Imaging device

Abstract

The imaging device according to an embodiment has a first substrate, a second substrate, wiring, and a trench. The first substrate has pixels each having a photodiode and a floating diffusion for holding a charge converted by the photodiode. The second substrate has a pixel circuit for reading a pixel signal based on the charges held by the floating diffusions in the pixels, the second substrate being stacked on the first substrate. The wiring penetrates through the first substrate and the second substrate in the stacking direction, and establishes an electrical connection between the floating diffusions in the first substrate and an amplifying transistor in the pixel circuit of the second substrate. The trench is formed at least in the second substrate so as to extend parallel to the wiring, the trench having a depth equal to or greater than the thickness of a semiconductor layer in the second substrate.

Description

[Technical field]

[0001] The present disclosure relates to an imaging device. [Background technology]

[0002] Conventionally, miniaturization of the area per pixel of a two-dimensional imaging device has been achieved by introducing a microprocess and improving the mounting density. In recent years, imaging devices with a three-dimensional structure have been developed to further miniaturize imaging devices and increase the density of pixels. In an imaging device with a three-dimensional structure, for example, a semiconductor substrate having a plurality of sensor pixels and a semiconductor substrate having a signal processing circuit for processing signals obtained by each sensor pixel are stacked on top of each other. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-245506 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in a three-dimensional imaging device, when semiconductor chips are stacked in three layers, it is not possible to bond all of the semiconductor substrates with their front surfaces together. If semiconductor substrates are stacked in three layers without any consideration, the structure for electrically connecting the semiconductor substrates may result in an increase in chip size or an impediment to miniaturization of the area per pixel. Therefore, it is desirable to provide an imaging device with a three-layer structure that has the same chip size as before and does not impede miniaturization of the area per pixel.

[0005] Furthermore, the imaging device is not limited to a three-layer structure, and the floating diffusion in the pixel and the gate of the amplification transistor in the pixel circuit are connected by a connection via as FD wiring. In a fine pixel, the area of ​​the connection via of the FD wiring is about 45%. As a result, the effective area of ​​the pixel circuit becomes smaller, and the layout area of ​​the amplification transistor cannot be expanded. [Means for solving the problem]

[0006] In order to solve the above problem, an imaging device according to an embodiment of the present disclosure includes a first substrate, a second substrate, wiring, and a trench. The first substrate includes a pixel having a photodiode and a floating diffusion that holds a charge converted by the photodiode. The second substrate includes a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, and is stacked on the first substrate. The wiring penetrates the first substrate and the second substrate in the stacking direction, and electrically connects between the floating diffusion in the first substrate and an amplifying transistor in the pixel circuit of the second substrate. The trench is formed at least in the second substrate, runs parallel to the wiring, and has a depth equal to or greater than the thickness of a semiconductor layer in the second substrate. Effect of the Invention

[0007] By reducing the parasitic capacitance of the wiring, the charge-to-voltage conversion efficiency can be improved. [Brief description of the drawings]

[0008] [Figure 1] 1 is a block diagram illustrating an example of a functional configuration of an imaging device according to an embodiment of the present disclosure. [Diagram 2] 2 is a plan view showing a schematic configuration of the imaging device shown in FIG. [Diagram 3] FIG. 3 is a schematic diagram illustrating a cross-sectional configuration taken along line III-III′ shown in FIG. 2. [Figure 4] 2 is an equivalent circuit diagram of the pixel sharing unit shown in FIG. 1. [Diagram 5] 10 is a diagram illustrating an example of a connection mode between a plurality of pixel sharing units and a plurality of vertical signal lines. [Figure 6] 4 is a schematic cross-sectional view illustrating an example of a specific configuration of the imaging device illustrated in FIG. 3. [Figure 7A] 7 is a schematic diagram illustrating an example of a planar configuration of a main part of a first substrate illustrated in FIG. 6. [Figure 7B] 7B is a schematic diagram showing a planar configuration of a pad portion together with a main portion of the first substrate shown in FIG. 7A. [Figure 8] 7 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) illustrated in FIG. 6. FIG. [Figure 9] 7 is a schematic diagram illustrating an example of a planar configuration of a pixel circuit and a main part of a first substrate together with a first wiring layer illustrated in FIG. 6. [Figure 10] 7 is a schematic diagram illustrating an example of a planar configuration of a first wiring layer and a second wiring layer illustrated in FIG. 6. [Figure 11] 7 is a schematic diagram illustrating an example of a planar configuration of the second wiring layer and the third wiring layer illustrated in FIG. 6. [Figure 12] 7 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer and a fourth wiring layer illustrated in FIG. 6. [Figure 13] 4 is a schematic diagram for explaining a path of an input signal to the imaging device shown in FIG. 3. [Figure 14] 4 is a schematic diagram for explaining a signal path of a pixel signal in the imaging device shown in FIG. 3. [Figure 15] 9 is a schematic diagram illustrating a modified example of the planar configuration of the second substrate (semiconductor layer) shown in FIG. 8. FIG. [Figure 16] 16 is a schematic diagram showing a planar configuration of a first wiring layer and a main part of a first substrate together with the pixel circuit shown in FIG. 15. [Figure 17] 17 is a schematic diagram illustrating an example of a planar configuration of a second wiring layer together with the first wiring layer illustrated in FIG. 16. [Figure 18] 18 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer together with the second wiring layer illustrated in FIG. 17. [Figure 19]19 is a schematic diagram illustrating an example of a planar configuration of a fourth wiring layer together with the third wiring layer illustrated in FIG. 18. [Figure 20] 7B is a schematic diagram illustrating a modified example of the planar configuration of the first substrate shown in FIG. 7A. [Figure 21] 21 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate illustrated in FIG. 20. FIG. [Figure 22] 22 is a schematic diagram illustrating an example of a planar configuration of a first wiring layer together with the pixel circuit illustrated in FIG. 21. FIG. [Figure 23] 23 is a schematic diagram illustrating an example of a planar configuration of a second wiring layer together with the first wiring layer illustrated in FIG. 22. [Figure 24] 24 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer together with the second wiring layer illustrated in FIG. 23. FIG. [Diagram 25] 25 is a schematic diagram illustrating an example of a planar configuration of a fourth wiring layer together with the third wiring layer illustrated in FIG. 24. [Figure 26] 21 is a schematic diagram illustrating another example of the planar configuration of the first substrate shown in FIG. 20. [Figure 27] 27 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate illustrated in FIG. 26. FIG. [Figure 28] 28 is a schematic diagram illustrating an example of a planar configuration of a first wiring layer together with the pixel circuit illustrated in FIG. 27. [Figure 29] 29 is a schematic diagram illustrating an example of a planar configuration of a second wiring layer together with the first wiring layer illustrated in FIG. 28. [Diagram 30] 30 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer together with the second wiring layer illustrated in FIG. 29. [Diagram 31] 31 is a schematic diagram illustrating an example of a planar configuration of a fourth wiring layer together with the third wiring layer illustrated in FIG. 30. FIG. [Diagram 32] 4 is a schematic cross-sectional view illustrating another example of the imaging device illustrated in FIG. 3. [Diagram 33] 33 is a schematic diagram for explaining a path of an input signal to the imaging device shown in FIG. 32. FIG. [Diagram 34]33 is a schematic diagram for explaining a signal path of a pixel signal in the imaging device shown in FIG. 32. FIG. [Diagram 35] 7 is a schematic cross-sectional view illustrating another example of the imaging device illustrated in FIG. 6. [Diagram 36] 5 is a diagram illustrating another example of the equivalent circuit illustrated in FIG. [Figure 37] FIG. 7B is a schematic plan view illustrating another example of the pixel separating portion shown in FIG. 7A etc. [Figure 38] FIG. 11 is an equivalent circuit diagram showing an example of the configuration of a pixel sharing unit in an imaging device according to embodiment 2-1. [Figure 39] 2 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate and a second substrate according to embodiment 2-1. FIG. [Diagram 40] FIG. 2 is a schematic diagram showing an example of a laminated structure of a first substrate and a second substrate. [Diagram 41] 1 is a schematic diagram showing an example of the arrangement of trenches T1 on the surface of a second substrate. FIG. [Diagram 42] 10 is a schematic diagram showing an example of the arrangement of trenches T2 on the surface of a second substrate. FIG. [Diagram 43] 13 is a schematic diagram showing an example of the arrangement of trenches T3 on the surface of a second substrate. FIG. [Diagram 44] 13 is a schematic diagram showing an example of the arrangement of trenches T4 on the surface of a second substrate. FIG. [Diagram 45] FIG. 11 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate and a second substrate in embodiment 2-2. [Figure 46A] 13 is a schematic diagram showing an example of the arrangement of trenches T5 on the surface of a second substrate. FIG. [Figure 46B] 1 is a schematic diagram showing an example of the arrangement of trenches T10 on the surface of a second substrate. FIG. [Figure 46C] 1 is a schematic diagram showing an example of the arrangement of trenches T11 on the surface of a second substrate. FIG. [Figure 46D] 1 is a schematic diagram showing an example of the arrangement of trenches T12 on the surface of a second substrate. FIG. [Figure 46E] 13 is a schematic diagram showing an example of the arrangement of trenches T13 on the surface of the second substrate. FIG. [Figure 46F]13 is a schematic diagram showing an example of the arrangement of trenches T14 on the surface of the second substrate. FIG. [Figure 46G] 13 is a schematic diagram showing an example of the arrangement of trenches T15 on the surface of the second substrate. FIG. [Fig. 46H] 1 is a schematic diagram showing an example of the arrangement of trenches T16 on the surface of a second substrate. FIG. [Figure 47] 13 is a schematic diagram showing an example of a cross-sectional shape of a trench T5. FIG. [Figure 48A] FIG. 11 is an equivalent circuit diagram showing an example of the configuration of a pixel sharing unit in an imaging device according to embodiment 2-3. [Figure 48B] FIG. 13 is an equivalent circuit diagram showing another example of the configuration of the pixel sharing unit in the imaging device according to embodiment 2-3. [Figure 49] 13 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate and a second substrate according to embodiment 2-3. FIG. [Figure 50A] FIG. 11 is an equivalent circuit diagram showing an example of the configuration of a plurality of pixel circuits on a second substrate in accordance with embodiment 3-1. [Figure 50B] FIG. 2 is a schematic configuration block diagram of a column signal processing unit according to a first embodiment. [Figure 50C] FIG. 11 is a schematic configuration block diagram of a column signal processing unit according to a second embodiment. [Figure 50D] FIG. 2 is an explanatory diagram of a first configuration example of a comparator. [Figure 50E] FIG. 11 is an explanatory diagram of a second configuration example of the comparator. [Figure 50F] FIG. 13 is an explanatory diagram of a third configuration example of the comparator. [Figure 50G] FIG. 13 is a schematic configuration block diagram of a column signal processing unit according to a third embodiment. [Figure 50H] FIG. 13 is an explanatory diagram of a configuration example of a comparator according to the third embodiment; [Fig. 50I] FIG. 13 is a schematic configuration block diagram of a column signal processing unit according to a fourth embodiment. [Fig. 50J] FIG. 2 is an explanatory diagram of a configuration example of a pre-circuit; [Figure 51] 3 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate and a second substrate according to embodiment 3-1. FIG. [Figure 52]FIG. 2 is a schematic diagram showing an example of a planar configuration of a pixel circuit. [Figure 53] 53 is a schematic diagram showing an example of a planar configuration in which an FD line FDL and a shield line SL2 are overlapped on the surface of the pixel circuit shown in FIG. 52. [Figure 54] 3 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate and a second substrate according to embodiment 3-2. FIG. [Figure 55] FIG. 13 is an equivalent circuit diagram showing an example of the configuration of a plurality of pixel circuits on a second substrate in accordance with embodiment 3-3. [Figure 56] FIG. 11 is an equivalent circuit diagram showing an example of the configuration of a pixel sharing unit of a global shutter type imaging device according to embodiment 3-4. [Figure 57] FIG. 13 is an equivalent circuit diagram showing an example of the configuration of a pixel shared unit of a memory-retention type global shutter imaging device according to an embodiment 3-5. [Figure 58] FIG. 1 is a diagram illustrating an example of a schematic configuration of an imaging system including an imaging device according to the above embodiment and its modified example. [Figure 59] 59 is a diagram showing an example of an imaging procedure of the imaging system shown in FIG. 58. [Figure 60] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Figure 61] 4 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit; FIG. [Figure 62] 1 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system. [Figure 63] 2 is a block diagram showing an example of a functional configuration of a camera head and a CCU. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the following embodiments, the same components are designated by the same reference numerals, and duplicated descriptions will be omitted.

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The description will be made in the following order. 1. First embodiment (imaging device having a stacked structure of three substrates) 2. Modification 1 (Planar Configuration Example 1) 3. Modification 2 (Planar Configuration Example 2) 4. Modification 3 (Planar Configuration Example 3) 5. Modification 4 (Example in which a contact portion between substrates is provided in the center of the pixel array portion) 6. Modification 5 (Example having planar type transfer transistor) 7. Modification 6 (Example in which one pixel is connected to one pixel circuit) 8. Modification 7 (Example of the configuration of the pixel separation unit) 9. Second Embodiment 9.1 Problems to be solved in the second embodiment 9.2 Overview of the Second Embodiment 9.3 Specific example of embodiment 2-1 9.3.1 Configuration of embodiment 2-1 9.3.2 Functions and Effects of Embodiment 2-1 9.3.3 Modification of embodiment 2-1 9.4 Specific example of embodiment 2-2 9.4.1 Configuration of embodiment 2-2 9.4.2 Functions and Effects of Embodiment 2-2 9.5 Specific examples of embodiments 2-3 9.5.1 Configuration of embodiment 2-3 9.5.2 Functions and Effects of Embodiments 2-3 10. Third embodiment 10.1 Problems to be solved in the third embodiment 10.2 Overview of the Third Embodiment 10.3 Specific example of embodiment 3-1 10.3.1 Configuration of embodiment 3-1 10.3.2 Functions and Effects of Embodiment 3-1 10.4 Specific example of embodiment 3-2 10.4.1 Configuration of embodiment 3-2 10.4.2 Functions and Effects of Embodiment 3-2 10.5 Specific example of embodiment 3-3 10.5.1 Configuration of embodiment 3-3 10.5.2 Functions and Effects of Embodiment 3-3 10.6 Specific examples of embodiments 3 and 4 10.6.1 Configuration of embodiment 3-4 10.6.2 Functions and Effects of Embodiments 3 and 4 10.7 Specific examples of embodiments 3-5 10.7.1 Configuration of embodiment 3-5 10.7.2 Functions and Effects of Embodiments 3-5 11. Application Examples (Imaging Systems) 12. Application Examples

[0011] <1. First embodiment> [Functional configuration of imaging device 1] FIG. 1 is a block diagram showing an example of a functional configuration of an imaging device (imaging device 1) according to an embodiment of the present disclosure.

[0012] The imaging device 1 in FIG. 1 includes, for example, an input section 510A, a row driver section 520, a timing control section 530, a pixel array section 540, a column signal processing section 550, an image signal processing section 560, and an output section 510B.

[0013] In the pixel array section 540, pixels 541 are repeatedly arranged in an array. More specifically, a pixel sharing unit 539 including a plurality of pixels is a repeating unit, and this is repeatedly arranged in an array having a row direction and a column direction. In this specification, for convenience, the row direction may be called the H direction, and the column direction perpendicular to the row direction may be called the V direction. In the example of FIG. 1, one pixel sharing unit 539 includes four pixels (pixels 541A, 541B, 541C, and 541D). Each of the pixels 541A, 541B, 541C, and 541D has a photodiode PD (illustrated in FIG. 6, etc., described later). The pixel sharing unit 539 is a unit that shares one pixel circuit (pixel circuit 210 in FIG. 4, described later). In other words, one pixel circuit (pixel circuit 210, described later) is included for each of four pixels (pixels 541A, 541B, 541C, and 541D). By operating this pixel circuit in a time-division manner, pixel signals of the pixels 541A, 541B, 541C, and 541D are sequentially read out. The pixels 541A, 541B, 541C, and 541D are arranged in, for example, 2 rows and 2 columns. In the pixel array section 540, a plurality of row driving signal lines 542 and a plurality of vertical signal lines (column readout lines) 543 are provided in addition to the pixels 541A, 541B, 541C, and 541D. The row driving signal line 542 drives the pixels 541 included in each of a plurality of pixel sharing units 539 arranged in a row direction in the pixel array section 540. The row driving signal line 542 drives each pixel arranged in a row direction among the pixel sharing units 539. As will be described in detail later with reference to FIG. 4, the pixel sharing unit 539 is provided with a plurality of transistors. In order to drive each of these transistors, a plurality of row driving signal lines 542 are connected to one pixel sharing unit 539. The pixel sharing unit 539 is connected to the vertical signal line (column readout line) 543. Pixel signals are read out via the vertical signal line (column readout line) 543 from each of the pixels 541A, 541B, 541C, and 541D included in the pixel sharing unit 539.

[0014] The row driving unit 520 includes, for example, a row address control unit that determines the position of the row for driving the pixels, in other words, a row decoder unit, and a row driving circuit unit that generates signals for driving the pixels 541A, 541B, 541C, and 541D.

[0015] The column signal processing unit 550 includes, for example, a load circuit unit that is connected to the vertical signal line 543 and forms a source follower circuit together with the pixels 541A, 541B, 541C, and 541D (pixel sharing units 539). The column signal processing unit 550 may include an amplifier circuit unit that amplifies a signal read out from the pixel sharing unit 539 via the vertical signal line 543. The column signal processing unit 550 may include a noise processing unit. In the noise processing unit, for example, a system noise level is removed from the signal read out from the pixel sharing unit 539 as a result of photoelectric conversion.

[0016] The column signal processing unit 550 has, for example, an analog-to-digital converter (ADC). In the analog-to-digital converter, the signal read from the pixel sharing unit 539 or the analog signal that has been subjected to the noise processing is converted into a digital signal. The ADC includes, for example, a comparator unit and a counter unit. In the comparator unit, the analog signal to be converted is compared with a reference signal to be compared therewith. In the counter unit, the time until the comparison result in the comparator unit is inverted is measured. The column signal processing unit 550 may include a horizontal scanning circuit unit that controls scanning of the readout column.

[0017] The timing control section 530 supplies signals for controlling timing to the row driving section 520 and the column signal processing section 550 based on a reference clock signal and a timing control signal input to the device.

[0018] The image signal processing unit 560 is a circuit that performs various signal processing on data obtained as a result of photoelectric conversion, in other words, data obtained as a result of the imaging operation in the imaging device 1. The image signal processing unit 560 includes, for example, an image signal processing circuit unit and a data holding unit. The image signal processing unit 560 may also include a processor unit.

[0019] One example of signal processing executed by the image signal processing unit 560 is a tone curve correction process that imparts more gradation to the AD converted imaging data when the data is of a dark subject, and reduces the gradation when the data is of a bright subject. In this case, it is desirable to store in advance in the data storage unit of the image signal processing unit 560 characteristic data of the tone curve based on which the gradation of the imaging data is to be corrected.

[0020] The input section 510A is for inputting, for example, the above-mentioned reference clock signal, timing control signal, characteristic data, and the like from outside the device to the imaging device 1. The timing control signal is, for example, a vertical synchronization signal and a horizontal synchronization signal. The characteristic data is, for example, for storage in a data holding section of the image signal processing section 560. The input section 510A includes, for example, an input terminal 511, an input circuit section 512, an input amplitude changing section 513, an input data conversion circuit section 514, and a power supply section (not shown).

[0021] The input terminal 511 is an external terminal for inputting data. The input circuit unit 512 is for taking in the signal input to the input terminal 511 into the inside of the imaging device 1. The input amplitude change unit 513 changes the amplitude of the signal taken in by the input circuit unit 512 to an amplitude that is easily used inside the imaging device 1. The input data conversion circuit unit 514 changes the arrangement of the data string of the input data. The input data conversion circuit unit 514 is composed of, for example, a serial-parallel conversion circuit. In this serial-parallel conversion circuit, a serial signal received as input data is converted into a parallel signal. Note that, in the input unit 510A, the input amplitude change unit 513 and the input data conversion circuit unit 514 may be omitted. The power supply unit supplies power set to various voltages required inside the imaging device 1 based on a power source supplied from the outside to the imaging device 1.

[0022] When the imaging device 1 is connected to an external memory device, the input unit 510A may be provided with a memory interface circuit that receives data from the external memory device. The external memory device may be, for example, a flash memory, an SRAM, or a DRAM.

[0023] The output unit 510B outputs image data to the outside of the device. This image data is, for example, image data captured by the imaging device 1 and image data signal-processed by the image signal processing unit 560. The output unit 510B includes, for example, an output data conversion circuit unit 515, an output amplitude change unit 516, an output circuit unit 517, and an output terminal 518.

[0024] The output data conversion circuit unit 515 is configured, for example, by a parallel-serial conversion circuit, and the output data conversion circuit unit 515 converts the parallel signal used inside the imaging device 1 into a serial signal. The output amplitude change unit 516 changes the amplitude of the signal used inside the imaging device 1. The signal with the changed amplitude can be easily used by an external device connected to the outside of the imaging device 1. The output circuit unit 517 is a circuit that outputs data from inside the imaging device 1 to the outside of the device, and the output circuit unit 517 drives a wiring outside the imaging device 1 connected to an output terminal 518. The output terminal 518 outputs data from the imaging device 1 to the outside of the device. In the output unit 510B, the output data conversion circuit unit 515 and the output amplitude change unit 516 may be omitted.

[0025] When the imaging device 1 is connected to an external memory device, the output unit 510B may be provided with a memory interface circuit that outputs data to the external memory device. The external memory device may be, for example, a flash memory, an SRAM, or a DRAM.

[0026] [Schematic configuration of imaging device 1] 2 and 3 show an example of a schematic configuration of the imaging device 1. The imaging device 1 includes three substrates (a first substrate 100, a second substrate 200, and a third substrate 300). FIG. 2 shows a schematic planar configuration of each of the first substrate 100, the second substrate 200, and the third substrate 300, and FIG. 3 shows a schematic cross-sectional configuration of the first substrate 100, the second substrate 200, and the third substrate 300 stacked on top of each other. FIG. 3 corresponds to the cross-sectional configuration along line III-III' shown in FIG. 2. The imaging device 1 is a three-dimensional imaging device formed by bonding three substrates (the first substrate 100, the second substrate 200, and the third substrate 300). The first substrate 100 includes a semiconductor layer 100S and a wiring layer 100T. The second substrate 200 includes a semiconductor layer 200S and a wiring layer 200T. The third substrate 300 includes a semiconductor layer 300S and a wiring layer 300T. Here, the combination of the wiring included in each of the first substrate 100, the second substrate 200, and the third substrate 300 and the interlayer insulating film around it is called the wiring layer (100T, 200T, 300T) provided on each substrate (the first substrate 100, the second substrate 200, and the third substrate 300) for convenience. The first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order, and the semiconductor layer 100S, the wiring layer 100T, the semiconductor layer 200S, the wiring layer 200T, the wiring layer 300T, and the semiconductor layer 300S are arranged in this order along the stacking direction. The specific configurations of the first substrate 100, the second substrate 200, and the third substrate 300 will be described later. The arrow shown in FIG. 3 indicates the incident direction of the light L to the imaging device 1. In this specification, for convenience, in the following cross-sectional views, the light incident side of the imaging device 1 may be referred to as "bottom", "lower side", or "downward", and the side opposite the light incident side may be referred to as "upper side", "upper side", or "upper". Also, in this specification, for convenience, with respect to a substrate having a semiconductor layer and a wiring layer, the wiring layer side may be referred to as the front side, and the semiconductor layer side may be referred to as the back side. Note that the description in the specification is not limited to the above names. The imaging device 1 is, for example, a back-illuminated imaging device in which light is incident from the back side of the first substrate 100 having a photodiode.

[0027] The pixel array section 540 and the pixel sharing unit 539 included in the pixel array section 540 are both configured using both the first substrate 100 and the second substrate 200. The first substrate 100 is provided with a plurality of pixels 541A, 541B, 541C, and 541D that the pixel sharing unit 539 has. Each of these pixels 541 has a photodiode (a photodiode PD described later) and a transfer transistor (a transfer transistor TR described later). The second substrate 200 is provided with a pixel circuit (a pixel circuit 210 described later) that the pixel sharing unit 539 has. The pixel circuit reads out pixel signals transferred from the photodiodes of the pixels 541A, 541B, 541C, and 541D via the transfer transistors, or resets the photodiodes. In addition to such pixel circuits, the second substrate 200 has a plurality of row driving signal lines 542 extending in the row direction and a plurality of vertical signal lines 543 extending in the column direction. The second substrate 200 further has a power supply line 544 extending in the row direction. The third substrate 300 has, for example, an input section 510A, a row driver 520, a timing control section 530, a column signal processing section 550, an image signal processing section 560, and an output section 510B. The row driver 520 is provided, for example, in a region partially overlapping the pixel array section 540 in the stacking direction (hereinafter simply referred to as the stacking direction) of the first substrate 100, the second substrate 200, and the third substrate 300. More specifically, the row driver 520 is provided in a region overlapping near an end of the pixel array section 540 in the H direction in the stacking direction (FIG. 2). The column signal processing section 550 is provided, for example, in a region partially overlapping the pixel array section 540 in the stacking direction. More specifically, the column signal processing section 550 is provided in a region overlapping the vicinity of an end portion in the V direction of the pixel array section 540 in the stacking direction (FIG. 2). Although not shown, the input section 510A and the output section 510B may be provided in a portion other than the third substrate 300, for example, on the second substrate 200. Alternatively, the input section 510A and the output section 510B may be provided on the back surface (light incident surface) side of the first substrate 100.The pixel circuits provided on the second substrate 200 may also be called pixel transistor circuits, pixel transistor groups, pixel transistors, pixel readout circuits, or readout circuits. In this specification, the term pixel circuits is used.

