Twin drive drive unit

Abstract

The twin drive driving device comprises a slider extending along an X-axis direction, first and second shaft drive units moving along a Y-axis direction, first and second position detection units which detect respective positions of both ends of the slider, a control unit which performs positioning control, and a target position setting unit, wherein the target position setting unit includes: an inspection unit which performs positioning accuracy inspection of the twin drive driving device by performing positioning control on the basis of a temporary first target position and a temporary second target position; an update unit which sequentially changes at least one among the temporary first target opposition and the temporary second target position in a predetermined direction of the Y-axis direction or in an opposite direction that is the opposite of the predetermined direction until a result of the positioning accuracy inspection satisfies an inspection criterion, and which causes the inspection unit to repeatedly perform the positioning accuracy inspection; and a setting unit which sets, to a first target position and a second target position, the temporary first target position and the temporary second target position when the result of the positioning accuracy inspection satisfies the inspection criterion.

Description

[Technical field]

[0001] The present disclosure relates to a twin drive drive device that stops a slider at a target position using a pair of shaft drive units. [Background technology]

[0002] Conventionally, various techniques have been proposed for the twin drive drive device. For example, an XY positioning control device described in Patent Document 1 below includes a moving body that extends along the X-axis direction, is movable along the Y-axis direction perpendicular to the X-axis direction, and supports an object to be transported so as to be movable along the X-axis direction, first and second guide members that guide both ends of the moving body along the first and second Y-axis directions, respectively, first and second position detection means that detect the positions of each end of the moving body in the first and second Y-axis directions, respectively, first and second driving means that move the moving body along the first and second Y axes, respectively, and causes the first and second driving means to move the moving body in the Y-axis direction and move the object to be transported in the X-axis direction using position information output from the first and second position detection means. and a control means for controlling positioning by adjusting the second driving means so that the moving body is in a free-running state before actual driving, causing the first driving means to move the moving body to at least one predetermined position on the first Y-axis, and after the moving body has moved to the predetermined position on the first Y-axis, causing the second position detection means to detect predetermined position information of the second Y-axis of the moving body, and during actual driving, causing the first driving means to move the moving body to an actual driving position that is a position for actual driving, and causing the second driving means to move the moving body to an actual driving position corrected using an error of the predetermined position information of the second Y-axis relative to the predetermined position on the first Y-axis.

[0003] According to the description in Patent Document 1 below, such an XY positioning control device, in an all-axis positioning control method for performing high-precision positioning, detects predetermined position information of the second Y-axis when a movable body is moved to a predetermined position on the first Y-axis side, and during actual driving, moves the movable body to an actual driving position on the first Y-axis side, and moves the movable body to an actual driving position corrected using the error in the detected predetermined position information of the second Y-axis relative to the predetermined position of the first Y-axis on the second Y-axis side. Therefore, it is possible to avoid interference of external forces acting on the movable body from the first Y-axis side and the second Y-axis side, thereby increasing the rigidity of the movable body and enabling high-speed positioning control with high control gain. It is also possible to avoid damage to the movable body, temperature increases in the first and second driving means, and excess power consumption due to interference from external forces. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2003-140749 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, if interference with external forces acting on the moving body from the first Y-axis side and the second Y-axis side is avoided too much, depending on the rigidity of the moving body and the driving means, there is a risk that the yawing vibration that occurs when the moving body stops at the actual driving position cannot be suppressed.

[0006] The present disclosure has been made in consideration of the above-mentioned points, and has an objective of providing a twin-drive drive device that can improve the positioning accuracy of a slider when stopping the slider at a target position by positioning control. [Means for solving the problem]

