Grinding apparatus and wafer grinding method

Abstract

To make grinding marks of three or more grinding mechanisms provided in a grinder cross one another.SOLUTION: A second grinding mechanism is arranged on a chuck table 50 such that a second grinding mark 452 of a wafer 5 generated by grinding with a second grinding wheel intersects a first grinding mark 451 of the wafer 5 in a second grinding step, Further, a third grinding mechanism is arranged on the chuck table 50 such that a third grinding mark 453 of the wafer 5 generated by grinding with a third grinding wheel intersects the second grinding mark 452 of the wafer 5 in a third grinding step. Thereby, the wafer 5 is ground such that the first grinding mark 451 is scraped off in the second grinding step, and the wafer 5 is ground such that the second grinding mark 452 is scraped off in the third grinding step. Accordingly, the wafer 5 of high quality having high flexural strength can be obtained.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a grinding device. and wafer grinding method Regarding. [Background technology]

[0002] A grinding device that uses a grinding wheel to grind a wafer held on the holding surface of a chuck table is disclosed in, for example, Patent Document 1. The grinding device in this document includes a first grinding mechanism and a second grinding mechanism. In this device, grinding marks generated by grinding with a first grinding wheel attached to the first grinding mechanism and grinding marks generated by grinding with a second grinding wheel attached to the second grinding mechanism are made to intersect with each other. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2000-288881 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the grinding apparatus of Patent Document 1, it is difficult to make grinding marks formed on the wafer by a grinding mechanism that first grinds the wafer and grinding marks formed on the wafer by a grinding mechanism that later grinds the wafer intersect with each other.

[0005] Therefore, an object of the present invention is to make the grinding marks of three or more grinding mechanisms provided in a grinding device intersect with each other. [Means for solving the problem]

[0006] The grinding device of the present invention (the present grinding device) comprises a turntable rotatably arranged around a center axis, at least four chuck tables arranged on the turntable and holding a wafer by a holding surface, at least three grinding mechanisms arranged to grind the wafer by contacting the lower surface of an annular grinding wheel with a radial area of ​​the wafer held on the holding surface, and a grinding feed mechanism for grinding and feeding the grinding mechanism in a grinding feed direction perpendicular to the holding surface, and the grinding device is a grinding device that positions one of the chuck tables at each of the grinding wheels by rotating the turntable and in-feed grinds the wafer held on the holding surface, and the at least three grinding mechanisms are arranged to grind the wafer by contacting the lower surface of an annular first grinding wheel with the lower surface of a first grinding wheel. contacting the first grinding area of ​​the wafer with The first grinding mechanism grinds the wafer by grinding the wafer with the lower surface of the second annular grinding wheel. contacting the second grinding area of ​​the wafer with The second grinding mechanism grinds the wafer by grinding the bottom surface of the third annular grinding wheel. contacting the third grinding area of ​​the wafer with and a third grinding mechanism for grinding the wafer by the third grinding mechanism, when the chuck table is positioned relative to each of the first grinding wheel of the first grinding mechanism, the second grinding wheel of the second grinding mechanism, and the third grinding wheel of the third grinding mechanism by rotation of the turntable, a rotation center of the turntable, a rotation center of the chuck table, and a rotation center of each of the first grinding wheel, the second grinding wheel, and the third grinding wheel are arranged on the same straight line, and when the chuck table holding a wafer is positioned relative to the second grinding wheel of the second grinding mechanism, the first grinding area and the second grinding area of ​​the wafer are line-symmetrical with respect to a straight line connecting the rotation center of the turntable, the rotation center of the chuck table, and the rotation center of the second grinding wheel, A first grinding mark on the wafer generated by grinding with the first grinding wheel intersects with a second grinding mark on the wafer generated by grinding with the second grinding wheel. death, moreover, When the chuck table holding the wafer is positioned on the third grinding wheel of the third grinding mechanism, the second grinding area and the third grinding area of ​​the wafer are symmetrical with respect to a straight line connecting the rotation center of the turntable, the rotation center of the chuck table, and the rotation center of the third grinding wheel. A second grinding mark on the wafer caused by grinding with the second grinding wheel intersects with a third grinding mark on the wafer caused by grinding with the third grinding wheel. The wafer grinding method of the present invention is a wafer grinding method for grinding a wafer by the grinding apparatus, and includes a first grinding step of grinding the wafer by contacting a lower surface of the first grinding wheel with the first grinding area of ​​the wafer held on the chuck table, a second grinding step of grinding the wafer by contacting a lower surface of the second grinding wheel with the second grinding area of ​​the wafer after the first grinding step, thereby intersecting the first grinding mark generated on the wafer in the first grinding step with the second grinding mark generated by grinding with the second grinding wheel, and a third grinding step of grinding the wafer by contacting a lower surface of the third grinding wheel with the third grinding area of ​​the wafer after the second grinding step, thereby intersecting the third grinding mark generated by grinding with the third grinding wheel with the second grinding mark generated on the wafer in the second grinding step. Effect of the Invention

