Diffusion soldering and / or sintering apparatus, tools and systems for connecting components of at least one electronic assembly

Abstract

The present invention relates to a diffusion soldering and / or sintering device, a pressure tool and a system comprising the same for connecting components of at least one electronic assembly, in particular several electronic assemblies, by diffusion soldering or pressure sintering. The device comprises an upper tool and a lower tool between which an assembly is clamped, the upper tool having at least one pressure pad, filled or fillable with a fluid or displaceable medium with a variable internal pressure, and at least one, in particular several plungers, operatively connected to the pressure pad and configured to transmit a pressure force generated by a pressure rise in the pressure pad to the assembly. In the present invention, the upper tool has a guide frame in which the plunger is guided axially movably along the effective direction of the pressure force, the plunger being guided movably in the guide frame in a sealed state relative to the pressure pad.

Description

[Technical field]

[0001] The present invention relates to a diffusion soldering and / or sintering apparatus for connecting components of at least one electronic assembly by diffusion soldering and / or pressure sintering, comprising an upper tool and a lower tool between which the assembly is clamped, the upper tool having at least one pressure pad filled or fillable with a fluid or displaceable medium having a variable internal pressure, and at least one, in particular a plurality of plungers operatively connected to the pressure pad and configured to transfer a pressure force generated by a pressure increase in the pressure pad to the assembly and to transfer thermal energy. [Background technology]

[0002] In universal diffusion soldering and / or sintering machines, solid workpieces can be produced under the influence of heat and pressure from so-called green bodies consisting of fine-grained or coarse-grained materials or material mixtures. Universal diffusion soldering and / or sintering machines are used to mechanically, electrically and thermally interconnect components of electronic assemblies. For example, universal diffusion soldering and / or sintering machines can be used to connect electric semiconductor components, such as high-performance switching elements or semiconductor assemblies, with basic bodies, such as PCBs, heat sinks, etc., with each other by diffusion soldering or pressure sintering. For this reason, it has become common in the field of power electronics to provide so-called molded modules, which integrate various electronic circuits and semiconductor components and, in principle, are provided with contact pins for connecting them to electronic systems. These molded modules can be used for the encapsulation of electronic components, which protect wire-bonded, soldered or glued microelectronic structures with a thermo-mechanically compatible robust encapsulant.

[0003] In diffusion soldering, the atoms of a solid base material are mixed with the atoms of a liquid solder using pressure. As a result, an alloy zone is formed between the base material and the solder, which forms a material-to-material connection. In low-temperature pressure sintering, which is a type of pressure sintering, two or more components, in particular an electronic component and a substrate, can be connected to each other in an electrically and / or thermally conductive manner by a joining material, which is sintered. Corresponding devices and methods are known, for example, from WO 2014 / 135151 A2.

[0004] Currently, a connection method that combines a diffusion soldering process and a sintering process has been developed, and the connection means may use a combination of a diffusion solder and a sintering paste.

[0005] The required pressure is up to 650 bar and the applicable temperature is up to 350°C.

[0006] General purpose diffusion soldering and / or sintering equipment is frequently used in automated sintering systems, especially automated multi-chamber sintering systems.

[0007] Sintering or diffusion soldering of the electronic assembly itself is accomplished by the action of pressure exerted by the upper and lower tools, regulating the temperature of the assembly and / or its components to be sintered. For example, the temperatures required for connection and diffusion in low-temperature pressure sintering with silver are typically between about 130°C and 250°C-300°C, with pressures of up to 30 MPa and times of about 5 to 10 minutes.

[0008] In order to obtain parallel layers with as little porosity as possible from the sintered material inserted between the components during pressure sintering, the joining layers are compressed by pressure before and during the diffusion process to ensure a mechanically stable, particularly shear-resistant connection as well as the necessary electrical and thermal conductivity. At the end of the sintering operation, the pressure and temperature are reduced.

[0009] One challenge is to apply the pressure required for diffusion soldering or sintering as evenly as possible to the assembly, so that the components of the assembly are not subjected to local or temporary pressure peaks. It is particularly required to prevent such local pressure peaks during diffusion soldering or sintering of assemblies in which several electronic components of different heights are arranged on one substrate or workpiece carrier. Electronic components within the scope of the invention are to be understood as passive electrical components such as semiconductor components and electronic switching groups, as well as cooling elements such as cooling plates, PCBs or connection elements such as power pins, for example copper pins. An assembly is such components or such electronic components connected to one another.

[0010] In the following, pressure sintering will be primarily referred to, but all aspects of diffusion soldering that can be carried out in a manner similar or similar to pressure sintering in terms of the temperature and pressure applied in the joining process are also included.

[0011] In order to allow for as even a distribution of the applied pressure or pressure as possible, the prior art has proposed using a pressure pad to generate the pressure, the pad being operatively connected to a number of plungers of different heights, which transmit the applied pressure from the pressure pad to the assembly.

[0012] A typical sintering device of this type is described in DE 102007047698 B4. A further sintering device with a pressure pad but without a plunger is disclosed in DE 102014114095 B4.

[0013] EP 3 454 364 A1 relates to an apparatus for sealing or sintering semiconductor elements, in which an upper tool and a lower tool are shown with an assembly arranged between them. The upper tool shows a pressure application unit as a pressure pad, which can be filled with a fluid and has a variable internal pressure, and which interacts with a plunger, called a spacer, in order to transmit the pressure force generated by the pressure increase in the pressure pad to the assembly. The upper tool has a guide frame with a guide duct, in which the plunger is axially movable along the pressure force with a lateral tilt clearance. The pressure medium is fed into the pressure chamber, and between the pressure medium and the plunger covering the guide duct a diaphragm is provided as a flexible membrane in order to seal the guide duct of the plunger against the pressure pad. The pressure chamber is connected to a source of fluid that generates the pressure increase.

[0014] WO 2018 / 122795 A1 shows a sintering machine of the same general type in which the plunger is arranged directly in the cylinder, thereby eliminating the need for a separate guide frame.

[0015] DE102017216545A1 shows a sintering device with an upper tool and a lower tool for sintering electronic assemblies. The pressure pad consists of a hollow space and a membrane and is subjected to a variable internal pressure via a fluid source. The pressure pad is connected via the membrane to a pressure plunger axially guided in a guide frame GE for transmitting the pressure force.

[0016] WO 2016 / 050466 A1 relates to a similar generic sintering machine, in which a receptacle for a pressure pad is provided in the cylinder / piston arrangement.

[0017] One of the disadvantages of conventional diffusion soldering or sintering devices is that the pressure or applied force often does not act sufficiently uniformly and parallel on the assembly to be sintered or diffusion soldered. Pressure peaks, pressure gradients and parallel sintering layers can result in localized loads on the individual components or prevent the formation of a uniform bond layer whose mechanical, electrical and / or thermal properties are identical at all points. A further disadvantage of known diffusion soldering or sintering devices is that the applied force is not built up simultaneously and parallel, i.e. it can build up faster in certain areas than in others, resulting in spatial variations in the applied pressure time, which makes a controlled process more difficult and therefore can also lead to quality variations. A further disadvantage of conventional diffusion soldering or sintering devices with guided pressure plungers is that expensive sealing membranes or seals must be provided for the pressure spaces or pressure pads, which are prone to wear and do not allow for a quick and cheap resetting of the pressure tool. [Prior art documents] [Patent documents]

[0018] [Patent Document 1] International Publication No. 2014 / 135151 [Patent Document 2] German Patent No. 102007047698 [Patent Document 3] German Patent No. 102014114095 [Patent Document 4] European Patent Application Publication No. 3454364 [Patent Document 5] International Publication No. 2018 / 122795 [Patent Document 6] DE 102017216545 A1 [Patent Document 7] International Publication No. 2016 / 050466 Summary of the Invention

[0019] The object of the invention is to indicate a diffusion soldering and / or sintering device that is configured to generate a homogeneous applied pressure, both spatially and temporally, on at least one assembly, in particular on a plurality of assemblies.

[0020] This object is achieved by a diffusion soldering and / or sintering device having the features of claim 1. Advantageous embodiments of the diffusion soldering and / or sintering device are given in the dependent claims.

[0021] The invention provides that the upper tool has a guide frame in which the plunger is axially movable along the effective direction of the applied pressure. The plunger is movably guided in the guide frame in a sealed state against the pressure pad. The guide frame and the sealed plunger guided therein thus seal the pressure pad against the application surface and prevent damage to the pressure pad. The axial guidance of the plunger ensures that the pressure required for diffusion soldering or pressure sintering is transferred from the pressure pad to the assembly to be sintered or soldered with the required homogeneity in time and space. The plunger can be heatable or allows a rapid transfer of thermal energy to the assembly to be sintered or soldered. In any case, a more rapid and selective transfer can be made than was previously possible with individual plungers of large area, in particular individual plungers with pressure pads (in particular silicon pads). The plunger is accordingly movably guided in or against the effective direction of the pressure. The plungers can exert a selectively settable applied pressure force at least due to their geometrical design and are mechanically connected directly to one another.

[0022] The seal may be achieved by a sealing membrane between the pressure pad and the upper side of the guide frame or plunger, or by a sealing element on the plunger within a plunger guide in the guide frame.

[0023] The pressure pad preferably consists of a volume limited by a flexible, bending and / or stretching pad membrane and filled with a displaceable medium, such as a non-compressible or compressible fluid or gel. The fluid or displaceable medium can be present within the pressure pad and / or can be supplied or replenished from the outside, for example in the form of a hydraulic supply, before or during the diffusion soldering and / or sintering operation. The pressure equalizing medium held within the pressure pad volume can usually be a fluid or another viscous medium, i.e. a displaceable substance, such as an elastomer, for example silicone, a thermally conductive oil, a thermally conductive paste or a thermally conductive grease. The fluid used is for example a hydraulic oil, but can also be silicone or a perfluoropolyether (PFPE). A PFPE known as Galden HS260 has a boiling point of 260°C and can be evacuated by a vacuum pump provided periodically, for example in case of a leak in the pressure pad.

