Apparatus and method for CMP temperature control

Abstract

The chemical mechanical polishing apparatus includes a platen for holding a polishing pad, a carrier for holding a substrate against the polishing surface of the polishing pad during the polishing process, a temperature control system including a source of fluid medium, and one or more openings disposed above the platen and separated from the polishing pad, the openings configured to allow the fluid medium to flow over the polishing pad to heat or cool the polishing pad.

Description

[Technical field]

[0001] TECHNICAL FIELD This disclosure relates to chemical mechanical polishing (CMP), and more particularly to temperature control during chemical mechanical polishing. [Background technology]

[0002] Integrated circuits are typically formed on a substrate by sequentially depositing conductive, semiconductive, or insulating layers on a semiconductor wafer. Planarization of layers on the substrate is required during various manufacturing processes. For example, one manufacturing step involves depositing a fill layer over a non-planar surface and planarizing the fill layer. In certain applications, the fill layer is planarized until the top surface of a patterned layer is exposed. For example, a metal layer can be deposited on a patterned insulating layer to fill the trenches and holes in the insulating layer. After planarization, portions of the metal remaining in the trenches and holes of the patterned layer form vias, plugs, and lines that provide conductive paths between thin film circuits on the substrate. As another example, a dielectric layer can be deposited over a patterned conductive layer and then planarized to allow for subsequent photolithography steps.

[0003] Chemical mechanical polishing (CMP) is one accepted method of planarization. This planarization method typically requires that the substrate be mounted on a carrier head. Typically, the exposed surface of the substrate is placed against a rotating polishing pad. The carrier head exerts a controllable load on the substrate to press the substrate against the polishing pad. Typically, an abrasive slurry containing abrasive particles is supplied to the surface of the polishing pad. Summary of the Invention

[0004] In one aspect, a chemical mechanical polishing apparatus includes a platen for holding a polishing pad, a carrier for holding a substrate against a polishing surface of the polishing pad during a polishing process, and a temperature control system including a source of heated fluid and a plurality of openings disposed above the platen and separated from the polishing pad and configured to allow the heated fluid to flow onto the polishing pad.

[0005] Implementations of any of the above aspects may include one or more of the following features.

[0006] The heated fluid may include a gas, for example steam.

[0007] A body may extend above the platen and a plurality of openings may be formed in a surface of the body. The openings may be disposed on the body with a non-uniform density along a radial axis of the platen.

[0008] The apparatus may have a slurry dispensing port, and the openings may be arranged with a higher density in a radial zone corresponding to the radial location of the slurry dispensing port.

[0009] In another aspect, a chemical mechanical polishing apparatus includes a platen for holding a polishing pad, a carrier for holding a substrate against a polishing surface of the polishing pad during a polishing process, and a temperature control system including a source of cooling fluid and a plurality of openings disposed above the platen and separated from the polishing pad and configured to allow the cooling fluid to flow onto the polishing pad.

[0010] Implementations of any of the above aspects may include one or more of the following features.

[0011] The plurality of openings can supply a cooling fluid to a first region of the polishing pad. The polishing fluid dispensing system can have a port for supplying polishing fluid to a second separate region of the polishing pad, and the rinsing system can have a port for supplying rinsing fluid to a third separate region of the polishing pad.

[0012] The cooling fluid may include a liquid, such as water. For example, the cooling fluid may be comprised of water or aerosolized water.

[0013] The cooling fluid may include a liquid and a gas. The plurality of openings may be configured to generate an aerosolized mist.

[0014] The openings may be disposed on the body with a non-uniform density along the radial axis of the platen.

[0015] One or more valves and / or pumps may control the mixture ratio of liquid and gas in the cooling fluid supplied to the polishing pad.

[0016] In another aspect, a method of chemical mechanical polishing includes contacting a substrate with a polishing pad, creating relative motion between the polishing pad and the substrate, and raising or lowering the temperature of the polishing pad by supplying a thermal control medium onto the polishing pad.

[0017] In another aspect, a chemical mechanical polishing apparatus includes a platen for holding a polishing pad, a carrier for holding a substrate against a polishing surface of the polishing pad during a polishing process, and a temperature control system including a source of fluid medium and one or more openings disposed above the platen and separated from the polishing pad and configured to allow the fluid medium to flow over the polishing pad to heat or cool the polishing pad.

