Process module, substrate processing system and processing method

Abstract

To provide a process module, a substrate processing system, and a processing method that can reduce footprint.SOLUTION: A process module includes four mounting tables laid out in 2 rows and 2 columns inside the process module, and the dimensions of the row spacing and the column spacing that constitute the layout are different.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a process module, a substrate processing system and a processing method. [Background technology]

[0002] 2. Description of the Related Art As a process module for processing substrates (hereinafter also referred to as wafers) in a substrate processing system, a process module that processes four wafers simultaneously in one chamber is known (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-087576 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a process module, a substrate processing system, and a processing method that can reduce the footprint. [Means for solving the problem]

[0005] A process module according to one embodiment of the present disclosure has four mounting stages laid out in two rows and two columns inside the process module, and the row spacing and column spacing forming the layout have different dimensions. Effect of the Invention

[0006] According to the present disclosure, the footprint can be reduced. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a schematic plan view showing an example of a configuration of a substrate processing system according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is an exploded perspective view showing an example of the configuration of the substrate processing apparatus according to this embodiment. [Diagram 3] FIG. 3 is a diagram showing an example of the positional relationship between the processing space and the rotating arm at the standby position. [Figure 4] FIG. 4 is a diagram showing an example of the positional relationship between the processing space and the rotating arm at the wafer holding position. [Diagram 5] FIG. 5 is a diagram showing an example of a moving path of a wafer in the substrate processing apparatus according to this embodiment. [Figure 6] FIG. 6 is a diagram showing an example of an exhaust path of the substrate processing apparatus in this embodiment. [Figure 7] FIG. 7 is a schematic cross-sectional view showing an example of the configuration of a substrate processing apparatus according to this embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a process module, a substrate processing system, and a processing method will be described in detail with reference to the accompanying drawings. Note that the disclosed technology is not limited to the following preferred embodiments.

[0009] A process module that processes four wafers simultaneously in one chamber has four stages for placing each of the four wafers, and therefore has a large footprint. In response to this, factories in which substrate processing systems are installed are required to reduce the footprint in order to improve space efficiency. In addition, a process module that processes two wafers simultaneously in one chamber may be connected to a vacuum transfer chamber that transfers wafers to and from the process module. In other words, process modules of different sizes may be connected to the vacuum transfer chamber. In such cases, the vacuum transfer chamber is provided with a wafer transfer mechanism that is suited to each of the process modules of different sizes. Therefore, it is expected to reduce the footprint of the process module and to standardize the wafer transfer mechanism.

[0010] (Embodiment) [Substrate processing system configuration] Fig. 1 is a schematic plan view showing an example of the configuration of a substrate processing system according to an embodiment of the present disclosure. The substrate processing system 1 shown in Fig. 1 includes a loading / unloading port 11, a loading / unloading module 12, vacuum transfer modules 13a and 13b, and substrate processing apparatuses 2, 2a and 2b. In Fig. 1, the X direction is the left-right direction, the Y direction is the front-rear direction, the Z direction is the up-down direction (height direction), and the loading / unloading port 11 is the front side in the front-rear direction. The loading / unloading port 11 is connected to the front side of the loading / unloading module 12, and the vacuum transfer module 13a is connected to the rear side of the loading / unloading module 12, and they are connected to each other in the front-rear direction.

[0011] A carrier, which is a transfer container accommodating a substrate to be processed, is placed in the transfer port 11. The substrate is a wafer W, which is a circular substrate having a diameter of, for example, 300 mm. The transfer module 12 is a module for transferring the wafer W between the carrier and the vacuum transfer module 13a. The transfer module 12 has an atmospheric pressure transfer chamber 121 in which the wafer W is transferred between the carrier and the vacuum transfer module 13a in an atmospheric pressure atmosphere by a transfer mechanism 120, and a load lock chamber 122 in which the atmosphere in which the wafer W is placed is switched between an atmospheric pressure atmosphere and a vacuum atmosphere.

[0012] The vacuum transfer modules 13a and 13b each have a vacuum transfer chamber 14a and 14b in which a vacuum atmosphere is formed. Substrate transfer mechanisms 15a and 15b are disposed inside the vacuum transfer chambers 14a and 14b, respectively. Between the vacuum transfer module 13a and the vacuum transfer module 13b, a path 16 is disposed for transferring the wafer W between the vacuum transfer modules 13a and 13b. The vacuum transfer chambers 14a and 14b are each formed, for example, in a rectangular shape in a plan view. The substrate processing apparatuses 2 and 2b are connected to the four side walls of the vacuum transfer chamber 14a that face each other in the left-right direction, respectively. The substrate processing apparatuses 2a and 2b are connected to the four side walls of the vacuum transfer chamber 14b that face each other in the left-right direction, respectively.

