Vibration Sensors

Abstract

The vibration sensor according to the present application includes a vibration receiver including a housing, a stopper, and a vibration unit; and an acoustic transducer, wherein the housing and the acoustic transducer form an acoustic cavity, the vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity, the acoustic transducer is in acoustic communication with the first acoustic cavity, the housing is configured to generate vibrations based on an external vibration signal, and the vibration unit changes the sound pressure in the first acoustic cavity in response to vibration of the housing so as to generate an electric signal in the acoustic transducer, and the vibration unit includes a mass element and an elastic element, a first side of the elastic element is circumferentially attached to a side wall of the mass element, and a second side of the elastic element is connected to the stopper.

Description

[Technical field]

[0001] (Incorporated by reference) This application claims priority to an international application having application number PCT / CN2020 / 140180 filed on December 28, 2020, a Chinese application having application number 202110445739.3 filed on April 23, 2021, an international application having application number PCT / CN2021 / 107978 filed on July 22, 2021, and an international application having application number PCT / CN2021 / 129148 filed on November 5, 2021, the entire contents of which are incorporated herein by reference.

[0002] The present application relates to the field of acoustics, and in particular to vibration sensors. [Background technology]

[0003] A vibration sensor is an energy conversion device that converts vibration signals into electrical signals. When used as a bone conduction microphone, the vibration sensor can detect the vibration signals transmitted through bones, skin or muscles when a person speaks, thereby detecting the voice signal and not being interfered with by external noise at the same time. Limited by the processing process, it is currently difficult to control the size or shape of the elastic element in the vibration sensor, the volume occupied by the elastic element in the acoustic cavity is large, and the volume of the mass block is small, so the sensitivity of the vibration sensor is not high.

[0004] Therefore, it is desirable to provide a vibration sensor in which the size of the elastic element is limited to improve the sensitivity of the vibration sensor. Summary of the Invention [Means for solving the problem]

[0005] A vibration sensor according to some embodiments of the present application includes: a vibration receiver including a housing, a stopper, and a vibration unit; and an acoustic transducer; The housing and the acoustic transducer form an acoustic cavity, the vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity, the acoustic transducer is in acoustic communication with the first acoustic cavity, the housing is configured to generate vibrations based on an external vibration signal, the vibration unit modifies the sound pressure in the first acoustic cavity in response to vibration of the housing to generate an electrical signal in the acoustic transducer, and the vibration unit includes a mass element and an elastic element, a first side of the elastic element is circumferentially attached to a sidewall of the mass element and a second side of the elastic element is connected to the stopper.

[0006] In some embodiments, the stopper is located between the housing and the acoustic transducer, and the housing, the stopper and the acoustic transducer form the acoustic cavity.

[0007] In some embodiments, the acoustic transducer comprises a substrate, the stopper is connected to the substrate, and the stopper, the vibrating unit and the substrate form the first acoustic cavity.

[0008] In some embodiments, the elastic element is connected between the stopper and the mass element, and the elastic element and the substrate are spaced apart from each other in a vibration direction of the vibration unit.

[0009] In some embodiments, the thickness of the stopper along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit, and the side of the stopper away from the acoustic transducer is in the same plane as the side of the mass element away from the acoustic transducer.

[0010] In some embodiments, the width of the stopper along a direction perpendicular to the vibration direction of the vibration unit is 100 um to 500 um.

[0011] In some embodiments, the stopper includes a first stopper and a second stopper arranged in sequence along the vibration direction of the vibration unit, the first stopper being connected to the housing and the second stopper being connected to the acoustic transducer.

[0012] In some embodiments, the second side of the resilient element is connected to the first stopper.

[0013] In some embodiments, a thickness of the first stopper along a vibration direction of the vibration unit is equal to a thickness of the mass element along a vibration direction of the vibration unit.

[0014] In some embodiments, the width of the first stopper along a direction perpendicular to the vibration direction of the vibration unit is smaller than the width of the second stopper along a direction perpendicular to the vibration direction of the vibration unit.

[0015] In some embodiments, the ratio of the width of the first stopper along a direction perpendicular to the vibration direction of the vibration unit to the width of the second stopper along a direction perpendicular to the vibration direction of the vibration unit is greater than 0.5.

[0016] In some embodiments, the first stopper and the second stopper are made of different materials.

[0017] In some embodiments, the first stopper is made of at least one of an alloy material, a metal material, and a rigid plastic, and the second stopper is made of a solder paste or an adhesive.

[0018] In some embodiments, the second stopper has a thickness in the vibration direction of the vibration unit of 50 um to 500 um.

[0019] In some embodiments, the vibration unit includes a second elastic element located within the first acoustic cavity and connected to the second stopper and the acoustic transducer, respectively.

[0020] In some embodiments, the area of ​​the second elastic element is closer to the acoustic transducer than the area of ​​the second elastic element is farther from the acoustic transducer.

[0021] In some embodiments, the elastic element extends towards and is connected to the substrate, and the elastic element, the mass element and the substrate form the first acoustic cavity.

[0022] In some embodiments, the thickness of the stopper along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the area of ​​the first side of the elastic element is greater than the area of ​​the second side of the elastic element.

[0023] In some embodiments, the thickness of the stopper along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the side of the mass element facing away from the substrate is farther from the substrate than the side of the stopper facing away from the substrate.

[0024] In some embodiments, the mass element includes a first hole communicating the first acoustic cavity with the second acoustic cavity.

[0025] In some embodiments, the housing includes a second aperture, and the second acoustic cavity communicates with the outside through the second aperture.

[0026] In some embodiments, the stopper is located between the resilient element and the housing.

[0027] In some embodiments, the elastic element extends towards and is connected to the acoustic transducer, and the elastic element, the mass element and the acoustic transducer form the first acoustic cavity.

[0028] In some embodiments, the stopper has a thickness in the vibration direction of the vibration unit of 100 um to 1000 um.

[0029] A vibration sensor according to some embodiments of the present application includes: a vibration receiver including a housing and a vibration unit, and an acoustic transducer; The housing and the acoustic transducer form an acoustic cavity, the vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity, the acoustic transducer is in acoustic communication with the first acoustic cavity, the housing is configured to generate vibrations based on an external vibration signal, the vibration unit modifies sound pressure in the first acoustic cavity in response to vibration of the housing to generate an electrical signal in the acoustic transducer, and the vibration unit includes a mass element and an elastic element, the elastic element is attached to a side wall of the mass element and extends toward the housing.

[0030] In some embodiments, a thickness of the elastic element along a vibration direction of the vibration unit is greater than a thickness of the mass element along a vibration direction of the vibration unit.

[0031] The present application will now be further described in the manner of exemplary embodiments, which are illustrated in detail in the figures, which are not limiting, and in which like reference numerals refer to like structures. [Brief description of the drawings]

[0032] [Figure 1] FIG. 2 is an example block diagram of a vibration sensor in accordance with some embodiments of the present disclosure. [Diagram 2] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Diagram 3] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Figure 4] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Diagram 5] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Figure 6] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Figure 7] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Figure 8] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; [Figure 9] 1 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0033] In order to more clearly describe the technical means of the embodiments of the present specification, the drawings necessary for the description of the embodiments will be briefly described below. Obviously, the drawings described below are merely some examples or embodiments of the present specification, and those skilled in the art can apply the present specification to other similar scenarios based on these drawings without creative efforts. Unless it is obvious from the language environment or specified, the same numbers in the drawings indicate the same structures or operations.

[0034] It should be understood that the terms "system," "apparatus," "unit," and / or "module" used herein are ways to distinguish between different levels of assemblies, elements, components, parts, or structures, however, other terms may be used in place of the above terms if they can achieve the same purpose.

[0035] The terms "first", "second" and similar terms used in the present specification and claims do not denote any order, number or importance, but merely distinguish between different components. Similarly, similar terms such as "one" or "one" do not limit the number, but indicate the presence of at least one. Unless otherwise stated, similar terms such as "front", "rear", "lower" and / or "like" are not intended to be limited to one location or one spatial orientation, but are merely for ease of description. In general, the terms "comprise" and "contain" are merely intended to indicate the inclusion of explicitly identified steps and elements, and these steps and elements are not an exclusive listing, and the method or apparatus may include other steps or elements.

