Panel storage container

Abstract

To provide a panel container that can suppress breakage of a panel while complying with an SEMI standard.SOLUTION: In a panel container including a container body which has an opening and defines a container space for a panel P and a lid body 3 for closing the opening, the lid body 3 faces an end surface Pa of the panel P contained in the container body in a first direction while closing the opening. The container body has a retainer 63 for regulating movement of the panel P in the first direction while the lid body 3 is closing the opening. The retainer 63 has a pressing unit 73 for pressing the end surface Pa to the container space and a supporting unit 72 for supporting the pressing unit 73 in the first direction so that the pressing unit 73 can move forward and backward according to the opening or closing of the lid body 3. The supporting unit 72 causes the pressing unit 73 to press the end surface Pa while the lid body 3 closes the opening, and cancels the pressing of the end surface Pa by the pressing unit 73 while the opening is released.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present disclosure relates to a panel enclosure. [Background technology]

[0002] In manufacturing processes that handle panels such as glass substrates for liquid crystal panels, panel storage containers that store multiple panels are used when transferring rectangular panels from one manufacturing device to another manufacturing device for a different process, and when temporarily storing the panels. For example, Patent Document 1 describes a panel storage container that includes a container body that stores the panels, and a lid that can be opened and closed to cover an opening provided in the container body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-127272 A Summary of the Invention [Problem to be solved by the invention]

[0004] A retainer may be provided on the lid of a panel storage container to prevent damage to the panel caused by movement of the panel in the forward and backward directions due to vibration or the like. For example, when there is a gap between the inner surface of the lid and the panel, the retainer is provided to protrude beyond the inner surface of the lid. However, when a retainer is provided on the lid, the lid may become thicker than the thickness of the lid specified in the SEMI (Semiconductor Equipment and Materials International) standard. In such a case, the lid may be damaged by the load port that opens and closes the lid.

[0005] The present disclosure describes a panel housing that can reduce damage to the panel while complying with SEMI standards. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure includes a container body having an opening and defining a storage space for storing a panel, and a lid for closing the opening. The lid faces an end face of a panel stored in the container body in a first direction when the opening is closed. The container body includes a retainer that restricts movement of the panel in the first direction when the lid closes the opening. The retainer includes a pressing portion for pressing the end face toward the storage space, and a support portion that supports the pressing portion so that it can advance and retreat in the first direction depending on whether the lid is opened or closed. The support portion causes the pressing portion to press the end face when the lid closes the opening, and releases the pressing of the pressing portion against the end face when the opening is open.

[0007] In this panel storage container, the container body is provided with a retainer. Therefore, since there is no need to provide a retainer on the lid, the thickness of the lid can be within the thickness stipulated in the SEMI standard. The retainer on the container body allows the pressing portion of the retainer to press the end face of the panel toward the storage space when the lid is closing the opening of the container body, and the pressing force on the end face of the panel is released when the opening of the container body is open. Therefore, when the lid is closing the opening of the container body, the movement of the panel in the first direction is restricted, and when the opening of the container body is open, the panel can be removed from the container body. As a result, it is possible to suppress damage to the panel while complying with the SEMI standard.

[0008] In some embodiments, the container body may further include a shaft extending in a first direction for supporting the panel. The shaft may have an end portion that faces the lid in the first direction when the lid is closing the opening. The retainer may be provided at the end portion. In this case, since there is no need to provide a retainer on the lid, the thickness of the lid can be set within the thickness specified by the SEMI standard.

[0009] In some embodiments, the retainer may further include an attachment portion for attaching the retainer to an end portion. The support portion may include a first arm member having flexibility, extending from the attachment portion in a second direction intersecting with the first direction, and curved convexly toward the lid body so that the first arm member is pressed toward the storage space by the lid body when the lid body is closing the opening. The pressing portion may include a first pressing member provided at the tip of the first arm member. In this case, when the lid body closes the opening, the lid body presses the curved portion of the first arm member toward the storage space, and a force toward the storage space is applied to the first arm member. Since the first arm member is flexible, the first arm member is elastically deformed, and the first pressing member provided at the tip of the first arm member moves toward the end surface of the panel. This allows the first pressing member to press the end surface. On the other hand, when the force applied to the first arm member is released when the opening is opened, the first pressing member moves in a direction away from the end surface of the panel due to the elastic force of the first arm member. This releases the pressure on the end face of the panel, thereby restricting movement of the panel in the first direction while the lid is closing the opening of the container body, and also makes it possible to remove the panel from the container body while the opening of the container body is open.

[0010] In some embodiments, the support portion may further include a flexible second arm member that extends from the attachment portion toward the opposite side to the first arm member and is curved convexly toward the lid body so that the second arm member is pressed toward the storage space by the lid body when the lid body is closing the opening. The pressing portion may include a second pressing member provided at the tip of the second arm member. In this case, when the lid body closes the opening, the lid body presses the curved portion of the second arm member toward the storage space, and a force is applied to the second arm member toward the storage space. Since the second arm member is flexible, the second arm member is elastically deformed, and the second pressing member provided at the tip of the second arm member moves toward the end surface of the panel. This allows the second pressing member to press the end surface together with the first pressing member. On the other hand, when the force applied to the second arm member is released when the opening is opened, the second pressing member moves in a direction away from the end surface of the panel due to the elastic force of the second arm member. This releases the pressure on the end surface of the panel. Therefore, when the lid body is closing the opening of the container body, the movement of the panel in the first direction is more reliably restricted, and when the opening of the container body is open, the panel can be removed from the container body.

[0011] In some embodiments, the support may include an elastic member provided at the end and capable of expanding and contracting in a first direction, and a knock member attached to the elastic member so as to be pressed by the lid body toward the shaft in the first direction when the lid body is closing the opening. The pressing portion may be fixed to the knock member. In this case, when the lid body closes the opening, the lid body presses the knock member toward the shaft in the first direction. As a result, the elastic member is compressed, and the pressing portion fixed to the knock member moves toward the end face of the panel and presses the end face. On the other hand, when the force applied to the knock member is released when the opening is opened, the pressing portion moves in a direction away from the end face of the panel due to the elastic force of the elastic member. As a result, the pressing force against the end face of the panel is released. Therefore, when the lid body closes the opening of the container body, the movement of the panel in the first direction is restricted, and when the opening of the container body is opened, the panel can be carried out from the container body.

