Contact probe, probe head, and probe card of a probe head in a probe card of a test device used for an electronic device

Abstract

Provided is a contact probe of a probe head in a probe card of a test device for an electronic device, which stably contacts a contact pad of an interface panel and has stable and good accuracy of test results. 【Solution means】The contact probe 50 includes a needle body 51 provided between upper and lower guide plate units 41 and 42 so as to be curved at least along a first horizontal axis direction, a needle head 52 extending downward from the needle body along the longitudinal axis Z direction and abutting against the contact pad 32 of the device under measurement, and a needle tail 53 extending upward from the needle body along the longitudinal axis direction and having a contact end portion 533. The contact end portion has a contact end face that contacts the contact pad 32 of the interface panel 30. By making the area of the contact end face smaller than the area of the cross section of the needle body and avoiding exceeding the edge of the contact pad, a stable contact resistance is obtained.

Description

Technical Field

[0001] The present invention relates to a probe of a probe card of a test device used for an electronic device, and more particularly to a contact probe, a probe head including the contact probe, and a probe card.

Background Art

[0002] With the miniaturization of electronic components, the contact pads of electronic components are also miniaturized. The smaller the contact pad is, the smaller the contact force it receives. In order to avoid damaging the device under test by applying an excessive contact force when the contact probe contacts the contact pad of the device under test, a probe card used for testing electronic components with micro contact pads needs to use a contact probe with a low contact force (also referred to as low needle pressure).

[0003] The contact probe needs to have the needle head contact the contact pad of the device under test, and the needle tail contact the contact pad of the interface panel (for example, a space converter), and it is necessary to electrically connect the contact probe and the interface panel. However, when using a contact probe with a low contact force, the force exerted by the tip of the needle tail of the contact probe on the contact pad of the interface panel is relatively low, and the contact resistance is likely to become unstable. That is, an unstable contact is formed between the needle tail of the contact probe and the contact pad of the interface panel, which may adversely affect the accuracy of the test results.

[0004] In addition, with the miniaturization of electronic components, the center-to-center distance of contact pads has also been miniaturized. Therefore, the contact probes of the probe card required for testing also need to have the characteristic of a fine pitch. For example, the center-to-center distance between contact probes is 50 to 80 μm, and further less than 50 μm. The contact pads of the interface panel of the probe card are also reduced in size and center-to-center distance accordingly. As a result, it is likely that the tip of the needle tail of the contact probe will protrude from the edge of the contact pad that the tip of the needle tail of the contact probe touches. Furthermore, the contact area is insufficient, and there is a risk that the contact probe will contact a non-corresponding contact pad.

Summary of the Invention

Problems to be Solved by the Invention

[0005] The present invention has been made in view of the above-described problems, and an object thereof is to provide a contact probe of a probe head in a probe card of a test device used in an electronic device. By stably contacting the tip of the needle tail with the contact pad of the interface panel, a stable contact resistance can be obtained, the test result is stable and has good accuracy, the tip of the needle tail can be more accurately aligned with the corresponding contact pad, and the risk of exceeding the edge of the contact pad can be reduced.

Means for Solving the Problems

[0006] To achieve the above object, the contact probe according to the present invention has a longitudinal axis direction, a first lateral axis direction, and a second lateral axis direction that are orthogonal to each other, a width is defined along the first lateral axis direction, a thickness is defined along the second lateral axis direction, and a cross-sectional area orthogonal to the longitudinal axis direction is defined. The contact probe includes a needle body that extends in the longitudinal axis direction and is elongated, a needle head that is connected to the needle body and extends downward along the longitudinal axis direction from the needle body, and a needle tail that is connected to the needle body and extends upward along the longitudinal axis direction from the needle body. The needle body has a first central axis that extends in the longitudinal axis direction and is provided between an upper guide plate unit and a lower guide plate unit so as to be curved at least in the first lateral axis direction. The needle head is used to abut against a contact pad of a device under measurement located below the lower guide plate unit. The needle tail has a contact end portion, the contact end portion has a contact end surface, the contact end surface is used to make mechanical and electrical contact with a contact pad of an interface panel, the contact end surface has a second central axis that extends along the longitudinal axis direction, at least a part of the contact end portion is formed such that both the width and the thickness are smaller than those of the needle body, and the area of the contact end surface is made smaller than the cross-sectional area of the needle body.

[0007] As a result, compared with the needle body, the contact end portion of the needle tail has reduced width and thickness, and the area of the contact end face is reduced. Thereby, the stability of the contact between the contact end face of the needle tail and the contact pad of the interface panel can be enhanced, a stable contact resistance can be obtained, and the test results can have stable and good accuracy. Also, since the contact end face of the needle tail has a small area, it can be more accurately aligned with the contact pad of the corresponding interface panel. Furthermore, a sufficient safety distance can be ensured between the contact end face of the needle tail and the edge of the contact pad with which it makes contact, away from the edge. Thus, the risk that the contact end face of the needle tail exceeds the edge of the contact pad with which it makes contact can be reduced.

[0008] Preferably, at least a part of the contact end portion of the needle tail of the contact probe has a cross-sectional area that gradually decreases in the longitudinal axis direction as it approaches the contact end face.

[0009] In other words, the contact end portion of the needle tail has at least a part with an inclined surface, taper, or similar structure that is inclined with respect to the longitudinal axis direction, such that the cross-sectional area gradually decreases. Thereby, the problem of insufficient structural strength of the contact end portion due to the reduction of the cross-sectional area can be avoided.

[0010] Preferably, the needle tail has four side faces, and at least one of the four side faces has an inner retreating plane that is parallel to and faces in the same direction as the side face of the needle body, and deviates from the side face of the needle body in the opposite direction of the same direction.

[0011] In other words, the needle tail has the characteristic that at least a part of the contact end portion forms a gradually shrinking shape, so that the contact end face has a relatively small area. Further, this characteristic can also be achieved by at least a part of the side surface of the needle tail shrinking inward directly and flatly (in a non-gradually shrinking shape) with respect to the needle body. Thereby, the needle tail shrinks in cross-sectional area with respect to the needle body in a non-gradually shrinking shape. Therefore, the contact force exerted by the needle tail on the contact pad of the interface panel can be reduced to a certain extent, and the contact resistance and contact stability can be enhanced by reducing the area of the contact end face. The needle tail can simultaneously have the characteristic of gradually shrinking in cross-sectional area (i.e., the aforementioned inclined surface, conical surface, or similar configuration) and the characteristic of shrinking in cross-sectional area in a non-gradually shrinking shape (i.e., the aforementioned inner retreating plane). Thereby, the contact end face has an appropriate area, generates an appropriate contact force and contact resistance, and conforms to the test.

