Semiconductor device and its manufacturing method

Abstract

Provided are: a semiconductor device that is capable of reducing resistance values in a conductor path electrically connecting upper and lower substrates; and a manufacturing method for same. The semiconductor device comprises: a first semiconductor layer having a plurality of element-forming areas arranged adjacent to each other with an element-separating area therebetween, each having a first active element provided therein; a contact area provided on the element-separating area-side of the surface of each of the plurality of element-forming areas; a conductive pad connected to each of the plurality of element-forming areas, across the element-separating areas; a first insulating layer covering the first semiconductor layer and the conductive pad; a second conductive layer arranged upon the first insulating layer and having a second active element provided therein; a second insulating layer covering the second conductive layer; and a conductive plug that is embedded in a connection hole reaching from the second insulating layer to the conductive pad and is formed integrally with the conductive pad, using the same material.

Description

[Technical field]

[0001] The present disclosure relates to a semiconductor device and a manufacturing method thereof. [Background technology]

[0002] Conventionally, a method is known for increasing element density in the vertical direction by stacking multiple substrates on which elements such as transistors are formed (see Patent Document 1). This method is characterized by the fact that, rather than using just one flat surface, the number of elements is increased to two or three surfaces with each stack. When used for elements with limited area, it is possible to increase the number of elements and configure a complex circuit in a small area.

[0003] In image sensors, the pixel size is fixed, and the element area formed for each pixel is limited to the pixel size. Therefore, the size of the element cannot be freely changed, and there is a limit to increasing the number of elements to complicate the circuit. Therefore, for devices such as image sensors with limited element area, increasing the element area by stacking multiple substrates is a very useful method. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2014-99582 A Summary of the Invention [Problem to be solved by the invention]

[0005] In a laminated structure of multiple substrates, it is desirable to reduce the resistance of the conductive paths that electrically connect the upper and lower substrates.

[0006] An object of the present technology is to provide a semiconductor device capable of reducing the resistance value of a conductive path that electrically connects upper and lower substrates, and a manufacturing method thereof. [Means for solving the problem]

[0007] A semiconductor device according to one embodiment of the present technology includes a first semiconductor layer having a plurality of element formation regions arranged adjacent to each other via an element isolation region, each of which has a first active element provided therein, a contact region provided on the element isolation region side of a surface layer of each of the plurality of element formation regions, a conductive pad connected to each of the contact regions of the plurality of element formation regions across the element isolation region, a first insulating layer covering the first semiconductor layer and the conductive pad, a second semiconductor layer arranged on the first insulating layer and having a second active element provided therein, a second insulating layer covering the second semiconductor layer, and a conductive plug embedded in a connection hole extending from the second insulating layer to the conductive pad and formed integrally with the conductive pad using the same material.

[0008] a step of forming a contact region on the surface of each of the plurality of element formation regions on the side of the element isolation region, the contact region being located on the surface of the plurality of element formation regions across the element isolation region; a step of forming a pad core on the contact region of each of the plurality of element formation regions across the element isolation region via an etching stopper film; a step of forming a first active element in each of the plurality of element formation regions; a step of forming a first insulating layer covering the first semiconductor layer and the pad core; a step of arranging a second semiconductor layer on the first insulating layer; a step of forming a second active element in the second semiconductor layer by performing a step including a heat treatment; a step of forming a second insulating layer covering the second semiconductor layer; [Brief description of the drawings]

[0009] [Figure 1] 1 is a schematic diagram showing an outline of a solid-state imaging device according to a first embodiment of the present technology. [Diagram 2]1 is an equivalent circuit diagram of a pixel unit of a solid-state imaging device according to a first embodiment of the present technology. [Diagram 3] 4 is a diagram showing an arrangement of contact regions in a pixel unit of a solid-state imaging device according to a first embodiment of the present technology. FIG. [Figure 4] 1 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a first embodiment of the present technology. [Diagram 5] 3A to 3C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a first embodiment of the present technology. [Figure 6] 6A to 6C are cross-sectional views illustrating steps subsequent to FIG. 5 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 7] 7A to 7C are cross-sectional views illustrating steps subsequent to FIG. 6 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 8] 8A to 8C are cross-sectional views illustrating steps subsequent to FIG. 7 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 9] 9A to 9C are cross-sectional views illustrating steps subsequent to FIG. 8 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 10] 10A to 10C are cross-sectional views illustrating steps subsequent to FIG. 9 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 11] 11A to 11C are cross-sectional views illustrating steps subsequent to FIG. 10 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 12] 12A to 12C are cross-sectional views illustrating steps subsequent to FIG. 11 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 13] 13A to 13C are cross-sectional views illustrating steps subsequent to FIG. 12 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 14] 14A to 14C are cross-sectional views illustrating steps subsequent to FIG. 13 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 15] 15A to 15C are cross-sectional views illustrating steps subsequent to FIG. 14 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 16] 16A to 16C are cross-sectional views illustrating steps subsequent to FIG. 15 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 17]17A to 17C are cross-sectional views illustrating steps subsequent to FIG. 16 in the method for manufacturing the solid-state imaging device according to the first embodiment of the present technology. [Figure 18] 11 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a second embodiment of the present technology. FIG. [Figure 19] 7A to 7C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a second embodiment of the present technology. [Figure 20] 20A to 20C are cross-sectional views illustrating steps subsequent to FIG. 19 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Figure 21] 21A to 21C are cross-sectional views illustrating steps subsequent to FIG. 20 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Figure 22] 22A to 22D are cross-sectional views illustrating steps subsequent to FIG. 21 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Diagram 23] 23 is a cross-sectional view illustrating a process subsequent to FIG. 22 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Figure 24] 24A to 24C are cross-sectional views illustrating steps subsequent to FIG. 23 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Diagram 25] 25A to 25C are cross-sectional views illustrating steps subsequent to FIG. 24 in the method for manufacturing the solid-state imaging device according to the second embodiment of the present technology. [Figure 26] 11 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a third embodiment of the present technology. FIG. [Figure 27] 10A to 10C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a third embodiment of the present technology. [Figure 28] 27A to 27C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a third embodiment of the present technology. [Figure 29] 29A to 29C are cross-sectional views illustrating steps subsequent to FIG. 28 in the method for manufacturing the solid-state imaging device according to the third embodiment of the present technology. [Diagram 30] 13 is a plan view of a main part of a pixel unit of a solid-state imaging device according to a fourth embodiment of the present technology. FIG. [Diagram 31] 31 is a cross-sectional view of a main part showing a cross-sectional structure taken along the line AA in FIG. 30. [Diagram 32]10A to 10C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a fourth embodiment of the present technology. [Diagram 33] 33A to 33C are cross-sectional views illustrating steps subsequent to FIG. 32 in the method for manufacturing the solid-state imaging device according to the fourth embodiment of the present technology. [Diagram 34] 34A to 34C are cross-sectional views illustrating steps subsequent to FIG. 33 in the manufacturing method for the solid-state imaging device according to the fourth embodiment of the present technology. [Diagram 35] 35A to 35C are cross-sectional views illustrating steps subsequent to FIG. 34 in the manufacturing method for the solid-state imaging device according to the fourth embodiment of the present technology. [Diagram 36] 36A to 36C are cross-sectional views illustrating steps subsequent to FIG. 35 in the method for manufacturing the solid-state imaging device according to the fourth embodiment of the present technology. [Figure 37] 13 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a fifth embodiment of the present technology. FIG. [Figure 38] 13A to 13C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a fifth embodiment of the present technology. [Figure 39] 39A to 39C are cross-sectional views illustrating steps subsequent to FIG. 38 in the method for manufacturing the solid-state imaging device according to the fifth embodiment of the present technology. [Diagram 40] 40A to 40C are cross-sectional views illustrating steps subsequent to FIG. 39 in the manufacturing method for the solid-state imaging device according to the fifth embodiment of the present technology. [Diagram 41] 40A to 40C are cross-sectional views illustrating steps in a method for manufacturing a solid-state imaging device according to a fifth embodiment of the present technology. [Diagram 42] 41A to 41C are cross-sectional views showing steps in a method for manufacturing a solid-state imaging device according to a fifth embodiment of the present technology. [Diagram 43] 43A to 43C are cross-sectional views illustrating steps subsequent to FIG. 42 in the method for manufacturing the solid-state imaging device according to the fifth embodiment of the present technology. [Diagram 44] 44A to 44C are cross-sectional views illustrating steps subsequent to FIG. 43 in the method for manufacturing the solid-state imaging device according to the fifth embodiment of the present technology. [Diagram 45] 45A to 45C are cross-sectional views illustrating steps subsequent to FIG. 44 in the method for manufacturing the solid-state imaging device according to the fifth embodiment of the present technology. [Diagram 46] 13 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a sixth embodiment of the present technology. FIG. [Figure 47]FIG. 13 is a diagram showing a modified example of the sixth embodiment. [Figure 48] FIG. 13 is a block diagram illustrating an example of the functional configuration of an imaging device according to a seventh embodiment. [Figure 49] 49 is a plan view showing a schematic configuration of the imaging device shown in FIG. 48. [Figure 50] 50 is a schematic diagram showing a cross-sectional configuration taken along line III-III' shown in FIG. 49. [Figure 51] FIG. 49 is an equivalent circuit diagram of the pixel sharing unit shown in FIG. 48. [Figure 52] 10 is a diagram illustrating an example of a connection mode between a plurality of pixel sharing units and a plurality of vertical signal lines. [Figure 53] 51 is a schematic cross-sectional view illustrating an example of a specific configuration of the imaging device shown in FIG. 50. [Figure 54A] 54 is a schematic diagram illustrating an example of a planar configuration of a main part of a first substrate illustrated in FIG. 53. [Figure 54B] 54B is a schematic diagram showing a planar configuration of a pad portion together with a main portion of the first substrate shown in FIG. 54A. [Figure 55] 54 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) shown in FIG. 53. FIG. [Figure 56] 54 is a schematic diagram showing an example of a planar configuration of a pixel circuit and a main part of a first substrate, together with the first wiring layer shown in FIG. 53. [Figure 57] 54 is a schematic diagram illustrating an example of a planar configuration of the first wiring layer and the second wiring layer illustrated in FIG. 53. [Figure 58] 54 is a schematic diagram illustrating an example of a planar configuration of the second wiring layer and the third wiring layer illustrated in FIG. 53. [Figure 59] 54 is a schematic diagram illustrating an example of a planar configuration of a third wiring layer and a fourth wiring layer illustrated in FIG. 53. [Figure 60] FIG. 51 is a schematic diagram for explaining the path of an input signal to the imaging device shown in FIG. 50. [Figure 61] FIG. 51 is a schematic diagram for explaining a signal path of a pixel signal in the imaging device shown in FIG. 50. [Figure 62]56 is a schematic diagram illustrating a modified example of the planar configuration of the second substrate (semiconductor layer) shown in FIG. 55. FIG. [Figure 63] 63 is a schematic diagram showing the planar configuration of the pixel circuit shown in FIG. 62 as well as the first wiring layer and the main part of the first substrate. [Figure 64] 64 is a schematic diagram showing an example of a planar configuration of a second wiring layer together with the first wiring layer shown in FIG. 63. [Figure 65] 65 is a schematic diagram showing an example of a planar configuration of a third wiring layer together with the second wiring layer shown in FIG. 64. [Figure 66] 66 is a schematic diagram showing an example of a planar configuration of a fourth wiring layer together with the third wiring layer shown in FIG. 65. [Figure 67] FIG. 54B is a schematic diagram illustrating a modified example of the planar configuration of the first substrate shown in FIG. 54A. [Figure 68] 68 is a schematic diagram illustrating an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate shown in FIG. 67. FIG. [Figure 69] FIG. 69 is a schematic diagram showing an example of the planar configuration of a first wiring layer together with the pixel circuit shown in FIG. 68. [Figure 70] 70 is a schematic diagram showing an example of a planar configuration of the second wiring layer together with the first wiring layer shown in FIG. 69. [Figure 71] 71 is a schematic diagram showing an example of a planar configuration of a third wiring layer together with the second wiring layer shown in FIG. 70. FIG. [Figure 72] 72 is a schematic diagram showing an example of a planar configuration of a fourth wiring layer together with the third wiring layer shown in FIG. 71. [Figure 73] 68 is a schematic diagram illustrating another example of the planar configuration of the first substrate shown in FIG. 67. [Figure 74] 74 is a schematic diagram showing an example of a planar configuration of a second substrate (semiconductor layer) laminated on the first substrate shown in FIG. 73. FIG. [Figure 75] FIG. 75 is a schematic diagram showing an example of a planar configuration of a first wiring layer together with the pixel circuit shown in FIG. 74. [Figure 76] 76 is a schematic diagram showing an example of a planar configuration of a second wiring layer together with the first wiring layer shown in FIG. 75. [Figure 77]77 is a schematic diagram showing an example of a planar configuration of a third wiring layer together with the second wiring layer shown in FIG. 76. [Figure 78] 78 is a schematic diagram showing an example of a planar configuration of a fourth wiring layer together with the third wiring layer shown in FIG. 77. [Figure 79] 51 is a schematic cross-sectional view illustrating another example of the imaging device shown in FIG. 50. [Figure 80] 79. FIG. 80 is a schematic diagram for explaining the path of an input signal to the imaging device shown in FIG. [Figure 81] FIG. 81 is a schematic diagram for explaining a signal path of a pixel signal in the imaging device shown in FIG. 79. [Figure 82] 54 is a schematic cross-sectional view illustrating another example of the imaging device shown in FIG. 53. [Figure 83] FIG. 52 is a diagram illustrating another example of the equivalent circuit shown in FIG. 51. [Figure 84] FIG. 54B is a schematic plan view illustrating another example of the pixel separating portion shown in FIG. 54A etc. [Figure 85] FIG. 1 is a diagram illustrating an example of a schematic configuration of an imaging system including an imaging device according to the above embodiment and its modified example. [Figure 86] FIG. 86 is a diagram showing an example of an imaging procedure of the imaging system shown in FIG. 85. [Figure 87] 1 is a block diagram showing an example of a schematic configuration of a vehicle control system; [Figure 88] 4 is an explanatory diagram showing an example of the installation positions of an outside-vehicle information detection unit and an imaging unit; FIG. [Figure 89] 1 is a diagram illustrating an example of a schematic configuration of an endoscopic surgery system. [Figure 90] 2 is a block diagram showing an example of a functional configuration of a camera head and a CCU. FIG. [Figure 91A] 13 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to an eighth embodiment of the present technology. FIG. [Figure 91B] FIG. 91B is an enlarged cross-sectional view of a main part of FIG. 91A. [Fig. 91C] 13A to 13C are diagrams showing an arrangement of contact regions and shapes of conductive pads in a pixel unit of a solid-state imaging device according to an eighth embodiment of the present technology. [Figure 92] 13A to 13C are cross-sectional views illustrating steps in a manufacturing method for a solid-state imaging device according to an eighth embodiment of the present technology. [Figure 93] 93A to 93C are cross-sectional views illustrating steps subsequent to those in FIG. 92 in the method for manufacturing the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 94] 94 is a cross-sectional view showing a process subsequent to FIG. 93 in the manufacturing method for the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 95] 95A to 95C are cross-sectional views illustrating steps subsequent to FIG. 94 in the method for manufacturing the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 96] 96 is a cross-sectional view showing a process subsequent to FIG. 95 in the manufacturing method for the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 97] 97A to 97C are cross-sectional views illustrating steps subsequent to those in FIG. 96 in the method for manufacturing the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 98] 98 is a cross-sectional view showing a process subsequent to FIG. 97 in the method for manufacturing a solid-state imaging device according to the eighth embodiment of the present technology. [Figure 99] 99 is a cross-sectional view showing a process subsequent to FIG. 98 in the method for manufacturing the solid-state imaging device according to the eighth embodiment of the present technology. [Figure 100] 99A to 99C are cross-sectional views illustrating steps in a manufacturing method for a solid-state imaging device according to the eighth embodiment of the present technology. [Figure 101] FIG. 23 is a diagram showing a first modified example of the eighth embodiment. [Figure 102] FIG. 23 is a diagram showing a second modified example of the eighth embodiment. [Figure 103] 13 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a ninth embodiment of the present technology. FIG. [Figure 104] 23 is a cross-sectional view in the thickness direction showing an example of the configuration of an imaging device according to a tenth embodiment of the present technology. FIG. [Figure 105] 23 is a cross-sectional view in the thickness direction showing an example of the configuration of an imaging device according to a tenth embodiment of the present technology. FIG. [Figure 106] 23 is a cross-sectional view in the thickness direction showing an example of the configuration of an imaging device according to a tenth embodiment of the present technology. FIG. [Figure 107]13 is a horizontal cross-sectional view showing an example layout of a plurality of pixel units according to a tenth embodiment of the present technology. FIG. [Figure 108] 13 is a horizontal cross-sectional view showing an example layout of a plurality of pixel units according to a tenth embodiment of the present technology. FIG. [Fig. 109] 13 is a horizontal cross-sectional view showing an example layout of a plurality of pixel units according to a tenth embodiment of the present technology. FIG. [Figure 110] 23 is a cross-sectional view in the thickness direction showing a modified example of an imaging device according to the tenth embodiment of the present technology. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the first to tenth embodiments of the present technology will be described with reference to the drawings. In the description of the drawings referred to in the following description, the same or similar parts are given the same or similar symbols. However, it should be noted that the drawings are schematic, and the relationship between thickness and planar dimensions, the thickness ratio of each layer, etc. are different from the actual ones. Therefore, the specific thickness and dimensions should be determined with reference to the following description. In addition, it goes without saying that there are parts with different dimensional relationships and ratios between the drawings. Note that the effects described in this specification are merely examples and are not limited to the present invention, and other effects may also be present.

[0011] (First embodiment) <Configuration of solid-state imaging device> As an example of a solid-state imaging device according to a first embodiment of the present technology, a back-illuminated CMOS image sensor (solid-state imaging device) is illustrated. As shown in Fig. 1, the solid-state imaging device 1A according to the first embodiment of the present technology includes a first substrate unit (first floor unit) 10, a second substrate unit (second floor unit) 20, and a third substrate unit (third floor unit) 30. The solid-state imaging device 1A has a three-dimensional structure in which the first substrate unit 10, the second substrate unit 20, and the third substrate unit 30 are stacked in this order.

[0012] The first substrate unit 10 has a plurality of sensor pixels 12 that perform photoelectric conversion in a semiconductor layer 701. The plurality of sensor pixels 12 are arranged in a matrix in a pixel region 13 in the first substrate unit 10. The second substrate unit 20 has a readout circuit 22 that outputs a pixel signal based on the charge output from the sensor pixel 12, one for every four sensor pixels 12. The second substrate unit 20 has a plurality of pixel driving lines 23 extending in the row direction and a plurality of vertical signal lines 24 extending in the column direction. The third substrate unit 30 may be called a bottom substrate.

[0013] The third substrate unit 30 has a logic circuit 32 that processes pixel signals. The logic circuit 32 has, for example, a vertical drive circuit 33, a column signal processing circuit 34, a horizontal drive circuit 35, and a system control circuit 36. The logic circuit 32 (specifically, the horizontal drive circuit 35) outputs an output voltage Vout for each sensor pixel 12 to the outside. In the logic circuit 32, for example, a low-resistance region made of silicide formed by a salicide (Self Aligned Silicide) process such as CoSi2 or NiSi may be formed on the surface of an impurity diffusion region (semiconductor region) in contact with the source electrode and the drain electrode.

[0014] The vertical drive circuit 33, for example, sequentially selects the plurality of sensor pixels 12 on a row-by-row basis. The column signal processing circuit 34, for example, performs correlated double sampling (CDS) processing on pixel signals output from each sensor pixel 12 in the row selected by the vertical drive circuit 33. The column signal processing circuit 34, for example, performs CDS processing to extract a signal level of the pixel signal and holds pixel data according to the amount of light received by each sensor pixel 12. The horizontal drive circuit 35, for example, sequentially outputs the pixel data held in the column signal processing circuit 34 to the outside. The system control circuit 36, for example, controls the driving of each block (the vertical drive circuit 33, the column signal processing circuit 34, and the horizontal drive circuit 35) in the logic circuit 32.

[0015] Fig. 2 is an equivalent circuit diagram showing a configuration example of a pixel unit PU of a solid-state imaging device 1A according to a first embodiment of the present technology. As shown in Fig. 2, in the solid-state imaging device 1A, four sensor pixels 12 are electrically connected to one readout circuit 22 to configure one pixel unit PU. The four sensor pixels 12 share one readout circuit 22, and the outputs of the four sensor pixels 12 are input to the shared readout circuit 22.

[0016] Each sensor pixel 12 has components in common with each other. In Fig. 2, in order to distinguish the components of each sensor pixel 12 from each other, identification numbers (1, 2, 3, 4) are added to the end of the code (e.g., PD, TG, FD described later) of the components of each sensor pixel 12. In the following, when it is necessary to distinguish the components of each sensor pixel 12 from each other, an identification number is added to the end of the code of the components of each sensor pixel 12, but when it is not necessary to distinguish the components of each sensor pixel 12 from each other, the identification number at the end of the code of the components of each sensor pixel 12 is omitted.

[0017] Each sensor pixel 12 has, for example, a photodiode PD (an example of a photoelectric conversion element), a transfer transistor TR electrically connected to the photodiode PD, and a floating diffusion FD that temporarily holds the charge output from the photodiode PD via the transfer transistor TR. The photodiode PD performs photoelectric conversion to generate a charge according to the amount of received light. The cathode region of the photodiode PD is electrically connected to the source region of the transfer transistor TR, and the anode region of the photodiode PD is electrically connected to a reference potential line (for example, ground). The drain region of the transfer transistor TR is electrically connected to the floating diffusion FD, and the gate electrode of the transfer transistor TR is electrically connected to the pixel drive line 23. The transfer transistor TR is, for example, a complementary metal oxide semiconductor (CMOS) transistor. The floating diffusion FD is composed of an n-type contact region 705 (see FIG. 4) described later.

[0018] The floating diffusions FD of the sensor pixels 12 sharing one readout circuit 22 are electrically connected to each other and to an input terminal of the common readout circuit 22. The readout circuit 22 includes, for example, an amplification transistor AMP (an example of a first transistor), a reset transistor RST, and a selection transistor SEL (an example of a second transistor). Note that the selection transistor SEL may be omitted as necessary.

[0019] The source region of the reset transistor RST (the input end of the readout circuit 22) is electrically connected to the floating diffusion FD, and the drain region of the reset transistor RST is electrically connected to the power supply line VDD and the drain region of the amplification transistor AMP. The gate electrode of the reset transistor RST is electrically connected to a pixel drive line 23 (see FIG. 1). The source region of the amplification transistor AMP is electrically connected to the drain region of the selection transistor SEL, and the gate electrode of the amplification transistor AMP is electrically connected to the source region of the reset transistor RST. The source region of the selection transistor SEL (the output end of the readout circuit 22) is electrically connected to a vertical signal line 24, and the gate electrode of the selection transistor SEL is electrically connected to the pixel drive line 23 (see FIG. 1).

[0020] When the transfer transistor TR is turned on, it transfers the charge of the photodiode PD to the floating diffusion FD. For example, as shown in FIG. 4 described later, the gate electrode 710 of the transfer transistor TR extends from the surface of the semiconductor layer 701 to a depth that penetrates the well region 704 and reaches the photodiode PD. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. When the reset transistor RST is turned on, it resets the potential of the floating diffusion FD to the potential of the power supply line VDD. The selection transistor SEL controls the output timing of the pixel signal from the readout circuit 22.

[0021] The amplification transistor AMP generates a pixel signal having a voltage corresponding to the level of the charge held in the floating diffusion FD. The amplification transistor AMP constitutes a source follower type amplifier, and outputs a pixel signal having a voltage corresponding to the level of the charge generated in the photodiode PD. When the selection transistor SEL is turned on, the amplification transistor AMP amplifies the potential of the floating diffusion FD and outputs a voltage corresponding to the potential to the column signal processing circuit 34 via the vertical signal line 24. The reset transistor RST, the amplification transistor AMP, and the selection transistor SEL are, for example, CMOS transistors.

[0022] FIG. 3 is a diagram showing an arrangement of contact regions in a pixel unit of a solid-state imaging device according to a first embodiment of the present technology. FIG. 4 is a cross-sectional view of a main part of a pixel unit of a solid-state imaging device according to a first embodiment of the present technology. Note that the cross-sectional view of the main part shown in FIG. 4 is merely a schematic view, and is not intended to strictly and correctly show an actual structure. In the cross-sectional view of the main part shown in FIG. 4, the horizontal positions of transistors and impurity diffusion regions (semiconductor regions) are intentionally changed in order to easily explain the configuration of the solid-state imaging device 1A on paper. Also, in FIG. 4, the third substrate portion is not shown.

[0023] 4, the second substrate portion 20 is laminated on one surface, that is, the main surface (front surface), of the first substrate portion (bottom substrate) 10. In addition, although not shown, the third substrate portion 20 is laminated on one surface, that is, the main surface, of the second substrate portion 20.

[0024] The first substrate unit 10 has a semiconductor layer 701 as a first semiconductor layer and an insulating layer 720 as a first insulating layer covering the semiconductor layer 701. The first substrate unit 10 has a rear surface opposite to the one surface as an incident surface. A planarization film 831, a color filter 832, a microlens 833, and the like are provided on the rear surface side of the first substrate unit 10. The planarization film 831 planarizes the rear surface side of the first substrate unit 10. The microlens 833 collects the light incident on the first substrate unit 10. The color filter 832 separates the light incident on the first substrate unit 10 into colors. The color filter 832 and the microlens 833 are provided for each sensor pixel 12.

[0025] The semiconductor layer 701 has a plurality of island regions 703 as a plurality of element formation regions, each of which is disposed adjacent to one another in a plane with an element isolation region 702 interposed therebetween, and each of which is provided with a first active element. In a manufacturing process, the semiconductor layer 701 is formed by grinding the rear surface side of a semiconductor substrate, for example, by a CMP method, until the plurality of element formation regions partitioned by the element isolation region 702 become individual island regions 703. A single crystal silicon substrate of a first conductivity type (for example, n-type) is used as the semiconductor substrate. That is, each of the plurality of island regions 703 is mainly composed of the n-type semiconductor layer 701.

[0026] The element isolation region 702 electrically isolates adjacent island regions 703. The element isolation region 702 has, for example, an STI (Shallow Trench Isolation) structure, and extends from the main surface of the semiconductor layer 701 in the depth direction.

[0027] One island region 703 corresponds to one sensor pixel 12. A well region 704 of a second conductivity type (for example, p-type) is provided in a surface layer portion of the island region 703. An n-type photodiode PD is provided as a first active element in a region deeper than the well region 704. A transfer transistor TR is provided as a first active element in a surface layer portion of the island region 703. Although not shown in detail, the transfer transistor TR has a gate insulating film 109 provided along an inner wall of a gate groove extending in the depth direction from the main surface of the island region 703, a T-shaped gate electrode 710 with a part embedded in the gate groove via the gate insulating film 709 and the other part protruding from the gate groove, and a source region and a drain region (not shown).

[0028] 3 and 4, an n-type contact region 705 is provided inside a well region 704 on the side of the element isolation region 702 in the surface layer portion of the island region 703. As shown in Fig. 3, the contact region 705 is provided in contact with a first intersection 702a located in the center of a pixel unit PU, each unit of which includes four sensor pixels 12, among intersections between the element isolation region 702 extending in the row direction and the element isolation region 702 extending in the column direction. The contact region 705 reduces ohmic contact resistance with a conductive pad 824a (described later) and shares a floating diffusion FD.

[0029] 3 and 4, a p-type contact region 706 having a higher impurity concentration than the well region 704 is provided inside the well region 704 on the element isolation region 702 side of the surface layer portion of the island region 703. As shown in Fig. 3, the contact region 706 is provided in contact with a second intersection 702b located at a corner of the pixel unit PU, among the intersections of the element isolation region 702. The contact region 706 reduces ohmic contact resistance with a conductive pad 742b, which will be described later.

[0030] 4, in the center of the pixel unit PU, the above-mentioned conductive pad 824a is electrically and mechanically connected to each contact region 705 of the four island regions 703 arranged via the first intersection 702a of the element isolation region 702, straddling the first intersection 702a of the element isolation region 702. In addition, in the corners of the pixel unit PU, the above-mentioned conductive pad 824b is electrically and mechanically connected to each contact region 706 of the four island regions 703 arranged via the second intersection 702b of the element isolation region 702, straddling the second intersection 702b of the element isolation region 702.

[0031] The insulating layer 720 is provided on the semiconductor layer 701 so as to cover the island region 703 and the conductive pads 824a, 824b. The first insulating layer 720 is formed of, for example, one of a silicon oxide film (SiO), a silicon nitride film (SiN), a silicon oxynitride film (SiON), or a silicon carbonitride film (SiCN), or a laminated film of two or more of these films.

[0032] 4, the second substrate unit 20 has a semiconductor layer 801 as a second semiconductor layer, and an insulating layer 820 as a second insulating layer provided on the semiconductor layer 801. The second substrate unit 20 also has an insulating film 802 on the back surface of the semiconductor layer 801 opposite to the insulating layer 820 side. The semiconductor layer 801 is disposed on the insulating layer 720 via the insulating film 802. The insulating film 802 is formed of, for example, a silicon oxide film, and is bonded to the insulating layer 720 below.

