Optical processing equipment

Abstract

This optical processing device comprises a combining element that combines a first optical path of a first light beam of a first wavelength and a second optical path of a second light beam of a second wavelength which is longer than the first wavelength, a condensing optical system that has a positive refractive force and condenses each of the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having a negative refractive force, wherein the correction optical system is arranged in the first optical path on the incident side of the combining element, one of the first and second light beams is for processing the workpiece and the other of the first and second light beams is for measuring the workpiece.

Description

[Technical field]

[0001] The present invention relates to an optical processing apparatus. [Background technology]

[0002] As an example of a processing device capable of processing an object, Patent Document 1 describes a processing device that irradiates a laser beam onto the surface of an object to form a structure. This type of processing device is required to process the object appropriately (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Pat. No. 4,994,639 Summary of the Invention

[0004] According to a first aspect, an optical processing apparatus includes a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength, a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having negative refractive power, wherein the correction optical system is disposed in the first optical path on the incident side of the combining element, and one of the first light beam and the second light beam is a light beam that processes the workpiece, and the other of the first light beam and the second light beam is a light beam that measures the workpiece. According to a second aspect, an optical processing apparatus includes a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength, a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having positive refractive power, wherein the correction optical system is disposed in the first optical path on the incident side of the combining element, a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength, one of the first light beam and the second light beam is a light beam that processes the workpiece, and the other of the first light beam and the second light beam is a light beam that measures the workpiece. According to a third aspect, an optical processing apparatus includes a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength, a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having positive refractive power, wherein the correction optical system is disposed in the second optical path on the incident side of the combining element, and one of the first light beam and the second light beam is a light beam that processes the workpiece, and the other of the first light beam and the second light beam is a light beam that measures the workpiece. According to a fourth aspect, an optical processing apparatus includes a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength, a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element toward a workpiece, and a correction optical system having negative refractive power, wherein the correction optical system is disposed in the second optical path on the incident side of the combining element, a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength, one of the first light beam and the second light beam is a light beam that processes the workpiece, and the other of the first light beam and the second light beam is a light beam that measures the workpiece. [Brief description of the drawings]

[0005] [Figure 1] 1 is a diagram illustrating a schematic configuration of an optical processing apparatus according to a first embodiment. [Diagram 2] 4A and 4B are diagrams for explaining a state in which a first light flux and a second light flux are focused at a focusing position. [Diagram 3] 2A to 2C are diagrams showing an optical design example of the optical device according to the first embodiment. [Figure 4] FIG. 13 is a diagram illustrating a schematic configuration of a light collecting optical system included in an optical device according to a second embodiment. [Diagram 5] 10A to 10C are diagrams showing an example of an optical design of an optical device according to a second embodiment. [Figure 6] FIG. 13 is a diagram illustrating a schematic configuration of a modified optical processing apparatus. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0006] (Optical processing device of the first embodiment) FIG. 1 is a diagram showing a schematic configuration of an optical processing device 1 according to a first embodiment. The X, Y, and Z directions shown by arrows in FIG. 1 and each of the figures described later are orthogonal to each other, and the X, Y, and Z directions indicate the same direction in each of the figures. The XZ direction shown by arrows in FIG. 1 is a direction intermediate between the above-mentioned X and Z directions, that is, it is orthogonal to the Y direction and indicates a direction 45° away from each of the X and Z directions. Hereinafter, the directions indicated by the arrows are called the +X direction, the +Y direction, the +Z direction, and the +XZ direction, respectively. The position in the X direction is called the X position, the position in the Y direction is called the Y position, and the position in the Z direction is called the Z position.

[0007] The optical processing apparatus 1 of the first embodiment includes an optical device 2, a guide 20, a sample stage 19, a control unit 22, a measurement unit 23, a calculation unit 24, and a position information correction unit 25, which are shown in a frame surrounded by a dashed line. The optical processing apparatus 1 focuses a first light flux R1 of a first wavelength, which is emitted from a light source 10 and enters the optical device 2 via a first optical path P1, onto an irradiated surface 17 by the optical device 2. A workpiece 18 is placed on the sample stage 19, and the sample stage 19 positions the workpiece 18 such that a processed surface 18s of the workpiece 18 coincides with the irradiated surface 17 of the optical device 2.

[0008] The sample stage 19 is provided with a driving member such as a linear motor, and moves on a guide 20 in at least one of the X and Y directions. The sample stage 19 may move the workpiece 18 along the Z direction (the optical axis direction of the focusing optical system 16). The optical device 2 may be movable along the Z direction. A focus adjustment optical system (not shown) may be provided to change the focusing positions of the first light beam R1 and a second light beam R2 (described later) on the workpiece 18 along the Z direction.

[0009] In this case, the focus adjustment optical system may be disposed in a front-stage third optical path P3a (in other words, an optical path in which the first optical path P1 and the second optical path P2 are superimposed) between the combining element 12 and the fixed mirror 13 (polarization scanning unit) described below. Note that the focus adjustment optical system may be disposed in at least one of the optical paths of the first optical path P1 (described below) between the light source 10 and the combining element 12 and the second optical path P2 (described below) between the measurement unit 23 and the combining element 12.

[0010] The X, Y, and Z positions of the sample stage 19 are measured, for example, by an optical encoder 21, and the position information of the sample stage 19 is sent as a measurement signal S1 to the control unit 22. Based on the measurement signal S1, the control unit 22 sends a control signal S2 to the sample stage 19, and sets the sample stage 19 to a desired position. The sample stage 19 can also be called a holder that holds a sample. The measurement unit 23, the calculation unit 24, and the position information correction unit 25 will be described in detail later.

[0011] The optical device 2 includes, from the light source 10 side to which the first light beam R1 of the first wavelength is supplied, a correction optical system 11, a combining element 12, a fixed mirror 13, an oscillating mirror 14, and a focusing optical system 16 shown in a frame surrounded by a dotted line. A first light beam R1, which is supplied from the light source 10 as, for example, a parallel light beam and travels in the +Z direction, is incident on a correction optical system 11 which is made up of one or more lenses or mirrors and has a predetermined refractive power. The first light beam R1 which has left the correction optical system 11 is incident on a combining element 12. Here, the refractive power of an optical system or optical element can be the reciprocal of the focal length of the optical system or optical element.

[0012] In this specification, the optical path of the first light beam R1 between the light source 10 and the combining element 12 is called the first optical path P1. Therefore, it can be said that the correction optical system 11 is arranged on the first optical path P1. Note that the first optical path P1 is not limited to between the light source 10 and the combining element 12. For example, it can be said that the first optical path P1 of the first light beam R1 is the optical path of the first light beam R1 traveling from the light source 10 to the workpiece 18 via the combining element 12, the fixed mirror 13, the oscillating mirror 14, and the focusing optical system 16 in the optical processing device 1 (optical device 2). In other words, it can be said that the correction optical system 11 is arranged on the first optical path P1 on the incident side of the combining element 12, where the first light beam R1 is incident.

[0013] In this specification, the optical path of the second light beam R2 between the measurement unit 23 and the combining element 12 is called the second optical path P2. Therefore, it can be said that the correction optical system 11 is not disposed on the second optical path P2. The measurement unit 23 has a measurement light source 23a that emits the second light beam R2, a light receiving unit 23c that receives the detection light (second light beam R2) returning from the workpiece 18 as described later, and a beam splitter 23b that separates and combines the light emitted from the measurement light source 23a and the light returning from the workpiece 18. Note that the beam splitter 23b may be a half mirror.

[0014] The second optical path P2 is not limited to between the measurement unit 23 and the combining element 12. For example, the second optical path P2 of the second light beam R2 can also be said to be an optical path of the second light beam R2 traveling from the measurement light source 23a (measurement unit 23) to the workpiece 18 via the combining element 12, the fixed mirror 13, the oscillating mirror 14, and the focusing optical system 16 in the optical processing apparatus 1 (optical device 2).

[0015] The second light beam R2 is also incident on the combining element 12 from the measurement light source 23a (measurement unit 23) through the second light path P2. Here, the second light beam R2 is a light beam of a second wavelength different from the first wavelength of the first light beam R1. More specifically, the second wavelength of the second light beam R2 is longer than the first wavelength of the first light beam R1. In the combining element 12, the first light path P1 is combined with the second light path P2 from the measurement light source 23a (measurement unit 23). Therefore, the first light beam R1 and the second light beam R2 are combined by the combining element 12. The combining element 12 is, for example, a dichroic prism, and the dichroic reflecting surface 12r transmits the first light beam R1 of the first wavelength and reflects the second light beam R2 of the second wavelength different from the first wavelength.

[0016] The combining element 12 is not limited to the above-mentioned dichroic prism, and may be made of a flat glass having a dichroic mirror. Alternatively, when the first light beam R1 and the second light beam R2 are linearly polarized lights whose polarization planes are substantially orthogonal to each other, a polarizing beam splitter may be used.

[0017] The first light beam R1 and the second light beam R2 merged by the combining element 12 are both emitted from the combining element 12 in the +Z direction and enter the fixed mirror 13. As an example, the fixed mirror 13 is a plane mirror arranged along a plane parallel to the XZ direction and the Y direction. The first light beam R1 and the second light beam R2 traveling in the +Z direction and entering the fixed mirror 13 are reflected by the fixed mirror 13 in the +X direction and enter the oscillating mirror 14, which is a plane mirror. The first light beam R1 and the second light beam R2 reflected by the oscillating mirror 14 approximately in the +Z direction enter the focusing optical system 16.

[0018] In this specification, the optical path between the combining element 12 and the focusing optical system 16 is called the third optical path P3. Therefore, it can be said that the fixed mirror 13 and the oscillating mirror 14 are arranged in the third optical path P3. In addition, in the third optical path P3, the portion between the combining element 12 and the fixed mirror 13 is called the front-stage third optical path P3a, the portion between the fixed mirror 13 and the oscillating mirror 14 is called the middle-stage third optical path P3b, and the portion between the oscillating mirror 14 and the focusing optical system 16 is called the rear-stage third optical path P3c. As described above, the first optical path P1 of the first light beam R1 can also be said to be the optical path of the first light beam R1 traveling from the light source 10 to the workpiece 18 via the combining element 12, the fixed mirror 13, the oscillating mirror 14, and the focusing optical system 16 in the optical processing apparatus 1.

[0019] The second optical path P2 of the second light beam R2 can also be said to be the optical path of the second light beam R2 traveling from the measurement light source 23a (measurement unit 23) to the workpiece 18 via the combining element 12, the fixed mirror 13, the oscillating mirror 14, and the focusing optical system 16 in the optical processing apparatus 1. Therefore, the third optical path P3 can also be said to be an optical path in which the first optical path P1 of the first light beam R1 and the second optical path P2 of the second light beam R2 are at least partially overlapped. In other words, the fixed mirror 13 and the oscillating mirror 14 (i.e., the deflection scanning unit) can also be said to be disposed on the first optical path P1 and the second optical path P2 between the combining element 12 and the focusing optical system 16.

