam apparatus detector module to the interface device in a predetermined orientation; and a guide mechanism configured to move the mounted detector module along a guide path between a first position inside the chamber of the particle beam apparatus and a second position outside the apparatus during use. Features of an apparatus or method provided according to any of the preceding aspects may be provided as part of the apparatus according to the sixth aspect.

[0069] Next, embodiments of the present invention will be described with reference to the attached drawings, in which similar features are indicated by the same reference numerals. [Brief explanation of the drawing]

[0070] [Figure 1] This is a schematic diagram showing a side view of an interface device according to the first embodiment of the present invention. [Figure 2] This is a perspective view of the interface device of the first embodiment. [Figure 3] This flowchart shows an example of a method for replacing the detector module of a particle beam apparatus using the interface device according to the present invention. [Figure 4] This is a schematic diagram showing the interface device of the first embodiment in three steps of the method of the first embodiment. [Figure 5] This is a partial perspective view of an interface device according to a second embodiment of the present invention, which includes a selectively removable transport capsule. [Figure 6]This is a perspective view showing an example of a detector module adapted for use with the interface device according to the present invention. [Figure 7] This is a perspective view showing a portion of a further exemplary detector module being replaced using an exemplary method. [Figure 8] This is a schematic side view of an interface device according to a third embodiment of the present invention. [Modes for carrying out the invention]

[0071] Next, examples of interface devices and methods according to the present invention will be described with reference to Figures 1 to 8.

[0072] Figure 1 schematically shows the interface device of the first embodiment. In this embodiment, the interface device 101 is installed in the particle beam apparatus 103, which is an electron microscope. The device 101 is coupled to the microscope 103 via a microscope port interface 102. The interface device 101 is so named because it has a general-purpose insertion mechanism, which allows various types of detector modules 107 to be inserted into the electron microscope 103. The common design of the interface device can accordingly accommodate the design of various different detector modules, such as EDS, BSED, and EBSD detectors. This is because all of these types of detectors require access to the same part of the microscope chamber, good electrical and vacuum paths, retraction and insertion, and fine alignment with respect to the electron microscope, especially its beam. In addition, both EDS and EBSD detectors need to maintain good thermal paths and require ESD protection.

[0073] The retraction and insertion of the detector module 107 can be performed using the guide mechanism 109. In this embodiment, this includes a general-purpose bellows adapted to accommodate different types of detector modules as they are moved along a guide path from an external position to an internal position within the chamber of the microscope 103.

[0074] The ability to adjust the position and orientation of the interface device is provided by an adjustment mechanism 112, which in this embodiment is provided as a general-purpose alignment stage, or "YZ stage," not specific to the type of detector or sensor. Such adjustments are typically performed during the installation of the device 101 to effectively set the installation orientation of the interface device relative to the device 103. The installer can make fine positional and / or directional adjustments to achieve precise alignment of the detector module with respect to the device beam during use. Furthermore, the adjustment mechanism can be used, for example, to improve alignment or correct misalignment caused by defects in the device components.

[0075] In this embodiment, a specific sensor head 113 is fixed to the detector module 107, and the interface device 101 is geometrically configured to guide the insertion of the detector module into the microscope chamber 103 so that the sensor head 113 arrives at a predetermined position and orientation relative to the beam axis of the microscope. It is also conceivable that a specific sensor head 113 may be interchangeably mounted on a specific detector module 107.

[0076] The interface device 101, particularly its alignment member 104, is configured to receive a corresponding shaped component 108 of the detector module. As a result, the receiving of the component by the alignment member, and generally the receiving of the detector module 107 by the interface device 101, is configured to mount the detector module 107 in a predetermined orientation to the interface device 101. In this embodiment, the alignment member includes a bushing shaped to provide an interference fit or transition fit between the module component 108 and the bushing. Other detector modules (not shown) that can be replaced with the depicted detector module 107 generally have a fitting member having the same shape and orientation as the joining or fitting member 108 and corresponding to the detector module, thereby allowing different detector modules to be used with the insertion mechanism 101.

