Discharge lamp, ultraviolet irradiation device, ozone generator, and method of manufacturing the discharge lamp

Abstract

To provide a discharge lamp, etc. with excellent design and a high degree of design freedom on the external shape and structure, as well as functions such as sterilization and deodorization, in accordance with various use environments.SOLUTION: A discharge lamp 10 is a double tube structure lamp with a dielectric 50 arranged coaxially in a discharge container 10T and welded at one end and forming a bent portion 10Q. In the bent portion 10Q, the dielectric 50 covering an inner electrode 30, which is configured with a band-shaped foil electrode, is arranged coaxially along a tube axis C.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a discharge lamp such as an excimer lamp capable of emitting ultraviolet light, and more particularly to a discharge lamp having a double tube structure. [Background technology]

[0002] In excimer lamps with a double-tube structure in which the arc tube is made up of an inner tube and an outer tube, the outer tube and the inner tube are fused together at the sealing portion and sealed together (see, for example, Patent Document 1). High-pressure gas is sealed in the discharge space formed between the inner tube and the outer tube, and by applying a high-frequency voltage between the inner electrode in the inner tube and the outer electrode provided on the outer tube side, discharge occurs and ultraviolet light is emitted.

[0003] Meanwhile, lighting fixtures using excimer lamps are known (see Non-Patent Document 1). In this lighting fixture, a surface-shaped lighting fixture with multiple excimer lamps arranged adjacent to each other is installed on the ceiling. It illuminates with visible light and irradiates the area to be sterilized with ultraviolet light as necessary. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 5504095 [Non-patent literature]

[0005] [Non-Patent Document 1] Toshiba Lighting & Technology Corporation, “UVee Care Universal Downlight HP Introduction Site”, [online], January 2021, [Retrieved May 17, 2021], Internet <URL:https: / / www.tlt.co.jp / tlt / products / uv_lighting / uvee_universal_downlight / uvee_universal_downlight.htm> Summary of the Invention [Problem to be solved by the invention]

[0006] UV irradiation devices (including lighting equipment capable of UV irradiation), ozone generators, etc. are used in a variety of places, such as public facilities, medical institutions such as hospital rooms, laboratories, entertainment facilities, etc., and the specifications, such as size, vary depending on the usage environment. For example, in the case of portable devices or small devices, the lamp installation space is limited.

[0007] When multiple excimer lamps are arranged, it is difficult to provide a design and lamp structure that matches the usage environment due to restrictions on the lamp installation method, electrical circuits, wiring equipment, etc. Also, since it is premised on the arrangement of multiple lamps, in some cases the required light output cannot be obtained.

[0008] Therefore, there is a demand for discharge lamps and the like that have excellent design and a high degree of freedom in terms of appearance shape, structure, etc., in addition to functions such as sterilization and deodorization, depending on various usage environments. [Means for solving the problem]

[0009] The discharge lamp of the present invention comprises a discharge vessel in which a discharge gas is sealed, and a tubular member (herein referred to as an inner tube) that covers an electrode (herein referred to as an inner electrode) that extends along the tube axis within the discharge vessel, and is applicable to ultraviolet irradiation devices, ozone generators, lighting devices, etc. The inner electrode can be bent depending on the manufacturing process including heating or the characteristics of the material itself, and can be made of a conductive material that extends in one direction in a long, rod-like, columnar, or strip-like shape. For example, it can be made of a strip-shaped foil electrode.

[0010] In the present invention, the inner tube is formed coaxially with respect to the curved portion formed in the discharge vessel. By forming the inner electrode coaxially with respect to the curved portion, it is possible to generate a discharge throughout the entire discharge vessel. The discharge vessel can be configured as a curved portion as a whole, or it can be configured as a partial curved portion, with linear portions and curved portions. It is also possible to form a plurality of curved portions of different curved shapes throughout the entire vessel. The curved portion of the discharge vessel may be configured according to a shape derived from various viewpoints, such as design specifications and design.