[0012] In some embodiments, the container body may further include a flange that defines the opening. The retainer may be provided on the flange. In this case, since there is no need to provide a retainer on the lid, the thickness of the lid can be within the thickness specified by the SEMI standard.

[0013] In some embodiments, the support may include a hinge portion that attaches the pressing portion to the flange so as to be rotatable about a support shaft that extends in a second direction intersecting with the first direction. When the lid closes the opening, the hinge portion may rotate the pressing portion about the support shaft to press the end face, and when the opening is opened, the hinge portion may rotate the pressing portion about the support shaft to release the pressing of the pressing portion. In this case, when the lid closes the opening, the pressing portion rotates about the support shaft and presses the end face of the panel. On the other hand, when the opening is opened, the pressing portion rotates about the support shaft and the pressing of the end face of the panel by the pressing portion is released. Therefore, when the lid closes the opening of the container body, the movement of the panel in the first direction is restricted, and when the opening of the container body is opened, the panel can be removed from the container body. Effect of the Invention

[0014] According to the present disclosure, a panel can be held while complying with SEMI standards. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is an exploded perspective view of a panel storage container according to a first embodiment. [Diagram 2] FIG. 2 is a rear perspective view of the panel housing container shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] 5 is an exploded perspective view of the shaft and the retainer shown in FIG. [Figure 6] Fig. 6(a) is a plan view showing the positional relationship between the retainer and the panel when the opening is open, and Fig. 6(b) is a cross-sectional view taken along line VIb-VIb in Fig. 6(a). [Figure 7] Fig. 7(a) is a plan view showing the positional relationship between the retainer and the panel when the lid is closing the opening, and Fig. 7(b) is a cross-sectional view taken along line VIIb-VIIb in Fig. 7(a). [Figure 8] Fig. 8(a) is a diagram showing a modified example of the retainer, and Fig. 8(b) is a diagram showing another modified example of the retainer. [Figure 9] FIG. 9 is a cross-sectional view showing the internal structure of a panel storage container according to the second embodiment. [Figure 10] FIG. 10 is a cross-sectional view taken along line XX in FIG. [Figure 11] 11 is an exploded perspective view of the shaft and retainer shown in FIG. [Figure 12]Fig. 12(a) is a cross-sectional view showing the positional relationship between the retainer and the panel when the opening is open, and Fig. 12(b) is a cross-sectional view showing the positional relationship between the retainer and the panel when the lid closes the opening. [Figure 13] FIG. 13 is an exploded perspective view of the panel storage container according to the third embodiment. [Figure 14] FIG. 14 is a cross-sectional view taken along line XIV-XIV in FIG. [Figure 15] FIG. 15 is an enlarged view of a portion of FIG. [Figure 16] FIG. 16 is a cross-sectional view showing the positional relationship between the retainer and the panel when the lid is closing the opening. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions are omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction is a direction intersecting (here, perpendicular to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction intersecting (here, perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is a left-right direction (width direction; second direction), the Y-axis direction is a front-back direction (depth direction; first direction), and the Z-axis direction is a top-bottom direction (height direction; second direction). For convenience of description, the terms "front", "rear", "upper", "lower", "left", and "right" are used, but are not limited to these directions.

[0017] (First embodiment) A panel storage container according to a first embodiment will be described with reference to FIG. 1 and FIG. 2. FIG. 1 is an exploded perspective view of the panel storage container according to the first embodiment. FIG. 2 is a rear perspective view of the panel storage container shown in FIG. 1. The panel storage container 1 shown in FIG. 1 and FIG. 2 is a container for storing a plurality of panels. The panel storage container 1 complies with, for example, the SEMI standard. Examples of the panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panel has a rectangular shape. Examples of the panel size include 510 mm×515 mm and 600 mm×600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily, and may be, for example, 6 or 12.

[0018] The panel storage container 1 is used, for example, in a manufacturing device for manufacturing electronic components. Electronic components are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, a process of sealing these electronic components with epoxy resin or the like, a process of peeling the sealed electronic components from the carrier panel in panel form, and a process of cutting out the panel-form electronic components individually. The panel storage container 1 is used to transport panels between these processes.

[0019] The panel storage container 1 includes a container body 2 and a lid body 3.

[0020] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores a plurality of panels. Specifically, the container body 2 stores a plurality of panels arranged in the vertical direction. The panels are inserted into and removed from the container body 2 via the opening 2a. Details of the container body 2 will be described later.

[0021] The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 airtightly closes the opening 2a of the container body 2 via a sealing member 33 such as a gasket (see FIG. 16). When closing the opening 2a, the lid body 3 faces an end face of a panel housed in the container body 2 in the front-rear direction. The lid body 3 is detachably attached to a flange 25 that defines the opening 2a. The lid body 3 includes a lid main body 31 and a locking mechanism 32.

[0022] The lid body 31 is a main body of the lid body 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material such as aluminum and magnesium alloy. The lid body 31 may be made of a thermoplastic resin such as polycarbonate resin. The lid body 31 has a front surface 31a and a back surface 31b. The front surface 31a forms the outer surface of the panel storage container 1. A keyhole 31h is provided in the front surface 31a. A key (not shown) is inserted into the keyhole 31h. The back surface 31b is the surface opposite to the front surface 31a. When the lid body 3 closes the opening 2a, the back surface 31b faces the storage space 20.

[0023] The locking mechanism 32 locks or unlocks the lid 3 by operating a key inserted in a keyhole 31h. The locking mechanism 32 is equipped with a latch (not shown). With the lid 3 attached to the flange 25, the latch is inserted into a locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid 3.

[0024] The container body 2 and the lid 3 are constructed by combining a plurality of parts molded from metal materials or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may be used as the resins contained in the molding material of the resin material.

[0025] Conductive materials and various antistatic agents may be added to these resins. The conductive materials may be, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. As the antistatic agent, anionic, cationic, and nonionic antistatic agents may be used. Benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine ultraviolet absorbers may be added. Glass fibers or carbon fibers that improve rigidity may also be selectively added.

[0026] Next, a detailed description will be given of the container body 2. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, a frame 26, a base portion 27, and a side plate 28.

[0027] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are substantially rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are disposed substantially parallel to each other. The pair of side walls 23 face each other in the left-right direction and are disposed substantially parallel to each other. The rear wall 24 connects the rear end of the top plate 21 to the rear end of the bottom plate 22, and also connects the rear ends of the pair of side walls 23. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define the storage space 20.