[0077] The detector module 207 is shown in another unmounted state in Figure 2. It can be seen that the sensor head 113 is inserted into the interface device 201 and is within the area defined by the general bellows 215. Furthermore, Figure 2 shows an electrical connector 219, which in this embodiment is provided as an ESD-safe electrical connection. This is provided as a jack protruding from the module 207 and is positioned to be received by the corresponding electrical connector socket 220 of the interface device when the detector module is mounted in the interface device. The jack 219 and socket 220 can be shaped in a corresponding manner so as to include or be composed of an alignment member of the insertion mechanism 201 and a corresponding alignment member of the module 207, i.e., they can contribute to alignment to a predetermined orientation, which is achieved when the module 207 is mounted. The illustrated spatial axes show the X-axis as parallel to the insertion and retraction directions of the module into the microscope chamber, the Y-axis and Z-axis are orthogonal to these and to each other. The retraction direction is indicated by the arrow in Figure 2, and the insertion direction is indicated by the arrow in Figure 1.

[0078] Accordingly, in the apparatus of the embodiment, the detector design is effectively separated into the detector module and the standard or general design of the interface device, which includes microscope port-specific parts and a general alignment mechanism, chassis, bellows, slide / retraction assembly, and module alignment features. The interface device adjustment mechanism 112 is aligned with the microscope chamber 103 and preferably with respect to the pole piece of the microscope 103 or the particle beam axis in use. This alignment can be performed, for example, by a service engineer during the initial installation. The entire interface 101 is adapted to remain mounted and aligned at all times after installation. In this way, the aforementioned problems encountered in existing configurations, which require a skilled service engineer for removal of the detector unit, alignment of replacement sensor heads, and recalibration thereof, are overcome.

[0079] An example of the replacement process is shown in the flowchart of Figure 3. According to this process, only the detector module 107, which is generally very light in weight and whose handle and replacement are more practical, needs to be retracted to the outside of the chamber using the guide mechanism of the interface device 101, thereby preventing accidental damage to the detector or microscope.

[0080] An exemplary replacement method 300 begins with the operation of a guide mechanism 301 to remove the first detector module from the chambers of the particle beam apparatus 103, 203. In Figures 1 and 2, the bellows 109, 209 are in an extended state, and the receiving parts 104, 204 of the interface apparatus are located distal to or away from the microscope port interface 102. Realizing this extended position of the receiving part 204 corresponds to the second position described above in this disclosure, where the detector module 207 is outside the chambers of the microscopes 103, 203. In different embodiments, the interface apparatus may be configured such that the second position is a position where the mounted detector module is at least partially inside the chamber of the microscope 103. The second position is typically further away along the guide path in the retraction direction than the first position. The first position is typically the analysis position.

[0081] The direction in which the first detector module 207 can be removed (or retracted) is indicated by the arrow in Figure 2.

[0082] Subsequently, in step 302, the first detector module 207 is removed from or unattached to the guide mechanism and interface device 201. In this way, the detector module 207 can be easily removed from the device 203 for repair or replacement purposes.

[0083] In step 303, the second detector module 407a is provided, mounted on the guide mechanism, and aligned using the alignment member of the interface device 401, as shown in step A of Figure 4. The mounting direction of the replacement detector module 407a, its sensor head 413a (which may be different from that of the first detector module), is indicated by the arrow in Figure 4. Since the detector module 407a, like the first detector module 407, is equipped with a universal mating part for engaging with the alignment member of the interface device 401, accurate alignment can be achieved without making relative adjustments for different detector modules. Thus, in step 303, the predetermined alignment is also achieved for the second detector module.

[0084] Stage B in Figure 4 depicts the second detector module 407a in its installed state and in the second position.

[0085] In 304, the second detector 407 is moved along the guide mechanism from the second position shown in step B to the first position for use shown in step C. The bellows retract, and the protruding portion of the detector module 407a, which has the sensor head 413a, is inserted to a position suitable for analysis of the subject using the beam of the apparatus 403. The removed detector module can be housed in a transport capsule and transported. A method for removing the detector module 507 is shown in four steps in Figure 5. Capsules containing replacement or different types of detectors can be loaded in a procedure that can be considered the reverse of the detector mounting process. Common alignment features or structures on the interface apparatus 501, which can be understood as alignment members, ensure that the new detector is correctly positioned and no user alignment is required during replacement.