[0012] More preferably, the needle tail has inner retreating planes on two side surfaces respectively, and the two inner retreating planes face the positive direction and the negative direction of the first horizontal axis direction respectively.

[0013] After the contact probe is penetrated into the upper and lower guide holes of the upper and lower guide plate units, the upper and lower guide plate units are displaced relatively at least in the first horizontal axis direction, so that the section of the needle body located between the upper and lower guide plate units is elastically curved and deformed at least in the first horizontal axis direction (the upper and lower guide plate units are displaced relatively in both the first and second horizontal axis directions, and the needle body is elastically curved and deformed in both the first and second horizontal axis directions). At this time, the side surface of the needle body facing the positive or negative direction of the first horizontal axis direction abuts against the inner surface of the upper guide hole. That is, in the needle body, the section located within the upper guide hole is not centered with respect to the upper guide hole and is eccentric at least in the first horizontal axis direction. By making the needle tail have inner retreat planes facing the positive and negative directions of the first horizontal axis direction, adjustment is performed on the contact end face of the needle tail so that the degree of eccentricity in the first horizontal axis direction with respect to the upper guide hole can be made relatively small (with respect to the needle body), and it is also possible to make it centered with respect to the upper guide hole. Thereby, the contact end face of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Also, the risk that the contact end face of the needle tail exceeds the edge of the contact pad it contacts can be further reduced.

[0014] Preferably, the needle tail further has a stop portion and a base portion. The stop portion is connected to the needle body, and the base portion is connected between the stop portion and the contact end portion. The stop portion is formed with a cross-sectional area larger than the cross-sectional area of the needle body, and restricts the needle tail above the upper guide plate unit. The base portion is formed with a cross-sectional area smaller than the cross-sectional area of the stop portion. The contact end portion has a cross-sectional area smaller than the cross-sectional area of the base portion, or has a cross-sectional area the same as the cross-sectional area of the base portion.

[0015] Thereby, a base portion is provided between the contact end portion and the stop portion, which can enhance the structural strength of the needle tail and make the contact end portion less likely to crack due to stress. Also, when the contact probe is provided penetrating through the upper and lower guide plate units, the contact probe passes through the upper and lower guide holes of the upper and lower guide plate units from top to bottom. When the actual installer looks from top to bottom, it is usually difficult to identify whether the mounting direction of the contact probe is correct based on the positional relationship between the contact end portion and the stop portion. However, when there is a base portion, by having a relative positional relationship in which the contact end portion and the base portion can be clearly distinguished, the mounting efficiency and accuracy of the contact probe can be enhanced.

[0016] More preferably, the base portion has a top surface, the contact end portion is connected to a part of the top surface so as to be offset to at least one side of the base portion, and a connection portion between the contact end portion and the base portion is offset by a predetermined distance along at least one of the first horizontal axis direction and the second horizontal axis direction with respect to at least one edge of the top surface of the base portion.

[0017] Thereby, the contact end portion is offset to one side of the base portion in the first horizontal axis direction and / or to the other side of the base portion in the second horizontal axis direction. Thus, the contact end portion and the base portion have a relative positional relationship that can be clearly distinguished, and the mounting efficiency and accuracy of the contact probe can be improved.

[0018] More preferably, the base portion is trapezoidal in a cross-section parallel to the longitudinal axis direction.

[0019] Thereby, the base portion may have a trapezoidal cross-section along the longitudinal axis direction and the first horizontal axis direction, and may also have a trapezoidal cross-section along the longitudinal axis direction and the second horizontal axis direction. Thereby, the cross-sectional area gradually decreases upward from the base portion. Thereby, on the premise of enabling the contact end face to have a small required area, the overall structural strength of the needle tail is ensured.

[0020] More preferably, the base portion is formed with a width smaller than the width of the stopper portion, and a thickness smaller than the thickness of the stopper portion, or a thickness the same as the thickness of the stopper portion and a thickness larger than the thickness of the contact end portion, or a thickness the same as the thickness of the contact end portion.

[0021] Thereby, it is sufficient that the width of the base portion is smaller than the width of the stopper portion, and the thickness of the base portion may be the same as the thickness of the stopper portion. Or the thickness of the base portion may be made smaller than the thickness of the stopper portion. Thereby, the cross-sectional area is reduced from the base portion, enabling the contact end face to have a smaller area.

[0022] More preferably, the base portion and the stopping portion are discontinuously connected to each other.

[0023] Thereby, the base portion and the stopping portion are clearly distinguished in appearance. The two do not together form a single continuous shape. Thus, a large step is created in the cross-sectional area of the base portion with respect to the cross-sectional area of the stopping portion. Thereby, the cross-sectional area is reduced from the base portion so that the contact end face has a smaller area.

[0024] Preferably, the second central axis of the contact end face of the needle tail is displaced from the first central axis of the needle body by a first predetermined distance along the first horizontal axis direction.

[0025] As described above, when the upper and lower guide plate units are displaced relative to each other in the first horizontal axis direction to bend the needle body of the contact probe in the first horizontal axis direction, the section of the needle body located in the upper guide hole is arranged eccentrically with respect to the upper guide hole along the first horizontal axis direction. By displacing the second central axis and the first central axis by a first predetermined distance along the first horizontal axis direction, the degree to which the contact end face of the needle tail is eccentric along the first horizontal axis direction with respect to the upper guide hole can be reduced (compared to the needle body), and further, the contact end face of the needle tail can be arranged centrally with respect to the upper guide hole. Thereby, the contact end face of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Also, the risk that the contact end face of the needle tail exceeds the edge of the contact pad with which it contacts can be further reduced.

[0026] More preferably, the second central axis of the contact end face of the needle tail is displaced from the first central axis of the needle body by a second predetermined distance along the second horizontal axis direction.

[0027] The upper and lower guide plate units can be displaced relative to each other not only in the first horizontal axis direction but also in the second horizontal axis direction. Therefore, the section of the needle body located in the upper guide hole can be arranged eccentrically with respect to the upper guide hole along the second horizontal axis direction. By shifting the second central axis and the first central axis along the second horizontal axis direction by a second predetermined distance, the degree of eccentricity of the contact end face of the needle tail with respect to the upper guide hole along the second horizontal axis direction can be reduced (compared to the needle body), and furthermore, the contact end face of the needle tail can be centered with respect to the upper guide hole. Thereby, the contact end face of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. In addition, the risk that the contact end face of the needle tail exceeds the edge of the contact pad it contacts can be further reduced.

