Method for manufacturing submicron fluid channels and submicron fluid channels manufactured thereby

Abstract

The present invention relates to a method for manufacturing submicron fluid channels using a 3D printer and a submicron fluid channel manufactured thereby, wherein the method for manufacturing the submicron fluid channel includes the steps of: (a) modeling a 3D model including micropores; (b) adjusting the output direction of the minimum diameter of the micropores in the thickness direction of the layer of the 3D printer and outputting the 3D model; and (c) applying predetermined heat and pressure to the output to form a submicron-sized fluid channel, wherein step (c) is a step in which a fluid channel is formed in which two points that form the minimum diameter of the pores embodied in the output are in close contact with each other.

Description

Technical Field

[0001] The present invention relates to a method for manufacturing a sub-micron fluid channel using a 3D printer and a sub-micron fluid channel manufactured thereby. More specifically, considering the output method of the 3D printer, the present invention relates to a method for manufacturing a sub-micron fluid channel capable of obtaining higher resolution and a sub-micron fluid channel manufactured thereby.

Background Art

[0002] Generally, in the bio-energy field such as bio-sensing, switching devices, and energy harvesting, technologies for fabricating nano-fluid diodes for controlling electric current in channels through which fluid flows are being very importantly studied.

[0003] Existing nano-fluid diodes in channels through which fluid flows have been fabricated through a photolithography process. However, the photolithography process must be performed in a high-class clean room, requires equipment such as a photo aligner, a wet station, and a spin coater, and the process procedure is also very complicated.

[0004] Various alternatives to replace the complexity of the photolithography process are under research. Among them, the manufacturing method using a 3D printer is most widely used. However, although nano-sized outputs must be output to fabricate nano-structures, the resolution of commercially available 3D printers is several tens of μm, and the actually stably outputable resolution is only at the level of several hundreds of μm, so it is difficult to fabricate nano-structures.

Summary of the Invention

[0005] The technical problem of the present invention has been addressed in consideration of these points, and the object of the present invention is to provide a method for easily fabricating submicron fluid channels using a commercially available 3D printer. [Means for solving the problem]

[0006] To achieve the above objectives, the present invention provides a method for manufacturing a submicron fluid channel, comprising the steps of: (a) modeling a three-dimensional model including micropores; (b) adjusting the output direction of the minimum diameter of the micropores in the thickness direction of the layer of the three-dimensional printer and outputting the three-dimensional model; and (c) applying predetermined heat and pressure to the output to form a submicron fluid channel, wherein step (c) is a step in which a fluid channel is formed in which two points that form the minimum diameter of the pores embodied in the output are in close contact with each other.

[0007] Furthermore, according to one embodiment of the present invention, step (c) may be a step in which the two points come into close contact as the pressure is applied to the two points in a direction opposite to them.

[0008] Furthermore, according to one embodiment of the present invention, the 3D printer may have an xy resolution greater than the thickness of the layer.

[0009] Furthermore, according to one embodiment of the present invention, the minimum diameter of the pores embodied in the output is even smaller than the xy resolution.

[0010] Furthermore, according to one embodiment of the present invention, the thickness of the layer may correspond to the diameter in the z-axis direction of the pores embodied in the output object.

[0011] Furthermore, according to one embodiment of the present invention, after step (c), a step of maintaining the pressure applied at room temperature for a predetermined period of time can be performed.

[0012] Furthermore, according to one embodiment of the present invention, step (b) may include a step of rotating the three-dimensional model with respect to a combination of x-axis and y-axis rotation axes.

[0013] Furthermore, according to one embodiment of the present invention, the rotation angle may be 90 degrees or less.

[0014] Furthermore, according to one embodiment of the present invention, in step (b), when the three-dimensional model is rotated 90 degrees with respect to the x-axis, the minimum diameter of the micropores in the y-axis direction may correspond to the thickness of the layer.

[0015] Furthermore, according to one embodiment of the present invention, in step (b), if the three-dimensional model is rotated 90 degrees with respect to the y-axis, the minimum diameter of the micropores in the x-axis direction may correspond to the thickness of the layer.

[0016] Furthermore, according to one embodiment of the present invention, the 3D printer may be an MJP (Multi Jetting Printing) type.

[0017] The submicron fluid channel produced by the method for producing a submicron fluid channel according to the present invention as described above is characterized in that it includes a submicron-sized fluid channel, and the maximum diameter of the fluid channel is less than 1 μm.