[0024] The pressure pad can be filled with gas or powder, can be provided in the form of a foil, for example graphite foil, or can be designed as a soft metal, in particular softer than iron, for example aluminum, lead, gold, indium, copper, platinum, silver, zinc, tin. Thin elastic foils, such as graphite foil, can also be used to create parallelism between the upper and lower plungers. In general, the fluid can be a gas, for example nitrogen. Furthermore, the use of other gases, in particular steam, is also possible. The fluid can preferably be a gas or other displaceable medium, for example PFPE (Galden), silicon, CO2, argon, nitrogen, helium, Igumix (mixed gases), as well as mixtures or combinations of elastomers, oils, greases and / or gases. This volume can be self-contained or equipped with accesses to allow the fluid to be supplied or removed, as will be explained below in connection with the preferred embodiment.

[0025] Preferably, the pressure pad can be designed as a silicone pad.

[0026] According to an advantageous embodiment of the invention, the upper tool has at least one pressure unit with a receptacle for a pressure pad. The receptacle, which preferably surrounds the pressure pad from several sides, holds the pad both in the working position and in the rest position in which no pressure force acts on the assembly and ensures homogenization of the pressure force by a stable support of the pressure pad. Several pressure units can be provided, in particular if each pressure unit receives a pressure pad for an individual plunger, the individual plunger having a relatively large plunger surface, as for example in the case of soft plungers. In contrast to hard plungers, soft plungers use a soft material for the plunger surface, such as silicon or soft metal.

[0027] According to a further advantageous embodiment, the pressure unit has an opening facing the lower tool and covered by a guide frame, on which the pressure pad rests, by means of which the pressure pad is operatively connected with a plunger guided in the guide frame, which at the same time provides an additional support to supplement the support provided by the receptacle in the pressure unit.

[0028] According to a further advantageous embodiment, the pressure unit has a cylinder and a piston movably received therein, which together define a receptacle for the pressure pad, such that the volume of the receptacle is variable by moving the piston. When the piston is inserted into the cylinder, the volume of the receptacle decreases and the pressure in the pressure pad increases. This pressure increase generates the pressing force required for diffusion soldering or pressure sintering. As will be explained below, if individual plungers or so-called multiplungers are used, the cylinder can simultaneously function as a guide frame.

[0029] As the piston moves out of the cylinder, the volume of the receptacle increases again, reducing the pressure on the pressure pad and therefore decreasing the pressure.

[0030] In this respect, the piston is preferably provided with an opening, for which purpose the piston is arranged on the side facing the lower tool of the pressure unit and is designed, for example, as an annular piston.

[0031] According to a further advantageous embodiment, the upper tool and the lower tool are movable relative to each other along the effective direction of the pressure, and when the upper tool comes into contact with the lower tool or with a workpiece carrier resting on the lower tool, the piston moves into the cylinder. In this configuration, the pressure is generated indirectly, i.e. by a relative movement between the upper tool and the lower tool. This relative movement can be achieved by suitable means, for example a hydraulic drive or a spindle drive. The relative movement of the piston with respect to the cylinder is thus achieved indirectly or passively, and no direct drive is required to bring about this relative movement between the piston and the cylinder. The piston is preferably connected to a guide frame. The pressure in the pressure pad therefore does not rise until the upper tool comes into contact with the lower tool or with the workpiece carrier carrying the electronic assembly to be sintered.

[0032] According to an advantageous embodiment of the invention, the pressure pad is connected or connectable to a fluid source for supplying a fluid into the pressure pad, and the pressure increase can be performed by the supply of a fluid. The fluid can be liquid or gas. The fluid source can be heatable and / or coolable, so that the supplied fluid can be used for heating and cooling. In particular, the fluid source can include a heat exchanger, in particular a tubular heat exchanger for regulating the temperature of the fluid. It is also conceivable to use a liquid metal as the fluid. The fluid or displaceable metal can for example be poured in a liquid state at high temperature, then solidify and, after being placed in the sintering equipment, be liquefied by the heater of the sintering equipment, so that it remains in a liquid or liquefied state. For example, tin solder can be used here to match the sintering process temperature.

[0033] Alternatively or additionally to the change in the volume of the receptacle as described above by the movement of the piston into the cylinder, the pressure in the pressure pad can also be increased by supplying the pressure pad with further fluid. The fluid source can be, for example, a pump or another suitable reservoir for a fluid suitable for achieving the fluid supply. The fluid can be liquid or gaseous, for example PFPE (Galden) is suitable as a fluid, which can be advantageously used in liquid or gaseous form as pressure equalization fluid. If a fluid source is additionally provided to the cylinder / piston arrangement described above, the supply of fluid into the pressure pad can result in a further pressure increase even when further movement of the piston into the cylinder is no longer possible or desirable, for example because mechanical limits to the travel distance have come into effect.

[0034] Preferably, PFPEs can be used as fluids, either in liquid form or in gaseous form depending on the temperature range, and are used for both heat transfer and pressure equalization. PFPEs are a family of plastics that are usually liquid to pasty at room temperature, in particular perfluoropolyethers, with a boiling point of 260 °C, also known as Galden HS260 (HS260 = boiling point 260 °C), which are used for vapor phase soldering. An important advantage compared to thermally conductive oils is that in case of damage or leakage of the pressure pad membrane, the escaping liquid does not harm the components. It is also possible to evaporate the liquid in the vacuum chamber by vacuum and pump it out of the chamber with a vacuum pump.

[0035] According to a further advantageous embodiment, the guide frame comprises a plunger guide plate with guide ducts for axial guidance of the plunger. The guide ducts preferably extend at least through the plunger guide plate in the effective direction of pressure and ensure lateral guidance of the plunger, thereby allowing a precise positioning of the plunger relative to the components of the assembly. The plunger guide plate may be of one-piece or two or more constructions.

[0036] According to a further advantageous embodiment, at least one flexible membrane is arranged between the pressure pad and the plunger, which serves as a kind of additional mechanical protection layer and in particular prevents the pressure pad from being inadvertently damaged by local pressure peaks during application of pressure to the plunger.

[0037] In this respect, it has proved to be advantageous for the membrane to cover the guide duct, which in particular prevents the pressure pad from being pushed into any gaps that may exist between the plunger and the wall of the guide duct, thereby ensuring that the pressure buildup in the pressure pad is fully utilized to generate a pressure acting on the effective cross section of the pressure plunger, and that the pressure pad does not bulge into local gaps or cavities.

[0038] According to a further advantageous embodiment, the guide frame has a membrane holding plate arranged on the side of the plunger guide plate facing the pressure pad, the membrane being held between the membrane holding plate and the plunger guide plate, the membrane holding plate thus fixing the membrane on the plunger guide plate and in particular ensuring an additional pretension of the membrane.

[0039] In this respect, it has proved to be advantageous if the membrane retaining plate has at least one penetration extending at least above the guide duct. This penetration can be designed as one large central penetration, which covers the plunger guide plate only in its peripheral area and fixes the membrane between the membrane retaining plate and the plunger guide plate. The membrane retaining plate preferably has several separate penetrations, each penetration being associated with a single guide duct or preferably with a group of guide ducts. In particular, the size and arrangement of the penetrations correspond to the size and arrangement of the associated substrate to which the electronic components are connected by a diffusion soldering or pressure sintering operation. Thus, the guide ducts are not covered by the solid parts of the membrane retaining plate and the plunger is operatively connected to the pressure pad via the membrane.

[0040] According to a further advantageous embodiment, the plunger is permanently or detachably connected, preferably glued, to the membrane. The connection between the plunger and the membrane ensures that the plunger does not fall downwards from the guide frame when the diffusion soldering and / or sintering device is in a rest position with the upper tool spaced apart from the lower tool.

[0041] According to a further advantageous embodiment, the upper tool has at least one fixing device for the plunger, which fixes the plunger against falling out of the guide duct.

[0042] In this respect, it has proved to be advantageous if the membrane is magnetic and the fastening device comprises a respective magnetic element connected to the plunger, preferably integrated in the plunger, to hold the plunger to the membrane. As a result, the magnetic element is releasably held to the membrane. This has the advantage that both the plunger and the membrane are reusable if the diffusion soldering and / or sintering device has to be adjusted to other assemblies having different dimensions, in particular different height components, than the previously processed assembly. The advantage compared to permanently glued plungers lies in particular in cases where only parts of the plunger need to be replaced. This reduces setting times and costs. The magnetic membrane can be part of the fastening device. The use of magnetic elements also allows for easy reconfiguration, resulting in a quick-change system of plungers that can be adapted to changed assembly configurations. For example, the single assembly or multiple assemblies are regularly arranged in a workpiece carrier that is guided during processing by the diffusion soldering and / or sintering device. If the type of assembly or its arrangement in the workpiece carrier is changed, a reconfiguration of the plunger arrangement is required. The use of a quick change system, particularly a magnetic element, greatly simplifies and reduces the cost of this task.

[0043] According to another embodiment, the fixing device comprises respective fixing pins which are attached to the plunger guide plate and extend through recesses provided in the plunger. In this configuration too, the replacement of the plunger is possible. Preferably, the fixing pins have sufficient clearance in the recesses so that the axial mobility of the plunger required for the diffusion soldering and / or sintering operations is ensured. To that end, the recesses can be designed, for example, as slots. The fixing pins preferably extend with their longitudinal axis in a plane defined by the main extension direction of the plunger guide plate. The plunger guide plate can be provided with suitable mounting recesses or grooves for the fixing pins, for example in the form of recesses. To allow the mounting and / or replacement of the plunger or the fixing pins, the plunger guide plate can be designed in two parts: an upper plunger guide plate and a lower plunger guide plate.

