Reticle inspection equipment capable of simulation

Abstract

To provide a reticle inspection device capable of executing a simulation.SOLUTION: A body 10 has a storage space 13 therein, and executes a simulation for at least one of a conveyance process and a preparation process of a reticle having a prescribed size. A detection module is stored in the storage space 13 of the body 10, detects environmental information of at least the one body 10 at the time of simulation, and calculates at least the one measurement data. A power source 30 is stored in the storage space 13 of the body 10 and is electrically connected to the detection module, and provides power required for actuation of the detection module. A wireless charging receiver 40 is stored in the storage space 13 of the body 10 and is electrically connected to the power source 30, and is driven by external force and charges the power source 30. The charging case 50 has a charging space 51 for storing the body 10 therein, is provided with a wireless charging stand 53 corresponding to the wireless charging receiver 40, and is operated, drives the wireless charging receiver 40 and charges a power source.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a reticle inspection apparatus used in a semiconductor manufacturing process, and more particularly to a reticle inspection apparatus capable of simulating at least one of a transport process or a production process of a reticle of a predetermined size offline and measuring various environmental information. [Background technology]

[0002] In the current semiconductor manufacturing process, the lithography process is one of the essential steps. The lithography process is a technology that transfers the circuit pattern on the reticle to the wafer by irradiating the photoresist on the wafer with a light source of a specific wavelength, which passes through the reticle, causing a chemical change in the photoresist.

[0003] The reticle plays a very important role in the lithography process. The reticle is a thin piece made of quartz glass, on which a circuit pattern is coated, which is composed of a certain metal plating film (e.g., chromium metal) arranged in a certain arrangement. However, like a wafer, the reticle is a delicate and fragile vehicle. A potential problem is that the material and structural strength of the reticle itself are fragile, so any vibration or tilt that occurs during the reticle transportation process or the lithography process may affect the structure of the reticle. The reticle itself and the metal plating film thereon may also be altered, deformed, or embrittled due to the surrounding environmental temperature and humidity. All of these problems affect the operation of the reticle. If a problem occurs in the reticle, the wafers manufactured using the reticle may also be affected and become unusable, which may cause immeasurable losses for semiconductor manufacturers.

[0004] Patent document 1 (Taiwan Patent Publication No. I463251) discloses a reticle structure for detecting environmental information. By providing a plurality of areas for detecting environmental information and a transmission module in the reticle structure, the surrounding environment is detected and recorded while the reticle is working, and the user can use different effective solutions based on the related information of the surrounding environment. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Taiwan Patent Publication TWI463251 Specification Summary of the Invention [Problem to be solved by the invention]

[0006] However, a problem with the above reticle structure is that since an environmental sensor is merely added to a general reticle structure, the environmental sensor detects environmental information only when the reticle structure is transported or worked on. However, when a problem with the surrounding environment is found during the progress of the fabrication process, the reticle structure may already have been affected, and all wafers in this fabrication process may be affected and cannot be shipped. The only way to prevent the reticle from being affected by environmental factors is to improve the environmental factors after the fact, and the problem of the reticle being affected by environmental factors during the fabrication process cannot be prevented. Therefore, one of the problems that related parties and researchers in the semiconductor field strongly wish to solve is to measure environmental information related to the reticle transport environment and work environment in advance and prevent the reticle from being affected by environmental factors during the fabrication process.

[0007] The main object of the present invention is to provide a simulation-capable reticle inspection device that can detect the presence or absence of abnormalities in the work environment or work machine by simulating at least one of the reticle transportation process or production process offline and detecting related environmental information.

[0008] Another object of the present invention is to provide a simulation-enabled reticle inspection apparatus that can improve the durability of the detection module through wireless charging technology. [Means for solving the problem]

[0009] In order to achieve the above-mentioned object, a reticle detection and inspection device capable of simulation according to one aspect of the present invention includes a main body, a detection module, a power source, a wireless charging receiver, and a charging case. The main body has an internal storage space, and at least one of a transport process or a production process of a reticle of a predetermined size is simulated. The detection module is accommodated in the storage space of the main body, detects at least one environmental information of the main body during the simulation, and calculates at least one measurement data based on the detected environmental information. The power source is accommodated in the storage space of the main body and electrically connected to the detection module, and provides power required for the operation of the detection module. The wireless charging receiver is accommodated in the storage space of the main body and electrically connected to the power source, and is driven by an external force to charge the power source. The charging case has a charging space for accommodating the main body, and is provided with a wireless charging stand corresponding to the wireless charging receiver, and is operated to drive the wireless charging receiver and charge the power source.

