Substrate with multilayer reflective film, reflective mask blank, reflective mask, and method for manufacturing semiconductor device

Abstract

To provide a substrate having a thin film for manufacturing a reflection type mask, which at least imparts no adverse effect on a performance of the reflection type mask, even if impurities are included in the thin film of the substrate having a thin film such as a reflection type mask blank.SOLUTION: A substrate having a thin film includes: a substrate; and at least one thin film disposed on a main surface of the substrate. The thin film includes: a base material constituting the thin film; and a trace quantity material other than the base material. When a secondary ionic intensity discharged from the thin film is measured by a time-of-flight secondary ion mass spectrometry (TOF-SIMS), a ratio (I2 / I1) of at least one secondary ionic intensity (I2) of the trace quantity material in the thin film to a secondary ionic intensity (I1) of the base material is larger than 0 and 0.300 or less.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a reflective mask used in the manufacture of a semiconductor device, a multilayer reflective film-coated substrate and a reflective mask blank used for the manufacture of a reflective mask, and a method for manufacturing a semiconductor device using the reflective mask. [Background technology]

[0002] In recent years, in the semiconductor industry, with the increasing integration of semiconductor devices, fine patterns exceeding the transfer limit of conventional photolithography using ultraviolet light are required. To enable the formation of such fine patterns, EUV lithography, which is an exposure technology using extreme ultraviolet (hereinafter referred to as "EUV") light, is considered to be promising. Here, EUV light refers to light in a wavelength band in the soft X-ray region or the vacuum ultraviolet region, specifically light with a wavelength of about 0.2 to 100 nm. A reflective mask has been proposed as a transfer mask used in EUV lithography. The reflective mask has a multilayer reflective film formed on a substrate for reflecting exposure light, and an absorber film pattern that is a patterned absorber film formed on the multilayer reflective film for absorbing exposure light.

[0003] The reflective mask is manufactured from a reflective mask blank having a substrate, a multilayer reflective film formed on the substrate, and an absorber film formed on the multilayer reflective film. The absorber film pattern is manufactured by forming a pattern of the absorber film by a photolithography method or the like.

[0004] A multilayer reflective film-coated substrate for manufacturing a reflective mask blank is required to have higher smoothness in view of the improvement of defect quality accompanying the recent finer patterns and the optical properties required for transfer masks. A multilayer reflective film is formed by alternately laminating a high refractive index layer and a low refractive index layer on the surface of a mask blank substrate. The high refractive index layer and the low refractive index layer are generally formed by a sputtering method such as ion beam sputtering.

[0005] As a technique for producing a substrate with a multilayer reflective film, Patent Document 1 describes that when forming a multilayer reflective film of a reflective mask blank for EUV lithography on a substrate, ion beam sputtering is performed while rotating the substrate around its central axis and maintaining the absolute value of the angle α between the normal to the substrate and the sputtered particles incident on the substrate within the range of 35 degrees≦α≦80 degrees.

[0006] US Patent No. 5,399,663 describes a method for coating a deposition chamber shield of a deposition chamber for depositing a material on a substrate. Specifically, US Patent No. 5,399,663 describes the steps of: a) providing a deposition shield having a prepared surface; b) coating the prepared shield surface with a stainless steel coating having a thickness of about 100 microns to about 250 microns; and c) cleaning the coated surface to remove loose particles to achieve a surface roughness of between about 300 microinches to about 800 microinches and about 0.1 particles / mm2 of a size between about 1 micron to about 5 microns. 2 providing a stainless steel coated shield having a surface particle density of less than about 1 micron in size and no particles less than about 1 micron in size.

[0007] Patent Document 3 describes a method for manufacturing a substrate with a reflective layer for EUV lithography (EUVL). Specifically, the manufacturing method described in Patent Document 3 includes a step of forming a Mo / Si multilayer reflective film by alternately depositing a molybdenum (Mo) film and a silicon (Si) film on a substrate, and a step of depositing a ruthenium (Ru) film or a Ru compound film as a protective layer on the multilayer reflective film. Patent Document 3 further describes that, based on the erosion region of the sputtering target (Si target) used for depositing the Si film, the erosion region and non-erosion region of the sputtering target (Ru target or Ru compound target) used for depositing the Ru film or Ru compound film are predicted, and the predicted non-erosion region of the Ru target or Ru compound target is roughened before depositing the Ru film or Ru compound film. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] Special Publication No. 2009-510711 [Patent Document 2] JP 2013-174012 A [Patent Document 3] JP 2012-129520 A Summary of the Invention [Problem to be solved by the invention]

[0009] The reflective mask has at least a substrate, a multilayer reflective film for reflecting the exposure light, and an absorber pattern for absorbing the exposure light. The reflective mask is manufactured by patterning the absorber film of a reflective mask blank to form an absorber pattern. The reflective mask blank has a substrate, a multilayer reflective film, and an absorber film, and may further have thin films such as a back conductive film, a protective film, and an etching mask film, as necessary. Note that a substrate having at least one thin film selected from a multilayer reflective film, an absorber film, a back conductive film, a protective film, and an etching mask film formed on the main surface of the substrate is called a substrate with a thin film.

[0010] A sputtering method is generally used to deposit a thin film such as a multilayer reflective film on the main surface of a substrate. A deposition apparatus using the sputtering method is a vacuum deposition apparatus. That is, deposition using the sputtering method is performed in a vacuum chamber with the inside evacuated. In a vacuum deposition apparatus, deposition of a film on parts other than the substrate in the vacuum chamber is inevitable. If a film deposited on parts other than the substrate peels off and adheres to the substrate, it causes defects. In order to prevent defects from occurring in the deposited thin film due to peeling of the attached film, a shield can be placed in the vacuum chamber. In order to prevent the film deposited on the surface of the shield from peeling off, the surface of the shield is blasted or a thermal spray coating is formed on the surface of the shield. Materials such as alumina, titania, and yttria are often selected as the material of the blasting particles and the material of the thermal spray coating.

[0011] On the other hand, even if the surface of the shield is treated as described above, the thin film formed on the substrate may contain materials (trace materials) originating from materials inside the chamber, such as the shield. The reason for this is believed to be that the components, such as the shield, are also exposed to plasma, ion beams, etc., when forming the thin film. Ideally, it is preferable to reduce the content of trace materials contained in the thin film to zero. However, for the reasons described above, it is very difficult to reduce the content of trace materials originating from materials inside the chamber of the vacuum film forming apparatus to zero in the thin film, considering the cost and production efficiency. Depending on the type of substance, impurities contained in the thin film may affect the characteristics of the reflective mask blank and the reflective mask, the EUV reflectance of the multilayer reflective film, the occurrence of defects during etching, the durability of the reflective mask, etc.

[0012] Incidentally, even when a thin film is formed using a film formation method other than the sputtering method, as described above, it is conceivable that trace amounts of impurities originating from the material constituting the vacuum chamber may be mixed into the thin film of the reflective mask blank and the reflective mask.

[0013] Therefore, an object of the present invention is to provide a reflective mask that at least does not adversely affect the performance of the reflective mask even if impurities are contained in the reflective mask blank and the thin film of the reflective mask. Another object of the present invention is to provide a thin film-attached substrate such as a reflective mask blank for manufacturing the above-mentioned reflective mask. A further object of the present invention is to provide a method for manufacturing a semiconductor device using the above-mentioned reflective mask. [Means for solving the problem]

[0014] In order to solve the above problems, the present invention has the following configuration.

[0015] (Configuration 1) A first aspect of the present invention is a thin-film-attached substrate having a substrate and at least one thin film provided on a main surface of the substrate, the thin film includes a base material constituting the thin film and a trace amount of a material other than the base material, The thin-film-formed substrate is characterized in that, when the intensity of secondary ions emitted from the thin film is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS), the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material is greater than 0 and less than 0.300.

[0016] (Configuration 2) A second aspect of the present invention is the thin-film-formed substrate of the first aspect, wherein the trace material contains at least one element selected from the group consisting of yttrium (Y), zirconium (Zr), niobium (Nb), aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni), and copper (Cu).

[0017] (Configuration 3) A third aspect of the present invention is the thin-film-coated substrate according to the first or second aspect, wherein the thin film is at least one selected from a back surface conductive film, a multilayer reflective film, a protective film, an absorber film, and an etching mask film.

[0018] (Configuration 4) A fourth aspect of the present invention is the thin-film-coated substrate according to the third aspect, wherein the thin film is a multilayer reflective film, and the base material is molybdenum (Mo).

[0019] (Configuration 5) A fifth aspect of the present invention is the thin-film-formed substrate according to the third aspect, wherein the thin film is a protective film and the base material is ruthenium (Ru).

[0020] (Configuration 6) A sixth aspect of the present invention is a reflective mask blank, characterized in that the thin film is at least one selected from a multilayer reflective film and a protective film, and that the reflective mask blank has an absorber film on the thin film-coated substrate of any one of the first to fifth aspects.

[0021] (Configuration 7) A seventh aspect of the present invention is a reflective mask, characterized in that the absorber film in the reflective mask blank of the sixth aspect has an absorber pattern formed by patterning.

[0022] (Configuration 8) Configuration 8 of the present invention is a method for manufacturing a semiconductor device, comprising the steps of setting the reflective mask of configuration 7 in an exposure apparatus having an exposure light source that emits EUV light, and transferring a transfer pattern to a resist film formed on a transfer substrate. Effect of the Invention

[0023] According to the present invention, it is possible to provide a reflective mask that does not adversely affect the performance of the reflective mask even if impurities are contained in the thin film of the reflective mask. Also, according to the present invention, it is possible to provide a thin film-coated substrate such as a reflective mask blank for manufacturing the above-mentioned reflective mask. Furthermore, it is possible to provide a method for manufacturing a semiconductor device using the above-mentioned reflective mask. [Brief description of the drawings]

[0024] [Figure 1] 1 is a schematic cross-sectional view of an example of a multilayer reflective film-coated substrate (substrate with thin film) of the present embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view of another example of a multilayer reflective film-coated substrate (substrate with thin film) of the present embodiment. [Diagram 3] 1 is a schematic cross-sectional view of an example of a substrate with a back surface conductive film (substrate with a thin film) of the present embodiment. [Figure 4] FIG. 2 is a schematic cross-sectional view of yet another example of a multilayer reflective film-coated substrate (substrate with thin film) of the present embodiment. [Diagram 5] FIG. 2 is a schematic cross-sectional view of an example of a reflective mask blank (substrate with thin film) of the present embodiment. [Figure 6] FIG. 2 is a schematic cross-sectional view of another example of a reflective mask blank (substrate with thin film) of the present embodiment. [Figure 7] 1A to 1C are schematic cross-sectional views illustrating steps of a method for manufacturing a reflective mask according to an embodiment of the present invention. [Figure 8] FIG. 1 is a schematic diagram of the internal structure of an ion beam sputtering apparatus. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that the following embodiments are merely for the purpose of specifically explaining the present invention, and are not intended to limit the scope of the present invention.

[0026] This embodiment is a thin-film-attached substrate having a thin film on at least one of the two main surfaces of a mask blank substrate (also simply referred to as a "substrate"). The thin film included in the thin-film-attached substrate of this embodiment contains a predetermined material (base material and trace material) as described below. In this specification, the thin film containing a predetermined material used in this embodiment may be referred to as a "predetermined thin film."

[0027] Fig. 1 is a schematic diagram showing an example of a multilayer reflective film-coated substrate 110, which is an example of a thin-film-coated substrate 120 of this embodiment. The multilayer reflective film-coated substrate 110 shown in Fig. 1 includes a multilayer reflective film 5. In the example shown in Fig. 1, the multilayer reflective film 5 of the multilayer reflective film-coated substrate 110 is a predetermined thin film.

[0028] Fig. 2 is a schematic diagram showing an example of a multilayer reflective film-coated substrate 110, which is another example of the thin-film-coated substrate 120 of this embodiment. The multilayer reflective film-coated substrate 110 shown in Fig. 2 includes a multilayer reflective film 5 and a protective film 6. In the example shown in Fig. 1, the multilayer reflective film 5 and / or the protective film 6 of the multilayer reflective film-coated substrate 110 are predetermined thin films.

[0029] Fig. 3 is a schematic diagram showing an example of a thin-film-attached substrate 120 (substrate with a back surface conductive film) of this embodiment. The thin-film-attached substrate 120 shown in Fig. 3 includes a back surface conductive film 2. In the example shown in Fig. 3, the back surface conductive film 2 of the thin-film-attached substrate 120 is a predetermined thin film.

