Piping connection structure and treatment device

Abstract

To provide technique capable of absorbing an error in assembling of a device.SOLUTION: A pipe connection structure of a processing device includes first piping having a first flange on one end, second piping having a second flange connected with the first flange on one end, and a piping clamp for connecting and fastening the first flange and the second flange at a plurality of positions including a position at which an axis of the first piping and an axis of the second piping do not coincide with each other.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present disclosure relates to a piping connection structure and a processing apparatus. [Background technology]

[0002] A vacuum processing apparatus using a bellows in exhaust piping to absorb errors in each component is used (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-104755 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that can absorb errors that may occur during device assembly. [Means for solving the problem]

[0005] A piping connection structure according to one aspect of the present disclosure is a piping connection structure provided in a processing device, the piping connection structure comprising: a first pipe having a first flange portion at one end; a second pipe having a second flange portion at one end connected to the first flange portion; and a piping clamp that connects and fastens the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first pipe and a pipe axis of the second pipe do not coincide with each other. death , The second flange portion includes an annular projection that protrudes from a connection surface that is connected to the first flange portion and has an inner diameter larger than an outer diameter of the first flange portion. . Effect of the Invention

[0006] According to the present disclosure, errors that occur during device assembly can be absorbed. [Brief description of the drawings]

[0007] [Figure 1] 1 is a schematic diagram illustrating an example of a processing apparatus according to an embodiment; [Diagram 2] FIG. 1 is a perspective view showing an example of a pipe connection structure according to an embodiment; [Diagram 3] FIG. 2 is a perspective view showing an example of a pipe connection structure according to an embodiment; [Figure 4] FIG. 1 is a cross-sectional view showing an example of a pipe connection structure according to an embodiment. [Diagram 5] FIG. 2 is an enlarged view of a portion of the first flange portion; [Figure 6] FIG. 1 is a diagram showing a connection form between a first pipe and a second pipe. [Figure 7] A diagram showing an example of a piping clamp [Figure 8] A diagram showing an example of a piping clamp [Figure 9] FIG. 13 is a perspective view showing another example of the pipe connection structure of the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all of the accompanying drawings, the same or corresponding members or parts are designated by the same or corresponding reference numerals, and duplicated descriptions will be omitted.

[0009] [Processing Device] An example of a processing apparatus according to an embodiment will be described with reference to FIG. 1. The processing apparatus according to the embodiment is an apparatus that accommodates a substrate in a processing vessel (Chamber) and performs a predetermined process (for example, a film forming process, an etching process) on the substrate. The processing apparatus may be a batch type apparatus that processes a plurality of substrates at once, or a single-wafer type apparatus that processes substrates one by one. The processing apparatus may also be a semi-batch type apparatus that revolves a plurality of substrates arranged on a turntable in a processing vessel by the turntable, and processes the substrates by passing them in sequence through an area where a first gas is supplied and an area where a second gas is supplied.

[0010] The processing apparatus 1 includes a processing vessel 10, a gas supply unit 20, and an exhaust unit 30. In the processing apparatus 1, a processing gas is supplied into the processing vessel 10 by the gas supply unit 20, and a predetermined process is performed on a substrate accommodated in the processing vessel 10. In the processing apparatus 1, the processing gas supplied into the processing vessel 10 is exhausted by the exhaust unit 30.

[0011] The processing vessel 10 accommodates a substrate. The processing vessel 10 has a supply port 11, and a processing gas is supplied from a gas supply unit 20 into the processing vessel 10 via the supply port 11. The processing vessel 10 has an exhaust port 12, and the processing gas is exhausted from the processing vessel 10 via the exhaust port 12.

[0012] The gas supply unit 20 includes a process gas supply source, a valve, a flow rate controller (none of which are shown), etc. The gas supply unit 20 supplies the process gas, the flow rate of which is controlled by the flow rate controller, into the process vessel 10 via the supply port 11. The supply and stop of the process gas from the process gas supply source into the process vessel 10 is controlled by opening and closing a valve.

