Method for detecting deviation of substrate transfer position and substrate processing apparatus

Abstract

To detect a displacement amount of relative positions of an electrostatic chuck and a substrate.SOLUTION: A displacement amount detection method for a substrate transfer position includes the steps of: a) setting a substrate support surface at the same temperature within the substrate support surface; b) etching a first etching target film formed on a substrate; c) acquiring a first etching rate of the first etching target film; d) setting the temperature of the substrate support surface so as to be higher gradually from a central part to an edge part in a concentric manner or to be lower gradually from the central part to the edge part; e) etching a second etching target film of the same kind as the first etching target film formed on the substrate; f) acquiring a second etching rate of the second etching target film; g) calculating a differential of the acquired first and second etching rates; and f) calculating a displacement amount of the substrate based on the calculated differential.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present disclosure relates to a method for detecting a deviation amount of a substrate transport position and a substrate processing apparatus. [Background technology]

[0002] When performing etching processing in a substrate processing apparatus, an electrostatic chuck (ESC: Electric Static Chuck) is replaced periodically due to wear. It is known that a replaced ESC includes an error in the installation position, which leads to a deviation in the relative position between the ESC and the substrate, and has a significant adverse effect on the characteristics of the substrate. In response to this, it is known to perform so-called teaching, in which the position coordinates of the substrate are stored in a control unit while visually checking the transfer position of the substrate, in order to correct the error in the relative position between the susceptor and the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-127069 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a method for detecting a deviation amount of a substrate transfer position, and a substrate processing apparatus, capable of detecting the amount of deviation of the relative position between an electrostatic chuck and a substrate. [Means for solving the problem]

[0005] A method for detecting a deviation amount of a substrate transport position according to one embodiment of the present disclosure is a method for detecting a deviation amount of a substrate transport position in a substrate processing apparatus, the substrate processing apparatus including a process module having a mounting table having a substrate support surface provided inside a chamber, and a control unit capable of concentrically controlling a temperature of the substrate support surface, and includes a) setting the substrate support surface to the same temperature within the substrate support surface, b) etching a first etching target film formed on the substrate, c) acquiring a first etching rate which is the etching rate of the first etching target film, d) setting the temperature of the substrate support surface to be gradually higher concentrically from the center to the periphery, or to be gradually lower from the center to the periphery, e) etching a second etching target film of the same type as the first etching target film formed on the substrate, f) acquiring a second etching rate which is the etching rate of the second etching target film, g) calculating a difference between the acquired first etching rate and the second etching rate, and f) calculating an amount of deviation of the substrate based on the calculated difference. Effect of the Invention

[0006] According to the present disclosure, the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a cross-sectional plan view illustrating an example of a substrate processing apparatus according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a diagram showing an example of a plasma processing apparatus according to this embodiment. [Diagram 3] FIG. 3 is a diagram showing an example of a temperature control region of the main body of the substrate support in this embodiment. [Figure 4] FIG. 4 is a diagram showing an example of a cross section of a main body of a substrate support in this embodiment. [Diagram 5] FIG. 5 is a diagram showing an example of the temperature conditions for each etching process in this embodiment. [Figure 6]FIG. 6 is a diagram showing an example of a contour diagram and a graph of etching rates in the X and Y directions in this embodiment. [Figure 7] FIG. 7 is a diagram showing an example of a graph and a contour diagram showing the difference in etching rate in the X and Y directions in this embodiment. [Figure 8] FIG. 8 is a diagram showing an example of calculating the deviation amount of the center of gravity by a linear approximation formula from a graph showing the difference in etching rate in the X direction in this embodiment. [Figure 9] FIG. 9 is a diagram showing an example of calculating the amount of deviation of the center of gravity by a linear approximation formula from a graph showing the difference in etching rate in the Y direction in this embodiment. [Figure 10] FIG. 10 is a diagram showing an example of the amount of deviation of the center of the wafer from the center of the ESC in this embodiment. [Figure 11] FIG. 11 is a flowchart showing an example of the deviation amount detection process in this embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, embodiments of the disclosed method for detecting a deviation amount of a substrate transport position and a substrate processing apparatus will be described in detail with reference to the drawings. Note that the disclosed technology is not limited to the following embodiments.

[0009] As mentioned above, if there is a misalignment between the center of the ESC and the center of the substrate, the RF (Radio Frequency) characteristics and temperature characteristics become nonuniform, leading to in-plane nonuniformity in the etching rate and etching shape. It is difficult to quantify such errors in the relative positions of the ESC and the substrate after they are installed in the chamber. Therefore, it is expected that the amount of misalignment between the electrostatic chuck and the substrate can be detected accurately and simply.

[0010] [Configuration of substrate processing equipment] Fig. 1 is a cross-sectional plan view showing an example of a substrate processing apparatus according to an embodiment of the present disclosure. The substrate processing apparatus 1 shown in Fig. 1 is a substrate processing apparatus capable of performing various processes such as plasma processing on substrates (hereinafter also referred to as wafers) one by one.

[0011] As shown in FIG. 1, the substrate processing apparatus 1 includes a transfer module 10, six process modules 20, a loader module 30, and two load lock modules 40.

[0012] The transfer module 10 has a substantially pentagonal shape in a plan view. The transfer module 10 has a vacuum chamber, and a transfer mechanism 11 is disposed inside. The transfer mechanism 11 has a guide rail (not shown), two arms 12, and a fork 13 disposed at the tip of each arm 12 to support a wafer. Each arm 12 is a SCARA arm type and is configured to be rotatable and extendable. The transfer mechanism 11 moves along the guide rail and transfers a wafer between the process module 20 and the load lock module 40. Note that the transfer mechanism 11 is not limited to the configuration shown in FIG. 1 as long as it is capable of transferring a wafer between the process module 20 and the load lock module 40. For example, each arm 12 of the transfer mechanism 11 may be configured to be rotatable, extendable, and movable up and down.

