Method for seasoning a processing chamber

Abstract

FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to semiconductor processing. More particularly, embodiments of the present disclosure relate to a method for seasoning one or more components of a processing chamber. In at least one embodiment, a method for seasoning a processing chamber includes depositing a seasoning film on a component of the processing chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200°C or about 200°C to about 400°C. The method includes depositing a deposition film on the seasoning film. In at least one embodiment, the method includes introducing a nitrogen-containing gas into the seasoning film to form a nitrogen-treated seasoning film. The introduction of the nitrogen-containing gas into the seasoning film occurs before depositing a deposition film on the seasoning film.

Description

[Technical field]

[0001] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to semiconductor processing. More particularly, embodiments of the present disclosure relate to a method for seasoning one or more components of a processing chamber. [Background technology]

[0002] Semiconductor processing involves many different chemical and physical processes by which small integrated circuits are produced on a substrate. The layers of materials that make up the integrated circuits are produced by chemical vapor deposition, physical vapor deposition, epitaxial growth, chemical treatments, electrochemical processes, etc.

[0003] A typical semiconductor processing chamber includes a chamber body defining a processing zone, a gas distribution assembly adapted to deliver gas from a gas supply to the processing zone, a gas energizer, such as a plasma generator, utilized to excite processing gas to process a substrate positioned on a substrate support assembly, and a gas exhaust. During plasma processing, the excited gas is often composed of ions, radicals, and / or other highly reactive species that etch and erode exposed portions of processing chamber parts, such as an electrostatic chuck that holds the substrate during processing. In addition, processing by-products often deposit on the chamber parts, which must be periodically cleaned, typically using highly reactive fluorine. Thus, to maintain the cleanliness of the processing chamber, periodic cleaning processes are performed to remove by-products from the processing chamber. Attack by reactive species during processing and cleaning reduces the lifetime of chamber parts and increases maintenance frequency. In addition, flakes such as aluminum fluoride (AlF) from eroded portions of the chamber parts can be a source of particulate contamination during substrate processing. Additionally, AlF3 formed on hotter component surfaces during the cleaning process may sublime but subsequently deposit on cooler chamber component surfaces, such as the showerhead, after the cleaning process. This residual deposit may result in premature failure of chamber components and frequent chamber maintenance.

[0004] Attempts have been made to protect ("season") chamber parts by depositing protective materials (e.g., layers) on one or more processing chamber parts. However, conventional seasoning methods do not work in CVD chambers operating at low pressures (and / or low temperatures). Such low pressure / low temperature CVD chambers may be advantageously used to deposit highly patterned films, such as hard mask films, e.g., amorphous carbon hard mask films, on substrates. Due to the low pressures, low temperatures, and / or larger processing volumes used in such chambers, conventional seasoning methods (of chamber parts) provide materials (e.g., layers) that are prone to delamination and poor adhesion to the processing chamber part(s). Such delamination and poor adhesion can promote contamination of the substrate during processing.

[0005] Thus, there is a need for process improvements to maintain the cleanliness of the processing chamber and the integrity of the chamber parts, extend the life of the chamber parts, and provide high quality processed wafers. Summary of the Invention

[0006] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to semiconductor processing. More particularly, embodiments of the present disclosure relate to a method for seasoning one or more components of a processing chamber.

[0007] In at least one embodiment, a method of seasoning a processing chamber includes depositing a seasoning film on a component of a processing chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C. The method includes depositing a deposition film on the seasoning film.

[0008] In at least one embodiment, a method includes depositing a seasoning film on a component including flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas, the method includes adjusting the first flow ratio to a second flow ratio of the first carbon-containing precursor gas to the first inert precursor gas.

[0009] In at least one embodiment, a method for seasoning a process chamber includes depositing a first seasoning film on a part of a process chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C. The method includes depositing a second seasoning film on the first seasoning film. The method includes depositing a deposition film on the second seasoning film. Depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the process chamber.

[0010] In at least one embodiment, a method for seasoning a process chamber includes depositing a first seasoning film on a component of a process chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C. The method includes depositing a plurality of additional seasoning films on the first seasoning film. The method includes depositing a deposition film on the plurality of additional seasoning films. Depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the process chamber.

[0011] So that the above-mentioned features of the present disclosure can be understood in detail, a more particular description of the present disclosure, briefly summarized above, can be had by reference to embodiments, some of which are illustrated in the accompanying drawings, in which it is noted, however, that the accompanying drawings depict only exemplary embodiments and therefore should not be considered limiting of its scope, other equally effective embodiments being permissible. [Brief description of the drawings]

[0012] [Figure 1] 1 is a process flow diagram of a process for seasoning a processing chamber according to one aspect of the present disclosure; [Diagram 2] 1 is a schematic cross-sectional side view of a processing chamber according to one aspect of the present disclosure. [Figure 3A] 1 is a schematic cross-sectional side view of a portion of a lid coupled to a conduit according to one embodiment of the present disclosure; [Figure 3B] FIG. 2B is a perspective view of the shower head of the lid of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] To facilitate understanding, wherever possible, like reference numerals are used to designate like elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0014] FIELD OF THE DISCLOSURE Embodiments of the present disclosure relate to semiconductor processing. More particularly, embodiments of the present disclosure relate to a method for seasoning one or more components of a processing chamber.

[0015] The disclosed method can reduce delamination of protective material (deposited film) and improve adhesion of the deposited film to the chamber component by providing a seasoning film disposed between the deposited film and the chamber component. For example, the deposited film can have an intrinsic stress of about 400 MPa or less (compressive), such as about 100 MPa to about 300 MPa (compressive), whereas the chamber component (e.g., an aluminum-containing component) can have an intrinsic stress of about 800 MPa or more (compressive), such as about 900 MPa to about 1,200 MPa (compressive). Additionally or alternatively, the chamber component can have an intrinsic stress of about 100 MPa or more (tensile), such as about 200 MPa to about 500 MPa (tensile). Such mismatch of intrinsic stress between the deposited film and the chamber component promotes delamination and adhesion failure between the deposited film and the chamber component. However, the inventors have found that by controlling the intrinsic stress of the seasoning film, the seasoning film can be tailored to beneficially adhere to the deposited film on one side of the seasoning film and to the chamber part on the opposite side of the seasoning film. The inventors have found many ways to achieve such improvements. For purposes of this disclosure, the intrinsic stress can be determined by attaching a test strip to the chamber part, depositing the film to be measured on the test strip, removing the test strip with the film deposited thereon, and analyzing the film using any suitable optional optical spectroscopy technique. An example of a processing chamber that can be adapted to benefit from exemplary aspects of the present disclosure is the PIONEER™ PECVD system, available from Applied Materials, Inc., Santa Clara, California, USA. It is contemplated that other processing chambers and / or processing platforms, including those from other manufacturers, can also be adapted to benefit from aspects of the present disclosure.

[0016] In some embodiments, as shown in FIG. 1, a method 100 of seasoning a process chamber (e.g., one or more components of a process chamber) includes depositing 102 a seasoning film on the component of the process chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C. The method may include depositing 104 a deposition film on the seasoning film. In at least one embodiment, the temperature is about 100° C. to about 200° C. Alternatively, the temperature may be about 200° C. to about 400° C., such as about 250° C. to about 350° C. Higher temperatures may provide improved film quality, adhesion, and / or lower intrinsic stress (compared to processes using lower temperatures). For example, (1) the seasoning film and the deposition film, and / or (2) the seasoning film and the chamber component may diffuse into each other to some extent better (compared to processes using lower temperatures), thereby improving adhesion. However, using higher temperatures increases the cost of carrying out the process.

[0017] Depositing the seasoning film may include flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber. Depositing the deposition film may include flowing a second carbon-containing precursor gas and a second inert precursor gas into the processing chamber. The second carbon-containing precursor gas is the same as or different from the first carbon-containing precursor gas, and the second inert precursor gas is the same as or different from the first inert precursor gas. In some embodiments, the first carbon-containing precursor gas and / or the second carbon-containing precursor gas is acetylene. In some embodiments, the first inert precursor gas and / or the second inert precursor gas is helium.

[0018] Flowing the first carbon-containing precursor gas and the first inert precursor gas into the processing chamber can include flowing the first carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm and flowing the first inert precursor gas into the processing chamber at a flow rate of about 150 sccm to about 800 sccm, these flow rates being based on a chamber designed to process 300 mm wafers.

[0019] The deposited film can be an amorphous carbon-containing film. In some embodiments, the deposited film has an intrinsic stress of about 400 MPa or less (compressive), such as about 100 MPa to about 300 MPa (compressive). The chamber component is a metal-containing component, such as aluminum or an aluminum alloy. The chamber component can have an intrinsic stress of about 800 MPa or more (compressive), such as about 900 MPa to about 1,200 MPa (compressive). Additionally or alternatively, the chamber component can have an intrinsic stress of about 100 MPa or more (tensile), such as about 200 MPa to about 500 MPa (tensile).

[0020] Depositing the deposition film over the seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature less than about 200° C. Depositing the deposition film over the seasoning film is performed by flowing a second carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm. In some embodiments, depositing the deposition film over the seasoning film includes providing about 1 kW to about 6 kW of RF power to the processing chamber.

[0021] The method may further include introducing a nitrogen-containing gas into the seasoning film to form a nitrogen-treated seasoning film. Introducing the nitrogen-containing gas into the seasoning film may occur prior to depositing a deposition film over the seasoning film.

[0022] Introducing the nitrogen-containing gas into the seasoning film can be performed at a chamber pressure of about 4 mTorr to about 20 mTorr and / or at a temperature less than about 200° C. The nitrogen-containing gas can include any suitable nitrogen-containing gas, such as ammonia. Introducing the nitrogen-containing gas into the seasoning film can include flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm, such as about 50 sccm to about 600 sccm. Introducing the nitrogen-containing gas into the seasoning film can include providing about 100 kW to about 4,000 kW of RF power to the processing chamber to activate the nitrogen-containing gas.

[0023] The introduction of nitrogen-containing gas into the seasoning film(s) of the present disclosure can provide a nitrogen-terminated surface that provides nucleation sites for the deposited film, leading to improved adhesion to the deposited film and leading to a controlled bond structure of the deposited film (e.g., low intrinsic stress of the deposited layer). The introduction of nitrogen-containing gas into the seasoning film(s) can be performed at low temperature and / or low pressure, so that the nitrogen treatment is mainly at the surface of the seasoning film(s) and can promote bonding and nucleation to the deposited film. In addition, because the deposited film can be deposited at low temperature and / or low pressure, the deposited layer can have a low nitrogen content, which can reduce the intrinsic stress and peeling of the deposited film.

[0024] The processing chamber component can be any suitable component, such as a chamber wall, a spacer, a substrate support (e.g., an edge ring), etc. In at least one embodiment, the component is not a wafer, e.g., not a semiconductor wafer. For example, the process can include placing an inert substrate on a pedestal of the chamber and performing a seasoning method. In some embodiments, the processing chamber component is an inner wall of the processing chamber. The inner wall can be larger than the wall of a conventional CVD chamber, such as the wall of a Pioneer™ processing chamber. Traditionally, it has been very difficult to properly season large walls, and the disclosed method can overcome such limitations.

[0025] Gradual seasoning film In some embodiments, which can be combined with other embodiments, depositing a seasoning film on the component includes flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas. The method includes adjusting the first flow ratio to a second flow ratio of the first carbon-containing precursor gas to the first inert precursor gas. Adjusting the first flow ratio to the second flow ratio modifies the bonding structure (e.g., sp 2 vs sp 3 For example, a first flow rate ratio can be slowly adjusted to a second flow rate ratio to provide a graded seasoning film with a gradual change in bonding structure from the side of the seasoning film placed on the part to the side of the seasoning film placed on the deposition film. Hybridization of the surface of the seasoning film can affect the adhesion of the surface of the seasoning film to the chamber part and the deposition layer. sp 2 Higher properties result in increased intrinsic stress. For example, a first flow ratio can promote higher intrinsic stress (at the first surface of the seasoning film) for beneficial adhesion to chamber components, while a second flow ratio can result in lower intrinsic stress (at the second side of the seasoning film) compared to materials of conventional seasoning methods, resulting in reduced delamination of the deposited film and / or the seasoning film.