[0020] The focusing optical system 16 is an optical system including a plurality of lenses (L11 to L15). The optical axis AX of the focusing optical system 16 is indicated by a chain line in FIG. 1. The optical axis AX of the focusing optical system 16 may be referred to as the optical axis of the exit side of the processing device 2. Among them, the lens L11 arranged on the most incident side is a lens having a negative refractive power, for example. Hereinafter, the lens L11 is also referred to as the first lens. The lenses (L12 to L15) arranged on the irradiated surface 17 side (downstream side) of the lens L11 constitute a second lens group G20 and have a positive refractive power as a whole. The first light flux R1 and the second light flux R2 are generally focused on the irradiated surface 17 by the refractive power of the focusing optical system 16. For ease of explanation, it has been stated that the first light beam R1 and the second light beam R2 are focused on the irradiated surface 17, but the focusing position of the first light beam R1 and the focusing position of the second light beam R2 do not have to be on the same plane (i.e., on the irradiated surface 17).

[0021] The oscillating mirror 14 is held by a driving member 15 so as to be oscillable within a predetermined angle range around a rotation axis parallel to the Y direction, for example. As an example, a so-called galvanometer mirror may be used as the oscillating mirror 14 and the driving member 15. When the oscillating mirror 14 oscillates within a predetermined angle range around the Y direction as the center of rotation, the traveling direction of the first light beam R1 and the second light beam R2 reflected by the oscillating mirror 14 changes (oscillates) between two directions separated from the +Z direction by an angle twice the above-mentioned predetermined angle in the ±X direction.

[0022] When the reflective surface of the oscillating mirror 14 is in the reference position, i.e., when the reflective surface is parallel to the Y direction and the XZ direction, the first light beam R1 and the second light beam R2 reflected by the oscillating mirror 14 pass through the central optical path P4a and are approximately focused at the central focusing point Fa on the irradiated surface 17. When the oscillating mirror 14 rotates counterclockwise from the reference position around a rotation axis parallel to the Y direction, the first light beam R1 and the second light beam R2 reflected by the oscillating mirror 14 pass through the right optical path P4b and are generally focused at the right-side focusing point Fb, which is located on the +X side of the central focusing point Fa on the irradiated surface 17.

[0023] On the other hand, when the oscillating mirror 14 rotates clockwise from the reference position around a rotation axis parallel to the Y direction, the first light beam R1 and the second light beam R2 reflected by the oscillating mirror 14 pass through the left optical path P4c and are generally focused at the left light focusing point Fc, which is located on the -X side of the central focusing point Fa on the irradiated surface 17. Therefore, the oscillating mirror 14 can also be said to be a deflection scanning unit that deflects the first light beam R1 and the second light beam R2 and causes them to scan within the plane of the illuminated surface 17.

[0024] The deflection scanning unit is not limited to a galvanometer mirror. For example, the deflection scanning unit may be an existing member capable of deflecting the first light beam R1 and the second light beam R2 from the combining element 12 and scanning the respective focusing points of the first light beam R1 and the second light beam R2 toward the workpiece 18 via the focusing optical system 16. For example, the deflection scanning unit may be a polygon mirror. The control unit 22 sends a control signal S3 to the driving member 15 to set the orientation of the oscillating mirror 14 to a predetermined orientation.

[0025] Hereinafter, the central optical path P4a, the right optical path P4b, and the left optical path P4c are collectively or individually referred to as the fourth optical path P4. Also, the central focusing point Fa, the right focusing point Fb, and the left focusing point Fc are collectively or individually referred to as the focusing point FP.

[0026] As an example, the focusing optical system 16 is a so-called fθ lens system. When the projection characteristic of the focusing optical system 16 is fθ, the distance from the central focusing point Fa to the right focusing point Fb or the left focusing point Fc on the illuminated surface 17 is proportional to the deviation angle from the +Z direction of the traveling direction of the first light beam R1 and the second light beam R2 emitted from the oscillating mirror 14. In other words, the X position of the focusing point FP on the illuminated surface 17 is proportional to the rotation angle θ of the oscillating mirror 14 from the above-mentioned reference position about the Y direction. The projection characteristic of the focusing optical system 16 is not limited to fθ. The projection characteristic of the focusing optical system 16 may be, for example, an equisolid angle projection characteristic or an orthogonal projection characteristic.

[0027] The first light beam R1 supplied from the light source 10 passes through the first optical path P1, the third optical path P3, and the fourth optical path P4 described above, and is irradiated onto the processing surface 18s of the workpiece 18 arranged on the irradiated surface 17. The second light beam R2 emitted from the measurement light source 23a (measurement unit 23) passes through the second optical path P2, the third optical path P3, and the fourth optical path P4 described above, and is irradiated onto the processing surface 18s of the workpiece 18 arranged on the irradiated surface 17. Note that, like the third optical path P4, the fourth optical path P4 can also be said to be an optical path in which at least a part of the first optical path P1 of the first light beam R1 and the second optical path P2 of the second light beam R2 are superimposed.

[0028] In the optical processing device 1 of the first embodiment, the first light beam R1 is a light beam for processing the surface 18s to be processed. That is, the first light beam R1 processes the surface 18s to be processed at the portion irradiated with the first light beam R1 by evaporating or melting the surface 18s to be processed itself (so-called removal processing), adding an object to the surface 18s to be processed (so-called addition processing), altering the surface 18s to be processed, or sensitizing, evaporating, or causing a chemical reaction of a film material formed on the surface 18s to be processed. Note that the first light beam R1 does not have to be a light beam for processing the surface 18s to be processed. The first light beam R1 may be, for example, a light beam for measuring the surface 18s to be processed.

[0029] In the optical processing device 1 of the first embodiment, the second light beam R2 of the second wavelength is, for example, a light beam for measuring the position of the surface 18s to be processed. The second light beam R2 is irradiated to a part of the surface 18s to be processed, and the second light beam R2 reflected or scattered by the surface 18s to be processed returns to the combining element 12 via the fourth optical path P4 and the third optical path P3. The second light beam R2 is reflected by the dichroic reflecting surface 12r of the combining element 12, passes through the second optical path P2, and is received by the measuring unit 23 (light receiving unit 23c). The second light beam R2 reflected or scattered by the surface 18s to be processed and received by the measuring unit 23 (light receiving unit 23c) can also be called detection light. The second light beam R2 does not have to be a light beam for measuring the surface 18s to be processed. The second light beam R2 may be, for example, a light beam for processing the surface 18s to be processed. When the first light beam R1 is a light beam for measuring the processed surface 18s, the second light beam R2 may be a light beam for processing the processed surface 18s. When the first light beam R1 is a light beam for processing the processed surface 18s, the second light beam R2 may also be a light beam for processing the processed surface 18s. When the first light beam R1 is a light beam for measuring the processed surface 18s, the second light beam R2 may also be a light beam for measuring the processed surface 18s. In this embodiment, the second wavelength is longer than the first wavelength, but the second wavelength may be shorter than the first wavelength.

[0030] Information relating to the intensity of the detection light detected by the measurement unit 23 (light receiving unit 23c) is sent to the calculation unit 24. The calculation unit 24 calculates position information relating to the portion of the workpiece surface 18s irradiated with the second light flux R2, based on the information relating to the intensity of the detection light detected by the measurement unit 23. The position information calculated by the calculation unit 24 is one or more of information relating to the X position, information relating to the Y position, and information relating to the Z position of the workpiece surface 18s.

[0031] The measuring unit 23 may include, for example, an interferometer. As such a position measuring unit, the three-dimensional shape measuring device disclosed in Japanese Patent No. 5231883 may be applied. The calculation unit 24 may also calculate position information regarding the processed surface 18s based on a signal S6 including position information regarding the sample stage 19 or information regarding the rotation angle of the oscillating mirror 14 transmitted from the control unit 22.

[0032] The position information of the workpiece 18s calculated by the calculation unit 24 may be the coordinates of the workpiece 18s, a point cloud of a plurality of points included in the workpiece 18s, or a three-dimensional model representing the workpiece 18s. The measuring unit 23 may detect at least one of the following, instead of or in addition to information regarding the position of the workpiece surface 18s: the shape of the workpiece surface 18s, the surface roughness of the workpiece surface 18s, the temperature of the workpiece surface 18s, the reflectance of the workpiece surface 18s, and the transmittance of the workpiece surface 18s.

[0033] Fig. 2 is a conceptual diagram showing a fourth optical path P4 in which light is collected by the collecting optical system 16 onto the illuminated surface 17. For simplification, Fig. 2 shows only one lens L15 of the collecting optical system 16, which is closest to the illuminated surface 17. Although slight, chromatic aberration remains in the focusing optical system 16. For this reason, the focusing point FP of the light that passes through the fourth optical path P4 and is irradiated onto the illuminated surface 17 is separated into a first focusing point FP1 of a first light flux R1 having a first wavelength and a second focusing point FP2 of a second light flux R2 having a second wavelength different from the first wavelength.

[0034] In the following, the difference in Z position between the first condensing point FP1 and the second condensing point FP2 is referred to as axial chromatic aberration D1, and the difference in position in the XY plane direction is referred to as magnification chromatic aberration D2. 2, as an example, the surface on which the first light focusing point FP1 is formed is shown as the illuminated surface 17. The surface on which the first light focusing point FP1 is formed may be referred to as the image plane of the focusing optical system 16.

[0035] The optical processing apparatus 1 determines at least one of the irradiation position, the number of irradiations, and the irradiation conditions of the first light beam R1 on the surface to be processed 18s, based on the position information of the surface to be processed 18s detected and calculated by the measuring unit 23 and the calculating unit 24 using the second light beam R2. The number of irradiations of the first light beam R1 is the number of irradiations of the first light beam R1 per unit time, the number of irradiations of the first light beam R1 on a predetermined position of the surface to be processed 18s, etc., and the irradiation conditions of the first light beam R1 may include, for example, the intensity of the first light beam R1, the wavelength of the first light beam R1, etc.

[0036] However, the position information of the processing surface 18s detected and calculated by the measurement unit 23 and the calculation unit 24 is position information measured using the second light beam R2 of the second wavelength. Therefore, this position information has errors of the above-mentioned axial chromatic aberration D1 and lateral chromatic aberration D2 with respect to the position of the processing surface 18s based on the first light beam R1 of the first wavelength used for optical processing.

[0037] In the optical processing apparatus 1 of the first embodiment, the correction optical system 11 arranged in the first optical path P1 of the optical device 2 moves the focusing position (position of the first focusing point FP1) of the first light flux R1 in the vicinity of the irradiated surface 17 closer to the focusing position (position of the second focusing point FP2) of the second light flux R2. Therefore, the magnitude of the above-mentioned axial chromatic aberration D1 is reduced compared to the case where the correction optical system 11 is not provided.