[0028] The first substrate 100 and the second substrate 200 are electrically connected by, for example, through electrodes (through electrodes 120E, 121E in FIG. 6 described later). The second substrate 200 and the third substrate 300 are electrically connected by, for example, contact portions 201, 202, 301, 302. The second substrate 200 is provided with contact portions 201, 202, and the third substrate 300 is provided with contact portions 301, 302. The contact portion 201 of the second substrate 200 contacts the contact portion 301 of the third substrate 300, and the contact portion 202 of the second substrate 200 contacts the contact portion 302 of the third substrate 300. The second substrate 200 has a contact region 201R in which a plurality of contact portions 201 are provided, and a contact region 202R in which a plurality of contact portions 202 are provided. The third substrate 300 has a contact region 301R in which a plurality of contact parts 301 are provided, and a contact region 302R in which a plurality of contact parts 302 are provided. The contact regions 201R, 301R are provided between the pixel array section 540 and the row driver section 520 in the stacking direction (FIG. 3). In other words, the contact regions 201R, 301R are provided, for example, in a region where the row driver section 520 (third substrate 300) and the pixel array section 540 (second substrate 200) overlap in the stacking direction, or in a region adjacent thereto. The contact regions 201R, 301R are disposed, for example, at the end in the H direction of such a region (FIG. 2). In the third substrate 300, for example, the contact region 301R is provided at a position overlapping a part of the row driver section 520, specifically, the end in the H direction of the row driver section 520 (FIGS. 2 and 3). The contact sections 201 and 301 connect, for example, the row driving section 520 provided on the third substrate 300 and the row driving signal line 542 provided on the second substrate 200. The contact sections 201 and 301 may connect, for example, the input section 510A provided on the third substrate 300 to a power supply line 544 and a reference potential line (a reference potential line VSS described later). The contact regions 202R and 302R are provided between the pixel array section 540 and the column signal processing section 550 in the stacking direction (FIG. 3).In other words, the contact regions 202R and 302R are provided in, for example, a region where the column signal processing section 550 (the third substrate 300) and the pixel array section 540 (the second substrate 200) overlap in the stacking direction, or in a region adjacent thereto. The contact regions 202R and 302R are arranged, for example, at the end in the V direction of such a region (FIG. 2). In the third substrate 300, for example, the contact region 301R is provided in a position overlapping a part of the column signal processing section 550, specifically, an end in the V direction of the column signal processing section 550 (FIGS. 2 and 3). The contact sections 202 and 302 are for connecting pixel signals (signals corresponding to the amount of charge generated as a result of photoelectric conversion in the photodiodes) output from each of the multiple pixel sharing units 539 of the pixel array section 540 to the column signal processing section 550 provided on the third substrate 300. The pixel signals are sent from the second substrate 200 to the third substrate 300.

[0029] FIG. 3 is an example of a cross-sectional view of the imaging device 1 as described above. The first substrate 100, the second substrate 200, and the third substrate 300 are electrically connected via wiring layers 100T, 200T, and 300T. For example, the imaging device 1 has an electrical connection portion that electrically connects the second substrate 200 and the third substrate 300. Specifically, the contact portions 201, 202, 301, and 302 are formed with electrodes formed of a conductive material. The conductive material is formed of a metal material such as copper (Cu), aluminum (Al), and gold (Au). The contact regions 201R, 202R, 301R, and 302R electrically connect the second substrate and the third substrate by directly joining wiring formed as electrodes, for example, to each other, thereby enabling input and / or output of signals between the second substrate 200 and the third substrate 300.

[0030] The electrical connection portion that electrically connects the second substrate 200 and the third substrate 300 can be provided at a desired location. For example, as described as the contact regions 201R, 202R, 301R, and 302R in FIG. 3, the electrical connection portion may be provided in a region that overlaps with the pixel array section 540 in the stacking direction. The electrical connection portion may also be provided in a region that does not overlap with the pixel array section 540 in the stacking direction. Specifically, the electrical connection portion may be provided in a region that overlaps with a peripheral portion disposed outside the pixel array section 540 in the stacking direction.

[0031] The first substrate 100 and the second substrate 200 are provided with, for example, connection holes H1 and H2. The connection holes H1 and H2 penetrate the first substrate 100 and the second substrate 200 (FIG. 3). The connection holes H1 and H2 are provided outside the pixel array section 540 (or a portion overlapping the pixel array section 540) (FIG. 2). For example, the connection hole H1 is disposed outside the pixel array section 540 in the H direction, and the connection hole H2 is disposed outside the pixel array section 540 in the V direction. For example, the connection hole H1 reaches the input section 510A provided on the third substrate 300, and the connection hole H2 reaches the output section 510B provided on the third substrate 300. The connection holes H1 and H2 may be hollow or may contain a conductive material at least in part. For example, there is a configuration in which a bonding wire is connected to an electrode formed as the input section 510A and / or the output section 510B. Alternatively, there is a configuration in which an electrode formed as the input section 510A and / or the output section 510B is connected to a conductive material provided in the connection holes H1, H2. The conductive material provided in the connection holes H1, H2 may be embedded in a part or all of the connection holes H1, H2, or the conductive material may be formed on the side walls of the connection holes H1, H2.

[0032] 3 shows a structure in which the input unit 510A and the output unit 510B are provided on the third substrate 300, but the present invention is not limited to this. For example, the input unit 510A and / or the output unit 510B can be provided on the second substrate 200 by sending a signal of the third substrate 300 to the second substrate 200 via the wiring layers 200T and 300T. Similarly, the input unit 510A and / or the output unit 510B can be provided on the first substrate 100 by sending a signal of the second substrate 200 to the first substrate 1000 via the wiring layers 100T and 200T.

[0033] 4 is an equivalent circuit diagram showing an example of the configuration of the pixel-shared unit 539. The pixel-shared unit 539 includes a plurality of pixels 541 (four pixels 541, 541A, 541B, 541C, and 541D, are shown in FIG. 4), one pixel circuit 210 connected to the plurality of pixels 541, and a vertical signal line 543 connected to the pixel circuit 210. The pixel circuit 210 includes, for example, four transistors, specifically, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FD. As described above, the pixel-shared unit 539 is configured to sequentially output pixel signals of the four pixels 541 (pixels 541A, 541B, 541C, and 541D) included in the pixel-shared unit 539 to the vertical signal line 543 by operating one pixel circuit 210 in a time-division manner. A state in which one pixel circuit 210 is connected to multiple pixels 541 and the pixel signals of the multiple pixels 541 are output in a time-division manner by the single pixel circuit 210 is said to be "multiple pixels 541 sharing one pixel circuit 210."

[0034] The pixels 541A, 541B, 541C, and 541D have components in common with each other. Hereinafter, in order to distinguish the components of the pixels 541A, 541B, 541C, and 541D from each other, the identification number 1 is added to the end of the reference numeral of the component of the pixel 541A, the identification number 2 is added to the end of the reference numeral of the component of the pixel 541B, the identification number 3 is added to the end of the reference numeral of the component of the pixel 541C, and the identification number 4 is added to the end of the reference numeral of the component of the pixel 541D. When it is not necessary to distinguish the components of the pixels 541A, 541B, 541C, and 541D from each other, the identification numbers at the end of the reference numerals of the components of the pixels 541A, 541B, 541C, and 541D are omitted.

[0035] The pixels 541A, 541B, 541C, and 541D each have, for example, a photodiode PD, a transfer transistor TR electrically connected to the photodiode PD, and a floating diffusion FD electrically connected to the transfer transistor TR. In the photodiodes PD (PD1, PD2, PD3, and PD4), the cathode is electrically connected to the source of the transfer transistor TR, and the anode is electrically connected to a reference potential line (for example, ground). The photodiode PD photoelectrically converts incident light and generates a charge according to the amount of light received. The transfer transistors TR (transfer transistors TR1, TR2, TR3, and TR4) are, for example, n-type CMOS (Complementary Metal Oxide Semiconductor) transistors. In the transfer transistor TR, the drain is electrically connected to the floating diffusion FD, and the gate is electrically connected to a drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 (see FIG. 1) connected to one pixel sharing unit 539. The transfer transistor TR transfers the charge generated in the photodiode PD to the floating diffusion FD. The floating diffusion FD (floating diffusions FD1, FD2, FD3, FD4) is an n-type diffusion layer region formed in a p-type semiconductor layer. The floating diffusion FD is a charge holding means that temporarily holds the charge transferred from the photodiode PD, and is also a charge-voltage conversion means that generates a voltage according to the amount of charge.

[0036] The four floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) included in one pixel shared unit 539 are electrically connected to each other and to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG. The drain of the FD conversion gain switching transistor FDG is connected to the source of the reset transistor RST, and the gate of the FD conversion gain switching transistor FDG is connected to a drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 connected to one pixel shared unit 539. The drain of the reset transistor RST is connected to a power supply line VDD, and the gate of the reset transistor RST is connected to the drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 connected to one pixel shared unit 539. The gate of the amplification transistor AMP is connected to the floating diffusion FD, the drain of the amplification transistor AMP is connected to the power supply line VDD, and the source of the amplification transistor AMP is connected to the drain of the selection transistor SEL. The source of the selection transistor SEL is connected to a vertical signal line 543, and the gate of the selection transistor SEL is connected to the drive signal line. This drive signal line is part of a plurality of row drive signal lines 542 connected to one pixel sharing unit 539 .

[0037] When the transfer transistor TR is turned on, the transfer transistor TR transfers the charge of the photodiode PD to the floating diffusion FD. The gate (transfer gate TG) of the transfer transistor TR includes, for example, a so-called vertical electrode, and is provided extending from the surface of the semiconductor layer (semiconductor layer 100S in FIG. 6 described later) to a depth reaching the PD, as shown in FIG. 6 described later. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. When the reset transistor RST is turned on, the potential of the floating diffusion FD is reset to the potential of the power supply line VDD. The selection transistor SEL controls the output timing of the pixel signal from the pixel circuit 210. The amplification transistor AMP generates, as the pixel signal, a signal of a voltage according to the level of the charge held in the floating diffusion FD. The amplification transistor AMP is connected to the vertical signal line 543 via the selection transistor SEL. In the column signal processing unit 550, the amplification transistor AMP configures a source follower together with a load circuit unit (see FIG. 1) connected to the vertical signal line 543. When the selection transistor SEL is turned on, the amplification transistor AMP outputs the voltage of the floating diffusion FD to the column signal processing unit 550 via the vertical signal line 543. The reset transistor RST, the amplification transistor AMP, and the selection transistor SEL are, for example, N-type MOS transistors.

[0038] The FD conversion gain switching transistor FDG is used to change the gain of the charge-voltage conversion in the floating diffusion FD. In general, the pixel signal is small when shooting in a dark place. Based on Q=CV, when performing charge-voltage conversion, if the capacitance (FD capacitance C) of the floating diffusion FD is large, V when converted to voltage by the amplification transistor AMP will be small. On the other hand, in a bright place, the pixel signal becomes large, so if the FD capacitance C is not large, the floating diffusion FD cannot receive the charge of the photodiode PD. Furthermore, the FD capacitance C needs to be large so that V when converted to voltage by the amplification transistor AMP does not become too large (in other words, so that it becomes small). In consideration of this, when the FD conversion gain switching transistor FDG is turned on, the gate capacitance of the FD conversion gain switching transistor FDG increases, so the overall FD capacitance C becomes large. On the other hand, when the FD conversion gain switching transistor FDG is turned off, the overall FD capacitance C becomes small. In this way, by switching the FD conversion gain switching transistor FDG on and off, the FD capacitance C can be made variable and the conversion efficiency can be switched. The FD conversion gain switching transistor FDG is, for example, an N-type MOS transistor.

[0039] It is also possible to configure the pixel circuit 210 without providing the FD conversion gain switching transistor FDG. In this case, for example, the pixel circuit 210 is composed of three transistors, for example, an amplification transistor AMP, a selection transistor SEL, and a reset transistor RST. The pixel circuit 210 has at least one pixel transistor, for example, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FDG.

[0040] The selection transistor SEL may be provided between the power supply line VDD and the amplification transistor AMP. In this case, the drain of the reset transistor RST is electrically connected to the power supply line VDD and the drain of the selection transistor SEL. The source of the selection transistor SEL is electrically connected to the drain of the amplification transistor AMP, and the gate of the selection transistor SEL is electrically connected to the row drive signal line 542 (see FIG. 1). The source of the amplification transistor AMP (the output terminal of the pixel circuit 210) is electrically connected to the vertical signal line 543, and the gate of the amplification transistor AMP is electrically connected to the source of the reset transistor RST. Although not shown in the figure, the number of pixels 541 sharing one pixel circuit 210 may be other than four. For example, two or eight pixels 541 may share one pixel circuit 210.

[0041] FIG. 5 shows an example of a connection between a plurality of pixel sharing units 539 and a vertical signal line 543. For example, four pixel sharing units 539 arranged in a column direction are divided into four groups, and a vertical signal line 543 is connected to each of the four groups. For the sake of simplicity, FIG. 5 shows an example in which each of the four groups has one pixel sharing unit 539, but each of the four groups may include a plurality of pixel sharing units 539. In this way, in the imaging device 1, a plurality of pixel sharing units 539 arranged in a column direction may be divided into groups including one or a plurality of pixel sharing units 539. For example, a vertical signal line 543 and a column signal processing unit 550 are connected to each of the groups, so that pixel signals can be read out simultaneously from each group. Alternatively, in the imaging device 1, one vertical signal line 543 may be connected to a plurality of pixel sharing units 539 arranged in a column direction. In this case, pixel signals are read out sequentially in a time-division manner from the plurality of pixel sharing units 539 connected to one vertical signal line 543.

[0042] [Specific configuration of imaging device 1] FIG. 6 shows an example of a cross-sectional configuration perpendicular to the main surfaces of the first substrate 100, the second substrate 200, and the third substrate 300 of the imaging device 1. FIG. 6 is a schematic representation for easy understanding of the positional relationship of the components, and may differ from the actual cross section. In the imaging device 1, the first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order. The imaging device 1 further has a light receiving lens 401 on the back side (light incident surface side) of the first substrate 100. A color filter layer (not shown) may be provided between the light receiving lens 401 and the first substrate 100. The light receiving lens 401 is provided, for example, for each of the pixels 541A, 541B, 541C, and 541D. The imaging device 1 is, for example, a back-illuminated imaging device. The imaging device 1 has a pixel array section 540 arranged in the center and a peripheral section 540B arranged outside the pixel array section 540.

[0043] The first substrate 100 has, in order from the light receiving lens 401 side, an insulating film 111, a fixed charge film 112, a semiconductor layer 100S, and a wiring layer 100T. The semiconductor layer 100S is made of, for example, a silicon substrate. The semiconductor layer 100S has, for example, a p-well layer 115 in a part of the surface (the surface on the wiring layer 100T side) and in the vicinity thereof, and has an n-type semiconductor region 114 in the other region (region deeper than the p-well layer 115). For example, the n-type semiconductor region 114 and the p-well layer 115 form a pn junction type photodiode PD. The p-well layer 115 is a p-type semiconductor region.

[0044] Fig. 7A shows an example of a planar configuration of the first substrate 100. Fig. 7A mainly shows the planar configuration of the pixel separation portion 117, the photodiode PD, the floating diffusion FD, the VSS contact region 118, and the transfer transistor TR of the first substrate 100. The configuration of the first substrate 100 will be described using Fig. 7A together with Fig. 6.

[0045] A floating diffusion FD and a VSS contact region 118 are provided near the surface of the semiconductor layer 100S. The floating diffusion FD is composed of an n-type semiconductor region provided in the p-well layer 115. The floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) of the pixels 541A, 541B, 541C, and 541D are provided close to each other in the center of the pixel sharing unit 539 (FIG. 7A), for example. Although details will be described later, the four floating diffusions (floating diffusions FD1, FD2, FD3, FD4) included in this pixel sharing unit 539 are electrically connected to each other via electrical connection means (pad section 120 described later) in the first substrate 100 (more specifically, in the wiring layer 100T). Furthermore, the floating diffusion FD is connected from the first substrate 100 to the second substrate 200 (more specifically, from the wiring layer 100T to the wiring layer 200T) via an electrical means (a through electrode 120E described below). In the second substrate 200 (more specifically, inside the wiring layer 200T), the floating diffusion FD is electrically connected to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG by this electrical means.

[0046] The VSS contact region 118 is a region electrically connected to the reference potential line VSS, and is arranged apart from the floating diffusion FD. For example, in the pixels 541A, 541B, 541C, and 541D, the floating diffusion FD is arranged at one end of each pixel in the V direction, and the VSS contact region 118 is arranged at the other end (FIG. 7A). The VSS contact region 118 is, for example, composed of a p-type semiconductor region. The VSS contact region 118 is connected to, for example, a ground potential or a fixed potential. This allows a reference potential to be supplied to the semiconductor layer 100S.

[0047] The first substrate 100 is provided with a transfer transistor TR together with a photodiode PD, a floating diffusion FD, and a VSS contact region 118. The photodiode PD, the floating diffusion FD, the VSS contact region 118, and the transfer transistor TR are provided in each of the pixels 541A, 541B, 541C, and 541D. The transfer transistor TR is provided on the front surface side (the side opposite to the light incident surface side, the second substrate 200 side) of the semiconductor layer 100S. The transfer transistor TR has a transfer gate TG. The transfer gate TG includes, for example, a horizontal portion TGb facing the front surface of the semiconductor layer 100S and a vertical portion TGa provided in the semiconductor layer 100S. The vertical portion TGa extends in the thickness direction of the semiconductor layer 100S. One end of the vertical portion TGa is in contact with the horizontal portion TGb, and the other end is provided in the n-type semiconductor region 114. By configuring the transfer transistor TR with such a vertical transistor, transfer failure of pixel signals is less likely to occur, and the readout efficiency of pixel signals can be improved.

[0048] The horizontal part TGb of the transfer gate TG extends from a position facing the vertical part TGa toward, for example, the center of the pixel sharing unit 539 in the H direction (FIG. 7A). This allows the H direction position of the through electrode (through electrode TGV described below) that reaches the transfer gate TG to be closer to the H direction positions of the through electrodes (through electrodes 120E and 121E described below) connected to the floating diffusion FD and the VSS contact region 118. For example, the multiple pixel sharing units 539 provided on the first substrate 100 have the same configuration (FIG. 7A).

[0049] The semiconductor layer 100S is provided with a pixel separator 117 that separates the pixels 541A, 541B, 541C, and 541D from one another. The pixel separator 117 is formed extending in a normal direction (perpendicular to the surface of the semiconductor layer 100S) of the semiconductor layer 100S. The pixel separator 117 is provided to separate the pixels 541A, 541B, 541C, and 541D from one another, and has, for example, a lattice-like planar shape (FIGS. 7A and 7B). The pixel separator 117 electrically and optically separates the pixels 541A, 541B, 541C, and 541D from one another, for example. The pixel separator 117 includes, for example, a light-shielding film 117A and an insulating film 117B. The light-shielding film 117A is made of, for example, tungsten (W) or the like. The insulating film 117B is provided between the light shielding film 117A and the p-well layer 115 or the n-type semiconductor region 114. The insulating film 117B is made of, for example, silicon oxide (SiO). The pixel separator 117 has, for example, a full trench isolation (FTI) structure and penetrates the semiconductor layer 100S. Although not shown, the pixel separator 117 is not limited to an FTI structure that penetrates the semiconductor layer 100S. For example, it may have a deep trench isolation (DTI) structure that does not penetrate the semiconductor layer 100S. The pixel separator 117 extends in the normal direction of the semiconductor layer 100S and is formed in a partial region of the semiconductor layer 100S.

[0050] The semiconductor layer 100S is provided with, for example, a first pinning region 113 and a second pinning region 116. The first pinning region 113 is provided near the back surface of the semiconductor layer 100S, and is disposed between the n-type semiconductor region 114 and the fixed charge film 112. The second pinning region 116 is provided on a side surface of the pixel separating section 117, specifically, between the pixel separating section 117 and the p-well layer 115 or the n-type semiconductor region 114. The first pinning region 113 and the second pinning region 116 are formed of, for example, a p-type semiconductor region.

[0051] A fixed charge film 112 having a negative fixed charge is provided between the semiconductor layer 100S and the insulating film 111. A first pinning region 113 of the hole accumulation layer is formed at the interface on the light-receiving surface (rear surface) side of the semiconductor layer 100S due to an electric field induced by the fixed charge film 112. This suppresses the generation of dark current due to the interface state on the light-receiving surface side of the semiconductor layer 100S. The fixed charge film 112 is formed, for example, of an insulating film having a negative fixed charge. Examples of materials for the insulating film having a negative fixed charge include hafnium oxide, zirconium oxide, aluminum oxide, titanium oxide, and tantalum oxide.

[0052] A light-shielding film 117A is provided between the fixed charge film 112 and the insulating film 111. This light-shielding film 117A may be provided continuously with the light-shielding film 117A constituting the pixel separating section 117. The light-shielding film 117A between the fixed charge film 112 and the insulating film 111 is selectively provided, for example, at a position facing the pixel separating section 117 in the semiconductor layer 100S. The insulating film 111 is provided so as to cover this light-shielding film 117A. The insulating film 111 is made of, for example, silicon oxide.

[0053] The wiring layer 100T provided between the semiconductor layer 100S and the second substrate 200 has an interlayer insulating film 119, pad portions 120 and 121, a passivation film 122, an interlayer insulating film 123, and a bonding film 124 in this order from the semiconductor layer 100S side. The horizontal portion TGb of the transfer gate TG is provided in this wiring layer 100T, for example. The interlayer insulating film 119 is provided over the entire surface of the semiconductor layer 100S and is in contact with the semiconductor layer 100S. The interlayer insulating film 119 is made of, for example, a silicon oxide film. The configuration of the wiring layer 100T is not limited to the above, and may be any configuration having wiring and an insulating film.

[0054] FIG. 7B shows the configuration of the pad sections 120 and 121 together with the planar configuration shown in FIG. 7A. The pad sections 120 and 121 are provided in selective regions on the interlayer insulating film 119. The pad section 120 is for connecting the floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) of the pixels 541A, 541B, 541C, and 541D to each other. The pad section 120 is disposed, for example, in the center of the pixel sharing unit 539 in plan view for each pixel sharing unit 539 (FIG. 7B). The pad section 120 is disposed so as to straddle the pixel separating section 117, and is disposed so as to overlap at least a portion of each of the floating diffusions FD1, FD2, FD3, and FD4 (FIGS. 6 and 7B). Specifically, the pad section 120 is formed in a region that overlaps at least a portion of each of the plurality of floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) that share the pixel circuit 210 and at least a portion of the pixel separation section 117 formed between the plurality of photodiodes PD (photodiodes PD1, PD2, PD3, PD4) that share the pixel circuit 210 in a direction perpendicular to the surface of the semiconductor layer 100S. The interlayer insulating film 119 is provided with a connection via 120C for electrically connecting the pad section 120 and the floating diffusions FD1, FD2, FD3, FD4. The connection via 120C is provided in each of the pixels 541A, 541B, 541C, 541D. For example, a portion of the pad section 120 is embedded in the connection via 120C, so that the pad section 120 and the floating diffusions FD1, FD2, FD3, FD4 are electrically connected.

[0055] The pad portion 121 is for connecting the multiple VSS contact regions 118 to each other. For example, the VSS contact regions 118 provided in the pixels 541C and 541D of one pixel sharing unit 539 adjacent to each other in the V direction and the VSS contact regions 118 provided in the pixels 541A and 541B of the other pixel sharing unit 539 are electrically connected by the pad portion 121. The pad portion 121 is provided, for example, so as to straddle the pixel separation portion 117, and is arranged so as to overlap at least a part of each of the four VSS contact regions 118. Specifically, the pad portion 121 is formed in a region that overlaps at least a part of each of the multiple VSS contact regions 118 and at least a part of the pixel separation portion 117 formed between the multiple VSS contact regions 118 in a direction perpendicular to the surface of the semiconductor layer 100S. The interlayer insulating film 119 is provided with a connection via 121C for electrically connecting the pad portion 121 and the VSS contact region 118. The connection via 121C is provided in each of the pixels 541A, 541B, 541C, and 541D. For example, a part of the pad portion 121 is embedded in the connection via 121C, thereby electrically connecting the pad portion 121 and the VSS contact region 118. For example, the pad portion 120 and the pad portion 121 of each of the multiple pixel sharing units 539 aligned in the V direction are disposed at approximately the same position in the H direction ( FIG. 7B ).

