Carbon-based coating used on the surface of a cutter, method for manufacturing the same, and cutter.

Abstract

The present application provides a carbon-based coating used on the surface of a cutter, a method for manufacturing the same, and a cutter. 【Means】The carbon-based coating includes, in order from the surface of the cutter to the outside, a carbon layer with a high content of sp 3 bonding, a gradient layer, and a carbon layer with a high content of sp 2 bonding. The content of sp 3 bonding in the carbon layer with a high content of sp 3 bonding is 50 to 80%. The content of sp 2 bonding in the carbon layer with a high content of sp 2 bonding is 50 to 80%. The gradient layer has a decreasing content of sp 3 bonding from the inside to the outside. The present application provides a carbon layer mainly composed of sp 3 bonding and a carbon layer mainly composed of sp 2 bonding respectively. The former provides high hardness and wear resistance, and the latter has a low friction coefficient and good lubricity. By providing a gradient layer between the two carbon layers, the present application realizes a gradient transition of the properties of both, avoids the problem of poor bonding, improves stability, reduces the internal stress in the coating, avoids the risk of being easily crushed, realizes thick deposition, and the carbon-based coating has a simple structure, stable performance, low cost, and a wide application range.

Description

[Technical Field]

[0001] This application relates to the technical field of cutter coatings, and more particularly to a carbon-based coating used on the surface of a cutter, a method for manufacturing the same, and a cutter. [Background technology]

[0002] Printed circuit boards are the carriers of the modern information industry. As information transmission develops towards higher frequencies, higher speeds, and lower losses, the thickness and proportion of hard fillers in printed circuit boards are gradually increasing, the number of micro-holes is gradually increasing, and the viscosity of modified resins is rising. This leads to increased wear on micro-drills used for mechanical drilling, making chip evacuation difficult, and in severe cases, the cutter may break, affecting the processing efficiency and quality of printed circuit boards. Therefore, it is necessary to improve the wear resistance of micro-cutters to extend their service life, and the surface of the drill must have high lubricity to improve chip evacuation performance and prevent cutter breakage due to dust clogging.

[0003] Coating technology is one of the most effective means of improving the surface performance of materials, and performance requirements for coatings typically include hardness, wear resistance, and friction coefficient. Conventional wear-resistant coatings are usually metal coatings or ceramic coatings, such as TiAlN, CrAlN, or TiSiN. While these coatings have high hardness and excellent wear resistance, they also have a high friction coefficient and cannot meet the requirement for good chip evacuation. Diamond-like coatings, as a type of self-lubricating coating, have the characteristics of high hardness and low friction coefficient and are widely applied in cutter coating processes. However, their internal stress is high, and if the coating is made thick, it is prone to cracking or shattering, making it difficult to manufacture thick coatings. On the other hand, if the coating is too thin, the improvement in the wear resistance of the cutter is limited, affecting its service life.

[0004] CN101432462A discloses a coated substrate having a multilayer structure including a tetrahedral carbon layer and a soft outer layer, the multilayer structure comprising an adhesion-promoting layer, an intermediate layer and an amorphous carbon layer, the intermediate layer comprising a tetrahedral carbon layer with a Young's modulus greater than 200 GPa and a sp ratio greater than 50% 3 It has a bonded carbon content, contains non-hydrogenated tetrahedral carbon or hydrogenated tetrahedral carbon, and the Young's modulus of the amorphous carbon layer is lower than 200 GPa and lower than 40% sp 3 The material contains bonded carbon and includes amorphous carbon hydride or diamond-like nanocomposite layers. In this multilayer structure, the tetrahedral carbon layer and the amorphous carbon layer are in direct contact, and the change in their performance is abrupt. This easily leads to a decrease in bond strength, and problems such as structural layer fracture or separation are likely to occur during application, affecting the service life.

[0005] CN103317793A discloses a diamond-like nanocomposite coating cutter and a method for manufacturing the same, wherein a connecting layer, a gradient layer, and a main wear-resistant layer are sequentially attached to the substrate of the cutter from inside to outside. The connecting layer is molybdenum, the gradient layer is attached to the connecting layer and is a Mo-C layer, with the carbon content in the gradient layer gradually increasing from inside to outside, the main wear-resistant layer is attached to the gradient layer and is a diamond-like coating doped with molybdenum carbide, i.e., a MoC-DLC layer. The diamond-like coating in the composite coating is located on the outermost side and the structural layer mainly plays a wear-resistant role, but still sp 3 It belongs to a structural layer with a high bond content, resulting in high internal stress. When the coating is thickened, it becomes prone to fracture, cannot achieve long-term wear resistance, and has a short lifespan.

[0006] In summary, regarding the selection of carbon-based coatings for the cutter surface, sp 3 Bonding and sp 2 Depending on the bonding characteristics, different carbon-based structural layers are required to ensure hardness and wear resistance, reduce the coefficient of friction, improve lubricity, and achieve a thick coating. [Overview of the project]

Problems to be Solved by the Invention

[0007] The following is an overview of the subject matter described in detail in this specification. This overview does not limit the scope of the claims.

[0008] This application provides a carbon-based coating used on the surface of a cutter, a method for manufacturing the same, and a cutter. The carbon-based coating has sp 3 bonding and sp 2 bonding. Depending on the difference in the content of sp 3 bonding or sp 2 bonding, a carbon layer mainly composed of sp 3 bonding or sp 2 bonding is provided respectively. The former provides high hardness and wear resistance, and the latter has a low friction coefficient, good lubricity, and a gradient layer is provided between the two to achieve a gradient transition of the properties of the two, avoiding the problem of poor bonding due to the large difference in properties, being prone to delamination or breakage, and improving the stability of the carbon-based coating.

Means for Solving the Problems

[0009] In Embodiment 1, this application sequentially includes a carbon layer with a high content of sp 3 bonding, a gradient layer, and a carbon layer with a high content of sp 2 bonding from the surface of the cutter to the outside. The content of sp 3 bonding in the carbon layer with a high content of sp 3 bonding is 50 - 80%, for example, 50%, 55%, 60%, 65%, 70%, 75% or 80% etc., and the content of sp 2 bonding in the carbon layer with a high content of sp 2 bonding is 50 - 80%, for example, 50%, 55%, 60%, 65%, 70%, 75% or 80% etc., but is not limited to the listed values, and other unlisted values within each numerical range are equally applicable. The gradient layer has the content of sp 3 bonding decreasing from high to low from the inside to the outside, and sp 2The order is from the lowest bond content to the highest bond content. This invention provides a carbon-based coating for use on the surface of a cutter.

[0010] In this application, the selection of the structure of the carbon-based coating on the surface of the cutter is determined according to the performance requirements, sp 3 Carbon layers and sp with high bond content 2 Each carbon layer had a high bond content. 3 The bond has a diamond structure, and the carbon sp 2 The bond is a graphite structure, and the difference in the ratio of the two affects the performance of the coating; the former is located on the substrate side of the cutter, sp 3 It has a high bond content, high hardness, and excellent wear resistance; the latter is located on the air side, sp 2 The bonding content is high, the coefficient of friction is low, and the lubrication performance is superior. In this application, a gradient layer is provided between the two, that is, sp 3 Bonding and sp 2 The bond content changes gradually, achieving a transition in performance between the two carbon layers, avoiding the problem of poor bonding due to large differences in performance, improving the stability of the carbon-based coating, reducing internal stress in the coating, avoiding the risk of fracturing by increasing the coating thickness, and enabling thick deposition. The carbon-based coating has a simple structure, stable performance, low cost, and a wide range of applications.

[0011] In this application, sp in the carbon layer 3 The bond content test involves measuring the carbon layer at different depths from the surface of the coating towards the cutter. 3 The bond content was determined by etching the carbon-based coating with argon ions to a certain thickness, obtaining the surface of the carbon-based coating to the corresponding depth, and by using X-ray photoelectron spectroscopy to determine the sp in the coating. 3 Bonding and sp 2 sp as a percentage of the total amount of bonds 3 This includes measuring the proportion of carbon atoms in the bond.

[0012] The following are preferred technical proposals for this application, but are not intended to limit the technical proposals of this application. The technical objectives and beneficial effects of this application can be better achieved and realized by the following technical proposals.

[0013] As a preferred technical solution of the present invention, the sp 3 The thickness of the carbon layer with a high bond content is 0.1 to 5 μm, for example, 0.1 μm, 0.5 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm, or 5 μm, but it is not limited to the listed values, and other values ​​within that range that are not listed also apply.