[0013] The process modules 20 are arranged radially around the transfer module 10 and connected to the transfer module 10. The process module 20 is an example of a plasma processing apparatus. The process module 20 has a processing chamber and a cylindrical substrate support part 21 (mounting table) arranged inside. The substrate support part 21 has three lift pins 22 in the form of a thin rod that can be freely protruded from the upper surface. Each lift pin 22 is arranged on the same circumference in a plan view, and supports and lifts a wafer placed on the substrate support part 21 by protruding from the upper surface of the substrate support part 21, and places the supported wafer on the substrate support part 21 by retracting into the substrate support part 21. After the wafer is placed on the substrate support part 21, the process module 20 reduces the pressure inside to introduce a processing gas, and further applies high-frequency power inside to generate plasma, and performs plasma processing on the wafer by the plasma. The transfer module 10 and the process module 20 are separated by a gate valve 23 that can be freely opened and closed.

[0014] The loader module 30 is disposed opposite the transfer module 10. The loader module 30 is a rectangular parallelepiped and is an atmospheric transfer chamber maintained in an atmospheric pressure atmosphere. Two load lock modules 40 are connected to one side surface along the longitudinal direction of the loader module 30. Three load ports 31 are connected to the other side surface along the longitudinal direction of the loader module 30. A FOUP (Front-Opening Unified Pod) (not shown), which is a container for accommodating a plurality of wafers, is placed on the load port 31. An aligner 32 is connected to one side surface along the transverse direction of the loader module 30. A transfer mechanism 35 is disposed within the loader module 30. Furthermore, a measurement unit 38 is connected to the other side surface along the transverse direction of the loader module 30.

[0015] The aligner 32 aligns the wafer. The aligner 32 has a rotary stage 33 rotated by a drive motor (not shown). The rotary stage 33 has a diameter smaller than that of the wafer, for example, and is configured to be rotatable with the wafer placed on the upper surface. An optical sensor 34 for detecting the outer periphery of the wafer is provided near the rotary stage 33. In the aligner 32, the optical sensor 34 detects the center position of the wafer and the direction of the notch relative to the center of the wafer, and the wafer is transferred to a fork 37 (described later) so that the center position of the wafer and the direction of the notch are at a predetermined position and in a predetermined direction. As a result, the transport position of the wafer is adjusted in the load lock module 40 so that the center position of the wafer and the direction of the notch are at a predetermined position and in a predetermined direction.

[0016] The transfer mechanism 35 has a guide rail (not shown), an arm 36, and a fork 37. The arm 36 is a SCARA arm type, and is configured to be freely movable along the guide rail, and is also configured to be freely rotatable, extendable, and movable up and down. The fork 37 is disposed at the tip of the arm 36 and supports the wafer. In the loader module 30, the transfer mechanism 35 transfers the wafer between the FOUPs placed on each load port 31, the aligner 32, the measurement unit 38, and the load lock module 40. Note that the transfer mechanism 35 is not limited to the configuration shown in FIG. 1 as long as it is capable of transferring the wafer between the FOUPs, the aligner 32, the measurement unit 38, and the load lock module 40.

[0017] The measuring unit 38 measures the etching amount of the wafer after the etching process in the process module 20. The measuring unit 38 calculates the etching rate based on the measured etching amount and the etching process time. That is, the measuring unit 38 measures the etching rate. The measuring unit 38 outputs the measured etching rate to the control device 50 described later. The measuring unit 38 is not limited to being located adjacent to the loader module 30, and may be located inside the loader module 30.

[0018] The load lock module 40 is disposed between the transfer module 10 and the loader module 30. The load lock module 40 has an internal pressure variable chamber that can be switched between vacuum and atmospheric pressure, and has a cylindrical stage 41 disposed therein. When the load lock module 40 carries a wafer from the loader module 30 to the transfer module 10, the load lock module 40 maintains the internal pressure at atmospheric pressure, receives the wafer from the loader module 30, and then reduces the internal pressure to carry the wafer into the transfer module 10. When the load lock module 40 carries a wafer from the transfer module 10 to the loader module 30, the load lock module 40 maintains the internal pressure at vacuum, receives the wafer from the transfer module 10, and then increases the internal pressure to atmospheric pressure to carry the wafer into the loader module 30. The stage 41 has three lift pins 42 in the form of a plurality of thin rods that can be freely protruded from the upper surface. The lift pins 42 are arranged on the same circumference in a plan view, and support and lift the wafer by protruding from the upper surface of the stage 41, and place the supported wafer on the stage 41 by retracting into the stage 41. The load lock module 40 and the transfer module 10 are separated by a gate valve (not shown) that can be opened and closed freely. The load lock module 40 and the loader module 30 are also separated by a gate valve (not shown) that can be opened and closed freely.

[0019] The substrate processing apparatus 1 includes a control device 50. The control device 50 is, for example, a computer, and includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), an auxiliary storage device, etc. The CPU operates based on a program stored in the ROM or the auxiliary storage device, and controls the operation of each component of the substrate processing apparatus 1.

[0020] [Process module 20 configuration] Next, a configuration example of a capacitively coupled plasma processing apparatus will be described as an example of the process module 20. In the following description, the process module 20 will be referred to as a capacitively coupled plasma processing apparatus 20 or simply as a plasma processing apparatus 20. Fig. 2 is a diagram showing an example of a plasma processing apparatus in this embodiment.

