Cutting device

Abstract

To detect a failure of a screwing state of a fixing nut.SOLUTION: A cutting device is equipped with a cutting unit that has a spindle, and is installed with an annular cutting blade at a tip end portion of the spindle via a blade mount, and a determination unit that determines a state of the cutting blade in the blade mount. The determination unit has a second channel that is connected to a first channel of a mounter of the blade mount and acts negative pressure or positive pressure on the first channel, a measuring apparatus that obtains a measurement value of at least one of pressure in the second channel and a flow rate of a fluid flowing in the second channel, a screwing state determining portion that determines that a screwing state to a boss portion of a fixing nut is unsatisfactory when the measurement value when negative pressure or positive pressure is acted on the first channel indicates an abnormal value while the fixing nut is at least partially screwed with the boss portion of the mounter on which the cutting blade is disposed, and a notifying portion that reports the determination result of the screwing state determining portion.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a cutting device having a spindle on which a cutting blade for cutting a workpiece is mounted. [Background technology]

[0002] Cutting machines are widely used to separate semiconductor wafers having a plurality of semiconductor devices formed on the front surface side into individual device chips. The cutting machine has a cutting unit for cutting the semiconductor wafer. The cutting unit includes a spindle to which a cutting blade is attached.

[0003] The cutting edge of the cutting blade wears with use, and therefore needs to be replaced as appropriate according to the degree of wear. For example, a hub-type cutting blade having an annular cutting edge bonded to one surface of a metal annular base is used (see, for example, Patent Document 1).

[0004] When attaching this cutting blade to the spindle, the through hole of the cutting blade is inserted into the boss of the mount fixed to the tip of the spindle, and the female thread formed on the inner side of the annular fixing nut is screwed onto the male thread formed on the outer side of the tip of the boss (i.e., the fixing nut is screwed onto the boss).

[0005] However, if the fixing nut is screwed in such a way that the rotation axis of the fixing nut is inclined obliquely relative to the central axis of the boss, the cutting blade is not sufficiently fixed by the mount and the fixing nut. If the workpiece is cut in this state, the cutting groove may be inclined in the thickness direction of the workpiece, or the cutting edge of the cutting blade may be damaged. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2013-132701 A Summary of the Invention [Problem to be solved by the invention]

[0007] The present invention has been made in consideration of the above problems, and has an object to detect improper screwing of a fixing nut. [Means for solving the problem]

[0008] According to one aspect of the present invention, a cutting unit is provided having a spindle, and an annular cutting blade is attached to a tip of the spindle via a blade mount, and a judgment unit for judging a state of the cutting blade on the blade mount, the blade mount including a mounter fixed to the tip of the spindle, and a fixing nut for pressing the cutting blade against the mount to clamp the cutting blade together with the mount, the mounter including a boss portion having a male thread with which the fixing nut is screwed, the boss portion being inserted into a central hole of the cutting blade, and an annular threaded portion located on the base end side of the boss portion, protruding outward beyond the boss portion in the radial direction of the boss portion, and capable of contacting the cutting blade when the cutting blade is inserted into the boss portion. and a first flow path connected to an opening formed in the mount and located outside the boss portion and inside the flange portion, wherein the judgment unit has a second flow path connected to the first flow path of the mounter for applying negative pressure or positive pressure to the first flow path, a measuring device for obtaining a measurement value of at least one of the pressure in the second flow path and the flow rate of fluid flowing through the second flow path, a threaded state judgment unit for determining that the threaded state of the fixing nut into the boss portion is poor if the measurement value shows an abnormal value when negative pressure or positive pressure is applied to the first flow path with the fixing nut at least partially threaded onto the boss portion of the mounter on which the cutting blade is disposed, and an alarm unit for notifying the judgment result of the threaded state judgment unit.

[0009] Preferably, the cutting device further includes a blade replacement unit having a blade holding portion that holds the cutting blade in a removably manner, a fixed nut holding portion that rotatably holds the fixed nut, and a moving portion that moves the blade holding portion and the fixed nut holding portion. Also, preferably, the determination unit further has a first solenoid valve connected to the first flow path for applying negative pressure from a negative pressure source to the first flow path, and a second solenoid valve connected to the first flow path for applying positive pressure from an air supply source to the first flow path. Effect of the Invention

[0010] A cutting device according to one aspect of the present invention includes a determination unit for determining a state of a cutting blade in a blade mount. The determination unit includes a second flow path connected to a first flow path of a mounter constituting the blade mount for applying negative or positive pressure to the first flow path, and a measuring device for obtaining a measurement value of at least one of the pressure in the second flow path and the flow rate of a fluid flowing through the second flow path.

[0011] The judgment unit further includes a screwing state judgment unit that judges that the screwing state of the fixing nut to the boss portion is poor if a measurement value indicates an abnormal value when negative pressure or positive pressure is applied to the first flow path with the fixing nut at least partially screwed onto the boss portion of the mounter on which the cutting blade is disposed.