[0013] Of the four side walls of the vacuum transfer chamber 14a, the front side is connected to a load lock chamber 122 installed in the load / unload module 12. Gate valves G are arranged between the normal pressure transfer chamber 121 and the load lock chamber 122, between the load lock chamber 122 and the vacuum transfer module 13a, and between the vacuum transfer modules 13a, 13b and the substrate processing apparatuses 2, 2a, 2b. The gate valves G open and close the load / unload ports for the wafers W provided in the modules that are connected to each other.

[0014] The substrate transfer mechanism 15a transfers the wafer W between the load / unload module 12, the substrate processing apparatus 2, 2b, and the path 16 in a vacuum atmosphere. The substrate transfer mechanism 15b transfers the wafer W between the path 16 and the substrate processing apparatus 2a, 2b in a vacuum atmosphere. The substrate transfer mechanisms 15a, 15b are made of articulated arms and have a substrate holder for holding the wafer W. The substrate processing apparatus 2, 2a, 2b performs substrate processing using a processing gas on a plurality of wafers W (e.g., two or four) in a vacuum atmosphere at once. For this reason, the substrate holder of the substrate transfer mechanism 15a, 15b is configured to hold, for example, two wafers W at the same time so that two wafers W are delivered to the substrate processing apparatus 2, 2a, 2b at once. The substrate processing apparatus 2, 2a can transfer the wafer W received on the mounting table on the vacuum transfer module 13a, 13b side to the mounting table on the far side by a rotating arm provided inside. Moreover, the substrate transport mechanisms 15a and 15b are an example of a wafer transport mechanism.

[0015] In addition, the substrate processing apparatuses 2, 2a, and 2b can be connected to any of the positions on the sides of the vacuum transfer modules 13a and 13b that face each other in the left-right direction, since the Y-direction pitch (row interval) of the mounting tables is the same as the pitch Py. In the example of FIG. 1, the substrate processing apparatuses 2 and 2b are connected to the vacuum transfer module 13a, and the substrate processing apparatuses 2a and 2b are connected to the vacuum transfer module 13b. The substrate processing apparatuses 2 and 2a are substrate processing apparatuses that have different diameters of reactors including a processing space corresponding to one mounting table according to a process application, and have different pitches Px1 and Px2 that are the X-direction pitch (row interval) of the mounting tables. In addition, the pitch Px2 of the substrate processing apparatus 2a is the same value as the pitch Py. In other words, the pitch Py corresponds to the size of the largest reactor. In other words, the substrate processing apparatus 2 has a smaller reactor size than the substrate processing apparatus 2a, so the pitch Px1 can be made smaller than the pitch Px2.

[0016] The internal configuration of the substrate processing apparatus 2a is basically the same as that of the substrate processing apparatus 2, except that the pitch Px2 is different from the pitch Px1, and the description thereof will be omitted. The substrate processing apparatus 2b is a type of substrate processing apparatus having two mounting tables, and does not transport wafers in the substrate processing apparatus 2b, but loads two wafers at the same time, processes them, and loads them out at the same time. For convenience of explanation, the X-direction pitch in the XYZ coordinate system in FIG. 1 is described as the column interval, and the Y-direction pitch is described as the row interval. However, for example, the substrate processing apparatus 2, 2a may be disposed on the back side of the vacuum transfer module 13b, and in this case, the column interval and the row interval must be interchanged. In other words, which is the row and which is the column must be determined based on the surface where the substrate processing apparatus 2, 2a contacts the vacuum transfer module 13a, 13b.

[0017] The substrate processing system 1 has a control unit 8. The control unit 8 is, for example, a computer including a processor, a storage unit, an input device, a display device, and the like. The control unit 8 controls each unit of the substrate processing system 1. The control unit 8 can use the input device to allow an operator to input commands to manage the substrate processing system 1. The control unit 8 can also use the display device to visualize and display the operating status of the substrate processing system 1. Furthermore, the storage unit of the control unit 8 stores a control program for controlling various processes performed in the substrate processing system 1 by the processor, recipe data, and the like. The processor of the control unit 8 executes the control program to control each unit of the substrate processing system 1 according to the recipe data, thereby performing a desired substrate processing in the substrate processing system 1.

[0018] [Configuration of substrate processing equipment] Next, with reference to FIG. 2 to FIG. 7, an example in which the substrate processing apparatus 2 is applied to a film forming apparatus that performs plasma CVD (Chemical Vapor Deposition) processing on a wafer W will be described. The substrate processing apparatus 2 is an example of a process module. FIG. 2 is an exploded perspective view showing an example of the configuration of the substrate processing apparatus in this embodiment. As shown in FIG. 2, the substrate processing apparatus 2 includes a processing vessel (vacuum vessel) 20 that is rectangular in plan view. The processing vessel 20 is configured so that a vacuum atmosphere can be maintained inside. The processing vessel 20 is configured such that an open portion on the upper surface is closed by a gas supply unit 4 and a manifold 36, which will be described later. In FIG. 2, partitions and the like inside are omitted so that the relationship between the processing spaces S1 to S4 and the rotating arm 3 can be easily understood. The processing vessel 20 has two loading / unloading ports 21 formed on the side connected to the vacuum transfer chamber 14a or 14b, aligned in the Y direction. The loading / unloading port 21 is opened and closed by a gate valve G.