[0036] In the embodiments herein, a vibration sensor is described. In some embodiments, the vibration sensor may include a vibration receiver and an acoustic transducer. In some embodiments, the vibration receiver may include a housing, a stopper, and a vibration unit. The housing may be connected to the stopper to form an acoustic cavity, and the vibration unit is located within the acoustic cavity and partitions the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The acoustic transducer may be in acoustic communication with the first acoustic cavity. In some embodiments, the housing may generate vibrations based on an external vibration signal (e.g., a signal generated by vibration of bones, skin, etc. when a user speaks), and the vibration unit changes the sound pressure of the first acoustic cavity in response to the vibration of the housing to generate an electrical signal in the acoustic transducer.

[0037] In some embodiments, the vibration unit may include a mass element and an elastic element. A first side of the elastic element may be attached to a sidewall of the mass element, and a second side of the elastic element may be connected to a stopper, such that the elastic element is connected between the mass element and the stopper. The first side of the elastic element may be a side of the elastic element that extends toward the mass element. The second side of the elastic element may be a side opposite to the first side of the elastic element, and the second side of the elastic element extends toward the stopper. In some embodiments, the stopper may be located between the housing and the acoustic transducer. In some embodiments, the stopper may be located between the elastic element and the housing. In some embodiments, the vibration receiver of the vibration sensor is provided with a stopper that can restrict the elastic element and control the flow of the elastic element during the manufacturing process of the vibration receiver, making it easier to control the size and / or shape of the elastic element and further adjust (e.g., increase) the size or volume of the mass element to improve the sensitivity of the vibration sensor.

[0038] In some embodiments, the vibration receiver may include a housing and a vibration unit including a mass element and a resilient element attached to a sidewall of the mass element and extending toward the housing.

[0039] FIG. 1 is an example block diagram of a vibration sensor according to some embodiments of the present disclosure.

[0040] 1, vibration sensor 100 may include a vibration receiver 110 and an acoustic transducer 120. In some embodiments, vibration receiver 110 and acoustic transducer 120 may be connected in a physical manner. A physical connection herein may include welding, fastening, gluing, molding, or the like, or any combination thereof.

[0041] In some embodiments, the vibration sensor 100 may be used as a bone conduction microphone. When used as a bone conduction microphone, the vibration sensor 100 can receive vibration signals of tissues such as bones and skin generated when a user speaks, and convert the vibration signals into electrical signals containing audio information. Since the vibration sensor 100 hardly collects sounds (or vibrations) in the air, the vibration sensor 100 is not affected by noises in the surrounding environment (e.g., the speech of other people in the vicinity, the noise of vehicles running) to a certain extent, and is suitable for use in a noisy environment to collect audio signals when a user speaks. In some embodiments, the vibration sensor 100 may be applied to earphones (e.g., air conduction earphones and bone conduction earphones), hearing aids, hearing aids, glasses, helmets, augmented reality (AR) devices, virtual reality (VR) devices, etc., or any combination thereof. For example, the vibration sensor 100 may be applied to earphones as a bone conduction microphone.

[0042] The vibration receiver 110 may be configured to receive and transmit a vibration signal. In some embodiments, the vibration receiver 110 includes a housing and a vibration unit. In some embodiments, the vibration receiver 110 may further include a stopper. In some embodiments, the stopper may be located between the housing and the acoustic transducer 120, and the vibration receiver 110 may be connected to the acoustic transducer 120 by the stopper. In some embodiments, the housing may be a hollow structure, the housing, the stopper, and the acoustic transducer 120 may be connected to form an acoustic cavity, and some members of the vibration sensor 100 (e.g., the vibration unit) may be located within the acoustic cavity. In some embodiments, the vibration unit may be located within the acoustic cavity, and the vibration unit (e.g., the elastic element and the mass element) may be connected to the stopper to partition the acoustic cavity into a first acoustic cavity and a second acoustic cavity. The first acoustic cavity may be in acoustic communication with the acoustic transducer 120. Acoustic communication may be any form of communication capable of transmitting sound pressure, sound waves, or vibration signals.

[0043] In some embodiments, the stopper may be located between the vibration unit (e.g., elastic element) and the housing. The elastic element extends toward and is connected to the acoustic transducer 120. The vibration unit (e.g., elastic element and mass element) and the acoustic transducer 120 form a first acoustic cavity.

[0044] The acoustic transducer 120 can generate an electrical signal including audio information based on the change in sound pressure in the first acoustic cavity. In some embodiments, the vibration signal can be received by the vibration receiver 110 and can change the internal air pressure of the first acoustic cavity, and the acoustic transducer 120 can generate an electrical signal based on the change in air pressure in the first acoustic cavity. In some embodiments, when the vibration sensor 100 is operating, the housing can generate vibrations based on an external vibration signal (e.g., a signal generated by vibration of the skeleton, skin, etc. when a user speaks). The vibration unit vibrates in response to the vibration of the housing by the stopper and transmits the vibration to the acoustic transducer 120 by the first acoustic cavity. In some embodiments, the acoustic transducer 120 generates vibrations based on the external vibration signal and transmits the vibration signal to the vibration unit. In some embodiments, the acoustic transducer 120 generates vibrations based on the external vibration signal, and transmits the vibration signal to the vibration unit. In some embodiments, the acoustic transducer 120 generates vibrations based on the external vibration signal, and the vibration unit vibrates in response to the vibration of the acoustic transducer 120 by being connected to the stopper or the housing. For example, the vibration of the vibration unit can cause a change in the volume of the first acoustic cavity, which in turn can cause a change in the air pressure in the first acoustic cavity, and convert the change in the air pressure in the first acoustic cavity into a change in sound pressure. The acoustic transducer 120 can detect the change in the sound pressure in the first acoustic cavity and generate an electrical signal based on this. For example, the acoustic transducer 120 can include a vibrating membrane, and when the sound pressure in the first acoustic cavity changes and acts on the vibrating membrane, the vibrating membrane vibrates (or deforms), and thus the acoustic transducer 120 converts the vibration of the vibrating membrane into an electrical signal. For more information on the vibration sensor 100, please refer to Figures 2 to 9 and their related descriptions.

[0045] It should be noted that the above description of the vibration sensor 100 and its components is for illustrative and explanatory purposes only and does not limit the scope of the present specification. Those skilled in the art can make various modifications and changes to the vibration sensor 100 based on the teachings of the present specification. In some embodiments, the vibration sensor 100 may further include other components, such as a power source that provides electrical energy to the acoustic transducer 120. These modifications and changes are still within the scope of the present specification.

[0046] FIG. 2 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0047] 2, the vibration sensor 200 may include a vibration receiver 210 and an acoustic transducer 220. In some embodiments, the vibration receiver 210 may include a housing 211, a stopper 212, and a vibration unit 213. The stopper 212 may be located between the housing 211 and the acoustic transducer 220, and the vibration receiver 210 is connected to the acoustic transducer 220 by the stopper 212.

[0048] In some embodiments, the housing 211 may be a hollow structure, and the housing 211 may be connected to the acoustic transducer 220 by a stopper 212 to form an acoustic cavity. In some embodiments, the vibrating unit 213 may be located within the acoustic cavity, and the vibrating unit 213 may be connected to the stopper 212 to divide the acoustic cavity into a first acoustic cavity 214 and a second acoustic cavity 215. In some embodiments, the stopper 212 may be connected to the substrate 221 of the acoustic transducer 220 such that the vibrating unit 213, the stopper 212, and the substrate 221 form the first acoustic cavity 214. The stopper 212 may be connected to the housing 211 such that the vibrating unit 213, the stopper 212, and the housing 211 form the second acoustic cavity 215. In some embodiments, the shape of the housing 211 may be a regular or irregular three-dimensional structure, such as a rectangular parallelepiped, a cylindrical body, a truncated cone, etc. In some embodiments, the material of the housing 211 may include metal (e.g., copper, iron, and aluminum), alloy (e.g., stainless steel), plastic, etc., or any combination thereof. In some embodiments, the housing 211 may have a certain thickness to ensure sufficient strength so as to better protect the components of the vibration sensor 100 (e.g., the vibration unit 213) installed within the housing 211.