[0007] The present specification relates to a twin-drive driving device including a slider extending along an X-axis direction, first and second axis driving units provided corresponding to both ends of the slider and moving the slider along a Y-axis direction, first and second position detection units detecting the respective positions of both ends of the slider as first and second detection positions, a control unit performing positioning control of the first and second axis driving units based on the first and second detection positions, and a target position setting unit setting a first target position for the first detection position and a second target position for the second detection position when stopping the slider at a target position by positioning control, wherein the target position setting unit performs positioning control based on the tentative first target position and second target position, A position inspection and a time inspection are carried out when the slider is stopped at the inspection position from the reference position. The inspection section inspects the positioning accuracy of the twin drive drive unit, and the results of the positioning accuracy inspection are Position and time inspection A twin-drive driving device is disclosed that includes an update unit that causes an inspection unit to repeatedly perform a positioning accuracy inspection by sequentially changing at least one of a tentative first target position and a second target position in a specified direction in the Y-axis direction or in a direction opposite to the specified direction until an inspection criterion is met, and a determination unit that determines the tentative first target position and second target position as the first target position and the second target position when the result of the positioning accuracy inspection satisfies the inspection criterion. Effect of the Invention

[0008] According to the present disclosure, the twin drive actuator can improve the positioning accuracy of the slider when stopping the slider at a target position through positioning control. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a plan view showing a schematic diagram of a twin-drive drive device according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a block diagram for explaining a control configuration of the twin drive drive device. [Diagram 3] 10 is a flowchart illustrating an offset amount calculation method. [Figure 4] 11 is a flowchart illustrating a method for reusing an offset amount. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings. However, in FIG. 1, some of the configuration is omitted, and the dimensional ratios of the depicted parts are not necessarily accurate. Furthermore, in FIG. 1, the reference character D1 indicates the X-axis direction, which is the left-right direction. The reference character D2 indicates the Y-axis direction, which is the front-back direction. Therefore, the X-axis direction D1 and the Y-axis direction D2 are horizontal directions that are perpendicular to each other.

[0011] As shown in FIG. 1, the twin-drive driving device 10 of this embodiment includes a left linear motor 12L, a right linear motor 12R, a slider 14, a left linear encoder 16L, and a right linear encoder 16R. The left linear motor 12L includes a left stator 18L and a left mover 20L. The right linear motor 12R includes a right stator 18R and a right mover 20R. The left stator 18L and the right stator 18R are rail-shaped and are provided along the Y-axis direction D2 with a certain interval in the X-axis direction D1. The left mover 20L is mounted by the left stator 18L so as to be slidable in the Y-axis direction D2. Similarly, the right mover 20R is mounted by the right stator 18R so as to be slidable in the Y-axis direction D2.

[0012] The slider 14 is beam-shaped and spans between the left stator 18L and the right stator 18R so as to extend in the X-axis direction D1. A left end 22L of the slider 14 is fixed to the left mover 20L. Similarly, a right end 22R of the slider 14 is fixed to the right mover 20R. This allows the left linear motor 12L and the right linear motor 12R to move the slider 14 along the Y-axis direction D2.

[0013] The left linear encoder 16L includes a left scale 24L and a left detection head 26L. The left scale 24L is fixed to the left stator 18L with its longitudinal direction aligned with the Y-axis direction D2. The left detection head 26L is fixed to a position at the left end 22L of the slider 14 where the left scale 24L can be detected. This allows the left linear encoder 16L to detect the position of the left end 22L of the slider 14 as a left detection position 38L (see FIG. 2, described later). The left detection head 26L may be fixed to a position at the left mover 20L where the left scale 24L can be detected.

[0014] Similarly, the right linear encoder 16R includes a right scale 24R and a right detection head 26R. The right scale 24R is fixed to the right stator 18R with its longitudinal direction aligned with the Y-axis direction D2. The right detection head 26R is fixed to a position on the right end 22R of the slider 14 where the right scale 24R can be detected. This allows the right linear encoder 16R to detect the position of the right end 22R of the slider 14 as a right detection position 38R (see FIG. 2, which will be described later). The right detection head 26R may be fixed to a position on the right mover 20R where the right scale 24R can be detected.

[0015] 2, in addition to the above-mentioned configuration, the twin drive driving device 10 is equipped with a controller 28, a left servo amplifier 30L, and a right servo amplifier 30R, etc. The controller 28 is mainly configured as a computer, and is equipped with an arithmetic circuit such as a CPU, RAM, ROM, etc., and controls the entire twin drive driving device 10. The ROM of the controller 28 stores various control programs described below and various data used in these control programs, etc.