[0021] The capacitively coupled plasma processing apparatus 20 includes a plasma processing chamber 60, a gas supply 70, a power supply 80, and an exhaust system 90. The plasma processing apparatus 20 also includes a substrate support 21 and a gas inlet. The gas inlet is configured to introduce at least one process gas into the plasma processing chamber 60. The gas inlet includes a showerhead 61. The substrate support 21 is disposed in the plasma processing chamber 60. The showerhead 61 is disposed above the substrate support 21. In one embodiment, the showerhead 61 forms at least a portion of a ceiling of the plasma processing chamber 60. The plasma processing chamber 60 has a plasma processing space 60s defined by the showerhead 61, a sidewall 60a of the plasma processing chamber 60, and the substrate support 21. The sidewall 60a is grounded. The showerhead 61 and the substrate support 21 are electrically insulated from a plasma processing chamber 60 housing.

[0022] The substrate support 21 includes a main body 211 and a ring assembly 212. The main body 211 has a central region (substrate support surface) 211a for supporting a wafer (substrate) W, and an annular region (ring support surface) 211b for supporting the ring assembly 212. The annular region 211b of the main body 211 surrounds the central region 211a of the main body 211 in a plan view. The wafer W is disposed on the central region 211a of the main body 211, and the ring assembly 212 is disposed on the annular region 211b of the main body 211 so as to surround the wafer W on the central region 211a of the main body 211. In one embodiment, the main body 211 includes a base and an electrostatic chuck. The base includes a conductive member. The conductive member of the base functions as a lower electrode. The electrostatic chuck is disposed on the base. The upper surface of the electrostatic chuck has a substrate support surface 211a. The ring assembly 212 includes one or more annular members. At least one of the one or more annular members is an edge ring. Although not shown, the substrate support 21 may include a temperature adjustment module configured to adjust at least one of the electrostatic chuck, the ring assembly 212, and the wafer W to a target temperature. The temperature adjustment module may include a heater, a heat transfer medium, a flow path, or a combination thereof. A heat transfer fluid such as brine or gas flows through the flow path. The substrate support 21 may also include a heat transfer gas supply unit configured to supply a heat transfer gas between the back surface of the wafer W and the substrate support surface 211a.

[0023] The shower head 61 is configured to introduce at least one processing gas from the gas supply unit 70 into the plasma processing space 60s. The shower head 61 has at least one gas supply port 61a, at least one gas diffusion chamber 61b, and multiple gas inlets 61c. The processing gas supplied to the gas supply port 61a passes through the gas diffusion chamber 61b and is introduced into the plasma processing space 60s from the multiple gas inlets 61c. The shower head 61 also includes a conductive member. The conductive member of the shower head 61 functions as an upper electrode. In addition to the shower head 61, the gas introduction unit may include one or more side gas injectors (SGIs) attached to one or more openings formed in the side wall 60a.

[0024] The gas supply 70 may include at least one gas source 71 and at least one flow controller 72. In one embodiment, the gas supply 70 is configured to supply at least one process gas from a respective gas source 71 through a respective flow controller 72 to the showerhead 61. Each flow controller 72 may include, for example, a mass flow controller or a pressure-controlled flow controller. Additionally, the gas supply 70 may include at least one flow modulation device to modulate or pulse a flow rate of the at least one process gas.

[0025] The power source 80 includes an RF power source 81 coupled to the plasma processing chamber 60 via at least one impedance matching circuit. The RF power source 81 is configured to supply at least one RF signal (RF power), such as a source RF signal and a bias RF signal, to the conductive member of the substrate support 21 and / or the conductive member of the showerhead 61. This causes plasma to be formed from at least one processing gas supplied to the plasma processing space 60s. Thus, the RF power source 81 can function as at least a part of the plasma generating unit. In addition, by supplying a bias RF signal to the conductive member of the substrate support 21, a bias potential is generated on the wafer W, and ion components in the formed plasma can be attracted to the wafer W.

[0026] In one embodiment, the RF power supply 81 includes a first RF generating unit 81a and a second RF generating unit 81b. The first RF generating unit 81a is coupled to the conductive member of the substrate support 21 and / or the conductive member of the shower head 61 via at least one impedance matching circuit, and is configured to generate a source RF signal (source RF power) for plasma generation. In one embodiment, the source RF signal has a frequency in the range of 13 MHz to 150 MHz. In one embodiment, the first RF generating unit 81a may be configured to generate a plurality of source RF signals having different frequencies. The generated one or more source RF signals are supplied to the conductive member of the substrate support 21 and / or the conductive member of the shower head 61. The second RF generating unit 81b is coupled to the conductive member of the substrate support 21 via at least one impedance matching circuit, and is configured to generate a bias RF signal (bias RF power). In one embodiment, the bias RF signal has a lower frequency than the source RF signal. In one embodiment, the bias RF signal has a frequency in the range of 400 kHz to 13.56 MHz. In one embodiment, the second RF generator 81b may be configured to generate multiple bias RF signals having different frequencies. The generated bias RF signal or signals are provided to the conductive members of the substrate support 21. Also, in various embodiments, at least one of the source RF signal and the bias RF signal may be pulsed.

[0027] The power supply 80 may also include a DC power supply 82 coupled to the plasma processing chamber 60. The DC power supply 82 includes a first DC generator 82a and a second DC generator 82b. In one embodiment, the first DC generator 82a is connected to a conductive member of the substrate support 21 and configured to generate a first DC signal. The generated first DC signal is applied to the conductive member of the substrate support 21. In one embodiment, the first DC signal may be applied to another electrode, such as an electrode in an electrostatic chuck. In one embodiment, the second DC generator 82b is connected to a conductive member of the showerhead 61 and configured to generate a second DC signal. The generated second DC signal is applied to the conductive member of the showerhead 61. In various embodiments, the first and second DC signals may be pulsed. The first and second DC generating units 82a, 82b may be provided in addition to the RF power supply 81, or the first DC generating unit 82a may be provided in place of the second RF generating unit 81b.