[0086] In step A of Figure 5, the temporary guide mechanism 514 is inserted as indicated by the arrow. In this embodiment, the temporary guide mechanism 514 is provided in the form of a rod arrangement. However, in different embodiments, any suitable guide mechanism can be used. In step B of Figure 5, the detector module 507 to be removed is detached from the interface device and pulled out along the temporary guide mechanism 514 as indicated by the arrow.

[0087] In step C, the aforementioned ESD safety capsule 517 is positioned and secured around or covering the detector module 507. This can be achieved by any suitable fixing device or fastener. The positioning of the capsule 517 around module 507 is indicated by the arrow in step C. In other embodiments, the detection module can be moved into the capsule rather than entering the transport capsule by positioning the transport capsule around the detection module, and this capsule can optionally be fixed to an interface device for this purpose. This movement may include further movement of the module in the backward direction, for example, using a guide mechanism or temporary guide mechanism.

[0088] In stage C, the module 507 is retracted from the device 501, making the sensor head 513 of the first detector module 507 visible. In stage D, with the module secured within the capsule 517, the module is detached from the temporary guide mechanism 514 and removed therefrom, as indicated by the arrow. The module is then shipped, for example, to a repair center.

[0089] In various embodiments, the guide mechanism may be temporary or permanent and generally ensure that the detector module can be retracted and removed without risk of damaging the detector or microscope. To prevent accidental removal of the detector module from the guide mechanism, a rear catch 625 can be used in some embodiments, as shown in Figure 6, at the end of the guide mechanism distal to the interface device 501 and especially its receiving component.

[0090] Figure 6 shows a detail view of an exemplary detector module adapted or designed for use with an exemplary interface device according to the present invention. The module is shown with a temporary guide mechanism 614 in place for removing module 607. The module is a detector-specific module, including electronics and thermal management. Although not shown in part in this embodiment, the guide mechanism of the interface device comprises a guide rod 621. Rotational alignment and ESD protection are provided by protruding module components 616 on both sides of a common guide spigot 616a of the module, from which a detector-specific tube 624 extends. Seals are provided in the form of a common O-ring 616b, and common fixing holes 616c are provided at the mounting end of module 607. These detector module components 616 are common to a plurality of detector modules adapted to be mounted on the exemplary interface device. In other words, the interface device, in particular its alignment members or array of alignment members, comprises one or more interface elements adapted to cooperate or link with a set of detector module elements 616.

[0091] In a preferred embodiment, all critical thermal, thermal path, and electrical connections of the detector module are made in the factory where the module is manufactured. The position of the sensor 513 relative to the common alignment feature 616 is fixture-aligned in the factory to ensure that different types of detectors are correctly positioned and aligned with respect to the interface device, and therefore also with respect to the chamber, pole piece, and particle beam in use, due to the alignment between the interface device and the device 103.

[0092] The detector module includes protective arrangements adapted to ensure that electrical contacts between the module and the interface device are made without the risk of ESD damage. The final vacuum seal of module 607 to the interface device can be made by a simple O-ring 616b seal, or, in other examples for UHV (ultra-high vacuum) chambers, by a copper gasket. As described above, these features are common across different detector modules.

[0093] Another sensor replacement process is shown in Figure 7. In this alternative replacement process, the steps described above are used to retract the detector module 707 sufficiently on the guide mechanism 709 (which may be a temporary guide mechanism) so that a user can access and replace the sensor head 713 on the detector module itself. The sensor head 713 can be replaced while the module is safely outside the microscope chamber. In Figure 7, the sensor head is depicted in a separated state, with fixtures and electrical connectors provided on both the sensor head 713 and the module 707 and configured to engage with each other, but not currently connected. Preferably, the detector module 707 is coupled to the sensor head via connectors or mating parts common to different types of sensor heads and includes components for establishing electrical and data communication with the sensor head.

[0094] After replacing the sensor head, the detector module can be reinserted into the general-purpose interface device 701. This alternative replacement process is useful because it mitigates the problem that access to replace the sensor head within the device chamber is often very limited, posing a high risk of damaging the detector or microscope.