[0018] Furthermore, according to one embodiment of the present invention, the minimum diameter of the fluid channel can satisfy the requirement of 1 nm or more. [Effects of the Invention]

[0019] According to the present invention configured as described above, submicron fluid channels can be easily fabricated using a commercially available 3D printer, rather than relying on existing complex and expensive photolithography processes.

[0020] Moreover, a high-resolution output can be obtained and can be deformed into a sub-micron-sized channel.

Brief Description of the Drawings

[0021] [Figure 1] It is a flowchart related to a method for manufacturing a sub-micron fluid channel according to an embodiment of the present invention. [Figure 2] It is a diagram showing an example of rotating a 3D model according to an embodiment of the present invention and adjusting the output direction. [Figure 3] (a) is a conceptual diagram of the process of deforming a sub-micron fluid channel according to an embodiment of the present invention, and (b) is a photograph showing the actual deformation process. [Figure 4] It is a diagram schematizing a method for manufacturing a sub-micron fluid channel according to an embodiment of the present invention. [Figure 5] It is a photograph showing the layer thickness of an output when output without rotating a 3D model according to an embodiment of the present invention. [Figure 6] It is a photograph showing pores embodied in an output produced using a 3D printer according to an embodiment of the present invention. <00S0089>It is a photograph showing pores embodied in an output produced using a 3D printer according to an embodiment of the present invention. [Figure 8] It is a schematic diagram showing a sub-micron fluid channel manufactured by a method for manufacturing a sub-micron fluid channel according to an embodiment of the present invention. [Figure 9] SEM photographs of the (a) before deformation and (b) after deformation of the sub-micron fluid channel. [Figure 10] It is a test result for determining the presence or absence of formation of a sub-micron fluid channel manufactured according to an embodiment of the present invention. [Figure 11] It is a graph obtained by measuring the electrical resistance of nanopores of a sub-micron fluid channel manufactured according to an embodiment of the present invention and calculating the pore size. [Modes for carrying out the invention]

[0022] Hereinafter, many embodiments of the present invention will be described in detail with reference to the accompanying drawings. Each embodiment of the present invention is provided to further and completely illustrate the invention to those who are ordinary skill in the art, and the embodiments described below can be modified into many other forms, and the scope of the invention is not limited to these embodiments. Rather, these embodiments are provided to further enrich and complete this disclosure and to fully convey the idea of ​​the invention to those skilled in the art. Furthermore, the thicknesses and sizes of each layer in the drawings are exaggerated for the sake of clarity and ease of explanation.

[0023] On the other hand, in the following, "3D printer" refers to a device that receives a 3D model as input and outputs a 3D object (output). Also, unless otherwise specified, "3D model" is used to mean "a model used in a 3D printer" or "a model for 3D printing." "3D modeling" refers to the process of creating a 3D model (shape), and it is possible to generate a 3D solid shape using a 3D photo booth, 2D photographs, or other design drawings.

[0024] Figure 1 is a flowchart relating to a method for manufacturing submicron fluid channels using a 3D printer according to one embodiment of the present invention.

[0025] Referring to Figure 1, first, a three-dimensional model including micropores is modeled (S110).

[0026] The submicron fluid channels according to embodiments of the present invention are fluid channels with a maximum diameter of less than 1 μm, and can be obtained by deforming pores of tens to hundreds of micrometers in size. For this purpose, a three-dimensional model including micropores that will serve as preliminary channels is modeled. The micropores can take on various shapes such as squares and ellipses, and their number and structure can be designed in various ways depending on the purpose of the fluid channel.

[0027] The smaller the diameter of the micropores, the smaller the cross-sectional width of the micropores, and the smaller the cross-sectional width of the micropores, the easier it is to deform the pores and manufacture submicron-sized channels.

[0028] The printer's resolution is expressed in terms of layer thickness and xy resolution in dpi (dots per inch) or micrometers (μm). The diameter of the micropores can be determined by the xy resolution of the 3D printer. More specifically, the x-axis resolution refers to the smallest unit the printer can move from side to side, and the y-axis resolution refers to the smallest unit the printer can move back and forth. A smaller minimum unit means a higher resolution, and the higher the resolution, the smaller the diameter of the micropores can be.

