WORK SYSTEM, DRIVE SYSTEM, PARAMETER SETTING METHOD, AND PROGRAM

Abstract

The present disclosure addresses the problem of providing: an operating system which suppresses vibrations produced in a head section by appropriately setting control parameters, and makes highly accurate operation within the movement range of the head section possible; and a drive system, a parameter setting method, and a program. The operating system (2) is equipped with a head section (3), a displacement detection unit (4), and a parameter setting unit (52). The head section (3) moves toward an operation target (8) as a result of a drive force imparted by the drive unit (6), and executes an operation on the operation target (8). The displacement detection unit (4) moves along with the head section (3), and detects the displacement of a detection target site (3a), which is at least one part of the head section (3). The parameter setting unit (52) sets a control parameter for controlling the movement of the head section (3) by the drive unit (6) on the basis of the displacement detection results when the moving head section (3) stops.

Description

[Technical field]

[0001] The present disclosure relates to a working system, a drive system, a parameter setting method, and a program. [Background technology]

[0002] The component mounter of Patent Document 1 uses a motor to move a component holding means that holds components, and mounts the components on a board. Because the component holding means moves with acceleration from the motor, residual vibrations occur in the component holding means when the component holding means stops. This residual vibration is one of the factors that greatly affect the mounting accuracy of the component mounter.

[0003] Patent Document 1 discloses a component mounter that performs processing to reduce such residual vibration, and uses a laser beam measuring instrument as a means for measuring the residual vibration occurring in the component holding means.The component holding means is then moved to a position where it is irradiated with the laser beam of the laser beam measuring instrument, thereby measuring the residual vibration occurring in the component holding means.If the residual vibration value exceeds an allowable value, the movement time of the component holding means is changed so that the residual vibration value is equal to or less than the allowable value.

[0004] However, in a work system such as the component mounter of Patent Document 1, the vibration generated in the head part changes when the direction and stroke of movement of the head part (component holding means) change. Therefore, when the head part is moved to a position other than the measurement point where the vibration generated in the head part is measured by a laser length measuring device (laser beam measuring device), there is a problem that it is not easy to control the movement of the head part so as to reduce the vibration generated in the head part. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2006-303032 A Summary of the Invention

[0006] An object of the present disclosure is to provide a work system, a drive system, a parameter setting method, and a program that suppresses vibrations generated in the head unit by appropriately setting control parameters, thereby enabling high-precision work within the movement range of the head unit.

[0007] A work system according to one aspect of the present disclosure includes a head unit, a displacement detection unit, and a parameter setting unit. The head unit moves toward a work target by a driving force applied from a driving unit and performs work on the work target. The displacement detection unit moves together with the head unit and detects the displacement of a detection target portion that is at least a part of the head unit. The parameter setting unit sets a control parameter for controlling the movement of the head unit by the driving unit based on a detection result of the displacement when the moving head unit stops. The displacement detection unit includes an imaging unit that images the detection target portion. A work system according to another aspect of the present disclosure includes a head unit, a displacement detection unit, and a parameter setting unit. The head unit moves toward a work object by a driving force applied from a driving unit, and performs work on the work object. The displacement detection unit moves together with the head unit, and detects the displacement of a detection target portion that is at least a part of the head unit. The parameter setting unit sets a control parameter for controlling the movement of the head unit by the driving unit, based on a detection result of the displacement when the moving head unit stops. The control parameter is a gain related to the responsiveness of the driving unit.

[0008] A working system according to one aspect of the present disclosure includes a head unit and a parameter setting unit. The head unit moves toward a work object by a driving force applied from a driving unit, and performs work on the work object. The parameter setting unit sets a control parameter for controlling the movement of the head unit by the driving unit. The parameter setting unit includes: acquiring a detection result of the displacement of the detection target portion from a displacement detection unit including an imaging unit that moves together with the head unit and images the detection target portion that is at least a part of the head unit; The control parameters are set based on the detection result of the displacement when the moving head unit stops. A work system according to another aspect of the present disclosure includes a head unit and a parameter setting unit. The head unit moves toward a work target by a driving force applied from a driving unit, and performs work on the work target. The parameter setting unit sets a control parameter for controlling the movement of the head unit by the driving unit. The parameter setting unit acquires a detection result of the displacement of a detection target portion that is at least a part of the head unit from a displacement detection unit that moves together with the head unit, and sets the control parameter based on the detection result of the displacement when the moving head unit stops. The control parameter is a gain related to the responsiveness of the driving unit.

[0009] A drive system according to one aspect of the present disclosure includes the above-described working system and the drive unit.

[0010] A parameter setting method according to an aspect of the present disclosure includes a displacement detection step and a parameter setting step. The displacement detection step detects the displacement of a detection target portion, which is at least a part of a head unit that moves toward a work target by a driving force applied from a driving unit and performs work on the work target, using a displacement detection unit that moves together with the head unit. The parameter setting step sets a control parameter for controlling the movement of the head unit by the driving unit based on a detection result of the displacement when the moving head unit stops. The displacement detection unit includes an imaging unit that images the detection target portion. A parameter setting method according to another aspect of the present disclosure includes a displacement detection step and a parameter setting step. The displacement detection step detects the displacement of a detection target portion, which is at least a part of a head unit that moves toward a work target by a driving force applied from a driving unit and performs work on the work target, using a displacement detection unit that moves together with the head unit. The parameter setting step sets a control parameter for controlling the movement of the head unit by the driving unit based on a detection result of the displacement when the moving head unit stops. The control parameter is a gain related to the responsiveness of the driving unit.

[0011] A program according to an aspect of the present disclosure causes a computer to execute the parameter setting step of the parameter setting method described above. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a block diagram showing a drive system including a working system according to an embodiment. [Diagram 2] FIG. 2 is a perspective view showing a main part of the above working system. [Diagram 3] FIG. 3 is a side view showing an imaging unit of the above working system. [Figure 4] FIG. 4 is a schematic side view showing vibration of a head portion of the above working system. [Diagram 5] FIG. 5 is a flowchart showing a control parameter setting method for the above-mentioned operating system. [Figure 6] FIG. 6 is a block diagram showing a second modified example of the above working system. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] The following embodiments generally relate to a working system, a drive system, a parameter setting method, and a program. More specifically, the present invention relates to a working system including a head unit that moves toward a work object and performs work on the work object, a drive system, and a parameter setting method and a program thereof.