[0033] As shown in Fig. 4, the solid-state imaging device 1A according to the first embodiment of the present technology further includes a conductive plug 823a that is embedded in a connection hole 821a that reaches the surface of a conductive pad 824a from the surface of the insulating layer 820 and is integrally formed of the same material as the conductive pad 824a. The conductive pad 824a has an area larger than that of the conductive plug 823a when viewed in a plan view. The solid-state imaging device 1A according to the first embodiment of the present technology further includes a conductive plug 823b that is embedded in a connection hole 821b that reaches the surface of a conductive pad 824b from the surface of the insulating layer 820 and is integrally formed of the same material as the conductive pad 824b. The conductive pad 824b has an area larger than that of the conductive plug 823b when viewed in a plan view. The conductive plug 823a and the conductive pad 824a, as well as the conductive plug 823b and the conductive pad 824b, can be made of a high melting point metal material such as titanium (Ti), tungsten (W), cobalt (Co), molybdenum (Mo), etc., and for example, tungsten (W) is used.

[0034] The insulating layer 820 is provided with a connection hole 825a that reaches the surface of the gate electrode 806a on the island region 803a from the surface of the insulating layer 820, a connection hole 825b that reaches the surface of the island region 803a from the surface of the insulating layer 820, and a connection hole 825c that reaches the surface of the gate electrode 806b on the island region 803b from the surface of the insulating layer 820. Conductive plugs 826a to 826c are embedded in these connection holes 825a to 825c. A high melting point metal material, such as tungsten (W), can be used as the conductive plugs 826a to 826c.

[0035] A wiring 827a is provided on the insulating layer 820, and is electrically and mechanically connected to the conductive plugs 823a and 826a so as to cover the conductive plugs 823a and 826a. A wiring 827b is provided on the insulating layer 820, and is electrically and mechanically connected to the conductive plugs 826b so as to cover the conductive plugs 826b. A wiring 827c is provided on the insulating layer 820, and is electrically and mechanically connected to the conductive plugs 823b and 826c so as to cover the conductive plugs 823b and 826c.

[0036] An insulating film 828 is provided on the insulating layer 820 so as to cover the wirings 827a to 827c. A wiring 829 is provided on a surface layer of the insulating film 828. The wirings 827a to 827c and the wiring 829 are made of a metal such as copper (Cu). The amplification transistor AMP has a gate insulating film 205 formed on the main surface of the island region 803a, a gate electrode 806a provided on the gate insulating film 805, and a source region and a drain region formed in the surface layer of the island region 803a. The reset transistor RST has a gate insulating film 805 formed on the main surface of the island region 803b, a gate electrode 806b provided on the gate insulating film 805, and a source region and a drain region formed in the surface layer of the island region 803b.

[0037] The gate electrode 806a of the amplifier transistor AMP provided in the second substrate unit 20 is electrically connected to four contact regions 705 adjacent to the first intersection 702a of the element isolation region 702 in the lower first substrate unit 10 through a conductive path including the conductive plug 826a, the wiring 827a, the conductive plug 823a, and the conductive pad 824a. In this conductive path, the conductive plug 823a and the conductive pad 824a are integrally formed from the same material, so that there is one less heterojunction than when the conductive plug 823a is formed from, for example, a polycrystalline silicon film. Therefore, according to the solid-state imaging device 1A of the first embodiment, it is possible to reduce the resistance value of the conductive path electrically connecting the gate electrode 806a of the amplifier transistor AMP provided in the upper second substrate unit 20 and the contact region 705 provided in the lower first substrate unit 10. In addition, since the contact region 705 shares the floating diffusion FD, it is possible to increase the operating speed of the pixel unit PU.

[0038] The island region 803b provided in the second substrate unit 20 is electrically connected to four contact regions 706 adjacent to the second intersection 702b of the element isolation region 702 in the lower first substrate unit 10 through a conductive path including the conductive plug 826c, the wiring 827c, the conductive plug 823b, and the conductive pad 824b. In this conductive path, the conductive plug 823b is integrally formed with the conductive pad 824b using the same material, so that there is one less heterojunction than when the conductive plug 823b is formed using, for example, a polycrystalline silicon film. Therefore, according to the solid-state imaging device 1A of the first embodiment, the resistance value of the conductive path electrically connecting the island region 803b provided in the upper second substrate unit 20 and the contact region 706 provided in the lower first substrate unit 10 can be reduced.

[0039] <Method of Manufacturing Solid-State Imaging Device> Next, an example of a method for manufacturing the solid-state imaging device according to the first embodiment will be described with reference to FIGS. First, a semiconductor layer 701 made of a single crystal silicon semiconductor substrate is prepared.

[0040] 5, an element isolation region 702 is formed on the main surface side of the semiconductor layer 701, and an island region 703 is formed as an element formation region surrounded and partitioned by the element isolation region 702. The element isolation region 702 is formed, for example, by forming an isolation trench extending in the depth direction from the main surface of the semiconductor layer 701 using well-known photolithography technology and anisotropic dry etching technology, and then selectively filling the isolation trench with an insulating film. The insulating film is filled in by forming, for example, a silicon oxide film by CVD on the entire main surface of the semiconductor layer 701 including the inside of the isolation trench, and then selectively removing the insulating film on the main surface of the semiconductor layer 701 by etch-back or CMP.

[0041] Next, using well-known photolithography, ion implantation, and heat treatment techniques, a p-type well region 704 and an n-type charge generation region (not shown) that constitute a photodiode are formed in the surface layer portion (upper portion) of the semiconductor layer 1. Through this process, a photodiode PD is formed in the island region 703.

[0042] 6, an n-type contact region 705 is formed on the element isolation region 702 side (first intersection 702a side) of the surface layer of each of the island regions 703 adjacent to each other via the element isolation region 702, and a p-type contact region 706 is formed on the element isolation region 702 side (second intersection 702b side) of the surface layer of each of the island regions 703 adjacent to each other via the element isolation region 702. The n-type contact region 705 and the p-type contact region 706 are formed every other one at the intersections where the element isolation region extending in the row direction intersects with the element isolation region 702 extending in the column direction. The contact regions 705 and the contact regions 706 are formed using well-known photolithography, ion implantation, and heat treatment techniques.

[0043] 7, a pad core 708a is formed on each of the n-type contact regions 705 of the four island regions 703 across the first intersection 702a of the element isolation region 702 via an etching stopper film 707, and a pad core 708b is formed on each of the p-type contact regions 706 of the four island regions 703 across the second intersection 702b of the element isolation region 702 via an etching stopper film 707. The etching stopper film 707 and the pad cores 708a, 708b are formed, for example, by forming a silicon oxide film and a polycrystalline silicon film in this order by a CVD method on the entire surface of the semiconductor layer 701 including the island regions 703 and the element isolation region 702, and then patterning the polycrystalline silicon film and the silicon oxide film in this order. The polycrystalline silicon film used is a non-doped type in which impurities that reduce resistance are not introduced during or after deposition.

[0044] Next, a gate trench extending in the depth direction from the main surface of the semiconductor layer 701 is formed in the island region 703. Then, a thermal oxidation process is performed to form a gate insulating film 709 made of a thermally oxidized silicon film on the main surface of the semiconductor layer 701 including the inside of the gate trench. Then, a polycrystalline silicon film, for example, is formed as a gate electrode material on the entire surface of the gate insulating film 709 including the inside of the gate trench by a CVD method. An impurity that reduces the resistance value during or after deposition is introduced into the polycrystalline silicon film. Then, the polycrystalline silicon film and the gate insulating film 709 are patterned in this order to form a T-shaped gate electrode 710, part of which is embedded in the gate trench via the gate insulating film 709 and the other part of which protrudes from the gate trench, as shown in FIG. This process forms a transfer transistor TR.

[0045] Next, as shown in FIG. 9, an insulating layer 720 is formed as a first insulating layer on the entire main surface of the semiconductor layer 701 so as to cover the gate electrode 710 and the pad cores 708a and 708b.

[0046] Next, a semiconductor layer 801 made of, for example, monocrystalline silicon is prepared as the second semiconductor layer. An insulating film 802 made of, for example, a silicon oxide film is provided on the back surface of the semiconductor layer 801 opposite to the main surface. Then, as shown in FIG. 10, the semiconductor layer 801 is bonded to the main surface side of the semiconductor layer 701. Specifically, the insulating layer 720 on the main surface side of the semiconductor layer 701 and the insulating film 802 on the back surface side of the semiconductor layer 801 are placed face to face and heat treated in a state in which they are in close contact with each other. As a result, as shown in FIG. 10, the insulating film 802 and the insulating layer 720 are integrated, and the upper semiconductor layer 801 and the lower semiconductor layer 701 are bonded to each other via the insulating film 802 and the insulating layer 720. Also, the semiconductor layer 801 is disposed on the insulating layer 720. Then, the main surface side of the semiconductor layer 801 is ground by, for example, a CMP method to reduce the thickness of the semiconductor layer 801.

[0047] Next, the semiconductor layer 801 is patterned into a plurality of island regions 803 using well-known photolithography and anisotropic dry etching techniques, and then, as shown in Fig. 11, the spaces between the island regions 803 are filled with an insulating film 804. The filling with the insulating film 804 is performed, for example, by forming the insulating film 804 made of a silicon oxide film over the entire surface of the semiconductor layer 801 including on the island regions 803 and between the island regions 803 by a CVD method, and then selectively removing the insulating film 804 on the island regions 803 by an etch-back method or a CMP method.

[0048] Next, as shown in FIG. 12, an amplifier transistor AMP and a selection transistor SEL (not shown) are formed as second active elements in an island region 803a of the plurality of island regions 803, and a reset transistor RST is formed as a second active element in an island region 803b of the plurality of island regions 803. These second active elements are formed by first performing a thermal oxidation process on the island region 803 to form a gate insulating film 805 made of a thermally oxidized silicon film on the main surface of the island region 803. Then, for example, a polycrystalline silicon film is formed as a gate electrode material on the entire surface on the gate insulating film 805 by a CVD method. An impurity that reduces the resistance value during or after deposition is introduced into this polycrystalline silicon film. Then, this polycrystalline silicon film and the gate insulating film 705 are patterned in this order to form gate electrodes 806a and 806b on the island regions 803a and 803b with the gate insulating film 805 interposed therebetween. Then, impurities are ion-implanted into the island regions 803a and 803b using the gate electrodes 806a and 806b as masks. Then, the island regions 703a and 703b are subjected to a heat treatment (heat treatment to activate impurities) to recover crystal defects caused by the ion implantation, thereby forming a source region and a drain region. As a result, an amplifier transistor AMP and a select transistor SEL are formed in the island region 803a, and a reset transistor RST is formed in the island region 803b.

[0049] In this process, the thermal oxidation process and the crystal defect recovery process are performed in an atmosphere at a temperature of about 1000° C., but since the pad cores 708a, 708b are formed of a non-doped polycrystalline silicon film, impurities do not diffuse from the pad cores 708a, 708b to the contact regions 705, 706, and the contact regions 705, 706 do not expand. In particular, since the contact region 705 shares the floating diffusion FD, the accumulation of charges in the contact region 705 can be stabilized.

[0050] Next, an insulating layer 820 is formed as a second insulating layer covering the island regions 703a and 703b. Then, as shown in FIG.

[0051] 13, a connection hole 821a is formed from the surface of the insulating layer 820 to the surface of the pad core 708a, and a connection hole 821b is formed from the surface of the insulating layer 820 to the surface of the pad core 708b. These connection holes 821a and 821b are formed using well-known photolithography and anisotropic dry etching techniques.

[0052] 14, the pad core 708a and the etching stopper film 707 are removed through the connection hole 821a to form a space 822a connected to the connection hole 821a, and the pad core 708b and the etching stopper film 707 are removed through the connection hole 821b to form a space 822b connected to the connection hole 821a. The pad cores 708a and 708b are removed under etching conditions that have selectivity for the insulating layer 820, the insulating film 802, the insulating layer 720, and the etching stopper film 707. At this time, the surfaces of the contact regions 705 and 706 are slightly etched, but the reduction in thickness of the contact regions 705 and 706 can be suppressed compared to the case where the pad cores 708a and 708b are removed by etching without providing the etching stopper film 707.

[0053] 15, conductive material is filled into the spaces 822a, 822b and the connection holes 821a, 821b to form conductive pads 824a, 824b connected to the contact regions 705, 706 and conductive plugs 823a, 823b integrally formed with the same material as the conductive pads 824a, 824b. The conductive pads 824a, 824b and the conductive plugs 823a, 823b are formed by first forming a barrier metal film along the inner walls of the connection holes 821a, 821b, the inner walls of the spaces 822a, 822b, and the surfaces of the contact regions 705, 706 by, for example, a PVD method. The barrier metal film is formed of a composite film including a titanium (Ti) film / titanium nitride (TiN) film from the bottom. The titanium film and titanium nitride film are formed to a thickness of, for example, about several tens of nm. Then, for example, a tungsten (W) film is formed as a high melting point material by CVD so as to fill the insides of the spaces 822a, 822b and the connection holes 821a, 821b. The tungsten film and the barrier metal film are then etched back by dry etching such as RIE, thereby selectively removing the tungsten film and the barrier metal film on the contact regions 705, 706 and on the insulating layer 820. As a result, conductive pads 824a, 824b and conductive plugs 823a, 823b, which are integrally formed of the same material, are formed.

[0054] Next, a connection hole 825a is formed that reaches the surface of the gate electrode 806a of the amplifying transistor AMP from the surface of the insulating layer 820, a connection hole 825b is formed that reaches the surface of the island region 803a from the surface of the insulating layer 820, and a connection hole 825c is formed that reaches the surface of the island region 803b from the surface of the insulating layer 820. Then, as shown in Fig. 16, conductive plugs 826a to 826c are embedded in the respective connection holes 825a to 825c in the same manner as the above-mentioned conductive plugs 823a and 823b.

[0055] Next, a wiring 827a electrically and mechanically connected to the conductive plugs 823a and 826a, a wiring 827b electrically and mechanically connected to the conductive plugs 826b, and a wiring 827c electrically and mechanically connected to the conductive plugs 823b and 826c are formed on the surface of the insulating layer 820. These wirings 827a to 827c are formed by forming a metal film, for example a copper film, on the surface of the insulating layer 820 by a CVD method, and then patterning the copper film by using well-known photolithography technology and anisotropic dry etching technology.

[0056] Next, an insulating film 828 is formed on the insulating layer 820 so as to cover the insulating layer 820 including the wirings 827a to 827c, and then wirings 829 embedded in the surface layer of the insulating layer 820 are formed.

[0057] Next, the third substrate unit 30 on which the logic circuit 32 and the like are formed is bonded to the second substrate unit 20. Then, the back surface side of the semiconductor layer 701 is ground by CMP or the like until the element isolation region 702 is exposed, thereby isolating the island region 103. Furthermore, a planarizing film, a color filter, a microlens, and the like are formed on the back surface of the semiconductor layer 701. This almost completes the solid-state imaging device 1A according to the first embodiment shown in FIG.

[0058] According to the manufacturing method of the solid-state imaging device 1A according to the first embodiment, the conductive plug 823a and the conductive pad 824a are integrally formed from the same material, and the conductive plug 823b and the conductive pad 824b are integrally formed from the same material, so that it is possible to reduce the number of heterojunctions by one compared to the case where the conductive pad 824a is formed from, for example, a polycrystalline silicon film. Therefore, it is possible to manufacture the solid-state imaging device 1A in which the resistance value of the conductive path including the conductive plug 823a and the conductive pad 824a and the resistance value of the conductive path including the conductive plug 823a and the conductive pad 824a are reduced.

[0059] Furthermore, according to the manufacturing method of the solid-state imaging device 1A of the first embodiment, no diffusion of impurities occurs from the conductive pads 824a, 824b to the contact regions 705, 706, so that a solid-state imaging device 1A can be manufactured in which the expansion of the contact regions 705, 706 is suppressed. In the solid-state imaging device 1A according to the first embodiment described above, the semiconductor layer 801 in which the insulating film 804 is embedded between the island regions 803 has been described. However, the semiconductor layer 801 may be formed of one semiconductor, as in the semiconductor substrate 21 shown in FIG. 104 of the tenth embodiment described later. In this case, an element isolation layer 213 surrounding the periphery of the transistor is formed in the semiconductor layer 801, as in the semiconductor substrate 21 shown in FIG. 104. In this case, a through hole through which the conductive plug 823a passes and a through hole through which the conductive plug 823b passes may be formed in the semiconductor layer 801, and then an upper insulating layer 820 may be formed so as to fill the through holes. When the conductive plugs 823a and 823b are passed through the through holes formed in the semiconductor layer 801, it is preferable to provide insulation and isolation by interposing an insulating film between the semiconductor layer 801 and the conductive plugs 823a and 823b. The second substrate portion 20 of the first embodiment may be configured by stacking the semiconductor substrates 21 and 21A, as in the second substrate portion 20 of the tenth embodiment shown in Fig. 104. In this case, it is preferable that the conductive plugs 823a and 823b are formed to penetrate the multiple semiconductor substrates while being insulated and isolated from the multiple semiconductor substrates.

[0060] Second embodiment <Configuration of solid-state imaging device> The solid-state imaging device 1B1 according to the second embodiment of the present technology has a configuration basically similar to that of the solid-state imaging device 1A according to the first embodiment described above, but differs in the following configuration. That is, the solid-state imaging device 1B1 according to the second embodiment of the present technology includes MIS contact parts 840a and 240b between the contact regions 705 and 706 and the conductive plugs 823a and 823b, as shown in Fig. 18. In addition, the solid-state imaging device 1B1 according to the second embodiment of the present technology includes a compound semiconductor layer 850 as a second semiconductor layer, instead of the semiconductor layer 801 of the first embodiment described above.

[0061] The MIS contact unit 840a has a contact region 705, an insulating film 841 provided on the contact region 705, and a conductive pad 842a provided on the insulating film 841. The MIS contact unit 840b has a contact region 706, an insulating film 841 provided on the contact region 706, and a conductive pad 842b provided on the insulating film 841.

[0062] The insulating film 841 and conductive pad 842a of the MIS contact section 840a are disposed on the four contact regions 705 across the first intersection 702a of the element isolation region 702. Similarly, the insulating film 841 and conductive pad 842b of the MIS contact section 840b are disposed on the four contact regions 706 across the second intersection 702b of the element isolation region 702. The conductive pads 842a and 842b are formed of a polycrystalline silicon (doped polysilicon) film into which impurities for reducing resistance are introduced during or after film formation. The insulating film 841 is an amorphous film, and may be, for example, a titanium oxide (TiO2) film or a strontium titanate (SrTiO x ) membrane can be used.

[0063] The MIS contact parts 840a and 840b enable a contact with lower resistance than the junction between the polycrystalline silicon (conductive pads 842a, 842b) and the crystalline silicon (contact regions 805, 806) by using the insulating film 841 to block the wave function of electrons that penetrate from the metal (polycrystalline silicon film) side into the band gap of the semiconductor (contact regions 805, 806) and by using the interface dipole generated at the interface between the insulating film and the semiconductor (contact regions 805, 806) to generate an electric field that effectively reduces the Schottky barrier. The MIS contact is described in the following document.

[0064] k.-W. Ang, et al., IEDM 2012, P.439. S. Datta et al., VLSI tech.pp. 174-1752014

[0065] The compound semiconductor layer 850 has a plurality of island regions 853 as a plurality of element formation regions, each of which is arranged in a plane adjacent to each other via an insulating film 802, and each of which is provided with a second active element. In the manufacturing process, the compound semiconductor layer 850 is formed by bonding a compound semiconductor substrate having an insulating film 802 on the back surface to the first substrate unit 10, patterning the compound semiconductor substrate to form a plurality of island regions 853, and then filling the spaces between the plurality of island regions 853 with an insulating film 804. As the compound semiconductor substrate, a III-V material or a IV material can be used. As the III-V material, indium gallium arsenide (InGaAs) can be used, and as the IV material, silicon germanium (SiGe) or germanium (Ge) can be used. In this second embodiment, an InGaAs substrate is used. That is, each of the plurality of island regions 853 is mainly composed of a compound semiconductor layer 850 made of InGaAs.

[0066] An amplifier transistor AMP and a selection transistor SEL (not shown) serving as second active elements are provided in an island region 853a of the multiple island regions 853. A reset transistor RST serving as a second active element is provided in an island region 853b of the multiple island regions 853. The island regions 853a and 853b are disposed on four island regions 703 constituting one pixel unit PU.

[0067] Although not shown in detail, the amplification transistor AMP has a gate insulating film 855, a gate electrode 856a, a source region, and a drain region provided in the island region 853a. The selection transistor SEL also has a gate insulating film, a gate electrode, a source region, and a drain region provided in the island region 853a. Although not shown in detail, the reset transistor RST has a gate insulating film 855, a gate electrode 856b, a source region, and a drain region provided in the island region 853b. The gate insulating film 855 is formed of an aluminum oxide film formed on the island region by, for example, the ALD method.

[0068] According to the solid-state imaging device 1B1 according to the second embodiment of the present technology, since the MIS contact portion 840a can be formed by forming a thin insulating film between the contact region 705 and the conductive pad 842a, a low-resistance floating diffusion shared contact structure can be obtained. Also, since the MIS contact portion can be formed by forming a thin insulating film 841 between the contact region 706 and the conductive pad 842b, a low-resistance contact structure can be obtained.

[0069] <Method of Manufacturing Solid-State Imaging Device> Next, a manufacturing method of the solid-state imaging device 1B1 according to the second embodiment of the present technology will be described.

[0070] First, as shown in FIG. 19, an element isolation region 702, an island region 703, a well region 704, a photodiode PD, a transfer transistor TR, contact regions 705 and 706, and the like are formed in a semiconductor layer 701.

[0071] Next, titanium oxide (TiO) having a thickness of about 10 to 20 nm is applied to the entire surface of the semiconductor layer 701 including the island region 703. x 20, a MIS contact portion 840a is formed on each of the contact regions 705 of the four island regions 703 across the first intersection 702a of the element isolation region 702 via an insulating film 841, and a conductive pad 842b is formed on each of the contact regions 706 of the four island regions 703 across the second intersection 702b of the element isolation region 702 via an insulating film 841. This process forms MIS contact portions 840a on the four contact regions 705 in contact with the first intersection 702a of the element isolation region 702, and forms MIS contact portions 840b on the four contact regions 706 in contact with the second intersection 702b of the element isolation region 702.

[0072] Next, as shown in FIG. 21, an insulating layer 720 is formed as a first insulating layer on the entire main surface of the semiconductor layer 701 so as to cover the gate electrode 710 and the MIS contact portions 840a and 840b.

[0073] Next, a compound semiconductor layer 850 made of, for example, InGaAs is prepared as the second semiconductor layer. An insulating film 801 made of, for example, a silicon oxide film is provided on the back surface of the compound semiconductor layer 850 opposite to the main surface. Then, as shown in FIG. 22, the compound semiconductor layer 850 is bonded to the main surface side of the semiconductor layer 701. Specifically, the insulating layer 720 on the main surface side of the semiconductor layer 701 and the insulating film 802 provided on the back surface side of the compound semiconductor layer 850 are placed face to face and heat treated in a state of being in close contact with each other. As a result, as shown in FIG. 22, the insulating film 802 and the insulating layer 720 are integrated, and the upper compound semiconductor layer 850 and the lower semiconductor layer 701 are bonded to each other via the insulating film 802 and the insulating layer 720. Also, the compound semiconductor layer 850 is disposed on the insulating layer 720. Then, the main surface side of the compound semiconductor layer 840 is ground by, for example, a CMP method to reduce the thickness of the compound semiconductor layer 850.

[0074] Next, as shown in FIG. 23, the compound semiconductor layer 850 is patterned into a plurality of island regions 853 using known photolithography technology, anisotropic line etching technology, or the like, and then, as shown in FIG. 23, the spaces between the island regions 853 are filled with an insulating film 804 to planarize the main surface side of the compound semiconductor layer 850.

[0075] Next, as shown in FIG. 24, an amplifier transistor AMP and a selection transistor SEL (not shown) are formed as second active elements in an island region 853a of the plurality of island regions 853, and a reset transistor RST is formed as a second active element in an island region 853b of the plurality of island regions 853. For these second active elements, first, a gate insulating film 855 made of an Al2O3 film with a thickness of about 10 nm is formed by an ALD method on the entire main surface of the compound semiconductor layer 850 including the island region 853. Then, a gate electrode material made of an aluminum (Al) or aluminum alloy film with a thickness of about 100 nm is formed by a sputtering method on the entire surface on the gate insulating film 855. Then, the gate electrode material and the gate insulating film 855 are patterned in this order to form gate electrodes 856a and 856b on the island regions 853a and 853b with the gate insulating film 855 interposed therebetween. Then, a source region and a drain region are formed by a doped epitaxial growth method at a low temperature of 550° C. or less. As a result, the amplifier transistor AMP and the selection transistor SEL are formed in the island region 853a, and the reset transistor RST is formed in the island region 853b.

[0076] In this process, the insulating film 841 of the MIS contact parts 840a, 840b is also exposed to the heat treatment temperature when the second active element is formed. The characteristics of the insulating film 841 of the MIS contact parts 840a, 840b tend to become unstable when exposed to high temperatures, and it may become difficult to maintain a low resistance. However, since the second active element is formed by a low-temperature process at 550°C or less, the low resistance of the MIS contact parts 840a, 840b can be maintained even after the formation of the second active element.

[0077] Next, an insulating layer 820 is formed as a second insulating layer covering the island regions 853a and 853b. Then, as shown in FIG.

[0078] 25, a connection hole 821a is formed so as to reach the surface of the conductive pad 842a from the surface of the insulating layer 820, and a connection hole 821b is formed so as to reach the surface of the conductive pad 842b from the surface of the insulating layer 820. These connection holes 821a and 821b are formed using well-known photolithography and anisotropic dry etching techniques.

[0079] Next, a conductive material is filled into the contact holes 821a, 821b in the same manner as in the first embodiment described above, to form conductive plugs 823a, 823b in the contact holes 821a, 821b. Then, the same manner as in the first embodiment described above is applied to form contact holes 825a-825c, conductive plugs 826a-826c, wirings 827a-827c, an insulating film 828, wirings 829, and the like. After bonding the third substrate unit 30, a planarization film 831, a color filter 832, a microlens 833, and the like are formed on the rear surface of the semiconductor layer 701. This almost completes the solid-state imaging device 1B1 according to the second embodiment shown in FIG.

[0080] According to the manufacturing method of the solid-state imaging device 1B1 according to the second embodiment of the present technology, since the second active element is formed by a low-temperature process after the MIS contact portion is formed, it is possible to provide the solid-state imaging device 1B1 having the MIS contact portions 840a, 840b that maintain low resistance. In addition, since this allows the second active element and the logic circuit to be stacked on the photodiode PD, it is possible to increase the pixel area and provide the solid-state imaging device 1B1 with ultra-high sensitivity. In addition, in the solid-state imaging device 1B1 according to the second embodiment, the second substrate portion 20 may also be configured in such a way that semiconductor substrates 21 and 21A are stacked (multiple semiconductor substrates are stacked) as in the second substrate portion 20 shown in FIG. 104 of the tenth embodiment described later.

[0081] Third embodiment <Configuration of solid-state imaging device> In the above-described second embodiment, the case where the compound semiconductor layer 850 is used as the second semiconductor layer has been described. However, in the present technology, as shown in FIG. 26 , similarly to the above-described first embodiment, the second semiconductor layer can also be made of a semiconductor layer 801 made of single crystal silicon.

[0082] Specifically, as shown in Fig. 27, a substrate part is prepared in which an insulating layer 720 is formed as a first insulating layer on a semiconductor layer 701, and as shown in Fig. 28, a substrate part is prepared in which an insulating layer 820 is formed as a second insulating layer covering the semiconductor layer 801. Then, as shown in Fig. 29, the insulating layer 720 on the main surface side of the semiconductor layer 701 and the insulating film 802 on the back surface side of the semiconductor layer 801 are placed face to face and bonded to each other by heat treatment. Then, the same process as in the second embodiment is carried out to form connection holes 825a to 825c, wirings 825a to 825c, insulating film 828, wiring 829, etc., as shown in Fig. 26.

[0083] According to the manufacturing method of the solid-state imaging device 1B2 of the third embodiment, a substrate portion having a second active element that has already been formed by performing high-temperature heat treatment is bonded to a substrate portion having pre-formed MIS contact portions 840a, 840b, thereby making it possible to provide a solid-state imaging device 1B2 having MIS contact portions 840a, 840b that maintain low resistance. In addition, in the solid-state imaging device 1B2 of the third embodiment, the second substrate portion 20 may also be configured in such a way that semiconductor substrates 21 and 21A are stacked (multiple semiconductor substrates are stacked) as in the second substrate portion 20 shown in Figure 104 of the tenth embodiment described later.

[0084] (Fourth embodiment) <Configuration of solid-state imaging device> A solid-state imaging device 1C according to the fourth embodiment of the present technology has a basically similar configuration to the solid-state imaging device 1 according to the above-described first embodiment, but differs in the following configuration.

[0085] 30 and 31, the solid-state imaging device 1C according to the fourth embodiment of the present technology includes conductive plugs 875a and 875b embedded in through holes 871a and 871b extending from the surface of the insulating layer 820 to the surfaces of the conductive pads 864a and 864b via an insulating film 873. The solid-state imaging device 1C according to the fourth embodiment of the present technology also includes an isolation trench 872 that isolates the element formation region of the semiconductor layer 801 into island regions 803, an insulating film 873 provided on a side wall of the isolation trench 872, and an element isolation region 876 including a conductive material 874 embedded inside the insulating film 873 in the isolation trench.