[0038] Here, when the focal length of the focusing optical system 16 is positive (the refractive power is positive) and the on-axis chromatic aberration of the focusing optical system 16 is undercorrected (i.e., when the back focus of the focusing optical system 16 at the first wavelength is shorter than the back focus of the focusing optical system 16 at the second wavelength), the focal length of the correction optical system 11 arranged in the first optical path P1 of the optical device 2 is made negative (the refractive power is negative), so that the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16 and the correction optical system 11 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength can be made smaller than the absolute value of the difference between the back focus of the focusing optical system 16 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength.

[0039] On the other hand, when the focal length of the focusing optical system 16 is positive (the refractive power is positive) and the axial chromatic aberration of the focusing optical system 16 is over-corrected (i.e., when the back focus of the focusing optical system 16 at the first wavelength is longer than the back focus of the focusing optical system 16 at the second wavelength), the focal length of the correction optical system 11 arranged in the first optical path P1 of the optical device 2 is made positive (the refractive power is positive), so that the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16 and the correction optical system 11 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength can be made smaller than the absolute value of the difference between the back focus of the focusing optical system 16 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength (the optical device when the refractive power of the focusing optical system 16 is positive and the axial chromatic aberration of the focusing optical system 16 is over-corrected will be described in detail in the second embodiment). The back focus of an optical system can be the distance along the optical axis of the optical system from the optical surface of the optical member closest to the exit side of the optical system to the back focal position of the optical system. Therefore, the error caused by the axial chromatic aberration D1 contained in the position information of the processed surface 18s detected and calculated by the measurement unit 23 and the calculation unit 24 is reduced, and the position information of the processed surface 18s can be calculated more accurately.

[0040] Generally, due to chromatic aberration remaining in the focusing optical system 16, the angle φ1 of the chief ray R1p of the first light beam R1 relative to the normal N1 of the irradiated surface 17 and the angle φ2 of the chief ray R2p of the second light beam R2 relative to the normal N2 of the irradiated surface 17 may be different angles.

[0041] In the optical processing apparatus 1 of the first embodiment, the optical design of the optical device 2 is optimized so that the absolute values ​​of the angles φ1 and φ2 are both set to 1° or less. That is, even if the position of the fourth optical path P4 changes to the central optical path P4a, the right optical path P4b, the left optical path P4c, etc. shown in FIG. 1 due to the oscillation of the oscillating mirror 14, the chief ray R1p and the chief ray R2p are incident on the irradiated surface 17 at an incident angle of 1° or less. In other words, the angles of the chief ray R1p of the first light beam R1 and the chief ray R2p of the second light beam R2 with respect to the normal (Z direction) at the respective focusing positions are within 1°. In other words, the object side (the processed surface 18s side) of the optical device 2 (optical processing apparatus 1) has a telecentric characteristic.

[0042] As a result, even if the surface 18s to be processed is slightly misaligned in the Z direction from the irradiated surface 17 due to its unevenness or the like, the first light beam R1 can be irradiated to the desired X and Y positions of the surface 18s to be processed, and the surface 18s to be processed can be accurately processed. Similarly, the desired X and Y positions of the surface 18s to be processed can be accurately measured.

[0043] In addition, when the surface to be processed 18s has few irregularities, or when the surface to be processed 18s can always be accurately aligned with the irradiated surface 17, the angle of incidence of the chief ray R1p and the chief ray R2p to the irradiated surface 17 may be 1° or more. In this specification, the "chief ray" may be a line sequentially connecting the centers of gravity of the light quantities in the cross sections of the first light beam R1 or the second light beam R2 at different Z positions.

[0044] In the optical processing apparatus 1 and the optical device 2 of the first embodiment, the axial chromatic aberration D1 or the lateral chromatic aberration D2 occurring between the first light beam R1 and the second light beam R2 is reduced. However, the adverse effect of the axial chromatic aberration D1 or the lateral chromatic aberration D2 may be further reduced by numerical correction using the position information correction unit 25 described below.

[0045] The position information correcting unit 25 is a unit that numerically corrects the axial chromatic aberration D1 or the magnification chromatic aberration D2. The position information correcting unit 25 receives a signal S8 from the control unit 22, the signal S8 including information on the rotation angle of the oscillating mirror 14 or information on the X position of the focusing point FP of the light beam traveling on the fourth optical path P4 determined by the rotation angle of the oscillating mirror 14.

[0046] The position information correcting unit 25 stores aberration information of the focusing optical system 16, which is numerical data indicating the relationship between the rotation angle of the oscillating mirror 14 or the X position of the focusing point FP of the light beam traveling on the fourth optical path P4, and at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2. The position information correcting unit 25 may also store information on so-called telecentricity of the focusing optical system 16. Hereinafter, the aberration information and the information on telecentricity may be collectively referred to as information on the characteristics of the focusing optical system 16. The position information correcting unit 25 calculates at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2 at the focusing point FP from the information on the characteristics of the focusing optical system 16, based on the information on the rotation angle of the oscillating mirror 14 or the information on the X position of the focusing point FP sent from the control unit 22.

[0047] The position information correction unit 25 corrects the position information of the workpiece surface 18s calculated by the calculation unit 24 and transmitted as a signal S9 based on at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2 calculated as described above. Then, the position information correction unit 25 returns the corrected position information of the workpiece surface 18s to the calculation unit 24 as a signal S10.

[0048] Instead of correcting the position information of the workpiece surface 18s itself, the position information correction unit 25 may return the amount by which the position information should be corrected as a signal S10 to the calculation unit 24. In this case, the calculation unit 24 may correct the position information of the workpiece surface 18s using the amount by which the position information should be corrected transmitted from the position information correction unit 25.

[0049] In addition, if the chromatic aberration of the optical device 2 including the light-collecting optical system 16 is suppressed to a sufficiently small value by the correction optical system 11, the position information correcting section 25 does not need to be provided. In addition, when the axial chromatic aberration D1 occurring between the first light beam R1 and the second light beam R2 is sufficiently suppressed to a small value by the correction optical system 11 and the magnification chromatic aberration D2 is large, the position information of the workpiece surface 18s may be corrected using the position information correction unit 25.

[0050] (Example of optical design for optical devices) Fig. 3 is a diagram showing an optical design example of the optical device 2. The optical device 2 of the design example shown in Fig. 3, as an example, substantially focuses a first light beam R1 and a second light beam R2, which are parallel light beams with a diameter of 10 [mm] and are supplied from the light source 10 and the measurement unit 23, respectively, on the irradiated surface 17.

[0051] The numerical table shown in FIG. 3 indicates the radius of curvature R [mm] and surface spacing D [mm] of each surface of the optical components such as lenses and mirrors that constitute the optical device 2, as defined by the surface number shown on the left side, and the refractive index of the optical components.

[0052] 3, the surface numbers are obtained by adding "a" to the end of the reference numeral of each of the optical components (correction optical system 11, combining element 12, and lenses L11-L15) described above, which is the surface number of the surface on the side on which light from light source 10 or measurement unit 23 is incident. For example, surface number 11a is the surface number of the surface of correction optical system 11 on the side on which light from light source 10 is incident.

[0053] The surface number of the surface from which the light from the light source 10 or the measurement unit 23 exits is determined by adding b to the end of the reference number of the optical component. For example, surface number L11b is the surface number of the surface of the lens L11 included in the focusing optical system 16 on the lens L12 side. Surface numbers 13 and 14 indicate the reflecting surfaces of the fixed mirror 13 and the oscillating mirror 14, respectively.

[0054] The surface interval D represents the interval between the surface specified by the surface number and the next surface on the side of the irradiated surface 17. The surface interval D shown in the row of surface number L15b is the interval between the surface with surface number L15b and the irradiated surface 17. Moreover, the surface distance D between surface numbers 13 and 14 is expressed as a negative value because the fixed mirror 13 is a mirror.

[0055] The refractive index represents the refractive index of an optical member disposed between the surface designated by the surface number and the next surface on the illuminated surface 17 side of that surface. The refractive index in the column labeled WL532[nm] is the refractive index for light of 532[nm], which is an example of the wavelength (first wavelength) of the first light flux R1. The refractive index in the column labeled WL1550 [nm] is the refractive index for light of 1550 [nm], which is an example of the wavelength (second wavelength) of the second light beam R2.

[0056] The refractive index of the fixed mirror 13 and the oscillating mirror 14 is set to -1. In addition, since the second light beam R2 of the second wavelength does not pass through the first optical path P1 in which the correction optical system 11 is arranged, the refractive index at the second wavelength is not shown for the correction optical system 11, i.e., surface numbers 11a and 11b.

[0057] In the optical device 2 shown in Fig. 1, in order to show the size of each optical member in a size sufficient for explanation, the lengths of the front-stage third optical path P3a and the middle-stage third optical path P3b of the third optical path P3 are shown shorter than those of the design example shown in Fig. 3. The same applies to the distance between the correction optical system 11 and the combining element 12.

[0058] 3, the optical device 2 has transparent members (correction optical system 11, combining element 12, and lenses L11 to L15) all made of the same material, quartz glass. Therefore, this optical system is not ideal for correcting chromatic aberration, particularly axial chromatic aberration D1. However, in the optical design example shown in Figure 3, the correction optical system 11 arranged in the first optical path P1 can bring the first focusing point FP1 (focusing position) of the first light beam R1 near the irradiated surface 17 closer to the second focusing point FP2 (focusing position) of the second light beam R2.

[0059] The optical design example shown in FIG. 3 will now be described in further detail. The correction optical system 11 has a negative refractive power, and a focal length fc at a first wavelength of 532 [nm] is −1133.2 [mm]. The focusing optical system 16 has a lens L11 (first lens) that is disposed on the entrance side and has a negative refractive power, and a second lens group G20 that includes a plurality of lenses L12 to L15 and has a positive refractive power as a whole. The focusing optical system 16 has a positive refractive power as a whole, and a focal length fg at a first wavelength of 532 [nm] is 100.0 [mm].

[0060] Therefore, the relationship between the focal length fc of correction optical system 11 and the focal length fg of focusing optical system 16 satisfies the following formula (1). |fc| > 10×fg (1) In other words, the absolute value of the focal length fc of the correction optical system 11 is set to be 10 times or more the focal length fg of the focusing optical system 16; in other words, the absolute value of the refractive power of the correction optical system 11 (|1 / fc|) is set to be 1 / 10 or less of the refractive power of the focusing optical system 16.

[0061] This allows the optical device 2 as a whole to perform appropriate correction of chromatic aberration without having the correction optical system 11 perform excessive correction of chromatic aberration, making it possible to further reduce the axial chromatic aberration D1 or the chromatic aberration of magnification D2. In addition, when it is acceptable for longitudinal chromatic aberration D1 or lateral chromatic aberration D2 to remain to a certain extent, correction optical system 11 and focusing optical system 16 do not necessarily need to satisfy formula (1).