[0026] In some embodiments, the seasoning film is an amorphous carbon-containing film. In some embodiments, the seasoning film has an intrinsic stress of about 300 MPa to about 800 MPa (compressive). The seasoning film can progress from about 300 MPa to about 550 MPa (compressive) on a first side to about 550 MPa to about 800 MPa (compressive) on a second side. The gradient of the intrinsic stress of the seasoning film results in improved adhesion and reduced delamination (compared to conventional seasoning films in high temperature / pressure CVD chambers).

[0027] In at least one embodiment, the first flow ratio is from about 1:1 to about 1:2. In some embodiments, the second flow ratio is from about 10:1 to about 1:1, or from about 1:2 to about 1:10. For example, a high ratio of acetylene to helium can result in a higher intrinsic stress (compared to a lower ratio). When the acetylene is more diluted (e.g., a 1:10 ratio), a material with a lower intrinsic stress will be formed.

[0028] Adjusting the first flow ratio to the second flow ratio can occur at a rate of about 1 sccm / sec to about 20 sccm / sec.

[0029] Depositing the seasoning film on the component can include supplying a first RF power to the chamber (e.g., supplied from a bottom electrode of the chamber (e.g., a pedestal)) and adjusting the first RF power to a second RF power. Adjusting the first RF power to the second RF power can cause the bonding structure (e.g., sp 2 vs sp 3 The first RF power can provide control of the carbon content. For example, a graded seasoning film can be provided in which the bond structure changes gradually from the side of the seasoning film disposed on the component to the side of the seasoning film disposed on the deposited film. For example, the first RF power can promote high intrinsic stress (at the first surface of the seasoning film) for beneficial adhesion to the chamber component, while the second RF power can provide low intrinsic stress (at the second side of the seasoning film) for beneficial adhesion to the deposited layer. The beneficial adhesion results in reduced delamination of the deposited film and / or the seasoning film compared to materials of conventional seasoning methods.

[0030] In some embodiments, the method includes adjusting the first RF power to the second RF power at a rate of about 20 W / sec to about 500 W / sec. In at least one embodiment, the first RF power and the second RF power are independently about 1 kW to about 6 kW. For example, the first RF power can be about 1 kW to about 4 kW and the second RF power can be about 4 kW to about 6 kW. A low RF power provides a material with high intrinsic stress, whereas a high RF power provides a material with low intrinsic stress.

[0031] In some embodiments, the seasoning film may have a thickness of about 100 nm to about 700 nm. The deposited film may have a thickness of about 500 nm to about 3 microns.

[0032] The method may further include introducing a nitrogen-containing gas into the seasoning film to form a nitrogen-treated seasoning film. Introducing the nitrogen-containing gas into the seasoning film may occur before depositing a deposition film on the seasoning film. In some embodiments, introducing the nitrogen-containing gas into the seasoning film occurs at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C. The nitrogen-containing gas may include any suitable nitrogen-containing gas, such as ammonia.

[0033] Introducing the nitrogen-containing gas to the seasoning film can include flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm, such as about 50 sccm to about 600 sccm. In some embodiments, introducing the nitrogen-containing gas to the seasoning film includes providing about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0034] Double-layer seasoning film In some embodiments, a method of seasoning a process chamber includes depositing a first seasoning film on a component of a process chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C., or about 200° C. to about 400° C. In some embodiments, the temperature is about 100° C. to about 200° C. Alternatively, in some embodiments, the temperature is about 200° C. to about 400° C., such as about 250° C. to about 300° C. Depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the process chamber. The method includes depositing a second seasoning film on the first seasoning film.

[0035] In some embodiments, the first seasoning film and / or the second seasoning film are amorphous carbon-containing films. In some embodiments, the first seasoning film and / or the second seasoning film independently have an intrinsic stress of about 300 MPa to about 800 MPa (compressive). In some embodiments, the first seasoning film has an intrinsic stress of about 550 MPa to about 800 MPa (compressive). In at least one embodiment, the second seasoning film has an intrinsic stress of about 300 MPa to about 550 MPa (compressive).

[0036] Depositing the second seasoning film on the first seasoning film can be performed at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. Depositing the second seasoning film can include flowing a second carbon-containing precursor gas and a second inert precursor gas into the process chamber.

[0037] The method may further include depositing a deposition film on the second seasoning film. Depositing the deposition film may include flowing a third carbon-containing precursor gas and a third inert precursor gas into the processing chamber. The second carbon-containing precursor gas is the same as or different from the first or third carbon-containing precursor gas, and the second inert precursor gas is the same as or different from the first or third inert precursor gas. Similarly, the third carbon-containing precursor gas is the same as or different from the first or second carbon-containing precursor gas, and the third inert precursor gas is the same as or different from the first or second inert precursor gas. In some embodiments, the first carbon-containing precursor gas and / or the second carbon-containing precursor gas include acetylene. In some embodiments, the first inert precursor gas and / or the second inert precursor gas include helium.

[0038] Depositing a first seasoning film on the component may include flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas. Depositing a second seasoning film on the first seasoning film may include adjusting the first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas to a second flow ratio. Adjusting the first flow ratio to the second flow ratio may improve the bonding structure (e.g., sp 2 vs sp 3 The present invention can provide control of the carbon content of the deposited film. For example, by rapidly adjusting the first flow ratio to the second flow ratio, a bilayer seasoning film can be provided having a change in bond structure from the side of the first seasoning film disposed on the component to the side of the second seasoning film disposed thereon with a deposited film. For example, the first flow ratio can promote high intrinsic stress (of the first seasoning film) for beneficial adhesion to the chamber component, while the second flow ratio can provide low intrinsic stress (of the second seasoning film) for beneficial adhesion to the deposited layer. The beneficial adhesion results in reduced delamination of the deposited film and / or seasoning film compared to materials of conventional seasoning methods.

[0039] In some embodiments, the first flow ratio is from about 1:1 to about 1:2. In at least one embodiment, the second flow ratio is from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0040] Adjusting the first flow ratio to the second flow ratio can occur at a rate of about 1 second or less, such as about 0.5 seconds or less.

[0041] In some embodiments, depositing a first seasoning film on the component includes providing a first RF power to the chamber. Depositing a second seasoning film on the first seasoning film can include adjusting the first RF power to a second RF power. Adjusting the first RF power to the second RF power can occur at a rate of about 1 second or less, such as about 0.5 seconds or less.

[0042] Depositing the deposition film over the second seasoning film can be performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C. Depositing the deposition film over the second seasoning film can be performed by flowing a third carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm.

[0043] In some embodiments, the first carbon-containing precursor gas, the second carbon-containing precursor gas, and / or the third carbon-containing precursor gas comprises acetylene. In some embodiments, the first inert precursor gas, the second inert precursor gas, and / or the third inert precursor gas comprises helium. Depositing a deposition film on the second seasoning film can include providing about 1 kW to about 6 kW of RF power to the processing chamber.

[0044] In at least one embodiment, flowing the first carbon-containing precursor gas and the first inert precursor gas into the processing chamber may include flowing the first carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm and / or flowing the first inert precursor gas into the processing chamber at a flow rate of about 150 sccm to about 800 sccm. Flowing the second carbon-containing precursor gas and the second inert precursor gas into the processing chamber may include flowing the second carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm. The flow rate of the second carbon-containing precursor gas may be different from the flow rate of the first carbon-containing precursor gas. Flowing the second inert precursor gas into the processing chamber may be performed at a flow rate of about 150 sccm to about 800 sccm. The flow rate of the second inert precursor gas may be different from the flow rate of the first inert precursor gas.

[0045] Depositing a first seasoning film on the component can include providing a first RF power to the chamber. Depositing a second seasoning film on the first seasoning film can include providing a second RF power to the chamber, where the second RF power is different from the first RF power. The first RF power can be adjusted to the second RF power. Providing the second RF power different from the first RF power can improve the bonding structure (e.g., sp 2 vs sp 3 For example, a graded seasoning film can be provided with a bond structure change from the side of the seasoning film disposed on the component to the side of the seasoning film with the deposited film disposed thereon by rapidly adjusting the first RF power to the second RF power. For example, the first RF power can promote high intrinsic stress (of the first seasoning film) for beneficial adhesion to the chamber component, while the second RF power can provide low intrinsic stress (of the second seasoning film) for beneficial adhesion to the deposited layer. The beneficial adhesion results in reduced delamination of the deposited film and / or the seasoning film compared to materials of conventional seasoning methods.

[0046] In some embodiments, the first RF power and the second RF power are independently between about 1 kW and about 6 kW. In at least one embodiment, the first RF power is between about 1 kW and about 3 kW, and the second RF power is between about 3 kW and about 6 kW.

[0047] In some embodiments, the first seasoning film and the second seasoning film can have a combined thickness of about 100 nm to about 700 nm. The ratio of the thickness of the first seasoning film to the second seasoning film can be about 2:1 to about 1:10, such as about 1:1. The deposited film can have a thickness of about 500 nm to about 3 microns.

[0048] The method may further include introducing a nitrogen-containing gas into the second seasoning film to form a nitrogen-treated seasoning film. The introducing of the nitrogen-containing gas into the second seasoning film may occur before depositing a deposition film on the second seasoning film. In some embodiments, the introducing of the nitrogen-containing gas into the second seasoning film occurs at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. The nitrogen-containing gas may include any suitable nitrogen-containing gas, such as ammonia.

[0049] Introducing the nitrogen-containing gas to the second seasoning film can include flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm, such as about 50 sccm to about 600 sccm. In some embodiments, introducing the nitrogen-containing gas to the second seasoning film includes providing about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0050] Multi-layer seasoning film The method of the present disclosure may include depositing a first seasoning film on a component of a processing chamber at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C. The temperature may be about 100° C. to about 200° C. Alternatively, the temperature may be about 200° C. to about 400° C., such as about 250° C. to about 300° C. The method may include depositing a plurality of additional seasoning films on the first seasoning film. The method may include depositing a deposition film on the plurality of additional seasoning films.

[0051] In some embodiments, the first seasoning film and / or one or more of the multiple additional seasoning films are amorphous carbon-containing films. In some embodiments, the first seasoning film and / or one or more of the multiple additional seasoning films independently have an intrinsic stress of about 300 MPa to about 800 MPa (compressive). In some embodiments, the first seasoning film has an intrinsic stress of about 550 MPa to about 800 MPa (compressive). In at least one embodiment, one or more of the multiple additional seasoning films independently have an intrinsic stress of about 300 MPa to about 550 MPa (compressive).

[0052] Depositing the first seasoning film can include flowing a first carbon-containing precursor gas and a first inert precursor gas into the process chamber.

[0053] The plurality of additional seasoning films may be, for example, about 3 additional seasoning films to about 14 additional seasoning films, such as about 4 additional seasoning films to about 10 additional seasoning films, about 4 additional seasoning films to about 8 additional seasoning films, etc. In some embodiments, depositing the plurality of additional seasoning films includes depositing a second seasoning film on the first seasoning film by flowing a second carbon-containing precursor gas and a second inert precursor gas into the processing chamber. Depositing the plurality of additional seasoning films may include depositing a third seasoning film on the second seasoning film by flowing a third carbon-containing precursor gas and a third inert precursor gas into the processing chamber. Depositing the plurality of additional seasoning films may include depositing a fourth seasoning film on the third seasoning film by flowing a fourth carbon-containing precursor gas and a fourth inert precursor gas into the processing chamber. The second, third, and fourth carbon-containing precursor gases are independently the same as each other or different from each other. In some embodiments, the first carbon-containing precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, and / or the fourth carbon-containing precursor gas include acetylene. The second, third, and fourth inert precursor gases are independently the same as each other or different from each other. In some embodiments, the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, and / or the fourth inert precursor gas include helium.