[0029] Commercially available 3D printers print by stacking resin along the z-axis, with each layer being called a layer. The z-axis resolution refers to the smallest unit of height when the printer stacks layers. Generally, the xy resolution within a single layer is several hundred micrometers, while the thickness of a single layer is approximately less than 100 micrometers (250 dpi), corresponding to several tens of micrometers. This means that the xy resolution is greater than the thickness of the layer, or in other words, the resolution along the z-axis (the direction in which the layers are stacked) is even higher.

[0030] Therefore, the output direction of the minimum diameter of the micropores is adjusted to the thickness direction of the layer of the 3D printer, and the 3D model is output (S120).

[0031] By rotating a 3D model around the x or y axis, and adjusting the output direction of the minimum diameter of micropores to align with the thickness direction of the 3D printer's layer, the minimum output unit becomes smaller compared to not rotating the model, allowing for even smaller micropore diameters. This makes it possible to output pores with a minimum diameter smaller than the x and y resolution of the 3D printer.

[0032] When the height direction of a 3D model is defined as the z-axis direction, the direction in which the 3D model is rotated is a combination of the x-axis and y-axis rotation axes. Here, "rotating with a combination of the x-axis and y-axis rotation axes" includes all cases where (i) only the x-axis is the axis of rotation, (ii) only the y-axis is the axis of rotation, or (iii) both the x-axis and y-axis are the axes of rotation. On the other hand, rotation around the z-axis only changes the front, back, left, right (x and y) directions of the desired shape and does not change the resolution, so it is not considered in this invention.

[0033] In embodiments of the present invention, by rotating the desired shape using a combination of x and y axis rotations and adjusting the resolution to a high level, the minimum diameter of pores embodied in the output can be made even smaller than the xy resolution of the 3D printer. In this case, the thickness of the layer corresponds to the diameter of the pores embodied in the output in the z axis direction. This allows the minimum diameter in the x axis direction and the minimum diameter in the y axis direction to be different from each other by making either the minimum diameter in the x axis direction or the minimum diameter in the y axis direction of the micropores correspond to the thickness of the layer.

[0034] As an example, assuming a 3D printer with an xy resolution of 100 μm and a layer thickness of 30 μm, if we design micropores with a size of 30 μm × 30 μm horizontally (x-axis) and vertically (y-axis), the output will be as follows. If the 3D model is printed in the existing output direction without rotation, the pore size will be smaller than the printer's xy resolution, so 30 μm × 30 μm pores will not be printed. However, if the output direction is changed, even smaller pores can be printed. However, unlike the initial pore design, the output will be approximately 30 μm × 100 μm depending on the resolution. This is because the layer thickness (z-axis resolution) is 30 μm and the xy-axis resolution is 100 μm.

[0035] In summary, while 3D printers can print with X and Y axis resolutions of 100 μm or higher, the Z axis can print down to a minimum of 30 μm. Therefore, using this, it is possible to print pores much smaller than the X and Y resolutions.

[0036] The rotation angle during rotation can include 0°, in which case the 3D model is generated exactly as it was originally set in its default orientation. Even when the rotation angle is 0°, it is possible to adjust the size of the micropores within the xy resolution range of the 3D printer, and naturally, the minimum diameter in the x-axis direction and the minimum diameter in the y-axis direction can be adjusted to be different from each other.

[0037] Figure 2 shows an example of rotating a three-dimensional model according to one embodiment of the present invention to adjust the output direction.

[0038] In Figure 2, (a) shows the output of the desired shape without rotation, (b) shows the output of the desired shape rotated 90 degrees with respect to the y-axis, and (c) shows the output of the desired shape rotated 45 degrees with respect to the y-axis.

[0039] Figures 2(a) to (c) all contain a rectangular prism-shaped micropore A, and the size of the micropore A is determined by the diameter in the x-axis direction and the diameter in the y-axis direction. Depending on whether the shape is rotated or not, the size of the micropore A can be different in all of (a) to (c).

[0040] According to Figure 2(a), the diameter a in the x-axis direction and the diameter b in the y-axis direction are determined by the xy resolution of the 3D printer. More specifically, a may be determined by the x-axis resolution and b may be determined by the y-axis resolution. Thus, the diameters a and b of the micropore A will be several hundred micrometers in size.