[0028] The exhaust system 90 may be connected to, for example, a gas exhaust port 60e provided at the bottom of the plasma processing chamber 60. The exhaust system 90 may include a pressure regulating valve and a vacuum pump. The pressure in the plasma processing space 60s is adjusted by the pressure regulating valve. The vacuum pump may include a turbomolecular pump, a dry pump, or a combination thereof.

[0029] [Temperature conditions for etching process] Next, the temperature conditions and etching rate of the etching process will be described with reference to FIG. 3 to FIG. 6. First, the temperature control region on the substrate support surface 211a will be described with reference to FIG. 3 and FIG. 4. FIG. 3 is a diagram showing an example of the temperature control region of the main body of the substrate support part in this embodiment. As shown in FIG. 3, the substrate support surface 211a is divided into five concentric areas in sequence from the center. The five concentric areas of the substrate support surface 211a are areas C1, C2, M, E, and VE in sequence from the center to the periphery. In addition, one area of ​​the ring support surface 211b is represented as area FR because it is used to place, for example, a focus ring as an edge ring. The areas C1, C2, M, E, VE, and FR constitute a concentric temperature control region.

[0030] FIG. 4 is a diagram showing an example of a cross section of the main body of the substrate support part in this embodiment. As shown in FIG. 4, the main body 211 has a base 211c and an electrostatic chuck 211d. The electrostatic chuck 211d has heaters 213a to 213f corresponding to the areas C1, C2, M, E, VE, and FR, respectively. The heater 213a is a circular heater corresponding to the area C1 at the center of the substrate support surface 211a. The heaters 213b to 213e are annular heaters corresponding to the areas C2, M, E, and VE of the substrate support surface 211a. The heater 213f is an annular heater corresponding to the area FR of the ring support surface 211b. The heaters 213a to 213f can be individually temperature-controlled. That is, the control device 50 can concentrically control the temperatures of the substrate support surface 211a and the ring support surface 211b. The electrostatic chuck 211d includes an attraction electrode (not shown). The areas C2, M, E, VE, and FR may be further divided into a plurality of temperature control regions in the circumferential direction. In this case, the heaters 213b to 213f are also divided to correspond to the divided plurality of temperature control regions. The divided plurality of temperature control regions may be controlled to the same temperature in the circumferential direction.

[0031] In Figures 5 and 6, when etching a silicon nitride film (SiN blanket) formed on a wafer W using a specific recipe that has a high temperature sensitivity to the etching rate, the etching rates were obtained when the temperature of the wafer W was kept constant (condition T1) and when a concentric temperature gradient was applied (condition T1_temp).

[0032] 5 is a diagram showing an example of the temperature conditions for each etching process in this embodiment. As shown in FIG. 5, in condition T1, the movement amount (x, y) of the wafer W relative to the transfer position on the substrate supporting surface 211a is set to (0, 0). In addition, in condition T1, the temperatures of areas C1, C2, M, E, VE, and FR on the substrate supporting surface 211a and the ring supporting surface 211b are controlled to t1°C.

[0033] The condition T1_temp sets the amount of movement (x, y) with respect to the transfer position of the wafer W on the substrate support surface 211a to (0, 0) in the same manner as the condition T1. Also, under the condition T1_temp, for each area, areas C1 and C2 are controlled to t1 °C, area M is controlled to t2 °C, and areas E and VE are controlled to t3 °C. Further, under the condition T1_temp, area FR on the ring support surface 211b is controlled to t3 °C. Here, the relationship among the temperatures t1 to t3 is t1 < t2 < t3. That is, under the condition T1_temp, a temperature gradient from t1 °C to t3 °C is formed in a concentric circle pattern. Namely, the concentric circular temperature gradient in the condition T1_temp is such that the central portion of the wafer W has a lower temperature than the peripheral portion. In other words, the concentric circular temperature gradient is set such that the temperature of the substrate support surface 211a gradually increases from the central portion to the peripheral portion in a concentric circle pattern. Note that the concentric circular temperature gradient may be such that the central portion of the wafer W has a higher temperature than the peripheral portion. That is, the concentric circular temperature gradient may be set such that the temperature of the substrate support surface 211a gradually decreases from the central portion to the peripheral portion in a concentric circle pattern. Also, the concentric circular temperature gradient may be set such that the temperatures of the substrate support surface 211a and the ring support surface 211b gradually increase from the central portion to the peripheral portion and further to the ring support surface 211b in a concentric circle pattern, or gradually decrease from the central portion to the peripheral portion and further to the ring support surface 211b in a concentric circle pattern.

[0034] The temperature control of the wafer W is sufficient if it is at least the temperature of the substrate support surface 211a, and it is not necessarily required to control the temperature of the ring support surface 211b. The concentric temperature gradient is sufficient if it is formed by at least two temperature regions on the substrate support surface 211a, and is not limited to the five temperature regions of this embodiment. In addition, for example, when a heater is not built in the substrate support part 21, the surface temperature of the wafer W is controlled to be the same temperature by making the pressure of the helium gas, which is the heat transfer gas supplied between the substrate support surface 211a and the wafer W, uniform within the substrate support surface 211a (mounting surface). On the other hand, the pressure of the helium gas is made different between the center and the periphery within the substrate support surface 211a, so that the surface temperature of the wafer W is controlled to have a concentric temperature gradient. In addition, the temperature of each area can be arbitrarily set so that a temperature gradient is formed within a range that can be set by the main body part 211 of the substrate support part 21, for example, within a range of 0°C to 120°C.