[0054] In some embodiments, depositing the plurality of additional seasoning films includes depositing a fifth seasoning film on the fourth seasoning film by flowing a fifth carbon-containing precursor gas and a fifth inert precursor gas into the processing chamber. The method may include depositing a sixth seasoning film on the fifth seasoning film by flowing a sixth carbon-containing precursor gas and a sixth inert precursor gas into the processing chamber. The method may include depositing a seventh seasoning film on the sixth seasoning film by flowing a seventh carbon-containing precursor gas and a seventh inert precursor gas into the processing chamber. The method may include depositing an eighth seasoning film on the seventh seasoning film by flowing an eighth carbon-containing precursor gas and an eighth inert precursor gas into the processing chamber. The fifth, sixth, seventh, and eighth carbon-containing precursor gases are independently the same as each other or different from each other. In some embodiments, the first carbon-containing precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, the fourth carbon-containing precursor gas, the fifth carbon-containing precursor gas, the sixth carbon-containing precursor gas, the seventh carbon-containing precursor gas, and / or the eighth carbon-containing precursor gas comprises acetylene. The fifth, sixth, seventh, and eighth inert precursor gases are independently the same as each other or different from each other. In some embodiments, the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, the fourth inert precursor gas, the fifth inert precursor gas, the sixth inert precursor gas, the seventh inert precursor gas, and / or the eighth inert precursor gas comprises helium.

[0055] In some embodiments, depositing one or more seasoning films of the plurality of additional seasoning films occurs at a chamber pressure of about 4 mTorr to about 20 mTorr and / or at a temperature of less than about 200° C. In at least one embodiment, depositing each seasoning film of the plurality of additional seasoning films occurs at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C.

[0056] In some embodiments, each seasoning film of the plurality of additional seasoning films has a different intrinsic stress than adjacent seasoning films of the plurality of additional seasoning films. For example, the third seasoning film has a different intrinsic stress than the second seasoning film and the fourth seasoning film. Similarly, in some embodiments, the second seasoning film has a different intrinsic stress than the first seasoning film and the third seasoning film. In some embodiments, the first seasoning film has substantially the same intrinsic stress as the third seasoning film, the fifth seasoning film, and / or the seventh seasoning film. In at least one embodiment, the second seasoning film has substantially the same intrinsic stress as the fourth seasoning film, the sixth seasoning film, and / or the eighth seasoning film.

[0057] Depositing a first seasoning film on the component may include flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas. Depositing a second seasoning film on the first seasoning film may include adjusting the first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas to a second flow ratio. Depositing a third seasoning film on the second seasoning film may include adjusting the second flow ratio of the second carbon-containing precursor gas to the second inert precursor gas to a third flow ratio. Depositing a fourth seasoning film on the third seasoning film may include adjusting the third flow ratio of the third carbon-containing precursor gas to the third inert precursor gas to a fourth flow ratio. In some embodiments, the first flow ratio and the third flow ratio are independently about 1:1 to about 1:2. The second flow ratio and the fourth flow ratio can be from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0058] Adjusting the first flow ratio to the second flow ratio, the second flow ratio to the third flow ratio, and / or the third flow ratio to the fourth flow ratio can independently occur at a rate of about 1 second or less, such as about 0.5 seconds or less.

[0059] Depositing a fifth seasoning film on the fourth seasoning film may include flowing a fifth carbon-containing precursor gas and a fifth inert precursor gas at a fifth flow ratio of the fifth carbon-containing precursor gas to the fifth inert precursor gas. Depositing a sixth seasoning film on the fifth seasoning film may include adjusting a fifth flow ratio of the fifth carbon-containing precursor gas to the fifth inert precursor gas to a sixth flow ratio. Depositing a seventh seasoning film on the sixth seasoning film may include adjusting a sixth flow ratio of the sixth carbon-containing precursor gas to the sixth inert precursor gas to a seventh flow ratio. Depositing an eighth seasoning film on the seventh seasoning film may include adjusting a seventh flow ratio of the seventh carbon-containing precursor gas to the seventh inert precursor gas to an eighth flow ratio. In some embodiments, the fifth flow ratio and the seventh flow ratio are independently about 1:1 to about 1:2. The sixth flow ratio and the eighth flow ratio can be from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0060] Adjusting the first flow ratio to the second flow ratio, the second flow ratio to the third flow ratio, the third flow ratio to the fourth flow ratio, the fourth flow ratio to the fifth flow ratio, the fifth flow ratio to the sixth flow ratio, the sixth flow ratio to the seventh flow ratio, and / or the seventh flow ratio to the eighth flow ratio can independently occur at a rate of about 1 second or less, such as about 0.5 seconds or less.

[0061] By adjusting the first flow ratio to a second flow ratio, the second flow ratio to a third flow ratio, the third flow ratio to a fourth flow ratio, etc., the bonding structure (e.g., sp 2 vs sp 3For example, by rapidly adjusting one flow rate ratio to another (e.g., alternating flow rates from 1 to 2 to 3 (e.g., same as 1) to 4 (e.g., same as 2), etc.), an alternating seasoning film structure can be provided in which the bonding structure alternates from one seasoning film to an adjacent seasoning film. Hybridization of the surface of the seasoning film (overall seasoning film structure) can affect the adhesion of the surface of the seasoning film structure to the chamber parts and deposition layers. sp 2 Higher properties result in increased intrinsic stress. For example, the first flow ratio, the third flow ratio, the fifth flow ratio, and / or the seventh flow ratio can provide high intrinsic stress (at the surface of the seasoning film) for beneficial adhesion to chamber parts, while the second flow ratio, the fourth flow ratio, the sixth flow ratio, and / or the eighth flow ratio can provide low intrinsic stress (throughout the seasoning film structure) for beneficial adhesion to the deposited layers. Alternating deposited films provide low intrinsic stress throughout the seasoning film structure (and low intrinsic stress in the individual films due to the thickness of each film), which promotes adhesion to adjacent components (such as chamber parts and deposited films). The beneficial adhesion results in reduced delamination of the deposited film and / or seasoning film compared to materials of conventional seasoning methods.

[0062] The method may include depositing a first seasoning film on the component by supplying a first RF power to the chamber. Depositing a second seasoning film on the first seasoning film may include adjusting the first RF power to a second RF power. Depositing a third seasoning film on the second seasoning film may include adjusting the second RF power to a third RF power. Depositing a fourth seasoning film on the third seasoning film may include adjusting the third RF power to a fourth RF power. Adjusting the first RF power to the second RF power, the second RF power to the third RF power, and / or the third RF power to the fourth RF power may be independently performed at a rate of about 1 second or less, such as about 0.5 seconds or less. In some embodiments, the first RF power, the second RF power, the third RF power, and / or the fourth RF power are independently about 1 kW to about 6 kW. In some embodiments, the first RF power and / or the third RF power are independently between about 1 kW and about 3 kW. In at least one embodiment, the second RF power and / or the fourth RF power are independently between about 3 kW and about 6 kW.

[0063] In some embodiments, depositing a fifth seasoning film on the fourth seasoning film includes adjusting the fourth RF power to a fifth RF power. Depositing a sixth seasoning film on the fifth seasoning film can include adjusting the fifth RF power to a sixth RF power. Depositing a seventh seasoning film on the sixth seasoning film can include adjusting the sixth RF power to a seventh RF power. Depositing an eighth seasoning film on the seventh seasoning film includes adjusting the seventh RF power to an eighth RF power. Adjusting the first RF power to the second RF power, the second RF power to the third RF power, the third RF power to the fourth RF power, the fourth RF power to the fifth RF power, the fifth RF power to the sixth RF power, the sixth RF power to the seventh RF power, and / or the seventh RF power to the eighth RF power can be independently performed at a rate of about 1 second or less, such as about 0.5 seconds or less. In some embodiments, the first RF power, the second RF power, the third RF power, the fourth RF power, the fifth RF power, the sixth RF power, the seventh RF power, and / or the eighth RF power are independently between about 1 kW and about 6 kW. In at least one embodiment, the first RF power, the third RF power, the fifth RF power, and / or the seventh RF power are independently between about 1 kW and about 3 kW. The second RF power, the fourth RF power, the sixth RF power, and / or the eighth RF power can independently be from about 3 kW to about 6 kW.

[0064] By adjusting the first RF power to the second RF power, the second RF power to the third RF power, the third RF power to the fourth RF power, etc., the bonding structure (e.g., sp 2 vs sp 3For example, by rapidly adjusting one RF power to another (e.g., alternating RF power from 1 to 2 to 3 (e.g., same as 1) to 4 (e.g., same as 2), etc.), an alternating seasoning film structure can be provided in which the bonding structure alternates from one seasoning film to an adjacent seasoning film. Hybridization of the surface of the seasoning film (overall seasoning film structure) can affect the adhesion of the surface of the seasoning film structure to the chamber parts and deposition layers. sp 2 Higher properties result in increased intrinsic stress. For example, the first RF power, the third RF power, the fifth RF power, and / or the seventh RF power can provide high intrinsic stress (at the surface of the seasoning film) for beneficial adhesion to chamber parts, while the second RF power, the fourth RF power, the sixth RF power, and / or the eighth RF power can provide low intrinsic stress (at the second side of the entire seasoning film structure) for beneficial adhesion to the deposition layer. The alternating deposition films result in low intrinsic stress of the entire seasoning film structure, which promotes adhesion to adjacent parts (such as chamber parts and deposition films). The beneficial adhesion results in reduced delamination of the deposition film and / or seasoning film compared to materials of conventional seasoning methods.

[0065] In some embodiments, flowing the first carbon-containing precursor gas and the first inert precursor gas into the processing chamber includes flowing the first carbon-containing precursor gas into the processing chamber at a flow rate between about 100 sccm and about 600 sccm and / or flowing the first inert precursor gas into the processing chamber at a flow rate between about 150 sccm and about 800 sccm.

[0066] In some embodiments, the first inert precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, and / or the fourth carbon-containing precursor gas are independently flowed at a flow rate between about 100 sccm and about 600 sccm. The first inert precursor gas, the second inert precursor gas, the third inert precursor gas, and the fourth inert precursor gas are independently flowed at a flow rate between about 150 sccm and about 800 sccm.

[0067] In some embodiments, the flowing of the first inert precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, the fourth carbon-containing precursor gas, the fifth carbon-containing precursor gas, the sixth carbon-containing precursor gas, the seventh carbon-containing precursor gas, and / or the eighth carbon-containing precursor gas into the processing chamber may be independently performed at a flow rate between about 100 sccm and about 600 sccm. The flowing of the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, the fourth inert precursor gas, the fifth inert precursor gas, the sixth inert precursor gas, the seventh inert precursor gas, and / or the eighth inert precursor gas into the processing chamber may be independently performed at a flow rate between about 150 sccm and about 800 sccm.

[0068] The first seasoning film and the multiple additional seasoning films have a combined thickness of about 100 nm to about 700 nm. For example, the first seasoning film can have a thickness of about 10 nm to about 100 nm. One or more of the multiple additional seasoning films can independently have a thickness of about 10 nm to about 100 nm. The deposited film can have a thickness of about 500 nm to about 3 microns.

[0069] In some embodiments, depositing the deposition film over the multiple additional seasoning films is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. Depositing the deposition film over the multiple additional seasoning films can be performed by flowing a carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm. Depositing the deposition film over the multiple additional seasoning films can include providing an RF power of about 1 kW to about 6 kW to the processing chamber.

[0070] The method may further include introducing a nitrogen-containing gas into one or more of the plurality of additional seasoning films to form a nitrogen-treated seasoning film. For example, a film of the plurality of films may have a surface exposed to the interior chamber volume, e.g., the film may be a film / the film on which a deposition film is deposited. Introducing the nitrogen-containing gas into the film of the plurality of additional seasoning films may occur before depositing the deposition film on the film of the plurality of additional seasoning films. In some embodiments, introducing the nitrogen-containing gas into the film occurs at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. The nitrogen-containing gas may include any suitable nitrogen-containing gas, such as ammonia.