[0028] The top plate 21, the bottom plate 22, and the side walls 23 are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be visually observed from the outside of the container body 2. A part of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0029] The flange 25 is a rectangular frame body, and is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material. The upper and lower frame parts of the flange 25 are each provided with two locking holes 25h arranged at a distance in the left-right direction. The locking holes 25h in the upper frame part and the locking holes 25h in the lower frame part are provided in positions facing each other in the up-down direction.

[0030] The frame body 26 is used to fix the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24. The frame body 26 is made of a metal material such as aluminum or stainless steel. The frame body 26 is provided on the front surface of the rear wall 24. The frame body 26 has a frame portion 26a (see FIG. 3), a support pillar 26b (see FIG. 3), and a pair of support pillars 26c (see FIG. 3). The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

[0031] The support pillar 26b and the pair of support pillars 26c are columnar members extending in the up-down direction. The one support pillar 26c, the support pillar 26b, and the other support pillar 26c are arranged in that order in the left-right direction and are disposed approximately parallel to each other. The support pillar 26b and the pair of support pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The support pillar 26b is provided at the center of the frame body 26 in the left-right direction, and the pair of support pillars 26c are provided near both ends of the frame body 26 in the left-right direction. The support pillar 26b is provided with a plurality of fitting holes for attaching a shaft 61a described later. The support pillar 26c is provided with a plurality of fitting holes for attaching a shaft 62a described later.

[0032] The pedestal portion 27 is a portion that serves as the base of the container body 2. The pedestal portion 27 is made of a metal material such as aluminum or stainless steel. The pedestal portion 27 is provided on the lower surface of the bottom plate 22. The pedestal portion 27 is made by combining a plurality of columnar support members.

[0033] The side plate 28 is a member for attaching the support body 65 described later. The side plate 28 is a plate-shaped member extending in the up-down direction. The side plate 28 is made of a metal material such as aluminum or stainless steel. The side plate 28 is provided on the outer surface of the side wall 23. In the present embodiment, two side plates 28 are provided on each side wall 23. The two side plates 28 are arranged in the front-rear direction and disposed approximately parallel to each other. One side plate 28 is provided near the center of the side wall 23 in the front-rear direction, and the other side plate 28 is provided near the front end of the side wall 23 in the front-rear direction.

[0034] At the corners of the container body 2, cover members for preventing particles from entering the accommodation space 20 are provided.

[0035] Next, the configuration inside the storage space 20 will be described with reference to Fig. 3. Fig. 3 is a cross-sectional view taken along line III-III in Fig. 2. As shown in Fig. 3, the container body 2 further includes a panel support portion 60. The panel support portion 60 is a portion for supporting a plurality of panels. The panel support portion 60 is provided in the storage space 20. The panel support portion 60 includes a plurality of central support portions 61, a plurality of side support portions 62, a plurality of retainers 63, and a plurality of stoppers 64.

[0036] The numbers of central support parts 61, side support parts 62, retainers 63, and stoppers 64 vary depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel support parts 60 include one central support part 61, two side support parts 62, two retainers 63, and two stoppers 64 per panel. In other words, the one central support part 61, the two side support parts 62, the two retainers 63, and the two stoppers 64 form a storage stage that stores one panel.

[0037] The central support portion 61 is a portion for supporting the central portion of the panel in the left-right direction. The central support portion 61 has a shaft 61a and a plurality of elastic bodies 61b. The shaft 61a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 61a is used to support one panel. The shaft 61a has an end portion 61c and an end portion 61d, which are both ends in the extension direction (front-rear direction) of the shaft 61a. The end portion 61c is fitted into a fitting hole of the support 26b and fixed to the support 26b by a screw. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0038] The elastic body 61b is an annular (for example, circular) member provided on the outer circumferential surface of the shaft 61a. The elastic body 61b is provided to suppress slippage of the panel and improve the positioning accuracy of the panel. From the viewpoint of preventing slippage of the panel, the elastic body 61b may have a higher frictional force than the shaft 61a. From the viewpoint of preventing damage to the panel, the elastic body 61b may have a higher elasticity (cushioning property) than the shaft 61a. The elastic body 61b is made of, for example, a rubber material. Examples of the rubber material include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The elastic body 61b is, for example, an O-ring. The multiple elastic bodies 61b are arranged at regular intervals in the extension direction of the shaft 61a.

[0039] The side support portion 62 is a portion for supporting both ends of the panel in the left-right direction. The side support portion 62 has a shaft 62a, a plurality of elastic bodies 62b, and a plurality of supports 65. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The shaft 62a is used to support one panel. The shaft 62a has an end portion 62c and an end portion 62d, which are both ends in the extension direction (front-rear direction) of the shaft 62a. The end portion 62c of the shaft 62a is fitted into a fitting hole of the support 26c and fixed to the support 26c by a screw. The end portion 62d faces the cover 3 (rear surface 31b) in the front-rear direction when the cover 3 closes the opening 2a.

[0040] The shaft 62a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction, and is longer than the length of the shaft 61a in the front-rear direction. The shaft 61a and the pair of shafts 62a are arranged in the left-right direction. The shaft 61a is disposed between the pair of shafts 62a.

[0041] The elastic body 62b is an annular (for example, circular) member provided on the outer circumferential surface of the shaft 62a. The elastic body 62b is provided to suppress slippage of the panel and improve the positioning accuracy of the panel. The constituent material and arrangement of the elastic body 62b are similar to those of the elastic body 61b, and therefore a detailed description thereof will be omitted.

[0042] The support body 65 is a member for holding (supporting) the shaft 62a and supporting the end portion in the left-right direction of the panel. An insertion hole penetrating the support body 65 in the front-rear direction is provided at the tip portion of the support body 65, and the shaft 62a is inserted through the insertion hole. The support body 65 has an inclined surface that slopes downward from the base end of the support body 65 toward the tip.

[0043] The base end portion of the support 65 is abutted against the inner surface of the side wall 23, and the side plate 28, the side wall 23, and the support 65 are positioned by a knock pin (not shown). In this state, a screw is inserted from the outside of the side plate 28 into an insertion hole provided in the side plate 28, and the screw is screwed into a screw hole provided in the base end portion of the support 65. As a result, the support 65 is fixed to the side plate 28 with the side wall 23 sandwiched between the support 65 and the side plate 28.