[0049] The vibration sensor 200 can convert an external vibration signal into an electrical signal. By way of example only, the external vibration signal may include a vibration signal when a person speaks, a vibration signal generated by the skin due to human body movement or the operation of other devices (e.g., speakers) close to the skin, and a vibration signal generated by an object or air contacting the vibration sensor 200, or any combination thereof. When the vibration sensor 200 is in operation, the housing 211 generates vibrations in response to the external vibration signal, and the vibration of the housing 211 is transmitted to the vibration unit 213 by the stopper 212, and the vibration unit 213 vibrates in response to the vibration of the housing 211. The vibration of the vibration unit 213 causes a change in the volume of the first acoustic cavity 214, which in turn causes a change in the air pressure in the first acoustic cavity 214, and the change in the air pressure in the cavity can be converted into a change in sound pressure. The acoustic transducer 220 can be in acoustic communication with the first acoustic cavity 214 to detect changes in sound pressure in the first acoustic cavity 214 and convert the changes in sound pressure into an electrical signal. For example, the acoustic transducer 220 can include a sound collection hole 2211, and the changes in sound pressure in the first acoustic cavity 214 can act on a vibrating membrane of the acoustic transducer 220 through the sound collection hole 2211, such that the vibrating membrane vibrates (or deforms) and generates an electrical signal. In some embodiments, the sound collection hole 2211 can be located in a substrate 221 of the acoustic transducer 220, and the sound collection hole 2211 penetrates the substrate 221 along the vibration direction of the vibration unit 213. Furthermore, the electrical signal generated by the acoustic transducer 220 can be transmitted to an external electronic device. By way of example only, the acoustic transducer 220 can include an interface (not shown). The interface may be wired (e.g., electrically connected) or wirelessly connected to internal elements (e.g., a processor) of the external electronic device. The electrical signal generated by the acoustic transducer 220 may be communicated to the external electronic device via the interface in a wired or wireless manner. In some examples, the external electronic device may include a mobile device, a wearable device, a virtual reality device, an augmented reality device, or the like, or any combination thereof.In some embodiments, the mobile device may include a smartphone, a tablet computer, a personal digital assistant (PDA), a gaming device, a navigation device, or the like, or any combination thereof. In some embodiments, the wearable device may include a smart bracelet, an earphone, a hearing aid, a smart helmet, a smart watch, a smart clothing, a smart backpack, a smart accessory, or the like, or any combination thereof. In some embodiments, the virtual reality device and / or the augmented reality device may include a virtual reality helmet, a virtual reality glasses, a virtual reality patch, an augmented reality helmet, an augmented reality glasses, an augmented reality patch, or the like, or any combination thereof. For example, the virtual reality device and / or the augmented reality device may include Google Glass, Oculus Rift, Hololens, Gear VR, or the like.

[0050] In some embodiments, the acoustic transducer 220 may include a substrate 221. The substrate 221 may fix and / or support the vibration receiver 210. In some embodiments, the substrate 221 may be installed on the acoustic transducer 220, and the housing 211 may be connected to the substrate 221 by a stopper 212 so as to enclose the acoustic cavity. In some embodiments, the material of the substrate 221 may include a metal (e.g., iron, copper), an alloy (e.g., stainless steel), a non-metal (plastic, rubber, resin), etc., or any combination thereof. In some embodiments, the installation of the substrate 221 allows the vibration receiver 210 to be processed, manufactured, and sold as an independent member. The acoustic transducer 220 with the substrate 221 may be physically connected (e.g., glued) directly to the vibration receiver 210 to form the vibration sensor 200, thereby simplifying the manufacturing process of the vibration sensor 200 and improving the flexibility of the manufacturing process of the vibration sensor 200. In some embodiments, the thickness of the substrate 221 may be 10 um to 300 um. For example, the thickness of the substrate 221 may be 80 um to 90 um.

[0051] In some embodiments, the vibration unit 213 may include a mass element 2131 and an elastic element 2132. A first side of the elastic element 2132 is attached to a sidewall of the mass element 2131, and a second side of the elastic element 2132 is connected to the stopper 212. The first side of the elastic element 2132 may be a side of the elastic element 2132 adjacent to the mass element 2131. The second side of the elastic element 2132 may be a side opposite to the first side of the elastic element 2132, i.e., the second side of the elastic element 2132 may be a side of the elastic element 2132 adjacent to the stopper 212. For example, the elastic element 2132 may have a ring-shaped structure, the first side of the elastic element 2132 is an inner ring side of the ring-shaped structure, and the second side of the elastic element 2132 is an outer ring side of the ring-shaped structure. The first side and the second side of the elastic element 2132 are aligned along a direction perpendicular to the vibration direction of the vibration unit 213. In some embodiments, the elastic element 2132 and the mass element 2131 and / or the stopper 212 may be connected in a physical manner, for example, glued. By way of example only, the elastic element 2132 may be a material (e.g., an adhesive) with good adhesion such that the elastic element 2132 can be directly glued to the mass element 2131 and / or the stopper 212.

[0052] In some embodiments, the elastic element 2132 may be a material that is resistant to high temperatures so that the elastic element 2132 maintains its performance during processing and manufacturing of the vibration sensor 200. In some embodiments, when the elastic element 2132 is in an environment of 200° C. to 300° C., its Young's modulus and shear modulus do not change or change only slightly (e.g., within 5%), and the Young's modulus may characterize the deformation ability of the elastic element 2132 when it is stretched or compressed, and the shear modulus may characterize the deformation ability of the elastic element 2132 when it is sheared. In some embodiments, the elastic element 2132 may be a material that has good elasticity (i.e., is easily elastically deformed) so that the vibration unit 213 can vibrate in response to the vibration of the housing 211. By way of example only, the material of the elastic element 2132 may include silicone rubber, silicone gel, silicone ketone rubber, silicone sealant, and the like, or any combination thereof. In some embodiments, the Shore hardness of the elastic element 2132 may be less than 50HA so that the elastic element 2132 has good elasticity. For example, the Shore hardness of the elastic element 2132 may be in the range of 5HA to 50HA.

[0053] In some embodiments, the material of the mass element 2131 has a density below a certain density threshold (e.g., 6 g / cm 3), for example, the material of the mass element 2131 may include metals or alloys such as lead, copper, silver, tin, stainless steel, ferritic stainless steel, or any combination thereof. With the same mass, the higher the density of the material of the mass element 2131, the smaller the size, so by manufacturing the mass element 2131 with a material whose density is greater than a certain density threshold, the size of the vibration sensor 200 can be reduced to a certain extent. In some embodiments, the material density of the mass element 2131 has a significant effect on the resonance peak and sensitivity of the frequency response curve of the vibration sensor 200. With the same volume, the higher the density of the mass element 2131, the larger its mass, and the resonance peak of the vibration sensor 200 moves to a lower frequency, so by increasing the mass of the mass element 2131, the sensitivity of the vibration sensor 200 in the low frequency band (e.g., 20 Hz to 6000 Hz) can be improved. In some embodiments, the material density of the mass element 2131 is 6 g / cm 3 For example, the material density of the mass element 2131 is between 7 and 20 g / cm 3 In some embodiments, the mass element 2131 and the elastic element 2132 may be made of different materials and are assembled (e.g., glued) to form the vibration unit 213. In some embodiments, the mass element 2131 and the elastic element 2132 may be made of the same material and are integrally molded to form the vibration unit 213. In some embodiments, the thickness of the mass element 2131 along its vibration direction may be 60 um to 1150 um. For example, the thickness of the mass element 2131 along its vibration direction may be 140 um to 200 um.