[0086] The conductive pad 864a is formed separately from the conductive plug 875a. The conductive pad 864a is disposed on the four contact regions 705 across the first intersection 702a of the element isolation region 702, and is electrically and mechanically connected to the four contact regions 705. Similarly, the conductive pad 864b is also formed separately from the conductive plug 875b. The conductive pad 864b is disposed on the four contact regions 706 across the second intersection 702b of the element isolation region 702, and is electrically and mechanically connected to the four contact regions 706. The conductive pads 864a and 864b are formed of a polycrystalline silicon (doped polysilicon) film into which impurities that reduce the resistance value are introduced during or after film formation, for example. On the other hand, the conductive plugs 875a and 875b are formed of tungsten, which is a high-melting point metal material, like the conductive plugs 823a and 823b of the first embodiment.

[0087] In the solid-state imaging device 1C according to the fourth embodiment of the present technology, the island region 803 in which the second active element is formed is surrounded in a planar manner by the conductive material 874. Therefore, according to the solid-state imaging device 1C according to the fourth embodiment of the present technology, scattering of incident light can be blocked, so that color mixing can be suppressed and an ultra-high sensitivity solid-state imaging device 1C can be obtained.

[0088] <Method of Manufacturing Solid-State Imaging Device> Next, an example of a method for manufacturing the solid-state imaging device according to the fourth embodiment will be described with reference to FIGS. First, as shown in FIG. 32, an element isolation region 702, an island region 703, a well region 704, a photodiode PD, a transfer transistor TR, contact regions 705 and 706, conductive pads 864a and 864b, and the like are formed in a semiconductor layer 701.

[0089] Next, as shown in FIG. 32, an insulating layer 720 is formed as a first insulating layer all over the main surface of the semiconductor layer 701 so as to cover the gate electrode 710 and the conductive pads 864a and 864b.

[0090] Next, as shown in FIG. 33, a semiconductor layer 801 is bonded to the main surface side of the semiconductor layer 101 in the same manner as in the first embodiment described above. Specifically, the insulating layer 720 on the main surface side of the semiconductor layer 101 and the insulating film 802 provided on the back surface side of the semiconductor layer 801 are placed face to face and heat treated in a state of being in close contact with each other. As a result, as shown in FIG. 33, the insulating film 802 and the insulating layer 720 are integrated, and the upper semiconductor layer 801 and the lower semiconductor layer 701 are bonded to each other via the insulating film 802 and the insulating layer 720. In addition, the semiconductor layer 801 is disposed on the insulating layer 720. Thereafter, the main surface side of the semiconductor layer 801 is ground by, for example, a CMP method to reduce the thickness of the semiconductor layer 801.

[0091] 34, an amplifier transistor AMP and a select transistor are formed as second active elements in an element formation region corresponding to the island region 803a of the plurality of element formation regions of the semiconductor layer 801 while leaving the element isolation region of the semiconductor layer 801, and a reset transistor RST is formed as a second active element in an element formation region corresponding to the island region 803b of the plurality of element formation regions. These second active elements are formed by a method similar to that of the first embodiment described above.

[0092] Next, an insulating layer 820 is formed as a second insulating layer covering the island regions 803a and 803b. Then, as shown in FIG.

[0093] Next, as shown in FIG. 35, a connection hole 871a is formed from the surface of the insulating layer 820 to the surface of the conductive pad 864a, and a connection hole 871b is formed from the surface of the insulating layer 820 to the conductive pad 864b. Furthermore, the element isolation region of the semiconductor layer 801 is removed by etching to form an island region 803. The island region 803 can be formed in the same process as the formation of the connection holes 871a and 871b. That is, by using a photomask (reticle) having a pattern of the connection holes 871a and 871b and a pattern of the island region 803, the etching for forming the connection holes 871a and 871b and the etching for forming the island region 803 can be performed on the semiconductor layer 801 in the same process. By forming the island region 803 by etching the element isolation region of the semiconductor layer 801, a separation groove 872 is formed between adjacent island regions 803.

[0094] Next, an insulating film 873 such as a silicon oxide film that covers the semiconductor layer 801 in the connection holes 871a, 871b and in the isolation trench 872 is formed by, for example, a CVD method. Then, the insulating film 873 existing on the surface of the insulating layer 820, at the bottoms of the connection holes 871a, 871b, and at the bottom of the isolation trench 872 is selectively removed by, for example, an anisotropic etching technique such as RIE.

[0095] 36, a conductive material 874 is embedded inside the insulating film 873 in the connection holes 871a and 871b to form conductive plugs 875a and 875b made of the conductive material 874 inside the connection holes 871a and 871b, and a conductive material 274 is embedded inside the insulating film 873 in the isolation groove 872. The conductive plugs 875a and 875b are insulated from the semiconductor layer 801 in the connection holes 871a and 871b by the insulating film 873 in the connection holes 871a and 871b. Furthermore, the conductive material 874 in the isolation groove 872 is insulated from the semiconductor layer 801 in the isolation groove 872 by the insulating film 873 in the isolation groove 872.

[0096] Next, using the same method as in the first embodiment described above, connection holes 825a-825c, conductive plugs 826a-826c, wirings 827a-827c, an insulating film 828, wiring 829, etc. are formed, and after bonding the third substrate unit 30, a planarization film 831, a color filter 832, a microlens 833, etc. are formed on the back surface of the semiconductor layer 701. This almost completes the solid-state imaging device 1C according to the fourth embodiment shown in Figures 30 and 31.

[0097] According to the method for manufacturing the solid-state imaging device 1C according to the fourth embodiment of the present technology, it is possible to provide the solid-state imaging device 1C in which the island region 803 in which the second active element is formed is surrounded by a conductive material in a planar manner.

[0098] Furthermore, according to the manufacturing method of the solid-state imaging device 1C of the fourth embodiment of the present technology, the island region can be surrounded by conductive material in the process of forming the conductive plugs 875a, 875b in the connection holes 871a, 871b, thereby reducing the number of manufacturing processes and achieving cost reduction in the solid-state imaging device 1C. In the solid-state imaging device 1C according to the fourth embodiment, the second substrate unit 20 may also be configured to have semiconductor substrates 21 and 21A stacked together (a plurality of semiconductor substrates stacked together) like the second substrate unit 20 shown in Fig. 104 of the tenth embodiment described later. In this case, the conductive plugs 875a and 875b embedded in the through holes 871a and 871b via the insulating film 873 may penetrate the plurality of semiconductor substrates.

[0099] Fifth embodiment <Configuration of solid-state imaging device> The solid-state imaging device 1D according to the fifth embodiment of the present technology has a different pixel unit configuration from the solid-state imaging device 1A according to the first embodiment described above. That is, the pixel unit PU of the solid-state imaging device 1A according to the first embodiment is configured to connect four sensor pixels 12 to one readout circuit. In contrast, the pixel unit of the solid-state imaging device 1D according to the fifth embodiment of the present technology is configured to connect one pixel unit to one readout circuit. As shown in FIG. 37, a conductive path that electrically connects the gate electrode 882 of the amplification transistor AMP of the readout circuit and the contact region 705 that shares the floating diffusion FD of the sensor pixel is also provided for each sensor pixel. The conductive path has a conductive plug 889 embedded inside a connection hole 888 that reaches the surface of the contact region 705 from the surface of an insulating layer 887 as a second insulating layer.

[0100] The amplification transistors AMP are provided in island regions 884 that are obtained by dividing an element formation region of a semiconductor layer 801 serving as a second semiconductor layer. In Fig. 37, the amplification transistors AMP of two adjacent readout circuits are provided in parallel in one island region 884. The amplification transistor AMP has, for example, a gate insulating film 881 made of a thermally oxidized silicon film provided on a main surface of the island region 884, a gate electrode 882 made of a polycrystalline silicon film on the gate insulating film 881, and a source region and a drain region made of a semiconductor region formed in a surface layer portion of the island region 884.

[0101] A through hole 885 penetrating in the vertical direction is provided in the island region 884 corresponding to the conductive plug 889. A sidewall 886 made of a material having a higher etching ratio than an insulating layer 887 covering the island region 884 is provided on the wall surface within the through hole 885 and the side surface on the outer periphery of the island region 884. The conductive plug 889 is formed along the sidewall 886. The sidewall 886 is made of at least one of a SiN film, a SiBN film, and a SiBCN film, which have an etching selectivity to a silicon oxide film.

[0102] <Method of Manufacturing Solid-State Imaging Device> Next, a manufacturing method of the solid-state imaging device 1D according to the fifth embodiment will be described with reference to FIGS. First, as shown in FIG. 38, an element isolation region 702, an island region 703, a well region 704, a photodiode PD, a transfer transistor TR, a contact region 705, and the like are formed in a semiconductor layer 701.

[0103] Next, as shown in FIG. 38, an insulating layer 720 is formed as a first insulating layer all over the main surface of the semiconductor layer 701 so as to cover the gate electrode 710.

[0104] Next, as shown in FIG. 39, a semiconductor layer 801 is bonded to the main surface side of the semiconductor layer 701 in the same manner as in the first embodiment described above. Specifically, the insulating layer 720 on the main surface side of the semiconductor layer 701 and the insulating film 802 on the back surface side of the semiconductor layer 801 are placed face to face and heat treated in a state of being in close contact with each other. As a result, as shown in FIG. 39, the insulating film 802 and the insulating layer 720 are integrated, and the upper semiconductor layer 801 and the lower semiconductor layer 701 are bonded to each other via the insulating film 802 and the insulating layer 720. In addition, the semiconductor layer 801 is disposed on the insulating layer 720. Thereafter, the main surface side of the semiconductor layer 801 is ground by, for example, a CMP method to reduce the thickness of the semiconductor layer 801.

[0105] 40, amplifying transistors AMP are formed as second active elements in a plurality of element formation regions of the semiconductor layer 801 while leaving the element isolation regions of the semiconductor layer 801. In addition, although not shown, a selection transistor and a reset transistor RST are formed as second active elements. These second active elements are formed by the same method as in the first embodiment described above.

[0106] 41, the element formation region of the semiconductor layer 801 is divided into a plurality of island regions 884 by using well-known photolithography technology, anisotropic line etching technology, or the like, and through holes 885 for passing conductive plugs 889 through the island regions 884 are formed. The through holes 885 are disposed at positions overlapping the contact regions 705 in a plan view.

[0107] 42, sidewalls 886 are formed on the sidewalls within the through-holes 885 of the island region 884 and on the sidewalls on the periphery of the island region 884. The sidewalls 886 can be formed, for example, by depositing an insulating film by a CVD method so as to cover the sidewalls within the through-holes 885 of the island region 884 and the sidewalls on the periphery of the island region 884, and then subjecting this insulating film to anisotropic dry etching. The sidewalls 886 are formed, for example, from a silicon nitride film.

[0108] 43, an insulating layer 887 is formed by, for example, a CVD method as a second insulating layer covering the island regions 884 so as to fill the gaps between adjacent island regions 884 and the insides of the sidewalls 886 of the through-holes 885 of the island regions 884. The insulating layer 887 is formed of silicon oxide having selectivity with respect to the sidewalls 886.

[0109] Next, after planarizing the surface of the insulating layer 887, a connection hole 888 is formed that extends from the surface of the insulating layer 887 through the through hole 885 of the island region 884 to the surface of the contact region 705, as shown in Fig. 44. At this time, the formation of the connection hole 888 is performed using a photolithography technique, so that the connection hole 888 is formed along the side wall 886 even if the photoresist pattern is misaligned in a direction that overlaps with the side wall 886 in a planar manner due to misalignment of the mask.

[0110] 45, a conductive material is embedded in the contact hole 888 by the same method as in the first embodiment described above to form a conductive plug 889. Then, a contact hole 825, a conductive plug 826, a wiring 890, an insulating film 828, a wiring 829, and the like are formed by applying the same method as in the first embodiment described above, and after bonding the third substrate unit 30, a planarizing film, a color filter, a microlens, and the like are formed on the rear surface of the semiconductor layer 701. In this way, the solid-state imaging device 1D according to the fifth embodiment shown in FIG. 37 is almost completed.

[0111] According to the manufacturing method of the solid-state imaging device 1D of the fifth embodiment of the present technology, the connection hole 888 is formed along the sidewall 886, and therefore the conductive plug 889 embedded in the connection hole 888 is also formed along the connection hole 888. Therefore, it is possible to reduce the misalignment between the conductive plug 889 and the semiconductor layer (island region 884). On the other hand, the parasitic capacitance parasitic to the conductive plug 889 varies depending on the misalignment between the conductive plug 889 and the semiconductor layer (island region 884). Therefore, according to the manufacturing method of the solid-state imaging device 1D of the fifth embodiment of the present technology, it is possible to reduce the variation in the parasitic capacitance parasitic to the conductive plug 889. Furthermore, the variation in the parasitic capacitance parasitic to the conductive plug 889 affects the variation in the conversion efficiency. Therefore, since the variation in the parasitic capacitance parasitic to the conductive plug 889 can be reduced, the conversion efficiency can be stabilized. In the solid-state imaging device 1D according to the fifth embodiment, the second substrate unit 20 may also be configured to have semiconductor substrates 21 and 21A stacked (multiple semiconductor substrates stacked) like the second substrate unit 20 shown in Fig. 104 of the tenth embodiment described later. In this case, the conductive plug 889 may be formed along the sidewalls 286 formed on each of the multiple semiconductor substrates.

[0112] Sixth embodiment <Configuration of solid-state imaging device> As shown in FIG. 46, a solid-state imaging device 1E according to the sixth embodiment of the present technology has substantially the same configuration as the solid-state imaging device 1D according to the above-described fifth embodiment, but differs in the following configuration.

[0113] That is, the solid-state imaging device 1E according to the sixth embodiment of the present technology includes a low dielectric film 891 between the island region 884 (semiconductor layer) and the sidewall 886, the low dielectric film 891 having a lower dielectric constant than the sidewall 886. As the low dielectric film 891, it is preferable to use a Si-based low dielectric material having a lower N content than the sidewall 886 and containing added B, O, C, etc. Furthermore, the low dielectric film 891 may be a porous film containing air bubbles, or may be a laminated film of two or more layers.

[0114] According to the solid-state imaging device 1E according to the sixth embodiment of the present technology, it is possible to reduce the variation in parasitic capacitance and also the parasitic capacitance itself.

[0115] In the above-described sixth embodiment, as shown in Fig. 47(a), a case has been described in which the conductive plug 889 penetrates the island region 884. However, the present technology is not limited to this, and can be applied, for example, to a case in which the conductive plug 889 passes between two island regions 884 in the vertical direction, as shown in Fig. 47(b). In addition, the present technology can be applied to a case in which two conductive plugs 889 pass individually between the island region 884 and another island region, as shown in Fig. 47(c).

[0116] Seventh embodiment The seventh embodiment will be described in detail below with reference to the drawings. The description will be made in the following order. 1. Embodiment (imaging device having a stacked structure of three substrates) 2. Modification 1 (Planar Configuration Example 1) 3. Modification 2 (Planar Configuration Example 2) 4. Modification 3 (Planar Configuration Example 3) 5. Modification 4 (Example in which a contact portion between substrates is provided in the center of the pixel array portion) 6. Modification 5 (Example having planar type transfer transistor) 7. Modification 6 (Example in which one pixel is connected to one pixel circuit) 8. Modification 7 (Example of the Configuration of the Pixel Separation Unit) 9. Application Examples (Imaging Systems) 10. Application Examples

[0117] <1. Preferred embodiment> [Functional configuration of imaging device 1] FIG. 48 is a block diagram showing an example of a functional configuration of an imaging device (imaging device 1) according to an embodiment of the present disclosure.

[0118] The imaging device 1 in FIG. 48 includes, for example, an input section 510A, a row driver section 520, a timing control section 530, a pixel array section 540, a column signal processing section 550, an image signal processing section 560, and an output section 510B.

[0119] In the pixel array section 540, pixels 541 are repeatedly arranged in an array. More specifically, a pixel sharing unit 539 including a plurality of pixels is a repeating unit, and this is repeatedly arranged in an array having a row direction and a column direction. In this specification, for convenience, the row direction may be called the H direction, and the column direction perpendicular to the row direction may be called the V direction. In the example of FIG. 48, one pixel sharing unit 539 includes four pixels (pixels 541A, 541B, 541C, and 541D). Each of the pixels 541A, 541B, 541C, and 541D has a photodiode PD (illustrated in FIG. 53, etc., which will be described later). The pixel sharing unit 539 is a unit that shares one pixel circuit (pixel circuit 210 in FIG. 50, which will be described later). In other words, one pixel circuit (pixel circuit 210, which will be described later) is included for every four pixels (pixels 541A, 541B, 541C, and 541D). By operating this pixel circuit in a time-division manner, pixel signals of the pixels 541A, 541B, 541C, and 541D are sequentially read out. The pixels 541A, 541B, 541C, and 541D are arranged in, for example, 2 rows and 2 columns. In the pixel array section 540, a plurality of row driving signal lines 542 and a plurality of vertical signal lines (column readout lines) 543 are provided in addition to the pixels 541A, 541B, 541C, and 541D. The row driving signal line 542 drives the pixels 541 included in each of a plurality of pixel sharing units 539 arranged in a row direction in the pixel array section 540. The row driving signal line 542 drives each pixel arranged in a row direction among the pixel sharing units 539. As will be described in detail later with reference to FIG. 51, the pixel sharing unit 539 is provided with a plurality of transistors. In order to drive each of these transistors, a plurality of row driving signal lines 542 are connected to one pixel sharing unit 539. The pixel sharing unit 539 is connected to the vertical signal line (column readout line) 543. Pixel signals are read out via the vertical signal line (column readout line) 543 from each of the pixels 541A, 541B, 541C, and 541D included in the pixel sharing unit 539.

[0120] The row driving unit 520 includes, for example, a row address control unit that determines the position of the row for pixel driving, in other words, a row decoder unit, and a row driving circuit unit that generates signals for driving the pixels 541A, 541B, 541C, and 541D.

[0121] The column signal processing unit 550 includes, for example, a load circuit unit that is connected to the vertical signal line 543 and forms a source follower circuit together with the pixels 541A, 541B, 541C, and 541D (pixel sharing units 539). The column signal processing unit 550 may include an amplifier circuit unit that amplifies a signal read out from the pixel sharing unit 539 via the vertical signal line 543. The column signal processing unit 550 may include a noise processing unit. In the noise processing unit, for example, a system noise level is removed from the signal read out from the pixel sharing unit 539 as a result of photoelectric conversion.

[0122] The column signal processing unit 550 has, for example, an analog-to-digital converter (ADC). In the analog-to-digital converter, the signal read from the pixel sharing unit 539 or the analog signal that has been subjected to the noise processing is converted into a digital signal. The ADC includes, for example, a comparator unit and a counter unit. In the comparator unit, the analog signal to be converted is compared with a reference signal to be compared therewith. In the counter unit, the time until the comparison result in the comparator unit is inverted is measured. The column signal processing unit 550 may include a horizontal scanning circuit unit that controls scanning of the readout column.

[0123] The timing control section 530 supplies signals for controlling timing to the row driving section 520 and the column signal processing section 550 based on a reference clock signal and a timing control signal input to the device.

[0124] The image signal processing unit 560 is a circuit that performs various signal processing on data obtained as a result of photoelectric conversion, in other words, data obtained as a result of the imaging operation in the imaging device 1. The image signal processing unit 560 includes, for example, an image signal processing circuit unit and a data holding unit. The image signal processing unit 560 may also include a processor unit.

[0125] One example of signal processing executed by the image signal processing unit 560 is a tone curve correction process that imparts more gradation to the AD converted imaging data when the data is of a dark subject, and reduces the gradation when the data is of a bright subject. In this case, it is desirable to store in advance in the data storage unit of the image signal processing unit 560 characteristic data of the tone curve based on which the gradation of the imaging data is to be corrected.

[0126] The input section 510A is for inputting, for example, the above-mentioned reference clock signal, timing control signal, characteristic data, and the like from outside the device to the imaging device 1. The timing control signal is, for example, a vertical synchronization signal and a horizontal synchronization signal. The characteristic data is, for example, for storage in a data holding section of the image signal processing section 560. The input section 510A includes, for example, an input terminal 511, an input circuit section 512, an input amplitude changing section 513, an input data conversion circuit section 514, and a power supply section (not shown).

[0127] The input terminal 511 is an external terminal for inputting data. The input circuit unit 512 is for taking in the signal input to the input terminal 511 into the inside of the imaging device 1. The input amplitude change unit 513 changes the amplitude of the signal taken in by the input circuit unit 512 to an amplitude that is easily used inside the imaging device 1. The input data conversion circuit unit 514 changes the arrangement of the data string of the input data. The input data conversion circuit unit 514 is composed of, for example, a serial-parallel conversion circuit. In this serial-parallel conversion circuit, a serial signal received as input data is converted into a parallel signal. Note that, in the input unit 510A, the input amplitude change unit 513 and the input data conversion circuit unit 514 may be omitted. The power supply unit supplies power set to various voltages required inside the imaging device 1 based on a power source supplied from the outside to the imaging device 1.

[0128] When the imaging device 1 is connected to an external memory device, the input unit 510A may be provided with a memory interface circuit that receives data from the external memory device. The external memory device may be, for example, a flash memory, an SRAM, or a DRAM.

[0129] The output unit 510B outputs image data to the outside of the device. This image data is, for example, image data captured by the imaging device 1 and image data signal-processed by the image signal processing unit 560. The output unit 510B includes, for example, an output data conversion circuit unit 515, an output amplitude change unit 516, an output circuit unit 517, and an output terminal 518.

[0130] The output data conversion circuit unit 515 is configured, for example, by a parallel-serial conversion circuit, and the output data conversion circuit unit 515 converts the parallel signal used inside the imaging device 1 into a serial signal. The output amplitude change unit 516 changes the amplitude of the signal used inside the imaging device 1. The signal with the changed amplitude can be easily used by an external device connected to the outside of the imaging device 1. The output circuit unit 517 is a circuit that outputs data from inside the imaging device 1 to the outside of the device, and the output circuit unit 517 drives a wiring outside the imaging device 1 connected to an output terminal 518. The output terminal 518 outputs data from the imaging device 1 to the outside of the device. In the output unit 510B, the output data conversion circuit unit 515 and the output amplitude change unit 516 may be omitted.

[0131] When the imaging device 1 is connected to an external memory device, the output unit 510B may be provided with a memory interface circuit that outputs data to the external memory device. The external memory device may be, for example, a flash memory, an SRAM, or a DRAM.

[0132] [Schematic configuration of imaging device 1] FIG. 49 and FIG. 50 show an example of a schematic configuration of the imaging device 1. The imaging device 1 includes three substrates (a first substrate 100, a second substrate 200, and a third substrate 300). FIG. 49 shows a schematic planar configuration of each of the first substrate 100, the second substrate 200, and the third substrate 300, and FIG. 50 shows a schematic cross-sectional configuration of the first substrate 100, the second substrate 200, and the third substrate 300 stacked on top of each other. FIG. 50 corresponds to the cross-sectional configuration along line III-III' shown in FIG. 49. The imaging device 1 is a three-dimensional imaging device formed by bonding three substrates (the first substrate 100, the second substrate 200, and the third substrate 300). The first substrate 100 includes a semiconductor layer 100S and a wiring layer 100T. The second substrate 200 includes a semiconductor layer 200S and a wiring layer 200T. The third substrate 300 includes a semiconductor layer 300S and a wiring layer 300T. Here, the combination of the wiring included in each of the first substrate 100, the second substrate 200, and the third substrate 300 and the interlayer insulating film around it is called the wiring layer (100T, 200T, 300T) provided on each substrate (the first substrate 100, the second substrate 200, and the third substrate 300) for convenience. The first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order, and the semiconductor layer 100S, the wiring layer 100T, the semiconductor layer 200S, the wiring layer 200T, the wiring layer 300T, and the semiconductor layer 300S are arranged in this order along the stacking direction. The specific configurations of the first substrate 100, the second substrate 200, and the third substrate 300 will be described later. The arrow shown in FIG. 50 indicates the incident direction of the light L to the imaging device 1. In this specification, for convenience, in the following cross-sectional views, the light incident side of the imaging device 1 may be referred to as "bottom", "lower side", or "downward", and the side opposite the light incident side may be referred to as "upper side", "upper side", or "upper". Also, in this specification, for convenience, with respect to a substrate having a semiconductor layer and a wiring layer, the wiring layer side may be referred to as the front side, and the semiconductor layer side may be referred to as the back side. Note that the description in the specification is not limited to the above names. The imaging device 1 is, for example, a back-illuminated imaging device in which light is incident from the back side of the first substrate 100 having a photodiode.

[0133] The pixel array section 540 and the pixel sharing unit 539 included in the pixel array section 540 are both configured using both the first substrate 100 and the second substrate 200. The first substrate 100 is provided with a plurality of pixels 541A, 541B, 541C, and 541D that the pixel sharing unit 539 has. Each of these pixels 541 has a photodiode (a photodiode PD described later) and a transfer transistor (a transfer transistor TR described later). The second substrate 200 is provided with a pixel circuit (a pixel circuit 210 described later) that the pixel sharing unit 539 has. The pixel circuit reads out pixel signals transferred from the photodiodes of the pixels 541A, 541B, 541C, and 541D via the transfer transistors, or resets the photodiodes. In addition to such pixel circuits, the second substrate 200 has a plurality of row driving signal lines 542 extending in the row direction and a plurality of vertical signal lines 543 extending in the column direction. The second substrate 200 further has a power supply line 544 extending in the row direction. The third substrate 300 has, for example, an input section 510A, a row driver 520, a timing control section 530, a column signal processing section 550, an image signal processing section 560, and an output section 510B. The row driver 520 is provided, for example, in a region partially overlapping the pixel array section 540 in the stacking direction (hereinafter simply referred to as the stacking direction) of the first substrate 100, the second substrate 200, and the third substrate 300. More specifically, the row driver 520 is provided in a region overlapping the vicinity of an end of the pixel array section 540 in the H direction in the stacking direction (FIG. 49). The column signal processing section 550 is provided, for example, in a region partially overlapping the pixel array section 540 in the stacking direction. More specifically, the column signal processing section 550 is provided in a region overlapping with the vicinity of an end portion in the V direction of the pixel array section 540 in the stacking direction (FIG. 49). Although not shown, the input section 510A and the output section 510B may be provided in a portion other than the third substrate 300, for example, on the second substrate 200. Alternatively, the input section 510A and the output section 510B may be provided on the back surface (light incident surface) side of the first substrate 100.The pixel circuits provided on the second substrate 200 may also be called pixel transistor circuits, pixel transistor groups, pixel transistors, pixel readout circuits, or readout circuits. In this specification, the term pixel circuits is used.

[0134] The first substrate 100 and the second substrate 200 are electrically connected by, for example, through electrodes (through electrodes 120E, 121E in FIG. 53 described later). The second substrate 200 and the third substrate 300 are electrically connected by, for example, contact portions 201, 202, 301, 302. The second substrate 200 is provided with contact portions 201, 202, and the third substrate 300 is provided with contact portions 301, 302. The contact portion 201 of the second substrate 200 contacts the contact portion 301 of the third substrate 300, and the contact portion 202 of the second substrate 200 contacts the contact portion 302 of the third substrate 300. The second substrate 200 has a contact region 201R in which a plurality of contact portions 201 are provided, and a contact region 202R in which a plurality of contact portions 202 are provided. The third substrate 300 has a contact region 301R in which a plurality of contact parts 301 are provided, and a contact region 302R in which a plurality of contact parts 302 are provided. The contact regions 201R, 301R are provided between the pixel array section 540 and the row driver section 520 in the stacking direction (FIG. 50). In other words, the contact regions 201R, 301R are provided, for example, in a region where the row driver section 520 (third substrate 300) and the pixel array section 540 (second substrate 200) overlap in the stacking direction, or in a region adjacent thereto. The contact regions 201R, 301R are disposed, for example, at the end in the H direction of such a region (FIG. 49). In the third substrate 300, for example, the contact region 301R is provided at a position overlapping a part of the row driver section 520, specifically, the end in the H direction of the row driver section 520 (FIGS. 49 and 50). The contact sections 201 and 301 connect, for example, the row driving section 520 provided on the third substrate 300 and the row driving line 542 provided on the second substrate 200. The contact sections 201 and 301 may connect, for example, the input section 510A provided on the third substrate 300 to a power supply line 544 and a reference potential line (a reference potential line VSS described later). The contact regions 202R and 302R are provided between the pixel array section 540 and the column signal processing section 550 in the stacking direction (FIG. 50).In other words, the contact regions 202R and 302R are provided in, for example, a region where the column signal processing section 550 (the third substrate 300) and the pixel array section 540 (the second substrate 200) overlap in the stacking direction, or in a region adjacent thereto. The contact regions 202R and 302R are arranged, for example, at the end in the V direction of such a region (FIG. 49). In the third substrate 300, for example, the contact region 301R is provided at a position overlapping a part of the column signal processing section 550, specifically, an end in the V direction of the column signal processing section 550 (FIGS. 49 and 50). The contact sections 202 and 302 are for connecting, for example, pixel signals (signals corresponding to the amount of charge generated as a result of photoelectric conversion in the photodiodes) output from each of the multiple pixel sharing units 539 of the pixel array section 540 to the column signal processing section 550 provided on the third substrate 300. The pixel signals are sent from the second substrate 200 to the third substrate 300.

[0135] FIG. 50 is an example of a cross-sectional view of the imaging device 1 as described above. The first substrate 100, the second substrate 200, and the third substrate 300 are electrically connected via wiring layers 100T, 200T, and 300T. For example, the imaging device 1 has an electrical connection portion that electrically connects the second substrate 200 and the third substrate 300. Specifically, the contact portions 201, 202, 301, and 302 are formed with electrodes formed of a conductive material. The conductive material is formed of a metal material such as copper (Cu), aluminum (Al), and gold (Au). The contact regions 201R, 202R, 301R, and 302R electrically connect the second substrate and the third substrate by directly joining wirings formed as electrodes, for example, to each other, thereby enabling input and / or output of signals between the second substrate 200 and the third substrate 300.