[0018] One or more of the following possible advantages may be realized: The temperature of the polishing pad may be increased or decreased quickly and efficiently; The temperature of the polishing pad may be controlled without contacting the polishing pad with a solid body (e.g. a heat exchange plate), thus reducing the risk of pad contamination and failure; The temperature variation across a polishing operation may be reduced, which may improve the polishing predictability of the polishing process; The temperature variation from one polishing operation to another may be reduced, which may improve the wafer-to-wafer uniformity and improve the repeatability of the polishing process; The temperature variation across the substrate may be reduced, which may improve the within-wafer uniformity.

[0019] The details of one or more embodiments are set forth in the accompanying drawings and the description below. Other aspects, features, and advantages will become apparent from the description and drawings, and from the claims. [Brief description of the drawings]

[0020] [Figure 1] 1 shows a schematic cross-sectional view of one embodiment of a polishing apparatus. [Diagram 2] 1 shows a schematic top view of an exemplary chemical mechanical polishing apparatus. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Chemical mechanical polishing works by a combination of mechanical wear and chemical etching at the interface between the substrate, the polishing fluid, and the polishing pad. During the polishing process, friction between the surface of the substrate and the polishing pad generates a significant amount of heat. In addition, some processes also include an in-situ pad conditioning step, in which a conditioning disk, for example a disk coated with abrasive diamond particles, is pressed against the rotating polishing pad to condition and texture the surface of the polishing pad. Heat can also be generated by wear during the conditioning process. For example, in a typical 1-minute copper CMP process with a nominal downforce pressure of 2 psi and a removal rate of 8000 Å / min, the surface temperature of a polyurethane polishing pad can increase by about 30 degrees Celsius.

[0022] Both chemically related variables (e.g., the onset and rate of the reactions involved) and mechanically related variables (e.g., the surface friction coefficient and viscoelasticity of the polishing pad) in the CMP process are strongly temperature dependent. As a result, variations in the surface temperature of the polishing pad can lead to changes in removal rate, polishing uniformity, erosion, dishing, and residue. By controlling the surface temperature of the polishing pad more closely during polishing, the temperature variations can be reduced, and the polishing performance, as measured, for example, as intra-wafer or inter-wafer non-uniformity, can be improved.

[0023] Several techniques have been proposed for temperature control. As one example, a coolant can be flowed through the platen. As another example, the temperature of the polishing liquid supplied to the polishing pad can be controlled. However, these techniques can be insufficient. For example, the platen must supply or draw heat through the body of the polishing pad itself to control the temperature of the polishing surface. Because polishing pads are typically plastic materials and are poor conductors of heat, heat control from the platen can be difficult. On the other hand, the polishing liquid may not have significant thermal mass.

[0024] A technique that can address these issues is to have a dedicated temperature control system (separate from the supply of polishing fluid) that supplies a temperature-controlled medium (e.g., liquid, vapor, or mist) onto the polishing surface of the polishing pad (or the polishing fluid on the polishing pad).

[0025] A further challenge is that the temperature rise is often not uniform along the radius of the rotating polishing pad during the CMP process. Without being limited to any particular theory, different sweep profiles of the polishing head and pad conditioner can sometimes have different residence times in each radial zone of the polishing pad. Furthermore, the relative linear velocity between the polishing pad and the polishing head and / or pad conditioner also varies along the radius of the polishing pad. Furthermore, the polishing liquid can act as a heat sink, cooling the polishing pad in the area where the polishing liquid is dispensed. These effects can contribute to non-uniform heat generation on the polishing pad surface, which can result in variations in removal rate within the wafer.

[0026] A technique that may address these issues is to have multiple independently controlled dispensers spaced along the radius of the polishing pad, which allows the temperature of the media to be varied along the length of the pad, and therefore the temperature of the polishing pad to be controlled in the radial direction. Another technique that may address these issues is to have dispensers spaced non-uniformly along the radius of the polishing pad.