[0095] Further protection of the sensor head 713 may be provided by a protective cover 723 fitted to fit around the sensor head 713 and fitted to securely hold the sensor head 713 therein, thereby allowing the sensor head to be held, carried, operated, and attached to and detached from the detector tube 724.

[0096] Figure 8 shows yet another exemplary configuration of an interface device suitable for a small chamber microscope. Generally, such microscopes do not require an insertion / retraction mechanism. In such cases, instead of having bellows, sliding guides, or other movable parts of an insertion / retraction mechanism, as mounted by a guide mechanism in the previous embodiment, the interface device may instead comprise a static mounting plate 809. The mounting plate 809 is configured to move the mounted detector module along a guide path at least partially simultaneously with or in conjunction with the insertion or mounting of the detector module 807 into the interface device 801. Thus, in this embodiment, the guide mechanism and the alignment member may share one or more components, the alignment member may include a guide mechanism, or vice versa, or two or more may be integrated.

[0097] The mounting plate 801 includes a common detector module mounting feature adapted to accept module 807, and a simple O-ring seal.

[0098] In such embodiments, the procedure for removing the temporary guide mechanism and module described above may typically be the same.

[0099] In a further exemplary process for module replacement, a simple under-pole piece sensor can be replaced without accessing the chamber in the manner described above. In such an example, the interface device is used as a push rod for inserting the under-pole piece sensor head of the detector module into a fixed socket under the pole piece without accessing the chamber. Thus, the socket under the pole piece may constitute or include a guide mechanism and / or alignment member. Thus, the socket is typically configured to mount the detector module in a predetermined orientation to the interface device and is adapted to move the mounted detector module between a first position and a second position along a guide path. That is, the predetermined orientation can be understood as being determined by the module being directly or indirectly fitted into or engaged with the socket. Similarly, the first position corresponds to the position where the engaging portion of the module is fully inserted into or engaged with the socket, and the second position corresponds to the position where the module is directly or indirectly engaged in the socket but not fully inserted. Therefore, the interface device is preferably adapted to prevent the module from moving further in the insertion direction beyond the first position. The push rod can also be used to remove a faulty under-pole piece sensor and replace it with a usable sensor. This is suitable for simpler sensors, such as BSED sensors. [Explanation of Symbols]

[0100] 101 Interface device 102 Microscope Port Interface 103 Particle beam device 104 Alignment member 107 Detector Module 108 Module Components 109 Bellows 112 Adjustment mechanism 113 Sensor head

Claims

1. An interface device for a particle beam apparatus, A positioning member for mounting the detector module of the particle beam apparatus to the interface device in a first predetermined orientation, A guide mechanism configured to move the mounted detector module along a guide path between a first position located at a predetermined location within the chamber of the particle beam apparatus and a second position located outside the particle beam apparatus, wherein the guide mechanism is configured such that when the mounted detector module is at the first position, it is in a second predetermined orientation relative to the particle beam apparatus. An interface device equipped with the following features.

2. The interface device according to claim 1, wherein the first position, the guide path, and the second position are located within a guide volume, and the geometry of the guide volume encompasses the detector module when it is at all intermediate positions along the first position, the second position, and the guide path.

3. The interface device according to claim 2, wherein each of the different detector modules, having different geometric shapes, is configured to be movable between a first position and a second position while housed in the guide volume, so that a plurality of different detector modules having different geometric shapes can be used within the particle beam apparatus.

4. The interface device according to any one of claims 1 to 3, wherein the guide path is linear.

5. The interface device according to any one of claims 1 to 4, wherein the first position is within a predetermined distance from the particle beam axis during use.

6. The interface device according to any one of claims 1 to 5, further comprising one or more device port-specific components.

7. The interface device according to any one of claims 1 to 6, wherein the first position is an internal position of the particle beam apparatus in which the detector module is used internally during normal use.

8. The interface device according to any one of claims 1 to 7, further comprising an adjustment mechanism configured to move the mounted detector module from an initial position within the chamber to a first position.

9. The interface device according to any one of claims 1 to 8, wherein the guide mechanism is configured to move the mounted detector module along the portion of the guide path between the first position and a partially retracted position when in use.

10. The interface device according to any one of claims 1 to 9, wherein the detector module comprises a sensor head that can be replaced by the user.