[0041] According to Figure 2(b), the diameter c in the z-axis direction corresponds to the thickness of the layer, so the diameter c is several tens of micrometers in size. That is, after rotating the shape in Figure 2(a) by 90 degrees, output is performed in the direction in which the layers are stacked (z-axis), so by adjusting whether or not to output the layer, the diameter c in the z-axis direction becomes the same as the thickness of the layer. On the other hand, the diameter b in the y-axis direction is determined by the resolution of the 3D printer, i.e., the y-axis resolution, so the diameter b is several hundred micrometers in size, the same as in Figure 2(a).

[0042] As shown in Figure 2(b), when the shape is rotated back to its original form after 3D printing, the diameter c in the z-axis direction becomes the diameter in the x-axis direction. This has a different value from the diameter a in the x-axis direction in Figure 2(a). That is, it has a shorter diameter in the x-axis direction than the diameter a in Figure 2(a). In another embodiment, if the desired shape is rotated 90 degrees around the x-axis, the diameter c in the z-axis direction becomes the diameter in the y-axis direction by the same principle.

[0043] Figure 2(c) shows the case where the shape of Figure 2(a) is rotated by 45 degrees before printing. The diameter d depends on the resolution of the 3D printer and the thickness of the layer, so it has a value between a and c. On the other hand, the diameter b in the y-axis direction is determined by the resolution of the 3D printer, so it has the same size as the diameter b in Figure 2(a), which is several hundred micrometers. After 3D printing, when it is rotated back to the original shape, the diameter d becomes the diameter of the micropore A in the x-axis direction.

[0044] Thus, in Figure 2, the diameters of a, c, and d are different from each other, and consequently, the sizes of the micropores A are also different. In the above example, as shown in Figure 2(c), even when printing at an acute angle of less than 90 degrees, micropores ranging from tens of micrometers to hundreds of micrometers in size can be obtained, and the effect and degree of the micropore size can differ depending on the printer resin spray angle and curing method. Through this, it can be seen that different micropore sizes can be obtained by rotating the shape at the 3D modeling stage. Furthermore, it can be seen that a high-resolution output can be obtained by adjusting the output direction of the smallest scale of the output to be printed to the z axis (the direction in which layers are stacked).

[0045] In one embodiment, the 3D printer may be a device based on an inkjet jetting method, such as MJP (Multi Jetting Printing) or Colorjet. The MJP method, also known as the MJM method, is a layering method that hardens photocurable resin and casting wax material with ultraviolet (UV) light. By jetting the material with the printer head and simultaneously hardening it with UV light to form the object, it builds one layer at a time, resulting in a fast printing speed and a precise surface. The material for the model and the material for the support that supports the model are jetted from different nozzles, and the support can be easily removed during the post-processing stage, allowing for the expression of a variety of forms.

[0046] Heat and pressure are applied to the output material over a certain period of time to form submicron-sized fluid channels (S130).

[0047] Figure 3(a) is a conceptual diagram of the process of deforming an output object 100 containing micropores A according to an embodiment of the present invention, and Figure 10(b) is a photograph showing the actual deformation process.

[0048] Referring to Figure 3, as shown in (a), heat can be applied to the mesh of micropores A using the vise 310 and the heating element 211, and for example, a steam iron can be used as the heating element 211. Figure 3(b) shows the state in which deformation occurs in the mesh within the vise 310 and submicron fluid channels are formed.

[0049] Figure 4 is a diagram illustrating a method for manufacturing a submicron fluid channel according to one embodiment of the present invention.

[0050] Referring to Figure 4, the process by which the micropores A of the output material deform is shown. When heat is applied to an output material containing micropores A with diameters a in the x-axis direction and b in the y-axis direction that are different from each other, and then pressurized, the micropores A deform. For example, the output material can be pressurized at a predetermined pressure P in a heat treatment apparatus 210 equipped with a heating element 211. As a result, a submicron fluid channel A' is formed in the center of the micropore A, with both ends of diameter b in close contact with each other.

[0051] The unidirectional diameter b' of the submicron fluid channel A' is shorter than the diameters a and b of the existing micropores A, and may be, for example, less than 1 μm (greater than 0). Alternatively, it may have a diameter of 1 nm to less than 1 μm. This is because the resin of the 3D printer can deform due to heat. The pore size of the deformed output becomes smaller to the nanoscale, making it possible to obtain submicron fluid channels A'.

[0052] Since the resin of a 3D printer can be deformed by heat, by applying heat and pressure to the output and deforming it, it is possible to obtain channels smaller in size than the existing output channels. As in the example above, assuming that the xy resolution of the 3D printer is 100 μm and the layer thickness is 30 μm, even if the output result has pores of 30 μm x 100 μm, by deforming it with heat and pressure, it is possible to obtain pores of size 30 μm x 30 μm, as in the initial design.