[0019] A plurality of processing spaces S1 to S4 are provided inside the processing vessel 20. A mounting table 22 is provided in each of the processing spaces S1 to S4. The mounting table 22 is vertically movable, moving to an upper position when processing the wafer W and moving to a lower position when transferring the wafer W. A transfer space T is provided below the processing spaces S1 to S4, connecting the processing spaces S1 to S4 and transferring the wafer W by a rotating arm 3. The transfer space T below the processing spaces S1 and S2 is connected to each of the transfer ports 21, and the wafer W is transferred between the vacuum transfer chambers 14a and 14b by the substrate transfer mechanisms 15a and 15b.

[0020] The mounting tables 22 in the processing spaces S1 to S4 are laid out in two rows and two columns when viewed from above. In this layout, the row spacing and the column spacing have different dimensions. In other words, when comparing the Y-directional pitch (row spacing) of the mounting tables 22 and the X-directional pitch (column spacing) Px1, the pitch Py is greater than the pitch Px1.

[0021] FIG. 3 is a diagram showing an example of the positional relationship between the processing space and the rotating arm at the standby position. FIG. 4 is a diagram showing an example of the positional relationship between the processing space and the rotating arm at the wafer holding position. As shown in FIG. 3 and FIG. 4, the rotating arm 3 has four end effectors 32 capable of holding the wafers W to be placed on the mounting tables 22, and a base member 33 having a rotation axis located at the center of a 2-row, 2-column layout. The four end effectors 32 are connected to the base member 33 so as to form an X shape. The X shape of the rotating arm 3 is configured such that, at the wafer W holding position shown in FIG. 4, the dimension in the Y direction corresponding to the row spacing of the X shape is different from the dimension in the X direction corresponding to the column spacing.

[0022] 3, the rotating arm 3 is positioned between the processing spaces S1 to S4, and does not impede the vertical movement of each mounting stage 22. In FIG. 3, a wafer W is placed on each mounting stage 22. The movement of the rotating arm 3 will be described when, for example, the wafers W in the first and second rows are transferred from this state so as to be interchanged, that is, when the wafers W in the processing spaces S1, S2 are transferred to the processing spaces S3, S4, and the wafers W in the processing spaces S3, S4 are transferred to the processing spaces S1, S2.

[0023] First, each mounting table 22 is moved to a transfer position in the lower transfer space T, and the lift pins 26 (described later) provided on each mounting table 22 are raised to lift the wafer W. Next, the rotating arm 3 is rotated clockwise by about 30°, and each end effector 32 is inserted between the mounting table 22 and the wafer W as shown in FIG. 4. Then, the lift pins 26 are lowered to place the wafer W on each end effector 32. Next, the rotating arm 3 is rotated clockwise by 180°, and the wafer W is transported to a holding position on each mounting table 22. When each mounting table 22 raises the lift pins 26 to receive the wafer W, the rotating arm 3 is rotated counterclockwise by about 30° to move to a standby position. In this manner, the first and second rows of wafers W can be transported in a swapped manner by the rotating arm 3. This allows the time required for transporting the wafer W to be reduced when, for example, different processes are repeated in the processing spaces S1, S2 and the processing spaces S3, S4 (for example, when a film formation process and an annealing process are repeated).

[0024] Fig. 5 is a diagram showing an example of a movement path of a wafer in the substrate processing apparatus in this embodiment. Fig. 5 illustrates a movement path when a wafer W is transferred from the vacuum transfer chamber 14a to the inside of the substrate processing apparatus 2. First, as shown by a path F1, the substrate transfer mechanism 15a in the vacuum transfer chamber 14a simultaneously loads two wafers W onto each of the mounting tables 22 at a transfer position in the transfer space T at the bottom of the processing spaces S1, S2 corresponding to the mounting tables 22 in the same row. Each of the mounting tables 22 in the processing spaces S1, S2 raises the lift pins 26 to receive the wafers W.