[0027] 1 and 2 show one embodiment of a polishing station 20 of a chemical mechanical polishing system. The polishing station 20 includes a rotatable, disk-shaped platen 24 on which a polishing pad 30 rests. The platen 24 is operable to rotate about an axis 25 (see arrow A in FIG. 2). For example, a motor 22 can turn a drive shaft 28 to rotate the platen 24. The polishing pad 30 can be a two-layer polishing pad having an outer polishing layer 34 and a softer backing layer 32.

[0028] The polishing station 20 may include a supply port, for example, at the end of a slurry supply arm 39, for dispensing a polishing fluid 38 (such as a polishing slurry) onto the polishing pad 30. The polishing station 20 may include a pad conditioner device 90 having a conditioning disk 92 (see FIG. 2) for maintaining the surface roughness of the polishing pad 30. The conditioning disk 92 may be located at the end of an arm 92 that may be swung to sweep the disk 92 radially across the polishing pad 30.

[0029] Carrier head 70 is operable to hold substrate 10 against polishing pad 30. Carrier head 70 is suspended from a support structure 72 (e.g., a carousel or track) and coupled by a drive shaft 74 to a carrier head rotation motor 76 such that carrier head 70 may rotate about axis 71. Optionally, carrier head 70 may be oscillated laterally, for example on a slider on the carousel, by movement along the track, or by rotational oscillation of the carousel itself.

[0030] The carrier head 70 may include a retaining ring 84 for holding the substrate. In some embodiments, the retaining ring 84 may include a lower plastic portion 86 that contacts the polishing pad and an upper portion 88 of a harder material.

[0031] In operation, the platen rotates about its central axis 25 and the carrier head rotates about its central axis 71 and translates laterally across the upper surface of the polishing pad 30 .

[0032] Carrier head 70 may include a flexible membrane 80 having a substrate mounting surface that contacts the backside of substrate 10, and a number of pressurizable chambers 82 for applying different pressures to different zones (e.g., different radial zones) on substrate 10. The carrier head may also include a retaining ring 84 for holding the substrate.

[0033] In some embodiments, the polishing station 20 includes a sensor 64 for monitoring the temperature within the polishing station or the temperature of the polishing station or components within the polishing station (e.g., the temperature of the polishing pad and / or the slurry on the polishing pad). For example, the temperature sensor 64 may be an infrared (IR) sensor (e.g., an IR camera) disposed above the polishing pad 30 and configured to measure the temperature of the polishing pad 30 and / or the slurry 38 on the polishing pad. In particular, the temperature sensor 64 may be configured to measure the temperature at multiple points along the radius of the polishing pad 30 to generate a radial temperature profile. For example, the IR camera may have a field of view that spans the radius of the polishing pad 30.

[0034] In some embodiments, the temperature sensor is a contact sensor rather than a non-contact sensor. For example, the temperature sensor 64 may be a thermocouple or an IR thermometer disposed on or within the platen 24. Additionally, the temperature sensor 64 may be in direct contact with the polishing pad.

[0035] In some embodiments, multiple temperature sensors can be spaced at different radial locations across the polishing pad 30 to provide the temperature at multiple points along the radius of the polishing pad 30. This technique can be used alternatively or in addition to an IR camera.

[0036] 1 as being positioned to monitor the temperature of the polishing pad 30 and / or the slurry 38 on the pad 30, the temperature sensor 64 may also be positioned inside the carrier head 70 to measure the temperature of the substrate 10. The temperature sensor 64 may be in direct contact (i.e., a contacting sensor) with the semiconductor wafer of the substrate 10. In some implementations, multiple temperature sensors are included within the polishing station 22, for example, to measure the temperature of various components of / within the polishing station.

[0037] The polishing system 20 also includes a temperature control system 100 for controlling the temperature of the polishing pad 30 and / or the slurry 38 on the polishing pad. The temperature control system 100 may include a cooling system 102 and / or a heating system 104. At least one of the cooling system 102 and the heating system 104, and in some embodiments both, operate by supplying a temperature control medium (e.g., a liquid, vapor, or mist) onto the polishing surface 36 of the polishing pad 30 (or onto the polishing fluid already present on the polishing pad).