[0011] For example, the discharge vessel can be partially or entirely provided with a gently curved arc, and the curved portion can be formed by forming a vessel portion curved in a V-shape, U-shape, one turn or multiple turns of a spiral (360°), etc. It is also possible to form a curved portion with a substantially constant curvature or a curved portion with a variable curvature.

[0012] The curved portion of the discharge vessel can be formed so that the electric field intensity distribution in a radial cross section inside the discharge vessel is equivalent to that of the straight portions and curved portions formed in the discharge vessel. For example, when the inner electrode is a strip electrode, the curved portion can be configured to bend in the thickness direction of the inner electrode.

[0013] In the curved portion of the discharge vessel, the curvature direction can be determined according to the shape, configuration, manufacturing method, etc. of the inner electrode, and the curvature direction can also be determined taking into consideration the electric field strength distribution in the discharge space inside the discharge vessel, etc. For example, in the case of a thin inner electrode whose thickness is smaller than its radial width, it can be curved in the width direction along the vessel axis (lamp axis) so that the electrode thickness direction faces the inside and outside of the curved portion.

[0014] The inner electrode may be a strip-shaped electrode sealed to the inner tube so that the electric field strength in a radial cross section in the discharge vessel varies along the circumferential direction of the lamp. In this case, the curved portion may be formed so as to bend in a direction in which the electric field strength due to the inner electrode is low. For example, when the curved portion is formed in a spiral shape, the curved portion may be curved along the width direction of the inner electrode so as to be adjacent to the direction in which the electric field strength due to the inner electrode is high.

[0015] In the curved portion, the inner tube can be coaxially arranged by providing at least one support member disposed between the discharge vessel and the inner tube and extending in the lamp radial direction. For example, the support member can be formed to have an outer diameter larger than the width of the inner tube along the curved direction. The support member can be formed, for example, in a columnar shape, or can have other shapes.

[0016] In the curved portion, the inner tube is arranged coaxially within the discharge vessel, but it does not necessarily have to be arranged strictly coaxially. For example, the curved portion can be formed so that the distance interval along the thickness direction of the inner electrode in the radial cross section of the curved portion varies partially along the lamp axis.

[0017] The ultraviolet irradiation device according to one aspect of the present invention includes a discharge vessel in which a discharge gas is sealed, and an inner tube that covers a strip-shaped inner electrode that extends along the tube axis within the discharge vessel. The discharge vessel has a curved portion that is curved in the thickness direction of the inner electrode, and ultraviolet rays can be radiated toward the inner peripheral side surface and / or the outer peripheral side surface of the curved portion.

[0018] An ozone generator according to one embodiment of the present invention includes the ultraviolet irradiation device described above, in which the radius of curvature of the curved portion is set to be greater than or equal to the transmission distance at which the ultraviolet intensity ratio of the ultraviolet light emitted from the discharge vessel is attenuated by 80%, and a gas containing oxygen flows around the discharge vessel.

[0019] One aspect of the present invention is a method for manufacturing a discharge lamp, which involves covering the inner tube by sealing the inner tube, which is a dielectric, to a foil-shaped inner electrode that is deformable along the thickness direction, welding a rod-shaped support member to the outer surface of the inner tube, placing the inner tube inside an outer tube that serves as a discharge vessel, and welding the inner tube and the support member to the inner surface of the outer tube to form an integrated double-tube structure discharge tube, and then partially heating the periphery of the outer tube so as to curve the outer tube, inner electrode, and inner tube together. Effect of the Invention

[0020] According to the present invention, it is possible to provide discharge lamps and the like which have excellent design and a high degree of freedom in terms of external shape and structure in addition to functions such as sterilization and deodorization in accordance with various usage environments. [Brief description of the drawings]

[0021] [Figure 1] 1 is a schematic plan view of an excimer lamp according to a first embodiment. [Diagram 2] 1 is a schematic cross-sectional view of an excimer lamp according to a first embodiment. [Diagram 3] FIG. 4 is a schematic plan view of an excimer lamp according to a second embodiment. [Figure 4] FIG. 11 is a schematic plan view of an excimer lamp according to a third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0023] Fig. 1 is a schematic plan view of an excimer lamp (hereinafter, referred to as a discharge lamp) according to a first embodiment, and Fig. 2 is a schematic cross-sectional view taken along line AA in Fig. 1.