[0025] Next, the rotating arm 3 is rotated clockwise by about 30° from the standby position, the end effector 32 is inserted between the wafer W and the mounting table 22 at the transfer position at the bottom of the processing spaces S1 and S2, and the lift pins 26 are lowered to place the wafer W on each end effector 32. After the wafer W is placed, the rotating arm 3 is rotated clockwise by 180° as shown by the path F2, and the wafer W is transferred onto the mounting table 22 (the holding position of the rotating arm 3) at the transfer position of the transfer space T at the bottom of the processing spaces S3 and S4. When the mounting table 22 at the transfer position at the bottom of the processing spaces S3 and S4 raises the lift pins 26 to receive the wafer W, the rotating arm 3 is rotated counterclockwise by about 30° and moved to the standby position. In this state, the wafer W is not placed on the mounting table 22 in the processing spaces S1 and S2, and the wafer W is placed on the mounting table 22 in the processing spaces S3 and S4. Next, two wafers W are simultaneously loaded onto each mounting table 22 at the transfer position at the bottom of the processing spaces S1, S2 by the substrate transfer mechanism 15a in the vacuum transfer chamber 14a, as shown by path F1, and the wafers W are placed on the mounting tables 22 in the processing spaces S1, S2, so that the wafers W are placed on all of the mounting tables 22 in the processing spaces S1 to S4.

[0026] Similarly, when unloading, first, the wafer W placed on the mounting table 22 at the transfer position at the bottom of the processing spaces S1 and S2 is unloaded to the vacuum transfer chamber 14a by the substrate transfer mechanism 15a. Next, the wafer W placed on the mounting table 22 at the transfer position at the bottom of the processing spaces S3 and S4 is transferred to the mounting table 22 at the transfer position at the bottom of the processing spaces S1 and S2 by the rotating arm 3. Then, the wafer W placed on the mounting table 22 at the transfer position at the bottom of the processing spaces S1 and S2 is unloaded to the vacuum transfer chamber 14a by the substrate transfer mechanism 15a. In this way, the wafer W can be loaded and unloaded to the processing spaces S1 to S4 by using the substrate transfer mechanism 15a capable of loading and unloading two wafers W at a time and the rotating arm 3.

[0027] Also, when the wafer W is transported by the rotating arm 3, the misalignment of the wafer W with respect to the mounting table 22 at the transport destination may be detected and the mounting table 22 may be slightly moved in the XY plane to correct the misalignment of the wafer W. In this case, the substrate processing apparatus 2 has misalignment detection sensors that detect the misalignment of the wafer W at rotationally symmetric positions within the row intervals or column intervals on the rotation trajectory of the wafer W held by the rotating arm 3. In the example of Fig. 5, sensors 31a and 31b are provided between the processing spaces S1 and S2 and between the processing spaces S3 and S4, which are within the row intervals, respectively.

[0028] The sensors 31a and 31b are, for example, a pair of two optical sensors, and are arranged on a straight line in the X direction passing through the center of the substrate processing apparatus 2, that is, the center position of the 2-row, 2-column layout. This is to reduce errors by making the expansion direction due to thermal expansion of the processing vessel 20 the same direction for the two sensors. Note that the arrangement positions of the sensors 31a and 31b are not limited to the X direction as long as they are on a straight line passing through the center of the substrate processing apparatus 2. The substrate processing apparatus 2 detects the amount of misalignment of the wafer W by comparing the front and rear edges of the wafer W detected by the sensors 31a and 31b with the output result of an encoder (not shown) provided on the rotating arm 3.

[0029] 5, position P24 indicates a state where the rear edge of the wafer W passes the sensor 31b when transferred from the processing space S2 to S4, and position P42 indicates a state where the rear edge of the wafer W passes the sensor 31a when transferred from the processing space S4 to S2. The substrate processing apparatus 2 can correct the misalignment of the wafer W by minutely moving the mounting table 22 in the XY plane according to the detected amount of misalignment. That is, the substrate processing apparatus 2 adjusts the misalignment so that the wafer W is located at the center of the processing spaces S1 to S4 when the mounting table 22 is raised. Note that the term "minor" used here means within about 5 mm.

[0030] FIG. 6 is a diagram showing an example of an exhaust path of the substrate processing apparatus in this embodiment. FIG. 6 shows the processing vessel 20 viewed from above with a gas supply unit 4 described later removed. As shown in FIG. 6, a manifold 36 is disposed at the center of the substrate processing apparatus 2. The manifold 36 has a plurality of exhaust paths 361 connected to the processing spaces S1 to S4. Each exhaust path 361 is connected to a hole 351 of a thrust nut 35 described later at a lower center of the manifold 36. Each exhaust path 361 is connected to an annular flow path 363 in each guide member 362 provided at the upper part of the processing spaces S1 to S4. That is, gas in the processing spaces S1 to S4 is exhausted to a joint exhaust port 205 described later through the flow path 363, the exhaust path 361, and the hole 351.