[0038] In the cooling system 102, the cooling medium may be a gas (e.g., air) or a liquid (e.g., water). The medium may be at room temperature or may be chilled below room temperature (e.g., 5-15 degrees Celsius). In some implementations, the cooling system 102 uses an air-liquid mist (e.g., an aerosolized mist of a liquid such as water). In particular, the cooling system may have a nozzle that creates an aerosolized mist of water that is chilled below room temperature. In some implementations, a solid material may be mixed with the gas and / or liquid. The solid material may be a chilled material (e.g., ice) or a material that absorbs heat when dissolved in water (e.g., by a chemical reaction).

[0039] The cooling medium may be supplied by flowing through one or more apertures in the coolant supply arm (e.g., holes or slots optionally formed in a nozzle), which may be provided by a manifold connected to a source of coolant.

[0040] 1 and 2, an exemplary cooling system 102 includes an arm 110 that extends over the platen 24 and polishing pad 30 from the edge of the polishing pad to or near the center of the polishing pad 30 (e.g., within 5% of the total radius of the polishing pad). The arm 110 may be supported by a base 112, which may be supported on the same frame 40 as the platen 24. The base 112 may include one or more actuators, such as a linear actuator that raises or lowers the arm 110 and / or a rotary actuator that swings the arm 110 laterally over the platen 24. The arm 110 is positioned to avoid collisions with other hardware components, such as the polishing head 70, pad conditioning disk 92, and slurry dispensing arm 39.

[0041] The exemplary cooling system 102 includes a plurality of nozzles 120 suspended from an arm 110. Each nozzle 120 is configured to spray a liquid cooling medium (e.g., water) onto the polishing pad 30. The arm 110 may be supported by a base 112 such that the nozzles 120 are separated from the polishing pad 30 by a gap 126.

[0042] Each nozzle 120 may be configured to direct aerosolized water in a mist 122 toward the polishing pad 30. The cooling system 102 may include a source 130 of liquid cooling medium and a gas source 132 (see FIG. 2). The liquid from source 130 and the gas from source 132 may be mixed, for example, in a mixing chamber 134 (see FIG. 1) in or on the arm 110 before being directed through the nozzles 120 to generate the mist 122.

[0043] In some implementations, process parameters such as flow rate, pressure, temperature, and / or liquid to gas mixture ratio can be independently controlled for each nozzle. For example, the coolant for each nozzle 120 can flow through an independently controllable chiller to independently control the temperature of the mist. As another example, a separate set of gas and liquid pumps can be coupled to each nozzle to independently control the flow rate, pressure, and gas to liquid mixture ratio for each nozzle.

[0044] The various nozzles can spray onto different radial zones 124 on the polishing pad 30. Adjacent radial zones 124 may overlap. In some embodiments, the nozzles 120 generate a mist that impinges on the polishing pad 30 along an elongated region 128. For example, the nozzles can be configured to generate a mist within a generally planar triangular space.

[0045] One or more of the elongated regions 128, for example all of the elongated regions 128, may have a longitudinal axis parallel to a radius extending through the region 128 (see region 128a). Alternatively, the nozzle 120 produces a cone-shaped mist.

[0046] 1 shows the mist overlapping, the nozzles 120 may be oriented such that the elongated regions do not overlap. For example, at least some of the nozzles 120, such as all of the nozzles 120, may be oriented such that the elongated region 128 is at an oblique angle to a radius passing through the elongated region (see 128b).

[0047] At least some of the nozzles 120 may be oriented such that the central axis of the spray from that nozzle (see arrow A) is at an oblique angle to the polishing surface 36. In particular, the mist 122 may be directed from the nozzles 120 such that, within the region of impingement caused by the rotation of the platen 24, the mist 122 has a horizontal component (see arrow A) in a direction opposite to the direction of movement of the polishing pad 30.

[0048] 1 and 2 show the nozzles 120 as being uniformly spaced, this is not necessary. The nozzles 120 may be non-uniformly distributed either radially or angularly, or both. For example, the nozzles 120 may be clustered more tightly along the radial direction toward the edge of the polishing pad 30. Although Figures 1 and 2 show nine nozzles, there may be a greater or lesser number of nozzles (e.g., from 3 to 20 nozzles).