[0013] The exhaust unit 30 includes an exhaust line 31, an APC valve 32, a vacuum pump 33, etc. The exhaust line 31 includes, for example, an exhaust pipe, and connects the exhaust port 12 and the vacuum pump 33. The exhaust line 31 includes at least one of a pipe connection structure 100 and a pipe connection structure 200, which will be described later. The APC valve 32 is interposed in the exhaust line 31, and adjusts the exhaust speed by adjusting the conductance of the exhaust line 31. The vacuum pump 33 includes, for example, a dry pump, a turbo molecular pump, etc., and exhausts the inside of the processing vessel 10 via the exhaust line 31.

[0014] [Pipe connection structure] An example of a pipe connection structure 100 included in the processing apparatus 1 of FIG. 1 will be described with reference to FIGS.

[0015] The pipe connection structure 100 includes a first pipe 110, a second pipe 120, a pipe clamp 130, and the like.

[0016] The first pipe 110 is a straight pipe having an inner diameter ID 11. The first pipe 110 includes a flange portion 111, a sealing member 112, a sliding member 113, and the like.

[0017] The flange portion 111 is provided at one end (the end portion on the -z direction side) of the first pipe 110. The flange portion 111 has a connection surface 111a to be connected to a flange portion 121 of the second pipe 120 described later.

[0018] The sealing member 112 is provided on the connection surface 111a of the flange portion 111. The sealing member 112 seals the gap between the flange portion 111 and the flange portion 121. This ensures airtightness within the first pipe 110 and the second pipe 120. The sealing member 112 is, for example, an O-ring.

[0019] The sliding member 113 is provided on the connection surface 111a of the flange portion 111. The sliding member 113 smoothes the relative movement between the flange portion 111 and the flange portion 121 when they are aligned. This makes it possible to suppress the generation of particles such as metal powder caused by friction between the flange portion 111 and the flange portion 121. The sliding member 113 is, for example, a ball roller.

[0020] The second pipe 120 has an inner diameter ID21 and is a straight pipe that tapers toward one end (the end on the +z direction side). The inner diameter ID21 of the second pipe 120 is the same as the inner diameter ID11 of the first pipe 110. However, the inner diameter ID21 of the second pipe 120 may be different from the inner diameter ID11 of the first pipe 110. The second pipe 120 includes a flange portion 121, an annular protrusion 122, etc.

[0021] The flange portion 121 is provided at one end (the end on the +z direction side) of the second pipe 120. The flange portion 121 has a connection surface 121a that is connected to the flange portion 111 of the first pipe 110. The flange portion 121 has an inner diameter ID22 larger than that of the flange portion 111. As a result, even if the flange portion 111 and the flange portion 121 are connected at a position where the pipe axis Z1 of the first pipe 110 and the pipe axis Z2 of the second pipe 120 do not coincide with each other, the flow path cross-sectional area does not become small at the portion where the flange portion 111 and the flange portion 121 are connected. Therefore, it is possible to suppress a change in the flow of the process gas at the portion where the flange portion 111 and the flange portion 121 are connected. However, the flange portion 121 may have the same inner diameter as the flange portion 111. In addition, the flange portion 121 has an outer diameter larger than that of the flange portion 111.

[0022] The annular protrusion 122 protrudes from the connection surface 121a of the flange portion 121, and has a ring shape with an inner diameter larger than the outer diameter of the flange portion 111. The annular protrusion 122 comes into contact with the outer wall of the flange portion 111 during alignment between the flange portion 111 and the flange portion 121, thereby limiting the movement of the flange portion 111 to a predetermined range. Note that FIG. 4 shows a state in which the inner wall on the left side of the annular protrusion 122 comes into contact with the outer wall of the flange portion 111.