[0014] In one embodiment, the sp 3 The hardness of carbon layers with a high bond content is 45-65 GPa, for example, 45 GPa, 50 GPa, 55 GPa, 60 GPa, or 65 GPa, but is not limited to the listed values, and other values ​​within that range that are not listed also apply.

[0015] In one embodiment, the sp 2 The thickness of the carbon layer with a high bond content is 0.1 to 5 μm, for example, 0.1 μm, 0.5 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm, or 5 μm, but it is not limited to the listed values, and other values ​​within that range that are not listed also apply.

[0016] In one embodiment, the sp 2 The hardness of carbon layers with a high bond content is 20-45 GPa, for example, 20 GPa, 25 GPa, 30 GPa, 35 GPa, 40 GPa, or 45 GPa. However, it is not limited to the listed values, and other values ​​within this range that are not listed also apply.

[0017] In this application, the hardness of the carbon layer is detected by a nanoindenter.

[0018] In one embodiment, the thickness of the gradient layer is 0.1 to 3 μm, for example, 0.1 μm, 0.5 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, or 3 μm, but is not limited to the listed values, and other values ​​within the range that are not listed are also applicable.

[0019] In one embodiment, sp in the gradient layer 3 The amount of binding is sp 3 sp in a carbon layer with a high bond content 3 From the content of the bond, sp 2 sp in a carbon layer with a high bond content 3 The amount of binding agents decreases.

[0020] In one embodiment, sp in the gradient layer 3 Bond content or sp 2 The bond content is either a continuous gradient or a gradient gradient.

[0021] In one embodiment, in the case of the continuous gradient, sp 3 Bond content or sp 2 The bond content changes either linearly at a constant rate or nonlinearly.

[0022] In one embodiment, in the case of the gradient, the gradient layer is sp 3 It consists of at least two gradient layers with different bond content.

[0023] In one embodiment, the thickness of a single gradient layer is 0.02 to 1 μm, for example, 0.02 μm, 0.05 μm, 0.1 μm, 0.3 μm, 0.5 μm, 0.6 μm, 0.8 μm, or 1 μm, but is not limited to the listed values, and other values ​​within that range that are not listed are also applicable.

[0024] In this application, sp in the gradient layer 3 Bond content or sp 2As the bond content changes, the corresponding hardness also changes, and the trend of this change is sp 3 The bond content decreases continuously or gradually, and simultaneously, sp 2 The bond content increases continuously or gradiently, and the hardness of the coating gradually decreases, that is, in a gradient layer, sp 3 Bonding and sp 2 Gradient transitions are achieved by controlling the proportion of the coating of the bond, and these are divided into continuous gradients and gradient gradients. In the case of a continuous gradient, sp 3 The bond content decreases along the thickness direction, and the rate curve may be linear and constant velocity, or it may be nonlinear, as shown in Figure 1. In the case of a gradient, the gradient layer is sp 3 It consists of multiple structural layers with different bond content, and sp between adjacent gradient layers. 3 The difference in bond content and the thickness of the single layer may or may not be equal, as shown in Figure 2.

[0025] In this application, the hardness of the carbon-based coating is 20 to 65 GPa, for example 20 GPa, 25 GPa, 30 GPa, 35 GPa, 40 GPa, 45 GPa, 50 GPa, 55 GPa, 60 GPa, or 65 GPa, and the overall thickness is 0.5 to 8 μm, for example 0.5 μm, 1 μm, 2 μm, 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, or 8 μm.

[0026] As a preferred technical solution of the present invention, the sp 2 Carbon layers with a high bond content include pure carbon coatings or element-doped carbon coatings.

[0027] In one embodiment, the doped elements include one or at least two combinations of silicon, nitrogen, hydrogen, chromium, titanium, tantalum, molybdenum, niobium, or aluminum. Typical examples of such combinations include, but are not limited to, combinations of silicon and nitrogen, chromium and titanium, nitrogen and aluminum, silicon, titanium and tantalum, tantalum, molybdenum and niobium, etc.

[0028] In one embodiment, the carbon-based coating further includes an adhesive layer located between the carbon-based coating and the surface of the cutter.

[0029] In one embodiment, the material of the adhesive layer includes one or at least two of the following: an element, a corresponding elemental nitride, a corresponding elemental carbide, or a corresponding elemental carbidrid. Typical examples of such combinations include, but are not limited to, a combination of an element and a corresponding elemental nitride, a combination of a corresponding elemental nitride and a corresponding elemental carbide, a combination of a corresponding elemental carbide and a corresponding elemental carbidrid, or a combination of an element, a corresponding elemental nitride, and a corresponding elemental carbide.

[0030] In one embodiment, the element comprises one or at least two of the following elements: chromium, titanium, molybdenum, tungsten, tantalum, vanadium, or silicon. Typical examples of such combinations include, but are not limited to, a combination of chromium and titanium, a combination of tungsten and tantalum, a combination of titanium and silicon, or a combination of molybdenum, tungsten, and tantalum.

[0031] In one embodiment, the number of adhesive layers is at least one, for example, one, two, or three layers, and the thickness of each adhesive layer is 0.1 to 1 μm, for example, 0.1 μm, 0.3 μm, 0.5 μm, 0.6 μm, 0.8 μm, or 1 μm, but is not limited to the listed values, and other values ​​within the range that are not listed are also applicable.

[0032] In this application, the bonding strength between the carbon-based coating and the surface of the cutter is improved by providing an adhesive layer. However, the adhesive layer can be a single layer or multiple layers, and a combination of different materials can be selected for the multiple layers.

[0033] In aspect 2, the present application is, After fixing the cutter drill, a vacuum is created, protective gas is circulated to control the pressure, the magnetron sputtering cathode and magnetically tuned multi-arc cathode are activated, the cathode current is controlled, and sputtering occurs on the surface of the cutter drill. 3 Step (1) involves depositing a carbon layer with a high bond content, Step (2) involves adjusting the current of the magnetron sputtering cathode to be continuously increased and the current of the magnetically tuned multi-arc cathode to be continuously decreased, thereby depositing and obtaining a gradient layer. Based on step (2), the current of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode is continuously controlled and deposited sp 2 The process includes (3) obtaining a carbon layer with a high bond content to obtain a carbon-based coating, The present invention provides a method for manufacturing the above-mentioned carbon-based coating.

[0034] In this application, sp in carbon-based coatings 3 Bonding and sp 2 The control of the bond content is achieved by adjusting the proportion of carbon atoms and carbon ions that reach the surface of the cutter, and the higher the proportion of carbon atoms, the more sp in the coating. 2The higher the bond content and the greater the proportion of carbon ions, the greater the sp in the coating. 3 The bond content increases. Here, carbon atoms are obtained by a glow discharge method using a magnetron sputtering cathode, and the greater the current or power of the magnetron sputtering cathode, the greater the amount of carbon atoms generated. Carbon ions are obtained by an arc discharge method using a magnetically tuned multi-arc cathode, and the greater the current or power of the magnetically tuned multi-arc cathode, the greater the amount of carbon ions generated. In other words, the ratio of carbon atoms and carbon ions requires the cooperative adjustment control of the two cathodes. A certain narrow angle is formed between the magnetron sputtering cathode and the magnetically tuned multi-arc cathode, and the angle range can be selected from 20 to 180 degrees, for example, 20 degrees, 40 degrees, 60 degrees, 90 degrees, 120 degrees, 135 degrees, 150 degrees, or 180 degrees. The angle between the central axes of the two intersects near the surface of the cutter, ensuring that carbon atoms and carbon ions do not deposit sequentially but reach the surface simultaneously. Furthermore, the magnetron sputtering cathode and the magnetically tuned multi-arc cathode are arranged in pairs, and multiple pairs can be provided depending on the device structure and coating needs, and are positioned around the outer circumference of the device.

[0035] As a preferred technical method of the present invention, the cutter drill described in step (1) is first cleaned before fixing, and the cleaning includes ultrasonic cleaning.

[0036] In one embodiment, the medium used for cleaning includes one or at least two of acetone, alcohol, or water, and typical examples of such combinations include, but are not limited to, a combination of acetone and alcohol, a combination of alcohol and water, or a combination of acetone, alcohol, and water. Optionally, all three may be used sequentially, or the medium may be used alone.