[0136] The electrical connection portion that electrically connects the second substrate 200 and the third substrate 300 can be provided at a desired location. For example, as described as the contact regions 201R, 202R, 301R, and 302R in FIG. 50, the electrical connection portion may be provided in a region that overlaps with the pixel array section 540 in the stacking direction. The electrical connection portion may also be provided in a region that does not overlap with the pixel array section 540 in the stacking direction. Specifically, the electrical connection portion may be provided in a region that overlaps with a peripheral portion disposed outside the pixel array section 540 in the stacking direction.

[0137] The first substrate 100 and the second substrate 200 are provided with, for example, connection holes H1 and H2. The connection holes H1 and H2 penetrate the first substrate 100 and the second substrate 200 (FIG. 50). The connection holes H1 and H2 are provided outside the pixel array section 540 (or a portion overlapping the pixel array section 540) (FIG. 49). For example, the connection hole H1 is disposed outside the pixel array section 540 in the H direction, and the connection hole H2 is disposed outside the pixel array section 540 in the V direction. For example, the connection hole H1 reaches the input section 510A provided on the third substrate 300, and the connection hole H2 reaches the output section 510B provided on the third substrate 300. The connection holes H1 and H2 may be hollow or may contain a conductive material at least in part. For example, there is a configuration in which a bonding wire is connected to an electrode formed as the input section 510A and / or the output section 510B. Alternatively, there is a configuration in which an electrode formed as the input section 510A and / or the output section 510B is connected to a conductive material provided in the connection holes H1, H2. The conductive material provided in the connection holes H1, H2 may be embedded in a part or all of the connection holes H1, H2, or the conductive material may be formed on the side walls of the connection holes H1, H2.

[0138] 50, the input unit 510A and the output unit 510B are provided on the third substrate 300, but the present invention is not limited to this. For example, the input unit 510A and / or the output unit 510B can be provided on the second substrate 200 by sending a signal of the third substrate 300 to the second substrate 200 via the wiring layers 200T and 300T. Similarly, the input unit 510A and / or the output unit 510B can be provided on the first substrate 100 by sending a signal of the second substrate 200 to the first substrate 1000 via the wiring layers 100T and 200T.

[0139] FIG. 51 is an equivalent circuit diagram showing an example of the configuration of the pixel sharing unit 539. The pixel sharing unit 539 includes a plurality of pixels 541 (four pixels 541, 541A, 541B, 541C, and 541D, are shown in FIG. 51), one pixel circuit 210 connected to the plurality of pixels 541, and a vertical signal line 5433 connected to the pixel circuit 210. The pixel circuit 210 includes, for example, four transistors, specifically, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FD. As described above, the pixel sharing unit 539 is configured to sequentially output pixel signals of the four pixels 541 (pixels 541A, 541B, 541C, and 541D) included in the pixel sharing unit 539 to the vertical signal line 543 by operating one pixel circuit 210 in a time-division manner. A state in which one pixel circuit 210 is connected to multiple pixels 541 and the pixel signals of the multiple pixels 541 are output in a time-division manner by the single pixel circuit 210 is said to be "multiple pixels 541 sharing one pixel circuit 210."

[0140] The pixels 541A, 541B, 541C, and 541D have components in common with each other. Hereinafter, in order to distinguish the components of the pixels 541A, 541B, 541C, and 541D from each other, the identification number 1 is added to the end of the reference numeral of the component of the pixel 541A, the identification number 2 is added to the end of the reference numeral of the component of the pixel 541B, the identification number 3 is added to the end of the reference numeral of the component of the pixel 541C, and the identification number 4 is added to the end of the reference numeral of the component of the pixel 541D. When it is not necessary to distinguish the components of the pixels 541A, 541B, 541C, and 541D from each other, the identification numbers at the end of the reference numerals of the components of the pixels 541A, 541B, 541C, and 541D are omitted.

[0141] The pixels 541A, 541B, 541C, and 541D each have, for example, a photodiode PD, a transfer transistor TR electrically connected to the photodiode PD, and a floating diffusion FD electrically connected to the transfer transistor TR. In the photodiodes PD (PD1, PD2, PD3, and PD4), the cathode is electrically connected to the source of the transfer transistor TR, and the anode is electrically connected to a reference potential line (for example, ground). The photodiode PD photoelectrically converts incident light and generates a charge according to the amount of light received. The transfer transistors TR (transfer transistors TR1, TR2, TR3, and TR4) are, for example, n-type CMOS (Complementary Metal Oxide Semiconductor) transistors. In the transfer transistor TR, the drain is electrically connected to the floating diffusion FD, and the gate is electrically connected to a drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 (see FIG. 48) connected to one pixel sharing unit 539. The transfer transistor TR transfers the charge generated in the photodiode PD to the floating diffusion FD. The floating diffusion FD (floating diffusions FD1, FD2, FD3, FD4) is an n-type diffusion layer region formed in a p-type semiconductor layer. The floating diffusion FD is a charge holding means that temporarily holds the charge transferred from the photodiode PD, and is also a charge-voltage conversion means that generates a voltage according to the amount of charge.

[0142] The four floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) included in one pixel shared unit 539 are electrically connected to each other and to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG. The drain of the FD conversion gain switching transistor FDG is connected to the source of the reset transistor RST, and the gate of the FD conversion gain switching transistor FDG is connected to a drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 connected to one pixel shared unit 539. The drain of the reset transistor RST is connected to a power supply line VDD, and the gate of the reset transistor RST is connected to the drive signal line. This drive signal line is a part of a plurality of row drive signal lines 542 connected to one pixel shared unit 539. The gate of the amplification transistor AMP is connected to the floating diffusion FD, the drain of the amplification transistor AMP is connected to the power supply line VDD, and the source of the amplification transistor AMP is connected to the drain of the selection transistor SEL. The source of the selection transistor SEL is connected to a vertical signal line 543, and the gate of the selection transistor SEL is connected to the drive signal line. This drive signal line is part of a plurality of row drive signal lines 542 connected to one pixel sharing unit 539 .

[0143] When the transfer transistor TR is turned on, the transfer transistor TR transfers the charge of the photodiode PD to the floating diffusion FD. The gate (transfer gate TG) of the transfer transistor TR includes, for example, a so-called vertical electrode, and is provided extending from the surface of the semiconductor layer (semiconductor layer 100S in FIG. 53 described later) to a depth reaching the PD, as shown in FIG. 53 described later. The reset transistor RST resets the potential of the floating diffusion FD to a predetermined potential. When the reset transistor RST is turned on, the potential of the floating diffusion FD is reset to the potential of the power supply line VDD. The selection transistor SEL controls the output timing of the pixel signal from the pixel circuit 210. The amplification transistor AMP generates, as the pixel signal, a signal of a voltage according to the level of the charge held in the floating diffusion FD. The amplification transistor AMP is connected to the vertical signal line 543 via the selection transistor SEL. In the column signal processing unit 550, the amplification transistor AMP configures a source follower together with a load circuit unit (see FIG. 48) connected to the vertical signal line 543. When the selection transistor SEL is turned on, the amplification transistor AMP outputs the voltage of the floating diffusion FD to the column signal processing unit 550 via the vertical signal line 543. The reset transistor RST, the amplification transistor AMP, and the selection transistor SEL are, for example, N-type CMOS transistors.

[0144] The FD conversion gain switching transistor FDG is used to change the gain of the charge-voltage conversion in the floating diffusion FD. In general, the pixel signal is small when shooting in a dark place. Based on Q=CV, when performing charge-voltage conversion, if the capacitance (FD capacitance C) of the floating diffusion FD is large, V when converted to voltage by the amplification transistor AMP will be small. On the other hand, in a bright place, the pixel signal becomes large, so if the FD capacitance C is not large, the floating diffusion FD cannot receive the charge of the photodiode PD. Furthermore, the FD capacitance C needs to be large so that V when converted to voltage by the amplification transistor AMP does not become too large (in other words, so that it becomes small). In consideration of this, when the FD conversion gain switching transistor FDG is turned on, the gate capacitance of the FD conversion gain switching transistor FDG increases, so the overall FD capacitance C becomes large. On the other hand, when the FD conversion gain switching transistor FDG is turned off, the overall FD capacitance C becomes small. In this way, by switching the FD conversion gain switching transistor FDG on and off, the FD capacitance C can be made variable and the conversion efficiency can be switched. The FD conversion gain switching transistor FDG is, for example, an N-type CMOS transistor.

[0145] It is also possible to configure the pixel circuit 210 without providing the FD conversion gain switching transistor FDG. In this case, for example, the pixel circuit 210 is composed of three transistors, for example, an amplification transistor AMP, a selection transistor SEL, and a reset transistor RST. The pixel circuit 210 has at least one pixel transistor, for example, an amplification transistor AMP, a selection transistor SEL, a reset transistor RST, and an FD conversion gain switching transistor FDG.

[0146] The selection transistor SEL may be provided between the power supply line VDD and the amplification transistor AMP. In this case, the drain of the reset transistor RST is electrically connected to the power supply line VDD and the drain of the selection transistor SEL. The source of the selection transistor SEL is electrically connected to the drain of the amplification transistor AMP, and the gate of the selection transistor SEL is electrically connected to the row drive signal line 542 (see FIG. 48). The source of the amplification transistor AMP (the output terminal of the pixel circuit 210) is electrically connected to the vertical signal line 543, and the gate of the amplification transistor AMP is electrically connected to the source of the reset transistor RST. Although not shown in the figure, the number of pixels 541 sharing one pixel circuit 210 may be other than four. For example, two or eight pixels 541 may share one pixel circuit 210.

[0147] FIG. 52 shows an example of a connection between a plurality of pixel sharing units 539 and a vertical signal line 543. For example, four pixel sharing units 539 arranged in a column direction are divided into four groups, and a vertical signal line 543 is connected to each of the four groups. For the sake of simplicity, FIG. 52 shows an example in which each of the four groups has one pixel sharing unit 539, but each of the four groups may include a plurality of pixel sharing units 539. In this way, in the imaging device 1, a plurality of pixel sharing units 539 arranged in a column direction may be divided into groups including one or more pixel sharing units 539. For example, a vertical signal line 543 and a column signal processing circuit 550 are connected to each of the groups, so that pixel signals can be read out simultaneously from each group. Alternatively, in the imaging device 1, one vertical signal line 543 may be connected to a plurality of pixel sharing units 539 arranged in a column direction. In this case, pixel signals are read out sequentially in a time-division manner from the plurality of pixel sharing units 539 connected to one vertical signal line 543.

[0148] [Specific configuration of imaging device 1] FIG. 53 shows an example of a cross-sectional configuration perpendicular to the main surfaces of the first substrate 100, the second substrate 100, and the third substrate 300 of the imaging device 1. FIG. 53 is a schematic representation for making it easier to understand the positional relationship of the components, and may differ from the actual cross section. In the imaging device 1, the first substrate 100, the second substrate 200, and the third substrate 300 are stacked in this order. The imaging device 1 further has a light receiving lens 401 on the back side (light incident surface side) of the first substrate 100. A color filter layer (not shown) may be provided between the light receiving lens 401 and the first substrate 100. The light receiving lens 401 is provided, for example, for each of the pixels 541A, 541B, 541C, and 541D. The imaging device 1 is, for example, a back-illuminated imaging device. The imaging device 1 has a pixel array section 540 arranged in the center and a peripheral section 540B arranged outside the pixel array section 540.

[0149] The first substrate 100 has, in order from the light receiving lens 401 side, an insulating film 111, a fixed charge film 112, a semiconductor layer 100S, and a wiring layer 100T. The semiconductor layer 100S is made of, for example, a silicon substrate. The semiconductor layer 100S has, for example, a p-well layer 115 in a part of the surface (the surface on the wiring layer 100T side) and in the vicinity thereof, and has an n-type semiconductor region 114 in the other region (region deeper than the p-well layer 115). For example, the n-type semiconductor region 114 and the p-well layer 115 form a pn junction type photodiode PD. The p-well layer 115 is a p-type semiconductor region.

[0150] Fig. 54A shows an example of a planar configuration of the first substrate 100. Fig. 54A mainly shows the planar configuration of the pixel separation portion 117, the photodiode PD, the floating diffusion FD, the VSS contact region 118, and the transfer transistor TR of the first substrate 100. The configuration of the first substrate 100 will be described using Fig. 54A together with Fig. 53.

[0151] A floating diffusion FD and a VSS contact region 118 are provided near the surface of the semiconductor layer 100S. The floating diffusion FD is composed of an n-type semiconductor region provided in the p-well layer 115. The floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) of the pixels 541A, 541B, 541C, and 541D are provided close to each other in the center of the pixel shared unit 539 (FIG. 54A). Although details will be described later, the four floating diffusions (floating diffusions FD1, FD2, FD3, FD4) included in this shared unit 539 are electrically connected to each other via electrical connection means (pad section 120 described later) in the first substrate 100 (more specifically, in the wiring layer 100T). Furthermore, the floating diffusion FD is connected from the first substrate 100 to the second substrate 200 (more specifically, from the wiring layer 100T to the wiring layer 200T) via an electrical means (a through electrode 120E described below). In the second substrate 200 (more specifically, inside the wiring layer 200T), the floating diffusion FD is electrically connected to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG by this electrical means.

[0152] The VSS contact region 118 is a region electrically connected to the reference potential line VSS, and is arranged apart from the floating diffusion FD. For example, in the pixels 541A, 541B, 541C, and 541D, the floating diffusion FD is arranged at one end of each pixel in the V direction, and the VSS contact region 118 is arranged at the other end (FIG. 54A). The VSS contact region 118 is, for example, composed of a p-type semiconductor region. The VSS contact region 118 is connected to, for example, a ground potential or a fixed potential. This allows a reference potential to be supplied to the semiconductor layer 100S.

[0153] The first substrate 100 is provided with a transfer transistor TR together with a photodiode PD, a floating diffusion FD, and a VSS contact region 118. The photodiode PD, the floating diffusion FD, the VSS contact region 118, and the transfer transistor TR are provided in each of the pixels 541A, 541B, 541C, and 541D. The transfer transistor TR is provided on the front surface side (the side opposite to the light incident surface side, the second substrate 200 side) of the semiconductor layer 100S. The transfer transistor TR has a transfer gate TG. The transfer gate TG includes, for example, a horizontal portion TGb facing the front surface of the semiconductor layer 100S and a vertical portion TGa provided in the semiconductor layer 100S. The vertical portion TGa extends in the thickness direction of the semiconductor layer 100S. One end of the vertical portion TGa is in contact with the horizontal portion TGb, and the other end is provided in the n-type semiconductor region 114. By configuring the transfer transistor TR with such a vertical transistor, transfer failure of pixel signals is less likely to occur, and the readout efficiency of pixel signals can be improved.

[0154] The horizontal part TGb of the transfer gate TG extends from a position facing the vertical part TGa toward, for example, the center of the pixel sharing unit 539 in the H direction (FIG. 54A). This allows the H direction position of the through electrode (through electrode TGV described below) that reaches the transfer gate TG to be close to the H direction positions of the through electrodes (through electrodes 120E, 121E described below) connected to the floating diffusion FD and the VSS contact region 118. For example, the multiple pixel sharing units 539 provided on the first substrate 100 have the same configuration (FIG. 54A).

[0155] The semiconductor layer 100S is provided with a pixel separator 117 that separates the pixels 541A, 541B, 541C, and 541D from one another. The pixel separator 117 is formed extending in a normal direction (perpendicular to the surface of the semiconductor layer 100S) of the semiconductor layer 100S. The pixel separator 117 is provided to separate the pixels 541A, 541B, 541C, and 541D from one another, and has, for example, a lattice-like planar shape (FIGS. 54A and 54B). The pixel separator 117 electrically and optically separates the pixels 541A, 541B, 541C, and 541D from one another. The pixel separator 117 includes, for example, a light-shielding film 117A and an insulating film 117B. The light-shielding film 117A is made of, for example, tungsten (W) or the like. The insulating film 117B is provided between the light shielding film 117A and the p-well layer 115 or the n-type semiconductor region 114. The insulating film 117B is made of, for example, silicon oxide (SiO). The pixel separator 117 has, for example, a full trench isolation (FTI) structure and penetrates the semiconductor layer 100S. Although not shown, the pixel separator 117 is not limited to an FTI structure that penetrates the semiconductor layer 100S. For example, it may have a deep trench isolation (DTI) structure that does not penetrate the semiconductor layer 100S. The pixel separator 117 extends in the normal direction of the semiconductor layer 100S and is formed in a partial region of the semiconductor layer 100S.

[0156] The semiconductor layer 100S is provided with, for example, a first pinning region 113 and a second pinning region 116. The first pinning region 113 is provided near the back surface of the semiconductor layer 100S, and is disposed between the n-type semiconductor region 114 and the fixed charge film 112. The second pinning region 116 is provided on a side surface of the pixel separating section 117, specifically, between the pixel separating section 117 and the p-well layer 115 or the n-type semiconductor region 114. The first pinning region 113 and the second pinning region 116 are formed of, for example, a p-type semiconductor region.

[0157] A fixed charge film 112 having a negative fixed charge is provided between the semiconductor layer 100S and the insulating film 111. A first pinning region 113 of the hole accumulation layer is formed at the interface on the light-receiving surface (rear surface) side of the semiconductor layer 100S due to an electric field induced by the fixed charge film 112. This suppresses the generation of dark current due to the interface state on the light-receiving surface side of the semiconductor layer 100S. The fixed charge film 112 is formed, for example, of an insulating film having a negative fixed charge. Examples of materials for the insulating film having a negative fixed charge include hafnium oxide, zirconium oxide, aluminum oxide, titanium oxide, and tantalum oxide.

[0158] A light-shielding film 117A is provided between the fixed charge film 112 and the insulating film 111. This light-shielding film 117A may be provided continuously with the light-shielding film 117A constituting the pixel separating section 117. The light-shielding film 117A between the fixed charge film 112 and the insulating film 111 is selectively provided, for example, at a position facing the pixel separating section 117 in the semiconductor layer 100S. The insulating film 111 is provided so as to cover this light-shielding film 117A. The insulating film 111 is made of, for example, silicon oxide.

[0159] The wiring layer 100T provided between the semiconductor layer 100S and the second substrate 200 has an interlayer insulating film 119, pad portions 120 and 121, a passivation film 122, an interlayer insulating film 123, and a bonding film 124 in this order from the semiconductor layer 100S side. The horizontal portion TGb of the transfer gate TG is provided in this wiring layer 100T, for example. The interlayer insulating film 119 is provided over the entire surface of the semiconductor layer 100S and is in contact with the semiconductor layer 100S. The interlayer insulating film 119 is made of, for example, a silicon oxide film. The configuration of the wiring layer 100T is not limited to the above, and may be any configuration having wiring and an insulating film.

[0160] FIG. 54B shows the configuration of the pad sections 120 and 121 together with the planar configuration shown in FIG. 54A. The pad sections 120 and 121 are provided in selective regions on the interlayer insulating film 119. The pad section 120 is for connecting the floating diffusions FD (floating diffusions FD1, FD2, FD3, and FD4) of the pixels 541A, 541B, 541C, and 541D to each other. The pad section 120 is disposed, for example, in the center of the pixel sharing unit 539 in plan view for each pixel sharing unit 539 (FIG. 54B). The pad section 120 is disposed so as to straddle the pixel separating section 117, and is disposed so as to overlap at least a portion of each of the floating diffusions FD1, FD2, FD3, and FD4 (FIGS. 53 and 54B). Specifically, the pad section 120 is formed in a region that overlaps at least a portion of each of the plurality of floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) that share the pixel circuit 210 and at least a portion of the pixel separation section 117 formed between the plurality of photodiodes PD (photodiodes PD1, PD2, PD3, PD4) that share the pixel circuit 210 in a direction perpendicular to the surface of the semiconductor layer 100S. The interlayer insulating film 119 is provided with a connection via 120C for electrically connecting the pad section 120 and the floating diffusions FD1, FD2, FD3, FD4. The connection via 120C is provided in each of the pixels 541A, 541B, 541C, 541D. For example, a portion of the pad section 120 is embedded in the connection via 120C, so that the pad section 120 and the floating diffusions FD1, FD2, FD3, FD4 are electrically connected.

[0161] The pad portion 121 is for connecting the multiple VSS contact regions 118 to each other. For example, the VSS contact regions 118 provided in the pixels 541C and 541D of one pixel sharing unit 539 adjacent to each other in the V direction and the VSS contact regions 118 provided in the pixels 541A and 541B of the other pixel sharing unit 539 are electrically connected by the pad portion 121. The pad portion 121 is provided, for example, so as to straddle the pixel separation portion 117, and is arranged so as to overlap at least a part of each of the four VSS contact regions 118. Specifically, the pad portion 121 is formed in a region that overlaps at least a part of each of the multiple VSS contact regions 118 and at least a part of the pixel separation portion 117 formed between the multiple VSS contacts 118 in a direction perpendicular to the surface of the semiconductor layer 100S. The interlayer insulating film 119 is provided with a connection via 121C for electrically connecting the pad portion 121 and the VSS contact region 118. The connection via 121C is provided in each of the pixels 541A, 541B, 541C, and 541D. For example, a part of the pad portion 121 is embedded in the connection via 121C, thereby electrically connecting the pad portion 121 and the VSS contact region 118. For example, the pad portions 120 and 121 of the multiple pixel sharing units 539 aligned in the V direction are disposed at approximately the same position in the H direction ( FIG. 54B ).

[0162] By providing the pad section 120, it is possible to reduce the wiring for connecting each floating diffusion FD to the pixel circuit 210 (for example, the gate electrode of the amplification transistor AMP) in the entire chip. Similarly, by providing the pad section 121, it is possible to reduce the wiring for supplying a potential to each VSS contact region 118 in the entire chip. This makes it possible to reduce the area of ​​the entire chip, suppress electrical interference between wiring in miniaturized pixels, and / or reduce costs by reducing the number of components.

[0163] The pads 120 and 121 can be provided at desired positions on the first substrate 100 and the second substrate 200. Specifically, the pads 120 and 121 can be provided on either the wiring layer 100T or the insulating region 212 of the semiconductor layer 200S. When provided on the wiring layer 100T, the pads 120 and 121 may be directly in contact with the semiconductor layer 100S. Specifically, the pads 120 and 121 may be directly connected to at least a part of each of the floating diffusion FD and / or the VSS contact region 118. Alternatively, the pads 120 and 121 may be provided at desired positions in the insulating region 2112 of the wiring layer 100T and the semiconductor layer 200S by providing connection vias 120C and 121C from each of the floating diffusion FD and / or the VSS contact region 118 connected to the pads 120 and 121.

[0164] In particular, when the pad portions 120, 121 are provided in the wiring layer 100T, it is possible to reduce the number of wirings connected to the floating diffusion FD and / or the VSS contact region 118 in the insulating region 212 of the semiconductor layer 200S. This makes it possible to reduce the area of ​​the insulating region 212 for forming the through wiring for connecting the floating diffusion FD to the pixel circuit 210, among the second substrate 200 for forming the pixel circuit 210. Therefore, it is possible to secure a large area for the second substrate 200 for forming the pixel circuit 210. By securing the area for the pixel circuit 210, it is possible to form a large pixel transistor, which can contribute to improving image quality by reducing noise, etc.

[0165] In particular, when an FTI structure is used for the pixel separation section 117, it is preferable to provide a floating diffusion FD and / or a VSS contact region 118 in each pixel 541, and therefore, by using the configuration of the pad sections 120, 121, the wiring connecting the first substrate 100 and the second substrate 200 can be significantly reduced.

[0166] 54B, for example, the pad section 120 to which the floating diffusions FD are connected and the pad section 121 to which the VSS contacts 118 are connected are alternately arranged in a straight line in the V direction. The pad sections 120 and 121 are formed in positions surrounded by the photodiodes PD, the transfer gates TG, and the floating diffusions FD. This allows elements other than the floating diffusions FD and the VSS contact regions 118 to be freely arranged on the first substrate 100 on which the elements are formed, and the layout of the entire chip can be made more efficient. In addition, symmetry in the layout of the elements formed in each pixel sharing unit 539 is ensured, and the variation in the characteristics of each pixel 541 can be suppressed.

[0167] The pad parts 120 and 121 are made of, for example, polysilicon (Poly Si), more specifically, doped polysilicon to which impurities are added. The pad parts 120 and 121 are preferably made of a conductive material with high heat resistance, such as polysilicon, tungsten (W), titanium (Ti), and titanium nitride (TiN). This makes it possible to form the pixel circuit 210 after bonding the semiconductor layer 200S of the second substrate 200 to the first substrate 100. The reason for this will be explained below. In the following explanation, the method of forming the pixel circuit 210 after bonding the semiconductor layer 200S of the first substrate 100 to the semiconductor layer 200S of the second substrate 200 is called the first manufacturing method.

[0168] Here, it is also conceivable to form the pixel circuits 210 on the second substrate 200 and then bond it to the first substrate 100 (hereinafter referred to as the second manufacturing method). In this second manufacturing method, electrodes for electrical connection are formed in advance on the surface of the first substrate 100 (surface of the wiring layer 100T) and the surface of the second substrate 200 (surface of the wiring layer 200T). When the first substrate 100 and the second substrate 200 are bonded together, the electrodes for electrical connection formed on the surfaces of the first substrate 100 and the second substrate 200 come into contact with each other at the same time. As a result, an electrical connection is formed between the wiring included in the first substrate 100 and the wiring included in the second substrate 200. Therefore, by configuring the imaging device 1 using the second manufacturing method, it is possible to manufacture the imaging device using an appropriate process according to the configuration of each of the first substrate 100 and the second substrate 200, for example, and it is possible to manufacture a high-quality, high-performance imaging device.

[0169] In such a second manufacturing method, when the first substrate 100 and the second substrate 200 are bonded together, an alignment error may occur due to a manufacturing device for bonding. In addition, the first substrate 100 and the second substrate 200 have a diameter of, for example, several tens of centimeters, and when the first substrate 100 and the second substrate 200 are bonded together, the substrates may expand and contract in microscopic regions of the first substrate 100 and the second substrate 200. This expansion and contraction of the substrates is caused by a slight difference in the timing at which the substrates contact each other. Due to such expansion and contraction of the first substrate 100 and the second substrate 200, an error may occur in the position of the electrodes for electrical connection formed on the surface of the first substrate 100 and the surface of the second substrate 200. In the second manufacturing method, it is preferable to take measures so that the electrodes of the first substrate 100 and the second substrate 200 contact each other even if such an error occurs. Specifically, at least one, and preferably both, of the electrodes of the first substrate 100 and the second substrate 200 are made large in consideration of the above-mentioned error. Therefore, when the second manufacturing method is used, for example, the size (size in the substrate planar direction) of the electrode formed on the surface of the first substrate 100 or the second substrate 200 becomes larger than the size of the internal electrode extending in the thickness direction from the inside of the first substrate 100 or the second substrate 200 to the surface.

[0170] On the other hand, by forming the pad parts 120, 121 from a heat-resistant conductive material, it becomes possible to use the first manufacturing method. In the first manufacturing method, after forming the first substrate 100 including the photodiode PD and the transfer transistor TR, the first substrate 100 and the second substrate 200 (semiconductor layer 2000S) are bonded together. At this time, the second substrate 200 is in a state in which the patterns of the active elements and wiring layers constituting the pixel circuits 210 have not yet been formed. Since the second substrate 200 is in a state before the patterns are formed, even if an error occurs in the bonding position when the first substrate 100 and the second substrate 200 are bonded together, this bonding error does not cause an error in the alignment between the pattern of the first substrate 100 and the pattern of the second substrate 200. This is because the pattern of the second substrate 200 is formed after the first substrate 100 and the second substrate 200 are bonded together. When forming a pattern on the second substrate, for example, an exposure device for pattern formation performs pattern formation while using the pattern formed on the first substrate as a target for alignment. For the above reasons, errors in the bonding positions of the first substrate 100 and the second substrate 200 do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method. For the same reason, errors caused by expansion and contraction of the substrates in the second manufacturing method do not pose a problem in manufacturing the imaging device 1 in the first manufacturing method.

[0171] In the first manufacturing method, after the first substrate 100 and the second substrate 200 (semiconductor layer 200S) are bonded together in this manner, active elements are formed on the second substrate 200. After that, the through electrodes 120E, 121E and the through electrodes TGV (FIG. 53) are formed. In forming the through electrodes 120E, 121E, and TGV, for example, a pattern of the through electrodes is formed from above the second substrate 200 using reduced projection exposure by an exposure device. Since reduced exposure projection is used, even if an error occurs in the alignment between the second substrate 200 and the exposure device, the magnitude of the error is only a fraction (the reciprocal of the reduced exposure projection magnification) of the error in the second substrate 200 in the second manufacturing method. Therefore, by configuring the imaging device 1 using the first manufacturing method, it becomes easier to align the elements formed on the first substrate 100 and the second substrate 200, and a high-quality, high-performance imaging device can be manufactured.

[0172] The imaging device 1 manufactured using such a first manufacturing method has different characteristics from the imaging device manufactured using the second manufacturing method. Specifically, in the imaging device 1 manufactured using the first manufacturing method, for example, the through electrodes 120E, 121E, and TGV have a substantially constant thickness (size in the substrate plane direction) from the second substrate 200 to the first substrate 100. Alternatively, when the through electrodes 120E, 121E, and TGV have a tapered shape, they have a tapered shape with a constant inclination. The imaging device 1 having such through electrodes 120E, 121E, and TGV makes it easy to miniaturize the pixels 541.