[0007] In this grinding device, the first grinding mechanism, the second grinding mechanism, and the third grinding mechanism are arranged relative to the chuck table so that the second grinding mark on the wafer intersects with the first grinding mark on the wafer, and the third grinding mark on the wafer intersects with the second grinding mark on the wafer. As a result, the wafer is ground by the second grinding wheel so that the first grinding mark is ground off. Furthermore, the wafer is ground by the third grinding wheel so that the second grinding mark is ground off. Therefore, it is possible to obtain a high-quality wafer having small thickness variation and high flexural strength.

[0008] In addition, an appropriate impact force acts on the second grinding wheel and the third grinding wheel during grinding, which generates a self-sharpening effect and maintains the grinding force. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is an explanatory diagram showing a configuration of a grinding device. [Diagram 2] FIG. 2 is a perspective view showing the configuration of a turntable, a chuck table, a grinding mechanism, and a grinding feed mechanism. [Diagram 3] FIG. 2 is an explanatory diagram showing a grinding area formed by a grinding wheel. [Figure 4] FIG. 1 is a perspective view showing a configuration of a grinding device in which five chuck tables are arranged on a turntable and four grinding mechanisms are provided. [Diagram 5] FIG. 1 is a perspective view showing a configuration of a grinding device in which five chuck tables are arranged on a turntable and four grinding mechanisms are provided. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] 1 has a first equipment base 201 and a second equipment base 202 arranged on the -Y direction side of the first equipment base 201. The wafer 5 is loaded and unloaded on the first equipment base 201. The wafer 5 is processed on the second equipment base 202.

[0011] That is, the grinding apparatus 1 includes a control unit 7, and a first grinding mechanism 10, a second grinding mechanism 20, and a third grinding mechanism 30 on a second apparatus base 202. Under the control of the control unit 7, the wafer 5 held on the chuck table 50 is ground by the first grinding mechanism 10, the second grinding mechanism 20, and the third grinding mechanism 30.

[0012] In the grinding apparatus 1, a first cassette 150 and a second cassette 151 are arranged on the front side (+Y direction side) of a first apparatus base 201. Unprocessed or processed wafers 5 are accommodated in these cassettes 150 and 151. In the following, it is assumed that unprocessed wafers 5 are accommodated in the first cassette 150, while processed wafers 5 are accommodated in the second cassette 151.

[0013] The openings (not shown) of cassettes 150 and 151 face the -Y direction side. A robot 153 is disposed on the -Y direction side of these openings. The robot 153 carries the processed wafer 5 into the second cassette 151. The robot 153 also takes out the unprocessed wafer 5 from the first cassette 150 and places it on a temporary placement table 156, which is a table for temporarily placing the wafer 5.

[0014] A carry-in mechanism 154 is installed on the −X direction side of the second apparatus base 202. The carry-in mechanism 154 includes a carry-in pad 155 for holding the wafer 5. The carry-in mechanism 154 holds the wafer 5 placed on the temporary placement table 156 by using the carry-in pad 155, and transports the wafer 5 to the chuck table 50.

[0015] The chuck table 50 has a holding surface 52 for holding the wafer 5. The holding surface 52 is a conical surface with an apex at the center, and is connected to a suction source (not shown) so that the wafer 5 can be held by suction. The chuck table 50 holds the wafer 5 transferred by the carry-in mechanism 154 on the holding surface 52. The chuck table 50 can rotate the holding surface 52 holding the wafer 5 by rotating about a rotation axis that passes through the center of the holding surface 52 and extends in the Z-axis direction.

[0016] In this embodiment, four chuck tables 50 are arranged at equal intervals in the circumferential direction on the upper surface of the turntable 60 arranged on the second device base 202. The turntable 60 is arranged on the second device base 202 so as to be rotatable about its center. That is, the turntable 60 can rotate about its axis extending in the Z-axis direction located at its center by the driving force of a turntable motor (not shown). The turntable 60 rotates about its axis, causing the four chuck tables 50 to revolve. As a result, the chuck tables 50 can be positioned in the carry-in / out area 400 near the carry-in mechanism 154 and the carry-out mechanism 157, the first grinding area 401 below the first grinding mechanism 10, the second grinding area 402 below the second grinding mechanism 20, and the third grinding area 403 below the third grinding mechanism 30, in that order.

