Secondary battery protection circuit and secondary battery abnormality detection system

Abstract

The present invention detects abnormalities of a secondary battery, and ensures safety by quickly detecting a phenomenon of a decrease in safety of the secondary battery and warning the user, for example. A first protective circuit and a second protective circuit are provided in one secondary battery. The first protective circuit has a memory circuit including a transistor that uses an oxide semiconductor. A complementary dual protection system is made possible during charging by combining a plurality of protective circuits, further increasing safety.

Description

[Technical field]

[0001] One embodiment of the present invention relates to an object, a method, or a manufacturing method. Alternatively, the present invention relates to a process, a machine, a manufacture, or a composition of matter. One embodiment of the present invention relates to a semiconductor device, a display device, a light-emitting device, a power storage device, a lighting device, an electronic device, or a manufacturing method thereof. One embodiment of the present invention relates to a vehicle or an electronic device for a vehicle provided in a vehicle. In particular, the present invention relates to a protection circuit for a secondary battery, a charging control method for a secondary battery, an abnormality detection system for a secondary battery, a management system for a secondary battery, and an electronic device having a secondary battery.

[0002] In this specification, the term "electricity storage device" refers to elements and devices in general that have an electricity storage function, including, for example, secondary batteries such as lithium ion secondary batteries, lithium ion capacitors, all-solid-state batteries, and electric double layer capacitors. [Background technology]

[0003] In recent years, various types of power storage devices, such as lithium-ion secondary batteries, lithium-ion capacitors, and air batteries, have been actively developed. In particular, the demand for high-output, high-energy-density lithium-ion secondary batteries has rapidly expanded in conjunction with the development of the semiconductor industry, and they are now indispensable in the modern information society as a rechargeable energy source, as they are used in portable information terminals, such as mobile phones, smartphones, tablets, and notebook computers, portable music players, digital cameras, medical devices, and next-generation clean energy automobiles, such as hybrid vehicles (HVs), electric vehicles (EVs), and plug-in hybrid vehicles (PHVs or PHEVs).

[0004] In portable information terminals and electric vehicles, multiple secondary batteries are connected in series or parallel, equipped with a protection circuit, and used as a battery pack (also called a battery pack). A battery pack is a battery in which multiple secondary batteries are housed inside a container (metal can, film exterior) together with a specified circuit to facilitate the handling of the secondary batteries. The battery pack is equipped with an ECU (Electronic Control Unit) to manage the operating state.

[0005] Secondary batteries used in electric and hybrid vehicles deteriorate depending on the number of charges, depth of discharge, charging current, charging environment (temperature change), etc. Deterioration also depends on how the user uses the battery, and factors such as the temperature during charging, frequency of quick charging, amount of charge by regenerative braking, and timing of charging by regenerative braking may also be related to deterioration.

[0006] Patent Document 1 discloses a battery state detection device for detecting a micro-short circuit in a secondary battery, and a battery pack incorporating the same. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] Patent Publication No. 2010-66161 Summary of the Invention [Problem to be solved by the invention]

[0008] One of the objectives is to ensure safety by detecting abnormalities in secondary batteries, for example, detecting phenomena that reduce the safety of secondary batteries at an early stage and warning users.

[0009] Another object of the present invention is to provide a highly safe secondary battery monitoring system. [Means for solving the problem]

[0010] In order to create a highly safe secondary battery monitoring system, multiple types of protection circuits are combined.

[0011] The invention disclosed in this specification is an abnormality detection system for a secondary battery that has a first protection circuit that detects abnormalities when the secondary battery is charged and a second protection circuit that detects abnormalities when the secondary battery is charged and discharged, the first protection circuit having a comparison circuit including a transistor, and the second protection circuit having an arithmetic circuit that calculates the output voltage of the secondary battery.

[0012] In the above configuration, the first protection circuit detects voltage abnormalities using a comparator circuit for each sampling period. The comparator circuit can use an N-channel MOSFET or a P-channel MOSFET, and the material of the transistor used in the comparator circuit can be SiC or GaN.

[0013] In the above configuration, the second protection circuit detects an abnormality by calculating the charge capacity using a coulomb counter during charging and discharging. The coulomb counter is a battery remaining detection device that converts the charge / discharge current flowing through a detection resistor (sense resistor) into a voltage and grasps the remaining battery capacity of the secondary battery based on the converted voltage value.

[0014] In the above configuration, one type of abnormality during charging of the secondary battery is a micro-short circuit, which can be detected by the first and second protection circuits. Furthermore, since a voltage value is used to detect an abnormality during charging of the secondary battery, the first and second protection circuits can also detect overcharging and over-discharging. Overcharging is also one type of abnormality during charging of the secondary battery. Moreover, over-discharging is also one type of abnormality during discharging of the secondary battery. The first and second protection circuits detect these abnormalities early and warn the user, thereby ensuring safety.

[0015] The transistor in the first protection circuit may have an oxide semiconductor, and the oxide semiconductor can be made of indium, gallium, or zinc. An OS transistor (also referred to as an OS FET) using an oxide semiconductor has a characteristic of an extremely small off-state current. When an OS transistor is used as the transistor M1, the leakage current of the transistor M1 can be made extremely low. In other words, written data can be held for a long time by the transistor M1, and therefore the frequency of refreshing the memory cell holding the data can be reduced. Furthermore, the refresh operation of the memory cell can be made unnecessary. Furthermore, since the leakage current is extremely low, analog data can be held in the memory cell.

[0016] A circuit for controlling charging or a battery control system having a memory circuit including a transistor using an oxide semiconductor may be referred to as a battery operating system (BTOS) or a battery oxide semiconductor.

[0017] In addition, in the charging control circuit, a predetermined threshold current can be set and a sudden abnormality, specifically a micro-short circuit, can be detected based on the detected current value. When a micro-short circuit occurs, the internal resistance decreases, so the amount of current flowing through a normal secondary battery becomes relatively small, and a large amount of current flows through the secondary battery in which an abnormality has occurred, which is dangerous. In the charging control circuit, the current is maintained at a controlled value and the current value can also be monitored. Furthermore, by detecting a micro-short circuit, an abnormality in the secondary battery can be detected early.

[0018] A micro-short circuit refers to a tiny short circuit inside a secondary battery, and is not so severe that the positive and negative electrodes of the secondary battery are short-circuited to the point that charging and discharging are impossible, but rather refers to a phenomenon in which a short-circuit current flows for a short period of time at the tiny short circuit. The cause of a micro-short circuit is believed to be that deterioration occurs when multiple charging and discharging are performed, causing metal elements such as lithium and cobalt to precipitate inside the battery, and the precipitates grow, causing localized current concentration in parts of the positive electrode and negative electrode, resulting in parts of the separator not functioning, or the generation of by-products.

[0019] In addition, the lithium ion secondary battery is not limited to a secondary battery using an electrolytic solution, and the present invention can also be applied to an all-solid-state secondary battery using a solid electrolyte. Examples of solid electrolytes include polymer electrolytes and various ceramics (e.g., LAGP(Li 1.5 Al 0.5 Ge 1.5 (PO 4 ) 3 ), Li 10 GeP 2 S 12 Polymer electrolytes include polymer gel electrolytes that contain an electrolyte solution, and polymer solid electrolytes that do not contain an electrolyte solution. Polymer gel electrolytes are made by injecting electrolyte solution into a polymer with lithium ion conductivity. Examples of polymers with lithium ion conductivity include polyethylene oxide (PEO) and polypropylene oxide (PPO). Effect of the Invention

[0020] Micro-short circuits are thought to occur when lithium ions precipitate on the carbon of the negative electrode during charging, so it is important to detect abnormalities during charging. Therefore, by combining multiple protection circuits, a complementary double protection system is possible during charging, further enhancing safety. [Brief description of the drawings]

[0021] FIG. 1 is a block diagram showing one embodiment of the present invention. FIG. 2 is a block diagram showing one embodiment of the present invention. FIG. 3 is an example of a battery model used in one embodiment of the present invention. FIG. 4 is a block diagram showing one embodiment of the present invention. FIG. 5 is an example of a block diagram illustrating a first protection circuit according to one embodiment of the present invention. FIG. 6 is a block diagram showing one embodiment of the present invention. 7A, 7B, 7C, 7D, 7E, 7F, and 7G are diagrams for explaining examples of the circuit configuration of a memory. FIG. 8 is a schematic cross-sectional view illustrating a configuration example of a semiconductor device. FIG. 9 is a schematic cross-sectional view illustrating a configuration example of a semiconductor device. 10A, 10B, and 10C are schematic cross-sectional views illustrating examples of the structure of a transistor. 11A and 11B are schematic cross-sectional views illustrating examples of the structure of a transistor. FIG. 12 is a schematic cross-sectional view illustrating a configuration example of a semiconductor device. 13A and 13B are schematic cross-sectional views illustrating examples of the structure of a transistor. FIG. 14 is a schematic cross-sectional view illustrating a configuration example of a semiconductor device. 15A, 15B, and 15C are diagrams showing an example of a moving body. FIG. 16A is a perspective view showing an example of a secondary battery, FIG. 16B is an exploded perspective view of the secondary battery, and FIG. 16C is a model diagram of the secondary battery during charging. FIG. 17 illustrates a portion of a timing chart showing one embodiment of the present invention. FIG. 18 is a diagram showing a dual detection system according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, the embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and those skilled in the art will easily understand that the form and details of the present invention can be modified in various ways. Furthermore, the present invention is not to be interpreted as being limited to the description of the embodiments shown below.

[0023] (Embodiment 1) In this embodiment, an example in which a first protection circuit 11 and a second protection circuit 13 are provided for one secondary battery is shown in FIG.

[0024] FIG. 1 is an example of a block diagram showing an example of a management system for a secondary battery.

[0025] As shown in Fig. 1, a charge control circuit 14 electrically connected to a secondary battery has two cutoff transistors between the secondary battery. One cutoff switch 12 cuts off the power supply to stop charging. The other cutoff switch 15 also cuts off the power supply to stop charging. The cutoff switches 12 and 15 may be power transistors (also called power MOS), or may be N-channel MOSFETs or P-channel MOSFETs, and other materials such as SiC and GaN may be used. Oxide semiconductor materials containing In, Ga, and Zn may also be used.

[0026] The first protection circuit 11 has at least a first control circuit 16, a comparison circuit 18, and a cutoff switch 12. The comparison circuit 18 may be formed on the chip of the first control circuit 16. The comparison circuit 18 may be formed on the chip of the cutoff switch 12. The chip of the cutoff switch 12 may be bonded to the chip of the first control circuit 16, and the comparison circuit 18 may be formed on the cutoff switch 12. The chips may be bonded together using a known bonding technique. The first protection circuit 11 detects a micro-short circuit by comparing the voltage with the previous voltage fed back using the comparison circuit 18, and stops charging by turning off the cutoff switch 12 using the first control circuit 16.

[0027] The second protection circuit 13 has at least a second control circuit 17, an AD converter 19, and a cutoff switch 15. The AD converter 19 may be formed on the chip of the second control circuit 17. The AD converter 19 may be formed on the chip of the cutoff switch 15. The chip of the cutoff switch 15 may be bonded to the chip of the second control circuit 17, and the AD converter 19 may be formed on the cutoff switch 15. The chips may be bonded together using a known bonding technique. The second protection circuit 13 detects a micro-short by digitizing values ​​such as the voltage of the secondary battery using the AD converter 19, and performing calculations in the second control circuit 17 based on those values, and stops charging by turning off the cutoff switch 15 using the second protection circuit 13. The second control circuit 17 has a calculation circuit such as a CPU to perform calculations.

[0028] Overcharging caused by an internal short circuit accompanied by a gradual voltage change is difficult to detect with the first protection circuit 11, and is therefore suitable for detection with the second protection circuit 13. In addition, the second protection circuit 13 can output a warning signal from the second control circuit 17, and therefore can refrain from immediately turning off the cutoff switch 15 upon detection of an internal short circuit accompanied by a gradual voltage change, and can display a warning to the user, urging the user to make a final decision on whether or not to stop charging. An internal short circuit accompanied by a gradual voltage change is not urgent enough to immediately stop use, but can be judged as a sign of an abnormality. In addition, an internal short circuit accompanied by a gradual voltage change is often caused by deterioration of the secondary battery over time, so it can also be used to urge the user to replace the secondary battery.

[0029] Moreover, momentary voltage fluctuations are detected by the first protection circuit 11. The first protection circuit 11 can be considered a simple protection circuit that immediately stops charging if there is an abnormality even if the cause of the sudden change in charging voltage is unknown.

[0030] Even if one of them becomes inoperative for some reason, if the other detection is operational, it is possible to stop dangerous short circuits and overcharging. In addition, a third and fourth protection circuit may be used.

[0031] In this way, by independently controlling charging in two or more systems, a highly safe secondary battery management system can be provided.

[0032] 2 shows an example in which two secondary batteries are used. A first protection circuit 11 is provided for one secondary battery, and a third protection circuit 21 is provided for the other secondary battery.

[0033] The first protection circuit 11 may have the same configuration as the third protection circuit 21 .

[0034] The third protection circuit 21 has at least a third control circuit 26, a comparison circuit 28, and a cutoff switch 22. The third protection circuit 21 detects a micro-short circuit by comparing the voltage with the previous voltage fed back using the comparison circuit 28, and stops charging by turning off the cutoff switch 22 using the third control circuit 26.

[0035] Since the second control circuit has a CPU and the like, it can calculate the remaining charge and the like for each of the multiple secondary batteries. Therefore, even when there are three or more secondary batteries, only one second protection circuit 13 including the second control circuit 17 is required. However, in the case of an electric vehicle or the like in which a set of multiple secondary batteries connected in series or parallel is made into one module pack and multiple such module packs are used, a second protection circuit 13 is provided for each secondary battery module pack.

[0036] Even when a plurality of secondary batteries are used, a highly safe secondary battery management system can be provided by using a plurality of protection circuits and controlling charging.

[0037] (Embodiment 2) In this embodiment, an example is shown in which charging control of a secondary battery is performed using two protection circuit modules. Note that a protection circuit module refers to a module in which at least one of an IC including a protection circuit including a transistor, a CPU, and other elements (capacitive elements, resistive elements, etc.) is mounted on a circuit board having connection terminals, etc.

[0038] The battery model of the secondary battery used is shown in Fig. 3. The method for estimating the state of charge of the secondary battery is carried out by performing calculations using an electric circuit model, in this embodiment, a Foster type electric circuit model. In this embodiment, calculations are performed using the electric circuit model, so that the method can be realized by an inexpensive microcomputer with a relatively low computing power.

