Ultrasonic-assisted green laser equipment for processing copper-based diamond cooling fins

Abstract

The invention belongs to the technical field of metal-based composite material additive manufacturing, and particularly relates to ultrasonic-assisted green laser equipment for copper-based diamond cooling fin machining, which comprises a rack, a printing cabin, a green laser machining system, an ultrasonic-assisted system, a powder spreading system, a gas control system, an intelligent control system and an online monitoring system. By integrating a green laser processing system and an ultrasonic auxiliary system, an ultrasonic-green laser-powder multi-energy field coupling processing system is constructed, the wavelength of green laser is 532 nm, the absorption rate of copper is increased, and compared with traditional infrared laser, low-power and high-efficiency melting of copper can be achieved, the diamond graphitization risk is reduced from the angle of a heat source, and the production cost is reduced. Ultrasonic vibration is transmitted to a molten pool through a substrate coupling type structure, by means of the cavitation effect and the acoustic streaming effect, the interface wettability of copper and diamond is effectively improved, the interface bonding force is enhanced, the interface thermal resistance is reduced, meanwhile, grains are refined, pores are eliminated, residual stress is reduced, and the comprehensive performance of the cooling fin is remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of additive manufacturing technology for metal matrix composites, specifically to an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks. Background Technology

[0002] With the rapid development of fields such as artificial intelligence, new energy vehicles, and aerospace, the heat flux density of high-power chips has approached or even exceeded 1000 W / cm², placing extremely high demands on the thermal conductivity, structural precision, and reliability of heat dissipation devices. Copper-diamond composite materials, due to their advantages such as ultra-high thermal conductivity and thermal expansion coefficient matching the chip, have become a core material for extreme thermal management scenarios. However, when using traditional laser 3D printing technology to process copper-diamond heat sinks, several technical bottlenecks are encountered: First, copper and diamond have poor natural wettability and weak interfacial bonding, easily forming high interfacial thermal resistance, which cannot fully utilize the ultra-high thermal conductivity of diamond; second, the high temperature during laser processing can easily cause diamond to undergo graphitization transformation, turning it from a good thermal conductor into a thermal insulator; third, defects such as pores and cracks are easily generated during the printing process, and the significant difference in thermal expansion coefficients between copper and diamond can easily generate large residual stress after cooling, affecting the mechanical strength and long-term reliability of the heat sink; fourth, diamond particles are prone to segregation or agglomeration, resulting in poor uniformity of heat sink performance, making it difficult to meet the needs of industrial production.