[0054] In some embodiments, the elastic element 2132 and the substrate 221 of the acoustic transducer 220 are spaced apart from each other in the vibration direction of the vibration unit 213. By locating the elastic element 2132 so as not to contact the substrate 221, the vibration sensor 200 can be manufactured more easily. In some embodiments, the vibration sensor 200 can be manufactured separately. For example, the vibration receiver 210 and the acoustic transducer 220 can be manufactured separately, and then the vibration receiver 210 and the acoustic transducer 220 can be connected in a physical manner (for example, by welding or bonding) to form the vibration sensor 200. In some embodiments, the distance between the elastic element 2132 and the substrate 221 in the vibration direction of the vibration unit 213 can be set according to the needs of the vibration sensor 200, for example, the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213, and is not further limited here.

[0055] In some embodiments, the mass element 2131 may further include a first hole 21311 communicating between the first acoustic cavity 214 and the second acoustic cavity 215. The first hole 21311 penetrates the mass element 2131 and allows gas to flow between the first acoustic cavity 214 and the second acoustic cavity 215, thereby balancing the change in air pressure inside the first acoustic cavity 214 and the second acoustic cavity 215 due to temperature change during the manufacturing process of the vibration sensor 200 (e.g., during the reflow soldering process), and reducing or preventing damage to the components of the vibration sensor 200, such as cracking and deformation, due to the change in air pressure.

[0056] In some embodiments, the first hole portion 21311 may be a single hole structure. In some embodiments, the diameter of the single hole may be 1-50 um. In some embodiments, the diameter of the single hole may be 7-10 um. In some embodiments, the first hole portion 21311 may be an array of a certain number of micropores. By way of example only, the number of micropores may be 2-10. In some embodiments, the diameter of each micropore may be 0.1-25 um. For example, the diameter of each micropore may be 20 um.

[0057] In some embodiments, the mass element 2131 may not have the first hole 21311. In some embodiments, if the mass element 2131 does not have the first hole 21311, the connection strength between the mass element 2131 and the elastic element 2132 may be improved (e.g., the adhesive strength of the adhesive between the mass element 2131 and the elastic element 2132 may be increased) to prevent the components of the vibration sensor 200 from being damaged by changes in air pressure inside the first acoustic cavity 214.

[0058] In some embodiments, the housing 211 may have at least one second hole 2111 penetrating the housing 211. The structure of the second hole 2111 is the same as or similar to the structure of the first hole 21311. The second hole 2111 allows the second acoustic cavity 215 to communicate with the outside gas, and therefore balances the change in air pressure inside the second acoustic cavity 215 due to temperature change during the manufacturing process of the vibration sensor 200 (e.g., during the reflow soldering process), and can reduce or prevent damage, such as cracking and deformation, of the components of the vibration sensor 200 due to the change in air pressure. In addition, the second hole 2111 can reduce attenuation caused by the gas inside the second acoustic cavity 215 when the mass element 2131 vibrates.

[0059] In some embodiments, air-conducted sound in the environment may affect the performance of the vibration sensor 200. To reduce the effect of air-conducted sound in the environment, the second hole 2111 on the housing 211 may be sealed by a sealing material after the manufacturing of the vibration sensor 200 is completed, for example, after reflow soldering. By way of example only, the sealing material may include an epoxy adhesive, a silicone sealant, or the like, or any combination thereof. In some embodiments, the housing 211 may not have the second hole 2111 installed.

[0060] In some embodiments, the first side of the elastic element 2132 may be attached to a peripheral surface of the mass element 2131. For example, if the mass element 2131 is a columnar structure (cylinder or prism), the peripheral surface of the mass element 2131 is a side surface of the columnar structure. In some embodiments, the second side of the elastic element 2132 may be attached to an inner wall of the stopper 212 such that the projections of the mass element 2131, the elastic element 2132, and the stopper 212 in the vibration direction of the vibration unit 213 are arranged inward and outward in sequence. In some embodiments, the projections of the mass element 2131 in the vibration direction of the vibration unit 213 may be regular and / or irregular polygons, such as a circle, a rectangle, a pentagon, a hexagon, etc. The projection of the elastic element 2132 and the stopper 212 in the vibration direction of the vibration unit 213 may be a regular and / or irregular polygonal ring, such as a circular ring, a rectangular ring, a pentagonal ring, a hexagonal ring, etc., corresponding to a regular and / or irregular polygonal ring, such as a circle, a rectangle, a pentagon, a hexagon, etc. In some embodiments, the elastic element 2132 can be in close contact with the peripheral surface of the mass element 2131 and / or the stopper 212 to ensure the sealing of the first acoustic cavity 214, so that the change of the air pressure in the first acoustic cavity 214 is only related to the amplitude of the vibration unit 213, and the change of the sound pressure in the first acoustic cavity 214 is more obvious and effective.

[0061] In some embodiments, the structure of the elastic element 2132 may be a single-layer structure, a two-layer structure, a multi-layer structure, etc. The size and material of the structure of each layer in the two-layer structure or multi-layer structure of the elastic element 2132 may be the same or different. The structure of the elastic element 2132 may be reasonably set according to the manufacturing process of the vibration sensor 200, and the present application is not limited thereto.

[0062] In some embodiments, due to the material type of the elastic element 2132, for example, rubber-based material, the elastic element 2132 is in a semi-fluid state or is easily deformed in a high-temperature process during the manufacturing process of the vibration sensor 200, so that it is difficult to control the size and shape of the elastic element 2132. Therefore, without setting a stopper, it is necessary to reduce the size of the mass element 2131 to ensure that the elastic element 2132 does not flow out of the housing 211 and avoid affecting the connection between the housing 211 and the substrate 221 in the subsequent process. By installing the stopper 212 on the vibration sensor 200, the size of the elastic element 2132 can be controlled. For example, in the process of manufacturing the vibration sensor 200, the stopper 212 and the mass element 2131 can be fixed, and then the elastic element 2132 can be filled into the gap between the stopper 212 and the mass element 2131, thereby controlling the size of the elastic element 2132 and avoiding the elastic element 2132 extending along a direction perpendicular to the vibration direction of the vibration unit 213, leaving room for the increase in the size of the mass element 2131, and improving the performance of the vibration sensor 200, for example, improving the sensitivity of the vibration sensor 200.

[0063] In some embodiments, the stopper 212 may be located between the housing 211 and the acoustic transducer 220, and the housing 211 is connected to the acoustic transducer 220 by the stopper 212. When the overall size of the vibration sensor 200 and the size of the stopper 212 are constant, the volume occupied by the stopper 212 in the acoustic cavity can be reduced when the stopper 212 is located between the housing 211 and the acoustic transducer 220 compared to when the stopper 212 is located inside the housing 211, thereby increasing the volume of the mass element 2131 (e.g., increasing the width of the mass element 2131 along a direction perpendicular to the vibration direction of the vibration unit 213), and further improving the sensitivity of the vibration sensor 200.

[0064] In some embodiments, the stopper 212 may be manufactured from a rigid material to ensure that the stopper 212 has sufficient strength. In some embodiments, the rigid material may include, but is not limited to, a metal material (e.g., copper, iron, aluminum), an alloy material (e.g., stainless steel), a rigid plastic, and the like. For example, the stopper 212 may be manufactured from a brass material to facilitate welding between the stopper 212 and the substrate 221. Also, for example, the stopper 212 may be manufactured from a stainless steel material to ensure that the stopper 212 has great strength, thereby ensuring the structural reliability of the stopper 212. In some embodiments, the stopper 212 may be manufactured from a non-magnetic metal.

[0065] In some embodiments, when other parameters (e.g., material) of the stopper 212 are constant, the width of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 can affect the strength of the stopper 212. For example, when other parameters (e.g., material) of the stopper 212 are constant, the smaller the width of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 (the width d of the stopper 212 shown in FIG. 2 ), the smaller the strength of the stopper 212. Therefore, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 needs to be greater than a first width threshold (e.g., 100 um) to ensure that the stopper 212 has sufficient strength. In some embodiments, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 may be greater than 100 um.