[0030] Fig. 4 is a schematic diagram showing yet another example of a multilayer reflective film-coated substrate 110, which is an example of the thin-film-coated substrate 120 of this embodiment. The multilayer reflective film-coated substrate 110 shown in Fig. 4 includes a back surface conductive film 2, a multilayer reflective film 5, and a protective film 6. In the example shown in Fig. 4, at least one of the back surface conductive film 2, the multilayer reflective film 5, and the protective film 6 is a predetermined thin film.

[0031] Fig. 5 is a schematic diagram showing an example of a reflective mask blank 100, which is an example of a thin-film-coated substrate 120 of this embodiment. The reflective mask blank 100 shown in Fig. 5 comprises a back surface conductive film 2, a multilayer reflective film 5, a protective film 6, and an absorber film 7. In the example shown in Fig. 5, at least one of the back surface conductive film 2, the multilayer reflective film 5, the protective film 6, and the absorber film 7 is a predetermined thin film.

[0032] Fig. 6 is a schematic diagram showing another example of a reflective mask blank 100, which is an example of a thin-film-coated substrate 120 of the present embodiment. The reflective mask blank 100 shown in Fig. 6 comprises a back surface conductive film 2, a multilayer reflective film 5, a protective film 6, an absorber film 7, and an etching mask film 9. In the example shown in Fig. 6, at least one of the back surface conductive film 2, the multilayer reflective film 5, the protective film 6, the absorber film 7, and the etching mask film 9 is a predetermined thin film.

[0033] In this specification, the term "multilayer reflective film-coated substrate 110" refers to a substrate having a multilayer reflective film 5 formed on a predetermined substrate 1. Examples of schematic cross-sectional views of the multilayer reflective film-coated substrate 110 are shown in Figures 1 and 2. Note that the "multilayer reflective film-coated substrate 110" also includes substrates on which thin films other than the multilayer reflective film 5, such as a protective film 6 and / or a back surface conductive film 2, are formed.

[0034] In this specification, the term "reflective mask blank 100" refers to a multilayer reflective film-coated substrate 110 having an absorber film 7 formed on a multilayer reflective film 5. The "reflective mask blank 100" also includes a structure in which further thin films, such as an etching mask film 9 and a resist film 8, are formed (see FIGS. 6 and 7(b)).

[0035] In this specification, among the main surfaces of the mask blank substrate 1, the main surface on which the back conductive film 2 is formed may be referred to as the "back main surface" or the "second main surface". Also, in this specification, the main surface of the substrate with a back conductive film on which the back conductive film 2 is not formed may be referred to as the "front main surface" (or the "first main surface"). On the front main surface of the mask blank substrate 1, a multilayer reflective film 5 is formed in which high refractive index layers and low refractive index layers are alternately laminated.

[0036] In this specification, "having a predetermined thin film on the main surface of the mask blank substrate 1" means that the predetermined thin film is disposed in contact with the main surface of the mask blank substrate 1, and also includes the case where another film is disposed between the mask blank substrate 1 and the predetermined thin film. The same applies to films other than the predetermined thin film. For example, "having film B on film A" means that film A and film B are disposed so as to be in direct contact with each other, and also includes the case where another film is disposed between film A and film B. In addition, in this specification, for example, "film A is disposed in contact with the surface of film B" means that film A and film B are disposed so as to be in direct contact with each other, without another film being interposed between film A and film B.

[0037] Next, the surface roughness (Rms) which is a parameter indicating the surface morphology of the mask blank substrate 1 and the surface morphology of the thin film constituting the reflective mask blank 100 or the like will be described.

[0038] Rms (Root Mean Square), a typical index of surface roughness, is the square root of the average of the squares of the deviations from the average line to the measured curve. Rms is expressed by the following formula (1).

[0039]

number

[0040] Rms has conventionally been used to control the surface roughness of the mask blank substrate 1, and allows the surface roughness to be grasped numerically.

[0041] [Substrate with thin film 120] Next, the thin-film-coated substrate 120 of this embodiment and the predetermined thin film will be described. The thin-film-coated substrate 120 of this embodiment has a predetermined thin film on at least one of the two main surfaces of the substrate 1.

[0042] 1 to 6 show examples of a thin-film-coated substrate 120 of this embodiment. As described above, the thin-film-coated substrate 120 shown in Figs. 1 and 2 is also called a multilayer reflective film-coated substrate 110. The thin-film-coated substrate 120 shown in Fig. 3 is also called a substrate with a back-surface conductive film. The thin-film-coated substrate 120 shown in Figs. 5 and 6 is also called a reflective mask blank 100.

[0043] In the thin-film-attached substrate 120 of this embodiment, any one of the thin films formed on the thin-film-attached substrate 120 is a predetermined thin film. The predetermined thin film is preferably at least one selected from the back surface conductive film 2, the multilayer reflective film 5, the protective film 6, the absorber film 7, and the etching mask film 9. Moreover, the predetermined thin film is more preferably the multilayer reflective film 5 and / or the protective film 6. In this embodiment, the predetermined thin film is a thin film (such as the multilayer reflective film 5 and the protective film 6) that is usually used when constructing the reflective mask blank 100, and therefore it is possible to manufacture a reflective mask 200 that does not adversely affect the performance of the reflective mask 200.

[0044] [Prescribed thin film] Next, a description will be given of the predetermined thin film of the thin-film-formed substrate 120 of this embodiment. The predetermined thin film included in the thin-film-formed substrate 120 of this embodiment contains a base material constituting the thin film, and a trace amount of material other than the base material.

[0045] In this specification, the term "matrix material" refers to a main material among the materials forming the thin film, and is a material that corresponds to the highest signal intensity when the thin film is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). The signal intensity of TOF-SIMS is not necessarily proportional to the content in the thin film measured by other analytical methods. For example, in the case of a Mo / Si multilayer reflective film 5 consisting of a Mo layer and a Si layer, the atomic ratios of Mo and Si are about 40 atomic % and 60 atomic % when measured by X-ray photoelectron spectroscopy (XPS), but when the Mo / Si multilayer reflective film 5 is measured by TOF-SIMS under the measurement conditions described below, the signal intensity of Mo is detected to be higher than the signal intensity of Si. Therefore, the matrix material of the Mo / Si multilayer reflective film 5 in this embodiment is Mo. The matrix material as described above may be called "the matrix material constituting the thin film".

[0046] In this specification, the term "small-amount material" refers to a material other than the base material contained in the thin film. More specifically, it can refer to a material (element) other than the base material, the content of which in the thin film is 3 atomic % or less as measured by XPS. For example, in the case of the Mo / Si multilayer reflective film 5, the atomic ratio of Si is about 60 atomic %, so it can refer to Si being neither a base material nor a small-amount material.

[0047] Conventionally, it has been believed that impurities contained in a thin film have an adverse effect on the performance of the thin film. Therefore, efforts have been made to make the concentration of impurities contained in the thin film as low as possible (ideally to zero). The present inventors have found that if the content of trace materials (impurities) contained in the thin film of the thin film-formed substrate 120 is within a predetermined range, the performance of the reflective mask 200 manufactured using the thin film-formed substrate 120 is not adversely affected. The present inventors have also found that if the trace materials (impurities) contained in the thin film of the thin film-formed substrate 120 are predetermined materials and the content of the trace materials (impurities) is within a predetermined range, the presence of the trace materials (impurities) in the thin film does not adversely affect the performance of the reflective mask 200, or the presence of the trace materials (impurities) in the thin film can improve the performance of the reflective mask 200. In this specification, impurities that do not adversely affect the thin film even when present, or that can improve the performance of the reflective mask 200 when present, can be called trace materials. The content of trace materials is often extremely small, and needs to be measured using a highly sensitive measurement method. Specifically, the content of trace materials can be determined by time-of-flight secondary ion mass spectrometry (TOF-SIMS), which will be described next.

[0048] In this embodiment, in order to evaluate the content of the trace material relative to the content of the base material of a predetermined thin film of the thin film-attached substrate 120, measurement can be performed using time-of-flight secondary ion mass spectrometry (TOF-SIMS). Specifically, the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material can be obtained by measuring the secondary ion intensity emitted from the thin film by TOF-SIMS. In this embodiment, the ratio (I2 / I1) of the secondary ion intensity of the predetermined thin film is preferably greater than 0, and more preferably 0.005 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, more preferably 0.250 or less, and even more preferably 0.200 or less.

[0049] The measurement conditions for measuring the secondary ion intensity (I1) of the base material of a given thin film and at least one secondary ion intensity (I2) of a trace material by time-of-flight secondary ion mass spectrometry (TOF-SIMS) can be as shown below. Primary ion species: Bi3 ++ Primary acceleration voltage: 30 kV Primary ion current: 3.0nA Primary ion irradiation area: Inside area of ​​a square with sides of 200 μm Secondary ion measurement range: 0.5 to 3000 m / z

[0050] Here, when measuring a predetermined thin film to be measured by TOF-SIMS, the secondary ion intensity can be measured by ion etching the surface of the predetermined thin film by 1 to 2 nm. On the other hand, when another film is laminated on the predetermined thin film to be measured, the secondary ion intensity of the predetermined thin film can be measured by removing the other film by ion etching to expose the predetermined thin film.

[0051] In addition, the content of a trace material in a given thin film is often very small. Therefore, the secondary ion intensity obtained by TOF-SIMS is likely to vary depending on the measurement conditions. When the ratio (I2 / I1) of the secondary ion intensities obtained by TOF-SIMS is used, the variation due to the measurement conditions can be suppressed. Therefore, by using the ratio (I2 / I1) of the secondary ion intensities obtained by TOF-SIMS, it is possible to appropriately specify the amount of a trace material in a thin film that does not adversely affect the performance of the reflective mask 200 or can improve the performance of the reflective mask 200.

[0052] In general, the lower limit of the content of trace materials (impurities) in a predetermined thin film is ideally zero. However, in reality, when forming a predetermined thin film by sputtering or the like, components inside the film formation chamber, such as a shield, are exposed to plasma and ion beams. Therefore, it is very difficult to reduce the content of trace materials originating from materials inside the chamber to zero in the predetermined thin film in terms of cost and production efficiency. Therefore, in this embodiment, the thin film contains a trace amount of a predetermined material that does not have an adverse effect even if it exists in the thin film, or that can improve the performance of the reflective mask 200 by its existence, and the lower limit of the ratio of secondary ion intensity (I2 / I1) is set to a value greater than 0.

[0053] Furthermore, if the ratio of the secondary ion intensities (I2 / I1) is greater than 0.300, defects in the thin-film-coated substrate 120 may increase, adversely affecting the performance of the thin-film-coated substrate 120. For example, if the predetermined thin film is a multilayer reflective film and / or a protective film and the ratio of the secondary ion intensities (I2 / I1) is greater than 0.300, the reflectance of EUV light may decrease, which is undesirable.

[0054] The trace material of a given thin film of the thin-film-coated substrate 120 of this embodiment preferably contains at least one element selected from yttrium (Y), zirconium (Zr), niobium (Nb), aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni), and copper (Cu).

[0055] The extinction coefficient k of yttrium (Y), zirconium (Zr) and niobium (Nb) at a wavelength of 13.5 nm is relatively low. Therefore, when these trace materials are contained in, for example, the multilayer reflective film 5 and / or the protective film 6, the influence on the reflectance of the multilayer reflective film 5 to EUV light is small. In addition, when these trace materials are contained in a predetermined thin film, there is a possibility that the durability of the predetermined thin film is improved. In particular, when the trace material is yttrium (Y), it is preferable because the etching resistance of the predetermined thin film is high. Note that, when a material with a low extinction coefficient k such as Y, Zr and Nb is used as the trace material, the extinction coefficient k of the trace material is preferably less than 0.01, and more preferably 0.005 or less.

[0056] Moreover, the extinction coefficient k of aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu) at a wavelength of 13.5 nm is relatively high. However, when the content of the trace material contained in the predetermined thin film is a trace amount as described above (the ratio of secondary ion intensity (I2 / I1) is equal to or less than a predetermined value), the influence on the reflectance of the reflective mask 200 to EUV light is small. Furthermore, the inclusion of these trace materials may reduce the stress difference at the interface between the predetermined thin film and other thin films. Furthermore, when these trace materials are contained, there is a tendency to inhibit the crystallization of the predetermined thin film. Therefore, when the predetermined thin film contains these trace materials, the crystal structure of the predetermined thin film can be easily made amorphous, and the surface roughness of the predetermined thin film can be reduced. When a material with a high extinction coefficient k such as Al, Ti, Cr, Fe, Ni and Cu is used as the trace material, the extinction coefficient k of the trace material is preferably 0.01 or more.