[0037] In one embodiment, the washing time is independently 10 to 60 minutes, for example, 10 min, 20 min, 30 min, 40 min, 50 min, or 60 min, but is not limited to the listed numbers, and other numbers within that range that are not listed are also applicable.

[0038] In one embodiment, the cutter drill is cleaned and then dried.

[0039] In one embodiment, the cutter drill described in step (1) is placed in a vacuum chamber and fixed to a jig.

[0040] In one embodiment, the pressure after the vacuuming described in step (1) is 1.0 × 10⁻⁶ -2 It drops below Pa, for example, 1.0 × 10⁻⁶ -2 Pa, 8.0 × 10 -3 Pa, 6.0 × 10 -3 Pa, 5.0 × 10 -3 Pa, 4.0 × 10 -3 Pa, 2.0 × 10 -3 Pa or 1.0 × 10 -3 The values ​​are Pa, etc., but are not limited to the listed numbers; other numbers within that range that are not listed also apply.

[0041] In one embodiment, the protective gas described in step (1) includes an inert gas.

[0042] In one embodiment, the pressure after the protective gas is vented in step (1) is 0.1 to 5 Pa, for example, 0.1 Pa, 0.5 Pa, 1 Pa, 1.5 Pa, 2 Pa, 2.5 Pa, 3 Pa, 4 Pa, or 5 Pa, but is not limited to the listed values, and other values ​​within that range that are not listed are also applicable.

[0043] In one embodiment, the current of the magnetron sputtering cathode described in step (1) is 0.1 to 2A, for example, 0.1A, 0.3A, 0.5A, 0.8A, 1A, 1.2A, 1.5A, 1.8A, or 2A, but is not limited to the listed values, and other values ​​within the range not listed are also applicable.

[0044] In one embodiment, the power of the magnetron sputtering cathode described in step (1) is 0.05 to 3 kW, for example, 0.05 kW, 0.1 kW, 0.5 kW, 1 kW, 1.5 kW, 2 kW, 2.5 kW, or 3 kW, but is not limited to the listed values, and other values ​​within the range not listed are also applicable.

[0045] In one embodiment, the current of the magnetically tuned multi-arc cathode described in step (1) is 70 to 300 A, for example, 70 A, 100 A, 120 A, 150 A, 180 A, 200 A, 220 A, 250 A, 270 A, or 300 A, but is not limited to the listed values, and other values ​​within the range that are not listed are also applicable.

[0046] In one embodiment, the power of the magnetically tuned multi-arc cathode described in step (1) is 0.5 to 20 kW, for example, 0.5 kW, 1 kW, 3 kW, 5 kW, 8 kW, 10 kW, 12 kW, 15 kW, 18 kW, or 20 kW, but is not limited to the listed values, and other values ​​within the range not listed are also applicable.

[0047] In one embodiment, step (1) is described in sp 3 The deposition time for carbon layers with a high bond content is 5 to 60 minutes, for example, 5 min, 10 min, 20 min, 30 min, 40 min, 50 min, or 60 min, but is not limited to the listed values, and other values ​​within that range that are not listed also apply.

[0048] As a preferred technical example of this application, the sp described in step (1) 3Before depositing a carbon layer with a high bond content, an adhesive layer is first deposited on the surface of the cutter drill.

[0049] In one embodiment, a magnetically adjustable multi-arc cathode is selected according to the material of the adhesive layer, and different atmospheric conditions and currents are controlled.

[0050] In one embodiment, when the adhesive layer is made of a single material, a protective gas is vented to control the pressure to 0.1-5 Pa, for example, 0.1 Pa, 0.5 Pa, 1 Pa, 1.5 Pa, 2 Pa, 2.5 Pa, 3 Pa, 4 Pa, or 5 Pa, and the current of the magnetically tuned multi-arc cathode is set to 20-300 A, for example, 20 A, 50 A, 70 A, 100 A, 120 A, 150 A, 180 A, 200 A, 220 A, 250 A, 270 A, or 300 A, but the values ​​are not limited to those listed, and other values ​​within each numerical range that are not listed are also applicable.

[0051] In one embodiment, when the material of the adhesive layer is a corresponding elemental nitride, nitrogen gas is passed through to control the pressure to 0.5 to 5 Pa, for example, 0.5 Pa, 1 Pa, 1.5 Pa, 2 Pa, 2.5 Pa, 3 Pa, 4 Pa, or 5 Pa, and the current of the magnetically tuned multi-arc cathode is set to 20 to 300 A, for example, 20 A, 50 A, 70 A, 100 A, 120 A, 150 A, 180 A, 200 A, 220 A, 250 A, 270 A, or 300 A, but the values ​​are not limited to those listed, and other values ​​within each numerical range that are not listed are also applicable.

[0052] In one embodiment, when the material of the adhesive layer is a corresponding elemental carbide, a carbon-containing gas is passed through to control the pressure to 0.2 to 5 Pa, for example, 0.2 Pa, 0.5 Pa, 1 Pa, 1.5 Pa, 2 Pa, 2.5 Pa, 3 Pa, 4 Pa, or 5 Pa, and the current of the magnetically tuned multi-arc cathode is set to 20 to 300 A, for example, 20 A, 50 A, 70 A, 100 A, 120 A, 150 A, 180 A, 200 A, 220 A, 250 A, 270 A, or 300 A, but the values ​​are not limited to those listed, and other values ​​within each numerical range that are not listed are also applicable.

[0053] In one embodiment, when the material of the adhesive layer is a corresponding single carbidine nitride, a mixed gas of carbon-containing gas and nitrogen gas is passed through to control the pressure to 0.5 to 5 Pa, for example, 0.5 Pa, 1 Pa, 1.5 Pa, 2 Pa, 2.5 Pa, 3 Pa, 4 Pa, or 5 Pa, and the current of the magnetically adjusted multi-arc cathode is set to 20 to 300 A, for example, 20 A, 50 A, 70 A, 100 A, 120 A, 150 A, 180 A, 200 A, 220 A, 250 A, 270 A, or 300 A, but the values ​​are not limited to those listed, and other values ​​within each numerical range that are not listed are also applicable.

[0054] In one embodiment, the carbon-containing gas includes acetylene and / or methane.

[0055] In one embodiment, if the adhesive layer includes two or more layers, the single-layer deposition processes described above are combined and superimposed.

[0056] In this application, depending on the type of adhesive layer selected, in addition to the corresponding single target material, nitrides, carbides, or carbidinenitrides require corresponding atmospheric conditions, such as a nitrogen-containing gas or a carbon-containing gas. For the former, nitrogen gas can be selected, and for the latter, a simple organic gas such as methane or acetylene can be selected.

[0057] In a preferred technical application of the present invention, the current of the magnetron sputtering cathode described in step (2) is continuously increased from 0.1 to 2A (e.g., 0.1A, 0.3A, 0.5A, 0.8A, 1.0A, 1.2A, 1.5A, 1.8A, or 2.0A, etc.) to 20 to 30A (e.g., 20A, 22A, 24A, 25A, 27A, 28A, or 30A, etc.), and is not limited to the listed values, but applies similarly to other unlisted values ​​within each numerical range.

[0058] In one embodiment, the current of the magnetically tuned multi-arc cathode described in step (2) is continuously reduced from 70 to 300 A (e.g., 70 A, 90 A, 100 A, 120 A, 150 A, 180 A, 200 A, 250 A, or 300 A, etc.) to 20 to 80 A (e.g., 20 A, 30 A, 40 A, 50 A, 60 A, 70 A, 80 A, etc.), and is not limited to the listed values, but applies equally to other unlisted values ​​within each numerical range.

[0059] In one embodiment, the currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode described in step (2) are either continuously changing or gradient changing.

[0060] In one embodiment, the deposition time for the gradient layer described in step (2) is 2 to 120 min, for example, 2 min, 5 min, 10 min, 20 min, 30 min, 45 min, 60 min, 80 min, 100 min, or 120 min, but is not limited to the listed numbers, and other numbers within the range that are not listed are also applicable.

[0061] In this application, the deposition of the gradient layer is sp 3 Bonding and sp 2 Due to changes in the bond content, the conditions such as the current and power of the corresponding cathode need to change in real time, and both also have a corresponding relationship, however, sp 3 Bonding and sp 2Based on a gradient scheme for the coupling content, it is determined whether the current and power of different cathodes change continuously or gradient-wise.

