Corrosion-resistant double-layer sampling box

Abstract

To provide a corrosion-resistant double-layer sampling box that reduces contamination of the inner sampling space of the double-layer sampling box from the external environment and improves the cleanliness of the inside of the body. [Solution] A corrosion-resistant double-layer sampling box (20) includes an outer door and a main body (22) on which the outer door is provided, wherein an inner door (221) is provided within the main body, and in the main body, an inner sampling space and an outer transition space (223) are defined by the inner door, the inner sampling space is connected to the outer transition space by opening and closing the inner door, and the outer transition space is connected to the outside of the main body by opening and closing the outer door, and the main body has a plurality of fluid pipeline attachment ports connected to the inner sampling space, a curtain gas supply port (225), and a plurality of curtain gas outlets (226) connected to the curtain gas supply port, the plurality of curtain gas outlets are connected to the outer transition space, and the gas outlet directions of the plurality of curtain gas outlets are located between the inner door and the outer door.

Description

[Technical Field]

[0001] The present invention relates to a sampling box, and in particular to a corrosion-resistant double-layer sampling box. [Background technology]

[0002] Chemical solutions are commonly used in semiconductor manufacturing processes, and to ensure their quality, it is necessary to detect their quality before use. To ensure the accuracy of the detection data and the safety of the factory environment, sampling boxes are installed within the factory. An operator places a sampling bottle in the sampling box and operates it from outside the box to inject the chemical solution into the sampling bottle. Examples of conventional sampling boxes include Patent Documents 1 and 2.

[0003] As semiconductor manufacturing processes continue to evolve, the sampling environment provided by conventional sampling boxes is no longer able to fully protect the chemicals being sampled. This is because the body and components of conventional sampling boxes are susceptible to corrosion by vapors (hereinafter referred to as chemical vapors) generated from the chemicals, affecting the sampling environment and even the sampling results of the chemicals being sampled. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Taiwan Utility Model Patent No. TWM662704 [Patent Document 2] Taiwan Utility Model Patent No. TWM657907 Summary of the Invention [Problem to be solved by the invention]

[0005] The main purpose of this invention is to solve the problems that conventional sampling boxes have insufficient corrosion resistance in the sampling environment and insufficient cleanliness. [Means for solving the problem]

[0006] To achieve the above object, the present invention provides a corrosion-resistant double-layer sampling box, including an outer door and a main body provided with the outer door, wherein an inner door is provided within the main body, the inner door defining an inner sampling space and an outer transition space within the main body, the inner sampling space communicating with the outer transition space when the inner door is opened or closed, and the outer transition space communicating with the outside of the main body when the outer door is opened or closed, the main body having a plurality of fluid pipeline attachment ports communicating with the inner sampling space, a curtain gas supply port, and a plurality of curtain gas outlets communicating with the curtain gas supply port, the plurality of curtain gas outlets communicating with the outer transition space, and the gas outlet directions of the plurality of curtain gas outlets being located between the inner door and the outer door.

[0007] In one embodiment, the body has a gas passageway communicating the curtain gas supply port with the plurality of curtain gas delivery ports.

[0008] In one embodiment, the projections of the curtain gas outlets are located between the inner door and the outer door.

[0009] In one embodiment, the body has a gas outlet in communication with the outer transition space.

[0010] In one embodiment, the body has a waste outlet in communication with the interior sampling space.

[0011] In one embodiment, the main body has a drain pan provided in the inner sampling space, a plurality of drain hoses are provided in the drain pan, and a projection range of the drain pan overlaps with the waste liquid discharge port.

[0012] In one embodiment, the main body has a guide slope provided at the bottom of the inner sampling space, and the waste liquid discharge port is located on the lower side of the guide slope in horizontal height.

[0013] In one embodiment, the body includes a guide plate disposed within the inner sampling space.

[0014] In one embodiment, the double-layer sampling box is provided on the surface of the body and has a door sensor for detecting whether the outer door is open or closed.