[0014] Hereinafter, the working system, the driving system, the parameter setting method, and the program according to the embodiment will be described in detail with reference to Figs. 1 to 5. However, each figure described in the following embodiment is a schematic diagram, and the ratio of the size and thickness of each component does not necessarily reflect the actual dimensional ratio. Note that the configuration described in the following embodiment is merely an example of the present disclosure. The present disclosure is not limited to the following embodiment, and various modifications are possible depending on the design, etc., as long as the effects of the present disclosure can be achieved.

[0015] (1) Overview of drive system The drive system 1 according to this embodiment will be outlined below.

[0016] FIG. 1 shows a block diagram of a drive system 1.

[0017] The drive system 1 shown in FIG. 1 is a system that performs work on a work object 8, and is used, for example, in facilities such as factories, laboratories, offices, and educational facilities for the manufacture of various products such as electronic devices, automobiles, clothing, food, medicines, and crafts. The work includes attachment, inspection, coating, bonding, transfer, and the like, which are performed on the work object 8. Attachment is the work of attaching (mounting) a component to the work object 8. Inspection is the work of inspecting the appearance (shape, size, scratches, position, etc.) or interior (cracks, cavities, etc.) of the work object 8. Coating is the work of applying a liquid agent such as solder, adhesive, and flux to the work object 8. Bonding is the work of performing bonding on the work object 8. Transfer is the work of moving the work object 8.

[0018] In this embodiment, a case where the drive system 1 is used for manufacturing electronic devices in a factory will be described. A typical electronic device has various circuit blocks such as a power supply circuit and a control circuit. In manufacturing these circuit blocks, as an example, a solder coating process, a mounting process, and a soldering process are performed in this order. In the solder coating process, cream solder is applied (or printed) on a board (including a printed wiring board). In the mounting process, components (including electronic components) are mounted on the board. In the soldering process, for example, the board on which the components are mounted is heated in a reflow furnace to melt the cream solder and perform soldering. In the mounting process, the drive system 1 performs a mounting operation of mounting components 9 (see FIGS. 2 and 3) on a board 81 (see FIGS. 2 and 3), which is a work object 8.

[0019] In the mounting operation, the suction nozzle of the head picks up the component 9 from the component supply unit and mounts it on the top surface of the board 81. At this time, the position control of the head requires high positioning accuracy. For this reason, a servo motor is mainly used as the actuator of the drive unit that moves the head. A technique called feedback control is used to control the servo motor, which reduces the deviation between the command (control target) and the actual operation. And to perform feedback control of the servo motor with high accuracy, it is necessary to appropriately set control parameters such as gain.

[0020] In the setting work for setting the control parameters of the servo motor, it is considered to use the measurement results of the vibration (nozzle deflection) of the suction nozzle by a stationary laser length measuring device as a means for grasping the actual operation of the head. In the mounting work, the head generates vibrations when it moves from the component supply unit onto the board 81 and stops on the board 81, or when it moves to the next mounting position on the board 81 and stops there. The laser length measuring device uses a laser to measure the vibration (nozzle deflection) that occurs in the suction nozzle of the head when the head stops. Then, the actual operation of the head is grasped from the measurement results of the nozzle deflection, and the control parameters are set so that the deviation between the command and the actual operation is reduced.

[0021] Here, assuming that the head part moves in each of the X-axis and Y-axis (see Fig. 2), the nozzle runout differs depending on the position on the XY plane (plane defined by the X-axis and Y-axis) where the moving head part stops. Therefore, the position on the XY plane where the moving head part stops is taken as the operating position, and the nozzle runout is measured at each of the multiple operating positions. Specifically, under the condition that the head part moves in the Y-axis (see Fig. 2) direction from a specified starting point, the stroke indicating the distance the head part moves is made variable, and the nozzle runout is measured for each stroke. In addition, the starting point is set at multiple different positions in the X-axis (see Fig. 2) direction, and the nozzle runout for each stroke is measured from each starting point at a different position in the X-axis direction. However, in order to measure the nozzle runout by changing the operating position, a laser length measuring device needs to be installed at each operating position, and the laser length measuring device needs to be reinstalled every time the operating position is changed. As a result, in order to properly set the control parameters when the head moves from the specified first point to the second point during mounting work, it is possible to at least increase the number of operating positions where the nozzle runout is measured, but this would require a lot of time and effort.In other words, it takes a lot of time and effort to properly set the control parameters to enable high-precision work within the movement range of the head.

[0022] In addition, the control parameters were set using the measurement results of the nozzle runout by the stationary laser length measuring device using a development machine during the development of the drive system, and were not set for each mass-produced machine of the drive system. In other words, the control parameters were not set taking into account the individual differences of the drive system. In addition, it was difficult to appropriately set the control parameters for each mass-produced machine using the stationary laser length measuring device to enable high-precision work within the moving range of the head unit.

[0023] Furthermore, when using a stationary laser length measuring device, in order to measure the vibration of the suction nozzle inside the equipment, the laser length measuring device installed outside the equipment irradiates a laser onto the suction nozzle inside the equipment. However, depending on the structure of the equipment, the range within the equipment that can be irradiated with the laser is limited. In this case, it is difficult to measure the vibration of the suction nozzle inside the equipment.

[0024] 1, the drive system 1 of the present embodiment includes a working system 2 and a driving unit 6. The working system 2 includes a head unit 3, a displacement detection unit 4, and a control unit 5.

[0025] The head unit 3 and the control unit 5, the displacement detection unit 4 and the control unit 5, and the drive unit 6 and the control unit 5 are connected to each other via a wireless path or a wired path so that they can communicate with each other. The wireless communication preferably complies with standards such as wireless LAN, Bluetooth (registered trademark), or ZigBee (registered trademark). The wired communication preferably complies with standards for wired LAN (Local Area Network) such as Ethernet (registered trademark). The wireless communication and the wired communication may be of a dedicated communication standard.

[0026] The head unit 3 moves toward the work target 8 by the driving force applied by the driving unit 6, and performs work on the work target 8. The displacement detection unit 4 moves together with the head unit 3, and detects the displacement of the detection target portion 3a, which is at least a part of the head unit 3. The parameter setting unit 52 of the control unit 5 sets control parameters for controlling the movement of the head unit 3 by the driving unit 6, based on the displacement detection result when the moving head unit 3 stops. Therefore, the driving system 1 and the work system 2 appropriately set the control parameters to suppress vibrations generated in the head unit 3, and enable high-precision work within the movement range of the head unit 3.