[0017] The load-in / out area 400 is an area (position) of the chuck table 50 where the load mechanism 154 can load the wafer 5 and the unload mechanism 157 can unload the wafer 5. The load mechanism 154 transports the wafer 5 to the chuck table 50 in the load-in / out area 400. The first to third grinding areas are areas in which the chuck table 50 is positioned so that the wafer 5 can be ground by the first grinding mechanism 10, the second grinding mechanism 20 and the third grinding mechanism 30, respectively.

[0018] The first grinding area 401 is provided on the +Y direction side of the second device base 202. In the first grinding area 401, a first grinding mechanism 10 and a first grinding feed mechanism 70 that feeds the first grinding mechanism 10 in a grinding feed direction are installed. The grinding feed direction is a direction perpendicular to the holding surface 52 of the chuck table 50.

[0019] The first grinding mechanism 10 grinds the wafer 5 with the lower surface of the annular first grinding wheel 11. That is, the first grinding mechanism 10 grinds the wafer 5 by bringing the lower surface of the first grinding wheel 11 into contact with a radial area of ​​the wafer 5 held on a conical holding surface 52. Further, in the vicinity of the first grinding mechanism 10, a thickness sensor 240 is provided for measuring the thickness of the wafer 5 being ground.

[0020] Further, a second grinding area 402 and a third grinding area 403 are provided on the -Y direction side of the second device base 202. The second grinding area 402 is provided with a second grinding mechanism 20 and a second grinding feed mechanism 80 that feeds the second grinding mechanism 20 in the grinding feed direction. Further, the third grinding area 403 is provided with a third grinding mechanism 30 and a third grinding feed mechanism 90 that feeds the third grinding mechanism 30 in the grinding feed direction.

[0021] The second grinding mechanism 20 grinds the wafer 5 with the lower surface of an annular second grinding wheel 21. The third grinding mechanism 30 grinds the wafer 5 with the lower surface of an annular third grinding wheel 31. That is, the second grinding mechanism 20 (third grinding mechanism 30) grinds the wafer 5 by contacting the lower surface of the second grinding wheel 21 (third grinding wheel 31) with the radial area of ​​the wafer 5 held on the holding surface 52.

[0022] Further, a thickness sensor 240 for measuring the thickness of the wafer 5 being ground is provided near each of the second grinding mechanism 20 and the third grinding mechanism 30. In addition, in this embodiment, the loading / unloading area 400 is provided with a two-fluid cleaning device for cleaning the holding surface 52 with two-fluid cleaning water, which is a mixture of water and air, and a holding surface grindstone cleaning device for cleaning the holding surface 52 with a grindstone (both not shown).

[0023] In this embodiment, by rotating the turntable 60, one chuck table 50 is positioned sequentially over the first grinding wheel 11, the second grinding wheel 21, and the third grinding wheel 31, and the wafer 5 held on its holding surface 52 is in-feed ground by these grinding wheels.

[0024] In this embodiment, for example, the first grinding wheel 11 is a grinding wheel for rough grinding containing relatively large abrasive grains, the second grinding wheel 21 is a grinding wheel containing medium-sized abrasive grains, and the third grinding wheel 31 is a grinding wheel for finish grinding containing relatively small abrasive grains.

[0025] The ground wafer 5 is unloaded from the chuck table 50 in the load / unload area 400 by the unloading mechanism 157 and transported to the spin cleaning unit 265 disposed adjacent to the turntable 60 .

[0026] In the spin cleaning unit 265, pure water is supplied to the wafer 5, and the wafer 5 is rotated about its center, thereby cleaning the wafer 5. Thereafter, the wafer 5 is dried by rotating the wafer 5 at a higher speed than during cleaning. Incidentally, before cleaning with pure water, a chemical solution may be supplied to clean the wafer 5, and then the chemical solution may be removed with pure water.

[0027] The wafer 5 that has been spin-cleaned by the spin cleaning unit 265 is carried into the second cassette 151 by the robot 153 .

[0028] Here, the configuration surrounding the turntable 60, the chuck table 50, the grinding mechanism, and the grinding feed mechanism will be described in more detail.

[0029] The turntable 60 is placed on a table base 300 via a support pad 310 (see FIG. 3). As shown in FIG. 1, the table base 300 is a base for the turntable 60, and is placed approximately in the center of the second device base 202 of the grinding device 1. A cylindrical support pillar 320 is fixed to the table base 300 so as to stand upright from the table base 300.

[0030] The turntable 60 has an annular plate shape with an opening in the center, and a support pillar 320 fixed to the table base 300 passes through this opening. With this configuration, the turntable 60 can rotate in the outer circumferential direction of the support pillar 320.