[0062] In the optical design example shown in Fig. 3, the back focus of the composite optical system of the focusing optical system 16 and the correction optical system 11 at the first wavelength is 144.7 mm, and the back focus of the focusing optical system 16 at the second wavelength is 144.7 mm. The back focus of the focusing optical system 16 at the first wavelength is 137.0 mm, and the back focus of the focusing optical system 16 at the second wavelength is 144.7 mm. Therefore, the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16 and the correction optical system 11 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength is 0 mm, which is set smaller than the absolute value (7.7 mm) of the difference between the back focus of the focusing optical system 16 at the first wavelength and the back focus of the focusing optical system 16 at the second wavelength.

[0063] This makes it possible to bring the focusing position of the first light flux R1 in the vicinity of the illuminated surface 17 (the position of the first focusing point FP1) closer to the focusing position of the second light flux R2 (the position of the second focusing point FP2). As described above or will be described later, the correction optical system 11 is not limited to an optical system having a negative refractive power, but may be an optical system having a positive refractive power.

[0064] In the first embodiment, instead of arranging correction optical system 11 having a negative focal length (negative refractive power) on first optical path P1 on the incident side of first light beam R1 of combining element 12, correction optical system 11 having a positive focal length (positive refractive power) may be arranged on second optical path P2 (for example, second optical path P2 between measurement unit 23 and combining element 12) on the incident side of second light beam R2 of combining element 12 (in other words, the emission side of detection light from workpiece 18). Correction optical system 11 having a positive focal length (positive refractive power) may be arranged on second optical path P2 between measurement light source 23a and combining element 12.

[0065] Here, when the focal length of the focusing optical system 16 is positive (positive refractive power) and the axial chromatic aberration of the focusing optical system 16 is undercorrected (i.e., when the back focus of the focusing optical system 16 at the second wavelength is longer than the back focus of the focusing optical system 16 at the first wavelength), the focal length of the correction optical system 11 arranged on the second optical path P2 on the incident side of the second light beam R2 of the combining element 12 is made positive (positive refractive power), so that the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16 and the correction optical system 11 (a correction optical system having a positive focal length) at the second wavelength and the back focus of the focusing optical system 16 at the first wavelength can be made smaller than the absolute value of the difference between the back focus of the focusing optical system 16 at the second wavelength and the back focus of the focusing optical system 16 at the first wavelength. It should be noted that when correction optical system 11 is arranged on second optical path P2 rather than on first optical path P1, it can be said that the correction optical system is not arranged on first optical path P1.

[0066] The condensing optical system 16 may be provided so as to be replaceable with a second condensing optical system different from the condensing optical system 16 shown in the figure (hereinafter also referred to as the "first condensing optical system"). The correction optical system 11 may be provided so as to be replaceable with a second correction optical system different from the correction optical system 11 shown in the figure (hereinafter also referred to as the "first correction optical system"). In this case, the first condensing optical system and the second condensing optical system may be configured so as to be replaceable by a member exchange mechanism (not shown) such as a turret or an auto tool changer such that one of the optical systems is disposed in the optical path. Similarly, the first correction optical system and the second correction optical system may be configured so as to be replaceable by a member exchange mechanism (not shown) such as a turret or an auto tool changer such that one of the optical systems is disposed in the optical path.

[0067] In this case, when the above-mentioned second light collecting optical system is used as the light collecting optical system 16, the above-mentioned second correction optical system may be used as the correction optical system 11. The first and second light collecting optical systems may have different back focal lengths, and the first and second correction optical systems may have different focal lengths.

[0068] Furthermore, when the back focus of the first light collecting optical system is shorter than the back focus of the second light collecting optical system, the focal length of the second correction optical system may be longer than the focal length of the first correction optical system. When the back focus of the first light collecting optical system is longer than the back focus of the second light collecting optical system, the focal length of the second correction optical system may be shorter than the focal length of the first correction optical system.

[0069] (Effects of the optical processing device according to the first embodiment) (1) The optical processing apparatus 1 of the first embodiment described above includes a combining element 12 that combines a first optical path P1 of a first light beam R1 having a first wavelength and a second optical path P2 of a second light beam R2 having a second wavelength longer than the first wavelength, a focusing optical system 16 that has a positive refractive power and focuses the first light beam R1 and the second light beam R2 from the combining element 12 toward a workpiece 18, and a correction optical system 11 that has a negative refractive power. The correction optical system 11 is disposed on the first optical path P1 on the incident side of the combining element 12, and one of the first light beam R1 and the second light beam R2 is a light beam that processes the workpiece 18, and the other of the first light beam R1 and the second light beam R2 is a light beam that measures the workpiece 18. With this configuration, the position of the surface 18s to be processed of the workpiece 18 can be detected by the second light beam R2 having the second wavelength, and the surface 18s to be processed can be processed by the first light beam R1 having the first wavelength. Therefore, the position of the surface 18s to be processed can be detected with high accuracy, and the surface 18s to be processed can be processed with high accuracy based on the highly accurate detection result.

[0070] (Optical processing device according to the second embodiment) 4 is a diagram showing a schematic configuration of a focusing optical system 16a of an optical device 2a included in an optical processing apparatus according to a second embodiment. Note that the optical device 2a is similar to the optical device 2 included in the optical processing apparatus 1 of the first embodiment described above, except that the focusing optical system 16 is replaced with the focusing optical system 16a and the design data of the correction optical system 11 is changed, so the same components are denoted by the same reference numerals and the description will be omitted as appropriate. In the optical processing apparatus of the second embodiment, the optical device 2 of the optical processing apparatus 1 of the first embodiment is replaced with an optical device 2a.

[0071] As in the optical device 2 included in the optical processing device 1 of the first embodiment shown in FIG. 1, in the optical device 2a, a correction optical system 11S is arranged on the first optical path P1 through which the first light beam R1 passes. The first light beam R1 and the second light beam R2 from the measurement unit 23 are merged by the combining element 12, reflected by the fixed mirror 13 and the oscillating mirror 14, and enter the focusing optical system 16a. The first light beam R1 and the second light beam R2 are then substantially focused on the irradiated surface 17 by the focusing optical system 16. Note that, in the optical processing device 1 (optical device 2a) of the second embodiment, as in the first embodiment, the first wavelength of the first light beam R1 and the second wavelength of the second light beam R2 are different, and the second wavelength is longer than the first wavelength. FIG. 4 shows only the correction optical system 11S, the oscillating mirror 14, and the light collecting optical system 16a of the optical device 2a, and does not show the other components.

[0072] The focusing optical system 16a is an optical system including a plurality of lenses (L21 to L28). Among these, the lens L21 arranged on the most incident side is a lens having a negative refractive power, for example. Hereinafter, the lens L21 is also referred to as a first lens. The lenses (L22 to L28) arranged closer to the irradiated surface 17 (downstream side) than the lens L21 constitute a second lens group G21, and have a positive refractive power as a whole. The first light flux R1 and the second light flux R2 are generally focused on the irradiated surface 17 by the refractive power of the focusing optical system 16a.

[0073] (An example of an optical design of an optical device included in the optical processing device according to the second embodiment) Fig. 5 is a diagram showing an example of an optical design of an optical device 2a included in an optical processing apparatus according to a second embodiment. The items described in the numerical table shown in Fig. 5 are the same as those in the numerical table shown in Fig. 3. The surface numbers on the left side of the numerical table shown in Fig. 5 are obtained by adding "a" to the end of the symbol of each lens if the surface is a surface on the side where light from the light source 10 or the measuring unit 23 enters, or "b" if the surface is a surface on the side where light exits, as with the surface numbers in Fig. 3.

[0074] As can be seen from the refractive index shown in Fig. 5, the optical device 2a has its constituent transparent members (correction optical system 11, combining element 12, and lenses L11-L15) each made of one of two materials, quartz glass and fluorite. In the optical device 2a, compared to the optical device 2 described above, the chromatic aberration of magnification D2 is more effectively corrected by the focusing optical system 16a, and the axial chromatic aberration D1 is overcorrected.

[0075] In addition, the correction optical system 11S arranged on the first optical path P1 can bring the over-correction of the axial chromatic aberration D1 of the focusing optical system 16a closer to an appropriate correction state, thereby making it possible to bring the first focusing point FP1 (focusing position) of the first light beam R1 near the irradiated surface 17 even closer to the second focusing point FP2 (focusing position) of the second light beam R2. That is, in the optical processing apparatus 1 (optical device 2a) of the second embodiment, the correction optical system 11S arranged in the first optical path P1 of the optical device 2a moves the focusing position (position of the first focusing point FP1) of the first light flux R1 in the vicinity of the irradiated surface 17 closer to the focusing position (position of the second focusing point FP2) of the second light flux R2. Therefore, the magnitude of the above-mentioned axial chromatic aberration D1 is reduced compared to the case where the correction optical system 11S is not provided.

[0076] Here, when the focal length of the focusing optical system 16a is positive (the refractive power is positive) and the axial chromatic aberration D1 of the focusing optical system 16a is over-corrected (i.e., when the back focus of the focusing optical system 16a at the first wavelength is longer than the back focus of the focusing optical system 16a at the second wavelength), the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16a and the correction optical system 11S at the first wavelength and the back focus of the focusing optical system 16a at the second wavelength can be made smaller than the absolute value of the difference between the back focus of the focusing optical system 16a at the first wavelength and the back focus of the focusing optical system 16a at the second wavelength by making the focal length of the correction optical system 11S arranged in the first optical path P1 of the optical device 2a positive (the refractive power is positive).

[0077] In the optical processing apparatus 1 and the optical device 2a of the second embodiment, the chromatic aberration of magnification D2 occurring between the first light beam R1 and the second light beam R2 is corrected by the focusing optical system 16a. In this case, there is an advantage that the chromatic aberration of magnification D2 can be easily corrected by overcorrecting the axial chromatic aberration D1 of the focusing optical system 16a.

[0078] Also, in the optical processing apparatus 1 of the second embodiment equipped with the optical device 2a, the chief ray R1p and the chief ray R2p (see FIG. 2) are designed to be incident on the irradiated surface 17 at an incident angle of 1° or less. The incident angle of the chief ray R1p and the chief ray R2p on the irradiated surface 17 may be 1° or more. In other words, the angle of the chief ray R1p and the chief ray R2p with respect to the normal (Z direction) at each focusing position is within 1°. In other words, the object side (the processed surface 18s side) of the optical device 2a has a telecentric characteristic.

[0079] An optical design example of the optical device 2a shown in Fig. 5 will be described in further detail below. In the optical device 2a, the correction optical system 11S has a positive refractive power, and the focal length fc at a first wavelength of 532 [nm] is 6361.5 [mm]. The light-collecting optical system 16a has a lens L21 (first lens) that is disposed on the entrance side and has a negative refractive power, and a second lens group G21 that includes a plurality of lenses L22 to L28 and has a positive refractive power as a whole.