[0028] Preferably, the needle body has at least one gap extending along the longitudinal axis direction, the gap penetrates the needle body along the second horizontal axis direction, and the needle body is defined by the gap into two arm portions, and the two arm portions are separated from each other along the first horizontal axis direction.

[0029] Thereby, the gap weakens the rigidity of the needle body, reduces the contact force exerted by the contact probe on the contact pads of the device under test and the interface panel, and avoids damage to the contact pads caused by excessive contact force. In particular, in response to high-frequency and high-speed test needs, usually, in order to obtain good electrical transmission characteristics, a short contact probe is used. A short contact probe has high rigidity and contact force. In this case, the gap can reduce the contact force of the contact probe. In addition, the gap enhances the elasticity of the needle body and ensures the effect that the needle body elastically deforms along the first horizontal axis direction.

[0030] More preferably, the needle body has a thickness greater than or equal to its width.

[0031] Since the needle body is curved in the defined width direction (i.e., the first horizontal axis direction), the width of the needle body is less than or equal to the thickness and is further smaller than the thickness. Therefore, an excellent elastic deformation effect can be produced on the needle body, and the needle body can be made less likely to break by having a sufficient thickness.

[0032] More preferably, at least one group of protruding blocks is provided in the gap, the group of protruding blocks has two protruding blocks, and the two protruding blocks protrude from the two arm portions so as to face each other.

[0033] Thus, when the probe head of the contact probe abuts against the contact pad of the device under test and receives a reaction force, the needle body is compressed, elastically deformed, and displaced. At this time, the two protruding blocks facing each other in the gap abut against each other. Thereby, it is possible to avoid the adjacent arm portions from rubbing against each other due to contact with each other, and the service life of the contact probe can be improved. In addition, by the two protruding blocks facing each other abutting against each other, it is possible to maintain the displacement directions of the arm portions to be the same and to maintain a predetermined interval between the arm portions. This is useful for the electrical performance of high-frequency high-speed tests.

[0034] The probe head used in the probe card of the test device of the electronic device according to the present invention includes an upper guide plate unit, a lower guide plate unit, and a plurality of probes. The upper guide plate unit has a plurality of upper guide holes. The lower guide plate unit has a plurality of lower guide holes. The plurality of probes pass through the upper guide holes and the lower guide holes and include at least one contact probe according to claim 1. The plurality of probes are all curved along the first horizontal axis direction, a third central axis is defined in the upper guide hole, and the second central axis of the contact probe is closer to the third central axis of the upper guide hole through which it passes than the first central axis.

[0035] As a result, since the contact end surface of the needle tail of the probe head of the present invention is small, the contact probe of the probe head stably contacts the contact pad of the interface panel, so that the test result has stable and good accuracy. Further, the contact end surface of the needle tail has a lower degree of eccentricity with respect to the upper guide hole than the needle body. Thereby, the contact end surface of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Further, a sufficient safety distance away from the edge can be further ensured between the contact end surface of the needle tail and the edge of the contact pad with which it contacts, and the risk that the contact end surface of the needle tail exceeds the edge of the contact pad with which it contacts can be further reduced.

[0036] Preferably, the second central axis of the contact probe coincides with the third central axis of the upper guide hole.

[0037] As a result, the contact end surface of the needle tail is disposed centrally with respect to the upper guide hole. Therefore, the contact end surface of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Further, the risk that the contact end surface of the needle tail exceeds the edge of the contact pad with which it contacts can be further reduced.

[0038] Preferably, two mutually opposite directions are defined in the first horizontal axis direction, and the needle body of the contact probe has a first support surface facing one of the two directions in the first horizontal axis direction, and the first support surface is supported by the inner surface of the upper guide hole, and at least a part of the contact end of the needle tail of the contact probe deviates from the first support surface toward the other of the two directions in the first horizontal axis direction.

[0039] For example, when the first support surface of the needle body faces in the negative direction of the first horizontal axis, at least a part of the contact end surface of the needle tail deviates from the first support surface in the positive direction of the first horizontal axis. Thereby, compared with the needle body, the degree of eccentricity of the contact end surface of the needle tail along the first horizontal axis with respect to the upper guide hole is low. Further, the contact end surface of the needle tail can be arranged in the center with respect to the upper guide hole. Thereby, the contact end surface of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Also, the risk that the contact end surface of the needle tail exceeds the edge of the contact pad with which it contacts can be further reduced.

[0040] Preferably, two mutually opposite directions are defined in the second horizontal axis direction, the needle body of the contact probe has a second support surface facing one of the two directions in the second horizontal axis direction, the second support surface is supported by the inner surface of the upper guide hole, and at least a part of the contact end of the needle tail of the contact probe deviates from the second support surface toward the other of the two directions in the second horizontal axis direction.

[0041] For example, when the second support surface of the needle body faces in the negative direction of the second horizontal axis, at least a part of the contact end surface of the needle tail deviates from the second support surface in the positive direction of the second horizontal axis. Thereby, compared with the needle body, the degree of eccentricity of the contact end surface of the needle tail along the second horizontal axis with respect to the upper guide hole is low. Further, the contact end surface of the needle tail can be arranged in the center with respect to the upper guide hole. Thereby, the contact end surface of the needle tail can be more accurately aligned with the contact pad of the corresponding interface panel. Also, the risk that the contact end surface of the needle tail exceeds the edge of the contact pad with which it contacts can be further reduced.

[0042] The probe card of the test device used in the electronic device according to the present invention includes the above-described probe head and an interface panel. The interface panel includes a lower surface facing the probe head and a plurality of contact pads located on the lower surface. The contact end surface of the needle tail of the contact probe of the probe head is in mechanical and electrical contact with the contact pad of the interface panel.

[0043] Accordingly, the above-described probe head is used for the probe card of the present invention. Therefore, it has the advantages and effects thereof, and can produce test results with stable accuracy and good quality. In addition, the risk that the contact end surface of the needle tail exceeds the edge of the contact pad with which it contacts can be reduced.

[0044] The detailed structures, features, assembly or usage methods of the contact probe, probe head, and probe card according to the present invention will be described in the detailed description of the following embodiments. However, those having ordinary knowledge in the field of the present invention should understand that the detailed description and the specific embodiments listed for implementing the present invention are for explaining the present invention, and are not for limiting the scope of the utility model registration claims of the present invention.