[0056] By providing the pad section 120, it is possible to reduce the wiring for connecting each floating diffusion FD to the pixel circuit 210 (for example, the gate electrode of the amplification transistor AMP) in the entire chip. Similarly, by providing the pad section 121, it is possible to reduce the wiring for supplying a potential to each VSS contact region 118 in the entire chip. This makes it possible to reduce the area of ​​the entire chip, suppress electrical interference between wiring in miniaturized pixels, and / or reduce costs by reducing the number of components.

[0057] The pads 120 and 121 can be provided at desired positions on the first substrate 100 and the second substrate 200. Specifically, the pads 120 and 121 can be provided on either the wiring layer 100T or the insulating region 212 of the semiconductor layer 200S. When provided on the wiring layer 100T, the pads 120 and 121 may be directly in contact with the semiconductor layer 100S. Specifically, the pads 120 and 121 may be directly connected to at least a part of each of the floating diffusion FD and / or the VSS contact region 118. Alternatively, the pads 120 and 121 may be provided at desired positions in the insulating region 2112 of the wiring layer 100T and the semiconductor layer 200S by providing connection vias 120C and 121C from each of the floating diffusion FD and / or the VSS contact region 118 connected to the pads 120 and 121.

[0058] In particular, when the pad portions 120, 121 are provided in the wiring layer 100T, it is possible to reduce the number of wirings connected to the floating diffusion FD and / or the VSS contact region 118 in the insulating region 212 of the semiconductor layer 200S. This makes it possible to reduce the area of ​​the insulating region 212 for forming the through wiring for connecting the floating diffusion FD to the pixel circuit 210, among the second substrate 200 for forming the pixel circuit 210. Therefore, it is possible to secure a large area for the second substrate 200 for forming the pixel circuit 210. By securing the area for the pixel circuit 210, it is possible to form a large pixel transistor, which can contribute to improving image quality by reducing noise, etc.

[0059] In particular, when an FTI structure is used for the pixel separation section 117, it is preferable to provide a floating diffusion FD and / or a VSS contact region 118 in each pixel 541, and therefore, by using the configuration of the pad sections 120, 121, the wiring connecting the first substrate 100 and the second substrate 200 can be significantly reduced.

[0060] 7B, for example, the pad section 120 to which the floating diffusions FD are connected and the pad section 121 to which the VSS contact regions 118 are connected are alternately arranged in a straight line in the V direction. The pad sections 120 and 121 are formed in positions surrounded by the photodiodes PD, the transfer gates TG, and the floating diffusions FD. This allows elements other than the floating diffusions FD and the VSS contact regions 118 to be freely arranged on the first substrate 100 on which the elements are formed, and the layout of the entire chip can be made more efficient. In addition, symmetry in the layout of the elements formed in each pixel sharing unit 539 is ensured, and the variation in the characteristics of each pixel 541 can be suppressed.

[0061] The pad parts 120 and 121 are made of, for example, polysilicon (Poly Si), more specifically, doped polysilicon to which impurities are added. The pad parts 120 and 121 are preferably made of a conductive material with high heat resistance, such as polysilicon, tungsten (W), titanium (Ti), and titanium nitride (TiN). This makes it possible to form the pixel circuit 210 after bonding the semiconductor layer 200S of the second substrate 200 to the first substrate 100. The reason for this will be explained below. In the following explanation, the method of forming the pixel circuit 210 after bonding the semiconductor layer 200S of the first substrate 100 to the semiconductor layer 200S of the second substrate 200 is called the first manufacturing method.

[0062] Here, it is also conceivable to form the pixel circuits 210 on the second substrate 200 and then bond it to the first substrate 100 (hereinafter referred to as the second manufacturing method). In this second manufacturing method, electrodes for electrical connection are formed in advance on the surface of the first substrate 100 (surface of the wiring layer 100T) and the surface of the second substrate 200 (surface of the wiring layer 200T). When the first substrate 100 and the second substrate 200 are bonded together, the electrodes for electrical connection formed on the surfaces of the first substrate 100 and the second substrate 200 come into contact with each other at the same time. As a result, an electrical connection is formed between the wiring included in the first substrate 100 and the wiring included in the second substrate 200. Therefore, by configuring the imaging device 1 using the second manufacturing method, it is possible to manufacture the imaging device using an appropriate process according to the configuration of each of the first substrate 100 and the second substrate 200, for example, and it is possible to manufacture a high-quality, high-performance imaging device.

[0063] In such a second manufacturing method, when the first substrate 100 and the second substrate 200 are bonded together, an alignment error may occur due to a manufacturing device for bonding. In addition, the first substrate 100 and the second substrate 200 have a diameter of, for example, several tens of centimeters, and when the first substrate 100 and the second substrate 200 are bonded together, the substrates may expand and contract in microscopic regions of the first substrate 100 and the second substrate 200. This expansion and contraction of the substrates is caused by a slight difference in the timing at which the substrates contact each other. Due to such expansion and contraction of the first substrate 100 and the second substrate 200, an error may occur in the position of the electrodes for electrical connection formed on the surface of the first substrate 100 and the surface of the second substrate 200. In the second manufacturing method, it is preferable to take measures so that the electrodes of the first substrate 100 and the second substrate 200 contact each other even if such an error occurs. Specifically, at least one, and preferably both, of the electrodes of the first substrate 100 and the second substrate 200 are made large in consideration of the above-mentioned error. Therefore, when the second manufacturing method is used, for example, the size (size in the substrate planar direction) of the electrode formed on the surface of the first substrate 100 or the second substrate 200 becomes larger than the size of the internal electrode extending in the thickness direction from the inside of the first substrate 100 or the second substrate 200 to the surface.

[0064] On the other hand, by forming the pad parts 120, 121 from a heat-resistant conductive material, it becomes possible to use the first manufacturing method. In the first manufacturing method, after forming the first substrate 100 including the photodiode PD and the transfer transistor TR, the first substrate 100 and the second substrate 200 (semiconductor layer 2000S) are bonded together. At this time, the second substrate 200 is in a state in which the patterns of the active elements and wiring layers constituting the pixel circuits 210 have not yet been formed. Since the second substrate 200 is in a state before the patterns are formed, even if an error occurs in the bonding position when the first substrate 100 and the second substrate 200 are bonded together, this bonding error does not cause an error in the alignment between the pattern of the first substrate 100 and the pattern of the second substrate 200. This is because the pattern of the second substrate 200 is formed after the first substrate 100 and the second substrate 200 are bonded together. When forming a pattern on the second substrate, for example, an exposure device for pattern formation performs pattern formation while using the pattern formed on the first substrate as a target for alignment. For the above reasons, errors in the bonding positions of the first substrate 100 and the second substrate 200 do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method. For the same reason, errors caused by expansion and contraction of the substrates in the second manufacturing method do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method.

[0065] In the first manufacturing method, after the first substrate 100 and the second substrate 200 (semiconductor layer 200S) are bonded together in this manner, active elements are formed on the second substrate 200. After that, the through electrodes 120E, 121E and the through electrodes TGV (FIG. 6) are formed. In forming the through electrodes 120E, 121E, and TGV, for example, a pattern of the through electrodes is formed from above the second substrate 200 using reduced projection exposure by an exposure device. Since reduced exposure projection is used, even if an error occurs in the alignment between the second substrate 200 and the exposure device, the magnitude of the error is only a fraction (the reciprocal of the reduced exposure projection magnification) of the error in the second substrate 200 in the second manufacturing method. Therefore, by configuring the imaging device 1 using the first manufacturing method, it becomes easier to align the elements formed on the first substrate 100 and the second substrate 200, and a high-quality, high-performance imaging device can be manufactured.

[0066] The imaging device 1 manufactured using such a first manufacturing method has different characteristics from the imaging device manufactured using the second manufacturing method. Specifically, in the imaging device 1 manufactured using the first manufacturing method, for example, the through electrodes 120E, 121E, and TGV have a substantially constant thickness (size in the substrate plane direction) from the second substrate 200 to the first substrate 100. Alternatively, when the through electrodes 120E, 121E, and TGV have a tapered shape, they have a tapered shape with a constant inclination. The imaging device 1 having such through electrodes 120E, 121E, and TGV makes it easy to miniaturize the pixels 541.

[0067] Here, when the imaging device 1 is manufactured by the first manufacturing method, since the active elements are formed on the second substrate 200 after bonding the first substrate 100 and the second substrate 200 (semiconductor layer 200S), the first substrate 100 is also affected by the heat treatment required for forming the active elements. For this reason, as described above, it is preferable to use a conductive material with high heat resistance for the pad parts 120, 121 provided on the first substrate 100. For example, it is preferable to use a material with a higher melting point (i.e., higher heat resistance) for the pad parts 120, 121 than at least a part of the wiring material included in the wiring layer 200T of the second substrate 200. For example, a conductive material with high heat resistance such as doped polysilicon, tungsten, titanium, or titanium nitride is used for the pad parts 120, 121. This makes it possible to manufacture the imaging device 1 by using the first manufacturing method described above.

[0068] The passivation film 122 is provided over the entire surface of the semiconductor layer 100S so as to cover the pad portions 120 and 121 (FIG. 6). The passivation film 122 is made of, for example, a silicon nitride (SiN) film. The interlayer insulating film 123 covers the pad portions 120 and 121 with the passivation film 122 therebetween. This interlayer insulating film 123 is provided over the entire surface of the semiconductor layer 100S. The interlayer insulating film 123 is made of, for example, a silicon oxide (SiO) film. The bonding film 124 is provided on the bonding surface between the first substrate 100 (specifically, the wiring layer 100T) and the second substrate 200. That is, the bonding film 124 is in contact with the second substrate 200. This bonding film 124 is provided over the entire main surface of the first substrate 100. The bonding film 124 is made of, for example, a silicon nitride film.

[0069] The light receiving lens 401 faces, for example, the semiconductor layer 100S with the fixed charge film 112 and the insulating film 111 therebetween (FIG. 6). The light receiving lens 401 is provided, for example, at a position facing the photodiode PD of each of the pixels 541A, 541B, 541C, and 541D.

[0070] The second substrate 200 has a semiconductor layer 200S and a wiring layer 200T in this order from the first substrate 100 side. The semiconductor layer 200S is made of a silicon substrate. In the semiconductor layer 200S, a well region 211 is provided across the thickness direction. The well region 211 is, for example, a p-type semiconductor region. In the second substrate 20, a pixel circuit 210 arranged for each pixel sharing unit 539 is provided. For example, the pixel circuit 210 is provided on the front surface side (the wiring layer 200T side) of the semiconductor layer 200S. In the imaging device 1, the second substrate 200 is bonded to the first substrate 100 such that the back surface side (the semiconductor layer 200S side) of the second substrate 200 faces the front surface side (the wiring layer 100T side) of the first substrate 100. That is, the second substrate 200 is bonded to the first substrate 100 face-to-back.

[0071] 8 to 12 show an example of a planar configuration of the second substrate 200. FIG. 8 shows a configuration of the pixel circuit 210 provided near the surface of the semiconductor layer 200S. FIG. 9 shows a schematic configuration of the wiring layer 200T (specifically, the first wiring layer W1 described later), the semiconductor layer 200S connected to the wiring layer 200T, and each part of the first substrate 100. FIGS. 10 to 12 show an example of a planar configuration of the wiring layer 200T. Hereinafter, the configuration of the second substrate 200 will be described with reference to FIGS. 8 to 12 together with FIG. 6. In FIGS. 8 and 9, the outline of the photodiode PD (the boundary between the pixel isolation section 117 and the photodiode PD) is shown by a dashed line, and the boundary between the semiconductor layer 200S and the element isolation region 213 or the insulating region 214 in the portion overlapping the gate electrode of each transistor constituting the pixel circuit 210 is shown by a dotted line. In the portion overlapping the gate electrode of the amplifying transistor AMP, a boundary between the semiconductor layer 200S and the element isolation region 213 and a boundary between the element isolation region 213 and the insulating region 212 are provided on one side in the channel width direction.

[0072] The second substrate 200 is provided with an insulating region 212 that divides the semiconductor layer 200S and an element isolation region 213 provided in a part of the semiconductor layer 200S in the thickness direction (FIG. 6). For example, in the insulating region 212 provided between two pixel circuits 210 adjacent to each other in the H direction, the through electrodes 120E, 121E and through electrodes TGV (through electrodes TGV1, TGV2, TGV3, TGV4) of two pixel sharing units 539 connected to the two pixel circuits 210 are arranged (FIG. 9).

[0073] The insulating region 212 has approximately the same thickness as the semiconductor layer 200S (FIG. 6). The semiconductor layer 200S is divided by this insulating region 212. The through electrodes 120E, 121E and the through electrodes TGV are arranged in this insulating region 212. The insulating region 212 is made of, for example, silicon oxide.

[0074] The through electrodes 120E, 121E are provided penetrating the insulating region 212 in the thickness direction. The upper ends of the through electrodes 120E, 121E are connected to the wirings (first wiring W1, second wiring W2, third wiring W3, and fourth wiring W4 described later) of the wiring layer 200T. The through electrodes 120E, 121E are provided penetrating the insulating region 212, the bonding film 124, the interlayer insulating film 123, and the passivation film 122, and the lower ends are connected to the pad parts 120, 121 (FIG. 6). The through electrodes 120E are for electrically connecting the pad part 120 and the pixel circuit 210. That is, the floating diffusion FD of the first substrate 100 is electrically connected to the pixel circuit 210 of the second substrate 200 by the through electrodes 120E. The through electrode 121E is for electrically connecting the pad portion 121 and the reference potential line VSS of the wiring layer 200T. That is, the through electrode 121E electrically connects the VSS contact region 118 of the first substrate 100 to the reference potential line VSS of the second substrate 200.

[0075] The through electrode TGV is provided to penetrate the insulating region 212 in the thickness direction. The upper end of the through electrode TGV is connected to the wiring of the wiring layer 200T. This through electrode TGV is provided to penetrate the insulating region 212, the bonding film 124, the interlayer insulating film 123, the passivation film 122, and the interlayer insulating film 119, and its lower end is connected to the transfer gate TG (FIG. 6). Such a through electrode TGV is for electrically connecting the transfer gate TG (transfer gates TG1, TG2, TG3, TG4) of each of the pixels 541A, 541B, 541C, 541D to the wiring of the wiring layer 200T (a part of the row driving signal line 542, specifically, the wiring TRG1, TRG2, TRG3, TRG4 in FIG. 11 described later). That is, the transfer gate TG of the first substrate 100 is electrically connected to the wiring TRG of the second substrate 200 by the through electrode TGV, so that a drive signal is sent to each of the transfer transistors TR (transfer transistors TR1, TR2, TR3, TR4).

[0076] The insulating region 212 is a region for providing the through electrodes 120E, 121E and the through electrodes TGV for electrically connecting the first substrate 100 and the second substrate 200 insulated from the semiconductor layer 200S. For example, the through electrodes 120E, 121E and the through electrodes TGV (through electrodes TGV1, TGV2, TGV3, TGV4) connected to the two pixel circuits 210 (pixel sharing units 539) adjacent to each other in the H direction are provided in the insulating region 212. The insulating region 212 is provided, for example, extending in the V direction (FIGS. 8 and 9). Here, the position of the through electrodes TGV in the H direction is arranged closer to the position of the through electrodes 120E, 121E in the H direction than the position of the vertical part TGa by devising the arrangement of the horizontal part TGb of the transfer gate TG (FIGS. 7A and 9). For example, the through electrode TGV is disposed at approximately the same position as the through electrodes 120E, 120E in the H direction. This allows the through electrodes 120E, 121E and the through electrode TGV to be provided together in the insulating region 212 extending in the V direction. As another arrangement example, it is possible to provide the horizontal part TGb only in the region overlapping the vertical part TGa. In this case, the through electrode TGV is formed approximately directly above the vertical part TGa, and the through electrode TGV is disposed, for example, in the approximately center of each pixel 541 in the H direction and the V direction. At this time, the position of the through electrode TGV in the H direction and the position of the through electrodes 120E, 121E in the H direction are largely shifted. For example, an insulating region 212 is provided around the through electrodes TGV and the through electrodes 120E, 121E to electrically insulate them from the adjacent semiconductor layer 200S. When the position of the through electrode TGV in the H direction is significantly separated from the positions of the through electrodes 120E, 121E in the H direction, it is necessary to provide an insulating region 212 independently around each of the through electrodes 120E, 121E, and TGV. This results in the semiconductor layer 200S being divided into small pieces. In contrast, a layout in which the through electrodes 120E, 121E and the through electrode TGV are collectively disposed in the insulating region 212 extending in the V direction can increase the size of the semiconductor layer 200S in the H direction. This makes it possible to secure a large area for the semiconductor element formation region in the semiconductor layer 200S.This makes it possible, for example, to increase the size of the amplification transistor AMP and suppress noise.

[0077] As described with reference to FIG. 4, the pixel sharing unit 539 has a structure in which the floating diffusions FD provided in the respective pixels 541 are electrically connected to each other, and the pixels 541 share one pixel circuit 210. The floating diffusions FD are electrically connected to each other by the pad section 120 provided on the first substrate 100 (FIGS. 6 and 7B). The electrical connection section (pad section 120) provided on the first substrate 100 and the pixel circuit 210 provided on the second substrate 200 are electrically connected to each other via one through electrode 120E. As another structural example, it is also possible to provide the electrical connection section between the floating diffusions FD on the second substrate 200. In this case, the pixel sharing unit 539 is provided with four through electrodes connected to the floating diffusions FD1, FD2, FD3, and FD4, respectively. Therefore, in the second substrate 200, the number of through electrodes that penetrate the semiconductor layer 200S increases, and the insulating region 212 that insulates the periphery of these through electrodes becomes larger. In comparison, the structure in which the pad portion 120 is provided on the first substrate 100 (FIGS. 6 and 7B) can reduce the number of through electrodes and the insulating region 212. This makes it possible to secure a large area for the semiconductor element formation region in the semiconductor layer 200S. This makes it possible to increase the size of the amplification transistor AMP, for example, and suppress noise.

[0078] The element isolation region 213 is provided on the surface side of the semiconductor layer 200S. The element isolation region 213 has an STI (Shallow Trench Isolation) structure. In the element isolation region 213, the semiconductor layer 200S is dug in the thickness direction (perpendicular to the main surface of the second substrate 200), and an insulating film is embedded in the dug portion. The insulating film is made of, for example, silicon oxide. The element isolation region 213 isolates a plurality of transistors constituting the pixel circuit 210 according to the layout of the pixel circuit 210. The semiconductor layer 200S (specifically, the well region 211) extends below the element isolation region 213 (deep in the semiconductor layer 200S).

[0079] Here, with reference to Figures 7A, 7B, and 8, the difference between the outer shape (outer shape in the substrate planar direction) of the pixel sharing unit 539 on the first substrate 100 and the outer shape of the pixel sharing unit 539 on the second substrate 200 will be described.

[0080] In the imaging device 1, a pixel sharing unit 539 is provided across both the first substrate 100 and the second substrate 200. For example, the outer shape of the pixel sharing unit 539 provided on the first substrate 100 and the outer shape of the pixel sharing unit 539 provided on the second substrate 200 are different from each other.

[0081] 7A and 7B, the outlines of the pixels 541A, 541B, 541C, and 541D are indicated by dashed lines, and the outline shape of the pixel sharing unit 539 is indicated by a thick line. For example, the pixel sharing unit 539 of the first substrate 100 is configured with two pixels 541 (pixels 541A and 541B) adjacent to each other in the H direction and two pixels 541 (pixels 541C and 541D) adjacent to each other in the V direction. That is, the pixel sharing unit 539 of the first substrate 100 is configured with four pixels 541 arranged in two rows and two columns adjacent to each other, and the pixel sharing unit 539 of the first substrate 100 has a substantially square outline shape. In the pixel array section 540, such pixel sharing units 539 are arranged adjacent to each other at a two pixel pitch in the H direction (a pitch equivalent to two pixels 541) and at a two pixel pitch in the V direction (a pitch equivalent to two pixels 541).

[0082] 8 and 9, the outlines of the pixels 541A, 541B, 541C, and 541D are indicated by dashed lines, and the outline shape of the pixel sharing unit 539 is indicated by a thick line. For example, the outline shape of the pixel sharing unit 539 of the second substrate 200 is smaller than that of the pixel sharing unit 539 of the first substrate 100 in the H direction, and is larger than that of the pixel sharing unit 539 of the first substrate 100 in the V direction. For example, the pixel sharing unit 539 of the second substrate 200 is formed with a size (area) equivalent to one pixel in the H direction, and is formed with a size equivalent to four pixels in the V direction. That is, the pixel sharing unit 539 of the second substrate 200 is formed with a size equivalent to adjacent pixels arranged in one row by four columns, and the pixel sharing unit 539 of the second substrate 200 has a substantially rectangular outline shape.

[0083] For example, in each pixel circuit 210, the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG are arranged in this order in the V direction (FIG. 8). By providing the outer shape of each pixel circuit 210 in a substantially rectangular shape as described above, it is possible to arrange four transistors (the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG) in one direction (the V direction in FIG. 8). This allows the drain of the amplification transistor AMP and the drain of the reset transistor RST to be shared in one diffusion region (the diffusion region connected to the power supply line VDD). For example, it is also possible to provide the formation region of each pixel circuit 210 in a substantially square shape (see FIG. 21 described later). In this case, two transistors are arranged along one direction, and it becomes difficult to share the drain of the amplification transistor AMP and the drain of the reset transistor RST in one diffusion region. Therefore, by providing the formation region of the pixel circuit 210 in a substantially rectangular shape, it becomes easier to arrange the four transistors closely to each other, and the formation region of the pixel circuit 210 can be made smaller. That is, the pixel can be miniaturized. Furthermore, when it is not necessary to reduce the formation area of ​​the pixel circuit 210, it is possible to increase the formation area of ​​the amplification transistor AMP and suppress noise.

[0084] For example, in addition to the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG, a VSS contact region 218 connected to a reference potential line VSS is provided near the surface of the semiconductor layer 200S. The VSS contact region 218 is, for example, configured of a p-type semiconductor region. The VSS contact region 218 is electrically connected to the VSS contact region 118 of the first substrate 100 (semiconductor layer 100S) via the wiring of the wiring layer 200T and the through electrode 121E. This VSS contact region 218 is provided, for example, at a position adjacent to the source of the FD conversion gain switching transistor FDG with the element isolation region 213 therebetween (FIG. 8).

[0085] Next, the positional relationship between the pixel sharing unit 539 provided on the first substrate 100 and the pixel sharing unit 539 provided on the second substrate 200 will be described with reference to Fig. 7B and Fig. 8. For example, one of the two pixel sharing units 539 arranged in the V direction of the first substrate 100 (for example, the upper side of the paper in Fig. 7B) is connected to one of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (for example, the left side of the paper in Fig. 8). For example, the other of the two pixel sharing units 539 arranged in the V direction of the first substrate 100 (for example, the lower side of the paper in Fig. 7B) is connected to the other of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (for example, the right side of the paper in Fig. 8).

[0086] For example, of two pixel sharing units 539 arranged in the H direction of the second substrate 200, the internal layout (arrangement of transistors, etc.) of one pixel sharing unit 539 is substantially equal to a layout obtained by inverting the internal layout of the other pixel sharing unit 539 in the V direction and H direction. The effects obtained by this layout will be described below.

[0087] In two pixel sharing units 539 arranged in the V direction of the first substrate 100, each pad section 120 is disposed at the center of the outer shape of the pixel sharing unit 539, that is, the center of the pixel sharing unit 539 in the V direction and the H direction (FIG. 7B). On the other hand, since the pixel sharing unit 539 of the second substrate 200 has an outer shape of a substantially rectangle elongated in the V direction as described above, for example, the amplification transistor AMP connected to the pad section 120 is disposed at a position shifted upward from the center of the pixel sharing unit 539 in the V direction on the paper. For example, when the internal layout of two pixel sharing units 539 arranged in the H direction of the second substrate 200 is the same, the distance between the amplification transistor AMP of one pixel sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel sharing unit 539 on the upper side of the paper in FIG. 7) becomes relatively short. However, the distance between the amplification transistor AMP of the other pixel sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel sharing unit 539 on the lower side of the paper surface of FIG. 7) becomes longer. Therefore, the area of ​​the wiring required to connect the amplification transistor AMP and the pad section 120 becomes larger, and there is a concern that the wiring layout of the pixel sharing unit 539 becomes complicated. This may affect the miniaturization of the imaging device 1.

[0088] In contrast, by inverting the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 at least in the V direction, the distance between the amplifier transistors AMP and the pad section 120 of both of these two pixel sharing units 539 can be shortened. Therefore, compared with a configuration in which the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 are the same, it is easier to miniaturize the imaging device 1. Note that the planar layout of each of the multiple pixel sharing units 539 of the second substrate 200 is symmetrical within the range shown in FIG. 8, but becomes asymmetrical when the layout of the first wiring layer W1 shown in FIG. 9 described later is included.

