Stage apparatus, lithography apparatus and article manufacturing method

Abstract

To provide a stage device having a measurement system easy to implement.SOLUTION: A stage device includes: a stage movable in a first direction and a second direction orthogonal to each other; a scale arranged on the stage in a manner extending in the first direction; an optical assembly arranged so as to face the scale at least in a part of a movable range of the stage and extending in the second direction; and an interferometer configured to send measurement light and reference light to the optical assembly and receive the measurement light and the reference light returned from the optical assembly. The optical assembly is configured to irradiate the scale with the measurement light from the interferometer and to return, to the interferometer, the measurement light and the reference light returned from the scale.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The present invention relates to a stage apparatus, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] In conventional exposure apparatuses for manufacturing articles such as semiconductor devices and display devices, laser interferometer systems capable of measuring the position and displacement of an object with high resolution and with long-term stability have been used as measurement systems for measuring the position of the stage. In recent years, due to the demand for finer features and improved productivity, stage apparatuses are required to have faster and more accurate positioning performance. In this situation, fluctuations in measurement values ​​caused by air fluctuations in the optical path of the laser interferometer are a factor that hinders improvements in the overlay performance of device patterns, which is the final performance of the exposure apparatus.

[0003] Patent Document 1 discloses an optical encoder system capable of measuring the attitude of a stage device holding a substrate with respect to 6 DOF (degrees of freedom) as an alternative to a laser interferometer system. The optical encoder may include a scale having a two-dimensional grating regularly arranged with a fine pitch on the nano-order, and a plurality of heads that irradiate the scale with a semiconductor laser light, detect reflected or diffracted light, and convert it into incremental position information. The advantage of the encoder system is that it is not affected by air fluctuations and the scale can be permanently fixed to the measurement target. This means that the measured value is unchanged unless the scale is distorted by heat or elasticity from the outside, and measurement errors of the grating straightness and orthogonality can be calibrated, for example, during assembly and manufacturing by interferometer measurement in a vacuum. The encoder can provide sub-nanometer resolution by combining it with calibration and interpolation techniques. On the other hand, the encoder may be affected by long-term mechanical fluctuations such as drift of the grating pitch of the scale, drift of the scale holder, thermal expansion, etc.

[0004] Patent Document 2 discloses a measurement system that uses both a laser interferometer and an encoder. This measurement system uses an encoder to perform high-precision measurement of short and short intervals of the wide range of drive strokes of a stage device, and uses a laser interferometer to correct for fluctuations over long and long intervals.

[0005] Patent Document 3 discloses an interference type encoder system capable of simultaneous measurement of multiple axes, which is an improvement of a conventional laser interferometer system. Until now, exposure apparatuses have used laser interferometers using the heterodyne interference method. In a laser interferometer using the heterodyne interference method, a heterodyne signal is generated by emitting measurement light and reference light from a common light source, and overlapping and interfering the measurement light reflected from the measurement object with the reference light that serves as a reference. The phase change of this heterodyne signal can be converted into a relative position change of the measurement object. Patent Document 3 discloses an interference type encoder that sends measurement light to a scale fixed to the measurement object, and detects a relative position change of the measurement object by interfering the measurement light diffracted by the scale's array grating with the reference light that serves as a reference.

[0006] If the interferometric encoder system of Patent Document 3 is applied to an exposure apparatus and a two- or more-axis interferometer optical path and a two-dimensional grating scale are provided on the stage device, it may be possible to detect the complete 3D posture quickly and with high accuracy, with almost no effect from surrounding air fluctuations. [Prior art documents] [Patent documents]

[0007] [Patent Document 1] JP 2002-151405 A [Patent Document 2] JP 2009-33166 A [Patent Document 3] Special Publication No. 2013-525750 [Non-patent literature]

[0008] [Non-Patent Document 1] Arbabi, A.et al.Planar metasurface retroreflector.Nat.Photo.11, 415-420(2017). Summary of the Invention [Problem to be solved by the invention]

[0009] However, when attempting to install an encoder system on a stage apparatus that has previously used a laser interferometer system, there has been a practical problem in that it is not possible to arrange the head and scale due to layout space constraints within the exposure apparatus.

[0010] For example, it is conceivable to apply the multi-dimensional encoder system of Patent Document 1 to a wafer stage. In this case, in order to measure the driving area of ​​the wafer stage with an encoder and control the position, multiple encoder heads may be installed on the moving part of the stage, and multiple large area scales may be fixed to the lens barrel support that holds the reduction projection lens above the wafer stage. In this case, the relative distance between the stage and the lens barrel support or the reduction projection lens is measured. In other words, the simplest way to use a multi-dimensional encoder would be to place the head on the moving part and the scale on the stationary part.

[0011] However, in addition to the reduction projection lens, the lens barrel support also contains subunits such as various optical systems, a focus detection system, a substrate transport mechanism, and an air conditioning control mechanism, making it extremely difficult to provide space for placing such a large-area scale.

[0012] In contrast, Patent Document 2 discloses a method in which a scale is arranged on the movable part of the stage, multiple encoder heads are fixed above the stage, and the heads are switched according to the position of the stage to perform position control. In this type in which the scale is arranged on the movable part and the head is arranged on the stationary part, the area of ​​the scale can be reduced, but multiple heads must be arranged at regular intervals in a two-dimensional plane on the lens barrel support side. Moreover, the head switching operation becomes complicated, and it is difficult to secure a space to fix multiple heads in a thermally and mechanically stable manner as a practical problem, so the design hurdle is by no means lower than that of the type in which the head is arranged on the movable part and the scale is arranged on the stationary part. In the technology of Patent Document 3, it is unavoidable to lay out either multiple heads or a large-area scale on the main body frame part, and the same mounting problems as those in Patent Documents 1 and 2 are faced.

