Test gas sensor device and test gas leak detection method

JP2026511846APending Publication Date: 2026-04-14INFICON GMBH
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
INFICON GMBH
Filing Date
2024-04-03
Publication Date
2026-04-14

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  • Figure 2026511846000001_ABST
    Figure 2026511846000001_ABST
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Abstract

Providing a test gas sensor device for measuring test gases. [Solution] A test gas sensor device (12) for detecting a test gas leak in a test gas leak detection using the spray principle, comprising: a measuring sensor (14) for measuring the test gas concentration at a measurement position (46); an electronic signal processing device (18) configured to compare at least one measurement value recorded by the measuring sensor (14) with a reference value and generate an electronic control signal when the measurement signal exceeds a threshold value which depends on the reference value; and an indicator device (20) connected to the signal processing device (18), which is configured to output an optical and / or acoustic indicator signal when it receives a control signal as soon as the measurement signal exceeds a threshold value.
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Claims

1. A test gas sensor device (12) for detecting a test gas in a test gas leak detection using the spray principle, A measuring sensor (14) for measuring the test gas concentration at the measurement position (46), An electronic signal processing device (18) is configured to compare at least one measurement value recorded by the measurement sensor (14) with a reference value and generate an electronic control signal when the measurement signal exceeds a threshold value which depends on the reference value, An indicator device (20) connected to the signal processing device (18), wherein the indicator device (20) is configured to output an optical and / or acoustic indicator signal when it receives the control signal as soon as the measurement signal exceeds the threshold, and A test gas sensor device (12) equipped with the following:

2. The test gas sensor device (12) according to claim 1, further comprising a reference sensor (16) for measuring the reference value as the concentration, temperature, or humidity of the test gas in the atmosphere surrounding the measurement position (46).

3. The test gas sensor device (12) according to claim 1 or 2, characterized in that the signal processing device (18) comprises an electronic amplification circuit.

4. The test gas sensor device (12) according to any one of claims 1 to 3, characterized in that the indicator device (20) comprises a light source (22) for outputting an optical signal and / or a loudspeaker for outputting an acoustic signal.

5. The test gas sensor device (12) according to any one of claims 1 to 4, characterized in that the test gas sensor device (12) comprises a housing that includes at least a part of the indicator device (20) and / or a part of the signal processing device (18), and a reference sensor (16) and the measurement sensor (14) are arranged in the housing.

6. The test gas sensor device (12) according to claim 5, characterized in that the measuring sensor (14) and the reference sensor (16) are arranged adjacent to each other.

7. The test gas sensor device (12) according to any one of claims 1 to 6, characterized in that the housing (26) comprises a voltage source (24) for supplying power to the signal processing device (18) and / or the indicator device (20).

8. The test gas sensor device (12) according to any one of claims 1 to 7, characterized in that the light source (22) and / or the speaker are arranged in the housing (26) such that the instruction signal is output to the outside of the housing (26).

9. The test gas sensor device (12) according to any one of claims 1 to 8, characterized in that the housing (26) is formed in an elongated pen shape and comprises, in order along its longitudinal direction, the voltage source (24), the indicator device (20), the signal processing device (18), the reference sensor (16), and / or the measurement sensor (14).

10. The test gas sensor device (12) according to claim 9, characterized in that the reference sensor (16) and the measuring sensor (14) are arranged at the distal end of the elongated housing (26).

11. The test gas sensor device (12) according to any one of claims 1 to 10, characterized in that the housing (26) comprises a gripping portion (28) for wrapping the housing (26) with the hand, and an indicator portion (30) for the indicator device (20) protruding from the gripping portion (28), and the reference sensor (16) and / or the measuring sensor (14) are arranged at the end of the indicator portion (30) opposite to the gripping portion (28).

12. A leak detection device (10) comprising a test gas detector (38) adapted to be connected to a test specimen (44), and a vacuum pump (40) connected to the test gas detector (38) for exhausting gas from the test specimen (44), The test piece (44) is provided with a spray probe (34) connected to the test gas source (36) for spraying the test gas at the measurement position (46), A test gas sensor device (12) according to any one of claims 1 to 11 and A leak detection device (10) equipped with the following:

13. The leak detection device (10) according to claim 12, characterized in that the test gas sensor device (12) is connected to the spray probe (34) and / or the test gas detector (38) by an electronic data connection (48) in order to transmit the control signal and output an optical and / or acoustic signal at the spray probe (34) and / or the test gas detector (38) when the threshold is exceeded.

14. A method for detecting a test gas leak using a leak detection device (10) according to any one of claims 1 to 13, The steps include: spraying a test gas onto the test piece (44) at the measurement position (46) using the spray probe (34); The steps include: exhausting gas from the test piece (44) during spraying, and analyzing the gas exhausted from the test piece with the test gas detector (38); The steps include recording the measured value and detecting the test gas at the measurement position (46) using the test gas sensor device (12) by comparing the measured value with a reference value, The steps include outputting an optical and / or acoustic indicator signal as soon as the measurement signal exceeds a threshold, When the instruction signal is output, the step of spraying at the measurement position (46) with the spray probe (34) is terminated. A method characterized by the following.

15. The method according to the claim, characterized in that, after comparing the measured value with a reference value, an electronic control signal is generated when the measured value exceeds a threshold value of the measurement signal which depends on the reference value, and the instruction signal is output immediately when the measurement signal exceeds the threshold value.

16. The steps include recording the aforementioned reference value as the concentration, temperature, or humidity of the test gas in the atmosphere surrounding the measurement position (46) using the test gas sensor device (12), The steps include storing the aforementioned reference value, The steps include comparing the recorded measurement value with the stored reference value, The steps include: generating an electronic control signal when the measured value exceeds a threshold value that is dependent on the reference value of the measurement signal; The method according to claim 14 or 15, characterized by the step of outputting an optical and / or acoustic instruction signal as soon as the measurement signal exceeds the threshold.

17. The steps include: recording the measured value of the test gas detector in the leak detection device; recording the measured value of the test gas concentration at the test location by the test gas sensor device (12); transferring the measured value of the test gas concentration at the test location by the test gas sensor device (12) to the test gas detector (38); calculating the measured leak from the measurement signal of the test gas detector (38) in the leak detection device and the test gas concentration measured at the test location; and outputting the value calculated from the test gas concentration and the measured value of the test gas detector. A method according to any one of claims 1 to 16, characterized by the above.

18. The measurement value recorded by the test gas sensor device (12) is the first measurement value. The steps include recording a second measurement value of the gas exhausted from the test piece (44) using the test gas detector (38), A step of determining the leakage rate of the test piece (44) from the first measurement signal and the second measurement signal. A method according to any one of claims 1 to 17, characterized by the above.

19. The method according to the claim, characterized in that the first measurement value is transmitted to the test gas detector (38), and the test gas detector (38) determines and outputs the value of the leakage rate.