[0031] Specifically, the chuck table 50 is provided on a turntable 60. The turntable 60 is rotatably disposed in the center of a water case 61. The water case 61 has a rectangular bottom surface 65 and an outer wall 63 erected on a side of the bottom surface 65. The bottom surface 65 has an opening (not shown) in the center that allows the turntable 60 to rotate. The water case 61 has a disk-shaped cover 62 on the turntable 60 with an area that covers the opening. The water case 61 has an inner wall 64 on the upper surface of the cover 62 that divides the upper surface of the cover 62 into four. Four chuck tables 50 are disposed in each of the areas divided by the inner wall 64. A support pillar 320 that penetrates the turntable 60 and the cover 62 is disposed on the table base 300 in the center of the water case 61. In the drawings other than FIG. 1, in order to clearly show other configurations, the water case 61 is omitted, and the chuck table 50 is depicted as if it were disposed directly on the turntable 60.

[0032] Here, the configurations of the first grinding mechanism 10, the second grinding mechanism 20, the third grinding mechanism 30, the first grinding feed mechanism 70, the second grinding feed mechanism 80, and the third grinding feed mechanism 90 will be described.

[0033] As shown in Figure 2, which is an oblique view showing the configuration on the second device base 202, a first grinding mechanism 10 and a first grinding feed mechanism 70 that grinds and feeds the first grinding mechanism 10 are provided in front of the second device base 202 (on the +Y direction side).

[0034] Also, as shown in FIG. 2, at the rear of the second device base 202, there are provided a second grinding mechanism 20, a second grinding feed mechanism 80 which feeds the second grinding mechanism 20 for grinding, and a third grinding mechanism 30, and a third grinding feed mechanism 90 which feeds the third grinding mechanism 30 for grinding. In FIG. 2, in order to clearly show the configurations of the turntable 60, the chuck table 50, the grinding mechanisms 10, 20, and 30, and the grinding feed mechanisms 70, 80, and 90, other configurations are omitted.

[0035] The first grinding mechanism 10, the second grinding mechanism 20, and the third grinding mechanism 30 each include a spindle unit 41. The above-mentioned first grinding feed mechanism 70, second grinding feed mechanism 80, and third grinding feed mechanism 90 are configured to feed the first grinding mechanism 10, the second grinding mechanism 20, and the third grinding mechanism 30, each including the spindle unit 41, in the grinding feed direction.

[0036] Here, the first grinding mechanism 10, the second grinding mechanism 20, and the third grinding mechanism 30 have the same configuration except that they respectively include a first grinding wheel 11, a second grinding wheel 21, and a third grinding wheel 31. Therefore, in the following, the configuration of the first grinding mechanism 10 will be described in relation to the description of these configurations. The first grinding feed mechanism 70, the second grinding feed mechanism 80, and the third grinding feed mechanism 90 also have the same configuration. Therefore, in the following, in relation to the explanation of these configurations, the configuration of the first grinding feed mechanism 70 that feeds the first grinding mechanism 10 for grinding will be explained.

[0037] The first grinding feed mechanism 70 has a rectangular column 101. The column 101 is installed on the outer side of the turntable 60 on the second device base 202. The first grinding feed mechanism 70 is provided with a pair of guide rails 104 extending in the Z-axis direction, which is the grinding feed direction, on one surface of the column 101, a lifting table 116 that slides on the guide rails 104, a ball screw 115 parallel to the guide rails 104, a Z-axis motor 114 that rotates the ball screw 115, and a holder 110 attached to the front surface (surface) of the lifting table 116. The holder 110 holds the first grinding mechanism 10.

[0038] The guide rail 104 guides the movement of the first grinding mechanism 10 in the grinding feed direction. The lift table 116 is slidably installed on the guide rail 104. A nut portion (not shown) is fixed to the rear surface side (back surface side) of the lift table 116. A ball screw 115 is screwed into this nut portion. The Z-axis motor 114 is connected to one end of the ball screw 115.

[0039] In the first grinding feed mechanism 70, the Z-axis motor 114 rotates the ball screw 115, causing the lifting table 116 to move in the Z-axis direction along the guide rail 104. As a result, the holder 110 attached to the lifting table 116 and the first grinding mechanism 10 held by the holder 110 also move in the Z-axis direction together with the lifting table 116. In this way, the first grinding feed mechanism 70 feeds the first grinding mechanism 10 for grinding along the Z-axis direction. The ball screw 115 functions as an advance / retract axis that moves the first grinding mechanism 10 in the grinding feed direction.

[0040] The first grinding mechanism 10 includes a spindle housing 40 fixed to a holder 110, a spindle 42 rotatably held in the spindle housing 40, a spindle motor 44 that rotates the spindle 42, a wheel mount 45 attached to the lower end of the spindle 42, and a grinding wheel 43 detachably connected to the underside of the wheel mount 45. The spindle housing 40 , the spindle 42 and the spindle motor 44 constitute a spindle unit 41 of the first grinding mechanism 10 .