[0024] The discharge lamp 10 is an excimer lamp that emits ultraviolet rays, and is configured as a lamp with a double-tube structure, with an outer tube 20 made of a dielectric material such as quartz glass. Within the outer tube 20, a dielectric (hereinafter referred to as the inner tube) 50 is disposed along the tube axis C, and a sealing portion 25 of the outer tube 20 is integrally welded to the inner tube 50 to form a discharge vessel 10T.

[0025] A rare gas such as xenon gas or a mixed gas of these is filled in the discharge space S formed between the outer tube 20 and the inner tube 50 that constitute the discharge vessel 10T at a pressure in the range of, for example, 5 kPa to 150 kPa. Note that the inner surface of the outer tube 20 is not depicted in Fig. 1.

[0026] The inner tube 50 covers the inner electrode 30 and is sealed to the inner electrode 30 along the tube axis C. The inner electrode 30 has an electrode configuration in which a conductive material such as a metal extends along the tube axis C and is not exposed to the discharge space S. Here, the inner electrode 30 is composed of a strip-shaped foil electrode.

[0027] A spiral outer electrode (not shown in FIG. 1) is wound around the outer surface of the outer tube 20 at a predetermined interval along the tube axis C. A power supply line 70 connected to an end of the inner electrode 30 is connected to an external power source (not shown). Support members 60A-60E for supporting the inner tube 50 inside the outer tube 20 are provided at predetermined intervals between the outer tube 20 and the inner tube 50.

[0028] In order to suppress the effects (stress) of thermal expansion on the inner tube 50 and supporting member, the inner electrode 30 is made of a metal or alloy (such as molybdenum) with high conductivity and a thermal expansion coefficient as close as possible to that of the inner tube 50, and its thickness is set within the range of 20 μm to 50 μm and its width within the range of 1.2 mm to 10 mm.

[0029] 2, edge portions 30T1, 30T2, which are both edges of the inner electrode 30 along the tube axis C direction, have a knife-edge shape, and the thickness of the inner electrode 30 becomes thinner from the center toward the edges in the width direction (length direction from edge to edge), thereby preventing peeling due to a difference in thermal expansion with the inner tube 50. Therefore, in the spatial regions of the discharge space S near both edge portions 30T1, 30T2 of the inner electrode 30, the electric field strength is relatively high compared to the vicinity of both side surfaces 30S1, 30S2 other than the edges.

[0030] The inner tube 50 can be integrally welded to the outer tube 20, which has high transparency in the wavelength range of light emitted from the discharge generated in the discharge space, and is made of a dielectric material (such as quartz glass) that can suppress deterioration due to excimer light. The cross-sectional shape of the inner tube 50 is formed into an ellipse here. The inner electrode 30 is covered (embedded) so that its width direction is along the major axis direction of the ellipse and its thickness direction is along the minor axis direction of the ellipse.

[0031] The support member 60C is composed of a pair of rod-shaped members and is welded to the inner surface 20B of the outer tube 20 and the outer surface 50B of the inner tube 50, and each welded portion is formed into a curved shape. The support member 60C is formed in a straight line (columnar shape) along the lamp radial direction.

[0032] Furthermore, the support member 60C has a cross-sectional shape (here, circular) with an outer diameter R larger than the short axis length W of the inner tube having an elliptical cross section. Therefore, the support member 60C has a thickness that allows it to be welded to the entire circumference of the inner tube 50 along the tube axis C. The support member 60C is made of the same optically transparent quartz glass material as the outer tube 20 and the inner tube 50. The other support members 60A, 60B, 60D, and 60E are similarly configured.