Brief Description of the Drawings

[0045]

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Embodiments for Carrying Out the Invention

[0046] The applicant will explain here that in the embodiments and drawings introduced below, the same reference numerals represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are not illustrated based on actual proportions and quantities for the convenience of illustration, and the features of different embodiments can be applied to each other if feasible. Also, when referring to an element being installed on another element, it means that the aforementioned element is directly installed on the other element, or the aforementioned element is indirectly installed on the other element, that is, one or more other elements are further installed between the two elements. When an element is "directly" installed on another element, it means that no other element is installed between the two elements.

[0047] As shown in FIG. 1, a test device 10 for an electronic device according to an embodiment of the present invention includes a mounting table 11 and a probe card 12. The electronic device (hereinafter referred to as the device under test) of this embodiment is formed on a wafer 20. The wafer 20 is placed on the mounting table 11. A plurality of devices under test 21 are formed on the wafer 20. Each device under test 21 includes a plurality of contact pads 211. The probe card 12 has at least one interface panel 30 and a probe head 40. The probe head 40 has an upper guide plate unit 41, a lower guide plate unit 42, and a plurality of probes 43 penetrating through the upper and lower guide plate units 41 and 42. The probe card 12 is used to be electrically connected to a test machine (not shown), and a test program is executed by mechanically and electrically connecting the probes 43 to the contact pads 211 of the device under test 21.

[0048] As shown in FIG. 2, the upper guide plate unit 41 has a plurality of upper guide holes 411, and the lower guide plate unit 42 has a plurality of lower guide holes 421. A plurality of probes 43 each pass through the upper guide hole 411 and the lower guide hole 421. All or part of the probes 43 of the probe head 40 are the contact probes 50 shown in FIG. 2. The contact probe 50 refers to those having specific structural features at the needle tail among the probes 43. This part will be described in detail later. In this embodiment, the upper and lower guide plate units 41 and 42 each have only one plate. However, the upper guide plate unit 41 and / or the lower guide plate unit 42 may be composed of a plurality of stacked plates. The upper and lower guide plate units 41 and 42 may be directly connected to each other by having convex structures at their edges, or a hollow guide plate (not shown) may be connected between the upper and lower guide plate units 41 and 42.

[0049] The probe card usually includes a main circuit board for electrically connecting to a test machine. The main circuit board may be directly installed on the probe head. Or, a space converter may be installed between the main circuit board and the probe head. The interface panel 30 described in the present invention is directly provided on the probe head 40 and is a circuit board that directly contacts the probe 43. Therefore, the interface panel 30 can be the above-mentioned main circuit board or a space converter. As shown in FIG. 2, the interface panel 30 has a lower surface 31 facing the probe head 40 and a plurality of contact pads 32 located on the lower surface 31. The contact probes 50 each mechanically and electrically contact the contact pads 32 of the interface panel 30.

[0050] During the assembly process of the probe head 40, the upper and lower guide plate units 41 and 42 are initially installed facing each other and are not fixed in place. At this time, the upper guide hole 411 is coaxially aligned with the lower guide hole 421. The probe 43 is initially linear and passes through the coaxially aligned upper and lower guide holes 411 and 421 from top to bottom. Then, the upper and lower guide plate units 41 and 42 move relatively in the direction of a first horizontal axis (Y-axis), shifting the upper guide hole 411 and the lower guide hole 421 in the Y-axis direction and bending the probe 43 along the Y-axis. That is, as shown in FIG. 2, the contact probe 50 is bent. The upper and lower guide plate units 41 and 42 (but not limited to this) move relatively in the direction of a second horizontal axis (X-axis), shifting the upper guide hole 411 and the lower guide hole 421 in the X-axis direction and bending the probe 43 along the X-axis. The upper and lower guide plate units 41, 42 are fixed to each other after moving relative to each other, so that the probe 43 in the probe head 40 maintains its curved shape.

[0051] As shown in FIGS. 2 and 3, when the contact probe 50 is still in a vertical state, the contact probe 50 includes a needle body 51 that extends in one vertical axis (Z-axis) direction and is elongated, a needle head 52 that is integrally connected to the needle body 51 and extends downward along the Z-axis direction from the needle body 51, and a needle tail 53 that is integrally connected to the needle body 51 and extends upward along the Z-axis direction from the needle body 51. In the present invention, the width is defined along the first horizontal axis (Y-axis) direction, the thickness is defined along the second horizontal axis (X-axis) direction, and the area of the cross-section orthogonal to the vertical axis (Z-axis) direction is defined. That is, the area of the cross-section is defined in the X-Y plane. When the assembly of the probe head 40 is completed, the needle tail 53 is located above the upper guide hole 411 and is used to abut against the contact pad 32 of the interface panel 30. The needle head 52 is located below the lower guide hole 421 and is used to abut against the contact pad 211 of the device under test 21. The needle body 51 is provided between the upper guide plate unit 41 and the lower guide plate unit 42 so as to be curved in the first horizontal axis direction or curved in the first and second horizontal axis directions, and is used for slightly elastic bending when the needle head 52 abuts against the contact pad 211 of the device under test 21.

[0052] As shown in FIGS. 3 and 4, in the present embodiment, the needle tail 53 of the contact probe 50 has, in order from bottom to top, one stop portion 531, one base portion 532, and one contact end portion 533. The stop portion 531 is connected to the needle body 51, and the base portion 532 is connected between the stop portion 531 and the contact end portion 533. The thickness of the stop portion 531 is the same as the thickness of the needle body 51, and the width of the stop portion 531 is larger than the width of the needle body 51. Therefore, the cross-sectional area of the stop portion 531 is larger than the cross-sectional area of the needle body 51. As shown in FIG. 2, the width of the upper guide hole 411 is slightly larger than the width of the needle body 51 and smaller than the width of the stop portion 531. Therefore, due to the stop portion 531, the needle tail 53 is restricted above the upper guide plate unit 41. The thickness of the base portion 532 is the same as the thickness of the stop portion 531 (or the thickness of the base portion 532 may be smaller than the thickness of the stop portion 531), and the width of the base portion 532 is smaller than the width of the stop portion 531. For this reason, the cross-sectional area of the base portion 532 is smaller than the cross-sectional area of the stop portion 531. The width of the contact end portion 533 is smaller than the width of the base portion 532. The thickness of the base portion 532 is larger than or the same as the thickness of the contact end portion 533. The cross-sectional area of the portion where the contact end portion 533 and the base portion 532 are connected is smaller than the cross-sectional area of the base portion 532, and the cross-sectional area of the contact end portion 533 gradually decreases upward from this portion. The contact end portion 533 has one contact end face 534 located at the uppermost end. The contact end face 534 is used to make mechanical and electrical contact with the contact pad 32 of the interface panel 30. The overall width of the contact end portion 533 is smaller than the needle body 51. Also, except for the portion connected to the base portion 532, the thickness of other portions of the contact end portion 533 is smaller than the needle body 51 and gradually decreases upward, so that the area of the contact end face 534 is much smaller than the cross-sectional area of the needle body 51. In the present invention, the base portion 532 and the stop portion 531 are discontinuously connected to each other. That is, the base portion 532 and the stop portion 531 can be clearly distinguished by their external shapes, and the two do not form a continuous shape.For example, the base portion 532 and the stopper portion 531 are formed in a stepped shape in terms of appearance and have a height difference on the outer surface (side surface).