[0057] In the present embodiment, the predetermined thin film of the thin-film-coated substrate 120 can be formed by ion beam sputtering, DC sputtering, RF sputtering, or other magnetron sputtering methods. Fig. 8 shows an example of a schematic diagram of the internal structure of an ion beam sputtering device 500. An example of an ion beam sputtering device 500 that can be used to form the predetermined thin film of the present embodiment will be described with reference to Fig. 8.

[0058] As shown in the schematic diagram of FIG. 8, an ion beam sputtering apparatus 500 that can be used in this embodiment includes a substantially rectangular vacuum chamber 502. A substrate holder 503 is disposed on one short side of the vacuum chamber 502 (a wall surface having the lower side of FIG. 8 as one side. Hereinafter, for convenience of explanation, this will be referred to as the "lower short side" as appropriate) via a holder attachment rod 504. The substrate holder 503 is configured to be able to rotate on its own axis while holding a substrate 1, the details of which will be described later. The substrate holder 503 also includes a top clamp 517 having a pressing pin 518 provided at the corner. After being placed on the substrate holder 503, the substrate 1 is clamped by the top clamp 517 in such a manner that the corners of the main surface of the substrate 1 are pressed by the pressing pin 518. The top clamp 517 has a function of holding the substrate 1 together with the substrate holder 503, and also has a function of suppressing film adhesion to the side surface of the substrate 1 (similar to a function of a shield 519, which will be described later). The material of the top clamp 517 is preferably an insulating material, for example, a resin, from the viewpoint of suppressing dust generation by pressing the substrate 1. Furthermore, among resins, a material with a relatively high hardness is preferable, and for example, a polyimide resin is particularly suitable.

[0059] In addition, a base 506 having a generally rectangular shape in plan view is disposed near the other short side of the vacuum chamber 502 (a wall surface having the upper side of FIG. 8 as one side; hereinafter, referred to as the "upper short side" as appropriate) so as to face the substrate holder 503. A first sputtering target 507 is disposed on one long side of the base 506 (a surface including one long side), and a second sputtering target 508 is disposed on the other long side of the base 506 (a surface including the other long side). As materials constituting the first sputtering target 507 and the second sputtering target 508, metals, alloys, nonmetals, or compounds thereof can be used to form a predetermined thin film on the mask blank. When only one type of thin film is to be formed, only one of the first sputtering target 507 and the second sputtering target 508 can be used.

[0060] By using this ion beam sputtering device 500, for example, a multilayer reflective film 5 can be formed by alternately stacking high refractive index materials and low refractive index materials as a predetermined thin film. In this case, a high refractive index material such as silicon (Si) can be used as a material constituting the first sputtering target 507. Also, a low refractive index material such as molybdenum (Mo) can be used as a material constituting the second sputtering target 508. Here, the ion beam sputtering device 500 will be described using an example in which a Si material is used for the first sputtering target 507 and a Mo material is used for the second sputtering target 508. Also, a rotating shaft 509 is disposed at the center of the base 506, and the base 506 is configured to be rotatable integrally with the rotating shaft 509.

[0061] An exhaust passage 510 in which a vacuum pump 511 is disposed is connected to one of the longitudinal surfaces (a wall surface having the left side in FIG. 8 as one side; hereinafter, referred to as the "left longitudinal surface") of the vacuum chamber 502. Further, a valve (not shown) that can be opened and closed freely is provided in the exhaust passage 510.

[0062] A pressure sensor 512 for measuring the pressure inside the vacuum chamber 502 and an ion source 505 for supplying ionized particles are disposed on the other longitudinal surface of the vacuum chamber 502 (a wall surface having the right side in FIG. 8 as one side; hereinafter, referred to as the "right longitudinal surface" as appropriate). The ion source 505 is connected to a plasma gas supply means (not shown), and ion particles of the plasma gas are supplied from the plasma gas supply means. When the multilayer reflective film 5 is a Mo / Si periodic multilayer film, ion particles of an inert gas such as argon ions, krypton ions, or xenon ions can be used as the ion particles. The ion source 505 is disposed so as to face a base 506, and is configured to supply ion particles supplied from the plasma gas supply means to either a sputtering target 507 or 508 on the base 506.

[0063] Further, a neutralizer 513 is provided to supply electrons for neutralizing the ion particles from the ion source 505. The neutralizer 513 is provided with an electron supply source (not shown) that extracts electrons from plasma of a predetermined gas, and is configured to irradiate the electrons toward the path of the ion particles traveling from the ion source 505 to the sputtering target 507 or 508. Note that not all ion particles are necessarily neutralized by the neutralizer 513. Therefore, in this specification, the term "ion particles" is also used for ion particles that are partially neutralized by the neutralizer 513.

[0064] Each device, such as the holder mounting rod 504, the ion source 505, the rotating shaft 509, the vacuum pump 511, and the pressure sensor 512, is connected to a control device (not shown) and is configured to have its operation controlled by this control device.

[0065] As shown in FIG. 8, a shield 519 is disposed in the vacuum chamber 502. Together with the top clamp 517, the shield 519 is disposed to prevent the occurrence of defects in the thin film formed on the substrate 1 due to peeling of the attached film. When forming a predetermined thin film, the surface of the shield 519 is exposed to a beam of ionized particles or the like. Therefore, a substance on the surface of the shield 519 is knocked out, and a part of it is included in the thin film. By disposing a predetermined substance on the surface of the shield 519, the predetermined substance can be included in the predetermined thin film as a predetermined trace material. The shield 519 can be disposed in a portion exposed to a beam of ionized particles or the like. Therefore, by disposing a substance corresponding to the predetermined trace material on the surface of the shield 519, the predetermined trace material can be included in the predetermined thin film. In addition, as with the shield 519, with respect to components other than the shield 519 disposed in the vacuum chamber 502, there is a possibility that a substance on the surface of the component is knocked out and included in the predetermined thin film. By covering most of the region for film formation in the vacuum chamber 502 with the shield 519, it is possible to avoid the influence of components other than the shield 519. Therefore, by controlling the predetermined trace material disposed on the surface of the shield 519, it is possible to control the type and content of the trace material contained in the predetermined thin film.

[0066] In order to arrange a substance corresponding to the predetermined trace material on the surface of the shield 519, the shield 519 can be formed of a material containing the substance corresponding to the predetermined trace material. Also, by spraying the substance corresponding to the trace material on the surface of the shield 519, a coating containing the trace material can be formed. For example, as the shield 519 made of a material containing yttrium (Y), a shield 519 made of a stainless steel material suitable for a vacuum container such as SUS314 or SUS316 can be used in which a coating of yttria (Y2O3) is formed on the surface of the shield 519 or the like by spraying yttria (Y2O3) on the surface of the shield 519. Also, by blasting the surface of the shield 519 with a predetermined blasting material containing the trace material, a substance corresponding to the predetermined trace material can be arranged on the surface of the shield 519. For example, by blasting the surface of the shield 519 made of SUS314 or SUS316 with a blasting material of yttria (Y2O3), yttria (Y2O3) can be arranged on the surface of the shield 519.

[0067] The concentration of the trace material in a given thin film can be controlled by changing the film formation conditions, such as the type and energy of ion particles, the pressure during film formation, the concentration of the given trace material on the surface of the shield 519, the area and shape of the shield 519 exposed to the beam of ionized particles, and the relative positional relationship between the shield 519 and the substrate 1. As described above, the concentration of the trace material in a given thin film can be evaluated using the ratio (I2 / I1) of the secondary ion intensity (I2) of the trace material to the secondary ion intensity (I1) of the parent material by measurement with TOF-SIMS.

[0068] A method for forming the multilayer reflective film 5 using the ion beam sputtering apparatus 500 having the above-described configuration will be described.

[0069] First, the vacuum pump 511 is operated to exhaust gas from the vacuum chamber 502 through the exhaust passage 510. Then, when the pressure inside the vacuum chamber 502 measured by the pressure sensor 512 reaches a predetermined vacuum level (a vacuum level that does not affect the properties of the film to be formed, for example, 10 -8 Torr (1.33×10 -6 Wait until the temperature reaches 1 Pa.

[0070] Next, substrate 1, which is a substrate for thin film formation, is introduced into vacuum chamber 502 via a robot arm (not shown), and is accommodated in an opening of substrate holder 503 so that the main surface of substrate 1 is exposed. Then, substrate 1 placed on substrate holder 503 is clamped by top clamp 517 with the corners of the main surface of substrate 1 pressed by pressing pins 518.

[0071] A predetermined vacuum state is also maintained inside a robot arm housing chamber (not shown) adjacent to the vacuum chamber 502. Therefore, the vacuum chamber 502 can be maintained in the above-mentioned vacuum state even when the substrate 1 is introduced.

[0072] Then, a plasma gas (for example, a krypton plasma gas) is introduced into the vacuum chamber 502 from the plasma gas supply means via the ion source 505. At this time, the degree of vacuum in the vacuum chamber 502 is set to 10, which is suitable for performing sputtering. -4 ~10 -2 Torr (1.33×10 -2 The pressure is controlled to be maintained at 1.33 Pa.

[0073] Then, ionized particles (e.g., Kr + particles) are supplied to a first sputtering target 507 arranged on a base 506. The particles are collided with the first sputtering target 507, and the Si particles constituting the target 507 are knocked out (sputtered) from the surface of the target 507, and the Si particles are attached to the main surface of the substrate 1. During this process, the neutralizer 513 is operated to generate ionized particles (Kr +During this process, the rod 504 of the substrate holder 503 and the rotation axis 509 of the base 506 are controlled by a control device so that the rod 504 of the substrate holder 503 rotates at a predetermined rotation speed and the tilt angle of the first sputtering target 507 varies within a certain range. This allows a Si film to be formed uniformly on the main surface of the substrate 1. At this time, a part of the surface of the shield 519 is exposed to the ionized particles. Therefore, the material on the surface of the shield 519 is knocked out, and some of it is included in the Si film as a trace material.

[0074] After the formation of the Si film is completed, the rotation axis 509 of the base 506 is rotated by approximately 180° to bring the second sputtering target 508 into opposition to the main surface of the substrate 1. Then, ionized particles are supplied from the ion source 505 to the second sputtering target 508 arranged on the base 506. The ionized particles knock (sputter) the Mo particles constituting the target 508 from its surface, and the Mo particles are attached to the surface of the Si film formed on the main surface of the substrate 1. During this process, the neutralizer 513 is operated to blow the ionized particles (e.g., Kr + The ionized particles are neutralized. Similarly to the Si film deposition process described above, the rod 504 and the rotating shaft 509 of the substrate holder 503 are controlled to deposit a Mo film with a uniform thickness on the Si film deposited on the substrate 1. Note that, in this case, a part of the surface of the shield 519 is exposed to the ionized particles, similar to the Si film deposition process described above. Therefore, the material on the surface of the shield 519 is knocked out, and some of it is included in the Mo film as a trace material. The deposition process of the Si film and the Mo film is repeated a predetermined number of times (for example, 40 to 60 times), thereby obtaining a multilayer reflective film 5 having a predetermined reflectance with respect to the EUV light, which is the exposure light, in which the Si film and the Mo film are alternately laminated.

[0075] As described above, by making a predetermined thin film (e.g., multilayer reflective film 5) contain a predetermined trace material within a predetermined content range, it is possible to obtain a thin film-coated substrate 120 (substrate 110 with multilayer reflective film) having a multilayer reflective film 5 that does not adversely affect the performance of the reflective mask 200.

[0076] As described above, the predetermined thin film of the thin-film-coated substrate 120 of this embodiment is preferably at least one selected from the rear surface conductive film 2, the multilayer reflective film 5, the protective film 6, the absorber film 7, and the etching mask film 9, and more preferably the multilayer reflective film 5 and / or the protective film 6. Trace materials suitable for each of these thin films will be described in the following explanation.

[0077] <Substrate 110 with multilayer reflective film> The substrate 1 and each thin film constituting the multilayer reflective film coated substrate 110, which is one type of the thin film coated substrate 120 of this embodiment, will be described below.