[0071] Introducing the nitrogen-containing gas to the film can include flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm, such as about 50 sccm to about 600 sccm. In some embodiments, introducing the nitrogen-containing gas to the second seasoning film includes providing about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0072] Chamber Hardware The methods of the present disclosure can be performed in substrate processing chambers utilized for substrate processing in the manufacture of electronic devices, including deposition processes, etch processes, and other low pressure, plasma, and thermal processes used to manufacture electronic devices on substrates.

[0073] 2 is a schematic cross-sectional side view of an exemplary processing chamber 200 suitable for performing a seasoning process. In one embodiment, the processing chamber 200 can be configured to deposit a highly patterned film, such as a hardmask film, e.g., an amorphous carbon hardmask film, on a substrate. The processing chamber 200 includes a lid 300, a spacer 210 disposed on a chamber body 292, a substrate support 215, and a variable pressure system 220. A processing volume 260 exists inside the spacer 210 between the lid 300 and the substrate support 215.

[0074] The lid 300 is coupled to a first process gas source 240. The first process gas source 240 can include a process gas, such as a precursor gas, for forming a film on a substrate 218 supported on a substrate support 215. By way of example, the precursor gas can include a carbon-containing gas. By way of example, the precursor gas can include an inert gas. By way of example, the precursor gas can include helium. By way of example, the precursor gas can include one or more other gases. By way of example, the precursor gas can include a combination of gases. In some embodiments, the precursor gas can be acetylene (C 2 H 2 ).

[0075] The second process gas source 242 is fluidly coupled to the process volume 260 via an inlet 244 disposed through the spacer 210. By way of example, the second process gas source 242 may include a process gas, such as a precursor gas. By way of example, the precursor gas may include a carbon-containing gas. By way of example, the precursor gas may include an inert gas. By way of example, the precursor gas may include helium. By way of example, the precursor gas may include one or more other gases. By way of example, the precursor gas may include a combination of gases. In some embodiments, the precursor gas may include a C2 H 2 Includes.

[0076] In some embodiments, the total flow rate of precursor gases into the process volume 260 for deposition on a substrate, such as a wafer, can be from about 200 sccm to about 2 slm. In some embodiments, the flow rate of precursor gases from the second process gas source 242 into the process volume 260 can be adjusted relative to the flow rate of precursor gases from the first process gas source 240 into the process volume 260 such that the combined precursor gases are uniformly distributed within the process volume 260. A plurality of inlets 244 are distributed circumferentially around the spacer 210. In one example, the gas flow into each of the inlets 244 can be individually controlled to further promote uniform distribution of the precursor gases within the process volume 260.

[0077] The lid 300 includes a plate 302. The plate 302 is coupled to the spacer 210 via a riser 205, although it is contemplated that the riser 205 may be omitted and the plate 302 may be coupled directly to the spacer 210. In some embodiments, which may be combined with other embodiments, the riser 205 may be integral with the plate 302. The lid 300 includes a heat exchanger 224. The heat exchanger 224 may be attached to the plate 302 or may be integral with the plate 302. The heat exchanger 224 includes an inlet 226 and an outlet 228. In embodiments in which the heat exchanger 224 is integral with the plate 302, a heat exchange fluid may flow from the inlet 226 through channels 230 formed in the plate 302 and out the outlet 228.

[0078] The plate 302 is bonded to or integral with the manifold 246. The plate 302 is coupled to a remote plasma source 262 by a conduit 250, such as a mixing ampoule, having an axial through hole 252 that facilitates the flow of plasma through the conduit 250. Although the conduit 250 is shown as coupled to the manifold 246, it is contemplated that the manifold 246 may be integral with the conduit 250 such that the conduit 250 may be directly coupled to the plate 302. The manifold 246 is coupled to a first process gas source 240 and a purge gas source 256. Both the first process gas source 240 and the purge gas source 256 may be coupled to the manifold 246 by valves (not shown).

[0079] The lid 300 may be coupled to a remote plasma source 262, although in some embodiments, the remote plasma source 262 may be omitted. If present, the remote plasma source 262 may be coupled to a cleaning gas source 266 via a supply line for providing cleaning gas to the process volume 260. If the remote plasma source 262 is not present, the cleaning gas source 266 may be directly coupled to the conduit 250. If the remote plasma source 262 is not present, the cleaning gas source 266 may be indirectly coupled to the conduit 250. The cleaning gas may be supplied through the conduit 250. Additionally or alternatively, in some embodiments, the cleaning gas is provided through a channel that also carries the precursor gas into the process volume 260. By way of example, the cleaning gas may be molecular oxygen (O 2 ) and / or ozone (O 3 ), etc. In one example, the cleaning gas may include an oxygen-containing gas such as NF 3 By way of example, the cleaning gas may include one or more other gases. By way of example, the cleaning gas may include a combination of gases.

[0080] The substrate support 215 is coupled to an RF power source 270. The RF power source 270 can be a low frequency RF power source (e.g., about 2 MHz to about 13.56 MHz). It should be noted that other frequencies are also contemplated. In some implementations, the RF power source 270 is a mixed frequency RF power source that provides both high frequency and low frequency power. The use of a dual frequency RF power source enhances the deposition of the film. In one example, the RF power source 270 provides dual frequency power. A first frequency of about 2 MHz to about 13.56 MHz improves the injection of chemical species into the deposited film, while a second frequency of about 13.56 MHz to about 120 MHz increases the ionization and deposition rate of the film.

[0081] The RF power source 270 can be utilized in generating or maintaining a plasma in the process volume 260. For example, the RF power source 270 can be utilized during a deposition process. During a deposition or etching process, the RF power source 270 provides a power of about 100 watts (W) to about 20,000 W in the process volume 260 to promote ionization of the precursor gas. In an embodiment that can be combined with other embodiments described herein, the RF power source 270 is pulsed. In another embodiment that can be combined with other embodiments described herein, the precursor gas for deposition includes helium and acetylene. In an embodiment that can be combined with other embodiments described herein, acetylene is provided at a flow rate of about 10 sccm to about 1,000 sccm and helium is provided at a flow rate of about 50 sccm to about 10,000 sccm for deposition.

[0082] The substrate support 215 is coupled to an actuator 272 (i.e., a lift actuator) that effects its movement in the Z direction. The substrate support 215 is also coupled to a flexible facility cable 278 that allows vertical movement of the substrate support 215 while maintaining communication with a second RF power source 270 and other power and fluid connections. The spacer 210 is disposed on the chamber body 292. The height of the spacer 210 allows vertical movement of the substrate support 215 within the processing volume 260. The processing volume 260 defines an inner diameter of the chamber. In some embodiments, the inner diameter of the chamber is from about 10 inches to about 25 inches, such as from about 15 inches to about 20 inches. The height of the spacer 210 can be from about 0.5 inches to about 20 inches, such as from about 3 inches to about 20 inches, such as from about 5 inches to about 15 inches, such as from about 7 inches to about 10 inches. In one example, the substrate support 215 is movable from a first distance 274 to a second distance 276 relative to the lid 300 (e.g., relative to the datum 280 of the plate 302). In one embodiment, which can be combined with other embodiments, the second distance 276 is about two-thirds the first distance 274. For example, the difference between the first distance 274 and the second distance can be about 5 inches to about 6 inches. Thus, from the position shown in FIG. 1, the substrate support 215 is movable from about 5 inches to about 6 inches relative to the datum 280 of the plate 302. In another example, the substrate support 215 is fixed at one of the first distance 274 and the second distance 276.

[0083] In contrast to conventional plasma enhanced chemical vapor deposition (PECVD) processes, the spacers 210 significantly increase the distance (and therefore the volume therebetween) between the substrate support 215 and the lid assembly 300. The increased distance between the substrate support 215 and the lid 300 reduces the bombardment of ionized species within the process volume 260, resulting in the deposition of a film with less intrinsic stress. Films deposited with less intrinsic stress promote improved planarity (e.g., less bowing) of the substrate on which the film is formed. Reduced substrate bowing results in improved accuracy of downstream patterning operations.

[0084] The variable pressure system 220 includes a first pump 282 and a second pump 284. The first pump 282 is a roughing pump that can be utilized during a cleaning process and / or a substrate transfer process. A roughing pump is generally configured to move a higher volumetric flow rate and / or operate at a relatively high (but still subatmospheric) pressure. In one example, the first pump 282 maintains a pressure in the processing chamber 200 below 50 mTorr during a cleaning process. In another example, the first pump 282 maintains a pressure in the processing chamber 200 between about 0.5 mTorr and about 10 Torr. The utilization of a roughing pump during a cleaning operation facilitates a relatively high pressure and / or volumetric flow rate of the cleaning gas (compared to a deposition operation). The relatively high pressure and / or volumetric flow rate during a cleaning operation improves cleaning of the chamber surfaces.

[0085] The second pump 284 can be a turbo pump or a cryogenic pump. The second pump 284 is utilized during the deposition process. The second pump 284 is generally configured to operate at a relatively low volumetric flow rate and / or pressure. For example, the second pump 284 is configured to maintain the processing volume 260 of the processing chamber at a pressure of less than about 50 mTorr. In another example, the second pump 284 maintains the pressure in the processing chamber at about 0.5 mTorr to about 10 Torr. The reduced pressure in the processing volume 260 maintained during deposition may provide reduced neutral stress and / or sp when depositing a carbon-based hardmask. 2 -sp 3 The conversion promotes increased film deposition. Thus, the processing chamber 200 is configured to utilize both relatively low pressures to improve deposition or seasoning, and relatively high pressures to improve cleaning.

[0086] In some embodiments, which may be combined with other embodiments described herein, both the first pump 282 and the second pump 284 are utilized during the deposition process to maintain the processing volume 260 of the processing chamber at a pressure less than about 50 mTorr. In other embodiments, the first pump 282 and the second pump 284 maintain the processing volume 260 at a pressure between about 0.5 mTorr and about 10 Torr. A valve 286 is utilized to control the conductance path to one or both of the first pump 282 and the second pump 284. The valve 286 also provides symmetric pumping from the processing volume 260.

[0087] The processing chamber 200 also includes a substrate transfer port 285. The substrate transfer port 285 is selectively sealed by an inner door 290 and / or an outer door 291. Each of the doors 290 and 291 is coupled to an actuator 288 (i.e., a door actuator). The doors 290 and 291 facilitate vacuum sealing of the processing volume 260. The doors 290 and 291 also provide symmetrical RF application and / or plasma symmetry within the processing volume 260. In one example, at least the inner door 290 is formed of a material that facilitates conductance of RF power, such as stainless steel, aluminum, or alloys thereof. A seal 293, such as an O-ring, disposed at the interface of the spacer 210 and the chamber body 292 further seals the processing volume 260. A controller 294 is configured to control aspects of the processing chamber 200 during processing.

[0088] The controller 294 can be a processor-based system controller. For example, the controller 294 can be configured to control the components and process parameters of the process chamber 200. The controller 294 can include a programmable central processing unit (CPU) operable with memory and mass storage devices coupled to various components of the process chamber 200 to facilitate control of the process, an input control unit, a display unit, power supplies, clocks, cache, input / output (I / O) circuits, etc.

[0089] FIG. 3A is a partial cross-sectional view of a lid 300 of some embodiments. As shown in FIG. 3A, the baffle 258 may be omitted. The lid 300 includes a plate 302. The plate 302 has a first surface 304 and a second surface 306 opposite the first surface 304. In some embodiments, the second surface 306 of the plate 302 may be shaped or contoured. The plate 302 may have a recess 308 in the first surface 304. The recess 308 has an opening 310 and a sidewall 312 that extends from the opening 310 to a floor 316 within the plate 302. In some embodiments, the opening 310 defines a circle. For purposes of the following geometric description, the plate 302 may have an axis 314 that is approximately perpendicular to the first surface 304 and thus extends between the first surface 304 and the second surface 306.