[0027] (2)Details (2.1) Premise In this embodiment, as an example, a case will be described in which the drive system 1 is used to mount a component 9 by surface mount technology (SMT). That is, the component 9 is a surface mount device (SMD), and is mounted by being placed on a mounting surface 811 (see FIGS. 2 and 3) of a substrate 81.

[0028] Furthermore, the "imaging result" in the present disclosure refers to an image captured by the imaging unit 41, and includes a still image (still image) and a video (moving image). Furthermore, the "video" includes an image captured by the imaging unit 41 that is composed of a plurality of still images obtained by frame-by-frame shooting or the like. The image captured by the imaging unit 41 does not have to be the data itself output from the imaging unit 41. For example, the image captured by the imaging unit 41 may be appropriately compressed as necessary, converted into another data format, or processed to cut out a part of the image captured by the imaging unit 41, or to adjust the focus, brightness, or contrast. As an example in this embodiment, the image captured by the imaging unit 41 is a full-color video.

[0029] In the following, as an example, as shown in FIG. 2, three mutually orthogonal axes, X-axis, Y-axis, and Z-axis, are set, and the axes parallel to the mounting surface 811 of the substrate 81, which is the work object 8, are set as the "X-axis" and "Y-axis", and the axis parallel to the thickness direction of the substrate 81 is set as the "Z" axis. Furthermore, one of the two directions along the Z axis is set as the upward direction, and the other direction is set as the downward direction. For example, when the capture unit 322 described later faces the mounting surface 811 of the substrate 81, the substrate 81 is located below the capture unit 322. Note that the X-axis, Y-axis, and Z-axis are all imaginary axes, and the arrows indicating "X", "Y", and "Z" in the drawings are merely indicated for the purpose of explanation, and none of them have any substance. Furthermore, these directions are not intended to limit the directions in which the drive system 1 is used.

[0030] Further, pipes for circulating cooling water, cables for supplying power, pipes for supplying air pressure (including positive pressure and vacuum), and the like are connected to the drive system 1, but in this embodiment, illustration of these is omitted as appropriate.

[0031] (2.2) Head section The configuration of the head unit 3 will be described in more detail with reference to FIGS.

[0032] The head unit 3 includes a head main body 31 and a working unit 32 .

[0033] The head main body 31 is a box-shaped housing, and holds the working unit 32. The working unit 32 includes an actuator 321 and a capturing unit 322. In the drive system 1 according to this embodiment, one head main body 31 is provided with one actuator 321 and one capturing unit 322. This enables the head unit 3 to capture one component 9.

[0034] The capturing unit 322 is, for example, a suction nozzle having a suction port on its lower end surface. The capturing unit 322 is controlled by the head control unit 53 of the control unit 5, and is switchable between a capturing state in which the component 9 is captured (held) on its lower end surface and a release state in which the component 9 is released (released from capture). However, the capturing unit 322 is not limited to a suction nozzle, and may be configured to capture (hold) the component 9 by pinching (picking) it like a robot hand, for example.

[0035] Regarding the capturing of the component 9 by the capturing part 322, the head part 3 operates by receiving air pressure (vacuum) as a power source. That is, the head part 3 switches the capturing part 322 between a captured state and a released state by opening and closing a valve on a supply path of air pressure (vacuum) connected to the capturing part 322.

[0036] The actuator 321 moves the capturing part 322 linearly in the Z-axis direction. Furthermore, the actuator 321 rotates the capturing part 322 in a rotation direction (hereinafter referred to as "θ direction") about an axis line along the Z-axis direction. In the present embodiment, as an example, the actuator 321 drives the capturing part 322 in the Z-axis direction by a driving force generated by a linear motor. The actuator 321 drives the capturing part 322 in the θ direction by a driving force generated by a rotary motor. Furthermore, the head part 3 moves linearly in the X-axis direction and the Y-axis direction by a driving force applied from the driving part 6. Therefore, the capturing part 322 of the head part 3 can move in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θ direction by the driving part 6 and the actuator 321.

[0037] The head body 31 is made of metal and formed into a rectangular parallelepiped shape, for example. The actuator 321 and the capturing portion 322 are assembled to the head body 31, whereby the head body 31 holds the actuator 321 and the capturing portion 322. In this embodiment, the capturing portion 322 is indirectly held by the head body 31 via the actuator 321 in a state in which the capturing portion 322 is movable in the Z-axis direction and the θ direction. The head portion 3 moves within the XY plane as the head body 31 is moved within the XY plane by the driving portion 6.

[0038] 2 and 3, with the head unit 3 having captured the component 9 by the capturing unit 322, the head unit 3 moves the capturing unit 322 so as to approach the board 81, which is the work target 8. Then, the actuator 321 moves the capturing unit 322 in the vertical direction along the Z axis, thereby making it possible to mount the component 9 on the mounting surface 811 of the board 81. Specifically, the head unit 3 mounts the component 9 on the mounting surface 811 of the board 81 by lowering the capturing unit 322 in the state in which the component 9 has been captured.

[0039] (2.3) Displacement detection section The configuration of the displacement detection unit 4 will be described in more detail with reference to FIGS.

[0040] The displacement detection unit 4 of the present embodiment includes an imaging unit 41, and is attached to the lower surface of the head main body 31 of the head unit 3. That is, the displacement detection unit 4 moves together with the head unit 3.

[0041] 2 and 3, the imaging unit 41 has two cameras 411 and 412. The cameras 411 and 412 are so-called stereo cameras arranged side by side along the X-axis direction. The cameras 411 and 412 may be arranged side by side along the Y-axis direction.

[0042] Each of the cameras 411, 412 has an imaging element and an optical system. The imaging element is, for example, an image sensor such as a CCD (Charge Coupled Devices) or a CMOS (Complementary Metal-Oxide Semiconductor). The imaging element converts an image formed on a light receiving surface into an electrical signal and outputs the electrical signal. The optical system includes one or more lenses and mirrors. As an example in this embodiment, the optical system is realized by a combination of a plurality of lenses (lens group). The optical system forms an image of light from an imaging region on the light receiving surface of the imaging element.