[0049] In the heating system 104, the heating medium may be a gas (e.g., steam or heated air) or a liquid (e.g., heated water) or a combination of gas and liquid. The medium is above room temperature (e.g., 40-120 degrees Celsius, e.g., 90-110 degrees Celsius). The medium may be water (substantially pure deionized water, or water with additives or chemicals). In some implementations, the heating system 104 uses sprayed steam. The steam may include additives or chemicals.

[0050] The heating medium may be supplied by flowing through apertures (e.g., holes or slots provided by one or more nozzles) on the heating supply arm, which may be provided by a manifold connected to a source of heating medium.

[0051] The exemplary heating system 104 includes an arm 140 that extends over the platen 24 and polishing pad 30 from the edge of the polishing pad to or near the center of the polishing pad 30 (e.g., within 5% of the total radius of the polishing pad). The arm 140 may be supported by a base 142, which may be supported on the same frame 40 as the platen 24. The base 142 may include one or more actuators, such as a linear actuator that raises or lowers the arm 140 and / or a rotary actuator that swings the arm 140 laterally over the platen 24. The arm 140 is positioned to avoid collisions with other hardware components, such as the polishing head 70, pad conditioning disk 92, and slurry dispensing arm 39.

[0052] Along the rotation direction of the platen 24, the arm 140 of the heating system 104 may be disposed between the arm 110 of the cooling system 102 and the carrier head 70. Along the rotation direction of the platen 24, the arm 140 of the heating system 104 may be disposed between the arm 110 of the cooling system 102 and the slurry supply arm 39. For example, the arm 110 of the cooling system 102, the arm 140 of the heating system 104, the slurry supply arm 39, and the carrier head 70 may be disposed along the rotation direction of the platen 24 in this order.

[0053] A plurality of openings 144 are formed in the underside of the arm 140. Each opening 144 is configured to direct a gas or vapor, e.g., steam, onto the polishing pad 30. The arm 140 may be supported by a base 142 such that the openings 144 are separated from the polishing pad 30 by a gap. The gap may be 0.5-5 mm. In particular, the gap may be selected such that heat of the heating fluid is not significantly dissipated before the fluid reaches the polishing pad. For example, the gap may be selected such that steam emitted from the openings does not condense before reaching the polishing pad.

[0054] The heating system 104 may include a source of steam 146, which may be coupled to the arm 140 by piping. Each opening 144 may be configured to direct steam toward the polishing pad 30.

[0055] In some embodiments, process parameters, such as flow rate, pressure, temperature, and / or liquid to gas mixture ratios, can be independently controlled for each nozzle. For example, the fluid for each opening 144 can flow through an independently controllable heater to independently control the temperature of the heating fluid, such as the temperature of steam.

[0056] The various openings 144 can direct steam onto different radial zones on the polishing pad 30. Adjacent radial zones can overlap. Optionally, some of the openings 144 can be oriented such that the central axis of the spray from that opening is at an oblique angle to the polishing surface 36. Steam can be directed from one or more of the openings 144 to have a horizontal component in a direction opposite to the direction of movement of the polishing pad 30, within the region of impingement caused by the rotation of the platen 24.

[0057] 2 shows the openings 144 as being uniformly spaced, this is not necessary. The nozzles 120 may be non-uniformly distributed either radially or angularly, or both. For example, the openings 144 may be more tightly clustered toward the center of the polishing pad 30. As another example, the openings 144 may be more tightly clustered at a radius corresponding to the radius at which polishing fluid 38 is delivered to the polishing pad 30 by the slurry delivery arm 39. Additionally, while FIG. 2 shows nine openings, there may be a greater or lesser number of openings.

[0058] The polishing system 20 may also include a high-pressure rinse system 106. The high-pressure rinse system 106 includes a plurality of nozzles 154 (e.g., 3 to 20 nozzles) that direct a cleaning fluid, such as water, at high intensity onto the polishing pad 30 to clean the pad 30 and remove used slurry, polishing debris, and the like.