[0031] Fig. 7 is a schematic cross-sectional view showing an example of the configuration of the substrate processing apparatus in this embodiment. The cross section of Fig. 7 corresponds to the cross section of the substrate processing apparatus 2 taken along line AA shown in Fig. 6. The four processing spaces S1 to S4 have the same configuration, and are each formed between a mounting table 22 on which a wafer W is mounted and a gas supply unit 4 arranged opposite to the mounting table 22. In other words, the mounting table 22 and the gas supply unit 4 are provided in the processing vessel 20 for each of the four processing spaces S1 to S4. Fig. 7 shows processing spaces S1 and S3. The processing space S1 will be described below as an example.

[0032] The mounting table 22 also serves as the lower electrode, and is formed in a flat cylindrical shape made of, for example, metal or aluminum nitride (AlN) with a metal mesh electrode embedded therein. The mounting table 22 is supported from below by a support member 23. The support member 23 is formed in a cylindrical shape, extends vertically downward, and penetrates a bottom 27 of the processing vessel 20. A lower end of the support member 23 is located outside the processing vessel 20 and is connected to a rotation drive mechanism 600. The support member 23 is rotated by the rotation drive mechanism 600. The mounting table 22 is configured to be rotatable in response to the rotation of the support member 23. In addition, an adjustment mechanism 700 is provided at the lower end of the support member 23 for adjusting the position and inclination of the mounting table 22. The mounting table 22 is configured to be able to rise and fall between the processing position and the transfer position via the support member 23 by the adjustment mechanism 700. In FIG. 7, the mounting table 22 at the transfer position is depicted by a solid line, and the mounting table 22 at the processing position is depicted by a dashed line. The transfer position shows a state in which the end effector 32 is inserted between the mounting table 22 and the wafer W to receive the wafer W from the lift pins 26. The processing position is a position at which a substrate process (e.g., a film formation process) is performed, and the transfer position is a position at which the wafer W is transferred between the substrate transport mechanism 15a or the end effector 32.

[0033] A heater 24 is embedded in the mounting table 22. The heater 24 heats each wafer W mounted on the mounting table 22 to, for example, about 60° C. to 600° C. In addition, the mounting table 22 is connected to a ground potential.

[0034] Further, the mounting table 22 is provided with a plurality of (for example, three) pin through holes 26a, and the lift pins 26 are disposed inside the pin through holes 26a. The pin through holes 26a are provided so as to penetrate from the mounting surface (upper surface) of the mounting table 22 to the back surface (lower surface) opposite to the mounting surface. The lift pins 26 are slidably inserted into the pin through holes 26a. The upper ends of the lift pins 26 are suspended from the mounting surface side of the pin through holes 26a. That is, the upper ends of the lift pins 26 have a larger diameter than the pin through holes 26a, and the upper ends of the pin through holes 26a have a recessed portion formed therein that is larger in diameter and thickness than the upper end of the lift pin 26 and can accommodate the upper end of the lift pin 26. As a result, the upper ends of the lift pins 26 are engaged with the mounting table 22 and suspended from the mounting surface side of the pin through holes 26a. The lower ends of the lift pins 26 protrude from the rear surface of the mounting table 22 toward the bottom 27 of the processing vessel 20 .

[0035] When the mounting table 22 is raised to the processing position, the upper ends of the lift pins 26 are housed in the recesses of the pin through holes 26a on the mounting surface side. When the mounting table 22 is lowered from this state to the transfer position, the lower ends of the lift pins 26 come into contact with the bottom 27 of the processing vessel 20, and the lift pins 26 move within the pin through holes 26a until the upper ends of the lift pins 26 protrude from the mounting surface of the mounting table 22, as shown in Fig. 7. In this case, the lower ends of the lift pins 26 may come into contact with something like a lift pin contact member located on the bottom side, instead of the bottom 27 of the processing vessel 20.

[0036] The gas supply unit 4 is provided above the mounting table 22 on the ceiling of the processing vessel 20 via a guide member 362 made of an insulating member. The gas supply unit 4 functions as an upper electrode. The gas supply unit 4 includes a lid 42, a shower plate 43 that forms an opposing surface provided to face the mounting surface of the mounting table 22, and a gas flow chamber 44 formed between the lid 42 and the shower plate 43. A gas supply pipe 51 is connected to the lid 42, and the shower plate 43 has gas discharge holes 45 that penetrate the shower plate 43 in the thickness direction and are arranged, for example, vertically and horizontally, so that gas is discharged toward the mounting table 22 in a shower-like manner.

[0037] Each gas supply unit 4 is connected to a gas supply system 50 via a gas supply pipe 51. The gas supply system 50 includes supply sources of, for example, a reactive gas (film forming gas) which is a processing gas, a purge gas, and a cleaning gas, as well as piping, a valve V, and a flow rate adjustment unit M. The gas supply system 50 includes, for example, a cleaning gas supply source 53, a reactive gas supply source 54, a purge gas supply source 55, valves V1 to V3 provided in the piping of each supply source, and flow rate adjustment units M1 to M3.