[0043] Each of the cameras 411, 412 captures an image of the detection target portion 3a, which is at least a part of the head portion 3. In this embodiment, the detection target portion 3a includes the tip of the working unit 32. Specifically, the lower end (tip) of the capture portion 322 of the working unit 32 is the detection target portion 3a. That is, the imaging area R1 (see FIG. 3) of the camera 411 includes the detection target portion 3a, and the imaging area R2 (see FIG. 3) of the camera 412 includes the detection target portion 3a.

[0044] Therefore, the imaging section 41 equipped with the above-mentioned two cameras 411, 412 includes the detection target part 3a in the imaging area of ​​the imaging section 41, and can image the detection target part 3a. The detection target part 3a is a part in which vibration of the head part 3 corresponding to the displacement of the head part 3 is likely to appear, and in this embodiment, the lower end (tip) of the capture part 322 is the detection target part 3a.

[0045] The imaging unit 41 is attached to the lower surface of the head body 31. That is, the head unit 3 and the imaging unit 41 move simultaneously. In other words, the imaging unit 41 moves together with the head unit 3. Therefore, the imaging unit 41 can image the detection target site 3a regardless of the position where the head unit 3 moves and stops. The imaging result of the imaging unit 41 is a moving image, and includes information on the time variation of the displacement of the detection target site 3a. That is, the imaging unit 41 generates the detection result of the displacement of the detection target site 3a as an imaged image. Note that the imaging unit 41 may generate a plurality of still images captured in time series as the detection result. The imaged image generated by the imaging unit 41 is converted into coordinate data indicating the displacement of the detection target site 3a. For example, it is converted into data indicating the current position of the detection target site 3a relative to the target position of the detection target site 3a when the head unit 3 stops.

[0046] As described above, the displacement detection unit 4 moves together with the head unit 3, and is capable of detecting the displacement of the detection target site 3a, which is at least a part of the head unit 3.

[0047] (2.4) Drive unit The configuration of the drive unit 6 will be described in more detail with reference to FIGS.

[0048] As shown in FIG. 1, the driving unit 6 includes a movable unit 61 and a position detection unit 62.

[0049] The movable part 61 is controlled by the drive control part 51 of the control part 5, and moves to apply a driving force to the head part 3. The drive part 6 in this embodiment includes a linear servo motor, and has a slider that moves linearly as the movable part 61. The drive part 6 linearly moves the movable part 61 by the driving force generated by the linear servo motor when power is supplied to the drive part 6. The head part 3 is mechanically attached to the movable part 61, and the linear movement of the movable part 61 moves the head part 3 linearly within the XY plane.

[0050] The position detection unit 62 detects the position of the movable part 61. Specifically, the position detection unit 62 includes an encoder that detects the position in the direction of linear motion of the movable part 61. The detection result of the position detection unit 62 is transmitted to the control unit 5 as position information of the movable part 61.

[0051] In this embodiment, as shown in FIG. 2, the two drive units 6 include an X-axis drive unit 6A and a Y-axis drive unit 6B.

[0052] The X-axis driving unit 6A includes a slider as a movable unit 61A (61) that moves the head unit 3 linearly in the X-axis direction, and an encoder as a position detection unit 62A (62) that detects the position of the movable unit 61A in the X-axis direction. The position detection unit 62A generates position information of the movable unit 61A as a detection result of the position of the movable unit 61A.

[0053] The Y-axis driving unit 6B includes a slider as a movable unit 61B (61) that moves the head unit 3 linearly in the Y-axis direction together with the X-axis driving unit 6A, and includes an encoder as a position detection unit 62B (62) that detects the position of the movable unit 61B in the Y-axis direction. The position detection unit 62B generates position information of the movable unit 61B as a detection result of the position of the movable unit 61B.

[0054] (2.5) Control Unit A more detailed configuration of the control unit 5 will be described with reference to FIG.

[0055] The control unit 5 controls each part of the drive system 1.

[0056] The control unit 5 preferably includes a computer. The computer executes a program to realize some or all of the functions of the control unit 5. The computer includes a processor that operates according to a program as a main hardware configuration. The type of processor is not important as long as it can realize the functions by executing the program. The processor is composed of one or more electronic circuits including a semiconductor integrated circuit (IC) or an LSI (Large Scale Integration). Here, it is called an IC or an LSI, but the name changes depending on the degree of integration, and it may be called a system LSI, a VLSI (Very Large Scale Integration), or an ULSI (Ultra Large Scale Integration). A field programmable gate array (FPGA), which is programmed after the LSI is manufactured, or a reconfigurable logic device that can reconfigure the connection relationship inside the LSI or set up the circuit partition inside the LSI, can also be used for the same purpose. Multiple electronic circuits may be integrated into one chip or provided on multiple chips. Multiple chips may be integrated into one device or provided on multiple devices. The program is recorded in a non-transitory recording medium such as a computer-readable ROM, an optical disk, or a hard disk drive. The program may be stored in the recording medium in advance, or may be supplied to the recording medium via a wide area communication network including the Internet. At least a part of the control unit 5 may be realized by cloud computing technology.

[0057] The control unit 5 is configured to be able to communicate with each of the head unit 3, the displacement detection unit 4, and the drive unit 6. The control unit 5 outputs a control signal to the head unit 3 and the drive unit 6, and controls the head unit 3 and the drive unit 6 so as to mount the component 9 captured by the capture unit 322 on the mounting surface 811 of the board 81. The control unit 5 also outputs a control signal to the imaging unit 41 of the displacement detection unit 4 to control the imaging unit 41 and to obtain an image captured by the imaging unit 41 from the imaging unit 41.

[0058] Specifically, the control unit 5 includes a drive control unit 51, a parameter setting unit 52, and a head control unit 53.

[0059] The drive control unit 51 receives a command signal from an external management system (not shown), and receives position information of the movable part 61 from the position detection unit 62 of the drive unit 6. The command signal is a signal including command value data indicating the position of the head unit 3. The drive control unit 51 also receives the output of the encoder of the position detection unit 62 as position information of the movable part 61, and can grasp the position of the movable part 61 based on the position information of the movable part 61. Then, based on the detection result of the position of the movable part 61 (position of the movable part 61), the drive control unit 51 determines the control amount of the head unit 3 indicating the position (current position) of the head unit 3.