[0013] An object of the present invention is to provide a stage apparatus, a lithography apparatus, and an article manufacturing method that include a measurement system that is easy to implement. [Means for solving the problem]

[0014] One aspect of the present invention relates to a stage device comprising: a stage movable in a first direction and a second direction perpendicular to each other; a scale arranged on the stage so as to extend in the first direction; an optical assembly arranged to face the scale and extend in the second direction; and an interferometer that sends measurement light and reference light to the optical assembly and receives the measurement light and the reference light returning from the optical assembly; The optical assembly includes a beam splitter / combiner for separating the measurement light and the reference light provided from the interferometer and combining the measurement light and the reference light returned to the interferometer, a first retroreflector for retroreflecting the measurement light emitted from the beam splitter / combiner and diffracted by the scale toward the scale and returning the measurement light to the beam splitter / combiner via the scale, and a second retroreflector for retroreflecting the reference light emitted from the beam splitter / combiner and returning it to the beam splitter / combiner, wherein the beam splitter / combiner, the first retroreflector, and the second retroreflector are planar retroreflectors extending in the second direction. . Effect of the Invention

[0015] Advantageous Effects of Invention According to the present invention, a stage apparatus, a lithography apparatus, and an article manufacturing method are provided that include a measurement system that is easy to implement. [Brief description of the drawings]

[0016] [Figure 1]FIG. 1 is a perspective view showing a schematic configuration example of a measurement system including an interferometric encoder system and a laser interferometer system incorporated in an exposure apparatus. [Diagram 2] FIG. 2 is a diagram showing a configuration example of an optical assembly. [Diagram 3] FIG. 13 is a perspective view showing a schematic configuration example of another measurement system including an interferometric encoder system and a laser interferometer system incorporated in an exposure apparatus. [Figure 4] FIG. 13 is a perspective view that illustrates a schematic configuration of yet another example of a measurement system that includes an interferometric encoder system and a laser interferometer system incorporated in an exposure apparatus. [Diagram 5] FIG. 1 is a diagram showing an example of the arrangement of an exposure apparatus according to an embodiment. [Figure 6] FIG. 1 is a diagram showing an example of the configuration of a laser interferometer system. [Figure 7] 5 is a perspective view showing a configuration example of the interferometric encoder system shown in FIG. 4. [Figure 8] FIG. 13 is a diagram showing another example of the configuration of the optical assembly. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0018] In this specification and drawings, structures and directions are described according to the XYZ coordinate system. The directions do not mean absolute directions, but mean relative relationships between multiple directions. For example, the X-axis direction, the Y-axis direction, and the Z-axis direction are mutually perpendicular directions.

[0019] FIG. 5 shows the configuration of an exposure apparatus 500 according to an embodiment. The exposure apparatus 500 is configured to project a pattern of an original (not shown) onto a substrate and expose the substrate. The exposure apparatus 500 may be configured as a stepper that exposes the substrate while the original and the substrate are stationary, or as a scanner that exposes the substrate while scanning the original and the substrate. The exposure apparatus 500 is an example of a lithography apparatus that transfers the pattern of the original onto the substrate. In the exposure apparatus 500, the pattern of the original is transferred in the form of a latent image onto a photosensitive material (photoresist) applied to the substrate.

[0020] The illumination system 501 illuminates an original (not shown) mounted on an original stage 502, and the projection system 503 projects the pattern of the original onto a substrate (not shown) mounted on a stage of a substrate stage mechanism 504 (also understood as a stage device or a positioning device). The illumination system 501 and the projection system 503 constitute a transfer unit that transfers the pattern of the original onto the substrate. The substrate stage mechanism 504 may include an X-stage 506 that is movable relative to a base plate 505 in the X-axis direction with a long stroke, and a Y-stage 507 that is movable relative to the X-stage 506 in the Y-axis direction with a long stroke. The substrate stage mechanism 504 may also include a fine movement stage (stage) 508 that is movable relative to the Y-stage 507 in the X-axis direction, Y-axis direction, Z-axis direction (optical axis direction of the projection system 503), ωx-axis direction, ωy-axis direction, and ωz-axis direction (i.e., six axis directions) with a short stroke. The fine movement stage 508 may be understood as an example of a stage that can move in mutually orthogonal X-axis direction (second direction) and Y-axis direction (first direction). Here, the ωx-axis direction is the rotation direction around the X-axis, the ωy-axis direction is the rotation direction around the Y-axis, and the ωz-axis direction is the rotation direction around the Z-axis. Furthermore, the position in the ωx-axis direction means the rotation angle around the X-axis, the position in the ωy-axis direction is the rotation angle around the Y-axis, and the ωz-axis direction is the rotation angle around the Z-axis. A substrate chuck 509 that holds a substrate may be disposed on the fine movement stage 508. However, the substrate chuck 509 may be understood as a component of the fine movement stage 508.

[0021] The X stage 506 can be driven by an X linear motor (actuator) 510. The X linear motor 510 can include an X linear motor stator 510b that can be composed of a plurality of coils arranged on the base plate 505, and an X linear motor mover 510a that can be composed of a permanent magnet provided on the X stage 506. The Y stage 507 can be driven by a Y linear motor (actuator) 511. The Y linear motor 511 can include a Y linear motor stator 511b that can be composed of a plurality of coils arranged on the X stage 506, and a Y linear motor mover 511a that can be composed of a permanent magnet provided on the Y stage 507.

[0022] Bearings may be disposed between the X stage 506 and the Y stage 507. The X stage 506 is driven in the X-axis direction by the X linear motor 510, and thereby the Y stage 507 is also driven in the X-axis direction. The X stage 506 and the Y stage 507 may be supported by the base plate 505 via gas bearings. The fine movement stage 508 may be driven about six axes by a plurality of actuators such as linear motors (not shown). In one example, two X linear motors may be provided for driving the fine movement stage 508 in the X-axis direction, one Y linear motor may be provided for driving the fine movement stage 508 in the Y-axis direction, and three linear motors 512 may be provided for driving the fine movement stage 508 in the Z-axis direction. Each linear motor may include a coil (stator) disposed on the Y stage 507 and a permanent magnet (mover) provided on the fine movement stage 508. The fine movement stage 508 may be supported in a levitated state above the Y stage 507 by a self-weight support mechanism (not shown).