[0041] The spindle housing 40 is held by the holder 110 so as to extend in the Z-axis direction. The spindle 42 extends in the Z-axis direction so as to be substantially perpendicular to the holding surface 52 of the chuck table 50, and is supported by the spindle housing 40 so as to be rotatable.

[0042] The spindle motor 44 is connected to the upper end side of the spindle 42. The spindle motor 44 enables the spindle 42 to rotate about a rotation axis that passes through the center of the first grinding wheel 11 and extends along the Z-axis direction.

[0043] The spindle 42 passes through an opening provided in the bottom plate of the holder 110, and a wheel mount 45 is disposed below the opening. The wheel mount 45 is formed in a disk shape, and is fixed to the lower end (tip) of the spindle 42 and rotates in response to the rotation of the spindle 42. The wheel mount 45 supports the grinding wheel 43.

[0044] The grinding wheel 43 is formed so that its outer diameter is approximately the same as that of the wheel mount 45. The grinding wheel 43 includes an annular wheel base (annular base) 46 made of a metal material such as an aluminum alloy. A plurality of first grinding stones 11, each having an approximately rectangular parallelepiped shape, are annularly arranged and fixed on the underside of the wheel base 46 all around the circumference. In this manner, in the first grinding mechanism 10 , the first grinding wheel 11 disposed at the tip of the spindle 42 is rotated by the rotation of the spindle 42 , and grinds the wafer 5 held on the chuck table 50 .

[0045] The first grinding feed mechanism 70 may also include a counterbalance (not shown). The counterbalance is provided so as to bridge the column 101 and the holder 110 from above. The counterbalance is configured to lift the holder 110 with a force corresponding to the weight of the holder 110 including the first grinding mechanism 10. The counterbalance eliminates the load on the first grinding feed mechanism 70 due to the weight of the holder 110 including the first grinding mechanism 10. The force generated by the counterbalance is slightly greater than the above weight.

[0046] Next, the table base 300 and the support pads 310 of the turntable 60 will be described. As shown in Fig. 3, the table base 300 has a cylindrical side wall 303, and this side wall 303 has a circular outer surface 301 having approximately the same diameter as the outer diameter of the turntable 60, and a circular inner surface 302 having a smaller diameter than the outer surface 301. A plurality of support pads 310 are arranged on the upper surface of the table base 300 (the upper surface of the side wall 303). Also, the support pillars 320 are fixed to the bottom surface (not shown) of the table base 300 and stand upright.

[0047] The support pads 310 are installed on the table base 300 so as to be in contact with the lower surface of the turntable 60 at positions that form a substantially equilateral triangle when viewed from the upper arrow, as shown in FIG.

[0048] The support pad 310 is connected to an air source (not shown). When the turntable 60 rotates, the support pad 310 injects air from the air source onto the underside of the turntable 60, thereby lifting the turntable 60 from the table base 300. In this way, the support pad 310 supports the turntable 60 rotatably without contact.

[0049] That is, in this embodiment, when the control unit 7 rotates the turntable 60, the control unit 7 causes the turntable 60 to float from the table base 300 by air jetted from the support pad 310, and rotates the turntable 60 by the turntable motor. The side of the turntable and the pulley arranged at the tip of the turntable motor are connected by an endless belt. The control unit 7 positions the chuck table 50 holding the wafer 5 at a position corresponding to the first grinding wheel 11 of the first grinding mechanism 10 in the first grinding area 401, the second grinding wheel 21 of the second grinding mechanism 20 in the second grinding area 402, or the third grinding wheel 31 of the third grinding mechanism 30 in the third grinding area 403.

[0050] Thereafter, the control unit 7 stops the air being ejected from the support pad 310, thereby causing the support pad 310 to come into contact with and support the lower surface of the turntable 60.

[0051] Figure 3 also shows a first grinding region 431, a second grinding region 432 and a third grinding region 433, which are regions on the upper surface of the wafer 5 held on the chuck table 50 where the lower surfaces of the first grinding wheel 11, the second grinding wheel 21 and the third grinding wheel 31 come into contact. These grinding regions 431-433 are formed on the upper surface of the wafer 5 from the outer periphery toward the center by rotating the chuck table 50 in the direction of the arrow 505 and rotating the first grinding wheel 11, the second grinding wheel 21, and the third grinding wheel 31 in the direction of the arrow 501. The grinding regions 431-433 have a relatively narrow annular sector shape.

[0052] The grinding operation in the grinding device 1 controlled by the control unit 7 will be described below.

[0053] [Holding process] First, the control unit 7 uses the robot 153 and the loading mechanism 154 shown in FIG. 1 to remove the unprocessed wafer 5 from the first cassette 150, and passes it via the temporary placement table 156 to have it held on the holding surface 52 of the chuck table 50 located in the loading / unloading area 400.