[0038] The cleaning gas supply source 53 is connected to a cleaning gas supply path 532 via a flow rate regulator M1, a valve V1, and a remote plasma unit (RPU) 531. The cleaning gas supply path 532 branches into four systems downstream of the RPU 531, and each system is connected to the gas supply pipe 51. Valves V11 to V14 are provided for each branch pipe downstream of the RPU 531, and the corresponding valves V11 to V14 are opened during cleaning. For convenience, only the valves V11 and V14 are shown in FIG. 7.

[0039] The reactive gas supply source 54 and the purge gas supply source 55 are connected to a gas supply line 52 via flow rate adjusters M2 and M3 and valves V2 and V3, respectively. The gas supply line 52 is connected to a gas supply line 51 via a gas supply line 510. In addition, in FIG. 7, the gas supply line 52 and the gas supply line 510 are collectively shown as the respective supply lines and respective supply lines corresponding to the respective gas supply units 4.

[0040] A high-frequency power supply 41 is connected to the shower plate 43 via a matching box 40. The shower plate 43 functions as an upper electrode facing the mounting table 22. When high-frequency power is applied between the shower plate 43 as the upper electrode and the mounting table 22 as the lower electrode, the gas (reactive gas in this example) supplied from the shower plate 43 to the processing space S1 can be turned into plasma by capacitive coupling.

[0041] Next, the exhaust path from the processing spaces S1 to S4 to the joint exhaust port 205 will be described. As shown in Fig. 6 and Fig. 7, the exhaust path runs from annular flow paths 363 in each guide member 362 provided at the upper part of the processing spaces S1 to S4 through each exhaust path 361, via a joint part at the center lower part of the manifold 36 and hole 351, to the joint exhaust port 205. Note that the cross section of the exhaust path 361 is formed to be, for example, circular.

[0042] Around each of the processing spaces S1 to S4, an exhaust guide member 362 is provided so as to surround each of the processing spaces S1 to S4. The guide member 362 is, for example, an annular body provided so as to surround the area around the mounting table 22 at the processing position with a gap therebetween. The guide member 362 is configured to form an internal flow path 363 having, for example, a rectangular vertical cross section and an annular shape in plan view. In FIG. 6, the processing spaces S1 to S4, the guide member 362, the exhaust path 361, and the manifold 36 are shown in schematic form.

[0043] The guide member 362 forms a slit-shaped slit exhaust port 364 that opens toward the processing spaces S1 to S4. In this way, the slit exhaust port 364 is formed along the circumferential direction on the side periphery of each of the processing spaces S1 to S4. An exhaust path 361 is connected to the flow path 363, and the processing gas exhausted from the slit exhaust port 364 is caused to flow toward the junction at the center lower part of the manifold 36 and the hole 351.

[0044] 6, the sets of processing spaces S1-S2, S3-S4 are arranged with 180° rotational symmetry around the manifold 36 when viewed from the top. As a result, the flow paths of the processing gas from each of the processing spaces S1 to S4 through the slit exhaust port 364, the flow path 363 of the guide member 362, and the exhaust path 361 to the hole 351 are formed with 180° rotational symmetry around the hole 351.

[0045] The hole 351 is connected to an exhaust pipe 61 via a joint exhaust port 205 inside a thrust pipe 341 of a two-axis vacuum seal 34 arranged in the center of the processing vessel 20. The exhaust pipe 61 is connected to a vacuum pump 62 constituting a vacuum exhaust mechanism via a valve mechanism 7. One vacuum pump 62 is provided for each processing vessel 20, for example, and exhaust pipes downstream of the vacuum pumps 62 are joined together and connected to, for example, a factory exhaust system.

[0046] The valve mechanism 7 opens and closes a flow path for the process gas formed in the exhaust pipe 61, and has, for example, a casing 71 and an opening / closing unit 72. A first opening 73 connected to the upstream exhaust pipe 61 is formed on the top surface of the casing 71, and a second opening 74 connected to the downstream exhaust pipe is formed on the side surface of the casing 71.

[0047] The opening / closing unit 72 includes an opening / closing valve 721 formed to a size for closing the first opening 73, and a lifting mechanism 722 provided outside the casing 71 for lifting the opening / closing valve 721 in the casing 71. The opening / closing valve 721 is configured to be freely raised and lowered between a closed position for closing the first opening 73 shown by a dashed line in FIG. 7 and an open position for retreating below the first and second openings 73 and 74 shown by a solid line in FIG. 7. When the opening / closing valve 721 is in the closed position, the downstream end of the joint exhaust port 205 is closed, and exhausting of the inside of the processing vessel 20 is stopped. When the opening / closing valve 721 is in the open position, the downstream end of the joint exhaust port 205 is opened, and exhausting of the inside of the processing vessel 20 is performed.