[0039] This will be explained in more detail below.

[0040] First, the voltage value or current value of the secondary battery is actually measured by a detection means (a voltage detection circuit or a current detection circuit). These data are acquired by a voltage measuring device or a current measuring device (also called a current sensor) and stored in a storage device. The initial SOC(0) is calculated based on the voltage value acquired by the voltage measuring device, specifically, the charge / discharge characteristic data. The initial SOC(0) is the initial value of the SOC. Also, the initial Rs is the initial value of the DC resistance Rs (R O ) is the resistance due to the migration process of ions. Five initial parameters, specifically the initial SOC(0), FCC, and R 0 , R d , C d It should be noted that the Nelder-Mead method is an algorithm that does not require derivatives.

[0041] Another method of calculating the initial SOC(0) is to measure the open circuit voltage of the battery before use using a voltage detection circuit, and determine the initial SOC(0) from a map or table of the relationship between the open circuit voltage OCV and the SOC that has been obtained in advance. In this embodiment, f(SOC) is obtained from a lookup table of the SOC and OCV curve. Note that the OCV is the voltage when the battery is in an electrochemical equilibrium state, and corresponds to the SOC (State Of Charge).

[0042] The estimated output voltage of the battery model shown in FIG.

[0043]

number

[0044] In addition, the SOC update formula can be expressed as follows:

[0045]

number

[0046] Moreover, the overvoltage of the CR unit can be expressed by the following formula.

[0047]

number

[0048] Based on these formulas, a program for detecting an abnormality in a secondary battery can be created.

[0049] Additionally, to detect micro-shorts, the voltage error displacement is used. The voltage error displacement is calculated by calculating the voltage error at each time step and then taking the difference between the previous and next steps (i.e. the difference between the previous step and the current step). Noise can be reduced by using the following formula for correcting the series resistance Rs:

[0050]

number

[0051] If the sampling time is short, the measured value cannot keep up, so the series resistance Rs is calculated from the average value of three steps.

[0052] When data on the occurrence of a pseudo micro-short circuit was input and the differential of the voltage error was calculated using the above formula, it was possible to detect a voltage drop due to a pseudo micro-short circuit. When calculations were performed using charge / discharge data of the secondary battery, the threshold for detecting a micro-short circuit was found to be approximately 15 mV or more and 20 mV or less. Therefore, it is sufficient to perform charging control of the secondary battery so that a voltage exceeding the threshold value of 20 mV is detected as an abnormality. Note that this threshold value may differ depending on the type of secondary battery used, so it is preferable to calculate the threshold value of the secondary battery to be used in advance using the above formula or the like.

[0053] It can also detect overcharging caused by a gradual internal short circuit. By converting the voltage just before charging as the OCV to SOC, it accurately grasps the remaining battery charge and detects overcharging.

[0054] The first detection condition is to stop charging when the SOC exceeds 100%.

[0055] The second detection condition is that charging stops when the sum of the remaining battery charge just before charging and the amount of charging current exceeds FCC.

[0056] When calculating the initial charge amount from the OCV before charging, use the following formula.

[0057]

number

[0058]

number

[0059]

number

[0060] In the above formula, if the left side is greater than the right side, it is considered that the battery is overcharged.

[0061] The third detection condition is to use the OCV (the voltage immediately before charging and the voltage after sufficient relaxation after charging) to calculate the full charge capacity. If the OCV is greater than the previous full charge capacity, it is determined to be overcharged.

[0062] In this case, the following formula is used: SOC1 is the voltage immediately before charging, and SOC2 is the voltage after sufficient relaxation after charging.

[0063]

number

[0064]

number

[0065] Under normal conditions, the initial FCC and FCCupdate will be approximately the same value, but if the FCCupdate value becomes larger, it is considered to be an internal short circuit.

[0066] When the above three detection conditions are met, the system can detect an abnormality as overcharging caused by a slowly occurring internal short circuit. Since the calculation time per step is approximately 2 msec, if the sampling period is 1 second, it can handle more than 100 secondary batteries connected in series.

[0067] A program is created using the above-mentioned detection conditions as an algorithm, and the circuit configuration shown in FIG. 4 is created using an IC module (OS LSI) including an OS transistor capable of executing the program.

[0068] The secondary battery abnormality detection system shown in Fig. 4 turns off the cutoff switch when an IC module (OS LSI) including an OS transistor detects an abnormality. Also, when another IC module (BTOS) detects an abnormality, the other cutoff switch is turned off.

[0069] The IC module (OS LSI) including an OS transistor is a component including a protection circuit module. The protection circuit module is a module having at least one of a circuit including an FET (OS FET) having an oxide semiconductor, a CPU, and other elements (capacitive element, resistive element, etc.) on a circuit board having a connection terminal, etc. The IC module (OS LSI) including an OS transistor is electrically connected to a current detection resistor. In this embodiment, a technology called a normally-off computer is used to reduce the power consumption of the CPU of the IC module (OS LSI) including an OS transistor. The normally-off computer uses power gating to stop the supply of power to an integrated circuit such as a cache memory that is not in use, thereby reducing the power consumption of the CPU. In the normally-off computer, the supply of power is stopped within a short period of time, so that a memory element used as a buffer memory device (such as a cache memory) is required to be not only non-volatile but also to operate at high speed. Furthermore, in a normally-off computer, unless the time required for saving and restoring data accompanying the stopping of the power supply during power gating (overhead time) is short, it is difficult to stop the power supply during the time when the CPU is not processing. The shorter the overhead time and the shorter the break-even time (BET), the more the power supply can be stopped even during the short time when the CPU is not processing, and the more fine-grained the power gating can be performed.

[0070] Moreover, the secondary battery abnormality detection system shown in FIG. 18 shows a double detection system using a normally-off computer. In FIG. 18, the CPU used in the normally-off computer is denoted as NoffCPU. The power consumption can be reduced by turning on and off the power supply SW51 of this NoffCPU52. Also, FIG. 18 shows a secondary battery 50 and a battery pack 54 including a BTOS53, and shows ADC55 and ADC56 connected to the NoffCPU52. The ADC is an AD converter circuit. The ADC55 is connected to the current Ibat of the secondary battery 50, and the ADC56 is connected to the voltage Vbat of the secondary battery 50.

[0071] Since the change in the battery state of the secondary battery is slower than the operating time of the CPU, a period in which the power switch 51 is turned off can be provided between the first and second detection periods to reduce power consumption. For example, if there are two detection periods, the timing chart shown in Fig. 17 will result. Note that the second detection period is the interval between the start of the second detection and the time of the second detection determination in Fig. 17.

[0072] The VDD of the NoFCPU52 is set by the power SW51 during the on period (T on ) and off period (T off ) is switched, and the time it takes to turn it off (T backup ) to save the data. When switching from the off state to the on state again, the time required to restore the saved data (T recovery ) occurs. The time required for saving and restoring data due to the interruption of the power supply during power gating (T backup and T recovery The total time for all three is called overhead time.

[0073] In FIG. 17, at the first detection judgment, the CPU judges that the actual measurement value is normal because the difference between the estimated value and the actual measurement value is small, and uses this normal battery state data to estimate the battery state (voltage) at the next detection judgment. After the calculation of this estimated value is completed, the on-period (T on) may be terminated, so the estimated value data is saved. off ) is the on-period (T on ) but in reality it is more than five times as much.

[0074] If an abnormality occurs in the secondary battery 50 by the time of the second detection judgment, the time required to restore the saved estimated value data (T recovery ) or at the same time, the CPU performs calculations, and if there is a large difference between the estimated value and the actual measured value, it can be determined that there is an abnormality. In this way, the state of the secondary battery 50 can be checked by intermittently driving the Noff CPU 52. off ), that is, the interval of the detection period, can be determined by the user or designer. Note that since FIG. 17 shows an example in which anomaly detection continues even after an anomaly is detected, the timing chart shows that the estimated value data is saved after the anomaly is detected. However, if detection is to be stopped after an anomaly is detected, T backup There is no need to provide a period, that is, there is no need to save the data after the second detection determination.

[0075] Here, the detection of an abnormality in another IC module (BTOS53) will be described below. The configuration of the IC module (BTOS53) will be described with reference to FIG. 5, which is a block diagram of a detection circuit for abnormal behavior such as a micro-short circuit. Note that the cutoff switch having a gate electrically connected to the IC module (BTOS) in FIG. 4 corresponds to the power cutoff switch 105 in FIG. 5.

[0076] The IC module (BTOS) mounts a circuit including an FET having an oxide semiconductor, a microcomputer, and other elements (capacitive elements, resistive elements, etc.) on a circuit board (rigid board (also called a printed wiring board)). A circuit including an FET having an oxide semiconductor may be formed on an IC chip such as a microcomputer.

[0077] The first memory 103 monitors the charging voltage when the offset charging voltage is held. The second memory 104 holds the output data. The first memory 103 and the second memory 104 are memory circuits including FETs using an oxide semiconductor.

[0078] A specific operation for detecting abnormal behavior such as a micro-short circuit will be described below.

[0079] When the memory write signal becomes High at a certain detection timing, writing is performed to the first memory 103. The first memory 103 stores the offset battery charging voltage. In the case of normal behavior, the result of comparing the voltage held in the first memory 103 with the charging voltage in the comparator circuit 102 is always High, and the power cutoff switch control signal also becomes High.

[0080] When abnormal behavior such as a micro-short occurs, the charging voltage of the secondary battery suddenly drops. At that time, the output signal of the comparator circuit 102 is inverted, detecting the abnormal behavior. Then, the power cutoff switch control signal is set to low, and the low potential is held in the second memory 104, thereby maintaining the power cutoff switch 105 in the off state.

[0081] The protection circuit 100 shown in Fig. 5 is included in an IC module (BTOS) and has a simple configuration, and the control circuit 106 plays a role of writing the offset battery charging voltage to the first memory 103 at every arbitrary sampling period. The protection circuit 100 shown in Fig. 5 has a mechanism for constant detection, which differs from the NoffCPU, which performs intermittent detection.

[0082] By using two IC modules with different detection timings in this way, a complementary protection system for the secondary battery can be realized, and the safety of a battery pack (also called a battery pack) equipped with these two IC modules and a device having this battery pack 54 is improved. A battery pack refers to a battery module consisting of multiple secondary batteries housed inside a container (metal can, film exterior body) together with a specified circuit to facilitate the handling of the secondary batteries.

[0083] (Embodiment 3) In order to improve the accuracy of anomaly detection, an example of using a neural network for calculations such as estimating the remaining capacity of a secondary battery is shown below.

[0084] A neural network is a method and neural network processing performed by a neural network section (including, for example, a CPU (Central Processor Unit), a GPU (Graphics Processing Unit), an APU (Accelerated Processing Unit), memory, etc.). Note that an APU refers to a chip that integrates a CPU and a GPU into one.

[0085] The discharge of secondary batteries installed in devices is random as it tends to depend on the usage method of the user, but the charging conditions are fixed, so it can be said that charging is easier to estimate using a neural network than discharging. By using a certain number of charging curves as learning data in advance, accurate values ​​can be estimated using a neural network. If the secondary battery is actually measured and the charging curve is obtained, the initial SOC(0), FCC, R 0 , R d , C d can be obtained.

[0086] Specifically, various obtained data is evaluated and learned using machine learning or artificial intelligence, the estimated degree of deterioration of the secondary battery is analyzed, and if an abnormality is detected, charging of the secondary battery is stopped. Note that it is preferable that the learning itself is performed in advance and parameters used for estimating the degree of deterioration are calculated.

[0087] Fig. 6 shows an example in which a neural network unit 30 is provided above an IC module (OS LSI) including an OS transistor in addition to the configuration shown in Fig. 4. The neural network unit 30 has a state estimation unit 31 and a behavior estimation unit 32. The neural network unit 30 uses a microprocessor capable of performing neural network calculations.

[0088] In the case where the secondary battery is trained while being used, for example, in an electric vehicle, training data can be acquired while the vehicle is running, and the deterioration state of the secondary battery can be grasped. Note that a neural network unit 30 is used to estimate the deterioration state of the secondary battery. The neural network can be configured by a neural network having multiple hidden layers, that is, a deep neural network. Note that learning in a deep neural network is sometimes called deep learning.

[0089] In machine learning, first, feature values ​​are extracted from the training data. The relative amount of change that changes over time is extracted as a feature value (also called a feature quantity), and a neural network is trained based on the extracted feature value. The training means can train the neural network based on different training patterns for each time interval. The connection weights applied to the neural network can be updated according to the training results based on the training data. The connection weights are also called a feature quantity.

[0090] Based on the results of estimating the deterioration state of the secondary battery using the neural network unit 30, the parameters of the battery model of the IC module (OS LSI) including the OS transistor may be reset so that abnormality detection can be performed accurately over the long term.

[0091] Furthermore, by calculating the internal parameters of the battery model using the neural network unit 30 and inputting these values ​​to an IC module (OS LSI) that includes an OS transistor, it is possible to improve the accuracy of determining the degree of deterioration and the remaining gas gauge.

[0092] As a method for estimating the state of charge of the secondary battery using the neural network unit 30, the state of charge can also be obtained by performing calculation processing using a regression model, for example, a Kalman filter.

[0093] The Kalman filter is a type of infinite impulse response filter. Multiple regression analysis is a type of multivariate analysis in which multiple independent variables are used in regression analysis. Examples of multiple regression analysis include the least squares method. While regression analysis requires many time series of observed values, the Kalman filter has the advantage that it can sequentially obtain optimal correction coefficients as long as a certain amount of data is accumulated. The Kalman filter can also be applied to non-stationary time series.

[0094] A nonlinear Kalman filter (specifically, an unscented Kalman filter (also called UKF)) can be used to estimate the internal resistance and state of charge (SOC) of a secondary battery. An extended Kalman filter (also called EKF) can also be used. SOC indicates the state of charge (also called the charge rate), and is an index in which a fully charged state is 100% and a completely discharged state is 0%.