[0044] According to a further advantageous embodiment of the invention, the plunger is held in the guide duct with a lateral clearance. If the contact surfaces between the component to be sintered and the plunger are not exactly parallel due to manufacturing tolerances, the lateral clearance of the plunger in the guide duct allows the plunger to be slightly tilted in order to achieve parallelism between the contact surfaces. As a result, uneven pressure application to the component is prevented and the risk of pressure peaks occurring is reduced. The clearance is about 1 μm to 1 mm and can be designed as a parallel gap between the plunger and the guide duct in particular.

[0045] As a rule, the plunger has a circular cross-sectional shape. In further embodiments, the plunger can have an elliptical, angular or rectangular cross-section. The guide sides, i.e. the cross-sectional corners of the plunger, are preferably rounded in order to prevent local pressure peaks. The plunger is limited by the upper plunger side facing the pressure pad, the lower plunger side facing the pressure side and the component to be pressed, and the plunger outer jacket in the axial direction, which is guided in the guide frame. The side faces of the plunger outer jacket are called the guide sides and are guided in the guide ducts. The edge transitions of the guide sides are advantageously rounded, ensuring a guide without inclination. In particular by designing the plunger underside and also the entire plunger cross section in a rectangular or angular shape, the plunger cross section can be adapted to the typical design of the components to be sintered, in particular high-performance semiconductor components with rectangular or angular housing shapes, and multi-plunger units can be used with several adjacent and mutually sealing plungers guided along one another without gaps between the plungers, the multi-plunger units without limiting walls for the guide frame forming a closed sealing surface against the pressure pad, the multi-plunger units can be sealed against the pressure pad by a metal foil, and furthermore it is possible to magnetically connect the individual plungers of the multi-plunger unit to the metal foil.

[0046] With regard to the above embodiment, it may further be advantageous for the guide frame, in particular the plunger guide plate, to have an angular or rectangular shape and for the guide duct to have an angular or rectangular cross-sectional shape. This allows the sealing of the pressure pad by the guide frame and the plunger guided in the sealed guide duct to be achieved without the need for an additional membrane for sealing. A rectangular or angular shape allows for an efficient use of the surface for pressure and allows more components to be processed with the same force per face compared to a circular one.

[0047] In an advantageous embodiment, one or more guide ducts can hold several closely adjacent plungers, which can preferably be guided along one another. This embodiment proposes a multi-plunger unit as a plunger package, in which the guide frame has one or more guide ducts, and several plungers are guided in one guide duct. The plungers are here guided in a self-sealing manner axially along one another in the duct and have a contour that allows a planar sealing by the surfaces of the multiple plungers on the guide duct cross section. The plungers can thus have a concentric shape or be guided next to one another in a rectangular or angular shape. Other complex cross-sectional shapes that fill the guide duct are also conceivable. Here, it is advantageous for the plungers to have the same or different lengths from one another in order to allow the pressurization of components with a constant or varying height profile.

[0048] In a further advantageous embodiment, the plunger can have a sliding guide insert at the upper guide side facing the pressure pad, which is made of a material, preferably plastic, softer than the plunger material. Preferably, a full-circumferential plunger groove can be provided at the upper plunger side between the upper edge of the sliding guide insert and the upper plunger side. The sliding guide insert can efficiently seal the upper area of ​​the plunger facing the pressure pad against the guide frame or the adjacent plunger and can be replaced inexpensively in case of wear. The sliding guide insert for fixing the plunger can also fix the plunger non-positively or positively in the guide duct of the guide plate. For efficient sealing, it has been found to be advantageous to provide a full-circumferential plunger groove, in particular a plunger groove surrounded by a sharp edge, at the upper end of the sliding guide insert, opposite the surface of the upper plunger side acting on which the pressure pad acts. If the material of the sliding guide insert is made of a material softer than the plunger material, typically plastic as opposed to metal, the plunger material has a higher thermal expansion coefficient, which results in a better seal at high temperatures. Furthermore, a softer material can ensure parallel alignment of the plunger with respect to the surface of the component or assembly. The full-circumference plunger groove allows the pressure pad material, e.g. silicone, to flow into the plunger groove and press the sliding guide insert against the outer wall of the guide duct. Furthermore, if the surface of the sliding guide insert facing the plunger guide side has a friction-reducing surface contour, e.g. a profiled corrugated surface, the axial movement of the plunger is sealed with reduced resistance and the sliding guide insert stays in place on the guide side of the plunger. The sliding guide insert is preferably manufactured based on 3D printing technology, in particular printed or injection molded on the upper full-circumference plunger guide side section directly adjacent to the plunger groove. Reliable sealing in the guide duct of the guide plate is made possible by an increased thermal expansion coefficient of the material of the sliding guide insert.The use of the sliding guide insert provides a sealing effect against the pressure pad, which is so effective that a membrane as sealing element is not necessary. As plungers, a multi-plunger unit as described above can be advantageously used, where at the upper end of the sliding guide insert a metal foil can provide a seal against the pressure pad located above it. Furthermore, the individual plungers of the multi-plunger unit can be magnetically fixed in a non-positive connection to the metal foil.

[0049] In a further advantageous embodiment, the plunger can have a smaller or larger cross-section at the bottom of the plunger than at the top of the plunger. The different surface cross-sectional areas of the top and bottom of the plunger allow for increased or decreased pressure and also allow for efficient sealing of the pressure pad. The area of ​​the component to be sintered can be adaptively pressurized with increased or decreased pressure, and the cross-sectional profile of the bottom of the plunger can also be adapted to the specific requirements of the component geometry.

[0050] In a further advantageous embodiment, the piston can be movably guided in a sealed manner relative to the cylinder. The piston is used to increase the pressure in the pressure pad, which in turn presses the plunger in the direction from the upper tool to the lower tool. Due to the closing movement of the upper and lower tools, the pressure force that the piston transmits to the pressure pad acts on the piston, which is movable in the cylinder, which is at rest on the lower tool, in particular on the assembly or workpiece carrier. For sealing, the plunger can be sealed in the guide plate against the pressure pad, for example using a large membrane, in particular a metal membrane, or each plunger can be sealed alone or as a group in the guide plate against the pressure pad, for example using a membrane section or using an additional sealing element on the plunger. The plunger can be formed by the underside of a pressure pad, in particular a silicon pad, which presses the assembly directly or with an inserted process cover, such as a sintering foil. The sintering foil can assist in the parallel alignment of the plunger of the upper tool against the surface of the component or assembly on the lower tool. Furthermore, the sintering foil can prevent adhesion of silicon material to the component surface. The piston is also preferably formed as an annular piston and preferably comprises a piston skirt of harder material, in particular steel, and a piston sealing insert of softer material, in particular plastic, which is held securely in the piston skirt. The piston sealing insert of softer material can seal at the opening of the pressure chamber so that the pressure pad does not bulge in the gap between the piston and the cylinder of the pressure unit upon heating and application of pressure. The material selection of the piston sealing insert can be tailored to the pressure, temperature and material of the pressure pad to ensure sealing of the pressure pad in the cylinder when pressure is applied. Furthermore, the piston sealing insert, due to its yielding and softness, helps the parallel alignment of the plunger surface on the component surface and is used for the parallel alignment of the plunger surface of the upper tool with the component surface of the lower tool. The cylinder cross-sectional shape can preferably be circular in order to distribute the pressure evenly.However, by using the piston sealing insert, elliptical, angular, rectangular, polygonal or other cylinder cross-sectional shapes are conceivable, which are adapted to the assembly to be processed, thereby allowing, in particular, a compact and space-saving arrangement of the assembly on the workpiece carrier and high production rates even under high temperature and pressure. Cross-sectional shapes, in particular angular or rectangular cross-sectional shapes with rounded edges, are preferred in order to permanently ensure the tightness of the piston / cylinder seal against the pressure pad. The annular piston can have a clearance from the cylinder wall to allow the annular piston to slide inside the cylinder, and the intrusion of pressure pad material into the gap between the annular piston and the cylinder is prevented by the aforementioned seal, even in the absence of an intermediate membrane. Inside the annular piston, it is possible for the pressure pad to come into tight contact with the inner wall of the piston sealing insert. To that extent, in this embodiment, the plunger is tightly guided inside the guide duct formed by the inner wall of the annular piston.

[0051] In a further advantageous embodiment, the piston skirt can have a sealing seat on its piston upper side facing the upper tool, into which a flange area of ​​the piston sealing insert engages in such a way that a full-circumferential sealing groove is formed. The pressure pad can preferably have a full-circumferential sealing edge on its upper side, which can be pressed into the sealing groove of the piston with a sealing seam being formed when pressure is applied to the piston. The engagement of the flange area of ​​the piston sealing insert with the sealing seat of the piston skirt firstly allows a secure retention of the piston sealing insert and secondly allows the formation of a sealing groove which provides a space for the displacement of the pressure pad, which ensures a self-sealing effect of the pressure pad against the gap between the piston and the cylinder. The piston sealing insert can be easily replaced when worn or when resetting.

[0052] In a further advantageous embodiment, the piston and the pressure pad can be associated with one plunger, in particular the plunger can be designed as a soft plunger and can preferably be provided by a pressure pad, or the piston and the pressure pad can be associated with several plungers. In this embodiment, it is proposed to arrange one or more pressure units in the upper tool, each pressure unit having a separate plunger. If the pressure units are essentially composed of a cylinder with a pressure pad, an annular piston and a guide frame, each pressure unit can form a separate plunger. The lower part of the pressure pad can function as a soft plunger, for example a silicone plunger, but can also be designed as a hard plunger with a hard plunger surface. Alternatively, a single large pressure unit can be arranged in the upper tool and several small plungers can be arranged in the guide frame.