[0035] FIG. 6 is a diagram showing an example of a contour diagram and a graph of etching rates in the X and Y directions in this embodiment. In FIG. 6, a contour diagram and etching rates on a straight line in two different directions, X and Y directions, passing through the center of the wafer W are shown as etching results for the wafer W under the conditions T1 and T1_temp. Note that, under the conditions T1 and T1_temp, measurements were performed at 5 mm intervals excluding the edge of the wafer W as an example of the measurement interval of the etching rate. Under the condition T1, the etching rate was higher at the peripheral part of the wafer W than at the center, and a graph 101 of the etching rate in the X direction and a graph 102 of the etching rate in the Y direction were obtained. The result of the condition T1 includes a bias caused by the plasma processing chamber 60.

[0036] On the other hand, under condition T1_temp, the etching rate is lower at the periphery of the wafer W than at the center, and graph 103 of the etching rate in the X direction and graph 104 of the etching rate in the Y direction are obtained. The results under condition T1_temp include bias due to the plasma processing chamber 60 and bias due to the temperature of the substrate support surface 211a. Note that the etching rate is not limited to the X and Y directions, and may be in other directions as long as it passes through the center of the wafer W and includes etching rates in two different directions. Furthermore, it is preferable that the etching rates in the two different directions are etching rates in two directions perpendicular to each other.

[0037] [Calculate the difference] Next, in order to cancel the bias caused by the plasma processing chamber 60, a difference between the etching rates on straight lines in two different directions, the X and Y directions, which pass through the center of the wafer W, is calculated. Fig. 7 shows an example of a graph and a contour diagram showing the difference between the etching rates in the X and Y directions in this embodiment.

[0038] Condition T1Δ shown in FIG. 7 represents the difference between condition T1 and condition T1_temp. In condition T1Δ, a graph 105 representing the difference between graph 101 and graph 103 of the etching rate in the X direction, and a graph 106 representing the difference between graph 102 and graph 104 of the etching rate in the Y direction are obtained. The contour diagram in FIG. 7 represents the difference. In condition T1Δ, the bias caused by the plasma processing chamber 60 is canceled, and only the bias caused by the temperature of the substrate support surface 211a is included. That is, since the center of the five concentric areas of the substrate support surface 211a corresponds to the center of the substrate support surface 211a, the graphs 105 and 106 of condition T1Δ represent the amount of deviation between the wafer W and the substrate support surface 211a. In addition, the accuracy of the obtained amount of deviation can be improved by shortening the measurement interval of the etching rate.

[0039] Here, attention is focused on specific corresponding ranges 107, 108 (e.g., ±60 to 90 mm) in each section from the center (0 mm) of the wafer W to the periphery on both sides (150 mm, -150 mm). In the ranges 107, 108, the graphs 105, 106 are close to straight lines so as to correspond to the temperature gradient. Therefore, by finding a linear approximation for the graphs 105, 106 in the ranges 107, 108, the center of gravity of the contour lines of the contour diagram can be found, and the relative position of the wafer W with respect to the substrate support surface 211a can be found.

[0040] [Calculating the amount of deviation of the center of gravity] Fig. 8 is a diagram showing an example of calculating the amount of deviation of the center of gravity from a graph showing the difference in etching rate in the X direction in this embodiment using a linear approximation formula. The amount of deviation of the center of gravity corresponds to the deviation of the center of gravity of the contour line of the difference in etching rate in the contour diagram shown in Fig. 7. As shown in Fig. 8, a linear approximation formula is obtained for a range 107 of graph 105 on the positive side of the distance from the center of the wafer W to generate graph 109. Meanwhile, a linear approximation formula is obtained for a range 108 of graph 105 on the negative side of the distance from the center of the wafer W to generate graph 110.

[0041] Next, for graphs 109 and 110, the value of the x coordinate (Location) when the y coordinate is ΔER=2 [nm / min] is found. In the Location range (60 mm to 90 mm) corresponding to graph 109, the value is a. In the Location range (-90 mm to -60 mm) corresponding to graph 110, the value of the x coordinate (Location) when the y coordinate is ΔER=2 [nm / min] is b. Based on each of the x coordinate values ​​when the y coordinate is ΔER=2 [nm / min], the center of gravity can be found as (a+b) / 2. In other words, when the center of the wafer W is used as a reference, the center of the substrate supporting surface 211a is shifted by (a+b) / 2 in the x direction.

[0042] 9 is a diagram showing an example of calculating the amount of deviation of the center of gravity by a linear approximation formula from a graph showing the difference in etching rate in the Y direction in this embodiment. As shown in Fig. 9, a linear approximation formula is obtained for a range 107 of graph 106 where the distance from the center of the wafer W is on the positive side, to generate a graph 111. Meanwhile, a linear approximation formula is obtained for a range 108 of graph 106 where the distance from the center of the wafer W is on the negative side, to generate a graph 112.

[0043] Next, for graphs 111 and 112, the value of the x coordinate (Location) when the y coordinate is ΔER=2 [nm / min] is calculated. In the Location range (60 mm to 90 mm) corresponding to graph 111, the value is c. In addition, in the Location range (-90 mm to -60 mm) corresponding to graph 112, the value of the x coordinate (Location) when the y coordinate is ΔER=2 [nm / min] is d. Based on each value of the x coordinate when the y coordinate is ΔER=2 [nm / min], the center of gravity can be calculated as (c+d) / 2. In other words, when the center of the wafer W is used as a reference, the center of the substrate support surface 211a is shifted by (c+d) / 2 in the y direction. In graphs 109 to 112, the y coordinate for calculating the value of the x coordinate is not limited to ΔER=2 [nm / min], and other values ​​such as ΔER=1 [nm / min] or ΔER=3 [nm / min] may be used as long as they are in a linear region.