[0089] In addition, it is preferable that the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 are also inverted with respect to each other in the H direction. The reason for this will be described below. As shown in FIG. 9, the two pixel sharing units 539 arranged in the H direction of the second substrate 200 are connected to the pad sections 120, 121 of the first substrate 100. For example, the pad sections 120, 121 are disposed in the center of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (between the two pixel sharing units 539 arranged in the H direction). Therefore, by inverting the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 with respect to each other in the H direction, the distance between each of the multiple pixel sharing units 539 of the second substrate 200 and the pad sections 120, 121 can be reduced. That is, it becomes easier to miniaturize the imaging device 1.

[0090] In addition, the position of the outline of the pixel sharing unit 539 of the second substrate 200 may not be aligned with the position of any of the outlines of the pixel sharing unit 539 of the first substrate 100. For example, of the two pixel sharing units 539 arranged in the H direction of the second substrate 200, in one pixel sharing unit 539 (for example, the left side of the paper in FIG. 9), the outline of one side in the V direction (for example, the upper side of the paper in FIG. 9) is disposed outside the outline of one side in the V direction of the corresponding pixel sharing unit 539 of the first substrate 100 (for example, the upper side of the paper in FIG. 7B). In addition, of the two pixel sharing units 539 arranged in the H direction of the second substrate 200, in the other pixel sharing unit 539 (for example, the right side of the paper in FIG. 9), the outline of the other side in the V direction (for example, the lower side of the paper in FIG. 9) is disposed outside the outline of the other side in the V direction of the corresponding pixel sharing unit 539 of the first substrate 100 (for example, the lower side of the paper in FIG. 7B). In this way, by disposing the pixel sharing unit 539 of the second substrate 200 and the pixel sharing unit 539 of the first substrate 100 relative to each other, it is possible to shorten the distance between the amplification transistor AMP and the pad section 120. Therefore, it becomes easier to miniaturize the imaging device 1.

[0091] Furthermore, the positions of the outlines of the multiple pixel sharing units 539 on the second substrate 200 do not need to be aligned with each other. For example, two pixel sharing units 539 aligned in the H direction of the second substrate 200 are arranged with the positions of the outlines in the V direction shifted from each other. This makes it possible to shorten the distance between the amplification transistor AMP and the pad section 120. This makes it easier to miniaturize the imaging device 1.

[0092] With reference to FIG. 7B and FIG. 9, the repeated arrangement of the pixel sharing units 539 in the pixel array section 540 will be described. The pixel sharing unit 539 of the first substrate 100 has a size equivalent to two pixels 541 in the H direction and a size equivalent to two pixels 541 in the V direction (FIG. 7B). For example, in the pixel array section 540 of the first substrate 100, the pixel sharing units 539 having a size equivalent to four pixels 541 are repeatedly arranged adjacent to each other at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and at a two pixel pitch (a pitch equivalent to two pixels 541) in the V direction. Alternatively, the pixel array section 540 of the first substrate 100 may be provided with a pair of pixel sharing units 539 in which two pixel sharing units 539 are arranged adjacent to each other in the V direction. In the pixel array section 540 of the first substrate 100, for example, a pair of pixel sharing units 539 are repeatedly arranged adjacent to each other at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and at a four pixel pitch (a pitch equivalent to four pixels 541) in the V direction. The pixel sharing unit 539 of the second substrate 200 has a size equivalent to one pixel 541 in the H direction and a size equivalent to four pixels 541 in the V direction (FIG. 9). For example, the pixel array section 540 of the second substrate 200 is provided with a pair of pixel sharing units 539 including two pixel sharing units 539 each having a size equivalent to four pixels 541. The pixel sharing units 539 are arranged adjacent to each other in the H direction and offset from each other in the V direction. In the pixel array section 540 of the second substrate 200, for example, a pair of pixel sharing units 539 are repeatedly arranged adjacent to each other with no gaps at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and at a four pixel pitch (a pitch equivalent to four pixels 541) in the V direction. By repeatedly arranging the pixel sharing units 539 in this way, it is possible to arrange the pixel sharing units 539 without any gaps. This makes it easier to miniaturize the imaging device 1.

[0093] It is preferable that the amplification transistor AMP has a three-dimensional structure, such as a Fin type (FIG. 6). This increases the effective gate width, making it possible to suppress noise. The selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG have, for example, a planar structure. The amplification transistor AMP may have a planar structure. Alternatively, the selection transistor SEL, the reset transistor RST, or the FD conversion gain switching transistor FDG may have a three-dimensional structure.

[0094] The wiring layer 200T includes, for example, a passivation film 221, an interlayer insulating film 222, and a plurality of wirings (a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, and a fourth wiring layer W4). The passivation film 221 is in contact with, for example, the surface of the semiconductor layer 200S, and covers the entire surface of the semiconductor layer 200S. This passivation film 221 covers the gate electrodes of the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG. The interlayer insulating film 222 is provided between the passivation film 221 and the third substrate 300. This interlayer insulating film 222 separates the plurality of wirings (the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, and the fourth wiring layer W4). The interlayer insulating film 222 is made of, for example, silicon oxide.

[0095] In the wiring layer 200T, for example, from the semiconductor layer 200S side, a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, a fourth wiring layer W4, and contact parts 201, 202 are provided in this order, and these are insulated from each other by an interlayer insulating film 222. In the interlayer insulating film 222, a plurality of connection parts are provided to connect the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, or the fourth wiring layer W4 to the layers below them. The connection parts are parts in which a conductive material is embedded in connection holes provided in the interlayer insulating film 222. For example, in the interlayer insulating film 222, a connection part 218V is provided to connect the first wiring layer W1 and the VSS contact region 218 of the semiconductor layer 200S. For example, the hole diameter of such a connection part that connects elements of the second substrate 200 to each other is different from the hole diameters of the through electrodes 120E, 121E and the through electrodes TGV. Specifically, the diameter of the connection hole connecting the elements of the second substrate 200 is preferably smaller than the diameter of the through electrodes 120E, 121E and the through electrode TGV. The reason for this will be described below. The depth of the connection part (connection part 218V, etc.) provided in the wiring layer 200T is smaller than the depth of the through electrodes 120E, 121E and the through electrode TGV. Therefore, the connection part can be filled with a conductive material more easily than the through electrodes 120E, 121E and the through electrode TGV. By making the diameter of the connection part smaller than the diameter of the through electrodes 120E, 121E and the through electrode TGV, it becomes easier to miniaturize the imaging device 1.

[0096] For example, the first wiring layer W1 connects the through electrode 120E to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG (specifically, a connection hole reaching the source of the FD conversion gain switching transistor FDG). The first wiring layer W1 connects, for example, the through electrode 121E to the connection portion 218V, thereby electrically connecting the VSS contact region 218 of the semiconductor layer 200S to the VSS contact region 118 of the semiconductor layer 100S.

[0097] Next, the planar configuration of the wiring layer 200T will be described with reference to Fig. 10 to Fig. 12. Fig. 10 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2. Fig. 11 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3. Fig. 12 shows an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4.

[0098] For example, the third wiring layer W3 includes wirings TRG1, TRG2, TRG3, TRG4, SELL, RSTL, and FDGL extending in the H direction (row direction) (FIG. 11). These wirings correspond to the row driving signal lines 542 described with reference to FIG. 4. The wirings TRG1, TRG2, TRG3, and TRG4 are for sending driving signals to the transfer gates TG1, TG2, TG3, and TG4, respectively. The wirings TRG1, TRG2, TRG3, and TRG4 are connected to the transfer gates TG1, TG2, TG3, and TG4 via the second wiring layer W2, the first wiring layer W1, and the through-electrode 120E, respectively. The wiring SELL is for sending a driving signal to the gate of the selection transistor SEL, the wiring RSTL is for sending a driving signal to the gate of the reset transistor RST, and the wiring FDGL is for sending a driving signal to the gate of the FD conversion gain switching transistor FDG, respectively. The wirings SELL, RSTL, and FDGL are each connected to the gates of the selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG via the second wiring layer W2, the first wiring layer W1, and a connection portion.

[0099] For example, the fourth wiring layer W4 includes a power supply line VDD, a reference potential line VSS, and a vertical signal line 543 extending in the V direction (column direction) (FIG. 12). The power supply line VDD is connected to the drain of the amplification transistor AMP and the drain of the reset transistor RST via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part. The reference potential line VSS is connected to the VSS contact region 218 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part 218V. The reference potential line VSS is also connected to the VSS contact region 118 of the first substrate 100 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, the through electrode 121E, and the pad part 121. The vertical signal line 543 is connected to the source (Vout) of the selection transistor SEL via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part.

[0100] The contact parts 201 and 202 may be provided at positions overlapping the pixel array part 540 in a plan view (for example, FIG. 3), or may be provided in the outer peripheral part 540B of the pixel array part 540 (for example, FIG. 6). The contact parts 201 and 202 are provided on the surface of the second substrate 200 (surface on the wiring layer 200T side). The contact parts 201 and 202 are made of metal such as Cu (copper) and Al (aluminum). The contact parts 201 and 202 are exposed on the surface of the wiring layer 200T (surface on the third substrate 300 side). The contact parts 201 and 202 are used for electrical connection between the second substrate 200 and the third substrate 300 and for bonding the second substrate 200 and the third substrate 300 together.

[0101] 6 illustrates an example in which a peripheral circuit is provided in the peripheral portion 540B of the second substrate 200. This peripheral circuit may include a part of the row driving section 520 or a part of the column signal processing section 550. As illustrated in FIG. 3, the peripheral circuit may not be provided in the peripheral portion 540B of the second substrate 200, and the connection holes H1 and H2 may be provided in the vicinity of the pixel array section 540.

[0102] The third substrate 300 has, for example, a wiring layer 300T and a semiconductor layer 300S in this order from the second substrate 200 side. For example, the surface of the semiconductor layer 300S is provided on the second substrate 200 side. The semiconductor layer 300S is made of a silicon substrate. A circuit is provided on the surface side of the semiconductor layer 300S. Specifically, for example, at least a part of the input unit 510A, the row driver 520, the timing control unit 530, the column signal processing unit 550, the image signal processing unit 560, and the output unit 510B is provided on the surface side of the semiconductor layer 300S. The wiring layer 300T provided between the semiconductor layer 300S and the second substrate 200 includes, for example, an interlayer insulating film, a plurality of wiring layers separated by the interlayer insulating film, and contact units 301 and 302. The contact parts 301 and 302 are exposed on the surface (surface on the second substrate 200 side) of the wiring layer 300T, and the contact part 301 is in contact with the contact part 201 of the second substrate 200, and the contact part 302 is in contact with the contact part 202 of the second substrate 200. The contact parts 301 and 302 are electrically connected to circuits (for example, at least one of the input part 510A, the row driving part 520, the timing control part 530, the column signal processing part 550, the image signal processing part 560, and the output part 510B) formed in the semiconductor layer 300S. The contact parts 301 and 302 are made of metals such as Cu (copper) and aluminum (Al). For example, the external terminal TA is connected to the input part 510A via the connection hole part H1, and the external terminal TB is connected to the output part 510B via the connection hole part H2.

[0103] Here, the features of the imaging device 1 will be described.

[0104] In general, an imaging device mainly consists of a photodiode and a pixel circuit. Increasing the area of ​​the photodiode increases the charge generated as a result of photoelectric conversion, thereby improving the signal-to-noise ratio (S / N ratio) of the pixel signal, and enabling the imaging device to output better image data (image information). On the other hand, increasing the size of the transistors (especially the size of the amplifying transistors) included in the pixel circuit reduces the noise generated in the pixel circuit, thereby improving the S / N ratio of the imaging signal, and enabling the imaging device to output better image data (image information).

[0105] However, in an imaging device in which a photodiode and a pixel circuit are provided on the same semiconductor substrate, if the area of ​​the photodiode is increased within the limited area of ​​the semiconductor substrate, the size of the transistor in the pixel circuit may be reduced, and if the size of the transistor in the pixel circuit is increased, the area of ​​the photodiode may be reduced.

[0106] To solve these problems, for example, the imaging device 1 of the present embodiment uses a structure in which a plurality of pixels 541 share one pixel circuit 210, and the shared pixel circuit 210 is arranged to overlap the photodiode PD. This makes it possible to maximize the area of ​​the photodiode PD and maximize the size of the transistor provided in the pixel circuit 210 within the limited area of ​​the semiconductor substrate. This improves the S / N ratio of the pixel signal, and enables the imaging device 1 to output better image data (image information).

[0107] When implementing a structure in which a plurality of pixels 541 share one pixel circuit 210 and this is arranged to overlap the photodiode PD, a plurality of wirings connected to one pixel circuit 210 extend from the floating diffusion FD of each of the plurality of pixels 541. In order to secure a large area of ​​the semiconductor substrate 200 in which the pixel circuit 210 is formed, for example, a connection wiring can be formed that connects the plurality of extending wirings to each other and combines them into one. Similarly, a connection wiring can be formed for the plurality of wirings extending from the VSS contact region 118, by connecting the plurality of extending wirings to each other and combining them into one.

[0108] For example, if a connection wiring that interconnects the multiple wirings extending from the floating diffusion FD of each of the multiple pixels 541 is formed in the semiconductor substrate 200 that forms the pixel circuit 210, it is conceivable that the area for forming the transistors included in the pixel circuit 210 will be reduced. Similarly, if a connection wiring that interconnects the multiple wirings extending from the VSS contact region 118 of each of the multiple pixels 541 and combines them into one is formed in the semiconductor substrate 200 that forms the pixel circuit 210, it is conceivable that the area for forming the transistors included in the pixel circuit 210 will be reduced.

[0109] In order to solve these problems, for example, the imaging device 1 of this embodiment can be configured to have a structure in which a plurality of pixels 541 share one pixel circuit 210, and the shared pixel circuit 210 is arranged superimposed on a photodiode PD, and the first substrate 100 can be provided with a connection wiring that interconnects and combines the floating diffusions FD of the plurality of pixels 541, and a connection wiring that interconnects and combines the VSS contact regions 118 provided in each of the plurality of pixels 541.

[0110] Here, when the above-mentioned second manufacturing method is used as a manufacturing method for providing the first substrate 100 with the connection wiring for mutually connecting and integrating the floating diffusions FD of the plurality of pixels 541 and the connection wiring for mutually connecting and integrating the VSS contact regions 118 of the plurality of pixels 541, for example, the first substrate 100 and the second substrate 200 can be manufactured using an appropriate process according to the configuration of each substrate, and a high-quality, high-performance imaging device can be manufactured. In addition, the connection wiring of the first substrate 100 and the second substrate 200 can be formed by a simple process. Specifically, when the above-mentioned second manufacturing method is used, an electrode connected to the floating diffusion FD and an electrode connected to the VSS contact region 118 are provided on the surface of the first substrate 100 and the surface of the second substrate 200, which are the bonding interface between the first substrate 100 and the second substrate 200, respectively. Furthermore, it is preferable to make the electrodes formed on the surfaces of the two substrates large so that the electrodes can contact each other even if a positional deviation occurs between the electrodes provided on the surfaces of the two substrates when the first substrate 100 and the second substrate 200 are bonded together. In this case, it may become difficult to arrange the electrodes within the limited area of ​​each pixel of the imaging device 1.

[0111] In order to solve the problem of needing a large electrode at the bonding interface between the first substrate 100 and the second substrate 200, for example, the imaging device 1 of this embodiment can use the first manufacturing method described above as a manufacturing method in which a plurality of pixels 541 share one pixel circuit 210 and the shared pixel circuit 210 is arranged so as to overlap the photodiode PD. This makes it easy to align the elements formed on the first substrate 100 and the second substrate 200, respectively, and makes it possible to manufacture a high-quality, high-performance imaging device. Furthermore, it is possible to have a unique structure that is generated by using this manufacturing method. That is, the structure has a semiconductor layer 100S and wiring layer 100T of the first substrate 100 and a semiconductor layer 200S and wiring layer 200T of the second substrate 200 stacked in this order, in other words, a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back, and has through electrodes 120E, 121E that pass from the surface side of the semiconductor layer 200S of the second substrate 200, through the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reach the surface of the semiconductor layer 100S of the first substrate 100.

[0112] In a structure in which a first substrate 100 is provided with connection wiring that interconnects and combines the floating diffusions FD of the multiple pixels 541 and connection wiring that interconnects and combines the VSS contact regions 118 of the multiple pixels 541, if this structure is stacked on a second substrate 200 using the first manufacturing method to form a pixel circuit 210 on the second substrate 200, there is a possibility that the influence of the heat treatment required to form the active elements provided in the pixel circuit 210 will extend to the connection wiring formed on the first substrate 100.

[0113] Therefore, in order to solve the problem that the heat treatment when forming the active elements affects the connection wiring, the imaging device 1 of this embodiment desirably uses a conductive material with high heat resistance for the connection wiring that connects the floating diffusions FD of the respective pixels 541 to each other and combines them into one, and for the connection wiring that connects the VSS contact regions 118 of the respective pixels 541 to each other and combines them into one. Specifically, the conductive material with high heat resistance can be a material with a melting point higher than at least a part of the wiring material included in the wiring layer 200T of the second substrate 200.

[0114] In this manner, for example, the imaging device 1 of the present embodiment has: (1) a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back (specifically, a structure in which the semiconductor layer 100S and the wiring layer 100T of the first substrate 100 and the semiconductor layer 200S and the wiring layer 200T of the second substrate 200 are stacked in this order); (2) a structure in which through-electrodes 120E, 121E are provided from the front surface side of the semiconductor layer 200S of the second substrate 200, penetrating the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reaching the front surface of the semiconductor layer 100S of the first substrate 100; and (3) a structure in which the floating diffusions FD provided in each of the plurality of pixels 541 are provided. By providing a structure in which the first substrate 100 and the second substrate 200 have connection wiring that interconnects the floating diffusions FD of the respective pixels 541 to combine them into one, and connection wiring that interconnects the VSS contact regions 118 of the respective pixels 541 to combine them into one, without providing a large electrode at the interface between the first substrate 100 and the second substrate 200, it is possible to provide the first substrate 100 with connection wiring that interconnects the floating diffusions FD of the respective pixels 541 to combine them into one, and connection wiring that connects the VSS contact regions 118 of the respective pixels 541 to combine them into one.

[0115] [Operation of imaging device 1] Next, the operation of the imaging device 1 will be described with reference to Figs. 13 and 14. Figs. 13 and 14 are diagrams in which arrows representing the paths of each signal have been added to Fig. 3. Fig. 13 shows the paths of the input signal input from the outside to the imaging device 1, the power supply potential, and the reference potential with arrows. Fig. 14 shows the signal paths of the pixel signals output from the imaging device 1 to the outside with arrows. For example, an input signal (e.g., a pixel clock and a synchronization signal) input to the imaging device 1 via the input section 510A is transmitted to the row driver 520 of the third substrate 300, and a row drive signal is generated in the row driver 520. This row drive signal is sent to the second substrate 200 via the contact sections 301 and 201. Furthermore, this row drive signal reaches each of the pixel shared units 539 of the pixel array section 540 via a row drive signal line 542 in the wiring layer 200T. Among the row driving signals that reach the pixel sharing unit 539 of the second substrate 200, the driving signals other than the transfer gate TG are input to the pixel circuit 210, and each transistor included in the pixel circuit 210 is driven. The driving signal of the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 of the first substrate 100 via the through electrode TGV, and the pixels 541A, 541B, 541C, and 541D are driven (FIG. 13). In addition, the power supply potential and the reference potential supplied to the input section 510A (input terminal 511) of the third substrate 300 from the outside of the imaging device 1 are sent to the second substrate 200 via the contact sections 301 and 201, and are supplied to the pixel circuits 210 of each pixel sharing unit 539 via the wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D of the first substrate 100 via the through electrode 121E. Meanwhile, pixel signals photoelectrically converted by the pixels 541A, 541B, 541C, and 541D of the first substrate 100 are sent to the pixel circuit 210 of the second substrate 200 for each pixel sharing unit 539 via the through-electrode 120E. A pixel signal based on this pixel signal is sent from the pixel circuit 210 to the third substrate 300 via the vertical signal line 543 and the contact units 202 and 302. This pixel signal is processed by the column signal processing unit 550 and the image signal processing unit 560 of the third substrate 300, and then output to the outside via the output unit 510B.

[0116] [effect] In this embodiment, the pixels 541A, 541B, 541C, and 541D (pixel sharing unit 539) and the pixel circuit 210 are provided on different substrates (first substrate 100 and second substrate 200). This allows the areas of the pixels 541A, 541B, 541C, and 541D and the pixel circuit 210 to be enlarged compared to when the pixels 541A, 541B, 541C, and 541D and the pixel circuit 210 are formed on the same substrate. As a result, it is possible to increase the amount of pixel signals obtained by photoelectric conversion and reduce the transistor noise of the pixel circuit 210. This improves the signal-to-noise ratio of the pixel signals, and the imaging device 1 can output better pixel data (image information). In addition, it is possible to miniaturize the imaging device 1 (in other words, reduce the pixel size and make the imaging device 1 smaller). The imaging device 1 can increase the number of pixels per unit area by reducing the pixel size, and output a high-quality image.

[0117] In addition, in the imaging device 1, the first substrate 100 and the second substrate 200 are electrically connected to each other by the through electrodes 120E, 121E provided in the insulating region 212. For example, a method of connecting the first substrate 100 and the second substrate 200 by bonding pad electrodes to each other, or a method of connecting by through wiring (for example, TSV (Thorough Si Via)) that penetrates a semiconductor layer can be considered. Compared to such methods, by providing the through electrodes 120E, 121E in the insulating region 212, the area required for connecting the first substrate 100 and the second substrate 200 can be reduced. This reduces the pixel size, and the imaging device 1 can be made more compact. In addition, the resolution can be increased by further miniaturizing the area per pixel. When it is not necessary to reduce the chip size, the formation area of ​​the pixels 541A, 541B, 541C, 541D and the pixel circuit 210 can be expanded. As a result, it is possible to increase the amount of pixel signals obtained by photoelectric conversion and reduce noise in the transistors provided in the pixel circuits 210. This improves the signal-to-noise ratio of the pixel signals, enabling the imaging device 1 to output better pixel data (image information).

[0118] Furthermore, in the imaging device 1, the pixel circuit 210, the column signal processing section 550, and the image signal processing section 560 are provided on different substrates (the second substrate 200 and the third substrate 300). This allows the area of ​​the pixel circuit 210 and the areas of the column signal processing section 550 and the image signal processing section 560 to be enlarged compared to a case in which the pixel circuit 210, the column signal processing section 550, and the image signal processing section 560 are formed on the same substrate. This allows noise generated in the column signal processing section 550 to be reduced, and allows the image signal processing section 560 to be equipped with a more advanced image processing circuit. This improves the signal-to-noise ratio of the pixel signal, and enables the imaging device 1 to output better pixel data (image information).

[0119] In the imaging device 1, the pixel array section 540 is provided on the first substrate 100 and the second substrate 200, and the column signal processing section 550 and the image signal processing section 560 are provided on the third substrate 300. The contact sections 201, 202, 301, and 302 that connect the second substrate 200 and the third substrate 300 are formed above the pixel array section 540. Therefore, the contact sections 201, 202, 301, and 302 can be freely laid out without being interfered with in the layout by various wirings provided in the pixel array. This makes it possible to use the contact sections 201, 202, 301, and 302 for electrical connection between the second substrate 200 and the third substrate 300. By using the contact sections 201, 202, 301, and 302, for example, the column signal processing section 550 and the image signal processing section 560 have a high degree of freedom in layout. This makes it possible to reduce noise generated in the column signal processing unit 550 and to incorporate a more advanced image processing circuit in the image signal processing unit 560. Therefore, the signal-to-noise ratio of the pixel signals is improved, and the imaging device 1 can output better pixel data (image information).

[0120] Furthermore, in the imaging device 1, the pixel separator 117 penetrates the semiconductor layer 100S. This makes it possible to suppress color mixing between the pixels 541A, 541B, 541C, and 541D even if the distance between adjacent pixels (pixels 541A, 541B, 541C, and 541D) is reduced due to miniaturization of the area per pixel. This improves the signal-to-noise ratio of the pixel signal, enabling the imaging device 1 to output better pixel data (image information).

[0121] Furthermore, in the imaging device 1, a pixel circuit 210 is provided for each pixel sharing unit 539. This allows the formation area of ​​the transistors (amplification transistor AMP, reset transistor RST, selection transistor SEL, FD conversion gain switching transistor FDG) that constitute the pixel circuit 210 to be larger than when a pixel circuit 210 is provided for each of the pixels 541A, 541B, 541C, and 541D. For example, by increasing the formation area of ​​the amplification transistor AMP, it is possible to suppress noise. This improves the signal-to-noise ratio of the pixel signal, and enables the imaging device 1 to output better pixel data (image information).

[0122] Furthermore, in the imaging device 1, the pad section 120 that electrically connects the floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) of the four pixels (pixels 541A, 541B, 541C, 541D) is provided on the first substrate 100. This makes it possible to reduce the number of through electrodes (through electrodes 120E) that connect the first substrate 100 and the second substrate 200, compared to the case where such a pad section 120 is provided on the second substrate 200. Therefore, it is possible to reduce the insulating region 212 and ensure a sufficient size of the formation region (semiconductor layer 200S) of the transistors that constitute the pixel circuit 210. This makes it possible to reduce noise of the transistors provided in the pixel circuit 210, improve the signal-to-noise ratio of the pixel signal, and enable the imaging device 1 to output better pixel data (image information).