[0044] The retainer 63 is a member that restricts the movement of the panels housed in the container body 2 in the front-rear direction (movement toward the lid body 3) when the lid body 3 closes the opening 2a. The retainer 63 is made of, for example, the above-mentioned resin material. The retainer 63 is provided at the end 62d of the shaft 62a. The details of the retainer 63 will be described later.

[0045] The stopper 64 is a member for determining the position of the rear end of the panel. The stopper 64 is made of, for example, the above-mentioned resin material. The stopper 64 is provided at the end 62c of the shaft 62a. The stopper 64 has a block shape. The stopper 64 has an insertion hole for inserting the shaft 62a in the front-rear direction. With the shaft 62a inserted into the insertion hole of the stopper 64, the rear surface of the stopper 64 abuts against the front surface of the support 26c, and the stopper 64 is fixed to the support 26c by a screw. The stopper 64 has an inclined surface that inclines forward from the top surface downward.

[0046] The placement position on which the panel is placed is determined by the retainer 63, the stopper 64, and the support 65. Specifically, the placement position of the panel in the front-rear direction is determined by the retainer 63 and the stopper 64, and the placement position of the panel in the left-right direction is determined by the four support bodies 65 provided on the left and right.

[0047] Next, the retainer 63 will be described in detail with reference to Figures 4 and 5. Figure 4 is a cross-sectional view taken along line IV-IV in Figure 3. Figure 5 is an exploded perspective view of the shaft and the retainer shown in Figure 4. As shown in Figures 4 and 5, the retainer 63 includes an attachment portion 71, a support portion 72, and a pressing portion 73.

[0048] The mounting portion 71 is a portion for mounting the retainer 63 to the end portion 62d. The mounting portion 71 has a protruding piece 74 that protrudes upward at the front end of the mounting portion 71. The protruding piece 74 has an inclined surface 74a. The inclined surface 74a is a surface that inclines forward as it extends upward. The mounting portion 71 is provided with a through hole 71h that penetrates the mounting portion 71 in the front-rear direction. The end portion 62d of the shaft 62a is fitted into the through hole 71h from the rear end of the mounting portion 71, and the retainer 63 is attached to the shaft 62a by a screw 77.

[0049] The support portion 72 is a portion that supports the pressing portion 73 so as to be able to advance and retreat in the front-rear direction in response to the opening and closing of the lid body 3. The support portion 72 causes the pressing portion 73 to press the end surface Pa of the panel P when the lid body 3 is in a state where the opening 2a is closed, and releases the pressing of the pressing portion 73 against the end surface Pa of the panel P when the opening 2a is open. Specifically, the support portion 72 includes a pair of arm members 75. Each arm member 75 is a member having flexibility. The pair of arm members 75 are provided on the mounting portion 71. One arm member 75 (first arm member) extends in the left-right direction from one end of the protruding piece 74 in the left-right direction so as to be separated from the protruding piece 74. The other arm member 75 (second arm member) extends in the left-right direction from the other end of the protruding piece 74 in the left-right direction so as to be separated from the protruding piece 74. In other words, one arm member 75 and the other arm member 75 extend in opposite directions to each other in the direction in which end surface Pa extends (the left-right direction).

[0050] Each of the pair of arm members 75 is curved forwardly and convexly. The curved portion of each arm member 75 protrudes forward from the position of the back surface 31b when the lid body 3 closes the opening 2a. In other words, each arm member 75 is curved forwardly and convexly toward the lid body 3 so as to be pressed backward by the lid body 3 when the lid body 3 closes the opening 2a.

[0051] The pressing portion 73 is a portion for pressing the end face Pa of the panel P backward. The pressing portion 73 includes a pair of pressing members 76. One pressing member 76 (first pressing member) is provided at the tip of one arm member 75. The other pressing member 76 (second pressing member) is provided at the tip of the other arm member 75. Each pressing member 76 has a pressing surface 76a. The pressing surface 76a is a surface that abuts against the end face Pa when the pressing member 76 presses the end face Pa backward.

[0052] The operation of the retainer 63 will be described with reference to Fig. 6(a), Fig. 6(b), Fig. 7(a), and Fig. 7(b). Fig. 6(a) is a plan view showing the positional relationship between the retainer and the panel when the opening is open. Fig. 6(b) is a cross-sectional view taken along line VIb-VIb in Fig. 6(a). Fig. 7(a) is a plan view showing the positional relationship between the retainer and the panel when the lid is closing the opening. Fig. 7(b) is a cross-sectional view taken along line VIIb-VIIb in Fig. 7(a).

[0053] As shown in Figures 6(a) and 6(b), when the opening 2a is open, the pressing surface 76a of each pressing member 76 is separated from the end surface Pa of the panel P. At this time, the curved portion of each arm member 75 protrudes forward from the position in the front-rear direction of the back surface 31b when the cover 3 closes the opening 2a. Since no load is applied to the curved portion of the arm member 75, no elastic force is generated in the arm member 75. This state of the retainer 63 is referred to as the initial state.

[0054] As shown in FIG. 7(a) and FIG. 7(b), when the cover 3 closes the opening 2a, the curved portions of the arm members 75 are pushed backward by the rear surface 31b of the cover 3. Since the arm members 75 are flexible, the arm members 75 are elastically deformed and the pressing members 76 move backward. As a result, the pressing surfaces 76a come into contact with the end faces Pa and press the end faces Pa backward. Since the rear end faces of the panel P come into contact with the stoppers 64, the panel P is sandwiched between the retainer 63 and the stoppers 64 in the front-rear direction. As a result, the movement of the panel P in the front-rear direction is restricted. The amount of deformation of the arm members 75 in the front-rear direction is, for example, 5 mm or less.

[0055] At this time, since the arm member 75 is elastically deformed, an elastic force is generated in the arm member 75. Therefore, when the lid body 3 is removed from the container body 2 and the opening 2a is opened, the shape of the arm member 75 returns to its original state and the retainer 63 returns to its initial state. This allows the panel P to move in the front-rear direction, and the panel P becomes ready to be carried out.

[0056] Two retainers 63 are provided for one panel P, and each retainer 63 has two arm members 75. In other words, a holding force four times the elastic force is applied to one panel P. The entire panel storage container 1 generates a holding force equal to the number M of panels that can be stored in the panel storage container 1. Here, the SEMI standard specifies that the maximum tightening force for the lid 3 is 192 N. To satisfy this regulation, each arm member 75 may be designed so that the holding force for holding the panel P per arm member 75 (elastic force of the arm member 75) is 192 N / (M×2×2) or less.