[0016] The controller 28 is connected to a left servo amplifier 30L and a right servo amplifier 30R. The left servo amplifier 30L is connected to a left linear motor 12L and a left linear encoder 16L. Similarly, the right servo amplifier 30R is connected to a right linear motor 12R and a right linear encoder 16R. In this way, the twin drive driving device 10 has a feedback control servo mechanism configured to perform multi-axis control.

[0017] The controller 28 includes a control unit 32, a target position setting unit 34, and a storage unit 36. The control unit 32 serves as a feedback control controller, and performs positioning control of the left linear motor 12L and the right linear motor 12R based on the left detected position 38L detected by the left linear encoder 16L and the right detected position 38R detected by the right linear encoder 16R.

[0018] The target position setting unit 34 sets a left target position 40L and a right target position 40R. The left target position 40L is a target value of feedback control for the left detected position 38L. The right target position 40R is a target value of feedback control for the right detected position 38R.

[0019] The target position setting unit 34 sets the left target position 40L and the right target position 40R when positioning control of the left linear motor 12L and the right linear motor 12R is performed. At that time, the left target position 40L and the right target position 40R are set to positions such that thrusts 44 in directions opposite to each other in the Y-axis direction D2 are generated in the left mover 20L and the right mover 20R, respectively, when the slider 14 is stopped at the first command position 42A by positioning control, as shown in FIG. 1 above, for example. The setting will be described later.

[0020] The thrust 44 generated by the left mover 20L faces forward, and the thrust 44 generated by the right mover 20R faces backward. However, the left target position 40L and the right target position 40R may be set so that the thrust 44 generated by the left mover 20L faces backward, and the thrust 44 generated by the right mover 20R faces forward.

[0021] Returning to FIG. 2, the storage unit 36 ​​is a non-volatile memory such as an EEPROM, and stores an offset amount 46. The offset amount 46 refers to the distance from the left target position 40L or the right target position 40R in the Y-axis direction D2, and is calculated by an offset amount calculation method 48 (see FIG. 3 described later). As shown in FIG. 1 above, the direction of the offset amount 46 includes a predetermined direction D3 and an opposite direction D4. The predetermined direction D3 of the offset amount 46 refers to the direction from the left target position 40L or the right target position 40R toward the front in the Y-axis direction D2. The opposite direction D4 of the offset amount 46 refers to the direction from the left target position 40L or the right target position 40R toward the rear in the Y-axis direction D2. Therefore, the opposite direction D4 of the offset amount 46 is opposite to the predetermined direction D3 of the offset amount 46.

[0022] In the twin drive actuation device 10, at the time of its shipping inspection, for example, a control program of an offset amount calculation method 48 represented by a flowchart in Fig. 3 is executed by the target position setting unit 34 to find the offset amount 46. The flowchart of the offset amount calculation method 48 will be described below.

[0023] In the initial setting process S10, the left detection position 38L and the right detection position 38R when the slider 14 is placed at a reference position by a jig or the like are set as the reference points of the left linear encoder 16L and the right linear encoder 16R. Additionally, 0 is substituted as an initial value for the offset amount 46. At this time, the left linear motor 12L and the right linear motor 12R are not generating thrust, and the slider 14 is not receiving any external force that would deform it in the Y-axis direction D2.

[0024] The accuracy inspection process S12 inspects the positioning accuracy of the twin drive drive device 10. The positioning accuracy inspection of the twin drive drive device 10 inspects the position and time when the slider 14 is stopped at an inspection position from a reference position by positioning control.

[0025] 1 is set as a reference position, and a second command position 42B, which is spaced forward in the Y-axis direction D2 from the first command position 42A, is set as an inspection position. Furthermore, a value indicating the second command position 42B is used for the left target position 40L and the right target position 40R.

[0026] In the judgment process S14, it is judged whether the positioning accuracy inspection of the twin drive actuation device 10 is passed. In this judgment, if the result of the position inspection and the result of the time inspection meet the respective inspection criteria, it is judged as passing. In the position inspection, if the difference between the stopping position of the slider 14 and the inspection position is within a predetermined distance, the result of the position inspection is judged as meeting the inspection criteria. In the time inspection, if the time it takes for the slider 14 to stop at the inspection position from the reference position is within a predetermined time, the result of the time inspection is judged as meeting the inspection criteria.