[0033] When a high frequency (e.g., in the range of several kHz to several tens of MHz) and a high voltage (e.g., in the range of several kV to several tens of kV) are applied to the inner electrode 30 and the outer electrode 40, a discharge occurs in the discharge space S, and excimer light of a predetermined wavelength is emitted. Here, ultraviolet light (e.g., a wavelength of 172 nm) is emitted toward the outside of the discharge vessel 10T. The applied voltage can be determined according to the size of the discharge vessel 10T, the required illuminance of the ultraviolet light, etc.

[0034] As shown in Fig. 1, discharge vessel 10T has curved portion 10Q formed in a single spiral, and is bent approximately 360° so that ends 10T1, 10T2 of discharge vessel 10T face in opposite directions. Here, the curvature of discharge vessel 10T (outer tube 20, inner tube 50) is approximately constant, and a circular opening N is formed that is surrounded by inner circumferential surface 10C on the inside in the curved direction of discharge vessel 10T. Fig. 2 shows a cross-sectional view along the radial direction of discharge vessel 10T (from inner circumferential surface 10C to outer circumferential surface 10F).

[0035] The outer tube 20 and the inner tube 50 are curved in a direction perpendicular to the support members 60A-60E, i.e., in a direction perpendicular to the width direction of the inner electrode 30 (thickness direction). The outer tube 20 and the inner tube 50 are curved along a direction in which the electric field strength in a radial cross section is relatively low, so that the effect of bending on the electric field strength distribution can be reduced. Therefore, the electric field strength distribution in the circumferential direction of the inner tube 50 at the curved portion 10Q does not differ from the electric field strength distribution at the straight portion 10R of the discharge vessel 10T.

[0036] Furthermore, by bending the discharge vessel 10T through approximately 360°, ends 10T1, 10T2 of the discharge vessel 10T face in opposite directions and are adjacent along the width direction of the inner electrode 30. That is, edge 30T2 where the electric field strength is relatively high near end 10T1 and edge 30T1 where the electric field strength is relatively high near end 10T2 of the discharge vessel 10T are arranged adjacent (facing) along the central axis D, and the region with high electric field strength is not adjacent to the region with low electric field strength.

[0037] The curvature of the discharge vessel 10T does not affect the electric field strength distribution around the circumference, i.e., no areas of relatively high electric field strength are formed, so that in the discharge space S inside the discharge vessel 10T, a uniform discharge occurs along the tube axis C, including both the straight portion 10R and the curved portion 10Q, and ultraviolet rays are emitted.

[0038] The discharge vessel 10T is configured such that the inner electrode 30, inner tube 50, and outer tube 20 are bent as a single unit, and the inner tube 50 that covers (seals) the inner electrode 30 is disposed approximately coaxially so that the distance interval in the discharge space S is uniform in both the curved portion 10Q and the straight portion 10R of the outer tube 20. Therefore, the inner electrode 30, which is a strip-shaped foil electrode, is also coaxial over the entire tube axis C of the outer tube 20, and is curved so that the width direction of the inner electrode 30 is always parallel to the central axis D of the opening N.

[0039] Note that the effect of distance error (non-uniformity) on the electric field intensity is smaller in the distance T1 along the thickness direction of the inner electrode 30 than in the distance T2 along the width direction of the inner electrode 30. Therefore, the distance T1 may be configured to vary relatively more along the tube axis C than the distance T2, and to be partially eccentric along the thickness direction (the distance is not uniform).

[0040] In the discharge lamp 10 of the double-tube structure in which such a curved portion 10Q is formed, the electric field strength distribution in the circumferential direction of the inner tube 50 in the outer tube 20 does not change significantly along the tube axis C in both the straight portion 10R and the curved portion 10Q, and the uniformity of the overall discharge and ultraviolet irradiance is maintained along the tube axis C of the discharge lamp 10. Therefore, it is possible to irradiate ultraviolet rays uniformly over the entire circumference of the target for ultraviolet irradiation without rotating the target for ultraviolet irradiation around the central axis D.

[0041] By passing the flow tube through the opening N and the raw gas to be irradiated with ultraviolet light through the flow tube, it becomes possible to sterilize and deodorize. The radius of curvature of the discharge vessel 10T can be determined according to the size (diameter) of the flow tube.