[0066] In some embodiments, when the overall size of the vibration sensor 200 is constant, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 can affect the width of the mass element 2131 along the direction perpendicular to the vibration direction of the vibration unit 213. In some embodiments, when the overall size of the vibration sensor 200 is constant, the larger the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213, the smaller the width of the mass element 2131 along the direction perpendicular to the vibration direction of the vibration unit 213, thereby reducing the sensitivity of the vibration sensor 200. Therefore, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 needs to be smaller than a second width threshold (e.g., 500 um), thereby ensuring that the mass element 2131 has an appropriate size and ensuring that the vibration sensor 200 has high sensitivity. In some embodiments, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than 500 um. For example, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than 300 um. Furthermore, for example, the width d of the stopper 212 along the direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than 200 um.

[0067] In some embodiments, the first width threshold and / or the second width threshold may be set depending on the material strength of the stopper 212, requirements for the overall size of the vibration sensor 200, and / or requirements for the performance (e.g., requirements for sensitivity) of the vibration sensor 200. In some embodiments, the width d of the stopper 212 along a direction perpendicular to the vibration direction of the vibration unit 213 may be 100 um to 500 um. For example, the width d of the stopper 212 along a direction perpendicular to the vibration direction of the vibration unit 213 may be 100 um to 200 um.

[0068] In some embodiments, during the manufacturing process of the vibration sensor 200, the height of the first acoustic cavity 214 along the vibration direction of the vibrating unit 213 can be controlled by setting the thickness of the stopper 212 and the mass element 2131 along the vibration direction of the vibrating unit 213. In some embodiments, the thickness of the stopper 212 along the vibration direction of the vibrating unit 213 can be greater than the thickness of the mass element 2131 along the vibration direction of the vibrating unit 213. The side of the mass element 2131 away from the substrate 221 is flush with the side of the stopper 212 away from the substrate 221. The difference between the thickness of the stopper 212 along the vibration direction of the vibrating unit 213 and the thickness of the mass element 2131 along the vibration direction of the vibrating unit 213 can be the height of the first acoustic cavity 214 along the vibration direction of the vibrating unit 213. Therefore, when manufacturing the vibration sensor 200, the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 may be limited by setting the thickness of the stopper 212 along the vibration direction of the vibration unit 213 and the thickness of the mass element 2131 along the vibration direction of the vibration unit 213 so as to accurately control the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213.

[0069] The above description of the vibration sensor 200 and its components is merely for illustrative purposes and does not limit the scope of application of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 200 based on the suggestions of this specification, for example, the first hole 21311 may be installed through the elastic element 2132. These modifications and changes are still within the scope of this specification.

[0070] FIG. 3 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0071] The structure of the vibration sensor 300 shown in Fig. 3 is similar to the structure of the vibration sensor 200 shown in Fig. 2, but differs in that the structure of the stopper is different. As shown in Fig. 3, the stopper 312 of the vibration sensor 300 may include a first stopper 3121 and a second stopper 3122 that are installed in order along the vibration direction of the vibration unit 213, and the first stopper 3121 is connected to the housing 211, and the second stopper 3122 is connected to the acoustic transducer 220 (e.g., the substrate 221). That is, the housing 211, the first stopper 3121, the second stopper 3122, and the acoustic transducer 220 (e.g., the substrate 221) are connected in order along the vibration direction of the vibration unit 213. In some embodiments, a first side of the elastic element 2132 is circumferentially attached to the periphery of the mass element 2131, and a second side of the elastic element 2132 is connected to the first stopper 3121, i.e., the elastic element 2132 is connected between the mass element 2131 and the first stopper 3121. The elastic element 2132 and the substrate 221 are spaced apart from each other in the vibration direction of the vibration unit 213.

[0072] In some embodiments, the thickness of the first stopper 3121 along the vibration direction of the vibration unit 213 may be equal to the thickness of the mass element 2131 along the vibration direction of the vibration unit 213. In some embodiments, the first stopper 3121 and the mass element 2131 may be manufactured from the same kind of material. In such a situation, the first stopper 3121 and the mass element 2131 may be processed simultaneously to reduce the processing flow, so as to make the manufacturing process of the vibration sensor 300 faster and easier.

[0073] In some embodiments, the thickness of the second stopper 3122 along the vibration direction of the vibration unit 213 may be equal to the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213. When manufacturing the vibration receiver 210 in such an installation manner, the thickness of the second stopper 3122 along the vibration direction of the vibration unit 213 may be set according to the requirement for the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213 so as to more accurately control the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213. In some embodiments, the thickness of the second stopper 3122 along the vibration direction of the vibration unit 213 may be 50 um to 500 um. For example, the thickness of the second stopper 3122 along the vibration direction of the vibration unit 213 may be 150 um to 400 um. Also, for example, the thickness of the second stopper 3122 along the vibration direction of the vibration unit 213 may be 250 um to 300 um.

[0074] In some embodiments, the width of the first stopper 3121 along the direction perpendicular to the vibration direction of the vibration unit 213 may be the same as or different from the width of the second stopper 3122 along the direction perpendicular to the vibration direction of the vibration unit 213. In some embodiments, the width of the first stopper 3121 along the direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than the width of the second stopper 3122 along the direction perpendicular to the vibration direction of the vibration unit 213 so that the elastic element 2132 is placed between the first stopper 3121 and the mass element 2131. For example, by setting the width of the first stopper 3121 along the direction perpendicular to the vibration direction of the vibration unit 213 to be smaller than the width of the second stopper 3122 along the direction perpendicular to the vibration direction of the vibration unit 213, the elastic element 2132 can be more easily bonded between the first stopper 3121 and the mass element 2131. In some embodiments, the ratio of the width of the first stopper 3121 along the direction perpendicular to the vibration direction of the vibration unit 213 to the width of the second stopper 3122 along the direction perpendicular to the vibration direction of the vibration unit 213 may be greater than 0.5. When the overall size of the vibration sensor 300 is constant, the width of the mass element 2131 along the direction perpendicular to the vibration direction of the vibration unit 213 can be increased by setting the width of the first stopper 3121 along the direction perpendicular to the vibration direction of the vibration unit 213 to be small, thereby improving the sensitivity of the vibration sensor 300. On the other hand, the overall strength of the stopper 312 can be improved to a certain extent by setting the width of the second stopper 3122 along the direction perpendicular to the vibration direction of the vibration unit 213 to be large.

[0075] In some embodiments, the range of widths of the first stopper 3121 and / or the second stopper 3122 along a direction perpendicular to the vibration direction of the vibration unit 213 may be 100 um to 500 um. For example, the range of widths of the first stopper 3121 along a direction perpendicular to the vibration direction of the vibration unit 213 may be 100 um to 250 um, and the range of widths of the second stopper 3122 along a direction perpendicular to the vibration direction of the vibration unit 213 may be 200 um to 500 um.

[0076] In some embodiments, the width of the first stopper 3121 along a direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than the width of the second stopper 3122 along a direction perpendicular to the vibration direction of the vibration unit 213.

[0077] In some embodiments, the first stopper 3121 and the second stopper 3122 may be made of the same or different materials. In some embodiments, the first stopper 3121 and the second stopper 3122 may both be made of a rigid material. For example, the first stopper 3121 and the second stopper 3122 may both be made of a metal material (e.g., brass), an alloy material (e.g., stainless steel), a rigid plastic, etc. Manufacturing the first stopper 3121 and the second stopper 3122 from the same material can simplify the manufacturing flow of the vibration sensor 300.

[0078] In some embodiments, the first stopper 3121 and the second stopper 3122 may be made of different materials. For example, the first stopper 3121 may be made of a rigid material (e.g., a metal material, an alloy material, a rigid plastic), and the second stopper 3122 may be made of a solder paste or an adhesive. In the manufacturing process of the vibration sensor 300, the housing 211 can be connected to the first stopper 3121 first, and then the housing 211 and the first stopper 3121 can be directly connected (e.g., glued) to the substrate 221 by the second stopper 3122, thereby making the manufacturing flow of the vibration sensor 300 simpler. In addition, by directly connecting the first stopper 3121 and the substrate 221 by the second stopper 3122, the connection strength between the vibration receiver 210 and the substrate 221 can be improved, and the structural reliability of the vibration sensor 300 can be further improved.