[0173] Here, when the imaging device 1 is manufactured by the first manufacturing method, since the active elements are formed on the second substrate 200 after bonding the first substrate 100 and the second substrate 200 (semiconductor layer 200S), the first substrate 100 is also affected by the heat treatment required for forming the active elements. For this reason, as described above, it is preferable to use a conductive material with high heat resistance for the pad parts 120, 121 provided on the first substrate 100. For example, it is preferable to use a material with a higher melting point (i.e., higher heat resistance) for the pad parts 120, 121 than at least a part of the wiring material included in the wiring layer 200T of the second substrate 200. For example, a conductive material with high heat resistance such as doped polysilicon, tungsten, titanium, or titanium nitride is used for the pad parts 120, 121. This makes it possible to manufacture the imaging device 1 by using the first manufacturing method described above.

[0174] The passivation film 122 is provided over the entire surface of the semiconductor layer 100S so as to cover the pad portions 120 and 121 (FIG. 53). The passivation film 122 is made of, for example, a silicon nitride (SiN) film. The interlayer insulating film 123 covers the pad portions 120 and 121 with the passivation film 122 therebetween. This interlayer insulating film 123 is provided over the entire surface of the semiconductor layer 100S. The interlayer insulating film 123 is made of, for example, a silicon oxide (SiO) film. The bonding film 124 is provided on the bonding surface between the first substrate 100 (specifically, the wiring layer 100T) and the second substrate 200. That is, the bonding film 124 is in contact with the second substrate 200. This bonding film 124 is provided over the entire main surface of the first substrate 100. The bonding film 124 is made of, for example, a silicon nitride film.

[0175] The light receiving lens 401 faces, for example, the semiconductor layer 100S with the fixed charge film 112 and the insulating film 111 therebetween (FIG. 53). The light receiving lens 401 is provided, for example, at a position facing the photodiode PD of each of the pixels 541A, 541B, 541C, and 541D.

[0176] The second substrate 200 has a semiconductor layer 200S and a wiring layer 200T in this order from the first substrate 100 side. The semiconductor layer 200S is made of a silicon substrate. In the semiconductor layer 200S, a well region 211 is provided across the thickness direction. The well region 211 is, for example, a p-type semiconductor region. In the second substrate 20, a pixel circuit 210 arranged for each pixel sharing unit 539 is provided. For example, the pixel circuit 210 is provided on the front surface side (the wiring layer 200T side) of the semiconductor layer 200S. In the imaging device 1, the second substrate 200 is bonded to the first substrate 100 such that the back surface side (the semiconductor layer 200S side) of the second substrate 200 faces the front surface side (the wiring layer 100T side) of the first substrate 100. That is, the second substrate 200 is bonded to the first substrate 100 face-to-back.

[0177] 55 to 59 show an example of a planar configuration of the second substrate 200. FIG. 55 shows a configuration of the pixel circuit 210 provided near the surface of the semiconductor layer 200S. FIG. 56 shows a schematic configuration of the wiring layer 200T (specifically, the first wiring layer W1 described later), the semiconductor layer 200S connected to the wiring layer 200T, and each part of the first substrate 100. FIG. 57 to FIG. 59 show an example of a planar configuration of the wiring layer 200T. Hereinafter, the configuration of the second substrate 200 will be described with reference to FIG. 53 and FIG. 55 to FIG. 59. In FIG. 55 and FIG. 56, the outline of the photodiode PD (the boundary between the pixel isolation portion 117 and the photodiode PD) is shown by a dashed line, and the boundary between the semiconductor layer 200S and the element isolation region 213 or the insulating region 214 in the portion overlapping the gate electrode of each transistor constituting the pixel circuit 210 is shown by a dotted line. In the portion overlapping the gate electrode of the amplifying transistor AMP, a boundary between the semiconductor layer 200S and the element isolation region 213 and a boundary between the element isolation region 213 and the insulating region 213 are provided on one side in the channel width direction.

[0178] The second substrate 200 is provided with an insulating region 212 that divides the semiconductor layer 200S and an element isolation region 213 provided in a part of the thickness direction of the semiconductor layer 200S (FIG. 53). For example, in the insulating region 212 provided between two pixel circuits 210 adjacent to each other in the H direction, the through electrodes 120E, 121E and through electrodes TGV (through electrodes TGV1, TGV2, TGV3, TGV4) of two pixel sharing units 539 connected to the two pixel circuits 210 are arranged (FIG. 56).

[0179] The insulating region 212 has approximately the same thickness as the semiconductor layer 200S (FIG. 53). The semiconductor layer 200S is divided by this insulating region 212. The through electrodes 120E, 121E and the through electrodes TGV are arranged in this insulating region 212. The insulating region 212 is made of, for example, silicon oxide.

[0180] The through electrodes 120E, 121E are provided penetrating the insulating region 212 in the thickness direction. The upper ends of the through electrodes 120E, 121E are connected to the wirings (first wiring W1, second wiring W2, third wiring W3, and fourth wiring W4 described later) of the wiring layer 200T. The through electrodes 120E, 121E are provided penetrating the insulating region 212, the bonding film 124, the interlayer insulating film 123, and the passivation film 122, and the lower ends are connected to the pad parts 120, 121 (FIG. 53). The through electrodes 120E are for electrically connecting the pad part 120 and the pixel circuit 210. That is, the floating diffusion FD of the first substrate 100 is electrically connected to the pixel circuit 210 of the second substrate 200 by the through electrodes 120E. The through electrode 121E is for electrically connecting the pad portion 121 and the reference potential line VSS of the wiring layer 200T. That is, the through electrode 121E electrically connects the VSS contact region 118 of the first substrate 100 to the reference potential line VSS of the second substrate 200.

[0181] The through electrode TGV is provided to penetrate the insulating region 212 in the thickness direction. The upper end of the through electrode TGV is connected to the wiring of the wiring 200T. This through electrode TGV is provided to penetrate the insulating region 212, the bonding film 124, the interlayer insulating film 123, the passivation film 122, and the interlayer insulating film 119, and its lower end is connected to the transfer gate TG (FIG. 53). Such a through electrode TGV is for electrically connecting the transfer gate TG (transfer gates TG1, TG2, TG3, TG4) of each of the pixels 541A, 541B, 541C, 541D to the wiring of the wiring layer 200T (a part of the row driving signal line 542, specifically, the wirings TRG1, TRG2, TRG3, TRG4 in FIG. 58 described later). That is, the transfer gate TG of the first substrate 100 is electrically connected to the wiring TRG of the second substrate 200 by the through electrode TGV, so that a drive signal is sent to each of the transfer transistors TR (transfer transistors TR1, TR2, TR3, TR4).

[0182] The insulating region 212 is a region for providing the through electrodes 120E, 121E and the through electrodes TGV for electrically connecting the first substrate 100 and the second substrate 200 insulated from the semiconductor layer 200S. For example, the through electrodes 120E, 121E and the through electrodes TGV (through electrodes TGV1, TGV2, TGV3, TGV4) connected to the two pixel circuits 210 (shared units 539) adjacent to each other in the H direction are provided in the insulating region 212 provided between the two pixel circuits 210 (shared units 539). The insulating region 212 is provided, for example, extending in the V direction (FIGS. 55 and 56). Here, the position of the through electrodes TGV in the H direction is arranged closer to the position of the through electrodes 120E, 121E in the H direction than the position of the vertical part TGa by devising the arrangement of the horizontal part TGb of the transfer gate TG (FIGS. 54A and 56). For example, the through electrode TGV is disposed at approximately the same position as the through electrodes 120E, 120E in the H direction. This allows the through electrodes 120E, 121E and the through electrode TGV to be provided together in the insulating region 212 extending in the V direction. As another arrangement example, it is possible to provide the horizontal part TGb only in the region overlapping the vertical part TGa. In this case, the through electrode TGV is formed approximately directly above the vertical part TGa, and the through electrode TGV is disposed, for example, in the approximately center of each pixel 541 in the H direction and the V direction. At this time, the position of the through electrode TGV in the H direction and the position of the through electrodes 120E, 121E in the H direction are largely shifted. For example, an insulating region 212 is provided around the through electrodes TGV and the through electrodes 120E, 121E to electrically insulate them from the adjacent semiconductor layer 200S. When the position of the through electrode TGV in the H direction is significantly separated from the positions of the through electrodes 120E, 121E in the H direction, it is necessary to provide an insulating region 212 independently around each of the through electrodes 120E, 121E, and TGV. This results in the semiconductor layer 200S being divided into small pieces. In contrast, a layout in which the through electrodes 120E, 121E and the through electrode TGV are collectively disposed in the insulating region 212 extending in the V direction can increase the size of the semiconductor layer 200S in the H direction. This makes it possible to secure a large area for the semiconductor element formation region in the semiconductor layer 200S.This makes it possible, for example, to increase the size of the amplification transistor AMP and suppress noise.

[0183] As described with reference to FIG. 51, the pixel sharing unit 539 has a structure in which the floating diffusions FD provided in the respective pixels 541 are electrically connected to each other, and the pixels 541 share one pixel circuit 210. The floating diffusions FD are electrically connected to each other by a pad section 120 provided on the first substrate 100 (FIGS. 53 and 54B). The electrical connection section (pad section 120) provided on the first substrate 100 and the pixel circuit 210 provided on the second substrate 200 are electrically connected to each other via one through electrode 120E. As another structural example, it is also possible to provide the electrical connection section between the floating diffusions FD on the second substrate 200. In this case, the pixel sharing unit 539 is provided with four through electrodes connected to the floating diffusions FD1, FD2, FD3, and FD4, respectively. Therefore, in the second substrate 200, the number of through electrodes penetrating the semiconductor layer 200S increases, and the insulating region 212 that insulates the periphery of these through electrodes becomes larger. In comparison, the structure in which the pad portion 120 is provided in the first substrate 100 (FIGS. 53 and 54B) can reduce the number of through electrodes and make the insulating region 212 smaller. Thus, a large area can be secured for the semiconductor element formation region in the semiconductor layer 200S. This makes it possible, for example, to increase the size of the amplification transistor AMP and suppress noise.

[0184] The element isolation region 213 is provided on the surface side of the semiconductor layer 200S. The element isolation region 213 has an STI (Shallow Trench Isolation) structure. In the element isolation region 213, the semiconductor layer 200S is dug in the thickness direction (perpendicular to the main surface of the second substrate 200), and an insulating film is embedded in the dug portion. The insulating film is made of, for example, silicon oxide. The element isolation region 213 isolates a plurality of transistors constituting the pixel circuit 210 according to the layout of the pixel circuit 210. The semiconductor layer 200S (specifically, the well region 211) extends below the element isolation region 213 (deep in the semiconductor layer 200S).

[0185] Here, with reference to Figures 54A, 54B, and 55, the difference between the outer shape (outer shape in the substrate planar direction) of the pixel sharing unit 539 on the first substrate 100 and the outer shape of the pixel sharing unit 539 on the second substrate 200 will be described.

[0186] In the imaging device 1, a pixel sharing unit 539 is provided across both the first substrate 100 and the second substrate 200. For example, the outer shape of the pixel sharing unit 539 provided on the first substrate 100 and the outer shape of the pixel sharing unit 539 provided on the second substrate 200 are different from each other.

[0187] 54A and 54B, the outlines of the pixels 541A, 541B, 541C, and 541D are indicated by dashed lines, and the outline shape of the pixel sharing unit 539 is indicated by a thick line. For example, the pixel sharing unit 539 of the first substrate 100 is configured with two pixels 541 (pixels 541A and 541B) adjacent to each other in the H direction and two pixels 541 (pixels 541C and 541D) adjacent to each other in the V direction. That is, the pixel sharing unit 539 of the first substrate 100 is configured with four pixels 541 arranged in two rows and two columns adjacent to each other, and the pixel sharing unit 539 of the first substrate 100 has a substantially square outline shape. In the pixel array section 540, such pixel sharing units 539 are arranged adjacent to each other at a two pixel pitch in the H direction (a pitch equivalent to two pixels 541) and at a two pixel pitch in the V direction (a pitch equivalent to two pixels 541).

[0188] In Fig. 55 and Fig. 56, the outlines of the pixels 541A, 541B, 541C, and 541D are indicated by dashed lines, and the outline shape of the pixel sharing unit 539 is indicated by a thick line. For example, the outline shape of the pixel sharing unit 539 of the second substrate 200 is smaller than that of the pixel sharing unit 539 of the first substrate 100 in the H direction, and is larger than that of the pixel sharing unit 539 of the first substrate 100 in the V direction. For example, the pixel sharing unit 539 of the second substrate 200 is formed with a size (area) equivalent to one pixel in the H direction, and is formed with a size equivalent to four pixels in the V direction. That is, the pixel sharing unit 539 of the second substrate 200 is formed with a size equivalent to adjacent pixels arranged in one row x four columns, and the pixel sharing unit 539 of the second substrate 200 has a substantially rectangular outline shape.

[0189] For example, in each pixel circuit 210, the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG are arranged in this order in the V direction (FIG. 55). By providing the outer shape of each pixel circuit 210 in a substantially rectangular shape as described above, it is possible to arrange four transistors (the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG) in one direction (the V direction in FIG. 55). This allows the drain of the amplification transistor AMP and the drain of the reset transistor RST to be shared in one diffusion region (the diffusion region connected to the power supply line VDD). For example, it is also possible to provide the formation region of each pixel circuit 210 in a substantially square shape (see FIG. 68 described later). In this case, two transistors are arranged along one direction, and it becomes difficult to share the drain of the amplification transistor AMP and the drain of the reset transistor RST in one diffusion region. Therefore, by providing the formation region of the pixel circuit 210 in a substantially rectangular shape, it becomes easier to arrange the four transistors closely to each other, and the formation region of the pixel circuit 210 can be made smaller. That is, the pixel can be miniaturized. Furthermore, when it is not necessary to reduce the formation area of ​​the pixel circuit 210, it is possible to increase the formation area of ​​the amplification transistor AMP and suppress noise.

[0190] For example, in addition to the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG, a VSS contact region 218 connected to a reference potential line VSS is provided near the surface of the semiconductor layer 200S. The VSS contact region 218 is, for example, configured of a p-type semiconductor region. The VSS contact region 218 is electrically connected to the VSS contact region 118 of the first substrate 100 (semiconductor layer 100S) via the wiring of the wiring layer 200T and the through electrode 121E. This VSS contact region 218 is provided, for example, at a position adjacent to the source of the FD conversion gain switching transistor FDG with the element isolation region 213 therebetween (FIG. 55).

[0191] Next, with reference to Fig. 54B and Fig. 55, the positional relationship between the pixel sharing unit 539 provided on the first substrate 100 and the pixel sharing unit 539 provided on the second substrate 200 will be described. For example, one of the two pixel sharing units 539 arranged in the V direction of the first substrate 100 (for example, the upper side of the paper in Fig. 54B) is connected to one of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (for example, the left side of the paper in Fig. 55). For example, the other of the two pixel sharing units 539 arranged in the V direction of the first substrate 100 (for example, the lower side of the paper in Fig. 54B) is connected to the other of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (for example, the right side of the paper in Fig. 55).

[0192] For example, of two pixel sharing units 539 arranged in the H direction of the second substrate 200, the internal layout (arrangement of transistors, etc.) of one pixel sharing unit 539 is substantially equal to a layout obtained by inverting the internal layout of the other pixel sharing unit 539 in the V direction and H direction. The effects obtained by this layout will be described below.

[0193] In two pixel sharing units 539 aligned in the V direction of the first substrate 100, each pad section 120 is disposed at the center of the outer shape of the pixel sharing unit 539, that is, the center of the pixel sharing unit 539 in the V direction and the H direction ( FIG. 54B ). On the other hand, since the pixel sharing unit 539 of the second substrate 200 has an outer shape that is substantially rectangular and long in the V direction as described above, for example, the amplification transistor AMP connected to the pad section 120 is disposed at a position shifted upward from the center of the pixel sharing unit 539 in the V direction on the paper. For example, when the internal layouts of two pixel sharing units 539 aligned in the H direction of the second substrate 200 are the same, the distance between the amplification transistor AMP of one pixel sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel sharing unit 539 on the upper side of the paper in FIG. 54) becomes relatively short. However, the distance between the amplification transistor AMP of the other pixel sharing unit 539 and the pad section 120 (for example, the pad section 120 of the pixel sharing unit 539 on the lower side of the paper surface of FIG. 54) becomes longer. Therefore, the area of ​​the wiring required to connect this amplification transistor AMP and the pad section 120 becomes larger, and there is a concern that the wiring layout of the pixel sharing unit 539 becomes complicated. This may affect the miniaturization of the imaging device 1.

[0194] In contrast, by inverting the internal layouts of two pixel sharing units 539 arranged in the H direction of the second substrate 200 at least in the V direction, the distance between the amplifier transistors AMP and the pad section 120 of both of these two pixel sharing units 539 can be shortened. Therefore, compared with a configuration in which the internal layouts of two pixel sharing units 539 arranged in the H direction of the second substrate 200 are the same, it is easier to miniaturize the imaging device 1. Note that the planar layout of each of the multiple pixel sharing units 539 of the second substrate 200 is symmetrical within the range shown in FIG. 55, but becomes asymmetrical when the layout of the first wiring layer W1 shown in FIG. 56 described later is included.

[0195] In addition, it is preferable that the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 are also inverted with respect to each other in the H direction. The reason for this will be described below. As shown in FIG. 56, the two pixel sharing units 539 arranged in the H direction of the second substrate 200 are connected to the pad portions 120, 121 of the first substrate 100. For example, the pad portions 120, 121 are disposed in the center portions in the H direction of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 (between the two pixel sharing units 539 arranged in the H direction). Therefore, by inverting the internal layouts of the two pixel sharing units 539 arranged in the H direction of the second substrate 200 with respect to each other in the H direction, the distance between each of the multiple pixel sharing units 539 of the second substrate 200 and the pad portions 120, 121 can be reduced. That is, it becomes easier to miniaturize the imaging device 1.

[0196] In addition, the position of the outline of the pixel sharing unit 539 of the second substrate 200 does not have to be aligned with the position of any of the outlines of the pixel sharing unit 539 of the first substrate 100. For example, of the two pixel sharing units 539 arranged in the H direction of the second substrate 200, in one pixel sharing unit 539 (for example, the left side of the paper in FIG. 56), the outline of one side in the V direction (for example, the upper side of the paper in FIG. 56) is disposed outside the outline of one side in the V direction of the corresponding pixel sharing unit 539 of the first substrate 100 (for example, the upper side of the paper in FIG. 54B). In addition, of the two pixel sharing units 539 arranged in the H direction of the second substrate 200, in the other pixel sharing unit 539 (for example, the right side of the paper in FIG. 56), the outline of the other side in the V direction (for example, the lower side of the paper in FIG. 56) is disposed outside the outline of the other side in the V direction of the corresponding pixel sharing unit 539 of the first substrate 100 (for example, the lower side of the paper in FIG. 54B). In this way, by disposing the pixel sharing unit 539 of the second substrate 200 and the pixel sharing unit 539 of the first substrate 100 relative to each other, it is possible to shorten the distance between the amplification transistor AMP and the pad section 120. Therefore, it becomes easier to miniaturize the imaging device 1.

[0197] Furthermore, the positions of the outlines of the multiple pixel sharing units 539 on the second substrate 200 do not need to be aligned with each other. For example, two pixel sharing units 539 aligned in the H direction of the second substrate 200 are arranged with the positions of the outlines in the V direction shifted from each other. This makes it possible to shorten the distance between the amplification transistor AMP and the pad section 120. This makes it easier to miniaturize the imaging device 1.

[0198] With reference to FIG. 54B and FIG. 56, the repeated arrangement of the pixel sharing units 539 in the pixel array section 540 will be described. The pixel sharing unit 539 of the first substrate 100 has a size equivalent to two pixels 541 in the H direction and a size equivalent to two pixels 541 in the V direction (FIG. 54B). For example, in the pixel array section 540 of the first substrate 100, the pixel sharing units 539 having a size equivalent to four pixels 541 are repeatedly arranged adjacent to each other at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and at a two pixel pitch (a pitch equivalent to two pixels 541) in the V direction. Alternatively, the pixel array section 540 of the first substrate 100 may be provided with a pair of pixel sharing units 539 in which two pixel sharing units 539 are arranged adjacent to each other in the V direction. In the pixel array section 540 of the first substrate 100, for example, a pair of pixel sharing units 539 are repeatedly arranged adjacent to each other at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and a four pixel pitch (a pitch equivalent to four pixels 541) in the V direction. The pixel sharing unit 539 of the second substrate 200 has a size of one pixel 541 in the H direction and a size of four pixels 541 in the V direction ( FIG. 56 ). For example, the pixel array section 540 of the second substrate 200 is provided with a pair of pixel sharing units 539 including two pixel sharing units 539 each having a size equivalent to four pixels 541. The pixel sharing units 539 are arranged adjacent to each other in the H direction and offset from each other in the V direction. In the pixel array section 540 of the second substrate 200, for example, a pair of pixel sharing units 539 are repeatedly arranged adjacent to each other with no gaps at a two pixel pitch (a pitch equivalent to two pixels 541) in the H direction and at a four pixel pitch (a pitch equivalent to four pixels 541) in the V direction. By repeatedly arranging the pixel sharing units 539 in this way, it is possible to arrange the pixel sharing units 539 without any gaps. This makes it easier to miniaturize the imaging device 1.

[0199] It is preferable that the amplification transistor AMP has a three-dimensional structure, such as a Fin type (FIG. 53). This increases the effective gate width, making it possible to suppress noise. The selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG have, for example, a planar structure. The amplification transistor AMP may have a planar structure. Alternatively, the selection transistor SEL, the reset transistor RST, or the FD conversion gain switching transistor FDG may have a three-dimensional structure.

[0200] The wiring layer 200T includes, for example, a passivation film 221, an interlayer insulating film 222, and a plurality of wirings (a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, and a fourth wiring layer W4). The passivation film 221 is in contact with, for example, the surface of the semiconductor layer 200S, and covers the entire surface of the semiconductor layer 200S. This passivation film 221 covers the gate electrodes of the selection transistor SEL, the amplification transistor AMP, the reset transistor RST, and the FD conversion gain switching transistor FDG. The interlayer insulating film 222 is provided between the passivation film 221 and the third substrate 300. This interlayer insulating film 222 separates the plurality of wirings (the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, and the fourth wiring layer W4). The interlayer insulating film 222 is made of, for example, silicon oxide.

[0201] In the wiring layer 200T, for example, from the semiconductor layer 200S side, a first wiring layer W1, a second wiring layer W2, a third wiring layer W3, a fourth wiring layer W4, and contact parts 201, 202 are provided in this order, and these are insulated from each other by an interlayer insulating film 222. In the interlayer insulating film 222, a plurality of connection parts are provided to connect the first wiring layer W1, the second wiring layer W2, the third wiring layer W3, or the fourth wiring layer W4 to the layers below them. The connection parts are parts in which a conductive material is embedded in connection holes provided in the interlayer insulating film 222. For example, in the interlayer insulating film 222, a connection part 218V is provided to connect the first wiring layer W1 and the VSS contact region 218 of the semiconductor layer 200S. For example, the hole diameter of such a connection part that connects elements of the second substrate 200 to each other is different from the hole diameters of the through electrodes 120E, 121E and the through electrodes TGV. Specifically, the diameter of the connection hole connecting the elements of the second substrate 200 is preferably smaller than the diameter of the through electrodes 120E, 121E and the through electrode TGV. The reason for this will be described below. The depth of the connection part (connection part 218V, etc.) provided in the wiring layer 200T is smaller than the depth of the through electrodes 120E, 121E and the through electrode TGV. Therefore, the connection part can be filled with a conductive material more easily than the through electrodes 120E, 121E and the through electrode TGV. By making the diameter of the connection part smaller than the diameter of the through electrodes 120E, 121E and the through electrode TGV, it becomes easier to miniaturize the imaging device 1.

[0202] For example, the first wiring layer W1 connects the through electrode 120E to the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG (specifically, a connection hole reaching the source of the FD conversion gain switching transistor FDG). The first wiring layer W1 connects, for example, the through electrode 121E to the connection portion 218V, thereby electrically connecting the VSS contact region 218 of the semiconductor layer 200S to the VSS contact region 118 of the semiconductor layer 100S.

[0203] Next, the planar configuration of the wiring layer 200T will be described with reference to Fig. 57 to Fig. 59. Fig. 57 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2. Fig. 58 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3. Fig. 59 shows an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4.

[0204] For example, the third wiring layer W3 includes wirings TRG1, TRG2, TRG3, TRG4, SELL, RSTL, and FDGL extending in the H direction (row direction) (FIG. 58). These wirings correspond to the row driving signal lines 542 described with reference to FIG. 51. The wirings TRG1, TRG2, TRG3, and TRG4 are for sending driving signals to the transfer gates TG1, TG2, TG3, and TG4, respectively. The wirings TRG1, TRG2, TRG3, and TRG4 are connected to the transfer gates TG1, TG2, TG3, and TG4 via the second wiring layer W2, the first wiring layer W1, and the through-electrode 120E, respectively. The wiring SELL is for sending a driving signal to the gate of the selection transistor SEL, the wiring RSTL is for sending a driving signal to the gate of the reset transistor RST, and the wiring FDGL is for sending a driving signal to the gate of the FD conversion gain switching transistor FDG, respectively. The wirings SELL, RSTL, and FDGL are each connected to the gates of the selection transistor SEL, the reset transistor RST, and the FD conversion gain switching transistor FDG via the second wiring layer W2, the first wiring layer W1, and a connection portion.

[0205] For example, the fourth wiring layer W4 includes a power supply line VDD, a reference potential line VSS, and a vertical signal line 543 extending in the V direction (column direction) (FIG. 59). The power supply line VDD is connected to the drain of the amplification transistor AMP and the drain of the reset transistor RST via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part. The reference potential line VSS is connected to the VSS contact region 218 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part 218V. The reference potential line VSS is also connected to the VSS contact region 118 of the first substrate 100 via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, the through electrode 121E, and the pad part 121. The vertical signal line 543 is connected to the source (Vout) of the selection transistor SEL via the third wiring layer W3, the second wiring layer W2, the first wiring layer W1, and a connection part.

[0206] The contact parts 201 and 202 may be provided at positions overlapping the pixel array part 540 in a plan view (for example, FIG. 50), or may be provided in the outer peripheral part 540B of the pixel array part 540 (for example, FIG. 53). The contact parts 201 and 202 are provided on the surface of the second substrate 200 (surface on the wiring layer 200T side). The contact parts 201 and 202 are made of metal such as Cu (copper) and Al (aluminum). The contact parts 201 and 202 are exposed on the surface of the wiring layer 200T (surface on the third substrate 300 side). The contact parts 201 and 202 are used for electrical connection between the second substrate 200 and the third substrate 300 and for bonding the second substrate 200 and the third substrate 300 together.

[0207] 53 shows an example in which a peripheral circuit is provided in the peripheral portion 540B of the second substrate 200. This peripheral circuit may include a part of the row driving section 520 or a part of the column signal processing section 550. Also, as shown in FIG. 50, the peripheral circuit may not be arranged in the peripheral portion 540B of the second substrate 200, and the connection holes H1 and H2 may be arranged in the vicinity of the pixel array section 540.

[0208] The third substrate 300 has, for example, a wiring layer 300T and a semiconductor layer 300S in this order from the second substrate 200 side. For example, the surface of the semiconductor layer 300S is provided on the second substrate 200 side. The semiconductor layer 300S is made of a silicon substrate. A circuit is provided on the surface side of the semiconductor layer 300S. Specifically, for example, at least a part of the input unit 510A, the row driver 520, the timing control unit 530, the column signal processing unit 550, the image signal processing unit 560, and the output unit 510B is provided on the surface side of the semiconductor layer 300S. The wiring layer 300T provided between the semiconductor layer 300S and the second substrate 200 includes, for example, an interlayer insulating film, a plurality of wiring layers separated by the interlayer insulating film, and contact units 301 and 302. The contact parts 301 and 302 are exposed on the surface (surface on the second substrate 200 side) of the wiring layer 300T, and the contact part 301 is in contact with the contact part 201 of the second substrate 200, and the contact part 302 is in contact with the contact part 202 of the second substrate 200. The contact parts 301 and 302 are electrically connected to circuits (for example, at least one of the input part 510A, the row driving part 520, the timing control part 530, the column signal processing part 550, the image signal processing part 560, and the output part 510B) formed in the semiconductor layer 300S. The contact parts 301 and 302 are made of metals such as Cu (copper) and aluminum (Al). For example, the external terminal TA is connected to the input part 510A via the connection hole part H1, and the external terminal TB is connected to the output part 510B via the connection hole part H2.

[0209] Here, the features of the imaging device 1 will be described.

[0210] In general, an imaging device mainly consists of a photodiode and a pixel circuit. Increasing the area of ​​the photodiode increases the charge generated as a result of photoelectric conversion, thereby improving the signal-to-noise ratio (S / N ratio) of the pixel signal, and enabling the imaging device to output better image data (image information). On the other hand, increasing the size of the transistors (especially the size of the amplifying transistors) included in the pixel circuit reduces the noise generated in the pixel circuit, thereby improving the S / N ratio of the imaging signal, and enabling the imaging device to output better image data (image information).

[0211] However, in an imaging device in which a photodiode and a pixel circuit are provided on the same semiconductor substrate, if the area of ​​the photodiode is increased within the limited area of ​​the semiconductor substrate, the size of the transistor in the pixel circuit may be reduced, and if the size of the transistor in the pixel circuit is increased, the area of ​​the photodiode may be reduced.