[0023] The projection system 503 has a plurality of optical elements and a barrel that houses the plurality of optical elements, and can be supported by a barrel support 513. The barrel support 513 can be supported by a base member 515 via an air mount 514, and the base plate 505 can be supported by the base member 515 via an air mount 516. The air mounts 514 and 516 can include, for example, an active vibration isolator. The active vibration isolator reduces vibrations transmitted from the floor via the base member 515, and suppresses vibrations caused by the movement of an object supported by the barrel support 513 and the base plate 505 using built-in actuators and sensors. The substrate stage mechanism 504 can include a laser interferometer system LI and an interferometric encoder system ENC that measure the position of the fine movement stage 508.

[0024] 6 shows an example of the configuration of laser interferometer system LI. Laser interferometer system LI includes, for example, X laser interferometer group 1601, Y laser interferometer group 1602, and Z laser interferometer group 1603. X laser interferometer group 1601 can include X laser interferometers 1601a and 1601b. X laser interferometers 1601a and 1601b can be arranged to irradiate measurement laser light onto a side surface of fine movement stage 508. X laser interferometers 1601a and 1601b can be arranged to irradiate measurement laser light onto different height positions on a side surface of fine movement stage 508 in order to obtain tilt information (rotation angle in the ωy-axis direction) of fine movement stage 508. X laser interferometers 1601a and 1601b irradiate a measurement light (a laser light for measurement) traveling in the X-axis direction onto a reflecting surface provided on the side of fine movement stage 508, and cause the reflected measurement light to interfere with a reference light reflected by a reference surface (not shown). X laser interferometers 1601a and 1601b measure or detect the position of fine movement stage 508 in the X-axis direction based on interference fringes generated by the interference. A rotation angle (tilt information) in the ωy-axis direction can be detected based on the difference in the positions in the X-axis direction provided by X laser interferometers 1601a and 1601b.

[0025] The Y laser interferometer group 1602 may include Y laser interferometers 1602a, 1602b, and 1602c. The Y laser interferometers 1602a, 1602b, and 1602c may be arranged to irradiate a side surface of the fine movement stage 508 with a measurement laser beam. The Y laser interferometers 1602a and 1602b may be arranged to irradiate a measurement laser beam to different height positions on the side surface of the fine movement stage 508 in order to obtain tilt information (rotation angle in the ωx-axis direction) of the fine movement stage 508. The Y laser interferometers 1602b and 1602c may be arranged to irradiate a measurement laser beam to different positions at the same height on the side surface of the fine movement stage 508 in order to obtain rotation information (rotation angle in the ωz-axis direction) of the fine movement stage 508. Y laser interferometers 1602a, 1602b, and 1602c irradiate a measurement light (measurement laser light) traveling in the Y-axis direction onto a reflecting surface provided on the side of fine movement stage 508, and cause the reflected measurement light to interfere with a reference light reflected by a reference surface (not shown). Y laser interferometers 1602a, 1602b, and 1602c measure or detect the position of fine movement stage 508 in the Y-axis direction based on interference fringes generated by the interference. Rotation angles in the ωx-axis direction and the ωz-axis direction can be detected based on the difference in the Y-axis position provided by Y laser interferometers 1602a, 1602b, and 1602c.

[0026] The Z laser interferometer group 1603 may include Z laser interferometers 1603a and 1603b. The Z laser interferometers 1603a and 1603b may be arranged to irradiate the upper surface of the fine stage 508 with a laser beam for measurement. The Z laser interferometers 1603a and 1603b irradiate a laser beam for measurement traveling in the Z-axis direction onto a reflecting surface provided on the upper surface of the fine stage 508, and cause the reflected laser beam (measurement beam) to interfere with a reference beam reflected by a reference surface (not shown). The Z laser interferometers 1603a and 1603b measure or detect the position of the fine stage 508 in the Z-axis direction based on interference fringes generated by the interference. Based on the difference in the position in the Z-axis direction provided by the Z laser interferometers 1603a and 1603b, the rotation angle (tilt) in the ωy-axis direction can be detected.

[0027] Measurement light (laser light for measurement) from Z laser interferometer 1603a is incident on a reflecting surface provided on the upper surface of fine movement stage 508 via mirror 1604a on X stage 506 and mirrors 1605a and 1606a fixed to lens barrel support 513. The measurement light reflected on the reflecting surface is guided to Z laser interferometer 1603a via mirrors 1606a, 1605a, and 1604a. On the other hand, reference light (laser light for measurement) from Z laser interferometer 1603a is irradiated to mirror 1606a via mirror 1604a on X stage 506 and mirror 1605a fixed to lens barrel support 513, and is reflected by mirror 1606a. The reference light reflected by mirror 1606a is guided to Z laser interferometer 1603a via mirrors 1605a and 1604a.

[0028] Measurement light (laser light for measurement) from Z laser interferometer 1603b is incident on a reflecting surface provided on the upper surface of fine movement stage 508 via mirror 1604b on X stage 506 and mirrors 1605b and 1606b fixed to lens barrel support 513. The measurement light reflected on the reflecting surface is guided to Z laser interferometer 1603b via mirrors 1606b, 1605b, and 1604b. On the other hand, reference light (laser light for measurement) from Z laser interferometer 1603b is irradiated to mirror 1606b via mirror 1604b on X stage 506 and mirror 1605b fixed to lens barrel support 513, and is reflected by mirror 1606b. The reference light reflected by mirror 1606b is guided to Z laser interferometer 1603b via mirrors 1605b and 1604b.

[0029] The mirrors 1604a, 1604b, 1605a, and 1605b have a long shape along the X-axis direction, and the Z laser interferometers 1603a and 1603b are disposed outside the substrate stage mechanism 504. With this configuration, even if the fine stage 508 moves a long stroke in the XY plane, the optical path of the Z laser interferometer 1603 passing above the fine stage 508 is not blocked and follows the movement of the fine stage 508. Therefore, regardless of the XY position of the fine stage 508, the measurement light (laser light) is always irradiated onto the reflecting surface on the upper surface of the fine stage 508. The projection system 503 is disposed between the mirrors 606a and 606b, and when the projection system 503 is located above one of the two reflecting surfaces provided on the upper surface of the fine stage 508, the position can be measured using the other reflecting surface.