[0044] Fig. 10 is a diagram showing an example of the amount of deviation of the wafer center from the ESC center in this embodiment. As shown in Fig. 10, if the center of the seal band 113, which is the portion of the substrate support surface 211a that contacts the outermost periphery of the wafer W, is expressed as the ESC center (x, y) = (0, 0), the coordinates of the center of the wafer W can be found based on the centers of gravity in the X and Y directions, and are (x, y) = ((a + b) / 2, (c + d) / 2). In other words, the amount of deviation of the center of the wafer W from the ESC center can be found as (x, y) = ((a + b) / 2, (c + d) / 2).

[0045] [Method for detecting deviation in substrate transport position] Next, a method for detecting the amount of deviation of the substrate transport position in the substrate processing apparatus 1 of this embodiment will be described. Fig. 11 is a flow chart showing an example of a deviation amount detection process in this embodiment. In the following description, the operation of each component of the substrate processing apparatus 1 is controlled by the control device 50. The deviation amount detection process shown in Fig. 11 will also be described including adjustment of the substrate transport position based on the detected amount of deviation.

[0046] The control device 50 controls the wafer W accommodated in the FOUP of the load port 31 to be transported to the process module 20 via the loader module 30, the load lock module 40, and the transfer module 10, and placed on the substrate support surface 211a of the main body 211. Note that, for example, a silicon nitride film is formed on the wafer W as a first etching target film in order to measure the etching rate, and the film thickness of the silicon nitride film in two different directions, the X direction and the Y direction, is measured in advance.

[0047] The control device 50 then closes the opening and controls the exhaust system 90 to exhaust gas from the plasma processing space 60s so that the atmosphere in the plasma processing space 60s has a predetermined vacuum degree. The control device 50 also controls a temperature control module (not shown) to adjust the temperature of the wafer W to a predetermined uniform temperature. The control device 50 controls the supply of a process gas to the plasma processing space 60s. The process gas may be, for example, a fluorine-containing gas. The control device 50 controls the supply of a source RF signal and a bias RF signal from the RF power source 81 to generate a plasma of the process gas, and controls the first etching process to etch the wafer W (step S1). That is, the control device 50 controls the surface temperature of the wafer W placed on the substrate support surface 211a (mounting table) of the substrate support unit 21 to be the same temperature, and controls the etching of the first etching target film formed on the wafer W under predetermined conditions.

[0048] When the first etching process is completed, the control device 50 performs control to stop the supply of the process gas, the source RF signal, and the bias RF signal, and to open the opening (not shown). The control device 50 performs control to unload the wafer W from the process module 20, and to transport it to the measurement unit 38 via the transfer module 10, the load lock module 40, and the loader module 30.

[0049] The control device 50 controls the measurement unit 38 to measure the film thickness of the silicon nitride film, which is the first etching target film, after the first etching process. The measurement is performed at the same positions as the measurement positions measured in advance. The control device 50 controls the measurement unit 38 to obtain a first etching rate for the wafer W from the film thickness of the silicon nitride film measured in advance and the film thickness of the silicon nitride film after the first etching process (step S2). The control device 50 controls the wafer W, whose first etching rate has been measured, to be accommodated in the FOUP of the load port 31 via the loader module 30.

[0050] Next, the control device 50 controls the other wafers W accommodated in the FOUP of the load port 31 to be transported to the process module 20 via the loader module 30, the load lock module 40, and the transfer module 10, and placed on the substrate support surface 211a of the main body 211. For the etching rate measurement, the other wafers W are also formed with a second etching target film (silicon nitride film) that is the same film as that in the first etching process, and the film thicknesses at the same multiple positions in two different directions, the X and Y directions, are measured in advance. The control device 50 then closes the opening and controls the exhaust system 90 to exhaust gas from the plasma processing space 60s so that the atmosphere in the plasma processing space 60s reaches a predetermined vacuum level.

[0051] The controller 50 also controls a temperature control module (not shown) to adjust the temperature of the wafer W to a predetermined temperature with a concentric temperature gradient. That is, the controller 50 controls the temperature of the substrate support surface 211a to be gradually increased from the center to the periphery in a concentric manner. The controller 50 controls the supply of a process gas to the plasma processing space 60s. The process gas is, for example, a fluorine-containing gas. The controller 50 controls the second etching process to etch the wafer W with the plasma of the process gas generated by supplying a source RF signal and a bias RF signal from the RF power supply 81 (step S3). That is, the controller 50 controls the surface temperature of the wafer W placed on the substrate support surface 211a (mounting table) of the substrate support unit 21 to be concentrically temperature gradient, and controls the etching of a second etching target film of the same type as the first etching target film formed on the wafer W under predetermined conditions.

[0052] When the second etching process is completed, the control device 50 controls the measurement unit 38 to measure the film thickness of the silicon nitride film, which is the second etching target film, after the second etching process, in the same manner as in step S2. The measurement is performed at a plurality of positions that are the same as the measurement positions measured in advance. The control device 50 controls the measurement unit 38 to obtain a second etching rate from the film thickness of the silicon nitride film measured in advance and the film thickness of the silicon nitride film after the second etching process (step S4). The control device 50 controls the wafer W, whose second etching rate has been measured, to be accommodated in the FOUP of the load port 31 via the loader module 30. Note that, if the silicon nitride film of the wafer W used in the first etching process is sufficiently thick, the second etching process may be performed using the wafer W, and the second etching rate may be calculated from the difference in the etching amount. The control device 50 may also execute steps S1, S2 and steps S3, S4 in a reverse order.