[0095] The initial parameters obtained by the optimization algorithm are collected every n (n is an integer, for example, 50) cycles, and the data group is used as training data for learning. The learning model is used for neural network processing, and the SOC can be estimated with high accuracy. The software program that executes the inference program for neural network processing can be written in various programming languages ​​such as Python (registered trademark), Go, Perl, Ruby, Prolog, Visual Basic, C, C++, Swift, and Java (registered trademark). In addition, the application may be created using a framework such as Chainer (available in Python), Caffe (available in Python and C++), TensorFlow (available in C, C++, and Python), and .NET. For example, the LSTM algorithm is programmed in Python, and a CPU (Central Processor Unit) or a GPU (Graphics Processing Unit) is used. In addition, a chip that integrates a CPU and a GPU into one is sometimes called an APU (Accelerated Processing Unit), and this APU chip can also be used. Alternatively, an IC (also called an inference chip) incorporating an AI system may be used. An IC incorporating an AI system may also be called a circuit (microprocessor) that performs neural network calculations.

[0096] The learning system includes a teacher creating device and a learning device. The teacher data creating device creates teacher data used when the learning device learns (learning phase). The teacher data includes data that is the same as the data to be processed and the recognition target, and an evaluation of the label corresponding to the data. The teacher data creating device includes an input data acquiring unit, an evaluation acquiring unit, and a teacher data creating unit. The input data acquiring unit may acquire data from data stored in a storage device, or may acquire learning input data via the Internet. The input data is data used for learning, and includes a current value and a voltage value of a secondary battery. The teacher data does not have to be actual measurement data, and data close to the actual measurement may be created by setting conditions for initial parameters, and a predetermined characteristic database of the data may be used as the teacher data to perform neural network processing to estimate the state of charge (SOC). The SOC of the same type of battery may be efficiently estimated by creating data close to the actual measurement based on the charge and discharge characteristics of a certain battery, and performing neural network processing using the predetermined characteristic database of the data as the teacher data.

[0097] When only an optimization algorithm is used for SOC estimation, the optimization algorithm requires a large amount of calculations, and there are problems such as convergence to meaningless values ​​and divergence where the optimal value cannot be determined. The characteristics of the battery are nonlinear, and five initial parameters are obtained using a method for numerical optimization of nonlinear functions. The five initial parameters are the total capacity FCC (Full Charge Capacity), DC resistance R S (R 0 ), resistance due to diffusion process R d , diffusion capacitance C d , the initial SOC is (0). Note that FCC (full charge capacity, also called total capacity) is the rated capacity at room temperature of 25°C.

[0098] The optimization process for obtaining the five initial parameters can be performed using tools implemented in Python (registered trademark) or Matlab (registered trademark).

[0099] When the secondary battery is deteriorated, if the FCC of the initial parameter changes significantly, an error in the SOC may occur, so the initial parameter used in the calculation for estimating the SOC may be updated. The initial parameter to be updated is calculated by an optimization algorithm using data of charge and discharge characteristics actually measured in advance. By performing calculation processing using a regression model, for example, a Kalman filter, using the updated initial parameter, it is possible to perform a highly accurate SOC estimation (judgment phase) even after deterioration. After that, the output SOC value is notified to the user. The judgment phase does not only refer to the calculation performed in inference, but also refers to the period from the acquisition of actual measurement data to inference and the end of output of the estimated SOC value. In this specification, calculation processing using a Kalman filter is also expressed as Kalman filter processing.

[0100] The timing for updating the initial parameters may be arbitrary, but in order to estimate the SOC with high accuracy, it is preferable to update the parameters more frequently, and it is preferable to update the parameters periodically and continuously.

[0101] In addition, although this embodiment shows an example in which the IC module including OS transistors (OS LSI) and the neural network unit 30 are electrically connected, wireless communication may be performed. If five initial parameters can be determined in advance using the neural network unit 30 based on parameters used for learning, i.e., data on the secondary battery to be used, the configuration shown in Fig. 4 may be used as data for the IC module including OS transistors (OS LSI).

[0102] This embodiment mode can be freely combined with other embodiment modes.

[0103] (Embodiment 4) In this embodiment, circuit configuration examples of the storage means are shown in FIGS. 7A to 7G. Each of FIGS. 7A to 7G functions as a storage element. The storage element 410 shown in FIG. 7A includes a transistor M1 and a capacitor CA. The storage element 410 includes one transistor and one capacitor. For example, the first memory 103 and the second memory 104 shown in Embodiment 2 are memory circuits including FETs using an oxide semiconductor, and any one of the circuit configuration examples of the storage means shown in FIG. 7 can be used.

[0104] A first terminal of the transistor M1 is connected to a first terminal of the capacitance element CA, a second terminal of the transistor M1 is connected to a wiring BL, a gate of the transistor M1 is connected to a wiring WL, and a back gate of the transistor M1 is connected to a wiring BGL. A second terminal of the capacitance element CA is connected to a wiring CAL. A node where the first terminal of the transistor M1 and the first terminal of the capacitance element CA are electrically connected is called a node ND.

[0105] In an actual transistor, the gate and back gate are arranged to overlap each other via the channel formation region of the semiconductor layer. Both the gate and the back gate can function as a gate. Therefore, when one is called the "back gate", the other is sometimes called the "gate" or "front gate". Also, one is sometimes called the "first gate" and the other is sometimes called the "second gate".

[0106] The back gate may be at the same potential as the gate, or may be at ground potential or any other potential. By changing the potential of the back gate independently of the gate, the threshold voltage of the transistor can be changed.

[0107] By providing a back gate and by setting the gate and the back gate at the same potential, the region in the semiconductor layer through which carriers flow becomes larger in the film thickness direction, and the amount of carrier movement increases. As a result, the on-current of the transistor increases and the field-effect mobility increases.

[0108] Therefore, the transistor can have a large on-state current relative to the area it occupies. In other words, the area occupied by the transistor can be made small relative to the required on-state current. Thus, a highly integrated semiconductor device can be realized.

[0109] The wiring BGL functions as a wiring for applying a potential to the back gate of the transistor M1. By applying an arbitrary potential to the wiring BGL, the threshold voltage of the transistor M1 can be increased or decreased.

[0110] Data is written and read by applying a high-level potential to the wiring WL to turn on the transistor M1 and electrically connect the wiring BL and the node ND.

[0111] The wiring CAL functions as a wiring for applying a predetermined potential to the second terminal of the capacitance element CA. It is preferable that a fixed potential be applied to the wiring CAL.

[0112] 7B is a modified example of the memory element 410. In the memory element 420, the back gate of the transistor M1 is electrically connected to the wiring WL. With this configuration, the same potential as that of the gate of the transistor M1 can be applied to the back gate of the transistor M1. Thus, when the transistor M1 is in a conductive state, the current flowing through the transistor M1 can be increased.

[0113] 7C , the transistor M1 may be a transistor with a single gate structure (a transistor without a back gate). The memory element 430 has a configuration in which the back gate is removed from the transistor M1 of the memory element 410 and the memory element 420. Thus, the memory element 430 can be manufactured in a shorter process than the memory element 410 and the memory element 420.

[0114] Storage element 410, storage element 420, and storage element 430 are DRAM type storage elements.

[0115] An oxide semiconductor is preferably used for a semiconductor layer in which a channel of the transistor M1 is formed. In this specification and the like, a transistor including an oxide semiconductor in a semiconductor layer in which a channel is formed is also referred to as an “OS transistor” or an “OS FET”.

[0116] For example, the oxide semiconductor may be an oxide semiconductor containing any one of indium, element M (element M is one or more elements selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, etc.), and zinc. In particular, the oxide semiconductor is preferably an oxide semiconductor containing indium, gallium, or zinc.

[0117] An OS transistor has a characteristic that its off-state current is extremely low. By using an OS transistor as the transistor M1, the leakage current of the transistor M1 can be made extremely low. That is, written data can be held by the transistor M1 for a long time. This makes it possible to reduce the frequency of refreshing the memory element. Furthermore, the refresh operation of the memory element can be made unnecessary. Furthermore, since the leakage current is extremely low, multilevel data or analog data can be held in the memory element 410, the memory element 420, and the memory element 430.

[0118] In this specification and the like, a DRAM using an OS transistor is referred to as a dynamic oxide semiconductor random access memory (DOSRAM).

[0119] 7D shows an example of a circuit configuration of a gain cell type memory element including two transistors and one capacitor element. The memory element 440 includes a transistor M1, a transistor M2, and a capacitor element CA.

[0120] A first terminal of the transistor M1 is connected to a first terminal of the capacitance element CA, a second terminal of the transistor M1 is connected to the wiring WBL, and a gate of the transistor M1 is connected to the wiring WWL. A second terminal of the capacitance element CA is connected to the wiring CAL. A first terminal of the transistor M2 is connected to the wiring RBL, a second terminal of the transistor M2 is connected to the wiring RWL, and a gate of the transistor M2 is connected to the first terminal of the capacitance element CA. A node where the first terminal of the transistor M1, the first terminal of the capacitance element CA, and the gate of the transistor M2 are electrically connected is called a node ND.

[0121] The bit line WBL functions as a write bit line, the bit line RBL functions as a read bit line, the word line WWL functions as a write word line, and the word line RWL functions as a read word line. The transistor M1 functions as a switch that connects the node ND and the bit line WBL to or from a conductive state.

[0122] It is preferable to use an OS transistor as the transistor M1. As described above, since an OS transistor has an extremely low off-state current, the use of an OS transistor as the transistor M1 allows a potential written to the node ND to be held for a long time. That is, data written to the memory element can be held for a long time.

[0123] There is no particular limitation on the type of transistor used as the transistor M2. The transistor M2 may be an OS transistor, a Si transistor (a transistor using silicon in a semiconductor layer), or another type of transistor.

[0124] When a Si transistor is used for the transistor M2, the silicon used for the semiconductor layer may be amorphous silicon, polycrystalline silicon, low temperature polysilicon (LTPS: Low Temperature Poly-Silicon), or single crystal silicon. Since a Si transistor may have a higher field-effect mobility than an OS transistor, the use of a Si transistor as a read transistor can increase the operation speed during reading.

[0125] When an OS transistor is used for transistor M1 and a Si transistor is used for transistor M2, the two may be stacked in different layers. OS transistors can be manufactured using the same manufacturing equipment and processes as Si transistors. Therefore, it is easy to mix OS transistors and Si transistors (hybridize them), and high integration is also easy. Mixing OS transistors and Si transistors refers to a single chip configuration in which a circuit having an OS transistor is provided above a circuit having Si FETs formed on a silicon wafer.

[0126] In addition, when the transistor M2 is an OS transistor, the leakage current in a non-selected state can be significantly reduced, thereby improving the read accuracy. By using OS transistors for both the transistors M1 and M2, the number of manufacturing steps of the semiconductor device can be reduced, and the productivity can be improved. For example, the semiconductor device can be manufactured at a process temperature of 400° C. or lower.

[0127] 7E to 7G show circuit configuration examples in which transistors having back gates (four-terminal transistors, also referred to as "four-terminal elements") are used as the transistors M1 and M2. A memory element 450 shown in FIG. 7E, a memory element 460 shown in FIG. 7F, and a memory element 470 shown in FIG. 7G are modifications of the memory element 440.

[0128] 7E, the gate and backgate of the transistor M1 are electrically connected to each other, and the gate and backgate of the transistor M2 are electrically connected to each other.

[0129] 7F, the back gates of the transistors M1 and M2 are electrically connected to the wiring BGL. A predetermined potential can be applied to the back gates of the transistors M1 and M2 through the wiring BGL.

[0130] 7G, the backgate of the transistor M1 is electrically connected to the wiring WBGL, and the backgate of the transistor M2 is electrically connected to the wiring RBGL. By connecting the backgates of the transistors M1 and M2 to different wirings, the threshold voltages of the transistors M1 and M2 can be changed independently.

[0131] The memory elements 440 to 470 are 2Tr1C memory cells. In this specification and the like, a memory device in which a 2Tr1C memory cell is configured using an OS transistor as the transistor M1 is referred to as a non-volatile oxide semiconductor random access memory (NOSRAM). In addition, the memory elements 440 to 470 can amplify the potential of the node ND by the transistor M2 and read it out. Since the off-state current of the OS transistor is very small, the potential of the node ND can be held for a long period of time. Furthermore, nondestructive reading in which the potential of the node ND is held even when a read operation is performed can be performed.

[0132] The information stored in the memory element is information that is rewritten infrequently, and therefore it is preferable to use, as the memory element, a non-single-layer random access memory (NSRAM) that allows non-destructive reading of information and can retain information for a long period of time.

[0133] In addition, the transistors shown in Figures 7A, 7B, and 7E to 7G are four-terminal elements, and therefore have the advantage that independent control of input and output can be easily performed compared to two-terminal elements such as Magnetoresistive Random Access Memory (MRAM), Resistive Random Access Memory (ReRAM), and Phase-change memory that utilize MTJ (Magnetic Tunnel Junction) characteristics.

[0134] (Embodiment 5) In this embodiment mode, a structure of a transistor applicable to the structure of the memory element described in the above embodiment mode, specifically, a structure in which transistors having different electrical characteristics are stacked will be described. In particular, in this embodiment mode, a structure of each transistor included in a memory circuit constituting a semiconductor device will be described. By using this structure, the degree of freedom in designing the semiconductor device can be increased. In addition, by stacking transistors having different electrical characteristics, the integration degree of the semiconductor device can be increased.

[0135] The semiconductor device shown in Fig. 8 includes a transistor 300, a transistor 500, and a capacitor 600. Fig. 10A is a cross-sectional view of the transistor 500 in the channel length direction, Fig. 10B is a cross-sectional view of the transistor 500 in the channel width direction, and Fig. 10C is a cross-sectional view of the transistor 300 in the channel width direction.

[0136] The transistor 500 is an OS transistor. The off-state current of the transistor 500 is small. Therefore, a potential can be held at the node NH for a long period of time. As a result, a potential is written to the node NH less frequently, which leads to reduced power consumption of the semiconductor device.

[0137] 8, the semiconductor device described in this embodiment includes a transistor 300, a transistor 500, and a capacitor 600. The transistor 500 is provided above the transistor 300, and the capacitor 600 is provided above the transistor 300 and the transistor 500.

[0138] The transistor 300 is provided over a substrate 311 and includes a conductor 316, an insulator 315, a semiconductor region 313 formed of a part of the substrate 311, a low resistance region 314a functioning as a source region or drain region, and a low resistance region 314b.

[0139] 10C, the upper surface and the side surface in the channel width direction of the semiconductor region 313 of the transistor 300 are covered with a conductor 316 via an insulator 315. By forming the transistor 300 as a fin type in this manner, the effective channel width is increased. This can improve the on-characteristics of the transistor 300. In addition, the contribution of the electric field of the gate electrode can be increased, and therefore the off-characteristics of the transistor 300 can be improved.