[0053] As a result, compared with the needle body 51, the contact end portion 533 of the needle tail 53 has a reduction in both width and thickness, and the area of the contact end surface 534 is reduced. Thereby, the stability of the contact between the contact end surface 534 of the needle tail 53 and the contact pad 32 of the interface panel 30 can be enhanced, a stable contact resistance can be obtained, the test results can have stable and good accuracy, and it can be ensured that the tested device has good performance. Also, since the area of the contact end surface 534 of the needle tail 53 is small, it can be more accurately aligned with the contact pad 32 of the corresponding interface panel 30. Furthermore, a sufficient safety distance away from the edge can be ensured between the contact end surface 534 of the needle tail 53 and the edge of the contact pad 32 with which it comes into contact. Therefore, the risk that the contact end surface 534 of the needle tail 53 exceeds the edge of the contact pad 32 with which it comes into contact can be reduced.

[0054] In addition, a base portion 532 is provided between the contact end portion 533 and the stop portion 531. When the area of the contact end surface 534 of the needle tail 53 is reduced, the length or height of the contact end portion 533 in the Z-axis direction is decreased. Thereby, the structural strength of the needle tail 53 is enhanced, making it difficult for the contact end portion 533 to break when receiving force. Also, the base portion 532 can be designed to have a relative positional relationship that can be clearly distinguished from the contact end portion 533. For example, as shown in FIG. 3, in this embodiment, the right side of the base portion 532 is flush with the right side of the contact end portion 533, and the left side of the base portion 532 protrudes significantly more than the left side of the contact end portion 533. Such a non-symmetrical left-right design has a clear identification effect. When the contact probe 50 is passed through the upper and lower guide plate units 41 and 42 from top to bottom, the actual operator can easily identify whether the mounting direction of the contact probe 50 is correct based on the relative positional relationship between the base portion 532 and the contact end portion 533. Thereby, the mounting efficiency and accuracy of the contact probe 50 can be improved. The base portion 532 and the contact end portion 533 are arranged eccentrically. Specifically, the contact end portion 533 is offset by a predetermined distance with respect to the base portion 532 in the width direction (i.e., the bending direction of the needle body). Or, the contact end portion 533 is offset by a predetermined distance with respect to the base portion 532 in the Y-axis direction. More specifically explained, the base portion 532 has one top surface 532a. The contact end portion 533 is connected and / or formed on a part of the top surface 532a so as to be offset to at least one side of the base portion 532 (offset to the right side in this embodiment, and may be inclined to the front side or the rear side simultaneously), and the connection portion between the contact end portion 533 and the base portion 532 is offset by a predetermined distance D3 along at least one of the X direction and the Y direction with respect to at least one edge portion 532b of the top surface 532a of the base portion 532.

[0055] As shown in FIG. 3, the needle body 51 has a first central axis A1 extending along a Z axis defined, and the contact end face 534 has a second central axis A2 extending along a Z axis defined. The second central axis A2 is offset from the first central axis A1 by a predetermined distance D1 along the Y axis. As shown in FIG. 2, the upper guide hole 411 has a third central axis A3 defined. When the assembly of the probe head 40 is completed, the upper and lower guide plate units 41, 42 move relative to each other along the Y axis, so that the first central axis A1 of the needle body 51 is deviated from the third central axis A3 of the upper guide hole 411 in the negative direction of the Y axis (see FIG. 5). Further, the second central axis A2 of the contact end face 534 may be offset from the first central axis A1 of the needle body 51 by a predetermined distance D2 along the X axis. When the assembly of the probe head 40 is completed, the upper and lower guide plate units 41, 42 move relative to each other along the X axis, so that the first central axis A1 of the needle body 51 is deviated from the third central axis A3 of the upper guide hole 411 in the positive direction of the X axis. It should be understood that when the assembly of the probe head 40 is completed, the middle section of the needle body 51 of the contact probe 50 is curved. Therefore, the middle section of the first central axis A1 of the needle body 51 also curves accordingly. The deviation of the first central axis A1 from the third central axis A3 of the upper guide hole 411 refers to the relationship between the section located in the upper guide hole 411 at the first central axis A1 and the third central axis A3 of the upper guide hole 411. In the present embodiment, the design of the contact end 533 is such that the second central axis A2 of the contact end face 534 is closer to the third central axis A3 of the upper guide hole 411 than the first central axis A1 of the needle body 51 (see FIG. 5 (in FIG. 5, the contact end face 534 is shown by a broken line)). In other words, compared with the needle body 51, the contact end face 534 of the needle tail 53 is relatively less eccentric with respect to the upper guide hole 411. Thereby, the contact end face 534 of the needle tail 53 can be more accurately aligned with the contact pad 32 of the corresponding interface panel 30. Further, the risk that the contact end face 534 of the needle tail 53 exceeds the edge of the contact pad 32 with which it contacts can be further reduced.

[0056] More preferably, the contact end portion 533 may be designed such that the second central axis A2 of the contact end face 534 and the third central axis A3 of the upper guide hole 411 overlap. That is, the contact end face 534 of the needle tail 53 is disposed at the center with respect to the upper guide hole 411. Thereby, the contact end face 534 of the needle tail 53 can be more accurately aligned with the contact pad 32 of the corresponding interface panel 30. Further, the risk that the contact end face 534 of the needle tail 53 exceeds the edge of the contact pad 32 with which it contacts can be further reduced.

[0057] Furthermore, in the aspect shown in FIGS. 2 to 5, the needle body 51 of the contact probe 50 has a first support surface 511 facing in the negative direction of the Y axis. As described above, the relative movement of the upper and lower guide plate units 41 and 42 along the Y axis causes the first support surface 511 of the needle body 51 to be supported by one inner surface 411a of the upper guide hole 411. However, the contact end portion 533 of the needle tail 53 deviates from the first support surface 511 in the positive direction of the Y axis. That is, as shown in FIG. 3, the position of the entire contact end portion 533 in the Y axis is deviated to the right of the first support surface 511. Such a structural design can reduce the degree to which the contact end face 534 of the needle tail 53 is eccentric along the Y axis with respect to the upper guide hole 411. Further, it can be made to be in a central arrangement.