[0059] 2, an exemplary rinsing system 106 includes an arm 150 that extends over the platen 24 and polishing pad 30 from the edge of the polishing pad to or near the center of the polishing pad 30 (e.g., within 5% of the total radius of the polishing pad). The arm 150 may be supported by a base 152, which may be supported on the same frame 40 as the platen 24. The base 152 may include one or more actuators, such as a linear actuator that raises or lowers the arm 150 and / or a rotary actuator that swings the arm 150 laterally over the platen 24. The arm 150 is positioned to avoid collisions with other hardware components, such as the polishing head 70, the pad conditioning disk 92, and the slurry dispensing arm 39.

[0060] Along the rotation direction of the platen 24, the arm 150 of the rinsing system 106 may be between the arm 110 of the cooling system 102 and the arm 140 of the heating system 104. For example, the arm 110 of the cooling system 102, the arm 150 of the rinsing system 106, the arm 140 of the heating system 104, the slurry supply arm 39, and the carrier head 70 may be arranged in this order along the rotation direction of the platen 24. Alternatively, along the rotation direction of the platen 24, the arm 110 of the cooling system 102 may be between the arm 150 of the rinsing system 106 and the arm 140 of the heating system 104. For example, the arm 150 of the rinsing system 106, the arm 110 of the cooling system 102, the arm 140 of the heating system 104, the slurry supply arm 39, and the carrier head 70 may be arranged in this order along the rotation direction of the platen 24.

[0061] A plurality of nozzles 154 are suspended from the arm 150. Each nozzle 154 is configured to spray a cleaning fluid at high pressure onto the polishing pad 30. The arm 150 can be supported by a base 152 such that the nozzles 120 are separated from the polishing pad 30 by a gap. The rinsing system 106 can include a source of cleaning fluid 156, which can be coupled to the arm 150 by piping.

[0062] The various nozzles 154 can spray onto different radial zones on the polishing pad 30. Adjacent radial zones can overlap. In some embodiments, the nozzles 154 are oriented such that the impact areas of the cleaning fluid on the polishing pad do not overlap. For example, at least some of the nozzles 154 may be positioned and oriented such that the impact areas are angularly separated.

[0063] At least some of the nozzles 154 may be oriented such that the central axis of the spray from that nozzle is at an oblique angle to the polishing surface 36. In particular, the cleaning fluid may be sprayed from each nozzle 154 with a horizontal component that is radially outward (towards the edge of the polishing pad). This allows the cleaning fluid to peel off the pad 30 more quickly, leaving a thinner region of fluid on the polishing pad 30. This allows for thermal coupling between the heating and / or cooling medium and the polishing pad 30.

[0064] 2 shows the openings 154 as being evenly spaced, this is not necessary. Additionally, while Figures 1 and 2 show nine nozzles, there may be a greater or lesser number of nozzles (e.g., from 3 to 20 nozzles).

[0065] The polishing system 20 may also include a controller 90 for controlling the operation of various components, such as the temperature control system 100. The controller 90 is configured to receive temperature measurements from the temperature sensors 64 for each radial zone of the polishing pad. The controller 90 can compare the measured temperature profile to a desired temperature profile and generate a feedback signal to a control mechanism (e.g., actuator, power supply, pump, valve, etc.) for each nozzle or opening. The feedback signal is calculated by the controller 90, for example, based on an internal feedback algorithm, to cause the control mechanism to adjust the amount of cooling or heating so that the polishing pad and / or slurry reaches (or at least approaches) the desired temperature profile.

[0066] Although FIG. 2 shows separate arms for each subsystem, e.g., heating system 104, cooling system 102, and rinsing system 106, the various subsystems can be included in a single assembly supported by a common arm. For example, the assembly can include a cooling module, a rinsing module, a heating module, a slurry supply module, and an optional wiper module. Each module can include a body, e.g., an arcuate body, that can be secured to a common mounting plate, which can be secured to the end of the arm such that the assembly is positioned above the polishing pad 30. Various fluid supply components, e.g., tubing, passages, etc., can extend inside each body. In some embodiments, the modules are individually removable from the mounting plate. Each module can have similar components to perform the functions of the arms of the associated system described above.

[0067] The above polishing apparatus and method can be applied to a variety of polishing systems. Either the polishing pad or the carrier head, or both, can move to create relative motion between the polishing surface and the substrate. For example, the platen can orbit rather than rotate. The polishing pad can be a circular (or some other shaped) pad fixed to the platen. The polishing layer can be a standard (e.g., polyurethane with or without fillers) abrasive material, a soft material, or a fixed abrasive material.