[0079] The above description of the vibration sensor 300 and its components is merely for illustrative purposes and does not limit the scope of application of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 300 based on the suggestions of this specification, and these modifications and changes are still within the scope of this specification. For example, the stopper 312 of the vibration sensor 300 may include multiple stoppers (e.g., four stoppers, five stoppers). The material of each stopper, the width along the direction perpendicular to the vibration direction of the vibration unit 213, and the thickness along the vibration direction of the vibration unit 213 may be the same or different.

[0080] FIG. 4 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0081] The structure of the vibration sensor 400 shown in FIG. 4 is similar to the structure of the vibration sensor 300 shown in FIG. 3, but differs in that the structure of the vibration unit is different. As shown in FIG. 4, the vibration unit 213 of the vibration sensor 400 may further include a second elastic element 4133. The second elastic element 4133 may be located in the first acoustic cavity 214 and connected to the second stopper 3122 and the substrate 221 of the acoustic transducer 220, respectively. By installing the second elastic element 4133 in the first acoustic cavity 214, the volume of the first acoustic cavity 214 can be reduced, thereby improving the performance (e.g., sensitivity) of the vibration sensor 400. For example, by reducing the volume of the first acoustic cavity 214, the volume change rate of the first acoustic cavity 214 due to the same displacement of the vibration unit 213 is higher, and the change in air pressure in the first acoustic cavity 214 is larger, thereby improving the sensitivity of the vibration sensor 400.

[0082] In some embodiments, the second elastic element 4133 may contact the elastic element 2132. In some embodiments, the second elastic element 4133 may not contact the elastic element 2132, i.e., there may be a distance between the second elastic element 4133 and the elastic element 2132. In some embodiments, the material of the second elastic element 4133 and the material of the elastic element 2132 may be the same or different. In some embodiments, the material of the elastic element 2132 and / or the second elastic element 4133 may include an elastic colloid, such as, for example, silicone rubber, silicone gel, silicone sealant, silicone ketone rubber, or the like.

[0083] In some embodiments, the second elastic element 4133 may not be in contact with the mass element 2131, thereby preventing the mass element 2131 from being affected by the second elastic element 4133 in the vibration process and impairing the function of the vibration sensor 400. For example, the second elastic element 4133 and the mass element 2131 may be spaced apart from each other along the vibration direction of the vibration unit 213, and the space may be larger than the maximum amplitude generated when the mass element 2131 vibrates along the vibration direction.

[0084] In some embodiments, the area of ​​the second elastic element 4133 on the side close to the acoustic transducer 220 may be equal to the area of ​​the second elastic element 4133 on the side away from the acoustic transducer 220. The area of ​​the second elastic element 4133 on the side close to the acoustic transducer 220 may be a cross-sectional area along a direction perpendicular to the vibration direction of the vibration unit 213 of the second elastic element 4133. For example, the projection shape of the second elastic element 4133 on a plane parallel to the vibration direction of the vibration unit 213 may be rectangular. In some embodiments, when the second elastic element 4133 contacts the elastic element 2132, the width of the second elastic element 4133 along the direction perpendicular to the vibration direction of the vibration unit 213 may be smaller than the width of the elastic element 2132 along the direction perpendicular to the vibration direction of the vibration unit 213, thereby avoiding the second elastic element 4133 contacting the mass element 2131.

[0085] In some embodiments, the area of ​​the second elastic element 4133 on the side close to the acoustic transducer 220 may be larger than the area of ​​the second elastic element 4133 on the side away from the acoustic transducer 220. For example, the shape of the second elastic element 4133 projected onto a plane parallel to the vibration direction of the vibration unit 213 may be a trapezoid or a triangle. The side of the second elastic element 4133 away from the second stopper 3122 in the direction perpendicular to the vibration direction of the vibration unit 213 may be set to an inclined plane or a circular arc surface. By setting the area of ​​the second elastic element 4133 on the side close to the acoustic transducer 220 to be larger than the area of ​​the second elastic element 4133 on the side away from the acoustic transducer 220, the second elastic element 4133 can be prevented from contacting the mass element 2131 and the volume of the first acoustic cavity 214 can be further reduced, thereby further improving the sensitivity of the vibration sensor 400.

[0086] It should be noted that the above description of the vibration sensor 400 and its components is merely for illustrative and explanatory purposes, and does not limit the scope of application of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 400 based on the teachings of this specification, and these modifications and changes still fall within the scope of this specification. For example, the stopper 312 in the vibration sensor 400 may be a single-layer stopper (e.g., the stopper 212 shown in FIG. 2).

[0087] FIG. 5 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0088] The structure of the vibration sensor 500 shown in FIG. 5 is similar to the structure of the vibration sensor 200 shown in FIG. 2, but differs in that the structure of the elastic element is different.

[0089] 5, the elastic element 5132 of the vibration sensor 500 may extend toward and be connected to the acoustic transducer 220. For example, the elastic element 5132 may extend toward and be connected to the substrate 221. The elastic element 5132, the substrate 221 and the vibration unit 213 form a first acoustic cavity 214. By connecting the elastic element 5132 to the substrate 221 of the acoustic transducer 220, the volume of the first acoustic cavity 214 can be further reduced, thereby improving the sensitivity of the vibration sensor 500.

[0090] In some embodiments, the elastic element 5132 may flow due to temperature changes during the manufacturing process of the vibration receiver 210, which may cause the elastic element 5132 to permeate the surface (also referred to as the "lower surface") of the mass element 2131 that is adjacent to the substrate 221, thereby affecting the vibration of the mass element 2131 and the sensitivity of the vibration sensor 500. In some embodiments, the permeation amount of the elastic element 5132 into the lower surface of the mass element 2131 can be controlled by controlling the total amount of material (e.g., the amount of adhesive) used for the elastic element 5132. The permeation amount may be the overlap area between the projection area of ​​the elastic element 5132 in the vibration direction of the vibration unit 213 and the projection area of ​​the mass element 2131 in the vibration direction of the vibration unit 213. In some embodiments, the permeation amount of the elastic element 5132 is 25% or less of the projection area of ​​the mass element 2131 in the vibration direction of the vibration unit 213. For example, the penetration amount of the elastic element 5132 is 10% or less of the projected area of ​​the mass element 2131 in the vibration direction of the vibration unit 213.

[0091] It should be noted that the above description of the vibration sensor 500 and its components is merely for illustrative purposes and does not limit the scope of the present specification. Those skilled in the art may make various modifications and changes to the vibration sensor 500 based on the teachings of the present specification, and these modifications and changes are still within the scope of the present specification. In some embodiments, the stopper 212 in the vibration sensor 500 may have a two-layer structure or a multi-layer structure (e.g., the stopper 312 shown in FIG. 3). For example, the stopper 212 in the vibration sensor 500 may include a first stopper (not shown in FIG. 5) and a second stopper (not shown in FIG. 5), and when the widths of the first stopper and the second stopper along the direction perpendicular to the vibration direction of the vibration unit 213 are different, the side of the elastic element 5132 adjacent to the stopper 212 may be installed in a step structure so that the elastic element 5132 is tightly connected to the first stopper and the second stopper, respectively.

[0092] FIG. 6 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0093] The structure of the vibration sensor 600 shown in FIG. 6 is similar to the structure of the vibration sensor 500 shown in FIG. 5, but differs in that the structures of the elastic element and the stopper are different.

[0094] 6, the thickness of the stopper 212 along the vibration direction of the vibrating unit 213 may be equal to the thickness of the mass element 2131 along the vibration direction of the vibrating unit 213. In this case, the stopper 212 and the mass element 2131 may be machined simultaneously, so as to simplify the manufacturing process of the stopper 212 and the mass element 2131. In some embodiments, when manufacturing the vibration sensor 600, the stopper 212 and the mass element 2131 are first positioned in the same horizontal plane (i.e., the side of the stopper 212 away from the substrate 221 is in the same plane as the side of the mass element 2131 away from the substrate 221), and then the elastic element 6132 is bonded between the stopper 212 and the mass element 2131, and the temperature is increased to thermally expand the air in the sound collection hole 2211 and lift the mass element 2131, so that the side of the mass element 2131 away from the substrate 221 is farther from the substrate 221 than the side of the stopper 212 away from the substrate 221, thereby forming the first acoustic cavity 214. In some embodiments, the difference between the distance between the side of the mass element 2131 away from the substrate 221 and the substrate 221 and the distance between the side of the stopper 212 away from the substrate 221 and the substrate 221 may be the height of the first acoustic cavity 214 along the vibration direction of the vibration unit 213.