[0212] To solve these problems, for example, the imaging device 1 of the present embodiment uses a structure in which a plurality of pixels 541 share one pixel circuit 210, and the shared pixel circuit 210 is arranged so as to overlap the photodiode PD. This makes it possible to maximize the area of ​​the photodiode PD and to maximize the size of the transistor provided in the pixel circuit 210 within the limited area of ​​the semiconductor substrate. This improves the S / N ratio of the pixel signal, and enables the imaging device 1 to output better image data (image information).

[0213] When realizing a structure in which a plurality of pixels 541 share one pixel circuit 210 and this is arranged to overlap the photodiode PD, a plurality of wirings connected to one pixel circuit 210 extend from the floating diffusion FD of each of the plurality of pixels 541. In order to secure a large area of ​​the semiconductor substrate 200 in which the pixel circuit 210 is formed, for example, a connection wiring can be formed that connects the plurality of extending wirings to each other and combines them into one. Similarly, for the plurality of wirings extending from the VSS contact region 118, a connection wiring can be formed that connects the plurality of extending wirings to each other and combines them into one.

[0214] For example, if a connection wiring that interconnects the multiple wirings extending from the floating diffusion FD of each of the multiple pixels 541 is formed in the semiconductor substrate 200 that forms the pixel circuit 210, it is conceivable that the area for forming the transistors included in the pixel circuit 210 will be reduced. Similarly, if a connection wiring that interconnects the multiple wirings extending from the VSS contact region 118 of each of the multiple pixels 541 and combines them into one is formed in the semiconductor substrate 200 that forms the pixel circuit 210, it is conceivable that the area for forming the transistors included in the pixel circuit 210 will be reduced.

[0215] In order to solve these problems, for example, the imaging device 1 of this embodiment can have a structure in which a plurality of pixels 541 share one pixel circuit 210, and the shared pixel circuit 210 is arranged superimposed on a photodiode PD, and the first substrate 100 can be provided with a connection wiring that interconnects and combines the floating diffusions FD of the plurality of pixels 541, and a connection wiring that interconnects and combines the VSS contact regions 118 provided in each of the plurality of pixels 541.

[0216] Here, when the above-mentioned second manufacturing method is used as a manufacturing method for providing the first substrate 100 with the connection wiring for connecting the floating diffusions FD of the plurality of pixels 541 to one another and the connection wiring for connecting the VSS contact regions 118 of the plurality of pixels 541 to one another, for example, the first substrate 100 and the second substrate 200 can be manufactured using an appropriate process according to the configuration of each substrate, and a high-quality, high-performance imaging device can be manufactured. In addition, the connection wiring of the first substrate 100 and the second substrate 200 can be formed by a simple process. Specifically, when the above-mentioned second manufacturing method is used, an electrode connected to the floating diffusion FD and an electrode connected to the VSS contact region 118 are provided on the surface of the first substrate 100 and the surface of the second substrate 200, which are the bonding interface between the first substrate 100 and the second substrate 200. Furthermore, it is preferable to make the electrodes formed on the surfaces of the two substrates large so that the electrodes can contact each other even if a positional deviation occurs between the electrodes provided on the surfaces of the two substrates when the first substrate 100 and the second substrate 200 are bonded together. In this case, it may become difficult to arrange the electrodes within the limited area of ​​each pixel of the imaging device 1.

[0217] In order to solve the problem of needing a large electrode at the bonding interface between the first substrate 100 and the second substrate 200, for example, the imaging device 1 of this embodiment can use the first manufacturing method described above as a manufacturing method in which a plurality of pixels 541 share one pixel circuit 210 and the shared pixel circuit 210 is arranged so as to overlap the photodiode PD. This makes it easy to align the elements formed on the first substrate 100 and the second substrate 200, respectively, and allows the manufacturing of a high-quality, high-performance imaging device. Furthermore, it is possible to have a unique structure that is generated by using this manufacturing method. That is, the structure has a semiconductor layer 100S and wiring layer 100T of the first substrate 100 and a semiconductor layer 200S and wiring layer 200T of the second substrate 200 stacked in this order, in other words, a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back, and has through electrodes 120E, 121E that pass from the surface side of the semiconductor layer 200S of the second substrate 200, through the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reach the surface of the semiconductor layer 100S of the first substrate 100.

[0218] In a structure in which a first substrate 100 is provided with connection wiring that interconnects and combines the floating diffusions FD of the multiple pixels 541 into one, and connection wiring that interconnects and combines the VSS contact regions 118 of the multiple pixels 541 into one, if this structure is stacked on a second substrate 200 using the first manufacturing method to form a pixel circuit 210 on the second substrate 200, there is a possibility that the influence of the heating process required when forming the active elements provided in the pixel circuit 210 will extend to the connection wiring formed on the first substrate 100.

[0219] Therefore, in order to solve the problem that the connection wiring is affected by the heat treatment when forming the active element, in the imaging device 1 of the present embodiment, it is desirable to use a conductive material with high heat resistance for the connection wiring that connects the floating diffusions FD of the respective pixels 541 to each other and combines them into one, and for the connection wiring that connects the VSS contact regions 118 of the respective pixels 541 to each other and combines them into one. Specifically, the conductive material with high heat resistance can be a material with a higher melting point than at least a part of the wiring material included in the wiring layer 200T of the second substrate 200.

[0220] In this manner, for example, the imaging device 1 of the present embodiment has: (1) a structure in which the first substrate 100 and the second substrate 200 are stacked face-to-back (specifically, a structure in which the semiconductor layer 100S and the wiring layer 100T of the first substrate 100 and the semiconductor layer 200S and the wiring layer 200T of the second substrate 200 are stacked in this order); (2) a structure in which through-electrodes 120E, 121E are provided from the front surface side of the semiconductor layer 200S of the second substrate 200, penetrating the semiconductor layer 200S and the wiring layer 100T of the first substrate 100, and reaching the front surface of the semiconductor layer 100S of the first substrate 100; and (3) a structure in which the floating diffusions FD provided in each of the plurality of pixels 541 are provided. By providing a structure in which the first substrate 100 and the second substrate 200 have a connection wiring that interconnects the floating diffusions FD of the respective pixels 541 and combines them into one, and a connection wiring that interconnects the VSS contact regions 118 of the respective pixels 541 and combines them into one, and a structure in which the connection wiring is formed from a conductive material with high heat resistance, it is possible to provide the first substrate 100 with the connection wiring that interconnects the floating diffusions FD of the respective pixels 541 and combines them into one, and the connection wiring that connects the VSS contact regions 118 of the respective pixels 541 and combines them into one, without providing a large electrode at the interface between the first substrate 100 and the second substrate 200.

[0221] [Operation of imaging device 1] Next, the operation of the imaging device 1 will be described with reference to Figs. 60 and 61. Figs. 60 and 61 are diagrams in which arrows representing the paths of each signal have been added to Fig. 50. Fig. 60 shows the paths of the input signal input from the outside to the imaging device 1, the power supply potential, and the reference potential with arrows. Fig. 61 shows the signal paths of the pixel signals output from the imaging device 1 to the outside with arrows. For example, an input signal (e.g., a pixel clock and a synchronization signal) input to the imaging device 1 via the input section 510A is transmitted to the row driver 520 of the third substrate 300, and a row drive signal is generated in the row driver 520. This row drive signal is sent to the second substrate 200 via the contact sections 301 and 201. Furthermore, this row drive signal reaches each of the pixel shared units 539 of the pixel array section 540 via a row drive signal line 542 in the wiring layer 200T. Among the row driving signals that reach the pixel sharing unit 539 of the second substrate 200, the driving signals other than the transfer gate TG are input to the pixel circuit 210, and each transistor included in the pixel circuit 210 is driven. The driving signal of the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 of the first substrate 100 via the through electrode TGV, and the pixels 541A, 541B, 541C, and 541D are driven (FIG. 60). In addition, the power supply potential and the reference potential supplied to the input section 510A (input terminal 511) of the third substrate 300 from the outside of the imaging device 1 are sent to the second substrate 200 via the contact sections 301 and 201, and are supplied to the pixel circuits 210 of each pixel sharing unit 539 via the wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D of the first substrate 100 via the through electrode 121E. Meanwhile, pixel signals photoelectrically converted by the pixels 541A, 541B, 541C, and 541D of the first substrate 100 are sent to the pixel circuit 210 of the second substrate 200 for each pixel sharing unit 539 via the through-electrode 120E. A pixel signal based on this pixel signal is sent from the pixel circuit 210 to the third substrate 300 via the vertical signal line 543 and the contact units 202 and 302. This pixel signal is processed by the column signal processing unit 550 and the image signal processing unit 560 of the third substrate 300, and then output to the outside via the output unit 510B.

[0222] [effect] In this embodiment, the pixels 541A, 541B, 541C, and 541D (pixel sharing unit 539) and the pixel circuit 210 are provided on different substrates (first substrate 100 and second substrate 200). This allows the areas of the pixels 541A, 541B, 541C, and 541D and the pixel circuit 210 to be enlarged compared to when the pixels 541A, 541B, 541C, and 541D and the pixel circuit 210 are formed on the same substrate. As a result, it is possible to increase the amount of pixel signals obtained by photoelectric conversion and reduce the transistor noise of the pixel circuit 210. This improves the signal-to-noise ratio of the pixel signals, and the imaging device 1 can output better pixel data (image information). In addition, it is possible to miniaturize the imaging device 1 (in other words, reduce the pixel size and make the imaging device 1 smaller). The imaging device 1 can increase the number of pixels per unit area by reducing the pixel size, and output a high-quality image.

[0223] In the imaging device 1, the first substrate 100 and the second substrate 200 are electrically connected to each other by through electrodes 120E and 121E provided in the insulating region 212. For example, a method of connecting the first substrate 100 and the second substrate 200 by bonding pad electrodes to each other, or a method of connecting them by through wiring (for example, TSV (Thorough Si Via)) that penetrates a semiconductor layer can also be considered. It is possible to achieve this. Compared to such a method, by providing the through electrodes 120E, 121E in the insulating region 212, the area required for connecting the first substrate 100 and the second substrate 200 can be reduced. This reduces the pixel size, making the imaging device 1 even more compact. Furthermore, by further miniaturizing the area per pixel, the resolution can be increased. When it is not necessary to reduce the chip size, the formation area of ​​the pixels 541A, 541B, 541C, 541D and the pixel circuit 210 can be expanded. As a result, it is possible to increase the amount of pixel signals obtained by photoelectric conversion and reduce noise of the transistors provided in the pixel circuit 210. This improves the signal-to-noise ratio of the pixel signals, and the imaging device 1 can output better pixel data (image information).

[0224] Furthermore, in the imaging device 1, the pixel circuit 210, the column signal processing section 550, and the image signal processing section 560 are provided on different substrates (the second substrate 200 and the third substrate 300). This allows the area of ​​the pixel circuit 210 and the areas of the column signal processing section 550 and the image signal processing section 560 to be enlarged compared to a case in which the pixel circuit 210, the column signal processing section 550, and the image signal processing section 560 are formed on the same substrate. This allows noise generated in the column signal processing section 550 to be reduced, and allows the image signal processing section 560 to be equipped with a more advanced image processing circuit. This improves the signal-to-noise ratio of the pixel signal, and enables the imaging device 1 to output better pixel data (image information).

[0225] In the imaging device 1, the pixel array section 540 is provided on the first substrate 100 and the second substrate 200, and the column signal processing section 550 and the image signal processing section 560 are provided on the third substrate 300. The contact sections 201, 202, 301, and 302 that connect the second substrate 200 and the third substrate 300 are formed above the pixel array section 540. Therefore, the contact sections 201, 202, 301, and 302 can be freely laid out without being interfered with in the layout by various wirings provided in the pixel array. This makes it possible to use the contact sections 201, 202, 301, and 302 for electrical connection between the second substrate 200 and the third substrate 300. By using the contact sections 201, 202, 301, and 302, for example, the column signal processing section 550 and the image signal processing section 560 have a high degree of freedom in layout. This makes it possible to reduce noise generated in the column signal processing unit 550 and to incorporate a more advanced image processing circuit in the image signal processing unit 560. Therefore, the signal-to-noise ratio of the pixel signals is improved, and the imaging device 1 can output better pixel data (image information).

[0226] Furthermore, in the imaging device 1, the pixel separator 117 penetrates the semiconductor layer 100S. This makes it possible to suppress color mixing between the pixels 541A, 541B, 541C, and 541D even if the distance between adjacent pixels (pixels 541A, 541B, 541C, and 541D) is reduced due to miniaturization of the area per pixel. This improves the signal-to-noise ratio of the pixel signal, enabling the imaging device 1 to output better pixel data (image information).

[0227] Furthermore, in the imaging device 1, a pixel circuit 210 is provided for each pixel sharing unit 539. This allows the formation area of ​​the transistors (amplification transistor AMP, reset transistor RST, selection transistor SEL, FD conversion gain switching transistor FDG) that constitute the pixel circuit 210 to be larger than when a pixel circuit 210 is provided for each of the pixels 541A, 541B, 541C, and 541D. For example, by increasing the formation area of ​​the amplification transistor AMP, it is possible to suppress noise. This improves the signal-to-noise ratio of the pixel signal, and enables the imaging device 1 to output better pixel data (image information).

[0228] Furthermore, in the imaging device 1, the pad section 120 that electrically connects the floating diffusions FD (floating diffusions FD1, FD2, FD3, FD4) of the four pixels (pixels 541A, 541B, 541C, 541D) is provided on the first substrate 100. This makes it possible to reduce the number of through electrodes (through electrodes 120E) that connect the first substrate 100 and the second substrate 200, compared to the case where such a pad section 120 is provided on the second substrate 200. Therefore, it is possible to reduce the insulating region 212 and ensure a sufficient size of the formation region (semiconductor layer 200S) of the transistors that constitute the pixel circuit 210. This makes it possible to reduce noise of the transistors provided in the pixel circuit 210, improve the signal-to-noise ratio of the pixel signal, and enable the imaging device 1 to output better pixel data (image information).

[0229] Modifications of the imaging device 1 according to the above embodiment will be described below. In the following modifications, components common to the above embodiment will be denoted by the same reference numerals.

[0230] <2. Variation 1> 62 to 66 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 62 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 55 described in the above embodiment. FIG. 63 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 56 described in the above embodiment. FIG. 64 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 57 described in the above embodiment. FIG. 65 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 58 described in the above embodiment. FIG. 66 shows an example of the planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 59 described in the above embodiment.

[0231] In this modification, as shown in Fig. 63, of two pixel sharing units 539 arranged in the H direction of the second substrate 200, the internal layout of one pixel sharing unit 539 (e.g., the right side of the paper) is configured to be inverted only in the H direction from the internal layout of the other pixel sharing unit 539 (e.g., the left side of the paper). Also, the deviation in the V direction between the outline of one pixel sharing unit 539 and the outline of the other pixel sharing unit 539 is larger than the deviation described in the above embodiment (Fig. 56). In this way, by increasing the deviation in the V direction, it is possible to reduce the distance between the amplification transistor AMP of the other pixel sharing unit 539 and the pad section 120 connected thereto (the pad section 120 of the other (lower side of the paper) of the two pixel sharing units 539 arranged in the V direction shown in Fig. 54). With such a layout, in the first modification of the imaging device 1 shown in FIGS. 62 to 66, the area of ​​the two pixel sharing units 539 arranged in the H direction can be made the same as that of the pixel sharing unit 539 of the second substrate 200 described in the above embodiment without inverting the planar layouts of the two pixel sharing units 539 arranged in the H direction in the V direction. The planar layout of the pixel sharing unit 539 of the first substrate 100 is the same as the planar layout (FIGS. 54A and 54B) described in the above embodiment. Therefore, the imaging device 1 of this modification can obtain the same effect as the imaging device 1 described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangement described in the above embodiment and this modification.

[0232] <3. Variation 2> 67 to 72 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 67 shows a schematic planar configuration of the first substrate 100, and corresponds to FIG. 54A described in the above embodiment. FIG. 68 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 55 described in the above embodiment. FIG. 69 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 56 described in the above embodiment. FIG. 70 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 57 described in the above embodiment. FIG. 71 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 58 described in the above embodiment. FIG. 72 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 59 described in the above embodiment.

[0233] In this modification, the outer shape of each pixel circuit 210 has a substantially square planar shape (FIG. 68, etc.). In this respect, the planar configuration of the imaging device 1 of this modification differs from the planar configuration of the imaging device 1 described in the above embodiment.

[0234] For example, the pixel sharing unit 539 of the first substrate 100 is formed over a pixel region of 2 rows x 2 columns as described in the above embodiment, and has a substantially square planar shape ( FIG. 67 ). For example, in each pixel sharing unit 539, the horizontal portions TGb of the transfer gates TG1 and TG3 of the pixels 541A and 541C of one pixel column extend in a direction from a position overlapping with the vertical portion TGa toward the center of the pixel sharing unit 539 in the H direction (more specifically, in a direction toward the outer edges of the pixels 541A and 541C and toward the center of the pixel sharing unit 539), and the horizontal portions TGb of the transfer gates TG2 and TG4 of the pixels 541B and 541D of the other pixel column extend in a direction from a position overlapping with the vertical portion TGa toward the outside of the pixel sharing unit 539 in the H direction (more specifically, in a direction toward the outer edges of the pixels 541B and 541D and toward the outside of the pixel sharing unit 539). The pad portion 120 connected to the floating diffusion FD is provided in the center of the pixel sharing unit 539 (the center of the pixel sharing unit 539 in the H and V directions), and the pad portion 121 connected to the VSS contact region 118 is provided at the end of the pixel sharing unit 539 at least in the H direction (in the H and V directions in Figure 67).

[0235] As another arrangement example, it is possible to provide the horizontal parts TGb of the transfer gates TG1, TG2, TG3, and TG4 only in the region facing the vertical parts TGa. In this case, the semiconductor layer 200S is likely to be divided into small parts, as described in the above embodiment. Therefore, it is difficult to form the transistors of the pixel circuit 210 to be large. On the other hand, if the horizontal parts TGb of the transfer gates TG1, TG2, TG3, and TG4 are extended in the H direction from the position where they overlap with the vertical parts TGa as in the above modification, it is possible to increase the width of the semiconductor layer 200S, as described in the above embodiment. Specifically, it is possible to arrange the positions in the H direction of the through electrodes TGV1 and TGV3 connected to the transfer gates TG1 and TG3 close to the position in the H direction of the through electrode 120E, and to arrange the positions in the H direction of the through electrodes TGV2 and TGV4 connected to the transfer gates TG2 and TG4 close to the position in the H direction of the through electrode 121E (FIG. 69). This allows the width (size in the H direction) of the semiconductor layer 200S extending in the V direction to be increased, as in the above embodiment. This allows the size of the transistors in the pixel circuit 210, particularly the size of the amplifying transistor AMP, to be increased. As a result, the signal-to-noise ratio of the pixel signal is improved, and the imaging device 1 can output better pixel data (image information).

[0236] The pixel sharing unit 539 of the second substrate 200 has, for example, approximately the same size in the H direction and the V direction as the pixel sharing unit 539 of the first substrate 100, and is provided, for example, over an area corresponding to a pixel area of ​​approximately 2 rows x 2 columns. For example, in each pixel circuit 210, a selection transistor SEL and an amplification transistor AMP are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction, and an FD conversion gain switching transistor FDG and a reset transistor RST are arranged side by side in the V direction in one semiconductor layer 200S extending in the V direction. The one semiconductor layer 200S in which the selection transistor SEL and the amplification transistor AMP are provided and the one semiconductor layer 200S in which the FD conversion gain switching transistor FDG and the reset transistor RST are provided are arranged side by side in the H direction via an insulating region 212. This insulating region 212 extends in the V direction (FIG. 68).

[0237] Here, the outer shape of the pixel shared unit 539 of the second substrate 200 will be described with reference to Fig. 68 and Fig. 69. For example, the pixel shared unit 539 of the first substrate 100 shown in Fig. 67 is connected to an amplification transistor AMP and a selection transistor SEL provided on one side of the H direction of the pad section 120 (the left side of the paper in Fig. 69), and an FD conversion gain switching transistor FDG and a reset transistor RST provided on the other side of the H direction of the pad section 120 (the right side of the paper in Fig. 69). The outer shape of the shared unit 541 of the second substrate 200 including the amplification transistor AMP, the selection transistor SEL, the FD conversion gain switching transistor FDG, and the reset transistor RST is determined by the following four outer edges.

[0238] The first outer edge is the outer edge of one end in the V direction (the end on the upper side of the paper in FIG. 69) of the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP. This first outer edge is provided between the amplification transistor AMP included in the pixel sharing unit 539 and the selection transistor SEL included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on one side in the V direction (the upper side of the paper in FIG. 69). More specifically, the first outer edge is provided in the center in the V direction of the element isolation region 213 between the amplification transistor AMP and the selection transistor SEL. The second outer edge is the outer edge of the other end in the V direction (the end on the lower side of the paper in FIG. 69) of the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP. This second outer edge is provided between the selection transistor SEL included in the pixel sharing unit 539 and the amplification transistor AMP included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on the other side in the V direction (the lower side of the paper in FIG. 69). More specifically, the second outer edge is provided in the center in the V direction of the element isolation region 213 between the selection transistor SEL and the amplification transistor AMP. The third outer edge is the outer edge of the other end in the V direction (the end on the lower side of the paper in FIG. 69) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This third outer edge is provided between the FD conversion gain switching transistor FDG included in the pixel shared unit 539 and the reset transistor RST included in the pixel shared unit 539 adjacent to the other side in the V direction (the lower side of the paper in FIG. 69) of this pixel shared unit 539. More specifically, the third outer edge is provided in the center in the V direction of the element isolation region 213 between the FD conversion gain switching transistor FDG and the reset transistor RST. The fourth outer edge is the outer edge of one end in the V direction (the end on the upper side of the paper in FIG. 69) of the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. This fourth outer edge is provided between the reset transistor RST included in the pixel sharing unit 539 and the FD conversion gain switching transistor FDG (not shown) included in the pixel sharing unit 539 adjacent to the pixel sharing unit 539 on one side of the V direction (the upper side of the paper in Figure 69).More specifically, the fourth outer edge is provided at the center in the V direction of the element isolation region 213 (not shown) between the reset transistor RST and the FD conversion gain switching transistor FDG.

[0239] In the outline of the pixel sharing unit 539 of the second substrate 200 including such first, second, third, and fourth outer edges, the third and fourth outer edges are arranged to be shifted to one side in the V direction with respect to the first and second outer edges (in other words, offset to one side in the V direction). By using such a layout, it is possible to arrange both the gate of the amplification transistor AMP and the source of the FD conversion gain switching transistor FDG as close as possible to the pad section 120. Therefore, the area of ​​the wiring connecting them is reduced, and it becomes easier to miniaturize the imaging device 1. The VSS contact region 218 is provided between the semiconductor layer 200S including the selection transistor SEL and the amplification transistor AMP and the semiconductor layer 200S including the reset transistor RST and the FD conversion gain switching transistor FDG. For example, the multiple pixel circuits 210 have the same arrangement.

[0240] The imaging device 1 having such a second substrate 200 can also obtain the same effects as those described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangements described in the above embodiment and this modified example.

[0241] <4. Variation 3> 73 to 78 show a modified example of the planar configuration of the imaging device 1 according to the above embodiment. FIG. 73 shows a schematic planar configuration of the first substrate 100, and corresponds to FIG. 54B described in the above embodiment. FIG. 74 shows a schematic planar configuration of the semiconductor layer 200S of the second substrate 200 near the surface, and corresponds to FIG. 55 described in the above embodiment. FIG. 75 shows a schematic configuration of the first wiring layer W1 and the semiconductor layer 200S and each part of the first substrate 100 connected to the first wiring layer W1, and corresponds to FIG. 56 described in the above embodiment. FIG. 76 shows an example of the planar configuration of the first wiring layer W1 and the second wiring layer W2, and corresponds to FIG. 57 described in the above embodiment. FIG. 77 shows an example of the planar configuration of the second wiring layer W2 and the third wiring layer W3, and corresponds to FIG. 58 described in the above embodiment. FIG. 78 shows an example of a planar configuration of the third wiring layer W3 and the fourth wiring layer W4, and corresponds to FIG. 59 described in the above embodiment.

[0242] In this modification, the semiconductor layer 200S of the second substrate 200 extends in the H direction (FIG. 75). That is, this substantially corresponds to a configuration obtained by rotating the planar configuration of the imaging device 1 shown in FIG. 68 and the like by 90 degrees.

[0243] For example, the pixel sharing unit 539 of the first substrate 100 is formed over a pixel region of 2 rows by 2 columns as described in the above embodiment, and has a substantially square planar shape ( FIG. 73 ). For example, in each pixel sharing unit 539, the transfer gates TG1 and TG2 of the pixels 541A and 541B in one pixel row extend toward the center of the pixel sharing unit 539 in the V direction, and the transfer gates TG3 and TG4 of the pixels 541C and 541D in the other pixel row extend toward the outside of the pixel sharing unit 539 in the V direction. The pad section 120 connected to the floating diffusion FD is provided in the center of the pixel sharing unit 539, and the pad section 121 connected to the VSS contact region 118 is provided at an end of the pixel sharing unit 539 at least in the V direction (in the V direction and H direction in FIG. 73 ). At this time, the V-direction positions of the through electrodes TGV1 and TGV2 of the transfer gates TG1 and TG2 approach the V-direction position of the through electrode 120E, and the V-direction positions of the through electrodes TGV3 and TGV4 of the transfer gates TG3 and TG4 approach the V-direction position of the through electrode 121E (FIG. 75). Therefore, for the same reason as described in the above embodiment, the width (size in the V direction) of the semiconductor layer 200S extending in the H direction can be increased. This makes it possible to increase the size of the amplification transistor AMP and suppress noise.

[0244] In each pixel circuit 210, the selection transistor SEL and the amplification transistor AMP are arranged side by side in the H direction, and the reset transistor RST is arranged adjacent to the selection transistor SEL in the V direction with the insulating region 212 between them (FIG. 74). The FD conversion gain switching transistor FDG is arranged side by side with the reset transistor RST in the H direction. The VSS contact region 218 is provided in an island shape in the insulating region 212. For example, the third wiring layer W3 extends in the H direction (FIG. 77), and the fourth wiring layer W4 extends in the V direction (FIG. 78).

[0245] The imaging device 1 having such a second substrate 200 can also obtain the same effects as those described in the above embodiment. The arrangement of the pixel sharing units 539 of the second substrate 200 is not limited to the arrangements described in the above embodiment and this modification. For example, the semiconductor layer 200S described in the above embodiment and modification 1 may extend in the H direction.

[0246] <5. Variation 4> Fig. 79 is a schematic diagram showing a modified cross-sectional configuration of the imaging device 1 according to the above embodiment. Fig. 79 corresponds to Fig. 50 described in the above embodiment. In this modified example, the imaging device 1 has contact portions 203, 204, 303, and 304 at positions facing the center of the pixel array section 540, in addition to the contact portions 201, 202, 301, and 302. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the above embodiment.

[0247] The contact portions 203 and 204 are provided on the second substrate 200, and are exposed on the bonding surface with the third substrate 300. The contact portions 303 and 304 are provided on the third substrate 300, and are exposed on the bonding surface with the second substrate 200. The contact portion 203 contacts the contact portion 303, and the contact portion 204 contacts the contact portion 304. That is, in this imaging device 1, the second substrate 200 and the third substrate 300 are connected by the contact portions 203, 204, 303, and 304 in addition to the contact portions 201, 202, 301, and 302.

[0248] Next, the operation of the imaging device 1 will be described with reference to FIG. 80 and FIG. 81. In FIG. 80, the input signal inputted from the outside to the imaging device 1, and the paths of the power supply potential and the reference potential are indicated by arrows. In FIG. 81, the signal path of the pixel signal outputted from the imaging device 1 to the outside is indicated by arrows. For example, the input signal inputted to the imaging device 1 via the input section 510A is transmitted to the row driver 520 of the third substrate 300, and the row driver 520 generates a row drive signal. This row drive signal is sent to the second substrate 200 via the contact sections 303 and 203. Furthermore, this row drive signal reaches each pixel sharing unit 539 of the pixel array section 540 via the row drive signal line 542 in the wiring layer 200T. Of the row drive signals that reach the pixel sharing units 539 of the second substrate 200, the drive signals other than the transfer gate TG are inputted to the pixel circuit 210, and each transistor included in the pixel circuit 210 is driven. A drive signal for the transfer gate TG is input to the transfer gates TG1, TG2, TG3, and TG4 of the first substrate 100 via the through electrode TGV, and the pixels 541A, 541B, 541C, and 541D are driven. In addition, a power supply potential and a reference potential supplied to an input section 510A (input terminal 511) of the third substrate 300 from the outside of the imaging device 1 are sent to the second substrate 200 via contact sections 303 and 203, and are supplied to the pixel circuits 210 of the pixel sharing units 539 via wiring in the wiring layer 200T. The reference potential is also supplied to the pixels 541A, 541B, 541C, and 541D of the first substrate 100 via the through electrode 121E. Meanwhile, pixel signals photoelectrically converted by the pixels 541A, 541B, 541C, and 541D of the first substrate 100 are sent to the pixel circuit 210 of the second substrate 200 for each pixel sharing unit 539. A pixel signal based on this pixel signal is sent from the pixel circuit 210 to the third substrate 300 via a vertical signal line 543 and contact units 204 and 304. This pixel signal is processed by a column signal processing unit 550 and an image signal processing unit 560 of the third substrate 300, and then output to the outside via an output unit 510B.

[0249] The imaging device 1 having such contact portions 203, 204, 303, and 304 can also provide the same effects as those described in the above embodiment. The positions and number of the contact portions can be changed depending on the design of the circuit of the third substrate 300 to which the wiring via the contact portions 303 and 304 is connected.