[0078] <<Substrate 1>> The substrate 1 in the multilayer reflective film coated substrate 110 of this embodiment is required to prevent the absorber pattern 7a from being distorted due to heat during EUV exposure. For this reason, a substrate having a low thermal expansion coefficient within the range of 0±5 ppb / °C is preferably used as the substrate 1. Examples of materials having a low thermal expansion coefficient within this range include SiO2-TiO2 glass and multi-component glass ceramics.

[0079] The first main surface of the substrate 1 on which the transfer pattern (constituting the absorber film 7 described later) is formed is surface-processed to have a predetermined flatness from the viewpoint of obtaining at least pattern transfer accuracy and positional accuracy. In the case of EUV exposure, the flatness is preferably 0.1 μm or less, more preferably 0.05 μm or less, and even more preferably 0.03 μm or less in a 132 mm×132 mm area of ​​the main surface on which the transfer pattern of the substrate 1 is formed. In addition, the second main surface (rear main surface) on the opposite side to the side on which the absorber film 7 is formed is a surface that is electrostatically chucked when set in an exposure device. The second main surface is preferably 0.1 μm or less, more preferably 0.05 μm or less, and even more preferably 0.03 μm or less in a 132 mm×132 mm area. The flatness of the second main surface of the reflective mask blank 100 in an area of ​​142 mm×142 mm is preferably 1 μm or less, more preferably 0.5 μm or less, and even more preferably 0.3 μm or less.

[0080] In addition, the surface smoothness of the substrate 1 is also an extremely important item. The surface roughness of the first main surface on which the absorber pattern 7a for transfer is formed is preferably 0.15 nm or less in root mean square roughness (Rms), more preferably 0.10 nm or less in Rms. The surface smoothness can be measured by an atomic force microscope.

[0081] Furthermore, the substrate 1 preferably has high rigidity in order to prevent deformation due to film stress of films (such as the multilayer reflective film 5) formed on the substrate 1. In particular, the substrate 1 preferably has a high Young's modulus of 65 GPa or more.

[0082] <<Base film>> The multilayer reflective film coated substrate 110 of this embodiment can have an undercoat film in contact with the surface of the substrate 1. The undercoat film is a thin film formed between the substrate 1 and the multilayer reflective film 5. The presence of the undercoat film prevents charge-up during mask pattern defect inspection using an electron beam, reduces phase defects in the multilayer reflective film 5, and provides high surface smoothness.

[0083] The material of the undercoat film is preferably a material containing ruthenium or tantalum as a main component. For example, it may be Ru metal alone or Ta metal alone, or it may be a Ru alloy or Ta alloy containing metals such as titanium (Ti), niobium (Nb), molybdenum (Mo), zirconium (Zr), yttrium (Y), boron (B), lanthanum (La), cobalt (Co), and / or rhenium (Re) in Ru or Ta. The thickness of the undercoat film is preferably in the range of, for example, 1 nm to 10 nm.

[0084] In this embodiment, the undercoat film can be a predetermined thin film. That is, when the undercoat film is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS), it is preferable that the ratio (I2 / I1) of at least one secondary ion intensity (I2) of the trace material in the thin film to the secondary ion intensity (I1) of the base material when the secondary ion intensity emitted from the undercoat film is measured is within the above-mentioned predetermined range.

[0085] <<Multilayer reflective film 5>>

[0086] The multilayer reflective film-coated substrate 110 (thin film-coated substrate 120) of this embodiment includes a multilayer reflective film 5. The multilayer reflective film 5 provides the reflective mask 200 with the function of reflecting EUV light. The multilayer reflective film 5 is a multilayer film in which layers containing elements with different refractive indices as main components are periodically laminated. The multilayer reflective film-coated substrate 110 including the multilayer reflective film 5 is one type of thin film-coated substrate 120 of this embodiment. In this embodiment, the multilayer reflective film 5 is preferably a predetermined thin film.

[0087] Generally, the multilayer reflective film 5 is a multilayer film in which thin films (high refractive index layers) of a light element or its compound, which is a high refractive index material, and thin films (low refractive index layers) of a heavy element or its compound, which is a low refractive index material, are alternately stacked in about 40 to 60 periods.

[0088] The multilayer film used as the multilayer reflective film 5 may be laminated in multiple cycles, with a high refractive index layer / low refractive index layer stacked in this order from the substrate 1 side, or may be laminated in multiple cycles, with a low refractive index layer / high refractive index layer stacked in this order from the substrate 1 side. Note that the top layer of the multilayer reflective film 5, i.e., the surface layer of the multilayer reflective film 5 opposite to the substrate 1 side, is preferably a high refractive index layer. In the above-mentioned multilayer film, when a high refractive index layer / low refractive index layer stacked in this order from the substrate 1 side is stacked in multiple cycles, with a high refractive index layer / low refractive index layer stacked in this order from the substrate 1 side, the top layer is a low refractive index layer. In this case, if the low refractive index layer constitutes the top surface of the multilayer reflective film 5, it is easily oxidized, and the reflectance of the reflective mask 200 decreases. Therefore, it is preferable to form a high refractive index layer on the top low refractive index layer to form the multilayer reflective film 5. On the other hand, in the above-mentioned multilayer film, when a low refractive index layer / high refractive index layer laminate structure in which a low refractive index layer and a high refractive index layer are laminated in this order from the substrate 1 side is one period, the uppermost layer is the high refractive index layer. Therefore, in this case, there is no need to form an additional high refractive index layer.

[0089] The high refractive index layer may be a layer containing silicon (Si). As the material containing Si, in addition to a simple substance of Si, a Si compound containing boron (B), carbon (C), nitrogen (N), oxygen (O) and / or hydrogen (H) in addition to Si may be used. By using a high refractive index layer containing Si, a reflective mask 200 having excellent reflectance to EUV light can be obtained. In addition, the low refractive index layer may be a simple substance of metal selected from molybdenum (Mo), ruthenium (Ru), rhodium (Rh) and platinum (Pt), or an alloy thereof. In addition, boron (B), carbon (C), nitrogen (N), oxygen (O) and / or hydrogen (H) may be added to these simple substances or alloys. In the multilayer reflective film-coated substrate 110 of this embodiment, it is preferable that the low refractive index layer is a molybdenum (Mo) layer and the high refractive index layer is a silicon (Si) layer. For example, a Mo / Si periodic laminated film in which Mo layers and Si layers are alternately laminated for about 40 to 60 periods is preferably used as the multilayer reflective film 5 for reflecting EUV light with a wavelength of 13 nm to 14 nm. The high refractive index layer that is the top layer of the multilayer reflective film 5 may be formed of silicon (Si), and a silicon oxide layer containing silicon and oxygen may be formed between the top layer (Si) and the protective film 6. With this structure, it is possible to improve the mask cleaning resistance.

[0090] The reflectance of the multilayer reflective film 5 alone is usually 65% ​​or more, and the upper limit is usually 73%. The thickness and period of each of the constituent layers of the multilayer reflective film 5 can be appropriately selected depending on the exposure wavelength. Specifically, the thickness and period of each of the constituent layers of the multilayer reflective film 5 can be selected so as to satisfy the law of Bragg reflection. In the multilayer reflective film 5, there are multiple high refractive index layers and multiple low refractive index layers, but the thicknesses of the high refractive index layers and the low refractive index layers do not necessarily have to be the same. In addition, the thickness of the Si layer on the outermost surface of the multilayer reflective film 5 can be adjusted within a range that does not reduce the reflectance. The thickness of the Si (high refractive index layer) on the outermost surface can be 3 nm to 10 nm.

[0091] In this embodiment, the multilayer reflective film 5 of the multilayer reflective film-coated substrate 110 is preferably a predetermined thin film. That is, when the multilayer reflective film 5 is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS), the ratio (I2 / I1) of at least one secondary ion intensity (I2) of a trace material in the thin film to the secondary ion intensity (I1) of the base material when the secondary ion intensity emitted from the multilayer reflective film 5 is measured is preferably within the above-mentioned predetermined range.

[0092] When the multilayer reflective film 5 is a predetermined thin film, the base material can be molybdenum (Mo).

[0093] As described above, the multilayer reflective film 5 of the multilayer reflective film-coated substrate 110 of this embodiment is preferably a Mo / Si multilayer reflective film 5 having a low refractive index layer of molybdenum (Mo) and a high refractive index layer of silicon (Si). When this Mo / Si multilayer reflective film 5 is measured by TOF-SIMS, the signal intensity of Mo is higher than the signal intensity of Si. Therefore, Mo is the material corresponding to the highest signal intensity when the Mo / Si multilayer reflective film 5 is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Therefore, the base material can be molybdenum (Mo).

[0094] The trace material contained in the multilayer reflective film 5 of the multilayer reflective film-coated substrate 110 (thin film-coated substrate 120) of this embodiment preferably contains at least one element selected from yttrium (Y), zirconium (Zr), niobium (Nb), aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni), and copper (Cu).

[0095] The extinction coefficients k of yttrium (Y), zirconium (Zr) and niobium (Nb) at a wavelength of 13.5 nm are relatively low. Therefore, when these trace materials are contained in the multilayer reflective film 5, the influence on the reflectance of the multilayer reflective film 5 to EUV light is small. Furthermore, when these trace materials are contained in the multilayer reflective film 5, there is a possibility that the durability of the multilayer reflective film 5 is improved. In particular, when the trace material is yttrium (Y), it is preferable because the etching resistance of the multilayer reflective film 5 is high. Note that, when such a material with a low extinction coefficient k is used as the trace material, the extinction coefficient k of the trace material is preferably less than 0.01, and more preferably 0.005 or less.

[0096] Moreover, the extinction coefficient k of aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu) at a wavelength of 13.5 nm is relatively high. However, when the content of the trace material contained in the multilayer reflective film 5 is a trace amount as described above (the ratio of secondary ion intensity (I2 / I1) is equal to or less than a predetermined value), the influence on the reflectance of the reflective mask 200 for EUV light is small. Furthermore, the inclusion of these trace materials may reduce the stress difference at the interface between the multilayer reflective film 5 and other thin films, etc. Furthermore, when the multilayer reflective film 5 contains these trace materials, there is a tendency for the crystallization of the multilayer reflective film 5 to be inhibited. Therefore, when the multilayer reflective film 5 contains these trace materials, the crystal structure of the multilayer reflective film 5 can be easily made amorphous, and the surface roughness of the multilayer reflective film 5 can be reduced.

[0097] When the multilayer reflective film 5 is a Mo / Si multilayer reflective film 5 and contains at least one element selected from yttrium (Y), zirconium (Zr) and niobium (Nb) as a trace material, the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material (Mo) when measuring the secondary ion intensity emitted from the multilayer reflective film 5 is preferably greater than 0, more preferably 0.005 or more, and even more preferably 0.010 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, and more preferably 0.250 or less.

[0098] When the multilayer reflective film 5 is a Mo / Si multilayer reflective film 5 and contains at least one element selected from aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu) as a trace material, the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the parent material (Mo) when measuring the secondary ion intensity emitted from the multilayer reflective film 5 is preferably greater than 0, and more preferably 0.005 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, and more preferably 0.250 or less.

[0099] In manufacturing the multilayer reflective film-coated substrate 110 of this embodiment, the multilayer reflective film 5 can be formed on the substrate 1 by ion beam sputtering. The multilayer reflective film 5 in which high refractive index materials and low refractive index materials are alternately laminated can be formed by using an ion beam sputtering apparatus 500 as shown in FIG. 8 described above. In this case, a high refractive index material such as Si or a Si compound can be used as a material constituting the first sputtering target 507. In addition, a low refractive index material such as Mo, Nb, Ru, or Rh can be used as a material constituting the second sputtering target 508.

[0100] Here, a case will be described in which a Si material is used for the first sputtering target 507, and a Mo material is used for the second sputtering target 508. First, a Si layer having a thickness of about 4 nm is formed on the substrate 1 using a Si target. Then, a Mo layer having a thickness of about 3 nm is formed using a Mo target. This Si layer and Mo layer constitute one cycle, and 40 to 60 cycles are stacked to form the multilayer reflective film 5 (the outermost layer is a Si layer). Note that while 60 cycles requires more steps than 40 cycles, the reflectance to EUV light can be increased.