[0030] Position sensors (e.g., linear encoders) may be disposed between the fine stage 508 and the Y stage 507. In one example, three linear encoders may be disposed to measure the position of the fine stage 508 in the Z-axis direction, the ωx-axis direction, and the ωy-axis direction relative to the Y stage 507. Such position sensors may be used to measure the shape of the reflecting surface of the fine stage 508 or to perform calibration. Other sensors, such as capacitance sensors, may be used instead of the linear encoders.

[0031] The exposure apparatus 500 includes a control unit 550. The control unit 550 can be configured, for example, by a PLD (abbreviation of Programmable Logic Device) such as an FPGA (abbreviation of Field Programmable Gate Array), or an ASIC (abbreviation of Application Specific Integrated Circuit), or a general-purpose or dedicated computer with a program built in, or a combination of all or part of these. The control unit 550 may include a main control unit and a stage control unit. The main control unit controls the overall operation of the exposure apparatus and can transmit position command information to the stage control unit. Note that, instead of transmitting position command information from the main control unit to the stage control unit, information required for generating position command information may be transmitted, and the stage control unit may generate the position command information. The stage control unit can be configured to control the fine movement stage 508 with respect to six axes based on six-axis information of the fine movement stage 508 acquired using a laser interferometer system LI and an interferometric encoder system ENC.

[0032] FIG. 1 shows an example of the configuration of a measurement system including an interferometric encoder system ENC and a laser interferometer system LI incorporated in an exposure apparatus 500. The interferometric encoder system ENC can be incorporated in, for example, the substrate stage mechanism 504 or the exposure apparatus 500 without affecting the configurations of the substrate stage mechanism 504 and the laser interferometer system LI shown in FIG. 5 and FIG. 6. The interferometric encoder system ENC can include a scale S, an optical assembly R, and a Z interferometer (interferometer) 603. The scale S can be arranged on the fine stage 508 so as to extend in the Y-axis direction (first direction). The scale S can be arranged on the upper surface of the fine stage 508. A grating arranged along the Y-axis direction with a nano-order fine pitch can be provided on the surface of the scale S. The overall size of the scale S does not need to be large enough to cover the entire movable range of the fine stage 508 in the XY-axis directions, as in an encoder layout in which the head is arranged on the movable part and the scale is arranged on the stationary part. The length of the scale S in the Y-axis direction may be the minimum length required to drive the fine movement stage 508 in the Y-axis direction, and the width of the scale S in the X-axis direction may be the minimum width required to reflect the measurement light passing through the optical assembly R.

[0033] Z interferometer 603 may be configured to send measurement light and reference light to optical assembly R and receive measurement light and reference light returning from optical assembly R. Optical assembly R may be configured to irradiate measurement light from Z interferometer 603 onto scale S and return measurement light and reference light returning from scale S to Z interferometer 603.

[0034] The optical assembly R may be disposed so as to face the scale S in at least a part of the movable range of the fine movement stage 508. The optical assembly R may extend in the X-axis direction (second direction). The optical assembly R may be a collection of optical components having an elongated shape. The optical assembly R may be disposed above the scale S so as to intersect with the scale S. The optical assembly R may be statically held between the mirror 606 and the scale S at a predetermined distance from the scale S. Here, the optical assembly R may be supported by the lens barrel support 513 or the projection system 503 while keeping its elongated direction always parallel to the elongated direction of the mirror 606 (the X-axis direction in FIG. 1). In addition, the optical assembly R is preferably supported by the lens barrel support 513 or the projection system 503 via a heat insulating member.

[0035] The optical assembly R may internally separate the measurement light and the reference light emitted from the Z interferometer 603 and guided to the optical assembly R via the mirrors 604, 605, and 606, and irradiate the surface of the scale S with the measurement light. The optical assembly R may also retro-reflect the measurement light reflected or diffracted on the surface of the scale S at least once toward the scale S, recombine the measurement light returning from the scale S with the reference light, and return the measurement light to the Z interferometer 603. The length of the long dimension of the optical assembly R may be the minimum length required for driving the fine movement stage 508 in the X-axis direction and for transmitting the measurement light, similar to the scale S. The mirror 604 (first mirror) may be disposed on the X-stage 506 (movable body) that moves in the X-axis direction (second direction) together with the fine movement stage 508. The mirror 605 (second mirror) and the mirror 606 (third mirror) may be fixedly disposed away from the fine movement stage 508, the X-stage 506, and the mirror 604, and may extend in the X-axis direction. Mirrors 604, 605, and 606 may be positioned to form optical paths for the measurement light and the reference light between Z interferometer 603 and optical assembly R.

[0036] 2(a) and (b) show one configuration example of the optical assembly R. In FIG. 2(a), a solid line with an arrow indicates the optical path of the measurement light 200, a dotted line with an arrow indicates the optical path of the reference light 201, and the arrows indicate the traveling directions of the measurement light and the reference light. The optical assembly R may include a beam splitter / combiner PBS, first retroreflectors 202a and 202b, and a second retroreflector 203. The beam splitter / combiner PBS separates the measurement light 200 and the reference light 201 provided from the Z interferometer 603, and combines the measurement light 200 and the reference light 201 returned to the Z interferometer 603. The first retroreflectors 202a and 202b retroreflect the measurement light 200 emitted from the beam splitter / combiner PBS and diffracted by the scale S toward the scale S, and reflects or diffracts the measurement light 200 at the scale S. That is, the measurement light 200 incident on the first retroreflectors 202a and 202b is retroreflected by the first retroreflectors 202a and 202b and then returns to the beam splitter / combiner PBS via the scale S. The first retroreflectors 202a and 202b also return the measurement light 200 reflected or diffracted by the scale S to the beam splitter / combiner PBS. The second retroreflector 203 retroreflects the reference light emitted from the beam splitter / combiner PBS and returns it to the beam splitter / combiner PBS. The beam splitter / combiner PBS, the first retroreflectors 202a and 202b, and the second retroreflector 203 may extend in the X-axis direction (second direction).