[0054] [First grinding process] Next, the control unit 7 controls the positioning of the chuck table 50 holding the wafer 5 relative to the first grinding mechanism 10 . That is, first, the control unit 7 rotates the turntable 60 to position the chuck table 50 holding the wafer 5 below the first grinding mechanism 10 in the first grinding area 401 .

[0055] In the first grinding area 401, the holder 110 of the first grinding feed mechanism 70 holds the spindle unit 41 of the first grinding mechanism 10 (see FIG. 2).

[0056] In addition, the lower surface of the first grinding wheel 11 at the tip of the spindle unit 41 is parallel to the radius portion of the conical holding surface 52 of the chuck table 50. As a result, a first grinding region 431 in the shape of an arc extending from the outer periphery to the center is formed by the first grinding wheel 11 on the wafer 5 held on the holding surface 52, as shown in FIG.

[0057] In this state, the control unit 7 controls the first grinding mechanism 10 and the first grinding feed mechanism 70 to grind the wafer 5. As a result, a first grinding mark 451 having a shape corresponding to the shape of the first grinding region 431 is formed on the wafer 5. Note that the first grinding mark 451 is actually formed on the entire grinding surface of the wafer 5, but FIG. 3 shows only the mark overlapping with the first grinding region 431. This also applies to the second grinding mark 452 and the third grinding mark 453 described later.

[0058] [Second grinding process] After the first grinding step is completed, the control unit 7 controls the positioning of the chuck table 50 holding the wafer 5 relative to the second grinding mechanism 20 . That is, first, the control unit 7 rotates the turntable 60 to position the chuck table 50 holding the wafer 5 below the second grinding mechanism 20 in the second grinding area 402 .

[0059] In the second grinding area 402, the holder 110 of the second grinding feed mechanism 80 holds the spindle unit 41 of the second grinding mechanism 20 (see FIG. 2).

[0060] In addition, the lower surface of the second grinding wheel 21 at the tip of the spindle unit 41 is parallel to the radius portion of the conical holding surface 52 of the chuck table 50. As a result, a second grinding region 432 in the shape of an arc extending from the outer periphery to the center is formed by the second grinding wheel 21 on the wafer 5 held on the holding surface 52, as shown in Fig. 3. The chuck table 50 is disposed with respect to the second grinding mechanism 20 so that the second grinding region 432 intersects with the first grinding region 431.

[0061] In this state, the control unit 7 controls the second grinding mechanism 20 and the second grinding feed mechanism 80 to grind the wafer 5. As a result, a second grinding mark 452 having a shape corresponding to the shape of the second grinding region 432 is formed on the wafer 5.

[0062] In this manner, in the first grinding process and the second grinding process, the chuck table 50 is positioned relative to the first grinding mechanism 10 and the second grinding mechanism 20 so that the first grinding mark 451 on the wafer 5 caused by grinding with the first grinding wheel 11 intersects with the second grinding mark 452 on the wafer 5 caused by grinding with the second grinding wheel 21.

[0063] [Third grinding process] After the second grinding step is completed, the control unit 7 controls the position of the chuck table 50 holding the wafer 5 relative to the third grinding mechanism 30. That is, the control unit 7 rotates the turntable 60 to position the chuck table 50 holding the wafer 5 below the third grinding mechanism 30 in the third grinding area 403 .

[0064] In the third grinding area 403, the holder 110 of the third grinding feed mechanism 90 holds the spindle unit 41 of the third grinding mechanism 30 (see FIG. 2).

[0065] In addition, the lower surface of the third grinding wheel 31 at the tip of the spindle unit 41 is parallel to the radius portion of the conical holding surface 52 of the chuck table 50. As a result, a third grinding region 433 in the shape of an arc extending from the outer periphery to the center is formed by the third grinding wheel 31 on the wafer 5 held on the holding surface 52, as shown in Fig. 3. The chuck table 50 is disposed with respect to the third grinding mechanism 30 so that the third grinding region 433 intersects with the second grinding region 432.

[0066] In this state, the control unit 7 controls the third grinding mechanism 30 and the third grinding feed mechanism 90 to grind the wafer 5. As a result, a third grinding mark 453 having a shape corresponding to the shape of the third grinding region 433 is formed on the wafer 5.

[0067] In this manner, in the third grinding process, the chuck table 50 is positioned relative to the third grinding mechanism 30 so that the second grinding marks 452 on the wafer 5 caused by grinding with the second grinding wheel 21 intersect with the third grinding marks 453 on the wafer 5 caused by grinding with the third grinding wheel 31.

[0068] [Cleaning and recovery process] After the third grinding step is completed, the control unit 7 rotates the turntable 60 to place the chuck table 50 holding the wafer 5 in the carry-in / out area 400. The control unit 7 controls the carry-out mechanism 157 shown in FIG. 1 to transport the wafer 5 to the spin cleaning unit 265 and perform spin cleaning. Thereafter, the control unit 7 controls the robot 153 to carry the spin-cleaned wafer 5 into the second cassette 151.