[0057] In the panel storage container 1 described above, the container body 2 includes a retainer 63. Specifically, the retainer 63 is provided at the end 62d of the shaft 62a. Therefore, since there is no need to provide a retainer on the lid body 3, the thickness of the lid body 3 can be within the thickness stipulated in the SEMI standard. The retainer 63 allows the pressing portion 73 to press the end face Pa in the front-rear direction (rearward) toward the storage space 20 when the lid body 3 is closing the opening 2a, and releases the pressing force on the end face Pa when the opening 2a is open. Therefore, when the lid body 3 is closing the opening 2a, the movement of the panel P in the front-rear direction is restricted, and when the opening 2a is open, the panel P can be carried out from the container body 2. As a result, it is possible to suppress damage to the panel P while complying with the SEMI standard.

[0058] Specifically, when the lid body 3 closes the opening 2a, the lid body 3 presses the curved portion of each arm member 75 in the front-rear direction (rearward) toward the storage space 20, and a force is applied to each arm member 75 toward the storage space 20. Since each arm member 75 has flexibility, each arm member 75 elastically deforms, and the pressing member 76 provided at the tip of each arm member 75 moves toward the end surface Pa. In other words, the pressing member 76 is pressed toward the end surface Pa by using the force of closing the lid body 3. As a result, each pressing member 76 presses the end surface Pa. On the other hand, when the opening 2a is opened (the lid body 3 is removed from the container body 2), if the force applied to each arm member 75 is released, each pressing member 76 moves in a direction away from the end surface Pa due to the elastic force of each arm member 75. As a result, the pressing force against the end surface Pa is released. Therefore, when the lid body 3 closes the opening 2a, the movement of the panel P in the front-rear direction is restricted, and when the opening 2a is open, the panel P can be removed from the container body 2.

[0059] The retainer 63 may be provided only on the end portion 62d of the shaft 62a on one side. The support portion 72 may include only the arm member 75 on one side, and the pressing portion 73 may include only the pressing member 76 on one side.

[0060] As shown in FIG. 8(a), the pressing member 76 may have an inclined surface 76b and an inclined surface 76c instead of the pressing surface 76a. The inclined surface 76b and the inclined surface 76c are surfaces that face the end surface Pa in the front-rear direction. The lower end of the inclined surface 76b is connected to the upper end of the inclined surface 76c. The inclined surface 76b is inclined toward the panel P as it heads upward from the boundary between the inclined surface 76b and the inclined surface 76c. The inclined surface 76c is inclined toward the panel P as it heads downward from the boundary between the inclined surface 76b and the inclined surface 76c. In other words, the inclined surface 76b and the inclined surface 76c form a V-shaped groove.

[0061] In this case, with the lid 3 closing the opening 2a, the pressing member 76 presses the panel P backward while vertically sandwiching the front end of the panel P between the inclined surfaces 76b and 76c. With this configuration, the movement of the front end of the panel P in the vertical direction is restricted. Therefore, even if a vertical force is applied to the panel P due to vibration or the like with the lid 3 closing the opening 2a, the possibility that the panel P will come off the pressing member 76 can be reduced. As a result, it is possible to more reliably restrict the movement of the panel P in the front-rear direction.

[0062] As shown in FIG. 8(b), the pressing member 76 may include a main body 76d and a protruding portion 76e. The main body 76d is a portion facing the end surface Pa of the panel P in the front-rear direction. The main body 76d has a block shape. The protruding portion 76e protrudes in the front-rear direction from the upper end of the main body 76d toward the panel P. In this case, when the cover 3 closes the opening 2a, the pressing member 76 presses the end surface Pa backward by the main body 76d. At this time, since the protruding portion 76e is located above the panel P, even if an upward force is applied to the panel P due to vibration or the like, the possibility that the panel P will come off the pressing member 76 can be reduced. As a result, it is possible to more reliably restrict the movement of the panel P in the front-rear direction.

[0063] The pressing member 76 may further include another protrusion that protrudes in the front-rear direction from the lower end of the main body 76d toward the panel P. In this case, when the lid 3 is closing the opening 2a, the other protrusion is located below the panel P, so that even if a force in the up-down direction is applied to the panel P due to vibration or the like, the possibility of the panel P coming off the pressing member 76 can be reduced. As a result, it is possible to more reliably restrict movement of the panel P in the front-rear direction.

[0064] Second embodiment A panel storage container according to the second embodiment will be described with reference to Fig. 9 to Fig. 11. Fig. 9 is a cross-sectional view showing an internal structure of the panel storage container according to the second embodiment. Fig. 10 is a cross-sectional view taken along line XX in Fig. 9. Fig. 11 is an exploded perspective view of the shaft and the retainer shown in Fig. 10.

[0065] As shown in FIG. 9, the panel storage container 1A differs from the panel storage container 1 mainly in that the container body 2A is provided instead of the container body 2. The container body 2A differs from the container body 2 mainly in that the container body 2A is provided instead of the panel support portion 60. The panel support portion 60A differs from the panel support portion 60 mainly in that the panel support portion 60A is provided instead of the retainers 63. As shown in FIG. 11, the end portion 62d of the shaft 62a has a smaller diameter than the other portion of the shaft 62a. An annular groove 62e is provided on the outer circumferential surface of the end portion 62d. The shaft 62a has a step portion 62f formed between the end portion 62d and the other portion.

[0066] 10 and 11, the retainer 63A includes a support portion 81 and a pressing portion 82. Similar to the support portion 72, the support portion 81 is a portion that supports the pressing portion 82 so that the pressing portion 82 can advance and retreat in the front-rear direction in response to the opening and closing of the lid body 3. The support portion 81 causes the pressing portion 82 to press the end face Pa when the lid body 3 is in a state where the opening 2a is closed, and releases the pressing of the pressing portion 82 against the end face Pa when the opening 2a is open. Specifically, the support portion 81 includes an elastic member 83, a knock member 84, and a retaining ring 85.

[0067] The elastic member 83 is provided at the end 62d so as to be expandable and contractible in the front-rear direction. In this embodiment, the elastic member 83 is a coil spring, and is wound around the axis of the shaft 62a on the outer circumferential surface of the end 62d. The elastic member 83 is disposed so as to be sandwiched between the step portion 62f and a push plate 84e described later.