[0095] In some embodiments, the elastic element 6132 has a certain deformation ability, so that the elastic element 6132 can be stretched and deformed during the manufacturing process of the vibration sensor 600 (e.g., during the lifting process of the mass element 2131), such that the area of ​​the first side (the side close to the mass element 2131) of the elastic element 6132 is larger than the area of ​​the second side (the side away from the mass element 2131) of the elastic element 6132.

[0096] It should be noted that the above description of the vibration sensor 600 and its components is merely for illustrative and explanatory purposes, and is not intended to limit the scope of the present specification. Those skilled in the art may make various modifications and changes to the vibration sensor 600 based on the teachings of the present specification, and these modifications and changes are still within the scope of the present specification. In some embodiments, the stopper 212 in the vibration sensor 600 may have a two-layer structure or a multi-layer structure (e.g., the stopper 312 shown in FIG. 3).

[0097] FIG. 7 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0098] The structure of the vibration sensor 700 shown in FIG. 7 is similar to the structure of the vibration sensor 500 shown in FIG. 5, but differs in that the structure of the stopper is different.

[0099] In some embodiments, as shown in FIG. 7 , the stopper 712 may be located between the elastic element 2132 and the housing 211. In some embodiments, the stopper 712 may be disposed around the elastic element 2132, with the side of the elastic element 2132 adjacent to the mass element 2131 being physically connected to the mass element 2131 and the side of the elastic element 2132 adjacent to the stopper 712 being physically connected to the stopper 712. In some embodiments, the stopper 712 may be physically connected to the substrate 221. In some embodiments, the stopper 712 may not contact the housing 211. For example, the stopper 712 and the housing 211 may be provided at a certain interval. In some embodiments, the stopper 712 may contact the housing 211. In some embodiments, the elastic element 2132 may extend toward and be physically connected to the substrate 221 of the acoustic transducer 220, such that the substrate 221, the elastic element 2132 and the mass element 2131 form a first acoustic cavity 214.

[0100] In some embodiments, the thickness of the stopper 712 along the vibration direction of the vibrating unit 213 may be 100 um to 1000 um. For example, the thickness of the stopper 712 along the vibration direction of the vibrating unit 213 may be 200 um to 500 um. In some embodiments, the thickness of the stopper 712 along the vibration direction of the vibrating unit 213 may be equal to the thickness of the mass element 2131 along the vibration direction of the vibrating unit 213. In this case, the stopper 712 and the mass element 2131 may be processed simultaneously to simplify the manufacturing process of the stopper 712 and the mass element 2131.

[0101] The above description of the vibration sensor 700 and its components is merely for illustrative purposes and does not limit the scope of application of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 800 based on the suggestions of this specification. For example, the thickness of the stopper 712 along the vibration direction of the vibration unit 213 may be equal to or greater than the thickness of the elastic element 2132 along the vibration direction of the vibration unit 213.

[0102] FIG. 8 is an example structural diagram of a vibration sensor according to some embodiments of the present disclosure.

[0103] As shown in FIG. 8, the vibration sensor 800 may not include a stopper. In some embodiments, as shown in FIG. 8, the elastic element 8132 is disposed around the mass element 2131. The inner side of the elastic element 8132 is physically connected to the mass element 2131, and the outer side of the elastic element 8132 is physically connected to the housing 211. In some embodiments, the elastic element 8132 and the substrate 221 are spaced apart from each other in the vibration direction of the vibration unit 213. The elastic element 8132, the mass element 2131, the housing 211, and the substrate 221 form a first acoustic cavity 214. The elastic element 8132, the mass element 2131, and the housing 211 form a second acoustic cavity 215.

[0104] In some embodiments, when forming the first acoustic cavity 214 and the second acoustic cavity 215, a jig (not shown in FIG. 8 ) can be used to control the distance between the mass element 2131 and the substrate 221 (i.e., the height of the first acoustic cavity 214). For example, the mass element 2131 can be placed on a jig, and the height of the jig itself can be used to lift the mass element 2131, and then the mass element 2131 and the housing 211 can be connected by an elastic element 8132 to control the height of the first acoustic cavity 214 and the second acoustic cavity 215. By connecting the mass element 2131 to the housing 211 by the elastic element 8132 and controlling the distance between the mass element 2131 and the substrate 221 by the jig, the height of the first acoustic cavity 214 and the second acoustic cavity 215 can be controlled more stably and accurately, thereby simplifying the manufacturing process flow of the vibration sensor 800. Additionally, the structure of mass element 2131 (eg, whether or not holes are drilled in mass element 2131) does not affect the process flow described above.

[0105] In some embodiments, the thickness of the elastic element 8132 along the vibration direction of the vibration unit 213 may be smaller, equal to, or larger than the thickness of the mass element 2131 along the vibration direction of the vibration unit 213.

[0106] FIG. 9 is an example structural diagram of a vibration sensor 800 according to some embodiments of the present disclosure.

[0107] 9, in some embodiments, the thickness of the elastic element 8132 along the vibration direction of the vibrating unit 213 may be greater than the thickness of the mass element 2131 along the vibration direction of the vibrating unit 213. For example, both sides of the elastic element 8132 along the vibration direction of the vibrating unit 213 may protrude from both sides of the mass element 2131 along the vibration direction of the vibrating unit 213. That is, the side of the elastic element 8132 close to the substrate 221 is closer to the substrate 221 than the side of the mass element 2131 close to the substrate 221, and the side of the elastic element 8132 away from the substrate 221 is farther from the substrate 221 than the side of the mass element 2131 away from the substrate 221. By installing in this manner, the connection area between the elastic element 8132 and the mass element 2131 can be increased, thereby improving the connection strength between the elastic element 8132 and the mass element 2131.

[0108] The above description of the vibration sensor 800 and its components is merely for illustrative purposes and does not limit the scope of application of this specification. Those skilled in the art can make various modifications and changes to the vibration sensor 800 based on the suggestions of this specification. For example, the side of the elastic element 8132 that is close to the substrate 221 is closer to the substrate 221 than the side of the mass element 2131 that is close to the substrate 221, and the side of the elastic element 8132 that is away from the substrate 221 is in the same plane as the side of the mass element 2131 that is away from the substrate 221. For example, the side of the elastic element 8132 that is close to the substrate 221 is in the same plane as the side of the mass element 2131 that is close to the substrate 221, and the side of the elastic element 8132 that is away from the substrate 221 is farther from the substrate 221 than the side of the mass element 2131 that is away from the substrate 221.

[0109] Although the basic concept has been described above, it is clear to those skilled in the art that the above detailed disclosure is merely provided as an example and is not intended to limit the present application. Although not expressly described herein, those skilled in the art may make various changes, improvements and modifications to the present application. These changes, improvements and modifications are intended to be suggested by the present application and therefore fall within the spirit and scope of the exemplary embodiments of the present application.

[0110] Also, certain terms are used herein to describe embodiments of the present application. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic associated with at least one embodiment of the present application. Thus, it is emphasized and understood that references to two or more of "one embodiment," "one embodiment," or "one alternative embodiment" in various parts of this specification do not necessarily all refer to the same embodiment. Also, certain features, structures, or characteristics in one or more embodiments of the present application may be combined as appropriate.

[0111] Also, as will be appreciated by those skilled in the art, aspects of the present application may be illustrated and described in several patentable classes or contexts, including any new and useful process, machine, manufacture, or combination of matter, or any new and useful improvement thereto. Thus, aspects of the present application may be implemented entirely in hardware, entirely in software (including firmware, resident software, microcode, etc.), or a combination of hardware and software. Any of the above hardware or software may be referred to as a "data block," "module," "engine," "unit," "assembly," or "system." Also, aspects of the present application may take the form of a computer program product embodied in one or more computer-readable medium(s) containing computer-readable program code.