[0027] Here, if the positioning accuracy inspection of the twin drive driving device 10 passes (S14: YES), a pass process S16 is performed. In the pass process S16, the offset amount 46 is stored in the memory unit 36. In this case, the offset amount is 0. Thereafter, the offset amount calculation method 48 ends. On the other hand, if the positioning accuracy inspection of the twin drive driving device 10 fails (S14: NO), a predetermined direction increase process S18 is performed.

[0028] In the predetermined direction increase process S18, a certain amount is added to the offset amount 46 so that the offset amount 46 increases in the predetermined direction D3. The certain amount is a fixed value, but for example, a value obtained by multiplying a certain distance used in the inspection standard of the position inspection by a coefficient may be used.

[0029] In the accuracy inspection process S20, the positioning accuracy of the twin drive actuation device 10 is inspected in the same manner as in the accuracy inspection process S12 described above. That is, a position inspection and a time inspection are performed when the slider 14 is stopped at the inspection position from the reference position by the positioning control. However, of the left target position 40L and the right target position 40R used in the positioning control, a tentative left target position 40L is used as the left target position 40L. The tentative left target position 40L is a value indicating a position that is away from the left target position 40L by an offset amount 46 in the predetermined direction D3.

[0030] In the judgment process S22, similarly to the judgment process S14 described above, it is judged whether the positioning accuracy inspection of the twin drive driving device 10 is passed. Here, if the positioning accuracy inspection of the twin drive driving device 10 is passed (S22: YES), the above-mentioned pass process S16 is performed, and the offset amount 46 is stored in the memory unit 36. At that time, the direction in which the offset amount 46 increased is stored in the memory unit 36 ​​as the direction of the offset amount 46. Thereafter, the offset amount calculation method 48 ends. On the other hand, if the positioning accuracy inspection of the twin drive driving device 10 is unsuccessful (S22: NO), the judgment process S24 is performed.

[0031] In the judgment process S24, it is judged whether the result of the current position inspection is better than the previous one. If the result of the current position inspection is equal to or worse than the previous one (S24: NO), the opposite direction increase process S26 is performed. In the opposite direction increase process S26, an initial value of 0 is substituted for the offset amount 46. Furthermore, a fixed amount is added to the offset amount 46 so that the offset amount 46 increases in the opposite direction D4. The fixed amount used in the above-mentioned predetermined direction increase process S18 is used.

[0032] On the other hand, if the result of the current positional inspection is improved over the previous one (S24: YES), a same-direction increase process S28 is performed. In the same-direction increase process S28, for example, if the offset amount 46 immediately before this process is performed is increased by a fixed amount in the predetermined direction D3, a fixed amount is further added to the offset amount 46 so that the offset amount 46 increases in the predetermined direction D3.

[0033] On the other hand, if the offset amount 46 immediately before this process is performed is a value added to the offset amount 46 so that it increases in the opposite direction D4, a fixed amount is further added to the offset amount 46 so that the offset amount 46 increases in the opposite direction D4. Note that after the opposite direction increase process S26 is performed, if it is determined in the above determination process S24, which is repeated as described below, that the result of this position inspection is improved over the previous one (S24: YES), the offset amount 46 immediately before this process is performed is a value added to the offset amount 46 so that it increases in the opposite direction D4.

[0034] After the opposite direction increase process S26 or the same direction increase process S28 is performed, a judgment process S30 is performed. In the judgment process S30, it is judged whether the offset amount 46 exceeds the limit amount. If the offset amount 46 is less than the limit amount (S30: NO), the processes after the accuracy check process S20 are repeated. When the accuracy check process S20 is repeated after the opposite direction increase process S26 is performed, the tentative left target position 40L used in the positioning control of the accuracy check process S20 is a value indicating a position that is away from the left target position 40L by the offset amount 46 in the opposite direction D4.

[0035] On the other hand, if the offset amount 46 exceeds the limit amount (S30: YES), a rejection process S32 is performed. In the rejection process S32, information such as that the offset amount 46 exceeds the limit amount is stored in the storage unit 36. Thereafter, the offset amount calculation method 48 ends.