[0080] The light-collecting optical system 16a has a positive refractive power as a whole, and a focal length fg at the first wavelength of 532 [nm] is 100.0 [mm]. Therefore, also in optical device 2a, focal length fc of correction optical system 11 and focal length fg of focusing optical system 16a satisfy the relationship of formula (1) described above.

[0081] The second lens group G21 includes at least one positive lens such as lens L28 having positive refractive power and made of fluorite as a first lens material, and at least one negative lens such as lens L27 having negative refractive power and made of quartz glass as a second lens material. Hereinafter, the Abbe number ν of the lens material is defined as ν=(n2-1) / (n2-n1) using the refractive index n1 of the lens material at a first wavelength (533 [nm]) and the refractive index n2 of the lens material at a second wavelength (1550 [nm]).

[0082] In the optical device 2a, the Abbe number v1 of the first lens material (fluorite) and the Abbe number v2 of the second lens material (quartz glass) satisfy the relationship of formula (2). ν1 > ν2 (2) This makes it possible to satisfactorily correct the chromatic aberration of the light-converging optical system 16, and further reduce the axial chromatic aberration D1 or the lateral chromatic aberration D2. When it is acceptable for the axial chromatic aberration D1 or lateral chromatic aberration D2 to remain to a certain extent, the Abbe number v1 and the Abbe number v2 do not necessarily have to satisfy the formula (2).

[0083] In the optical design example shown in Fig. 5, the back focus of the composite optical system of the focusing optical system 16a and the correction optical system 11S at the first wavelength is 99.9 mm, and the back focus of the focusing optical system 16 at the second wavelength is 100.0 mm. The back focus of the focusing optical system 16 at the first wavelength is 101.5 mm, and the back focus of the focusing optical system 16 at the second wavelength is 100.0 mm. Therefore, the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16a and the correction optical system 11S at the first wavelength and the back focus of the focusing optical system 1a at the second wavelength is 0.1 mm, which is set smaller than the absolute value (1.5 mm) of the difference between the back focus of the focusing optical system 16a at the first wavelength and the back focus of the focusing optical system 16a at the second wavelength. This makes it possible to bring the focusing position of the first light flux R1 in the vicinity of the illuminated surface 17 (the position of the first focusing point FP1) closer to the focusing position of the second light flux R2 (the position of the second focusing point FP2).

[0084] In the second embodiment, instead of arranging correction optical system 11S having a positive focal length (positive refractive power) on first optical path P1 on the incident side of first light beam R1 of combiner element 12 of optical processing apparatus 1 (optical device 2a), correction optical system 11S having a negative focal length (negative refractive power) may be arranged on second optical path P2 on the incident side of second light beam R2 of combiner element 12 (for example, second optical path P2 between measurement unit 23 and combiner element 12). In addition, correction optical system 11S having a negative focal length (negative refractive power) may be arranged on second optical path P2 between measurement light source 23a and combiner element 12.

[0085] Here, when the focal length of the focusing optical system 16a is positive (positive refractive power) and the axial chromatic aberration of the focusing optical system 16a is over-corrected (i.e., when the back focus of the focusing optical system 16a at the second wavelength is shorter than the back focus of the focusing optical system 16a at the first wavelength), the focal length of the correction optical system 11S arranged on the second optical path P2 on the incident side of the second light beam R2 of the combining element 12 can be made negative (negative refractive power), so that the absolute value of the difference between the back focus of the composite optical system of the focusing optical system 16a and the correction optical system 11S (a correction optical system having a negative focal length) at the second wavelength and the back focus of the focusing optical system 16a at the first wavelength can be made smaller than the absolute value of the difference between the back focus of the focusing optical system 16a at the second wavelength and the back focus of the focusing optical system 16a at the first wavelength.

[0086] In addition, the chromatic aberration of magnification D2 occurring between the first light beam R1 and the second light beam R2 is corrected by the focusing optical system 16a. At this time, there is an advantage that by overcorrecting the axial chromatic aberration D1 of the focusing optical system 16a, it becomes easier to correct the chromatic aberration of magnification D2.

[0087] The condensing optical system 16a may be provided so as to be replaceable with a second condensing optical system different from the condensing optical system 16a shown in the figure (hereinafter also referred to as the "first condensing optical system"). The correction optical system 11S may be provided so as to be replaceable with a second correction optical system different from the correction optical system 11S shown in the figure (hereinafter also referred to as the "first correction optical system"). In this case, the first condensing optical system and the second condensing optical system may be configured so as to be replaceable by a member exchange mechanism (not shown) such as a turret or an auto tool changer such that one of the optical systems is disposed in the optical path. Similarly, the first correction optical system and the second correction optical system may be configured so as to be replaceable by a member exchange mechanism (not shown) such as a turret or an auto tool changer such that one of the optical systems is disposed in the optical path.

[0088] In this case, when the above-mentioned second light collecting optical system is used as the light collecting optical system 16a, the above-mentioned second correction optical system may be used as the correction optical system 11S. The first and second light collecting optical systems may have different back focal lengths, and the first and second correction optical systems may have different focal lengths.

[0089] As in the second embodiment, when the focal length of the focusing optical system 16a is positive (positive refractive power) and the on-axis chromatic aberration D1 of the focusing optical system 16a is over-corrected, and the focal length of the correction optical system 11S arranged in the first optical path P1 of the optical device 2a is positive (positive refractive power), if the back focus of the first focusing optical system at the first wavelength is shorter than the back focus of the second focusing optical system at the first wavelength, the focal length of the second correction optical system at the first wavelength may be longer than the focal length of the first correction optical system at the first wavelength.

[0090] On the other hand, when the back focus of the first focusing optical system at the first wavelength is longer than the back focus of the second focusing optical system at the first wavelength, the focal length of the second correction optical system at the first wavelength may be shorter than the focal length of the first correction optical system at the first wavelength.

[0091] In addition, when the absolute value of the back focus of the first focusing optical system at the first wavelength is smaller than the absolute value of the back focus of the second focusing optical system at the first wavelength, the absolute value of the focal length of the second correction optical system at the first wavelength may be larger than the absolute value of the focal length of the first correction optical system at the first wavelength. On the other hand, when the absolute value of the back focus of the first focusing optical system at the first wavelength is larger than the absolute value of the back focus of the second focusing optical system at the first wavelength, the absolute value of the focal length of the second correction optical system at the first wavelength may be smaller than the absolute value of the focal length of the first correction optical system at the first wavelength.

[0092] In addition, as in the second embodiment, when the focal length of the focusing optical system 16a is positive (positive refractive power) and the axial chromatic aberration D1 of the focusing optical system 16a is over-corrected, and instead of the correction optical system 11S having a positive focal length (negative refractive power) in the second embodiment, a correction optical system 11S having a negative focal length (negative refractive power) is arranged in the second optical path P2 (for example, the second optical path P2 between the measurement unit 23 and the combining element 12) on the incident side of the second light beam R2 of the combining element 12, if the back focus of the first focusing optical system at the second wavelength is shorter than the back focus of the second focusing optical system at the second wavelength, the focal length of the second correction optical system at the second wavelength may be longer than the focal length of the first correction optical system at the second wavelength. On the other hand, when the back focus of the first focusing optical system at the second wavelength is longer than the back focus of the second focusing optical system at the second wavelength, the focal length of the second correction optical system at the second wavelength may be shorter than the focal length of the first correction optical system at the second wavelength.

[0093] In addition, when the absolute value of the back focus of the first focusing optical system at the second wavelength is smaller than the absolute value of the back focus of the second focusing optical system at the second wavelength, the absolute value of the focal length of the second correction optical system at the second wavelength may be larger than the absolute value of the focal length of the first correction optical system at the second wavelength. On the other hand, when the absolute value of the back focus of the first focusing optical system at the second wavelength is larger than the absolute value of the back focus of the second focusing optical system at the second wavelength, the absolute value of the focal length of the second correction optical system at the second wavelength may be smaller than the absolute value of the focal length of the first correction optical system at the second wavelength.

[0094] In each of the embodiments described above, the variations described below, and the embodiments described below, the number of lenses constituting the focusing optical system 16, 16a is not limited to the numbers described above, and may have any other number of lenses, or may include a mirror or a diffractive optical element. Furthermore, the light-collecting optical systems 16 and 16a do not include a cemented lens, but may include a cemented lens. The correction optical system 11, 11S may also have a plurality of lenses instead of a single lens, or may include a mirror or a diffractive optical element.

[0095] The first wavelength used in the optical processing and the second wavelength used in the measurement are not limited to the above-mentioned wavelengths, and may be other wavelengths. Furthermore, the first lens material and the second lens material are not limited to the above-mentioned fluorite and quartz glass, respectively, and may be other light-transmitting materials.

[0096] The oscillating mirror 14 may not only oscillate about a rotation axis parallel to the Y direction as described above, but may also oscillate about a rotation axis parallel to the XZ directions. In this case, the position of the light-focusing point FP on the irradiated surface 17 can be moved not only in the X direction as described above, but also in the Y direction. The oscillating mirror 14 may oscillate about a rotation axis parallel to the XZ directions instead of the Y direction. In this case, the position of the light-focusing point FP on the irradiated surface 17 can be moved in the Y direction. If it is sufficient to adjust the relative positions of the workpiece 18 and the focal point FP in the X and Y directions by moving the sample stage 19 relative to the guide 20, the oscillating mirror 14 need not be provided.

[0097] In addition, when the oscillating mirror 14 is provided as described above, the X position (or further the Y position) of the light focusing point FP on the irradiated surface 17 can be moved at high speed. This allows the light focusing point FP to be moved at high speed on the processing surface 18s of the workpiece 18, and the processing capacity of the optical processing device 1 can be further improved.

[0098] Note that a swingable oscillating mirror may be disposed in place of the fixed mirror 13. In this case, the oscillating mirror replacing the fixed mirror 13 may swing about a rotation axis parallel to the XZ directions, and the oscillating mirror 14 may swing about a rotation axis parallel to the Y direction as described above. In this case, the first light beam R1 and the second light beam R2 are scanned in the X direction and the Y direction within the plane of the illuminated surface 17.

[0099] In addition, a plurality of oscillating mirrors may be disposed in the third optical path P3 (i.e., an optical path in which the first optical path P1 and the second optical path P2 are at least partially overlapped) in addition to the oscillating mirror 14. In this case, the fixed mirror 13 may be removed from the third optical path P3.

[0100] As described above, the optical processing apparatus 1 and the optical processing apparatus of the second embodiment do not necessarily have to include the position information correcting unit 25. Furthermore, the optical processing apparatus 1 does not need to include the calculation unit 24. When the calculation unit 24 is not included, the measurement unit 23 transmits information related to the detected light intensity signal of the second light beam R2 to an external calculation unit (not shown), and the external calculation unit calculates the position information of the processed surface 18. Note that the optical processing apparatus 1a of the modified example described later does not need to include the position information correction unit 25 either.