[0058] On one hand, the needle body 51 of the contact probe 50 has a second support surface 512 facing the positive direction of the X-axis. As described above, the relative movement of the upper and lower guide plate units 41 and 42 along the X-axis causes the second support surface 512 to be supported by the other inner surface 411b of the upper guide hole 411. However, the contact end 533 of the needle tail 53 deviates from the second support surface 512 in the negative direction of the X-axis. That is, as shown in FIG. 4, the position of one front slope 535 of the contact end 533 on the X-axis gradually deviates upward from the position of the second support surface 512 on the X-axis. Such a structural design can reduce the degree of eccentricity of the contact end surface 534 of the needle tail 53 along the X-axis with respect to the upper guide hole 411. Furthermore, it can be centered.

[0059] The needle tail 53 of the contact probe 50 may have a configuration as shown in FIG. 6. The differences from the needle tail 53 shown in FIG. 4 are as follows. The contact end 533 shown in FIG. 4 is provided with only a front slope 535 on its front side, where the cross-sectional area gradually decreases upward. The contact end 533 shown in FIG. 6 is provided with one front slope 535 and one rear slope 536 on its front and rear sides, respectively, where the cross-sectional area gradually decreases upward. Thereby, the area of the contact end surface 534 can be further reduced. As shown in FIG. 7 (in FIG. 7, the contact end surface 534 is shown by a dashed line), this allows the contact end surface 534 to be more accurately aligned with the contact pad 32 of the corresponding interface panel 30. Also, the risk of the contact end surface 534 exceeding the edge of the contact pad 32 it contacts can be further reduced. The contact end 533 is an isosceles trapezoid that is large at the bottom and small at the top. Such a geometric shape enables the upper contact end surface 534 to maintain a small contact area, while ensuring the connection strength between the lower part and the base part 532, further enhancing the reliability and efficiency of the overall design.

[0060] In the embodiments of FIGS. 4 and 6, the contact end portion 533 of the needle tail 53 gradually tapers from its lowermost end to the contact end surface 534 at its uppermost end. That is, the area of the entire cross-section gradually decreases along the Z-axis toward the contact end surface 534. However, in the contact end portion 533 of the needle tail 53, the area of some cross-sections may gradually decrease along the Z-axis toward the contact end surface 534. The contact end portion 533 of the needle tail 53 shown in FIGS. 8 and 9 has a gradually tapering section 533a where the cross-sectional area gradually decreases and a non-tapering section 533b where the cross-sectional area is uniform. By gradually reducing, rather than directly and significantly decreasing, the area of at least some cross-sections of the contact end portion 533 of the needle tail 53, it is possible to avoid a lack of structural strength due to the decrease in the cross-sectional area of the contact end portion 533. In other words, since the contact end portion 533 is formed to gradually taper upward, while maintaining a small area of the contact end surface 534, the strength of the contact end portion 533 can be further ensured. That is, the connection portion between the contact end portion 533 and the base portion 532 can withstand greater pressure or stress, improving the stability and durability of the overall structure of the contact end portion 533 and reducing damage or deformation due to non-uniform forces.

[0061] The needle tail 53 of the contact probe 50 has the characteristic that at least a part of the contact end 533 forms a gradually narrowing shape, so that the contact end face 534 has a relatively small area. Also, this characteristic can also be achieved by at least a part of at least one side surface of the needle tail 53 shrinking directly and flatly (in a non-gradually narrowing shape) inward with respect to the needle body 51. More specifically, as shown in FIG. 4, the needle tail 53 has four side surfaces 53a, 53b, 53c, 53d, that is, the front side, the rear side, the left side, and the right side. The needle body 51 also has corresponding four side surfaces 51a, 51b, 51c, 51d. In the aspects shown in FIGS. 4, 6, 8, and 9, the side surface 53d (that is, the right side) of the needle tail 53 has one inner retreat plane 537. The inner retreat plane 537 is parallel to the side surface 51d (that is, the right side) of the needle body 51 and faces in the positive direction of the Y-axis, and the inner retreat plane 537 deviates from the side surface 51d of the needle body 51 in the negative direction of the Y-axis (that is, deviates toward the left side). Also, the side surface 53c (that is, the left side) of the needle tail 53 has another inner retreat plane 538. The inner retreat plane 538 is parallel to the side surface 51c (that is, the left side) of the needle body 51 and faces in the negative direction of the Y-axis, and the inner retreat plane 538 deviates from the side surface 51c of the needle body 51 in the positive direction of the Y-axis (that is, deviates toward the right side). In other words, both the left and right sides of the needle tail 53 have inner retreat planes 538 and 537, facing in the negative direction and the positive direction of the Y-axis respectively. Or, for example, like the needle tail 53 shown in FIGS. 10 and 11, the needle tail 53 has an inner retreat plane on one side surface. The difference between the needle tail 53 shown in FIG. 10 and that shown in FIG. 4 is that the inner retreat plane 538 is provided only on the side surface 53c (that is, the left side), and there is no retreat on the right side. Therefore, the widths of the base portion 532 and the needle body are the same. The difference between the needle tail 53 shown in FIG. 10 and that shown in FIG. 10 is that in addition to the front slope 535, one right slope 539 that gradually reduces the cross-sectional area upward is further provided at the contact end 533.

[0062] As a result, the needle tail 53 reduces in cross-sectional area with respect to the needle body 51 in a non-gradual reduction form. Still, the contact force exerted by the needle tail 53 on the contact pad 32 of the interface panel 30 can be reduced to some extent, and by reducing the area of the contact end face 534, the contact resistance and contact stability can be enhanced. Also, in each of the above-described aspects, the needle tail 53 has both the characteristic of reducing in cross-sectional area in a gradually reducing form (for example, the front slope 535, the rear slope 536, the right slope 539), and the characteristic of reducing in cross-sectional area in a non-gradual reduction form (for example, the inner retreat planes 537, 538). Thus, the contact end face 534 has an appropriate area, generates appropriate contact force and contact resistance, and conforms to the test. Alternatively, it is also possible to replace the above-described inner retreat plane 538 with a single left slope 540, and as shown in FIG. 12, a similar effect can be obtained.