[0015] In one embodiment, the double-layer sampling box has a plurality of plastic hinges provided on the body, and the plastic hinges are connected to one of the outer door and the inner door. [Effects of the Invention]

[0016] The present invention, implemented as described above, has the following advantages over the prior art: The main body of the present invention has a double-layer design, and the main body is divided into an inner sampling space and an outer transition space. The outer transition space is used as a transition area between the inner sampling space and the external environment of the double-layer sampling box, thereby reducing contamination of the inner sampling space from the external environment of the double-layer sampling box. Furthermore, the main body is further provided with a plurality of curtain gas outlets, which communicate with the outer transition space and are positioned between the outer door and the inner door, thereby reducing the entry of dirt from the outside of the main body when the outer door is opened and improving the cleanliness of the inside of the main body. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 2 is a three-dimensional structural diagram of one embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view taken along the line AA in FIG. [Figure 3] FIG. 2 is a cross-sectional view taken along the line BB in FIG. [Figure 4]1 is a schematic diagram of an embodiment of the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0018] The technical contents of the present invention will be described in detail below with reference to the drawings. 1 to 4, the present invention provides a corrosion-resistant double-layer sampling box 20, which provides sampling bottles 80 for sampling. The double-layer sampling box 20 includes an outer door 21 and a main body 22. The outer door 21 is attached to the main body 22 and is exposed on the surface of the double-layer sampling box 20. An inner door 221 is provided within the main body 22, and faces the outer door 21 but is not exposed on the surface of the double-layer sampling box 20. From the user's perspective, when opening the double-layer sampling box 20, the outer door 21 is the first door opened by the user, the inner door 221 is exposed after the outer door 21 is opened, and the inner door 221 is the second door opened by the user.

[0019] In the main body 22, an inner door 221 defines an inner sampling space 222 and an outer transition space 223. The inner sampling space 222 provides a sampling bottle 80 for sampling. The inner sampling space 222 communicates with the outer transition space 223 when the inner door 221 is opened or closed. The outer transition space 223 communicates with the outside of the main body 22 when the outer door 21 is opened or closed, and is used as a transition area between the outside of the main body 22 and the inner sampling space 222.

[0020] The main body 22 has a plurality of fluid pipeline attachment ports 224, a curtain gas supply port 225, and a plurality of curtain gas delivery ports 226. The plurality of fluid pipeline attachment ports 224 are connected to the inner sampling space 222. One of the fluid pipeline attachment ports 224 is used to attach a clean gas pipeline 50 so that clean gas can flow into the inner sampling space 222 and protect the inner sampling space 222 with positive pressure. In one embodiment, the clean gas is an inert gas such as nitrogen. The other fluid pipeline attachment port 224 is used to attach a chemical liquid pipeline 60 to inject a chemical liquid into a sampling bottle 80 placed in the inner sampling space 222. The curtain gas supply port 225 is used to attach another clean gas pipeline 70 to supply clean gas from the other clean gas pipeline 70. In this embodiment, the clean gas supplied by the clean gas pipeline 70 attached to the curtain gas supply port 225 is an inert gas. In another embodiment, the clean gas supplied by the clean gas pipeline 70 attached to the curtain gas supply port 225 is the same as the clean gas supplied by the clean gas pipeline 50 attached to one of the fluid pipeline attachment ports 224, and both are nitrogen. In addition, a plurality of curtain gas outlets 226 communicate the curtain gas supply port 225 with the outer transition space 223, and the gas outlet directions of the plurality of curtain gas outlets 226 are located between the inner door 221 and the outer door 21. The plurality of curtain gas outlets 226 receive the clean gas from the curtain gas supply port 225 and cause the clean gas to form a gas curtain 234 between the inner door 221 and the outer door 21, and the outer transition space 223 is protected by a positive pressure due to the action of the gas curtain 234.