[0101] The optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later) may not have the light source 10, and may receive the first light beam L1 from a light source provided outside the optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later) via a light guiding member such as an optical fiber. The optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later) may not have the measurement light source 23a, and may receive the second light beam L2 from a light source provided outside the optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later) via a light guiding member such as an optical fiber. In addition, the optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later) may not have at least one of the control unit 22, the calculation unit 24, and the position information correction unit 25, and may be provided, for example, outside the optical processing device 1, the optical processing device of the second embodiment, the optical processing device 1a (described later), and the optical processing device of the third embodiment (described later). In addition, at least one of the light source 10 and the measurement unit 23 may be included in the optical device 2 and the optical device 2a. In addition, at least one of the control unit 22 and the calculation unit 24 may be included in the optical device 2 and the optical device 2a.

[0102] In each of the embodiments described above, the modified examples described later, and the embodiments described later, the measurement unit 23 may not be a measurement device using the interference method as described above. For example, the measurement unit 23 may be a measurement device using an optical coherence tomography (OCT) method. An example of an OCT method measurement device is described in Japanese Patent Application Publication No. 2020-101499. For example, the measurement unit 23 may be a measurement device equipped with a white confocal displacement meter. An example of a white confocal displacement meter is described in Japanese Patent Application Publication No. 2020-085633. For example, the measurement unit 23 may be a measurement device using a phase modulation method. An example of a measurement device using a phase modulation method is described in Japanese Patent Application Publication No. 2010-025922. For example, the measurement unit 23 may be a measurement device using an intensity modulation method. An example of an intensity modulation type measurement device is described in JP 2016-510415 A and US Patent Application Publication No. 2014 / 226145 A.

[0103] In addition, in each of the embodiments described above, the modified examples described later, and the embodiments described later, before processing the workpiece 18 with the first light beam R1, the optical processing apparatus 1, the optical processing apparatus of the second embodiment, the optical processing apparatus 1a (described later), and the optical processing apparatus of the third embodiment (described later) may determine at least one of the irradiation position, number of irradiations, and irradiation conditions of the first light beam R1 on the workpiece 18s based on position information of the workpiece 18s detected and calculated by the measurement unit 23 and the calculation unit 24 using the second light beam R2.

[0104] In addition, in each of the above-described embodiments, the modified examples described later, and the embodiments described later, the optical processing apparatus 1, the optical processing apparatus of the second embodiment, the optical processing apparatus 1a (described later), and the optical processing apparatus of the third embodiment (described later) may measure the part processed by the first light beam R1 with the second light beam R2 after processing the workpiece surface 18s with the first light beam R1, and judge the quality and quality of the part processed by the first light beam R1. For example, the optical processing apparatus 1, the optical processing apparatus of the second embodiment, the optical processing apparatus 1a (described later), and the optical processing apparatus of the third embodiment (described later) may calculate position information of the part processed by the first light beam R1 after processing the workpiece surface 18s with the first light beam R1, and compare the calculated position information with predetermined reference position information (e.g., CAD data of the workpiece 18, etc.) to determine whether to reprocess the part processed by the first light beam R1 or to end processing.

[0105] When reprocessing the portion processed with the first light beam R1, the light processing device 1, the light processing device of the second embodiment, the light processing device 1a (described later), and the light processing device of the third embodiment (described later) may determine at least one of the irradiation position, the number of irradiations, and the irradiation conditions of the first light beam R1 on the processing surface 18s based on the position information of the portion processed with the first light beam R1, and reprocess the portion processed with the first light beam R1. Furthermore, the light processing devices 1 and 1a may calculate the position information of the portion processed with the first light beam R1 after processing the processing surface 18s with the first light beam R1, and compare the calculated position information with predetermined reference position information (e.g., CAD data of the workpiece 18, etc.) to determine whether the portion processed with the first light beam R1 has been processed into a desired shape.

[0106] In each embodiment described above, the optical processing apparatus 1, the optical processing apparatus of the second embodiment, and the optical processing apparatus of the third embodiment (described later) may process the workpiece 18 with the first light beam R1 while measuring the workpiece 18 with the second light beam R2 (detecting the detection light from the workpiece surface 18s, and calculating position information, etc.). In this case, processing and measurement of the workpiece 18 can be performed simultaneously.

[0107] In addition, in the optical processing apparatus 1, the optical processing apparatus of the second embodiment, and the optical processing apparatus of the third embodiment (described later), when processing the workpiece 18 with the first light beam R1 and measuring the workpiece 18 with the second light beam R2 are performed simultaneously, detection light from the workpiece surface 18s may be performed while processing the workpiece 18 with the first light beam R1, and calculation of position information, etc. based on the detection light may be performed after processing the workpiece 18 with the first light beam R1.

[0108] (Effects of the optical processing device according to the second embodiment) (2) The optical processing apparatus of the second embodiment described above includes a combining element 12 that combines a first optical path P1 of a first light beam R1 having a first wavelength and a second optical path P2 of a second light beam R2 having a second wavelength longer than the first wavelength, a focusing optical system 16a having a positive refractive power that focuses the first light beam R1 and the second light beam R2 from the combining element 12 toward the workpiece 18, and a correction optical system 11S having a positive refractive power. The correction optical system 11S is disposed on the second optical path P2 on the incident side of the combining element 12, and one of the first light beam R1 and the second light beam R2 is a light beam that processes the workpiece 18, and the other of the first light beam R1 and the second light beam R2 is a light beam that measures the workpiece 18. This configuration provides the same effects as the optical processing device 1 of the first embodiment described above.

[0109] (Modification of Optical Processing Apparatus) Hereinafter, the optical processing device 1a of the modified example will be described with reference to Fig. 6. The configuration of the optical processing device 1a is generally common to the optical processing device 1 of the first and second embodiments described above, so the same configurations are given the same reference numerals and the description will be omitted as appropriate.

[0110] The optical processing apparatus 1a of the modified example differs from the optical processing apparatus 1 of the first and second embodiments described above in that a variable mirror 26 is disposed on the second optical path P2 between the measurement unit 23 and the combining element 12. By setting the azimuth angle of the reflecting surface of the variable mirror 26 to a predetermined angle, the position of the second focusing point FP2 of the second light beam R2 relative to the first focusing point FP1 of the first light beam R1 on the processing surface 18s of the workpiece 18 can be shifted by a predetermined distance in the XY plane direction. Note that the variable mirror 26 may be configured so that the azimuth angle of the reflecting surface can be set to a predetermined angle around an axis parallel to the Y direction.

[0111] In a portion where machining is being performed by irradiating the first light beam R1, there is a risk that measurement cannot be performed with high accuracy by the second light beam R2 due to fumes and the like generated from the surface 18s to be machined. In the modified optical processing apparatus 1a, information regarding the position or state of the processing surface 18s can be detected at a position other than the position processed by the first light beam R1, thereby preventing a decrease in measurement accuracy due to fumes, etc.

[0112] The optical processing apparatus 1a of the modified example may process the workpiece 18 with the first light beam R1 while measuring the workpiece 18 with the second light beam R2. In this case, the processing and measurement of the workpiece 18 can be performed simultaneously while preventing a decrease in measurement accuracy due to fumes, etc. In addition, when the optical processing apparatus 1a of the modified example processes the workpiece 18 with the first light beam R1 and measures the workpiece 18 with the second light beam R2 (detection of detection light from the workpiece surface 18s and calculation of position information, etc.) simultaneously, the optical processing apparatus 1a may process the workpiece 18 with the first light beam R1 and detect light from the workpiece surface 18s, and calculate position information, etc. based on the detection light after the workpiece 18 is processed with the first light beam R1.

[0113] Instead of the deflection of the second light flux R2 by the variable mirror 26 described above, for example, a relay lens system may be disposed in the second optical path P2, and a parallel plate glass may be disposed near the intermediate focal point formed by the relay lens system. In this case, by tilting the normal directions of the entrance surface and exit surface of the parallel plate glass from the traveling direction of the second light flux R2, the position of the second focal point FP2 on the workpiece surface 18s relative to the first focal point FP1 can be shifted by a predetermined distance in the XY plane direction.

[0114] In the optical processing device 1a, the position where the variable mirror 26 is arranged is not limited to the second optical path P2 between the measurement unit 23 and the combining element 12. For example, the variable mirror 26 may be arranged in the first optical path P1 between the light source 10 and the combining element 12. In addition to the variable mirror 26 arranged in the second optical path P2 between the measurement unit 23 and the combining element 12, another variable mirror may be arranged in the first optical path P1 between the light source 10 and the combining element 12.

[0115] (Optical processing device according to the third embodiment) The optical processing device according to the third embodiment will be described below. However, the configuration of the optical processing device of the third embodiment is generally similar to the configuration of the optical processing device of the first and second embodiments shown in Figures 1 to 5. Therefore, hereinafter, differences between the optical processing device of the third embodiment and the optical processing devices of the first and second embodiments will be described with reference to Figures 1 and 2, and descriptions of common configurations will be omitted as appropriate.

[0116] The optical processing apparatus of the third embodiment does not include a correction optical system 11. Therefore, the amount of the axial chromatic aberration D1 or the lateral chromatic aberration D2 in the vicinity of the irradiated surface 17 is larger than that of the optical processing apparatus of the first and second embodiments described above. In the optical processing device of the third embodiment, the position of the processed surface 18s is also calculated by the measurement unit 23 and the calculation unit 24 using the second light beam R2 having the second wavelength.

[0117] The optical processing apparatus of the third embodiment includes the above-mentioned position information correcting unit 25. The position information correcting unit 25 stores aberration information of the focusing optical system 16, which is numerical data indicating the relationship between the rotation angle of the oscillating mirror 14 or the X position of the focusing point FP and at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2. The position information correcting unit 25 may also store information regarding the so-called telecentricity of the focusing optical system 16.

[0118] The position information correction unit 25 calculates at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2 at the condensing point FP from the information on the characteristics of the condensing optical system 16, based on the information on the rotation angle of the oscillating mirror 14 or the information on the X position of the condensing point FP sent from the control unit 22. The position information correction unit 25 corrects the position information of the surface 18s to be processed, which is calculated by the calculation unit 24 and transmitted as a signal S9, based on at least one of the axial chromatic aberration D1 and the lateral chromatic aberration D2 calculated as above. Then, the position information correction unit 25 returns the corrected position information of the surface 18s to the calculation unit 24 as a signal S10.

[0119] By being equipped with the position information correction unit 25, the optical processing apparatus of the third embodiment can accurately detect the position of the workpiece surface 18s even when an optical device 2 having a relatively large axial chromatic aberration D1 or magnification chromatic aberration D2 is used, and can process the workpiece surface 18s with high precision. As in the optical processing apparatuses of the first and second embodiments described above, both the position information correcting unit 25 and the correction optical system 11 may be provided to correct chromatic aberration with higher accuracy.