[0042] In addition, in order to avoid the influence of ultraviolet rays on objects other than the target of the ultraviolet rays, the distance from the inner surface 10C of the discharge vessel 10T to the central axis D of the opening N, or the radius of curvature, can be determined to be greater than the transmission distance at which the ultraviolet ray intensity ratio attenuates by 80% from the surface of the discharge vessel 10T (ultraviolet ray attenuation rate is 80%).

[0043] It is also possible to form a fluorescent film on the inner surface 20B of the outer tube 20 so that it receives ultraviolet light and emits visible light. Also, by adjusting the type of quartz tube constituting the discharge vessel 10T, the heat treatment conditions, and the type of discharge gas (the wavelength of the ultraviolet light emitted by the discharge), it is also possible to configure it so that it emits visible light together with ultraviolet light.

[0044] The above-mentioned discharge lamp 10 can be manufactured as follows. However, a manufacturing method for a discharge lamp capable of emitting visible light as well as ultraviolet light will be described.

[0045] An introduction tube is formed along the tube axis at one end of the cylindrical glass tube that will become the outer tube. A deformable foil-shaped molybdenum inner electrode is inserted along the thickness direction into the bottomed cylindrical dielectric glass tube that will become the inner tube, and the inner tube is heated to reduce its diameter so that it has an elliptical cross section, thereby sealing (exposing and fusing to the contents) and embedding the inner electrode.

[0046] A pair of rod-shaped support members each having an outer diameter (thickness along the thickness direction of the foil) larger than the outer diameter of the inner tube are welded to the inner tube at a predetermined interval over the entire circumference of the inner tube. The outer diameter of the support members can be smaller than the minor axis length of the inner tube having an elliptical cross section.

[0047] The inner tube and the outer tube are welded at one end, and then heated and reduced in diameter to seal the inside of the discharge vessel. This forms an integrated, linear, double-tube discharge vessel. At this time, heating is performed to weld the support member to the inner surface of the outer tube. The outer tube and the support member may be welded after the inner tube and the outer tube are welded, or the outer tube and the support member may be welded before the inner tube and the outer tube are welded.

[0048] The inner and outer tubes are heated at the portion to be curved of the discharge vessel, which is an integrated unit of the inner and outer tubes, so that the outer and inner tubes are curved into the desired shape. Specifically, the outer and inner tubes are bent integrally by partial heating of the same radial cross-sectional portion thereof, which is heated and softened by an oxyhydrogen burner or the like, and then allowed to cool naturally. However, heating of the periphery of the support member is avoided. The bending direction is along the thickness direction of the foil-shaped inner electrode. At this time, by using a support member with an outer diameter (thickness) larger than the minor axis length (width along the bending direction) of the inner tube with an elliptical cross-section, deformation due to softening due to heating can be prevented even if the periphery of the support member is heated.

[0049] The discharge tube is evacuated from the introduction tube to remove impurities, a discharge gas is sealed inside the light emitting tube, and the introduction tube is hermetically sealed by heating and melting.Then, an outer electrode is disposed on the outer surface of the discharge tube.

[0050] Regarding the above-mentioned manufacturing process, the discharge lamp may be manufactured by including a process of forming a fluorescent film on the inner surface of the discharge vessel. In addition, the cross-sectional shape of the outer tube may be formed to be elliptical so that the bending direction is the minor axis direction. Furthermore, the cross-sectional shape of the inner tube may be other than elliptical.

[0051] Regarding the support member, it is possible to use a configuration in which the inner tube is supported on only one side, instead of a pair of rod-shaped members. It is also possible to weld the support member along the thickness direction of the inner electrode, and it is also possible to support the inner tube at a location around the circumference without covering the entire circumference. It is also possible to make the cross-sectional size of the support member smaller than that of the inner tube.

[0052] Fig. 3 shows a discharge lamp according to the second embodiment. The discharge lamp 10' has a lamp structure in which the lamp is wound in a spiral shape multiple times. However, Fig. 3 shows only the inner electrode in the discharge tube.