[0053] The heat treatment temperature can be a temperature at which the resin can be melted and deformed, for example, 100°C or higher. The type and structure of the heat treatment apparatus 210 are not particularly limited and may be integrated with the heat generating section 211.

[0054] The direction in which pressure P is applied during pressurization may be parallel to the direction of formation of the shorter diameter b among a and b. Through this, the two endpoints forming diameter b come into close contact. Figure 4 shows a rectangular pore, where a and b correspond to the horizontal and vertical diameters, respectively. However, if the pore shape is not constant, the horizontal and vertical diameters may differ in different regions. In this case, a and b represent the minimum diameter in the x-axis direction and the minimum diameter in the y-axis direction, respectively. Preferably, the pressure P is applied in a direction parallel to the direction of formation of the shorter diameter among the minimum diameter in the x-axis direction and the minimum diameter in the y-axis direction. Even more preferably, the pressure is applied at the positions corresponding to the two endpoints of the diameter while the two endpoints of the diameter are in close contact with each other.

[0055] In another embodiment, when applying pressure in a direction parallel to the direction of diameter a formation, even greater pressure may be required to bring the two ends forming diameter a into close contact.

[0056] When the aforementioned output is compressed by pressure, the horizontal and vertical sizes of the micropores decrease, and the thickness also decreases. If the output, which has been deformed under heat and pressure, is left at room temperature for a certain period of time while maintaining only the pressure, it can maintain its deformed state without returning to its original state.

[0057] Figure 5 is a photograph showing the layer thickness of an output object when the shape is printed without rotation according to one embodiment of the present invention.

[0058] In Figure 5, the thickness of a single layer corresponds to approximately 26 μm to 44 μm. Through this, we can confirm that the z-axis resolution is in the range of several tens of micrometers.

[0059] Figures 6 and 7 are photographs showing outputs produced using a 3D printer according to one embodiment of the present invention. Specifically, Figure 6 shows the case where a desired shape is rotated 90 degrees with respect to the y-axis and then 3D modeled, and Figure 7 shows the case where a desired shape is rotated 45 degrees with respect to the y-axis and then 3D modeled.

[0060] Observation of the SEM image in Figure 6 confirms that the diameter of the micropores in the y-axis direction is 128 μm, while the diameter in the x-axis direction is a shorter 38.1 μm. This shows that by adjusting the existing output direction of the 3D printer, even higher resolution can be obtained, and that outputting in this manner can stably reduce the existing resolution of several hundred micrometers to several tens of micrometers.

[0061] Observation of the SEM image in Figure 7(a) confirms that the diameter of the micropores in the y-axis direction is 27.3 μm, while the diameter in the x-axis direction is a short 14.8 μm. Furthermore, observation of the SEM image in Figure 7(b) confirms that the diameter of the micropores in the y-axis direction is 36.4 μm, while the diameter in the x-axis direction is a short 17.6 μm.

[0062] Analysis of the photographs in Figures 6 and 7 reveals that when the shape is printed with a 45-degree tilt in the y-axis direction, the overall pore size is smaller. This utilizes the fact that the pore formation effect and degree differ depending on the resin spray angle of the 3D printer, and it can be confirmed that even smaller pores are formed when tilted by 45 degrees.

[0063] The embodiments shown in Figures 6 and 7 illustrate the case when rotated around the y-axis, but it is natural that similar characteristics can be obtained when rotated around the x-axis.

[0064] Figure 8 is a photograph showing a submicron fluid channel manufactured by the method for manufacturing a submicron fluid channel according to one embodiment of the present invention.

[0065] Figure 8(a) shows the output material containing micropores before deformation. After applying heat and pressure to this material, and then leaving it at room temperature for a certain period of time while maintaining only the pressure, the result shown in Figure 8(b) is obtained. In Figure 8(b), since no pores are observed on the μm scale, it can be seen that channels of several tens of μm can be deformed through them, and that it is possible to deform them into channels of nanometer size.

[0066] Figure 9 shows SEM images of the submicron fluid channel from Figure 8, (a) before deformation and (b) after deformation. In Figure 9, it can be seen that the 40 μm channel before deformation in (a) was deformed into a 94 nm channel as shown in (b).