[0003] In existing technologies, to address the aforementioned issues, some solutions employ green lasers to replace traditional infrared lasers to improve metal absorption, or optimize laser parameters to narrow the process window. However, these approaches fail to fundamentally solve core problems such as interface bonding, defect control, and particle distribution uniformity. While ultrasonic-assisted machining technology has been applied to the preparation of some materials, achieving effects such as grain refinement and defect elimination, there is currently no mature equipment solution for precisely integrating it with green laser 3D printing technology to construct a multi-energy field coupled machining system for high-quality processing of copper-based diamond heat sinks. Therefore, we propose an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks to solve the above problems. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks. By constructing a "ultrasound-green laser-powder" multi-energy field coupled processing system, it solves problems such as poor interface bonding, easy graphitization of diamond, numerous defects, and poor performance uniformity in the processing of copper-based diamond heat sinks, thereby achieving high-precision, high-performance integrated manufacturing of heat sinks.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks, comprising a frame, a printing chamber, a green laser processing system, an ultrasonic-assisted system, a powder spreading system, a worktable system, a gas control system, an intelligent control system, and an online monitoring system; the printing chamber is sealed and installed on the frame, and its interior has a powder spreading area and a processing area. The side wall of the printing chamber has an observation window and a maintenance door, and the bottom has a waste collection port; the green laser processing system is installed on the top of the printing chamber and is used to provide a high-precision, high-absorption laser heat source, including a green laser, a beam shaping module, a scanning galvanometer, and a field lens, wherein the green laser outputs... A 532nm green laser is used, and a beam shaping module adjusts the laser beam quality. A scanning galvanometer and field lens work together to achieve precise scanning of the laser beam in the processing area. The ultrasonic auxiliary system includes an ultrasonic generator, an ultrasonic transducer, an amplitude transformer, and an ultrasonic transmission assembly. The ultrasonic transducer is connected to the ultrasonic transmission assembly via the amplitude transformer. The ultrasonic transmission assembly is installed below the worktable system and transmits ultrasonic vibrations to the copper-coated diamond powder and molten pool in the processing area. The ultrasonic generator is used to adjust the ultrasonic power, frequency, and operating mode. The powder spreading system is installed on one side of the printing chamber and includes a powder cylinder, a powder feeding mechanism, and a powder spreading roller. The powder cylinder stores copper-coated diamond composite powder. The powder feeding mechanism delivers powder to the powder spreading area, and the powder spreading roller evenly spreads the powder onto the substrate of the worktable system. The worktable system includes a Z-axis motion platform, a substrate clamp, and a heat insulation layer. The substrate clamp is mounted on the Z-axis motion platform to fix the processing substrate. The heat insulation layer is located between the substrate clamp and the Z-axis motion platform. An ultrasonic transmission component is connected to the bottom of the substrate clamp to achieve efficient transmission of ultrasonic vibration to the substrate and powder layer. The gas control system includes an inert gas storage tank, a gas purification module, a flow controller, and a gas circulation module, used to introduce high-purity inert gas into the printing chamber to maintain the inert gas in the processing area and prevent oxidation of copper powder and diamond graphite. The intelligent control system is electrically connected to the green laser processing system, ultrasonic auxiliary system, powder spreading system, worktable system, gas control system, and online monitoring system to achieve coordinated control of each system. It integrates a process database and AI optimization module, which can automatically match the optimal process parameters according to the heat sink processing requirements. The online monitoring system includes a high-speed camera module, an infrared thermal imaging module, and a data acquisition module. The high-speed camera module monitors the flow of the molten pool and the distribution of diamond particles. The infrared thermal imaging module collects real-time temperature field data of the processing area. The data acquisition module transmits the monitoring data to the intelligent control system, providing data support for process parameter optimization.

[0006] As a preferred embodiment of the present invention, the ultrasonic transmission component adopts a substrate coupling structure, including a transmission pad and a buffer layer. The transmission pad is tightly attached to the bottom of the substrate clamp, and the buffer layer is disposed between the transmission pad and the amplitude transformer to reduce the interference of ultrasonic vibration on the worktable system, while ensuring the efficient transmission of ultrasonic energy.

[0007] As a preferred embodiment of the present invention, the ultrasonic frequency of the ultrasonic-assisted system is fixed at 20-80kHz, the ultrasonic power can be continuously adjusted within the range of 0-1000W, and the operating modes include continuous ultrasound and pulsed ultrasound. The pulsed ultrasound can be synchronized with the scanning rhythm of the green laser to achieve precise synergy between "laser scanning and ultrasonic action".

[0008] As a preferred embodiment of the present invention, the laser power of the green laser processing system can be adjusted within the range of 100-1000W, the scanning speed is 50-2000mm / s, the scanning spacing is 0.05-0.2mm, and the layer thickness can be precisely controlled within the range of 0.02-0.1mm, thus meeting the processing requirements of copper-based diamond heat sinks with different precision requirements.

[0009] As a preferred embodiment of the present invention, the inert gas of the gas control system is high-purity argon or nitrogen with a purity of ≥99.999%, and the oxygen content in the printing chamber can be controlled below 20ppm. The gas circulation module is equipped with a filter device to recover and purify the inert gas in the printing chamber, thereby realizing the recycling of the gas.

[0010] As a preferred technical solution of the present invention, the process database of the intelligent control system stores laser parameters, ultrasonic parameters and gas parameters corresponding to different diamond volume fractions and different heat sink structures. The AI ​​optimization module is based on the "process parameters-microstructure-thermal performance" mapping model, which can automatically optimize the process parameters according to the target performance of the heat sink, and has a real-time parameter adjustment function.

[0011] As a preferred technical solution of the present invention, the online monitoring system further includes a laser ranging module for real-time monitoring of the powder layer thickness and the forming height of the printed part, ensuring that the thickness of each layer is uniform. The sampling frequency of the data acquisition module is ≥1000Hz, which can realize high-frequency data acquisition and storage during the processing.

[0012] As a preferred embodiment of the present invention, the inner wall of the printing chamber is provided with a heat insulation layer to maintain the temperature stability of the processing area and reduce the impact of temperature fluctuations on the molding quality. The waste collection port is provided with a detachable filter screen to separate and recycle unused powder.