[0037] The measurement light 200 and the reference light 201 provided to the optical assembly R via mirrors 604, 605, and 606 are separated by a beam splitter / combiner PBS, and only the measurement light 200 is irradiated onto the scale S. The measurement light 200 is diffracted by the scale S, generating +1st order diffracted light 200p and -1st order diffracted light 200m at a non-Littrow angle. The +1st order diffracted light 200p is retroreflected by the retroreflector 202a, diffracted again by the scale S, and returns to the optical assembly R. The -1st order diffracted light 200m is similarly retroreflected by the retroreflector 202b, diffracted again by the scale S, and returns to the optical assembly R.

[0038] On the other hand, the reference light 201 separated by the beam splitter / combiner PBS is retroreflected by the retroreflector 203 and returns to the beam splitter / combiner PBS. The ±1st order diffracted light 200p, 200m of the measurement light 200 returning from the scale S is combined with the reference light 201 returning from the retroreflector 203 and is output from the optical assembly R toward the mirror 606. The ±1st order diffracted light 200p, 200m of the measurement light 200 and the reference light 201 are combined by the polarizing plate 607 via mirrors 606, 605, 604 and return to the Z interferometer 603. In the Z interferometer 603, interference fringes or a phase signal according to the optical path difference between the +1st order diffracted light 200p and the reference light 201 and the optical path difference between the −1st order diffracted light 200m and the reference light 201 are detected. Based on the interference fringes or phase signal, the Z interferometer 603 can generate position information regarding two degrees of freedom (Z-axis direction and Y-axis direction) of the scale S. For example, Patent Document 3 discloses an arithmetic expression for converting an acquired heterodyne phase signal into position information regarding two degrees of freedom.

[0039] 1, when the optical assembly R has an elongated shape extending in the X-axis direction, the optical paths of the Z interferometer 603 (optical paths of the measurement light 200 and the reference light 201) move in the X-axis direction (longitudinal direction) above the fine movement stage 508 in accordance with the movement of the fine movement stage 508 in the X-axis direction. Therefore, even if the incident positions of the measurement light 200 and the reference light 201 on the optical assembly R move in the X-axis direction, the optical paths of FIG. 2(a) are always maintained in the ZY cross section of the optical assembly R, that is, in the plane perpendicular to the elongated direction. Therefore, the optical path lengths of the measurement light 200 and the reference light 201 are constant regardless of the incident positions of the measurement light 200 and the reference light 201 on the optical assembly R in the X-axis direction.

[0040] The retroreflectors 202a, 202b, and 203 in FIG. 2(b) may each be a long prism in which two flat surfaces are combined at right angles to each other. In such a configuration, as long as the measurement light 200 and the reference light 201 are always incident perpendicularly to each surface of the optical assembly R and the attitude between the optical assembly R and the scale S is ideally parallel, the incident light returns in the opposite direction to the incident direction by two reflections. However, if the incident angle of the measurement light 200 and the reference light 201 to the incident surface of the optical assembly R changes even slightly depending on the incident position in the X-axis direction, the light may return in a direction different from the opposite direction to the incident direction, resulting in a measurement error. For example, a case in which the attitude between the optical assembly R and the scale S is not strictly parallel and one of them rotates in the ωy-axis direction, or a physical phenomenon in which the surface of the scale S is deformed by heat and changes over time may be assumed. A correction table may be created in advance to correct the measurement values ​​by the interferometric encoder system ENC in preparation for the occurrence of measurement errors caused by such misalignment of the optical axes of the measurement beam 200 and the reference beam 201, or changes in the attitude of the optical assembly R and the fine movement stage 508. The correction table can be created using the measurement values ​​by the X laser interferometer 1601, the Y laser interferometer 1602, and the Z laser interferometer 1603 of the laser interferometer system LI, or a focus detection unit (not shown) built into the exposure apparatus 500, or the like.

[0041] In addition, in order to always maintain the optical path length in the optical assembly R unchanged regardless of the optical axis or posture, the retroreflectors 202a, 202b, and 203 configured in the optical assembly R may be planar retroreflectors. FIGS. 8(a) and 8(b) show a configuration in which the retroreflectors 202a, 202b, and 203 in FIGS. 2(a) and 2(b) are replaced with planar retroreflectors 801a, 801b, and 801. Alternatively, a planar retroreflector may be configured by arranging a large number of metasurfaces, minute corner cube mirrors, or minute lens assemblies (cat's eye) described in Non-Patent Document 1 on the same plane. By adopting a planar retroreflector, measurement errors depending on the optical axis misalignment of the measurement light 200 and the reference light 201 and the posture of the optical assembly R and the fine movement stage 508 are eliminated, and a more robust interferometric encoder system ENC can be obtained.

[0042] FIG. 3 shows another configuration example of a measurement system including an interferometric encoder system ENC and a laser interferometer system LI incorporated in an exposure apparatus 500. In the configuration example of FIG. 3, the interferometric encoder system ENC includes two measuring instruments. The first measuring instrument may include a scale Sa, an optical assembly Ra, a Z interferometer (interferometer) 603a, and mirrors 604a, 605a, and 606a. The second measuring instrument may include a scale Sb, an optical assembly Rb, a Z interferometer (interferometer) 603b, and mirrors 604b, 605b, and 606b. The first measuring instrument and the second measuring instrument may be arranged to measure the positions of the fine movement stage 508 in the Z-axis direction and the Y-axis direction. In the configuration example of FIG. 3, the laser interferometer system LI includes the above-mentioned X laser interferometer 1601 (1601a, 1601b) and Y laser interferometer 1602 (1602a, 1602b, 1602c).

[0043] First, the interferometric encoder system ENC will be described. The scales Sa and Sb may extend in the Y-axis direction and be disposed along two sides parallel to the Y-axis direction on the upper surface of the fine movement stage 508. The optical assembly Ra may be disposed to face the scale Sa in at least a portion of the movable range of the fine movement stage 508 and may extend in the X-axis direction. The optical assembly Rb may be disposed to face the scale Sb in at least a portion of the movable range of the fine movement stage 508 and may extend in the X-axis direction.