[0123] Modifications of the imaging device 1 according to the above embodiment will be described below. In the following modifications, components common to the above embodiment will be denoted by the same reference numerals.

[0124] <2. Variation 1> 15 to 19 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 15 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 8 described in the above embodiment. FIG. 16 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 9 described in the above embodiment. FIG. 17 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 10 described in the above embodiment. FIG. 18 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 11 described in the above embodiment. FIG. 19 shows an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 12 described in the above embodiment.

[0125] In this modification, as shown in Fig. 16, of two pixel sharing units 539 arranged in the H direction of the second substrate 200, the internal layout of one pixel sharing unit 539 (e.g., the right side of the paper) is configured to be inverted only in the H direction from the internal layout of the other pixel sharing unit 539 (e.g., the left side of the paper). Also, the deviation in the V direction between the outline of one pixel sharing unit 539 and the outline of the other pixel sharing unit 539 is larger than the deviation described in the above embodiment (Fig. 9). In this way, by increasing the deviation in the V direction, it is possible to reduce the distance between the amplification transistor AMP of the other pixel sharing unit 539 and the pad section 120 connected thereto (the pad section 120 of the other (lower side of the paper) of the two pixel sharing units 539 arranged in the V direction shown in Fig. 7). With such a layout, in the first modification of the imaging device 1 shown in FIGS. 15 to 19, the area of ​​the two pixel sharing units 539 arranged in the H direction can be made the same as that of the pixel sharing unit 539 of the second substrate 200 described in the above embodiment, without inverting the planar layouts of the two pixel sharing units 539 arranged in the H direction in the V direction. The planar layout of the pixel sharing unit 539 of the first substrate 100 is the same as the planar layout (FIGS. 7A and 7B) described in the above embodiment. Therefore, the imaging device 1 of this modification can obtain the same effect as the imaging device 1 described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangement described in the above embodiment and this modification.

[0126] <3. Variation 2> 20 to 25 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 20 shows a schematic planar configuration of the first substrate 100, and corresponds to FIG. 7A described in the above embodiment. FIG. 21 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 8 described in the above embodiment. FIG. 22 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 9 described in the above embodiment. FIG. 23 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 10 described in the above embodiment. FIG. 24 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 11 described in the above embodiment. FIG. 25 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 12 described in the above embodiment.

[0127] In this modification, the outer shape of each pixel circuit 210 has a substantially square planar shape (FIG. 21, etc.). In this respect, the planar configuration of the imaging device 1 of this modification differs from the planar configuration of the imaging device 1 described in the above embodiment.

[0128] For example, the pixel sharing unit 539 of the first substrate 100 is formed over a pixel region of 2 rows x 2 columns as described in the above embodiment, and has a substantially square planar shape ( FIG. 20 ). For example, in each pixel sharing unit 539, the horizontal portions TGb of the transfer gates TG1 and TG3 of the pixels 541A and 541C of one pixel column extend in a direction from a position overlapping with the vertical portion TGa toward the center of the pixel sharing unit 539 in the H direction (more specifically, in a direction toward the outer edges of the pixels 541A and 541C and toward the center of the pixel sharing unit 539), and the horizontal portions TGb of the transfer gates TG2 and TG4 of the pixels 541B and 541D of the other pixel column extend in a direction from a position overlapping with the vertical portion TGa toward the outside of the pixel sharing unit 539 in the H direction (more specifically, in a direction toward the outer edges of the pixels 541B and 541D and toward the outside of the pixel sharing unit 539). The pad portion 120 connected to the floating diffusion FD is provided in the center of the pixel sharing unit 539 (the center of the pixel sharing unit 539 in the H and V directions), and the pad portion 121 connected to the VSS contact region 118 is provided at the end of the pixel sharing unit 539 at least in the H direction (in the H and V directions in Figure 20).

[0129] As another arrangement example, it is possible to provide the horizontal parts TGb of the transfer gates TG1, TG2, TG3, and TG4 only in the region facing the vertical parts TGa. In this case, the semiconductor layer 200S is likely to be divided finely, as described in the above embodiment. Therefore, it is difficult to form the transistors of the pixel circuit 210 to be large. On the other hand, if the horizontal parts TGb of the transfer gates TG1, TG2, TG3, and TG4 are extended in the H direction from the position where they overlap with the vertical parts TGa as in the above modification, the width of the semiconductor layer 200S can be increased, as described in the above embodiment. Specifically, it is possible to arrange the positions in the H direction of the through electrodes TGV1 and TGV3 connected to the transfer gates TG1 and TG3 close to the position in the H direction of the through electrode 120E, and to arrange the positions in the H direction of the through electrodes TGV2 and TGV4 connected to the transfer gates TG2 and TG4 close to the position in the H direction of the through electrode 121E (FIG. 22). This allows the width (size in the H direction) of the semiconductor layer 200S extending in the V direction to be increased, as in the above embodiment. This allows the size of the transistors in the pixel circuit 210, particularly the size of the amplifying transistor AMP, to be increased. As a result, the signal-to-noise ratio of the pixel signal is improved, and the imaging device 1 can output better pixel data (image information).

[0130] The pixel sharing unit 539 of the second substrate 200 has, for example, approximately the same size in the H direction and the V direction as the pixel sharing unit 539 of the first substrate 100, and is provided, for example, over an area corresponding to a pixel area of ​​approximately 2 rows x 2 columns. For example, in each pixel circuit 210, a selection transistor SEL and an amplification transistor AMP are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction, and an FD conversion gain switching transistor FDG and a reset transistor RST are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction. The one semiconductor layer 200S in which the selection transistor SEL and the amplification transistor AMP are provided and the one semiconductor layer 200S in which the FD conversion gain switching transistor FDG and the reset transistor RST are provided are arranged side by side in the H direction via an insulating region 212. This insulating region 212 extends in the V direction (FIG. 21).

[0131] Here, the outer shape of the pixel sharing unit 539 of the second substrate 200 will be described with reference to Fig. 21 and Fig. 22. For example, the pixel sharing unit 539 of the first substrate 100 shown in Fig. 20 is connected to an amplification transistor AMP and a selection transistor SEL provided on one side of the H direction of the pad section 120 (the left side of the paper in Fig. 22), and an FD conversion gain switching transistor FDG and a reset transistor RST provided on the other side of the H direction of the pad section 120 (the right side of the paper in Fig. 22). The outer shape of the pixel sharing unit 539 of the second substrate 200 including the amplification transistor AMP, the selection transistor SEL, the FD conversion gain switching transistor FDG, and the reset transistor RST is determined by the following four outer edges.

[0132] The first outer edge is the outer edge of one end in the V direction (the end on the upper side of the paper in FIG. 22) of the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP. This first outer edge is provided between the amplification transistor AMP included in the pixel sharing unit 539 and the selection transistor SEL included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on one side in the V direction (the upper side of the paper in FIG. 22). More specifically, the first outer edge is provided in the center in the V direction of the element isolation region 213 between the amplification transistor AMP and the selection transistor SEL. The second outer edge is the outer edge of the other end in the V direction (the end on the lower side of the paper in FIG. 22) of the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP. This second outer edge is provided between the selection transistor SEL included in the pixel sharing unit 539 and the amplification transistor AMP included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on the other side in the V direction (the lower side of the paper in FIG. 22). More specifically, the second outer edge is provided in the center in the V direction of the element isolation region 213 between the selection transistor SEL and the amplification transistor AMP. The third outer edge is the outer edge of the other end in the V direction (the end on the lower side of the paper in FIG. 22) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This third outer edge is provided between the FD conversion gain switching transistor FDG included in the pixel shared unit 539 and the reset transistor RST included in the pixel shared unit 539 adjacent to the other side in the V direction (the lower side of the paper in FIG. 22) of this pixel shared unit 539. More specifically, the third outer edge is provided in the center in the V direction of the element isolation region 213 between the FD conversion gain switching transistor FDG and the reset transistor RST. The fourth outer edge is the outer edge of one end in the V direction (the end on the upper side of the paper in FIG. 22) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This fourth outer edge is provided between the reset transistor RST included in the pixel sharing unit 539 and the FD conversion gain switching transistor FDG (not shown) included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on one side of the V direction (the upper side of the paper in Figure 22).More specifically, the fourth outer edge is provided at the center in the V direction of the element isolation region 213 (not shown) between the reset transistor RST and the FD conversion gain switching transistor FDG.

[0133] In the outline of the pixel sharing unit 539 of the second substrate 200 including such first, second, third, and fourth outer edges, the third and fourth outer edges are arranged to be shifted to one side in the V direction with respect to the first and second outer edges (in other words, offset to one side in the V direction). By using such a layout, it is possible to arrange both the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG as close as possible to the pad section 120. Therefore, the area of ​​the wiring connecting them is reduced, and it becomes easier to miniaturize the imaging device 1. The VSS contact region 218 is provided between the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP and the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. For example, the multiple pixel circuits 210 have the same arrangement.

[0134] The imaging device 1 having such a second substrate 200 can also obtain the same effects as those described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangements described in the above embodiment and this modified example.

[0135] <4. Variation 3> 26 to 31 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 26 shows a schematic planar configuration of the first substrate 100, and corresponds to FIG. 7B described in the above embodiment. FIG. 27 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 8 described in the above embodiment. FIG. 28 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 9 described in the above embodiment. FIG. 29 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 10 described in the above embodiment. FIG. 30 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 11 described in the above embodiment. FIG. 31 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 12 described in the above embodiment.

[0136] In this modification, the semiconductor layer 200S of the second substrate 200 extends in the H direction (FIG. 28). That is, this substantially corresponds to a configuration obtained by rotating the planar configuration of the imaging device 1 shown in FIG. 21 etc. by 90 degrees.

[0137] For example, the pixel sharing unit 539 of the first substrate 100 is formed over a pixel region of 2 rows x 2 columns as described in the above embodiment, and has a substantially square planar shape ( FIG. 26 ). For example, in each pixel sharing unit 539, the transfer gates TG1 and TG2 of the pixels 541A and 541B of one pixel row extend toward the center of the pixel sharing unit 539 in the V direction, and the transfer gates TG3 and TG4 of the pixels 541C and 541D of the other pixel row extend toward the outside of the pixel sharing unit 539 in the V direction. The pad section 120 connected to the floating diffusion FD is provided in the center of the pixel sharing unit 539, and the pad section 121 connected to the VSS contact region 118 is provided at an end of the pixel sharing unit 539 at least in the V direction (in the V direction and H direction in FIG. 26 ). At this time, the V-direction positions of the through electrodes TGV1 and TGV2 of the transfer gates TG1 and TG2 approach the V-direction position of the through electrode 120E, and the V-direction positions of the through electrodes TGV3 and TGV4 of the transfer gates TG3 and TG4 approach the V-direction position of the through electrode 121E (FIG. 28). Therefore, for the same reason as described in the above embodiment, the width (size in the V direction) of the semiconductor layer 200S extending in the H direction can be increased. This makes it possible to increase the size of the amplification transistor AMP and suppress noise.

[0138] In each pixel circuit 210, the selection transistor SEL and the amplification transistor AMP are arranged side by side in the H direction, and the reset transistor RST is arranged adjacent to the selection transistor SEL in the V direction with the insulating region 212 between them (FIG. 27). The FD conversion gain switching transistor FDG is arranged side by side with the reset transistor RST in the H direction. The VSS contact region 218 is provided in an island shape in the insulating region 212. For example, the third wiring layer W3 extends in the H direction (FIG. 30), and the fourth wiring layer W4 extends in the V direction (FIG. 31).

[0139] The imaging device 1 having such a second substrate 200 can also obtain the same effects as those described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangements described in the above embodiment and this modification. For example, the semiconductor layer 200S described in the above embodiment and modification 1 may extend in the H direction.

[0140] <5. Variation 4> Fig. 32 is a schematic diagram showing a modified example of the cross-sectional configuration of the imaging device 1 according to the above embodiment. Fig. 32 corresponds to Fig. 3 described in the above embodiment. In this modified example, the imaging device 1 has contact portions 203, 204, 303, and 304 at positions facing the center of the pixel array section 540, in addition to the contact portions 201, 202, 301, and 302. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the above embodiment.

[0141] The contact portions 203 and 204 are provided on the second substrate 200, and are exposed on the bonding surface with the third substrate 300. The contact portions 303 and 304 are provided on the third substrate 300, and are exposed on the bonding surface with the second substrate 200. The contact portion 203 contacts the contact portion 303, and the contact portion 204 contacts the contact portion 304. That is, in this imaging device 1, the second substrate 200 and the third substrate 300 are connected by the contact portions 203, 204, 303, and 304 in addition to the contact portions 201, 202, 301, and 302.

[0142] Next, the operation of the imaging device 1 will be described with reference to FIG. 33 and FIG. 34. In FIG. 33, the input signal inputted from the outside to the imaging device 1, and the paths of the power supply potential and the reference potential are indicated by arrows. In FIG. 34, the signal path of the pixel signal outputted from the imaging device 1 to the outside is indicated by arrows. For example, the input signal inputted to the imaging device 1 via the input section 510A is transmitted to the row driver 520 of the third substrate 300, and the row driver 520 generates a row drive signal. This row drive signal is sent to the second substrate 200 via the contact sections 303 and 203. Furthermore, this row drive signal reaches each pixel sharing unit 539 of the pixel array section 540 via the row drive signal line 542 in the wiring layer 200T. Of the row drive signals that reach the pixel sharing units 539 of the second substrate 200, the drive signals other than the transfer gate TG are inputted to the pixel circuit 210, and each transistor included in the pixel circuit 210 is driven. A drive signal for the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 of the first substrate 100 via the through electrode TGV, and the pixels 541A, 541B, 541C, and 541D are driven. In addition, a power supply potential and a reference potential supplied to an input section 510A (input terminal 511) of the third substrate 300 from the outside of the imaging device 1 are sent to the second substrate 200 via contact sections 303 and 203, and are supplied to the pixel circuits 210 of the pixel sharing units 539 via wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D of the first substrate 100 via the through electrode 121E. Meanwhile, pixel signals photoelectrically converted by the pixels 541A, 541B, 541C, and 541D of the first substrate 100 are sent to the pixel circuit 210 of the second substrate 200 for each pixel sharing unit 539. A pixel signal based on this pixel signal is sent from the pixel circuit 210 to the third substrate 300 via a vertical signal line 543 and contact units 204 and 304. This pixel signal is processed by a column signal processing unit 550 and an image signal processing unit 560 of the third substrate 300, and then output to the outside via an output unit 510B.

[0143] The imaging device 1 having such contact portions 203, 204, 303, and 304 can also provide the same effects as those described in the above embodiment. The positions and number of the contact portions can be changed depending on the design of the circuit of the third substrate 300 to which the wiring via the contact portions 303 and 304 is connected.

[0144] <6. Variation 5> Fig. 35 shows a modified cross-sectional configuration of the imaging device 1 according to the above embodiment. Fig. 35 corresponds to Fig. 6 described in the above embodiment. In this modification, a transfer transistor TR having a planar structure is provided on the first substrate 100. In this respect, the imaging device 1 of this modification differs from the imaging device 1 described in the above embodiment.

[0145] In the transfer transistor TR, the transfer gate TG is formed only by the horizontal portion TGb, In other words, the transfer gate TG does not have the vertical portion TGa and is provided opposite to the semiconductor layer 100S.

[0146] The imaging device 1 having such a planar-structured transfer transistor TR also provides the same effects as those described in the above embodiment. Furthermore, by providing the planar-type transfer gate TG on the first substrate 100, the photodiode PD can be formed closer to the surface of the semiconductor layer 100S than when a vertical-type transfer gate TG is provided on the first substrate 100, and this can be considered to increase the saturation signal amount (Qs). In addition, the method of forming the planar-type transfer gate TG on the first substrate 100 requires fewer manufacturing steps than the method of forming the vertical-type transfer gate TG on the first substrate 100, and it can be considered that the manufacturing steps are less likely to adversely affect the photodiode PD.

[0147] <7. Variation 6> Fig. 36 shows a modified example of the pixel circuit of the imaging device 1 according to the above embodiment. Fig. 36 corresponds to Fig. 4 described in the above embodiment. In this modified example, a pixel circuit 210 is provided for each pixel (pixel 541A). That is, the pixel circuit 210 is not shared by multiple pixels. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the above embodiment.

[0148] The imaging device 1 of this modification is the same as the imaging device 1 described in the above embodiment in that the pixel 541A and the pixel circuit 210 are provided on different substrates (the first substrate 100 and the second substrate 200). Therefore, the imaging device 1 according to this modification can also obtain the same effects as those described in the above embodiment.

[0149] <8. Variation 7> 37 shows a modified example of the planar configuration of pixel separation section 117 described in the above embodiment. Gaps may be provided in pixel separation section 117 surrounding each of pixels 541A, 541B, 541C, and 541D. That is, pixels 541A, 541B, 541C, and 541D do not have to be entirely surrounded by pixel separation section 117. For example, the gaps in pixel separation section 117 are provided near pad sections 120 and 121 (see FIG. 7B).

[0150] In the above embodiment, an example (see FIG. 6) has been described in which the pixel separator 117 has an FTI structure penetrating the semiconductor layer 100S, but the pixel separator 117 may have a configuration other than the FTI structure. For example, the pixel separator 117 does not have to be provided so as to completely penetrate the semiconductor layer 100S, and may have a so-called DTI (Deep Trench Isolation) structure.

[0151] <9. Second Embodiment> <9.1 Problems to be solved in the second embodiment> However, the floating diffusion FD in the pixel 541 and the gate of the amplification transistor AMP in the pixel circuit 210 are connected by a connection via as the FD wiring FDL. In a fine pixel, the area of ​​the connection via of the FD wiring FDL is about 45%. As a result, the effective area of ​​the pixel circuit 210 becomes small, and the layout area of ​​the amplification transistor AMP cannot be expanded.

[0152] In addition, the capacitance between the FD wiring FDL and the gate of the amplification transistor AMP, and the capacitance between the FD wiring FDL and other connection vias running parallel to the connection via, such as the TG wiring TGL and the VSS wiring VSS, are superimposed on the capacitance of the floating diffusion FD. Therefore, the FD capacitance becomes large, the charge-voltage conversion efficiency decreases, and the readout noise cannot be reduced.

[0153] <9.2 Overview of the second embodiment> Therefore, the imaging device has a first substrate, a second substrate, wiring, and a trench. The first substrate has a pixel having a photodiode and a floating diffusion that holds the charge converted by the photodiode. The second substrate has a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, and is stacked on the first substrate. The wiring penetrates the first substrate and the second substrate in the stacking direction, and electrically connects between the floating diffusion in the first substrate and the amplifying transistor in the pixel circuit of the second substrate. The trench is formed at least in the second substrate, runs parallel to the wiring, and has a depth equal to or greater than the thickness of the semiconductor layer in the second substrate.

[0154] In the imaging device, a trench is formed in the second substrate, parallel to the wiring that electrically connects the floating diffusion in the first substrate and the amplifying transistor in the pixel circuit of the second substrate, and has a depth equal to or greater than the thickness of the semiconductor layer in the second substrate. As a result, the parasitic capacitance of the wiring is reduced, improving the charge-to-voltage conversion efficiency.

[0155] <9.3 Specific example of embodiment 2-1> <9.3.1 Configuration of embodiment 2-1> FIG. 38 is an equivalent circuit diagram showing an example of the configuration of a pixel sharing unit 539 in the imaging device 1 of embodiment 2-1. The imaging device 1 has a structure in which a first substrate 100, a second substrate 200, and a third substrate 300 are stacked. The first substrate 100 has a pixel 541 that performs photoelectric conversion. The second substrate 200 has a pixel circuit 210A that reads out a pixel signal based on the charge output from the pixel 541. The third substrate 300 has a processing circuit that detects the pixel signal. The pixel sharing unit 539 has a pixel 541 and a pixel circuit 210A. The pixel 541 has four photodiodes PD, four transfer transistors TR that transfer the charge converted by each photodiode PD, and a floating diffusion FD that holds the charge transferred by the transfer transistor TR.

[0156] The pixel circuit 210A includes, for example, a reset transistor RST, an amplification transistor AMP, a selection transistor SEL, a power supply line VDD, and a vertical signal line (VSL) 543. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. The amplification transistor AMP generates, as a pixel signal, a signal whose voltage corresponds to the level of the charge held in the floating diffusion FD. The selection transistor SEL controls the connection between the drain of the amplification transistor AMP and the vertical signal line 543. The floating diffusion FD of the first substrate 100 is electrically connected to the gate of the amplification transistor AMP in the pixel circuit 210A of the second substrate 200 by an FD wiring FDL.

[0157] The vertical signal lines 543 electrically connect each pixel circuit 210A to a column signal processing unit 550 in a processing circuit arranged on the third substrate 300. The column signal processing unit 550 detects pixel signals appearing on the vertical signal lines 543 from each pixel circuit 210A.

[0158] The imaging device 1 has an FD wiring FDL that connects a floating diffusion FD in a pixel 541 of the first substrate 100 and a gate of an amplifying transistor AMP in a pixel circuit 210A of the second substrate 200. The FD wiring FDL is formed by a connection via between the first substrate 100 and the second substrate 200. The imaging device 1 has a trench T formed from the second substrate 200 to the first substrate 100 side, running parallel to the FD wiring FDL. The trench T has, for example, a conductive material embedded therein.

[0159] The source of the amplification transistor AMP in the pixel circuit 210A on the second substrate 200 is connected to a shield wiring SL made of a conductive material embedded in the trench T to have the same potential. The parasitic capacitance between the FD wiring FDL and the shield wiring SL is reduced by a factor of (1-(SF gain)), thereby reducing the capacitance of the FD wiring FDL and improving the charge-to-voltage conversion efficiency.

[0160] 39 is a cross-sectional schematic diagram showing an example of a laminated structure of the first substrate 100 and the second substrate 200 of the embodiment 2-1. The wiring layer 100T between the semiconductor layer 100S in the first substrate 100 and the second substrate 200 is made of, for example, SiO2 or the like, and has through-wiring that penetrates the wiring layer 100T in the lamination direction. The first substrate 100 and the second substrate 200 are electrically connected to each other by the through-wiring.

[0161] The through wiring has a TG wiring TGL electrically connected to the gate (transfer gate TG) of the transfer transistor TR in the pixel 541, and an FD wiring FDL connecting the gate of the amplification transistor AMP in the pixel circuit 210A and the connection pad of the floating diffusion FD. A trench T is formed between the TG wiring TGL and the FD wiring FDL in the wiring layer 100T. The depth of the trench T is set to a range that is equal to or greater than the thickness of the Si substrate of the second substrate 200 and does not affect the floating diffusion FD formed in the first substrate 100. A shield wiring SL is formed of a conductive material, such as doped polysilicon or a metal, embedded in the trench T.

[0162] 40 is a schematic diagram showing an example of a laminated structure of a first substrate 100 and a second substrate 200. When the shield wiring SL (trench T) is viewed from the surface (lamination surface) of the wiring layer 100T, the shield wiring SL is formed on the lamination surface of the wiring layer 100T in a circular shape with the FD wiring FDL at the center. In other words, the trench T running parallel to the FD wiring FDL is formed on the lamination surface of the wiring device 100T so that the FD wiring FDL is surrounded in a circular shape on the lamination surface, with the FD wiring FDL and the TG wiring TGL running parallel to the FD wiring FDL being electrically separated from each other.

[0163] <9.3.2 Functions and Effects of Embodiment 2-1> In the imaging device 1 of the embodiment 2-1, the shield wiring SL is arranged parallel to the FD wiring FDL that penetrates and connects between the first substrate 100 and the second substrate 200. Furthermore, in the imaging device 1, the source of the amplification transistor AMP in the pixel circuit 210A on the second substrate 200 is electrically connected to the shield wiring SL to have the same potential. As a result, the parasitic capacitance between the FD wiring FDL and the shield wiring SL is reduced by (1-(SF gain)) times, so that the capacitance of the FD wiring FDL can be reduced to improve the charge-voltage conversion efficiency. Even when one FD wiring FDL is arranged parallel to two TG wirings TGL, the shield wiring SL is arranged between each FD wiring FDL and the TG wiring TGL, and between the FD wiring FDL and the other FD wiring FDL. As a result, the parasitic capacitance of the FD wiring FDL can be reduced to improve the charge-voltage conversion efficiency.

[0164] <9.3.3 Modification of embodiment 2-1> In addition, when the shield wiring SL is viewed from the surface (lamination surface) of the wiring layer 100T, the shield wiring SL is configured in a circular shape centered on the FD wiring FDL, but this is not limited to this and can be modified as appropriate. Fig. 41 is a schematic diagram showing an example of the arrangement of the trenches T1 on the surface of the second substrate 200, and Fig. 5X is a schematic diagram showing an example of the arrangement of the trenches T2 on the surface of the second substrate 200. For example, when the shield wiring SL is viewed from the surface (lamination surface) of the wiring layer 100T, the trenches T1 may be parallel plate-shaped as shown in Fig. 41, or may be rectangular-shaped as shown in Fig. 42, and can be modified as appropriate.