[0090] 3A , the sidewall 312 extends from the opening 310 to the floor 316 at an acute angle 318 with respect to a reference line 314′ that is parallel to the axis 314. Thus, the sidewall 312 extends from the opening 310 to the floor 316 at an acute angle 318 with respect to the axis 314. However, it is contemplated that the sidewall 312 may extend approximately parallel to the axis 314 from the opening 310 to the floor 316. The acute angle 318 may be between 0 and 80 degrees, such as between 0 and 70 degrees, such as between 0 and 60 degrees, such as between 0 and 50 degrees, such as between 0 and 40 degrees, such as between 0 and 30 degrees, such as between 0 and 20 degrees, such as between 0 and 10 degrees. In some embodiments, as shown in FIG. 3A, the sidewall 312 can extend from the opening 310 to the floor 316 such that the cross-sectional area of ​​the opening 310 is smaller than the cross-sectional area of ​​the floor 316, defining a frusto-conical shape.

[0091] An array 320 of holes 322 extends from the recess 308 through the plate 302 to the second surface 306. Each hole 322 extends from a corresponding inlet 324 in the recess 308 to a corresponding outlet 326 in the second surface 306. Each inlet 324 is located in the floor 316 of the recess 308. However, it is contemplated that each inlet 324 may be located in a sidewall 312 of the recess 308, or each inlet 324 may be located at the intersection of the sidewall 312 and floor 316 of the recess 308. In some embodiments, which can be combined with other embodiments, the inlet 324 of one or more holes 322 in the array 320 of holes 322 may be located in one of the floor 316, the sidewall 312, or an intersection of the floor 316 and the sidewall 312, and the inlet 324 of one or more other holes 322 in the array 320 of holes 322 may be located in another of the floor 316, the sidewall 312, or an intersection of the floor 316 and the sidewall 312. In other words, the array 320 has a plurality of holes 322, each having an inlet 324, where the inlet 324 is independently located in one of the floor 316, the sidewall 312, or an intersection of the floor 316 and the sidewall 312.

[0092] Each hole 322 has a trajectory that extends through the plate 302 at an acute angle 328 relative to the axis 314. The acute angle 328 is between 0 and 80 degrees, such as between 0 and 70 degrees, such as between 0 and 60 degrees, such as between 0 and 50 degrees, such as between 0 and 40 degrees, such as between 0 and 30 degrees, such as between 0 and 20 degrees, such as between 0 and 10 degrees. However, it is contemplated that at least one hole 322 may have a trajectory that is parallel to the axis 314. Furthermore, it is contemplated that each hole 322 may have a trajectory that is parallel to the axis 314.

[0093] As shown in FIG. 3A , the second surface 306 includes a protrusion 330. In some embodiments, which may be combined with other embodiments, each outlet 326 may be located at the protrusion 330. However, other configurations are contemplated. For example, each outlet 326 may not be located at the protrusion 330, or each outlet 326 may be located at the base of the protrusion 330. In some embodiments, which may be combined with other embodiments, the outlet 326 of one or more holes 322 of the array 320 of holes 322 may be located at one of the protrusion 330, the base of the protrusion 330, or a portion of the second surface 306 remote from the protrusion 330, and the outlet 326 of one or more other holes 322 of the array 320 of holes 322 may be located at another location of the protrusion 330, the base of the protrusion 330, or a portion of the second surface 306 remote from the protrusion 330. In other words, the array 320 has a plurality of holes 322 each having an outlet 326, where each outlet 326 is independently located in the protrusion 330, the base of the protrusion 330, or a portion of the second surface 306 away from the protrusion 330.

[0094] The protrusion 330 is shaped like a frustum having a side 332 and an end 334, although other configurations are contemplated. In some embodiments, the protrusion 330 may be shaped like a sphere, an ellipsoid, or a portion of a cylinder. In some embodiments that may be combined with other embodiments, each outlet 326 may be located on the side 332, or each outlet 326 may be located on the end 334, or each outlet 326 may be located at an intersection 2 of the side 332 and the end 334. In some embodiments that may be combined with other embodiments, the outlet 326 of one or more holes 322 in the array 320 of holes 322 may be located on one of the side 332, the end 334, or the intersection of the side 332 and the end 334, and the outlet 326 of one or more other holes 322 in the array 320 of holes 322 may be located at another of the side 332, the end 334, and the intersection of the side 332 and the end 334. In other words, the array 320 has a plurality of holes 322, each having an outlet 326 independently located at one of a side surface 332, an end surface 334, or an intersection of a side surface 332 and an end surface 334. In some embodiments, which can be combined with other embodiments, the angle 336 at which the trajectory of each hole 322 whose outlet 326 is located at the side surface 332 intersects with the side surface 332 may be approximately 90 degrees.

[0095] The plate 302 includes a centrally located showerhead 340 that includes a protrusion 330 (if present) and an array 320 of holes 322. As shown in FIG. 3A, the showerhead 340 is integral with the plate 302. However, it is contemplated that the showerhead 340 may be permanently attached to the plate 302 or may be removably attached to the plate 302. The arrangement of the showerhead 340 and plate 302, particularly in embodiments in which the showerhead 340 is integral with the plate 302, facilitates the entire enclosure of the process volume 260 (including the plate 302, the risers 205 (if present), and the spacers 210) being fully grounded during use, thereby suppressing the generation of parasitic plasma.

[0096] The array 320 of holes 322 may be arranged as a single ring of holes 322 or multiple rings of holes 322. The holes 322 of the array 320 of holes 322 may be substantially uniformly spaced in the ring. The holes 322 of the array 320 of holes 322 may be non-uniformly spaced in the ring. When multiple rings of holes 322 are utilized, the multiple rings of holes 322 may be concentric, non-concentric, or arranged in a cluster. In some embodiments, which may be combined with other embodiments, some of the multiple rings of holes 322 may be arranged in one of concentric, non-concentric, and clustered, and other of the multiple rings of holes 322 may be arranged in another of concentric, non-concentric, and clustered.

[0097] Other arrangements of the holes 322 are also contemplated. For example, at least some of the holes 322 in the array 320 of holes 322 may be arranged into other geometric patterns, such as lines, triangles, squares, pentagons, hexagons, etc. Additionally or alternatively, at least some of the holes 322 in the array 320 of holes 322 may be arranged as clusters of holes 322 that define a regular pattern, such as a pattern that displays one or more uniform spacing dimensions between pairs of adjacent holes 322. Additionally or alternatively, at least some of the holes 322 in the array 320 of holes 322 may be arranged as clusters of holes 322 that define an irregular pattern, such as a pattern that displays non-uniform spacing dimensions between pairs of adjacent holes 322.

[0098] 3B, the array 320 of holes 322 is arranged as two rings of holes 322, a first ring 342 and a second ring 348. In some embodiments, which can be combined with other embodiments, the angles 328 of orbit of each hole 322 in the array 320 of holes 322 may be substantially the same, for example, within 1 degree of each other. However, it is contemplated that the angles 328 of orbit of some holes 322 in the array 320 of holes 322 may be different from the angles 328 of orbit of other holes 322 in the array 320 of holes 322.

[0099] The diameter of each hole 322 in the array 320 of holes 322 may be approximately the same as the diameter of each other hole 322, as determined by standard manufacturing tolerances. However, it is contemplated that the diameter of the array 320 of holes 322 may be different from the diameter of the other holes 322 in the array 320 of holes 322. For example, holes 322 having a first diameter may be arranged into a first cluster or geometric shape or pattern, and holes 322 having a second diameter different from the first diameter may be arranged into a second cluster or geometric shape or pattern. In such an example, the first cluster or geometric shape or pattern may have a size, shape, and / or pattern similar to the size, shape, and / or pattern of the second cluster or geometric shape or pattern. Additionally or alternatively, the first cluster or geometric shape or pattern may have a size, shape, and / or pattern different from the size, shape, and / or pattern of the second cluster or geometric shape or pattern.

[0100] In some embodiments, which may be combined with other embodiments, the diameter of each hole 322 in the array 320 of holes 322 may be substantially uniform. In some embodiments, the diameter of each hole 322 in the array 320 of holes 322 may be substantially non-uniform. For example, the diameter of each hole 322 may taper from a larger diameter at each inlet 324 to a smaller diameter at each outlet 326. Alternatively, the diameter of each hole 322 may taper from a smaller diameter at each inlet 324 to a larger diameter at each outlet 326. Alternatively, the diameter of each hole 322 may be uniform along a portion of the length of each hole 322 and transition to a different diameter such that the diameter of each hole 322 at the inlet 324 may be larger or smaller than the diameter of each hole 322 at the outlet 326. In some embodiments, which can be combined with other embodiments, the diameters of some holes 322 in the array 320 of holes 322 may be substantially uniform and the diameters of other holes 322 in the array 320 of holes 322 may be substantially non-uniform.

[0101] The sizing of each hole 322 in the array 320 of holes 322 may be selected by determining any one or more of the length of the hole 322, the diameter of the hole 322, the change in diameter of the hole 322 along the length of the hole 322, or the trajectory of each hole 322. In some embodiments, which may be combined with other embodiments, the number and / or sizing of the holes 322 in the array 320 of holes 322 may be selected according to one or more predetermined operational parameters or constraints. For example, the number and / or sizing of the holes 322 in the array 320 of holes 322 may be selected according to one or more ranges of values ​​of the one or more predetermined operational parameters or constraints. Exemplary operating parameters or constraints may include, but are not limited to, any one or more of the following: a thickness of a sheath of plasma generated during operation; a pressure of gas at the inlet 324 of each hole 322; a pressure of gas at the outlet 326 of each hole 322; an average velocity of gas through each hole 322; a velocity of gas in each hole 322 at the inlet 324 of each hole 322; a velocity of gas in each hole 322 at the outlet 326 of each hole 322; a total volumetric flow rate of gas through the holes 322; a total volumetric flow rate of gas through a group of holes 322 in the array 320 of holes 322;

[0102] The number of holes 322 and / or sizing of the holes 322 in the array 320 of holes 322 can be selected according to the pressure of the gas at the inlet 324 of each hole 322, which can be from about 0.01 Torr to about 10 Torr, for example, from about 0.01 Torr to about 5 Torr, for example, from about 0.01 Torr to about 3 Torr, for example, from about 0.1 Torr to about 3 Torr, for example, from about 1 Torr to about 3 Torr.

[0103] The number of holes 322 and / or sizing of the holes 322 in the array 320 of holes 322 can be selected according to the pressure of the gas at the outlet 326 of each hole 322, which can be from about 1 mTorr to about 1 Torr, for example, from about 1 mTorr to about 0.5 Torr, for example, from about 1 mTorr to about 0.1 Torr, for example, from about 1 mTorr to about 50 mTorr, for example, from about 1 mTorr to about 20 mTorr.

[0104] It is further contemplated that the number of holes 322 in the array 320 of holes 322 may be selected according to one or more predetermined operational parameters or constraints, and the sizing of the holes 322 may be selected according to one or more other predetermined operational parameters or constraints. For example, the diameter of each hole 322 may be selected according to any one or more of the following: a sheath thickness of a plasma generated during operation, a pressure of gas at the inlet 324 of each hole 322, a pressure of gas at the outlet 326 of each hole 322, an average velocity of gas through each hole 322, a velocity of gas in each hole 322 at the inlet 324 of each hole 322, a velocity of gas in each hole 322 at the outlet 326 of each hole 322, and the like; and the number of holes 322 in the array 320 of holes 322 may be selected according to one or more of the following: a thickness of a sheath of a plasma generated during operation, a pressure of gas at the inlet 324 of each hole 322, a pressure of gas at the outlet 326 of each hole 322, an average velocity of gas through each hole 322, a velocity of gas in each hole 322 at the inlet 324 of each hole 322, a velocity of gas in each hole 322 at the outlet 326 of each hole 322, and the like. may be selected according to any one or more of the following: the pressure of gas at the inlet 324 of each hole 322, the pressure of gas at the outlet 326 of each hole 322, the average velocity of gas through each hole 322, the velocity of gas in each hole 322 at the inlet 324 of each hole 322, the velocity of gas in each hole 322 at the outlet 326 of each hole 322, the total volumetric flow rate of gas through the holes 322, the total volumetric flow rate of gas through a group of holes 322 in the array 320 of holes 322, etc.