[0250] <6. Variation 5> Fig. 82 shows a modified cross-sectional configuration of the imaging device 1 according to the above embodiment. Fig. 82 corresponds to Fig. 53 described in the above embodiment. In this modification, a transfer transistor TR having a planar structure is provided on the first substrate 100. In this respect, the imaging device 1 of this modification differs from the imaging device 1 described in the above embodiment.

[0251] In the transfer transistor TR, the transfer gate TG is formed only by the horizontal portion TGb, In other words, the transfer gate TG does not have the vertical portion TGa and is provided opposite to the semiconductor layer 100S.

[0252] The imaging device 1 having such a planar-structured transfer transistor TR also provides the same effects as those described in the above embodiment. Furthermore, by providing the planar-type transfer gate TG on the first substrate 100, the photodiode PD can be formed closer to the surface of the semiconductor layer 100S than when a vertical-type transfer gate TG is provided on the first substrate 100, and this can be considered to increase the saturation signal amount (Qs). In addition, the method of forming the planar-type transfer gate TG on the first substrate 100 requires fewer manufacturing steps than the method of forming the vertical-type transfer gate TG on the first substrate 100, and it can be considered that the manufacturing steps are less likely to adversely affect the photodiode PD.

[0253] <7. Variation 6> Fig. 83 shows a modified example of the pixel circuit of the imaging device 1 according to the above embodiment. Fig. 83 corresponds to Fig. 51 described in the above embodiment. In this modified example, a pixel circuit 210 is provided for each pixel (pixel 541A). That is, the pixel circuit 210 is not shared by multiple pixels. In this respect, the imaging device 1 of this modified example differs from the imaging device 1 described in the above embodiment.

[0254] The imaging device 1 of this modification is the same as the imaging device 1 described in the above embodiment in that the pixel 541A and the pixel circuit 210 are provided on different substrates (the first substrate 100 and the second substrate 200). Therefore, the imaging device 1 according to this modification can also obtain the same effects as those described in the above embodiment.

[0255] <8. Variation 7> Fig. 84 shows a modified example of the planar configuration of pixel separation section 117 described in the above embodiment. Gaps may be provided in pixel separation section 117 surrounding each of pixels 541A, 541B, 541C, and 541D. That is, pixels 541A, 541B, 541C, and 541D do not have to be entirely surrounded by pixel separation section 117. For example, the gaps in pixel separation section 117 are provided in the vicinity of pad sections 120 and 121 (see Fig. 54B).

[0256] In the above embodiment, an example (see FIG. 53) has been described in which the pixel separator 117 has an FTI structure penetrating the semiconductor layer 100S, but the pixel separator 117 may have a structure other than the FTI structure. For example, the pixel separator 117 does not have to be provided so as to completely penetrate the semiconductor layer 100S, and may have a so-called DTI (Deep Trench Isolation) structure. This is also fine.

[0257] <9. Application Examples> FIG. 85 shows an example of a schematic configuration of an imaging system 7 including the imaging device 1 according to the above embodiment and its modified example.

[0258] The imaging system 7 is, for example, an electronic device such as an imaging device such as a digital still camera or a video camera, or a mobile terminal device such as a smartphone or a tablet terminal. The imaging system 7 includes, for example, the imaging device 1 according to the above embodiment and its modified example, a DSP circuit 243, a frame memory 244, a display unit 245, a storage unit 246, an operation unit 247, and a power supply unit 248. In the imaging system 7, the imaging device 1 according to the above embodiment and its modified example, the DSP circuit 243, the frame memory 244, the display unit 245, the storage unit 246, the operation unit 247, and the power supply unit 248 are connected to each other via a bus line 249.

[0259] The imaging device 1 according to the above embodiment and its modified examples outputs image data according to incident light. The DSP circuit 243 is a signal processing circuit that processes a signal (image data) output from the imaging device 1 according to the above embodiment and its modified examples. The frame memory 244 temporarily holds the image data processed by the DSP circuit 243 on a frame-by-frame basis. The display unit 245 is formed of a panel-type display device such as a liquid crystal panel or an organic EL (Electro Luminescence) panel, and displays a moving image or a still image captured by the imaging device 1 according to the above embodiment and its modified examples. The storage unit 246 records image data of a moving image or a still image captured by the imaging device 1 according to the above embodiment and its modified examples in a recording medium such as a semiconductor memory or a hard disk. The operation unit 247 issues operation commands for various functions of the imaging system 7 according to an operation by a user. The power supply unit 248 appropriately supplies various power sources that serve as operating power sources for the imaging device 1 according to the above embodiment and its modified examples, the DSP circuit 243, the frame memory 244, the display unit 245, the storage unit 246, and the operation unit 247 to these supply targets.

[0260] Next, the imaging procedure in the imaging system 7 will be described.

[0261] 86 shows an example of a flowchart of the imaging operation in the imaging system 7. The user operates the operation unit 247 to instruct the start of imaging (step S101). Then, the operation unit 247 transmits an imaging command to the imaging device 1 (step S102). Upon receiving the imaging command, the imaging device 1 (specifically, the system control circuit 36) executes imaging in a predetermined imaging method (step S103).

[0262] The imaging device 1 outputs image data obtained by imaging to the DSP circuit 243. Here, the image data refers to data for all pixels of pixel signals generated based on charges temporarily stored in the floating diffusion FD. The DSP circuit 243 performs predetermined signal processing (e.g., noise reduction processing, etc.) based on the image data input from the imaging device 1 (step S104). The DSP circuit 243 stores the image data that has been subjected to the predetermined signal processing in the frame memory 244, and the frame memory 244 stores the image data in the storage unit 246 (step S105). In this manner, imaging is performed in the imaging system 7.

[0263] In this application example, the imaging device 1 according to the above-described embodiment and its modified example is applied to an imaging system 7. This allows the imaging device 1 to be made smaller or have higher definition, so that a small or high-definition imaging system 7 can be provided. The solid-state imaging devices 1A, 1B1, 1B2, 1C, 1D, and 1E according to the first to sixth embodiments are also applied to the imaging system 7. The solid-state imaging devices 1F, 1G, and 1H according to eighth to tenth embodiments, which will be described later, are also applied to the imaging system 7.

[0264] <10. Application Examples> [Application example 1] The technology according to the present disclosure (the present technology) can be applied to various products. For example, the technology according to the present disclosure may be realized as a device mounted on any type of moving body such as an automobile, an electric vehicle, a hybrid electric vehicle, a motorcycle, a bicycle, a personal mobility device, an airplane, a drone, a ship, a robot, etc.

[0265] FIG. 87 is a block diagram showing a schematic configuration example of a vehicle control system, which is an example of a moving object control system to which the technology of the present disclosure can be applied.

[0266] The vehicle control system 12000 includes a plurality of electronic control units connected via a communication network 12001. In the example shown in Fig. 87, the vehicle control system 12000 includes a drive system control unit 12010, a body system control unit 12020, an outside-vehicle information detection unit 12030, an inside-vehicle information detection unit 12040, and an integrated control unit 12050. Also, as functional configurations of the integrated control unit 12050, a microcomputer 12051, an audio / video output unit 12052, and an in-vehicle network I / F (interface) 12053 are illustrated.

[0267] The drivetrain control unit 12010 controls the operation of devices related to the drivetrain of the vehicle in accordance with various programs. For example, the drivetrain control unit 12010 functions as a control device for a drive force generating device for generating a drive force of the vehicle, such as an internal combustion engine or a drive motor, a drive force transmission mechanism for transmitting the drive force to the wheels, a steering mechanism for adjusting the steering angle of the vehicle, and a braking device for generating a braking force of the vehicle.

[0268] The body system control unit 12020 controls the operation of various devices mounted on the vehicle body according to various programs. For example, the body system control unit 12020 functions as a control device for a keyless entry system, a smart key system, a power window device, or various lamps such as head lamps, back lamps, brake lamps, turn signals, and fog lamps. In this case, radio waves or signals of various switches transmitted from a portable device that replaces a key may be input to the body system control unit 12020. The body system control unit 12020 receives the input of these radio waves or signals and controls the door lock device, power window device, lamps, and the like of the vehicle.

[0269] The outside-vehicle information detection unit 12030 detects information outside the vehicle equipped with the vehicle control system 12000. For example, an imaging unit 12031 is connected to the outside-vehicle information detection unit 12030. The outside-vehicle information detection unit 12030 causes the imaging unit 12031 to capture an image outside the vehicle and receives the captured image. The outside-vehicle information detection unit 12030 may perform object detection processing or distance detection processing for a person, a car, an obstacle, a sign, or characters on a road surface, based on the received image.

[0270] The imaging unit 12031 is an optical sensor that receives light and outputs an electrical signal according to the amount of light received. The imaging unit 12031 can output the electrical signal as an image, or as distance measurement information. The light received by the imaging unit 12031 may be visible light or invisible light such as infrared light.

[0271] The in-vehicle information detection unit 12040 detects information inside the vehicle. For example, a driver state detection unit 12041 that detects the state of the driver is connected to the in-vehicle information detection unit 12040. The driver state detection unit 12041 includes, for example, a camera that captures an image of the driver, and the in-vehicle information detection unit 12040 may calculate the degree of fatigue or concentration of the driver based on the detection information input from the driver state detection unit 12041, or may determine whether the driver is dozing.

[0272] The microcomputer 12051 can calculate control target values ​​for the driving force generating device, the steering mechanism, or the braking device based on the information inside and outside the vehicle acquired by the outside-of-vehicle information detection unit 12030 or the inside-vehicle information detection unit 12040, and output a control command to the drive system control unit 12010. For example, the microcomputer 12051 can perform cooperative control aimed at realizing the functions of an ADAS (Advanced Driver Assistance System), including vehicle collision avoidance or impact mitigation, following driving based on the inter-vehicle distance, vehicle speed maintenance driving, vehicle collision warning, vehicle lane departure warning, etc.

[0273] In addition, the microcomputer 12051 can perform cooperative control for the purpose of autonomous driving, which allows the vehicle to travel autonomously without relying on the driver's operation, by controlling the driving force generating device, steering mechanism, braking device, etc. based on information about the surroundings of the vehicle acquired by the outside vehicle information detection unit 12030 or the inside vehicle information detection unit 12040.

[0274] Furthermore, the microcomputer 12051 can output a control command to the body system control unit 12020 based on the information outside the vehicle acquired by the outside-vehicle information detection unit 12030. For example, the microcomputer 12051 can control the headlamps according to the position of a preceding vehicle or an oncoming vehicle detected by the outside-vehicle information detection unit 12030, and perform cooperative control for the purpose of preventing glare, such as switching from high beams to low beams.

[0275] The audio / video output unit 12052 transmits at least one output signal of audio and image to an output device capable of visually or audibly notifying information to passengers in the vehicle or the outside of the vehicle. In the example of Fig. 87, an audio speaker 12061, a display unit 12062, and an instrument panel 12063 are exemplified as the output device. The display unit 12062 may include at least one of an on-board display and a head-up display, for example.

[0276] FIG. 88 is a diagram showing an example of the installation position of the imaging unit 12031.

[0277] In FIG. 88, a vehicle 12100 has imaging units 12101, 12102, 12103, 12104, and 12105 as an imaging unit 12031.

[0278] The imaging units 12101, 12102, 12103, 12104, and 12105 are provided at positions such as the front nose, side mirrors, rear bumper, back door, and the upper part of the windshield inside the vehicle cabin of the vehicle 12100. The imaging unit 12101 provided at the front nose and the imaging unit 12105 provided at the upper part of the windshield inside the vehicle cabin mainly acquire images of the front of the vehicle 12100. The imaging units 12102 and 12103 provided at the side mirrors mainly acquire images of the sides of the vehicle 12100. The imaging unit 12104 provided at the rear bumper or back door mainly acquires images of the rear of the vehicle 12100. The images of the front acquired by the imaging units 12101 and 12105 are mainly used to detect a preceding vehicle, a pedestrian, an obstacle, a traffic light, a traffic sign, a lane, or the like.

[0279] 88 shows an example of the imaging ranges of the imaging units 12101 to 12104. Imaging range 12111 indicates the imaging range of the imaging unit 12101 provided on the front nose, imaging ranges 12112 and 12113 indicate the imaging ranges of the imaging units 12102 and 12103 provided on the side mirrors, respectively, and imaging range 12114 indicates the imaging range of the imaging unit 12104 provided on the rear bumper or back door. For example, an overhead image of the vehicle 12100 viewed from above is obtained by superimposing the image data captured by the imaging units 12101 to 12104.

[0280] At least one of the imaging units 12101 to 12104 may have a function of acquiring distance information. For example, at least one of the imaging units 12101 to 12104 may be a stereo camera made up of a plurality of imaging elements, or may be an imaging element having pixels for detecting a phase difference.

[0281] For example, the microcomputer 12051 can extract, as a preceding vehicle, a three-dimensional object that is the closest three-dimensional object on the travel path of the vehicle 12100 and travels at a predetermined speed (for example, 0 km / h or more) in approximately the same direction as the vehicle 12100, by calculating the distance to each three-dimensional object in the imaging ranges 12111 to 12114 and the change over time of this distance (relative speed with respect to the vehicle 12100) based on the distance information obtained from the imaging units 12101 to 12104. Furthermore, the microcomputer 12051 can set a vehicle distance to be secured in advance in front of the preceding vehicle, and perform automatic brake control (including follow-up stop control) and automatic acceleration control (including follow-up start control). In this way, cooperative control can be performed for the purpose of automatic driving that travels autonomously without relying on the driver's operation.

[0282] For example, the microcomputer 12051 classifies and extracts three-dimensional object data on three-dimensional objects into two-wheeled vehicles, ordinary vehicles, large vehicles, pedestrians, utility poles, and other three-dimensional objects based on distance information obtained from the imaging units 12101 to 12104, and can use the data for automatic obstacle avoidance. For example, the microcomputer 12051 distinguishes obstacles around the vehicle 12100 into obstacles that are visible to the driver of the vehicle 12100 and obstacles that are difficult to see. Then, the microcomputer 12051 determines a collision risk indicating the risk of collision with each obstacle, and when the collision risk is equal to or greater than a set value and a collision is possible, the microcomputer 12051 can provide driving assistance for collision avoidance by outputting an alarm to the driver via the audio speaker 12061 or the display unit 12062, or by performing forced deceleration or avoidance steering via the drive system control unit 12010.

[0283] At least one of the imaging units 12101 to 12104 may be an infrared camera that detects infrared rays. For example, the microcomputer 12051 can recognize a pedestrian by determining whether or not a pedestrian is present in the captured images of the imaging units 12101 to 12104. The recognition of such a pedestrian is performed, for example, by a procedure of extracting feature points in the captured images of the imaging units 12101 to 12104 as infrared cameras, and a procedure of performing pattern matching processing on a series of feature points that indicate the contour of an object to determine whether or not the object is a pedestrian. When the microcomputer 12051 determines that a pedestrian is present in the captured images of the imaging units 12101 to 12104 and recognizes the pedestrian, the audio / image output unit 12052 controls the display unit 12062 to superimpose a rectangular contour line for emphasis on the recognized pedestrian. The audio / image output unit 12052 may also control the display unit 12062 to display an icon or the like indicating a pedestrian at a desired position.

[0284] An example of a mobile object control system to which the technology according to the present disclosure can be applied has been described above. The technology according to the present disclosure can be applied to the imaging unit 12031 among the configurations described above. Specifically, the imaging device 1 according to the above embodiment and its modified example, the solid-state imaging devices 1A to 1E according to the first to sixth embodiments described above, and the solid-state imaging devices 1F, 1G, and 1H according to the eighth to tenth embodiments described below can be applied to the imaging unit 12031. By applying the technology according to the present disclosure to the imaging unit 12031, a high-definition captured image with little noise can be obtained, and therefore, a highly accurate control using the captured image can be performed in the mobile object control system.

[0285] [Application example 2] FIG. 89 is a diagram showing an example of a schematic configuration of an endoscopic surgery system to which the technology according to the present disclosure (the present technology) can be applied.

[0286] 89 shows a state in which an operator (doctor) 11131 is performing surgery on a patient 11132 on a patient bed 11133 using an endoscopic surgery system 11000. As shown in the figure, the endoscopic surgery system 11000 is composed of an endoscope 11100, other surgical tools 11110 such as an insufflation tube 11111 and an energy treatment tool 11112, a support arm device 11120 that supports the endoscope 11100, and a cart 11200 on which various devices for endoscopic surgery are mounted.

[0287] The endoscope 11100 is composed of a lens barrel 11101, a region of a predetermined length from the tip of which is inserted into a body cavity of a patient 11132, and a camera head 11102 connected to the base end of the lens barrel 11101. In the illustrated example, the endoscope 11100 is configured as a so-called rigid scope having a rigid lens barrel 11101, but the endoscope 11100 may be configured as a so-called flexible scope having a flexible lens barrel.

[0288] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 11101. A light source device 11203 is connected to the endoscope 11100, and light generated by the light source device 11203 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 11101, and is irradiated via the objective lens toward an observation target in the body cavity of the patient 11132. The endoscope 11100 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0289] An optical system and an image sensor are provided inside the camera head 11102, and reflected light (observation light) from an observation target is collected on the image sensor by the optical system. The observation light is photoelectrically converted by the image sensor to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. The image signal is transmitted to a camera control unit (CCU) 11201 as RAW data.

[0290] The CCU 11201 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and performs overall control of the operations of the endoscope 11100 and the display device 11202. Furthermore, the CCU 11201 receives an image signal from the camera head 11102, and performs various types of image processing on the image signal, such as development processing (demosaic processing), for displaying an image based on the image signal.

[0291] Under the control of the CCU 11201, the display device 11202 displays an image based on an image signal that has been subjected to image processing by the CCU 11201.

[0292] The light source device 11203 is composed of a light source such as an LED (Light Emitting Diode), and supplies the endoscope 11100 with irradiation light when photographing an operation site or the like.

[0293] The input device 11204 is an input interface for the endoscopic surgery system 11000. A user can input various information and instructions to the endoscopic surgery system 11000 via the input device 11204. For example, the user inputs an instruction to change the imaging conditions (type of irradiated light, magnification, focal length, etc.) of the endoscope 11100.

[0294] The treatment tool control device 11205 controls the driving of the energy treatment tool 11112 for cauterizing tissue, incising, sealing blood vessels, etc. The insufflation device 11206 sends gas into the body cavity of the patient 11132 via the insufflation tube 11111 to inflate the body cavity for the purpose of securing the field of view of the endoscope 11100 and securing the working space of the surgeon. The recorder 11207 is a device capable of recording various information related to the surgery. The printer 11208 is a device capable of printing various information related to the surgery in various formats such as text, image, or graph.

[0295] The light source device 11203 that supplies irradiation light to the endoscope 11100 when photographing the surgical site can be composed of a white light source composed of, for example, an LED, a laser light source, or a combination of these. When the white light source is composed of a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, so that the white balance of the captured image can be adjusted in the light source device 11203. In this case, it is also possible to capture images corresponding to each of the RGB colors in a time-division manner by irradiating the observation object with laser light from each of the RGB laser light sources in a time-division manner and controlling the driving of the image sensor of the camera head 11102 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0296] The light source device 11203 may be controlled to change the intensity of the light it outputs at predetermined time intervals. The driving of the image sensor of the camera head 11102 may be controlled in synchronization with the timing of the change in the light intensity to obtain images in a time-division manner, and the images may be synthesized to generate an image with a high dynamic range that is free of so-called blackout and whiteout.

[0297] The light source device 11203 may be configured to supply light of a predetermined wavelength band corresponding to the special light observation. In the special light observation, for example, by utilizing the wavelength dependency of light absorption in body tissue, a narrow band light is irradiated compared to the irradiated light (i.e., white light) during normal observation, and a predetermined tissue such as blood vessels on the mucous membrane surface is photographed with high contrast, so-called narrow band imaging is performed. Alternatively, in the special light observation, a fluorescent observation may be performed in which an image is obtained by fluorescence generated by irradiating an excitation light. In the fluorescent observation, it is possible to irradiate an excitation light to a body tissue and observe the fluorescence from the body tissue (autofluorescence observation), or to locally inject a reagent such as indocyanine green (ICG) into the body tissue and irradiate the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 11203 may be configured to supply narrow band light and / or excitation light corresponding to such special light observation.

[0298] FIG. 90 is a block diagram showing an example of the functional configuration of the camera head 11102 and the CCU 11201 shown in FIG.

[0299] The camera head 11102 has a lens unit 11401, an imaging unit 11402, a drive unit 11403, a communication unit 11404, and a camera head control unit 11405. The CCU 11201 has a communication unit 11411, an image processing unit 11412, and a control unit 11413. The camera head 11102 and the CCU 11201 are connected to each other by a transmission cable 11400 so as to be able to communicate with each other.

[0300] The lens unit 11401 is an optical system provided at the connection portion with the lens barrel 11101. Observation light taken in from the tip of the lens barrel 11101 is guided to the camera head 11102 and enters the lens unit 11401. The lens unit 11401 is configured by combining a plurality of lenses including a zoom lens and a focus lens.

[0301] The imaging unit 11402 is composed of an imaging element. The imaging element constituting the imaging unit 11402 may be one (so-called single-plate type) or multiple (so-called multi-plate type). When the imaging unit 11402 is composed of a multi-plate type, for example, each imaging element may generate an image signal corresponding to each of RGB, and a color image may be obtained by combining the image signals. Alternatively, the imaging unit 11402 may be configured to have a pair of imaging elements for acquiring image signals for the right eye and the left eye corresponding to 3D (Dimensional) display. By performing 3D display, the surgeon 11131 can more accurately grasp the depth of the biological tissue in the surgical site. Note that when the imaging unit 11402 is composed of a multi-plate type, multiple lens units 11401 may be provided corresponding to each imaging element.

[0302] Furthermore, the imaging unit 11402 does not necessarily have to be provided in the camera head 11102. For example, the imaging unit 11402 may be provided inside the lens barrel 11101, immediately behind the objective lens.

[0303] The driving unit 11403 is configured by an actuator, and moves the zoom lens and focus lens of the lens unit 11401 by a predetermined distance along the optical axis under the control of the camera head control unit 11405. This allows the magnification and focus of the image captured by the imaging unit 11402 to be appropriately adjusted.

[0304] The communication unit 11404 is configured by a communication device for transmitting and receiving various information to and from the CCU 11201. The communication unit 11404 transmits the image signal obtained from the imaging unit 11402 to the CCU 11201 via the transmission cable 11400 as RAW data.

[0305] Furthermore, the communication unit 11404 receives a control signal for controlling the driving of the camera head 11102 from the CCU 11201, and supplies the control signal to the camera head control unit 11405. The control signal includes information on the imaging conditions, such as information specifying the frame rate of the captured image, information specifying the exposure value at the time of capturing the image, and / or information specifying the magnification and focus of the captured image.

[0306] The image capturing conditions such as the frame rate, exposure value, magnification, and focus may be appropriately specified by a user, or may be automatically set by the control unit 11413 of the CCU 11201 based on an acquired image signal. In the latter case, the endoscope 11100 is equipped with a so-called AE (Auto Exposure) function, AF (Auto Focus) function, and AWB (Auto White Balance) function.

[0307] The camera head control unit 11405 controls the driving of the camera head 11102 based on a control signal received from the CCU 11201 via the communication unit 11404.

[0308] The communication unit 11411 is configured with a communication device for transmitting and receiving various information to and from the camera head 11102. The communication unit 11411 receives an image signal transmitted from the camera head 11102 via the transmission cable 11400.

[0309] Furthermore, the communication unit 11411 transmits, to the camera head 11102, a control signal for controlling the driving of the camera head 11102. The image signal and the control signal can be transmitted by electrical communication, optical communication, or the like.

[0310] The image processing unit 11412 performs various types of image processing on the image signal, which is RAW data sent from the camera head 11102 .

[0311] The control unit 11413 performs various controls related to imaging of the surgical site etc. by the endoscope 11100 and display of the captured image obtained by imaging the surgical site etc. For example, the control unit 11413 generates a control signal for controlling the driving of the camera head 11102.

[0312] Further, the control unit 11413 causes the display device 11202 to display the captured image showing the surgical site, etc., based on the image signal that has been image-processed by the image processing unit 11412. At this time, the control unit 11413 may recognize various objects in the captured image using various image recognition techniques. For example, the control unit 11413 can recognize surgical tools such as forceps, specific living body parts, bleeding, mist when the energy treatment tool 11112 is used, etc., by detecting the shape and color of the edge of an object included in the captured image. When the control unit 11413 causes the display device 11202 to display the captured image, it may use the recognition result to superimpose various types of surgery support information on the image of the surgical site. By superimposing and presenting the surgery support information to the surgeon 11131, the burden on the surgeon 11131 can be reduced and the surgeon 11131 can proceed with the surgery reliably.

[0313] The transmission cable 11400 connecting the camera head 11102 and the CCU 11201 is an electrical signal cable for communication of electrical signals, an optical fiber for optical communication, or a composite cable of these.

[0314] Here, in the illustrated example, communication is performed wired using a transmission cable 11400, but communication between the camera head 11102 and the CCU 11201 may also be performed wirelessly.

[0315] An example of an endoscopic surgery system to which the technology according to the present disclosure can be applied has been described above. Of the configurations described above, the technology according to the present disclosure can be suitably applied to the imaging unit 11402 provided in the camera head 11102 of the endoscope 11100. By applying the technology according to the present disclosure to the imaging unit 11402, the imaging unit 11402 can be made smaller or have higher resolution, so that a small or high-resolution endoscope 11100 can be provided.

[0316] Eighth embodiment <Configuration of solid-state imaging device> The solid-state imaging device 1F of the eighth embodiment of the present technology has a configuration basically similar to that of the solid-state imaging device 1B2 of the third embodiment described above, with the configurations of the MIS contact portion, the first insulating layer, and the conductive plug being different.

[0317] That is, as shown in Fig. 91A, a solid-state imaging device 1F according to the eighth embodiment of the present technology includes MIS contact portions 906a and 906b, an insulating layer 721 as a first insulating layer, and conductive plugs 923a and 923b, instead of the MIS contact portions 840a and 840b, the insulating layer 720 as a first insulating layer, and the conductive plugs 823a and 823b of the third embodiment shown in Fig. 26. The other configurations are generally similar to those of the third embodiment described above.

[0318] 91A, the insulating layer 721 has an interlayer insulating film 901 provided on the semiconductor layer 701 so as to cover the island region 703 and the element isolation region (isolation region) 702, and an interlayer insulating film 907 provided on the interlayer insulating film 901 so as to cover conductive pads 905a and 905b (described later). Each of the interlayer insulating films 901 and 907 is formed of, for example, one of a silicon oxide film (SiO), a silicon nitride film (SiN), a silicon oxynitride film (SiON), or a silicon carbonitride film (SiCN), or a laminated film formed by laminating two or more of these films.

[0319] 91A, the MIS contact portion 906a is configured such that a conductive pad 905a is connected to a side surface of each contact region 705 via an insulating film 903 between adjacent contact regions 705 with an element isolation region 702 interposed therebetween. That is, the MIS contact portion 906a has the contact region 705, the insulating film 903, and the conductive pad 905a. 91A, the MIS contact portion 906b is configured such that a conductive pad 905b is connected to a side surface of each contact region 706 via an insulating film 903 between adjacent contact regions 706 with the element isolation region 702 interposed therebetween. That is, the MIS contact portion 906b has the contact region 706, the insulating film 903, and the conductive pad 905b.

[0320] As shown in FIG. 91B and FIG. 91C, the conductive pad 905a of the MIS contact portion 906a is connected to the side surfaces of the four adjacent contact regions 705 via the insulating film 903 at the first intersection 702a of the element isolation region 702. The conductive pad 905a has a body portion 905a1 connected to the side surfaces of the four contact regions 705 via the insulating film 903 in a recess 902a provided on the main surface side (the first surface side of the first surface and the second surface located on opposite sides) of the semiconductor layer 701, and a head portion 905a2 that is wider than the body portion 905a1 and is formed integrally with the body portion 905a1. In this eighth embodiment, the recess 902a extends from the upper surface side of the interlayer insulating film 901 to the semiconductor layer 701. The body portion 905a1 is embedded in the recess 902a. A head 905a2 of the conductive pad 905a protrudes from the recess 902a. The insulating film 903 is provided so as to cover the sidewall and bottom surfaces of the recess 902a. The recess 902a is preferably formed so that the bottom surface is located deeper than the contact region 705, in other words, the bottom surface is located closer to the light incident surface side of the semiconductor layer 701 (the second surface side of the first surface and the second surface located opposite each other) than the contact region 705. Also, the body 905a1 of the conductive pad 905a is preferably formed so as to protrude closer to the light incident surface side of the semiconductor layer 701 than the contact region 705.

[0321] As shown in FIG. 91B and FIG. 91C, the conductive pad 905b of the MIS contact portion 906b is connected to the side surfaces of the four adjacent contact regions 706 via the insulating film 903 at the second intersection 702b of the element isolation region 702. The conductive pad 905b has a body portion 905b1 connected to the side surfaces of the four contact regions 706 via the insulating film 903 in a recess 902b provided on the main surface side of the semiconductor layer 701, and a head portion 905b2 that is wider than the body portion 905b1 and is formed integrally with the body portion 905b1. In this eighth embodiment, the recess 902b extends from the upper surface side of the interlayer insulating film 901 to the semiconductor layer 701. The body portion 905a1 is embedded in the recess 902b. The head portion 905b2 of the conductive pad 905b protrudes from the recess 902b. The insulating film 903 is provided so as to cover the sidewall surface and the bottom surface of the recess 902b. It is preferable that the bottom surface of this recess 902b is also formed at a position deeper than the contact region 706, in other words, at a depth where the bottom surface is located closer to the light incident surface of the semiconductor layer 701 than the contact region 706. It is also preferable that the body portion 905b1 of the conductive pad 905b is formed so as to protrude closer to the light incident surface of the semiconductor layer 701 than the contact region 706.