[0165] Fig. 43 is a schematic diagram showing an example of the arrangement of trenches T3 on the surface of the second substrate 200. In addition, the trenches T may be arranged at a position electrically separated between the FD wiring FDL and the TG wiring TGL, and for example, the trenches T3 larger than the width of the FD wiring FDL may be arranged for the FD wiring FDL shown in Fig. 43. Fig. 44 is a schematic diagram showing an example of the arrangement of trenches T4 on the surface of the second substrate 200. When the TG wiring TGL is arranged diagonally from the FD wiring FDL shown in Fig. 44, the trenches T4 may be arranged between the FD wiring FDL and the TG wiring TGL diagonally from the FD wiring FDL, and can be appropriately changed.

[0166] In the imaging device 1 of the embodiment 2-1, the shield wiring SL of the trench T filled with a conductive material is formed in the wiring layer 100T. However, without filling the trench T with a conductive material, a hollow trench T may be formed in the wiring layer 100T as the shield wiring SL, and this can be modified as appropriate.

[0167] The selected pixel 541 is, for example, a pixel 541 selected row by row from one or more pixels 541 arranged in the row direction. However, the non-selected pixel 541 may be any pixel 541 other than the selected pixel 541, and can be changed as appropriate.

[0168] The selected pixel 541 is exemplified as a pixel 541 selected on a row-by-row basis, but it may also be, for example, a pixel 541 selected on a column-by-column basis from one or more pixels 541 arranged in the column direction, and this can be changed as appropriate.

[0169] Although the pixel 541 includes, for example, a total of four photodiodes PD, which are arranged in a 2×2 arrangement, the number is not limited to four and can be changed as appropriate as long as the number is one or more.

[0170] <9.4 Specific example of embodiment 2-2> <9.4.1 Configuration of embodiment 2-2> In the imaging device 1 of the embodiment 2-2, a case where a trench T is arranged between one FD wiring FDL and a TG wiring TGL is illustrated. However, a trench T may be arranged between four FD wiring FDL and a TG wiring TGL, and this embodiment will be described below as the embodiment 2-2. Note that the same reference numerals are given to the same configurations as the embodiment 2-1, and the description of the overlapping configurations and operations will be omitted.

[0171] 45 is a schematic cross-sectional view showing an example of a laminated structure of a first substrate 100 and a second substrate 200 according to embodiment 2-2. The wiring layer 100T has a first FD wiring FDL1, a second FD wiring FDL2, a first TG wiring TGL1, and a second TG wiring TGL2.

[0172] The wiring layer 100T has a first trench T51, a second trench T52, and a third trench T53. The first trench T51 is formed between the first TG wiring TGL1 and the first FD wiring FDL1, and electrically separates the first FD wiring FDL1 from the first TG wiring TGL1. The second trench T52 is formed between the second TG wiring TGL2 and the second FD wiring FDL2, and electrically separates the second TG wiring TGL2 from the second FD wiring FDL2. The third trench T53 is formed between the first FD wiring FDL1 and the second FD wiring FDL2, and electrically separates the first FD wiring FDL1 from the second FD wiring FDL2.

[0173] 46A is a schematic diagram showing an example of the arrangement of the trenches T5 on the surface of the second substrate 200. When the trenches T5 are viewed from the surface (lamination surface) of the wiring layer 100T, as shown in FIG. 46A, the trenches T5 have a first trench T51, a second trench T52, a third trench T53, a fourth trench T54, and a fifth trench T55. The first trench T51 electrically separates the first FD wiring FDL1 from the first TG wiring TGL1, and also electrically separates the third FD wiring FDL3 from the third TG wiring TGL3. The third trench T53 electrically separates the first FD wiring FDL1 from the second FD wiring FDL2, and also electrically separates the third FD wiring FDL3 from the fourth FD wiring FDL4. The second trench T52 electrically separates the second FD wiring FDL2 from the second TG wiring TGL2, and also electrically separates the fourth FD wiring FDL4 from the fourth TG wiring TGL4. Fig. 47 is a schematic diagram showing an example of a cross-sectional shape of the trench T5. As shown in Fig. 47, the trench T5 may have a hole size on the front surface (second substrate 200) side larger than the hole size on the back surface (first substrate 100) side, and can be changed as appropriate.

[0174] The arrangement of the trenches T can be changed as appropriate, and may be as shown in Figs. 46B to 46H. Fig. 46B is a schematic diagram showing an example of the arrangement of the trenches T10 on the surface of the second substrate 200. An L-shaped trench T10 may be arranged on a diagonal line of the TG wirings TGL1 to TGL4 of the first FD wiring FDL1 shown in Fig. 46B. In this case, the trenches T10 electrically isolate the first FD wiring FDL1 and the first TG wiring TGL1, the first FD wiring FDL1 and the second TG wiring TGL2, the first FD wiring FDL1 and the third TG wiring TGL3, and the first FD wiring FDL1 and the fourth TG wiring TGL4.

[0175] FIG. 46C is a schematic diagram showing an example of the arrangement of the trenches T11 on the surface of the second substrate 200. As shown in FIG. 46C, each of the FD wirings FDL1 to 4 may be surrounded by the trenches T11 in a lattice shape. The FD wirings FDL and the adjacent FD wirings FDL, and the FD wirings FDL and the adjacent TG wirings TGL are electrically isolated. Also, FIG. 46D is a schematic diagram showing an example of the arrangement of the trenches T12 on the surface of the second substrate 200. As shown in FIG. 46D, the FD wirings FDL1 to 4 are surrounded by the trenches T12 in a lattice shape. At this time, the shield of the cross-shaped intersections T12A of the trenches T12 is omitted. As a result, not only is it possible to electrically isolate the FD wirings FDL and the adjacent FD wirings FDL, and the FD wirings FDL and the adjacent TG wirings TGL, but also it is possible to avoid a situation in which the processing depth of the intersections during trench processing becomes deep.

[0176] FIG. 46E is a schematic diagram showing an example of the arrangement of the trenches T13 on the surface of the second substrate 200. The trenches T13 shown in FIG. 46E have a cross trench T131 and a diagonal trench T132. The cross trench T131 electrically separates the adjacent FD wirings FDL. The diagonal trench T132 electrically separates the FD wirings FDL and the diagonal TG wirings TGL. FIG. 46F is a schematic diagram showing an example of the arrangement of the trenches T14 on the surface of the second substrate 200. The trenches T14 shown in FIG. 46F have a cross trench T141 and a diagonal trench T142. The cross trench T141 electrically separates the adjacent FD wirings FDL. The diagonal trench T142 electrically separates the FD wirings FDL and the diagonal TG wirings TGL.

[0177] FIG. 46G is a schematic diagram showing an example of the arrangement of the trenches T15 on the surface of the second substrate 200. The trenches T15 shown in FIG. 46G have a cross trench T151 and a diagonal trench T152. The cross trench T151 electrically separates adjacent FD wirings FDL. The diagonal trench T152 electrically separates the FD wirings FDL and the diagonal TG wirings TGL. In this case, the shield of the cross-shaped intersections T151A of the cross trench T151 is omitted. As a result, not only is it possible to electrically separate the FD wirings FDL and the adjacent FD wirings FDL, and the FD wirings FDL and the adjacent TG wirings TGL, but it is also possible to avoid a situation in which the processing depth of the intersections T151A becomes deep during trench processing.

[0178] FIG. 46H is a schematic diagram showing an example of the arrangement of the trenches T16 on the surface of the second substrate 200. The trenches T16 shown in FIG. 46H have a cross trench T161 and a diagonal trench T162. The cross trench T161 electrically separates the adjacent FD wirings FDL. The diagonal trench T162 electrically separates the FD wirings FDL and the diagonal TG wirings TGL. In this case, the shield of the cross-shaped intersections T161A of the cross trench T161 is omitted. As a result, not only is it possible to electrically separate the FD wirings FDL and the adjacent FD wirings FDL, and the FD wirings FDL and the adjacent TG wirings TGL, but it is also possible to avoid a situation in which the processing depth of the intersections T161A becomes deep during trench processing.

[0179] <9.4.2 Actions and Effects of Embodiment 2-2> Even when the four FD wirings FDL1 to FDL4 run parallel to the four TG wirings TGL1 to TGL4, trenches T5 are arranged between the FD wirings FDL and the TG wirings TGL, and between the FD wirings FDL and other FD wirings FDL, to electrically isolate them. As a result, the capacitance of the FD wirings FDL can be reduced, and the charge-voltage conversion efficiency can be improved.

[0180] In the imaging device 1 of embodiment 2-1, a case has been exemplified in which the shield wiring SL formed of a trench T filled with a conductive material is disposed in the wiring layer 100T. However, the material filled in the trench T is not limited to a conductive material and may be, for example, a gas, and such an embodiment will be described below as embodiment 2-3.

[0181] <9.5 Specific example of embodiment 2-3> <9.5.1 Configuration of embodiment 2-3> Fig. 48A is an equivalent circuit diagram showing an example of the configuration of a pixel sharing unit 539 in the imaging device 1 of embodiment 2-3, and Fig. 49 is a schematic cross-sectional view showing an example of a laminated structure of the first substrate 100 and the second substrate 200 of embodiment 2-3. The imaging device 1 has an FD wiring FDL that penetrates and connects the wiring layer 100T between the semiconductor layer 100S in the first substrate 100 and the second substrate 200, and a trench T6 that runs parallel to the FD wiring FDL formed from the second substrate 200 to the first substrate 100 side.

[0182] The trench T6 is filled with a gas with a low relative dielectric constant (εs), such as Air (1.00054), N2 (1.00057), He (1.00052) or Ar (1.00007), and sealed to form the shield wiring SL1. By using an air gap with a low relative dielectric constant compared to the relative dielectric constant of SiO2 (3.9), the FD capacitance can be reduced, improving the charge-to-voltage conversion efficiency.

[0183] In the imaging device 1 of embodiment 2-3, a trench T6 filled with a gas having a low dielectric constant is arranged between the FD wiring FDL and the TG wiring TGL, thereby reducing the parasitic capacitance of the FD wiring FDL and improving the charge-to-voltage conversion efficiency.

[0184] Although the trench T6 is sealed with a low dielectric constant gas in the above example, it may be filled with a low dielectric constant (Low-k) insulating film material, and other suitable modifications may be made.

[0185] Also, the depth of the trench T6 is illustrated as being deeper than the SiO2 in the second substrate 200 and within a range that does not affect the floating diffusion FD on the first substrate 100. However, the present invention is not limited to this, and may be as deep as the trench T6 of the shield wiring SL1 shown in FIG. 49 compared to the shield wiring SL, and may be changed as appropriate. Also, although SiO2 is illustrated as the wiring layer 100T, it may be an insulating film material having a lower dielectric constant (Low-k) than SiO2, and may be changed as appropriate.

[0186] <9.5.2 Functions and Effects of Embodiments 2-3> In the imaging device 1 of the embodiment 2-3, even when one FD wiring FDL runs parallel to two TG wiring TGL, a shield wiring SL1 is arranged between each FD wiring FDL and the TG wiring TGL, and between the FD wiring FDL and other FD wiring FDL, to electrically separate them. As a result, the parasitic capacitance of the FD wiring FDL can be reduced, thereby improving the charge-voltage conversion efficiency.

[0187] FIG. 48B is an equivalent circuit diagram showing another example of the configuration of the pixel sharing unit in the imaging device according to embodiment 2-3.

[0188] The pixel sharing unit in FIG. 48B differs from the pixel sharing unit in FIG. 48A in that the back gate of the amplification transistor AMP is connected to the source of the amplification transistor AMP. According to this, the gate-source voltage Vgs of the amplification transistor AMP becomes lower, and therefore the potential of the reset level appearing on the vertical signal line (column read line) 543 becomes higher.

[0189] Incidentally, if the lower limit of the signal potential level of the vertical signal line (column readout line) 543 is determined by the load circuit included in the column signal processing unit 550, then by connecting the back gate and source of the amplifying transistor AMP, it becomes possible to increase the amplitude of the signal (pixel signal) that can be handled in the vertical signal line (column readout line) 543, thereby enabling improvement in detection accuracy.

[0190] <10. Third Embodiment> <10.1 Problems to be solved in the third embodiment> For example, the charge obtained by photoelectric conversion of the photodiode PD is Qp, the FD capacitance of the floating diffusion FD is Cfd, and the gain of the source follower circuit is Gsf. In this case, the source follower output voltage Vsf is calculated as Vsf=Gsf*Qp / Cfd. Therefore, the S / N (Signal / Noise) ratio is improved if a larger output voltage is obtained with the same amount of light. However, if the FD capacitance (Cfd) increases, the source follower output voltage (Vsf) decreases. Therefore, the source follower output voltage (Vsf) can be increased by increasing the gain (Gsf) of the source follower circuit. However, the influence of the parasitic capacitance of the FD capacitance (Cfd) is large, and a reduction in the parasitic capacitance is required.

[0191] <10.2 Overview of the Third Embodiment> Therefore, the imaging device has a first substrate, a second substrate, wiring, and a shield wiring. The first substrate has a pixel having a photodiode and a floating diffusion that holds the charge converted by the photodiode. The second substrate has a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, and is laminated on the first substrate. Wiring is formed on the first substrate and the second substrate, electrically connecting between the floating diffusion in the first substrate and the amplifying transistor in the pixel circuit of the second substrate. The shield wiring electrically connects between the gate of the amplifying transistor and the source of the amplifying transistor while electrically isolating between the well layer of the pixel circuit and the well layer of the amplifying transistor in the pixel circuit, and shields the wiring while running in parallel with the wiring.

[0192] In the imaging device, while the well layer of the pixel circuit and the well layer of the amplifier transistor are electrically isolated, the wiring is shielded by a shield wiring that electrically connects the gate of the amplifier transistor and the source of the amplifier transistor in parallel. In other words, the substrate bias effect is eliminated by connecting the source of the amplifier transistor and the well layer of the amplifier transistor to make them at the same potential, and the gain between the floating diffusion amplitude and the source amplitude of the amplifier transistor is set to 1. Furthermore, by arranging a shield wiring that draws out the source potential of the amplifier transistor around the wiring, the wiring that is coupled to the floating diffusion moves with the same amplitude as the floating diffusion. As a result, the wiring coupling capacitance is reduced, and the capacitance of the floating diffusion is reduced, improving the charge-to-voltage conversion efficiency.

[0193] In other words, in an imaging device, the capacitance of the floating diffusion due to the parasitic resistance of the wiring is reduced to improve the charge-to-voltage conversion efficiency. Furthermore, the shield wiring can suppress crosstalk between adjacent wirings.

[0194] <10.3 Specific example of embodiment 3-1> <10.3.1 Configuration of embodiment 3-1> 50A is an equivalent circuit diagram showing an example of the configuration of a plurality of pixel circuits 210B of the second substrate 200 of the embodiment 3-1. The second substrate 200 is configured with a common p-well layer 250 common to all pixels and an independent p-well layer 251 of the amplification transistor AMP for each pixel 541, and the common p-well layer 250 and the independent p-well layer 251 are electrically isolated by a full trench (FTI) T7.

[0195] The reset transistor RST and the selection transistor SEL in each pixel circuit 210B are formed in the common p-well layer 250. Since the common p-well layer 250 is connected to the GND potential, the back gates of the reset transistor RST and the selection transistor SEL are fixed to the GND potential.

[0196] On the other hand, the amplifying transistor AMP in the pixel circuit 210B is formed in the independent p-well layer 251. Since the independent p-well layer 251 is connected to the source of the amplifying transistor AMP, the potential of the independent p-well layer 251 changes following the source potential of the amplifying transistor AMP. In other words, since the back gate and source potential of the amplifying transistor AMP are at the same potential, the gain of the source follower circuit is 1.

[0197] For example, when the back gate of the amplifier transistor AMP is fixed to the GND potential, a substrate bias effect occurs according to the fluctuation of the source potential of the amplifier transistor AMP, and the gain of the source follower circuit becomes a value of about 0.85. As a result, since the independent p-well layer 251 follows the source potential of the amplifier transistor AMP, a 17% increase in the gain of the source follower circuit leads to a 17% increase in the source follower output voltage (Vsf).

[0198] Incidentally, a column signal processing unit 550 is connected to each of the vertical signal lines (column readout lines) 543, and pixel signals are read out via the vertical signal lines (column readout lines) 543.

[0199] Here, the configuration of the column signal processing unit 550 will be described. FIG. 50B is a schematic configuration block diagram of the column signal processing unit of the first embodiment. The column signal processing unit 550 includes, for example, a reference signal generating unit 551 configured as a constant voltage source, an AD converter 552 that performs AD conversion based on a reference signal input from the reference signal generating unit 551, and a load circuit LD configured as a current source, and is configured to output an AD conversion output ADCOUT as pixel data corresponding to the voltage of the vertical signal line (column readout line) 543. According to the above configuration, the read pixel signals can be converted into digital data and output.

[0200] FIG. 50C is a schematic configuration block diagram of a column signal processing unit according to the second embodiment. The column signal processing unit 550 of the second embodiment is configured using a single-slope ADC. The column signal processing unit 550 includes, for example, a RAMP generating circuit 553 that generates and outputs a RAMP waveform, a comparator 554 that compares the voltage of the pixel signal read out via the vertical signal line (column readout line) 543 with the voltage of the RAMP waveform and outputs a comparison result signal, a counter 555 that counts up when the level of the comparison result signal of the comparator 554 is, for example, at the “H” level, and a latch 556 that takes in the count value of the counter 555 at predetermined time intervals and outputs an AD conversion output ADCOUT as pixel data corresponding to the voltage of the vertical signal line (column readout line) 543. The above configuration also makes it possible to convert the read pixel signals into digital data and output the digital data.

[0201] Here, an example of the circuit configuration of the above-mentioned comparator 554 will be described. FIG. 50D is an explanatory diagram of a first configuration example of the comparator. As shown in FIG. 50D, the comparator 554 includes P-type MOS (PMOS) transistors PT11 and PT12, N-type MOS (NMOS) transistors NT11 and NT12, capacitors C11 and C12, and switches SW11 and SW12.

[0202] In the above configuration, the source of the PMOS transistor PT11 and the source of the PMOS transistor PT12 are connected to the high potential power supply VDD. The drain of the PMOS transistor PT11 is connected to the drain of the NMOS transistor NT11.

[0203] The drain and gate of the PMOS transistor PT11 are connected together, and the connection point is connected to the gate of the PMOS transistor PT12. The drain of the PMOS transistor PT12 is connected to the drain of the NMOS transistor NT12, and the connection point thereof is the output terminal OUT1.

[0204] The sources of the NMOS transistor NT11 and the NMOS transistor NT12 are connected to each other, and the connection point is connected to the drain of the NMOS transistor NT13. Furthermore, the drain of the NMOS transistor NT13 is connected to the low potential power supply GND.

[0205] The capacitor C11 has one terminal connected to the gate of the NMOS transistor NT11 and the other terminal serving as an input terminal to which the RAMP signal is input. Furthermore, the gate of the NMOS transistor NT12 is connected to one terminal of a capacitor C12, and the other terminal serves as an input terminal to which a pixel signal VSL is input.

[0206] As a result, in the comparator 554, a current mirror circuit is formed by the PMOS transistors PT11 and PT12, and the NMOS transistors NT11 and NT12 operate as a differential comparison circuit using the NMOS transistor NT13 as a current source.

[0207] FIG. 50E is an explanatory diagram of a second configuration example of the comparator. As shown in FIG. 50E, the comparator 554 includes PMOS transistors PT21 to PT23, NMOS transistors NT21 and NT22, capacitors C21 to C23, and switches SW21 and SW22.

[0208] In the above configuration, the source of the NMOS transistor NT21 and the source of the NMOS transistor NT22 are connected to the low potential power supply GND. The drain of the NMOS transistor NT22 is connected to the gate of the NMOS transistor NT22 and the drain of the PMOS transistor PT22.

[0209] The drain of the NMOS transistor NT22 is connected to the drain of the PMOS transistor PT23 and the output terminal OUT1. The source of the PMOS transistor PT22 is connected to the source of the PMOS transistor PT23 and the drain of the PMOS transistor PT21. The source of the PMOS transistor PT21 is connected to the high potential power supply VDD.

[0210] The NMOS transistor NT21 and the NMOS transistor NT22 form a current mirror circuit.

[0211] Furthermore, one terminal of the capacitor C21 is connected to the gate of a PMOS transistor PT22, and the other terminal serves as an input terminal to which the pixel signal VSL is input. Moreover, one terminal of the capacitor C22 is connected to the gate of a PMOS transistor PT22, and the other terminal serves as an input terminal to which a RAMP signal is input.

[0212] These capacitors C21 and C22 function as input capacitances. As a result, a differential comparison circuit is formed by the PMOS transistors PT21 to PT23, and the entire circuit functions as a comparator.

[0213] FIG. 50F is an explanatory diagram of a third configuration example of the comparator. As shown in FIG. 50F, the comparator 554 includes a PMOS transistor PT31, NMOS transistors NT31 and NT32, capacitors C31 and C32, and a switch SW31.

[0214] In the above configuration, the drain of the NMOS transistor NT31 is connected to the high potential power supply VDD, and the source is connected to the source of the PMOS transistor PT31. The drain of the PMOS transistor PT31 is connected to the drain of the NMOS transistor PT32 and the output terminal OUT1.

[0215] The source of the NMOS transistor PT32 is connected to the low potential power supply GND. Furthermore, a switch SW31 is connected between the gate and drain terminals of the PMOS transistor PT31.

[0216] Moreover, one terminal of the capacitor C31 is connected to the gate of the PMOS transistor PT31, and the other terminal serves as an input terminal to which the pixel signal VSL is input. Moreover, one terminal of the capacitor C32 is connected to the gate of the PMOS transistor PT31, and the other terminal serves as an input terminal to which the RAMP signal is input.

[0217] These capacitors C31 and C32 function as input capacitances. As a result, a comparison circuit is formed by the voltage division ratio of the PMOS transistor PT31 and the NMOS transistors NT31 and NT32, and the entire circuit functions as a comparator.

[0218] Next, the column signal processing unit according to the third aspect will be described. FIG. 50G is a schematic configuration block diagram of a column signal processing unit according to the third embodiment. The column signal processing unit 550 of the third aspect includes, for example, a RAMP generating circuit 557 that generates and outputs a RAMP waveform, a comparator 558 that compares the voltage of a pixel signal read out via a vertical signal line (column readout line) 543 with the voltage of the RAMP waveform and outputs a comparison result signal, a counter 559 that counts up when the level of the comparison result signal of the comparator 558 is, for example, at an “H” level, and a latch 560 that takes in the count value of the counter 559 at predetermined time intervals and outputs an AD conversion output ADCOUT as pixel data corresponding to the voltage of the vertical signal line (column readout line) 543.

[0219] In the column signal processing unit 550 of the third embodiment, a current generated due to the load circuit LD is connected to a vertical signal line (column readout line) 543 via a comparator 558, and a bias current is simultaneously applied to the amplifying transistor AMP and the comparator 558 that constitute a pixel by the current flowing through the load circuit LD, thereby reducing current consumption.

[0220] FIG. 50H is an explanatory diagram of a configuration example of a comparator according to the third embodiment. As shown in FIG. 50H, the comparator 558 includes a PMOS transistor PT41, a capacitor C41, a switch SW41, and a load circuit LD.

[0221] In the above configuration, the source of the PMOS transistor PT41 serves as an input terminal to which the pixel signal VSL is input, and the drain is connected to the load circuit LD and the output terminal OUT1.

[0222] Furthermore, a switch SW41 is connected between the gate and drain terminals of the PMOS transistor PT41. One terminal of the capacitor C41 is connected to the gate of the PMOS transistor PT41, and the other terminal serves as an input terminal to which the RAMP signal is input.

[0223] The capacitor C41 functions as an input capacitance. As a result, a comparison circuit is formed that outputs an output signal corresponding to the gate-source voltage of the PMOS transistor PT41, and the entire circuit functions as a comparator.

[0224] Next, the column signal processing unit according to the fourth aspect will be described. FIG. 50I is a schematic configuration block diagram of a column signal processing unit according to the fourth embodiment. The column signal processing unit 550 of the fourth aspect includes a load circuit LD, a pre-circuit 561 that connects a current generated by the load circuit LD to a vertical signal line (column readout line) 543, a reference signal generating unit 562 configured, for example, as a constant voltage source, and an AD converter 563 that performs AD conversion based on a reference signal input from the reference signal generating unit 562.

[0225] Here, a configuration example of the pre-circuit 561 will be described. FIG. 50J is an explanatory diagram of a configuration example of a front-end circuit. As shown in FIG. 50J, the front-end circuit 561 includes a PMOS transistor PT51, capacitors C51 and C52, and a load circuit LD.