[0023] The piping clamp 130 connects and fastens the flange portion 111 and the flange portion 121 at a plurality of positions including a position where the pipe axis Z1 of the first pipe 110 and the pipe axis Z2 of the second pipe 120 coincide and a position where they do not coincide. For example, as shown in a connection form A of FIG. 6, the piping clamp 130 connects and fastens the flange portion 111 and the flange portion 121 at a position where the pipe axis Z1 is shifted to the right of the pipe axis Z2. As shown in a connection form B of FIG. 6, the piping clamp 130 connects and fastens the flange portion 111 and the flange portion 121 at a position where the pipe axis Z1 and the pipe axis Z2 coincide. As shown in a connection form C of FIG. 6, the piping clamp 130 connects and fastens the flange portion 111 and the flange portion 121 at a position where the pipe axis Z1 is shifted to the left of the pipe axis Z2. In this way, the piping clamp 130 connects and fastens the flange portion 111 and the flange portion 121 at a plurality of positions, including positions where the pipe axis Z1 and the pipe axis Z2 do not coincide, so that errors during device assembly can be absorbed.

[0024] The piping clamp 130 includes a first holding member 131, a second holding member 132, a fixing member 133, a position adjustment member 134, a pressing member 135, and the like.

[0025] The first holding member 131 has a semicircular arc shape in a plan view. The first holding member 131 includes a recess 131a and a protrusion 131b.

[0026] The second holding member 132 has a semicircular arc shape in a plan view. The second holding member 132 includes a recess 132a and a protrusion 132b.

[0027] The fixing member 133 connects and fixes the first holding member 131 and the second holding member 132. The fixing member 133 is, for example, a screw.

[0028] The first holding member 131 and the second holding member 132 connect and fasten the flange portion 111 and the flange portion 121 by fitting the protruding portion 132b into the recessed portion 131a and by fitting the protruding portion 131b into the recessed portion 132a and fixing with a fixing member 133. In this way, the first holding member 131 and the second holding member 132 are configured to be separable.

[0029] The position adjustment member 134 adjusts the relative position between the first pipe 110 and the second pipe 120. The position adjustment member 134 includes, for example, a plurality of screws provided radially penetrating the first holding member 131 or the second holding member 132 and contacting the pipe wall of the first pipe 110 to move the first pipe 110 in a direction perpendicular to the pipe axis Z1.

[0030] The pressing member 135 presses the flange portion 111 and the flange portion 121 in a direction to bring them closer to each other. The pressing member 135 includes, for example, a plurality of screws provided to penetrate the first holding member 131 or the second holding member 132 in the thickness direction and contact the flange portion 121 to press the flange portion 121 in a direction to bring the flange portion 121 closer to the flange portion 111.

[0031] As described above, the pipe connection structure 100 of the embodiment has the pipe clamp 130 that connects and fastens the flange portion 111 and the flange portion 121 at a plurality of positions including a position where the pipe axis Z1 of the first pipe 110 and the pipe axis Z2 of the second pipe 120 do not coincide with each other. As a result, the pipe connection structure 100 has a degree of freedom in a planar direction (xy direction) perpendicular to the pipe axis Z1 and the pipe axis Z2, and therefore can absorb errors in the xy direction during device assembly.

[0032] Furthermore, the pipe connection structure 100 of the embodiment does not have a complex structure with a large surface area like a bellows, and therefore can be easily provided with anti-corrosion measures such as coating.

[0033] An example of a pipe connection structure 200 included in the processing apparatus 1 of FIG. 1 will be described with reference to FIG.

[0034] The pipe connection structure 200 differs from the above-described pipe connection structure 100 in that the second pipe 220 is an L-shaped pipe that connects the first pipe 210 and the third pipe 230.

[0035] The pipe connection structure 200 includes a first pipe 210, a second pipe 220, a third pipe 230, a first pipe clamp, a second pipe clamp, etc. Note that the first pipe clamp and the second pipe clamp are not shown in FIG.

[0036] The first pipe 210 may have the same configuration as the above-described first pipe 110. That is, the first pipe 210 is a straight pipe, and includes a flange portion 211, a sealing member (not shown), a sliding member (not shown), and the like.

[0037] The second pipe 220 is an L-shaped pipe. The second pipe 220 includes a flange portion 221, an annular protrusion 222, a flange portion 223, an annular protrusion 224, and the like.