[0063] To summarize the above, at least a part or the whole of one of the four side surfaces of the needle tail 53 is an inner retracted plane, and / or at least a part or the whole of one of the four side surfaces of the contact end portion 533 of the needle tail 53 is an inclined surface, and the settings can be combined as required. For example, there are the following modes. The contact end portion 533 of the needle tail 53 shown in FIG. 13 is provided with a front inclined surface 535, a rear inclined surface 536, a right inclined surface 539, and a left inclined surface 540. The needle tail 53 shown in FIG. 14 is provided with inner retracted planes 537, 538, a front inclined surface 535, and a right inclined surface 539. The needle tail 53 shown in FIG. 15 is provided with inner retracted planes 537, a front inclined surface 535, a right inclined surface 539, and a left inclined surface 540. FIG. 16 is similar to FIG. 14, except that the right inclined surface 539 occupies a part on the right side of the contact end portion 533. FIG. 17 is similar to FIG. 15, except that the right inclined surface 539 and the left inclined surface 540 each occupy a part on the right side and the left side of the contact end portion 533, respectively. FIGS. 18 and 19 are similar to FIGS. 16 and 17, except that the needle tail 53 does not have the inner retracted plane 537, and the base portion 532 and the needle body 51 have the same width. The needle tail 53 shown in FIG. 20 is not provided with an inner retracted plane, and the area of the contact end surface 534 is reduced by the front inclined surface 535 and the right inclined surface 539. The needle tail 53 shown in FIG. 21 is not provided with an inner retracted plane, and the area of the contact end surface 534 is reduced by the front inclined surface 535 and the left inclined surface 540. FIG. 22 is similar to FIG. 20, except that the right inclined surface 539 is located on both the base portion 532 and the contact end portion 533 at the same time. FIG. 23 is similar to FIG. 21, except that the left inclined surface 540 is located on both the base portion 532 and the contact end portion 533 at the same time. Among FIGS. 2 to 21, the base portion 532 is rectangular in the longitudinal section along the X-axis and the Y-axis, and is rectangular in the longitudinal section along the Y-axis and the X-axis. Therefore, the front, rear, left, and right side surfaces of the base portion 532 are all rectangular. Among FIGS. 22 to 23, the base portion 532 is trapezoidal in the longitudinal section along the Y-axis and the Z-axis. Or, the base portion 532 may be trapezoidal in the longitudinal section along the X-axis and the Z-axis.In other words, the base portion 532 can form a trapezoid in a cross-section parallel to the longitudinal axis direction. Thereby, on the premise that the cross-sectional area gradually decreases upward from the base portion 532 and the contact end surface 534 has a small area required, the overall structural strength of the needle tail 53 can be ensured. Further, in each of the above-described aspects, the front inclined surface 535 may be replaced with another inner retreating plane. For example, the needle tail 53 shown in FIG. 24 is similar to that shown in FIG. 4, however, the front inclined surface 535 is not provided on the front side of the contact end portion 533, and one inner retreating plane 541 is provided. The inner retreating plane 541 is parallel to the side surface 51a (i.e., the front side) of the needle body 51 and faces in the positive direction of the X axis. Further, the inner retreating plane 541 deviates from the side surface 51a of the needle body 51 in the negative direction of the X axis.

[0064] As shown in FIGS. 25 and 26, the needle body 51 of the contact probe 50 of the present invention has at least one gap 513. The gap 513 extends along the longitudinal direction of the needle body 51 and forms a narrow and long shape. That is, when the needle body 51 has not yet undergone bending deformation, the gap 513 extends along the Z-axis. The gap 513 penetrates the needle body 51 along the X-axis such that at least two arm portions 514 are defined by at least one gap 513. The two arm portions 514 are thin sheet-like and are separated from each other along the Y-axis. Such a gap 513 weakens the rigidity of the needle body 51, thereby reducing the contact force applied by the contact probe 50 to the contact pad 211 of the device under test 21 and the contact pad 32 of the interface panel 30, and avoiding damage to the contact pads 211 and 32 caused by excessive contact force. In particular, in response to high-frequency and high-speed test needs, usually, in order to obtain good electrical transmission characteristics, a short contact probe 50 is used. The short contact probe 50 has high rigidity and contact force. In this case, the gap 513 can reduce the contact force of the contact probe 50. Further, the gap 513 enhances the elasticity of the needle body 51 and ensures the effect of elastic deformation of the needle body 51 along the Y-axis. Furthermore, since the needle body 51 is curved along the Y-axis and the Y-axis is the direction defining the width, the thickness T of the needle body 51 can be made greater than or equal to the width W of the needle body 51, resulting in an excellent elastic deformation effect on the needle body 51, and the needle body 51 can be made less likely to break by having a sufficient thickness T.

[0065] In addition, at least one protruding block group 515 may be provided in the gap 513. The protruding block group 515 has two protruding blocks 516, and the two protruding blocks 516 protrude from the two arm portions 514 so as to face each other. Thus, when the probe head 52 of the contact probe 50 abuts against the contact pad 211 of the device under test 21 and receives a reaction force, the needle body 51 is compressed, elastically deformed, and displaced. At this time, the two protruding blocks 516 facing each other in the gap 513 abut against each other. Thereby, it is possible to avoid the adjacent arm portions 514 from rubbing against each other and wearing out, and to improve the service life of the contact probe 50. In addition, when the two protruding blocks 516 facing each other abut against each other, it is possible to maintain the displacement directions of the arm portions 514 to be the same and to maintain a predetermined interval between the arm portions 514. This is useful for the electrical performance of high-frequency high-speed tests.

[0066] Finally, the components disclosed in the embodiments according to the present invention are for illustrative purposes only and do not limit the scope of the rights of the present invention. It is again explained that alternative or modified other equivalent components should be included in the scope of the claims for utility model registration of the present invention.

Explanation of Reference Numerals

[0067] 10: Test device 11: Mounting table 12: Probe card 20: Wafer 21: Device under test 211: Contact pad 30: Interface panel 31: Lower surface 32: Contact pad 40: Probe head 41: Upper guide plate unit 411: Upper guide hole 411a, 411b: Inner surface 42: Lower guide plate unit 421: Lower guide hole 43: Probe 50: Contact Probe 51: Needle Body 51a, 51b, 51c, 51d: Side Surfaces 511: First Support Surface 512: Second Support Surface 513: Gap 514: Arm Portion 515: Protrusion Block Group 516: Protrusion Block 52: Needle Head 53: Needle Tail 53a, 53b, 53c, 53d: Side Surfaces 531: Stopper 532: Base Portion 532a: Top Surface 532b: Edge 533: Contact End 533a: Gradually Shrinking Region 533b: Non-Gradually Shrinking Region 534: Contact End Face 535: Front Inclined Plane 536: Rear Inclined Plane 537, 538: Inner Retreating Plane 539: Right Inclined Plane 540: Left Inclined Plane 541: Inner Retreating Plane A1: First Central Axis A2: Second Central Axis A3: Third Central Axis D1, D2, D3: Distance T: Thickness W: Width