[0120] (Effects of the optical processing device of the third embodiment) (3) The optical processing apparatus of the third embodiment includes a combining element 12 that combines a first light beam R1 of a first wavelength supplied along a first optical path P1 and a second light beam R2 of a second wavelength different from the first wavelength that is supplied along a second optical path P2, a focusing optical system 16 that focuses the first light beam R1 and the second light beam R2 combined by the combining element 12 onto an irradiated surface 17, a holding unit 19 that holds the workpiece 18 so that its workpiece surface 18s matches the irradiated surface 17, and a measurement unit 23 that detects detection light of the second light beam R2 that is reflected or scattered by the workpiece surface 18s and returned to the second optical path P2 via the focusing optical system 16 and the combining element 12. It also includes a calculation unit 24 that calculates position information of the portion of the workpiece surface 18s irradiated with the second light beam R2 based on information regarding the intensity of the detection light detected by the measurement unit 23, and a position information correction unit 25 that corrects the position information calculated by the calculation unit 24 based on aberration information of the focusing optical system 16. With this configuration, even if an optical device 2 with a relatively large axial chromatic aberration D1 or lateral chromatic aberration D2 is used, the position of the surface 18s to be processed can be accurately detected, and the surface 18s to be processed can be processed with high precision.

[0121] The present invention is not limited to the above. Other aspects conceivable within the scope of the technical idea of ​​the present invention are also included in the scope of the present invention. This embodiment may combine all or part of the above aspects.

[0122] (Additional Note) It will be understood by those skilled in the art that the above-described embodiments or variations thereof are specific examples of the following aspects.

[0123] (Section 1) An optical device comprising: a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element; and a correction optical system having negative refractive power, wherein the correction optical system is disposed in the first optical path on the incident side of the combining element.

[0124] (Section 2) an optical device comprising: a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having positive refractive power that focuses each of the first light beam and the second light beam from the combining element toward a workpiece; and a correction optical system having positive refractive power, wherein the correction optical system is disposed in the first optical path on an incident side of the combining element, and a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength.

[0125] (Section 3) 3. The optical device according to claim 1 or 2, wherein an absolute value of a difference between a back focus of a composite optical system of the focusing optical system and the correction optical system at the first wavelength and a back focus of the focusing optical system at the second wavelength is smaller than an absolute value of a difference between a back focus of the focusing optical system at the first wavelength and a back focus of the focusing optical system at the second wavelength.

[0126] (Section 4) An optical device comprising: a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having positive refractive power that focuses the first light beam and the second light beam from the combining element; and a correction optical system having positive refractive power, wherein the correction optical system is disposed in the second optical path on the incident side of the combining element.

[0127] (Section 5) an optical device comprising: a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having positive refractive power that focuses each of the first light beam and the second light beam from the combining element toward a workpiece; and a correction optical system having negative refractive power, wherein the correction optical system is disposed in the second optical path on an incident side of the combining element, and a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength.

[0128] (Section 6) 6. The optical device according to claim 4 or 5, wherein an absolute value of a difference between a back focus of a composite optical system of the focusing optical system and the correction optical system at the second wavelength and a back focus of the focusing optical system at the first wavelength is smaller than an absolute value of a difference between a back focus of the focusing optical system at the second wavelength and a back focus of the focusing optical system at the first wavelength.

[0129] (Section 7) In the optical device described in any one of paragraphs 1 to 6, when the focusing optical system is a first focusing optical system and the correction optical system is a first correction optical system, the first focusing optical system is provided so as to be replaceable with a second focusing optical system different from the first focusing optical system, and the first correction optical system is provided so as to be replaceable with a second correction optical system different from the first correction optical system.

[0130] (Section 8) 8. The optical device according to claim 7, wherein when the second focusing optical system is used as the focusing optical system, the second correction optical system is used as the correction optical system.

[0131] (Section 9) 9. The optical device according to claim 7 or 8, wherein the first focusing optical system and the second focusing optical system have different back focal lengths, and the first correction optical system and the second correction optical system have different focal lengths.

[0132] (Section 10) The optical device according to any one of paragraphs 7 to 9, which cites any one of paragraphs 1 to 3, wherein when the back focus of the first focusing optical system is shorter than the back focus of the second focusing optical system, the focal length of the second correction optical system is longer than the focal length of the first correction optical system, and when the back focus of the first focusing optical system is longer than the back focus of the second focusing optical system, the focal length of the second correction optical system is shorter than the focal length of the first correction optical system.

[0133] (Section 11) The optical device according to any one of paragraphs 7 to 9, which cite paragraph 2, wherein, when a back focus of the first focusing optical system at the first wavelength is shorter than a back focus of the second focusing optical system at the first wavelength, a focal length of the second corrective optical system at the first wavelength is longer than a focal length of the first corrective optical system at the first wavelength, and, when a back focus of the first focusing optical system at the first wavelength is longer than a back focus of the second focusing optical system at the first wavelength, a focal length of the second corrective optical system at the first wavelength is shorter than a focal length of the first corrective optical system at the first wavelength.

[0134] (Section 12) The optical device according to any one of paragraphs 7 to 9, which cite paragraph 5, wherein, when a back focus of the first focusing optical system at the second wavelength is shorter than a back focus of the second focusing optical system at the second wavelength, a focal length of the second corrective optical system at the second wavelength is longer than a focal length of the first corrective optical system at the second wavelength, and, when a back focus of the first focusing optical system at the second wavelength is longer than a back focus of the second focusing optical system at the second wavelength, a focal length of the second corrective optical system at the second wavelength is shorter than a focal length of the first corrective optical system at the second wavelength.

[0135] (Section 13) An optical device according to any one of paragraphs 1 to 3, or any one of paragraphs 7 to 11 which cites any one of paragraphs 1 to 3, wherein the correction optical system is not disposed in the second optical path.

[0136] (Section 14) An optical device according to any one of paragraphs 4 to 6, or any one of paragraphs 7 to 10 and 12 which cite any one of paragraphs 4 to 6, wherein the correction optical system is not disposed in the first optical path.

[0137] (Section 15) 15. The optical device according to any one of claims 1 to 14, wherein the focusing optical system has, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power overall, and a focal length fc of the correction optical system at the first wavelength and a focal length fg of the focusing optical system at the first wavelength satisfy the relationship |fc| > 10×fg.

[0138] (Section 16) 16. The optical device according to any one of paragraphs 1 to 15, wherein the focusing optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole, the second lens group including one or more positive lenses having positive refractive power and made of a first lens material, and one or more negative lenses having negative refractive power and made of a second lens material, wherein when the Abbe number ν of the lens material is ν=(n2-1) / (n2-n1), where n1 is a refractive index of the lens material at the first wavelength and n2 is a refractive index of the lens material at the second wavelength, the Abbe number ν1 of the first lens material and the Abbe number ν2 of the second lens material satisfy the relationship ν1>ν2.

[0139] (Section 17) 17. The optical device according to any one of claims 1 to 16, further comprising a deflection scanning unit disposed in a first optical path and a second optical path between the combining element and the focusing optical system, and deflecting the first light beam and the second light beam to move the focusing positions of the first light beam and the second light beam emitted from the focusing optical system along an axis intersecting the optical axis of the focusing optical system.

[0140] (Section 18) 18. The optical device according to any one of claims 1 to 17, wherein the angles of the chief rays of the first light beam and the second light beam with respect to the normal at their respective focusing positions are within 1°.

[0141] (Section 19) An optical processing apparatus comprising: the optical device according to any one of claims 1 to 18; and a support section for supporting a workpiece, wherein one of the first light beam and the second light beam is a light beam for processing the workpiece, and the other of the first light beam and the second light beam is a light beam for measuring the workpiece.

[0142] (Section 20) 20. The optical processing apparatus according to claim 19, further comprising a measurement unit for detecting, via the combining element and the focusing optical system, the one light beam being irradiated onto the workpiece, and the other light beam being irradiated onto the workpiece via the combining element and the focusing optical system, and detecting, via the focusing optical system and the combining element, a detection light generated by the other light beam being irradiated onto the workpiece.

[0143] (Section 21) 21. The optical processing apparatus according to claim 20, further comprising a calculation unit that generates information regarding a measurement result of the workpiece based on the detection light detected by the measurement unit. (Section 22) 22. The optical processing apparatus according to claim 21, wherein the other light beam is irradiated based on information related to the measurement result.

[0144] (Section 23) 23. The optical processing apparatus according to claim 22, wherein at least one of the irradiation position, the number of irradiations, and the irradiation conditions of the other light beam on the workpiece is determined based on information related to the measurement result.

[0145] (Section 24) 24. The optical processing apparatus according to claim 23, wherein the irradiation condition is at least one of the intensity and wavelength of the other light beam irradiated to the workpiece. (Section 25) 22. The optical processing apparatus according to claim 21, wherein the information on the measurement result includes information on a position of a portion of the workpiece irradiated with the one of the light beams.

[0146] (Section 26) 26. The optical processing apparatus according to claim 25, wherein the other light beam is irradiated based on the information relating to the position. (Section 27) 27. The optical processing apparatus according to claim 26, wherein at least one of an irradiation position, a number of irradiations, and an irradiation condition of the other light beam on the workpiece is determined based on the information relating to the position.

[0147] (Section 28) 28. The optical processing apparatus according to item 27, wherein the irradiation condition is at least one of the intensity and wavelength of the other light beam irradiated to the workpiece. (Section 29) 29. The optical processing apparatus according to any one of items 19 to 28, wherein the one light beam is a second light beam, and the other light beam is a first light beam.

[0148] (Section 30) an optical device comprising: a focusing optical system that focuses the first light beam and the second light beam from the combining element; and a correction optical system that is arranged in an optical path of the first light beam on the incident side of the combining element, wherein a distance between a focusing position of the first light beam and a focusing position of the second light beam when the correction optical system is arranged in the optical path is shorter than a distance between the focusing position of the first light beam and the focusing position of the second light beam when the correction optical system is not arranged in the optical path.

[0149] (Section 31) In the optical device described in paragraph 30, the distance along the optical axis of the focusing optical system between the focusing position of the first light beam and the focusing position of the second light beam when the correction optical system is arranged on the optical path is shorter than the distance along the optical axis between the focusing position of the first light beam and the focusing position of the second light beam when the correction optical system is not arranged on the optical path.