[0053] In a subsidiary aspect, a pressure tool designed as an upper or lower tool of the aforementioned diffusion soldering and / or sintering device is proposed, which comprises a rigid base plate and either at least one membrane, preferably made of silicon or steel alloy and formed in the direction of the pressure surface by a preferably dished flexible membrane or by a number of membrane sections, connected to the base plate, or a guide frame with a sealed plunger movably guideable therein, preferably with a pressure chamber containing a pressure pad filled with a fluid and arranged in a closed receiving space limited by the base plate and the membrane or the guide frame with the sealed plunger, the guide frame closing the pressure pad in the direction of the pressure surface and guiding the plunger. The membrane and / or plunger sealing allows the pressure chamber / pressure pad, preferably made of silicon, to be sealed against the pressure surface and allows the plunger to be placed on the membrane surface / guide frame, for example in the case of a metal membrane, it is easy to fix it by magnets, but other connection methods such as bolting, welding, riveting, etc. are also conceivable.

[0054] In an advantageous development, a partial region of the pressure chamber of the pressure tool described above, in particular at least one partial region of the pressure pad held in the pressure chamber, can be designed to be controllably fillable with a fluid, in particular gas. Preferably, the fluid filling is controllable by at least one filling valve. By filling a partial region of the pressure chamber, in particular with a fluid, in particular with a gas, a pressure can be generated by the fluid filled in the pressure chamber in addition to or instead of the pressure mechanically applied by the pressure. Thus, for example, when the pressure is reduced or vacuum is applied in the process chamber, the pressure chamber can be expanded via a membrane or by the movement of a sealed pressure plunger by introducing the atmospheric gas of the process chamber, if necessary a purge gas such as nitrogen, into a partial region of the pressure chamber. This allows relatively low but often sufficient pressures to be generated in the components for joining methods such as low-pressure sintering, for example with silver or copper, diffusion soldering, for example up to 0.4 MPa, thermocompression, for example up to 0.1 MPa, without the use of hydraulic pressure to mechanically actuate the pressure plunger. Therefore, by simply setting the process atmosphere in the process chamber and / or pressure chamber, pressure that could not be applied by mechanical pressure can be applied to the component by relative movement of the lower tool and the upper tool.

[0055] The above-described embodiments allow a pressure tool for pressure application to be provided in addition to or instead of a pressure drive, cheaply and easily with less effort, since the required and controlled sintering or diffusion soldering or joining pressure can be applied to the components using the gas pressure and process atmosphere / vacuum in the process chamber that is typically required for the process to compensate for part height differences on the components.

[0056] For this purpose, a vacuum pressure sensor and simple software area conversion are sufficient, so that the required and set sintering pressure, diffusion soldering pressure or joining pressure can be obtained without the need for additional force or pressure measuring systems.

[0057] Since the vacuum chamber applies pressure to the components via the pressure tool under vacuum conditions, it is possible to continuously monitor during the process whether oxygen is entering the vacuum chamber from the outside, so that any unexpected increase in chamber pressure can be detected immediately. This ensures that the hot components, especially the copper surfaces, do not oxidize. Pressure monitoring of the components can be done, for example, by means of load cells integrated into the pressure drive. For example, a stuck plunger can be detected.

[0058] In a further subsidiary aspect, a diffusion soldering and / or sintering installation is proposed, which comprises the aforementioned diffusion soldering device and / or sintering device and / or the aforementioned pressure tool. It is proposed that the diffusion soldering device and / or sintering device and / or the pressure tool are arranged in an atmospherically sealed module, in particular a vacuum module, of a multi-module system, and at least one further module is provided as a pre-heating module and / or a cooling module. Furthermore, a transport device is provided, which is configured to automatically move at least one workpiece carrier, in particular a lower tool, together with at least one assembly through the multi-module system. Furthermore, adjacent modules of the multi-module system are atmospherically sealable from each other.

[0059] In other words, a multi-module system is proposed, consisting of at least one atmospherically sealed module, in particular a vacuum module, which comprises the aforementioned sintering or diffusion soldering device and / or the aforementioned pressure tool. Inside this sintering / diffusion soldering module, the sintering and / or diffusion soldering process can take place, in particular under settable atmospheric conditions, in particular in a vacuum to exclude oxidation processes. At least one further module can be configured as a pre-heating module and / or a cooling module for shortening the process time, for particular pre- and / or post-treatment, for example cleaning, in particular with process gases such as plasma, formic acid, nitrogen, as well as temperature regulation. The workpiece carrier, which supports at least one, in particular several assemblies or components, can be guided in the module by a conveying device, for example a belt conveyor system. The conveying device can also pass the entire lower tool through the multi-module system. The transitions of the modules can be atmospherically sealed, for example sealable by gas locks, so that the atmosphere, pressure and temperature can be set separately for each module. The multi-module system can be designed for batch operations in flow production and even as a throughput system with transport devices that move assemblies through the multi-module system and back. [Brief description of the drawings]

[0060] Further advantages become apparent from the following description of the drawings, which show examples of the invention. The drawings, the description and the claims contain many feature combinations. The features can be considered individually and combined by the person skilled in the art into further useful combinations. The examples shown for the illustrated sintering apparatus can be used for diffusion soldering apparatus as well. [Figure 1] FIG. 1 is a schematic cross-sectional view of a sintering apparatus according to an embodiment, showing various working positions. [Diagram 2] FIG. 2 is a schematic cross-sectional view of a sintering device according to an embodiment, in various working positions. [Diagram 3]FIG. 3 is a perspective view of the sintering apparatus of FIGS. 1-2 in a rest position. [Figure 4] FIG. 4 is a perspective view showing the sintering apparatus of FIGS. 1 to 3 in a partial cross-sectional representation. [Diagram 5] FIG. 5 is a side view of the sintering apparatus of FIGS. [Figure 6] FIG. 6 is a perspective view of a guide frame of the sintering apparatus of FIGS. [Figure 7] FIG. 7 is a perspective exploded view of the guide frame of FIG. [Figure 8] FIG. 8 is a perspective view of the components of the guide frame of FIG. [Figure 9] 9 and 10 are partial views of the guide frame of FIGS. 6 and 7, seen from various angles. [Figure 10] 9 and 10 are partial views of the guide frame of FIGS. 6 and 7, seen from various angles. [Figure 11] FIG. 11 is a perspective partial view in cross-section of the guide frame of FIGS. 6 and 7 according to one configuration. [Figure 12] FIG. 12 is a perspective view of a guide frame according to a further configuration. [Figure 13] FIG. 13 is a perspective partial cross-sectional view of the guide frame of FIG. [Figure 14] FIG. 14 is an exploded view of a pressure tool of a sintering apparatus according to an embodiment of the present invention. [Figure 15a] FIG. 15a is a cross-sectional view according to a variant of the embodiment according to FIG. [Figure 15b] FIG. 15b is a cross-sectional view of a variant of the embodiment according to FIG. [Figure 16] FIG. 16 is a schematic side view of a sintering apparatus according to a further embodiment. [Figure 17a] FIG. 17a shows further pressing tools at several process stages of a sintering apparatus according to an embodiment. [Figure 17b] FIG. 17b shows further pressing tools at several process stages of a sintering apparatus according to an embodiment. [Figure 17c] FIG. 17c shows a further pressing tool at several process stages of a sintering apparatus according to an embodiment. [Figure 18a] FIG. 18a is a cross-section of a sealed pressurized plunger according to an embodiment of the present invention. [Figure 18b] FIG. 18b is a cross-section of a sealed pressurized plunger according to an embodiment of the present invention. [Figure 19] FIG. 19 is an embodiment of the pressure tool with a sealed pressure plunger as shown in FIG. 18a. [Figure 20] FIG. 20 is a perspective view of a multi-plunger unit according to an embodiment in which adjacent movable plungers are sealed from each other. [Figure 21a] 21a and 21b are plan and cross-sectional views of a square annular piston with a silicone pressure pad according to one embodiment of the present invention. [Figure 21b] 21a and 21b are plan and cross-sectional views of a square annular piston with a silicone pressure pad according to one embodiment of the present invention.

[0061] In the following description of exemplary embodiments and configurations, identical or similar elements are designated with the same reference numerals. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0062] 1 and 2 show an exemplary sintering apparatus 10 for connecting components of multiple electronic assemblies 12 by pressure sintering. However, it is also possible to sinter only a single assembly 12. For clarity, each of FIGS. 1 and 2 shows only a single assembly 12 consisting of a substrate 12A and multiple electronic components 12B of different sizes.

[0063] The sintering apparatus 10 comprises an upper tool 14 and a lower tool 16, which are movable relative to one another along a pressing direction R indicated by double-headed arrow R. For the sake of clarity, further components of the sintering apparatus 10, such as adjustment and holding devices for the tools 14, 16, are not shown.

[0064] The upper tool 14 and the lower tool 16 are heatable, although here for simplicity only one heating device 17 on the lower tool 16 is shown.

[0065] Depending on the configuration, the assembly 12 to be sintered can be held in a workpiece carrier 18, which is preferably inserted in an automated manner by a suitable transport device mounted on the lower tool 16 into the sintering apparatus 10 for simplified workpiece exchange and removed again from the sintering apparatus 10 after sintering is completed.

[0066] The upper tool 14 includes a pressure unit 20 that defines a receiving space, or receptacle 22 for a pressure pad 24 that completely fills the receptacle 22. The pressure pad 24 is surrounded by a fluid-tight, flexible envelope or pad membrane and defines a volume filled with a fluid, e.g., an elastomer such as silicone or grease, or a gas. The envelope can be made, for example, from a coated fiberglass or woven aramid fiber (Kevlar). The coating can be manufactured, for example, using polytetrafluoroethylene (PTFE).