[0048] Next, a description will be given of the biaxial vacuum seal 34 and the thrust nut 35. The biaxial vacuum seal 34 has a thrust pipe 341, bearings 342 and 344, a rotor 343, a main body 345, magnetic fluid seals 346 and 347, and a direct drive motor 348.

[0049] The thrust pipe 341 is a non-rotating central shaft, and receives a thrust load applied to the central upper part of the substrate processing apparatus 2 via the thrust nut 35. That is, when the processing spaces S1 to S4 are made into a vacuum atmosphere, the thrust pipe 341 receives a vacuum load applied to the central part of the substrate processing apparatus 2, thereby suppressing deformation of the upper part of the substrate processing apparatus 2. The thrust pipe 341 has a hollow structure, and its inside is the joint exhaust port 205. The upper surface of the thrust pipe 341 abuts against the lower surface of the thrust nut 35. The gap between the inner surface of the upper part of the thrust pipe 341 and the outer surface of the convex part on the inner periphery side of the thrust nut 35 is sealed by an O-ring (not shown).

[0050] The outer peripheral side of thrust nut 35 has a threaded structure, and thrust nut 35 is screwed into a partition wall at the center of processing vessel 20. Manifold 36 is provided on the upper part of the center of processing vessel 20. The thrust load is received by manifold 36, the partition wall at the center of processing vessel 20, thrust nut 35, and thrust piping 341.

[0051] The bearing 342 is a radial bearing that holds the rotor 343 on the thrust pipe 341 side. The bearing 344 is a radial bearing that holds the rotor 343 on the main body 345 side. The rotor 343 is disposed concentrically with the thrust pipe 341 and is a rotation shaft at the center of the rotating arm 3. In addition, the base member 33 is connected to the rotor 343. When the rotor 343 rotates, the rotating arm 3, that is, the end effector 32 and the base member 33 rotate.

[0052] The main body 345 houses therein the bearings 342, 344, the rotor 343, magnetic fluid seals 346, 347, and a direct drive motor 348. The magnetic fluid seals 346, 347 are disposed on the inner and outer circumferential sides of the rotor 343, and seal the processing spaces S1 to S4 from the outside. The direct drive motor 348 is connected to the rotor 343, and drives the rotor 343 to rotate the rotating arm 3.

[0053] In this way, the two-axis vacuum seal 34 has a thrust pipe 341, which is the non-rotating central axis of the first axis, supporting the load on the upper part of the processing vessel 20 while also serving as a gas exhaust pipe, and a rotor 343, which is the second axis, serving to rotate the rotating arm 3.

[0054] As described above, according to this embodiment, the process module (substrate processing apparatus 2) has four mounting tables 22 arranged in two rows and two columns inside the process module, and the row spacing and column spacing constituting the layout have different dimensions. As a result, the footprint of the process module can be reduced and the wafer transfer mechanism can be shared.

[0055] Moreover, according to this embodiment, the process module further includes four end effectors 32 capable of holding wafers W to be placed on the four mounting tables 22, a base member 33 with a rotation axis located at the center of the layout, the four end effectors 32 are connected to the base member 33 so as to form an X shape, and the rotating arm 3 has a dimension in the Y direction corresponding to the row spacing of the X shape different from a dimension in the X direction corresponding to the column spacing. As a result, the footprint of the process module can be reduced and the wafer transport mechanism can be shared.

[0056] Moreover, according to this embodiment, the process module further includes misalignment detection sensors (sensors 31a, 31b) for detecting misalignment of the wafer W at rotationally symmetric positions within the row intervals or column intervals on the rotation trajectory of the wafer W held by the rotating arm 3. As a result, the misalignment of the wafer W during transportation by the rotating arm 3 can be corrected.

[0057] Furthermore, according to this embodiment, each of the four mounting tables 22 can be slightly moved at least within the XY plane in response to the position of the wafer W detected by the misalignment detection sensor. As a result, misalignment of the wafer W caused by transportation by the rotating arm 3 or the like can be corrected.

[0058] Furthermore, according to this embodiment, two wafers W placed on the mounting tables 22 in the same row can be simultaneously loaded or unloaded. As a result, a two-wafer substrate processing apparatus and a wafer transfer mechanism can be standardized.