[0012] The judgment unit further includes a notification section that notifies the judgment result of the screwing state judgment section. Since the notification section can notify the user that the screwing state is poor, it is possible to prevent the user from starting cutting of the workpiece in a state where the cutting blade is not correctly attached. [Brief description of the drawings]

[0013] [Figure 1] FIG. [Diagram 2] FIG. [Diagram 3] 13 is a partial cross-sectional side view of the cutting unit with the fixing nut properly fastened. FIG. [Figure 4] 13 is a partial cross-sectional side view of the cutting unit in which the fixing nut is not properly tightened. FIG. [Diagram 5]FIG. [Figure 6] FIG. [Figure 7] FIG. 7(A) is a flow diagram of a determination method when the screwing state of a fixing nut is determined using negative pressure, and FIG. 7(B) is a flow diagram of a determination method when the screwing state of a fixing nut is determined using positive pressure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a cutting device 2. The X-axis direction (machining feed direction), the Y-axis direction (indexing feed direction), and the Z-axis direction (vertical direction) shown in Fig. 1 are directions perpendicular to each other.

[0015] In addition, some of the components are shown as functional blocks in Fig. 1. The cutting device 2 includes a base 4 that supports the components. An elevator 6 that is raised and lowered by a lifting mechanism (not shown) is provided at a corner of the base 4.

[0016] A cassette 8 for accommodating a workpiece 11 (workpiece unit 17) is placed on the upper surface of the lifting platform 6a of the elevator 6. The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon.

[0017] A dicing tape 13 having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11, and a metal annular frame 15 is attached to the outer periphery of the dicing tape 13. This forms a workpiece unit 17 in which the workpiece 11 is supported by the frame 15 via the dicing tape 13.

[0018] A circular opening 4a is formed on one side in the X-axis direction of the elevator 6. A cleaning unit 10 that cleans the workpiece 11 after cutting is disposed in the opening 4a. The cleaning unit 10 has a spinner table 12, a nozzle (not shown), etc.

[0019] A pair of guide rails 14 are provided above the cleaning unit 10. The pair of guide rails 14 move toward each other along the Y-axis direction to adjust the position of the workpiece unit 17 in the Y-axis direction.

[0020] A rectangular opening 4b having a longitudinal portion along the X-axis direction is formed on one side in the Y-axis direction of the pair of guide rails 14. A rectangular table cover 16 is provided on the opening 4b to cover a part of the opening 4b.

[0021] A bellows-like cover 18 that is extendable and contractible in the X-axis direction is provided on both sides of the table cover 16 in the X-axis direction. A disk-shaped chuck table 20 for suction-holding the workpiece unit 17 and the like is provided above the table cover 16.

[0022] The upper surface of the chuck table 20 functions as a holding surface that utilizes negative pressure to suction and hold the workpiece unit 17. On the sides of the chuck table 20, a pair of clamp units 20a that clamp the frame 15 are provided.

[0023] A rotation drive source such as a motor (not shown) that rotates the chuck table 20 around a rotation axis that is approximately parallel to the Z-axis direction is disposed below the table cover 16. Furthermore, a ball screw type X-axis movement mechanism (processing feed unit) (not shown) is provided below the rotation drive source.

[0024] Of the opening 4b, the area adjacent to the opening 4a in the Y-axis direction is a load-in / load-out area where the workpiece 11 is loaded and unloaded. In addition, of the opening 4b, on the opposite side in the X-axis direction to the load-in / load-out area, there is a cutting area where the workpiece 11 is cut.

[0025] A rectangular parallelepiped cover member 22 made of metal or the like is provided above the cutting area. A pair of cutting units 24 are disposed inside the space covered by the cover member 22. Here, the configuration of the cutting unit 24 will be described with reference to Figs. 2 and 3.

[0026] Fig. 2 is an exploded perspective view of the cutting unit 24. As shown in Fig. 2, the cutting unit 24 has a cylindrical spindle housing 26. A columnar spindle 28 is rotatably accommodated in the spindle housing 26.

[0027] A rotation drive source (not shown), such as a servo motor, is provided at the base end of the spindle 28. A tip end 28a of the spindle 28 protrudes from the spindle housing 26, and a screw hole 28b is formed in the tip end 28a.

[0028] A substantially disk-shaped mounter 30 is disposed on the tip 28a. A cylindrical first boss portion 30a is formed on one side of the center of the mounter 30. A first flow passage 30b (see FIG. 3) is formed inside the first boss portion 30a (inside the mounter 30), and an opening 30c located at one end of the first flow passage 30b is formed on the outer circumferential side surface of the first boss portion 30a.

[0029] A cylindrical second boss portion (boss portion) 30d is formed on the opposite side of the first boss portion 30a in the mounter 30. A male thread 30e into which a fixing nut 36 (described later) is screwed is formed on the outer circumferential side surface of the tip portion of the second boss portion 30d.

[0030] An annular flange portion 30f is formed on the base end side of the second boss portion 30d, protruding outward from the second boss portion 30d in the radial direction of the second boss portion 30d. An annular recess 30g is formed on the outer side of the second boss portion 30d and on the inner side of the flange portion 30f. An opening 30h is formed in the recess 30g and is located at the other end of the first flow path 30b.