[0038] The flange portion 221 is provided at one end (the end on the +z direction side) of the second pipe 220. The flange portion 221 has a connection surface 221a that is connected to the flange portion 211 of the first pipe 210. The flange portion 221 has an inner diameter larger than that of the flange portion 211. As a result, even if the flange portion 211 and the flange portion 221 are connected at a position where the pipe axis of the first pipe 210 and the pipe axis of the second pipe 220 do not coincide with each other, the flow path cross-sectional area does not become small at the portion where the flange portion 211 and the flange portion 221 are connected. Therefore, it is possible to suppress a change in the flow of the process gas at the portion where the flange portion 211 and the flange portion 221 are connected. However, the flange portion 221 may have the same inner diameter as the flange portion 211. In addition, the flange portion 221 has an outer diameter larger than that of the flange portion 211.

[0039] The annular protrusion 222 protrudes from the connection surface 221a of the flange portion 221, and has a ring shape with an inner diameter larger than the outer diameter of the flange portion 211. The annular protrusion 222 comes into contact with the outer wall of the flange portion 211 during alignment between the flange portion 211 and the flange portion 221, thereby limiting the movement of the flange portion 211 to a predetermined range. Note that FIG. 9 shows a state in which the inner wall of the annular protrusion 222 on the +x direction side comes into contact with the outer wall of the flange portion 211.

[0040] The flange portion 223 is provided at the other end (end portion on the +x direction side) of the second pipe 220. The flange portion 223 has a connection surface 223a to be connected to the flange portion 231 of the third pipe 230. The flange portion 223 has an inner diameter larger than that of the flange portion 231. As a result, even if the flange portion 223 and the flange portion 231 are connected at a position where the pipe axis of the second pipe 220 and the pipe axis of the third pipe 230 do not coincide with each other, the flow path cross-sectional area does not become small at the portion where the flange portion 223 and the flange portion 231 are connected. Therefore, it is possible to suppress a change in the flow of the process gas at the portion where the flange portion 223 and the flange portion 231 are connected. However, the flange portion 223 may have the same inner diameter as the flange portion 231. In addition, the flange portion 223 has an outer diameter larger than that of the flange portion 231.

[0041] The annular protrusion 224 protrudes from the connection surface 223a of the flange portion 223, and has a ring shape with an inner diameter larger than the outer diameter of the flange portion 231. The annular protrusion 224 contacts the outer wall of the flange portion 231 when aligning the flange portion 231 and the flange portion 223, thereby limiting the movement of the flange portion 231 to a predetermined range. Note that FIG. 9 shows a state in which the inner wall of the annular protrusion 224 on the +y direction side is in contact with the outer wall of the flange portion 231.

[0042] The third pipe 230 may have the same configuration as the above-described first pipe 110. That is, the third pipe 230 is a straight pipe, and includes a flange portion 231, a sealing member (not shown), a sliding member (not shown), and the like.

[0043] The first piping clamp connects and fastens the flange portion 211 and the flange portion 221 at a plurality of positions including positions where the pipe axis of the first piping 210 and the pipe axis of the second piping 220 coincide and positions where they do not coincide. The first piping clamp may have the same configuration as the piping clamp 130 described above.

[0044] The second pipe clamp connects and fastens the flange portion 223 and the flange portion 231 at a plurality of positions including positions where the pipe axis of the second pipe 220 and the pipe axis of the third pipe 230 coincide and positions where they do not coincide. The second pipe clamp may have the same configuration as the pipe clamp 130 described above.

[0045] As described above, the pipe connection structure 200 of the embodiment has a pipe clamp that connects and fastens the flange portion 211 and the flange portion 221 at a plurality of positions including a position where the pipe axis of the first pipe 210 and the pipe axis of the second pipe 220 do not coincide. As a result, the pipe connection structure 200 has a degree of freedom in a planar direction (xy direction) perpendicular to the pipe axes of the first pipe 210 and the second pipe 220, and can absorb errors in the xy direction during device assembly.