[0112] The computer storage medium may include a propagated data signal, propagated on baseband or as part of a carrier wave, for carrying the computer program code. The propagated signal may include various forms, such as electromagnetic signals, optical signals, or suitable combinations. The computer storage medium may be any computer readable medium other than a computer readable storage medium, which may be connected to an instruction execution system, device, or facility to realize the communication, propagation, or transmission of the program used. The program code on the computer storage medium may be propagated via any suitable medium, including wireless, cable, fiber optic cable, RF, or similar media, or any combination of the above media.

[0113] The computer program code necessary for the operation of each part of this application may be coded in one or more programming languages, including object-oriented programming languages ​​such as Java, Scala, Smalltalk, Eiffel, JADE, Emerald, C++, C#, VB.NET, Python, traditional procedural programming languages ​​such as C, Visual Basic, Fortran 2003, Perl, COBOL 2002, PHP, ABAP, dynamic programming languages ​​such as Python, Ruby and Groovy, or other programming languages. The program code may run entirely on the user's computer, on the user's computer as a separate software package, partly on the user's computer and partly on a remote computer, or entirely on a remote computer or server. In the latter case, the remote computer may be connected to the user's computer by any form of network, such as a local area network (LAN) or wide area network (WAN), may be connected to an external computer (e.g., via the Internet), may be in a cloud computing environment, may be used as a service, such as Software as a Service (SaaS).

[0114] Additionally, unless expressly stated in the claims, the order of enumeration of processing elements or sequences, the use of alphanumeric characters, or the use of other designations does not limit the order of procedures and methods of the present application. While the above disclosure describes through various examples what are presently believed to be various useful embodiments of the invention, it should be understood that such details are merely illustrative and that the appended claims are not limited to the disclosed embodiments, but on the contrary are intended to cover all modifications and equivalent combinations that are within the spirit and scope of the embodiments of the present application. For example, the system assembly described above may be implemented by a hardware device, but may also be implemented as a software-only solution, for example, by installing the described system on an existing server or mobile device.

[0115] Similarly, in the foregoing description of embodiments of the present application, it should be understood that various features may be grouped together in a single embodiment, figure, or description for the purpose of simplifying the application and facilitating an understanding of one or more embodiments of the present invention. This method of disclosure, however, should not be interpreted as reflecting an intention that the claimed subject matter requires more features than are recited in each claim. In fact, an embodiment may include fewer than all features of a single embodiment disclosed above.

[0116] In some embodiments, numbers describing the number of components and attributes are used, and it is understood that the numbers describing such embodiments are modified in some instances by the modifiers "about," "approximately," or "substantially." Unless otherwise specified, "about," "approximately," or "approximately" indicate that a variation of ±20% of the number is permitted. Thus, in some embodiments, all numerical parameters used in the specification and claims are approximations that may vary depending on the characteristics required for a particular embodiment. In some embodiments, the numerical parameters should be applied with the stated number of significant digits and ordinary rounding techniques. In some embodiments, the numerical ranges and parameters for determining the ranges are approximations; however, in specific embodiments, such numerical values ​​are set as precisely as possible.

[0117] All patents, patent applications, published patent applications, and other materials, such as articles, books, specifications, publications, documents, etc., referenced in this application are incorporated herein by reference in their entirety, except for prosecution history documents that are inconsistent or inconsistent with the content of this application, and documents that may have a limiting effect on the broadest scope of the claims of this application (now or later related to this application). In addition, if the explanations, definitions, and / or use of terms in the accompanying materials of this application are inconsistent or inconsistent with the content set forth in this application, the explanations, definitions, and / or use of terms in this application shall control.

[0118] Finally, it should be understood that the embodiments described herein are merely illustrative of the principles of the embodiments of the present application. Other variations may be within the scope of the present application. Thus, by way of example, and not of limitation, alternative configurations of the embodiments of the present application may be considered consistent with the teachings of the present application. Thus, the embodiments of the present application are not limited to the embodiments expressly introduced and described herein. [Explanation of symbols]

[0119] 100 Vibration Sensor 110 Vibration Receiver 211 Housing 212 Stopper 213 Vibration Unit 221 Substrate 220 Acoustic Transducer

Claims

1. a vibration receiver including a housing, a stopper, and a vibration unit; and an acoustic transducer; the housing and the acoustic transducer form an acoustic cavity, the vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity; the acoustic transducer is in acoustic communication with the first acoustic cavity; The housing is configured to generate vibrations based on an external vibration signal, and the vibration unit modifies an acoustic pressure in the first acoustic cavity in response to the vibration of the housing to generate an electrical signal in the acoustic transducer; A vibration sensor, wherein the vibration unit includes a mass element and an elastic element, a first side of the elastic element being attached to a side wall of the mass element and a second side of the elastic element being connected to the stopper.

2. The vibration sensor of claim 1 , wherein the stopper is located between the housing and the acoustic transducer, the housing, the stopper and the acoustic transducer forming the acoustic cavity.

3. 3. The vibration sensor of claim 2, wherein the acoustic transducer includes a substrate, the stopper is connected to the substrate, the stopper, the vibration unit and the substrate form the first acoustic cavity, the elastic element is connected between the stopper and the mass element, and the elastic element and the substrate are spaced at a constant interval in the vibration direction of the vibration unit.

4. 4. The vibration sensor of claim 2, wherein the thickness of the stopper along the vibration direction of the vibration unit is greater than the thickness of the mass element along the vibration direction of the vibration unit, and the side of the stopper away from the acoustic transducer is in the same plane as the side of the mass element away from the acoustic transducer.

5. The vibration sensor of claim 2, wherein the stopper includes a first stopper and a second stopper arranged in sequence along a vibration direction of the vibration unit, the first stopper being connected to the housing, and the second stopper being connected to the acoustic transducer.

6. The vibration sensor of claim 5 , wherein the second side of the resilient element is connected to the first stopper.

7. The vibration sensor according to claim 5 , wherein a thickness of the first stopper in the vibration direction of the vibration unit is equal to a thickness of the mass element in the vibration direction of the vibration unit.

8. A vibration sensor according to any one of claims 5 to 7, wherein the width of the first stopper along a direction perpendicular to the vibration direction of the vibration unit is smaller than the width of the second stopper along a direction perpendicular to the vibration direction of the vibration unit.

9. The vibration sensor according to any one of claims 5 to 8, wherein the first stopper and the second stopper are made of different materials.

10. The vibration sensor according to any one of claims 5 to 9, wherein the vibration unit includes a second elastic element, the second elastic element being located within the first acoustic cavity and connected to the second stopper and the acoustic transducer, respectively.

11. The vibration sensor according to claim 10 , wherein an area of ​​the second elastic element on a side adjacent to the acoustic transducer is larger than an area of ​​the second elastic element on a side away from the acoustic transducer.

12. The vibration sensor of claim 3 , wherein the elastic element extends toward and is connected to the substrate, the elastic element, the mass element and the substrate forming the first acoustic cavity.

13. 13. The vibration sensor of claim 12, wherein a thickness of the stopper along the vibration direction of the vibration unit is equal to a thickness of the mass element along the vibration direction of the vibration unit, and an area of ​​the first side of the elastic element is greater than an area of ​​the second side of the elastic element.

14. The vibration sensor described in claim 12, wherein the thickness of the stopper along the vibration direction of the vibration unit is equal to the thickness of the mass element along the vibration direction of the vibration unit, and the side of the mass element away from the substrate is farther from the substrate than the side of the stopper away from the substrate.

15. a vibration receiver including a housing and a vibration unit, and an acoustic transducer; the housing and the acoustic transducer form an acoustic cavity, the vibration unit is located within the acoustic cavity and divides the acoustic cavity into a first acoustic cavity and a second acoustic cavity; the acoustic transducer is in acoustic communication with the first acoustic cavity; The housing is configured to generate vibrations based on an external vibration signal, and the vibration unit modifies an acoustic pressure in the first acoustic cavity in response to the vibration of the housing to generate an electrical signal in the acoustic transducer; A vibration sensor, wherein the vibration unit includes a mass element and an elastic element, the elastic element being attached to a side wall of the mass element and extending toward the housing.

Images