[0101] As shown in FIG. 8, a shield 519 is disposed in the vacuum chamber 502. For example, by using Y2O3, ZrO2 and / or Nb2O5 for the shield 519, the trace material incorporated in the multilayer reflective film 5 can be a material with a relatively low extinction coefficient k, such as Y, Zr and Nb. As a result, even if the trace material is contained in the multilayer reflective film 5, the influence on the reflectance of the multilayer reflective film 5 to EUV light can be reduced. In particular, by making the shield 519, etc. out of a material containing yttrium (Y), for example, Y2O3, the multilayer reflective film 5 contains Y. It is preferable that the multilayer reflective film 5 contains yttrium (Y) as a trace material because it has high etching resistance. For the shield 519, etc. made of a material containing yttrium (Y), for example, yttria (Y2O3) is sprayed on the surface of the shield 519 made of SUS314 or SUS316 to form a coating of yttria (Y2O3) on the surface of the shield 519, etc. can be used. In addition, yttria (Y2O3) can be disposed on the surface of the shield 519 by blasting the surface of the shield 519 and the like with particles of yttria (Y2O3).

[0102] In addition, when the multilayer reflective film 5 contains a trace material having a relatively high extinction coefficient k, such as Cr and Fe, the reflectance of the multilayer reflective film 5 may decrease. Since stainless steel contains Cr and Fe, when the shield 519 is stainless steel, it is highly likely that a given thin film contains Cr and Fe as trace materials. Therefore, it is preferable to prevent the content of trace materials such as Cr and Fe in the multilayer reflective film 5 from becoming high by performing a surface treatment (film formation or blasting) on ​​the shield 519. However, when a suitable amount of trace materials having a relatively high extinction coefficient k, such as Cr and Fe, are contained, the multilayer reflective film 5 is easily made amorphous, so that the surface roughness of the multilayer reflective film 5 can be reduced. In addition, when Al and / or Ti are selected as the trace material having a relatively high extinction coefficient k, Al2O3 and / or TiO2, etc. can be used for the shield 519, etc.

[0103] The method for forming the multilayer reflective film 5 using the ion beam sputtering apparatus 500 having the above-mentioned configuration is as described above as the method for forming a predetermined thin film.

[0104] As described above, when the Si film and Mo film of the multilayer reflective film 5 are formed, the components such as the shield 519 are exposed to a beam of ionized particles. Therefore, in consideration of cost and production efficiency, it is difficult to prevent the formed multilayer reflective film 5 from containing materials (trace materials) originating from materials inside the chamber such as the shield 519. Therefore, by controlling the multilayer reflective film 5 to contain a predetermined trace material within a predetermined content range, it is possible to obtain a multilayer reflective film-coated substrate 110 (substrate with thin film 120) having a multilayer reflective film 5 that at least does not adversely affect the performance of the reflective mask 200.

[0105] <<Protective film 6>> In the multilayer reflective film-coated substrate 110 (substrate with thin film 120) of this embodiment, as shown in Figs. 2 and 4, a protective film 6 is preferably formed on the multilayer reflective film 5. By forming the protective film 6 on the multilayer reflective film 5, damage to the surface of the multilayer reflective film 5 can be suppressed when the multilayer reflective film-coated substrate 110 is used to manufacture the reflective mask 200. Therefore, the resulting reflective mask 200 has good reflectance characteristics for EUV light. The multilayer reflective film-coated substrate 110 including the protective film 6 is one type of the thin film-coated substrate 120 of this embodiment. In this embodiment, the protective film 6 is preferably a predetermined thin film.

[0106] The protective film 6 is formed on the multilayer reflective film 5 in order to protect the multilayer reflective film 5 from dry etching and cleaning in the manufacturing process of the reflective mask 200, which will be described later. The protective film 6 also has a function of protecting the multilayer reflective film 5 when repairing black defects in a mask pattern using an electron beam (EB).

[0107] 2 and 4 show the case where the protective film 6 is a single layer. However, the protective film 6 may have a laminated structure of three or more layers, with the bottom and top layers being layers made of a material containing, for example, ruthenium (Ru), and a metal other than Ru or an alloy being interposed between the bottom and top layers. The protective film 6 is formed of, for example, a material containing ruthenium (Ru) as a main component. Examples of materials containing ruthenium as a main component include simple Ru metal, Ru alloys containing metals such as titanium (Ti), niobium (Nb), molybdenum (Mo), zirconium (Zr), yttrium (Y), boron (B), lanthanum (La), cobalt (Co), rhenium (Re) and / or rhodium (Rh), and materials containing nitrogen therein. Among these, it is particularly preferable to use the protective film 6 made of a Ru-based material containing Ti. In this case, the phenomenon that silicon, which is a constituent element of the multilayer reflective film 5, diffuses from the surface of the multilayer reflective film 5 to the protective film 6 can be suppressed. This reduces surface roughness during mask cleaning and also makes it difficult for the film to peel off. Reducing surface roughness is directly linked to preventing a decrease in the reflectance of the multilayer reflective film 5 against EUV exposure light, and is therefore important for improving the exposure efficiency and throughput of EUV exposure.

[0108] The Ru content of the Ru alloy used in the protective film 6 is 50 atomic % or more and less than 100 atomic %, preferably 80 atomic % or more and less than 100 atomic %, and more preferably 95 atomic % or more and less than 100 atomic %. In particular, when the Ru content of the Ru alloy is 95 atomic % or more and less than 100 atomic %, it becomes possible to suppress the diffusion of the constituent element (silicon) of the multilayer reflective film 5 into the protective film 6. Furthermore, the protective film 6 in this case can combine mask cleaning resistance, an etching stopper function when the absorber film 7 is etched, and a function of preventing deterioration of the multilayer reflective film 5 over time, while sufficiently ensuring the reflectance of EUV light.

[0109] In EUV lithography, since there are few substances transparent to the exposure light, it is technically not easy to use an EUV pellicle that prevents foreign matter from adhering to the mask pattern surface. For this reason, pellicle-less operation that does not use a pellicle has become mainstream. In addition, in EUV lithography, exposure contamination occurs, such as the deposition of a carbon film or the growth of an oxide film on the reflective mask 200 due to EUV exposure. For this reason, when the reflective mask 200 is used in the manufacture of a semiconductor device, it is necessary to frequently clean the reflective mask 200 to remove foreign matter and contamination on the reflective mask 200. For this reason, the reflective mask 200 for EUV exposure is required to have a mask cleaning resistance that is orders of magnitude higher than that of a transmission mask for optical lithography. If the protective film 6 made of a Ru-based material containing Ti is used, the cleaning resistance against cleaning solutions such as sulfuric acid, sulfuric acid / hydrogen peroxide (SPM), ammonia, ammonia / hydrogen peroxide (APM), OH radical cleaning water, and ozone water with a concentration of 10 ppm or less is particularly high, making it possible to meet the requirements for mask cleaning resistance.

[0110] The thickness of the protective film 6 is not particularly limited as long as it can function as the protective film 6. From the viewpoint of the reflectance of EUV light, the thickness of the protective film 6 is preferably 1.0 nm to 8.0 nm, and more preferably 1.5 nm to 6.0 nm.

[0111] In this embodiment, the protective film 6 of the multilayer reflective film coated substrate 110 is preferably a predetermined thin film. That is, when the protective film 6 is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS), the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material when the secondary ion intensity emitted from the protective film 6 is measured is preferably within the above-mentioned predetermined range.

[0112] When the protective film 6 is a Ru metal element or a Ru alloy containing metals such as titanium (Ti), niobium (Nb), molybdenum (Mo), zirconium (Zr), yttrium (Y), boron (B), lanthanum (La), cobalt (Co), rhenium (Re) and / or rhodium (Rh) in Ru, and contains at least one element selected from yttrium (Y), zirconium (Zr) and niobium (Nb) as a trace material, the ratio (I2 / I1) of at least one secondary ion intensity (I2) of the trace material in the thin film to the secondary ion intensity (I1) of the base material (Ru metal element or Ru alloy) when the secondary ion intensity emitted from the protective film 6 is measured is preferably greater than 0, more preferably 0.005 or more, and even more preferably 0.010 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, more preferably 0.250 or less.

[0113] When the protective film 6 is a Ru metal element or a Ru alloy containing metals such as titanium (Ti), niobium (Nb), molybdenum (Mo), zirconium (Zr), yttrium (Y), boron (B), lanthanum (La), cobalt (Co), rhenium (Re) and / or rhodium (Rh) in Ru, and contains at least one element selected from aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu) as a trace material, the ratio (I2 / I1) of at least one secondary ion intensity (I2) of the trace material in the thin film to the secondary ion intensity (I1) of the base material (Ru metal element or Ru alloy) when the secondary ion intensity emitted from the protective film 6 is measured is preferably greater than 0, more preferably 0.005 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, more preferably 0.250 or less.

[0114] As described above, the protective film 6 of the multilayer reflective film coated substrate 110 of this embodiment is preferably made of a material containing ruthenium (Ru) as a main component. Therefore, when the protective film 6 is a predetermined thin film, the base material can be ruthenium (Ru).

[0115] The trace material contained in the protective film 6 of the multilayer reflective film-coated substrate 110 (thin film-coated substrate 120) of this embodiment preferably contains at least one element selected from yttrium (Y), zirconium (Zr), niobium (Nb), aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni), and copper (Cu).

[0116] The extinction coefficients k of yttrium (Y), zirconium (Zr) and niobium (Nb) at a wavelength of 13.5 nm are relatively low. Therefore, when these trace materials are contained in the protective film 6, there is little effect on the transmission of EUV light to the multilayer reflective film 5 formed under the protective film 6. Furthermore, when these trace materials are contained in the protective film 6, there is a possibility that the durability of the protective film 6 is improved. In particular, when the trace material is yttrium (Y), it is preferable because the etching resistance of the protective film 6 is high. Note that, when such a material with a low extinction coefficient k is used as the trace material, the extinction coefficient k of the trace material is preferably less than 0.01, and more preferably 0.005 or less.

[0117] Moreover, the extinction coefficient k of aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu) at a wavelength of 13.5 nm is relatively high. However, when the content of the trace material contained in the protective film 6 is a trace amount as described above (the ratio of secondary ion intensity (I2 / I1) is equal to or less than a predetermined value), the influence on the reflectance of the reflective mask 200 to EUV light is small. Furthermore, the inclusion of these trace materials may reduce the stress difference at the interface between the protective film 6 and other thin films. Furthermore, when the protective film 6 contains these trace materials, there is a tendency for the crystallization of the protective film 6 to be inhibited. Therefore, when the protective film 6 contains these trace materials, the crystal structure of the protective film 6 can be easily made amorphous, and the surface roughness of the protective film 6 can be reduced.

[0118] Any known film formation method can be used without any particular limitation as the method for forming the protective film 6. Specific examples of the method for forming the protective film 6 include a sputtering method and an ion beam sputtering method.

[0119] As in the case of forming the multilayer reflective film 5 described above, when forming the protective film 6, components such as the shield 519 arranged in the film forming apparatus are exposed to a beam or plasma of ionized particles. Therefore, it is difficult to prevent the formed protective film 6 from containing materials (trace materials) originating from materials inside the chamber such as the shield 519, in consideration of cost and production efficiency. Therefore, by controlling the protective film 6 to contain a predetermined trace material within a predetermined content range, it is possible to obtain a multilayer reflective film-coated substrate 110 (substrate 120 with thin film) having a protective film 6 that does not adversely affect the performance of the reflective mask 200. For this purpose, it is preferable that the material of the components arranged inside the chamber such as the shield 519 is a material equivalent to the trace material.

[0120] <Reflective mask blank 100> The reflective mask blank 100 of this embodiment will be described. The reflective mask blank 100 has an absorber film 7 on the above-mentioned multilayer reflective film-coated substrate 110. The reflective mask blank 100 including the absorber film 7 and the multilayer reflective film 5, and optionally the protective film 6, is one type of the thin film-coated substrate 120 of this embodiment. In the reflective mask blank 100 of this embodiment, the predetermined thin film is preferably at least one selected from the multilayer reflective film 5 and the protective film 6. Also, the absorber film 7 can be a predetermined thin film.

[0121] <<Absorber membrane 7>> The absorber film 7 of the reflective mask blank 100 of this embodiment is formed on the multilayer reflective film 5 (on the protective film 6 when the protective film 6 is formed). The basic function of the absorber film 7 is to absorb EUV light. The absorber film 7 may be an absorber film 7 intended to absorb EUV light, or an absorber film 7 having a phase shift function that also takes into account the phase difference of EUV light. The absorber film 7 having a phase shift function absorbs EUV light and reflects a part of it to shift the phase. That is, in the reflective mask 200 in which the absorber film 7 having a phase shift function is patterned, the absorber film 7 absorbs EUV light to reduce the light, and reflects a part of the light at a level that does not adversely affect pattern transfer. In addition, in the region (field portion) in which the absorber film 7 is not formed, the EUV light is reflected from the multilayer reflective film 5 via the protective film 6. Therefore, there is a desired phase difference between the reflected light from the absorber film 7 having a phase shift function and the reflected light from the field portion. The absorber film 7 having a phase shift function is formed so that the phase difference between the reflected light from the absorber film 7 and the reflected light from the multilayer reflective film 5 is 170 degrees to 190 degrees. Light beams with an inverted phase difference of about 180 degrees interfere with each other at the pattern edge, improving the image contrast of the projected optical image. With this improvement in image contrast, the resolution increases, and various exposure tolerances such as exposure dose tolerance and focus tolerance can be increased.