[0105] In some embodiments, which can be combined with other embodiments, each hole 322 in the array 320 of holes 322 can be sized to have a diameter that is less than or equal to 5 times the thickness of the sheath of the plasma generated during operation, such as less than or equal to 4 times the thickness of the sheath of the plasma generated during operation, such as less than or equal to 3 times the thickness of the sheath of the plasma generated during operation, such as less than or equal to 2 times the thickness of the sheath of the plasma generated during operation, such as less than or equal to the thickness of the sheath of the plasma generated during operation.

[0106] It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the outlet 326 of each hole 322 is less than Mach 1 but greater than or equal to half Mach 1. It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the outlet 326 of each hole 322 is substantially equal to Mach 1. It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the outlet 326 of each hole 322 is greater than Mach 1 but less than or equal to Mach 2.

[0107] It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the inlet 324 of each hole 322 is less than Mach 1. It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the inlet 324 of each hole 322 is substantially equal to Mach 1. It is further contemplated that the number and / or diameter of the holes 322 in the array 320 of holes 322 may be selected such that the velocity of the gas in each hole 322 at the inlet 324 of each hole 322 is greater than Mach 1 and less than or equal to Mach 2.

[0108] As shown in FIG. 3A, part of the assembly includes a plate 302 of a lid 300. A conduit 250 is attached to a first surface 304 of the plate 302. The conduit 250 has a through hole 252 that is substantially aligned with the recess 308. The conduit 250 is attached to the first surface 304 of the plate 302 by one or more fasteners 358. As shown, the first surface 304 of the plate 302 includes one or more openings 362 for receiving corresponding fasteners 358, such as bolts, screws, studs, dowel pins, etc. Additionally or alternatively, the first surface 304 can include one or more protrusions for connecting the plate 302 to the conduit 250, and it is contemplated that the protrusions may be threaded. A seal groove 364 in the first surface 304 of the plate 302 is located between the one or more fasteners 358 and the recess 308 and surrounds an opening 310 to the recess 308. When multiple fasteners 358 are utilized, it is contemplated that the fasteners 358 surround the seal groove 364. As shown in FIGURE 3A, a seal member 366, such as an O-ring, is installed in the seal groove 364, thereby sealing the interface between the plate 302 and the conduit 250. It is contemplated that the seal member 366 may contact a portion of the conduit 250 or a flange, or other structure associated with the conduit 250, such as the manifold 246.

[0109] The conduit 250 is shown coupled to a remote plasma source 262, a portion of which is shown in FIG. 3A. The through-hole 252 may be substantially aligned with an outlet 368 of the remote plasma source 262. The through-hole 252 may have a substantially uniform inner diameter along the length of the conduit 250 from the outlet 368 of the remote plasma source 262 to the first surface 304 of the plate 302; however, it is contemplated that the through-hole 252 may include a restriction 370 midway along the length of the conduit 250 from the outlet 368 of the remote plasma source 262 to the first surface 304 of the plate 302, as shown in the example of FIG. 3A.

[0110] As shown in FIG. 3A, the conduit 250 incorporates a manifold 246. The manifold 246 is coupled to the first process gas source 240 via a valve 372. In some embodiments, the manifold 246 may provide a single point of entry for process gas into the conduit 250, however, it is contemplated that the manifold 246 may provide multiple points of entry for process gas into the conduit 250. In some embodiments, the manifold 246 may be coupled to a purge gas source 256, however, it is contemplated that the conduit 250 may be coupled to the purge gas source 256 at a location on the conduit 250 other than the manifold 246. For example, the conduit 250 may be coupled to the purge gas source 256 at a location at or near the top of the conduit 250. As shown in FIG. 3A, the conduit 250 includes a heat exchanger 374, such as a tube configured to carry a heat exchange fluid. However, it is contemplated that the heat exchanger 374 may be omitted.

[0111] During operation, a purge gas (an inert gas(es)) from the purge gas source 256 enters the conduit 250 and mixes with the gas from the first process gas source 240. The combined gases exit the conduit 250 and flow through the holes 322 in the plate 302 into the process volume 260. A cleaning cycle of operation includes cleaning gas passing through the conduit 250, through the holes 322 in the plate 302, and into the process volume 260. It is contemplated that the cleaning gas may be mixed with the purge gas in the conduit 250 before the combined gases flow through the holes 322 in the plate 302 into the process volume 260. It is further contemplated that a plasma from a remote plasma source 262 may enter the conduit 250 and mix with the purge gas in the conduit 250 before the combined plasma and gas flow flows through the holes 322 in the plate 302 into the process volume 260.

[0112] The embodiments of the present disclosure provide many benefits to the operation of the processing chamber 200, including the reduction or elimination of certain undesirable effects. An example of an undesirable effect relates to the plate 302, which provides a path for passing components upstream of the lid 300. For example, RF can enter the conduit 250, through the remote plasma source 262, and into the supply line leading from the cleaning gas source 266 to the remote plasma source 262. This can lead to the establishment of a standing wave plasma, which can cause deposition in the conduit 250, the remote plasma source 262, and the supply line.

[0113] Another undesirable effect mitigated by embodiments of the present disclosure relates to low operating pressures and low gas velocities in the process volume 260, which cause back-diffusion of radicals into the conduit 250, the remote plasma source 262, and the supply lines. Such back-diffusion of radicals can cause or contribute to deposition within the conduit 250, the remote plasma source 262, and the supply lines.

[0114] Moreover, the above undesirable effects may affect the operation of the processing chamber 200 to the extent that they cause airborne deposition within the processing volume 260, such as on the lid 300, on the spacers 210, and / or on the substrate 218 and films deposited thereon. Such airborne deposition may cause defects in the substrate 218 and films deposited thereon.

[0115] The arrangement of the showerhead 340 and plate 302, particularly in embodiments where the showerhead 340 is integral with the plate 302, facilitates the entire enclosure of the process volume 260 (including the plate 302, the risers 205 (if present), and the spacers 210) being fully grounded during use, thereby suppressing the creation of parasitic plasma. Thus, embodiments of the present disclosure can suppress unwanted RF traversal upstream, thereby preventing the creation of standing wave plasma and preventing parasitic deposition.

[0116] Additionally, embodiments of the present disclosure can promote the velocity of gas entering the processing volume 260 through the lid 300 to be sufficient to suppress back-diffusion of radicals. Thus, embodiments of the present disclosure can prevent upstream airborne deposition. Furthermore, the velocity of gas entering the processing volume 260 through the lid 300 can be sufficient to suppress airborne deposition within the processing volume 260, thereby reducing the incidence and magnitude of defects in the substrate 218 and the film deposited thereon.

[0117] Additional Aspects The present disclosure provides, inter alia, the following aspects, each of which can be considered to optionally include any alternative aspects.

[0118] Section 1 1. A method of seasoning a processing chamber, comprising: depositing a seasoning film on the processing chamber components at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C.; depositing a deposition film on the seasoning film; A method comprising:

[0119] Section 2 2. The method of claim 1, wherein the temperature is from about 100° C. to about 200° C.

[0120] Section 3 3. The method of claim 1 or 2, wherein the temperature is from about 250° C. to about 300° C.

[0121] Section 4 depositing the seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber; and depositing the deposition film includes flowing a second carbon-containing precursor gas and a second inert precursor gas into the processing chamber, where the second carbon-containing precursor gas is the same as or different from the first carbon-containing precursor gas, and the second inert precursor gas is the same as or different from the first inert precursor gas; 4. The method according to any one of paragraphs 1 to 3.

[0122] Section 5 5. The method of any of claims 1 to 4, wherein depositing the deposition film over the seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0123] Section 6 6. The method of any of claims 1 to 5, wherein depositing the deposition film over the seasoning film is performed by flowing a second carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm.

[0124] Section 7 7. The method of any of claims 1 to 6, wherein depositing a deposition film over the seasoning film includes supplying about 1 kW to about 6 kW of RF power to the processing chamber.

[0125] Section 8 8. The method of any of paragraphs 1 to 7, wherein the first carbon-containing precursor gas and the second carbon-containing precursor gas comprise acetylene.

[0126] Section 9 9. The method of any of paragraphs 1 to 8, wherein the first inert precursor gas and the second inert precursor gas comprise helium.

[0127] Section 10 flowing a first carbon-containing precursor gas and a first inert precursor gas into a process chamber; flowing a first carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm; and flowing a first inert precursor gas into the processing chamber at a flow rate of about 150 sccm to about 800 sccm; 10. The method of any one of claims 1 to 9, comprising:

[0128] Section 11 Depositing a seasoning film on the component; flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; adjusting the first flow ratio to a second flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; 11. The method of any one of claims 1 to 10, comprising:

[0129] Section 12 12. The method of any of paragraphs 1 to 11, wherein the first flow ratio is about 1:1 to about 1:2.

[0130] Section 13 13. The method of any of paragraphs 1 to 12, wherein the second flow ratio is from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0131] Section 14 14. The method of any of clauses 1 to 13, wherein adjusting the first flow ratio to the second flow ratio is performed at a rate of about 1 sccm / sec to about 20 sccm / sec.

[0132] Section 15 Depositing a seasoning film on the component; providing a first RF power to the chamber; and Adjusting the first RF power to a second RF power 15. The method of any of claims 1 to 14, comprising:

[0133] Section 16 16. The method of any of clauses 1 to 15, wherein adjusting the first RF power to the second RF power is performed at a rate of about 20 W / sec to about 500 W / sec.

[0134] Section 17 17. The method of any of claims 1 to 16, wherein the first RF power and the second RF power are independently from about 1 kW to about 6 kW.

[0135] Section 18 18. The method of any of claims 1 to 17, wherein the first RF power is from about 1 kW to about 4 kW and the second RF power is from about 4 kW to about 6 kW.

[0136] Section 19 Depositing a seasoning film on the component; providing a first RF power to the chamber; and Adjusting the first RF power to a second RF power 19. The method of any of claims 1 to 18, comprising:

[0137] Section 20 20. The method of any of claims 1 to 19, wherein the first RF power and the second RF power are independently from about 1 kW to about 6 kW.

[0138] Section 21 21. The method of any of paragraphs 1 to 20, wherein the seasoning film has a thickness of about 100 nm to about 700 nm and the deposited film has a thickness of about 500 nm to about 3 microns.

[0139] Section 22 22. The method of any of claims 1 to 21, wherein the processing chamber part is not a wafer.

[0140] Section 23 23. The method of any of claims 1 to 22, wherein the part of the processing chamber is a wall of the processing chamber.

[0141] Section 24 24. The method of any of claims 1 to 23, further comprising introducing a nitrogen-containing gas into the seasoning film to form a nitrogen-treated seasoning film, wherein introducing the nitrogen-containing gas into the seasoning film occurs before depositing a deposition film on the seasoning film.

[0142] Section 25 25. The method of any of paragraphs 1 to 24, wherein introducing the nitrogen-containing gas into the seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0143] Section 26 26. The method of any of paragraphs 1 to 25, wherein the nitrogen-containing gas comprises ammonia.

[0144] Section 27 27. The method of any of paragraphs 1 to 26, wherein introducing the nitrogen-containing gas to the seasoning film comprises flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm.

[0145] Section 28 28. The method of any of paragraphs 1 to 27, wherein introducing the nitrogen-containing gas to the seasoning film comprises supplying about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0146] Section 29 29. The method of any of paragraphs 1 to 28, wherein the nitrogen gas comprises ammonia.

[0147] Section 30 30. The method of any of claims 1 to 29, further comprising introducing a nitrogen-containing gas into the seasoning film to form a nitrogen-treated seasoning film, wherein introducing the nitrogen-containing gas into the seasoning film occurs before depositing a deposition film on the seasoning film.