[0036] In this manner, the offset amount 46 and its direction calculated by the offset amount calculation method 48 are stored in the memory unit 36 ​​as inherent values ​​of the twin drive driving device 10 (S16). Furthermore, the offset amount 46 and its direction stored in the memory unit 36 ​​are used in the positioning control performed by the control unit 32 of the twin drive driving device 10.

[0037] Therefore, in the twin drive driving device 10, when the control unit 32 performs positioning control, for example, a control program of an offset amount reuse method 50 represented by a flowchart in Fig. 4 is executed by the controller 28. The offset amount reuse method 50 will be described below.

[0038] In the read process S50, the offset amount 46 and its direction are read from the storage unit . In the setting process S52, of the left target position 40L and the right target position 40R used in the positioning control, the left target position 40L is set by the target position setting unit 34 to a value indicating a position away from the left target position 40L by the offset amount 46 in the direction of the offset amount 46 (predetermined direction D3 or the opposite direction D4).

[0039] In the feedback control process S54, the positioning control is performed by the control unit 32. At that time, the left target position 40L set in the setting process S52 is used. This completes the offset amount reuse method 50.

[0040] In positioning control in which such an offset amount is set, when the slider 14 is stopped at a target position (for example, the first command position 42A or the second command position 42B) based on the position of the right end 22R, the left end 22L of the slider 14 stops at a position away from the target position by the offset amount 46 in the direction of the offset amount 46 (predetermined direction D3 or opposite direction D4). Therefore, the slider 14 is subjected to an external force that deforms it in the Y-axis direction D2. That is, as shown in FIG. 1 above, when the slider 14 stops, the left mover 20L of the left linear motor 12L and the right mover 20R of the right linear motor 12R each generate thrusts 44 in directions that face each other in the Y-axis direction D2. In this case, depending on the rigidity of the slider 14, the left linear motor 12L, and the right linear motor 12R, thrusts 44 in opposing directions in the Y-axis direction D2 are generated in the left movable element 20L of the left linear motor 12L and the right movable element 20R of the right linear motor 12R when the slider 14 is stopped, thereby suppressing the yawing vibration of the slider 14 more than when thrusts 44 in opposing directions are not generated.

[0041] As described above in detail, in the twin-drive driving device 10 of this embodiment, when the slider 14 is stopped at a target position by positioning control, the offset amount 46 is set in the left mover 20L of the left linear motor 12L and the right mover 20R of the right linear motor 12R according to the rigidity, etc. of the slider 14, the left linear motor 12L, and the right linear motor 12R, thereby improving the positioning accuracy of the slider 14.

[0042] Incidentally, in this embodiment, the left linear motor 12L is an example of a first axis driving unit. The right linear motor 12R is an example of a second axis driving unit. The left end 22L of the slider and the right end 22R of the slider are examples of both ends of the slider. The left linear encoder 16L is an example of a first position detection unit. The right linear encoder 16R is an example of a second position detection unit. The left detection position 38L is an example of a first detection position. The right detection position 38R is an example of a second detection position.

[0043] The left target position 40L is an example of a first target position. The right target position 40R is an example of a second target position. The first command position 42A or the second command position 42B is an example of a target position. The offset amount 46 is an example of a relative positional relationship of the second target position with respect to the first target position. The accuracy inspection process S20 is an example of an inspection unit. The specified direction increase process S18, the opposite direction increase process S26, and the same direction increase process S28 are examples of an update unit. The setting process S52 is an example of a determination process.

[0044] The present disclosure is not limited to the above-described embodiment, and various modifications are possible without departing from the spirit of the present disclosure.

[0045] For example, in the positioning control performed in the accuracy inspection process S20, a tentative right target position 40R may be used instead of the tentative left target position 40L. In such a case, in the setting process S52, the right target position 40R is set by the target position setting unit 34 to a value indicating a position away from the right target position 40R by the offset amount 46 in the direction of the offset amount 46 (predetermined direction D3 or opposite direction D4). Furthermore, in the feedback control process S54, in the positioning control performed by the control unit 32, the right target position 40R set in the above setting process S52 is used.