[0069] As described above, in this embodiment, in the second grinding step, the second grinding mechanism 20 is disposed with respect to the chuck table 50 so that the second grinding mark 452 on the wafer 5 generated by grinding with the second grinding wheel 21 intersects with the first grinding mark 451 on the wafer 5. Furthermore, in the third grinding step, the third grinding mechanism 30 is disposed with respect to the chuck table 50 so that the third grinding mark 453 on the wafer 5 generated by grinding with the third grinding wheel 31 intersects with the second grinding mark 452 on the wafer 5.

[0070] As a result, in the second grinding step, the wafer 5 is ground so as to remove the first grinding marks 451, and in the third grinding step, the wafer 5 is ground so as to remove the second grinding marks 452. Therefore, it is possible to obtain a high-quality wafer 5 having small thickness variations and high flexural strength.

[0071] In addition, the second grinding wheel 21 forming the second grinding mark 452 intersecting the first grinding mark 451 and the third grinding wheel 31 forming the third grinding mark 453 intersecting the second grinding mark 452 are subjected to an appropriate impact force when the grinding marks intersect and grind, causing a self-sharpening effect and maintaining the grinding force. Therefore, the grinding force of the second grinding wheel 21 and the third grinding wheel 31 can be improved.

[0072] In addition, the first grinding feed mechanism 70, the second grinding feed mechanism 80 and the third grinding feed mechanism 90 in this embodiment are provided with the spindle units 41 of the first grinding mechanism 10, the second grinding mechanism 20 and the third grinding mechanism 30, respectively.

[0073] In this embodiment, the grinding apparatus 1 has two cassettes 150 and 151 as cassettes for accommodating the wafers 5. In this regard, the number of cassettes included in the grinding apparatus 1 is not limited to two, and may be one, or three or more.

[0074] Furthermore, at least four chuck tables 50, which hold the wafer 5 by the holding surface 52, may be arranged on the turntable 60. Furthermore, at least three grinding mechanisms may be arranged.

[0075] For example, five chuck tables 50 may be arranged on the turntable 60, and four grinding mechanisms may be provided. That is, as shown in Fig. 4, a first grinding mechanism 10, a second grinding mechanism 20, and a third grinding mechanism 30 may be provided together with a first grinding feed mechanism 70, a second grinding feed mechanism 80, and a third grinding feed mechanism 90, and a fourth grinding mechanism 35 may be newly provided together with a fourth grinding feed mechanism 95 that feeds it for grinding.

[0076] The five chuck tables 50 are disposed at equal intervals in the circumferential direction on the turntable 60. The first grinding mechanism 10, the second grinding mechanism 20, the third grinding mechanism 30 and the fourth grinding mechanism 35 are provided so as to be disposed above the four chuck tables 50.

[0077] The fourth grinding mechanism 35 has a configuration similar to that of the third grinding mechanism 30, etc., and includes a fourth grinding wheel 36. The fourth grinding wheel 36 is, for example, a grinding wheel for final finish grinding that contains smaller abrasive grains than the third grinding wheel 31.

[0078] By rotating the fourth grinding wheel 36, a fourth grinding region 434 is formed on the upper surface of the wafer 5 held on the chuck table 50. The fourth grinding region 434 has a relatively thin annular sector shape, similar to the grinding regions 431 to 433. In FIG. 4, the rotation direction of grinding wheels 11, 21, 31 and 36 is indicated by arrow 501, while the rotation direction of chuck table 50 is indicated by arrow 505.

[0079] 4, the first grinding feed mechanism 70, the second grinding feed mechanism 80, the third grinding feed mechanism 90, and the fourth grinding feed mechanism 95 are each composed of a column 101 and a holder 110. The column 101 may be a gate-type column having pillars that sandwich the holder 110. In the gate-type column, the pillars are arranged to sandwich the chuck table 50.

[0080] Furthermore, in grinding the wafer 5 using the fourth grinding mechanism 35, the turntable 60 is rotated and the chuck table 50 is disposed relative to the fourth grinding mechanism so that the third grinding mark 453 of the wafer 5 generated by grinding with the third grinding wheel 31 intersects with the fourth grinding mark 454 of the wafer 5 generated by grinding with the fourth grinding wheel 36. Therefore, the wafer 5 is ground so that the third grinding mark 453 is removed. This makes it possible to obtain a high-quality wafer 5 with small thickness variation and high flexural strength. Furthermore, the grinding power of the second grinding wheel 21, the third grinding wheel 31, and the fourth grinding wheel 36 can be improved.