[0140] The transistor 300 may be either a p-channel type or an n-channel type.

[0141] The region where the channel of the semiconductor region 313 is formed and the region nearby the region, as well as the low resistance region 314a and the low resistance region 314b that become the source region or drain region, preferably contain a semiconductor such as a silicon-based semiconductor, and preferably contain single crystal silicon. Alternatively, they may be formed of a material containing Ge (germanium), SiGe (silicon germanium), GaAs (gallium arsenide), GaAlAs (gallium aluminum arsenide), or the like. A configuration using silicon in which the effective mass is controlled by applying stress to the crystal lattice and changing the lattice spacing may be used. Alternatively, the transistor 300 may be a HEMT (High Electron Mobility Transistor) by using GaAs and GaAlAs, or the like.

[0142] The low resistance region 314a and the low resistance region 314b contain, in addition to the semiconductor material applied to the semiconductor region 313, an element that imparts n-type conductivity, such as arsenic or phosphorus, or an element that imparts p-type conductivity, such as boron.

[0143] The conductor 316 functioning as the gate electrode can be made of a conductive material such as a semiconductor material, such as silicon, containing an element that imparts n-type conductivity, such as arsenic or phosphorus, or an element that imparts p-type conductivity, such as boron, a metal material, an alloy material, or a metal oxide material.

[0144] Since the work function is determined by the material of the conductor, the threshold voltage of the transistor can be adjusted by selecting the material of the conductor. Specifically, it is preferable to use a material such as titanium nitride or tantalum nitride for the conductor. Furthermore, in order to achieve both electrical conductivity and embeddability, it is preferable to use a metal material such as tungsten or aluminum as the conductor in a laminated state, and in particular, it is preferable to use tungsten in terms of heat resistance.

[0145] 8 is just an example and is not limited to this structure, and an appropriate transistor may be used depending on the circuit configuration and driving method. For example, when the semiconductor device is a unipolar circuit including only OS transistors, the transistor 300 may have the same structure as a transistor 500 which is an OS transistor, as shown in FIG 9. The details of the transistor 500 will be described later.

[0146] In this specification and the like, a unipolar circuit refers to a circuit in which all transistors are of the same conductivity type, for example, a circuit in which all transistors are n-channel transistors can be said to be a unipolar circuit.

[0147] An insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order over the transistor 300.

[0148] As the insulators 320, 322, 324, and 326, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, or the like can be used.

[0149] In this specification, silicon oxynitride refers to a material whose composition contains more oxygen than nitrogen, silicon nitride oxide refers to a material whose composition contains more nitrogen than oxygen, aluminum oxynitride refers to a material whose composition contains more oxygen than nitrogen, and aluminum nitride oxide refers to a material whose composition contains more nitrogen than oxygen.

[0150] The insulator 322 may function as a planarizing film that planarizes steps caused by the transistor 300 and the like provided thereunder. For example, the top surface of the insulator 322 may be planarized by a planarization process using a chemical mechanical polishing (CMP) method or the like to improve the planarity.

[0151] The insulator 324 is preferably a film having a barrier property that prevents hydrogen or impurities from diffusing from the substrate 311, the transistor 300, or the like to a region where the transistor 500 is provided.

[0152] As an example of a film having a barrier property against hydrogen, for example, silicon nitride formed by a CVD method can be used. Here, when hydrogen diffuses into a semiconductor element having an oxide semiconductor such as the transistor 500, the characteristics of the semiconductor element may deteriorate. Therefore, it is preferable to use a film that suppresses the diffusion of hydrogen between the transistor 500 and the transistor 300. Specifically, the film that suppresses the diffusion of hydrogen is a film that releases a small amount of hydrogen.

[0153] The amount of desorption of hydrogen can be analyzed, for example, by using thermal desorption spectrometry (TDS) etc. For example, the amount of desorption of hydrogen from the insulator 324 is calculated as 10×10 per area of ​​the insulator 324 when the surface temperature of the film is in the range of 50° C. to 500° C. in the TDS analysis. 15 atoms / cm 2 Less than or equal to 5×10 15 atoms / cm 2 The following is acceptable.

[0154] The insulator 326 preferably has a lower dielectric constant than the insulator 324. For example, the relative dielectric constant of the insulator 326 is preferably less than 4, and more preferably less than 3. For example, the relative dielectric constant of the insulator 326 is preferably 0.7 times or less, and more preferably 0.6 times or less, the relative dielectric constant of the insulator 324. By using a material with a low dielectric constant as the interlayer film, the parasitic capacitance generated between wirings can be reduced.

[0155] A conductor 328, a conductor 330, and the like that connect to the capacitor 600 or the transistor 500 are embedded in the insulator 320, the insulator 322, the insulator 324, and the insulator 326. The conductor 328 and the conductor 330 function as a plug or a wiring. In addition, a plurality of conductors that function as a plug or a wiring may be collectively given the same reference symbol. In this specification and the like, a wiring and a plug connected to the wiring may be integrated. That is, there are cases where a part of a conductor functions as a wiring and a case where a part of a conductor functions as a plug.

[0156] As the material for each plug and wiring (conductor 328, conductor 330, etc.), a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material can be used in a single layer or a laminated layer. It is preferable to use a high melting point material such as tungsten or molybdenum that has both heat resistance and conductivity, and it is preferable to use tungsten. Alternatively, it is preferable to form the wiring from a low resistance conductive material such as aluminum or copper. By using a low resistance conductive material, it is possible to reduce the wiring resistance.

[0157] A wiring layer may be provided over the insulator 326 and the conductor 330. For example, in FIG. 8, an insulator 350, an insulator 352, and an insulator 354 are stacked in this order. A conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or a wiring connected to the transistor 300. Note that the conductor 356 can be provided using a material similar to that of the conductor 328 or the conductor 330.

[0158] Note that, for example, the insulator 350 is preferably an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 356 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening provided in the insulator 350 having a barrier property against hydrogen. With this structure, the transistor 300 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0159] Note that, for example, tantalum nitride or the like may be used as the conductor having a barrier property against hydrogen. By stacking tantalum nitride and tungsten having high conductivity, it is possible to suppress diffusion of hydrogen from the transistor 300 while maintaining the conductivity of the wiring. In this case, a structure in which the tantalum nitride layer having a barrier property against hydrogen is in contact with the insulator 350 having a barrier property against hydrogen is preferable.

[0160] A wiring layer may be provided over the insulator 354 and the conductor 356. For example, in FIG. 8, an insulator 360, an insulator 362, and an insulator 364 are stacked in this order. A conductor 366 is formed in the insulator 360, the insulator 362, and the insulator 364. The conductor 366 functions as a plug or a wiring. The conductor 366 can be provided using a material similar to that of the conductor 328 or the conductor 330.

[0161] Note that, for example, the insulator 360 is preferably an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 366 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening provided in the insulator 360 having a barrier property against hydrogen. With this structure, the transistor 300 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0162] A wiring layer may be provided over the insulator 364 and the conductor 366. For example, in FIG. 8, an insulator 370, an insulator 372, and an insulator 374 are stacked in this order. A conductor 376 is formed in the insulator 370, the insulator 372, and the insulator 374. The conductor 376 functions as a plug or a wiring. Note that the conductor 376 can be provided using a material similar to that of the conductor 328 or the conductor 330.

[0163] Note that, for example, the insulator 370 is preferably an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 376 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening provided in the insulator 370 having a barrier property against hydrogen. With this structure, the transistor 300 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0164] A wiring layer may be provided over the insulator 374 and the conductor 376. For example, in FIG. 8, an insulator 380, an insulator 382, ​​and an insulator 384 are stacked in this order. A conductor 386 is formed in the insulator 380, the insulator 382, ​​and the insulator 384. The conductor 386 functions as a plug or a wiring. Note that the conductor 386 can be provided using a material similar to that of the conductor 328 or the conductor 330.

[0165] Note that, for example, the insulator 380 is preferably an insulator having a barrier property against hydrogen, similar to the insulator 324. The conductor 386 preferably includes a conductor having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening provided in the insulator 380 having a barrier property against hydrogen. With this structure, the transistor 300 and the transistor 500 can be separated by a barrier layer, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0166] In the above, a wiring layer including the conductor 356, a wiring layer including the conductor 366, a wiring layer including the conductor 376, and a wiring layer including the conductor 386 have been described, but the semiconductor device of this embodiment is not limited to this. There may be three or fewer wiring layers similar to the wiring layer including the conductor 356, or there may be five or more wiring layers similar to the wiring layer including the conductor 356.

[0167] An insulator 510, an insulator 512, an insulator 514, and an insulator 516 are stacked in this order over the insulator 384. Any of the insulator 510, the insulator 512, the insulator 514, and the insulator 516 is preferably made of a substance that has a barrier property against oxygen or hydrogen.

[0168] For example, the insulator 510 and the insulator 514 are preferably formed using a film having a barrier property that prevents hydrogen or impurities from diffusing from the substrate 311 or the like or from the region where the transistor 300 is provided to the region where the transistor 500 is provided. Therefore, it is preferable to use a material similar to that of the insulator 324.

[0169] As an example of a film having a barrier property against hydrogen, silicon nitride formed by a CVD method can be used. Here, hydrogen diffusion into a semiconductor element having an oxide semiconductor, such as the transistor 500, may deteriorate the characteristics of the semiconductor element. Therefore, it is preferable to use a film that suppresses hydrogen diffusion between the transistor 500 and the transistor 300. Specifically, the film that suppresses hydrogen diffusion is a film that releases a small amount of hydrogen.

[0170] As a film having a barrier property against hydrogen, for example, the insulator 510 and the insulator 514 are preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0171] In particular, aluminum oxide has a high blocking effect of preventing the permeation of both oxygen and impurities such as hydrogen and moisture, which are factors that cause fluctuations in the electrical characteristics of a transistor. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the transistor manufacturing process. In addition, aluminum oxide can suppress the release of oxygen from the metal oxide that constitutes the transistor 500. Therefore, aluminum oxide is suitable for use as a protective film for the transistor 500.

[0172] For example, the insulator 512 and the insulator 516 can be formed using a material similar to that of the insulator 320. By using a material with a relatively low dielectric constant for these insulators, parasitic capacitance between wirings can be reduced. For example, the insulators 512 and the insulator 516 can be formed using a silicon oxide film, a silicon oxynitride film, or the like.

[0173] A conductor 518, a conductor constituting the transistor 500 (for example, the conductor 503), and the like are embedded in the insulators 510, 512, 514, and 516. Note that the conductor 518 functions as a plug or a wiring connected to the capacitor 600 or the transistor 300. The conductor 518 can be formed using a material similar to that of the conductor 328 or the conductor 330.

[0174] In particular, the insulator 510 and the conductor 518 in the region in contact with the insulator 514 are preferably conductors having barrier properties against oxygen, hydrogen, and water. With this structure, the transistor 300 and the transistor 500 can be separated by a layer having barrier properties against oxygen, hydrogen, and water, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

[0175] Above the insulator 516 is a transistor 500 .

[0176] As shown in Figures 10A and 10B, a transistor 500 has a conductor 503 arranged so as to be embedded in an insulator 514 and an insulator 516, an insulator 520 arranged on the insulator 516 and the conductor 503, an insulator 522 arranged on the insulator 520, an insulator 524 arranged on the insulator 522, an oxide 530a arranged on the insulator 524, an oxide 530b arranged on the oxide 530a, conductors 542a and 542b arranged apart from each other on the oxide 530b, an insulator 580 arranged on the conductors 542a and 542b and having an opening formed therebetween overlapping with the conductors 542a and 542b, an oxide 530c arranged on the bottom and side surfaces of the opening, an insulator 550 arranged on the formation surface of the oxide 530c, and a conductor 560 arranged on the formation surface of the insulator 550.

[0177] 10A and 10B, it is preferable to dispose an insulator 544 between the oxide 530a, the oxide 530b, the conductor 542a, and the conductor 542b and the insulator 580. It is preferable that the conductor 560 has a conductor 560a provided inside the insulator 550 and a conductor 560b provided so as to be embedded inside the conductor 560a, as shown in Fig. 10A and 10B. It is preferable that an insulator 574 is disposed on the insulator 580, the conductor 560, and the insulator 550, as shown in Fig. 10A and 10B.

[0178] In the following, oxide 530a, oxide 530b, and oxide 530c may be collectively referred to as oxide 530.

[0179] In the transistor 500, a three-layer structure of the oxide 530a, the oxide 530b, and the oxide 530c is shown in the region where the channel is formed and in the vicinity thereof, but the present invention is not limited thereto. For example, a single layer of the oxide 530b, a two-layer structure of the oxide 530b and the oxide 530a, a two-layer structure of the oxide 530b and the oxide 530c, or a stacked structure of four or more layers may be provided. In addition, in the transistor 500, the conductor 560 is shown as having a two-layer stacked structure, but the present invention is not limited thereto. For example, the conductor 560 may have a single-layer structure or a stacked structure of three or more layers. In addition, the transistor 500 shown in FIG. 8, FIG. 9, FIG. 10A, and FIG. 10B are only examples, and the present invention is not limited thereto, and an appropriate transistor may be used depending on the circuit configuration and the driving method.

[0180] Here, the conductor 560 functions as the gate electrode of the transistor 500, and the conductors 542a and 542b function as the source electrode and drain electrode, respectively. As described above, the conductor 560 is formed so as to be embedded in the opening of the insulator 580 and in the region sandwiched between the conductors 542a and 542b. The arrangement of the conductors 560, 542a, and 542b is selected in a self-aligned manner with respect to the opening of the insulator 580. That is, in the transistor 500, the gate electrode can be arranged in a self-aligned manner between the source electrode and the drain electrode. Therefore, the conductor 560 can be formed without providing a margin for alignment, so that the area occupied by the transistor 500 can be reduced. This allows the semiconductor device to be miniaturized and highly integrated.

[0181] Furthermore, since the conductor 560 is formed in a self-aligned manner in the region between the conductor 542a and the conductor 542b, the conductor 560 does not have a region overlapping with the conductor 542a or the conductor 542b. This makes it possible to reduce parasitic capacitance formed between the conductor 560 and the conductor 542a and between the conductor 560 and the conductor 542b. As a result, the switching speed of the transistor 500 is improved, and the transistor 500 can have high frequency characteristics.