[0046] Moreover, the pipe connection structure 200 of the embodiment has a pipe clamp that connects and fastens the flange portion 223 and the flange portion 231 at a plurality of positions including a position where the pipe axis of the second pipe 220 and the pipe axis of the third pipe 230 do not coincide. As a result, the pipe connection structure 200 has a degree of freedom in a planar direction (yz direction) perpendicular to the pipe axes of the second pipe 220 and the third pipe 230, and can absorb errors in the yz direction during device assembly.

[0047] In this way, according to the pipe connection structure 200 of the embodiment, it is possible to accommodate geometric tolerances other than those in the rotational direction about the y-axis.

[0048] Furthermore, the pipe connection structure 200 of the embodiment does not have a complex structure with a large surface area like a bellows, and therefore can be easily provided with anti-corrosion measures such as coating.

[0049] In the above embodiment, flange portions 111 and 211 are an example of a first flange portion, flange portions 121 and 221 are an example of a second flange portion, flange portion 231 is an example of a third flange portion, and flange portion 223 is an example of a fourth flange portion.

[0050] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0051] 1 Processing equipment 100 Piping connection structure 110 First Pipe 111 Flange part 120 Second Pipe 121 Flange part 130 Pipe clamp

Claims

1. A piping connection structure provided in a processing device, a first pipe including a first flange portion at one end; a second pipe including a second flange portion connected to the first flange portion at one end; a piping clamp that connects and fastens the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first piping and a pipe axis of the second piping do not coincide with each other; and having The second flange portion includes an annular projection protruding from a connection surface connected to the first flange portion and having an inner diameter larger than an outer diameter of the first flange portion. Piping connection structure.

2. The second flange portion has a larger inner diameter than the first flange portion. The pipe connection structure according to claim 1 .

3. The second flange portion has a larger outer diameter than the first flange portion. The pipe connection structure according to claim 1 or 2.

4. The piping clamp includes a holding member that holds the first flange portion and the second flange portion. The pipe connection structure according to any one of claims 1 to 3.

5. The holding member can be divided into a plurality of parts. The pipe connection structure according to claim 4.

6. The piping clamp includes a position adjustment member that adjusts a relative position between the first piping and the second piping. The pipe connection structure according to claim 4 or 5.

7. the position adjustment member includes a plurality of screws provided through the holding member and contacting a wall of the first pipe to move the first pipe in a direction perpendicular to a pipe axis; The pipe connection structure according to claim 6.

8. The piping clamp includes a pressing member that presses the first flange portion and the second flange portion in a direction in which the first flange portion and the second flange portion approach each other. The pipe connection structure according to any one of claims 4 to 7.

9. the pressing member includes a plurality of screws that are provided through the holding member and contact the second flange portion to press the second flange portion in a direction toward the first flange portion, The pipe connection structure according to claim 8.

10. The first pipe includes a sealing member provided on a connection surface of the first flange portion that is connected to the second flange portion. The pipe connection structure according to any one of claims 1 to 9.

11. The first pipe includes a sliding member provided on a connection surface of the first flange portion that is connected to the second flange portion, The pipe connection structure according to any one of claims 1 to 10.

12. the second pipe is an L-shaped pipe having a fourth flange portion at the other end, a third pipe having a third flange portion at one end thereof connected to the fourth flange portion; a second pipe clamp that connects and fastens the third flange portion and the fourth flange portion at a plurality of positions including a position where a pipe axis of the other end of the second pipe does not coincide with a pipe axis of the third pipe; and having The pipe connection structure according to any one of claims 1 to 11.

13. a process vessel including an exhaust port; an exhaust pipe connected to the exhaust port; Equipped with The exhaust pipe is a first pipe including a first flange portion at one end; a second pipe including a second flange portion connected to the first flange portion at one end; a piping clamp that connects and fastens the first flange portion and the second flange portion at a plurality of positions including a position where a pipe axis of the first piping and a pipe axis of the second piping do not coincide with each other; and having The second flange portion includes an annular projection protruding from a connection surface connected to the first flange portion and having an inner diameter larger than an outer diameter of the first flange portion. Processing unit.

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