[0062] In one embodiment, the current of the magnetron sputtering cathode described in step (3) is 20 to 30 A, for example, 20 A, 22 A, 24 A, 25 A, 26 A, 28 A, or 30 A, but is not limited to the listed values, and other values ​​within the range that are not listed are also applicable.

[0063] In one embodiment, the power of the magnetron sputtering cathode described in step (3) is 10 to 30 kW, for example, 10 kW, 12 kW, 15 kW, 18 kW, 20 kW, 22 kW, 25 kW, 27 kW, or 30 kW, but is not limited to the listed values, and other values ​​within the range not listed are also applicable.

[0064] In one embodiment, the current of the magnetically tuned multi-arc cathode described in step (3) is 20 to 30 A, for example, 20 A, 22 A, 24 A, 25 A, 26 A, 28 A, or 30 A, but is not limited to the listed values, and other values ​​within the range that are not listed are also applicable.

[0065] In one embodiment, the power of the magnetically tuned multi-arc cathode described in step (3) is 0.05 to 1 kW, for example, 0.05 kW, 0.1 kW, 0.2 kW, 0.3 kW, 0.4 kW, 0.5 kW, 0.6 kW, 0.8 kW, or 1.0 kW, but is not limited to the listed values, and other values ​​within that range that are not listed are also applicable.

[0066] In one embodiment, step (3) is described in sp 2The deposition time for carbon layers with a high bond content is 2 to 600 min, for example, 2 min, 10 min, 30 min, 50 min, 75 min, 100 min, 150 min, 200 min, 300 min, 400 min, 500 min, or 600 min. However, it is not limited to the listed values, and other values ​​within this range that are not listed also apply.

[0067] In embodiment 3, the present application is: The invention comprises a drill and the carbon-based coating, wherein the drill includes a helical groove, a peripheral cutting edge, and a tip, the helical groove extends spirally from the tip to the end of the drill, and the carbon-based coating is divided into three types: completely covering the drill area, partially covering the drill area, or partially covering and then adding a protective layer over the entire area. We will provide a cutter.

[0068] In the present invention, a preferred technical solution is one in which the diameter of the drill body is 0.075 to 6 mm, for example, 0.075 mm, 0.1 mm, 0.5 mm, 1 mm, 2 mm, 3 mm, 4 mm, 5 mm, or 6 mm, but is not limited to the listed values, and other values ​​within the range not listed are also applicable.

[0069] In one embodiment, the axial length of the helical groove accounts for 80% or more of the drill length, for example, 80%, 85%, 90%, 95%, or 100%, but is not limited to the listed values, and other unlisted values ​​within that range also apply.

[0070] In one embodiment, the number of helical grooves is at least one, for example, one, two, or three.

[0071] In one embodiment, the depth of the helical groove occupies 5 to 52% of the drill diameter, for example, 5%, 10%, 15%, 20%, 25%, 30%, 40%, 50%, or 52%, but is not limited to the listed values, and other unlisted values ​​within that range also apply.

[0072] A preferred technical approach of this invention is that, when the carbon-based coating completely covers the drill area, it covers the helical groove, peripheral cutting edge, and tip.

[0073] In this application, such a method requires complete coverage of the drill area. When the cutter size is small, a completely covering coating, especially a thick coating, has a significant impact on the drill diameter, i.e., a significant impact on chip evacuation capacity, and is prone to causing cutter breakage. Therefore, this type of coating covering method is mainly applied to the processing of printed circuit boards, where the requirements for wear resistance are high and the requirements for chip evacuation are somewhat lower.

[0074] In one embodiment, when the carbon-based coating partially covers the drill area, it covers the peripheral cutting edge in the drill area.

[0075] In one embodiment, the length of the peripheral edge covered with the carbon-based coating accounts for 5 to 100% of the length of the helical groove, for example, 5%, 10%, 20%, 30%, 40%, 50%, 60%, 80%, or 100%, but is not limited to the listed values, and other unlisted values ​​within that range also apply.

[0076] In this application, the carbon-based coating covers only the peripheral cutting edge of the drill, and the length to which it is applied to the peripheral cutting edge varies depending on the workpiece material and drill structure, extending from the tip to the end of the helical groove, and limiting it to a certain length ratio. On the other hand, there is no carbon-based coating on the surface of the helical groove and the tip. This coating cover method is mainly used to handle the machining of difficult-to-machine printed circuit boards, where the coating thickness is large and there are certain requirements for chip evacuation, improving wear resistance and not affecting the chip evacuation capacity of the drill during deep hole drilling.

[0077] In one embodiment, when partially covering and then adding the entire protective layer, the peripheral cutting edge in the drill area is covered, and then a single layer of low-friction coating is deposited over the entire area.

[0078] In one embodiment, the thickness of the low-friction coating is 0.05 to 0.5 μm, for example, 0.05 μm, 0.1 μm, 0.15 μm, 0.2 μm, 0.25 μm, 0.3 μm, 0.35 μm, 0.4 μm, 0.45 μm, or 0.5 μm, and the coefficient of friction is less than 0.1, for example, 0.1, 0.08, 0.06, 0.05, 0.04, 0.02, or 0.01, but is not limited to the listed values, and other unlisted values ​​within each numerical range are also applicable.

[0079] In this invention, a layer of ultra-low friction coefficient carbon-based coating, which also provides wear resistance, is deposited over the entire surface of the drill, based on the second type of coating cover. The friction coefficient is far lower than that of ordinary hard alloys, which is 0.6 to 0.8. This structural design is primarily suited to high-end, hard-to-machine printed circuit board applications where both the wear resistance and chip evacuation performance of the drill are extremely high. The low friction coating has a small thickness, has almost no effect on the tip thickness, and can effectively improve chip evacuation capacity.

[0080] In this application, the cutter is not limited to a two-blade micro drill, but can also be applied to various commercially available standard and non-standard micro drills, and applications requiring high wear resistance and lubricity such as milling cutters, reamers, broaches, molds, gears, etc., may be selected. [Effects of the Invention]

[0081] Compared to related technologies, this invention offers the following beneficial effects.

[0082] (1) This application is, sp 3 Bonding and sp 2 Depending on the difference in the amount of bond, sp 3 Bonding and sp 2Each layer is primarily composed of carbon layers that provide bonding. The former offers high hardness and wear resistance, while the latter has a low coefficient of friction and good lubricity.

[0083] (2) This application is, sp 3 Bonding and sp 2 By creating a gradient layer between carbon layers that primarily consist of bonding, a gradient transition in the properties of the two layers is achieved. This avoids poor bonding due to large differences in properties, improves the stability of the carbon-based coating, reduces internal stress within the coating, avoids the risk of fracturing when the coating is thick, and enables thick deposition.

[0084] (3) The carbon-based coating and cutter structure relating to this application can effectively solve the processing problems of high-frequency printed circuit boards, high-speed printed circuit boards, and high-performance package substrates that are difficult to process, and will contribute to the development of next-generation communication technology, the chip industry, and the high-performance computing industry, and has a wide range of applications.

[0085] After reviewing and understanding the drawings and detailed descriptions, other embodiments can also be understood. [Brief explanation of the drawing]

[0086] The drawings are provided to provide an understanding of the technical concepts of this specification, constitute part of the specification, and are used together with the embodiments of this application to interpret the technical concepts of this specification, and do not limit the technical concepts of this specification.