[0046] Furthermore, in the pass process S16, instead of the offset amount 46, a tentative left target position 40L or a tentative right target position 40R may be stored in the memory unit 36. In such a case, when the control unit 32 performs positioning control in the feedback control process S54 to stop the slider 14 at the same position as the inspection position used in the accuracy inspection process S12 and the accuracy inspection process S20, the tentative left target position 40L or the tentative right target position 40R stored in the memory unit 36 ​​is used as the left target position 40L or the right target position 40R.

[0047] Furthermore, in the positioning control performed in the accuracy inspection process S12, the accuracy inspection process S20, and the feedback control process S54, a value indicating a position away from the left detected position 38L or the right detected position 38R in the direction of the offset amount 46 (predetermined direction D3 or opposite direction D4) by the offset amount 46 may be used as the left detected position 38L or the right detected position 38R. In such a case, the left target position 40L and the right target position 40R are not changed.

[0048] Further, instead of the left linear encoder 16L and the right linear encoder 16R, the first axis driving unit and the second axis driving unit may be configured by a combination of a rotary servo motor, a ball screw, a timing belt, a guide rail, or the like. [Explanation of symbols]

[0049] 10: twin drive drive device, 12L: left linear motor, 12R: right linear motor, 14: slider, 16L: left linear encoder, 16R: right linear encoder, 22L: left end of slider, 22R: right end of slider, 32: control unit, 34: target position setting unit, 36: memory unit, 38L: left detected position, 38R: right detected position, 40L: left target position, 40R: right target position, 42A: first command position, 42B: second command position, 44: thrust, 46: offset amount, D1: X-axis direction, D2: Y-axis direction, D3: specified direction, D4: opposite direction, S18: specified direction increase processing, S20: accuracy inspection processing, S26: opposite direction increase processing, S28: same direction increase processing, S52: setting processing, S54: feedback control processing.

Claims

1. A slider extending along the X-axis direction; a first and second axis driving unit provided corresponding to both ends of the slider, the first and second axis driving units configured to move the slider along a Y-axis direction; a first position detector that detects the positions of both ends of the slider as a first detection position and a second detection position; a control unit that controls the positions of the first and second shaft drive units based on the first and second detected positions; a target position setting unit that sets a first target position of the first detection position and a second target position of the second detection position when the slider is stopped at a target position by the positioning control, The target position setting unit is an inspection unit that performs the positioning control based on the tentative first target position and the tentative second target position, thereby inspecting the position and time when the slider is stopped at an inspection position from a reference position, and inspects the positioning accuracy of the twin drive driving device; an update unit that sequentially changes at least one of the tentative first target position and the second target position in a predetermined direction in the Y-axis direction or in a direction opposite to the predetermined direction until a result of the positioning accuracy test satisfies a test criterion for the position test and the time test, and causes the test unit to repeatedly perform the positioning accuracy test; a determination unit that determines the tentative first target position and the second target position as the first target position and the second target position when a result of the positioning accuracy test satisfies the test standard.

2. A slider extending along an X-axis direction; a first and second axis driving unit provided corresponding to both ends of the slider, the first and second axis driving units configured to move the slider along a Y-axis direction; a first position detector that detects the positions of both ends of the slider as a first detection position and a second detection position; a control unit that controls the positions of the first and second shaft drive units based on the first and second detected positions; a target position setting unit that sets a first target position of the first detection position and a second target position of the second detection position when the slider is stopped at a target position by the positioning control such that thrusts in directions opposed to each other in the Y-axis direction are generated in the first and second axis drive units, respectively; The target position setting unit is an inspection unit that performs a positioning accuracy inspection of the twin drive driving device by performing the positioning control based on the tentative first target position and the second target position; an update unit that sequentially changes at least one of the tentative first target position and the second target position in a predetermined direction in the Y-axis direction or in a direction opposite to the predetermined direction until a result of the positioning accuracy test satisfies an inspection criterion, and causes the inspection unit to repeatedly perform the positioning accuracy test; a determination unit that determines the tentative first target position and the second target position as the first target position and the second target position when a result of the positioning accuracy test satisfies the test standard.

3. a storage unit configured to store the first target position and the second target position determined by the determination unit, or a relative positional relationship of the second target position with respect to the first target position, 3. The twin-drive driving device according to claim 1, wherein the control unit performs the positioning control by using the first target position and the second target position or the relative positional relationship read out from the storage unit.

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