[0010] In yet another aspect, a reticle detection and inspection device capable of simulation includes a main body, a detection module, a power source, and a wireless charging receiver. The main body has an internal storage space, and at least one of a transport process or a production process of a reticle of a predetermined size is simulated. The detection module is accommodated in the storage space of the main body, detects at least one environmental information of the main body during the simulation, and calculates at least one measurement data based on the detected environmental information. The power source is accommodated in the storage space of the main body and electrically connected to the detection module, and provides power required for the operation of the detection module. The wireless charging receiver is accommodated in the storage space of the main body and electrically connected to the power source, and is driven by an external force to charge the power source.

[0011] In one embodiment, the main body has a base with a recess in the center and a lid that covers the recess from above, and the lid and the recess together define the storage space.

[0012] In one embodiment, the size of the body is the same as the size of a reticle of a given size.

[0013] In one embodiment, the body further includes a predetermined weight of filler therein, the filler being filled in the receiving space.

[0014] In one embodiment, the sensing module includes a circuit board, a sensing unit provided on the circuit board for sensing environmental information of the main body and the surrounding area and generating a sensing signal based on the sensed environmental information, and a calculation unit provided on the circuit board for receiving the sensing signal of the sensing unit and calculating measurement data based on the received sensing signal.

[0015] In one embodiment, the detection module further includes a memory unit provided on the circuit board, electrically connected to the calculation unit, and configured to store measurement data of the calculation unit; and a transmission unit provided on the circuit board, electrically connected to the memory unit, and configured to transmit the measurement data stored in the memory unit to an external remote device.

[0016] In one embodiment, the detection unit includes a vibration sensor that detects a degree of vibration of the main body during the simulation and generates a vibration signal based on the detected degree of vibration, and the calculation unit calculates a vibration value based on the received vibration signal.

[0017] In one embodiment, the detection unit includes a tilt sensor that detects a tilt degree of the body during the simulation and generates a tilt signal based on the detected tilt degree, and the calculation unit calculates an angle change value based on the received tilt signal.

[0018] In one embodiment, the detection unit includes a temperature sensor that detects an environmental temperature surrounding the main body during the simulation and generates a temperature signal based on the detected environmental temperature, and the calculation unit calculates a temperature value based on the received temperature signal.

[0019] In one embodiment, the detection unit includes a humidity sensor that detects environmental humidity around the main body during the simulation and generates a humidity signal based on the detected environmental humidity, and the calculation unit calculates a humidity value based on the received humidity signal. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is an exploded view of a first preferred embodiment of the present invention. [Diagram 2] FIG. 2 is a partial exploded view of a main body of a second preferred embodiment of the present invention. [Diagram 3] 1 is a cross-sectional view of a main body according to a first preferred embodiment of the present invention. [Figure 4] FIG. 1 is a block diagram of a first preferred embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] 1 to 4, a reticle inspection apparatus capable of simulating according to a preferred embodiment of the present invention simulates and detects at least one of a transport process or a production process of a reticle (not shown) of a predetermined size. This reticle inspection apparatus capable of simulating mainly includes a main body 10, a detection module 20, a power source 30, a wireless charging receiver 40, and a charging case 50.

[0022] The size of the body 10 is the same as the size of the reticle of the predetermined size. For example, in this embodiment, the reticle of the predetermined size is a flat rectangular parallelepiped structure with a length, width, and height of 6 inches, 6 inches, and 0.25 inches, respectively. The body 10 is also a flat rectangular parallelepiped structure with a length, width, and height of 6 inches, 6 inches, and 0.25 inches, respectively. However, in another embodiment, the outer shape of the body may be changed according to the change in size of the reticle of the predetermined size.

[0023] Specifically, the main body 10 is formed by combining a base 11 and a cover 12. The base 11 and the cover 12 are each a thin plate-like member, and the cover 12 is provided on the top surface of the base 11. In this embodiment, the material of the base 11 and the cover 12 is quartz glass. In another embodiment, the material of the base and the cover may be hardened glass, heat-resistant glass, soda-lime glass, or any other equivalent material that can be used for general reticles.