[0031] When fixing the mounter 30 to the spindle 28, first, the tip portion 28a is fitted into a cylindrical recess formed inside the first boss portion 30a. Next, the mounter 30 is fixed to the tip portion 28a by fastening the male screw 32 to the screw hole 28b (see FIG. 3).

[0032] An annular cutting blade 34 is attached to the mounter 30 fixed to the tip portion 28a. The cutting blade 34 in this example is a so-called hub-type blade, but a hubless type (i.e., washer type) blade may be attached as the cutting blade 34.

[0033] The cutting blade 34 has an annular base 34a made of an aluminum alloy or the like. A central hole 34b is formed in the base 34a, penetrating from one surface 34a1 to the other surface 34a2 of the base 34a. An annular cutting blade 34c is fixed to the outer periphery of the one surface 34a1 with an adhesive.

[0034] When attaching the cutting blade 34 to the mounter 30, the second boss portion 30d is inserted into the central hole 34b of the annular cutting blade 34 so that one surface 34a1 faces the flange portion 30f, and further, an annular fixing nut 36 is screwed onto the second boss portion 30d.

[0035] The fixing nut 36 has a screw hole 36a with a female thread formed therein. Around the screw hole 36a, a plurality of pin insertion portions 36b are formed, which are used when gripping and rotating the fixing nut 36. In this example, four pin insertion portions 36b are arranged at approximately equal intervals around the screw hole 36a.

[0036] An annular flange portion 36c (see FIG. 3) is formed on one surface of the fixing nut 36. When the fixing nut 36 is properly fastened to the male thread 30e, the flange portion 36c of the fixing nut 36 contacts the other surface 34a2, and the flange portion 30f of the mounter 30 contacts the one surface 34a1.

[0037] In this manner, the cutting blade 34 is pressed against the mounter 30 by the fixing nut 36, and is clamped between the fixing nut 36 and the mounter 30. Fig. 3 is a partial cross-sectional side view of the cutting unit 24 with the fixing nut 36 properly fastened.

[0038] In this embodiment, the mount 30 and the fixing nut 36 are collectively referred to as a blade mount 38. That is, the cutting blade 34 is attached to the tip portion 28a of the spindle 28 via the blade mount 38.

[0039] A cylindrical boss portion 26a is provided at the tip end of the spindle housing 26 so as to surround the outer periphery of the first boss portion 30a. An annular groove 26b is formed around the inner periphery of the boss portion 26a.

[0040] A suction passage 26c connected to the annular groove 26b is formed in the boss portion 26a. One end of the suction passage 26c is connected to the first flow passage 30b of the mounter 30 via a gap. The other end of the suction passage 26c is exposed on the outer peripheral side surface of the boss portion 26a and is connected to one end of a second flow passage 40 for applying negative pressure or positive pressure to the first flow passage 30b.

[0041] The second flow path 40 in this example branches into two, and one of the branches is connected to a negative pressure source 44 such as an ejector via a first solenoid valve 42. The other branch is connected to an air supply source 48 having an air compressor, an air tank, etc. via a second solenoid valve 46.

[0042] In the second flow path 40, a measuring device 50 is connected between the first solenoid valve 42, the second solenoid valve 46, and one end of the second flow path 40. The measuring device 50 includes one or both of a pressure gauge and a flow meter, and obtains a measured value of at least one of the pressure in the second flow path 40 and the flow rate of air (fluid) flowing through the second flow path 40.

[0043] As the pressure gauge, for example, a diaphragm pressure gauge can be used, and as the flow meter, for example, an ultrasonic flow meter or an electromagnetic flow meter can be used. The measuring device 50 is used when inspecting whether the fixing nut 36 is properly screwed into the second boss portion 30d.

[0044] For example, when inspecting the screwing state of the fixing nut 36 under negative pressure, the first solenoid valve 42 is opened and the second solenoid valve 46 is closed, and negative pressure is applied to the first flow path 30b for a predetermined time (e.g., 10 seconds). At this time, the measuring device 50 measures the pressure or flow rate of the second flow path 40.

[0045] Furthermore, for example, when inspecting the screwing state of the fixing nut 36 with positive pressure, the first solenoid valve 42 is closed and the second solenoid valve 46 is opened, and positive pressure is applied to the first flow path 30b for a predetermined time (for example, 10 seconds). At this time, the measuring device 50 measures the pressure or flow rate of the second flow path 40.

[0046] A control unit 52 (see FIG. 1) is connected to the measuring device 50. The control unit 52 is configured by a computer including, for example, a processing device such as a processor represented by a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory.

[0047] The auxiliary storage device stores software, and the functions of the control unit 52 are realized by operating the processing device and the like in accordance with this software. The auxiliary storage device stores a program for comparing the measurement value obtained by the measuring device 50 with a predetermined threshold value.