[0087] [Figure 1] This is a curve showing the change in sp3 bond content along the thickness direction in the case of a continuous gradient in the gradient layer according to the specification of this application. [Figure 2] In the case of a gradient gradient in the gradient layer according to the specification of this application, this is a curve of change along the thickness direction of the sp3 bond content. [Figure 3] This is a schematic diagram of the structure of the drill according to Embodiment 1 of the present invention. [Figure 4]This is a partially enlarged view of the drill according to Embodiment 1 of the present application. [Figure 5] This is a schematic diagram of the structure of the tip of the drill according to Embodiment 1 of the present invention. [Figure 6] This is a schematic diagram of the structure of the carbon-based coating according to Example 2 of the present application. [Figure 7] This is a schematic diagram of the structure of the drill according to Embodiment 2 of the present invention. [Figure 8] This is a partially enlarged view of the drill according to Embodiment 2 of the present application. [Figure 9] This is a schematic diagram of the structure of the tip of the drill according to Embodiment 2 of the present invention. [Figure 10] This is a schematic diagram of the structure of the drill according to Embodiment 3 of the present application. [Figure 11] This is a partially enlarged view of the drill according to Embodiment 3 of the present application. [Figure 12] This is a schematic diagram of the structure of the tip of the drill according to Embodiment 3 of the present invention. [Figure 13] This figure shows the results of an XPS test of a carbon layer with a high sp3 bond content in the carbon-based coating according to Example 6 of the present application. [Figure 14] This figure shows the results of an XPS test of a carbon layer with a high sp2 bond content in the carbon-based coating according to Example 6 of the present application. [Figure 15] This figure shows the cutter breakage rate when processing an E705G package substrate with different cutters according to Embodiment 6 of the present application. [Figure 16] This figure shows the wear condition after processing an E705G package substrate with a different cutter according to Embodiment 6 of the present application. [Explanation of symbols]

[0088] 1:sp 3 1: Carbon layer with high bond content; 2: Gradient layer; 3: sp 2 4: Carbon layer with high bonding content; 5: Adhesive layer; 6: Helical groove; 7: Circumferential edge; 8: Tip. [Modes for carrying out the invention]

[0089] To better explain the present application and facilitate the understanding of the technical solution of the present application, the present application will be further described in detail below. However, the following examples are merely simple examples of the present application and do not represent or limit the scope of the claims of the present application. The protection scope of the present application is based on the scope of the claims.

[0090] The following are typical examples of the present application, but are not limited thereto.

Example

[0091] This example provides a carbon-based coating and a cutter used on the surface of the cutter. The carbon-based coating includes, in order from the surface of the cutter to the outside, a carbon layer 1 with a high content of sp 3 bonding, a gradient layer 2, and a carbon layer 3 with a high content of sp 2 bonding. The content of sp 3 bonding in the carbon layer 1 with a high content of sp 3 bonding is 52.9%. The content of sp 2 bonding in the carbon layer 3 with a high content of sp 2 bonding is 62.6%. The gradient layer 2 changes from a higher content of sp 3 bonding to a lower content from the inside to the outside, and from a lower content of sp 2 bonding to a higher content.

[0092] The carbon layer 1 with a high content of sp 3 bonding has a thickness of 0.15 μm and a hardness of 52.1 GPa.

[0093] The carbon layer 3 with a high content of sp 2 bonding has a thickness of 0.2 μm and a hardness of 35.6 GPa.

[0094] The thickness of the gradient layer 2 is 0.2 μm, and the content of sp 3 bonding in the gradient layer 2 is a continuous gradient at a linear constant speed, decreasing from 52.9% to 37.4%.

[0095] The cutter includes a drill and a carbon-based coating on the surface of the drill. The structure schematic diagram of the drill is shown in Figure 3, and its partial enlarged view is shown in Figure 4, including a spiral groove 5, a peripheral edge 6, and a tip 7. The structure schematic diagram of the tip is shown in Figure 5. The spiral groove 5 extends spirally from the tip 7 to the end of the drill. The carbon-based coating partially covers the drill area, that is, it covers the peripheral edge 6 in the drill area.

[0096] The diameter of the main body of the drill was 0.15 mm.

[0097] The axial length of the spiral groove 5 occupied 100% of the length of the drill. The number of the spiral grooves 5 was two. The depth of the spiral groove 5 occupied 28% of the diameter of the drill.

[0098] The length of the peripheral edge 6 covered by the carbon-based coating occupied 50% of the length of the spiral groove 5.

Example

[0099] This example provides a carbon-based coating and a cutter used on the surface of the cutter. The structure schematic diagram of the carbon-based coating is shown in Figure 6, from the surface of the cutter to the outside, including a carbon layer 1 with a high content of sp 3 bonding, a gradient layer 2, and a carbon layer 3 with a high content of sp 2 bonding in sequence. The content of sp 3 bonding in the carbon layer 1 with a high content of sp 3 bonding is 60.3%. The content of sp 2 bonding in the carbon layer 3 with a high content of sp 2 bonding is 75.4%. The gradient layer 2 changes from a high content of sp 3 bonding to a low content from the inside to the outside, and from a low content of sp 2 bonding to a high content.

[0100] The carbon layer 1 with a high content of sp 3 bonding has a thickness of 0.2 μm and a hardness of 56.5 GPa.

[0101] The aforementioned sp 2 Carbon layer 3, which had a high bond content, had a thickness of 0.3 μm and a hardness of 22.5 GPa.

[0102] The thickness of the gradient layer 2 is 0.5 μm, and the sp in the gradient layer 2 3 The bond content showed a non-linear, continuous gradient, decreasing from 60.3% to 24.6%.

[0103] The carbon-based coating further includes an adhesive layer 4 located between the carbon-based coating and the surface of the cutter.

[0104] The material of the adhesive layer 4 was chromium, and the thickness of the adhesive layer 4 was 0.2 μm.

[0105] The cutter comprises a drill and a carbon-based coating on the surface of the drill. The drill, whose schematic structure is shown in Figure 7 and a partially enlarged view thereof is shown in Figure 8, includes a helical groove 5, a peripheral cutting edge 6, and a tip 7. A schematic structure of the tip is shown in Figure 9. The helical groove 5 extends spirally from the tip 7 to the end of the drill. The carbon-based coating completely covers the drill area, i.e., it covers the helical groove 5, the peripheral cutting edge 6, and the tip 7.

[0106] The diameter of the drill body was 0.25 mm.

[0107] The axial length of the helical groove 5 accounted for 95% of the drill's length. There were two helical grooves 5. The depth of the helical groove 5 accounted for 30% of the drill's diameter. [Examples]

[0108] This embodiment provides a carbon-based coating and a cutter used on the surface of a cutter. The carbon-based coating is applied from the surface of the cutter outwards, sp 3 Carbon layer 1, gradient layer 2, and sp have a high bond content. 2 The carbon layer 3, which has a high bond content, was sequentially included. 3sp in carbon layer 1, which has a high bond content 3 The content of the bond is 71.7%. 2 sp in carbon layer 3, which has a high bond content. 2 The bond content is 60.6%. The gradient layer 2 is sp from the inside out. 3 From the highest bond content to the lowest, sp 2 The list moved from those with low bond content to those with high bond content.

[0109] The aforementioned sp 3 Carbon layer 1, which had a high bond content, had a thickness of 0.5 μm and a hardness of 60.8 GPa.

[0110] The aforementioned sp 2 Carbon layer 3, which had a high bond content, had a thickness of 1.5 μm and a hardness of 33.9 GPa.

[0111] The thickness of the gradient layer 2 is 1.0 μm, and the sp in the gradient layer 2 3 The bond content showed a gradient, decreasing from 71.7% to 30.4%.

[0112] The aforementioned gradient layer 2 is sp 3 It consisted of two gradient layers with different bond content, and the thickness of a single gradient layer was 0.5 μm.

[0113] The cutter comprises a drill and a carbon-based coating on the surface of the drill. The drill, whose structural schematic is shown in Figure 10 and a partially enlarged view thereof is shown in Figure 11, includes a helical groove 5, a peripheral cutting edge 6, and a tip 7. A structural schematic of the tip is shown in Figure 12. The helical groove 5 extends spirally from the tip 7 to the end of the drill. The carbon-based coating partially covers the drill area and then adds an overall protective layer, that is, it covers the peripheral cutting edge 6 in the drill area and then deposits a single layer of low-friction coating over the entire surface.

[0114] The diameter of the drill body was 0.9 mm.

[0115] The axial length of the helical groove 5 accounted for 90% of the drill's length. There were two helical grooves 5. The depth of the helical groove 5 accounted for 25% of the drill's diameter.

[0116] The length of the peripheral blade 6 covered with the carbon-based coating accounted for 80% of the length of the helical groove 5.

[0117] The low-friction coating had a thickness of 0.1 μm, covered the entire surface of the drill area, and had a coefficient of friction of 0.08. [Examples]

[0118] This embodiment provides a carbon-based coating and a cutter used on the surface of a cutter. The carbon-based coating is applied from the surface of the cutter outwards, sp 3 Carbon layer 1, gradient layer 2, and sp have a high bond content. 2 The carbon layer 3, which has a high bond content, was sequentially included. 3 sp in carbon layer 1, which has a high bond content 3 The bond content is 76%. 2 sp in carbon layer 3, which has a high bond content. 2 The bond content is 77%. The gradient layer 2 is sp from the inside out. 3 From the highest bond content to the lowest, sp 2 The list moved from those with low bond content to those with high bond content.