[0068] The knock member 84 is a member provided so as to be movable forward and backward in response to the opening and closing of the lid body 3. The knock member 84 is made of, for example, the above-mentioned resin material. The knock member 84 is attached to the elastic member 83 so as to be pressed toward the shaft 62a in the forward and backward directions by the lid body 3 in a state in which the lid body 3 closes the opening 2a. The knock member 84 includes a cylindrical portion 84a, a flange portion 84b, a side wall portion 84c, a locking piece 84d, and a pressing plate 84e.

[0069] The cylindrical portion 84a is a cylindrical portion with both ends in the front-rear direction being open. The cylindrical portion 84a has, for example, a cylindrical shape. The cylindrical portion 84a is arranged so as to surround the end portion 62d. The flange portion 84b is an annular portion provided on the outer peripheral surface of the front end portion of the cylindrical portion 84a. When the cover body 3 closes the opening 2a, the flange portion 84b abuts against the back surface 31b of the cover body 3 and is pressed backward by the back surface 31b. The side wall portion 84c is a cylindrical portion provided along the outer peripheral edge of the flange portion 84b. The side wall portion 84c extends backward from the flange portion 84b. The locking piece 84d is an annular portion provided along the rear end edge of the side wall portion 84c. The locking piece 84d extends from the rear end edge of the side wall portion 84c toward the outer peripheral surface of the cylindrical portion 84a.

[0070] The push plate 84e is a member for compressing the elastic member 83. The push plate 84e is an annular plate. The outer diameter of the push plate 84e is substantially the same as the inner diameter of the cylindrical portion 84a. The inner diameter of the push plate 84e is the same as or slightly larger than the outer diameter of the end portion 62d. The push plate 84e is provided near the center in the front-rear direction of the cylindrical portion 84a. The outer peripheral edge of the push plate 84e is fixed to the inner peripheral surface of the cylindrical portion 84a. The elastic member 83 is compressed by the push plate 84e moving toward the step portion 62f.

[0071] The retaining ring 85 is a member that restricts the forward movement of the knock member 84. In this embodiment, the retaining ring 85 is fitted into the groove 62e. The retaining ring 85 is provided in front of the pressing plate 84e. The pressing plate 84e comes into contact with the retaining ring 85, thereby restricting the forward movement of the knock member 84.

[0072] The pressing portion 82 is a portion for pressing the end surface Pa of the panel P backward. The pressing portion 82 is made of an elastic member such as a bellows structure. The pressing portion 82 has a cylindrical shape with both ends open in the front-rear direction and a shape that is narrowed near the center in the front-rear direction. The pressing portion 82 has ends 82a and 82b, which are both ends in the front-rear direction. The ends 82a and 82b have an annular flange shape. The end 82a is fitted into an annular groove defined by the flange portion 84b, the side wall portion 84c, and the locking piece 84d. As a result, the pressing portion 82 is fixed to the knock member 84 so as to surround the outer circumferential surface of the cylindrical portion 84a, and the end 82b faces the end surface Pa in the front-rear direction.

[0073] The end 82a of the pressing portion 82 is fitted into the annular groove defined by the flange portion 84b, the side wall portion 84c, and the locking piece 84d, thereby fixing the pressing portion 82 to the knock member 84. Then, the end 62d around which the elastic member 83 is wound is inserted into the internal space of the cylindrical portion 84a and passes through the pressing plate 84e. As a result, the elastic member 83 is sandwiched between the pressing plate 84e and the step portion 62f. In this state, the retaining ring 85 is fitted into the groove 62e of the end 62d. In this manner, the retainer 63A is attached to the end 62d.

[0074] The operation of the retainer 63A will be described with reference to Fig. 12(a) and Fig. 12(b). Fig. 12(a) is a cross-sectional view showing the positional relationship between the retainer and the panel when the opening is open. Fig. 12(b) is a cross-sectional view showing the positional relationship between the retainer and the panel when the lid body closes the opening.

[0075] 12(a), when the opening 2a is open, the end 82b of the pressing portion 82 is separated from the end face Pa. At this time, the flange portion 84b of the knock member 84 is located forward of the position in the front-rear direction of the back surface 31b when the lid body 3 closes the opening 2a. Since no load is applied to the elastic member 83, no elastic force is generated in the elastic member 83. This state of the retainer 63A is referred to as the initial state.

[0076] As shown in FIG. 12(b), when the lid 3 closes the opening 2a, the back surface 31b of the lid 3 comes into contact with the flange portion 84b of the knock member 84, and the knock member 84 is pushed backward by the lid 3. At this time, the elastic member 83 is compressed by the pressing plate 84e of the knock member 84, and the pressing portion 82 moves backward together with the knock member 84. As a result, the end portion 82b comes into contact with the end face Pa, and while the pressing portion 82 is compressed, the end portion 82b presses the end face Pa backward. Since the rear end face of the panel P comes into contact with the stopper 64, the panel P is clamped between the retainer 63A and the stopper 64 in the front-rear direction. As a result, the movement of the panel P in the front-rear direction is restricted. The amount of deformation of the knock member 84 in the front-rear direction is, for example, 5 mm or less.

[0077] At this time, the pressing portion 82 and the elastic member 83 are compressed, so that an elastic force is generated in each of the pressing portion 82 and the elastic member 83. Therefore, when the lid body 3 is removed from the container body 2A and the opening 2a is opened, the elastic member 83 presses the pressing plate 84e forward, and the pressing plate 84e moves forward until it abuts against the retaining ring 85. This returns the retainer 63A to its initial state. As a result, the panel P becomes movable in the front-rear direction, and the panel P becomes ready to be carried out.

[0078] Two retainers 63A are provided for one panel P. That is, a force twice the sum of the elastic force of the pressing portion 82 and the elastic force of the elastic member 83 is applied to one panel P. As described above, the maximum value of the force for fastening the cover 3 is regulated to 192N in the SEMI standard. In order to satisfy this regulation, the retainer 63A is designed so that the sum of the holding force for holding the panel P per one retainer 63A (the elastic force of the pressing portion 82) and the elastic force of the elastic member 83 is 192N / (M×2) or less. Furthermore, the pressing portion 82 and the elastic member 83 may be designed so that the elastic force of the pressing portion 82 is equal to or greater than the elastic force of the elastic member 83 in order to hold the panel P.