[0048] This program is executed by a computer to function as the screwing state determination unit 54. The screwing state determination unit 54 may be configured with an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or the like.

[0049] The screw-fitting state determination unit 54 compares at least one of the pressure value of the second flow path 40 (measured value obtained by the measuring device 50) and the flow rate value of the second flow path 40 (measured value obtained by the measuring device 50) with a predetermined threshold value.

[0050] Now, referring to Figures 3 and 4, consider the case where negative pressure is applied to the first flow path 30b with the fixing nut 36 at least partially screwed onto the second boss portion 30d on which the cutting blade 34 is disposed.

[0051] 3, when the fixing nut 36 is properly fastened, a closed space is formed between the cutting blade 34 and the flange portion 30f, so that when negative pressure is applied to the first flow passage 30b, the pressure in the second flow passage 40 becomes a relatively low pressure value A1. Also, the flow rate in the second flow passage 40 becomes a relatively low flow rate value B1.

[0052] Fig. 4 is a partial cross-sectional side view of the cutting unit 24 in which the fixing nut 36 is not properly fastened. In Fig. 4, the fixing nut 36 is screwed to the mounter 30 with the rotation axis of the fixing nut 36 inclined obliquely with respect to the central axis of the second boss portion 30d.

[0053] Therefore, the fixing nut 36 does not reach the base end side of the second boss portion 30d as in Fig. 3, but stops at the tip end side of the second boss portion 30d compared to the case of Fig. 3. In this case, the cutting blade 34 is not sufficiently fixed by the mounter 30 and the fixing nut 36.

[0054] In addition, the space defined by the cutting blade 34 and the flange portion 30f is not a closed space, and a gap 58a may be formed between the cutting blade 34 and the flange portion 30f. Furthermore, a gap 58b may be formed between the other surface 34a2 and the flange portion 36c.

[0055] As shown in FIG. 4, when a negative pressure is applied to the first flow path 30b with the gap 58a formed, air flows in through the gap 58a, so that the pressure in the second flow path 40 becomes a relatively high high pressure value A3 and the flow rate in the second flow path 40 becomes a relatively high high flow rate value B3.

[0056] Therefore, when a negative pressure is applied to the first flow path 30b, a predetermined value between the low pressure value A1 and the high pressure value A3 is set as the pressure threshold value A2 in the screwing state determination unit 54. Also, a predetermined value between the low flow rate value B1 and the high flow rate value B3 is set as the flow rate threshold value B2 in the screwing state determination unit 54.

[0057] The relationship between the pressure and the flow rate when negative pressure is applied to the first flow path 30b is shown in Table 1. If the pressure value is an abnormal value greater than the threshold value A2, the screwing state determination unit 54 determines that the screwing state of the fixing nut 36 into the second boss portion 30d is poor, and if the flow rate value is an abnormal value greater than the threshold value B2, it determines that the screwing state is poor.

[0058] [Table 1]

[0059] Next, a case where positive pressure, not negative pressure, is applied to the first flow passage 30b will be described. When the fixing nut 36 is properly fastened (see FIG. 3), a closed space is formed by the cutting blade 34 and the flange portion 30f.

[0060] In this case, when a positive pressure is applied to the first flow path 30b, air does not flow out from the gap 58a, so the pressure in the second flow path 40 becomes a relatively high high pressure value A6. In contrast, since no air flows out from the gap 58a, the flow rate in the second flow path 40 becomes a relatively low low flow rate value B4.

[0061] On the other hand, if the fixing nut 36 is not tightened correctly (see FIG. 4), when positive pressure is applied to the first flow path 30b, a gap 58a is formed, and the pressure in the second flow path 40 becomes a relatively low low pressure value A4, but the flow rate in the second flow path 40 becomes a relatively high high flow rate value B6.

[0062] Therefore, when a positive pressure is applied to the first flow path 30b, a predetermined value between the low pressure value A4 and the high pressure value A6 is set as a pressure threshold value A5 in the screwing state determination unit 54. Also, a predetermined value between the low flow rate value B4 and the high flow rate value B6 is set as a flow rate threshold value B5 in the screwing state determination unit 54.

[0063] The relationship between the pressure and the flow rate when a positive pressure is applied to the first flow path 30b is shown in Table 2. If the pressure value is an abnormal value smaller than the threshold value A5, the screwing state determination unit 54 determines that the screwing state of the fixing nut 36 into the second boss portion 30d is poor, and if the flow rate value is an abnormal value larger than the threshold value B5, it determines that the screwing state is poor.

[0064] [Table 2]

[0065] The result of the determination by the screwing state determination unit 54 is notified to an operator (not shown) by the notification unit 56. The notification unit 56 has at least one of a monitor 56a, a lamp 56b, and a speaker (not shown). For example, the monitor 56a displays whether the screwing state is good or bad.

[0066] Also, for example, when the screwing state is good, the lamp 56b lights up in a first color (for example, blue), and when the screwing state is poor, the lamp 56b lights up in a second color (for example, red) different from the first color.