[0044] The Z interferometer 603a can provide the measurement light and the reference light to the optical assembly Ra via the mirrors 604a, 605a, and 606a, and can receive the measurement light and the reference light returning from the optical assembly Ra. The Z interferometer 603a can measure or detect the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The Z interferometer 603b can provide the measurement light and the reference light to the optical assembly Rb via the mirrors 604b, 605b, and 606b, and can receive the measurement light and the reference light returning from the optical assembly Rb. The Z interferometer 603b can measure or detect the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The control unit 550 can also detect the rotation angle of the fine stage 508 in the ωz-axis direction based on the difference between the positions in the Y-axis direction measured by the Z interferometers 603a and 603b.

[0045] Next, the laser interferometer system LI will be described. X laser interferometers 1601a and 1601b can measure or detect the position of fine stage 508 in the X-axis direction. Control unit 550 can detect the position of fine stage 508 in the ωy-axis direction based on the difference in the positions in the X-axis direction measured by X laser interferometers 1601a and 1601b. Y laser interferometers 1602a, 1602b, and 1602c can measure or detect the position of fine stage 508 in the Y-axis direction. Control unit 550 can detect the rotation angle of fine stage 508 in the ωx-axis direction based on the difference in the positions in the Y-axis direction measured by Y laser interferometers 1602a and 1602b. Control unit 550 can detect the rotation angle in the ωz-axis direction based on the difference in the positions in the Y-axis direction measured by Y laser interferometers 1602b and 1602c.

[0046] The optical paths of Z interferometers 603a, 603b above fine movement stage 508 are not blocked even when fine movement stage 508 moves within its movable range in the XY plane, and measurement light can always be irradiated onto scales Sa, Sb on the upper surface of fine movement stage 508. The measurement light returning from scales Sa, Sb can be returned to Z interferometers 603a, 603b along the same optical path together with the reference light.

[0047] The position of fine movement stage 508 in the Y-axis direction and the rotation angle in the ωz-axis direction can be measured by both Y laser interferometers 1602b, 1602c and Z interferometers 603a, 603b. Measurement of the short-term and short-term sections of the wide stroke or range of motion of fine movement stage 508 may be performed by Z interferometers 603a, 603b using an interference encoder, and fluctuations in the long-term and long-term sections may be corrected by Y laser interferometers 1602b, 1602c using a laser interferometer. In addition, a correction table for correcting measurement errors of Z interferometers 603a, 603b that depend on the optical axis misalignment of the measurement light and reference light, the optical assemblies Ra, Rb, and the attitude of fine movement stage 508 may be generated based on the measurement results by Y laser interferometers 1602b, 1602c.

[0048] As described above, it is possible to provide a stage device in which an interferometric encoder system is implemented limited to the Z and Y axes while using an existing laser interferometer system. This makes it possible to switch to a high-precision encoder system and improve performance with almost no changes to the overall layout of the exposure apparatus.

[0049] Figure 4 shows yet another example configuration of a measurement system including an interferometric encoder system ENC and a laser interferometer system LI incorporated in exposure apparatus 500. Figure 7 shows the interferometric encoder system ENC out of the interferometric encoder system ENC and laser interferometer system LI shown in Figure 4. The position of fine movement stage 508 can be detected with respect to six axes using the interferometric encoder system ENC and the laser interferometer system LI.

[0050] The exposure apparatus 500 includes a substrate stage mechanism 400 instead of the substrate stage mechanism 504 described above. The substrate stage mechanism 400 may have a configuration in which an X stage 506 and a Y stage 507 cross each other. The substrate stage mechanism 400 may include an X stage 506, a Y stage 507, and an XY stage 401. The X stage 506 is movable in the X-axis direction on a base plate 505 with a long stroke. The Y stage 507 is movable in the Y-axis direction on a base plate 505 with a long stroke. The XY stage 401 is movable in the X-axis direction and the Y-axis direction on the base plate 505 at a position where the X stage 506 and the Y stage 507 cross each other. The substrate stage mechanism 400 may include a fine movement stage 508 that is driven with six degrees of freedom, i.e., in the X-axis direction, the Y-axis direction, the Z-axis direction, the ωx-axis direction, the ωy-axis direction, and the ωz-axis direction, with a short stroke relative to the XY stage 401. A substrate chuck 509 for holding a substrate may be disposed on the fine movement stage 508. However, the substrate chuck 509 may also be understood as a component of the fine movement stage 508.

[0051] The X stage 506, the Y stage 507, and the XY stage 401 may be supported by a base plate 505 via gas bearings. The X stage 506 may be driven by an X linear motor including an X linear motor stator 510b that may be composed of a plurality of coils arranged on the base plate 505, and an X linear motor mover 510a that may be composed of a permanent magnet provided on the X stage 506. The Y stage 507 may be driven by a Y linear motor including a Y linear motor stator 511b that may be composed of a plurality of coils arranged on the base plate 505, and a Y linear motor mover 511a that may be composed of a permanent magnet provided on the Y stage 507. Bearings may be arranged between the X stage 506 and the XY stage 401. Bearings may be arranged between the Y stage 507 and the XY stage 401.

[0052] The fine movement stage 508 is disposed on the XY stage 401, and can be driven about six axes by a plurality of actuators such as linear motors. The fine movement stage 508 can be supported in a floating state above the XY stage 401 by a weight support mechanism (not shown). A position sensor (e.g., a linear encoder) can be disposed between the fine movement stage 508 and the XY stage 401. In one example, three linear encoders can be disposed so as to measure the position of the fine movement stage 508 in the Z-axis direction, the ωx-axis direction, and the ωy-axis direction relative to the Y stage 507. Such a position sensor can be used to measure the shape of the reflecting surface of the fine movement stage 508 or to perform calibration. Other sensors such as a capacitance sensor may be used instead of the linear encoder.