[0021] Next, the implementation of the double-layer sampling box 20 will be described with reference to FIGS. 1 to 4. First, assume that neither the outer door 21 nor the inner door 221 of the double-layer sampling box 20 is open. When a user intends to perform sampling, the outer transition space 223 and the inner sampling space 222 both allow the clean gas to enter therein. At this time, the outer transition space 223 forms a gas curtain between the inner door 221 and the outer door 21. Then, the outer door 21 and the inner door 221 are opened sequentially, and the sampling bottle 80 passes through the gas curtain 234 from the outer transition space 223 to the inner sampling space 222. Then, when the inner door 221 and the outer door 21 are closed, the chemical liquid pipeline 60 injects the chemical liquid into the sampling bottle 80, thereby sampling the chemical liquid. After sampling is completed, the outer door 21 and the inner door 221 are opened sequentially again, and the sampling bottle 80 can be removed.

[0022] As can be seen from the above, the present invention achieves a double-layer structure by providing an outer transition space 223 and an inner sampling space 222 within the main body 22. The outer transition space 223 serves as a transition area between the inner sampling space 222 and the external environment of the double-layer sampling box 20, effectively reducing the impact of the external environment of the double-layer sampling box 20 on the inner sampling space 222 and improving the cleanliness of the environment of the inner sampling space 222. The outer transition space 223 also reduces the contamination of the external environment of the double-layer sampling box 20 by chemical vapors generated during sampling in the inner sampling space 222. In addition, in this invention, the outer transition space 223 forms a gas curtain 234 between the inner door 221 and the outer door 21, which can prevent contamination of the external environment of the double-layer sampling box 20. Furthermore, since both the outer transition space 223 and the inner sampling space 222 are protected by the clean gas, the cleanliness of the internal environment of the main body 22 is improved, contamination of the chemical liquid in the sampling bottle 80 is reduced, and the detection accuracy of the chemical liquid in the sampling bottle 80 is improved.

[0023] 1 to 4 again, in one embodiment, the main body 22 further has a gas passage 227, which connects the curtain gas supply port 225 with a plurality of curtain gas outlets 226. In one embodiment, the plurality of curtain gas outlets 226 are arranged at intervals along the gas passage 227. Furthermore, the arrangement direction of the plurality of curtain gas outlets 226 is parallel to the extension direction of the gas passage 227. In another embodiment, the plurality of curtain gas outlets 226 are located above the outer transition space 223, and the projection positions of the plurality of curtain gas outlets 226 are located between the inner door 221 and the outer door 221.

[0024] 2 to 4, the double-layer sampling box 20 is provided with a waste discharge mechanism, which includes a discharge of chemical vapors and a discharge of chemical waste liquid. In one embodiment, the body 22 has a gas discharge port 228, which is connected to the outer transition space 223 and allows gas in the outer transition space 223 to be discharged. In another embodiment, the body 22 has a waste liquid discharge port 229, which is connected to the inner sampling space 222 and is located at the bottom of the body 22, so that the chemical waste liquid in the inner sampling space 222 flows toward the bottom of the body 22 and enters the waste liquid discharge port 229. In another embodiment, the main body 22 has a guide slope 230, which is provided at the bottom of the inner sampling space 222, and the waste liquid discharge outlet 229 is located on the lower side of the horizontal height of the guide slope 230, and the guide slope 230 guides and concentrates the chemical waste liquid at the bottom of the inner sampling space 222, and causes the chemical waste liquid to flow to the waste liquid discharge outlet 229.

[0025] 2 to 4 again, in one embodiment, the main body 22 has a drain pan 231, which is provided in the inner sampling space 222 and has a plurality of drain hoses 232, on which the sampling bottle 80 can be placed and from which chemical waste liquid can be discharged through the plurality of drain hoses 232. In addition, the projection range of the drain pan 231 overlaps with the waste liquid discharge port 229, so that the chemical waste liquid discharged from the plurality of drain hoses 232 of the drain pan 231 flows toward the waste liquid discharge port 229.