[0067] Furthermore, for example, if the screwing state is good, the speaker will emit a voice message saying "The screwing state is good" or "It is normal," and if the screwing state is poor, the speaker will emit a voice message saying "The screwing state is poor" or "It is abnormal."

[0068] The notification unit 56 , together with the second flow path 40 , the measuring device 50 and the screw-fitting state determination unit 54 , constitutes a determination unit 60 that determines the state of the cutting blade 34 in the blade mount 38 .

[0069] When it is reported that the screwing state of the fixing nut 36 is poor, for example, an operator stops the operation of the cutting device 2 and inspects the screwing state of the fixing nut 36 or adjusts the attachment of the fixing nut 36. Therefore, cutting of the workpiece 11 in a state where the cutting blade 34 is not properly attached can be prevented.

[0070] 1, a description will now be given of other components of the cutting device 2. A door section 59 is provided on the side surface of the cover member 22 facing the load / unload area. The door section 59 moves up and down or left and right to open and close a portion of the cover member 22.

[0071] A first transport unit 62 is provided above the base 4. The first transport unit 62 has an air cylinder connected to a horizontal movement mechanism (not shown) and with its longitudinal portion arranged along the Z-axis direction. A suction unit 62a is provided at the lower end of the rod of the air cylinder.

[0072] A gripping mechanism 62b capable of gripping a part of the outer periphery of the frame 15 is provided at the end of the suction unit 62a on the elevator 6 side. Above the first transport unit 62, an arm portion of a second transport unit 64 is provided.

[0073] A horizontal movement mechanism (not shown) is connected to one end of the arm, and an air cylinder with a longitudinal portion arranged along the Z-axis direction is connected to the other end of the arm. A suction unit 64a is provided at the lower end of the rod of the air cylinder.

[0074] Here, a brief description will be given of a procedure for cutting the workpiece 11 using the cutting device 2. First, the first transport unit 62 grips the frame 15 with the gripping mechanism 62b, and pulls out the workpiece unit 17 from the cassette 8 onto the pair of guide rails 14.

[0075] After the pair of guide rails 14 adjust the position of the workpiece unit 17 in the Y-axis direction, the first transport unit 62 adsorbs the frame 15 with the suction unit 62a and transports the workpiece unit 17 to the chuck table 20 arranged in the loading / unloading area.

[0076] Thereafter, the chuck table 20 moves to the cutting area while suction-holding the back side of the workpiece 11 with the holding surface. After the orientation of the planned dividing line (not shown) of the workpiece 11 in the XY plane is adjusted by alignment, the cutting unit 24 cuts the workpiece 11.

[0077] After cutting, the chuck table 20 moves to the carry-in / out area. The second transport unit 64 adsorbs the frame 15 with the suction unit 64a, and transports the workpiece unit 17 from the chuck table 20 to the cleaning unit 10.

[0078] After the workpiece 11 is washed and dried in the washing unit 10, the first transport unit 62 uses the pair of guide rails 14 to transport the workpiece unit 17 to the cassette 8. In this manner, the workpieces 11 are cut one after another.

[0079] However, as cutting progresses, the cutting blade 34 wears, and it is necessary to replace the worn cutting blade 34. The cutting device 2 of this embodiment has a blade replacement unit 66 for automatically replacing the hub-type cutting blade 34.

[0080] The blade replacing unit 66 will be described with reference to Figures 5 and 6. Figure 5 is a perspective view of the blade replacing unit 66, and Figure 6 is a side view of the replacing mechanism 90. The blade replacing unit 66 has a base plate 68 fixed to the base 4.

[0081] A lifting mechanism 72 for moving the articulated robot 70 along the Z-axis direction is provided on the base plate 68. The articulated robot 70 and the lifting mechanism 72 constitute a moving unit 74 for moving an exchange mechanism 90 (e.g., a blade holding jig 94, a fixing nut holding unit 96, etc.) described later.

[0082] The lifting mechanism 72 has a motor (not shown) provided on the lower part of the base plate 68, and a drive pulley (not shown) connected to the rotation shaft of the motor. In addition, a driven pulley (not shown) is provided on the upper part of the base plate 68.

[0083] A toothed endless belt (not shown) is hung between the drive pulley and the driven pulley, and a metal first support 76 is fixed to a part of this toothed endless belt. The first support 76 moves along the Z-axis direction in association with the movement of the toothed endless belt.

[0084] The lifting mechanism 72 is not limited to a toothed endless belt or the like. The lifting mechanism 72 may be a ball screw type. A first rotation mechanism 78 having a rotation drive source such as a motor is attached to the first support 76.

[0085] One end of a first arm 80 is connected to the first rotation mechanism 78. The first rotation mechanism 78 rotates and moves the first arm 80 within the XY plane. The other end of the first arm 80 is connected to a second rotation mechanism 82 having a rotation drive source such as a motor.

[0086] One end of a second arm 84 is connected to the second rotation mechanism 82. The second rotation mechanism 82 rotates and moves the second arm 84 within the XY plane. The other end of the second arm 84 is connected to a third rotation mechanism 86 having a rotation drive source such as a motor.