[0067] The pressure unit 20 comprises a cylinder 28 in which a piston 30 is guided so as to be movable along the pressing direction R. The receptacle 22 has, on its underside facing the lower tool 16, an opening 26 which extends inwardly of the piston 30 so that in the embodiment the piston 30 forms a kind of cylindrical annular piston. In the region of the opening 26, the receptacle 22 is limited by a guide frame 40 which has a number of guide ducts 42 in each of which one or more plungers 60 are guided so as to be axially movable along the effective direction of the pressing force, i.e. the pressing direction R. The guide frame 40 is fixed to the piston 30 with the help of suitable connecting elements, for example engaging or clamping elements, or bolting to the piston 30, which allow the exchange of the guide frame 40.

[0068] A flexible membrane 50 covering the guide duct 42 is arranged between the receptacle 22 and the pressure pad 24. In the example shown in Figures 1 and 2, the membrane is shown as a continuous membrane 50, but according to modifications explained in more detail below, the membrane can also be divided into several separate membrane sections 50A (Figures 5 and 7). The membrane 50 or membrane sections 50A can be made, for example, from a coated glass fiber or aramid fiber fabric (Kevlar), and can be coated with polytetrafluoroethylene (PTFE) or other materials if desired.

[0069] The operation of the sintering apparatus 10 is as follows: As shown in Fig. 1, after the assembly 12 or the workpiece carrier 18 is placed on the lower tool 16, the upper tool 14 and the lower tool 16 are first moved closer to each other, which can be achieved by moving either the upper tool 14 or the lower tool 16. In the situation shown in Fig. 1, the upper tool 14 with the guide frame 40 is being placed on the lower tool 16, more precisely on the workpiece carrier 18 attached to the lower tool 16.

[0070] As soon as the guide frame 40 is placed on the work carrier 18, the piston 30 is moved into the cylinder 28, which moves the upper and lower tools 14, 16 closer together and reduces the volume of the receptacle 22. At the same time, pressure is generated in the pressure pad 24, which moves or displaces the plunger 60 towards the assembly 12 and out of the guide duct 42. The envelope of the pressure pad 24 and the membrane 50 largely matches the contour of the upper side of the guide frame 40 or the plunger 60.

[0071] As soon as the plunger 60 contacts the component 12B, the initially still very low pressure builds up to a constant pressure until all the components 12B contact the associated plunger 60. The pressure pad 24 allows for hydraulic equalization so that no significant pressure rise inside the pressure pad 24 occurs until all the plungers 60 contact the associated components 12B. As a result, a simultaneous and uniform rise in pressure / pressure is achieved and the pressurized sintering of the assembly 12 is performed in a very uniform manner. To determine the pressure, the sintering device 10 can have suitable sensors. The heat transfer from a heating device (not shown) provided in the upper tool 14 to the assembly 12 can be achieved by multiple paths via the cylinder 28, the piston 30, the pressure pad 24, the plunger 60, the guide frame 40 and the membrane 50. A control device (not shown) can control or regulate process parameters such as pressure, pressing time and / or pressing temperature according to predetermined process rules.

[0072] After the sintering operation is completed, the upper tool 14 and the lower tool 16 are moved away from one another and the workpiece carrier 18 with the assembly 12 is released so that it can be removed from the sintering apparatus 10 .

[0073] The various components of the sintering apparatus 10 according to the exemplary embodiment and its variations will now be described in more detail with reference to FIGS.

[0074] Figure 3 shows the upper tool 14 with the pressure unit 20 and the guide frame 40 fixed thereto. A workpiece carrier 18, housing a number of electronic assemblies 12 for sintering in corresponding compartments, rests on the lower tool 16. To protect the assemblies 12 from dirt and contamination, a foil (not visible in Figure 3) can be arranged on the workpiece carrier 18 and fixed by a foil retaining ring 32 arranged thereon, thus preventing unintentional slippage. To prevent slippage of the foil retaining ring 32, the workpiece carrier 18 can be provided with suitable recesses or grooves 34. The foil improves the parallel alignment between the upper tool 14 and the lower tool 16 and can also improve the height equalization.

[0075] The diameter of the foil retaining ring 32 can be selected such that the guide frame 40 rests inside the foil retaining ring 32 on the work carrier 18 and therefore does not come into contact with the foil retaining ring 32. Alternatively, the diameter of the foil retaining ring can be selected to be small so that the guide frame 40 rests on the foil retaining ring 32, thereby creating pressure in the pressure unit 20.

[0076] Figure 4 shows the arrangement of Figure 3 in a side view, where only the workpiece carrier 18 is shown, but not the lower tool 16. From Figure 4 it can already be seen that the guide frame 40 is a multi-part structure made up of several plates, as will be explained in more detail below.

[0077] With reference to FIG. 5, the structure of the upper tool 14, including the pressure unit 20 and the guide frame 40, is explained in more detail. The structure of the pressure unit 20 corresponds to that shown in FIGS. 1 and 2. FIGS. 5 and 6 show the multi-part structure of the guide frame 40. The guide frame 40 includes a two-part plunger guide plate 46 with an upper plunger guide plate 46A and a lower plunger guide plate 46B. The guide duct 42 extends through both plunger guide plates 46A, 46B. The plunger 60 is guided with a certain lateral clearance inside the guide duct 42 so that the plunger 60 can also tilt to some extent inside the guide duct 42. For example, the guide duct 42 and the plunger 60 can have a rectangular cross section, with edge lengths of 8.00 mm for the guide duct 42 and 7.96 mm for the plunger 60. These dimensions are merely examples and are in no way limiting.

[0078] The piston 30 may be sealed against the cylinder 28 by a sliding guide insert 166, as detailed in Figures 18a and 18b. Alternatively, a sealing principle may be used using a piston sealing insert as shown in Figures 21a and 21b.

[0079] This moderate clearance allows the surfaces of the plunger 60 and the assembly 12, which are operably connected, to be aligned parallel to one another as necessary, preventing the formation of gradients during pressure application and further improving the uniformity of pressure application.

[0080] As can be easily seen, particularly in Figure 6, a membrane retainer plate 44 is disposed above a plunger guide plate 46 and has a number of penetrations 48 associated with compartments 36 formed in the work carrier 18 for holding the assemblies 12. Each penetration 48 can span a number of guide ducts 42 and respective plungers 60 disposed therein.

[0081] Each penetration 48 is associated with a respective membrane section 50A which is preferably somewhat larger than the associated penetration 48 so that the membrane section 50A can be clamped and held in place between the plunger guide plate 46 and the membrane retainer plate 44.

[0082] The membrane retainer plate 44, the upper plunger guide plate 46A and the lower plunger guide plate 46B may be bolted together.

[0083] 7, a suitable recess 54 can be formed in the upper side of the upper plunger guide plate 46A and sized to accommodate the associated membrane section 50A. Depending on the configuration, the depth of the recess 54 can be adjusted to the thickness of the membrane section 50A such that the membrane section 50A protrudes slightly upward from the recess 54 so that it can be clamped by the membrane retaining plate 44.

[0084] 9 and 10, the membrane retaining plate 44 can have, for each penetration 48, a respective all-around sealing edge 56 arranged at a distance from the edge of the penetration 48 and designed as a kind of bead which clamps the associated membrane section 50A on the peripheral side. The sealing edge 56 either consists of a flexible material fitted into the membrane retaining plate 44 or is formed by a corresponding projection provided on the membrane retaining plate 44.

[0085] To prevent the plunger 60 from falling out of the guide duct when the upper tool 14 is raised, the sintering apparatus 10 may have a fixing device for the plunger 60.

[0086] According to the configuration of such a fixing device, the membrane 50 or the membrane section 50A can be magnetic, which can be achieved, for example, by coating the membrane 50 or the membrane section 50A with a ferromagnetic or paramagnetic material, or the magnetic material can be embedded in the membrane 50 or the membrane section 50A in the form of microparticles or nanoparticles.

[0087] Each magnetic element 62 is preferably set flush on the plunger 60 with its end facing the membrane 50. These magnetic elements 62, made of a heat-resistant permanent magnetic material, interact with the magnetic membrane 50 and therefore prevent the plunger 60 from falling out of the guide duct 42. To replace the plunger 60 if necessary, it can be released from the membrane 50 by applying a force that overcomes the retention force. In this configuration, the plunger guide plate 46 can also be designed integrally.

[0088] A further configuration of the guide frame 40 with an alternative fixing device for the plungers 60 will be described with reference to Figures 12 and 13. The plungers 60 are provided with respective slot-like recesses 64 into which elongated fixing pins 66 extend. The fixing pins 66 are held in short grooves 52 formed in the upper side of the lower plunger guide plate 46B. To securely hold the fixing pins 66, a corresponding groove (not shown) can be provided in the underside of the upper plunger guide plate 46A. The fixing pins 66 can be sandwiched between the upper and lower plunger guide plates 46A, 46B.

[0089] The recess 64 in the plunger 60 is dimensioned to ensure the axial mobility of the plunger 60 required for the sintering operation. The fixing pins 66 can have a circular or rectangular cross section. Each fixing pin 66 can also extend through several plungers 60 if necessary for space reasons.

[0090] According to a further aspect of the invention, Figures 14 and 15a or 15b show a pressing tool 70 for an embodiment of the sintering apparatus 10. The pressing tool 70 is shown without the guide frame 40 and the plunger 60 added in the direction of the pressing surface 92. The pressing tool 70 can be designed as either an upper or lower tool and includes a base plate 72 and a cylindrical wall section 74 extending away from the base plate 72. The angular shape of the base plate 72 and the cylindrical shape of the wall section 74 in the example are purely exemplary and each can have a variety of shapes.