[0026] In another embodiment, the main body 22 has a guide plate 233, which is installed in the inner sampling space 222 and located on the inner door 221, and the guide plate 233 is inclined toward the waste liquid discharge port 229, and the guide plate 233 guides the chemical liquid splashing in the inner sampling space 222 to flow to the waste liquid discharge port 229.

[0027] 1 to 4, in one embodiment, the double-layer sampling box 20 of the present invention has a plurality of plastic hinges 25, which are mounted on the main body 22, and each plastic hinge 25 is connected to one of the outer door 21 and the inner door 221 to hinge the outer door 21 and the inner door 221. Because each plastic hinge 25 is not made of metal, the corrosion resistance of each plastic hinge 25 is improved, which helps to extend the service life in environments filled with acidic or alkaline substances. In another embodiment, the double-layer sampling box 20 of the present invention has a door sensor 26, which is mounted on the main body 22 and detects whether the outer door 21 is open or closed. In this embodiment, the door sensor 26 is independent of the outer transition space 223 and the inner sampling space 222, reducing contact with chemical vapors and thereby extending the service life. [Explanation of symbols]

[0028] 20 Double-layer sampling box 21 Outer Door 22 Main Unit 221 Inner Door 222 Inner Sampling Space 223 Outer transition space 224 Fluid Pipeline Attachment 225 Curtain gas supply port 226 Curtain gas outlet 227 Gas Passage 228 Gas outlet 229 Waste liquid outlet 230 Guide Slope 231 Drain pan 232 Drain hose 233 Guide Plate 234 Gas Curtain 25 Plastic Hinge 26 Door Sensor 50,70 Clean Gas Pipeline 60 Chemical Liquid Pipeline 80 sampling bottles

Claims

1. 1. A corrosion-resistant double-layer sampling box, comprising: The outer door and a main body provided with the outer door, wherein an inner door is provided within the main body, and in the main body, an inner sampling space and an outer transition space are defined by the inner door, and the inner sampling space is communicated with the outer transition space by opening and closing the inner door, and the outer transition space is communicated with the outside of the main body by opening and closing the outer door; a main body having a plurality of fluid pipeline attachment ports communicating with the inner sampling space, a curtain gas supply port, and a plurality of curtain gas outlet ports communicating with the curtain gas supply ports, the plurality of curtain gas outlet ports communicating with the outer transition space, and the gas outlet directions of the plurality of curtain gas outlet ports are located between the inner door and the outer door.

2. 2. The corrosion-resistant double-layer sampling box according to claim 1, wherein the body has a gas passage that connects the curtain gas supply port and the plurality of curtain gas delivery ports.

3. The corrosion-resistant double-layer sampling box according to claim 2 , wherein the projection positions of the plurality of curtain gas outlets are located between the inner door and the outer door.

4. The corrosion-resistant double-layer sampling box according to claim 3 , wherein the body has a gas outlet communicating with the outer transition space.

5. 5. The corrosion-resistant double-layer sampling box according to claim 1, wherein the body has a waste liquid outlet communicating with the inner sampling space.

6. 6. The corrosion-resistant double-layer sampling box of claim 5, wherein the main body has a drain pan provided in the inner sampling space, the drain pan is provided with a plurality of drain hoses, and the projection range of the drain pan overlaps with the waste liquid discharge outlet.

7. 7. The corrosion-resistant double-layer sampling box of claim 6, wherein the main body has a guide slope provided at the bottom of the inner sampling space, and the waste liquid discharge outlet is located on the lower side of the horizontal height of the guide slope.

8. 8. The corrosion-resistant double-layer sampling box of claim 7, wherein the body is disposed within the inner sampling space and has a guide plate located on the inner door.

9. The corrosion-resistant double-layer sampling box according to any one of claims 1 to 4, wherein the double-layer sampling box is provided on the surface of the main body and has a door sensor that detects the opening and closing of the outer door.

10. 10. The corrosion-resistant double-layer sampling box of claim 9, wherein the double-layer sampling box has a plurality of plastic hinges provided on the body, the plastic hinges being connected to one of the outer door and the inner door.

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