[0148] Section 31 31. The method of any of paragraphs 1 to 30, wherein introducing the nitrogen-containing gas into the seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0149] Section 32 32. The method of any of paragraphs 1 to 31, wherein the nitrogen-containing gas comprises ammonia.

[0150] Section 33 33. The method of any of paragraphs 1 to 32, wherein introducing the nitrogen-containing gas to the seasoning film comprises flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm.

[0151] Section 34 34. The method of any of paragraphs 1 to 33, wherein introducing the nitrogen-containing gas into the seasoning film comprises supplying about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0152] Section 35 35. The method of any of paragraphs 1 to 34, wherein the nitrogen gas comprises ammonia.

[0153] Section 36 1. A method of seasoning a processing chamber, comprising: depositing a first seasoning film on the processing chamber components at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C.; depositing a second seasoning film over the first seasoning film; and depositing a deposition film on the second seasoning film; where depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber; method.

[0154] Section 37 37. The method of claim 36, wherein the temperature is from about 100°C to about 200°C.

[0155] Section 38 38. The method of claim 36 or 37, wherein the temperature is from about 250°C to about 300°C.

[0156] Section 39 Item 39. The method of any of items 36 to 38, wherein depositing the second seasoning film on the first seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C.

[0157] Section 40 depositing the second seasoning film includes flowing a second carbon-containing precursor gas and a second inert precursor gas into the processing chamber; and depositing the deposition film includes flowing a third carbon-containing precursor gas and a third inert precursor gas into the processing chamber; Where: The second carbon-containing precursor gas is the same as or different from the first or third carbon-containing precursor gas, the second inert precursor gas is the same as or different from the first or third inert precursor gas, and The third carbon-containing precursor gas is the same as or different from the first or second carbon-containing precursor gas, and the third inert precursor gas is the same as or different from the first or second inert precursor gas; 40. The method of any one of paragraphs 36 to 39.

[0158] Section 41 depositing a first seasoning film on the component includes flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; depositing a second seasoning film on the first seasoning film includes adjusting a first flow ratio of a first carbon-containing precursor gas and a first inert precursor gas to a second flow ratio; 41. A method according to any one of paragraphs 36 to 40.

[0159] Section 42 42. The method of any of paragraphs 36 to 41, wherein the first flow ratio is about 1:1 to about 1:2.

[0160] Section 43 43. The method of any of paragraphs 36 to 42, wherein the second flow ratio is from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0161] Section 44 44. The method of any of paragraphs 36 to 43, wherein adjusting the first flow ratio to the second flow ratio occurs in a rate of about 1 second or less.

[0162] Section 45 depositing a first seasoning film on the component includes supplying a first RF power to the chamber; and depositing a second seasoning film on the first seasoning film includes adjusting the first RF power to a second RF power; 45. A method according to any one of paragraphs 36 to 44.

[0163] Section 46 46. ​​The method of any of clauses 36 to 45, wherein adjusting the first RF power to the second RF power occurs at a rate of about 1 second or less.

[0164] Section 47 47. The method of any of paragraphs 36 to 46, wherein depositing the deposition film over the second seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0165] Section 48 48. The method of any of paragraphs 36 to 47, wherein depositing the deposition film on the second seasoning film is performed by flowing a third carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm.

[0166] Section 49 49. The method of any of paragraphs 36 to 48, wherein depositing the deposition film over the second seasoning film includes supplying about 1 kW to about 6 kW of RF power to the processing chamber.

[0167] Section 50 50. The method of any of paragraphs 36 to 49, wherein the first carbon-containing precursor gas, the second carbon-containing precursor gas, and the third carbon-containing precursor gas comprise acetylene.

[0168] Section 51 51. The method of any of paragraphs 36 to 50, wherein the first inert precursor gas, the second inert precursor gas, and the third inert precursor gas comprise helium.

[0169] Section 52 flowing a first carbon-containing precursor gas and a first inert precursor gas into a process chamber; flowing a first carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm; and flowing a first inert precursor gas into the processing chamber at a flow rate of about 150 sccm to about 800 sccm; 52. The method of any one of claims 36 to 51, comprising:

[0170] Section 53 flowing a second carbon-containing precursor gas and a second inert precursor gas into the process chamber; flowing a second carbon-containing precursor gas into the processing chamber at a flow rate between about 100 sccm and about 600 sccm, the flow rate of the second carbon-containing precursor gas being different from a flow rate of the first carbon-containing precursor gas; and flowing a second inert precursor gas into the processing chamber at a flow rate between about 150 sccm and about 800 sccm, the flow rate of the second inert precursor gas being different from a flow rate of the first inert precursor gas; 53. The method of any of claims 36 to 52, comprising:

[0171] Section 54 depositing a first seasoning film on the component includes supplying a first RF power to the chamber; and depositing a second seasoning film over the first seasoning film includes providing a second RF power to the chamber, where the second RF power is different from the first RF power; 54. A method according to any one of paragraphs 36 to 53.

[0172] Section 55 55. The method of any of clauses 36 to 54, wherein the first RF power and the second RF power are independently from about 1 kW to about 6 kW.

[0173] Section 56 56. The method of any of paragraphs 36 to 55, wherein the first RF power is from about 1 kW to about 3 kW and the second RF power is from about 3 kW to about 6 kW.

[0174] Section 57 57. The method of any of paragraphs 36 to 56, wherein the first seasoning film and the second seasoning film have a combined thickness of about 100 nm to about 700 nm, and the deposited film has a thickness of about 500 nm to about 3 microns.

[0175] Section 58 58. The method of any of paragraphs 36 to 57, wherein the processing chamber part is not a wafer.

[0176] Section 59 59. The method of any of paragraphs 36 to 58, wherein the part of the processing chamber is a wall of the processing chamber.

[0177] Section 60 60. The method of any of claims 36 to 59, further comprising introducing a nitrogen-containing gas into the second seasoning film to form a nitrogen-treated seasoning film, wherein introducing the nitrogen-containing gas into the second seasoning film occurs prior to depositing a deposition film on the second seasoning film.

[0178] Section 61 61. The method of any of paragraphs 36 to 60, wherein introducing the nitrogen-containing gas into the second seasoning film is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0179] Section 62 62. The method of any of paragraphs 36 to 61, wherein the nitrogen-containing gas comprises ammonia.

[0180] Section 63 63. The method of any of paragraphs 36 to 62, wherein introducing a nitrogen-containing gas to the second seasoning film comprises flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm.

[0181] Section 64 64. The method of any of paragraphs 36 to 63, wherein introducing the nitrogen-containing gas to the second seasoning film comprises supplying about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0182] Section 65 65. The method of any of paragraphs 36 to 64, wherein the nitrogen gas comprises ammonia.

[0183] Section 66 1. A method of seasoning a processing chamber, comprising: depositing a first seasoning film on the processing chamber components at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or about 200° C. to about 400° C.; depositing a plurality of additional seasoning films on the first seasoning film; and depositing a deposition film over the plurality of additional seasoning films; where depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber; method.

[0184] Section 67 67. The method of claim 66, wherein the temperature is from about 100°C to about 200°C.

[0185] Item 68. The method of item 66 or 67, wherein the temperature is from about 250°C to about 300°C.

[0186] Section 69 Depositing a plurality of additional seasoning films; depositing a second seasoning film over the first seasoning film by flowing a second carbon-containing precursor gas and a second inert precursor gas into the process chamber; depositing a third seasoning film over the second seasoning film by flowing a third carbon-containing precursor gas and a third inert precursor gas into the process chamber; depositing a fourth seasoning film over the third seasoning film by flowing a fourth carbon-containing precursor gas and a fourth inert precursor gas into the processing chamber. where the second, third, and fourth carbon-containing precursor gases are independently the same as one another or different from one another; and the second, third, and fourth inert precursor gases are independently the same as one another or different from one another; 69. A method according to any one of paragraphs 66 to 68.

[0187] Section 70 Depositing a plurality of additional seasoning films; depositing a fifth seasoning film over the fourth seasoning film by flowing a fifth carbon-containing precursor gas and a fifth inert precursor gas into the processing chamber; depositing a sixth seasoning film over the fifth seasoning film by flowing a sixth carbon-containing precursor gas and a sixth inert precursor gas into the processing chamber; depositing a seventh seasoning film over the sixth seasoning film by flowing a seventh carbon-containing precursor gas and a seventh inert precursor gas into the processing chamber; and depositing an eighth seasoning film over the seventh seasoning film by flowing an eighth carbon-containing precursor gas and an eighth inert precursor gas into the process chamber. where the fifth, sixth, seventh, and eighth carbon-containing precursor gases are independently the same as or different from one another; and the fifth, sixth, seventh, and eighth inert precursor gases are independently the same as one another or different from one another; 70. A method according to any one of paragraphs 66 to 69.

[0188] Section 71 71. The method of any of paragraphs 66 to 70, wherein each seasoning film of the plurality of additional seasoning films has a different intrinsic stress than an adjacent seasoning film of the plurality of additional seasoning films.

[0189] Section 72 72. The method of any of paragraphs 66 to 71, wherein depositing one or more seasoning films of the plurality of additional seasoning films is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C.

[0190] Section 73 73. The method of any of paragraphs 66 to 72, wherein depositing each seasoning film of the plurality of additional seasoning films is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0191] Section 74 depositing a first seasoning film on the component includes flowing a first carbon-containing precursor gas and a first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; depositing a second seasoning film over the first seasoning film includes adjusting a first flow ratio of a first carbon-containing precursor gas and a first inert precursor gas to a second flow ratio; depositing a third seasoning film on the second seasoning film includes adjusting a second flow ratio of the second carbon-containing precursor gas and the second inert precursor gas to a third flow ratio; and depositing a fourth seasoning film on the third seasoning film includes adjusting a third flow ratio of the third carbon-containing precursor gas and the third inert precursor gas to a fourth flow ratio; 74. A method according to any one of paragraphs 66 to 73.

[0192] Section 75 75. The method of any of paragraphs 66 to 74, wherein the first flow ratio and the third flow ratio are independently from about 1:1 to about 1:2.

[0193] Section 76 76. The method of any of paragraphs 66 to 75, wherein the second flow ratio and the fourth flow ratio are from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0194] Section 77 77. The method of any of paragraphs 66 to 76, wherein adjusting the first flow ratio to the second flow ratio, the second flow ratio to the third flow ratio, and the third flow ratio to the fourth flow ratio are independently performed at a rate of about 1 second or less.

[0195] Section 78 depositing a fifth seasoning film on the fourth seasoning film includes flowing a fifth carbon-containing precursor gas and a fifth inert precursor gas at a fifth flow ratio of the fifth carbon-containing precursor gas to the fifth inert precursor gas; depositing a sixth seasoning film on the fifth seasoning film includes adjusting a fifth flow ratio of the fifth carbon-containing precursor gas and the fifth inert precursor gas to a sixth flow ratio; depositing a seventh seasoning film on the sixth seasoning film includes adjusting a sixth flow ratio of the sixth carbon-containing precursor gas and the sixth inert precursor gas to a seventh flow ratio; and depositing an eighth seasoning film on the seventh seasoning film includes adjusting a seventh flow ratio of the seventh carbon-containing precursor gas to the seventh inert precursor gas to an eighth flow ratio; 78. A method according to any one of paragraphs 66 to 77.

[0196] Section 79 79. The method of any of paragraphs 66 to 78, wherein the fifth flow ratio and the seventh flow ratio are independently from about 1:1 to about 1:2.

[0197] Section 80 80. The method of any of paragraphs 66 to 79, wherein the sixth flow ratio and the eighth flow ratio are from about 10:1 to about 1:1, or from about 1:2 to about 1:10.