[0122] The absorber film 7 may be a single layer film, or may be a multilayer film consisting of multiple films (for example, a lower absorber film and an upper absorber film). In the case of a single layer film, the number of steps during mask blank manufacturing can be reduced, improving production efficiency. In the case of a multilayer film, the optical constant and film thickness of the upper absorber film can be appropriately set so that it becomes an anti-reflection film during mask pattern defect inspection using light. This improves the inspection sensitivity during mask pattern defect inspection using light. In addition, if a film to which oxygen (O) and nitrogen (N), which improve oxidation resistance, are added is used as the upper absorber film, the stability over time is improved. In this way, various functions can be added by making the absorber film 7 a multilayer film. In the case of an absorber film 7 having a phase shift function, the range of adjustment on the optical surface can be increased by making it a multilayer film, making it easier to obtain a desired reflectance.

[0123] The material of the absorber film 7 is not particularly limited as long as it has the function of absorbing EUV light and can be processed by etching or the like (preferably by dry etching with a chlorine (Cl) or fluorine (F) based gas). As a material having such a function, at least one metal selected from palladium (Pd), silver (Ag), platinum (Pt), gold (Au), iridium (Ir), tungsten (W), chromium (Cr), cobalt (Co), manganese (Mn), tin (Sn), tantalum (Ta), vanadium (V), nickel (Ni), hafnium (Hf), iron (Fe), copper (Cu), tellurium (Te), zinc (Zn), magnesium (Mg), germanium (Ge), aluminum (Al), rhodium (Rh), ruthenium (Ru), molybdenum (Mo), niobium (Nb), titanium (Ti), zirconium (Zr), yttrium (Y), and silicon (Si), or a compound (alloy) thereof can be preferably used.

[0124] The absorber film 7 can be formed by magnetron sputtering such as DC sputtering and RF sputtering. For example, the absorber film 7 made of a tantalum compound or the like can be formed by a reactive sputtering method using a target containing tantalum and boron and argon gas to which oxygen or nitrogen is added.

[0125] The tantalum compound for forming the absorber film 7 includes an alloy of Ta and the above-mentioned metal. When the absorber film 7 is an alloy of Ta, the crystal state of the absorber film 7 is preferably an amorphous or microcrystalline structure in terms of smoothness and flatness. If the surface of the absorber film 7 is not smooth and flat, the edge roughness of the absorber pattern 7a increases, and the dimensional accuracy of the pattern may deteriorate. The surface roughness of the absorber film 7 is preferably 0.5 nm or less, more preferably 0.4 nm or less, and even more preferably 0.3 nm or less, in terms of root-mean-square roughness (Rms).

[0126] As the tantalum compound for forming the absorber film 7, a compound containing Ta and B, a compound containing Ta and N, a compound containing Ta, O and N, a compound containing Ta and B and further containing at least one of O and N, a compound containing Ta and Si, a compound containing Ta, Si and N, a compound containing Ta and Ge, and a compound containing Ta, Ge and N, etc. can be used.

[0127] Ta is a material that has a large absorption coefficient of EUV light and can be easily dry etched with chlorine-based gas or fluorine-based gas. Therefore, it can be said that Ta is a material for the absorber film 7 that is excellent in processability. Furthermore, by adding B, Si and / or Ge, etc. to Ta, an amorphous material can be easily obtained. As a result, the smoothness of the absorber film 7 can be improved. Furthermore, by adding N and / or O to Ta, the resistance of the absorber film 7 to oxidation is improved, and therefore the effect of improving stability over time can be obtained.

[0128] In the reflective mask blank 100 of this embodiment, the predetermined thin film is preferably at least one selected from a multilayer reflective film 5 and a protective film 6. In the reflective mask blank 100 of this embodiment, it is preferable that an absorber film 7 is further formed on the predetermined thin film, that is, the multilayer reflective film 5 or the protective film 6. The base material and the trace material when the predetermined thin film is the multilayer reflective film 5 and the protective film 6 are as described above.

[0129] Furthermore, in the reflective mask blank 100 of this embodiment, the absorber film 7 can be a predetermined thin film. That is, when the absorber film 7 is measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS), the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material when the secondary ion intensity emitted from the absorber film 7 is measured can be within the above-mentioned predetermined range.

[0130] The material of the absorber film 7 may be palladium (Pd), silver (Ag), platinum (Pt), gold (Au), iridium (Ir), tungsten (W), chromium (Cr), cobalt (Co), manganese (Mn), tin (Sn), tantalum (Ta), vanadium (V), nickel (Ni), hafnium (Hf), iron (Fe), copper (Cu), tellurium (Te), zinc (Zn), magnesium (Mg), germanium (Ge), aluminum (Al), rhodium (Rh), ruthenium (Ru), molybdenum (Mo), niobium (Nb), titanium (Ti), zirconium (Zr), yttrium (Y In the case where the absorber film 7 contains at least one element selected from the group consisting of arsenic (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) or copper (Cu) as the main component and the trace material contains aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) or copper (Cu) (excluding the combination of the absorber film 7 material and the trace material being the same material), the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material when the secondary ion intensity emitted from the absorber film 7 is measured is preferably greater than 0, and more preferably 0.005 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, more preferably 0.250 or less, and even more preferably 0.200 or less.

[0131] When the absorber film 7 is a predetermined thin film, the base material can be the above-mentioned metal that is the main component. The content ratio of the metal that is the main component is preferably 50 atomic % or more.

[0132] For example, when the material of the absorber film 7 contains Ta, it is preferable that the absorber film 7 contains aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) or copper (Cu) as a trace material. The extinction coefficient k of aluminum (Al) or the like at a wavelength of 13.5 nm is relatively high. Therefore, when aluminum (Al) or the like is contained as a trace material in the absorber film 7, the extinction coefficient k at a wavelength of 13.5 nm becomes relatively high. In addition, by containing aluminum (Al) or the like as a trace material, the stress difference at the interface between the absorber film 7 and a thin film (e.g., the multilayer reflective film 5 or the protective film 6, etc.) in contact with the absorber film 7 may be reduced. For example, the surface of the shield 519 (e.g., a stainless steel shield) arranged in the vacuum chamber 502 for forming the absorber film 7 is blasted with an alumina (Al2O3) blasting material to obtain the absorber film 7 containing aluminum (Al) as a trace material.

[0133] It is preferable that the trace material contained in the absorber film 7 of the reflective mask blank 100 of this embodiment does not contain yttrium (Y) and zirconium (Zr). Therefore, in order to form the absorber film 7, it is preferable that components such as the shield 519 arranged in the film forming apparatus are made of materials that do not contain yttrium (Y) and zirconium (Zr).

[0134] <<Backside conductive film 2>> A backside conductive film 2 for electrostatic chuck is formed on the second main surface (backside main surface) of the substrate 1 (opposite to the surface on which the multilayer reflective film 5 is formed, and on the intermediate layer if an intermediate layer such as a hydrogen penetration suppression film is formed on the substrate 1). The sheet resistance required for the backside conductive film 2 for electrostatic chuck is usually 100 Ω / □ (Ω / square) or less. The method for forming the backside conductive film 2 is, for example, magnetron sputtering or ion beam sputtering using a target of a metal such as chromium or tantalum, or an alloy thereof. The chromium (Cr)-containing material of the backside conductive film 2 is preferably a Cr compound containing at least one element selected from boron, nitrogen, oxygen, and carbon in Cr. Examples of Cr compounds include CrN, CrON, CrCN, CrCON, CrBN, CrBON, CrBCN, and CrBOCN. The tantalum (Ta)-containing material of the back surface conductive film 2 is preferably Ta, an alloy containing Ta, or a Ta compound containing at least one of boron, nitrogen, oxygen, and carbon in any of these. Examples of Ta compounds include TaB, TaN, TaO, TaON, TaCON, TaBN, TaBO, TaBON, TaBCON, TaHf, TaHfO, TaHfN, TaHfON, TaHfCON, TaSi, TaSiO, TaSiN, TaSiON, and TaSiCON. The thickness of the back surface conductive film 2 is not particularly limited as long as it satisfies the function for electrostatic chuck, but is usually 10 nm to 200 nm. In addition, the back surface conductive film 2 also serves to adjust the stress on the second main surface side of the mask blank 100. That is, the back surface conductive film 2 is adjusted to obtain a flat reflective mask blank 100 by balancing the stress from various films formed on the first main surface side.

[0135] Before forming the absorber film 7, a back surface conductive film 2 can be formed on the multilayer reflective film-coated substrate 110. In that case, it is possible to obtain a multilayer reflective film-coated substrate 110 having the back surface conductive film 2 as shown in FIG.

[0136] The rear surface conductive film 2 can be a predetermined thin film. Therefore, the thin film-coated substrate 120 (substrate with a rear surface conductive film) as shown in Fig. 3 is also one type of the thin film-coated substrate 120 of this embodiment.

[0137] When the material of the back conductive film 2 is a Cr compound or a Ta compound and contains aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) or copper (Cu) as a trace material, the ratio (I2 / I1) of the secondary ion intensity (I2) of at least one of the trace materials in the thin film to the secondary ion intensity (I1) of the base material (Ta or Cr) when measuring the secondary ion intensity emitted from the back conductive film 2 is preferably greater than 0, more preferably 0.005 or more. Moreover, the ratio (I2 / I1) is preferably 0.300 or less, more preferably 0.250 or less.

[0138] When the back surface conductive film 2 is a predetermined thin film, the base material may be Ta or Cr. The content of Ta or Cr is preferably 50 atomic % or more.

[0139] For example, when the material of the back surface conductive film 2 is a Ta compound, it is preferable that aluminum (Al), titanium (Ti), chromium (Cr), iron (Fe), nickel (Ni) or copper (Cu) is contained as a trace material. Since aluminum (Al) has high electrical conductivity, the back surface conductive film 2 contains aluminum (Al) as a trace material, which contributes to the conductivity of the back surface conductive film 2. In addition, the back surface conductive film 2 is required to have mechanical strength in order to perform vacuum chucking. The inclusion of aluminum (Al) as a trace material increases the density of the film through amorphization, and it becomes possible to improve the mechanical properties. For example, the surface of the shield 519 (e.g., a stainless steel shield) arranged in the vacuum chamber 502 for forming the back surface conductive film 2 can be blasted with an alumina (Al2O3) blasting material to obtain the back surface conductive film 2 containing aluminum (Al) as a trace material.

[0140] <Etching mask film 9> An etching mask film 9 may be formed on the absorber film 7. The material of the etching mask film 9 is a material having a high etching selectivity of the absorber film 7 to the etching mask film 9. Here, the "etching selectivity of B to A" refers to the ratio of the etching rate of A, which is a layer that is not to be etched (a layer that serves as a mask), to B, which is a layer that is to be etched. Specifically, it is specified by the formula "etching selectivity of B to A=etching rate of B / etching rate of A". In addition, "high selectivity" refers to a high selectivity value as defined above with respect to a comparison target. The etching selectivity of the absorber film 7 to the etching mask film 9 is preferably 1.5 or more, more preferably 3 or more.

[0141] Materials having a high etching selectivity of the absorber film 7 to the etching mask film 9 include materials of chromium and chromium compounds. When the absorber film 7 is etched with a fluorine-based gas, materials of chromium and chromium compounds can be used. Examples of chromium compounds include materials containing Cr and at least one element selected from N, O, C, and H. Also, when the absorber film 7 is etched with a chlorine-based gas that does not substantially contain oxygen, materials of silicon and silicon compounds can be used. Examples of silicon compounds include materials containing Si and at least one element selected from N, O, C, and H, as well as materials such as metal silicon (metal silicide) and metal silicon compounds (metal silicide compounds) containing metal in silicon and silicon compounds. Examples of metal silicon compounds include materials containing metal, Si, and at least one element selected from N, O, C, and H.