[0053] The control device 50 controls to calculate the difference between the acquired first etching rate and second etching rate for each of the X and Y directions (step S5). That is, the control device 50 controls to calculate the difference between the first etching rate and the second etching rate on a straight line in the same direction passing through the center of the wafer W for each of the X and Y directions. The control device 50 controls to obtain a linear approximation equation for a specific corresponding range in each section from the center of the wafer W to the periphery on both sides for the graph of the difference in each of the X and Y directions (step S6). The control device 50 controls to calculate the amount of deviation of the wafer W based on the linear approximation equation (step S7). That is, the control device 50 controls to calculate the value of the x coordinate corresponding to a specific y coordinate in the graph of the linear approximation equation for each of the X and Y directions for the plus and minus sides of the specific corresponding range, and to obtain the value obtained by dividing the difference between the values ​​of each x coordinate by 2 as the amount of deviation of the center of gravity of the substrate support surface 211a (ESC). The control device 50 controls the calculation of the coordinates (amount of deviation) of the center of the wafer W on the coordinate axis based on the center of the substrate support surface 211a by converting the amount of deviation of the center of gravity of the substrate support surface 211a in each of the X and Y directions into the amount of deviation of the center of gravity of the wafer W.

[0054] The control device 50 controls the transfer mechanism 11 to adjust the transfer position of the wafer W on the substrate support surface 211a when transferring the wafer W to the process module 20 based on the calculated amount of deviation, i.e., the coordinates of the center of the wafer W on the coordinate axis based on the center of the substrate support surface 211a (step S8). In this way, the substrate processing apparatus 1 can detect the amount of deviation of the relative position between the electrostatic chuck (ESC) and the substrate (wafer W) based on the etching rate when the temperature is uniform and when a temperature gradient is applied. In other words, when the deviation exceeds a predetermined amount, it can be determined whether or not to reassemble the ESC. In addition, it can cancel the bias component of the etching rate other than that caused by the relative position between the ESC and the wafer W (RF bias, edge ring deviation, etc.). Furthermore, it is possible to adjust the substrate transfer position without opening the plasma processing chamber 60 to the atmosphere, even during operation of the substrate processing apparatus 1.

[0055] In the above embodiment, the etching rate of the silicon nitride film formed on the wafer W is used, but the present invention is not limited thereto. The etching rate may be any etching rate of a film having high temperature sensitivity, for example, the etching rate of a silicon-containing film or an organic film may be used. Examples of the silicon-containing film include the silicon nitride film described above and a silicon oxide film. Examples of the organic film include a carbon-containing film such as a resist.

[0056] As described above, according to this embodiment, the substrate processing apparatus 1 includes a process module 20 in which a mounting table (main body 211) having a substrate support surface 211a is provided inside a chamber (plasma processing chamber 60), a measurement unit 38 that measures an etching rate of a substrate (wafer W), and a control unit (control device 50) that can concentrically control the temperature of the substrate support surface 211a. a) The control unit is configured to control the substrate processing apparatus 1 so as to set the substrate support surface 211a to the same temperature within the substrate support surface 211a. b) The control unit is configured to control the substrate processing apparatus 1 so as to etch a first etching target film formed on the substrate. c) The control unit is configured to control the substrate processing apparatus 1 so as to obtain a first etching rate that is an etching rate of the first etching target film. d) The control unit is configured to control the substrate processing apparatus 1 so as to set the temperature of the substrate support surface so as to be gradually higher concentrically from the center to the periphery, or to be gradually lower concentrically from the center to the periphery. e) The control unit is configured to control the substrate processing apparatus 1 to etch a second etching target film of the same type as the first etching target film formed on the substrate. f) The control unit is configured to control the substrate processing apparatus 1 to obtain a second etching rate, which is an etching rate of the second etching target film. g) The control unit is configured to control the substrate processing apparatus 1 to calculate a difference between the obtained first etching rate and the second etching rate. h) The control unit is configured to control the substrate processing apparatus 1 to calculate a deviation amount of the substrate based on the calculated difference. As a result, the deviation amount of the relative position between the electrostatic chuck (main body part 211) and the substrate can be detected. In addition, the bias component of the etching rate other than that caused by the relative position between the electrostatic chuck and the wafer W can be canceled.

[0057] According to the present embodiment, the first etching rate and the second etching rate each include etching rates in two different directions passing through the center of the substrate, so that the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected.

[0058] According to the present embodiment, the etching rates in the two different directions are etching rates in two directions perpendicular to each other, so that the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected.

[0059] According to the present embodiment, in step g), the difference between the first etching rate and the second etching rate on a straight line passing through the center of the substrate in the same direction is calculated, and in step h), a linear approximation formula is obtained for each specific corresponding range in each section from the center of the substrate to both side peripheral portions when each difference on the straight line is represented in a graph, and the deviation amount is calculated based on each linear approximation formula. As a result, the deviation amount of the relative position between the electrostatic chuck and the substrate can be detected.

[0060] Furthermore, according to this embodiment, the substrate support surface has at least two concentric temperature control regions, so that the difference between the first etching rate and the second etching rate can be obtained.

[0061] According to this embodiment, the mounting table has an annular ring support surface 211b on the outer periphery of the substrate support surface. In a), the temperature of the substrate support surface and the temperature of the ring support surface are set to the same temperature, and in d), the temperatures of the substrate support surface and the ring support surface are set so as to gradually increase concentrically from the center to the periphery and then to the ring support surface 211b, or to gradually decrease concentrically from the center to the periphery and then to the ring support surface 211b. As a result, the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected.

[0062] According to the present embodiment, the first etching rate and the second etching rate are the etching rates of the silicon-containing film or the organic film formed on the substrate, and as a result, the amount of deviation of the relative position between the electrostatic chuck and the substrate can be detected.

[0063] According to the present embodiment, the silicon-containing film is a silicon nitride film or a silicon oxide film, so that the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected.

[0064] Furthermore, according to this embodiment, i) the control unit is configured to control the substrate processing apparatus 1 to adjust the substrate transport position based on the calculated deviation amount. As a result, the substrate transport position can be adjusted accurately and easily.