[0079] In the panel storage container 1A, the same effects as those of the panel storage container 1 can be achieved with respect to the configuration common to the panel storage container 1. Furthermore, in the panel storage container 1A, when the lid body 3 closes the opening 2a, the lid body 3 presses the knock member 84 in the front-rear direction toward the shaft 62a. As a result, the elastic member 83 is compressed, and the pressing portion 82 fixed to the knock member 84 moves toward the end face Pa and presses the end face Pa. On the other hand, when the opening 2a is opened, if the force applied to the knock member 84 is released, the pressing portion 82 moves in a direction away from the end face Pa due to the elastic force of the elastic member 83. As a result, the pressing force against the end face Pa is released. Therefore, when the lid body 3 closes the opening 2a of the container body 2A, the movement of the panel P in the front-rear direction is restricted, and when the opening 2a is open, the panel P can be carried out from the container body 2A.

[0080] Since the pressing portion 82 is made of an elastic material, it is possible to prevent an excessive pressing force from being applied to the end surface Pa. This makes it possible to reduce the possibility of the panel P being damaged.

[0081] The retainer 63A may be provided only on the end portion 62d of the shaft 62a.

[0082] Third embodiment A panel storage container according to the third embodiment will be described with reference to Fig. 13 to Fig. 16. Fig. 13 is an exploded perspective view of the panel storage container according to the third embodiment. Fig. 14 is a cross-sectional view taken along line XIV-XIV in Fig. 13. Fig. 15 is an enlarged view of a portion of Fig. 14. Fig. 16 is a cross-sectional view showing the positional relationship between a retainer and a panel when the lid is closing the opening.

[0083] 13 to 15, the panel storage container 1B differs from the panel storage container 1 mainly in that it includes a container body 2B instead of the container body 2. The container body 2B differs from the container body 2 mainly in that it includes a panel support part 60B instead of the panel support part 60, and further includes a pair of retainers 90. The panel support part 60B differs from the panel support part 60 mainly in that it includes a plurality of stoppers 66 instead of the plurality of retainers 63. Note that the lid body 3 is not shown in FIG. 13.

[0084] The stopper 66 is a member for preventing the panel P from popping out and for determining the position of the front end of the panel P. The stopper 66 is made of, for example, the above-mentioned resin material. The stopper 66 is provided at the end 62d of the shaft 62a. For example, the end 62d of the shaft 62a is fitted into a mounting hole provided in the stopper 66, thereby attaching the stopper 66 to the shaft 62a. The stopper 66 has a disk-shaped locking piece 66a having an outer diameter larger than the outer diameter of the elastic body 62b. The locking piece 66a has an inclined surface that slopes backward from the outer circumferential surface toward the center.

[0085] The pair of retainers 90 are members that restrict movement in the front-rear direction (movement toward the lid 3) of the multiple panels P stored in the container body 2B when the lid 3 is closing the opening 2a. The pair of retainers 90 are respectively provided on a pair of side frame portions of the flange 25. Each retainer 90 includes an attachment portion 91, a pressing portion 92, and a support portion 93.

[0086] The mounting portion 91 is a portion for mounting the retainer 90 to the flange 25. The mounting portion 91 is made of a metal material such as aluminum or stainless steel. The mounting portion 91 is a plate material extending in the vertical direction. The mounting portion 91 includes a fixed plate 91a, an inclined plate 91b, and a connecting plate 91c.

[0087] The fixed plate 91a extends in the vertical direction along the inner surface of the side frame portion of the flange 25. Screws are inserted into insertion holes provided in the fixed plate 91a and screwed into screw holes provided in the inner surface of the side frame portion of the flange 25. This fixes the mounting portion 91 (retainer 90) to the flange 25. The inclined plate 91b extends in the vertical direction and is inclined toward the center in the left-right direction of the container body 2B as it extends rearward. The connecting plate 91c connects the fixed plate 91a and the inclined plate 91b.

[0088] The pressing portion 92 is a portion for pressing the end surface Pa of the panel P backward. The pressing portion 92 includes an arm member 94 and a pressing member 95. The arm member 94 is a member that rotates together with the pressing member 95. The arm member 94 is made of a metal material such as aluminum or stainless steel. The arm member 94 extends in the up-down direction over the entirety of the multiple panels P stored in the container body 2B. The arm member 94 has an L-shape when viewed in the up-down direction. A base end of the arm member 94 is fixed to a blade plate 96b described below, and a tip end of the arm member 94 is bent toward the center in the left-right direction of the container body 2B.

[0089] The pressing member 95 is a member that presses the end face Pa backward. The pressing member 95 is made of, for example, the above-mentioned resin material. The pressing member 95 extends in the up-down direction over the entirety of the multiple panels P stored in the container body 2B. The pressing member 95 is provided at the tip of the arm member 94. The pressing member 95 has a pressing surface 95a and an inclined surface 95b. The pressing surface 95a is a surface that comes into contact with the end face Pa when the pressing member 95 presses the end face Pa backward. The inclined surface 95b is a surface that forms an acute angle with the pressing surface 95a.

[0090] The support portion 93 is a portion that supports the pressing portion 92 so that it can advance and retreat in the front-rear direction in response to opening and closing of the lid body 3. The support portion 93 causes the pressing portion 92 to press the end face Pa when the lid body 3 is in a state where the opening 2a is closed, and releases the pressing of the pressing portion 92 against the end face Pa when the opening 2a is open. Specifically, the support portion 93 includes a hinge portion 96. In this embodiment, the support portion 93 includes two hinge portions 96. The two hinge portions 96 are provided spaced apart in the up-down direction.

[0091] Each hinge portion 96 is a portion that attaches the pressing portion 92 to the flange 25 so as to be rotatable around a support shaft 96a. The hinge portion 96 includes a support shaft 96a, a pair of blades 96b, and an elastic member 96c. The support shaft 96a extends in the vertical direction. Each blade 96b is connected so as to be rotatable around the support shaft 96a. The elastic member 96c biases the pair of blades 96b so that the hinge portion 96 is in an open state. The open state is a state in which the pair of blades 96b extend in opposite directions relative to the support shaft 96a. One blade 96b is fixed to the inclined plate 91b, and the other blade 96b is fixed to the arm member 94.

[0092] Further referring to FIG. 16, the operation of the retainer 90 will be described. FIG. 16 is a cross-sectional view showing the positional relationship between the retainer and the panel when the lid body is closing the opening. As shown in FIG. 15, when the opening 2a is open, the pressing surface 95a of the pressing member 95 is separated from the end surface Pa. At this time, the pressing member 95 is located forward of the position of the back surface 31b in the front-rear direction when the lid body 3 is closing the opening 2a. Of the pressing members 95, the tip of the pressing member 95 is located at the frontmost position, and is located inside the container body 2B in the left-right direction relative to the support shaft 96a. Since no load is applied to the pressing member 95, no elastic force is generated in the pressing member 95. This state of the retainer 90 is called the initial state.