[0182] The conductor 560 may function as a first gate (also referred to as a top gate) electrode. The conductor 503 may function as a second gate (also referred to as a bottom gate) electrode. In this case, the threshold voltage of the transistor 500 can be controlled by changing the potential applied to the conductor 503 independently of the potential applied to the conductor 560. In particular, by applying a negative potential to the conductor 503, the threshold voltage of the transistor 500 can be made higher than 0 V, and the off-current can be reduced. Therefore, applying a negative potential to the conductor 503 can reduce the drain current when the potential applied to the conductor 560 is 0 V, compared to when a negative potential is not applied.

[0183] The conductor 503 is arranged to have a region overlapping with the oxide 530 and the conductor 560. In this manner, when a potential is applied to the conductor 560 and the conductor 503, an electric field generated from the conductor 560 and an electric field generated from the conductor 503 are connected, and a channel formation region formed in the oxide 530 can be covered. In this specification and the like, a transistor structure in which a channel formation region is electrically surrounded by the electric fields of the first gate electrode and the second gate electrode is referred to as a surrounded channel (s-channel) structure.

[0184] The conductor 503 has a structure similar to that of the conductor 518, and the conductor 503a is formed in contact with the inner walls of the openings of the insulator 514 and the insulator 516, and the conductor 503b is formed further inside. Note that although the transistor 500 has a structure in which the conductor 503a and the conductor 503b are stacked, the present invention is not limited to this. For example, the conductor 503 may have a single layer structure or a stacked structure of three or more layers.

[0185] Here, the conductor 503a is preferably made of a conductive material having a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, copper atoms, etc. (the impurities are less likely to permeate through). Alternatively, it is preferable to use a conductive material having a function of suppressing the diffusion of oxygen (e.g., at least one of oxygen atoms, oxygen molecules, etc.) (the oxygen is less likely to permeate through). Note that in this specification and the like, the function of suppressing the diffusion of impurities or oxygen refers to the function of suppressing the diffusion of any one or all of the impurities or the oxygen.

[0186] For example, the conductor 503a has a function of suppressing the diffusion of oxygen, so that the conductor 503b can be prevented from being oxidized and causing a decrease in conductivity.

[0187] In addition, when the conductor 503 also functions as a wiring, it is preferable that the conductor 503b is made of a highly conductive material mainly composed of tungsten, copper, or aluminum. In that case, the conductor 503a is not necessarily provided. Although the conductor 503b is illustrated as a single layer, it may have a laminated structure, for example, a laminate of titanium or titanium nitride and the above-mentioned conductive material.

[0188] The insulators 520, 522, and 524 function as a second gate insulating film.

[0189] Here, the insulator 524 in contact with the oxide 530 preferably contains more oxygen than the oxygen required for the stoichiometric composition. That is, an excess oxygen region is preferably formed in the insulator 524. By providing such an insulator containing excess oxygen in contact with the oxide 530, oxygen vacancies in the oxide 530 can be reduced and the reliability of the transistor 500 can be improved.

[0190] Specifically, it is preferable to use an oxide material from which some oxygen is released by heating as an insulator having an excess oxygen region. An oxide material from which oxygen is released by heating is an oxide material from which the amount of released oxygen converted into oxygen atoms is 1.0×10 18 atoms / cm 3 More than 1.0×10 19 atoms / cm 3 More preferably, 2.0×10 19 atoms / cm 3 or more than 3.0 x 10 20 atoms / cm 3 The oxide film is one having the above-mentioned properties. The surface temperature of the film during the TDS analysis is preferably in the range of 100° C. or higher and 700° C. or lower, or 100° C. or higher and 400° C. or lower.

[0191] In addition, the oxide 530 may be brought into contact with the insulator having the excess oxygen region and subjected to one or more of heat treatment, microwave treatment, and RF treatment. By carrying out such treatment, water or hydrogen in the oxide 530 can be removed. For example, a reaction occurs in the oxide 530 that breaks the bond of VoH, in other words, "V O H→V O This reaction causes dehydrogenation. Some of the hydrogen generated combines with oxygen to form H 2 As O, hydrogen may be removed from the oxide 530 or from an insulator adjacent to the oxide 530. Also, some of the hydrogen may be diffused or captured (also called gettered) in the conductor 542.

[0192] Moreover, the microwave treatment is preferably carried out using, for example, an apparatus having a power source for generating high-density plasma, or an apparatus having a power source for applying RF to the substrate side. For example, high-density oxygen radicals can be generated by using a gas containing oxygen and high-density plasma. Furthermore, by applying RF to the substrate side, oxygen radicals generated by high-density plasma can be efficiently introduced into the oxide 530 or an insulator in the vicinity of the oxide 530. Furthermore, the microwave treatment may be carried out under a pressure of 133 Pa or more, preferably 200 Pa or more, and more preferably 400 Pa or more. Furthermore, as the gas to be introduced into the apparatus for carrying out the microwave treatment, for example, oxygen and argon are used, and the oxygen flow ratio (O 2 / (O 2 +Ar)) is set to 50% or less, preferably 10% or more and 30% or less.

[0193] In addition, in a manufacturing process of the transistor 500, it is preferable to perform heat treatment in a state where the surface of the oxide 530 is exposed. The heat treatment may be performed, for example, at a temperature of 100° C. or higher and 450° C. or lower, more preferably 350° C. or higher and 400° C. or lower. Note that the heat treatment is performed in an atmosphere of nitrogen gas or an inert gas, or an atmosphere containing an oxidizing gas at 10 ppm or higher, 1% or higher, or 10% or higher. For example, the heat treatment is preferably performed in an oxygen atmosphere. In this way, oxygen is supplied to the oxide 530 to reduce oxygen deficiencies (V O ) can be reduced. The heat treatment may be performed under reduced pressure. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas in order to compensate for the desorbed oxygen after the heat treatment in a nitrogen gas or inert gas atmosphere. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas in order to compensate for the desorbed oxygen. Alternatively, the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas in succession to a heat treatment in a nitrogen gas or inert gas atmosphere.

[0194] In addition, by subjecting the oxide 530 to an oxygen supplying treatment, the oxygen vacancies in the oxide 530 are repaired by the supplied oxygen. In other words, OFurthermore, the reaction of "+O→null" can be promoted. Furthermore, the hydrogen remaining in the oxide 530 reacts with the oxygen supplied to the oxide 530, converting the hydrogen into H 2 O. This causes the hydrogen remaining in the oxide 530 to recombine with the oxygen vacancies and form V. O The formation of H can be suppressed.

[0195] When the insulator 524 has an excess oxygen region, it is preferable that the insulator 522 has a function of suppressing the diffusion of oxygen (eg, oxygen atoms, oxygen molecules, etc.) (the oxygen is less likely to permeate).

[0196] The insulator 522 preferably has a function of suppressing diffusion of oxygen and impurities, which prevents oxygen contained in the oxide 530 from diffusing toward the insulator 520. Furthermore, reaction of the conductor 503 with oxygen contained in the insulator 524 and the oxide 530 can be suppressed.

[0197] The insulator 522 may be, for example, aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO 3 ), or (Ba,Sr)TiO 3 It is preferable to use an insulator containing a so-called high-k material such as (BST) in a single layer or a multilayer structure. As transistors become smaller and more highly integrated, problems such as leakage current may occur due to the thinning of the gate insulating film. By using a high-k material as the insulator that functions as the gate insulating film, it is possible to reduce the gate potential during transistor operation while maintaining the physical film thickness.

[0198] In particular, it is preferable to use an insulator containing an oxide of one or both of aluminum and hafnium, which are insulating materials having a function of suppressing the diffusion of impurities and oxygen (the oxygen is unlikely to permeate through them). As an insulator containing an oxide of one or both of aluminum and hafnium, it is preferable to use aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like. When the insulator 522 is formed using such a material, the insulator 522 functions as a layer that suppresses release of oxygen from the oxide 530 and the intrusion of impurities such as hydrogen into the oxide 530 from the periphery of the transistor 500.

[0199] Alternatively, for example, aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to these insulators. Alternatively, these insulators may be nitrided. Silicon oxide, silicon oxynitride, or silicon nitride may be stacked on the above insulators.

[0200] In addition, the insulator 520 is preferably thermally stable. For example, silicon oxide and silicon oxynitride are suitable because they are thermally stable. In addition, by combining a high-k material insulator with silicon oxide or silicon oxynitride, it is possible to obtain the insulator 520 having a thermally stable laminated structure with a high relative dielectric constant.

[0201] 10A and 10B, the insulator 520, the insulator 522, and the insulator 524 are illustrated as the second gate insulating film having a three-layer stack structure, but the second gate insulating film may have a single layer, a two-layer, or a four or more layer stack structure. In this case, the second gate insulating film is not limited to a stack structure made of the same material, and may be a stack structure made of different materials.

[0202] In the transistor 500, it is preferable to use a metal oxide functioning as an oxide semiconductor for the oxide 530 including the channel formation region. For example, a metal oxide such as In-M-Zn oxide (wherein the element M is one or more selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, etc.) may be used as the oxide 530. In particular, it is preferable that the In-M-Zn oxide applicable to the oxide 530 is CAAC-OS (C-Axls Aligned Crystal Oxide Semiconductor) or CAC-OS (Cloud-Aligned Composite Oxide Semiconductor). Alternatively, In-Ga oxide or In-Zn oxide may be used as the oxide 530. CAAC-OS and CAC-OS will be described later.

[0203] In addition, it is preferable to use a metal oxide with a low carrier concentration for the transistor 500. In order to reduce the carrier concentration of the metal oxide, the impurity concentration in the metal oxide may be reduced to reduce the defect state density. In this specification and the like, a low impurity concentration and a low defect state density are referred to as high purity intrinsic or substantially high purity intrinsic. Note that examples of impurities in the metal oxide include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, silicon, and the like.

[0204] In particular, hydrogen contained in the metal oxide reacts with oxygen that bonds with the metal atom to form water, which may cause oxygen vacancies in the metal oxide. In addition, when hydrogen enters an oxygen vacancy in the oxide 530, the oxygen vacancy and hydrogen combine to form V O May form H. V OH functions as a donor and may generate electrons as carriers. In addition, some of the hydrogen may bond with oxygen that bonds with metal atoms to generate electrons as carriers. Therefore, a transistor using a metal oxide containing a large amount of hydrogen is likely to have normally-on characteristics. In addition, hydrogen in a metal oxide is easily mobile due to stress such as heat or an electric field, so if a metal oxide contains a large amount of hydrogen, the reliability of the transistor may be deteriorated. In one embodiment of the present invention, V in the oxide 530 O It is preferable to reduce H as much as possible to obtain high-purity intrinsic or substantially high-purity intrinsic. O In order to obtain a metal oxide with a sufficiently reduced amount of H, it is important to remove impurities such as water and hydrogen from the metal oxide (sometimes referred to as dehydration or dehydrogenation treatment) and to supply oxygen to the metal oxide to compensate for the oxygen deficiency (sometimes referred to as oxygen addition treatment). O By using a metal oxide in which impurities such as H are sufficiently reduced for a channel formation region of a transistor, stable electrical characteristics can be imparted.

[0205] A defect in which hydrogen has entered an oxygen vacancy can function as a donor for a metal oxide. However, it is difficult to quantitatively evaluate the defect. Therefore, in a metal oxide, the carrier concentration may be used instead of the donor concentration. Therefore, in this specification, the carrier concentration assuming a state in which no electric field is applied may be used as a parameter of the metal oxide, instead of the donor concentration. In other words, the "carrier concentration" described in this specification may be rephrased as the "donor concentration".

[0206] Therefore, when a metal oxide is used for the oxide 530, it is preferable that hydrogen in the metal oxide is reduced as much as possible. Specifically, in the metal oxide, the hydrogen concentration obtained by secondary ion mass spectrometry (SIMS) is 1×10 20 atoms / cm 3 Less than 1 x 10 19 atoms / cm3 less than 5×10 18 atoms / cm 3 less than 1×10 18 atoms / cm 3 By using a metal oxide in which impurities such as hydrogen are sufficiently reduced for a channel formation region of a transistor, stable electrical characteristics can be obtained.

[0207] In addition, when a metal oxide is used for the oxide 530, the carrier concentration of the metal oxide in the channel formation region is 1×10 18 cm -3 It is preferable that the value is less than 1×10 17 cm -3 More preferably, it is less than 1×10 16 cm -3 More preferably, it is less than 1×10 13 cm -3 More preferably, it is less than 1×10 12 cm -3 The lower limit of the carrier concentration of the metal oxide in the channel formation region is not particularly limited, but is preferably, for example, 1×10 -9 cm -3 It can be said that:

[0208] Furthermore, when a metal oxide is used for the oxide 530, contact between the conductor 542 (conductor 542a and conductor 542b) and the oxide 530 may cause oxygen in the oxide 530 to diffuse into the conductor 542, resulting in the oxidation of the conductor 542. The oxidation of the conductor 542 is likely to result in a decrease in the conductivity of the conductor 542. The diffusion of oxygen in the oxide 530 into the conductor 542 can be rephrased as the conductor 542 absorbing the oxygen in the oxide 530.

[0209] Furthermore, oxygen in the oxide 530 may diffuse into the conductor 542 (conductor 542a and conductor 542b), forming a foreign layer between the conductor 542a and the oxide 530b and between the conductor 542b and the oxide 530b. Since the foreign layer contains more oxygen than the conductor 542, the foreign layer is presumed to have insulating properties. In this case, the three-layer structure of the conductor 542, the foreign layer, and the oxide 530b can be regarded as a three-layer structure made of a metal-insulator-semiconductor, and may be referred to as a MIS (Metal-Insulator-Semiconductor) structure or a diode junction structure mainly based on the MIS structure.

[0210] Note that the above-mentioned different layer is not limited to being formed between the conductor 542 and the oxide 530b. For example, the different layer may be formed between the conductor 542 and the oxide 530c. Alternatively, the different layer may be formed between the conductor 542 and the oxide 530b and between the conductor 542 and the oxide 530c.

[0211] The metal oxide that functions as a channel formation region in the oxide 530 preferably has a band gap of 2 eV or more, preferably 2.5 eV or more. In this manner, by using a metal oxide with a wide band gap, the off-state current of the transistor can be reduced.

[0212] The oxide 530 has the oxide 530a below the oxide 530b, and thus can suppress the diffusion of impurities from structures formed below the oxide 530a to the oxide 530b. Also, the oxide 530 has the oxide 530c on the oxide 530b, and thus can suppress the diffusion of impurities from structures formed above the oxide 530c to the oxide 530b.