[0013] As a preferred embodiment of the present invention, the powder spreading roller of the powder spreading system is made of elastic material and has anti-slip texture on its surface. The distance between the powder spreading roller and the substrate can be precisely adjusted by a servo motor to ensure that the powder spreading thickness error is ≤ ±0.002mm.

[0014] As a preferred embodiment of the present invention, the device further includes a post-processing module, which includes a stress-relief device and a surface polishing device. The stress-relief device is used to eliminate residual stress in the printed parts, and the surface polishing device is used to improve the surface accuracy of the heat sink.

[0015] This invention also discloses the processing principle of the above-mentioned equipment, specifically including the following steps:

[0016] S1. Equipment debugging: Set processing parameters through the intelligent control system, including laser power, scanning speed, scanning spacing, layer thickness, ultrasonic power, ultrasonic frequency, ultrasonic action mode, inert gas flow rate and oxygen content threshold in the printing chamber.

[0017] S2. Raw material preparation: Load copper-coated diamond composite powder into the powder cylinder of the powder spreading system, and fix the processing substrate on the substrate clamp of the worktable system.

[0018] S3. Gas pretreatment: Inert gas is introduced into the printing chamber through the gas control system. After the oxygen content in the printing chamber drops to below 20ppm, the inert gas circulation is maintained.

[0019] S4. Powder Spreading and Processing: The powder spreading system uniformly spreads copper-coated diamond composite powder onto the substrate. The green laser processing system emits a green laser and selectively scans and melts the powder layer under the action of the scanning galvanometer and field mirror. At the same time, the ultrasonic auxiliary system is activated, transmitting ultrasonic vibration to the molten pool through the ultrasonic transmission component. The ultrasonic cavitation effect is used to break dendrites and refine grains, and the acoustic flow effect is used to stir the molten pool, promoting the uniform distribution of diamond particles and the escape of gas.

[0020] S5, Layer stacking: After one layer is processed, the Z-axis motion platform drives the substrate to descend by a layer thickness, and the powder spreading system spreads the next layer of powder. Repeat step S4 until the overall forming of the copper-based diamond heat sink is completed.

[0021] S6. Online monitoring and adjustment: During the processing, the online monitoring system collects data on the molten pool status, temperature field, powder thickness and forming height in real time and transmits it to the intelligent control system. If an abnormality is detected, the AI ​​optimization module automatically adjusts the laser parameters or ultrasonic parameters.

[0022] S7. Post-processing: After printing is completed, wait for the temperature inside the printing chamber to drop to room temperature, remove the printed part, and perform stress relief and surface polishing through the post-processing module to obtain the final copper-based diamond heat sink.

[0023] Compared with the prior art, the present invention provides an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks, which has the following beneficial effects:

[0024] 1. This invention integrates a green laser processing system and an ultrasonic-assisted system to construct a multi-energy field coupled processing system of "ultrasound-green laser-powder". The green laser wavelength is 532nm and the absorption rate of copper can reach more than 70%. Compared with traditional infrared lasers, it can achieve low-power and high-efficiency melting of copper, reducing the risk of diamond graphitization from the heat source perspective. The ultrasonic vibration is transmitted to the molten pool through the substrate coupling structure. By utilizing the cavitation effect and acoustic flow effect, it effectively improves the interfacial wettability between copper and diamond, enhances the interfacial bonding force, reduces the interfacial thermal resistance, refines the grains, eliminates pores, reduces residual stress, and significantly improves the overall performance of the heat sink.

[0025] 2. The ultrasonic-assisted system of this invention can switch between continuous ultrasound and pulsed ultrasound modes. Pulsed ultrasound can be precisely synchronized with the green laser scanning rhythm to achieve efficient energy coupling, reducing energy waste and excessive heat input. The ultrasonic power and frequency can be continuously adjusted to adapt to the processing requirements of different diamond volume fractions and heat sink structures, enhancing the versatility of the equipment.

[0026] 3. This invention is equipped with a high-precision gas control system, which can control the oxygen content in the printing chamber to below 20ppm, effectively preventing copper powder oxidation and diamond graphitization, and ensuring processing quality; at the same time, it integrates an online monitoring system and an intelligent control system, based on a process database and an AI optimization module, to realize automated and intelligent control of the processing process, and can adjust process parameters in real time to improve the consistency and pass rate of printed parts.