[0060] Then, the drive control unit 51 controls the linear motion of the movable unit 61 so that the control amount follows the command value. That is, the drive control unit 51 feedback-controls the position of the movable unit 61 so that the control amount (current position) of the head unit 3 follows the command value (target position). At this time, the drive control unit 51 performs feedback control using the above-mentioned control amount, thereby improving the accuracy of the feedback control.

[0061] The drive control unit 51 uses control parameters when controlling the position of the movable unit 61. The control parameters are parameters for controlling the movement of the head unit 3 by the drive unit 6. Specifically, the control parameters include the gain of feedback control, as well as the movement speed, acceleration time, and deceleration time.

[0062] The parameter setting unit 52 sets control parameters for controlling the movement of the head unit 3 by the driving unit 6. Specifically, the parameter setting unit 52 receives a captured image of the detection target portion 3a from the imaging unit 41. The parameter setting unit 52 can detect vibrations of the detection target portion 3a of the head unit 3 (capturing unit 322) based on the captured image of the imaging unit 41. Then, the parameter setting unit 52 sets control parameters based on the vibrations of the detection target portion 3a when the moving head unit 3 stops.

[0063] The head control unit 53 controls the actuator 321 and the capturing unit 322. Specifically, the head control unit 53 moves the capturing unit 322 in the Z-axis direction and the θ direction by controlling the actuator 321. In addition, the head control unit 53 controls the capturing unit 322 to switch between a captured state of the component 9 by the capturing unit 322 and a released state of the component 9.

[0064] (2.6) Control parameter setting method The drive system 1 and the working system 2 described above perform a mounting operation in which the capture unit 322 picks up the component 9 from the component supply unit and mounts it on the mounting surface 811 of the board 81. Specifically, when the capture unit 322 picks up the component 9, the head unit 3 is moved by the drive unit 6 in the XY plane toward an operating position above the board 81, and stops at the operating position. In detail, when the capture unit 322 picks up the component 9, the drive control unit 51 outputs a movement command corresponding to the command value to the drive unit 6, and the head unit 3 is moved toward the target position by the drive unit 6. When the movement command indicating the amount of movement per unit time is 0, that is, when a stop command is output from the drive control unit 51 to the drive unit 6, the head unit 3 does not reach the target position, and there is a deviation between the target position and the current position of the head unit 3. In other words, there is a deviation between the command value corresponding to the target position of the head unit 3 and the control amount corresponding to the current position of the head unit 3. Then, while the deviation between the target position from the time when the stop command was output and the current position of the head unit 3 (deviation between the command value and the control amount) is attenuated, the head unit 3 reaches the target position and stops. Note that "the head unit 3 stops" means that the driving force of the drive unit 6 is lost, and the movement of the head unit 3 caused by the driving force of the drive unit 6 stops. In other words, it is possible for the head unit 3 to vibrate when it is stopped.

[0065] However, when the moving head unit 3 stops at the operating position, the head unit 3 vibrates due to inertial force (see FIG. 4). In particular, the detection target portion 3a (the lower end of the capture portion 322) at the tip of the head unit 3 vibrates significantly. If the head unit 3 vibrates significantly, the mounting accuracy of the actuator 321 and the capture portion 322 decreases. Alternatively, the waiting time required for the head unit 3 to wait at the operating position until the vibration of the head unit 3 stops increases, reducing the productivity of the mounting work.

[0066] Therefore, the parameter setting unit 52 executes the control parameter setting method shown in Fig. 5. This control parameter setting method reduces vibration (displacement) when the moving head unit 3 stops at an operating position by setting control parameters for controlling the movement of the head unit 3 by the drive unit 6.

[0067] Here, "reducing vibration (displacement)" includes the following two concepts. The amplitude of vibration (maximum displacement from the center of vibration) generated in the head portion 3 is reduced. - Shorten settling time.

[0068] Feedback control is used for controlling the position of the head unit 3. In the feedback control when stopping the head unit 3, if the deviation between the control amount (current position) and the command value (target position) is large, the settling time becomes long. The settling time is the time required for the vibration of the head unit 3 to converge within an allowable value. For example, the control parameter to be adjusted is the "gain," which is a parameter that sets the responsiveness of the feedback control. In this case, the larger the gain, the better the responsiveness of the feedback control, but the more likely overshooting occurs, and the more vibration tends to increase. Also, the smaller the gain, the less likely overshooting occurs and the less vibration there is, but the longer the settling time, the longer the work time.

[0069] As described above, in this embodiment, the control parameters are set so as to reduce the vibration (displacement) of the detection target area 3a when the moving head unit 3 stops, thereby ensuring the attachment accuracy and reducing the working time.

[0070] First, after the capturing unit 322 captures the component 9, the head unit 3 is moved by the driving unit 6 within the XY plane toward the operating position above the substrate 81. Then, when the head unit 3 reaches the operating position, the driving unit 6 stops the movement of the head unit 3.

[0071] The imaging unit 41 detects vibration (displacement) of the detection target portion 3a by capturing an image of at least the detection target portion 3a immediately before the moving head portion 3 stops at the operating position (displacement detection step S1). The imaging unit 41 may be configured to capture images at all times. The imaging unit 41 may be configured to start capturing images when the deviation between the control amount of the head portion 3 and the command value becomes equal to or less than a threshold. The imaging unit 41 may be configured to start capturing images when the drive control unit 51 completes the movement command to the drive portion 6 (when a stop command is output). The imaging unit 41 may be configured to start capturing images when the control amount of the head portion 3 matches the command value.

[0072] The parameter setting unit 52 receives data of the captured image by the imaging unit 41. The captured image is a moving image or a plurality of still images captured in time series, and includes information on the time variation of vibration (displacement). Therefore, the parameter setting unit 52 can obtain at least one of the amplitude, frequency, and period of the vibration generated in the detection target part 3a as vibration information based on the captured image. Then, the parameter setting unit 52 determines a control parameter based on the vibration information (parameter setting step S2).

[0073] Specifically, the parameter setting unit 52 analyzes the transient characteristics of the vibration by determining the amplitude and frequency of the vibration and their changes over time as vibration information based on the captured image. The parameter setting unit 52 determines the control parameters that minimize the settling time of the feedback control based on the analysis result of the transient characteristics of the vibration. Alternatively, the parameter setting unit 52 may determine the control parameters that make the settling time of the feedback control equal to or less than a threshold based on the vibration information.