[0059] According to the present embodiment, the substrate processing system is a substrate processing system 1 in which a plurality of process modules (substrate processing apparatuses 2, 2a) are connected to vacuum transfer chambers 14a, 14b having wafer transfer mechanisms (substrate transfer mechanisms 15a, 15b), and each of the plurality of process modules has four mounting stages arranged in two rows and two columns. The Y-direction pitch between the mounting stages of each of the plurality of process modules, which is a direction along the surface on the vacuum transfer chambers 14a, 14b side, is the same for one process module and the other process modules, among the plurality of process modules, and the X-direction pitch between the mounting stages of each of the plurality of process modules, which is a direction perpendicular to the surface on the vacuum transfer chambers 14a, 14b side, is different for one process module and the other process modules. As a result, process modules with different footprints can be mixed, and the wafer transfer mechanism can be shared.

[0060] According to the present embodiment, in the processing method in the process module (substrate processing apparatus 2), the process module includes four mounting tables 22 arranged in two rows and two columns, the four end effectors 32 capable of holding the wafers W mounted on the four mounting tables 22, and a base member 33 having a rotation axis located at the center of the layout, the four end effectors 32 are connected to the base member 33 so as to be in an X-shape, and a rotating arm 3 having a different dimension in the Y direction corresponding to the row spacing of the X-shape and a different dimension in the X direction corresponding to the column spacing, and the processing method includes transporting the wafers W in the first and second columns of the layout in an interchangeable manner by the rotating arm 3, thereby repeating different processing for the first and second columns. As a result, the time required for transporting the wafers W between each processing can be shortened.

[0061] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects, and may be omitted, substituted, or modified in various ways without departing from the spirit and scope of the appended claims.

[0062] For example, in the above embodiment, the substrate processing apparatus 2 is an apparatus that performs plasma CVD processing as the substrate processing, but the disclosed technology may be applied to any apparatus that performs other substrate processing such as plasma etching.

[0063] In the above embodiment, the direct drive motor 348 is used as a method for driving the rotor 343 in the biaxial vacuum seal 34, but the invention is not limited to this. For example, the rotor 343 may be provided with a pulley and driven by a timing belt from a motor provided outside the biaxial vacuum seal 34. [Explanation of symbols]

[0064] 1. Substrate Processing System 2, 2a, 2b Substrate processing equipment 3 Rotating Arm 4 Gas supply section 7 Valve mechanism 8. Control Unit 11 Loading / unloading port 12 Loading / unloading module 13a, 13b Vacuum transfer module 14a, 14b Vacuum transfer chamber 15a, 15b Substrate transport mechanism 16 Pass 20 Processing vessel 21 Loading / unloading entrance 22 Placement table 26 Lift pin 31a, 31b Sensor 32 End effector 33 Base material 34 2-axis vacuum seal 35 Thrust nut 36 Manifold 50 Gas supply system 205 Combined exhaust port 341 Thrust piping 351 hole 361 Exhaust duct 362 Guide member S1~S4 Processing space T Transport space W wafer

Claims

1. Four mounting tables are laid out in two rows and two columns inside the process module, the row spacing and the column spacing constituting the layout having different dimensions; a rotating arm including four end effectors capable of holding wafers to be placed on the four placement tables, a base member having a rotation axis located at a center position of the layout, the four end effectors being connected to the base member so as to be in an X-shape, and a Y-direction dimension corresponding to the row spacing of the X-shape being different from a X-direction dimension corresponding to the column spacing; Process module.

2. a displacement detection sensor for detecting a displacement of the wafer at each of rotationally symmetric positions within the row interval or the column interval on a rotation locus of the wafer held by the rotating arm; The process module of claim 1 .

3. each of the four mounting tables is capable of slight movement at least within an XY plane in response to the position of the wafer detected by the displacement detection sensor; The process module of claim 2 .

4. The wafers placed on the mounting tables in the same row can be simultaneously carried in or out, two of them. The process module according to any one of claims 1 to 3.

5. A substrate processing system including a plurality of process modules connected to a vacuum transfer chamber having a wafer transfer mechanism, Each of the plurality of process modules has four mounting tables arranged in two rows and two columns therein, a Y-direction pitch between the mounting stages of the layout, which is a direction along a surface facing the vacuum transfer chamber, is the same between one process module and another process module among the plurality of process modules, and an X-direction pitch between the mounting stages of the layout, which is a direction perpendicular to the surface facing the vacuum transfer chamber, is different between the one process module and another process module. Substrate processing system.

6. A processing method in a process module, comprising: The process module includes: Four mounting tables are laid out in an internal layout of two rows and two columns, the row spacing and column spacing of which are different from each other; a rotating arm including four end effectors capable of holding wafers to be placed on the four placement tables, and a base member having a rotation axis located at a center position of the layout, the four end effectors being connected to the base member so as to be in an X-shape, the Y-direction dimension corresponding to the row spacing of the X-shape being different from the X-direction dimension corresponding to the column spacing; the rotating arm transports the wafers in the first and second rows of the layout in a swapped manner, thereby repeating different processes for the first and second rows; Processing methods.

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