[0087] A second support 88 made of metal is connected to the third rotation mechanism 86. The third rotation mechanism 86 rotates and moves the second support 88 within the XY plane. An exchange mechanism 90 is fixed to the second support 88.

[0088] The replacement mechanism 90 is moved between a retracted position (see, for example, FIG. 1) and a replacement position (see, for example, FIG. 5) in which the first arm 80, the second arm 84, etc. are deployed. The replacement mechanism 90 has a housing 92 having a substantially cylindrical shape.

[0089] A rotation drive source (not shown) such as a motor for rotating the housing 92 is accommodated inside the housing 92. The rotation drive source enables the housing 92 to rotate around a rotation axis 92a that is aligned with the longitudinal direction (i.e., the height direction) of the cylinder of the housing 92.

[0090] A pair of blade holding jigs (blade holding portions) 94 are arranged on the side surfaces of the housing 92 so as to sandwich the rotation shaft 92a therebetween. The blade holding jig 94 has a cylindrical frame body with a bottom made of metal or the like.

[0091] An annular member made of an elastic material such as rubber, resin, or elastomer is disposed in the opening of the frame, and capable of suction-holding the base 34a of the cutting blade 34. The annular member has a plurality of openings (not shown) formed along the circumferential direction of the annular member, and one end of a third flow path (not shown) is connected to each opening.

[0092] A negative pressure source (not shown) such as an ejector is connected to the third flow path via a third solenoid valve (not shown). Also, an air supply source (not shown) is connected to the third flow path via a fourth solenoid valve (not shown).

[0093] When the third solenoid valve is opened and the fourth solenoid valve is closed, the cutting blade 34 can be sucked and held by the blade holding jig 94. On the other hand, when the third solenoid valve is closed and the fourth solenoid valve is opened, air can be used to release the cutting blade 34 from the blade holding jig 94. In this way, the blade holding jig 94 can hold the cutting blade 34 in a detachable manner.

[0094] A fixed nut holding portion 96 that rotatably holds the fixed nut 36 is provided between the pair of blade holding jigs 94 in the circumferential direction of the side surface of the housing 92. The fixed nut holding portion 96 has a disk-shaped base portion 98 (see FIG. 6).

[0095] Four insertion pins 100, each of which can be inserted into the pin insertion portions 36b, are arranged on one surface of the base portion 98 at approximately equal intervals in the circumferential direction of the base portion 98. One end of a rotating shaft 102 is fixed to the other surface of the base portion 98, and the other end of the rotating shaft 102 is connected to a driving unit 104, such as a motor.

[0096] A cylindrical cover 106 is provided on the outer periphery of the base portion 98. The cover 106 can be advanced and retreated along the longitudinal direction of the rotating shaft 102 by an actuator 108 fixed to the rotating shaft 102.

[0097] Four claws 110 are disposed at approximately equal intervals in the circumferential direction of the base portion 98 between the base portion 98 and the cover 106. Each claw 110 has a base end connected to the rotating shaft 102 in a state in which it is biased radially outward from the base portion 98 by a biasing member (not shown) such as a spring.

[0098] When the cover 106 is moved (retracted) in a direction approaching the housing 92, the tip of the claw portion 110 moves radially outward of the base portion 98. In contrast, when the cover 106 is moved (advanced) in a direction away from the housing 92, the tip of the claw portion 110 moves radially inward of the base portion 98.

[0099] Next, an example of automatically replacing the cutting blade 34 using the blade replacing unit 66 will be described. For example, first, the replacement mechanism 90 is placed above the blade stock table 112 arranged near the opening 4b by utilizing the moving part 74.

[0100] Then, the new cutting blade 34 is suction-held by one of the blade holding jig 94. Next, the replacement mechanism 90 is inserted into the interior of the cover member 22 through the open door portion 59, and the fixing nut 36 is removed from the second boss portion 30d by utilizing the fixing nut holding portion 96.

[0101] Specifically, with multiple insertion pins 100 inserted into the corresponding pin insertion portions 36b, the outer periphery of the fixing nut 36 is held with the tip of the claw portion 110 and the rotating shaft 102 is rotated in a predetermined direction, whereby the fixing nut 36 can be removed.

[0102] Next, the used cutting blade 34 is sucked and held by the other blade holding jig 94, and then the one blade holding jig 94 is made to face the mounter 30 and a new cutting blade 34 is placed on the second boss portion 30d.

[0103] The fixing nut 36 is then attached to the second boss portion 30d by the fixing nut holding portion 96. Specifically, with each insertion pin 100 inserted into the corresponding pin insertion portion 36b, the outer periphery of the fixing nut 36 is held by the tip of the claw portion 110, and the rotating shaft 102 is rotated in the direction opposite to the predetermined direction, whereby the fixing nut 36 can be attached to the second boss portion 30d.

[0104] In this embodiment, even when the cutting blade 34 is automatically replaced using the blade replacement unit 66, the judgment unit 60 is used to judge the screwing state of the fixing nut 36. Therefore, a defective screwing state of the cutting blade 34 caused by insufficient adjustment of the replacement mechanism 90 or the like can be detected before cutting.