[0053] First, the interferometric encoder system ENC will be described. In the configuration examples of Fig. 4 and Fig. 7, the interferometric encoder system ENC includes four measuring instruments. The first measuring instrument may include a scale Sa, an optical assembly Ra, a Z interferometer (interferometer) 603a, and mirrors 604a, 605a, and 606a. The second measuring instrument may include a scale Sb, an optical assembly Rb, a Z interferometer (interferometer) 603b, and mirrors 604b, 605b, and 606b. The third measuring instrument may include a scale Sc, an optical assembly Rc, a Z interferometer (interferometer) 603c, and mirrors 604c, 605c, and 606c. The fourth measuring instrument may include a scale Sd, an optical assembly Rd, a Z interferometer (interferometer) 603d, and mirrors 604d, 605d, and 606d.

[0054] The scales Sa, Sb are made of a thin plate, have an elongated shape extending in the Y-axis direction, and are arranged along a side parallel to the Y-axis direction of the upper surface of fine movement stage 508. The length of the scales Sa, Sb in the Y-axis direction may be the minimum length required for driving fine movement stage 508 in the Y-axis direction, and the width of the scales Sa, Sb in the X-axis direction may be the minimum width required for reflecting the measurement light transmitted through the optical assemblies Ra, Rb. A grating arranged along the Y-axis direction at a fine pitch on the nano-order is provided on the surface of the scales Sa, Sb.

[0055] The scales Sc, Sd are made of a thin plate, have an elongated shape extending in the X-axis direction, and are arranged along a side parallel to the X-axis direction of the upper surface of fine movement stage 508. The length of the scales Sc, Sd in the X-axis direction may be the minimum length required for driving the fine movement stage 508 in the X direction, and the width of the scales Sc, Sd in the Y-axis direction may be the minimum width required for reflecting the measurement light transmitted through the optical assemblies Rc, Rd. A grating arranged along the X-axis direction at a fine pitch on the nano-order is provided on the surface of the scales Sc, Sd.

[0056] The Z interferometer 603a provides the measurement light and the reference light to the optical assembly Ra via the mirrors 604a, 605a, and 606a, and receives the measurement light and the reference light returning from the optical assembly Ra. The Z interferometer 603a detects the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The Z interferometer 603b provides the measurement light and the reference light to the optical assembly Rb via the mirrors 604b, 605b, and 606b, and receives the measurement light and the reference light returning from the optical assembly Rb. The Z interferometer 603b detects the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The control unit 550 can also detect the rotation angle of the fine stage 508 in the ωz-axis direction based on the difference between the positions in the Y-axis direction measured by the Z interferometers 603a and 603b.

[0057] The Z interferometer 603c provides the measurement light and the reference light to the optical assembly Ra via the mirrors 604c, 605c, and 606c, and receives the measurement light and the reference light returning from the optical assembly Rc. The Z interferometer 603c detects the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The Z interferometer 603d provides the measurement light and the reference light to the optical assembly Rd via the mirrors 604d, 605d, and 606d, and receives the measurement light and the reference light returning from the optical assembly Rd. The Z interferometer 603d detects the positions of the fine stage 508 in the Z-axis direction and the Y-axis direction based on the interference fringes generated by the measurement light and the reference light. The control unit 550 can also detect the rotation angle of the fine stage 508 in the ωz-axis direction based on the difference between the positions in the Y-axis direction measured by the Z interferometers 603c and 603d.

[0058] The mirrors 605a, 605b, 606a, 606b, the optical assembly Ra, and the optical assembly Rb have an elongated shape along the X-axis direction, and the Z interferometers 603a, 603b are disposed outside the substrate stage mechanism 400. The projection system 503 is disposed between the mirrors 606a, 606b, and when the projection system 503 is positioned above one of the scales Sa and Sb on the fine movement stage 508, the position can be measured using the other scale S. However, when the projection system 503 is positioned above one of the scales Sa and Sb, the rotation angle in the ωz-axis direction cannot be detected. In this case, the rotation angle in the ωz-axis direction detected using the laser interferometer system LI can be used.

[0059] The mirrors 605c, 605d, 606c, 606d, the optical assembly Rc, and the optical assembly Rd have an elongated shape along the Y-axis direction, and the Z interferometers 603c, 603d are disposed outside the substrate stage mechanism 400. The projection system 503 is disposed between the mirrors 606c, 606d, and when the projection system 503 is positioned above one of the scales Sc and Sd on the fine movement stage 508, the position can be measured using the other scale S. However, when the projection system 503 is positioned above one of the scales Sc and Sd, the rotation angle in the ωz-axis direction cannot be detected. In this case, the rotation angle in the ωz-axis direction detected using the laser interferometer system LI can be used.

[0060] In the configuration examples of Figs. 4 and 7, the laser interferometer system LI includes X laser interferometers 1601a, 1601b and Y laser interferometers 1602a, 1602b, 1602c. X laser interferometers 1601a, 1601b measure the position of fine movement stage 508 in the X-axis direction. Controller 550 can detect the ωy-axis position of fine movement stage 508 based on the difference in the positions in the X-axis direction measured by X laser interferometers 1601a, 1601b. Y laser interferometers 1602a, 1602b, 1602c measure the position of fine movement stage 508 in the Y-axis direction. Controller 550 can detect the rotation angle of fine movement stage 508 in the ωx-axis direction based on the difference in the positions in the Y-axis direction measured by Y laser interferometers 1602a and 1602b. Furthermore, control unit 550 can detect the rotation angle in the ωz axis direction based on the difference between the positions in the Y axis direction measured by Y laser interferometers 1602b and 1602c.

[0061] The position in the X-axis direction, the Y-axis direction, the ωz-axis direction (rotation angle), the ωx-axis direction (rotation angle), and the ωy-axis direction (rotation angle) of fine movement stage 508 can be detected by both interferometric encoder system ENC and laser interferometer system LI. In other words, at least a portion of the position information of fine movement stage 508 detected using interferometric encoder system ENC can also be detected using laser interferometer system LI.

[0062] Measurement of short and short intervals of the wide stroke or range of motion of fine movement stage 508 may be performed by Z interferometers 603a-603d using an interference encoder system, and fluctuations in long and long intervals may be corrected using laser interferometers 601, 602 using a laser interferometer system. In addition, a correction table may be generated based on the measurement results by laser interferometers 601, 602 to correct measurement errors of Z interferometers 603a-603d that depend on the optical axis misalignment of the measurement light and reference light, and the attitude of optical assemblies Ra, Rb, Rc, Rd and fine movement stage 508.