[0067] Figure 10 shows the test results for determining the presence or absence of submicron fluid channels produced by one embodiment of the present invention.

[0068] The presence or absence of nanochannel formation can be confirmed through performance evaluation of nanofluidic diodes. Nanofluidic diodes exhibit a large difference between forward and reverse current due to asymmetry in the surrounding environment during current flow through nanostructures, making this a crucial test for determining the presence or absence of nanostructure formation.

[0069] Figure 10 shows graphs of the submicron fluid channel before (a) deformation and after (b) deformation. As shown in Figure 10(b), the resistance is 11 MΩ in the "forward direction" and 973 MΩ in the "reverse direction," resulting in a rectification ratio of 86. This confirms that the nanostructure was well formed.

[0070] Figure 11 is a graph showing the electrical resistance of nanopores in submicron fluid channels manufactured according to an embodiment of the present invention, and the pore size calculated from this measurement.

[0071] Referring to Figure 11, it can be confirmed that after deformation, the pore width W decreased to a nanoscale size of 48.8 nm. This is consistent with the results after deformation shown in Figures 8 and 9.

[0072] As described above, the present invention allows for adjustment of the existing output direction of a 3D printer to obtain even higher resolution, and outputting in this manner can stably reduce the existing resolution of several hundred micrometers to several tens of micrometers. Subsequently, when heat and pressure are applied to the output, deformation occurs, resulting in the formation of submicron fluid channels.

[0073] As described above, the present invention has been illustrated with reference to preferred embodiments, but is not limited to these embodiments. Various modifications and alterations are possible by those skilled in the art, without departing from the spirit of the invention. Such modifications and alterations should be considered to fall within the scope of the present invention and the appended claims.

Claims

1. When forming submicron-sized fluid channels using a 3D printer, (a) The step of modeling a three-dimensional model including micropores, (b) The step of adjusting the output direction of the minimum diameter of the micropores in the thickness direction of the layer of the 3D printer and outputting the 3D model, (c) The step of applying predetermined heat and pressure to the output material to form submicron-sized fluid channels, The aforementioned step (c) is, A method for manufacturing a submicron fluid channel, comprising the step of forming a submicron-sized fluid channel in which two points that form the minimum diameter of pores embodied in the output material are in close contact with each other.

2. The aforementioned step (c) is, The method for manufacturing a submicron fluid channel according to claim 1, wherein the pressure is applied to the two points in a direction opposite to the two points, causing the two points to come into close contact.

3. The aforementioned 3D printer is A method for manufacturing a submicron fluid channel according to claim 1, wherein the xy resolution is greater than the thickness of the layer.

4. A method for manufacturing a submicron fluid channel according to claim 3, characterized in that the minimum diameter of the pores embodied in the output is even smaller than the xy resolution.

5. A method for manufacturing a submicron fluid channel according to claim 1, wherein the thickness of the layer corresponds to the diameter in the z-axis direction of the pores embodied in the output object.

6. From stage (c) above, A method for manufacturing a submicron fluid channel according to claim 1, further comprising the step of maintaining the state at room temperature for a predetermined time while the aforementioned pressure is applied.

7. The aforementioned step (b) is, A method for manufacturing a submicron fluid channel according to claim 1, comprising the step of rotating the three-dimensional model on a combination of x-axis and y-axis rotation axes.

8. The method for manufacturing a submicron fluid channel according to claim 7, wherein the rotation angle is 90 degrees or less.

9. In step (b) above, When the aforementioned 3D model is rotated 90 degrees with respect to the x-axis, The method for manufacturing a submicron fluid channel according to claim 7, wherein the minimum diameter in the y-axis direction of the micropores corresponds to the thickness of the layer.

10. In step (b) above, When the aforementioned three-dimensional model is rotated 90 degrees with respect to the y-axis, A method for manufacturing a submicron fluid channel according to claim 7, wherein the minimum diameter in the x-axis direction of the micropores corresponds to the thickness of the layer.

11. The method for manufacturing a submicron fluid channel according to claim 1, wherein the three-dimensional printer is of the MJP (Multi Jetting Printing) type.

12. Manufactured according to any one of claims 1 to 11, Includes submicron-sized fluid channels, A submicron fluid channel whose maximum diameter is less than 1 μm.

13. The submicron fluid channel according to claim 12, wherein the minimum diameter of the fluid channel satisfies 1 nm or more.

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