[0226] In the above configuration, the source of the PMOS transistor PT51 serves as an input terminal to which the pixel signal VSL is input, and the drain is connected to the load circuit LD and the output terminal OUT1. Furthermore, a capacitor C52 is connected between the gate and drain terminals of the PMOS transistor PT41. This capacitor C52 functions as a feedback capacitance. The capacitor C51 functions as a reference capacitance, with one terminal of the capacitor C51 connected to the gate of the PMOS transistor PT41 and the other terminal connected to the low potential power supply GND. This pre-circuit 561 is configured as a current reuse column amplifier (CRCA). According to the above configuration, the gate-source voltage of the PMOS transistor PT51 varies in response to the pixel signal VSL input to the source of the PMOS transistor PT51, and the drain current of the PMOS transistor PT51 changes. The output voltage Vout according to this drain current is output from the output terminal OUT1 via the drain of the PMOS transistor PT51.

[0227] As described above, the pre-circuit 561 effectively functions as a comparison circuit that outputs an output signal corresponding to the pixel signal VSL, and the entire circuit functions as an amplifier.

[0228] 51 is a cross-sectional schematic diagram showing an example of a laminated structure of the first substrate 100 and the second substrate 200 in the embodiment 3-1. The first substrate 100 has a photodiode PD, a transfer transistor TR, and a floating diffusion FD. The pixel circuit 210B on the second substrate 200 has a reset transistor RST, an amplification transistor AMP, a selection transistor SEL, and an FD wiring FDL. A wiring layer 100T including a plurality of layers (M1 to M3) on the first substrate 100 and a wiring layer 200T including a plurality of layers (MP to M1) on the second substrate 200 are connected by a Copper-Cupper junction CC.

[0229] The wiring layers 100T, 200T penetrate from the first substrate 100 to the second substrate 200, and have FD wiring FDL arranged therein that connects the floating diffusion FD for each pixel 541 on the first substrate 100 to the amplification transistor AMP in the pixel circuit 210B on the second substrate 200.

[0230] The amplifier transistor AMP for each pixel 541 in the independent p-well layer 251 on the second substrate 200 is electrically isolated from the common p-well layer 250 by a full trench T7. The gate of the amplifier transistor AMP is connected to the FD wiring FDL, the drain of the amplifier transistor AMP is connected to the independent p-well layer 251, and the source of the amplifier transistor AMP is connected to the drain of the selection transistor SEL. The source of the amplifier transistor AMP is electrically connected to a shield wiring SL2 that runs parallel to the FD wiring FDL and connects to each layer in the wiring layer 100T and the wiring layer 200T.

[0231] The shield wiring SL2 is a wiring for the source potential of the amplification transistor AMP (= the back gate potential of the amplification transistor AMP). The shield wiring SL2 is arranged so as to cover the FD wiring FDL. The shield wiring SL2 is arranged so that the coupling capacitance between the floating diffusion FD and the source of the amplification transistor AMP is large, and the coupling capacitance between the floating diffusion FD and wiring other than the floating diffusion FD is minimized. The shield wiring SL2 extends from the wiring layer 200T to the wiring layer 100T via the joint CC between the wiring layer 100T of the first substrate 100 and the wiring layer 200T of the second substrate 200, and is arranged as a shield so as to cover the FD wiring FDL.

[0232] Since the independent p-well layer 251 is connected to the source of the amplification transistor AMP, the potential of the independent p-well layer 251 changes following the source potential of the amplification transistor AMP. In other words, the back gate and source potential of the amplification transistor AMP are at the same potential, so the gain of the source follower circuit is 1. The gate potential amplitude and source potential amplitude of the amplification transistor AMP are equal. That is, the potential of the shield wiring SL2 also changes following the change amount of the floating diffusion FD potential of the FD wiring FDL. Therefore, no charge transfer occurs between the FD wiring FDL and the shield wiring SL2, and the capacitance value between them decreases. As a result, even if the coupling between the FD wiring FDL and the shield wiring SL2 is large, it can be ignored as the capacitance of the floating diffusion FD during the actual read operation. And, since the FD wiring FDL is arranged so that the coupling between the other wirings is minimized, the capacitance of the floating diffusion FD is small. That is, the parasitic capacitance of the floating diffusion FD capacitance is reduced, so the source follower output voltage Vsf can be increased.

[0233] Moreover, each FD wiring FDL can be shielded by the shield wiring SL2 since the shield wiring SL2 is disposed between the FD wiring FDL of each adjacent pixel 541. As a result, the occurrence of crosstalk between adjacent FD wiring FDL can be suppressed.

[0234] If the periphery of the FD wiring FDL is shielded with the potential of this node, it will follow the potential of the floating diffusion FD with the same amplitude, so the capacitance between the wirings appears to be zero, and the FD capacitance can be reduced.

[0235] With the independent p-well layer 251 of the amplification transistor AMP for each pixel 541 separated by a full trench T7, the source of the amplification transistor AMP and the independent p-well layer 251 are connected to have the same potential. As a result, the substrate bias effect is eliminated, and the gain between the amplitude of the floating diffusion FD potential and the source potential amplitude of the amplification transistor AMP is set to 1.

[0236] The FD wiring FDL is surrounded by a shield wiring SL2 that draws out the source potential of the amplification transistor AMP, so that the wiring coupled to the floating diffusion FD moves with the same amplitude as the floating diffusion FD. As a result, the wiring coupling capacitance appears to be zero, so the floating diffusion FD capacitance can be reduced to improve the charge-to-voltage conversion efficiency.

[0237] 52 is a schematic diagram showing an example of a planar configuration of the pixel circuit 210B. In the pixel circuit 210B, the reset transistor RST and the selection transistor SEL are arranged in the common p well layer 250, and the amplification transistor AMP is arranged in the independent p well layer 251, with the common p well layer 250 and the independent p well layer 251 being electrically isolated by a full trench T7. The common p well layer 250 of the reset transistor RST and the selection transistor SEL is fixed to the GND potential.

[0238] Fig. 53 is a schematic diagram showing an example of a planar configuration in which an FD wiring FDL and a shield wiring SL2 are overlapped on the surface of the pixel circuit 210B shown in Fig. 52. The FD wiring FDL electrically connects the floating diffusion FD in the pixel 541 to the gate of the amplification transistor AMP and the source of the reset transistor RST. Furthermore, the shield wiring SL2 electrically connects the source of the amplification transistor AMP to the drain of the selection transistor SEL, and also electrically connects the independent p-well layer 251 to the source of the amplification transistor AMP. The shield wiring SL2 electrically connected to the source potential of the amplification transistor AMP is arranged to cover the periphery of the FD wiring FDL and is laid out so as to increase the coupling between the two.

[0239] <10.3.2 Functions and Effects of Embodiment 3-1> In the imaging device 1, the common p-well layer 250 and the independent p-well layer 251 of the amplifier transistor AMP are electrically isolated, and the FD wiring FDL is shielded by a shield wiring SL2 that connects the gate of the amplifier transistor AMP and the source of the amplifier transistor AMP. That is, the substrate bias effect is eliminated by connecting the source of the amplifier transistor AMP and the independent p-well layer 251 of the amplifier transistor AMP to have the same potential, and the gain between the floating diffusion FD amplitude and the source amplitude of the amplifier transistor AMP is set to 1. Furthermore, by arranging the shield wiring SL2 that draws out the source potential of the amplifier transistor AMP around the FD wiring FDL, the wiring coupled to the floating diffusion FD moves with the same amplitude as the floating diffusion FD. As a result, the wiring coupling capacitance is reduced, so that the FD capacitance is reduced and the charge-voltage conversion efficiency is improved.

[0240] That is, in the imaging device 1, the charge-voltage conversion efficiency is improved by reducing the FD capacitance due to the parasitic resistance of the FD wiring FDL. Furthermore, the shield wiring SL2 can suppress crosstalk between adjacent floating diffusions FD.

[0241] In the embodiment 3-1, an example has been shown in which full trench isolation is used as a structure for individually isolating the p-well layers of the amplification transistors AMP, but this is not limiting, and other means may be used as long as the p-well layers can be individually isolated.

[0242] The shield wiring SL2 shields a portion of the FD wiring FDL that passes through the second substrate 200 and the first substrate 100, of the FD wiring FDL that connects between the amplification transistor AMP in the second substrate 200 and the floating diffusion FD in the first substrate 100. The shield wiring SL2 shields a portion of the FD wiring FDL that passes through the wiring layer 100T of the first substrate 100 and the wiring layer 200T of the second substrate 200. However, the shield wiring SL2 may shield a portion of the FD wiring FDL that passes through the wiring layer 200T of the second substrate 200, and this embodiment will be described below as embodiment 3-2.

[0243] <10.4 Specific example of embodiment 3-2> <10.4.1 Configuration of embodiment 3-2> FIG. 54 is a cross-sectional schematic diagram showing an example of a laminated structure of the first substrate 100 and the second substrate 200 in the embodiment 3-2. In the embodiment 3-2, for example, when the pixel size is reduced, the number of junctions CC between the wiring layer 100T and the wiring layer 200T is restricted. The wiring layer 100T and the wiring layer 200T have an FD wiring FDL penetrating from the first substrate 100 side to the second substrate 200. The FD wiring FDL electrically connects the floating diffusion FD of the first substrate 100 and the gate of the amplification transistor AMP in the pixel circuit 210 on the second substrate 200. The shield wiring SL2 shields a part of the FD wiring FDL that passes through the wiring layer 200T in the second substrate 200.

[0244] <10.4.2 Functions and Effects of Embodiment 3-2> When the number of junctions CC is restricted by the reduction in size of the pixel 541, the shield wiring SL2 is limited to shielding only the FD wiring FDL in the wiring layer 200T on the second substrate 200 side. For example, when only one junction CC can be arranged in one pixel, the FD wiring FDL can be connected by penetrating the wiring layer 100T and the wiring layer 200T, but the source potential of the amplification transistor AMP cannot be extended to the wiring layer 100T on the first substrate 100 side. In this case, the shield wiring SL2 is arranged so as to cover the FD wiring FDL only with the wiring layer 200T in the second substrate 200. As a result, the effect of reducing the floating diffusion FD capacitance of the wiring layer 100T on the first substrate 100 side cannot be obtained, and the FD capacitance becomes slightly larger than that in embodiment 3-1. However, the effect of reducing the FD capacitance in the wiring layer 200T on the second substrate 200 side can be obtained. It can also be used for pixel reduction.

[0245] <10.5 Specific example of embodiment 3-3> <10.5.1 Configuration of embodiment 3-3> 55 is an equivalent circuit diagram showing an example of the configuration of the pixel circuits 210C and 210D of the second substrate 200 of the embodiment 3-3. The pixel circuit 210C electrically separates the independent p-well layer 251A in which the amplification transistors AMP of the pixel circuits 541 adjacent in the column direction are arranged from the common p-well layer 250 in which the reset transistors RST and the selection transistors SEL adjacent in the column direction are arranged by a full trench T8. The pixel circuit 210D is in a different row from the pixel circuit 210C. The pixel circuit 210D electrically separates the independent p-well layer 251A in which the amplification transistors AMP of the pixel circuits 541 adjacent in the column direction are arranged from the common p-well layer 250 in which the reset transistors RST and the selection transistors SEL adjacent in the column direction are arranged by a full trench T8.

[0246] The amplification transistors AMP that are read out simultaneously are adjacent amplification transistors AMP in the row direction. Therefore, when the pixels 541 are read out sequentially by row, while the amplification transistor AMP is reading out a pixel signal, the pixel signal of the amplification transistor AMP adjacent in the column direction is not read out at the same time. Therefore, the independent p well layers 251A of the amplification transistors AMP adjacent in the row direction are separated, while the independent p well layers 251A of the amplification transistors AMP adjacent in the column direction are shared. In other words, the well layer potential of the amplification transistors AMP adjacent in the column direction is shared, and the well layer potential of the amplification transistors AMP adjacent in the column direction in the next row is also shared.

[0247] Therefore, while the amplifier transistor AMP of the pixel circuit 210C1 is reading out the pixel signal, the well layer potential of the amplifier transistors AMP of the pixel circuits 210C2 and 210C3 in this column is the same potential as the source potential of the amplifier transistor AMP of the pixel circuit 210C1. Furthermore, the well layer potential of the amplifier transistors AMP of the pixel circuits 210C2 and 210C3 is also the same potential as the source potential of the amplifier transistor AMP of the pixel circuit 210C1. However, the amplifier transistors AMP of the other pixel circuits 210C2 and 210C3 adjacent in the column direction are not particularly affected because they are in a non-readout period, the selection transistors SEL are turned off, and they do not operate as amplifier circuits.

[0248] When pixels 541 are read out row by row, for example, it can be said that the amplification transistor AMP of pixel circuit 210C1 is read out simultaneously with the amplification transistor AMP of pixel circuit 210D1 adjacent in the row direction. Therefore, the well layer potential of the amplification transistor AMP of pixel circuit 210C1 and the well layer potential of the amplification transistor AMP of pixel circuit 210D1 adjacent in the row direction become different potentials depending on the pixel signal amount, so the well layers of both need to be separated. In other words, the well layers of pixels 541 that are read out simultaneously need to be separated, but there is no problem if the well layers of pixels 541 that are not read out simultaneously are shared.

[0249] <10.5.2 Functions and Effects of Embodiment 3-3> Therefore, even if it is impossible to separate the p-well layer for each pixel independently due to miniaturization of the pixels 541, by separating them only in the row direction, it is possible to obtain the same effect as in Example 2-2.

[0250] <10.6 Specific examples of embodiments 3-4> <10.6.1 Configuration of embodiment 3-4> The imaging device of the embodiment 3-4 is, for example, an imaging device of pixels having a charge holding unit for a global shutter. The global shutter method is a method of performing global exposure in which exposure of all pixels is basically started at the same time and exposure of all pixels is ended at the same time. Here, all pixels means all pixels appearing in an image, excluding dummy pixels and the like. In addition, if the time difference and image distortion are small enough to be negligible, the global shutter method also includes a method of performing global exposure in units of multiple rows (for example, several tens of rows) instead of all pixels at the same time, while moving the area where global exposure is performed. In addition, the global shutter method also includes a method of performing global exposure on pixels in a predetermined area, not on all pixels appearing in an image.

[0251] 56 is an equivalent circuit diagram showing an example of a configuration of a pixel shared unit 400 of a global shutter type imaging device according to embodiment 3-4. The pixel shared unit 400 in the global shutter type imaging device has a pixel 410 and a pixel circuit 420. The pixel 410 has a photodiode 411, a charge holding unit 412, a transfer transistor TR413, and an overflow transistor 414. Furthermore, the pixel circuit 420 has a reset transistor RST42, an amplification transistor AMP42, a selection transistor SEL42, and a floating diffusion FD42.

[0252] The reset transistor RST42 has a drain connected to the power supply VDD and a source connected to the floating diffusion FD42. The reset transistor RST42 initializes, i.e., resets, the floating diffusion FD42 in response to a drive signal applied to its gate electrode. For example, when the reset transistor RST42 is turned on by the drive signal, the potential of the floating diffusion FD42 is reset to the voltage level of the power supply VDD. In other words, the floating diffusion FD42 is initialized.

[0253] The floating diffusion FD42 converts the charges transferred from the photodiode PD via the transfer transistor 413 and the charge holding unit 412 into an electric signal (e.g., a voltage signal) and outputs the electric signal. A reset transistor RST42 is connected to the floating diffusion FD42, and a vertical signal line VSL is connected to the floating diffusion FD42 via an amplification transistor AMP42 and a selection transistor SEL42.

[0254] The amplification transistor AMP42 outputs an electrical signal according to the potential of the floating diffusion FD42. The amplification transistor AMP42 constitutes, for example, a source follower circuit together with a constant current source provided in the column signal processing unit. The selection transistor SEL42 is turned on when the pixel is selected, and outputs an electrical signal from the floating diffusion FD42 via the amplification transistor AMP42 to the column signal processing unit via the vertical signal line VSL.

[0255] In such a pixel sharing unit 400 in a global shutter type imaging device, pixels 410 are formed on the first substrate 100, pixel circuits 420 are formed on the second substrate 200, and the pixels 410 and pixel circuits 420 are connected by FD wiring FDL.

[0256] The second substrate 200 is composed of a common p-well layer common to all pixels and an independent p-well layer for each amplification transistor AMP42, and the common p-well layer and the independent p-well layer are electrically isolated by a full trench (FTI). The reset transistor RST42 and the selection transistor SEL42 in each pixel circuit 420 are formed in the common p-well layer. Since the common p-well layer is connected to the GND potential, the back gates of the reset transistor RST42 and the selection transistor SEL42 are fixed to the GND potential.

[0257] On the other hand, the amplifier transistor AMP42 in the pixel circuit 420 is formed in the independent p-well layer. Since the independent p-well layer is connected to the source of the amplifier transistor AMP42, the potential of the independent p-well layer changes following the source potential of the amplifier transistor AMP42. In other words, since the back gate and source potential of the amplifier transistor AMP42 are at the same potential, the gain of the source follower circuit is 1.

[0258] That is, the gate potential amplitude and the source potential amplitude of the amplification transistor AMP42 become equal. That is, the potential of the shield wiring SL4 also changes following the amount of change in the FD potential of the FD wiring FDL. Therefore, no charge transfer occurs between the FD wiring FDL and the shield wiring SL4, and the capacitance value between them decreases. Therefore, even if the coupling between the FD wiring FDL and the shield wiring SL4 is large, it can be ignored as the FD capacitance during the actual read operation. And, since the FD wiring FDL is arranged so that the coupling between the other wirings is minimized, the FD capacitance has a small value. That is, the parasitic capacitance of the FD capacitance is reduced, and the source follower output voltage Vsf can be increased.

[0259] <10.6.2 Functions and Effects of Embodiments 3-4> In the pixel shared unit 400 in the global shutter type imaging device of the embodiment 3-4, the common p-well layer and the independent p-well layer of the amplifier transistor AMP42 are electrically isolated from each other. Furthermore, in the pixel shared unit 400, the FD wiring FDL is shielded by a shield wiring SL4 that connects between the gate of the amplifier transistor AMP42 and the source of the amplifier transistor AMP42. That is, the source of the amplifier transistor AMP42 and the independent p-well layer of the amplifier transistor AMP42 are connected to have the same potential, thereby eliminating the substrate bias effect and setting the gain between the FD amplitude and the source amplitude of the amplifier transistor AMP42 to 1. Furthermore, by shielding the periphery of the FD wiring FDL with the shield wiring SL4 that draws out the source potential of the amplifier transistor AMP42, the wiring coupled to the floating diffusion FD moves with the same amplitude as the floating diffusion FD. As a result, the wiring coupling capacitance is reduced, so that the FD capacitance is reduced and the charge-voltage conversion efficiency is improved.

[0260] That is, in the pixel shared unit 400 in the global shutter type imaging device, the S / N ratio of the pixel signal is improved by improving the charge-voltage conversion efficiency while suppressing an increase in the FD capacitance due to the parasitic resistance of the FD wiring FDL. Moreover, the shield wiring SL4 can suppress crosstalk between adjacent floating diffusions FD.

[0261] <10.7 Specific examples of embodiments 3-5> <10.7.1 Configuration of embodiment 3-5> 57 is an equivalent circuit diagram showing an example of the configuration of a pixel shared unit 400A of a memory retention type global shutter type imaging device of embodiment 3-5. The pixel shared unit 400A has pixels PX1 and PX4 and a pixel circuit 420A. The pixel PX1 has a photodiode PD1, first to third transfer transistors TR1A to TR1C, a charge retention unit MEM1, a discharge transistor OFG1, a discharge unit OFD1, and a buffer BUF1. The first transfer transistor TR1A includes a transfer gate TRZ1, the second transfer transistor TR1B includes a transfer gate TRY1 and a transfer gate TRX1, and the third transfer transistor TR1C includes a transfer gate TRG1.

[0262] Similarly, the pixel PX4 has a photodiode PD4, first to third transfer transistors TR4A to TR4C, a charge holding unit MEM4, a discharge transistor OFG4, a discharge unit OFD4, and a buffer BUF4. The first transfer transistor TR4A includes a transfer gate TRZ4, the second transfer transistor TR4B includes a transfer gate TRY4 and a transfer gate TRX4, and the third transfer transistor TR4C includes a transfer gate TRG4.

[0263] Furthermore, the pixel PX1 and the pixel PX4 share a pixel circuit 420A including power supplies VDD1 and VDD2, a floating diffusion FD14, a reset transistor RST14, an amplifier transistor AMP14, and a selection transistor SEL14.

[0264] In this example, the first to third transfer transistors TR1A to TR1C and the first to third transfer transistors TR4A to TR4C are N-type MOS transistors. The reset transistor RST14, the amplification transistor AMP14, and the selection transistor SEL14 are also N-type MOS transistors. The gate electrodes of the first to third transfer transistors TR1A to TR1C and the first to third transfer transistors TR4A to TR4C are supplied with drive signals by the vertical drive unit and the horizontal drive unit based on the drive control of the system control unit. The gate electrodes of the reset transistor RST14, the amplification transistor AMP14, and the selection transistor SEL14 are supplied with drive signals by the vertical drive unit and the horizontal drive unit based on the drive control of the system control unit. These drive signals are pulse signals whose high level state is an active state (on state) and whose low level state is an inactive state (off state). In the following, turning a drive signal into an active state is also referred to as turning on the drive signal, and turning a drive signal into an inactive state is also referred to as turning off the drive signal.

[0265] The photodiodes PD1 and PD4 are photoelectric conversion elements formed of, for example, PN junction photodiodes, and are configured to receive light from a subject, generate charges according to the amount of received light through photoelectric conversion, and accumulate the charges.

[0266] The charge holding units MEM1 and MEM4 are provided between the photodiodes PD1 and PD4 and the floating diffusion FD14, respectively. Furthermore, in order to realize a global shutter function, the charge holding units MEM1 and MEM4 are regions that temporarily hold the charges generated and accumulated in the photodiodes PD1 and PD4 until the charges are transferred to the floating diffusion FD14.

[0267] The first transfer transistor TR1A and the second transfer transistor TR1B are arranged in this order between the photodiode PD1 and the charge holding unit MEM1. The third transfer transistor TR1C is arranged between the charge holding unit MEM1 and the floating diffusion FD14. The first transfer transistor TR1A and the second transfer transistor TR1B are configured to transfer the charge accumulated in the photodiode PD1 to the charge holding unit MEM1 in response to a drive signal applied to the gate electrode of each of the first transfer transistor TR1A and the second transfer transistor TR1B.

[0268] Similarly, the first transfer transistor TR4A and the second transfer transistor TR4B are arranged in this order between the photodiode PD4 and the charge holding unit MEM4. The third transfer transistor TR4C is arranged between the charge holding unit MEM4 and the floating diffusion FD14. The first transfer transistor TR4A and the second transfer transistor TR4B are configured to transfer the charge accumulated in the photodiode PD4 to the charge holding unit MEM4 in response to a drive signal applied to the gate electrode of each of the first transfer transistor TR4A and the second transfer transistor TR4B.

[0269] The third transfer transistor TR1C and the third transfer transistor TR4C transfer the charges temporarily held in the charge holding units MEM1 and MEM4 to the floating diffusion FD14 in response to a drive signal applied to the gate electrodes.

[0270] In the pixels PX1 and PX4, for example, it is assumed that the second transfer transistors TR1B and TR4B are turned off and the third transfer transistors TR1C and TR4C are turned on. In this case, the charges held in the charge holding units MEM1 and MEM4, respectively, are transferred to the floating diffusion FD14 via the third transfer transistors TR1C and TR4C.

[0271] The buffers BUF1 and BUF4 are charge storage regions formed between the first transfer transistor TR1A and the second transfer transistor TR1B. The reset transistor RST14 has a drain connected to a power supply VDD1 and a source connected to the floating diffusion FD14. The reset transistor RST14 initializes, i.e., resets, the floating diffusion FD14 in response to a drive signal applied to its gate electrode. For example, when the reset transistor RST14 is turned on by the drive signal, the potential of the floating diffusion FD14 is reset to the voltage level of the power supply VDD1. That is, the floating diffusion FD14 is initialized.

[0272] The floating diffusion FD14 converts the charges transferred from the photodiodes PD1 and PD4 via the first to third transfer transistors TR1A to TR1C, TR4A to TR4C and the charge holding units MEM1 and MEM4 into electrical signals (for example, voltage signals) and outputs the electrical signals. A reset transistor RST14 is connected to the floating diffusion FD14, and a vertical signal line VSL117 is connected to the floating diffusion FD14 via an amplification transistor AMP14 and a selection transistor SEL14.

[0273] The amplification transistor AMP14 outputs an electrical signal according to the potential of the floating diffusion FD14. The amplification transistor AMP14 constitutes, for example, a source follower circuit together with a constant current source provided in the column signal processing unit. When the pixel PX is selected, the selection transistor SEL14 is turned on to output an electrical signal from the floating diffusion FD14 via the amplification transistor AMP14 to the column signal processing unit through the vertical signal line VSL117.

[0274] The pixels PX1 and PX4 further include discharge parts OFD1 and OFD4, in addition to the floating diffusion FD14, as a transfer destination of the charges of the photodiodes PD1 and PD4, respectively. The discharge transistor OFG1 is disposed between the first transfer transistor TR1A and the second transfer transistor TR1B, and the discharge transistor OFG4 is disposed between the first transfer transistor TR4A and the second transfer transistor TR4B.