[0142] The thickness of the etching mask film 9 is desirably 3 nm or more from the viewpoint of obtaining the function as an etching mask for accurately forming a transfer pattern in the absorber film 7. Moreover, the thickness of the etching mask film 9 is desirably 15 nm or less from the viewpoint of making the thickness of the resist film 8 thin.

[0143] The etching mask film 9 can be the above-mentioned predetermined thin film.

[0144] <Other thin films>

[0145] The thin-film-coated substrate 120 of this embodiment preferably includes a hydrogen penetration suppression film between the glass substrate, which is the substrate 1, and the back surface conductive film 2 containing tantalum or chromium, for suppressing penetration of hydrogen from the substrate 1 into the back surface conductive film 2. The presence of the hydrogen penetration suppression film can suppress the incorporation of hydrogen into the back surface conductive film 2, and can suppress an increase in the compressive stress of the back surface conductive film 2.

[0146] The material of the hydrogen penetration suppression film may be any type of material that is difficult for hydrogen to permeate and can suppress the penetration of hydrogen from the substrate 1 to the back surface conductive film 2. Specific examples of the material of the hydrogen penetration suppression film include Si, SiO2, SiON, SiCO, SiCON, SiBO, SiBON, Cr, CrN, CrON, CrC, CrCN, CrCO, CrCON, Mo, MoSi, MoSiN, MoSiO, MoSiCO, MoSiON, MoSiCON, TaO, and TaON. The hydrogen penetration suppression film may be a single layer of these materials, or may be a multiple layer or composition gradient film.

[0147] The hydrogen penetration suppression film may be the above-mentioned predetermined thin film.

[0148] <Reflection mask 200> The present embodiment is a reflective mask 200 having an absorber pattern 7a on a multilayer reflective film 5 by patterning the absorber film 7 in the above-mentioned reflective mask blank 100. By using the reflective mask blank 100 of the present embodiment, it is possible to obtain a reflective mask 200 that has no adverse effect on the performance of the reflective mask 200 or has improved performance.

[0149] A reflective mask 200 is manufactured using the reflective mask blank 100 of this embodiment. Only an outline will be given here, and a detailed description will be given later in examples with reference to the drawings.

[0150] A reflective mask blank 100 is prepared, and a resist film 8 (not necessary if the reflective mask blank 100 is provided with a resist film 8) is formed on the outermost surface of its first main surface (on the absorber film 7, as described in the examples below), and a desired pattern such as a circuit pattern is drawn (exposed) on this resist film 8, which is then developed and rinsed to form a predetermined resist pattern 8a.

[0151] The absorber film 7 is dry-etched using the resist pattern 8a as a mask to form the absorber pattern 7a. The etching gas may be selected from chlorine-based gases such as Cl2, SiCl4, and CHCl3, mixed gases containing chlorine-based gas and O2 at a predetermined ratio, mixed gases containing chlorine-based gas and He at a predetermined ratio, mixed gases containing chlorine-based gas and Ar at a predetermined ratio, fluorine-based gases such as CF4, CHF3, C2F6, C3F6, C4F6, C4F8, CH2F2, CH3F, C3F8, SF6, and F2, and mixed gases containing fluorine-based gas and O2 at a predetermined ratio. If oxygen is contained in the etching gas at the final stage of etching, the surface of the Ru-based protective film 6 will become rough. For this reason, it is preferable to use an etching gas that does not contain oxygen at the overetching stage in which the Ru-based protective film 6 is exposed to etching.

[0152] Thereafter, the resist pattern 8a is removed by ashing or using a resist stripper, to produce an absorber pattern 7a on which a desired circuit pattern is formed.

[0153] Through the above steps, the reflective mask 200 of this embodiment can be obtained.

[0154] <Method of Manufacturing Semiconductor Device> This embodiment is a method for manufacturing a semiconductor device, which includes a step of forming a transfer pattern on a transferee by performing a lithography process using an exposure apparatus using the above-mentioned reflective mask 200. Specifically, the above-mentioned reflective mask 200 is set in an exposure apparatus having an exposure light source that emits EUV light, and the transfer pattern can be transferred to a resist film formed on the transferee substrate. According to the method for manufacturing a semiconductor device of this embodiment, a reflective mask 200 that does not adversely affect the performance of the reflective mask 200 even if impurities (trace materials) are contained in the thin film of the reflective mask 200 can be used, so that a semiconductor device having a fine and highly accurate transfer pattern can be manufactured.

[0155] Specifically, a desired transfer pattern can be formed on a semiconductor substrate by EUV exposure using the reflective mask 200 of the present embodiment. In addition to this lithography process, various steps such as etching of the film to be processed, formation of an insulating film or conductive film, introduction of a dopant, or annealing can be carried out to manufacture a semiconductor device having a desired electronic circuit formed thereon with a high yield. EXAMPLES

[0156] Each embodiment will be described below with reference to the drawings.

[0157] Example 1 2, a multilayer reflective film-coated substrate 110 was prepared in which a multilayer reflective film 5 and a protective film 6 were formed on one main surface of a substrate 1. The multilayer reflective film-coated substrate 110 of Example 1 was prepared as follows.

[0158] A SiO2-TiO2-based glass substrate, which is a low-thermal expansion glass substrate having a size of 6025 (approximately 152 mm × 152 mm × 6.35 mm) with both the first and second main surfaces polished, was prepared as substrate 1. In order to obtain a flat and smooth main surface, polishing was performed using a rough polishing process, a precision polishing process, a localized polishing process, and a touch polishing process.

[0159] Using an ion beam sputtering apparatus 500 as shown in FIG. 8, a multilayer reflective film 5 and a protective film 6 were successively formed on the first main surface of the above-mentioned substrate 1.

[0160] A shield 519 was placed in the vacuum chamber 502 of the ion beam sputtering device 500. The shield 519 was made of SUS314 and had its surface blasted. Yttria (Y2O3) particles were used as the blasting material. After the blasting, the shield 519 was cleaned by ultrasonic cleaning and / or plasma cleaning. By such blasting and cleaning, yttria (Y2O3) could be placed on the surface of the shield 519.

[0161] The multilayer reflective film 5 of Example 1 was a periodic multilayer reflective film 5 made of Si and Mo in order to obtain a multilayer reflective film 5 suitable for EUV light having a wavelength of 13.5 nm. Specifically, a Si target and a Mo target were used as the high refractive index material target and the low refractive index material target (first and second sputtering targets 507 and 508). Krypton (Kr) ion particles were supplied from an ion source 505 to these targets 507 and 508, and ion beam sputtering was performed to alternately stack Si layers and Mo layers on the substrate 1. During this ion beam sputtering, the substances contained in the shield 519, specifically, SUS314 (chromium and iron) and the blast material (yttrium), were included in the multilayer reflective film 5 as trace materials.

[0162] Here, the sputtered particles of Si and Mo were incident at an angle of 30 degrees with respect to the normal to the main surface of the substrate 1. First, a Si layer was formed to a thickness of 4.2 nm, and then a Mo layer was formed to a thickness of 2.8 nm. This constitutes one cycle, and 40 cycles were similarly stacked, and finally a Si layer was formed to a thickness of 4.0 nm to form the multilayer reflective film 5. Therefore, the material of the bottom layer of the multilayer reflective film 5, i.e., the layer closest to the substrate 1, is Si, and the material of the top layer of the multilayer reflective film 5, i.e., the layer in contact with the protective film 6, is also Si.

[0163] Next, after the formation of the multilayer reflective film 5, a protective film 6 was formed on the surface of the multilayer reflective film-coated substrate 110. In an Ar gas atmosphere, the protective film 6 made of Ru was formed to a thickness of 2.5 nm by ion beam sputtering using a Ru target. Here, the Ru sputter particles were incident at an angle of 40 degrees with respect to the normal to the main surface of the substrate 1. During this ion beam sputtering, the substances contained in the shield 519, specifically, SUS314 (chromium and iron) and the blast material (yttrium), were contained as trace materials in the protective film 6. Then, annealing was performed at 130° C. in the atmosphere.

[0164] In this manner, the multilayer reflective film coated substrate 110 of Example 1 was produced.

[0165] Next, the portions of the multilayer reflective film-coated substrate 110 of Example 1 corresponding to the protective film 6 and the multilayer reflective film 5 were measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Specifically, the surface of the protective film 6 was ion-etched by 1 nm, and then the secondary ion intensity of the base material and the trace material was measured by TOF-SIMS of the protective film 6. Next, the protective film 6 was ion-etched, and after the multilayer reflective film 5 was exposed on the surface, it was further etched by 1 nm, and then the secondary ion intensity of the base material and the trace material was measured by TOF-SIMS of the multilayer reflective film 5. Table 1 shows the types of base material and trace material measured by TOF-SIMS. In Table 1, the elements (Y, Fe, and Cr) marked with "*" are the trace materials to be measured. The base material of the protective film 6 was Ru, and the base material of the multilayer reflective film 5 was Mo. The measurement conditions for TOF-SIMS are shown below. Primary ion species: Bi3 ++ Primary acceleration voltage: 30 kV Primary ion current: 3.0nA Primary ion irradiation area: Inside area of ​​a square with sides of 200 μm Secondary ion measurement range: 0.5 to 3000 m / z

[0166] Table 2 shows the ratio (I2 / I1) of secondary ion intensities calculated from the secondary ion intensity (I1) of the base material (Ru) and the secondary ion intensity (I2) of the trace material by TOF-SIMS measurement of the protective film 6. Table 3 shows the ratio (I2 / I1) of secondary ion intensities calculated from the secondary ion intensity (I1) of the base material (Mo) and the secondary ion intensity (I2) of the trace material by TOF-SIMS measurement of the multilayer reflective film 5. For example, "Y / Ru" in Table 2 means the ratio (I2 / I1) of the secondary ion intensity (I1) of the base material Ru and the secondary ion intensity (I2) of the trace material Y. Table 3 is similar except that the base material is Mo.

[0167] The reflectance of the multilayer reflective film coated substrate 110 manufactured under the conditions of Example 1 to EUV light with a wavelength of 13.5 nm was measured, and it was confirmed that there was no decrease in reflectance compared with a reference example described later. In addition, the crystallinity of the Mo film of the multilayer reflective film coated substrate 110 manufactured under the conditions of Example 1 was measured by an X-ray diffraction device (XRD), and it was confirmed that it was more finely crystalline than the reference example.

[0168] (Examples 2 to 5) Table 1 shows materials for producing the multilayer reflective film coated substrate 110 of Examples 2 to 5. In Examples 2 to 5, similarly to Example 1, a multilayer reflective film coated substrate 110 was produced in which a multilayer reflective film 5 and a protective film 6 were formed on the first main surface of a substrate 1. However, in Examples 2, 3 and 5, a shield 519 was used that had been blasted with particles of the material shown in Table 1. In Examples 3 and 5, the amount of shield material contained in the multilayer reflective film 5 and the protective film 6 was adjusted by adjusting the thickness of the blasting. In Example 4, a shield 519 that had not been blasted was used. Therefore, the trace materials contained in the multilayer reflective film 5 and the protective film 6 of Examples 2 to 5 are different from those of Example 1.

[0169] As in Example 1, the portions of the multilayer reflective film-coated substrates 110 of Examples 2 to 5 corresponding to the protective film 6 and the multilayer reflective film 5 were measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Tables 2 and 3 show the measurement results. Furthermore, as in Example 1, the reflectance and crystallinity of the Mo film of the multilayer reflective film-coated substrates 110 of Examples 2 to 5 were measured. As a result, as in Example 1, the multilayer reflective film-coated substrates 110 of Examples 2 to 5 did not experience a decrease in reflectance compared to the Reference Example, and were more microcrystalline than the Reference Example.

[0170] (Examples 6 and 7) Table 1 shows materials for manufacturing the multilayer reflective film coated substrate 110 of Examples 6 and 7. In Examples 6 and 7, similarly to Example 1, a multilayer reflective film coated substrate 110 was manufactured in which a multilayer reflective film 5 and a protective film 6 were formed on the first main surface of a substrate 1. However, in Examples 6 and 7, the protective film 6 was formed by DC magnetron sputtering.