[0074] The drive system 1 and the working system 2 execute the control parameter setting method including the above-mentioned displacement detection step S1 and parameter setting step S2 for each of the multiple operation positions. As a result, the parameter setting unit 52 can determine control parameters that can ensure both the mounting accuracy and the waiting time reduction for each of the multiple operation positions. Then, the parameter setting unit 52 sets multiple control parameters that individually correspond to each of the multiple operation positions for feedback control. In this case, the drive control unit 51 can perform feedback control using control parameters suitable for each of the multiple operation positions.

[0075] The parameter setting unit 52 may set the average value, median value, maximum value, or minimum value of the control parameters corresponding to each of the multiple operation positions as a representative value, and set the representative value as a control parameter common to the multiple operation positions. Alternatively, the parameter setting unit 52 may detect vibrations occurring in the head unit 3 at the multiple operation positions, and set a gain common to the multiple operation positions for feedback control based on the detection results. In this case, between the above-mentioned displacement detection step S1 and the parameter setting step S2, a determination step is provided to determine whether or not the displacement detection step S1 has been performed at all operation positions. For example, the parameter setting unit 52 repeats the displacement detection step S1 until the processing of the displacement detection step S1 at all operation positions is completed. When the processing of the displacement detection step S1 at all operation positions is completed, the parameter setting unit 52 sets a gain common to all operation positions for feedback control based on the detection results at all operation positions.

[0076] Thereafter, in the drive system 1 and the work system 2, the drive control unit 51 performs feedback control using the control parameters set by the parameter setting unit 52. Note that the parameter setting by the parameter setting unit 52 is performed at least at one of the following times: before the system is shipped from the factory, during construction on-site, when regular maintenance is performed, and during operation.

[0077] As described above, the drive system 1 and the working system 2 detect vibrations of the detection target part 3a at multiple operating positions using the imaging unit 41 that moves together with the head unit 3. Then, the drive system 1 and the working system 2 determine appropriate control parameters that can reduce vibrations generated in the head unit 3 at each of the multiple operating positions. As a result, the drive system 1 and the working system 2 can set appropriate gains with less effort required to measure vibrations at multiple operating positions compared to a configuration that detects vibrations of the head unit 3 using a stationary laser length measuring device. In other words, the drive system 1 and the working system 2 suppress vibrations generated in the head unit 3 by appropriately setting the control parameters, enabling high-precision work within the movement range of the head unit 3.

[0078] Furthermore, the drive system 1 and the work system 2 can easily set parameters for each mass-produced machine of the system. As a result, the drive system 1 and the work system 2 can easily set parameters taking into account individual differences between systems.

[0079] In addition, the displacement detection unit 4 is attached to the head unit 3. As a result, the drive system 1 and the work system 2 can detect the vibration of the head unit 3 regardless of the position to which the head unit 3 moves and stops.

[0080] Furthermore, the parameter setting unit 52 sets the control parameters based on the detection result of vibration when the head unit 3 stops moving to perform the mounting work. That is, the drive system 1 and the working system 2 can set parameters while performing the mounting work, so there is no need to prepare time for parameter setting separately from the time for the mounting work, improving usability.

[0081] Furthermore, if the control unit 5 includes a computer, the program executed by this computer causes the computer to execute the operation of the parameter setting step S2 described above.

[0082] (3) First Modification In this modified example, the drive control unit 51 calculates a control amount indicating the position of the head unit 3 based on the detection results of the position of the movable part 61 and the detection results of the displacement of the detection target part 3a, and moves the movable part 61 so that the control amount follows the command value.

[0083] Specifically, the drive control unit 51 receives the output of the encoder of the position detection unit 62 as position information of the movable unit 61, and can grasp the position of the movable unit 61 based on the position information of the movable unit 61. Furthermore, the drive control unit 51 can grasp the occurrence status (amplitude, frequency, period, and their time changes, etc.) of the vibration of the detection target part 3a based on the image captured by the imaging unit 41. Therefore, the drive control unit 51 uses not only the position of the movable unit 61 but also the occurrence status of the vibration of the detection target part 3a to obtain the position (current position) of the head unit 3, and obtains a control amount indicating the position of the head unit 3. That is, the drive control unit 51 of this modified example obtains the control amount based on the detection result of the position of the movable unit 61 and the detection result of the vibration of the detection target part 3a. In this case, the drive control unit 51 can obtain the current position of the head unit 3 reflecting the actual shake of the head unit 3 as the control amount.

[0084] Therefore, since the drive system 1 uses a control amount that reflects the runout of the head unit 3, the positioning accuracy of the head unit 3 can be improved.

[0085] Furthermore, in the drive system 1 using the control amount of this modified example, by adjusting the control parameters in the same manner as in the above-described embodiment, the amplitude of vibration of the head unit 3 can be reduced when the head unit 3 is stopped in the operating position.

[0086] (4) Second Modification FIG. 6 shows a working system 2A as a modified example of the working system.

[0087] The working system 2A excludes the displacement detection unit 4 from its configuration requirements. In other words, the displacement detection unit 4 is not included in the working system 2A. In this case, even if the manufacturer of the working system 2A and the manufacturer of the displacement detection unit 4 are different, the drive system 1 can be configured.

[0088] (5) Third Modification The control parameter set by the parameter setting unit 52 may be other than the gain, and the parameter setting unit 52 may set two or more control parameters. That is, the parameter setting unit 52 may set at least one of the gain, the moving speed, the acceleration time, and the deceleration time as the control parameter.

[0089] The displacement detection unit 4 is not limited to a configuration including an imaging unit 41 as long as it moves together with the head unit 3 and has a function of detecting the displacement of the detection target site 3a of the head unit 3. For example, the displacement detection unit 4 may be configured to include a laser device, an acceleration sensor, or the like.

[0090] Moreover, the displacement detection unit 4 may be configured separately from the head unit 3. In this case, the drive system or the working system further includes a drive unit for the displacement detection unit that moves the displacement detection unit 4 together with the head unit 3 in synchronization with the head unit 3.

[0091] The imaging section 41 included in the displacement detection section 4 is not limited to a configuration including two cameras 411, 412. The imaging section 41 may have one camera or three or more cameras.