[0119] The aforementioned sp 3 Carbon layer 1, which had a high bond content, had a thickness of 0.8 μm and a hardness of 62.2 GPa.

[0120] The aforementioned sp 2 Carbon layer 3, which had a high bond content, had a thickness of 0.9 μm and a hardness of 20.6 GPa.

[0121] The thickness of the gradient layer 2 is 0.8 μm, and the sp in the gradient layer 2 3 The bond content showed a non-linear, continuous gradient, decreasing from 76% to 23%.

[0122] The carbon-based coating further includes an adhesive layer 4 located between the carbon-based coating and the surface of the cutter.

[0123] The adhesive layer 4 comprises a chromium adhesive layer and a chromium nitride adhesive layer in that order, with the chromium adhesive layer having a thickness of 0.2 μm and the chromium nitride adhesive layer having a thickness of 0.3 μm.

[0124] The cutter comprises a drill and a carbon-based coating on the surface of the drill. The drill includes a helical groove 5, a peripheral cutting edge 6, and a tip 7. The helical groove 5 extends spirally from the tip 7 to the end of the drill. The carbon-based coating completely covers the drill area, i.e., it covers the helical groove 5, the peripheral cutting edge 6, and the tip 7.

[0125] The diameter of the drill body was 2.0 mm.

[0126] The axial length of the helical groove 5 accounted for 85% of the drill's length. There was one helical groove 5. The depth of the helical groove 5 accounted for 40% of the drill's diameter. [Examples]

[0127] This embodiment provides a carbon-based coating and a cutter used on the surface of a cutter. The carbon-based coating is applied from the surface of the cutter outwards, sp 3 Carbon layer 1, gradient layer 2, and sp have a high bond content. 2 The carbon layer 3, which has a high bond content, was sequentially included. 3 sp in carbon layer 1, which has a high bond content 3 The bond content is 65%. 2 sp in carbon layer 3, which has a high bond content. 2 The bond content is 55%. The gradient layer 2 is sp from the inside out. 3 From the highest bond content to the lowest, sp 2 The list moved from those with low bond content to those with high bond content.

[0128] The aforementioned sp 3 Carbon layer 1, which had a high bond content, had a thickness of 5 μm and a hardness of 58.5 GPa.

[0129] The aforementioned sp 2 The carbon layer 3, which had a high bond content, had a thickness of 4.5 μm and a hardness of 40.5 GPa.

[0130] The aforementioned sp 2 Carbon layer 3, which has a high bond content, is an element-doped carbon coating, and the doped element was silicon.

[0131] The thickness of the gradient layer 2 is 2.5 μm, and the sp in the gradient layer 2 3 The bond content showed a gradient, decreasing from 65% to 45%.

[0132] The aforementioned gradient layer 2 is sp 3 The structure consisted of three gradient layers with different bond content, 60%, 55%, and 50%, respectively, with corresponding thicknesses of 0.8 μm, 0.9 μm, and 0.8 μm.

[0133] The carbon-based coating further includes an adhesive layer 4 located between the carbon-based coating and the surface of the cutter.

[0134] The adhesive layer 4 included a silicon nitride adhesive layer, and the thickness of the adhesive layer 4 was 1 μm.

[0135] The cutter comprises a drill and a carbon-based coating on the surface of the drill. The drill includes a helical groove 5, a peripheral cutting edge 6, and a tip 7. The helical groove 5 extends spirally from the tip 7 to the end of the drill. The carbon-based coating partially covers the drill area and then adds an overall protective layer, namely covering the peripheral cutting edge 6 in the drill area and then depositing a single layer of low-friction coating over the entire surface.

[0136] The diameter of the drill body was 6 mm.

[0137] The axial length of the helical groove 5 accounted for 80% of the length of the drill. There were two helical grooves 5. The depth of the helical groove 5 accounted for 20% of the diameter of the drill.

[0138] The length of the peripheral blade 6 covered with the carbon-based coating accounted for 100% of the length of the helical groove 5.

[0139] The low-friction coating had a thickness of 0.5 μm, covered the entire surface of the drill area, and had a coefficient of friction of 0.1. [Examples]

[0140] This embodiment provides a method for manufacturing a carbon-based coating used on the surface of a cutter. The carbon-based coating is the carbon-based coating in Example 1, and the method includes the following steps.

[0141] (1) First, the cutter drill was ultrasonically cleaned. The cleaning media used were acetone, alcohol, and water, respectively. Each medium was used individually, and the cleaning time for each was 20 minutes. After cleaning and drying, the cutter drill was placed in a vacuum chamber, fixed to a jig, and the pressure was set to 1.0 × 10⁻⁶. -2 Vacuum was drawn until the pressure dropped to Pa, and argon gas was passed through to control the pressure to 0.3 Pa. The magnetron sputtering cathode and magnetically tuned multi-arc cathode were started, the current of the magnetron sputtering cathode was controlled to 0.4 A and the power to 0.2 kW, and the current of the magnetically tuned multi-arc cathode was controlled to 200 A and the power to 5 kW, and the surface of the cutter drill was deposited for 20 mins, sp 3 A carbon layer with a high bond content was obtained.

[0142] (2) Based on step (1), the current of the magnetron sputtering cathode was continuously increased from 0.4A to 20A, and the current of the magnetically adjusted multi-arc cathode was continuously decreased from 200A to 30A. Deposition was carried out for 20 minutes to obtain a gradient layer.

[0143] (3) Based on step (2), argon gas is passed through and the pressure is controlled to 0.85 Pa, and the currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode are continuously controlled, the current of the magnetron sputtering cathode is controlled to 20 A and the power to 12 kW, and the current of the magnetically tuned multi-arc cathode is controlled to 30 A and the power to 0.8 kW, and deposition is performed for 80 min, sp 2 A carbon layer with a high bonding content was obtained, resulting in a carbon-based coating. This carbon-based coating covered the peripheral cutting edge position in the drill region.

[0144] sp in the carbon-based coating obtained in this embodiment 3 Carbon layers and sp with high bond content 2 XPS measurements were performed on carbon layers with high bonding content, and the results are shown in Figures 13 and 14, respectively. A cutter covered with a carbon-based coating was used to process an E705G package substrate, with 10,000 holes processed. The breakage rate of the cutter was compared with that of a cutter not covered with a coating and a cutter covered with a TiAlN coating, and the results are shown in Figure 15. The outer diameter of the cutter changed after processing, and its wear condition is shown in Figure 16.

[0145] In this embodiment, the curve in Figure 13 is used to calculate sp 3 sp in a carbon layer with a high bond content 3 The bond content was found to be 52.9%. The curve in Figure 14 allows for calculation of sp. 2 sp in a carbon layer with a high bond content 2The bonding content was found to be 62.6%. From Figure 15, it was found that the coated cutter in this embodiment did not experience breakage after use, while the breakage rates of the uncoated cutter and the TiAlN-coated cutter were 3‰ and 2‰, respectively. From Figure 16, it was found that after processing a 10,000-hole E705G package substrate, the outer diameter of the coated cutter in this embodiment decreased by only 2.1 μm, the outer diameter of the uncoated cutter decreased by 14.2 μm, and the outer diameter of the TiAlN-coated cutter decreased by 7.7 μm. This shows that the pure carbon coating in this embodiment has a clear advantage in wear resistance.

[0146] In summary, the carbon-based coating can reduce the rate of cutter breakage, improve the wear resistance of the cutter, and effectively extend the service life of the cutter by increasing the lubricity and wear resistance of the cutter surface. [Examples]

[0147] This embodiment provides a method for manufacturing a carbon-based coating used on the surface of a cutter. The carbon-based coating is the carbon-based coating in Example 2, and the method includes the following steps.

[0148] (1) First, the cutter drill was ultrasonically cleaned. The cleaning media used were acetone, alcohol, and water, respectively. Each medium was used individually, and the cleaning time for each was 30 minutes. After drying, the cutter drill was placed in a vacuum chamber, fixed to a jig, and the pressure was set to 9.0 × 10⁻⁶. -3 The system was evacuated until the pressure dropped to Pa, and then argon gas was passed through to control the pressure to 2.0 Pa. A magnetically tuned multi-arc cathode was activated, and the current of the magnetically tuned multi-arc cathode was controlled to 60 A. A chromium adhesive layer was deposited on the surface of the cutter drill for 10 minutes.