[0171] In Example 6, similarly to Example 1, the multilayer reflective film 5 was formed by the ion beam sputtering method using the ion beam sputtering device 500. Then, the protective film 6 was formed by the DC magnetron sputtering method using the magnetron sputtering device. Specifically, the protective film 6 made of Ru was formed on the multilayer reflective film 5 to a thickness of 2.5 nm by the DC sputtering method using a Ru target in an Ar gas atmosphere. At that time, the shields in the ion beam sputtering device 500 and the magnetron sputtering device were blasted with particles of the material (alumina (Al2O3)) shown in Table 1. Therefore, aluminum (Al) was included as a measurement element by time-of-flight secondary ion mass spectrometry (TOF-SIMS).

[0172] In Example 7, similar to Example 6, the ion beam sputtering apparatus 500 was used to form the multilayer reflective film 5 by ion beam sputtering. Thereafter, similar to Example 6, the magnetron sputtering apparatus was used to form the protective film 6 by DC magnetron sputtering. In Example 7, the ion beam sputtering apparatus 500 and the magnetron sputtering apparatus used a shield that had not been subjected to blasting treatment. In Example 7, a particle getter made of copper (Cu) was applied to a predetermined portion of the inner wall of the apparatus, particularly the ion beam sputtering apparatus 500 and the magnetron sputtering apparatus. Device The Mo / Si multilayer reflective film 5 and protective film 6 were then formed on the shield. Therefore, copper (Cu) was included as a measurement element by time-of-flight secondary ion mass spectrometry (TOF-SIMS).

[0173] As in Example 1, the portions of the multilayer reflective film-coated substrate 110 of Examples 6 and 7 corresponding to the protective film 6 and the multilayer reflective film 5 were measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). Tables 2 and 3 show the measurement results. Also, as in Example 1, the reflectance and crystallinity of the Mo film of the multilayer reflective film-coated substrate 110 of Examples 6 and 7 were measured. As a result, as in Example 1, the multilayer reflective film-coated substrate 110 of Examples 6 and 7 did not experience a decrease in reflectance and was more microcrystalline compared to the reference example.

[0174] (Reference example 1) The multilayer reflective film coated substrate 110 of Reference Example 1 was manufactured in the same manner as in Example 1. However, in Reference Example 1, the material of the shield 519 arranged in the vacuum chamber 502 of the ion beam sputtering device 500 when the multilayer reflective film 5 and the protective film 6 were formed was high-purity molybdenum (Mo). In addition, the surface of the shield 519 was cleaned by etching to prevent impurities from adhering to the surface of the shield 519. Note that high-purity molybdenum (Mo) is very expensive compared to the shield 519 made of SUS314. Therefore, the cost of manufacturing the multilayer reflective film coated substrate 110 of Reference Example 1 is very high compared to Examples 1 to 7.

[0175] As in Example 1, the portions of the multilayer reflective film-coated substrate 110 of Reference Example 1 corresponding to the protective film 6 and the multilayer reflective film 5 were measured by time-of-flight secondary ion mass spectrometry (TOF-SIMS). As in Example 1, the reflectance and the crystallinity of the Mo film of the multilayer reflective film-coated substrate 110 of Reference Example 1 were measured. The multilayer reflective film 5 of Reference Example 1 did not contain any elements corresponding to trace materials (below the detection limit), and the protective film 6 contained trace materials other than molybdenum (Mo) below the detection limit. The multilayer reflective film-coated substrate 110 of Reference Example 1 was satisfactory as a multilayer reflective film-coated substrate 110 for manufacturing a predetermined reflective mask 200, and therefore Reference Example 1 was used as a comparison subject for Examples 1 to 7.

[0176] The composition (atomic ratio) of the multilayer reflective films of Examples 1 to 7 and Reference Example 1 was measured by XPS and was found to be Mo:Si=40:60.

[0177] (Evaluation Results of Multilayer Reflective Film Coated Substrate 110 of Examples 1 to 7 and Reference Example 1) As shown in Tables 2 and 3, in the portions corresponding to the protective film 6 and the multilayer reflective film 5 of the multilayer reflective film-coated substrate 110 in Examples 1 to 7 and Reference Example 1, the ratios of secondary ion intensities (I2 / I1) calculated from the secondary ion intensity (I1) of the base material and the secondary ion intensity (I2) of the trace material measured by TOF-SIMS were all greater than 0 and less than 0.300.

[0178] It was also confirmed that the reflectance of the multilayer reflective film 5 did not decrease compared to Reference Example 1. It was also confirmed that the crystallinity of the Mo film was finer, with finer crystal grains, compared to Reference Example 1. Therefore, in Examples 1 to 7, even if impurities (trace materials) are contained in a predetermined thin film of the multilayer reflective film-coated substrate 110 for manufacturing the reflective mask 200, it can be said that this at least does not adversely affect the performance of the manufactured reflective mask 200.

[0179] (Reflective mask blank 100) The multilayer reflective film coated substrate 110 of the above-mentioned Examples 1 to 7 and Reference Example 1 can be used to manufacture a reflective mask blank 100. Hereinafter, a method for manufacturing the reflective mask blank 100 will be described.

[0180] An absorber film 7 was formed on the protective film 6 of the multilayer reflective film-coated substrate 110 by DC magnetron sputtering. The absorber film 7 was a laminated film consisting of two layers, a TaN film as an absorbing layer and a TaO film as a low-reflection layer. A TaN film was formed as an absorbing layer on the surface of the protective film 6 of the multilayer reflective film-coated substrate 110 by DC magnetron sputtering. This TaN film was formed by placing the multilayer reflective film-coated substrate 110 opposite a Ta target and by reactive sputtering in a mixed gas atmosphere of Ar gas and N2 gas. Next, a TaO film (low-reflection layer) was further formed on the TaN film by DC magnetron sputtering. This TaO film was formed by placing the multilayer reflective film-coated substrate 110 opposite a Ta target and by reactive sputtering in a mixed gas atmosphere of Ar gas and O2 gas, similar to the TaN film.

[0181] The composition (atomic ratio) of the TaN film was Ta:N=70:30, and the thickness was 48 nm, while the composition (atomic ratio) of the TaO film was Ta:O=35:65, and the thickness was 11 nm.

[0182] Next, a back surface conductive film 2 made of CrN was formed on the second main surface (rear main surface) of the substrate 1 by magnetron sputtering (reactive sputtering) under the following conditions: Conditions for forming the back surface conductive film 2: Cr target, mixed gas atmosphere of Ar and N2 (Ar: 90 atomic %, N: 10 atomic %), film thickness 20 nm.

[0183] As described above, the multilayer reflective film coated substrate 110 of each of Examples 1 to 7 and Reference Example 1 was used to produce a reflective mask blank 100.

[0184] (Reflective mask 200) Next, a reflective mask 200 was manufactured using the above-mentioned reflective mask blank 100 of Examples 1 to 7 and Reference Example 1. The manufacture of the reflective mask 200 will be described with reference to FIG.

[0185] First, as shown in FIG. 7(b), a resist film 8 was formed on the absorber film 7 of the reflective mask blank 100. Then, a desired pattern such as a circuit pattern was drawn (exposed) on the resist film 8, and the resist film 8 was developed and rinsed to form a predetermined resist pattern 8a (FIG. 7(c)). Next, the resist pattern 8a was used as a mask to dry etch the TaO film (upper absorber film) with CF4 gas, and then the TaN film (lower absorber film) was dry etched with Cl2 gas to form the absorber pattern 7a (FIG. 7(d)). The protective film 6 made of Ru has extremely high dry etching resistance against Cl2 gas and serves as a sufficient etching stopper. After that, the resist pattern 8a was removed by ashing or a resist stripper (FIG. 7(e)).

[0186] In this manner, the reflective masks 200 of Examples 1 to 7 and Reference Example 1 were manufactured.

[0187] (Semiconductor device manufacturing) The reflective mask 200 manufactured using the multilayer reflective film coated substrate 110 of Examples 1 to 7 and Reference Example 1 was set in an EUV scanner, and EUV exposure was performed on a wafer having a film to be processed and a resist film formed on a semiconductor substrate. Then, a resist pattern was formed on the semiconductor substrate having the film to be processed formed thereon by developing the exposed resist film.

[0188] The reflective mask 200 manufactured using the multilayer reflective film-coated substrate 110 of Examples 1 to 7 was able to form a fine, highly accurate transfer pattern, similar to Reference Example 1, since even if impurities were contained in the thin film constituting the reflective mask 200, the performance of the reflective mask 200 was at least not adversely affected.

[0189] This resist pattern is transferred to the film to be processed by etching, and then various processes such as forming insulating and conductive films, introducing dopants, and annealing are carried out, making it possible to manufacture semiconductor devices with the desired characteristics with a high yield.

[0190] [Table 1]

[0191] [Table 2]

[0192] [Table 3] [Explanation of symbols]

[0193] 1. Mask blank substrate (substrate) 2. Backside conductive film 5 Multilayer reflective film 6 Protective film 7. Absorber membrane 7a Absorber pattern 8. Resist film 8a Resist pattern 9 Etching mask film 100 Reflective mask blank 110 Multilayer reflective film substrate 120 Thin film substrate 200 Reflective mask 500 Ion Beam Sputtering Equipment 502 Vacuum Chamber 503 PCB Holder 504 Holder mounting rod 505 Ion Source 506 Foundation 507 First sputtering target 508 Secondary sputtering target 509 Rotational Axis 510 Exhaust passage 511 Vacuum Pump 512 Pressure Sensor 513 Neutralizer 517 Top Clamp 518 Presser pin 519 Shield

Claims

1. A reflective mask blank having a substrate and at least one thin film provided on a major surface of the substrate, the thin film is at least one selected from a back surface conductive film, a protective film, an absorber film, and an etching mask film; the thin film includes a base material constituting the thin film and a trace amount of a material other than the base material, The trace material includes at least one element selected from chromium (Cr), iron (Fe), nickel (Ni) and copper (Cu); After the surface of the thin film was ion-etched to a depth of 1 to 2 nm, the secondary ion intensity of the base material (I １ ) to the secondary ion intensity (I ２ ) ratio (I ２ / I １ ) is greater than 0 and less than or equal to 0.300; The reflective mask blank comprises: a multilayer reflective film provided on a major surface of the substrate, and the absorber film provided on the multilayer reflective film; or The multilayer reflective film is provided on the main surface of the substrate, the absorber film is provided on the multilayer reflective film, and at least one selected from the rear conductive film, the protective film, and the etching mask film. A reflective mask blank characterized by:

2. The ratio (I ２ / I １ 2. The reflective mask blank according to claim 1, wherein the ratio of the reflection angle to the reflection angle of the blank is 0.005 or more.

3. The multilayer reflective film is a multilayer reflective film in which high refractive index materials and low refractive index materials are alternately laminated, The high refractive index material includes silicon (Si), 3. The reflective mask blank according to claim 1, wherein the low refractive index material contains a metal selected from the group consisting of molybdenum (Mo), ruthenium (Ru), rhodium (Rh), and platinum (Pt), or an alloy thereof.

4. 4. The reflective mask blank according to claim 1, wherein the thin film is a protective film and the base material is ruthenium (Ru).

5. 5. The reflective mask blank according to claim 4, characterized in that the protective film is made of a Ru metal alone, a Ru alloy containing Ru with titanium (Ti), niobium (Nb), molybdenum (Mo), zirconium (Zr), yttrium (Y), boron (B), lanthanum (La), cobalt (Co), rhenium (Re) and / or rhodium (Rh), or a material containing nitrogen in any of these.

6. the thin film is the absorber film, 6. The reflective mask blank according to claim 1, wherein the absorber film contains at least one element selected from palladium (Pd), silver (Ag), platinum (Pt), gold (Au), iridium (Ir), tungsten (W), chromium (Cr), cobalt (Co), manganese (Mn), tin (Sn), tantalum (Ta), vanadium (V), nickel (Ni), hafnium (Hf), iron (Fe), copper (Cu), tellurium (Te), zinc (Zn), magnesium (Mg), germanium (Ge), aluminum (Al), rhodium (Rh), ruthenium (Ru), molybdenum (Mo), niobium (Nb), titanium (Ti), zirconium (Zr), yttrium (Y), and silicon (Si) as a main component.

7. the thin film is a back conductive film, 7. The reflective mask blank according to claim 1, wherein the rear conductive film contains chromium (Cr) or tantalum (Ta).

8. 8. A reflective mask having an absorber pattern formed by patterning the absorber film in the reflective mask blank according to claim 1.

9. 9. A method for manufacturing a semiconductor device, comprising the steps of: setting the reflective mask according to claim 8 in an exposure apparatus having an exposure light source that emits EUV light; and transferring a transfer pattern to a resist film formed on a transfer substrate.

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