[0068] It should be understood that the term relative positioning is used to refer to relative positioning within a system or substrate, and that the polishing surface and substrate may be held in a vertical orientation or some other orientation during the polishing operation.

[0069] The functional operations of the controller 90 may be implemented using one or more computer program products, i.e., one or more computer programs tangibly embodied in non-transitory computer-readable storage media, to perform or control the operation of a data processing device, e.g., a programmable processor, a computer, or multiple processors or computers.

[0070] A number of embodiments of the present invention have been described. However, it should be understood that various modifications can be made without departing from the spirit and scope of the invention.

[0071] For example, although the above description focuses on providing heating and / or cooling media on the polishing pad, heating and / or cooling media can be provided on other components to control the temperature of those components. For example, heating and / or cooling media can be sprayed onto the substrate while the substrate is positioned in the transfer station, e.g., the load cup. As another example, the load cup itself can be sprayed with heating and / or cooling media. As yet another example, the conditioning disk can be sprayed with heating and / or cooling media.

[0072] Accordingly, other embodiments are within the scope of the following claims.

Claims

1. 1. A chemical mechanical polishing apparatus comprising: a platen for holding the polishing pad; a carrier for holding a substrate against the polishing surface of the polishing pad during the polishing process; a polishing fluid dispenser having a slurry dispensing port disposed on a polishing fluid arm extending above the platen for supplying polishing fluid onto the polishing pad; a rinsing system that supplies a rinsing liquid to the polishing pad; and 1. A temperature control system comprising: a temperature control system including a heater control arm extending over the platen and connected to a source of heated fluid, and a first plurality of openings separate from the slurry dispensing port and the rinsing system, the first plurality of openings being disposed in the heater control arm above the platen and separate from the polishing pad, the first plurality of openings being configured to flow the heated fluid directly onto the polishing pad; Chemical mechanical polishing equipment.

2. The apparatus of claim 1 , wherein the heated fluid comprises a gas.

3. The apparatus of claim 2 , wherein the gas comprises steam.

4. The temperature control system further comprises:

4. The apparatus of claim 1, further comprising: a cooling control arm extending over the platen and connected to a source of cooling fluid; and a second plurality of openings separate from the slurry dispensing port and the rinsing system, the second plurality of openings being disposed on the cooling control arm over the platen and separated from the polishing pad, the cooling fluid being configured to flow from the second plurality of openings directly onto the polishing pad.

5. The apparatus of claim 1 or 3, wherein the heat control arm is supported by a base spaced from a side of the platen.

6. The apparatus of claim 1 or 3, wherein the openings are positioned to dispense fluid into multiple overlapping zones along a radial axis of the platen.

7. The apparatus of claim 1 or 3, wherein the openings are arranged with a non-uniform density along a radial axis of the platen.

8. The apparatus of claim 1 or 3, wherein the openings are arranged at a higher density in a radial zone corresponding to the radial location of the slurry dispensing port.

9. The apparatus of claim 1 or 3, wherein at least one of the openings is configured such that a central axis of spray from the opening is at an oblique angle to the polishing surface.

10. 10. The apparatus of claim 9, wherein at least one of the openings is configured such that the heated fluid is directed from the opening onto the polishing surface such that the heated fluid has a horizontal component in a direction opposite to a direction of movement of the polishing pad within a region of impingement of the heated fluid on the polishing surface.

11. 1. A method of chemical mechanical polishing comprising the steps of: contacting the substrate with a polishing pad; supplying a polishing fluid onto a first radial zone of the polishing pad; creating relative motion between the polishing pad and the substrate; rinsing a second radial zone of the polishing pad different from the first radial zone with a rinsing liquid; and increasing a temperature of a third radial zone of the polishing pad different from the first radial zone and the second radial zone by supplying a thermal control medium different from the polishing liquid and the rinsing liquid to the third radial zone at a position along a direction of movement of the polishing pad relative to the substrate, the position being different from a position of the polishing pad to which the polishing liquid and the rinsing liquid are supplied.

Images