[0322] 91B and 91C, the heads 905a2 and 905b2 of the conductive pads 905a and 905b have, for example, a rectangular shape in plan view. The bodies 905a1 and 905b1 of the conductive pads 905a and 905b and the recesses 901a and 901b also have, for example, a rectangular cross-sectional shape in plan view. The conductive pads 905a and 905b are formed of, for example, a polycrystalline silicon film (doped polysilicon film) into which impurities for reducing the resistance value are introduced during or after the film formation. The insulating film 903 is an amorphous film, for example, a titanium oxide film (TiO2 film) or a strontium titanate film (SrTiO x A membrane) can be used.

[0323] The MIS contacts 906a and 906b, like the MIS contacts 840a and 840b of the second and third embodiments, use the insulating film 903 to block the wave function of electrons penetrating from the metal (polycrystalline silicon film) side into the band gap of the semiconductor (contact regions 705, 706), and use an interface dipole generated at the insulating film / semiconductor (contact regions 705, 706) interface to generate an electric field that effectively reduces the Schottky barrier, thereby enabling a contact with a lower resistance than that between the polycrystalline silicon (conductive pads 905a, 905b) and the crystalline silicon (contact regions 705, 706). The MIS contacts are described in the document listed in paragraph

[0064] .

[0324] 91A, the conductive pad 905a of the MIS contact portion 906a is electrically connected to a wiring 827a via a conductive plug 923a embedded in a connection hole 921a that reaches the surface of the head portion 905a2 of the conductive pad 905a from the surface (upper surface) of the insulating layer 820. This wiring 827a is electrically connected to a gate electrode 806a of the amplification transistor AMP provided on the second substrate portion 20 via a conductive plug 826a embedded in a connection hole 825a, as in the first and third embodiments described above.

[0325] 91A, the conductive pad 905b of the MIS contact unit 906b is electrically connected to a wiring 827c via a conductive plug 923b embedded in a connection hole 921b that reaches the surface of the head 905b2 of the conductive pad 905b from the surface (upper surface) of the insulating layer 820. This wiring 827c is also electrically connected to an island region 803b provided in the second substrate unit 20 via a conductive plug 826c embedded in a connection hole 825c, as in the first and third embodiments described above.

[0326] <Method of Manufacturing Solid-State Imaging Device> Next, a manufacturing method of the solid-state imaging device 1F according to the eighth embodiment of the present technology will be described. First, as shown in FIG. 92, an element isolation region 702, an island region 703, a well region 704, a photodiode PD, a transfer transistor TR, contact regions 705 and 706, and the like are formed in a semiconductor layer 701.

[0327] Next, as shown in FIG. 93, an interlayer insulating film 901 is formed as an insulating layer 721 on the entire main surface of the semiconductor layer 701 so as to cover the island region 703 and the gate electrode 710 .

[0328] 93, recesses 902a and 902b are individually formed at the first intersection 702a and the second intersection 702b of the element isolation region 702 in a plan view, so as to extend from the upper surface of the interlayer insulating film 901 to the semiconductor layer 701. It is preferable that the recess 902a is formed to a depth protruding toward the light incident surface of the semiconductor layer 701 beyond the contact region 705, and the recess 902b is formed to a depth protruding toward the light incident surface of the semiconductor layer 701 beyond the contact region 706. In this step, the side surfaces of the four contact regions 705 are exposed on the inner sidewall surface of the recess 902a, and the side surfaces of the four contact regions 706 are exposed on the inner sidewall surface of the recess 902b.

[0329] Next, as shown in FIG. 94, a titanium oxide film (TiOx film) or a strontium titanate film (SrTiO x An insulating film 903 made of a SiO 2 film is formed by an ALD method or a sputtering method. The insulating film 903 is formed along the sidewall and bottom surfaces of the recess 902a, and the side surfaces of each of the four contact regions 705 exposed on the inner sidewall surface of the recess 902a are covered with the insulating film 903. The insulating film 903 is formed along the sidewall and bottom surfaces of the recess 903b, and the side surfaces of each of the four contact regions 706 exposed on the inner sidewall surface of the recess 903b are covered with the insulating film 903.

[0330] 94, a polycrystalline silicon film 904 having a thickness capable of filling the recesses 902a and 902b as a pad material is formed on the entire surface of the insulating film 903 including the recesses 902a and 902b by a low-temperature CVD method at 550° C. Impurities for reducing the resistance value are introduced into the polycrystalline silicon film 904 during or after the film formation. In this embodiment, the polycrystalline silicon film 904 is formed to a thickness of, for example, about 100 nm.

[0331] Next, the polycrystalline silicon film 904 and the insulating film 903 are patterned in this order to form a conductive pad 905a at a first intersection 702a of the element isolation region 702 in a plan view, and a conductive pad 905b at a second intersection 702b of the element isolation region 702, as shown in Fig. 95. The conductive pad 905a has a body 905a1 connected via the insulating film 903 to each side of the four contact regions 705 in a recess 902a provided on the main surface side of the semiconductor layer 701, and a head 905a2 which is wider than the body 905a1 and formed integrally with the body 905a1. Moreover, the conductive pad 905b has a body portion 905b1 connected to each side surface of the four contact regions 706 via an insulating film 903 in a recess 902b provided on the main surface side of the semiconductor layer 701, and a head portion 905b2 that is wider than the body portion 905b1 and formed integrally with the body portion 905b1. Through this process, an MIS contact portion 906a including the conductive pad 905a, the insulating film 903, and the contact region 705 is formed. Also, an MIS contact portion 906b including the conductive pad 905b, the insulating film 903, and the contact region 706 is formed.

[0332] 96, an interlayer insulating film 907 is formed as the insulating layer 721 on the entire surface of the interlayer insulating film 901 so as to cover the conductive pads 905a and 905b. By this process, a substrate part in which up to the insulating layer 721 is formed on the semiconductor layer 701 is constructed.

[0333] Next, as shown in Fig. 97, a substrate portion is prepared on which insulating layer 820 is formed as a second insulating layer covering semiconductor layer 801. Then, as shown in Fig. 98, insulating layer 721 on the main surface side of semiconductor layer 701 and insulating film 802 on the back surface side of semiconductor layer 801 are placed face to face and bonded to each other by heat treatment.

[0334] 99, a connection hole 921a is formed so as to reach the surface of the conductive pad 905a from the surface of the insulating layer 820, and a connection hole 921b is formed so as to reach the surface of the conductive pad 905b from the surface of the insulating layer 820. These connection holes 921a and 921b are formed using well-known photolithography and anisotropic dry etching techniques.

[0335] Next, as shown in Fig. 100, a conductive material is filled into the contact holes 921a, 921b by the same method as in the first and second embodiments described above, to form conductive plugs 923a, 923b in the contact holes 921a, 921b. Then, the same method as in the first and second embodiments described above is applied to form contact holes 825a-825c, conductive plugs 826a-826c, wirings 827a-827c, an insulating film 828, wirings 829, and the like. After bonding the third substrate unit 30, a planarization film 831, a color filter 832, a microlens 833, and the like are formed on the rear surface of the semiconductor layer 701. This almost completes the solid-state imaging device 1F according to the eighth embodiment shown in Figs. 91A-91C.

[0336] <Effects of the Eighth Embodiment> Next, the main effects of the eighth embodiment will be described. According to the solid-state imaging device 1F according to the eighth embodiment of the present technology, since the MIS contact portion 906a can be configured by forming the thin insulating film 903 between the contact region 705 and the conductive pad 905a, a low-resistance floating diffusion shared contact structure can be obtained. Also, since the MIS contact portion 906b can be formed by forming the thin insulating film 903 between the contact region 706 and the conductive pad 905b, a low-resistance contact structure can be obtained.

[0337] Furthermore, in the solid-state imaging device 1F according to the eighth embodiment, the conductive plug 923a and the contact region 705 are electrically connected by the MIS contact portion 906a, so that it is possible to reduce the resistance value of the conductive path electrically connecting the gate electrode 806a of the amplifying transistor AMP provided in the upper second substrate portion 20 and the contact region 705 provided in the lower first substrate portion 10. Furthermore, since the contact region 705 shares the floating diffusion FD, it is possible to increase the operating speed of the pixel unit PU.

[0338] Furthermore, in the solid-state imaging device 1F of the eighth embodiment, the conductive plug 923b and the contact region 706 are electrically connected by the MIS contact portion 906b, thereby making it possible to reduce the resistance value of the conductive path electrically connecting the island region 803b provided in the second substrate portion 20 at the upper level and the contact region 706 provided in the first substrate portion 10 at the lower level.

[0339] Moreover, the MIS contact portion 906a is configured such that a conductive pad 905a is connected to a side surface of each contact region 705 via an insulating film 903 between the contact regions 705 adjacent to each other across the element isolation region 702. Moreover, the MIS contact portion 906b is configured such that a conductive pad 905b is connected to a side surface of each contact region 706 via an insulating film 903 between the contact regions 706 adjacent to each other across the element isolation region 702. Therefore, according to the solid-state imaging device 1F according to the eighth embodiment, it is possible to narrow the distance between the shared pixels, and it is possible to achieve high sensitivity by miniaturization and enlarging the pixel region.

[0340] Moreover, the conductive pad 905a of the MIS contact portion 906a has a body portion 905a1 connected to each side surface of the four contact regions 705 via an insulating film 903 in a recess 902a provided on the main surface side of the semiconductor layer 701, and a head portion 905a2 that is wider than the body portion 905a1 and formed integrally with the body portion 905a1. Therefore, according to the solid-state imaging device 1F according to the eighth embodiment, it is possible to narrow the space between the shared pixels, and to suppress poor connection between the conductive plug 923a and the MIS contact portion 906a caused by mask misalignment.

[0341] Moreover, the conductive pad 905b of the MIS contact portion 906b has a body portion 905b1 connected to each side surface of the four contact regions 706 via an insulating film 903 in a recess 902b provided on the main surface side of the semiconductor layer 701, and a head portion 905b2 that is wider than the body portion 905b1 and formed integrally with the body portion 905b1. Therefore, according to the solid-state imaging device 1F according to the eighth embodiment, it is possible to narrow the space between the shared pixels, and to suppress poor connection between the conductive plug 923b and the MIS contact portion 906b caused by mask misalignment.

[0342] Furthermore, according to the manufacturing method of the solid-state imaging device 1F of the eighth embodiment, a conductive pad 905a is formed in a recess 902a provided between adjacent contact regions 705, connected to each of the contact regions 705 via an insulating film 903, and a conductive pad 905b is formed in a recess 902b provided between adjacent contact regions 706, connected to each of the contact regions 706 via an insulating film 903, so that a solid-state imaging device 1F can be provided that can be made more sensitive by miniaturizing the device and enlarging the pixel area.

[0343] Furthermore, according to the manufacturing method of the solid-state imaging device 1F of the eighth embodiment, a substrate portion having a second active element that has already been formed by performing high-temperature heat treatment is bonded to a substrate portion having preformed MIS contact portions 906a, 906b, so that it is possible to provide a solid-state imaging device 1F having MIS contact portions 906a, 906b that maintain low resistance.

[0344] <Modification of the Eighth Embodiment> In the above-described eighth embodiment, the cross-sectional shape in a plan view of each of the body parts 905a1 and 905b1 of the conductive pads 905a and 905b has been described as being rectangular. However, the present technology is not limited to the cross-sectional shape of the eighth embodiment. For example, as a first modification, as shown in FIG. 101, the cross-sectional shape of each of body portions 905a1, 905b1 of conductive pads 905a and 905b may be circular in plan view. As a second modification, as shown in FIG. 102, the cross-sectional shape of each of body portions 905a1, 905b1 of conductive pads 905a and 905b may be configured to be rectangular in plan view, with the diagonal line positioned on the element isolation region 702. As a third modified example, although not shown, the cross-sectional shape of each of the body portions 905a1, 905b1 of the conductive pads 905a and 905b in plan view may be configured as a rhombus, with the diagonal line positioned on the element isolation region 702. The circular shape of the first modified example, the rectangular shape of the second modified example, and the diamond shape of the third modified example are characterized by high contact reliability, ease of scaling, and ease of making the pixel portion larger. Also, the circular shape of the first modified example, the rectangular shape of the second modified example, and the diamond shape of the third modified example have a high tolerance for alignment variations in the patterning of the recesses 902a and 902b.

[0345] In the above-described eighth embodiment, the heads 905a2 and 905b2 of the conductive pads 905a and 905b are configured to have a rectangular planar shape in a plan view. However, the present technology is not limited to the cross-sectional shape of the eighth embodiment. For example, as shown in FIG. 101, the heads 905a2 and 905b2 of the conductive pads 905a and 905b may be configured to have a circular planar shape in a plan view. As shown in FIG. 102, the heads 905a2 and 905b2 of the conductive pads 905a and 905b may be configured to have a rectangular planar shape in a plan view, with the diagonal line positioned on the element isolation region 702. Although not shown, the heads 905a2 and 905b2 of the conductive pads 905a and 905b may be configured to have a diamond planar shape in a plan view.

[0346] Furthermore, the cross-sectional shape in a plan view of each of the body portions 905a1, 905b1 of the conductive pads 905a and 905b and the planar shape in a plan view of each of the head portions 905a2, 905b2 may be combined to have the same shape or different shapes. In addition, in the solid-state imaging device 1F of the above-mentioned eighth embodiment, the second substrate portion 20 may also be configured in such a way that semiconductor substrates 21 and 21A are stacked (multiple semiconductor substrates are stacked) as in the second substrate portion 20 shown in Figure 104 of the tenth embodiment described later.

[0347] Ninth embodiment A solid-state imaging device 1G according to the ninth embodiment of the present technology has a configuration basically similar to that of the solid-state imaging device 1B2 according to the above-described eighth embodiment, but differs in the configurations of the first insulating layer and the recess. That is, as shown in Fig. 103, a solid-state imaging device 1F according to the ninth embodiment of the present technology includes recesses 932a and 932b and an insulating layer 720 as a first insulating layer, instead of the recesses 902a and 902b and the insulating layer 721 as a first insulating layer of the eighth embodiment shown in Fig. 91A. The other configurations are generally similar to those of the above-mentioned eighth embodiment.

[0348] The recess 932a extends from the main surface side of the semiconductor layer 701 to the light incident surface side at the first intersection 702a of the element isolation region 702. A body 905a1 of the conductive pad 905a is embedded in the recess 902a. A head 905a2 of the conductive pad 905a protrudes from the recess 902a. The insulating film 903 is provided so as to cover the side and bottom surface of the recess 932a. That is, the conductive pad 905a of the ninth embodiment has a body 905a1 connected to each side of the four contact regions 705 via the insulating film 903 in the recess 932a provided on the main surface side of the semiconductor layer 701, and a head 905a2 that is wider than the body 905a1 and is formed integrally with the body 905a1.

[0349] The recess 932b extends from the main surface side of the semiconductor layer 701 to the light incident surface side at the second intersection 702b of the element isolation region 702. A body 905b1 of the conductive pad 905b is embedded in the recess 902b. A head 905b2 of the conductive pad 905b protrudes from the recess 932b. The insulating film 903 is provided so as to cover the side and bottom surface of the recess 932a. That is, the conductive pad 905b of the ninth embodiment has a body 905b1 connected to each side of the four contact regions 706 via the insulating film 903 in the recess 932b provided on the main surface side of the semiconductor layer 701, and a head 905b2 that is wider than the body 905b1 and is formed integrally with the body 905b1.

[0350] The insulating layer 720 is similar to the insulating layer 720 of the above-described first embodiment. The insulating layer 720 is provided on the semiconductor layer 701 so as to cover the island region 703 and the conductive pads 935a and 935b.

[0351] The solid-state imaging device 1G of the ninth embodiment thus configured also provides the same effects as those of the eighth embodiment described above. In addition, in the solid-state imaging device 1F of the above-mentioned eighth embodiment, the second substrate portion 20 may also be configured in such a way that semiconductor substrates 21 and 21A are stacked (multiple semiconductor substrates are stacked) as in the second substrate portion 20 shown in Figure 104 of the tenth embodiment described later.

[0352] Tenth embodiment 104 to 106 are cross-sectional views in the thickness direction showing a configuration example of a solid-state imaging device 1G according to the tenth embodiment of the present technology. FIG. 107 to FIG. 109 are cross-sectional views in the horizontal direction showing a layout example of a plurality of pixel units PU according to the tenth embodiment of the present technology. Note that the cross-sectional views shown in FIG. 104 to FIG. 106 are merely schematic views and are not intended to strictly and correctly show the actual structure. In the cross-sectional views shown in FIG. 104 to FIG. 106, the horizontal positions of the transistors and the impurity diffusion layers are intentionally changed at positions sec1 to sec3 in order to easily explain the configuration of the solid-state imaging device 1H on paper.

[0353] Specifically, in pixel unit PU of solid-state imaging device 1H shown in Fig. 104, the cross section at position sec1 is a cross section taken along line A1-A1' in Fig. 107, the cross section at position sec2 is a cross section taken along line B1-B1' in Fig. 108, and the cross section at position sec3 is a cross section taken along line C1-C1' in Fig. 109. Similarly, in solid-state imaging device 1H shown in Fig. 105, the cross section at position sec1 is a cross section taken along line A2-A2' in Fig. 107, the cross section at position sec2 is a cross section taken along line B2-B2' in Fig. 108, and the cross section at position sec3 is a cross section taken along line C2-C2' in Fig. 109. In the solid-state imaging device 1H shown in Figure 106, the cross section at position sec1 is a cross section taken along line A3-A3' in Figure 107, the cross section at position sec2 is a cross section taken along line B3-B3' in Figure 108, and the cross section at position sec3 is a cross section taken along line C3-C3' in Figure 109.

[0354] As shown in FIG. 104, the second substrate unit 20 is laminated on the front surface 10a side of the first substrate unit 10. A photodiode PD, a transfer transistor TR, and a floating diffusion FD are provided on the front surface 10a side of the first substrate unit 10. The photodiode PD, the transfer transistor TR, and the floating diffusion FD are each provided for each sensor pixel 12. The other surface of the first substrate unit 10 is a light incidence surface. The imaging device 1H is a back-illuminated imaging device, and a color filter and a light receiving lens are provided on the back surface. The color filter and the light receiving lens are each provided for each sensor pixel 12.

[0355] The semiconductor substrate 11 of the first substrate unit 10 is made of, for example, a silicon substrate. A well layer WE of a first conductivity type (e.g., p-type) is provided in a part of the front surface of the semiconductor substrate 11 and in the vicinity thereof, and a photodiode PD of a second conductivity type (e.g., n-type) is provided in a region deeper than the well layer WE. A well contact layer having a higher p-type concentration than the well layer WE, and an n-type floating diffusion FD are provided within the well layer WE.

[0356] The semiconductor substrate 11 is provided with an element isolation layer 16 that electrically isolates the adjacent sensor pixels 12 from each other. The element isolation layer 16 has, for example, an STI (Shallow Trench Isolation) structure and extends in the depth direction of the semiconductor substrate 11. In the semiconductor substrate 11, an impurity diffusion layer 17 is provided between the element isolation layer 16 and the photodiode PD. For example, the impurity diffusion layer 17 has a p-type layer and an n-type layer that are extended in the thickness direction of the semiconductor substrate 11. The p-type layer is located on the element isolation layer 16 side, and the n-type layer is located on the photodiode PD side. An insulating film 15 is provided on the front surface 11a side of the semiconductor substrate 11.

[0357] The second substrate unit 20 has a lower substrate 20a and an upper substrate 20b. The lower substrate 20a has a first semiconductor substrate 21. The first semiconductor substrate 21 is, for example, a silicon substrate made of single crystal silicon. An amplifier transistor AMP and an element isolation layer 213 surrounding the amplifier transistor AMP are provided on one surface 211a of the first semiconductor substrate 21. The element isolation layer 213 electrically isolates one amplifier transistor AMP and the other amplifier transistor AMP of adjacent pixel units PU. The lower substrate 20a has an insulating film 215 covering the front surface 211a of the first semiconductor substrate 21. The insulating film 215 covers the amplifier transistor AMP and the element isolation layer 213. The lower substrate 20a also has an insulating film 217 covering the other surface 211b of the first semiconductor substrate 21. The insulating film 15 of the first substrate unit 10 and the insulating film 217 of the lower substrate 20 a are bonded to each other to form an interlayer insulating film 228 .

[0358] The upper substrate 20b has a second semiconductor substrate 21A. The second semiconductor substrate 21A is, for example, a silicon substrate made of single crystal silicon. A reset transistor RST, a selection transistor SEL, and an element isolation layer 223 are provided on one surface 221a of the second semiconductor substrate 21A. For example, the element isolation layer 223 is provided between the reset transistor RST and the selection transistor SEL, and between the selection transistor SEL and the well layer of the second semiconductor substrate 21A. The upper substrate 20b has an insulating film 225 that covers the front surface 221a, the back surface 221b, and the side surface of the second semiconductor substrate 21A. The insulating film 215 of the lower substrate 20a and the insulating film 225 of the upper substrate 20b are bonded to each other to form an interlayer insulating film 226.

[0359] The imaging device 1H includes a plurality of wirings L1 to L10 provided in the interlayer insulating films 226, 228 and electrically connected to at least one of the first substrate unit 10 or the second substrate unit 20. The wiring L1 electrically connects the drain of the amplification transistor AMP to a power supply line VDD. The wiring L2 electrically connects four floating diffusions FD included in one pixel unit PU to a gate electrode AG of the amplification transistor AMP. The wiring L3 electrically connects the source of the amplification transistor AMP to the drain of the selection transistor SEL. The wiring L4 electrically connects the gate electrode SG of the selection transistor SEL to a pixel drive line 23 (see FIG. 1).

[0360] The wiring L5 electrically connects the source of the selection transistor SEL to the vertical signal line 24. The wiring L6 electrically connects the drain of the reset transistor RST to the power supply line VDD. The wiring L7 electrically connects the gate electrode RG (see FIG. 4A described later) of the reset trans...

Claims

1. a first semiconductor layer having a plurality of element formation regions disposed adjacent to each other with an element isolation region interposed therebetween, each of the element formation regions including a first active element; a contact region provided on a surface layer portion of each of the plurality of element formation regions on the element isolation region side; a conductive pad connected to the contact region of each of the plurality of element formation regions across the element isolation region; a first insulating layer covering the first semiconductor layer and the conductive pad; a second semiconductor layer disposed on the first insulating layer and having a second active element provided thereon; A second insulating layer covering the second semiconductor layer; a conductive plug embedded in a connection hole reaching the conductive pad from the second insulating layer and formed integrally with the conductive pad using the same material; Equipped with a first area of ​​the conductive pad in a first plan view is larger than a first area of ​​the conductive plug in a first plan view.

2. 2. The semiconductor device according to claim 1, wherein said conductive pad and said conductive plug are made of a high melting point metal material.

3. the first active element includes a photodiode and a transfer transistor having a source region electrically connected to a cathode region of the photodiode and a drain region electrically connected to the conductive plug; 2. The semiconductor device according to claim 1, wherein said second active element includes an amplifying transistor having a gate electrode electrically connected to said conductive plug.

4. forming a plurality of element formation regions in the first semiconductor layer, the element formation regions being partitioned by element isolation regions; forming a contact region on a surface layer portion of each of the plurality of element formation regions adjacent to each other via the element isolation region, the contact region being located on the side of the element isolation region; forming a pad core on the contact region of each of the plurality of element formation regions via an etching stopper film across the element isolation region; forming a first active element in each of the plurality of element formation regions; forming a first insulating layer covering the first semiconductor layer and the pad core; disposing a second semiconductor layer on the first insulating layer; forming a second active element in the second semiconductor layer by performing a process including a heat treatment; forming a second insulating layer covering the second semiconductor layer; forming a connection hole reaching the pad core from the second insulating layer; removing the pad core and the etching stopper film through the connection hole to form a space portion communicating with the connection hole; a step of filling the space and the connection hole with a conductive material to form a conductive pad connected to the contact region and a conductive plug integral with the conductive pad; A method for manufacturing a semiconductor device comprising the steps of:

5. 5. The method for manufacturing a semiconductor device according to claim 4, wherein the pad core is made of a non-doped polycrystalline silicon film.

6. The step of forming the second active element includes: forming a gate insulating film made of a thermal oxide film on a surface of the second semiconductor layer by performing a heat treatment; 5. The method of claim 4, further comprising the step of forming a source region and a drain region in a surface portion of the second semiconductor layer by performing a heat treatment.

7. a first semiconductor layer having a plurality of element formation regions disposed adjacent to each other with an element isolation region interposed therebetween, each of the element formation regions including a first active element; a contact region provided on a surface layer portion of each of the plurality of element formation regions on the element isolation region side; a conductive pad connected to the contact region of each of the plurality of element formation regions across the element isolation region; a first insulating layer covering the first semiconductor layer and the conductive pad; a second semiconductor layer disposed on the first insulating layer and having a second active element provided thereon; A second insulating layer covering the second semiconductor layer; a conductive plug embedded in a connection hole extending from the second insulating layer to the conductive pad; an insulating film provided between the conductive pad and the contact region; an area of ​​the conductive pad in a first plan view is larger than an area of ​​the conductive plug in a first plan view; a MIS contact portion is formed by the conductive pad, the insulating film, and the contact region.

8. 8. The semiconductor device according to claim 7, wherein said insulating film is an amorphous film.

9. 8. The semiconductor device according to claim 7, wherein the insulating film is a titanium oxide film or a strontium titanate film.

10. The semiconductor device according to claim 7 , wherein the second semiconductor layer is a compound semiconductor layer.

11. the first active element includes a photodiode and a transfer transistor having a source region electrically connected to a cathode region of the photodiode and a drain region electrically connected to the conductive plug; 8. The semiconductor device according to claim 7, wherein said second active element includes an amplifying transistor having a gate electrode electrically connected to said conductive plug.

12. forming a plurality of element formation regions in the first semiconductor layer, the element formation regions being partitioned by element isolation regions; forming a first active element in each of the plurality of element formation regions; forming a contact region on a surface layer portion of each of the plurality of element formation regions adjacent to each other via the element isolation region, the contact region being located on the side of the element isolation region; forming a conductive pad on the contact region of each of the plurality of element formation regions via an insulating film across the element isolation region, thereby forming a MIS contact portion including the conductive pad, the insulating film, and the contact region; forming a first insulating layer covering the first semiconductor layer and the conductive pad; disposing a second semiconductor layer on the first insulating layer; forming a second active element in the second semiconductor layer by performing a process including a heat treatment at 550° C. or less; forming a second insulating layer covering the second semiconductor layer; forming a conductive plug in a connection hole extending from the second insulating layer to the conductive pad; A method for manufacturing a semiconductor device comprising the steps of:

13. The method for manufacturing a semiconductor device as described in claim 12, wherein the second semiconductor layer is a compound semiconductor.

14. forming a plurality of element formation regions in the first semiconductor layer, the element formation regions being partitioned by element isolation regions; forming a first active element in each of the plurality of element formation regions; forming a contact region on a surface layer portion of each of the plurality of element formation regions adjacent to each other via the element isolation region, the contact region being located on the side of the element isolation region; forming a conductive pad on the contact region of each of the plurality of element formation regions via an insulating film across the element isolation region; forming a first insulating layer covering the first semiconductor layer and the conductive pad; disposing a second semiconductor layer having a second active element formed therein on the first insulating layer; forming a second insulating layer covering the second semiconductor layer; forming a conductive plug in a connection hole extending from the second insulating layer to the conductive pad; A method for manufacturing a semiconductor device comprising the steps of:

15. a first semiconductor layer having a plurality of element formation regions disposed adjacent to each other with an isolation region interposed therebetween, each of the element formation regions including a first active element; contact regions provided adjacent to each other on the isolation region side of a surface layer portion of each of the plurality of element formation regions; a conductive pad connected to a side surface of each of the contact regions via an insulating film within a recess provided between the contact regions adjacent to each other; a first insulating layer covering the first semiconductor layer and the conductive pad; a second semiconductor layer disposed on the first insulating layer and having a second active element provided thereon; A second insulating layer covering the second semiconductor layer; a conductive plug embedded in a connection hole extending from the second insulating layer to the conductive pad; an MIS contact portion including the conductive pad, the insulating film, and the contact region; The semiconductor device comprises:

16. 16. The semiconductor device according to claim 15, wherein the insulating film is an amorphous film.

17. 16. The semiconductor device according to claim 15, wherein the insulating film is a titanium oxide film or a strontium titanate film.

18. 16. The semiconductor device according to claim 15, wherein the conductive pad has a body portion connected to each of the contact regions via the insulating film within a recess extending in a depth direction from a main surface side of the first semiconductor layer, and a head portion which is wider than the body portion and formed integrally with the body portion.

19. the first active element includes a photodiode and a transfer transistor having a source region electrically connected to a cathode region of the photodiode and a drain region electrically connected to the conductive plug; 16. The semiconductor device according to claim 15, wherein the second active element includes an amplifying transistor having a gate electrode electrically connected to the conductive plug.

20. forming a plurality of element formation regions in the first semiconductor layer, the element formation regions being partitioned by isolation regions; forming contact regions adjacent to each other on the isolation region side of a surface layer portion of each of the plurality of element formation regions; forming a conductive pad connected to each of the contact regions via an insulating film within a recess provided between adjacent contact regions; A manufacturing method of a semiconductor device comprising:

Images