[0053] As in the first embodiment, the discharge vessel 10'T is curved spirally along the thickness direction of the foil-like inner electrode 30'. The curved portions are aligned along the width direction of the inner electrode 30', forming an opening (corresponding to N in FIG. 1) surrounded by the inner circumferential surface (corresponding to 10C in FIG. 1). By passing a flow path tube through this opening, it is possible to irradiate ultraviolet rays onto the raw material gas passing through the flow path tube.

[0054] In the second embodiment, in the spatial region where the curved portions of the discharge vessel 10'T are adjacent to each other, a discharge space is formed in which the electric field strength in the radial cross section is relatively high, and in the spatial regions on the inner and outer circumferential surfaces of the curved portions, a discharge space is formed in which the electric field strength in the radial cross section is relatively low.

[0055] As in the first embodiment, it is possible to emit visible light together with ultraviolet light. This allows a configuration in which ultraviolet light is irradiated on the inner peripheral surface side of the discharge vessel 10'T to perform sterilization and deodorization functions while illuminating the outside of the lamp.

[0056] 4 is a diagram showing a discharge lamp according to the third embodiment. The discharge lamp 100 has a U-shaped curved structure. As in the first embodiment, the inner electrode 130, the inner tube 150, and the outer tube 120 are integrally bent along the thickness direction of the inner electrode 130. It is also possible to form a ring-shaped curved portion, or a V-shape or an arc-shape curved by less than 180°.

[0057] In this way, various curved shapes can be arbitrarily and freely provided on the discharge lamp 10, so it is possible to configure the discharge lamp 10 in a form that matches the specifications of the ultraviolet irradiation device and ozone generator, the usage environment, the shape of the flow path tube, installation conditions, etc., and it is possible to deal with restrictions on installation space, etc. In addition, since it can be configured as a single discharge lamp, there is no need for complicated inspection and replacement work.

[0058] Although the first to third embodiments are premised on being configured with a discharge lamp 10 of a relatively large size, a curved portion can be provided in a small discharge lamp as well. Therefore, it is possible to replace not only an ultraviolet irradiation device and an ozone generator, but also a conventional lighting device, for example, a spiral fluorescent lamp, and it is possible to use it as lighting while irradiating ultraviolet rays as necessary.

[0059] For example, in the case of a discharge lamp that emits 172 nm ultraviolet light, which has a relatively short ultraviolet transmission distance, by using it in a ceiling lighting fixture equipped with a ceiling fan, a flow path is formed around the lighting fixture, and a sterilization effect can be achieved throughout the room. Also, a similar effect can be obtained by installing the lighting fixture next to an air conditioner.

[0060] Not only can it be applied to lighting fixtures, but it can also be used to further develop the design. For example, attractive lighting designs are required or preferred in restaurants, hotel lobbies, concert halls, museums, event facilities, etc. In this case, by curving the lamp according to the designer's desired lamp shape, it is possible to improve the aesthetics of the lighting space while also effectively sterilizing and deodorizing.

[0061] Particularly in spaces that necessarily require airtightness, such as clubhouses, small theaters, small concert halls, and recording studios, lighting with a highly designed form is required, while there is also a strong demand for antibacterial measures, etc. Under such conditions, the application of a discharge lamp having a curved portion as in this embodiment is suitable. EXAMPLES

[0062] This example is configured with a spiral-shaped excimer lamp corresponding to the first embodiment. The axial length of the discharge vessel before bending is about 140 mm, the thickness of the outer tube is 1 mm, and the inner diameter is 9 mm. The inner electrode, which is a strip-shaped foil electrode, is 2 mm wide and 28 μm thick, and both ends are formed into a knife-edge shape. The thickness of the inner tube is 1 mm, and the distance (discharge distance) between the inner surface of the outer tube and the outer surface of the inner tube is approximately 3 mm along the tube axis. A rare gas is sealed in the discharge space so as to emit ultraviolet light with a wavelength of 172 nm.