[0065] Furthermore, according to the present embodiment, the first etching rate and the second etching rate are measured and acquired by the measuring unit 38. As a result, the amount of deviation in the relative position between the electrostatic chuck and the substrate can be detected.

[0066] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims.

[0067] In addition, in each of the above-described embodiments, the measurement unit 38 is provided in the substrate processing apparatus 1, but the present invention is not limited to this. For example, a measurement device independent of the substrate processing apparatus 1 may be used to measure and acquire the film thickness before and after the etching process in order to measure the etching rate.

[0068] In the above embodiment, the process module 20 is described as an example in which a process such as etching is performed on the wafer W using capacitively coupled plasma as a plasma source, but the disclosed technology is not limited to this. As long as the device is one that performs a process on the wafer W using plasma, the plasma source is not limited to capacitively coupled plasma, and any plasma source such as inductively coupled plasma, microwave plasma, magnetron plasma, etc. can be used. [Explanation of symbols]

[0069] 1. Substrate Processing Equipment 10 Transfer Module 11. Transport mechanism 20 Process Module 21 Substrate support 30 Loader Module 38 Measuring part 40 Load Lock Module 50 Control device 60 Plasma Processing Chamber 70 Gas Supply Section 81 RF power supply 90 Exhaust System 211a Board support surface 211b Ring support surface 211 Main body 212 Ring Assembly W wafer

Claims

1. A method for detecting a deviation amount of a substrate transfer position in a substrate processing apparatus, comprising: The substrate processing apparatus includes: a process module including a chamber and a stage having a substrate support surface; a control unit capable of concentrically controlling a temperature of the substrate support surface; a) setting the substrate support surface to a uniform temperature throughout the substrate support surface; b) etching a first etching target film formed on a substrate; c) acquiring a first etching rate, which is an etching rate of the first etching target film; d) setting the temperature of the substrate support surface to be gradually higher or lower in a concentric circle from the center to the periphery; e) etching a second etching target film of the same type as the first etching target film formed on the substrate; f) acquiring a second etching rate, which is an etching rate of the second etching target film; g) calculating a difference between the acquired first etching rate and the acquired second etching rate; h) calculating a deviation amount of the substrate based on the calculated difference; The method for detecting a deviation amount of a substrate transport position includes the steps of:

2. the first etching rate and the second etching rate each include an etching rate in two different directions passing through a center of the substrate; 2. The method for detecting a deviation amount of a substrate transport position according to claim 1.

3. The etching rates in the two different directions are etching rates in two directions perpendicular to each other. The method for detecting a deviation of a substrate transport position according to claim 2 .

4. The step g) calculates a difference between the first etching rate and the second etching rate on a straight line passing through the center of the substrate in the same direction; The step (h) includes obtaining linear approximation equations for specific corresponding ranges in each section from the center of the substrate to both side peripheral portions when each difference on the straight line is represented in a graph, and calculating the amount of deviation based on each linear approximation equation.

4. The method for detecting a deviation amount of a substrate transport position according to claim 1.

5. the substrate support surface having at least two concentric temperature control regions; 5. The method for detecting a deviation of a substrate transport position according to claim 1.

6. the mounting table has an annular ring support surface on an outer periphery of the substrate support surface, a) sets the temperature of the substrate support surface and the temperature of the ring support surface to the same temperature; and setting the temperatures of the substrate support surface and the ring support surface so as to gradually increase in temperature from the center to the periphery and then to the ring support surface, or to gradually decrease in temperature from the center to the periphery and then to the ring support surface, in a concentric manner.

6. The method for detecting a deviation amount of a substrate transport position according to claim 1.

7. the first etching rate and the second etching rate are etching rates of a silicon-containing film or an organic film formed on the substrate; 7. The method for detecting a deviation amount of a substrate transport position according to claim 1.

8. The silicon-containing film is a silicon nitride film or a silicon oxide film. The method for detecting a deviation amount of a substrate transport position according to claim 7.

9. moreover, i) adjusting a transport position of the substrate based on the calculated amount of deviation; 9. The method for detecting a deviation amount of a substrate transport position according to claim 1.

10. the substrate processing apparatus includes a measurement unit for measuring an etching rate of the substrate, The first etching rate and the second etching rate are measured and acquired by the measurement unit.

10. The method for detecting a deviation amount of a substrate transport position according to claim 1.

11. A substrate processing apparatus, comprising: The substrate processing apparatus includes: a process module including a chamber and a stage having a substrate support surface; A measurement unit that measures an etching rate of a substrate; a control unit capable of concentrically controlling a temperature of the substrate support surface; a) the controller is configured to control the substrate processing apparatus to set the substrate support surface to a uniform temperature within the substrate support surface; b) the control unit is configured to control the substrate processing apparatus to etch a first etching target film formed on the substrate; c) the control unit is configured to control the substrate processing apparatus to obtain a first etching rate, the first etching rate being an etching rate of the first etching target film; d) the control unit is configured to control the substrate processing apparatus so as to set a temperature of the substrate support surface so as to be gradually higher concentrically from a center portion to a periphery portion or to be gradually lower concentrically from the center portion to the periphery portion; e) the control unit is configured to control the substrate processing apparatus to etch a second etching target film of the same type as a first etching target film formed on the substrate; f) the control unit is configured to control the substrate processing apparatus to obtain a second etching rate, the second etching rate being an etching rate of the second etching target film; g) the control unit is configured to control the substrate processing apparatus to calculate a difference between the acquired first etching rate and the acquired second etching rate; h) the control unit is configured to control the substrate processing apparatus to calculate a deviation amount of the substrate based on the calculated difference. Substrate processing equipment.

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