[0213] The oxide 530 preferably has a laminated structure of a plurality of oxide layers with different atomic ratios of each metal atom. Specifically, in the metal oxide used for the oxide 530a, the atomic ratio of element M among the constituent elements is preferably larger than the atomic ratio of element M among the constituent elements in the metal oxide used for the oxide 530b. In addition, in the metal oxide used for the oxide 530a, the atomic ratio of element M to In is preferably larger than the atomic ratio of element M to In in the metal oxide used for the oxide 530b. In addition, in the metal oxide used for the oxide 530b, the atomic ratio of In to element M is preferably larger than the atomic ratio of In to element M in the metal oxide used for the oxide 530a. In addition, the oxide 530c can be a metal oxide that can be used for the oxide 530a or the oxide 530b.

[0214] Specifically, the oxide 530a may be a metal oxide having an atomic ratio of In:Ga:Zn=1:3:4 or 1:1:0.5. The oxide 530b may be a metal oxide having an atomic ratio of In:Ga:Zn=4:2:3 or 1:1:1. The oxide 530c may be a metal oxide having an atomic ratio of In:Ga:Zn=1:3:4, Ga:Zn=2:1, or Ga:Zn=2:5. Specific examples of the oxide 530c having a layered structure include a layered structure of In:Ga:Zn=4:2:3 [atomic ratio] and In:Ga:Zn=1:3:4 [atomic ratio], a layered structure of Ga:Zn=2:1 [atomic ratio] and In:Ga:Zn=4:2:3 [atomic ratio], a layered structure of Ga:Zn=2:5 [atomic ratio] and In:Ga:Zn=4:2:3 [atomic ratio], and a layered structure of gallium oxide and In:Ga:Zn=4:2:3 [atomic ratio].

[0215] In addition, the energy of the conduction band minimum of the oxide 530a and the oxide 530c is preferably higher than that of the oxide 530b. In other words, the electron affinity of the oxide 530a and the oxide 530c is preferably smaller than that of the oxide 530b.

[0216] Here, the energy level of the conduction band minimum changes gradually at the junction of the oxide 530a, the oxide 530b, and the oxide 530c. In other words, it can be said that the energy level of the conduction band minimum at the junction of the oxide 530a, the oxide 530b, and the oxide 530c changes continuously or is a continuous junction. To achieve this, it is preferable to reduce the defect level density of the mixed layer formed at the interface between the oxide 530a and the oxide 530b and the interface between the oxide 530b and the oxide 530c.

[0217] Specifically, the oxides 530a and 530b, and the oxides 530b and 530c have a common element other than oxygen (as a main component), so that a mixed layer with a low density of defect states can be formed. For example, when the oxide 530b is an In-Ga-Zn oxide, the oxides 530a and 530c may be made of an In-Ga-Zn oxide, a Ga-Zn oxide, or a gallium oxide.

[0218] At this time, the main carrier path is the oxide 530b. By configuring the oxide 530a and the oxide 530c as described above, the defect state density at the interface between the oxide 530a and the oxide 530b and at the interface between the oxide 530b and the oxide 530c can be reduced. As a result, the effect of interface scattering on carrier conduction is reduced, and the transistor 500 can obtain a high on-state current.

[0219] Note that the semiconductor material that can be used for the oxide 530 is not limited to the above-mentioned metal oxides. A semiconductor material having a band gap (a semiconductor material that is not a zero-gap semiconductor) may be used as the oxide 530. For example, a semiconductor of a single element such as silicon, a compound semiconductor such as gallium arsenide, or a layered material that functions as a semiconductor (also called an atomic layer material, a two-dimensional material, or the like) is preferably used as the semiconductor material. In particular, it is preferable to use a layered material that functions as a semiconductor as the semiconductor material.

[0220] Here, in this specification and the like, the layered material is a general term for a group of materials having a layered crystal structure. The layered crystal structure is a structure in which layers formed by covalent bonds or ionic bonds are stacked via bonds weaker than covalent bonds or ionic bonds, such as van der Waals forces. The layered material has high electrical conductivity within a unit layer, that is, high two-dimensional electrical conductivity. By using a material that functions as a semiconductor and has high two-dimensional electrical conductivity in the channel formation region, a transistor with a large on-current can be provided.

[0221] Layered materials include graphene, silicene, and chalcogenides. Chalcogenides are compounds that contain chalcogen. Chalcogen is a general term for elements in group 16, including oxygen, sulfur, selenium, tellurium, polonium, and livermorium. Chalcogenides include transition metal chalcogenides and group 13 chalcogenides.

[0222] It is preferable to use, for example, a transition metal chalcogenide that functions as a semiconductor as the oxide 530. Specifically, molybdenum sulfide (representatively, MoS 2 ), molybdenum selenide (represented by MoSe 2 ), molybdenum tellurium (represented by MoTe 2 ), tungsten sulfide (represented by WS 2 ), tungsten selenide (represented by WSe 2 ), tungsten tellurium (represented by WTe 2 ), hafnium sulfide (represented by HfS 2 ), hafnium selenide (represented by HfSe 2 ), zirconium sulfide (typically ZrS 2 ), zirconium selenide (represented by ZrSe 2 ) etc.

[0223] Conductors 542a and 542b functioning as a source electrode and a drain electrode are provided on the oxide 530b. As the conductors 542a and 542b, it is preferable to use a metal element selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, and lanthanum, an alloy containing the above-mentioned metal element as a component, or an alloy combining the above-mentioned metal elements. For example, it is preferable to use tantalum nitride, titanium nitride, tungsten, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, or the like. In addition, tantalum nitride, titanium nitride, nitrides containing titanium and aluminum, nitrides containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxides containing strontium and ruthenium, and oxides containing lanthanum and nickel are preferable because they are conductive materials that are difficult to oxidize, or materials that maintain conductivity even when they absorb oxygen.Furthermore, metal nitride films such as tantalum nitride are preferable because they have barrier properties against hydrogen or oxygen.

[0224] 10, the conductor 542a and the conductor 542b are shown as a single-layer structure, but may be a laminated structure of two or more layers. For example, a tantalum nitride film and a tungsten film may be laminated. A titanium film and an aluminum film may be laminated. Alternatively, a two-layer structure in which an aluminum film is laminated on a tungsten film, a two-layer structure in which a copper film is laminated on a copper-magnesium-aluminum alloy film, a two-layer structure in which a copper film is laminated on a titanium film, or a two-layer structure in which a copper film is laminated on a tungsten film may be used.

[0225] In addition, there are three-layer structures in which a titanium film or titanium nitride film is laminated on the titanium film or titanium nitride film, an aluminum film or copper film is laminated on the titanium film or titanium nitride film, and a titanium film or titanium nitride film is further formed thereon, and a three-layer structure in which a molybdenum film or molybdenum nitride film is laminated on the molybdenum film or molybdenum nitride film, an aluminum film or copper film is laminated on the molybdenum film or molybdenum nitride film, and a molybdenum film or molybdenum nitride film is further formed thereon, etc. Note that a transparent conductive material containing indium oxide, tin oxide, or zinc oxide may be used.

[0226] 10A, regions 543a and 543b may be formed as low-resistance regions at and near the interface of the oxide 530 with the conductor 542a (conductor 542b). In this case, the region 543a functions as one of the source region and the drain region, and the region 543b functions as the other of the source region and the drain region. A channel formation region is formed in a region sandwiched between the regions 543a and 543b.

[0227] By providing the conductor 542a (conductor 542b) so as to be in contact with the oxide 530, the oxygen concentration in the region 543a (region 543b) may be reduced. Also, a metal compound layer containing a metal contained in the conductor 542a (conductor 542b) and a component of the oxide 530 may be formed in the region 543a (region 543b). In such a case, the carrier concentration in the region 543a (region 543b) increases, and the region 543a (region 543b) becomes a low-resistance region.

[0228] The insulator 544 is provided to cover the conductor 542a and the conductor 542b and suppresses oxidation of the conductor 542a and the conductor 542b. In this case, the insulator 544 may be provided to cover the side surface of the oxide 530 and to be in contact with the insulator 524.

[0229] The insulator 544 can be a metal oxide containing one or more selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, neodymium, lanthanum, magnesium, etc. In addition, the insulator 544 can also be made of silicon nitride oxide, silicon nitride, or the like.

[0230] In particular, it is preferable to use, as the insulator 544, an insulator containing an oxide of either or both of aluminum and hafnium, such as aluminum oxide, hafnium oxide, or an oxide containing aluminum and hafnium (hafnium aluminate). In particular, hafnium aluminate has higher heat resistance than a hafnium oxide film. Therefore, it is preferable because it is less likely to crystallize in a heat treatment in a later step. Note that the insulator 544 is not an essential component if the conductors 542a and 542b are oxidation-resistant or do not significantly decrease in conductivity even when they absorb oxygen. It may be designed appropriately depending on the desired transistor characteristics.

[0231] The insulator 544 can prevent impurities such as water and hydrogen contained in the insulator 580 from diffusing to the oxide 530b through the oxide 530c and the insulator 550. The insulator 544 can also prevent the conductor 560 from being oxidized by excess oxygen contained in the insulator 580.

[0232] The insulator 550 functions as a first gate insulating film. The insulator 550 is preferably disposed so as to be in contact with the inside (top and side surfaces) of the oxide 530c. The insulator 550 is preferably formed using an insulator that contains excess oxygen and releases oxygen by heating, similar to the insulator 524 described above.

[0233] Specifically, silicon oxide having excess oxygen, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, and silicon oxide having vacancies can be used. In particular, silicon oxide and silicon oxynitride are preferable because they are stable against heat.

[0234] By providing an insulator that releases oxygen when heated in contact with the top surface of the oxide 530c as the insulator 550, oxygen can be effectively supplied from the insulator 550 to the channel formation region of the oxide 530b through the oxide 530c. Similarly to the insulator 524, the concentration of impurities such as water or hydrogen in the insulator 550 is preferably reduced. The thickness of the insulator 550 is preferably 1 nm or more and 20 nm or less.

[0235] Furthermore, in order to efficiently supply excess oxygen contained in the insulator 550 to the oxide 530, a metal oxide may be provided between the insulator 550 and the conductor 560. The metal oxide preferably has a function of suppressing oxygen diffusion from the insulator 550 to the conductor 560. By providing a metal oxide having a function of suppressing oxygen diffusion, the diffusion of excess oxygen from the insulator 550 to the conductor 560 is suppressed. In other words, a decrease in the amount of excess oxygen supplied to the oxide 530 can be suppressed. Furthermore, oxidation of the conductor 560 due to the excess oxygen can be suppressed. As the metal oxide, a material that can be used for the insulator 544 may be used.

[0236] The insulator 550 may have a laminated structure, similar to the second gate insulating film. As transistors become smaller and more highly integrated, problems such as leakage current may occur due to the thinning of the gate insulating film. For this reason, by forming the insulator functioning as the gate insulating film into a laminated structure of a high-k material and a thermally stable material, it becomes possible to reduce the gate potential during transistor operation while maintaining the physical film thickness. In addition, a laminated structure that is thermally stable and has a high relative dielectric constant can be formed.

[0237] Although the conductor 560 functioning as the first gate electrode is shown as having a two-layer structure in FIGS. 10A and 10B, it may have a single-layer structure or a laminated structure of three or more layers.

[0238] The conductor 560a is a hydrogen atom, a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogen molecule, or a nitrogen oxide molecule (N 2 O, NO, NO 2 It is preferable to use a conductive material having a function of suppressing the diffusion of impurities such as copper atoms, etc., etc. Or, it is preferable to use a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, etc.). When the conductor 560a has a function of suppressing the diffusion of oxygen, it is possible to suppress the conductor 560b from being oxidized by the oxygen contained in the insulator 550 and the conductivity from decreasing. As a conductive material having a function of suppressing the diffusion of oxygen, for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide, etc. are preferably used. Also, an oxide semiconductor applicable to the oxide 530 can be used as the conductor 560a. In that case, the conductor 560b can be formed by a sputtering method to reduce the electrical resistance value of the conductor 560a to make it a conductor. This can be called an OC (Oxide Conductor) electrode.

[0239] The conductor 560b is preferably made of a conductive material containing tungsten, copper, or aluminum as a main component. Since the conductor 560b also functions as wiring, it is preferable to use a conductor having high conductivity. For example, a conductive material containing tungsten, copper, or aluminum as a main component can be used. The conductor 560b may have a layered structure, for example, a layered structure of titanium or titanium nitride and the above conductive material.

[0240] The insulator 580 is provided on the conductor 542a and the conductor 542b via the insulator 544. The insulator 580 preferably has an excess oxygen region. For example, the insulator 580 preferably has silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine has been added, silicon oxide to which carbon has been added, silicon oxide to which carbon and nitrogen have been added, silicon oxide having voids, or a resin. In particular, silicon oxide and silicon oxynitride are preferable because they are thermally stable. In particular, silicon oxide and silicon oxide having voids are preferable because they allow for the easy formation of an excess oxygen region in a later step.

[0241] The insulator 580 preferably has an excess oxygen region. By providing the insulator 580, from which oxygen is released by heating, to have a region in contact with the oxide 530c, oxygen in the insulator 580 can be efficiently supplied to the oxide 530a and the oxide 530b through the oxide 530c. Note that the concentration of impurities such as water or hydrogen in the insulator 580 is preferably reduced.

[0242] The opening of the insulator 580 is formed to overlap the region between the conductor 542a and the conductor 542b. As a result, the conductor 560 is formed so as to be embedded in the opening of the insulator 580 and the region sandwiched between the conductor 542a and the conductor 542b.

[0243] In miniaturizing a semiconductor device, it is necessary to shorten the gate length, but it is also necessary to prevent the conductivity of the conductor 560 from decreasing. If the film thickness of the conductor 560 is increased for that purpose, the conductor 560 may have a shape with a high aspect ratio. In this embodiment, the conductor 560 is provided so as to be embedded in the opening of the insulator 580. Therefore, even if the conductor 560 has a shape with a high aspect ratio, the conductor 560 can be formed without collapsing during the process.

[0244] The insulator 574 is preferably provided in contact with a top surface of the insulator 580, a top surface of the conductor 560, and a top surface of the insulator 550. By forming the insulator 574 by a sputtering method, excess oxygen regions can be provided in the insulator 550 and the insulator 580. This allows oxygen to be supplied from the excess oxygen regions into the oxide 530.