[0275] The discharge transistor OFG1 has a drain connected to the discharge unit OFD1 and a source connected to a wiring connecting the first transfer transistor TR1A and the second transfer transistor TR1B. Similarly, the discharge transistor OFG4 has a drain connected to the discharge unit OFD4 and a source connected to a wiring connecting the first transfer transistor TR4A and the second transfer transistor TR4B. The discharge transistors OFG1 and OFG4 initialize, that is, reset the photodiodes PD1 and PD4 in response to a drive signal applied to each gate electrode. Resetting the photodiodes PD1 and PD4 means depleting the photodiodes PD1 and PD4.

[0276] Further, the discharge transistors OFG1, OFG4 each form an overflow path, and discharge the charges overflowing from the photodiodes PD1, PD4 to the discharge sections OFD1, OFD4, respectively. Thus, in the pixels PX1, PX4 of this embodiment, the discharge transistors OFG1, OFG4 can directly reset the photodiodes PD1, PD4.

[0277] The pixels PX1 and PX4 and the floating diffusion FD14 are arranged on the first substrate 100, and the pixel circuit 420A including the reset transistor RST14, the amplification transistor AMP14, and the selection transistor SEL14 are arranged on the second substrate 200. Furthermore, the floating diffusion FD of the first substrate 100 and the gate of the amplification transistor AMP14 of the second substrate 200 are connected by an FD wiring FDL.

[0278] The second substrate 200 is composed of a common p-well layer common to all pixels and an independent p-well layer for each amplification transistor AMP14 of the pixel, and the common p-well layer and the independent p-well layer are electrically separated by a full trench (FTI). The reset transistor RST14 and the selection transistor SEL14 in each pixel circuit 420 are formed in the common p-well layer. Since the common p-well layer is connected to the GND potential, the back gates of the reset transistor RST14 and the selection transistor SEL14 are fixed to the GND potential.

[0279] On the other hand, the amplifier transistor AMP14 in the pixel circuit 420 is formed in the independent p-well layer. Since the independent p-well layer is connected to the source of the amplifier transistor AMP14, the potential of the independent p-well layer changes following the source potential of the amplifier transistor AMP14. In other words, since the back gate and source potential of the amplifier transistor AMP14 are at the same potential, the gain of the source follower circuit is 1.

[0280] That is, the gate potential amplitude and the source potential amplitude of the amplification transistor AMP14 become equal. That is, the potential of the shield wiring SL5 also changes following the amount of change in the FD potential of the FD wiring FDL. Therefore, no charge transfer occurs between the FD wiring FDL and the shield wiring SL5, and the capacitance value between them decreases. Therefore, even if the coupling between the FD wiring FDL and the shield wiring SL5 is large, it can be ignored as the FD capacitance during the actual read operation. And, since the FD wiring FDL is arranged so that the coupling between the other wirings is minimized, the FD capacitance has a small value. That is, the parasitic capacitance of the FD capacitance is reduced, and the source follower output voltage Vsf can be increased.

[0281] <10.7.2 Functions and Effects of Embodiments 3-5> In the pixel shared unit 400A in the memory retention type global shutter type imaging device of the embodiment 3-5, the common p well layer and the independent p well layer of the amplifier transistor AMP are electrically isolated from each other. In the pixel shared unit 400A, the FD wiring FDL is shielded by a shield wiring SL5 that connects between the gate of the amplifier transistor AMP14 and the source of the amplifier transistor AMP14. That is, the substrate bias effect is eliminated by connecting the source of the amplifier transistor AMP14 and the independent p well layer of the amplifier transistor AMP14 to have the same potential, and the gain between the FD amplitude and the source amplitude of the amplifier transistor AMP14 is set to 1. The periphery of the FD wiring FDL is shielded by the shield wiring SL5 that draws out the source potential of the amplifier transistor AMP14, so that the wiring coupled to the floating diffusion FD14 moves with the same amplitude as the floating diffusion FD14. As a result, the wiring coupling capacitance is reduced, so that the FD capacitance is reduced and the charge-voltage conversion efficiency is improved.

[0282] That is, in a memory-retention type global shutter imaging device, the S / N ratio of pixel signals can be improved by improving the charge-voltage conversion efficiency while suppressing an increase in FD capacitance due to the parasitic resistance of the FD wiring FDL. Moreover, the shield wiring SL5 can suppress crosstalk between adjacent floating diffusions FD14.

[0283] In the embodiments and modifications of the present disclosure, examples of the method for forming the above-mentioned layers, films, elements, etc. include, for example, physical vapor deposition (PVD) and CVD. Examples of the PVD method include vacuum deposition using resistance heating or high-frequency heating, EB (electron beam) deposition, various sputtering methods (magnetron sputtering, RF-DC coupled bias sputtering, ECR (Electron Cyclotron Resonance) sputtering, facing target sputtering, high-frequency sputtering, etc.), ion plating, laser ablation, molecular beam epitaxy (MBE), laser transfer, etc. Examples of the CVD method include plasma CVD, thermal CVD, MOCVD, photo CVD, etc. Further, other methods include electrolytic plating, electroless plating, spin coating, immersion, casting, microcontact printing, drop casting, various printing methods such as screen printing, inkjet printing, offset printing, gravure printing, and flexographic printing, stamping, spraying, and various coating methods such as air doctor coater, blade coater, rod coater, knife coater, squeeze coater, reverse roll coater, transfer roll coater, gravure coater, kiss coater, cast coater, spray coater, slit orifice coater, and calendar coater. In addition, examples of the patterning method for each layer include chemical etching such as shadow mask, laser transfer, and photolithography, and physical etching using ultraviolet light or laser. In addition, examples of the planarization technique include CMP, laser planarization, and reflow. That is, the imaging device 1 according to the embodiment and the modified example of the present disclosure can be easily and inexpensively manufactured using the existing manufacturing process of semiconductor devices.

[0284] In the above explanation, an example has been described in which the amplification transistor AMP, the selection transistor SEL, and the reset transistor RST that constitute the pixel circuit 210 of the second substrate 211 are formed on the same semiconductor substrate, but it is also possible to configure the second substrate 211 using multiple semiconductor substrates.

[0285] In this case, if the amplification transistor AMP is disposed at a position far from the floating diffusion, a capacitance is formed between the amplification transistor AMP and the floating diffusion, which may cause a decrease in conversion efficiency.

[0286] Therefore, among the amplification transistor AMP, the selection transistor SEL, and the reset transistor RST, it is preferable to form at least the amplification transistor AMP and the floating diffusion on the same semiconductor substrate, and to form the remaining transistors on a different semiconductor substrate.

[0287] In this case, if the channel width W of the amplification transistor AMP can be increased, it will lead to a reduction in noise. Therefore, by adopting the above-described configuration in which the second substrate is composed of multiple semiconductors, it is possible to increase the area that can be allocated to the amplification transistor AMP, thereby reducing noise and improving performance.

[0288] <11. Application Examples> FIG. 58 shows an example of a schematic configuration of an imaging system 7 including the imaging device 1 according to the above embodiment and its modified example.

[0289] The imaging system 7 is, for example, an electronic device such as an imaging device such as a digital still camera or a video camera, or a mobile terminal device such as a smartphone or a tablet terminal. The imaging system 7 includes, for example, the imaging device 1 according to the above embodiment and its modified example, a DSP circuit 243, a frame memory 244, a display unit 245, a storage unit 246, an operation unit 247, and a power supply unit 248. In the imaging system 7, the imaging device 1 according to the above embodiment and its modified example, the DSP circuit 243, the frame memory 244, the display unit 245, the storage unit 246, the operation unit 247, and the power supply unit 248 are connected to each other via a bus line 249.

[0290] The imaging device 1 according to the above embodiment and its modified examples outputs image data according to incident light. The DSP circuit 243 is a signal processing circuit that processes a signal (image data) output from the imaging device 1 according to the above embodiment and its modified examples. The frame memory 244 temporarily holds the image data processed by the DSP circuit 243 on a frame-by-frame basis. The display unit 245 is formed of a panel-type display device such as a liquid crystal panel or an organic EL (Electro Luminescence) panel, and displays a moving image or a still image captured by the imaging device 1 according to the above embodiment and its modified examples. The storage unit 246 records image data of a moving image or a still image captured by the imaging device 1 according to the above embodiment and its modified examples in a recording medium such as a semiconductor memory or a hard disk. The operation unit 247 issues operation commands for various functions of the imaging system 7 according to an operation by a user. The power supply unit 248 appropriately supplies various power sources that serve as operating power sources for the imaging device 1 according to the above embodiment and its modified examples, the DSP circuit 243, the frame memory 244, the display unit 245, the storage unit 246, and the operation unit 247 to these supply targets.

[0291] Next, the imaging procedure in the imaging system 7 will be described.

[0292] 59 shows an example of a flowchart of the imaging operation in the imaging system 7. The user issues an instruction to start imaging by operating the operation unit 247 (step S101). Then, the operation unit 247 transmits an imaging command to the imaging device 1 (step S102). Upon receiving the imaging command, the imaging device 1 (specifically, the system control circuit 36) executes imaging in a predetermined imaging method (step S103).

[0293] The imaging device 1 outputs image data obtained by imaging to the DSP circuit 243. Here, the image data refers to data for all pixels of pixel signals generated based on charges temporarily stored in the floating diffusion FD. The DSP circuit 243 performs predetermined signal processing (e.g., noise reduction processing, etc.) based on the image data input from the imaging device 1 (step S104). The DSP circuit 243 stores the image data that has been subjected to the predetermined signal processing in the frame memory 244, and the frame memory 244 stores the image data in the storage unit 246 (step S105). In this manner, imaging is performed in the imaging system 7.

[0294] In this application example, the imaging device 1 according to the above-described embodiment and its modified example is applied to an imaging system 7. This allows the imaging device 1 to be made smaller or have higher definition, so that a small or high-definition imaging system 7 can be provided.

[0295] <12. Application Examples> [Application example 1] The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.

[0296] FIG. 60 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology of the present disclosure can be applied.

[0297] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 60, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.

[0298] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle according to various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0299] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0300] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0301] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0302] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0303] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0304] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0305] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0306] The audio / video output unit 12052 transmits at least one output signal of audio and image to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In the example of Fig. 60, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0307] FIG. 61 is a diagram showing an example of the installation position of the imaging unit 12031.

[0308] In FIG. 61, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.

[0309] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0310] 61 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0311] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0312] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0313] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0314] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0315] An example of a mobile object control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 among the configurations described above. Specifically, the imaging device 1 according to the above embodiment and its modified example can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, a high-definition captured image with little noise can be obtained, and therefore, high-precision control using the captured image can be performed in the mobile object control system.

[0316] [Application example 2] FIG. 62 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0317] 62 shows a state in which an operator (doctor) 11131 is performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0318] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the illustrated example, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may be configured as a so-called flexible scope having a flexible lens barrel.

[0319] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens toward an observation target in the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0320] An optical system and an image sensor are provided inside the camera head 11102, and reflected light (observation light) from an observation target is collected on the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. The image signal is transmitted to a camera control unit (CCU) 11201 as RAW data.

[0321] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and performs overall control of the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102, and performs various types of image processing on the image signal, such as development processing (demosaic processing), for displaying an image based on the image signal.

[0322] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0323] The light source device 11203 is composed of a light source such as an LED (Light Emitting Diode), and supplies the endoscope 11100 with irradiation light when photographing an operation site or the like.

[0324] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiated light, magnification, focal length, etc.) of the endoscope 11100.

[0325] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 sends gas into the body cavity of the patient 11132 via the insufflation tube 11111 to inflate the body cavity for the purpose of securing the field of view of the endoscope 11100 and securing the working space of the surgeon. The recorder 11207 is a device capable of recording various information related to the surgery. The printer 11208 is a device capable of printing various information related to the surgery in various formats such as text, image, or graph.

[0326] The light source device 11203 that supplies irradiation light to the endoscope 11100 when photographing the surgical site can be composed of a white light source composed of, for example, an LED, a laser light source, or a combination of these. When the white light source is composed of a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, so that the white balance of the captured image can be adjusted in the light source device 11203. In this case, it is also possible to capture images corresponding to each of the RGB colors in a time-division manner by irradiating the observation object with laser light from each of the RGB laser light sources in a time-division manner and controlling the driving of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0327] The light source device 11203 may be controlled to change the intensity of the light it outputs at predetermined time intervals. The driving of the image sensor of the camera head 11102 may be controlled in synchronization with the timing of the change in the light intensity to obtain images in a time-division manner, and the images may be synthesized to generate an image with a high dynamic range that is free of so-called blackout and whiteout.

[0328] The light source device 11203 may be configured to supply light of a predetermined wavelength band corresponding to the special light observation. In the special light observation, for example, by utilizing the wavelength dependency of light absorption in body tissue, a narrow band light is irradiated compared to the irradiated light (i.e., white light) during normal observation, and a predetermined tissue such as blood vessels on the mucous membrane surface is photographed with high contrast, so-called narrow band imaging is performed. Alternatively, in the special light observation, a fluorescent observation may be performed in which an image is obtained by fluorescence generated by irradiating an excitation light. In the fluorescent observation, it is possible to irradiate an excitation light to a body tissue and observe the fluorescence from the body tissue (autofluorescence observation), or to locally inject a reagent such as indocyanine green (ICG) into the body tissue and irradiate the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow band light and / or excitation light corresponding to such special light observation.

[0329] FIG. 63 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0330] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other by a transmission cable 11400 so as to be able to communicate with each other.

[0331] The lens unit 11401 is an optical system provided at the connection portion with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is configured by combining a plurality of lenses including a zoom lens and a focus lens.

[0332] The imaging unit 11402 is composed of an imaging element. The imaging element constituting the imaging unit 11402 may be one (so-called single-plate type) or multiple (so-called multi-plate type). When the imaging unit 11402 is composed of a multi-plate type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining the image signals. Alternatively, the imaging unit 11402 may be configured to have a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to 3D (Dimensional) display. By performing 3D display, the surgeon 11131 can more accurately grasp the depth of the biological tissue in the surgical site. Note that when the imaging unit 11402 is composed of a multi-plate type, multiple lens units 11401 may be provided corresponding to each imaging element.

[0333] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately behind the objective lens.

[0334] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be appropriately adjusted.

[0335] The communication unit 11404 is configured by a communication device for transmitting and receiving various information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0336] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201, and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of capturing the image, and / or information specifying the magnification and focus of the captured image.

[0337] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by a user, or may be automatically set by the control unit 11413 of the CCU 11201 based on an acquired image signal. In the latter case, the endoscope 11100 is equipped with a so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0338] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404.

[0339] The communication unit 11411 is configured with a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0340] Furthermore, the communication unit 11411 transmits, to the camera head 11102, a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0341] The image processing unit 11412 performs various types of image processing on the image signal, which is RAW data sent from the camera head 11102 .

[0342] The control unit 11413 performs various controls related to imaging of the surgical site etc. by the endoscope 11100 and display of the captured image obtained by imaging the surgical site etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0343] Further, the control unit 11413 causes the display device 11202 to display the captured image showing the surgical site, etc., based on the image signal that has been image-processed by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition techniques. For example, the control unit 11413 can recognize surgical tools such as forceps, specific living body parts, bleeding, mist when the energy treatment tool 11112 is used, etc., by detecting the shape and color of the edge of an object included in the captured image. When the control unit 11413 causes the display device 11202 to display the captured image, it may use the recognition result to superimpose various types of surgery support information on the image of the surgical site. By superimposing and presenting the surgery support information to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0344] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for communication of electrical signals, an optical fiber for optical communication, or a composite cable of these.

[0345] Here, in the illustrated example, communication is performed wired using a transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0346] An example of an endoscopic surgery system to which the technology according to the present disclosure can be applied has been described above. Of the configurations described above, the technology according to the present disclosure can be suitably applied to the imaging unit 11402 provided in the camera head 11102 of the endoscope 11100. By applying the technology according to the present disclosure to the imaging unit 11402, the imaging unit 11402 can be made smaller or have higher resolution, so that a small or high-resolution endoscope 11100 can be provided.

[0347] The present disclosure has been described above by giving embodiments and their modified examples, application examples, and application examples, but the present disclosure is not limited to the above-mentioned embodiments, etc., and various modifications are possible. Note that the effects described in this specification are merely examples. The effects of the present disclosure are not limited to the effects described in this specification. The present disclosure may have effects other than those described in this specification.

[0348] Furthermore, for example, the present disclosure can have the following configuration. (1) A first substrate having pixels each having a photodiode and a floating diffusion for holding electric charges converted by the photodiode; a second substrate having a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel and is laminated on the first substrate; a wiring that penetrates the first substrate and the second substrate in a stacking direction and electrically connects a floating diffusion in the first substrate and an amplification transistor in the pixel circuit of the second substrate; a trench formed at least in the second substrate, running parallel to the wiring, and having a depth equal to or greater than the thickness of a semiconductor layer in the second substrate; An imaging device comprising: (2) The imaging device according to (1), further comprising a shield wiring that electrically connects the conductive material embedded in the trench and the source of the amplifying transistor. (3) The imaging device according to (1), characterized in that the trench is filled with a gas having a low dielectric constant. (4) The first substrate is A semiconductor layer; A wiring layer formed of SiO2 and laminated on the semiconductor layer; The imaging device according to (1) or (2), further comprising: (5) The first substrate is A semiconductor layer; and a wiring layer that is laminated on the semiconductor layer and is made of an insulating material having a lower dielectric constant than SiO2. (6) The trench is The imaging device described in (1), wherein the wiring is formed in a semiconductor layer in the second substrate so as to be electrically separated from other wirings running parallel to the wiring. (7) The trench is The imaging device described in (6) above, wherein the wiring is formed in a semiconductor layer in the second substrate so as to surround the wiring in a circular shape when viewed from the layered surface of the second substrate. (8) The trench is The imaging device described in (6) above, wherein the wiring is formed in a semiconductor layer in the second substrate so as to surround the wiring in a rectangular shape when viewed from the layered surface of the second substrate. (9) A first substrate having pixels each having a photodiode and a floating diffusion for holding an electric charge converted by the photodiode; a second substrate having a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, the second substrate being stacked on the first substrate; a wiring formed on the first substrate and the second substrate, the wiring electrically connecting a floating diffusion in the first substrate and an amplification transistor in the pixel circuit of the second substrate; a shield wiring that electrically connects between the gate of the amplifier transistor and the source of the amplifier transistor in a state in which a well layer of the pixel circuit and a well layer of the amplifier transistor in the pixel circuit are electrically isolated from each other, and that runs in parallel with the wiring and shields the wiring; An imaging device comprising: (10) The shield wiring is The imaging device described in (9), characterized in that at least the wiring portion that passes through the second substrate, of the wiring connecting between the amplifying transistor in the second substrate and the floating diffusion in the first substrate, is shielded. (11) The shield wiring is The imaging device described in (9), characterized in that the wiring portion that passes through the second substrate and the first substrate, of the wiring connecting between the amplifying transistor in the second substrate and the floating diffusion in the first substrate, is shielded. (12) The imaging device according to (9), wherein the distance between at least a portion of the shield wiring and the other wiring is shorter than that between the shield wiring and the other wiring. (13) The imaging device according to (9), wherein a coupling capacitance between the wiring and the shield wiring is larger than a coupling capacitance between the wiring and other wiring. (14) a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; The signal processing unit includes an AD converter that performs AD conversion based on a reference signal and a load circuit, and outputs pixel data according to a voltage of a vertical signal line. The imaging device according to (9). (15) a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; The signal processing unit includes a RAMP generating circuit that generates and outputs a RAMP waveform; a comparator that compares a voltage of a pixel signal read out via the vertical signal line with a voltage of a RAMP waveform; a counter that counts based on a comparison result signal of the comparator; a latch for outputting pixel data based on a count value of the counter; The imaging device according to (9) above, (16) The comparator is configured as a single-slope ADC. The imaging device according to (15). (17) the comparator includes a transistor to which the pixel signal read out via the vertical signal line is applied at a source terminal and to which the RAMP waveform is applied at a gate terminal, and which outputs a comparison result signal based on a gate-source voltage; The imaging device according to (15). (18) a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; The signal processing unit includes a load circuit. a front-end circuit configured as a current reuse circuit, the front-end circuit being connected to the vertical signal line and configured to absorb a current generated by the load circuit; an AD converter that performs AD conversion based on a predetermined reference signal and outputs pixel data according to the voltage of the vertical signal line; 10. The imaging device according to claim 9. [Explanation of symbols]

[0349] 1. Imaging device 100 First substrate 100T wiring layer 200 Second board 200T wiring layer 210A Pixel circuit 250 Common p-well layer 251 Independent p-well layer 541 pixels 554 Comparator 558 Comparator 561 Front circuit PD Photodiode FD Floating Diffusion FDL FD wiring T-Trench SL Shielded wiring

Claims

1. A first substrate having pixels each including a photodiode and a floating diffusion that holds electric charges converted by the photodiode; a second substrate having a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, the second substrate being stacked on the first substrate; a wiring that penetrates the first substrate and the second substrate in a stacking direction and electrically connects a floating diffusion in the first substrate and an amplification transistor in the pixel circuit of the second substrate; a trench formed at least in the second substrate, running in parallel with the wiring, and having a depth equal to or greater than a thickness of a semiconductor layer in the second substrate; a shield wiring formed of a conductive material embedded in the trench; Equipped with the shield wiring is electrically connected to the source of the amplification transistor; Imaging device.

2. The first substrate is A semiconductor layer; A SiO ２ A wiring layer formed by The imaging device according to claim 1 .

3. The first substrate is A semiconductor layer; A SiO ２ The imaging device according to claim 1 , further comprising: a wiring layer formed of an insulating material having a lower dielectric constant than the first insulating layer.

4. The trench is The imaging device according to claim 1 , wherein the wiring is formed in a semiconductor layer in the second substrate so as to electrically separate the wiring from other wirings running parallel to the wiring.

5. The trench is The imaging device according to claim 4 , wherein the wiring is formed in a semiconductor layer in the second substrate so as to surround the wiring in a circular shape when viewed from the layered surface of the second substrate.

6. The trench is The imaging device according to claim 4 , wherein the wiring is formed in a semiconductor layer in the second substrate so as to surround the wiring in a rectangular shape when viewed from the layered surface of the second substrate.

7. A well layer of the pixel circuit and a well layer of the amplification transistor in the pixel circuit are electrically isolated from each other, the well layer of the amplification transistor is electrically connected to a source of the amplification transistor; The imaging device according to any one of claims 1 to 6.

8. A first substrate having pixels each having a photodiode and a floating diffusion for holding an electric charge converted by the photodiode; a second substrate having a pixel circuit that reads out a pixel signal based on the charge held in the floating diffusion in the pixel, the second substrate being stacked on the first substrate; a wiring formed on the first substrate and the second substrate, the wiring electrically connecting a floating diffusion in the first substrate and an amplification transistor in the pixel circuit of the second substrate; a shield wiring for shielding the wiring; Equipped with a well layer of the pixel circuit and a well layer of the amplification transistor in the pixel circuit are electrically isolated from each other; the well layer of the amplification transistor is electrically connected to a source of the amplification transistor, the shield wiring is electrically connected to the source of the amplification transistor; Imaging device.

9. The shield wiring is 9. The imaging device according to claim 8, wherein at least a portion of the wiring that connects between the amplifying transistor in the second substrate and the floating diffusion in the first substrate and that passes through the second substrate is shielded.

10. The shield wiring is 9. The imaging device according to claim 8, wherein a portion of the wiring that connects between the amplifying transistor in the second substrate and the floating diffusion in the first substrate and that passes through the second substrate and the first substrate is shielded.

11. The imaging device according to claim 8 , wherein a distance between at least a portion of the shield wiring and the other wiring is shorter than a distance between the shield wiring and the other wiring.

12. 9. The imaging device according to claim 8, wherein a coupling capacitance between the wiring and the shield wiring is larger than a coupling capacitance between the wiring and another wiring.

13. a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; the column signal processing unit includes an AD converter that performs AD conversion based on a reference signal, and a load circuit, and outputs pixel data according to a voltage of the vertical signal line; The imaging device according to claim 8.

14. a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; The column signal processing unit includes: A RAMP generating circuit that generates and outputs a RAMP waveform; a comparator that compares a voltage of the pixel signal read out via the vertical signal line with a voltage of a RAMP waveform; a counter that counts based on a comparison result signal of the comparator; a latch for outputting pixel data based on a count value of the counter; having The imaging device according to claim 8.

15. The comparator is configured as a single-slope ADC. The imaging device according to claim 14.

16. the comparator has a transistor to which the pixel signal read out via the vertical signal line is applied to a source terminal and the RAMP waveform is applied to a gate terminal, and which outputs the comparison result signal based on a gate-source voltage; The imaging device according to claim 14.

17. a column signal processing unit connected to the pixel circuits via a plurality of vertical signal lines; The column signal processing unit includes: A load circuit; a pre-circuit configured as a current reuse column amplifier, the pre-circuit being connected to the vertical signal line through which a current generated by the load circuit flows; an AD converter that performs AD conversion based on a predetermined reference signal; Including, outputting pixel data corresponding to the voltage of the vertical signal line; The imaging device according to claim 8.

Images