[0150] (Section 32) an optical processing apparatus comprising: a combining element that combines a first light beam having a first wavelength supplied along a first optical path and a second light beam having a second wavelength different from the first wavelength that is supplied along a second optical path; a focusing optical system that focuses the first light beam and the second light beam combined by the combining element onto an irradiated surface, respectively; a holding unit that holds a workpiece so that its workpiece surface matches the irradiated surface; a measuring unit that detects detection light of the second light beam that is reflected or scattered by the workpiece surface and returned to the second optical path via the focusing optical system and the combining element; a calculating unit that calculates position information of a portion of the workpiece surface that is irradiated with the second light beam, based on information about an intensity of the detection light detected by the measuring unit; and a position information correcting unit that corrects the position information calculated by the calculating unit, based on information about a characteristic of the focusing optical system.

[0151] (Section 33) 33. The optical processing apparatus according to claim 32, further comprising a correction optical system arranged in the first optical path and adapted to move the focusing position of the first light beam in the vicinity of the irradiated surface closer to the focusing position of the second light beam in the optical axis direction of the focusing optical system. (Section 34) 34. The optical processing apparatus according to claim 32 or 33, wherein an irradiation position of the first light beam with respect to the surface to be processed is determined based on the position information of the surface to be processed.

[0152] The embodiments according to the thirty-second to thirty-fourth aspects described above may further include any of the configurations according to the first to ninth aspects described above. [Explanation of symbols]

[0153] 1: optical processing device, 2, 2a: optical device, P1: first optical path, P2: second optical path, P3: third optical path, P4: fourth optical path, R1: first light beam, R2: second light beam, 10: light source, 11: correction optical system, 12: combining element, 13: fixed mirror, 14: oscillating mirror, 16: focusing optical system, L11, L21: first lens, G20, G21: second lens group, 17: irradiated surface, 18: workpiece, 18s: workpiece surface, 19: sample stage, 20: guide, 22: control unit, 23: measurement unit, 24: calculation unit, 25: position information correction unit

Claims

1. a combining element for combining a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; a correction optical system having a negative refractive power; the correction optical system is disposed in the first optical path on an incident side of the combining element, one of the first light beam and the second light beam is a light beam for processing the workpiece, the other of the first light beam and the second light beam is a light beam for measuring the workpiece, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The focal length fc of the correction optical system at the first wavelength and the focal length fg of the focusing optical system at the first wavelength are expressed as follows: An optical processing device that satisfies the relationship |fc|>10×fg.

2. A combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; a correction optical system having a negative refractive power; the correction optical system is disposed in the first optical path on an incident side of the combining element, one of the first light beam and the second light beam is a light beam for processing the workpiece, the other of the first light beam and the second light beam is a light beam for measuring the workpiece, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The second lens group is one or more positive lenses having positive refractive power and made of a first lens material; one or more negative lenses having negative refractive power and made of a second lens material; Including, When the Abbe number ν of the lens material is expressed as ν=(n2-1) / (n2-n1), where n1 is the refractive index of the lens material for the first wavelength and n2 is the refractive index of the lens material for the second wavelength, The Abbe number ν1 of the first lens material and the Abbe number ν2 of the second lens material are An optical processing device that satisfies the relationship v1>v2.

3. a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; A correction optical system having a positive refractive power, the correction optical system is disposed in the first optical path on an incident side of the combining element, a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength; one of the first light beam and the second light beam is a light beam for processing the workpiece, The other of the first light beam and the second light beam is a light beam for measuring the workpiece.

4. In the optical processing apparatus according to any one of claims 1 to 3, an absolute value of a difference between a back focus of a composite optical system of the focusing optical system and the correction optical system at the first wavelength and a back focus of the focusing optical system at the second wavelength is smaller than an absolute value of a difference between a back focus of the focusing optical system at the first wavelength and a back focus of the focusing optical system at the second wavelength.

5. a combining element for combining a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; A correction optical system having a positive refractive power, the correction optical system is disposed in the second optical path on the incident side of the combining element, one of the first light beam and the second light beam is a light beam for processing the workpiece, the other of the first light beam and the second light beam is a light beam for measuring the workpiece, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The focal length fc of the correction optical system at the first wavelength and the focal length fg of the focusing optical system at the first wavelength are expressed as follows: An optical processing device that satisfies the relationship |fc|>10×fg.

6. A combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; A correction optical system having a positive refractive power, the correction optical system is disposed in the second optical path on the incident side of the combining element, one of the first light beam and the second light beam is a light beam for processing the workpiece, the other of the first light beam and the second light beam is a light beam for measuring the workpiece, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The second lens group is one or more positive lenses having positive refractive power and made of a first lens material; one or more negative lenses having negative refractive power and made of a second lens material; Including, When the Abbe number ν of the lens material is expressed as ν=(n2-1) / (n2-n1), where n1 is the refractive index of the lens material for the first wavelength and n2 is the refractive index of the lens material for the second wavelength, The Abbe number ν1 of the first lens material and the Abbe number ν2 of the second lens material are An optical processing device that satisfies the relationship v1>v2.

7. a combining element that combines a first optical path of a first light beam having a first wavelength and a second optical path of a second light beam having a second wavelength that is longer than the first wavelength; a focusing optical system having a positive refractive power and focusing the first light flux and the second light flux from the combining element toward a workpiece; a correction optical system having a negative refractive power; the correction optical system is disposed in the second optical path on the incident side of the combining element, a back focus of the focusing optical system at the first wavelength is longer than a back focus of the focusing optical system at the second wavelength; one of the first light beam and the second light beam is a light beam for processing the workpiece, The other of the first light beam and the second light beam is a light beam for measuring the workpiece.

8. In the optical processing apparatus according to any one of claims 5 to 7, an absolute value of a difference between a back focus of a composite optical system of the focusing optical system and the correction optical system at the second wavelength and a back focus of the focusing optical system at the first wavelength is smaller than an absolute value of a difference between a back focus of the focusing optical system at the second wavelength and a back focus of the focusing optical system at the first wavelength.

9. In the optical processing apparatus according to any one of claims 2 to 4 and claims 6 to 8, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The focal length fc of the correction optical system at the first wavelength and the focal length fg of the focusing optical system at the first wavelength are expressed as follows: The relationship |fc|>10×fg is satisfied. Optical processing equipment.

10. In the optical processing apparatus according to any one of claims 1, 3 to 5, and 7 to 9, the light-collecting optical system includes, in order from the combining element side, a first lens having negative refractive power and a second lens group having positive refractive power as a whole; The second lens group is one or more positive lenses having positive refractive power and made of a first lens material; one or more negative lenses having negative refractive power and made of a second lens material; Including, When the Abbe number ν of the lens material is expressed as ν=(n2-1) / (n2-n1), where n1 is the refractive index of the lens material for the first wavelength and n2 is the refractive index of the lens material for the second wavelength, The Abbe number ν1 of the first lens material and the Abbe number ν2 of the second lens material are The relationship of v1>v2 is satisfied. Optical processing equipment.

11. In the optical processing apparatus according to any one of claims 1 to 10, When the focusing optical system is a first focusing optical system and the correction optical system is a first correction optical system, the first light collecting optical system is provided so as to be replaceable with a second light collecting optical system different from the first light collecting optical system; The optical processing apparatus, wherein the first correction optical system is provided so as to be replaceable with a second correction optical system different from the first correction optical system.

12. The optical processing apparatus according to claim 11, An optical processing apparatus, wherein when the second focusing optical system is used as the focusing optical system, the second correction optical system is used as the correction optical system.

13. The optical processing apparatus according to claim 11 or 12, the first light collecting optical system and the second light collecting optical system have different back focuses, The optical processing apparatus, wherein the first correction optical system and the second correction optical system have different focal lengths.

14. In the optical processing apparatus according to any one of claims 11 to 13, which refers to any one of claims 1, 2, 5, or 6, When a back focus of the first light collecting optical system is shorter than a back focus of the second light collecting optical system, a focal length of the second correction optical system is longer than a focal length of the first correction optical system, An optical processing apparatus, wherein when a back focus of the first focusing optical system is longer than a back focus of the second focusing optical system, a focal length of the second correction optical system is shorter than a focal length of the first correction optical system.

15. In the optical processing apparatus according to any one of claims 11 to 13, which refers to claim 3, when a back focus of the first focusing optical system at the first wavelength is shorter than a back focus of the second focusing optical system at the first wavelength, a focal length of the second correction optical system at the first wavelength is longer than a focal length of the first correction optical system at the first wavelength, An optical processing apparatus, wherein when a back focus of the first focusing optical system at the first wavelength is longer than a back focus of the second focusing optical system at the first wavelength, a focal length of the second correction optical system at the first wavelength is shorter than a focal length of the first correction optical system at the first wavelength.

16. In the optical processing apparatus according to any one of claims 11 to 13, when a back focus of the first focusing optical system at the second wavelength is shorter than a back focus of the second focusing optical system at the second wavelength, a focal length of the second correction optical system at the second wavelength is longer than a focal length of the first correction optical system at the second wavelength, An optical processing apparatus, wherein when a back focus of the first focusing optical system at the second wavelength is longer than a back focus of the second focusing optical system at the second wavelength, a focal length of the second correction optical system at the second wavelength is shorter than a focal length of the first correction optical system at the second wavelength.

17. In the optical processing apparatus according to any one of claims 1 to 4 or claims 11 to 15 which refer to any one of claims 1 to 4, The optical processing apparatus, wherein the correction optical system is not disposed in the second optical path.

18. In the optical processing apparatus according to any one of claims 5 to 8, claims 11 to 14 that refer to any one of claims 5 to 8, or claims 16, The optical processing apparatus, wherein the correction optical system is not disposed in the first optical path.

19. In the optical processing apparatus according to any one of claims 1 to 18, an optical processing apparatus comprising: a deflection scanning unit disposed on the first optical path and the second optical path between the combining element and the focusing optical system, the deflection scanning unit deflecting the first light beam and the second light beam to move the focusing positions of the first light beam and the second light beam emitted from the focusing optical system along an axis intersecting the optical axis of the focusing optical system.

20. 20. The optical processing apparatus according to claim 1, An optical processing apparatus, wherein angles of chief rays of the first light beam and the second light beam with respect to a normal line at each of the focusing positions are within 1°.

21. In the optical processing apparatus according to any one of claims 1 to 20, the other of the first light beam and the second light beam is irradiated onto the workpiece via the combining element and the light collecting optical system; The optical processing apparatus further includes a measurement unit that detects, via the light collecting optical system and the combining element, detection light generated by the other light flux irradiated onto the workpiece.

22. 22. The optical processing apparatus according to claim 21, The optical processing apparatus further includes a calculation unit that generates position information regarding a position of a portion of the workpiece irradiated with one of the first light beam and the second light beam based on the detection light detected by the measurement unit.

23. 23. The optical processing apparatus according to claim 22, an optical processing device that irradiates the one of the first light beam and the second light beam based on the position information;

24. In the optical processing apparatus according to any one of claims 1 to 23, the one light beam is a second light beam, The other light beam is a first light beam.

25. Measuring a workpiece using an optical processing apparatus according to any one of claims 1 to 24; and processing the workpiece by irradiating the workpiece with the light beam from the light processing device.

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