Claims

1. A contact probe of a probe head in a probe card of a test device used for an electronic device, wherein a longitudinal axis direction, a first lateral axis direction, and a second lateral axis direction orthogonal to each other are defined, a width is defined along the first lateral axis direction, a thickness is defined along the second lateral axis direction, and a cross-sectional area orthogonal to the longitudinal axis direction is defined, a needle body that extends in the longitudinal axis direction and is elongated, a first central axis line extending in the longitudinal axis direction is defined, and the needle body is provided between an upper guide plate unit and a lower guide plate unit so as to be curved at least in the first lateral axis direction, a needle head connected to the needle body, extending downward along the longitudinal axis direction from the needle body, and used to abut against a contact pad of a device under test located below the lower guide plate unit, a needle tail connected to the needle body and extending upward along the longitudinal axis direction from the needle body, and comprising: the needle tail has a contact end portion, the contact end portion has a contact end face, the contact end face is used to make mechanical and electrical contact with a contact pad of an interface panel, a second central axis line extending along the longitudinal axis direction is defined for the contact end face, at least a part of the contact end portion is formed such that both the width and the thickness are smaller than those of the needle body, and the area of the contact end face is made smaller than the cross-sectional area of the needle body. A contact probe characterized by the above.

2. The contact probe according to claim 1, wherein at least a part of the contact end portion of the needle tail has a cross-sectional area that gradually decreases in the longitudinal axis direction as it approaches the contact end face. A contact probe characterized by the above.

3. The contact probe according to claim 1 or 2, wherein the needle tail has four side faces, at least one of the four side faces has an inner retracted plane, the inner retracted plane is parallel to the side face of the needle body and faces in the same direction, and deviates from the side face of the needle body in the opposite direction of the same direction. A contact probe characterized by the above.

4. The contact probe according to claim 3, The needle tail has two side surfaces each having an inner retreat plane, and the two inner retreat planes face the positive and negative directions of the first horizontal axis direction, respectively. The contact probe is characterized in that. **Claim 5** The contact probe according to claim 1, wherein the needle tail further has a stopper portion and a base portion, the stopper portion is connected to the needle body, and the base portion is connected between the stopper portion and the contact end portion; the stopper portion is formed such that the cross-sectional area thereof is larger than the cross-sectional area of the needle body, and restricts the needle tail above the upper guide plate unit; the base portion is formed such that the cross-sectional area thereof is smaller than the cross-sectional area of the stopper portion; the contact end portion has a cross-sectional area smaller than the cross-sectional area of the base portion or a cross-sectional area the same as the cross-sectional area of the base portion. The contact probe is characterized in that. **Claim 6** The contact probe according to claim 5, wherein the base portion has a top surface, and the contact end portion is connected to a part of the top surface so as to be offset to at least one side of the base portion; a connection portion between the contact end portion and the base portion is displaced by a predetermined distance along at least one of the first horizontal axis direction and the second horizontal axis direction with respect to at least one edge of the top surface of the base portion. The contact probe is characterized in that. **Claim 7** The contact probe according to claim 5, wherein the base portion is trapezoidal in a cross-section parallel to the longitudinal axis direction. The contact probe is characterized in that. **Claim 8** The contact probe according to claim 5, wherein the base portion is formed to have a width smaller than the width of the stopper portion, has a thickness smaller than the thickness of the stopper portion or a thickness the same as the thickness of the stopper portion, and has a thickness larger than the thickness of the contact end portion or a thickness the same as the thickness of the contact end portion. The contact probe is characterized in that. **Claim 9** The contact probe according to claim 5, wherein the base portion and the stopper portion are discontinuously connected to each other. The contact probe is characterized in that. **Claim 10** The contact probe according to claim 1, wherein the second central axis of the contact end surface of the needle tail is displaced by a first predetermined distance along the first horizontal axis direction from the first central axis of the needle body. The contact probe is characterized in that. **Claim 11** The contact probe according to claim 10, wherein the second central axis of the contact end surface of the needle tail is displaced by a second predetermined distance from the first central axis of the needle body along the second lateral axis direction A contact probe characterized by that.

12. The contact probe according to claim 1, wherein the needle body has at least one gap extending along the longitudinal axis direction, the gap penetrates the needle body along the second lateral axis direction, and the needle body is defined by the gap into two arm portions, and the two arm portions are separated from each other along the first lateral axis direction A contact probe characterized by that.

13. The contact probe according to claim 12, wherein the needle body has a thickness greater than the width or the thickness is the same as the width A contact probe characterized by that.

14. The contact probe according to claim 12, wherein at least one group of protruding blocks is provided in the gap, the group of protruding blocks has two protruding blocks, and the two protruding blocks protrude from the two arm portions respectively so as to face each other A contact probe characterized by that.

15. A probe head of a probe card of a test device used in an electronic device, comprising an upper guide plate unit having a plurality of upper guide holes, a lower guide plate unit having a plurality of lower guide holes, a plurality of probes including at least one contact probe according to claim 1 passing through the upper guide hole and passing through the lower guide hole, the plurality of probes are all curved along the first lateral axis direction, a third central axis is defined in the upper guide hole, and the second central axis of the contact probe is closer to the third central axis of the upper guide hole through which it passes than the first central axis A probe head characterized by that.

16. The probe head according to claim 15, wherein the second central axis of the contact probe overlaps the third central axis of the upper guide hole A probe head characterized by that.

17. The probe head according to claim 15, wherein The first horizontal axis direction defines two opposite directions, the needle body of the contact probe has a first support surface facing one of the two directions of the first horizontal axis direction, the first support surface is supported by the inner surface of the upper guide hole, and at least a part of the contact end of the needle tail of the contact probe deviates from the first support surface toward the other of the two directions of the first horizontal axis direction. The second horizontal axis direction defines two opposite directions, the needle body of the contact probe has a second support surface facing one of the two directions of the second horizontal axis direction, the second support surface is supported by the inner surface of the upper guide hole, and at least a part of the contact end of the needle tail of the contact probe deviates from the second support surface toward the other of the two directions of the second horizontal axis direction. A probe head characterized by the above.

18. A probe card of a test device used for an electronic device, the probe head according to claim 15, an interface panel including a lower surface facing the probe head and a plurality of contact pads located on the lower surface, the contact end surface of the needle tail of the contact probe of the probe head makes mechanical and electrical contact with the contact pads of the interface panel. A probe card characterized by the above.

Images