[0024] The main body 10 has an accommodation space 13 therein for accommodating the detection module 20, the power source 30, and the wireless charging receiver 40 inside the main body 10. Specifically, a recess 110 is provided at the center position of the base 11, and the cover 12 covers an upper part of the recess 110. When the base 11 is combined with the cover 12, the recess 110 and the cover 12 together define the accommodation space 13.

[0025] In this embodiment, the base 11 further has a second recess 111 surrounding the periphery of the recess 110 and connected to the top surface of the recess 110, and the bottom height of the second recess 111 is higher than the bottom height of the recess 110. The shape of the second recess 111 corresponds to the cover 12, and the cover 12 can be accommodated in the second recess 111, and at this time, the top height of the cover 12 is the same as the top height of the base 11. In another embodiment, the cover directly covers the top surface of the base, making the top height of the cover higher than the top height of the base.

[0026] The main body 10 further includes a filler 14 of a predetermined weight in the accommodation space 13. The filler 14 is filled in the accommodation space 13 to fix the detection module 20, the power source 30, and the wireless charging receiver 40 to their positions in the accommodation space 13. The user can adjust the weight and center of gravity of the main body 10 by adjusting the material and predetermined weight of the filler 14, and make the weight and center of gravity of the main body 10 closer to the weight and center of gravity of a reticle of a predetermined size. This makes the simulation results closer to the actual environment. In this embodiment, the filler 14 is epoxy resin, but in other embodiments, the filler may be a glue-like material, air, or vacuum.

[0027] The sensing module 20 includes a circuit board 21, a sensing unit 22, a calculation unit 23, a storage unit 24, a transmission unit 25, and a parameter adjustment unit 26. The circuit board 21 is accommodated in the accommodation space 13 of the main body 10 and abuts against the bottom surface of the recess 110 of the base 11. In this embodiment, the height of the circuit board 21 is lower than the depth of the recess 110. The sensing unit 22, the calculation unit 23, the storage unit 24, the transmission unit 25, and the parameter adjustment unit 26 are electrically connected to the circuit board 21.

[0028] The sensing unit 22 senses at least one environmental information of the main body 10 during the real-time simulation of the transport process or the preparation process of a reticle of a predetermined size, and generates at least one corresponding sensing signal at each predetermined time interval. In this embodiment, the sensing unit 22 includes, but is not limited to, at least one of a vibration sensor 220, a tilt sensor 221, a temperature sensor 222, and a humidity sensor 223. The environmental information includes, but is not limited to, at least one of a vibration degree of the main body 10, a tilt degree of the main body 10, an ambient environmental temperature, and an ambient environmental humidity. The sensing signal includes, but is not limited to, at least one of a vibration signal, a tilt signal, a temperature signal, and a humidity signal.

[0029] The vibration sensor 220 detects the degree of vibration of the main body 10, generates a vibration signal based on the detected degree of vibration, and transmits it to the calculation unit 23. The tilt sensor 221 detects the degree of tilt of the main body 10, generates a tilt signal based on the detected degree of tilt, and transmits it to the calculation unit 23. The temperature sensor 222 detects the environmental temperature around the main body 10, generates a temperature signal based on the detected environmental temperature, and transmits it to the calculation unit 23. The humidity sensor 223 detects the environmental humidity around the main body 10, generates a humidity signal based on the detected environmental humidity, and transmits it to the calculation unit 23.

[0030] The calculation unit 23 is electrically connected to the detection unit 22, and calculates corresponding measurement data based on the detection signal generated by the detection unit 22. In this embodiment, the measurement data includes at least one of a vibration value, a tilt angle value (or an angle change value), a temperature value, and a humidity value. Specifically, in this embodiment, the calculation unit 23 calculates a vibration value according to the vibration signal generated by the vibration sensor 220, calculates a tilt angle value (or an angle change value) according to the tilt signal generated by the tilt sensor 221, calculates a temperature value according to the temperature signal generated by the temperature sensor 222, and calculates a humidity value according to the humidity signal generated by the humidity sensor 223.

[0031] The storage unit 24 is electrically connected to the calculation unit 23, and receives and stores the measurement data calculated by the calculation unit 23. In this embodiment, the storage unit 24 can store measurement data for more than about 4 hours.