[0105] Next, a method for determining the screw-on state of the fixing nut 36 will be described with reference to Figures 7(A) and 7(B). Figure 7(A) is a flow diagram of a determination method for determining the screw-on state of the fixing nut 36 by negative pressure.

[0106] In the mounting step S10, with the cutting blade 34 placed on the second boss portion 30d, the fixing nut 36 is screwed onto the second boss portion 30d with a predetermined torque by the fixing nut holder 96. Next, the first solenoid valve 42 is closed, and the second solenoid valve 46 is momentarily opened (for example, for a predetermined time of one second or less), to apply positive pressure to the first flow path 30b and the second flow path 40.

[0107] In this manner, air is temporarily blown to the base 34a (blow step S20). If the screwing state is poor as shown in Fig. 4, the cutting blade 34 moves toward the fixing nut 36 side in the blow step S20.

[0108] This prevents the screw-threaded state determination unit 54 from erroneously determining that the screw-threaded state is good when, in fact, the screw-threaded state is poor as shown in FIG. 4 and the base 34a happens to be in contact with the flange portion 30f, resulting in application of negative pressure to the first flow path 30b.

[0109] After the blowing process S20, the first solenoid valve 42 is opened and the second solenoid valve 46 is closed for a predetermined time, and negative pressure is applied to the first flow path 30b and the second flow path 40, so that the screw-threaded state determination unit 54 determines whether the screw-threaded state is good or bad (determination process S30).

[0110] In the judgment step S30, the screwed state judgment unit 54 may judge the quality based on only the pressure value, or may judge the quality based on only the flow rate value. Also, the screwed state judgment unit 54 may judge the quality based on both the pressure value and the flow rate. If the screwed state is good, the judgment is terminated.

[0111] On the other hand, if the screwing state is poor, the worker is notified of this via the notification unit 56 (notification step S40). When the worker receives the notification, the worker manually adjusts the attachment of the fixing nut 36 or adjusts the blade replacement unit 66 to reattach the fixing nut 36 (correction step S50).

[0112] After the correction step S50, the process returns to the blowing step S20 again. If the screwing state is still poor even after multiple correction steps S50, it may be determined that there is a physical abnormality in the fixing nut 36, the blade replacement unit 66, or the like, and the determination may be terminated.

[0113] Fig. 7(B) is a flow diagram of a determination method when positive pressure is used to determine the screwing state of the fixing nut 36. When positive pressure is used, the method is the same as Fig. 7(A) when negative pressure is used, except that there is no blowing step S20, so a duplicated description will be omitted.

[0114] When positive pressure is used, after the installation process S10, the first solenoid valve 42 is closed and the second solenoid valve 46 is opened for a predetermined time, and positive pressure is applied to the first flow path 30b and the second flow path 40, so that the screw-threaded state determination unit 54 determines whether the screw-threaded state is good or bad (determination process S30).

[0115] In the above-described embodiment, an example was described in which the screw-threaded state determination unit 54 determines the screw-threaded state of the fixing nut 36, but the screw-threaded state determination unit 54 can also determine the insertion state of the cutting blade 34 inserted into the second boss portion 30d.

[0116] Specifically, after the second boss portion 30d is inserted into the central hole 34b of the cutting blade 34 and before the fixing nut 36 is screwed onto the second boss portion 30d, the insertion state of the cutting blade 34 is determined using negative pressure.

[0117] For example, when the cutting blade 34 is inserted at an angle relative to the second boss portion 30d, when negative pressure is applied to the first flow path 30b, etc., the pressure value and flow rate value become abnormal values ​​higher than the threshold value due to the gap between the one surface 34a1 and the flange portion 30f.

[0118] In this case, the screwing state determination unit 54 determines that the insertion is improper, and prompts the user to reinsert the cutting blade 34 through the notification unit 56. However, when the insertion state of the cutting blade 34 is determined by negative pressure, there is a risk that the cutting blade 34 may come off the second boss portion 30d, so the blowing process S20 described in FIG. 7(A) is not performed.

[0119] In this way, by the screwing state determination unit 54 determining the insertion state of the cutting blade 34, it is possible to prevent the cutting blade 34, which is inserted obliquely into the second boss portion 30d, from being forcibly fixed by the fixing nut 36. Therefore, damage to the second boss portion 30d can also be prevented.

[0120] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. For example, instead of the hub-type cutting blade 34, a circular cutting blade (i.e., a hubless-type cutting blade 34) may be clamped between a retaining nut (not shown) and the flange portion 30f.

[0121] However, even in this case, the fixing nut 36 is disposed on the side of the retaining nut opposite the cutting blade 34. That is, the fixing nut 36 is screwed into the second boss portion 30d in the same manner as in the case of the cutting blade 34, so it is preferable to determine the screwed state of the fixing nut 36.