[0245] For example, the insulator 574 can be a metal oxide containing one or more elements selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium, and the like.

[0246] In particular, aluminum oxide has high barrier properties and can suppress the diffusion of hydrogen and nitrogen even in a thin film of 0.5 nm to 3.0 nm. Therefore, aluminum oxide formed by sputtering can function as a barrier film against impurities such as hydrogen as well as an oxygen source.

[0247] An insulator 581 functioning as an interlayer film is preferably provided over the insulator 574. Like the insulator 524 and the like, the insulator 581 preferably has a reduced concentration of impurities such as water or hydrogen.

[0248] Furthermore, conductor 540a and conductor 540b are arranged in openings formed in insulator 581, insulator 574, insulator 580, and insulator 544. Conductor 540a and conductor 540b are provided facing each other with conductor 560 interposed therebetween. Conductor 540a and conductor 540b have the same structure as conductor 546 and conductor 548, which will be described later.

[0249] An insulator 582 is provided over the insulator 581. The insulator 582 is preferably made of a substance that has a barrier property against oxygen and hydrogen. Therefore, the insulator 582 can be made of a material similar to that of the insulator 514. For example, the insulator 582 is preferably made of a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide.

[0250] In particular, aluminum oxide has a high blocking effect of preventing the permeation of both oxygen and impurities such as hydrogen and moisture, which are factors that cause fluctuations in the electrical characteristics of a transistor. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the transistor manufacturing process. In addition, aluminum oxide can suppress the release of oxygen from the oxide that constitutes the transistor 500. Therefore, aluminum oxide is suitable for use as a protective film for the transistor 500.

[0251] An insulator 586 is provided over the insulator 582. The insulator 586 can be formed using a material similar to that of the insulator 320. By using a material with a relatively low dielectric constant for these insulators, parasitic capacitance between wirings can be reduced. For example, the insulator 586 can be formed using a silicon oxide film, a silicon oxynitride film, or the like.

[0252] Furthermore, conductors 546, conductors 548, etc. are embedded in insulators 520, 522, 524, 544, 580, 574, 581, 582, and 586.

[0253] The conductor 546 and the conductor 548 function as a plug or a wiring connected to the capacitor 600, the transistor 500, or the transistor 300. The conductor 546 and the conductor 548 can be formed using a material similar to that of the conductor 328 or the conductor 330.

[0254] After the transistor 500 is formed, an opening may be formed to surround the transistor 500, and an insulator with high barrier properties against hydrogen or water may be formed to cover the opening. By surrounding the transistor 500 with the insulator with high barrier properties, it is possible to prevent moisture and hydrogen from entering from the outside. Alternatively, a plurality of transistors 500 may be collectively surrounded by an insulator with high barrier properties against hydrogen or water. When an opening is formed to surround the transistor 500, for example, it is preferable to form an opening that reaches the insulator 514 or the insulator 522 and form the insulator with high barrier properties in contact with the insulator 514 or the insulator 522, because this can serve as part of the manufacturing process of the transistor 500. As the insulator with high barrier properties against hydrogen or water, for example, a material similar to that of the insulator 522 may be used.

[0255] Next, a capacitor 600 is provided above the transistor 500. The capacitor 600 includes a conductor 610, a conductor 620, and an insulator 630.

[0256] A conductor 612 may be provided over the conductor 546 and the conductor 548. The conductor 612 functions as a plug or a wiring connected to the transistor 500. The conductor 610 functions as an electrode of the capacitor 600. Note that the conductor 612 and the conductor 610 can be formed at the same time.

[0257] A metal film containing an element selected from molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium, or a metal nitride film containing the above-mentioned element (tantalum nitride film, titanium nitride film, molybdenum nitride film, tungsten nitride film), or the like can be used for the conductor 612 and the conductor 610. Alternatively, a conductive material such as indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide with silicon oxide added can also be used.

[0258] 8, the conductor 612 and the conductor 610 have a single-layer structure, but are not limited to this structure and may have a stacked structure of two or more layers. For example, a conductor having barrier properties and a conductor having high adhesion to the conductor having high conductivity may be formed between a conductor having barrier properties and a conductor having high conductivity.

[0259] The conductor 620 is provided so as to overlap with the conductor 610 with the insulator 630 interposed therebetween. The conductor 620 can be made of a conductive material such as a metal material, an alloy material, or a metal oxide material. It is preferable to use a high-melting point material such as tungsten or molybdenum that has both heat resistance and conductivity, and it is particularly preferable to use tungsten. When the conductor 620 is formed simultaneously with other structures such as a conductor, a low-resistance metal material such as Cu (copper) or Al (aluminum) may be used.

[0260] An insulator 640 is provided over the conductor 620 and the insulator 630. The insulator 640 can be provided using a material similar to that of the insulator 320. The insulator 640 may also function as a planarizing film that covers the uneven shape underneath.

[0261] With this structure, miniaturization or high integration can be achieved in a semiconductor device including a transistor including an oxide semiconductor.

[0262] Figures 11A and 11B show modifications of the transistor 500 shown in Figures 10A and 10B. Note that the configurations shown in Figures 11A and 11B can also be applied to the transistor 300 and the like.

[0263] 11A is a cross-sectional view of the transistor 500 in the channel length direction, and FIG. 11B is a cross-sectional view of the transistor 500 in the channel width direction. The transistor 500 shown in FIGS. 11A and 11B differs from the transistor 500 shown in FIGS. 10A and 10B in that the transistor 500 includes an insulator 402 and an insulator 404. The transistor 500 also differs from the transistor 500 shown in FIGS. 10A and 10B in that an insulator 552 is provided in contact with a side surface of the conductor 540a and an insulator 552 is provided in contact with a side surface of the conductor 540b. The transistor 500 also differs from the transistor 500 shown in FIGS. 10A and 10B in that the transistor 500 does not include an insulator 520.

[0264] 11A and 11B, the insulator 402 is provided over the insulator 512. Furthermore, the insulator 404 is provided over the insulator 574 and the insulator 402.

[0265] 11A and 11B, the insulator 514, the insulator 516, the insulator 522, the insulator 524, the insulator 544, the insulator 580, and the insulator 574 are patterned, and the insulator 404 covers them. That is, the insulator 404 is in contact with the top surface of the insulator 574, the side surface of the insulator 574, the side surface of the insulator 580, the side surface of the insulator 544, the side surface of the insulator 524, the side surface of the insulator 522, the side surface of the insulator 516, the side surface of the insulator 514, and the top surface of the insulator 402. As a result, the oxide 530 and the like are isolated from the outside by the insulator 404 and the insulator 402.

[0266] The insulators 402 and 404 preferably have a high function of suppressing diffusion of hydrogen (e.g., at least one of hydrogen atoms, hydrogen molecules, and the like) or water molecules. For example, silicon nitride or silicon nitride oxide, which are materials with high hydrogen barrier properties, are preferably used for the insulators 402 and 404. This can suppress diffusion of hydrogen and the like into the oxide 530, thereby suppressing deterioration of the characteristics of the transistor 500.

[0267] The insulator 552 is provided in contact with the insulator 581, the insulator 404, the insulator 574, the insulator 580, and the insulator 544. The insulator 552 preferably has a function of suppressing diffusion of hydrogen or water molecules. For example, the insulator 552 is preferably made of an insulator having a high hydrogen barrier property, such as silicon nitride, aluminum oxide, or silicon nitride oxide. In particular, silicon nitride is a material having a high hydrogen barrier property and is therefore suitable for use as the insulator 552. By using a material having a high hydrogen barrier property as the insulator 552, it is possible to suppress diffusion of impurities such as water or hydrogen from the insulator 580 or the like to the oxide 530 through the conductor 540a and the conductor 540b. It is also possible to suppress absorption of oxygen contained in the insulator 580 by the conductor 540a and the conductor 540b.

[0268] 12 is a cross-sectional view illustrating a configuration example of a semiconductor device in which the transistor 500 and the transistor 300 have the configurations shown in FIGS.

[0269] 13A and 13B are modifications of the transistor shown in FIG. 11A and FIG. 11B. FIG. 13A is a cross-sectional view of the transistor in the channel length direction, and FIG. 13B is a cross-sectional view of the transistor in the channel width direction. The transistor shown in FIG. 13A and FIG. 13B is different from the transistor shown in FIG. 11A and FIG. 11B in that the oxide 530c has a two-layer structure of an oxide 530c1 and an oxide 530c2.

[0270] The oxide 530c1 is in contact with the top surface of the insulator 524, the side surface of the oxide 530a, the top surface and side surface of the oxide 530b, the side surfaces of the conductors 542a and 542b, the side surface of the insulator 544, and the side surface of the insulator 580. The oxide 530c2 is in contact with the insulator 550.

[0271] The oxide 530c1 may be, for example, an In-Zn oxide. The oxide 530c2 may be the same material as that used for the oxide 530c when the oxide 530c has a single-layer structure. For example, the oxide 530c2 may be a metal oxide with an atomic ratio of n:Ga:Zn=1:3:4, Ga:Zn=2:1, or Ga:Zn=2:5.

[0272] By forming the oxide 530c in a two-layer structure of the oxide 530c1 and the oxide 530c2, the on-current of the transistor can be increased compared to when the oxide 530c has a single-layer structure. Therefore, the transistor can be, for example, a power MOS transistor. The oxide 530c of the transistor shown in FIG. 10A and FIG. 10B can also have a two-layer structure of the oxide 530c1 and the oxide 530c2.

[0273] 13A and 13B can be applied to transistors other than the transistor 500 and the transistor 300. In addition, the configurations shown in FIG.

[0274] 14 is a cross-sectional view illustrating an example of a configuration of a semiconductor device in which the transistor 500 has the configuration shown in FIGS. 10A and 10B and the transistor 300 has the configuration shown in FIGS. 13A and 13B. Note that, as in the case of FIG. 12, an insulator 552 is provided on a side surface of a conductor 546. As shown in FIG. 14, while both the transistor 300 and the transistor 500 are OS transistors, the transistor 300 and the transistor 500 can have different configurations.

[0275] This embodiment mode can be implemented in appropriate combination with configurations described in other embodiment modes or the like.

[0276] (Embodiment 6) An example of a cylindrical secondary battery will be described with reference to Figures 16A and 16B. As shown in Figure 16B, a cylindrical secondary battery 616 has a positive electrode cap (battery lid) 601 on the top surface, and a battery can (external can) 602 on the side and bottom surfaces. The positive electrode cap and battery can (external can) 602 are insulated by a gasket (insulating packing) 610.

[0277] FIG. 16B is a schematic diagram showing a cross section of a cylindrical secondary battery. Inside a hollow cylindrical battery can 602, a battery element is provided in which a strip-shaped positive electrode 604 and a negative electrode 606 are wound with a separator 605 sandwiched therebetween. Although not shown, the battery element is wound around a center pin. One end of the battery can 602 is closed and the other end is open. For the battery can 602, metals such as nickel, aluminum, and titanium that are resistant to corrosion by the electrolyte, or alloys of these metals and other metals (e.g., stainless steel, etc.) can be used. In addition, it is preferable to coat the battery can 602 with nickel, aluminum, etc. to prevent corrosion by the electrolyte. Inside the battery can 602, the battery element in which the positive electrode, negative electrode, and separator are wound is sandwiched between a pair of opposing insulating plates 608 and 609. In addition, a nonaqueous electrolyte (not shown) is injected into the inside of the battery can 602 in which the battery element is provided. The secondary battery is lithium cobalt oxide (LiCoO 2 ) and lithium iron phosphate (LiFePO 4 The positive electrode contains active materials such as lithium ions, the negative electrode is made of carbon materials such as graphite that can absorb and release lithium ions, and the organic solvent such as ethylene carbonate or diethyl carbonate is mixed with LiBF 4 or LiPF 6 The lithium salt may be a non-aqueous electrolyte solution.

[0278] Since the positive and negative electrodes used in a cylindrical storage battery are wound, it is preferable to form an active material on both sides of the current collector. A positive electrode terminal (positive electrode current collector lead) 603 is connected to the positive electrode 604, and a negative electrode terminal (negative electrode current collector lead) 607 is connected to the negative electrode 606. Both the positive electrode terminal 603 and the negative electrode terminal 607 can be made of a metal material such as aluminum. The positive electrode terminal 603 is resistance-welded to a safety valve mechanism 617, and the negative electrode terminal 607 is resistance-welded to the bottom of the battery can 602. The safety valve mechanism 617 is electrically connected to the positive electrode cap 601 via a PTC element (Positive Temperature Coefficient) 611. The safety valve mechanism 617 cuts off the electrical connection between the positive electrode cap 601 and the positive electrode 604 when the rise in the internal pressure of the battery exceeds a predetermined threshold value. The PTC element 611 is a thermosensitive resistor whose resistance increases when the temperature rises, and the increase in resistance limits the amount of current to prevent abnormal heat generation. The PTC element is made of barium titanate (BaTiO 3 )-based semiconductor ceramics, etc. can be used.

[0279] A lithium ion secondary battery using an electrolyte has a positive electrode, a negative electrode, a separator, an electrolyte, and an exterior body. In a lithium ion secondary battery, the anode (positive electrode) and the cathode (negative electrode) are interchanged during charging and discharging, and the oxidation reaction and the reduction reaction are interchanged, so the electrode with a high reaction potential is called the positive electrode, and the electrode with a low reaction potential is called the negative electrode. Therefore, in this specification, the positive electrode is called the "positive electrode" or "+ electrode (plus electrode)" and the negative electrode is called the "negative electrode" or "- electrode (minus electrode)" whether during charging, discharging, when a reverse pulse current is applied, or when a charging current is applied. If the terms anode (positive electrode) and cathode (negative electrode) related to the oxidation reaction and reduction reaction are used, they may be reversed during charging and discharging, which may cause confusion. Therefore, the terms anode (positive electrode) and cathode (negative electrode) are not used in this specification. If the terms anode and cathode are used, it should be specified whether they are used during charging or discharging, and also whether they correspond to the positive electrode (plus) or negative electrode (minus).

[0280] A charger is connected to the two terminals shown in FIG. 16C, and the storage battery 1400 is charged. The storage battery 1400 has a separator 1408 and an electrolyte 1406 between a positive electrode 1402 and a negative electrode 1404. As the charging of the storage battery 1400 progresses, the potential difference between the electrodes increases. In FIG. 16C, the direction of the current flowing from the external terminal of the storage battery 1400 to the positive electrode 1402, from the positive electrode 1402 to the negative electrode 1404 inside the storage battery 1400, and from the negative electrode to the external terminal of the storage battery 1400 is defined as the positive direction. In other words, the direction of the charging current is defined as the current direction.