[0027] 4. The powder spreading system of this invention adopts an elastic powder spreading roller and a precise spacing adjustment structure to ensure that the powder spreading thickness error is ≤ ±0.002mm. Combined with the high-precision control of the Z-axis motion platform, it can realize ultra-thin layer printing and meet the processing requirements of complex microchannel heat sinks. The equipment also integrates waste recycling and gas circulation functions, which reduces raw material consumption and production costs and conforms to the concept of green manufacturing. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of the ultrasound-assisted green laser device in an embodiment of the present invention;

[0029] Figure 2 This is a bottom view of the printing chamber in an embodiment of the present invention;

[0030] Figure 3 This is a side view of the printing chamber in an embodiment of the present invention;

[0031] Figure 4This is a schematic diagram of the internal cross-sectional structure of the printing chamber in an embodiment of the present invention;

[0032] Figure 5 This is a structural block diagram of the green laser processing system in an embodiment of the present invention;

[0033] Figure 6 This is a structural block diagram of the powder spreading system in an embodiment of the present invention;

[0034] Figure 7 This is a schematic diagram of the connection structure between the ultrasonic auxiliary system and the workbench system in an embodiment of the present invention;

[0035] Figure 8 This is a block diagram of the control system of the device in an embodiment of the present invention.

[0036] In the diagram: 1-Frame, 2-Printing chamber, 3-Green laser processing system, 31-Green laser, 32-Beam shaping module, 33-Scanning galvanometer, 34-Field lens, 4-Ultrasonic auxiliary system, 41-Ultrasonic generator, 42-Ultrasonic transducer, 43-Amplitude bar, 44-Ultrasonic transmission assembly, 441-Transmission pad, 442-Buffer layer, 5-Powder spreading system, 51-Powder cylinder, 52-Powder feeding mechanism, 53-Powder spreading roller, 6-Worktable system, 61 - Z-axis motion platform, 62-substrate clamp, 63-insulation layer, 7-gas control system, 71-inert gas storage tank, 72-gas purification module, 73-flow controller, 74-gas circulation module, 8-intelligent control system, 9-online monitoring system, 91-high-speed camera module, 92-infrared thermal imaging module, 93-data acquisition module, 10-observation window, 11-inspection door, 12-waste collection port, 13-substrate, 14-insulation layer. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] Example

[0039] Please see Figure 1-8 In this embodiment: an ultrasonic-assisted green laser device for processing copper-based diamond heat sinks includes a frame 1, a printing chamber 2, a green laser processing system 3, an ultrasonic-assisted system 4, a powder spreading system 5, a worktable system 6, a gas control system 7, an intelligent control system 8, and an online monitoring system 9.

[0040] The printing chamber 2 is sealed and installed on the frame 1. It has a powder spreading area and a processing area inside. The side wall of the printing chamber 2 is provided with an observation window 10 and an inspection door 11. The bottom is provided with a waste collection port 12. The inner wall of the printing chamber 2 is provided with a heat insulation layer 14 to maintain the temperature stability of the processing area. The waste collection port 12 is provided with a detachable filter screen to separate and recycle unused powder.

[0041] The green laser processing system 3 is installed on the top of the printing chamber 2 and includes a green laser 31, a beam shaping module 32, a scanning galvanometer 33, and a field lens 34. The green laser 31 outputs a green laser with a wavelength of 532nm. The laser power can be adjusted within the range of 100-1000W, the scanning speed is 50-2000mm / s, the scanning spacing is 0.05-0.2mm, and the layer thickness can be precisely controlled within the range of 0.02-0.1mm. The beam shaping module 32 is used to adjust the laser beam quality. The scanning galvanometer 33 and the field lens 34 work together to achieve precise scanning of the laser beam in the processing area.