[0122] Furthermore, the screwing state determination unit 54 may determine the insertion state of the hubless-type cutting blade 34 inserted into the second boss portion 30d before screwing the fixing nut 36. In particular, the hubless-type cutting blade 34 has a smaller area in contact with the second boss portion 30d than the hub-type cutting blade, and is therefore more likely to fall off from the second boss portion 30d.

[0123] In addition, the hubless-type cutting blade 34 is lighter in weight than the hub-type, so even if it falls, there is almost no noise or vibration. Therefore, there is a problem that it is difficult for an operator to notice that the cutting blade 34 has fallen.

[0124] However, according to the above-mentioned determination method, the insertion state of the hubless-type cutting blade 34 can be automatically determined by the screwing state determination unit 54. This makes it possible to prevent the fixing nut 36 from being screwed into the second boss portion 30d when the cutting blade 34 is not inserted into the second boss portion 30d.

[0125] Incidentally, the control unit 52 may be connected by wire or wirelessly to a server (not shown) disposed outside the cutting device 2, and transmit the judgment result to the external server every time a judgment is made. If the judgment result is recorded in the external server, the judgment result can be used when a defect analysis is performed later. [Explanation of symbols]

[0126] 2: cutting device, 4: base, 4a, 4b: opening, 6: elevator, 6a: lifting platform 8: cassette, 10: cleaning unit, 12: spinner table, 14: guide rail 11: workpiece, 13: dicing tape, 15: frame, 17: workpiece unit 16: Table cover, 18: Accordion cover 20: chuck table, 20a: clamp unit 22: cover member, 24: cutting unit 26: spindle housing, 26a: boss portion, 26b: annular groove, 26c: suction passage 28: spindle, 28a: tip, 28b: screw hole 30: mounter, 30a: first boss portion, 30b: first flow passage, 30c, 30h: openings 30d: second boss portion (boss portion), 30e: male thread, 30f: flange portion, 30g: recess 32: Male thread, 34: Cutting blade 34a: base, 34a1: one surface, 34a2: other surface, 34b: central hole, 34c: cutting blade 36: fixing nut, 36a: screw hole, 36b: pin insertion portion, 36c: flange portion 38: Blade mount, 40: Second flow path 42: first solenoid valve, 44: negative pressure source, 46: second solenoid valve, 48: air supply source 50: Measuring instrument, 52: Control unit 54: Screw-in state determination unit, 56: Notification unit, 56a: Monitor, 56b: Lamp 58a, 58b: gap, 59: door section, 60: judgment unit 62: first transport unit, 62a: suction unit, 62b: gripping mechanism 64: second transport unit, 64a: suction unit 66: Blade replacement unit, 68: Base plate, 70: Articulated robot 72: lifting mechanism, 74: moving part, 76: first support, 78: first rotation mechanism 80: first arm, 82: second rotation mechanism 84: second arm, 86: third rotation mechanism 88: second support, 90: exchange mechanism, 92: housing, 92a: rotating shaft 94: Blade holding jig (blade holding part), 96: Fixing nut holding part 98: base portion, 100: insertion pin, 102: rotating shaft, 104: drive portion, 106: cover 108: actuator, 110: claw portion, 112: blade stock table

Claims

1. a cutting unit having a spindle and an annular cutting blade attached to a tip of the spindle via a blade mount; a determination unit for determining a state of the cutting blade in the blade mount, The blade mount comprises: a mounter fixed to a tip end of the spindle; a fixing nut for pressing the cutting blade against the mount to clamp the cutting blade together with the mount, The mounter is a boss portion that is inserted into a central hole of the cutting blade and has a male thread into which the fixing nut is screwed; an annular flange portion located on the base end side of the boss portion, protruding outward from the boss portion in the radial direction of the boss portion, and capable of contacting the cutting blade when the cutting blade is inserted into the boss portion; a first flow passage formed in the mounter and connected to an opening located outside the boss portion and inside the flange portion; The judgment unit comprises: a second flow passage connected to the first flow passage of the mounter for applying a negative pressure or a positive pressure to the first flow passage; a measuring device for obtaining a measurement value of at least one of a pressure in the second flow path and a flow rate of a fluid flowing through the second flow path; a threaded state determination unit that determines that the threaded state of the fixing nut to the boss portion is poor if the measurement value indicates an abnormal value when negative pressure or positive pressure is applied to the first flow path with the fixing nut at least partially threaded onto the boss portion of the mounter on which the cutting blade is disposed; and and a notification unit that notifies a result of the determination by the threaded state determination unit.

2. Further comprising a blade changing unit, The blade replacement unit comprises: a blade holding portion that detachably holds the cutting blade; A fixing nut holding portion that rotatably holds the fixing nut; 2. The cutting device according to claim 1, further comprising a moving section for moving the blade holding section and the fixing nut holding section.

3. A cutting device as described in claim 1 or 2, characterized in that the judgment unit further has a first solenoid valve connected to the first flow path for applying negative pressure from a negative pressure source to the first flow path, and a second solenoid valve connected to the first flow path for applying positive pressure from an air supply source to the first flow path.

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