[0032] The transmission unit 25 is electrically connected to the storage unit 24 and transmits the measurement data stored in the storage unit 24 to an external remote device 60 by a method of wired transmission or wireless transmission (including but not limited to WIFI, Bluetooth, far infrared, high frequency circuit). The remote device 60 may include but is not limited to at least one of a personal mobile device (mobile phone, tablet), a computer, a physical server, or a cloud server. In another embodiment, the transmission module may be directly electrically connected to the detection unit and / or the calculation unit and transmit the detection signal generated by the detection unit and / or the measurement data calculated by the calculation unit to an external remote device.

[0033] The parameter adjusting unit 26 is electrically connected to the sensing unit 22 and communicatively connected to an external remote device 60, so that a user can operate the remote device 60 to adjust related measurement parameters of the sensing unit 22. The related measurement parameters include, but are not limited to, at least one vibration measurement parameter of the vibration sensor 220, at least one tilt measurement parameter of the tilt sensor 221, at least one temperature measurement parameter of the temperature sensor 222, and at least one humidity measurement parameter of the humidity sensor 223.

[0034] The environmental information that can be detected by the detection module 20 of the present invention is not limited to the vibration detection, tilt detection, temperature detection, and humidity detection disclosed in this embodiment. The user may install, as necessary, for example, a pressure sensor, an illuminance sensor, or any other sensor that detects factors affecting the use of the reticle.

[0035] The power source 30 is accommodated in the accommodation space 13 of the main body 10 and mounted on the circuit board 21. In this embodiment, the height of the power source 30 is equal to or less than the depth of the recess 110. The power source 30 is electrically connected to the sensing module 20 and provides the power required for the operation of the sensing module 20. Specifically, the power source 30 is a rechargeable battery, such as a lithium battery, a button battery, or other thin battery that can be accommodated in the recess 110 of the base 11. In this embodiment, the electrical capacity of the power source 30 when fully charged allows the sensing module 20 to operate continuously for more than four hours.

[0036] The wireless charging receiver 40 is accommodated in the accommodation space 13 of the main body 10 and mounted on the circuit board 21. In this embodiment, the height of the wireless charging receiver 40 is equal to or less than the depth of the recess 110. Specifically, the wireless charging receiver 40 is a receiving coil, and is electrically connected to the power source 30. The receiving coil is driven by external electromagnetic induction to generate a current, which can charge the power source 30.

[0037] The charging case 50 is a housing that can be opened and closed, and has a charging space 51 inside for placing and storing the main body 10 in the charging space 51. The charging case 50 is provided with a plurality of positioning parts 52 for supporting the main body 10 and preventing the main body 10 from moving in the charging case 50. A wireless charging stand 53 is provided on the bottom surface of the charging case 50 in correspondence with the wireless charging receiver 40. One end of the charging case 50 is electrically connected to a switch (not shown). When the main body 10 is placed in the charging space 51 of the charging case 50, a magnetic field change is caused by operating the wireless charging stand 53, and the wireless charging receiver 40 is driven by electromagnetic induction to generate a current and charge the power source 30. This allows the main body 10 to maintain a charged state when stored in the charging case 50, and relatively improves the durability of the power source 30 so that detection is not stopped due to a lack of power when detection is performed.

[0038] According to the above-mentioned structure, the reticle inspection apparatus capable of simulating the present invention has the following practical operational applications:

[0039] When a user determines that there is an abnormality in the work environment and / or the work machine before / after working on a reticle of a predetermined size "on-line" in the work environment or on the work machine, the user can use the reticle inspection device capable of simulation of the present invention to simulate at least one of the same transport process or production process as the reticle of the predetermined size "off-line." However, "online" here means that the transport and production process of the reticle of the predetermined size is actually performed, and "offline" here means that the reticle of the predetermined size is not transported in the work environment and the production process is not performed on the work machine. In addition, the transport process here includes transport before entering the work machine and transport after leaving the work machine, and the production process includes the process of moving and using in the work machine. In other words, the transport process and production process include all work processes of the reticle of the predetermined size.

[0040] When a user performs a simulation using a reticle inspection apparatus capable of simulating, the main body 10 is transported in a working environment together with a transport device (e.g., a robot arm, an automatic rail, a transport vehicle, a manual transport, etc.) and moved in the working machine by a transfer device (e.g., a robot arm, an automatic robot, an automatic rail, etc.). At this time, the detection unit 22 of the detection module 20 simultaneously detects the main body 10 and the surrounding environment in real time at a frequency of once per time interval.