[0149] The pressure was adjusted to 0.6 Pa, the magnetron sputtering cathode and the magnetically tuned multi-arc cathode were started simultaneously, the current of the magnetron sputtering cathode was controlled to 0.1 A and the power to 0.1 kW, and the current of the magnetically tuned multi-arc cathode was controlled to 150 A and the power to 10 kW, and the material was deposited on the surface of the cutter drill for 30 minutes. 3 A carbon layer with a high bond content was obtained.

[0150] (2) Based on step (1), the current of the magnetron sputtering cathode was continuously increased from 0.1A to 25A, and the current of the magnetically adjusted multi-arc cathode was continuously decreased from 150A to 26A. Deposition was carried out for 50 minutes to obtain a gradient layer.

[0151] (3) Based on step (2), argon gas is passed through and the pressure is controlled to 1.5 Pa, and the currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode are continuously controlled, the current of the magnetron sputtering cathode is controlled to 30 A and the power to 28 kW, and the current of the magnetically tuned multi-arc cathode is controlled to 20 A and the power to 0.2 kW, and deposition is performed for 120 min, sp 2 A carbon layer with a high bond content was obtained, resulting in a carbon-based coating. This carbon-based coating completely covered the drill area.

[0152] In this embodiment, the carbon-coated cutter was used to process the difficult-to-process EM390 printed circuit board, enabling the processing of 800 holes. Furthermore, the processing quality met the requirements, and the processing life increased fourfold compared to the uncoated cutter, which could only process 200 holes. [Examples]

[0153] This embodiment provides a method for manufacturing a carbon-based coating used on the surface of a cutter. The carbon-based coating is the carbon-based coating in Example 3, and the method includes the following steps.

[0154] (1) First, the cutter drill was ultrasonically cleaned. The cleaning media used were acetone, alcohol, and water, respectively. Each medium was used individually, and the cleaning time for each was 40 minutes. After cleaning and drying, the cutter drill was placed in a vacuum chamber, fixed to a jig, and the pressure was set to 1.0 × 10⁻⁶. -2 Vacuum was drawn until the pressure dropped to Pa, and argon gas was passed through to control the pressure to 0.1 Pa. The magnetron sputtering cathode and magnetically tuned multi-arc cathode were started, the current of the magnetron sputtering cathode was controlled to 0.1 A and the power to 0.15 kW, and the current of the magnetically tuned multi-arc cathode was controlled to 300 A and the power to 18 kW, and the surface of the cutter drill was deposited for 30 mins, sp 3 A carbon layer with a high bond content was obtained.

[0155] (2) Based on step (1), argon gas was passed through to control the pressure to 0.3 Pa, the current of the magnetron sputtering cathode was increased in a gradient manner, first from 0.4 A directly to 18 A, and the current of the magnetically adjusted multi-arc cathode was reduced in a gradient manner, from 300 A directly to 70 A, and after deposition for 4 minutes, the current of the magnetron sputtering cathode was increased directly from 18 A to 27 A, and the current of the magnetically adjusted multi-arc cathode was reduced directly from 70 A to 20 A, and after deposition for 16 minutes, a gradient layer consisting of two gradient layers was obtained.

[0156] (3) Based on step (2), argon gas is passed through and the pressure is controlled to 1.2 Pa, and the currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode are continuously controlled, the current of the magnetron sputtering cathode is controlled to 27 A and the power to 22 kW, and the current of the magnetically tuned multi-arc cathode is controlled to 20 A and the power to 0.5 kW, and deposition is performed for 60 min, sp 2 A carbon layer with a high bond content was obtained, resulting in a carbon-based coating.

[0157] The carbon-based coating was applied to the peripheral cutting edge position in the drill area, and then a low-friction coating was continuously deposited until the low-friction coating completely covered the drill area. Argon gas was passed through the area, and the pressure was controlled to 0.1 Pa. The currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode were controlled, with the current of the magnetron sputtering cathode set to 15 A and the power to 7.5 kW, and the current of the magnetically tuned multi-arc cathode set to 100 A and the power to 2 kW. Deposition was carried out for 20 minutes to obtain the low-friction coating.

[0158] In this embodiment, the carbon-based coating-covered cutter was used to process the difficult-to-process EM526 printed circuit board, enabling the processing of 700 holes. Furthermore, the processing quality met the requirements, and the processing life increased to 4.67 times that of the uncoated cutter, which could only process 150 holes. [Examples]

[0159] This embodiment provides a method for manufacturing a carbon-based coating used on the surface of a cutter. The carbon-based coating is the carbon-based coating in Example 4, and the method includes the following steps.

[0160] (1) First, the cutter drill was ultrasonically cleaned. The cleaning media used were acetone, alcohol, and water, respectively. Each medium was used individually, and the cleaning time for each was 50 minutes. After drying, the cutter drill was placed in a vacuum chamber, fixed to a jig, and the pressure was set to 5.0 × 10⁻⁶. -3 The vacuum was drawn until the pressure dropped to Pa, and neon gas was passed through to control the pressure to 3.0 Pa. A magnetically adjustable multi-arc cathode was activated, the current of the magnetically adjustable multi-arc cathode was controlled to 90 A, and deposition was performed on the surface of the cutter drill for 20 minutes to obtain a chromium bonded layer. The gas being passed through was adjusted to nitrogen gas, the pressure was controlled to 3.5 Pa, the current of the magnetically adjustable multi-arc cathode was controlled to 90 A, and deposition was performed for 15 minutes to obtain a chromium nitride bonded layer.

[0161] The pressure of the flowing krypton gas was adjusted to 0.3 Pa, and the magnetron sputtering cathode and the magnetically tuned multi-arc cathode were started simultaneously. The current of the magnetron sputtering cathode was controlled to 0.2 A and the power to 0.05 kW, and the current of the magnetically tuned multi-arc cathode was controlled to 290 A and the power to 17 kW. Deposition was carried out continuously for 30 minutes, sp 3 A carbon layer with a high bond content was obtained.

[0162] (2) Based on step (1), the current of the magnetron sputtering cathode was adjusted to increase continuously from 0.1A to 25A, and the current of the magnetically adjusted multi-arc cathode was reduced continuously from 290A to 30A, deposition was performed for 50 minutes, and a gradient layer was obtained.

[0163] (3) Based on step (2), krypton gas is passed through and the pressure is controlled to 1.6 Pa, and the currents of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode are continuously controlled, with the current of the magnetron sputtering cathode controlled to 28.6 A and the power to 27.8 kW, and the current of the magnetically tuned multi-arc cathode controlled to 20 A and the power to 0.9 kW, and deposition is performed for 350 min, sp 2 A carbon layer with a high bond content was obtained, resulting in a carbon-based coating. This carbon-based coating completely covered the drill area.

[0164] In this embodiment, a cutter covered with a carbon-based coating was used to process an aluminum printed circuit board, enabling the processing of 15,000 holes. The processing quality met the requirements, and the processing life increased fivefold compared to a cutter without the coating, which could only process 3,000 holes.

[0165] In summary, the present invention relates to sp 3 Bonding and sp 2 Depending on the difference in the amount of bond, sp 3 Bonding and sp 2Each layer is primarily composed of carbon bonds; the former provides high hardness and wear resistance, while the latter has a low coefficient of friction and good lubricity. This invention relates to sp 3 Bonding and sp 2 By providing a gradient layer between carbon layers primarily composed of bonding, a gradient transition in the properties of both layers is achieved. This avoids poor bonding due to large differences in properties, improves the stability of the carbon-based coating, reduces internal stress during coating, avoids the risk of fracturing by increasing the coating thickness, and enables thick deposition. As a result, the carbon-based coating and cutter structure can effectively solve the processing problems of hard-to-process high-frequency printed circuit boards, high-speed printed circuit boards, and high-performance package substrates, and has been found to have a wide range of applications.

[0166] While the present application has described the detailed products and methods described above, the applicant declares that the application is not limited to the detailed products and methods described above, that is, it does not mean that the application must be implemented in accordance with the detailed products and methods described above. Those skilled in the art should understand that any improvements to the present application, equivalent substitutions and additions of auxiliary components to the products of the present application, selection of specific forms, etc., are all included within the scope of protection and disclosure of the present application.

Claims

1. From the surface of the cutter outwards, sp ３ Carbon layer with high bond content, gradient layer, and sp ２ The carbon layers with high bond content are sequentially included, and the sp ３ sp in a carbon layer with a high bond content ３ The bond content is 50-80%, and the sp ２ sp in a carbon layer with a high bond content ２ The bond content is 50-80%, and the gradient layer is from the inside out, sp ３ From the highest bond content to the lowest, sp ２ The order is from the lowest bond content to the highest bond content. A carbon-based coating used on the surface of a cutter.