[0093] As shown in FIG. 16, when the lid 3 closes the opening 2a, the rear surface 31b of the lid 3 abuts against the tip of the pressing member 95, and the pressing member 95 is pushed backward by the lid 3. At this time, since the tip of the pressing member 95 is located inside the container body 2B in the left-right direction from the support shaft 96a, the pressing member 95 (pressing portion 92) rotates toward the inside in the left-right direction of the container body 2B, with the support shaft 96a as a fulcrum. As the pressing member 95 rotates, the elastic member 96c is compressed by the pair of blades 96b. As a result, the pressing surface 95a abuts against the end face Pa and presses the end face Pa backward. Since the rear end face of the panel P abuts against the stopper 64, the panel P is clamped between the retainer 90 and the stopper 64 in the front-rear direction. As a result, the movement of the panel P in the front-rear direction is restricted.

[0094] As the pressing member 95 rotates, the portion of the pressing member 95 that contacts the back surface 31b moves along the inclined surface 95b toward the base end of the pressing member 95. During this time, the portion of the pressing member 95 that contacts the back surface 31b remains inside the container body 2B relative to the support shaft 96a in the left-right direction, so the rotation direction of the pressing member 95 is maintained.

[0095] When the lid 3 closes the opening 2a, the elastic member 96c is compressed, and an elastic force is generated in the elastic member 96c. Therefore, when the lid 3 is removed from the container body 2B and the opening 2a is opened, the elastic member 96c rotates the pressing member 95 in the opposite direction until the hinge portion 96 is in the open state. This returns the retainer 90 to its initial state. As a result, the panel P becomes movable in the front-rear direction, and the panel P becomes ready to be carried out.

[0096] In the panel storage container 1B, the configuration common to the panel storage container 1 provides the same effects as the panel storage container 1. Furthermore, in the panel storage container 1B, the retainer 90 is provided on the flange 25. Therefore, there is no need to provide a retainer on the lid 3, and the thickness of the lid 3 can be set within the thickness stipulated in the SEMI standard.

[0097] In the panel storage container 1B, when the lid body 3 closes the opening 2a, the pressing portion 92 (pressing member 95) rotates about the spindle 96a as a fulcrum and presses the end face Pa backward (the storage space 20). On the other hand, when the opening 2a is opened, the pressing portion 92 (pressing member 95) rotates about the spindle 96a as a fulcrum and the pressing of the end face Pa by the pressing portion 92 is released. Therefore, when the lid body 3 closes the opening 2a, the movement of the panel P in the front-rear direction is restricted, and when the opening 2a is open, the panel P can be carried out from the container body 2B.

[0098] The container body 2B may include only one of the retainers 90. The pressing member 95 may have a configuration for pressing the end faces Pa of one or several panels P, instead of a configuration for pressing the end faces Pa of all the panels P stored in the container body 2B.

[0099] The panel storage container according to the present disclosure is not limited to the above embodiment.

[0100] The method of connecting each member of the container bodies 2, 2A, and 2B may be different from that in the above embodiment. In the above embodiment, the container bodies 2, 2A, and 2B are formed by combining multiple parts, but they may be integrally molded products. [Explanation of symbols]

[0101] Reference Signs List 1, 1A, 1B...panel storage container, 2, 2A, 2B...container body, 2a...opening, 3...lid body, 20...accommodation space, 25...flange, 62a...shaft, 62d...end, 63, 63A...retainer, 64...stopper, 71...mounting portion, 72...support portion, 73...pressing portion, 75...arm member (first arm member, second arm member), 76...pressing member (first pressing member, second pressing member), 81...support portion, 82...pressing portion, 83...elastic member, 84...knock member, 90...retainer, 91...mounting portion, 92...pressing portion, 93...support portion, 96...hinge portion, 96a...support shaft, P...panel, Pa...end surface.

Claims

1. a container body having an opening and defining a storage space for storing the panel; A cover for closing the opening; Equipped with the lid body faces an end surface of the panel housed in the container body in a first direction when the lid body closes the opening, the container body includes a retainer that restricts movement of the panel in the first direction when the lid body closes the opening, The retainer includes: a pressing portion for pressing the end surface toward the accommodation space; a support portion that supports the pressing portion so as to be capable of moving forward and backward in the first direction in response to opening and closing of the lid body; Equipped with The support portion presses the pressing portion against the end face when the lid body is closing the opening, and releases the pressing portion from pressing against the end face when the opening is open.

2. The container body further includes a shaft extending in the first direction for supporting the panel, the shaft has an end portion facing the lid body in the first direction when the lid body closes the opening, The panel housing of claim 1 , wherein the retainer is provided at the end portion.

3. The retainer further includes an attachment portion for attaching the retainer to the end portion, the support portion includes a first arm member having flexibility, the first arm member extending from the attachment portion in a second direction intersecting the first direction, and curved convexly toward the lid body so as to be pressed toward the storage space by the lid body in a state in which the lid body closes the opening, The panel storage container according to claim 2 , wherein the pressing portion includes a first pressing member provided at a tip of the first arm member.

4. the support portion further includes a flexible second arm member that extends from the attachment portion to an opposite side to the first arm member and is curved convexly toward the lid body so as to be pressed toward the storage space by the lid body when the lid body closes the opening, The panel storage container according to claim 3 , wherein the pressing portion includes a second pressing member provided at a tip of the second arm member.

5. The support portion is an elastic member provided at the end portion and capable of expanding and contracting in the first direction; a knock member attached to the elastic member so as to be pressed by the lid body toward the shaft in the first direction in a state in which the lid body closes the opening; Including, The panel storage container according to claim 2 , wherein the pressing portion is fixed to the knock member.

6. The container body further includes a flange defining the opening; The panel housing of claim 1 , wherein the retainer is provided on the flange.

7. the support portion includes a hinge portion that rotatably attaches the pressing portion to the flange about a support shaft that extends in a second direction intersecting with the first direction, 7. The panel storage container according to claim 6, wherein when the cover closes the opening, the hinge portion rotates the pressing portion about the support shaft as a fulcrum to press the pressing portion against the end face, and when the opening is opened, the hinge portion rotates the pressing portion about the support shaft as a fulcrum to release the pressure of the pressing portion.

Images