[0198] Section 81 81. The method of any of paragraphs 66 to 80, wherein adjusting the first flow ratio to a second flow ratio, the second flow ratio to a third flow ratio, the third flow ratio to a fourth flow ratio, the fourth flow ratio to a fifth flow ratio, the fifth flow ratio to a sixth flow ratio, the sixth flow ratio to a seventh flow ratio, and the seventh flow ratio to an eighth flow ratio is independently performed at a rate of about 1 second or less.

[0199] Section 82 Depositing a first seasoning film on the component includes supplying a first RF power to the chamber; depositing a second seasoning film over the first seasoning film includes adjusting the first RF power to a second RF power; depositing a third seasoning film on the second seasoning film includes adjusting the second RF power to a third RF power; and depositing a fourth seasoning film on the third seasoning film includes adjusting the third RF power to a fourth RF power; 82. A method according to any one of paragraphs 66 to 81.

[0200] Section 83 83. The method of any of clauses 66 to 82, wherein adjusting the first RF power to the second RF power, the second RF power to the third RF power, and the third RF power to the fourth RF power is performed independently at a rate of about 1 second or less.

[0201] Section 84 84. The method of any of clauses 66 to 83, wherein the first RF power, the second RF power, the third RF power, and the fourth RF power are independently from about 1 kW to about 6 kW.

[0202] Section 85 the first RF power and the third RF power are independently from about 1 kW to about 3 kW; and the second RF power and the fourth RF power are independently from about 3 kW to about 6 kW; 85. A method according to any one of paragraphs 66 to 84.

[0203] Section 86 depositing a fifth seasoning film on the fourth seasoning film includes adjusting the fourth RF power to a fifth RF power; depositing a sixth seasoning film on the fifth seasoning film includes adjusting the fifth RF power to a sixth RF power; depositing a seventh seasoning film on the sixth seasoning film includes adjusting the sixth RF power to a seventh RF power; and depositing an eighth seasoning film on the seventh seasoning film includes adjusting the seventh RF power to an eighth RF power; 86. A method according to any one of paragraphs 66 to 85.

[0204] Section 87 87. The method of any of clauses 66 to 86, wherein adjusting the first RF power to the second RF power, the second RF power to the third RF power, the third RF power to the fourth RF power, the fourth RF power to the fifth RF power, the fifth RF power to the sixth RF power, the sixth RF power to the seventh RF power, and the seventh RF power to the eighth RF power is performed independently at a rate of about 1 second or less.

[0205] Section 88 88. The method of any of clauses 66 to 87, wherein the first RF power, the second RF power, the third RF power, the fourth RF power, the fifth RF power, the sixth RF power, the seventh RF power, and the eighth RF power are independently from about 1 kW to about 6 kW.

[0206] Section 89 the first RF power, the third RF power, the fifth RF power, and the seventh RF power are independently from about 1 kW to about 3 kW; and the second RF power, the fourth RF power, the sixth RF power, and the eighth RF power are independently from about 3 kW to about 6 kW; 89. A method according to any one of paragraphs 66 to 88.

[0207] Section 90 90. The method of any of paragraphs 66 to 89, wherein the first carbon-containing precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, and the fourth carbon-containing precursor gas comprise acetylene.

[0208] Section 91 91. The method of any of paragraphs 66 to 90, wherein the first carbon-containing precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, the fourth carbon-containing precursor gas, the fifth carbon-containing precursor gas, the sixth carbon-containing precursor gas, the seventh carbon-containing precursor gas, and the eighth carbon-containing precursor gas comprise acetylene.

[0209] Section 92 Item 92. The method of any of items 66 to 91, wherein the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, and the fourth inert precursor gas comprise helium.

[0210] Section 93 Item 93. The method of any of items 66 to 92, wherein the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, the fourth inert precursor gas, the fifth inert precursor gas, the sixth inert precursor gas, the seventh inert precursor gas, and the eighth inert precursor gas comprise helium.

[0211] Section 94 flowing a first carbon-containing precursor gas and a first inert precursor gas into a process chamber; flowing a first carbon-containing precursor gas into the processing chamber at a flow rate of about 100 sccm to about 600 sccm; and flowing a first inert precursor gas into the processing chamber at a flow rate of about 150 sccm to about 800 sccm; 94. The method of any one of claims 66 to 93, comprising:

[0212] Section 95 flowing the first inert precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, and the fourth carbon-containing precursor gas into the processing chamber, independently, at flow rates between about 100 sccm and about 600 sccm; and flowing the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, and the fourth inert precursor gas into the processing chamber, independently, at flow rates between about 150 sccm and about 800 sccm; 5. A method according to any one of paragraphs 66 to 94.

[0213] Section 96 flowing the first inert precursor gas, the second carbon-containing precursor gas, the third carbon-containing precursor gas, the fourth carbon-containing precursor gas, the fifth carbon-containing precursor gas, the sixth carbon-containing precursor gas, the seventh carbon-containing precursor gas, and the eighth carbon-containing precursor gas into the process chamber, independently, at flow rates between about 100 sccm and about 600 sccm; and flowing the first inert precursor gas, the second inert precursor gas, the third inert precursor gas, the fourth inert precursor gas, the fifth inert precursor gas, the sixth inert precursor gas, the seventh inert precursor gas, and the eighth inert precursor gas into the processing chamber, independently, at flow rates between about 150 sccm and about 800 sccm; 66. A method according to any one of paragraphs 66 to 95.

[0214] Section 97 97. The method of any of paragraphs 66 to 96, wherein the first seasoning film and the plurality of additional seasoning films have a combined thickness of about 100 nm to about 700 nm, and the deposited film has a thickness of about 500 nm to about 3 microns.

[0215] Section 98 98. The method of any of paragraphs 66 to 97, wherein depositing the deposition film over the plurality of additional seasoning films is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200°C.

[0216] Section 99 99. The method of any of paragraphs 66 to 98, wherein depositing the deposition film over the plurality of additional seasoning films is performed by flowing a third carbon-containing precursor gas into the processing chamber at a flow rate of about 200 sccm to about 400 sccm.

[0217] Section 100 99. The method of any of claims 66 to 99, wherein depositing a deposition film over the plurality of additional seasoning films includes supplying about 1 kW to about 6 kW of RF power to the processing chamber.

[0218] Section 101 101. The method of any of claims 66 to 100, wherein the processing chamber part is not a wafer.

[0219] Section 102 102. The method of any of claims 66 to 101, wherein the part of the processing chamber is a wall of the processing chamber.

[0220] Section 103 Item 103. The method of any of items 66 to 102, further comprising introducing a nitrogen-containing gas into a film of the plurality of additional seasoning films to form a nitrogen-treated seasoning film, wherein introducing the nitrogen-containing gas into a film of the plurality of additional seasoning films occurs prior to depositing a deposition film on the plurality of additional seasoning films.

[0221] Section 104 104. The method of any of paragraphs 66 to 103, wherein introducing the nitrogen-containing gas into the plurality of additional seasoning films is performed at a chamber pressure of about 4 mTorr to about 20 mTorr and at a temperature of less than about 200° C.

[0222] Section 105 105. The method of any of paragraphs 66 to 104, wherein the nitrogen-containing gas comprises ammonia.

[0223] Section 106 106. The method of any of paragraphs 66 to 105, wherein introducing a nitrogen-containing gas to the plurality of additional seasoning films comprises flowing the nitrogen-containing gas into the processing chamber at a flow rate of about 25 sccm to about 1,000 sccm.

[0224] Section 107 107. The method of any of paragraphs 66 to 106, wherein introducing the nitrogen-containing gas to the plurality of additional seasoning films comprises supplying about 100 kW to about 4,000 kW of RF power to the processing chamber.

[0225] Section 108 108. The method of any of paragraphs 66 to 107, wherein the nitrogen gas comprises ammonia.

[0226] Overall, the disclosed method can provide reduced delamination of protective material (deposited film) and improved adhesion of deposited film to chamber components by providing a seasoning film disposed between the deposited film and the chamber components. For example, the deposited film can have an intrinsic stress of about 300 MPa or less (compressive), whereas the chamber components (e.g., aluminum-containing components) can have an intrinsic stress of about 800 MPa or more (compressive). Such mismatch of intrinsic stress between the deposited film and the chamber components promotes delamination and adhesion failure between the deposited film and the chamber components. However, the inventors have found that by controlling the intrinsic stress of the seasoning film, the seasoning film can be tailored to beneficially adhere to the deposited film on one side of the seasoning film and to the chamber components on the opposite side of the seasoning film. The inventors have found a number of approaches to achieve such improvements.

[0227] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, the scope of which is determined by the claims that follow.

Claims

1. 1. A method of seasoning a processing chamber, comprising: depositing a first seasoning film on the processing chamber components at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or from about 200° C. to about 400° C.; depositing a second seasoning film over the first seasoning film; and depositing a deposition film on the second seasoning film; where depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber; the first seasoning film comprises a first intrinsic stress having a first value, and the second seasoning film comprises a second intrinsic stress having a second value less than the first value. method.

2. depositing the first seasoning film on the component includes flowing the first carbon-containing precursor gas and the first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; and depositing the second seasoning film on the first seasoning film includes adjusting the first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas to a second flow ratio. The method of claim 1.

3. depositing the first seasoning film on the component includes supplying a first RF power to the processing chamber; and depositing the second seasoning film on the first seasoning film includes adjusting the first RF power to a second RF power. The method of claim 1.

4. 1. A method of seasoning a processing chamber, comprising: depositing a first seasoning film on the processing chamber components at a chamber pressure of about 4 mTorr to about 20 mTorr and a temperature of less than about 200° C. or from about 200° C. to about 400° C.; depositing a plurality of additional seasoning films over the first seasoning film; and depositing a deposition film over said plurality of additional seasoning films; where each seasoning film of the plurality of additional seasoning films comprises an alternating intrinsic stress such that each additional seasoning film alternates between a higher intrinsic stress and a lower intrinsic stress; depositing the first seasoning film includes flowing a first carbon-containing precursor gas and a first inert precursor gas into the processing chamber. method.

5. depositing the plurality of additional seasoning films; depositing a second seasoning film over the first seasoning film by flowing a second carbon-containing precursor gas and a second inert precursor gas into the process chamber; depositing a third seasoning film over the second seasoning film by flowing a third carbon-containing precursor gas and a third inert precursor gas into the process chamber; depositing a fourth seasoning film over the third seasoning film by flowing a fourth carbon-containing precursor gas and a fourth inert precursor gas into the process chamber. where the second, third, and fourth carbon-containing precursor gases are independently the same as or different from one another; and the second, third, and fourth inert precursor gases are independently the same as or different from one another; The method according to claim 4.

6. depositing the first seasoning film on the component includes flowing the first carbon-containing precursor gas and the first inert precursor gas at a first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas; depositing the second seasoning film on the first seasoning film includes adjusting the first flow ratio of the first carbon-containing precursor gas to the first inert precursor gas to a second flow ratio; depositing the third seasoning film on the second seasoning film includes adjusting the second flow ratio of the second carbon-containing precursor gas to the second inert precursor gas to a third flow ratio; and depositing the fourth seasoning film on the third seasoning film includes adjusting the third flow ratio of the third carbon-containing precursor gas to the third inert precursor gas to a fourth flow ratio. The method according to claim 5.

7. 7. The method of claim 6, wherein the first flow ratio and the third flow ratio are independently from about 1:1 to about 1:

2.

8. depositing the first seasoning film on the component includes providing a first RF power to the processing chamber; depositing the second seasoning film on the first seasoning film includes adjusting the first RF power to a second RF power; depositing the third seasoning film on the second seasoning film includes adjusting the second RF power to a third RF power; and depositing the fourth seasoning film on the third seasoning film includes adjusting the third RF power to a fourth RF power. The method according to claim 5.

9. The first seasoning film has a first intrinsic stress value; the second seasoning film has a second intrinsic stress value different from the first intrinsic stress value; the third seasoning film has a third intrinsic stress value equal to the first intrinsic stress value; the fourth seasoning film having a fourth intrinsic stress value equal to the second intrinsic stress value; The method according to claim 5.

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