[0042] The ultrasonic auxiliary system 4 includes an ultrasonic generator 41, an ultrasonic transducer 42, an amplitude transformer 43, and an ultrasonic transmission assembly 44. The ultrasonic transducer 42 is connected to the ultrasonic transmission assembly 44 through the amplitude transformer 43. The ultrasonic transmission assembly 44 is installed below the worktable system 6 and adopts a substrate coupling structure, including a transmission pad 441 and a buffer layer 442. The transmission pad 441 is tightly attached to the bottom of the substrate clamp 62. The buffer layer 442 is disposed between the transmission pad 441 and the amplitude transformer 43 to reduce the interference of ultrasonic vibration on the worktable system 6. The ultrasonic generator 41 is used to adjust the ultrasonic power (0-1000W), frequency (fixed at 20-80kHz), and operating mode (continuous ultrasound or pulsed ultrasound). The pulsed ultrasound can be synchronized with the scanning rhythm of the green laser.

[0043] The powder spreading system 5 is installed on one side inside the printing chamber 2, and includes a powder cylinder 51, a powder feeding mechanism 52, and a powder spreading roller 53. The powder cylinder 51 is used to store copper-coated diamond composite powder, the powder feeding mechanism 52 conveys the powder to the powder spreading area, and the powder spreading roller 53 is made of elastic material with anti-slip texture on its surface. The distance between the powder spreading roller 53 and the substrate 13 can be precisely adjusted by a servo motor to ensure that the powder spreading thickness error is ≤ ±0.002mm.

[0044] The workbench system 6 includes a Z-axis motion platform 61, a substrate clamp 62, and a heat insulation layer 63. The substrate clamp 62 is mounted on the Z-axis motion platform 61 to fix the processed substrate 13. The heat insulation layer 63 is disposed between the substrate clamp 62 and the Z-axis motion platform 61. The conductive pad 441 of the ultrasonic transmission component 44 is connected to the bottom of the substrate clamp 62.

[0045] The gas control system 7 includes an inert gas storage tank 71, a gas purification module 72, a flow controller 73, and a gas circulation module 74. The inert gas is high-purity argon with a purity ≥99.999%, which is used to introduce high-purity inert gas into the printing chamber 2 to maintain the inert gas in the processing area. The oxygen content in the printing chamber 2 can be controlled below 20ppm. The gas circulation module 74 is equipped with a filter device to recover and purify the inert gas in the printing chamber 2.

[0046] The intelligent control system 8 is electrically connected to the green laser processing system 3, the ultrasonic auxiliary system 4, the powder spreading system 5, the worktable system 6, the gas control system 7, and the online monitoring system 9, respectively. It integrates a process database and an AI optimization module. The process database stores process parameters corresponding to different diamond volume fractions and different heat sink structures. The AI ​​optimization module is based on the "process parameter-microstructure-thermal performance" mapping model and can automatically optimize process parameters and adjust them in real time.

[0047] The online monitoring system 9 includes a high-speed camera module 91, an infrared thermal imaging module 92, a laser ranging module, and a data acquisition module 93. The high-speed camera module 91 is used to monitor the flow of the molten pool and the distribution of diamond particles. The infrared thermal imaging module 92 is used to collect temperature field data of the processing area in real time. The laser ranging module is used to monitor the thickness of the powder layer and the forming height of the printed part in real time. The sampling frequency of the data acquisition module 93 is ≥1000Hz, which can realize high-frequency data acquisition and storage during the processing and transmit the data to the intelligent control system 8.

[0048] The device also includes a post-processing module, which includes a stress relief device and a surface polishing device. The stress relief device is used to eliminate residual stress in the printed parts, and the surface polishing device is used to improve the surface accuracy of the heat sink.

[0049] The working principle and usage process of this invention: S1. Equipment debugging: Set the processing parameters through the intelligent control system 8, laser power 300W, scanning speed 500mm / s, scanning spacing 0.1mm, layer thickness 0.05mm, ultrasonic power 500W, ultrasonic frequency 40kHz, adopt pulsed ultrasonic mode and synchronize with laser scanning, inert gas flow rate 20L / min, oxygen content threshold in printing chamber 2 15ppm;

[0050] S2. Raw material preparation: Copper-coated diamond composite powder with a diamond volume fraction of 50% is loaded into the powder cylinder 51 of the powder spreading system 5, and the copper substrate is fixed on the substrate clamp 62 of the worktable system 6.

[0051] S3. Gas pretreatment: High-purity argon gas is introduced into the printing chamber 2 through the gas control system 7. After the oxygen content in the printing chamber 2 drops to below 15ppm, the argon gas circulation is maintained.