[0091] The hollow space defined by the base plate 72 and the wall section 74 is closed by a metal membrane 50. The membrane 50 can be flat or dished, for example by deep drawing from a metal film or metal foil, a steel alloy, for example a chromium-nickel-steel alloy, is provided as a preferred material for the membrane 50. The plunger 60 can be arranged, for example magnetically fixed, on a pressure surface 92 of the membrane 50. The membrane 50 borders the hollow space on the side facing away from the base plate 72, in which for example a pressure pad 90 can be held. Alternatively, a support structure, for example a mechanically soft metal or liquid metal, a fluid chamber or a silicone pad, can also be received in the hollow space. The membrane 50 can have a full-circumferential rim section extending laterally in the same way as the wall section 74 and is clamped, for example, between the base plate 72 and a clamping ring 84. The clamping ring 84 can be bolted to the base plate 72, in particular to the open part of the wall section 74, and can fix the preferably dished rim section of the membrane 50. Alternatively, the membrane 50 can be fixed directly to the wall section 74. An annular piston 76, which can interact with the inner circumferential surface of the wall section 74 as a cylinder and a pressure pad 90 in the manner described above, can be disposed in a peripheral groove disposed in the clamp ring 84.

[0092] The hollow space formed between the base plate 72 and the membrane 50 defines, see figures 15a, 15b, a receiving space closed on all sides for a pressure pad or pressure chamber 90. This receiving space can form, for example, a pressure chamber 90 filled with a fluid, for example silicone or oil (see figure 15a), or a pressure pad 90 can be inserted (see figure 15b), which can be, for example, an oil-filled pad or a silicone pad etc. The pressure pad 90 can have, for example, a threaded insert, and the pressure pad 90 can be bolted to the base plate 72.

[0093] The thickness of the membrane 50 is selected so that the membrane 50 has sufficient elasticity to deform in the area of ​​the pressure surface 92 where the membrane 50 interacts with the electronic assembly components to be connected via the plunger 60 (not shown) by an appropriate dimension, and to provide pressure equalization between adjacent components via the pressure pad 90. The membrane 50 can have a uniform thickness, but can also have areas of different thickness. Thus, the membrane 50 can be thicker or thinner in some areas, and has a structure corresponding to different pressure range zones depending on the configuration of the components 130 to be pressed and the configuration of the plunger 60. The size ratios shown in Figures 14 and 15a, 15b are not necessarily to scale. In particular, the thickness of the membrane 50 can be smaller than shown. Each of the multiple individual membranes 50A can individually cover the through area 48 of the guide frame 40, as shown in Figure 5.

[0094] With reference to FIG. 16, a further embodiment of the sintering apparatus 10 is described, any of the features described in this connection may be realized in combination with the features of the sintering apparatus 10 previously described according to FIGS. 1 to 15 and may be used in other general purpose similar sintering apparatuses.

[0095] The sintering machine 10, shown diagrammatically and without scale in Fig. 16, comprises a pressure yoke 112 receiving an upper tool 120 and a pressure plunger 114 arranged below the pressure yoke 112 and holding a lower tool 122, which are movable relative to each other in the direction R by drive means in order to apply a pressure force to an electronic assembly component 130, which is connected and arranged between the upper tool 120 of the pressure yoke 112 and the lower tool 122 of the pressure plunger 114. The pressure yoke 112 receiving the upper tool 120 and the drive means can act on both the pressure yoke 112 and the pressure plunger 114 and can be designed, for example, as a hydraulic pressure with a pressure drive 34. The upper pressure tool 70 is disposed under the pressure yoke 112 as the upper tool 120, for example as a hard tool or a soft tool, and the graphite foil 140 is provided between the pressure yoke 112 and the upper tool 120, which can achieve a certain degree of equalization of pressure or gradient between the pressure yoke 112 and the upper tool 120, and can also achieve parallel alignment and height equalization. The graphite foil 140 can be adapted in type and thickness to achieve planar alignment between the upper hard tool 120 and the lower tool 122 when pressure is applied between the upper tool and the lower tool, like an elastic foil. As a result, the graphite foil 140 achieves accurate parallel alignment between the upper tool and the lower tool.

[0096] The upper tool 120 may be a hard tool or a soft tool with an elastic sintering pad 24. The upper tool 120 may be the above-mentioned upper tool 14 or the pressing tool 70 shown in Fig. 15a, Fig. 15b, or a combination thereof. Fig. 16 shows, as an example of the upper tool 120, a pressing tool 70 with a full-circumference annular piston 126 for pressing the sintering pad 24, which acts via the membrane 50 on the individual plungers 60 guided in the through-holes 48 of the plunger guide plate 46. The plungers 60 are here aligned with the component 130 to be sintered.

[0097] On the upper side of the pressure plunger 114 there is a heating plate 124, which in addition to one or more heating devices may also have one or more cooling devices. A lower tool 122, which has a receptacle for an elastic pressure pad 90 on its surface, is arranged on the upper side of the heating plate 124. Alternatively or additionally, the upper tool 120 can be provided with a pressure pad 24 designed as a soft tool, as shown in Fig. 14, Fig. 15a or Fig. 15b, and the upper hard tool 120 and / or the lower tool 122 can be replaced by the pressure tool 70.

[0098] The component 130 to be connected is placed on the pressure pad 90. A pressure tool 70 with a continuous metal film 50 and a plunger 60 guided in a penetration 48 of the guide frame is placed in the upper tool, which can exert a sintering pressure on the component 130. Optionally, one or more separation foils can be provided below and above the component 130 to prevent adhesion to the pressure pad 90 or the plunger 60.

[0099] 17a-17c show an embodiment of a diffusion soldering and / or sintering apparatus 10 with a single assembly 12 having components 130 in combination with a pressure tool 70, as shown, for example, in Figures 8 and 9a-b. A process chamber 160 includes an upper tool 14 and a lower tool 16. The upper tool 14 is contained in a pressure yoke 120.

[0100] A pressure drive 34 is arranged inside the lower tool 16 and can exert a feed movement via a pressure plunger 114 on a component 130 held in a work carrier (not shown) relative to a pressure tool 70 arranged in the upper tool 14. A number of parts 142, for example power semiconductor parts such as IGBTs, are arranged on the component 130 of the assembly 12. The parts 142 of the component 130 can have different heights and are to be connected, for example by means of cooling structures and connecting lines, in a diffusion soldering, joining or sintering process on the component 130. The component 130 can now be covered by a process cover (not shown), for example a foil, for protection and against contamination. A fluid duct 156 for temperature regulation, i.e. for the passage of a heating or cooling fluid, such as oil or air, is integrated into the pressure yoke 120.

[0101] A heating plate 124, which may have the same fluid ducts for heating or cooling, is arranged in the pressure tool 70 as the heating device 17. The heating plate 124 is the lower limit of the pressure chamber 90, where a pressure pad can be arranged. The pressure chamber 90 has a chamber area 144 which is controllably filled with a fluid. The fluid may be a gas or a liquid. In this embodiment, the chamber area 144 is filled with the ambient gas of the process chamber 160, for example a cleaning gas such as nitrogen or air. To that end, two filling valves 146 are provided in the pressure yoke 120, which allow, via valve actuators 148, to fluid-tightly close and open the chamber area 144 of the pressure chamber 90 with respect to the process chamber 160.

[0102] The pressure chamber 90 is further confined in the direction of the lower tool by a metal membrane as the membrane 50. The metal membrane can be, for example, a steel membrane, such as a dished steel sheet. The metal membrane can bulge downwards in the direction of the process chamber 160 due to fluid filling of the chamber area 144.

[0103] A multi-plunger unit 150 is disposed below the membrane 50. The multi-plunger unit 150 includes a guide plate 154 that receives and guides a number of pressure plungers 152. The pressure plungers 152 are used to selectively apply pressure to predefined areas of the component 130 and can be shaped and sized to suit the various geometric dimensions of the component 142 to which pressure is applied. During pressure application, i.e., operation of the pressure drive 34, the pressure plungers 152 are moved within the guide frame 154 towards the component 130 to selectively apply pressure.

[0104] 17a-17c, pressure is applied by the membrane 50 expanding due to the pressure difference between the process chamber 160 of the pressure chamber 90 and the fluid-fillable chamber area 144, regardless of the pressure generated by the pressure drive 34. The magnitude of the compressive force is determined from the pressure difference between the chamber area 144 and the process chamber 160, which displaces the membrane 50 towards the lower tool 16, thereby exerting pressure on the component 130.

[0105] In a first process step, shown in Figure 17a, the fill valve 146 is in an up position and the chamber area 144 is in fluid communication with the process chamber 160. In a second process step, a vacuum is created in the process chamber 160, which also creates a vacuum in the chamber area 144. The first and second process steps are shown in Figure 17a.

[0106] In a subsequent third process step, the process chamber 160 is filled with a cleaning gas, such as nitrogen, which permeates the chamber area 144 of the fluid chamber 90. In a fourth process step, the fill valve 146 is fluid-tight isolated from the process chamber 160 by the valve actuator 148. Thereafter, in a fifth process step, the pressurized drive 34 is actuated until a workpiece carrier (not shown) having the component 130 and a positioned process cover (also not shown) is in adjacent contact with the multi-plunger unit 154. The third to fifth steps are shown in FIG. 17b.

[0107] In the next, sixth process step shown in Fig. 17c, the process chamber 160 is evacuated. The membrane 50 now bulges downwards due to the pressure difference between the chamber area 144 of the pressure chamber 90 and the process chamber 160, causing the pressure plunger 152 in the guide frame 154 to move towards the component parts 130, so that a compressive force is selectively applied to the individual parts 142. This allows the height differences of the parts 142 to be compensated for, and the pressure can be fine-tuned according to the pressure difference.

[0108] This pressure application resulting from the pressure difference between the process chamber 160 and the pressure chamber 90 can be applied instead of or in addition to the pressure applied by the pressure drive 34. The resulting pressure can in principle be lower and more finely applied than the mechanical compressive force applied by the pressure drive 34. This can effectively support bonding, diffusion soldering and low pressure sintering methods.