[0281] In this embodiment, an example of a lithium ion secondary battery is shown, but the present invention is not limited to lithium ion secondary batteries, and a material having element A, element X, and oxygen can be used as a positive electrode material for a secondary battery. Element A is preferably one or more selected from Group 1 elements and Group 2 elements. As Group 1 elements, for example, alkali metals such as lithium, sodium, and potassium can be used. Furthermore, as Group 2 elements, for example, calcium, beryllium, and magnesium can be used. As element X, for example, one or more selected from metal elements, silicon, and phosphorus can be used. Furthermore, element X is preferably one or more selected from cobalt, nickel, manganese, iron, and vanadium. Representative examples include lithium cobalt composite oxide (LiCoO 2 ) and lithium iron phosphate (LiFePO 4 ) are mentioned.

[0282] The negative electrode includes a negative electrode active material layer and a negative electrode current collector. The negative electrode active material layer may include a conductive assistant and a binder.

[0283] As the negative electrode active material, an element capable of carrying out a charge / discharge reaction by alloying / dealloying with lithium can be used. For example, a material containing at least one of silicon, tin, gallium, aluminum, germanium, lead, antimony, bismuth, silver, zinc, cadmium, indium, etc. can be used. Such elements have a larger capacity than carbon, and silicon in particular has a high theoretical capacity of 4200mAh / g.

[0284] The secondary battery preferably has a separator, which may be made of, for example, cellulose-containing fibers such as paper, nonwoven fabric, glass fiber, ceramics, or synthetic fibers such as nylon (polyamide), vinylon (polyvinyl alcohol-based fiber), polyester, acrylic, polyolefin, or polyurethane.

[0285] 15 illustrates an example of a vehicle using an anomaly detection system for a secondary battery according to one embodiment of the present invention. A secondary battery module pack 8024 of an automobile 8400 illustrated in FIG. 15A can supply power to a light-emitting device such as a headlight 8401 or a room light (not shown) in addition to driving an electric motor 8406. The secondary battery module pack 8024 of the automobile 8400 may be a battery pack in which a plurality of cylindrical secondary batteries 616 illustrated in FIG. 16B are arranged and sandwiched between a first conductive plate and a second conductive plate.

[0286] The secondary batteries 616 may be connected in parallel, in series, or in parallel and then in series. By configuring a secondary battery module pack 8024 having the secondary batteries 616, a large amount of power can be extracted.

[0287] In order to cut off the power from multiple secondary batteries in a vehicle, a service plug or circuit breaker that can cut off high voltage without using tools is provided. For example, when 48 battery module packs each having 2 to 10 cells are connected in series, a service plug or circuit breaker is provided between the 24th and 25th cells.

[0288] The automobile 8500 shown in FIG. 15B can charge the secondary battery of the automobile 8500 by receiving power supply from an external charging facility by a plug-in method, a non-contact power supply method, or the like. FIG. 15B shows a state in which charging is being performed from a ground-mounted charging device 8021 to a secondary battery module pack 8024 mounted on the automobile 8500 via a cable 8022. When charging, the charging method and connector standards may be appropriately performed by a predetermined method such as CHAdeMO (registered trademark) or Combo. The charging device 8021 may be a charging station installed in a commercial facility, or may be a home power source. For example, the secondary battery module pack 8024 mounted on the automobile 8500 can be charged by an external power supply using plug-in technology. Charging can be performed by converting AC power to DC power via a conversion device such as an ACDC converter.

[0289] Although not shown, a power receiving device may be mounted on a vehicle, and charging may be performed by supplying power contactlessly from a ground power transmitting device. In the case of this contactless power supply method, by incorporating a power transmitting device in a road or an exterior wall, charging may be performed not only while the vehicle is stopped but also while the vehicle is moving. This contactless power supply method may also be used to transmit and receive power between vehicles. Furthermore, a solar cell may be provided on the exterior of the vehicle, and a secondary battery may be charged while the vehicle is stopped or moving. For such contactless power supply, an electromagnetic induction method or a magnetic field resonance method may be used.

[0290] 15C is an example of a two-wheeled vehicle using the abnormality detection system for a secondary battery of one embodiment of the present invention. A scooter 8600 shown in FIG. 15C includes a secondary battery module pack 8602, a side mirror 8601, and a turn signal light 8603. The secondary battery module pack 8602 can supply electricity to the turn signal light 8603.

[0291] 15C, the secondary battery module pack 8602 can be stored in the under-seat storage 8604. The secondary battery module pack 8602 can be stored in the under-seat storage 8604 even if the under-seat storage 8604 is small. This embodiment can also be applied to a power source for a snowmobile or a jet ski instead of a scooter. The protection circuit module detects an abnormality in the secondary battery module pack 8602 early and warns the user, thereby ensuring safety.

[0292] This embodiment mode can be appropriately combined with the descriptions of other embodiment modes. [Explanation of symbols]

[0293] 11: Protection circuit, 12: Shutdown switch, 13: Protection circuit, 14: Charging control circuit, 15: Shutdown switch, 16: Control circuit, 17: Control circuit, 18: Comparison circuit, 19: AD converter, 21: Protection circuit, 22: Shutdown switch, 26: Control circuit, 28: Comparison circuit, 30: Neural network unit, 31: State estimation unit, 32: Behavior estimation unit, 50: Secondary battery, 51: Power supply SW, 52: No-off CPU, 53: BTOS, 54: Battery pack, 55: ADC, 56: ADC, 100: Protection circuit, 102: Comparison circuit, 103: Memory, 104: Memory, 105: Power cutoff switch, 106: control circuit, 300: transistor, 311: substrate, 313: semiconductor region, 314a: low resistance region, 314b: low resistance region, 315: insulator, 316: conductor, 320: insulator, 322: insulator, 324: insulator, 326: insulator, 328: conductor, 330: conductor, 350: insulator, 352: insulator, 354: insulator, 356: conductor, 360: insulator, 362: insulator, 364: insulator, 366: conductor, 370: insulator, 372: insulator, 374: insulator, 376: conductor, 380: insulator, 382: insulator, 384: insulator edge, 386: conductor, 402: insulator, 404: insulator, 410: memory element, 420: memory element, 430: memory element, 440: memory element, 450: memory element, 460: memory element, 470: memory element, 500: transistor, 503: conductor, 503a: conductor, 503b: conductor, 510: insulator, 512: insulator, 514: insulator, 516: insulator, 518: conductor, 520: insulator, 522: insulator, 524: insulator, 526: insulator, 530: oxide, 530a: oxide, 530b: oxide, 530c: oxide, 530c1: oxide, 530c2 : oxide, 540a: conductor, 540b: conductor, 542: conductor, 542a: conductor, 542b: conductor, 543a: region, 543b: region, 544: insulator, 546: conductor, 548: conductor, 550: insulator, 552: insulator, 560: conductor, 560a: conductor, 560b: conductor, 574: insulator, 580: insulator, 581: insulator, 582: insulator, 586: insulator, 600: capacitance element, 601: positive electrode cap, 602: battery can, 603: positive electrode terminal, 604: positive electrode, 605: separator, 606: negative electrode, 607: negative electrode terminal, 608: insulating plate,609: insulating plate, 610: conductor, 611: PTC element, 612: conductor, 616: secondary battery, 617: safety valve mechanism, 620: conductor, 630: insulator, 640: insulator, 1400: storage battery, 1402: positive electrode, 1404: negative electrode, 8021: charging device, 8022: cable, 8024: secondary battery module pack, 8400: automobile, 8401: headlight, 8406: electric motor, 8500: automobile, 8600: scooter, 8601: side mirror, 8602: secondary battery module pack, 8603: turn signal light, 8604: under-seat storage,

Claims

1. A charge control circuit electrically connected to the secondary battery; a first cutoff switch electrically connected between the secondary battery and the charge control circuit; a second cutoff switch electrically connected between the first cutoff switch and the charge control circuit; a first protection circuit that detects an abnormality during charging of the secondary battery; a second protection circuit that detects an abnormality when the secondary battery is being charged and discharged; the first protection circuit includes the first cutoff switch, a first control circuit having a function of controlling cutoff of the first cutoff switch, and a comparison circuit electrically connected to the secondary battery and including a first transistor; the second protection circuit includes the second cutoff switch, a second control circuit having a function of controlling cutoff of the second cutoff switch, and an AD converter electrically connected to the secondary battery; the second control circuit has an arithmetic circuit that calculates an output voltage of the secondary battery based on a value digitized by the AD converter; the abnormality during charging of the secondary battery detected by the first protection circuit is a first micro-short circuit, the abnormality detected by the second protection circuit during charging of the secondary battery is a second micro-short circuit which causes a more gradual change in voltage than the first micro-short circuit; Secondary battery abnormality detection system.

2. A charge control circuit electrically connected to the secondary battery; a first cutoff switch electrically connected between the secondary battery and the charge control circuit; a second cutoff switch electrically connected between the first cutoff switch and the charge control circuit; a first protection circuit that detects an abnormality during charging of the secondary battery; a second protection circuit that detects an abnormality when the secondary battery is being charged and discharged; the first protection circuit includes the first cutoff switch, a first control circuit having a function of controlling cutoff of the first cutoff switch, and a comparison circuit electrically connected to the secondary battery and including a first transistor; the second protection circuit includes the second cutoff switch, a second control circuit having a function of controlling cutoff of the second cutoff switch, and an AD converter electrically connected to the secondary battery; the second control circuit has an arithmetic circuit that calculates an output voltage of the secondary battery based on a value digitized by the AD converter, and a means for issuing an alarm of an abnormality; the abnormality during charging of the secondary battery detected by the first protection circuit is a first micro-short circuit, the abnormality detected by the second protection circuit during charging of the secondary battery is a second micro-short circuit which causes a more gradual change in voltage than the first micro-short circuit; Secondary battery abnormality detection system.

3. A charge control circuit electrically connected to the secondary battery; a first cutoff switch electrically connected between the secondary battery and the charge control circuit; a second cutoff switch electrically connected between the first cutoff switch and the charge control circuit; a first protection circuit that detects an abnormality during charging of the secondary battery; a second protection circuit that detects an abnormality when the secondary battery is being charged and discharged; the first protection circuit includes the first cutoff switch, a first control circuit having a function of controlling cutoff of the first cutoff switch, and a comparison circuit electrically connected to the secondary battery and including a first transistor; the second protection circuit includes the second cutoff switch, a second control circuit having a function of controlling cutoff of the second cutoff switch, and an AD converter electrically connected to the secondary battery; the second control circuit has an arithmetic circuit that calculates an output voltage of the secondary battery based on a value digitized by the AD converter; the estimation of the state of the secondary battery using the first protection circuit and the second protection circuit is performed using an electric circuit model; the abnormality during charging of the secondary battery detected by the first protection circuit is a first micro-short circuit, the abnormality detected by the second protection circuit during charging of the secondary battery is a second micro-short circuit which causes a more gradual change in voltage than the first micro-short circuit; Secondary battery abnormality detection system.

4. A charge control circuit electrically connected to the secondary battery; a first cutoff switch electrically connected between the secondary battery and the charge control circuit; a second cutoff switch electrically connected between the first cutoff switch and the charge control circuit; a first protection circuit that detects an abnormality during charging of the secondary battery; a second protection circuit that detects an abnormality when the secondary battery is being charged and discharged; A neural network unit, the first protection circuit includes the first cutoff switch, a first control circuit having a function of controlling cutoff of the first cutoff switch, and a comparison circuit electrically connected to the secondary battery and including a first transistor; the second protection circuit includes the second cutoff switch, a second control circuit having a function of controlling cutoff of the second cutoff switch, and an AD converter electrically connected to the secondary battery; the second control circuit has an arithmetic circuit that calculates an output voltage of the secondary battery based on a value digitized by the AD converter; a function of estimating a state of the secondary battery while using the neural network unit, the abnormality during charging of the secondary battery detected by the first protection circuit is a first micro-short circuit, the abnormality detected by the second protection circuit during charging of the secondary battery is a second micro-short circuit which causes a more gradual change in voltage than the first micro-short circuit; Secondary battery abnormality detection system.

5. In any one of claims 1 to 4, the first blocking switch has a second transistor; The second transistor has an oxide semiconductor.

6. In any one of claims 1 to 4, the first blocking switch has a second transistor; the second transistor includes an oxide semiconductor; The oxide semiconductor includes In, Ga, and Zn.

7. In any one of claims 1 to 6, the second blocking switch has a third transistor; The third transistor has an oxide semiconductor.

8. In any one of claims 1 to 6, the second blocking switch has a third transistor; the third transistor includes an oxide semiconductor; The oxide semiconductor includes In, Ga, and Zn.

9. In any one of claims 1 to 8, The second protection circuit detects an abnormality by calculating a capacity using a coulomb counter during charging and discharging.

10. A charge control circuit electrically connected to the secondary battery; a first cutoff switch electrically connected between the secondary battery and the charge control circuit; a second cutoff switch electrically connected between the first cutoff switch and the charge control circuit; a first protection circuit that detects an abnormality during charging of the secondary battery; a second protection circuit that detects an abnormality when the secondary battery is being charged and discharged; the first protection circuit includes the first cutoff switch, a first control circuit having a function of controlling cutoff of the first cutoff switch, and a comparison circuit electrically connected to the secondary battery and including a first transistor; the second protection circuit includes the second cutoff switch, a second control circuit having a function of controlling cutoff of the second cutoff switch, and an AD converter electrically connected to the secondary battery; the second control circuit has an arithmetic circuit that calculates an output voltage of the secondary battery based on the value digitized by the AD converter; Secondary battery protection circuit.

11. In claim 10, the first blocking switch has a second transistor; The second transistor includes an oxide semiconductor.

12. In claim 10, the first blocking switch has a second transistor; the second transistor includes an oxide semiconductor; The protection circuit for a secondary battery, wherein the oxide semiconductor contains In, Ga, and Zn.

13. In any one of claims 10 to 12, the second blocking switch has a third transistor; The protection circuit for a secondary battery, wherein the third transistor has an oxide semiconductor.

14. In any one of claims 10 to 12, the second blocking switch has a third transistor; the third transistor includes an oxide semiconductor; The protection circuit for a secondary battery, wherein the oxide semiconductor contains In, Ga, and Zn.

Images