[0041] For example, in this embodiment, the vibration sensor 220 can detect the degree of vibration of the main body 10 during the transportation and production process, the tilt sensor 221 can detect the degree of tilt of the main body 10 during the transportation and production process, the temperature sensor 222 can detect the environmental temperature around the main body 10 during the transportation and production process, and the humidity sensor 223 can detect the environmental humidity around the main body 10 during the transportation and production process. The measurement data obtained after the calculation unit 23 calculates the detection signal obtained by the detection unit 22 is stored by the memory unit 24 during or after the simulation is completed, or transmitted by the transmission unit 25.

[0042] The external shape of the main body 10 is the same as that of a reticle of a given size, and the transport path and movement path of the main body 10 are both the same as the paths used in the transport and production process during online work on a reticle of a given size, so the environmental information obtained when simulating the main body 10 offline can be considered to be almost identical to the environmental information obtained during online work on a reticle of a given size.

[0043] The user can operate the remote device 60 to inspect and analyze the measurement data to determine offline whether a reticle of a predetermined size will encounter vibration or tilt in the working environment and working machine, and whether the temperature and humidity of the working environment and working machine will cause the reticle to deform, thermally expand or contract, or become embrittled. If the user determines that there is something wrong with the environmental information after analyzing the measurement data, he or she can further perform subsequent inspection and maintenance on the working environment and working machine. This can ensure that the reticle of a predetermined size will not be affected by environmental factors in subsequent online operations.

[0044] As described above, the reticle inspection apparatus capable of simulation according to the present invention has the same size and weight as the main body 10 of a reticle of a predetermined size, and thus simulates the transportation and preparation process of a reticle of a predetermined size offline, and measures related environmental information in real time using the detection module 20 to obtain corresponding measurement data. Therefore, a user can determine in advance whether there is a problem in the overall reticle work environment offline using the related measurement data, and eliminate the problem early before working on the reticle online. Therefore, the present invention can effectively solve the problem of being affected by environmental factors during the transportation or preparation process of a reticle. Meanwhile, the present invention further provides a technology for wirelessly charging the power source 30, thereby relatively improving the durability of the detection module 20. [Explanation of symbols]

[0045] 10. Main Unit 11 Pedestal 110 Recess 12 Lid 13 Containment Space 14 Filling 20 Detection Module 21 Circuit board 22 Detection unit 220 Vibration Sensor 221 Tilt Sensor 222 Temperature Sensor 223 Humidity Sensor 23 Computational Units 24 Storage Unit 25 Transmission Unit 26 Parameter Adjustment Unit 30 power supply 40 Wireless charging receiver 50 Charging case 51 Charging space 52 Positioning parts 53 Wireless charging stand 60 Remote Device

Claims

1. a main body having an internal storage space and configured to perform a simulation of at least one of a transport process or a production process of a reticle of a predetermined size; a detection module that is accommodated in the accommodation space of the main body, detects at least one piece of environmental information of the main body during the simulation, and calculates at least one piece of measurement data based on the detected environmental information; a power source that is accommodated in the accommodation space of the main body and electrically connected to the detection module to provide power required for operation of the detection module; a wireless charging receiver that is accommodated in the accommodation space of the main body and electrically connected to the power source and is driven by an external force to charge the power source; The charging case has a charging space therein for accommodating the main body, is provided with a wireless charging stand corresponding to the wireless charging receiver, and is operated to drive the wireless charging receiver and charge the power source; A simulation-enabled reticle inspection tool, including:

2. The main body has a base having a recess in the center and a lid covering an upper part of the recess, 2. The reticle inspection apparatus capable of simulating according to claim 1, wherein said lid and said recess together define said storage space.

3. 2. The reticle inspection apparatus capable of simulating according to claim 1, wherein the size of said main body is the same as the size of said reticle of said predetermined size.

4. 2. The reticle inspection apparatus capable of performing a simulation according to claim 1, wherein the main body further has therein a filler of a predetermined weight filled in the accommodation space.