11. The interface device according to any one of claims 1 to 10, wherein the detector module includes an energy-dispersive spectroscopy (EDS) detector, a backscatter electron detector (BSED), or an electron backscatter diffraction (EBSD) detector.

12. The interface device according to any one of claims 1 to 11, wherein the guide mechanism comprises one or more alignment rods.

13. The interface device according to any one of claims 1 to 12, wherein the guide mechanism is configured to be selectively detachable from the interface device.

14. The interface device according to any one of claims 1 to 13, comprising a set of interface elements adapted to cooperate with a corresponding set of detector module elements to guide the movement of the mounted detector module along the guide mechanism and to the first position.

15. The interface device according to claim 14, wherein the interface element comprises at least one component selected from one or more of a chassis, bellows, and slide assemblies.

16. The interface device according to any one of claims 1 to 15, further comprising a selectively removable transport capsule, wherein the detector module is moved into the transport capsule and the transport capsule is mounted on the interface device such that the detector module can be removed from the alignment member and the guide mechanism, respectively, so that the detector module can be removed from the device.

17. The interface device according to claim 16, further comprising a second guide mechanism configured to move the mounted detector module into the transport capsule along a second guide path when in use.

18. The interface device according to any one of claims 1 to 17, further comprising an interface connector for providing one or more electrical connections to a complementary module connector of the detector module when in use, wherein the interface connector and the detector module are arranged together to protect the detector module from damage due to electrostatic discharge.

19. The interface device according to any one of claims 1 to 18, further comprising a service position located outside the chamber along a transport path, wherein a user can access the sensor head of the detector module when the detector module is located within the service position.

20. The interface device according to any one of claims 1 to 19, wherein the guide mechanism is configured to move the mounted detector module away from the first position when the sensor is not in use.

21. An interface device for a particle beam apparatus, A positioning member for mounting the detector module of the particle beam apparatus to the interface device in a predetermined orientation, A guide mechanism configured to move the mounted detector module along a guide path between a first position and a second position within the chamber of the particle beam apparatus during use, An adjustment mechanism configured to move the mounted detector module between the first position and the third position within the chamber, An interface device equipped with the following features.

22. A method for replacing a detector module in a particle beam apparatus using an interface device according to any one of claims 1 to 21, a. To operate the guide mechanism to remove the first detector module from the chamber of the particle beam apparatus, b. Removing the first detector module from the guide mechanism, c. Attaching the second detector module to the guide mechanism and aligning the second detector module using the alignment member to achieve a predetermined alignment with respect to the second detector module, d. Moving the second detector along the guide mechanism and positioning it in the first position for use, Methods that include...

23. The interface device further comprises a selectively removable transport capsule, The above method further, The transport capsule is attached to the interface device, Moving the first detector module into the transport capsule, The method according to claim 22, comprising removing the first detector module from each of the alignment member and the guide mechanism to enable the removal of the detector module from the device.

24. A method for replacing the sensor head of a detector module in a particle beam apparatus using the interface device described in claim 19, The above method is performed in the following steps (a) Operate the guide mechanism to remove the first detector module, including the first sensor head, from the chamber of the particle beam apparatus and place it in the service position, (b) Removing the first sensor head from the first detector module, (c) Attaching the second sensor head to the first detector module, (d) Moving the first detector module together with the second sensor head along the guide mechanism to position it in the first position for use, Methods that include...

25. The method according to claim 24, wherein the second sensor head comprises a selectively removable cover that surrounds at least the sensor of the sensor head, the cover remains surrounding the sensor during step (c) while the sensor head is attached to the detector module, and step (c) further comprises removing the cover before step (d).

26. Prior to step (a), the detector module, a. Provision of thermal and electrical bonding, b. When the detector module is aligned with the alignment member of the interface device, the sensors of the detector module are aligned such that the detector module is accurately aligned within the device when it is in the first position. The method according to any one of claims 22 to 25, wherein each of the is packaged in a remote location.

27. A detector module adapted for use with the interface device described in claim 19, comprising a selectively removable sensor head, wherein the detector module comprises a selectively removable cover surrounding at least the sensor of the sensor head.

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