[0052] S4. Powder spreading and processing: The powder feeding mechanism 52 of the powder spreading system 5 conveys the copper-coated diamond composite powder to the powder spreading area. The powder spreading roller 53 spreads the powder evenly on the substrate 13. The green laser 31 of the green laser processing system 3 emits green laser light. After being shaped by the beam shaping module 32, the powder layer is selectively scanned and melted by the scanning galvanometer 33 and the field mirror 34. At the same time, the ultrasonic auxiliary system 4 is started. The ultrasonic vibration generated by the ultrasonic generator 41 is transmitted to the molten pool through the ultrasonic transducer 42, the amplitude transformer 43 and the ultrasonic transmission component 44. The ultrasonic cavitation effect is used to break dendrites and refine grains, and the acoustic flow effect is used to stir the molten pool, promoting the uniform distribution of diamond particles and the escape of gas.

[0053] S5, Layer stacking: After one layer is processed, the Z-axis motion platform 61 drives the substrate 13 to drop by 0.05mm, and the powder spreading system 5 spreads the next layer of powder. Repeat step S4 until the overall forming of the copper-based diamond heat sink is completed.

[0054] S6. Online monitoring and adjustment: During the processing, the high-speed camera module 91 of the online monitoring system 9 monitors the state of the molten pool and the distribution of diamond particles, the infrared thermal imaging module 92 collects temperature field data, the laser ranging module monitors the powder thickness and forming height, and the data acquisition module 93 transmits the data to the intelligent control system 8. If the molten pool is found to be unstable, the AI ​​optimization module automatically adjusts the laser power to 280W and the ultrasonic power to 520W.

[0055] S7. Post-processing: After printing, wait for the temperature inside the printing chamber 2 to drop to room temperature, remove the printed part, and perform stress relief treatment (temperature 200℃, heat preservation for 2 hours) and surface polishing through the post-processing module to obtain the final copper-based diamond heat sink. After testing, the heat sink has a density >99.5%, thermal conductivity >600W / mK, diamond graphitization rate <3%, and interfacial thermal resistance is reduced by more than 30% compared with the sample without ultrasonic assistance.

[0056] In the description of this invention, the terms "comprising," "including," or any other variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising a reference structure" does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. It should be noted that, herein, relational terms such as "first," "second," etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0057] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An ultrasonic-assisted green laser equipment for processing copper-based diamond heat sinks, comprising a frame (1), a printing chamber (2), a green laser processing system (3), an ultrasonic-assisted system (4), a powder spreading system (5), a worktable system (6), a gas control system (7), an intelligent control system (8), and an online monitoring system (9), characterized in that: The printing chamber (2) is sealed and installed on the frame (1). It has a powder spreading area and a processing area inside. The side wall of the printing chamber (2) is provided with an observation window (10) and an inspection door (11). The bottom is provided with a waste collection port (12). The green laser processing system (3) is installed on the top of the printing chamber (2) to provide a high-precision, high-absorption laser heat source. It includes a green laser (31), a beam shaping module (32), a scanning galvanometer (33), and a field lens (34). The green laser (31) outputs a green laser with a wavelength of 532nm. The beam shaping module is used to adjust the quality of the laser beam. The scanning galvanometer and the field lens (34) work together to achieve precise scanning of the laser beam in the processing area. The ultrasonic auxiliary system (4) includes an ultrasonic generator (41). The system includes an ultrasonic transducer (42), an amplitude transformer (43), and an ultrasonic transmission assembly (44). The ultrasonic transducer (42) is connected to the ultrasonic transmission assembly (44) via the amplitude transformer (43). The ultrasonic transmission assembly (44) is installed below the workbench system (6) and is used to transmit ultrasonic vibrations to the copper-coated diamond powder and molten pool in the processing area. The ultrasonic generator (41) is used to adjust the ultrasonic power, frequency, and operating mode. The powder spreading system (5) is installed on one side inside the printing chamber (2) and includes a powder cylinder (51), a powder feeding mechanism (52), and a powder spreading roller (53). The powder cylinder (51) is used to store copper-coated diamond composite powder. The powder feeding mechanism (52) transports the powder to the powder spreading area. The powder spreading roller (53) is used to evenly spread the powder on the workbench system. On the substrate of the table system, the table system (6) includes a Z-axis motion platform (61), a substrate clamp (62), and a heat insulation layer (63). The substrate clamp (62) is mounted on the Z-axis motion platform (61) and the substrate (13) is fixedly mounted thereon. The heat insulation layer (63) is disposed between the substrate clamp (62) and the Z-axis motion platform (61). The ultrasonic transmission component (44) is connected to the bottom of the substrate clamp (62) to realize the efficient transmission of ultrasonic vibration to the substrate (13) and the powder layer. The gas control system (7) includes an inert gas storage tank (71), a gas purification module (72), a flow controller (73), and a gas circulation module (74) for introducing high-purity inert gas into the printing chamber (2) to maintain the inertness of the processing area. The system uses a gas to prevent copper powder oxidation and diamond graphitization. The intelligent control system (8) is electrically connected to the green laser processing system (3), ultrasonic auxiliary system (4), powder spreading system (5), worktable system (6), gas control system (7), and online monitoring system (9) to achieve coordinated control of each system. It integrates a process database and AI optimization module, which can automatically match the optimal process parameters according to the heat sink processing requirements. The online monitoring system (9) includes a high-speed camera module (91), an infrared thermal imaging module (92), and a data acquisition module (93). The high-speed camera module (91) is used to monitor the flow of the molten pool and the distribution of diamond particles. The infrared thermal imaging module (92) is used to collect temperature field data of the processing area in real time.The data acquisition module (93) transmits the monitoring data to the intelligent control system (8), providing data support for process parameter optimization.

2. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The ultrasonic transmission component (44) adopts a substrate coupling structure, including a transmission pad (441) and a buffer layer (442). The transmission pad (441) is tightly attached to the bottom of the substrate clamp (62). The buffer layer (442) is disposed between the transmission pad (441) and the amplitude transformer (43) to reduce the interference of ultrasonic vibration on the worktable system (6) and ensure the efficient transmission of ultrasonic energy.

3. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The ultrasonic frequency of the ultrasonic-assisted system (4) is fixed at 20-80kHz, and the ultrasonic power can be continuously adjusted within the range of 0-1000W. The operating modes include continuous ultrasound and pulse ultrasound. The pulse ultrasound can be synchronized with the scanning rhythm of the green laser to achieve precise coordination of "laser scanning-ultrasonic action".

4. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The laser power of the green laser processing system (3) can be adjusted in the range of 100-1000W, the scanning speed is 50-2000mm / s, the scanning spacing is 0.05-0.2mm, and the layer thickness can be precisely controlled in the range of 0.02-0.1mm, so as to meet the processing requirements of copper-based diamond heat sinks with different precision requirements.

5. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The inert gas of the gas control system (7) is high-purity argon or nitrogen with a purity of ≥99.999%. The oxygen content in the printing chamber can be controlled below 20ppm. The gas circulation module is equipped with a filter device to recover and purify the inert gas in the printing chamber, so as to realize the recycling of gas.

6. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The intelligent control system (8) has a process database that stores laser parameters, ultrasonic parameters and gas parameters corresponding to different diamond volume fractions and different heat sink structures. The AI ​​optimization module is based on the "process parameters-microstructure-thermal performance" mapping model, which can automatically optimize process parameters according to the target performance of the heat sink and has a real-time parameter adjustment function.

7. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The online monitoring system (9) also includes a laser ranging module, which is used to monitor the thickness of the powder layer and the forming height of the printed parts in real time, so as to ensure that the thickness of each layer is uniform. The sampling frequency of the data acquisition module is ≥1000Hz, which can realize high-frequency data acquisition and storage during the processing.

8. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The printing chamber (2) has an insulation layer (14) on its inner wall to maintain the temperature stability of the processing area and reduce the impact of temperature fluctuations on the molding quality. The waste collection port (12) is equipped with a detachable filter screen to separate and recycle unused powder.

9. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The powder spreading system (5) uses an elastic material for its powder spreading roller (53), and its surface is provided with anti-slip texture. The distance between the powder spreading roller (53) and the substrate (13) can be precisely adjusted by a servo motor to ensure that the powder spreading thickness error is ≤ ±0.002mm.

10. The ultrasonic-assisted green laser device for processing copper-based diamond heat sinks according to claim 1, characterized in that: The device also includes a post-processing module, which includes a stress-relief device and a surface polishing device. The stress-relief device is used to eliminate residual stress in the printed parts, and the surface polishing device is used to improve the surface accuracy of the heat sink.

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