[0063] A voltage of 11 kV at a frequency of 25 kHz was applied to such a discharge lamp, and it was confirmed that ultraviolet light was emitted as well as visible light. [Explanation of symbols]

[0064] 10 Excimer lamp (discharge lamp) 10T discharge vessel 20 Outer tube 30 inner electrode 40 outer electrode 50 inner tube

Claims

1. a discharge vessel in which a discharge gas is sealed; an inner tube covering an inner electrode extending along a vessel axis within the discharge vessel; The inner tube is formed coaxially with respect to a curved portion formed in the discharge vessel, the inner electrode is a strip electrode, A discharge lamp, wherein the curved portion is curved in a thickness direction of the inner electrode.

2. A discharge vessel in which a discharge gas is sealed; an inner tube covering an inner electrode extending along a vessel axis within the discharge vessel; The inner tube is formed coaxially with respect to a curved portion formed in the discharge vessel, A discharge lamp characterized in that the curved portion of the discharge vessel is formed so that the electric field strength distribution in a radial cross section within the discharge vessel is equivalent to that of the straight portions formed in the discharge vessel and the curved portion.

3. A discharge lamp as claimed in claim 1 or 2, characterized in that it is an excimer lamp.

4. A discharge vessel in which a discharge gas is sealed; an inner tube covering an inner electrode extending along a vessel axis within the discharge vessel; The inner tube is formed coaxially with respect to a curved portion formed in the discharge vessel, the inner electrode is a strip-shaped electrode sealed to the inner tube such that the electric field strength in a radial cross section within the discharge vessel varies along the circumferential direction of the lamp, A discharge lamp, wherein the curved portion is bent in a direction in which the electric field strength generated by the inner electrode is low.

5. 5. The discharge lamp according to claim 4, wherein the curved portion is curved along a width direction of the inner electrode so as to be adjacent to a direction in which the electric field strength generated by the inner electrode is high.

6. At least one support member is disposed between the discharge vessel and the inner tube and extends in a radial direction of the lamp.

2. The discharge lamp according to claim 1, wherein the support member has an outer diameter larger than a thickness of the inner tube along a thickness direction of the inner electrode.

7. 7. A discharge lamp according to claim 1, wherein the curved portion is formed so that a distance interval along the thickness direction of the inner electrode in a radial cross section of the curved portion varies partially along the lamp axis.

8. a discharge vessel in which a discharge gas is sealed; an inner tube covering a strip-shaped inner electrode extending along the vessel axis within the discharge vessel; In the discharge vessel, a curved portion is formed that is curved in a thickness direction of the inner electrode, The inner tube is formed coaxially with the curved portion; An ultraviolet irradiation device capable of emitting ultraviolet rays toward an inner peripheral side surface and / or an outer peripheral side surface of the curved portion.

9. A device comprising: a discharge vessel in which a discharge gas is sealed; and an inner tube covering a band-shaped inner electrode extending along a vessel axis within the discharge vessel; a curved portion that is curved in the thickness direction of the inner electrode is formed in the discharge vessel; and an ultraviolet irradiation device capable of emitting ultraviolet rays toward an inner peripheral side surface and / or an outer peripheral side surface of the curved portion; the radius of curvature of the curved portion is set to be equal to or greater than the transmission distance at which the ultraviolet ray intensity ratio of the ultraviolet ray radiated from the discharge vessel is attenuated by 80%; An ozone generating device, characterized in that a gas containing oxygen flows around the discharge vessel.

10. a dielectric inner tube is sealed to a foil-like inner electrode that is deformable along a thickness direction to cover the inner electrode; a rod-shaped support member is welded to an outer surface of the inner tube; The inner tube is disposed within an outer tube which serves as a discharge vessel; forming an integral double-tube discharge tube by welding the inner tube and the support member to each other on the inner surface of the outer tube; A portion of the periphery of the outer tube is heated so that the outer tube, the inner electrode, and the inner tube are integrally curved. A method for manufacturing a discharge lamp comprising the steps of:

Images