[0081] In the configuration having the four grinding mechanisms shown in Fig. 4, the orientations of the column 101 and the holder 110 in the second grinding feed mechanism 80 and the fourth grinding feed mechanism 95 may be changed as shown in Fig. 5. With this configuration as well, the same effects as those of the configuration shown in Fig. 4 can be obtained. [Explanation of symbols]

[0082] 1: grinding device, 5: wafer, 7: control unit, 400: loading / unloading area, 10: first grinding mechanism, 11: first grinding wheel, 401: first grinding area, 431: first grinding region, 451: first grinding mark, 20: second grinding mechanism, 21: second grinding wheel, 402: second grinding area, 432: second grinding region, 452: second grinding mark, 30: third grinding mechanism; 31: third grinding wheel; 403: third grinding area, 433: third grinding region, 453: third grinding mark, 35: fourth grinding mechanism, 36: fourth grinding wheel, 434: fourth grinding region, 454: fourth grinding mark, 40: spindle housing, 41: spindle unit, 42: spindle, 43: grinding wheel, 44: spindle motor, 50: chuck table, 52: holding surface, 60: turntable, 61: Water case, 300: table base, 301: outer surface, 302: inner surface, 303: side wall, 320: Support pillar, 310: Support pad, 70: first grinding feed mechanism, 80: second grinding feed mechanism, 90: third grinding feed mechanism, 95: fourth grinding feed mechanism, 101: column, 104: guide rail, 110: holder, 114: Z-axis motor 115: ball screw, 116: lift table, 150: first cassette, 151: second cassette, 153: robot, 156: temporary placement table, 154: loading mechanism, 157: unloading mechanism, 201: first device base, 202: second device base, 240: Thickness sensor 265: Spin cleaning unit

Claims

1. A turntable arranged to be rotatable around a center axis; At least four chuck tables are arranged on the turntable and hold the wafer by a holding surface; a grinding mechanism, at least three of which are arranged, for grinding the wafer by contacting a lower surface of an annular grinding wheel with a radial area of ​​the wafer held on the holding surface; a grinding feed mechanism that feeds the grinding mechanism in a grinding feed direction perpendicular to the holding surface, a grinding apparatus for positioning one of the chuck tables at each of the grinding wheels by rotating the turntable, and for in-feed grinding the wafer held on the holding surface, comprising: The at least three grinding mechanisms include: a first grinding mechanism that brings a lower surface of a first annular grinding wheel into contact with a first grinding region of the wafer to grind the wafer; a second grinding mechanism that brings a lower surface of a second annular grinding wheel into contact with a second grinding area of ​​the wafer to grind the wafer; a third grinding mechanism that brings a lower surface of a third annular grinding wheel into contact with a third grinding area of ​​the wafer to grind the wafer, when the chuck table is positioned relative to each of the first grinding wheel of the first grinding mechanism, the second grinding wheel of the second grinding mechanism, and the third grinding wheel of the third grinding mechanism by rotation of the turntable, a rotation center of the turntable, a rotation center of the chuck table, and each of the rotation centers of the first grinding wheel, the second grinding wheel, and the third grinding wheel are arranged on the same straight line; when the chuck table holding the wafer is positioned on the second grinding wheel of the second grinding mechanism, the first grinding area and the second grinding area of ​​the wafer are symmetrical with respect to a straight line connecting a rotation center of the turntable, a rotation center of the chuck table, and a rotation center of the second grinding wheel, and a second grinding mark on the wafer generated by grinding with the second grinding wheel intersects with a first grinding mark on the wafer generated by grinding with the first grinding wheel, Furthermore, when the chuck table holding the wafer is positioned on the third grinding wheel of the third grinding mechanism, the second grinding area and the third grinding area of ​​the wafer are symmetrical with respect to a straight line connecting the rotation center of the turntable, the rotation center of the chuck table, and the rotation center of the third grinding wheel, and a third grinding mark on the wafer generated by grinding with the third grinding wheel intersects with a second grinding mark on the wafer generated by grinding with the second grinding wheel. Grinding equipment.

2. A method for grinding a wafer by the grinding apparatus according to claim 1, comprising: a first grinding step of grinding the wafer by bringing a lower surface of the first grinding wheel into contact with the first grinding region of the wafer held on the chuck table; a second grinding step in which, after the first grinding step, a lower surface of the second grinding wheel is brought into contact with the second grinding region of the wafer to grind the wafer, thereby intersecting the first grinding mark generated on the wafer in the first grinding step with the second grinding mark generated by grinding with the second grinding wheel; a third grinding step in which, after the second grinding step, a lower surface of the third grinding wheel is brought into contact with the third grinding region of the wafer to grind the wafer, thereby intersecting the second grinding mark generated on the wafer in the second grinding step with the third grinding mark generated by grinding with the third grinding wheel; A method for grinding a wafer, comprising:

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