[0092] The displacement detection unit 4 is not limited to detecting the displacement when the head unit 3 is vibrating as described above, but may detect the displacement when the head unit 3 is not vibrating. In other words, the control parameter setting method executed by the parameter setting unit 52 reduces the displacement when the head unit 3 stops by adjusting the control parameters for controlling the movement of the head unit 3 by the drive unit 6, even if the moving head unit 3 is not vibrating when it stops.

[0093] The movable part 61 of the drive unit 6 may be any movable part that moves to apply a driving force to the head unit 3, and is not limited to a slider that moves linearly. For example, the drive unit 6 may include a rotary servo motor, and have a rotor that rotates as the movable part 61. Alternatively, the drive unit 6 may include a planar servo motor, and have a mover that freely moves on the surface of a stator as the movable part 61.

[0094] The work performed by the drive system 1 and the working system 2 on the work object 8 is not limited to attachment. The work may be, for example, inspection, coating, bonding, or transfer. In other words, the working unit 32 of the head unit 3 is not limited to a configuration including a suction nozzle. The working unit 32 may be configured to include an inspection unit that collects inspection information on the work object 8. The working unit 32 may also be configured to include a coating unit that applies paint to the work object 8. The working unit 32 may also be configured to include a bonding unit that bonds the work object 8. The working unit 32 may also be configured to include a transfer unit that moves the work object 8.

[0095] The work object 8 may be something other than the substrate 81. The work object 8 may be, for example, an electronic device, an electric device, an assembly, a molded product, a product, or another product.

[0096] (6) Summary A work system (2) according to a first aspect of the embodiment includes a head unit (3), a displacement detection unit (4), and a parameter setting unit (52). The head unit (3) moves toward a work target (8) by a driving force applied by a driving unit (6) and performs work on the work target (8). The displacement detection unit (4) moves together with the head unit (3) and detects the displacement of a detection target portion (3a) which is at least a part of the head unit (3). The parameter setting unit (52) sets a control parameter for controlling the movement of the head unit (3) by the driving unit (6) based on the detection result of the displacement when the moving head unit (3) stops.

[0097] The above-mentioned working system (2) suppresses vibrations generated in the head unit (3) by appropriately setting control parameters, enabling high-precision work within the movement range of the head unit (3).

[0098] In the second aspect of the working system (2) according to the embodiment, in the first aspect, it is preferable that the parameter setting unit (52) sets the control parameters so as to reduce the displacement when the moving head unit (3) stops.

[0099] The above-mentioned work system (2) can ensure work accuracy while reducing waiting time.

[0100] In the working system (2) of the third aspect according to the embodiment, in the first or second aspect, the displacement detection unit (4) is preferably provided in the head unit (3).

[0101] The above-described working system (2) can detect the displacement of the detection target portion (3a) regardless of the position to which the head portion (3) moves and stops.

[0102] In the work system (2) of the fourth aspect of the embodiment, in any one of the first to third aspects, it is preferable that the displacement detection unit (4) includes an imaging unit (41) that images the detection target portion (3a).

[0103] The above-described working system (2) can generate the detection result of the displacement of the detection target portion (3a) as image data, which makes it easy to analyze the displacement.

[0104] In a fifth aspect of the working system (2) according to the embodiment, in any one of the first to fourth aspects, the head unit (3) has a working unit (32) that performs work on a work target (8), and a head body (31) to which the working unit (32) is attached and which is moved by a drive unit (6). It is preferable that the detection target portion (3a) includes a tip of the working unit (32).

[0105] The above-described work system (2) can easily detect the displacement of the detection target portion (3a) by designating a portion of the head portion (3) where the displacement of the head portion (3) is noticeable as the detection target portion (3a).

[0106] In the working system (2) of the sixth aspect according to the embodiment, in any one of the first to fifth aspects, it is preferable that the parameter setting unit (52) obtains at least one of the amplitude, frequency, and period of the vibration generated in the detection target part (3a) as vibration information based on the time variation of the displacement. The parameter setting unit (52) determines the control parameters based on the vibration information.

[0107] The above-mentioned operating system (2) can set control parameters more appropriately by analyzing vibrations.

[0108] In the seventh aspect of the working system (2) according to the embodiment, in any one of the first to sixth aspects, it is preferable that the head portion (3) includes a capturing portion (322) that captures the component (9), and that the work performed is an attachment work of attaching the component (9) to the work target (8).

[0109] The above-described work system (2) can easily set appropriate control parameters for controlling the head unit (3) that performs the mounting work, thereby making it possible to achieve both improved mounting accuracy and a reduced time required for mounting.

[0110] In the eighth aspect of the working system (2) according to the embodiment, in the seventh aspect, it is preferable that the parameter setting unit (52) sets the control parameters based on the detection result of the displacement when the head unit (3) moving to perform the mounting work stops.

[0111] The above-described work system (2) allows the setting of control parameters while performing a series of mounting operations, so there is no need to set aside time for setting the control parameters in addition to the mounting operations, improving usability.

[0112] In the working system (2) of the ninth aspect according to the embodiment, in any one of the first to eighth aspects, it is preferable that the control parameter is a gain related to the responsiveness of the driving unit (6).

[0113] The above-described working system (2) can set the displacement of the detection target portion (3a) by setting the gain.

[0114] A working system (2A) according to a tenth aspect of the embodiment includes a head unit (3) and a parameter setting unit (52). The head unit (3) moves toward a work target (8) by a driving force applied by a driving unit (6) and performs work on the work target (8). The parameter setting unit (52) sets a control parameter for controlling the movement of the head unit (3) by the driving unit (6). The parameter setting unit (52) acquires a detection result of the displacement of a detection target portion (3a), which is at least a part of the head unit (3), from a displacement detection unit (4) that moves together with the head unit (3). The parameter setting unit (52) sets the control parameter based on the detection result of the displacement when the moving head unit (3) stops.

[0115] The above-described working system (2A) suppresses vibrations generated in the head unit (3) by appropriately setting control parameters, enabling high-precision work within the movement range of the head unit (3).

[0116] A drive system (1) according to an eleventh aspect of the embodiment includes the working system (2, 2A) according to any one of the first to tenth aspects, and a drive unit (6).

[0117] The drive system (1) described above suppresses vibrations generated in the head unit (3) by appropriately setting control parameters, enabling high-precision work within the movement range of the head unit (3).