[0063] 4 and 7, it is possible to detect the position of fine movement stage 508 with high accuracy along six axes. Furthermore, with such a configuration, it is possible to adopt a highly accurate encoder system with almost no changes being made to the overall layout of an existing exposure apparatus.

[0064] The above-mentioned measurement system can be applied to an exposure apparatus, as well as to a lithography apparatus or a pattern transfer apparatus, such as an imprint apparatus or a maskless charged particle beam drawing apparatus. The above-mentioned measurement system can also be applied to an apparatus other than a lithography apparatus that requires high positioning accuracy (for example, a microscope or a machining apparatus).

[0065] Hereinafter, an article manufacturing method for manufacturing an article using a lithography apparatus represented by the above exposure apparatus will be described. The article manufacturing method may include a transfer step of transferring a pattern to a substrate using the above lithography apparatus, and a processing step of obtaining an article by processing the substrate to which the pattern has been transferred in the transfer step. When the lithography apparatus is an exposure apparatus, the article manufacturing method may include an exposure step of exposing a substrate coated with a photosensitive agent using the exposure apparatus, a development step of developing the substrate (photosensitive agent), and a processing step of processing the developed substrate to obtain an article. The processing steps include, for example, etching, resist peeling, dicing, bonding, packaging, and the like. According to this article manufacturing method, it is possible to manufacture an article of higher quality than before.

[0066] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0067] 508: Micromotion stage (stage), S: Scale, R: Optical assembly, 603: Interferometer

Claims

1. a stage movable in a first direction and a second direction perpendicular to each other; a scale disposed on the stage so as to extend in the first direction; an optical assembly disposed to face the scale and extending in the second direction; an interferometer that transmits measurement light and reference light to the optical assembly and receives the measurement light and reference light returning from the optical assembly; The optical assembly includes: a beam splitter / combiner for separating the measurement light and the reference light provided from the interferometer and for combining the measurement light and the reference light back to the interferometer; a first retroreflector that retroreflects the measurement light emitted from the beam splitter / combiner and diffracted by the scale toward the scale and returns the measurement light to the beam splitter / combiner via the scale; A second retroreflector that retroreflects the reference light emitted from the beam splitter / combiner back to the beam splitter / combiner; The beam splitter / combiner, the first retroreflector and the second retroreflector are planar retroreflectors extending in the second direction. A stage apparatus comprising:

2. The optical assembly is an assembly of optical components having an elongated shape extending in the second direction.

2. The stage apparatus according to claim 1 .

3. the optical assembly is positioned to face the scale over at least a portion of the range of motion of the stage; 3. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

4. The scale is disposed on an upper surface of the stage.

4. The stage apparatus according to claim 1, wherein the stage apparatus is a stage for moving a movable member.

5. a movable body that moves together with the stage in the second direction; A first mirror disposed on the movable body; a second mirror and a third mirror fixedly disposed apart from the stage, the movable body, and the first mirror and extending in the second direction, the first mirror, the second mirror, and the third mirror are arranged to form optical paths of the measurement light and the reference light between the interferometer and the optical assembly; 5. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

6. a second scale disposed on the stage so as to extend in the first direction; a second optical assembly disposed to face the second scale and extending in the second direction; a second interferometer that transmits measurement light and reference light to the second optical assembly and receives the measurement light and the reference light returning from the second optical assembly; the second optical assembly is disposed spaced apart from the optical assembly in the first direction.

6. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

7. a laser interferometer system for measuring a position of the stage; at least a portion of position information of the stage detected using the scale, the optical assembly, and the interferometer, and the second scale, the second optical assembly, and the second interferometer is also detected using the laser interferometer system; 7. The stage apparatus according to claim 6.

8. 8. The stage apparatus of claim 7, further comprising an actuator controlled to drive the stage based on information provided by the interferometer, the second interferometer, and the laser interferometer system.

9. The laser interferometer system comprises: a laser interferometer that irradiates a side surface of the stage with a laser beam for measurement; 9. The stage apparatus according to claim 8.

10. The laser interferometer system comprises: two laser interferometers for irradiating measurement laser beams at different height positions on a side surface of the stage in order to obtain tilt information of the stage; 9. The stage apparatus according to claim 8.

11. a laser interferometer for irradiating a side surface of the stage with a measurement laser beam in order to measure a position of the stage; 7. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

12. further comprising two laser interferometers for irradiating measurement laser beams at different height positions on a side surface of the stage in order to obtain tilt information of the stage; 7. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

13. A plurality of measuring instruments are provided to measure the stage with respect to a plurality of axes; at least one of the plurality of measuring instruments has the same configuration as the optical assembly and the interferometer; 13. The stage apparatus according to claim 1, wherein the stage apparatus is a stage unit.

14. A stage movable in a first direction and a second direction perpendicular to each other; a movable body that moves together with the stage in the second direction; A first mirror disposed on the movable body; a second mirror and a third mirror fixedly disposed apart from the stage, the movable body, and the first mirror and extending in the second direction; a scale disposed on the stage so as to extend in the first direction; an optical assembly disposed to face the scale and extending in the second direction; an interferometer that transmits measurement light and reference light to the optical assembly and receives the measurement light and reference light returning from the optical assembly; the first mirror, the second mirror, and the third mirror are arranged to form optical paths of the measurement light and the reference light between the interferometer and the optical assembly; the optical assembly is configured to irradiate the measurement light from the interferometer onto the scale, and return the measurement light returning from the scale and the reference light to the interferometer. A stage apparatus comprising:

15. A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a transfer unit that transfers the pattern of the original onto the substrate; 15. A stage apparatus according to any one of claims 1 to 14 configured to position the substrate; 1. A lithography apparatus comprising:

16. A transfer step of transferring a pattern onto a substrate using the lithography apparatus according to claim 15; a processing step of obtaining an article by processing the substrate to which the pattern has been transferred in the transfer step; A method for manufacturing an article, comprising:

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