[0109] 18a, 18b show two embodiments of a sealed pressure plunger 152. In FIG. 18a, a pressure plunger 152 made of a hard material such as steel is axially mounted and guided in a guide duct 42 of a guide frame 40. Above the guide frame 40, a pressure pad 24, for example of silicon, and / or a pressurizable pressure chamber 90 are arranged, which are sealed by the guide frame 40 and the sealed pressure plunger 152 in the direction of the pressure pad 24 or the pressure chamber. The pressure plunger 152 has a plunger lower side 170 facing the component 12B to be pressed and a plunger upper side 168 facing the pressure pad 24 or the pressure chamber 90. The cross-sectional shape of the pressure plunger 152 can preferably be square or rectangular and can have rounded corners so that at least one plunger lower side 170 is adjustable to the size of the component 12B to be pressed. The axial periphery of the pressure plunger 152 has a plunger guide side 162 in contact with the inner surface of the guide duct 42 and a plunger guide side section 164 in the region of the plunger upper side 168. The plunger guide side section 164 can be designed to be set back radially and can hold along its periphery a slide guide insert 166 in the form of a sealing insert for filling the recess. The slide guide insert 166 can preferably consist of a heat-resistant plastic, silicone or other soft material as the material of the pressure plunger 152, in particular a material with a higher coefficient of thermal expansion than the plunger material. Suitable materials are, for example, high-temperature thermoplastics, in particular polyetheretherketones or polyimides sold under the trade names PEEK, Tecapeek or Vespel. Furthermore, it is also possible to use materials with high electrical and thermal conductivity, in particular plastics, for example made of graphite. The slide guide insert 166 is preferably injection molded along the plunger guide side section 164 or printed directly using a 3D printing method.At the transition between the upper part of the slide guide insert 166 and the upper plunger part 168, a full-circumferential plunger groove 174 is preferably set in the upper plunger part 168, through which the pressure pad 24 can pass and which displaces the upper part of the slide guide insert 166 in the direction of the cylinder wall of the guide duct 42 in the event of thermal expansion due to heating of the pressure plunger 152, thereby improving the sealing.

[0110] In the example of Fig. 18a, the surface of the plunger lower portion 170 is reduced relative to the surface of the plunger upper portion 168, allowing the pressure to be increased. In contrast, Fig. 18b shows an example of a pressurizing plunger 152 in which the plunger lower portion 170 is increased relative to the plunger upper portion 168 to reduce pressure or to pressurize a larger surface of the component 12B.

[0111] A partial perspective cross-sectional view of the sliding guide insert 166 is also shown enlarged in Fig. 18b. On the side facing the cylinder wall of the guide duct 42, the sliding guide insert 166 has a friction-reducing surface contour 176, e.g. a groove contour, such that friction is reduced during the axial movement of the pressure plunger 152 against the outer wall of the guide duct 42.

[0112] Fig. 19 shows a further embodiment of a pressing tool 70, in which a pressing plunger as shown in Fig. 18a is used as an example. In principle, such pressing plungers are received in one common guide frame or in several guide frames of the pressing tool 70. The pressing tool has an upper tool 14 and a lower tool 16. The lower tool 16 can hold a workpiece carrier 18. The substrate 12A and the component 12B can be arranged on the workpiece carrier 18 as a connected assembly 12. Optionally, a process cover, for example a heat-resistant foil, can be temporarily arranged between the assembly 12 and the upper tool 14 during the sintering or pressing operation (not shown).

[0113] The upper tool 18 includes a guide frame 40 that includes one or more pressure plungers 152 held in guide ducts 42. The guide frame seals the pressure pad 24 located above it against the assembly 12. The pressure pad 24 or the pressure chamber 90 can be pressurized or depressurized using a fill valve 146. Two or more positioning elements 172, e.g. indexing rods, are used to position the upper tool 14 relative to the lower tool 16 and to secure the process cover. The positioning elements 172 can be moved in and out using a displacement unit, not shown.

[0114] The lower tool 16 may include a transport frame for holding a workpiece carrier 18 which can be automatically transported by a transport unit (not shown) through the sintering apparatus 10. The workpiece carrier can be inserted into and removed from the lower tool 16. The transport frame may be made of an electrically conductive and pressure-resistant material such as special steel and may have connecting bars of a lightweight and electrically conductive material such as an aluminum alloy, for example.

[0115] Furthermore, FIG. 20 shows in a perspective view an embodiment of a multi-plunger unit 150 as can be used in the pressing tool 70. In principle, each pressing plunger 152 is guided in a guide duct 42 of the guide frame 40. In this embodiment, several pressing plungers are guided axially along each other in a common guide duct 42. The pressing plungers are axially movable relative to each other. Sealing against the pressure chamber 90 or pressure pad 24, not shown, can be achieved using the membrane 50 or membrane section 50A previously described or using a sliding guide insert 166 provided on each pressing plunger 152. A metal membrane can be advantageously used, in which case the individual pressing plungers 152 can be magnetically fixed on the metal membrane with a non-positive connection. The multi-plunger unit 150 makes it possible to press or sinter assemblies 12 with closely adjacent structures of different heights by adjusting the length and size of the individual pressing plungers 152. A pressure-stabilizing mask can also be arranged on the lower tool 16 to allow the passage of individual pressing plungers 152 while holding back the other pressing plungers 152. Thus, by using the pressure mask on the lower tool 16 instead of adapting the guide frame 40 of the upper tool, a flexible adjustment to different assemblies 12 can be achieved, allowing a flexible and inexpensive adjustment to various pressing and sintering operations, especially in small batches. For the sealing of the plungers, it is possible to use a multi-plunger unit 150 instead of the individual plungers 152 of the concept shown in Figs. 18a, 18b. Instead of the individual plungers 152 shown in Figs. 18a, 18b, a number of small individual plungers 152 can be used, which are preferably sealed against the pressure pad 24 using a metal film on the plunger upper side 168. The individual plungers 152 can be magnetically attached to the metal film.Thus, parts of components 130 having very small sizes of a few mm, e.g. complex parts 142 having edge lengths of 5 mm or less, where individual sealing by small individual plungers 152 is impossible or only difficult, can be pressurized by small individual plungers 152 of the multi-plunger unit 150.

[0116] Finally, Fig. 21a, 21b show, by way of example, an example of an angular piston 30 as an annular piston 76 with a pressure pad 24 as a silicone pad. The angular shape of the plunger surface forming the pressure pad underside 180 allows the plunger shape to be provided space-saving and can be adapted in particular to the usual shapes of assemblies of power semiconductors such as IGBTs. The side edges of the guide sides of the annular piston 76 are rounded in order to prevent peak stresses in the region of the cylinder wall and to provide a sealing effect of the piston 30 in the cylinder 28. Fig. 21a shows the plan view and the cross-sectional view AA of the piston 30 as a rectangular annular piston 76 with rounded side edges or guide sides. The piston 30 comprises a piston skirt 184 made of a hard material, for example steel, and a piston sealing insert 186, preferably made of a soft material such as plastic, which is securely fitted therein. The soft material aids the parallel alignment of the plunger 60 with respect to the surface of the component 130 or assembly on the lower tool 16. Section view AA shows a section through the piston 30 in the direction of view shown relative to the plan view, folded upwards. The piston 30 has a piston upper side 198, the soft pad 24 shown in FIG. 21b, which forms the soft plunger and the plunger 60 at the same time, penetrates the piston upper side 198 and emerges at the piston lower side 196 when the piston 30 is inserted into the cylinder 28 (not shown). This is because the piston 30 reduces the volume of the pressure pad 24 by resting on the lower tool 16 or on the work carrier 18, on the assembly 12, at the same time as the upper tool 14 moves towards the lower tool 16. At the piston upper side 198, the piston skirt 184 of the annular piston 76 has a sealing seat 200 in the form of a protruding full periphery. The sealing groove 188 is formed by the positive fit of the piston sealing insert 186 from the piston upper side 198. This groove is limited at the side of the piston sealing insert 186 by the flange area 190, which fits into the sealing seat 200. When pressure is applied, the soft pressure pad 24 penetrates into the sealing groove 188, preventing the pressure pad from penetrating into the gap between the piston 30 and the cylinder 28.The entire upper edge around the upper side 198 of the annular piston 76, particularly along the sealing seat 200, is sharpened to improve the sealing effect, while the entire lower edge of the lower side 196 of the annular piston 76 is rounded to prevent stress peaks in the part or assembly.

[0117] FIG. 21b shows in a bottom view and in a cross-section BB the pressure pad 24, which in this example is designed as a plunger 60, a so-called soft plunger. The cross-section BB must be understood as a folded view along the line BB of the top bottom view. The pressure pad 24 is designed as a silicone plunger, in the interior of which a recess for a hard plunger insert, for example a metal block, can be provided. The lower part 180 of the pressure pad can form the plunger pressure surface. The upper part 182 of the pressure pad is provided with a sealing edge 192. After the first use for pressure application, the material of the sealing edge 192 of the pressure pad 24 is displaced into the sealing groove 188 of the piston 30, forming a sealing seam 194, which effectively seals the upper part 182 of the pressure pad against the piston 30 and the cylinder 28 (not shown). [Explanation of symbols]