[0118] In the drive system (1) according to the twelfth aspect of the embodiment, in the eleventh aspect, it is preferable that the drive unit (6) has a movable unit (61) that moves to apply a driving force to the head unit (3). It is preferable that the drive system (1) further includes a position detection unit (62) and a drive control unit (51). The position detection unit (62) detects the position of the movable unit (61). The drive control unit (51) controls the movable unit (61) based on a command value indicating the position of the head unit (3). The drive control unit (51) determines a control amount indicating the position of the head unit (3) based on the detection result of the displacement and the detection result of the position of the movable unit (61), and moves the movable unit (61) so that the control amount follows the command value.

[0119] The above-described drive system (1) can improve the accuracy of feedback control.

[0120] The parameter setting method according to the thirteenth aspect of the embodiment includes a displacement detection step (S1) and a parameter setting step (S2). The displacement detection step (S1) detects the displacement of a detection target portion (3a), which is at least a part of a head unit (3) that moves toward a work target (8) by a driving force applied from a drive unit (6) and performs work on the work target (8), using a displacement detection unit (4) that moves together with the head unit (3). The parameter setting step (S2) sets a control parameter for controlling the movement of the head unit (3) by the drive unit (6) based on a detection result of the displacement when the moving head unit (3) stops.

[0121] The parameter setting method described above suppresses vibrations generated in the head unit (3) by appropriately setting the control parameters, and enables high-precision work within the movement range of the head unit (3).

[0122] A program according to a fourteenth aspect of the embodiment causes a computer to execute the parameter setting step (S2) of the parameter setting method according to the thirteenth aspect.

[0123] The above-mentioned program appropriately sets the control parameters to suppress vibrations generated in the head unit (3), enabling high-precision work within the range of movement of the head unit (3). [Explanation of symbols]

[0124] 1. Drive system 2. 2A working system 3 Head section 3a Detection target area 31 Head body 32 Working Section 322 Capture unit 4. Displacement detection section 41 Imaging unit 51 Drive control unit 52 Parameter setting section 6 Drive unit 61 Moving parts 62 Position detection unit 8. Work Target 9 parts S1 Displacement detection step S2 Parameter setting step

Claims

1. a head unit that moves toward a work object by a driving force applied from a drive unit and performs a work on the work object; a displacement detection unit that moves together with the head unit and detects a displacement of a detection target portion that is at least a part of the head unit; a parameter setting unit that sets a control parameter for controlling the movement of the head unit by the drive unit based on a detection result of the displacement when the moving head unit stops, The displacement detection unit includes an imaging unit that images the detection target portion. Working system.

2. The parameter setting unit sets the control parameters so that the displacement when the moving head unit stops is reduced. The operating system of claim 1.

3. The displacement detection unit is provided in the head unit.

3. The operating system according to claim 1 or 2.

4. The head portion is A working unit that performs the work on the work object; a head body to which the working unit is attached and which is moved by the driving unit; The detection target portion includes a tip of the working part.

4. The operating system according to claim 1.

5. The parameter setting unit: determining, as vibration information, at least one of an amplitude, a frequency, and a period of a vibration generated in the detection target portion based on a time variation of the displacement; determining the control parameters based on the vibration information 5. The operating system according to claim 1.

6. The head portion is A catcher for capturing a part is provided, As the work, a mounting work is performed to mount the component on the work object.

6. The operating system according to claim 1.

7. The parameter setting unit sets the control parameter based on a detection result of the displacement when the head unit moving to perform the mounting work stops. The operating system of claim 6.

8. The control parameter is a gain related to the responsiveness of the drive unit.

8. A working system according to any one of claims 1 to 7.

9. A head unit that moves toward a work object by a driving force applied from a drive unit and performs work on the work object; a displacement detection unit that moves together with the head unit and detects a displacement of a detection target portion that is at least a part of the head unit; a parameter setting unit that sets a control parameter for controlling the movement of the head unit by the drive unit based on a detection result of the displacement when the moving head unit stops, The control parameter is a gain related to the responsiveness of the drive unit. Working system.

10. a head unit that moves toward a work object by a driving force applied from a drive unit and performs a work on the work object; a parameter setting unit that sets a control parameter for controlling the movement of the head unit by the drive unit, The parameter setting unit is acquiring a detection result of the displacement of the detection target portion from a displacement detection unit including an imaging unit that moves together with the head unit and images the detection target portion that is at least a part of the head unit; The control parameters are set based on the detection result of the displacement when the moving head unit stops. Working system.

11. A head unit that moves toward a work object by a driving force applied from a drive unit and performs work on the work object; a parameter setting unit that sets a control parameter for controlling the movement of the head unit by the drive unit, The parameter setting unit is obtaining a detection result of a displacement of a detection target portion, which is at least a part of the head portion, from a displacement detection unit that moves together with the head portion; setting the control parameters based on the detection result of the displacement when the moving head unit stops; The control parameter is a gain related to the responsiveness of the drive unit. Working system.

12. A work system according to any one of claims 1 to 11, The drive unit. Drive system.

13. The drive unit has a movable part that moves to apply the drive force to the head unit, A position detection unit that detects a position of the movable unit; a drive control unit that controls the movable unit based on a command value that indicates a position of the head unit, The drive control unit is determining a control amount indicating a position of the head unit based on a detection result of the displacement and a detection result of the position of the movable unit; The movable part is moved so that the controlled variable follows the command value. The drive system of claim 12.

14. A displacement detection step of detecting a displacement of a detection target portion, which is at least a part of a head portion that moves toward a work target by a driving force applied from a drive unit and performs work on the work target, using a displacement detection unit that moves together with the head portion; a parameter setting step of setting a control parameter for controlling the movement of the head unit by the drive unit based on a detection result of the displacement when the moving head unit stops, The displacement detection unit includes an imaging unit that images the detection target portion. How to set parameters.

15. A displacement detection step of detecting a displacement of a detection target portion, which is at least a part of a head portion that moves toward a work target by a driving force applied from a driving unit and performs work on the work target, using a displacement detection unit that moves together with the head portion; a parameter setting step of setting a control parameter for controlling the movement of the head unit by the drive unit based on a detection result of the displacement when the moving head unit stops, The control parameter is a gain related to the responsiveness of the drive unit. How to set parameters.

16. A method for causing a computer to execute the parameter setting step of the parameter setting method of claim 14 or 15. program.

Images