2. The above sp ３ The thickness of the carbon layer with a high content of the bond is 0.1 to 5 μm, The carbon-based coating according to claim 1.

3. The aforementioned sp ３ The hardness of the carbon layer with a high bond content is 45-65 GPa. The carbon-based coating according to claim 1 or 2.

4. The aforementioned sp ２ The thickness of the carbon layer with a high bond content is 0.1 to 5 μm. A carbon-based coating according to any one of claims 1 to 3.

5. The aforementioned sp ２ The hardness of the carbon layer with a high bond content is 20-45 GPa. A carbon-based coating according to any one of claims 1 to 4.

6. The thickness of the aforementioned gradient layer is 0.1 to 3 μm. Preferably, sp in the gradient layer ３ The bond content is sp ３ sp in a carbon layer with a high bond content ３ From the content of the bond sp ２ sp in a carbon layer with a high bond content ３ The amount of binding decreases, Preferably, sp in the gradient layer ３ Bonding content or sp ２ The bond content is a continuous gradient or a gradient gradient. Preferably, in the case of the continuous gradient, sp ３ Bonding content or sp ２ The bond content changes either linearly at a constant rate or nonlinearly. Preferably, in the case of the gradient, the gradient layer is sp ３ It consists of at least two gradient layers with different bond content, Preferably, the thickness of a single gradient layer is 0.02 to 1 μm. A carbon-based coating according to any one of claims 1 to 5.

7. The aforementioned sp ２ Carbon layers with a high bond content include pure carbon coatings or element-doped carbon coatings. Preferably, the doping element includes one or at least two of the following elements: silicon, nitrogen, hydrogen, chromium, titanium, tantalum, molybdenum, niobium, or aluminum. Preferably, the carbon-based coating further includes an adhesive layer located between the carbon-based coating and the surface of the cutter. Preferably, the material of the adhesive layer includes one or at least two of the following: a single element, a corresponding single element nitride, a corresponding single element carbide, or a corresponding single element carbidride. Preferably, the element comprises one or at least two of the following elements: chromium, titanium, molybdenum, tungsten, tantalum, vanadium, or silicon. Preferably, the number of adhesive layers is at least one, and the thickness of each adhesive layer is 0.1 to 1 μm. A carbon-based coating according to any one of claims 1 to 6.

8. A method for manufacturing a carbon-based coating according to any one of claims 1 to 7, After fixing the cutter drill, a vacuum is created, protective gas is circulated to control the pressure, the magnetron sputtering cathode and magnetically tuned multi-arc cathode are activated, the cathode current is controlled, and sputtering occurs on the surface of the cutter drill. ３ Step (1) involves depositing a carbon layer with a high bond content, Step (2) involves adjusting the current of the magnetron sputtering cathode to be continuously increased and the current of the magnetically tuned multi-arc cathode to be continuously decreased, thereby depositing and obtaining a gradient layer. Based on step (2), the current of the magnetron sputtering cathode and the magnetically tuned multi-arc cathode is continuously controlled and deposited sp ２ The process includes (3) obtaining a carbon layer with a high bond content to obtain a carbon-based coating, Manufacturing method.

9. The cutter drill described in step (1) is first cleaned before fixing, and the cleaning includes ultrasonic cleaning. Preferably, the medium used for cleaning comprises one or a combination of at least two of acetone, alcohol, or water, and the medium is used alone. Preferably, the washing time is independently 10 to 60 minutes. Preferably, the cutter drill is cleaned and then dried. The manufacturing method according to claim 8.

10. Place the cutter drill described in step (1) into the vacuum chamber and fix it to the jig. Preferably, the pressure after the vacuuming described in step (1) is 1.0 × 10⁻⁶. －２ It drops below Pa, Preferably, the protective gas described in step (1) includes an inert gas. Preferably, the pressure after the protective gas is passed through in step (1) is 0.1 to 5 Pa. Preferably, the current of the magnetron sputtering cathode described in step (1) is 0.1 to 2 A. Preferably, the power of the magnetron sputtering cathode described in step (1) is 0.05 to 3 kW. Preferably, the current of the magnetically tuned multi-arc cathode described in step (1) is 70 to 300 A. Preferably, the power of the magnetically tuned multi-arc cathode described in step (1) is 0.5 to 20 kW. Preferably, the sp described in step (1) ３ The deposition time of carbon layers with a high bond content is 5 to 60 minutes. The manufacturing method according to claim 8 or 9.

11. Step (1) described sp ３ Before depositing a carbon layer with a high bond content, first deposit an adhesive layer on the surface of the cutter drill. Preferably, a magnetically adjustable multi-arc cathode is selected according to the material of the adhesive layer, and different atmospheric conditions and currents are controlled. Preferably, when the adhesive layer is made of a single material, a protective gas is passed through to control the pressure to 0.1 to 5 Pa, and the current of the magnetically tuned multi-arc cathode is set to 20 to 300 A. Preferably, when the material of the adhesive layer is the corresponding elemental nitride, nitrogen gas is passed through to control the pressure to 0.5 to 5 Pa, and the current of the magnetically adjusted multi-arc cathode is set to 20 to 300 A. Preferably, when the material of the adhesive layer is a corresponding elemental carbide, a carbon-containing gas is passed through to control the pressure to 0.2 to 5 Pa, and the current of the magnetically adjusted multi-arc cathode is set to 20 to 300 A. Preferably, when the material of the adhesive layer is a corresponding single carbidine nitride, a mixed gas of carbon-containing gas and nitrogen gas is passed through to control the pressure to 0.5 to 5 Pa, and the current of the magnetically adjusted multi-arc cathode is set to 20 to 300 A. Preferably, the carbon-containing gas includes acetylene and / or methane. Preferably, if the adhesive layer includes two or more layers, the single-layer deposition processes described above are combined and superimposed. The manufacturing method according to any one of claims 8 to 10.

12. The current of the magnetron sputtering cathode described in step (2) increases continuously, rising from 0.1 to 2A to 20 to 30A. Preferably, the current of the magnetically tuned multi-arc cathode described in step (2) decreases continuously, from 70 to 300 A to 20 to 80 A. Preferably, the currents of the magnetron sputtering cathode and magnetically tuned multi-arc cathode described in step (2) are continuously changing or gradient changing. Preferably, the deposition time for the gradient layer described in step (2) is 2 to 120 mins. Preferably, the current of the magnetron sputtering cathode described in step (3) is 20 to 30 A. Preferably, the power of the magnetron sputtering cathode described in step (3) is 10 to 30 kW. Preferably, the current of the magnetically tuned multi-arc cathode described in step (3) is 20 to 30 A. Preferably, the power of the magnetically tuned multi-arc cathode described in step (3) is 0.05 to 1 kW. Preferably, the sp described in step (3) ２ The deposition time of carbon layers with a high bond content is 2 to 600 minutes. The manufacturing method according to any one of claims 8 to 11.

13. The invention comprises a drill and a carbon-based coating according to any one of claims 1 to 7, wherein the drill includes a helical groove, a peripheral cutting edge, and a tip, the helical groove extends spirally from the tip to the end of the drill, and the carbon-based coating is divided into three types: completely covering the drill area, partially covering the drill area, or partially covering and then adding a protective layer over the entire area. cutter.

14. The diameter of the drill body is 0.075 to 6 mm. Preferably, the axial length of the helical groove accounts for 80% or more of the length of the drill. Preferably, the number of helical grooves is at least one. Preferably, the depth of the helical groove accounts for 5 to 52% of the diameter of the drill. The cutter according to claim 13.

15. When the aforementioned carbon-based coating completely covers the drill area, it means that the helical groove, peripheral cutting edge, and tip are all covered. Preferably, when the carbon-based coating partially covers the drill area, it covers the peripheral cutting edge in the drill area. Preferably, the length of the peripheral cutting edge covered by the carbon-based coating accounts for 5 to 100% of the length of the helical groove. Preferably, when partially covering and then adding a full protective layer, the peripheral cutting edge in the drill area is covered, and then a single layer of low-friction coating is deposited over the entire surface. Preferably, the low-friction coating has a thickness of 0.05 to 0.5 μm and a coefficient of friction less than 0.

1. The cutter according to claim 13 or 14.

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