[0118] 10 Sintering equipment 12 Assembly 12A board 12B Components 14 Upper Tools 16 Lower Tool 17 Heating device 18 Work Career 20 Pressure Unit 22 Receptacle 24 Pressure Pad 26 Opening 28 cylinders 30 Piston 32 Foil Retaining Ring 34 Pressure Drive 40 Guide Frame 42 Guide duct 44 Membrane Retaining Plate 46 Plunger guide plate 46A Upper plunger guide plate 46B Lower plunger guide plate 48 Penetration 50 membrane 50A Membrane Section 52 Groove 54 Depression 56 Sealed Edge 60 Plunger 62 Magnetic elements 64 Recess 66 Fixing pin 70 Pressure Tools 72 Base Plate 74 Wall Section 76 Annular Piston 84 Clamp ring 90 Pressure Pad 92 Pressure Surface 112 Pressure Yoke 114 Pressure Plunger 120 Upper Tool 122 Lower Tool 124 Heating Plate 126 Annular Piston 130 Components 140 Elastic foil / graphite foil 142 Parts on Components 144 Fillable chamber area of ​​fluid chamber 146 Filling valve 148 Valve Actuator 150 Multi-plunger unit 152 Pressure Plunger 154 Guide Frame 156 Temperature Control Fluid Duct 160 Process Chamber 162 Plunger guide side 164 Plunger Guide Side Section 166 Slide guide insert 168 Plunger upper part 170 Lower part of plunger 172 Positioning Elements 174 Full Circumference Plunger Groove 176 Friction-reducing surface contours 180 Pressure pad lower part 182 Pressure pad upper part 184 Piston skirt 186 Piston Sealing Insert 188 Sealing groove 190 Sealed Insert Flange Area 192 Pressure Pad Sealing Edge 194 Pressure Pad Sealing Seam 196 Lower part of piston 198 Upper part of piston 200 Piston skirt sealing sheet R Pressure direction

Claims

1. A diffusion soldering and / or sintering device (10) for connecting components of at least one electronic assembly (12) by diffusion soldering and / or pressure sintering, comprising an upper tool (14, 120) between which at least one electronic assembly (12) is clamped and a lower tool (16, 122), said upper tool (14, 120) having at least one pressure pad (24, 90) filled or fillable with a fluid or displaceable medium having a variable internal pressure, and at least one plunger (60, 152) operably connected to said pressure pad (24, 90) and configured to transmit a pressure force generated by a pressure rise in said pressure pad (24, 90) to said electronic assembly (12), said upper tool (14, 120) being axially movable forward along an effective direction of the pressure force. a guide frame (40, 154) in which the plunger (60, 152) is guided, the plunger (60, 152) being movably guided in the guide frame (40, 154) in a sealed state against the pressure pad (24, 90); the upper tool (14, 120) has at least one pressure unit (20) having a receptacle (22) for the pressure pad (24, 90), the pressure unit (20) having a cylinder (28) and a piston (30) movably held therein, the cylinder (28) and the piston (30) defining the receptacle (22) for the pressure pad (24, 90) such that a volume of the receptacle (22) is variable by a movement of the piston (30).

2. 2. The diffusion soldering and / or sintering apparatus (10) of claim 1, characterized in that the pressure unit (20) has an opening (26) facing the lower tool (16, 122) and covered by the guide frame (40, 154), and the pressure pad (24, 90) rests on the guide frame (40, 154).

3. 3. The diffusion soldering and / or sintering device (10) according to claim 2, characterized in that the opening (26) is provided in the piston (30).

4. 4. The diffusion soldering and / or sintering apparatus (10) according to claim 1 or 3, characterized in that the upper tool (14, 120) and the lower tool (16, 122) are movable relative to each other along the effective direction of the pressing force, and when the upper tool (14, 120) comes into contact with the lower tool (16, 122) or a work carrier resting on the lower tool (16, 122), the piston (30) moves into the cylinder (28).

5. 2. The diffusion soldering and / or sintering apparatus (10) according to claim 1, characterized in that the pressure pads (24, 90) are connected or connectable to a fluid source for supplying a fluid into the pressure pads (24, 90), and a pressure increase can be performed by supplying a fluid.

6. 2. The diffusion soldering and / or sintering apparatus (10) according to claim 1, characterized in that the guide frame (40, 154) includes a plunger guide plate (46) having a guide duct (42) for axially guiding the plunger (60, 152).

7. 7. The diffusion soldering and / or sintering device (10) according to claim 6, characterized in that at least one flexible membrane (50, 50A) covering the guide duct (42) is arranged between the pressure pad (24, 90) and the plunger (60, 152).

8. Diffusion soldering and / or sintering apparatus (10) according to claim 7, characterized in that the guide frame (40, 154) has a membrane retaining plate (44) arranged on the side of the plunger guide plate (46) facing the pressure pad (24, 90), and the flexible membrane (50, 50A) is retained between the membrane retaining plate (44) and the plunger guide plate (46).

9. 9. The diffusion soldering and / or sintering device (10) according to claim 8, characterized in that the membrane carrier plate (44) has at least one penetration (48) extending at least above the guide duct (42).

10. Diffusion soldering and / or sintering device (10) according to claim 7, characterized in that said plunger (60, 152) is permanently or detachably connected to said flexible membrane (50, 50A).

11. 7. The diffusion soldering and / or sintering apparatus (10) according to claim 6, characterized in that the upper tool (14, 120) has at least one fixing device for the plunger (60, 152) which fixes the plunger (60, 152) so that it does not fall out of the guide duct (42).

12. A diffusion soldering apparatus and / or sintering apparatus (10) as described in claim 11, characterized in that at least one flexible membrane (50, 50A) covering the guide duct (42) is arranged between the pressure pad (24, 90) and the plunger (60, 152), the flexible membrane (50, 50A) is magnetic, and the fixing device includes respective magnetic elements (62) connected to the plunger (60, 152) and holds the plunger (60, 152) on the flexible membrane (50, 50A).

13. A diffusion soldering and / or sintering apparatus (10) as described in claim 11, characterized in that the guide frame (40, 154) has a membrane retaining plate (44) arranged on the side of the plunger guide plate (46) facing the pressure pad (24, 90), and the fixing device includes respective fixing pins (66) attached to the membrane retaining plate (44) and extending through recesses (64) provided in the plunger (60, 152).

14. 7. Diffusion soldering and / or sintering device (10) according to claim 6, characterized in that the plunger (60, 152) is held with lateral clearance in the guide duct (42).

15. Diffusion soldering and / or sintering device (10) according to claim 1, characterized in that the plunger (60, 152) has a square or rectangular cross section and the guide sides (162) of the plunger (60, 152) are rounded.

16. Diffusion soldering and / or sintering apparatus (10) according to claim 6, characterized in that the guide frame (40, 154) has a square or rectangular shape, the guide duct (42) has a square or rectangular cross-sectional shape, and the plunger (60, 152) has a square or rectangular cross-section.

17. Diffusion soldering and / or sintering device (10) according to claim 6, characterized in that the guide duct or guiding ducts (42) hold a number of adjacent plungers (60, 152) which are guidable along one another.

18. 2. The diffusion soldering and / or sintering apparatus (10) according to claim 1, characterized in that the plunger (60, 152) has on its upper guide side section (164) facing the pressure pad (24, 90) a slide guide insert (166) made of a material softer than the plunger material, and a circumferential plunger groove (174) is provided on the plunger upper side (168) between the upper edge of the slide guide insert (166) and the plunger upper side (168).

19. 2. The diffusion soldering and / or sintering apparatus (10) of claim 1, characterized in that the plunger (60, 152) of the plunger lower part (170) has a smaller or larger cross section than the plunger upper part (168).

20. 2. The diffusion soldering and / or sintering device (10) according to claim 1, characterized in that the piston (30) is movably guided in a sealed manner relative to the cylinder (24, 90), the piston (30) being formed as an annular piston (76, 126).

21. A diffusion soldering and / or sintering apparatus (10) as described in claim 20, characterized in that the annular piston (76, 126) includes a piston skirt (184) of a harder material than the annular piston (30) and a piston sealing insert (186) of a softer material than the annular piston (30) securely held within the piston skirt (184).

22. 21. The diffusion soldering and / or sintering device (10) according to claim 20, characterized in that the piston skirt (184) has a sealing seat (200) on its piston upper side (198) facing the upper tool (14, 120) in which a flange area (190) of the piston sealing insert (186) engages to form a circumferential sealing groove (188), and the pressure pad (24) has a circumferential sealing edge (192) on the pressure pad upper side (182) which can be pressed into the circumferential sealing groove (188) of the piston (30) when pressure is applied to the piston (30) with a sealing seam (194) being formed.

23. Diffusion soldering and / or sintering device (10) according to claim 21, characterized in that said piston (30) and said pressure pad (24) are associated with a plunger (60, 152).

24. A diffusion soldering and / or sintering apparatus (10) as described in claim 22, characterized in that the plunger (60, 152) is designed as a soft plunger and is provided by the pressure pad (24), or the piston (30) and the pressure pad (24) are associated with a plurality of plungers (60, 152).

25. A pressure tool (70) designed as an upper tool (14, 120) or a lower tool (16, 122) of a diffusion soldering and / or sintering device (10) according to claim 1, A rigid base plate (72); at least one membrane (50, 50A) connected to said base plate (72) and formed by a flexible membrane (50), or - a number of membrane sections (50A) in the direction of the pressure surface (92), or - a guide frame (40, 154) having at least one plunger (60, 152) movably guideable therein; a pressure chamber including at least one pressure pad (24, 90) arranged in a closed receiving space limited by the base plate (72) and the membrane (50, 50A) or the guide frame (40, 154) having at least one plunger (60, 152) and closing the pressure pad (24, 90) in the direction of the pressure surface (92) to guide the at least one plunger (60, 152), and filled with a fluid.

26. A pressure tool (70) according to claim 25, characterized in that at least one sub-region of the pressure chamber is controllably fluid-fillable by at least one filling valve (146).

27. 26. A diffusion soldering and / or sintering installation comprising a diffusion soldering and / or sintering device (10) according to claim 1 and / or a pressure tool (70) according to claim 25, characterized in that the diffusion soldering and / or sintering device (10) and / or the pressure tool (70) are arranged in an atmospherically sealed module of a multi-module system, at least one further module is provided as a pre-heating module and / or a cooling module, a transport device is provided which is configured to automatically move at least one workpiece carrier (18) with at least one assembly (12) through the multi-module system, and adjacent modules of the multi-module system are atmospherically sealable from one another.

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