5. The detection module includes: A circuit board; a detection unit provided on the circuit board, for detecting environmental information of the main body and its surroundings, and generating a detection signal based on the detected environmental information; a calculation unit disposed on the circuit board, the calculation unit receiving the detection signal from the detection unit and calculating measurement data based on the received detection signal; 2. The reticle inspection system capable of simulation according to claim 1, further comprising:

6. The detection module includes: a memory unit provided on the circuit board, electrically connected to the calculation unit, for storing measurement data of the calculation unit; a transmission unit provided on the circuit board and electrically connected to the storage unit for transmitting the measurement data stored in the storage unit to an external remote device; 6. The simulation capable reticle inspection system of claim 5, further comprising:

7. the detection unit includes a vibration sensor that detects a degree of vibration of the main body during the simulation and generates a vibration signal based on the detected degree of vibration; The reticle inspection apparatus capable of simulating according to claim 5 , wherein the calculation unit calculates a vibration value based on the received vibration signal.

8. the detection unit includes a tilt sensor that detects a tilt degree of the main body during the simulation and generates a tilt signal based on the detected tilt degree; The reticle inspection system according to claim 5 , wherein the calculation unit calculates an angle change value based on the received tilt signal.

9. the detection unit includes a temperature sensor that detects an environmental temperature around the main body during the simulation and generates a temperature signal based on the detected environmental temperature; The reticle inspection system according to claim 5 , wherein the calculation unit calculates a temperature value based on the received temperature signal.

10. The detection unit includes a humidity sensor that detects an environmental humidity around the main body during the simulation and generates a humidity signal based on the detected environmental humidity; The reticle inspection system according to claim 5 , wherein the calculation unit calculates a humidity value based on the received humidity signal.

11. a main body having an internal storage space and configured to perform a simulation of at least one of a transport process or a production process of a reticle of a predetermined size; a detection module that is accommodated in the accommodation space of the main body, detects at least one piece of environmental information of the main body during the simulation, and calculates at least one piece of measurement data based on the detected environmental information; a power source that is accommodated in the accommodation space of the main body and electrically connected to the detection module to provide power required for operation of the detection module; a wireless charging receiver that is accommodated in the accommodation space of the main body and electrically connected to the power source and is driven by an external force to charge the power source; A simulation-enabled reticle inspection tool, including:

12. The main body has a base having a recess in the center and a lid covering an upper part of the recess, 12. The reticle inspection apparatus capable of simulating according to claim 11, wherein the lid and the recess together define the storage space.

13. 12. The reticle inspection apparatus capable of simulating according to claim 11, wherein the size of the main body is the same as the size of the reticle of the predetermined size.

14. 12. The reticle inspection apparatus capable of performing a simulation according to claim 11, wherein the main body further has a predetermined weight of a filler therein that fills the accommodation space.

15. The detection module includes: A circuit board; a detection unit provided on the circuit board, for detecting environmental information of the main body and its surroundings, and generating a detection signal based on the detected environmental information; a calculation unit disposed on the circuit board, the calculation unit receiving the detection signal from the detection unit and calculating measurement data based on the received detection signal; 12. The reticle inspection system capable of simulation according to claim 11, further comprising:

16. The detection module includes: a memory unit provided on the circuit board, electrically connected to the calculation unit, for storing measurement data of the calculation unit; a transmission unit provided on the circuit board and electrically connected to the storage unit for transmitting the measurement data stored in the storage unit to an external remote device; The simulation capable reticle inspection system of claim 15 further comprising:

17. the detection unit includes a vibration sensor that detects a degree of vibration of the main body during the simulation and generates a vibration signal based on the detected degree of vibration; The reticle inspection system capable of simulating according to claim 15 , wherein the calculation unit calculates a vibration value based on the received vibration signal.

18. the detection unit includes a tilt sensor that detects a tilt degree of the main body during the simulation and generates a tilt signal based on the detected tilt degree; 16. The reticle inspection system according to claim 15, wherein the calculation unit calculates an angle change value based on the received tilt signal.

19. the detection unit includes a temperature sensor that detects an environmental temperature around the main body during the simulation and generates a temperature signal based on the detected environmental temperature; The reticle inspection system according to claim 15 , wherein the calculation unit calculates a temperature value based on the received temperature signal.

20. the detection unit includes a humidity sensor that detects an environmental humidity around the main body during the simulation and generates a humidity signal based on the detected environmental humidity; The reticle inspection system according to claim 15 , wherein the calculation unit calculates a humidity value based on the received humidity signal.

Images